CN107795473B - Fluid control device - Google Patents
Fluid control device Download PDFInfo
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- CN107795473B CN107795473B CN201610801655.8A CN201610801655A CN107795473B CN 107795473 B CN107795473 B CN 107795473B CN 201610801655 A CN201610801655 A CN 201610801655A CN 107795473 B CN107795473 B CN 107795473B
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- 239000012530 fluid Substances 0.000 title claims abstract description 109
- 238000009411 base construction Methods 0.000 claims abstract description 102
- 230000001360 synchronised effect Effects 0.000 claims abstract description 84
- 238000005452 bending Methods 0.000 claims abstract description 31
- 230000001788 irregular Effects 0.000 claims description 8
- 239000000853 adhesive Substances 0.000 claims description 2
- 238000003825 pressing Methods 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 claims 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 26
- 239000000758 substrate Substances 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 4
- 238000000354 decomposition reaction Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 230000000717 retained effect Effects 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000276425 Xiphophorus maculatus Species 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
A kind of fluid control device, include: piezoelectric actuator and deformable pedestal, piezoelectric actuator are made of the surface that piezoelectric element is attached at oscillating plate, and piezoelectric element is by applying voltage and deformation to drive oscillating plate bending vibration, oscillating plate has protruding portion, attaches another surface of piezoelectric element；And deformable base construction, it is made of flex plate and the mutual storehouse engagement of flow plate, and can synchronize and be deformed into synchronous distressed structure；Wherein, deformable base construction engagement positioning corresponding with the oscillating plate of piezoelectric actuator, makes to define a certain depth between flex plate and the protruding portion of oscillating plate, and flex plate has movable part, be arranged relative to protruding portion.
Description
Technical field
The present invention is about a kind of fluid control device, espespecially a kind of fluid control device with deformable pedestal.
Background technique
The either industry such as medicine, computer technology, printing and energy in each field at present, product towards sophistication and
Microminiaturization direction is developed, the fluid conveying knot that wherein products such as micropump, sprayer, ink gun and industrial printing devices are included
Structure is its key technology, therefore, how by innovation structure its technical bottleneck is broken through, for the important content of development.
It please refers to shown in Figure 1A and Figure 1B, Figure 1A is the partial structure diagram of known fluid control device, and Figure 1B is to practise
Know the part-structure assembling deviation schematic diagram of fluid control device.As shown, known fluid control device 100 makees kinetonucleus
The heart mainly includes substrate 101 and piezoelectric actuator 102, and substrate 101 and piezoelectric actuator 102 are storehouse settings, and substrate 101 with
Piezoelectric actuator 102 has a gap 103, wherein the gap 103 need to keep certain depth, remain certain by this gap 103
Depth then can drive fluid in fluid control device 100 when piezoelectric actuator 102 is activated by application voltage generates deformation
Each chamber indoor moveable, use achieve the purpose that fluid transmit.However, in this known fluid control device 100, wherein pressing
Electric actuator 102 and substrate 101 are flat overall structure, and have certain rigidity, with this condition, make this two
A entirety is that flat structure precisely aligns each other, to cause to generate between two plate with certain gap 103, that is, is tieed up
Certain depth is held, there can be certain degree of difficulty, is easy to generate error, because the entirety of the certain rigidity of any of the above-described tool is flat
Plate tilts an angle, θ if any any side, then can generate the shift value that opposite distance is multiplied by the angle, θ in opposite position,
Such as ㄧ is displaced d, and increases d ' (as shown in Figure 1B) at the graticule in the gap 103 for causing this certain, or vice versa reduction d ' (do not scheme
Show)；Especially when fluid control device is towards the development of microminiaturization, the size of each component is designed towards microminiaturization and is carried out, makes
Be intended between two plate maintain without increasing or decreasing d ', and then to keep the certain of gap 103 with certain gap 103
Depth, degree of difficulty is higher and higher, and if cannot keep the certain depth in gap 103, such as gap 103 is to increase an above-mentioned d '
When the error of displacement, the distance that will lead to the gap 103 is excessive, so that fluid efficiency of transmission is bad；Conversely, if gap is
In opposite direction so that reducing an above-mentioned d ' displacement (not shown), then make the distance in gap 103 too small, and then piezoelectric actuated
The contact interference of 102 actuation Shi Yiyu other assemblies of device, and leads to the problem of noise, and cause the fraction defective of fluid control device with
Promotion.
In other words, since the piezoelectric actuator 102 of known fluid control device 100 and substrate 101 are to have centainly
The flat overall structure of rigidity, is intended between the two plate with whole alignment mode, achievees the purpose that precisely to align and shows as difficulty, especially
It more becomes small in size of components, and when assembling is more difficult exactitude position, and then keeps the efficiency of fluid conveying low and generate noise
Problem causes using upper not convenient and uncomfortable.
Therefore, above-mentioned known techniques missing can be improved by how developing one kind, can make the instrument of conventionally employed fluid conveying device
Device or equipment reach small in size, micromation and mute, and overcome the problems, such as to be also easy to produce error when assembling, and then reach light comfortable
Portable purpose minisize fluid transmitting device, actually problem in the urgent need to address at present.
Summary of the invention
It is a primary object of the present invention to solve in known fluid control device, substrate and piezoelectric actuator are micro- because of component
The design of smallization is not easy to be precisely located and generate error when assembling, the demand for making it be difficult to maintain its gap after assembling
Distance, and then cause the efficiency of fluid conveying low and lead to the problem of noise causes using upper not convenient and uncomfortable
Problem.
In order to achieve the above object, a broader implementation pattern of the invention is to provide a kind of fluid control device, include: a pressure
Electric actuator is made of the surface that a piezoelectric element is attached at an oscillating plate, piezoelectric element deformation by application voltage
To drive the oscillating plate bending vibration, which has a protruding portion, and it is relatively arranged on and attaches the piezoelectric element
Another surface on the surface；And a deformable base construction, it is made of a flex plate and the mutual storehouse engagement of a flow plate,
And it can synchronize and be deformed into a synchronous distressed structure；Wherein, oscillating plate phase of the deformable base construction and the piezoelectric actuator
Corresponding engagement positioning, so as to define a spy between the flex plate of the deformable base construction and the protruding portion of the oscillating plate
Depthkeeping degree and the flex plate have a movable part, are the protruding portions relative to the oscillating plate and are arranged.
Detailed description of the invention
Figure 1A is the partial structure diagram of known fluid control device.
Figure 1B is the part-structure assembling deviation schematic diagram of known fluid control device.
Fig. 2A is the positive decomposition texture schematic diagram of the fluid control device of present pre-ferred embodiments.
Fig. 2 B is the positive combination structural schematic diagram of fluid control device shown in Fig. 2A.
Fig. 3 is the back side decomposition texture schematic diagram of fluid control device shown in Fig. 2A.
Fig. 4 A is the amplification profile structural schematic diagram of fluid control device shown in Fig. 2A.
Fig. 4 B to Fig. 4 C is the local illustrative view of fluid control device shown in Fig. 2A.
Fig. 5 A is that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronizes first deformed in fact
Apply aspect schematic diagram.
Fig. 5 B is that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronizes second deformed in fact
Apply aspect schematic diagram.
Fig. 5 C is that the third of the synchronous deformation of deformable base construction of the fluid control device of present pre-ferred embodiments is real
Apply aspect schematic diagram.
Fig. 5 D is that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronizes the 4th deformed in fact
Apply aspect schematic diagram.
Fig. 6 A is that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronizes the 5th deformed in fact
Apply aspect schematic diagram.
Fig. 6 B is that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronizes the 6th deformed in fact
Apply aspect schematic diagram.
Fig. 6 C is that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronizes the 7th deformed in fact
Apply aspect schematic diagram.
Fig. 6 D is that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronizes the 8th deformed in fact
Apply aspect schematic diagram.
Fig. 7 A is that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronizes the 9th deformed in fact
Apply aspect schematic diagram.
Fig. 7 B is that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronizes the tenth deformed in fact
Apply aspect schematic diagram.
Fig. 7 C is the 11 of the synchronous deformation of deformable base construction of the fluid control device of present pre-ferred embodiments
State sample implementation schematic diagram.
Fig. 7 D is the 12 of the synchronous deformation of deformable base construction of the fluid control device of present pre-ferred embodiments
State sample implementation schematic diagram.
Fig. 8 is that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronizes the 13rd deformed in fact
Apply aspect schematic diagram.
[symbol description]
100: known fluid control device
101: substrate
102: piezoelectric actuator
103: gap
2: fluid control device
20: deformable base construction
21: flow plate
21a: outer surface
21b: interior surface
210: access aperture
211: confluence through slot
212: confluence opening portion
22: flex plate
22a: movable part
22b: fixed part
23: piezoelectric actuator
230: oscillating plate
230a: second surface
230b: first surface
230c: protruding portion
231: outline border
232: bracket
233: piezoelectric element
235: gap
241,242: insulating trip
25: conductive sheet
26: shell
26a: accommodating space
268: side wall
δ: certain depth
H: spacing
A: temporary chamber
θ: angle
D, d ': displacement
Specific embodiment
The some exemplary embodiments for embodying feature of present invention and advantage will describe in detail in the explanation of back segment.It should be understood that
It is that the present invention there can be various variations in different aspects, neither departs from the scope of the present invention, and explanation therein
And attached drawing inherently is illustrated as being used, and nand architecture is in the limitation present invention.
Fluid control device 2 of the invention can be applied to the industry such as the raw skill of medicine, the energy, computer technology or printing, with
To transmit fluid, but not limited to this.Please refer to Fig. 2A, Fig. 2 B, shown in Fig. 3 and Fig. 4 A, Fig. 2A is that the present invention is preferable reality
The positive decomposition texture schematic diagram of the fluid control device of example is applied, Fig. 2 B is the positive combination of fluid control device shown in Fig. 2A
Structural schematic diagram, Fig. 3 are the back side decomposition texture schematic diagram of fluid control device shown in Fig. 2A, and Fig. 4 A is to flow shown in Fig. 2A
The amplification profile structural schematic diagram of member control apparatus.As shown in Fig. 2A and Fig. 3, fluid control device 2 of the invention has variable
The structures such as shape base construction 20, piezoelectric actuator 23, insulating trip 241,242, conductive sheet 25 and shell 26, wherein deformable base
Holder structure 20 includes then flow plate 21 and flex plate 22, and but not limited to this.Piezoelectric actuator 23 correspond to flex plate 22 and
Setting, which assembled by an oscillating plate 230 and a piezoelectric element 233, in this present embodiment, can be changed
The structures such as shape base construction 20, piezoelectric actuator 23, insulating trip 241, conductive sheet 25, another insulating trip 242 are that mutual storehouse is set
It sets, and holds and close within shell 26.
Please continue to refer to shown in Fig. 2A, Fig. 2 B, Fig. 3 and Fig. 4 A, the flow plate 21 of fluid control device 2 of the invention is tool
There is the outer surface 21a of interior surface 21b and corresponding setting, as shown in Figure 3, it is seen that have at least on the 21a of portion surface outside
One access aperture 210, in present pre-ferred embodiments, the quantity of access aperture 210 is 4, and but not limited to this, is through stream
The outer surface 21a and interior surface 21b of logical plate 21, mainly with the effect for complying with atmospheric pressure from outside device for fluid and from
In the 210 incoming fluid control device 2 of an at least access aperture.It and again as shown in Figure 2 A, can by the interior surface 21b of flow plate 21
See there is at least one confluence through slot 211 thereon, at least an access aperture 210 is right to this of the outer surface 21a with flow plate 21
It should be arranged.It is there is confluence opening portion 212, and opening portion 212 of converging is and remittance at the center exchange of grade confluence through slot 211
Circulation groove 211 is connected, and the fluid for the through slot 211 that can will converge whereby from an at least access aperture 210 entrance guide and the collection that converges
In to confluence opening portion 212, to be transmitted.Therefore in present pre-ferred embodiments, flow plate 21 has integrally formed
Access aperture 210, confluence through slot 211 and confluence opening portion 212, and a confluence stream is correspondingly formed at the confluence opening portion 212
The confluence chamber of body, so that fluid is temporary.In some embodiments, the material of flow plate 21 be can be but it is unlimited for by one it is stainless
Steel material is constituted.Flex plate 22 is made of a flexible materials, and but not limited to this, and on flex plate 22 have one
Stream hole 220 corresponds to the confluence opening portion 212 of the interior surface 21b of flow plate 21 and is arranged so that fluid can to flow down
It is logical.In other embodiments, flex plate 22 is can be made of a copper material, and but not limited to this, and flex plate 22 has one
Movable part 22a and a fixed part 22b, such setting of flex plate 22 are connected on flow plate 21, and to use, fixed part 22b is fixed to be connected
It is connected on flow plate 21, and movable part 22a is the part at the corresponding place in confluence opening portion 212, and the setting of stream hole 220 is can
On dynamic portion 22a.
Please continue to refer to shown in Fig. 2A, Fig. 2 B and Fig. 3, in present pre-ferred embodiments, piezoelectric actuator 23 be include pressure
Electrical component 233, oscillating plate 230, outline border 231 and an at least bracket 232, in present pre-ferred embodiments, oscillating plate 230 is
Flexible square plate structure, and there is first surface 230b and corresponding second surface 230a, piezoelectric element 233 is can
Square platy structure, and its side length is not more than the side length of oscillating plate 230, and can be attached at the first surface 230b of oscillating plate 230
On, but not limited to this, generates deformation after the piezoelectric element 233 application voltage and drives 230 bending vibration of oscillating plate.Yu Ben
In invention preferred embodiment, the second surface 230a of oscillating plate 230 can also have a protruding portion 230c, protruding portion 230c that can be
But it is not limited to a circular protrusions structure；In the outside of oscillating plate 230 then around setting outline border 231, the kenel of outline border 231 is also substantially
Corresponding to the kenel of oscillating plate 230, therefore the hollow out frame-type structure that outline border 231 can be also square；And oscillating plate 230 and outline border
It is to be connected with an at least bracket 232, and resilient support is provided between 231.As shown in Figure 2 A and 2 B, shell 26 has at least one
Tap 261, shell 26 are not only single plate structure, can also have the frame structure of side wall 260 for periphery, and by this week
The plate common definition of side wall 260 and its bottom that edge is constituted goes out an accommodating space 26a, is set with for the piezoelectric actuator 23
It is placed in accommodating space 26a, therefore after fluid control device 2 of the invention is completed, then its front schematic view can be as schemed
Shown in 2B and Fig. 4 A, i.e., shell 26 is the cover except piezoelectric actuator 23 and deformable base construction 20, and make shell 26 with
The temporary chamber A of fluid circulation is constituted between piezoelectric actuator 23, and tap 261 makes fluid to be connected to temporary chamber A
It circulates in except shell 26.
Fig. 4 A to Fig. 4 C is please referred to, Fig. 4 A is the schematic diagram of the section structure of fluid control device shown in Fig. 2A, and Fig. 4 B is extremely
Fig. 4 C is the local illustrative view of fluid control device shown in Fig. 2A.In this present embodiment, so in Fig. 4 A to Fig. 4 C, absolutely
Embolium 241, conductive sheet 25 and another insulating trip 242 slightly show, and shown deformable base in this Fig. 4 A to Fig. 4 C
Holder structure 20 is that it not yet generates the kenel before synchronous deformation, these icons are to illustrate deformable base construction of the invention
The structure of 20 flow plate 21 and flex plate 22 and piezoelectric actuator 23 is correspondingly arranged position and actuation relationship etc., and conjunction is first chatted
It is bright.
As shown in Figure 4 A, after the assembling corresponding with piezoelectric actuator 23 of flow plate 21, flex plate 22, then in flex plate 22
Can be collectively formed the chamber of a confluence fluid at stream hole 220 with the confluence opening portion 212 of flow plate 21, and flex plate 22 with
It is with spacing h between the outline border 231 of piezoelectric actuator 23, is a fillable medium in some embodiments, in spacing h,
Such as: conducting resinl, but not limited to this, is engaged and is positioned by medium, so that the oscillating plate of flex plate 22 and piezoelectric actuator 23
Maintainable certain distance between 230 protruding portion 230c, such as spacing h can also make flex plate 22 and piezoelectric actuator 23
A certain depth δ is formed between the protruding portion 230c of oscillating plate 230, and further in the oscillating plate 230 of the piezoelectric actuator 23
, can be by the fluid compression (imply that and certain depth δ becomes smaller) when vibration, and increase the pressure of fluid and flow velocity；In addition, should
Certain depth δ is a suitable distance, interferes to make to reduce the contact between flex plate 22 and piezoelectric actuator 23, is produced with reducing
The problem of raw noise；And certain depth δ between the protruding portion 230c of the oscillating plate 230 of flex plate 22 and piezoelectric actuator 23
The chamber constituted is by the stream hole 220 of flex plate 22 and the fluid that converges at the confluence opening portion 212 of flow plate 21
Chamber is connected.
When 2 actuation of fluid control device, vertical direction mainly is carried out by voltage actuation is applied by piezoelectric actuator 23
Reciprocating vibration.As shown in Figure 4 B, when piezoelectric actuator 23 is vibrated upwards by application voltage actuation, due to flex plate 22
For light, thin laminated structure, therefore when piezoelectric actuator 23 vibrates, flex plate 22 also can carry out vertical direction therewith resonating
Reciprocating vibration, as the part of the movable part 22a of flex plate 22 also can bending vibration deformation therewith, and the stream hole 220
It is set to the center of flex plate 22 or at center, therefore when piezoelectric actuator 23 vibrates upwards, at this time flex plate 22
Movable part 22a can be vibrated upwards by piezoelectric actuator 23 drive due to fluid is up brought into and is pushed and with upward vibration
Dynamic, then fluid is entered by at least access aperture 210 on flow plate 21, and by least one confluence through slot 211 to be pooled in
At the confluence opening portion 212 of centre, then via on flex plate 22 with the confluence stream hole 220 that is correspondingly arranged of opening portion 212 to upstream
Enter the chamber that the certain depth δ between the protruding portion 230c of the oscillating plate 230 to flex plate 22 and piezoelectric actuator 23 is constituted
In, by the deformation of this flex plate 22, with compress flex plate 22 and piezoelectric actuator 23 oscillating plate 230 protruding portion 230c it
Between the volume of chamber that is constituted of certain depth δ, and reinforce this compressed kinetic energy in chamber middle flow space, promote in it
Fluid is pushed to be flowed to two sides, and then passes through flowing upwards by the gap between oscillating plate 230 and bracket 232.
As for shown in Fig. 4 C, when piezoelectric actuator 23 vibrates downwards, then the movable part 22a of flex plate 22 also resonates therewith
It is bent downwardly vibration deformation, fluid is pooled at the confluence opening portion 212 in center and tails off, and the also vibration downwards of piezoelectric actuator 23
It is dynamic, and it is moved to the constituted cavity bottom of certain depth δ between flex plate 22 and piezoelectric actuator 23 and to increase chamber compressible
Volume, so repeat and implement actuation shown in Fig. 4 B, the oscillating plate 230 of flex plate 22 Yu piezoelectric actuator 23 can be increased
Protruding portion 230c between the compressed space in chamber middle flow space that is constituted certain depth δ, to reach biggish stream
Body soakage and discharge rate.
In presently preferred embodiments of the present invention, as previously mentioned, deformable base construction 20 is by flow plate 21 and flex plate
22 are formed, and wherein flow plate 21 and flex plate 22 are mutual storehouse, and flow plate 21 is synchronous with the two of flex plate 22 deforms
To constitute a synchronous distressed structure.Furthermore, synchronous distressed structure above-mentioned refers to by flow plate 21 and flex plate 22
Synchronization deformed region constituted, when any one of them is deformed, then another one centainly deforms therewith, and the two deformation
Shape is that unanimously, i.e. the corresponding surface of the two is to engage and position each other, and do not have any between the two
Gap or parallel misalignment, for example, when the flow plate 21 of deformable base construction 20 is deformed, flex plate 22 also generates identical
Deformation；In the same manner, when the flex plate 22 of deformable base construction 20 is deformed, flow plate 21 also generates identical change
Shape.In some embodiments, flow plate 21 and flex plate 22 are the positioning that is interconnected by an adhesive agent, and but not limited to this.
In addition, because such as preceding known content is addressed shown in Figure 1B, in the fluid control device 100 of Yu Xizhi, wherein piezoelectric actuator 102 with
Substrate 103 is flat overall structure, and has certain rigidity, and with this condition, it is whole flat for making this two
Board-like structure precisely aligns each other, and makes to maintain certain gap between two plate, implies that and maintains its required depthkeeping
Degree, can have comparable degree of difficulty, be easy to generate error, cause variety of problems.So preferable implementation various in the present invention
Example, feature are using the synchronous deformation of a deformable base construction 20, as aforementioned flow plate 21 and flex plate 22, with structure
At synchronous distressed structure, which is equivalent to the substrate 101 of known techniques, but the flow plate of the synchronization distressed structure
21 and flex plate 22 have a variety of different state sample implementations defined in the various embodiments in the present invention, and this is various specific
Synchronous distressed structure can be maintained at a required specific gap between the oscillating plate 230 of opposite piezoelectric actuator 23
Within (i.e. the chamber that certain depth δ is constituted), therefore even if work as development of the fluid control device 2 towards microminiaturization, each component
Size design and carry out towards microminiaturization, remain to make easily this above-mentioned to be intended to maintain to have between the two by the synchronization distressed structure
Certain gap is readily, because (no matter should using its synchronization distressed structure for aligning the non-planar base that area has reduced
It is deformed into bending, cone-shaped, various curved, irregular etc. shape) it is aligned with a plate, and no longer it is two large area
Plate contraposition, but the plate of the small area of a non-planar base and a large area aligns, therefore can reduce easily between the two
Gap error, and then reach and solve the problems, such as that the efficiency of fluid conveying is low and generate noise, so that solving to use upper inconvenience
Sharp and uncomfortable known problem.
In some embodiments, deformable base construction 20 is that flow plate 21 and the synchronous deformation of flex plate 22 are same with what is constituted
Walk distressed structure, i.e. the synchronization deformed region of the deformable base construction 20 be can for movable part 22a region and exceed
Other regions movable part 22a, and it can be warp architecture or cone that the synchronization distressed structure that is constituted of the deformable base construction 20, which is,
Type structure or convex block planar structure, but be not limited thereto.
As shown in Fig. 5 A and Fig. 5 C, in this first state sample implementation and third state sample implementation, deformable base construction 20 is
The synchronous distressed structure of the bending that flow plate 21 and flex plate 11 are constituted, that is, the synchronization deformed region of deformable base construction 20
It is in the region of movable part 22a and beyond other regions movable part 22a, i.e. the synchronization distressed structure of two state sample implementation is
The synchronous distressed structure of one bending, but only the bending of the two synchronizes the direction deformed difference.As shown in Figure 5A first is implemented
The mode of the synchronous deformation of implementation bending connects in aspect for the outer surface 21a direction in the flow plate 21 of deformable base construction 10
The protruding portion 230c direction bending deformation of the nearly oscillating plate 230, while the region of the movable part 22a of flex plate 22 and beyond movable
Other regions portion 22a are also directed to the protruding portion 230c direction bending deformation close to the oscillating plate 230, to constitute deformable pedestal knot
The synchronous distressed structure of the bending of structure 20；And implement to be bent to synchronize in third state sample implementation as shown in Figure 5 C to be deformed into deformable
The outer surface 21a of the flow plate 21 of base construction 10 is directed away from the protruding portion 230c direction bending deformation of the oscillating plate 230,
It the region of the movable part 22a of flex plate 22 and is also directed to simultaneously beyond other regions movable part 22a prominent far from the oscillating plate 230
The direction portion 230c bending deformation out, the synchronous distressed structure of bending to constitute deformable base construction 20；Therefore the first state sample implementation
And it constitutes in third state sample implementation and can be protected between the flex plate 22 of deformable base construction 20 and the protruding portion 230c of oscillating plate 230
It holds within the scope of required certain depth δ, i.e., the region of the movable part 22a of the flex plate 22 and oscillating plate 230 is prominent
It is maintained between portion 230c within the scope of required certain depth δ out, and then constituting having for this two state sample implementation can
The flow plate 21 and flex plate 22 for deforming base construction 20 constitute the fluid control device 2 for being bent synchronous distressed structure.
As shown in Fig. 6 A and Fig. 6 C, in this 5th state sample implementation and the 7th state sample implementation, deformable base construction 20 is
The synchronous distressed structure of the taper that flow plate 21 and flex plate 22 are constituted, that is, the synchronization deformed region of deformable base construction 20
It is in the region of movable part 22a and beyond other regions movable part 22a, i.e. the synchronization distressed structure of two state sample implementation is one
Taper synchronizes distressed structure, but only the taper of the two synchronizes the direction deformed difference.And as shown in Figure 6A the 5th implements
The mode for implementing the synchronous deformation of taper in aspect is to connect in the outer surface 21a direction of the flow plate 21 of deformable base construction 10
The direction the protruding portion 230c taper-deformation of the nearly oscillating plate 230, while the region of the movable part 22a of flex plate 22 and beyond movable
Other regions portion 22a are also directed to the direction the protruding portion 230c taper-deformation close to the oscillating plate 230, to constitute deformable pedestal knot
The synchronous distressed structure of the taper of structure 20；And implement taper in the 7th state sample implementation as shown in Figure 6 C and synchronize to be deformed into deformable
The outer surface 21a of the flow plate 21 of base construction 10 is directed away from the direction the protruding portion 230c taper-deformation of the oscillating plate 230,
It the region of the movable part 22a of flex plate 22 and is also directed to simultaneously beyond other regions movable part 22a prominent far from the oscillating plate 230
The direction portion 230c taper-deformation out, the synchronous distressed structure of taper to constitute deformable base construction 20；Therefore the 5th state sample implementation
And the 7th in state sample implementation with constitute can between the flex plate 22 of deformable base construction 20 and the protruding portion 230c of oscillating plate 230
It is maintained within the scope of required certain depth δ, i.e., the region of the movable part 22a of flex plate 22 and oscillating plate 230 is prominent
It is maintained between portion 230c within the scope of required certain depth δ out, and then it is variable to constitute having for this two state sample implementation
The flow plate 21 and flex plate 22 of shape base construction 20 constitute the fluid control device 2 of the synchronous distressed structure of taper.
As shown in Fig. 7 A and Fig. 7 C, in this 9th state sample implementation and the 11st state sample implementation, deformable base construction 20
The convex block plane synchronization distressed structure being made of flow plate 21 and flex plate 22, that is, the synchronous of deformable base construction 20 becomes
Shape region is in the region of movable part 22a and beyond other regions movable part 22a, i.e. the synchronization distressed structure of two state sample implementation
It is a convex block plane synchronization distressed structure, but the direction of convex block plane synchronization deformation both only difference.And such as Fig. 7 A
Shown in implement the mode of convex block plane synchronization deformation in the 9th state sample implementation be in the flow plate 21 of deformable base construction 10
Outer surface 21a in the region of movable part 22a and beyond other regions movable part 22a towards close to the prominent of the oscillating plate 230
The direction portion 230c convex block plane deformation out, at the same the region of the movable part 22a of flex plate 22 and exceed other regions movable part 22a
It is also directed to the direction the protruding portion 230c convex block plane deformation close to the oscillating plate 230, to constitute the cone of deformable base construction 20
Just as step distressed structure；And implements convex block plane synchronization in the 11st state sample implementation as seen in figure 7 c and be deformed into deformable base
The direction the protruding portion 230c convex block plane that the outer surface 21a of the flow plate 21 of holder structure 10 is directed away from the oscillating plate 230 becomes
Shape, while the region of the movable part 22a of flex plate 22 and being also directed to beyond other regions movable part 22a far from the oscillating plate 230
The direction protruding portion 230c convex block plane deformation, to constitute the convex block plane synchronization distressed structure of deformable base construction 20；Therefore
To constitute the flex plate 22 of deformable base construction 20 and dashing forward for oscillating plate 230 in 9th state sample implementation and the 11st state sample implementation
Be positively retained between portion 230c within the scope of required certain depth δ out, i.e., the region of the movable part 22a of flex plate 22 with
It is maintained between the protruding portion 230c of oscillating plate 230 within the scope of required certain depth δ, and then constitutes this two implementation state
The fluid control of the flow plate 21 and the composition convex block plane synchronization distressed structure of flex plate 22 with deformable base construction 20 of sample
Device 2 processed.
For another example aforementioned, in other embodiments, deformable base construction 20 also can be for flow plate 21 and flex plate 22 only
Synchronization distressed structure of the synchronous deformation in part to constitute, i.e. the synchronization deformed region of the deformable base construction 20 are only that flexibility
The region of the movable part 22a of plate 22, and the synchronization distressed structure that this deformable base construction 20 is constituted also can be warp architecture
Or tapered structure or convex block planar structure, but be also not limited.
As shown in Fig. 5 B and Fig. 5 D, in the second state sample implementation and the 4th state sample implementation, deformable base construction 20 is
Flow plate 21 and only the constituted synchronous distressed structure of bending of the synchronous deformation in part, that is, deformable base construction 20 of flex plate 22
Synchronization deformed region be in the region of movable part 22a, i.e. the synchronization distressed structure of this two state sample implementation is that a bending is synchronous
Distressed structure, so the synchronous deformation of its bending is only that part is bent synchronous deformation, and the difference of this two state sample implementation is only that its portion
Divide the direction of the synchronous deformation of bending different.The synchronous deformation of implementation section bending in the second state sample implementation as shown in Figure 5 B
Mode is the movable part 22a at the corresponding confluence opening portion 212 outer surface 21a of the flow plate 21 of deformable base construction 10
Region is towards the protruding portion 230c direction bending deformation close to the oscillating plate 230, while the region movable part 22a of flex plate 22 is also
It is curved to reach the deformable generation of base construction 20 part towards the protruding portion 230c direction bending deformation close to the oscillating plate 230
The synchronous distressed structure of song；And implementation section bending is synchronized and is deformed into deformable pedestal in the 4th state sample implementation as shown in Figure 5 D
The region movable part 22a of the corresponding confluence opening portion 212 the outer surface 21a of the flow plate 21 of structure 10 is directed away from the oscillating plate
230 direction bending deformation, while the region movable part 22a of flex plate 22 is also directed to the protruding portion far from the oscillating plate 230
The bending deformation of the direction 230c is bent synchronous distressed structure to constitute deformable 20 part of base construction；Therefore the second state sample implementation and
To constitute the region movable part 22a of the flex plate 22 of deformable base construction 20 and dashing forward for oscillating plate 230 in 4th state sample implementation
Be positively retained between portion 230c within the scope of required certain depth δ out, i.e., the region of the movable part 22a of flex plate 22 with
It is maintained between the protruding portion 230c of oscillating plate 230 within the scope of required certain depth δ, and then constitutes this two implementation state
The fluid control of the flow plate 21 and the synchronous distressed structure of 22 composition part of flex plate bending with deformable base construction 20 of sample
Device 2 processed.
As shown in Fig. 6 B and Fig. 6 D, in the 6th state sample implementation and the 8th state sample implementation, deformable base construction 20 is stream
Logical plate 21 and flex plate 22, which only partially synchronize, deforms the synchronous distressed structure of constituted taper, that is, deformable base construction 20
Synchronous deformed region is that the synchronization distressed structure of this i.e. two state sample implementation, which is that a taper is synchronous, to be become in the region of movable part 22a
Shape structure, synchronous deform of its right taper is only the synchronous deformation of part conic, and the difference of this two state sample implementation is only that its part
The direction of the synchronous deformation of taper is different.The side of the synchronous deformation of implementation section taper in the 6th state sample implementation as shown in Figure 6B
Formula is the area movable part 22a at the corresponding confluence opening portion 212 outer surface 21a of the flow plate 21 of deformable base construction 10
Domain is towards the direction the protruding portion 230c taper-deformation close to the oscillating plate 230, while the region movable part 22a of flex plate 22 also court
To the direction the protruding portion 230c taper-deformation close to the oscillating plate 230, part conic is generated to reach deformable base construction 20
Synchronous distressed structure；And implementation section taper is synchronized and is deformed into deformable pedestal knot in the 8th state sample implementation as shown in Figure 6 D
The region movable part 22a of the corresponding confluence opening portion 212 the outer surface 21a of the flow plate 21 of structure 10 is directed away from the oscillating plate
230 direction protruding portion 230c taper-deformation, while the region movable part 22a of flex plate 22 is also directed to far from the oscillating plate 230
The direction protruding portion 230c taper-deformation, the synchronous distressed structure of part conic to constitute deformable base construction 20；Therefore the 6th
The region movable part 22a and the vibration of the flex plate 22 of deformable base construction 20 are constituted in state sample implementation and the 8th state sample implementation
It is positively retained between the protruding portion 230c of plate 230 within the scope of required certain depth δ, i.e. the movable part of flex plate 22
It is maintained between the region of 22a and the protruding portion 230c of oscillating plate 230 within the scope of required certain depth δ, and then structure
The synchronous deformation of flow plate 21 and flex plate 22 composition part taper at this two state sample implementation with deformable base construction 20
The fluid control device 2 of structure.
As shown in Fig. 7 B and Fig. 7 D, in the tenth state sample implementation and the 12nd state sample implementation, deformable base construction 20 is
Flow plate 21 and only the constituted part convex block plane synchronization distressed structure of the synchronous deformation in part, that is, deformable base of flex plate 22
The synchronization deformed region of holder structure 20 is equally only that the region of movable part 22a, i.e. the synchronization distressed structure of this two state sample implementation
It is a convex block plane synchronization distressed structure, right its convex block plane synchronization deformation is only part convex block plane synchronization, and this two reality
The difference for applying aspect is only that the direction of its part convex block plane synchronization deformation is different.As shown in Figure 7 B the tenth implements state
The mode that implementation section convex block plane synchronization deforms in sample is in the outer surface 21a of the flow plate 21 of deformable base construction 10
The region movable part 22a at corresponding confluence opening portion 212 is towards the direction the protruding portion 230c convex block plane close to the oscillating plate 230
Deformation, while the region movable part 22a of flex plate 22 is also directed to the direction the protruding portion 230c convex block plane close to the oscillating plate 230
Deformation, to constitute the part convex block plane synchronization distressed structure of deformable base construction 20；And the 12nd as illustrated in fig. 7d is real
Implementation section convex block plane synchronization in aspect is applied to be deformed into 21a pairs of outer surface of flow plate 21 of deformable base construction 10
Should converge opening portion 212 the region movable part 22a be directed away from the oscillating plate 230 the direction protruding portion 230c convex block plane become
Shape, while the region movable part 22a of flex plate 22 is also directed to the direction the protruding portion 230c convex block plane far from the oscillating plate 230 and becomes
Shape, to constitute the part convex block plane synchronization distressed structure of deformable base construction 20；Therefore the tenth state sample implementation and the 12nd is in fact
It applies in aspect to constitute the region movable part 22a of the flex plate 22 of deformable base construction 20 and the protruding portion of oscillating plate 230
It is positively retained between 230c within the scope of required certain depth δ, i.e. the region of the movable part 22a of flex plate 22 and vibration
Chamber between the protruding portion 230c of plate 230 is maintained within the scope of required certain depth δ, and then constitutes this two implementation
The 222 composition part convex block plane synchronization distressed structure of flow plate 21 and flex plate with deformable base construction 20 of aspect
Fluid control device 2.
It is for another example aforementioned, in some embodiments, the flow plate 21 of deformable base construction 20 and the surface of flex plate 22
It can be also to may make up the synchronous distressed structure aspect of a curved surface, which synchronizes distressed structure as the curved surface institute structure of several different curvatures
At, or can be also made of the curved surface of same curvature, the 13rd state sample implementation of Fig. 8 is please referred to, wherein implementing curved surface knot
The mode of the synchronous deformation of structure is several different bent in being produced as on the outer surface 21a of the flow plate 21 of deformable base construction 20
The synchronous deformation of the curved surface that the curved surface of rate is constituted, flex plate 22 also has several different curvatures for that can synchronize deformation simultaneously for this
Curved surface, so to constitute the synchronous distressed structure of curved surface of deformable base construction 20, however, the mode of the synchronous deformation of this curved surface is also
It is not limited, can also synchronize and become for the curved surface constituted in the curved surface for being produced as several different curvatures on the surface of flex plate 22
Shape, so that flow plate 21 generates the synchronous deformation of corresponding curved surface, and the synchronous deformation of curved surface for collectively forming deformation base construction 20
Structure；It whereby so that can between the synchronous distressed structure of the curved surface of deformable base construction 20 and the protruding portion 230c of oscillating plate 230
It is maintained within the scope of required certain depth δ, and then constitutes the flow plate 21 with deformable base construction 20 and scratch
Property plate 22 constitute the fluid control device 2 of the synchronous distressed structure structure of curved surface.
In other embodiments, what the flow plate 21 and flex plate 22 of deformable base construction 20 were constituted synchronizes deformation
The synchronization distressed structure of structure not necessarily conformation of rules also can be irregular synchronization distressed structure, imply that in deformable
Irregular synchronous deformation is formed on the flow plate 21 of base construction 20 or the surface of flex plate 22, so as to flow plate 21 and scratch
Property plate 22 is corresponding constitutes an irregular synchronous distressed structure, but not limited to this.And the irregular synchronization of the flex plate 22
Required certain depth can be equally maintained between distressed structure and the protruding portion 230c of oscillating plate 230.
Pass through the various realities such as above-mentioned warp architecture, pyramidal structure, convex block planar structure, curved-surface structure or irregular structure
Aspect is applied, can be made needed for being maintained between the movable part 22a of deformable base construction 20 and the protruding portion 230c of oscillating plate 230
It within the scope of the certain depth δ asked, is limited by the range of this certain depth δ, then when can avoid the assembling of fluid control device 2
Error cause gap excessive or the protruding portion 230c of too small and its caused flex plate 22 and oscillating plate 230 be in contact with each other it is dry
The problems such as relating to, and then keeping fluid efficiency of transmission bad and noise can be generated.
In conclusion fluid control device of the invention is flow plate and flex plate the institute structure by deformable base construction
At synchronization distressed structure, the embodiment of synchronization deformation is can be for towards close to or away from the piezoelectric actuator, so that can
Deform base construction flex plate and oscillating plate protruding portion between keep, and adjustment required certain depth range it
It is interior, and then reduce flex plate contact with the protruding portion of oscillating plate interference and also can reach so as to the efficiency of lifting fluid transmission
The effect of reducing noise.In this way, fluid control device of the invention passes through the deformable base construction that can synchronize deformation, into
And can adjust, correct required certain depth, to reach the best fluid efficiency of transmission of fluid control device, reduce noise, together
When can also reduce the fraction defective of product, the quality of lifting fluid control device.
The present invention can be appointed as person familiar with the technology apply craftsman think and be it is all as modify, but all do not depart from appended right such as and want
Seek protection scope defined by book.
Claims (17)
1. a kind of fluid control device, includes:
One piezoelectric actuator is made of the surface that a piezoelectric element is attached at an oscillating plate, and the piezoelectric element is electric by applying
Pressure and deformation to drive the oscillating plate bending vibration, the oscillating plate have a protruding portion, and its be relatively arranged on attach the pressure
Another surface on the surface of electrical component；And
One deformable base construction is made of a flex plate and the mutual storehouse engagement of a flow plate, and can synchronize and be deformed into one
Synchronous distressed structure；
Wherein, deformable base construction engagement positioning corresponding with the oscillating plate of the piezoelectric actuator, so that this is deformable
A certain depth and the flex plate are defined between the flex plate of base construction and the protruding portion of the oscillating plate has one
Movable part is the protruding portion relative to the oscillating plate and is arranged.
2. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms knot
The synchronous deformed region of the one of structure is in the region of the movable part of the flex plate, and this of the synchronization distressed structure and the oscillating plate are prominent
The required certain depth is maintained to constitute between portion out.
3. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms knot
The synchronous deformed region of the one of structure is in the region of the movable part of the flex plate, and to be that a bending is synchronous become the synchronization distressed structure
Shape structure maintains the required specific depth between the synchronous distressed structure of the bending and the protruding portion of the oscillating plate to constitute
Degree.
4. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms knot
The synchronous deformed region of the one of structure is in the region of the movable part of the flex plate, and to be that a taper is synchronous become the synchronization distressed structure
Shape structure maintains the required specific depth between the synchronous distressed structure of the taper and the protruding portion of the oscillating plate to constitute
Degree.
5. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms knot
The synchronous deformed region of the one of structure is in the region of the movable part of the flex plate, and the synchronization distressed structure is that a convex block plane is same
Distressed structure is walked, maintenance is required to be somebody's turn to do between the convex block plane synchronization distressed structure and the protruding portion of the oscillating plate to constitute
Certain depth.
6. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms knot
The synchronous deformed region of the one of structure is in the region of the movable part of the flex plate and beyond the region of movable part, synchronization deformation knot
The required certain depth is maintained between this of structure and the oscillating plate protruding portion to constitute.
7. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms knot
The synchronous deformed region of the one of structure is in the region of the movable part of the flex plate and beyond the region of movable part, and the synchronization deforms
Structure is the synchronous distressed structure of a bending, is maintained between the synchronous distressed structure of the bending and the protruding portion of the oscillating plate with constituting
The required certain depth.
8. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms knot
The synchronous deformed region of the one of structure is in the region of the movable part of the flex plate and beyond the region of movable part, and the synchronization deforms
Structure is the synchronous distressed structure of a taper, is maintained between the synchronous distressed structure of the taper and the protruding portion of the oscillating plate with constituting
The required certain depth.
9. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms knot
The synchronous deformed region of the one of structure is in the region of the movable part of the flex plate and beyond the region of movable part, and the synchronization deforms
Structure be a convex block plane synchronization distressed structure, between the convex block plane synchronization distressed structure and the protruding portion of the oscillating plate with
It constitutes and maintains the required certain depth.
10. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms
Structure is the synchronous distressed structure of the curved surface that is constituted of the flow plate and the flex plate, the synchronous distressed structure of the curved surface be it is several not
The curved surface of same curvature is constituted, and is maintained between the synchronous distressed structure of the curved surface of the flex plate and the protruding portion of the oscillating plate
The required certain depth.
11. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms
Structure is the synchronous distressed structure of a curved surface that the flow plate and the flex plate are constituted, and the synchronous distressed structure of the curved surface is several phases
Curved surface with curvature is constituted, and maintains institute between the synchronous distressed structure of the curved surface of the flex plate and the protruding portion of the oscillating plate
The certain depth of demand.
12. fluid control device as described in claim 1, which is characterized in that the synchronization of the deformable base construction deforms
The irregular synchronous distressed structure that structure is constituted for the flow plate and the flex plate, this of the flex plate are irregular same
The required certain depth is maintained between step distressed structure and the protruding portion of the oscillating plate.
13. fluid control device as described in claim 1, which is characterized in that the oscillating plate of the piezoelectric actuator is in pros
Shape, and flexible vibration, and the piezoelectric actuator also includes:
One outline border, around the outside for being set to the oscillating plate；And
An at least bracket is connected between a side of the oscillating plate and the outline border, for resilient support.
14. fluid control device as described in claim 1, which is characterized in that the deformable base construction and the oscillating plate it
Between by a medium engagement positioning, and the medium be an adhesive agent.
15. fluid control device as described in claim 1, which is characterized in that also include a shell, the cover is engaged in the piezoelectricity
Actuator makes to constitute a fluid flowing lumen room between the shell and the piezoelectric actuator, and the shell is equipped at least one discharge
Hole, to be connected to except fluid circulation chamber and the shell.
16. fluid control device as described in claim 1, which is characterized in that the flex plate has a stream hole, and is set to
The center of the movable part or at center, so that fluid passes through.
17. fluid control device as claimed in claim 16, which is characterized in that the flow plate has an at least access aperture, extremely
A few confluence through slot and a confluence opening portion, the access aperture are connected through the flow plate and at least one confluence through slot, and
The other end of the confluence through slot be connected to the confluence opening portion, and the confluence opening portion correspond to the flex plate this is movable
Portion, and be connected to the stream hole of the flex plate.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2013084909A1 (en) * | 2011-12-09 | 2013-06-13 | 株式会社村田製作所 | Gas control apparatus |
| CN104235438A (en) * | 2013-06-24 | 2014-12-24 | 研能科技股份有限公司 | Miniature valve device |
| CN104454472A (en) * | 2013-09-15 | 2015-03-25 | 应璐 | Piezoelectric micropump for injecting insulin |
| WO2016013390A1 (en) * | 2014-07-25 | 2016-01-28 | 株式会社村田製作所 | Fluid control device |
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2016
- 2016-09-05 CN CN201610801655.8A patent/CN107795473B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013084909A1 (en) * | 2011-12-09 | 2013-06-13 | 株式会社村田製作所 | Gas control apparatus |
| CN104235438A (en) * | 2013-06-24 | 2014-12-24 | 研能科技股份有限公司 | Miniature valve device |
| CN104454472A (en) * | 2013-09-15 | 2015-03-25 | 应璐 | Piezoelectric micropump for injecting insulin |
| WO2016013390A1 (en) * | 2014-07-25 | 2016-01-28 | 株式会社村田製作所 | Fluid control device |
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