CN209212517U - Fluid control device - Google Patents

Abstract

A kind of fluid control device, include: piezoelectric actuator and deformable pedestal, piezoelectric actuator are made of the surface that piezoelectric element is attached at oscillating plate, and piezoelectric element is by applying voltage and deformation to drive oscillating plate bending vibration, oscillating plate has protruding portion, attaches another surface of piezoelectric element；And deformable base construction, it is made of flex plate and the mutual storehouse engagement of flow plate, and can synchronize and be deformed into synchronous distressed structure；Wherein, the engagement positioning corresponding with the oscillating plate of piezoelectric actuator of deformable base construction, and deformable base construction is deformed towards close to the direction of oscillating plate is prominent, makes to define a certain depth between flex plate and the protruding portion of oscillating plate, and flex plate has movable part, is arranged relative to protruding portion.

Description

Fluid control device

Technical field

The utility model is about a kind of fluid control device, espespecially a kind of fluid control device with deformable pedestal.

Background technique

The either industry such as medicine, computer technology, printing and energy in each field at present, product towards sophistication and Microminiaturization direction is developed, the fluid conveying knot that wherein products such as micropump, sprayer, ink gun and industrial printing devices are included Structure is its key technology, therefore, how by innovation structure its technical bottleneck is broken through, for the important content of development.

It please refers to shown in Figure 1A and Figure 1B, Figure 1A is the partial structure diagram of known fluid control device, and Figure 1B is to practise Know the part-structure assembling deviation schematic diagram of fluid control device.As shown, known fluid control device 100 makees kinetonucleus The heart mainly includes substrate 101 and piezoelectric actuator 102, and substrate 101 and piezoelectric actuator 102 are storehouse settings, and substrate 101 with Piezoelectric actuator 102 has a gap 103, wherein the gap 103 need to keep certain depth, remain certain by this gap 103 Depth then can drive fluid in fluid control device 100 when piezoelectric actuator 102 is activated by application voltage generates deformation Each chamber indoor moveable, use achieve the purpose that fluid transmit.However, in this known fluid control device 100, wherein pressing Electric actuator 102 and substrate 101 are flat overall structure, and have certain rigidity, with this condition, make this two A entirety is that flat structure precisely aligns each other, to cause to generate between two plate with certain gap 103, that is, is tieed up Certain depth is held, there can be certain degree of difficulty, is easy to generate error, because the entirety of the certain rigidity of any of the above-described tool is flat Plate tilts an angle, θ if any any side, then can generate the shift value that opposite distance is multiplied by the angle, θ in opposite position, Such as ㄧ is displaced d, and increases d ' (as shown in Figure 1B) at the graticule in the gap 103 for causing this certain, or vice versa reduction d ' (do not scheme Show)；Especially when fluid control device is towards the development of microminiaturization, the size of each component is designed towards microminiaturization and is carried out, makes Be intended between two plate maintain without increasing or decreasing d ', and then to keep the certain of gap 103 with certain gap 103 Depth, degree of difficulty is higher and higher, and if cannot keep the certain depth in gap 103, such as gap 103 is to increase an above-mentioned d ' When the error of displacement, the distance that will lead to the gap 103 is excessive, so that fluid efficiency of transmission is bad；Conversely, if gap is In opposite direction so that reducing an above-mentioned d ' displacement (not shown), then make the distance in gap 103 too small, and then piezoelectric actuated The contact interference of 102 actuation Shi Yiyu other assemblies of device, and leads to the problem of noise, and cause the fraction defective of fluid control device with Promotion.

In other words, since the piezoelectric actuator 102 of known fluid control device 100 and substrate 101 are to have centainly The flat overall structure of rigidity, is intended between the two plate with whole alignment mode, achievees the purpose that precisely to align and shows as difficulty, especially It more becomes small in size of components, and when assembling is more difficult exactitude position, and then keeps the efficiency of fluid conveying low and generate noise Problem causes using upper not convenient and uncomfortable.

Therefore, above-mentioned known techniques missing can be improved by how developing one kind, can make the instrument of conventionally employed fluid conveying device Device or equipment reach small in size, micromation and mute, and overcome the problems, such as to be also easy to produce error when assembling, and then reach light comfortable Portable purpose minisize fluid transmitting device, actually problem in the urgent need to address at present.

Utility model content

The main purpose of the utility model is that solving in known fluid control device, substrate and piezoelectric actuator are because of group The design of part microminiaturization is not easy to be precisely located and generate error when assembling, it is made to be difficult to maintain its gap after assembling Demand distance, and then cause the efficiency of fluid conveying low and lead to the problem of noise causes using upper not convenient and do not relax Suitable problem.

In order to achieve the above object, a broader implementation pattern of the utility model is to provide a kind of fluid control device, include: One piezoelectric actuator is made of the surface that a piezoelectric element is attached at an oscillating plate, the piezoelectric element by apply voltage and Deformation is to drive the oscillating plate bending vibration, which has a protruding portion, and it is to be relatively arranged on to attach the piezoelectricity group Another surface on the surface of part；And a deformable base construction, institute is engaged for a flex plate and the mutual storehouse of a flow plate It constitutes, and can synchronize and be deformed into a synchronous distressed structure；Wherein, vibration of the deformable base construction and the piezoelectric actuator The corresponding engagement positioning of plate, and deformable base construction is deformed towards close to the direction of oscillating plate is prominent, so that the deformable pedestal It is movable with one that a certain depth and the flex plate are defined between the flex plate of structure and the protruding portion of the oscillating plate Portion is the protruding portion relative to the oscillating plate and is arranged.

Detailed description of the invention

Figure 1A is the partial structure diagram of known fluid control device.

Figure 1B is the part-structure assembling deviation schematic diagram of known fluid control device.

Fig. 2A is the positive decomposition texture schematic diagram of the fluid control device of the utility model preferred embodiment.

Fig. 2 B is the positive combination structural schematic diagram of fluid control device shown in Fig. 2A.

Fig. 3 is the back side decomposition texture schematic diagram of fluid control device shown in Fig. 2A.

Fig. 4 A is the amplification profile structural schematic diagram of fluid control device shown in Fig. 2A.

Fig. 4 B to Fig. 4 C is the local illustrative view of fluid control device shown in Fig. 2A.

Fig. 5 A is the of the synchronous deformation of the deformable base construction of the fluid control device of the utility model preferred embodiment One state sample implementation schematic diagram.

Fig. 5 B is the of the synchronous deformation of the deformable base construction of the fluid control device of the utility model preferred embodiment Two state sample implementation schematic diagrames.

Fig. 5 C is the of the synchronous deformation of the deformable base construction of the fluid control device of the utility model preferred embodiment Three state sample implementation schematic diagrames.

Fig. 5 D is the of the synchronous deformation of the deformable base construction of the fluid control device of the utility model preferred embodiment Four state sample implementation schematic diagrames.

Fig. 6 A is the of the synchronous deformation of the deformable base construction of the fluid control device of the utility model preferred embodiment Five state sample implementation schematic diagrames.

Fig. 6 B is the of the synchronous deformation of the deformable base construction of the fluid control device of the utility model preferred embodiment Six state sample implementation schematic diagrames.

Fig. 6 C is the of the synchronous deformation of the deformable base construction of the fluid control device of the utility model preferred embodiment Seven state sample implementation schematic diagrames.

Fig. 6 D is the of the synchronous deformation of the deformable base construction of the fluid control device of the utility model preferred embodiment Eight state sample implementation schematic diagrames.

Fig. 7 A is the of the synchronous deformation of the deformable base construction of the fluid control device of the utility model preferred embodiment Nine state sample implementation schematic diagrames.

Fig. 7 B is the of the synchronous deformation of the deformable base construction of the fluid control device of the utility model preferred embodiment Ten state sample implementation schematic diagrames.

Fig. 7 C is the of the synchronous deformation of the deformable base construction of the fluid control device of the utility model preferred embodiment 11 state sample implementation schematic diagrames.

Fig. 7 D is the of the synchronous deformation of the deformable base construction of the fluid control device of the utility model preferred embodiment 12 state sample implementation schematic diagrames.

Fig. 8 is the ten of the synchronous deformation of deformable base construction of the fluid control device of the utility model preferred embodiment Three state sample implementation schematic diagrames.

[symbol description]

100: known fluid control device

101: substrate

102: piezoelectric actuator

103: gap

2: fluid control device

20: deformable base construction

21: flow plate

21a: outer surface

21b: interior surface

210: access aperture

211: confluence through slot

212: confluence opening portion

22: flex plate

22a: movable part

22b: fixed part

23: piezoelectric actuator

230: oscillating plate

230a: second surface

230b: first surface

230c: protruding portion

231: outline border

232: bracket

233: piezoelectric element

235: gap

241,242: insulating trip

25: conductive sheet

26: shell

26a: accommodating space

268: side wall

δ: certain depth

H: spacing

A: temporary chamber

θ: angle

D, d ': displacement

Specific embodiment

The some exemplary embodiments for embodying the utility model features and advantages will describe in detail in the explanation of back segment.Ying Li Solution is that the utility model can have various variations in different aspects, does not all depart from the scope of the utility model, And explanation therein and attached drawing are inherently the use being illustrated as, and nand architecture is in limitation the utility model.

The fluid control device 2 of the utility model can be applied to the works such as the raw skill of medicine, the energy, computer technology or printing Industry, with to transmit fluid, but not limited to this.Please refer to Fig. 2A, Fig. 2 B, shown in Fig. 3 and Fig. 4 A, Fig. 2A is the utility model For the positive decomposition texture schematic diagram of the fluid control device of preferred embodiment, Fig. 2 B is fluid control device shown in Fig. 2A Positive combination structural schematic diagram, Fig. 3 are the back side decomposition texture schematic diagram of fluid control device shown in Fig. 2A, and Fig. 4 A is Fig. 2A Shown in fluid control device amplification profile structural schematic diagram.As shown in Fig. 2A and Fig. 3, the fluid of the utility model controls dress Setting 2 has the structures such as deformable base construction 20, piezoelectric actuator 23, insulating trip 241,242, conductive sheet 25 and shell 26, In, deformable base construction 20 includes then flow plate 21 and flex plate 22, and but not limited to this.Piezoelectric actuator 23 corresponds to Flex plate 22 and be arranged, which assembled by an oscillating plate 230 and a piezoelectric element 233, Yu Benshi It applies in example, the structures such as deformable base construction 20, piezoelectric actuator 23, insulating trip 241, conductive sheet 25, another insulating trip 242 are Mutual storehouse setting, and hold and close within shell 26.

Please continue to refer to shown in Fig. 2A, Fig. 2 B, Fig. 3 and Fig. 4 A, the flow plate 21 of the fluid control device 2 of the utility model It is the outer surface 21a with interior surface 21b and corresponding setting, as shown in Figure 3, it is seen that have on the 21a of portion surface outside An at least access aperture 210, in the utility model preferred embodiment, the quantity of access aperture 210 is 4, and but not limited to this, It is through the outer surface 21a and first surface 21b of flow plate 21, mainly complies with atmospheric pressure from outside device with for fluid Effect and from the 210 incoming fluid control device 2 of an at least access aperture.And again as shown in Figure 2 A, by the inside of flow plate 21 Surface 21b as it can be seen that thereon have at least one confluence through slot 211, to the outer surface 21a with flow plate 21 this at least one into Enter hole 210 to be correspondingly arranged.It is with confluence opening portion 212, and confluence opening portion at the center exchange of grade confluence through slot 211 212 are connected with confluence through slot 211, whereby can guide the fluid for entering confluence through slot 211 from an at least access aperture 210 And converge and be concentrated to confluence opening portion 212, to be transmitted.Therefore in the utility model preferred embodiment, flow plate 21 has There are integrally formed access aperture 210, confluence through slot 211 and confluence opening portion 212, and is corresponded at the confluence opening portion 212 The confluence chamber of a confluence fluid is formed, so that fluid is temporary.In some embodiments, the material of flow plate 21 is can be but not It is limited to be made of a stainless steel material.Flex plate 22 is made of a flexible materials, and but not limited to this, and in flexibility There is a stream hole 220 on plate 22, correspond to the confluence opening portion 212 of the interior surface 21b of flow plate 21 and be arranged, so that Fluid can circulate downwards.In other embodiments, flex plate 22 is can be made of a copper material, and but not limited to this, scratches Property plate 22 there is an a movable part 22a and fixed part 22b, the setting of such flex plate 22 is connected on flow plate 21, solid to use Determine portion 22b to be fixedly connected on flow plate 21, and movable part 22a is the part at the corresponding place in confluence opening portion 212, and flow path Hole 220 is arranged on movable part 22a.

Please continue to refer to shown in Fig. 2A, Fig. 2 B and Fig. 3, in the utility model preferred embodiment, piezoelectric actuator 23 is packet Piezoelectric element 233, oscillating plate 230, outline border 231 and an at least bracket 232 are included, in the utility model preferred embodiment, vibration Movable plate 230 is flexible square plate structure, and has first surface 230b and corresponding second surface 230a, piezoelectricity group Part 233 be can square platy structure, and its side length is not more than the side length of oscillating plate 230, and can be attached at the first of oscillating plate 230 On the 230b of surface, but not limited to this, generates deformation after the piezoelectric element 233 application voltage and the oscillating plate 230 is driven to be bent Vibration.In the utility model preferred embodiment, the second surface 230a of oscillating plate 230 can also have a protruding portion 230c, should Protruding portion 230c can be but not be limited to a circular protrusions structure；In the outside of oscillating plate 230 then around setting outline border 231, outline border 231 kenel also corresponds roughly to the kenel of oscillating plate 230, therefore the hollow out frame-type structure that outline border 231 can be also square；And it shakes It is to be connected with an at least bracket 232, and resilient support is provided between movable plate 230 and outline border 231.As shown in Figure 2 A and 2 B, shell Body 26 has an at least tap 261, and shell 26 is not only single plate structure, can also have the frame of side wall 260 for periphery Body structure, and the plate common definition of the side wall 260 being made of the periphery and its bottom goes out an accommodating space 26a, with for The piezoelectric actuator 23 is set in accommodating space 26a, therefore after the fluid control device of the utility model 2 is completed, Then its front schematic view can be as shown in Fig. 2 B and Fig. 4 A, i.e., shell 26 is the cover in piezoelectric actuator 23 and deformable base construction Except 20, and make to constitute the temporary chamber A of fluid circulation between shell 26 and piezoelectric actuator 23, and tap 261 to It is connected to temporary chamber A, circulates in fluid except shell 26.

Fig. 4 A to Fig. 4 C is please referred to, Fig. 4 A is the schematic diagram of the section structure of fluid control device shown in Fig. 2A, and Fig. 4 B is extremely Fig. 4 C is the local illustrative view of fluid control device shown in Fig. 2A.In this present embodiment, so in Fig. 4 A to Fig. 4 C, absolutely Embolium 241, conductive sheet 25 and another insulating trip 242 slightly show, and shown deformable base in this Fig. 4 A to Fig. 4 C Holder structure 20 is that it not yet generates the kenel before synchronous deformation, these icons are the deformable pedestals to illustrate the utility model The structure of the flow plate 21 and flex plate 22 of structure 20 and piezoelectric actuator 23 is correspondingly arranged position and actuation relationship etc., closes It first chats bright.

As shown in Figure 4 A, after the assembling corresponding with piezoelectric actuator 23 of flow plate 21, flex plate 22, then in flex plate 22 Can be collectively formed the chamber of a confluence fluid at stream hole 220 with the confluence opening portion 212 of flow plate 21, and flex plate 22 with It is with spacing h between the outline border 231 of piezoelectric actuator 23, is a fillable medium in some embodiments, in spacing h, Such as: conducting resinl, but not limited to this, is engaged and is positioned by medium, so that the oscillating plate of flex plate 22 and piezoelectric actuator 23 Maintainable certain distance between 230 protruding portion 230c, such as spacing h can also make flex plate 22 and piezoelectric actuator 23 A certain depth δ is formed between the protruding portion 230c of oscillating plate 230, and further in the oscillating plate 230 of the piezoelectric actuator 23 , can be by the fluid compression (imply that and certain depth δ becomes smaller) when vibration, and increase the pressure of fluid and flow velocity；In addition, should Certain depth δ is a suitable distance, interferes to make to reduce the contact between flex plate 22 and piezoelectric actuator 23, is produced with reducing The problem of raw noise；And certain depth δ between the protruding portion 230c of the oscillating plate 230 of flex plate 22 and piezoelectric actuator 23 The chamber constituted is by the stream hole 220 of flex plate 22 and the fluid that converges at the confluence opening portion 212 of flow plate 21 Chamber is connected.

When 2 actuation of fluid control device, vertical direction mainly is carried out by voltage actuation is applied by piezoelectric actuator 23 Reciprocating vibration.As shown in Figure 4 B, when piezoelectric actuator 23 is vibrated upwards by application voltage actuation, due to flex plate 22 For light, thin laminated structure, therefore when piezoelectric actuator 23 vibrates, flex plate 22 also can carry out vertical direction therewith resonating Reciprocating vibration, as the part of the movable part 22a of flex plate 22 also can bending vibration deformation therewith, and the stream hole 220 It is set to the center of flex plate 22 or at center, therefore when piezoelectric actuator 23 vibrates upwards, at this time flex plate 22 Movable part 22a can be vibrated upwards by piezoelectric actuator 23 drive due to fluid is up brought into and is pushed and with upward vibration Dynamic, then fluid is entered by at least access aperture 210 on flow plate 21, and by least one confluence through slot 211 to be pooled in At the confluence opening portion 212 of centre, then via on flex plate 22 with the confluence stream hole 220 that is correspondingly arranged of opening portion 212 to upstream Enter the chamber that the certain depth δ between the protruding portion 230c of the oscillating plate 230 to flex plate 22 and piezoelectric actuator 23 is constituted In, by the deformation of this flex plate 22, with compress flex plate 22 and piezoelectric actuator 23 oscillating plate 230 protruding portion 230c it Between the volume of chamber that is constituted of certain depth δ, and reinforce this compressed kinetic energy in chamber middle flow space, promote in it Fluid is pushed to be flowed to two sides, and then passes through flowing upwards by the gap between oscillating plate 230 and bracket 232.

As for shown in Fig. 4 C, when piezoelectric actuator 23 vibrates downwards, then the movable part 22a of flex plate 22 also resonates therewith It is bent downwardly vibration deformation, fluid is pooled at the confluence opening portion 212 in center and tails off, and the also vibration downwards of piezoelectric actuator 23 It is dynamic, and it is moved to the constituted cavity bottom of certain depth δ between flex plate 22 and piezoelectric actuator 23 and to increase chamber compressible Volume, so repeat and implement actuation shown in Fig. 4 B, the oscillating plate 230 of flex plate 22 Yu piezoelectric actuator 23 can be increased Protruding portion 230c between the compressed space in chamber middle flow space that is constituted certain depth δ, to reach biggish stream Body soakage and discharge rate.

In the preferred embodiment of the utility model, as previously mentioned, deformable base construction 20 is by flow plate 21 and to scratch Property plate 22 formed, wherein flow plate 21 and flex plate 22 are mutual storehouse, and flow plate 21 is synchronous with the two of flex plate 22 Deformation is to constitute a synchronous distressed structure.Furthermore, synchronous distressed structure above-mentioned refers to by flow plate 21 and flexibility The synchronization deformed region of plate 22 is constituted, and when any one of them is deformed, then another one centainly deforms therewith, and the two becomes The shape of shape is that unanimously, i.e., the corresponding surface of the two is to engage and position each other, and do not have appoint between the two What gap or parallel misalignment, for example, when the flow plate 21 of deformable base construction 20 is deformed, flex plate 22 is also generated Identical deformation；In the same manner, when the flex plate 22 of deformable base construction 20 is deformed, flow plate 21 also generates identical Deformation.In some embodiments, flow plate 21 and flex plate 22 are the positioning that is interconnected by an adhesive agent, but not as Limit.In addition, because such as preceding known content is addressed shown in Figure 1B, in the fluid control device 100 of Yu Xizhi, wherein piezoelectric actuator 102 and substrate 103 are flat overall structure, and have certain rigidity, and with this condition, it is whole for making this two The flat structure of body precisely aligns each other, and makes to maintain certain gap between two plate, imply that maintenance its required one Depthkeeping degree can have comparable degree of difficulty, be easy to generate error, cause variety of problems.So various in the utility model Preferred embodiment, feature are to utilize a deformable base construction 20, the synchronization of as aforementioned flow plate 21 and flex plate 22 Deformation, to constitute synchronous distressed structure, which is equivalent to the substrate 101 of known techniques, but synchronization deformation knot The flow plate 21 and flex plate 22 of structure have a variety of different state sample implementations defined in the various embodiments in the utility model, And the various specific synchronous distressed structures can be maintained at an institute between the oscillating plate 230 of opposite piezoelectric actuator 23 Within the specific gap (i.e. the chamber that certain depth δ is constituted) of demand, therefore even if work as fluid control device 2 towards microminiaturization Development, the size of each component are designed towards microminiaturization and are carried out, by the synchronization distressed structure remain to make easily this above-mentioned two It is intended to maintain between person with certain gap to be readily, to become because aligning the synchronous of the non-planar base that area has reduced using it Shape structure (no matter this is deformed into bending, cone-shaped, various curved, irregular etc. shape) and a plate align, and It is no longer the plate contraposition of two large area, but the plate of the small area of a non-planar base and a large area aligns, therefore can be easily Gap error between the two is reduced, and then is reached and is solved the problems, such as that the efficiency of fluid conveying is low and generate noise, so that solution Certainly use upper not convenient and uncomfortable known problem.

In some embodiments, deformable base construction 20 is that flow plate 21 and the synchronous deformation of flex plate 22 are same with what is constituted Walk distressed structure, i.e. the synchronization deformed region of the deformable base construction 20 be can for movable part 22a region and exceed Other regions movable part 22a, and it can be warp architecture or cone that the synchronization distressed structure that is constituted of the deformable base construction 20, which is, Type structure or convex block planar structure, but be not limited thereto.

As shown in Fig. 5 A and Fig. 5 C, in this first state sample implementation and third state sample implementation, deformable base construction 20 is The synchronous distressed structure of the bending that flow plate 21 and flex plate 11 are constituted, that is, the synchronization deformed region of deformable base construction 20 It is in the region of movable part 22a and beyond other regions movable part 22a, i.e. the synchronization distressed structure of two state sample implementation is The synchronous distressed structure of one bending, but only the bending of the two synchronizes the direction deformed difference.As shown in Figure 5A first is implemented The mode of the synchronous deformation of implementation bending connects in aspect for the outer surface 21a direction in the flow plate 21 of deformable base construction 10 The protruding portion 230c direction bending deformation of the nearly oscillating plate 230, while the region of the movable part 22a of flex plate 22 and beyond movable Other regions portion 22a are also directed to the protruding portion 230c direction bending deformation close to the oscillating plate 230, to constitute deformable pedestal knot The synchronous distressed structure of the bending of structure 20；And implement to be bent to synchronize in third state sample implementation as shown in Figure 5 C to be deformed into deformable The outer surface 21a of the flow plate 21 of base construction 10 is directed away from the protruding portion 230c direction bending deformation of the oscillating plate 230, It the region of the movable part 22a of flex plate 22 and is also directed to simultaneously beyond other regions movable part 22a prominent far from the oscillating plate 230 The direction portion 230c bending deformation out, the synchronous distressed structure of bending to constitute deformable base construction 20；Therefore the first state sample implementation And chamber between the flex plate 22 of deformable base construction 20 and the protruding portion 230c of oscillating plate 230 is constituted in third state sample implementation Room is positively retained within the scope of required certain depth δ, i.e. the region of the movable part 22a of the flex plate 22 and oscillating plate Chamber between 230 protruding portion 230c is maintained within the scope of required certain depth δ, and then constitutes this two implementation The fluid control of the flow plate 21 and the synchronous distressed structure of the composition bending of flex plate 22 with deformable base construction 20 of aspect Device 2.

As shown in Fig. 6 A and Fig. 6 C, in this 5th state sample implementation and the 7th state sample implementation, deformable base construction 20 is The synchronous distressed structure of the taper that flow plate 21 and flex plate 22 are constituted, that is, the synchronization deformed region of deformable base construction 20 It is in the region of movable part 22a and beyond other regions movable part 22a, i.e. the synchronization distressed structure of two state sample implementation is one Taper synchronizes distressed structure, but only the taper of the two synchronizes the direction deformed difference.And as shown in Figure 6A the 5th implements The mode for implementing the synchronous deformation of taper in aspect is to connect in the outer surface 21a direction of the flow plate 21 of deformable base construction 10 The direction the protruding portion 230c taper-deformation of the nearly oscillating plate 230, while the region of the movable part 22a of flex plate 22 and beyond movable Other regions portion 22a are also directed to the direction the protruding portion 230c taper-deformation close to the oscillating plate 230, to constitute deformable pedestal knot The synchronous distressed structure of the taper of structure 20；And implement taper in the 7th state sample implementation as shown in Figure 6 C and synchronize to be deformed into deformable The outer surface 21a of the flow plate 21 of base construction 10 is directed away from the direction the protruding portion 230c taper-deformation of the oscillating plate 230, It the region of the movable part 22a of flex plate 22 and is also directed to simultaneously beyond other regions movable part 22a prominent far from the oscillating plate 230 The direction portion 230c taper-deformation out, the synchronous distressed structure of taper to constitute deformable base construction 20；Therefore the 5th state sample implementation And the 7th in state sample implementation to constitute between the flex plate 22 of deformable base construction 20 and the protruding portion 230c of oscillating plate 230 Chamber is positively retained within the scope of required certain depth δ, i.e. the region of the movable part 22a of flex plate 22 and oscillating plate Chamber between 230 protruding portion 230c is maintained within the scope of required certain depth δ, and then constitutes this two implementation state The fluid of the flow plate 21 and the synchronous distressed structure of the composition taper of flex plate 22 with deformable base construction 20 of sample controls dress Set 2.

As shown in Fig. 7 A and Fig. 7 C, in this 9th state sample implementation and the 11st state sample implementation, deformable base construction 20 The convex block plane synchronization distressed structure being made of flow plate 21 and flex plate 22, that is, the synchronous of deformable base construction 20 becomes Shape region is in the region of movable part 22a and beyond other regions movable part 22a, i.e. the synchronization distressed structure of two state sample implementation It is a convex block plane synchronization distressed structure, but the direction of convex block plane synchronization deformation both only difference.And such as Fig. 7 A Shown in implement the mode of convex block plane synchronization deformation in the 9th state sample implementation be in the flow plate 21 of deformable base construction 10 Outer surface 21a in the region of movable part 22a and beyond other regions movable part 22a towards close to the prominent of the oscillating plate 230 The direction portion 230c convex block plane deformation out, at the same the region of the movable part 22a of flex plate 22 and exceed other regions movable part 22a It is also directed to the direction the protruding portion 230c convex block plane deformation close to the oscillating plate 230, to constitute the cone of deformable base construction 20 Just as step distressed structure；And implements convex block plane synchronization in the 11st state sample implementation as seen in figure 7 c and be deformed into deformable base The direction the protruding portion 230c convex block plane that the outer surface 21a of the flow plate 21 of holder structure 10 is directed away from the oscillating plate 230 becomes Shape, while the region of the movable part 22a of flex plate 22 and being also directed to beyond other regions movable part 22a far from the oscillating plate 230 The direction protruding portion 230c convex block plane deformation, to constitute the convex block plane synchronization distressed structure of deformable base construction 20；Therefore To constitute the flex plate 22 of deformable base construction 20 and dashing forward for oscillating plate 230 in 9th state sample implementation and the 11st state sample implementation The chamber between portion 230c is positively retained within the scope of required certain depth δ out, i.e. the movable part 22a's of flex plate 22 Chamber between region and the protruding portion 230c of oscillating plate 230 is maintained within the scope of required certain depth δ, and then structure Flow plate 21 and flex plate 22 at this two state sample implementation with deformable base construction 20 constitute the deformation of convex block plane synchronization The fluid control device 2 of structure.

For another example aforementioned, in other embodiments, deformable base construction 20 also can be for flow plate 21 and flex plate 22 only Synchronization distressed structure of the synchronous deformation in part to constitute, i.e. the synchronization deformed region of the deformable base construction 20 are only that flexibility The region of the movable part 22a of plate 22, and the synchronization distressed structure that this deformable base construction 20 is constituted also can be warp architecture Or tapered structure or convex block planar structure, but be also not limited.

As shown in Fig. 5 B and Fig. 5 D, in the second state sample implementation and the 4th state sample implementation, deformable base construction 20 is Flow plate 21 and only the constituted synchronous distressed structure of bending of the synchronous deformation in part, that is, deformable base construction 20 of flex plate 22 Synchronization deformed region be in the region of movable part 22a, i.e. the synchronization distressed structure of this two state sample implementation is that a bending is synchronous Distressed structure, so the synchronous deformation of its bending is only that part is bent synchronous deformation, and the difference of this two state sample implementation is only that its portion Divide the direction of the synchronous deformation of bending different.The synchronous deformation of implementation section bending in the second state sample implementation as shown in Figure 5 B Mode is the movable part 22a at the corresponding confluence opening portion 212 outer surface 21a of the flow plate 21 of deformable base construction 10 Region is towards the protruding portion 230c direction bending deformation close to the oscillating plate 230, while the region movable part 22a of flex plate 22 is also It is curved to reach the deformable generation of base construction 20 part towards the protruding portion 230c direction bending deformation close to the oscillating plate 230 The synchronous distressed structure of song；And implementation section bending is synchronized and is deformed into deformable pedestal in the 4th state sample implementation as shown in Figure 5 D The region movable part 22a of the corresponding confluence opening portion 212 the outer surface 21a of the flow plate 21 of structure 10 is directed away from the oscillating plate 230 direction bending deformation, while the region movable part 22a of flex plate 22 is also directed to the protruding portion far from the oscillating plate 230 The bending deformation of the direction 230c is bent synchronous distressed structure to constitute deformable 20 part of base construction；Therefore the second state sample implementation and To constitute the region movable part 22a of the flex plate 22 of deformable base construction 20 and dashing forward for oscillating plate 230 in 4th state sample implementation The chamber between portion 230c is positively retained within the scope of required certain depth δ out, i.e. the movable part 22a's of flex plate 22 Chamber between region and the protruding portion 230c of oscillating plate 230 is maintained within the scope of required certain depth δ, and then structure Flow plate 21 and the synchronous deformation of 22 composition part of flex plate bending at this two state sample implementation with deformable base construction 20 The fluid control device 2 of structure.

As shown in Fig. 6 B and Fig. 6 D, in the 6th state sample implementation and the 8th state sample implementation, deformable base construction 20 is stream Logical plate 21 and flex plate 22, which only partially synchronize, deforms the synchronous distressed structure of constituted taper, that is, deformable base construction 20 Synchronous deformed region is that the synchronization distressed structure of this i.e. two state sample implementation, which is that a taper is synchronous, to be become in the region of movable part 22a Shape structure, synchronous deform of its right taper is only the synchronous deformation of part conic, and the difference of this two state sample implementation is only that its part The direction of the synchronous deformation of taper is different.The side of the synchronous deformation of implementation section taper in the 6th state sample implementation as shown in Figure 6B Formula is the area movable part 22a at the corresponding confluence opening portion 212 outer surface 21a of the flow plate 21 of deformable base construction 10 Domain is towards the direction the protruding portion 230c taper-deformation close to the oscillating plate 230, while the region movable part 22a of flex plate 22 also court To the direction the protruding portion 230c taper-deformation close to the oscillating plate 230, part conic is generated to reach deformable base construction 20 Synchronous distressed structure；And implementation section taper is synchronized and is deformed into deformable pedestal knot in the 8th state sample implementation as shown in Figure 6 D The region movable part 22a of the corresponding confluence opening portion 212 the outer surface 21a of the flow plate 21 of structure 10 is directed away from the oscillating plate 230 direction protruding portion 230c taper-deformation, while the region movable part 22a of flex plate 22 is also directed to far from the oscillating plate 230 The direction protruding portion 230c taper-deformation, the synchronous distressed structure of part conic to constitute deformable base construction 20；Therefore the 6th The region movable part 22a and the vibration of the flex plate 22 of deformable base construction 20 are constituted in state sample implementation and the 8th state sample implementation Chamber between the protruding portion 230c of plate 230 is positively retained within the scope of required certain depth δ, i.e., flex plate 22 can Chamber between the region of dynamic portion 22a and the protruding portion 230c of oscillating plate 230 be maintained at required certain depth δ range it It is interior, and then constitute the 22 composition part taper of flow plate 21 and flex plate with deformable base construction 20 of this two state sample implementation The fluid control device 2 of synchronous distressed structure.

As shown in Fig. 7 B and Fig. 7 D, in the tenth state sample implementation and the 12nd state sample implementation, deformable base construction 20 is Flow plate 21 and only the constituted part convex block plane synchronization distressed structure of the synchronous deformation in part, that is, deformable base of flex plate 22 The synchronization deformed region of holder structure 20 is equally only that the region of movable part 22a, i.e. the synchronization distressed structure of this two state sample implementation It is a convex block plane synchronization distressed structure, right its convex block plane synchronization deformation is only part convex block plane synchronization, and this two reality The difference for applying aspect is only that the direction of its part convex block plane synchronization deformation is different.As shown in Figure 7 B the tenth implements state The mode that implementation section convex block plane synchronization deforms in sample is in the outer surface 21a of the flow plate 21 of deformable base construction 10 The region movable part 22a at corresponding confluence opening portion 212 is towards the direction the protruding portion 230c convex block plane close to the oscillating plate 230 Deformation, while the region movable part 22a of flex plate 22 is also directed to the direction the protruding portion 230c convex block plane close to the oscillating plate 230 Deformation, to constitute the part convex block plane synchronization distressed structure of deformable base construction 20；And the 12nd as illustrated in fig. 7d is real Implementation section convex block plane synchronization in aspect is applied to be deformed into 21a pairs of outer surface of flow plate 21 of deformable base construction 10 Should converge opening portion 212 the region movable part 22a be directed away from the oscillating plate 230 the direction protruding portion 230c convex block plane become Shape, while the region movable part 22a of flex plate 22 is also directed to the direction the protruding portion 230c convex block plane far from the oscillating plate 230 and becomes Shape, to constitute the part convex block plane synchronization distressed structure of deformable base construction 20；Therefore the tenth state sample implementation and the 12nd is in fact It applies in aspect to constitute the region movable part 22a of the flex plate 22 of deformable base construction 20 and the protruding portion of oscillating plate 230 Chamber between 230c is positively retained within the scope of required certain depth δ, i.e. the region of the movable part 22a of flex plate 22 Chamber between the protruding portion 230c of oscillating plate 230 is maintained within the scope of required certain depth δ, and then constitutes this Flow plate 21 with deformable base construction 20 and 222 composition part convex block plane synchronization of the flex plate deformation of two state sample implementations The fluid control device 2 of structure.

It is for another example aforementioned, in some embodiments, the flow plate 21 of deformable base construction 20 and the surface of flex plate 22 It can be also to may make up the synchronous distressed structure aspect of a curved surface, which synchronizes distressed structure as the curved surface institute structure of several different curvatures At, or can be also made of the curved surface of same curvature, the 13rd state sample implementation of Fig. 8 is please referred to, wherein implementing curved surface knot The mode of the synchronous deformation of structure is several different bent in being produced as on the outer surface 21a of the flow plate 21 of deformable base construction 20 The synchronous deformation of the curved surface that the curved surface of rate is constituted, flex plate 22 also has several different curvatures for that can synchronize deformation simultaneously for this Curved surface, so to constitute the synchronous distressed structure of curved surface of deformable base construction 20, however, the mode of the synchronous deformation of this curved surface is also It is not limited, can also synchronize and become for the curved surface constituted in the curved surface for being produced as several different curvatures on the surface of flex plate 22 Shape, so that flow plate 21 generates the synchronous deformation of corresponding curved surface, and the synchronous deformation of curved surface for collectively forming deformation base construction 20 Structure；Whereby so that between the synchronous distressed structure of the curved surface of deformable base construction 20 and the protruding portion 230c of oscillating plate 230 Chamber is positively retained within the scope of required certain depth δ, and then constitutes the flow plate with deformable base construction 20 21 and flex plate 22 constitute the fluid control device 2 of the synchronous distressed structure structure of curved surface.

In other embodiments, what the flow plate 21 and flex plate 22 of deformable base construction 20 were constituted synchronizes deformation The synchronization distressed structure of structure not necessarily conformation of rules also can be irregular synchronization distressed structure, imply that in deformable Irregular synchronous deformation is formed on the flow plate 21 of base construction 20 or the surface of flex plate 22, so as to flow plate 21 and scratch Property plate 22 is corresponding constitutes an irregular synchronous distressed structure, but not limited to this.And the irregular synchronization of the flex plate 22 Required certain depth can be equally maintained between distressed structure and the protruding portion 230c of oscillating plate 230.

Pass through the various realities such as above-mentioned warp architecture, pyramidal structure, convex block planar structure, curved-surface structure or irregular structure Aspect is applied, the chamber between the movable part 22a of deformable base construction 20 and the protruding portion 230c of oscillating plate 230 can kept Within the scope of required certain depth δ, is limited by the range of this certain depth δ, then can avoid fluid control device 2 Error when assembled cause gap excessive or the protruding portion 230c of too small and its caused flex plate 22 and oscillating plate 230 each other The problems such as contacting interference, and then keeping fluid efficiency of transmission bad and noise can be generated.

In conclusion the fluid control device of the utility model is the flow plate and flex plate by deformable base construction The synchronization distressed structure constituted, the embodiment of synchronization deformation be can for towards close to or away from the piezoelectric actuator, with Make holding between the flex plate of deformable base construction and the protruding portion of oscillating plate, simultaneously model of the adjustment in required certain depth Within enclosing, and then reduces flex plate contact with the protruding portion of oscillating plate interference and may be used also so as to the efficiency of lifting fluid transmission Reach the effect of reducing noise.In this way, which the fluid control device of the utility model passes through the deformable base that can synchronize deformation Holder structure, and then can adjust, correct required certain depth, to reach best fluid efficiency of transmission, the drop of fluid control device Low noise, while can also reduce the fraction defective of product, the quality of lifting fluid control device.

The utility model can be appointed as person familiar with the technology apply craftsman think and be it is all as modify, but all do not depart from such as appended power Protection scope defined by sharp claim.

Claims (17)

1. a kind of fluid control device, it is characterised in that: include:

One piezoelectric actuator is made of the surface that a piezoelectric element is attached at an oscillating plate, and the piezoelectric element is electric by applying Pressure and deformation to drive the oscillating plate bending vibration, the oscillating plate have a protruding portion, and its be relatively arranged on attach the pressure Another surface on the surface of electrical component；And

One deformable base construction is made of a flex plate and the mutual storehouse engagement of a flow plate, and can synchronize and be deformed into one Synchronous distressed structure；

Wherein, deformable base construction engagement positioning corresponding with the oscillating plate of the piezoelectric actuator, and the deformable base The synchronization distressed structure of holder structure is deformed towards close to the direction of the oscillating plate is prominent, so that this of the deformable base construction is scratched Property plate and the protruding portion of the oscillating plate between define a certain depth and the flex plate there is a movable part and one fixed Portion, the fixed part are fixedly connected on the flow plate, which is the protruding portion relative to the oscillating plate and is arranged, this is movable Portion's deformation with the bending vibration of flex plate.

2. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms knot The synchronous deformed region of the one of structure is in the region of the movable part of the flex plate, and this of the synchronization distressed structure and the oscillating plate are prominent The required certain depth is maintained to constitute between portion out.

3. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms knot The synchronous deformed region of the one of structure is to be bent synchronous distressed structure the one of the region of the movable part of the flex plate, and the bending is synchronous The required certain depth is maintained between this of distressed structure and the oscillating plate protruding portion to constitute.

4. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms knot The synchronous deformed region of the one of structure is the synchronous distressed structure of a taper in the region of the movable part of the flex plate, and the taper is synchronous The required certain depth is maintained between this of distressed structure and the oscillating plate protruding portion to constitute.

5. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms knot The synchronous deformed region of the one of structure is the convex block plane synchronization distressed structure in the region of the movable part of the flex plate, the convex block The required certain depth is maintained between plane synchronization distressed structure and the protruding portion of the oscillating plate to constitute.

6. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms knot The synchronous deformed region of the one of structure is in the region of the movable part of the flex plate and beyond the region of movable part, synchronization deformation knot The required certain depth is maintained between this of structure and the oscillating plate protruding portion to constitute.

7. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms knot The synchronous deformed region of the one of structure is in the region of the movable part of the flex plate and a bending in the region beyond movable part synchronizes Distressed structure maintains the required specific depth between the synchronous distressed structure of the bending and the protruding portion of the oscillating plate to constitute Degree.

8. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms knot The synchronous deformed region of the one of structure is in the region of the movable part of the flex plate and a taper in the region beyond movable part is synchronous Distressed structure maintains the required specific depth between the synchronous distressed structure of the taper and the protruding portion of the oscillating plate to constitute Degree.

9. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms knot The synchronous deformed region of the one of structure is a convex block plane in the region in the movable part of the flex plate and the region beyond movable part Synchronous distressed structure remains required between the convex block plane synchronization distressed structure and the protruding portion of the oscillating plate to constitute The certain depth.

10. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms The synchronous distressed structure of a curved surface that the synchronous deformed region of the one of structure is constituted for the flow plate and the flex plate, the curved surface are synchronous Distressed structure is made of the curved surface of several not same curvatures, the synchronous distressed structure of the curved surface of the flex plate and the oscillating plate The required certain depth is maintained between the protruding portion.

11. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms The synchronous deformed region of the one of structure constitutes the synchronous distressed structure of a curved surface, the synchronous deformation knot of the curved surface by flow plate and flex plate Structure is made of the curved surface of several same curvatures, the protruding portion of the curved surface of the flex plate synchronous distressed structure and the oscillating plate Between maintain the required certain depth.

12. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms The synchronous deformed region of the one of structure is constituted an irregular synchronous distressed structure, the flex plate by the flow plate and the flex plate The irregular synchronous distressed structure and the oscillating plate the protruding portion between maintain the required certain depth.

13. fluid control device as described in claim 1, which is characterized in that the oscillating plate of the piezoelectric actuator is in pros Shape, and flexible vibration, which also includes:

One outline border, around the outside for being set to the oscillating plate；And

An at least bracket is connected between a side of the oscillating plate and the outline border, for resilient support.

14. fluid control device as described in claim 1, which is characterized in that the deformable base construction and the oscillating plate it Between by a medium engagement positioning, and the medium be an adhesive agent.

15. fluid control device as described in claim 1, which is characterized in that also include a shell, the cover is engaged in the piezoelectricity Actuator makes to constitute a fluid flowing lumen room between the shell and the piezoelectric actuator, and the shell is equipped at least one discharge Hole, to be connected to except fluid circulation chamber and the shell.

16. fluid control device as described in claim 1, which is characterized in that the flex plate has a stream hole, and is set to The center of the movable part or at center, so that fluid passes through.

17. fluid control device as described in claim 1, which is characterized in that the flow plate has an at least access aperture, at least One confluence through slot and a confluence opening portion, which is connected through the flow plate and at least one confluence through slot, and is somebody's turn to do The other end of confluence through slot be connected to the confluence opening portion, and the confluence opening portion correspond to the flex plate this is movable Portion, and be connected to the stream hole of the flex plate.