CN211819871U - Fluid control device - Google Patents

Abstract

A fluid control device, comprising: the piezoelectric actuator is formed by attaching a piezoelectric component to the surface of a vibrating plate, the piezoelectric component deforms under the application of voltage to drive the vibrating plate to vibrate in a bending mode, and the vibrating plate is provided with a protruding portion attached to the other surface of the piezoelectric component; and a deformable base structure formed by stacking and joining a flexible plate and a flow plate, and capable of being synchronously deformed into a synchronous deformation structure; the deformable base structure is correspondingly jointed and positioned with the vibration plate of the piezoelectric actuator, so that a specific depth is defined between the flexible plate and the protrusion part of the vibration plate, and the flexible plate is provided with a movable part which is arranged opposite to the protrusion part.

Description

Fluid control device

Technical Field

The present invention relates to a fluid control device, and more particularly to a fluid control device with a deformable base.

Background

At present, in all fields, no matter the industries such as medicine, computer technology, printing and energy, products are developed towards refinement and miniaturization, wherein fluid conveying structures contained in products such as micropumps, sprayers, ink jet heads and industrial printing devices are key technologies, so that how to break through the technical bottleneck through innovative structures is an important content of development.

Referring to fig. 1A and 1B, fig. 1A is a schematic view of a partial structure of a conventional fluid control device, and fig. 1B is an assembly offset schematic view of a partial structure of a conventional fluid control device. As shown in the figure, the actuating core of the conventional fluid control device 100 mainly includes a substrate 101 and a piezoelectric actuator 102, the substrate 101 and the piezoelectric actuator 102 are stacked, and the substrate 101 and the piezoelectric actuator 102 have a gap 103, wherein the gap 103 needs to maintain a certain depth, and the gap 103 maintains a certain depth, so that when the piezoelectric actuator 102 is actuated by applying a voltage to deform, fluid can be driven to flow in each chamber of the fluid control device 100, thereby achieving the purpose of fluid transmission. However, in the conventional fluid control device 100, in which the piezoelectric actuator 102 and the substrate 101 are both of a flat-plate type integral structure and have a certain rigidity, under the condition that the two integral flat-plate structures are precisely aligned with each other, so that a certain gap 103 is generated between the two plates, i.e. a certain depth is maintained, which has a certain difficulty and is very easy to generate errors, because if any one of the integral flat-plates with certain rigidity is inclined by an angle θ, a displacement value of the relative distance multiplied by the angle θ, such as a displacement d of one, is generated at the relative position, so as to increase d '(as shown in fig. 1B) at a mark line of the certain gap 103 or decrease d' (not shown) otherwise; particularly, as the fluid control apparatus is miniaturized, the size of each component is miniaturized, so that a certain gap 103 is maintained between the two plates, and d 'is not increased or decreased, thereby maintaining a certain depth of the gap 103, which is more and more difficult, and if the certain depth of the gap 103 cannot be maintained, for example, if the gap 103 increases the error of d' displacement, the distance of the gap 103 is too large, thereby the fluid transmission efficiency is not good; on the contrary, if the gap is in the opposite direction so as to reduce the d' displacement (not shown), the distance of the gap 103 is too small, and the piezoelectric actuator 102 is likely to contact and interfere with other components during operation, thereby generating noise, and increasing the fraction defective of the fluid control device.

In other words, since the piezoelectric actuator 102 and the substrate 101 of the conventional fluid control device 100 are both of a flat plate type integral structure with a certain rigidity, it is difficult to achieve the purpose of precise alignment in an integral alignment manner between the two plates, and particularly, the smaller the component size, the more difficult the precise alignment is during assembly, so as to cause the problems of low fluid conveying efficiency and noise generation, which results in inconvenience and discomfort in use.

Therefore, how to develop a miniature fluid transmission device which can improve the defects of the prior art, can make the traditional instrument or equipment adopting the fluid transmission device achieve small volume, miniaturization and silence, and overcome the problem of easy error generation during assembly, thereby achieving the purpose of light, comfortable and portable, is a problem which needs to be solved at present.

SUMMERY OF THE UTILITY MODEL

The present invention is directed to solve the problems of inconvenience and discomfort in the prior art, in which the substrate and the piezoelectric actuator are not easily positioned precisely due to the miniaturized design of the components, and thus the required distance of the gap is difficult to maintain after the assembly, resulting in low efficiency of fluid transportation and noise generation.

To achieve the above object, a broader aspect of the present invention is to provide a fluid control device, including: the piezoelectric actuator is formed by attaching a piezoelectric component to one surface of a vibrating plate, the piezoelectric component deforms by applying voltage to drive the vibrating plate to vibrate in a bending way, and the vibrating plate is provided with a protruding part and is oppositely arranged on the other surface attached to the surface of the piezoelectric component; and a deformable base structure formed by stacking and joining a flexible plate and a circulation plate, and capable of being synchronously deformed into a synchronous deformation structure; the deformable base structure and the vibrating plate of the piezoelectric actuator are correspondingly jointed and positioned so as to define a specific depth between the flexible plate of the deformable base structure and the protrusion part of the vibrating plate, and the flexible plate is provided with a movable part which is arranged relative to the protrusion part of the vibrating plate.

Drawings

Fig. 1A is a schematic partial structure diagram of a conventional fluid control device.

FIG. 1B is a schematic diagram of a partial structure assembly offset of a conventional fluid control device.

Fig. 2A is a schematic front exploded view of a fluid control device according to a preferred embodiment of the present invention.

Fig. 2B is a front assembly view of the fluid control device shown in fig. 2A.

Fig. 3 is a schematic diagram of a back exploded view of the fluid control device shown in fig. 2A.

Fig. 4A is an enlarged sectional view of the fluid control device shown in fig. 2A.

Fig. 4B to 4C are partial operation schematic diagrams of the fluid control apparatus shown in fig. 2A.

Fig. 5A is a schematic diagram of a first implementation of the synchronous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.

Fig. 5B is a schematic diagram of a second embodiment of the synchronous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.

Fig. 5C is a schematic diagram of a third implementation of the synchronous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.

Fig. 5D is a schematic diagram of a fourth implementation manner of the synchronous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.

Fig. 6A is a schematic diagram of a fifth implementation of the synchronous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.

Fig. 6B is a schematic diagram of a sixth implementation of the synchronous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.

Fig. 6C is a schematic diagram of a seventh implementation manner of the synchronous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.

Fig. 6D is a schematic diagram of an eighth implementation manner of the synchronous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.

Fig. 7A is a schematic diagram of a ninth implementation of the synchronous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.

Fig. 7B is a schematic diagram of a tenth implementation of the synchronous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.

Fig. 7C is a schematic diagram of an eleventh implementation of the synchronous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.

Fig. 7D is a schematic diagram of a twelfth implementation manner of the synchronous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the invention.

Fig. 8 is a schematic diagram of a thirteenth implementation mode of the synchronous deformation of the deformable base structure of the fluid control device according to the preferred embodiment of the present invention.

[ notation ] to show

100: conventional fluid control device

101: substrate

102: piezoelectric actuator

103: gap

2: fluid control device

20: deformable base structure

21: flow plate

21 a: exterior surface

21 b: internal surface

210: feed inlet

211: conflux through groove

212: confluence opening part

22: flexible board

22 a: movable part

22 b: fixing part

23: piezoelectric actuator

230: vibrating plate

230 a: second surface

230 b: first surface

230 c: projection part

231: outer frame

232: support frame

233: piezoelectric component

235: voids

241. 242: insulating sheet

25: conductive sheet

26: shell body

26 a: containing space

268: side wall

: a specific depth

h: distance between each other

A: temporary storage chamber

θ: angle of rotation

d. d': displacement of

Detailed Description

Some exemplary embodiments that embody the features and advantages of the present invention will be described in detail in the description of the later sections. It is to be understood that the invention is capable of modification in various respects, all without departing from the scope of the invention, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

The fluid control device 2 of the present invention can be applied to industries such as medical technology, energy, computer technology, printing, etc. for transferring fluid, but not limited thereto. Referring to fig. 2A, fig. 2B, fig. 3 and fig. 4A, fig. 2A is a schematic front exploded view of a fluid control device according to a preferred embodiment of the present invention, fig. 2B is a schematic front assembled view of the fluid control device shown in fig. 2A, fig. 3 is a schematic back exploded view of the fluid control device shown in fig. 2A, and fig. 4A is an enlarged sectional view of the fluid control device shown in fig. 2A. As shown in fig. 2A and 3, the fluid control device 2 of the present invention includes a deformable base structure 20, a piezoelectric actuator 23, insulating sheets 241 and 242, a conductive sheet 25, a housing 26, and the like, wherein the deformable base structure 20 includes a flow plate 21 and a flexible plate 22, but not limited thereto. The piezoelectric actuator 23 is disposed corresponding to the flexible board 22, the piezoelectric actuator 23 is assembled by a vibrating board 230 and a piezoelectric element 233, in the embodiment, the deformable base structure 20, the piezoelectric actuator 23, the insulating sheet 241, the conductive sheet 25, and the other insulating sheet 242 are stacked and accommodated in the housing 26.

Referring to fig. 2A, 2B, 3 and 4A, the flow plate 21 of the fluid control device 2 of the present invention has an inner surface 21B and a corresponding outer surface 21a, as shown in fig. 3, at least one inlet hole 210 is formed on the outer surface 21a, and in the preferred embodiment of the present invention, the number of the inlet holes 210 is 4, but not limited thereto, and the inlet holes penetrate through the outer surface 21a and the inner surface 21B of the flow plate 21, and are mainly used for allowing the fluid to flow from the outside of the device into the fluid control device 2 through the at least one inlet hole 210 under the action of the atmospheric pressure. And as also shown in fig. 2A, seen from the inner surface 21b of the flow plate 21, it has at least one through converging slot 211 for corresponding arrangement with the at least one inlet hole 210 of the outer surface 21a of the flow plate 21. The communication position of the center of the communication slots 211 is provided with a communication opening 212, and the communication opening 212 is communicated with the communication slots 211, so that the fluid entering the communication slots 211 from the at least one inlet hole 210 can be guided and converged to the communication opening 212 for transmission. Therefore, in the preferred embodiment of the present invention, the flow plate 21 has an inlet hole 210, a converging through groove 211 and a converging opening 212 formed integrally, and a converging chamber for converging fluid is correspondingly formed at the converging opening 212 for temporary storage of the fluid. In some embodiments, the material of the flow plate 21 may be, but is not limited to, a stainless steel material. The flexible plate 22 is made of a flexible material, but not limited thereto, and the flexible plate 22 has a flow path hole 220 provided corresponding to the confluence opening 212 of the inner surface 21b of the flow plate 21 so as to allow the fluid to flow downward. In other embodiments, the flexible plate 22 may be made of a copper material, but not limited thereto, the flexible plate 22 has a movable portion 22a and a fixed portion 22b, such that the flexible plate 22 is connected to the flow plate 21, the fixed portion 22b is fixedly connected to the flow plate 21, the movable portion 22a is a portion corresponding to the position of the confluence opening portion 212, and the flow path hole 220 is disposed on the movable portion 22 a.

As shown in fig. 2A, fig. 2B and fig. 3, in the preferred embodiment of the present invention, the piezoelectric actuator 23 includes a piezoelectric element 233, a vibrating plate 230, an outer frame 231 and at least one support 232, in the preferred embodiment of the present invention, the vibrating plate 230 is a flexible square plate-shaped structure and has a first surface 230B and a corresponding second surface 230a, the piezoelectric element 233 is a flexible square plate-shaped structure, and the side length thereof is not greater than the side length of the vibrating plate 230 and can be attached to the first surface 230B of the vibrating plate 230, but not limited thereto, and the piezoelectric element 233 generates a deformation to drive the vibrating plate 230 to vibrate in a bending manner after being applied with a voltage. In the preferred embodiment of the present invention, the second surface 230a of the vibrating plate 230 may further have a protrusion 230c, and the protrusion 230c may be, but not limited to, a circular protrusion; an outer frame 231 is disposed around the outer side of the vibrating plate 230, and the configuration of the outer frame 231 also substantially corresponds to the configuration of the vibrating plate 230, so that the outer frame 231 may also be a square hollow frame structure; the vibrating plate 230 is connected to the outer frame 231 by at least one support 232 and provides elastic support. As shown in fig. 2A and 2B, the housing 26 has at least one discharge hole 261, the housing 26 is not only a single plate structure, but also a frame structure with a side wall 260 at its periphery, and the side wall 260 formed by the periphery and the plate at its bottom define a receiving space 26a for the piezoelectric actuator 23 to be disposed in the receiving space 26a, so that when the fluid control device 2 of the present invention is assembled, its front schematic view is as shown in fig. 2B and 4A, that is, the housing 26 covers the piezoelectric actuator 23 and the deformable base structure 20, and a temporary storage chamber a for fluid flowing is formed between the housing 26 and the piezoelectric actuator 23, and the discharge hole 261 is used for communicating the temporary storage chamber a, so that the fluid flows outside the housing 26.

Referring to fig. 4A to 4C, fig. 4A is a schematic cross-sectional structure view of the fluid control apparatus shown in fig. 2A, and fig. 4B to 4C are schematic partial operation views of the fluid control apparatus shown in fig. 2A. In the present embodiment, in fig. 4A to 4C, the insulation sheet 241, the conductive sheet 25 and the other insulation sheet 242 are illustrated schematically, and the deformable base structure 20 shown in fig. 4A to 4C is in a state before the synchronous deformation is not generated, which are used to illustrate the structures, the corresponding arrangement positions and the operation relationships of the flow plate 21, the flexible plate 22 and the piezoelectric actuator 23 of the deformable base structure 20 of the present invention, and are described in the foregoing.

As shown in fig. 4A, when the flow plate 21, the flexible plate 22 and the piezoelectric actuator 23 are assembled correspondingly, a chamber for collecting fluid can be formed at the flow path hole 220 of the flexible plate 22 and the collecting opening 212 of the flow plate 21, and a space h is provided between the flexible plate 22 and the outer frame 231 of the piezoelectric actuator 23, in some embodiments, the space h can be filled with a medium, for example: the conductive paste, but not limited thereto, is positioned by medium bonding, so that a certain distance, for example, the distance h, can be maintained between the flexible plate 22 and the protrusion 230c of the vibration plate 230 of the piezoelectric actuator 23, and a specific depth can be formed between the flexible plate 22 and the protrusion 230c of the vibration plate 230 of the piezoelectric actuator 23, and further, when the vibration plate 230 of the piezoelectric actuator 23 vibrates, the fluid can be compressed (i.e., the specific depth is reduced), and the pressure and the flow rate of the fluid are increased; in addition, the specific depth is a proper distance for reducing the contact interference between the flexible board 22 and the piezoelectric actuator 23, so as to reduce the problem of noise generation; and a chamber having a predetermined depth between the flexible plate 22 and the protrusion 230c of the vibrating plate 230 of the piezoelectric actuator 23 communicates with a chamber in which the fluid is converged at the confluence opening 212 of the circulation plate 21 through the flow path hole 220 of the flexible plate 22.

When the fluid control device 2 is operated, the piezoelectric actuator 23 is actuated by an applied voltage to perform reciprocating vibration in the vertical direction. As shown in fig. 4B, when the piezoelectric actuator 23 is actuated by an applied voltage to vibrate upward, because the flexible plate 22 is a light and thin sheet-like structure, when the piezoelectric actuator 23 vibrates, the flexible plate 22 also resonates to perform a reciprocating vibration in a vertical direction, that is, a portion of the movable portion 22a of the flexible plate 22 also deforms along with the bending vibration, and the flow path hole 220 is disposed at or near the center of the flexible plate 22, so when the piezoelectric actuator 23 vibrates upward, the movable portion 22a of the flexible plate 22 is driven by the upward vibration of the piezoelectric actuator 23 to bring and push a fluid upward to vibrate upward, and the fluid enters from at least one inlet hole 210 on the flow plate 21, passes through at least one bus groove 211 to be collected at the bus opening 212 at the center, and then flows upward through the flow path hole 220 disposed on the flexible plate 22 corresponding to the bus opening 212 to the flexible plate 22 and the protrusion of the vibrating plate 230 of the piezoelectric actuator 23 230c, the volume of the chamber formed by the specific depth between the flexible plate 22 and the protrusion 230c of the vibration plate 230 of the piezoelectric actuator 23 is compressed by the deformation of the flexible plate 22, and the compressed kinetic energy of the middle flow space of the chamber is enhanced, so that the fluid in the chamber is pushed to flow towards both sides, and further passes through the gap between the vibration plate 230 and the support 232 and flows upwards.

As shown in fig. 4C, when the piezoelectric actuator 23 vibrates downwards, the movable portion 22a of the flexible plate 22 also resonates and bends downwards to vibrate and deform, the fluid is less collected to the central collecting opening 212, and the piezoelectric actuator 23 also vibrates downwards, and the fluid is displaced to the bottom of the chamber formed by the specific depth between the flexible plate 22 and the piezoelectric actuator 23 to increase the compressible volume of the chamber, so that the implementation shown in fig. 4B is repeated, and the compressed space of the intermediate chamber flowing space formed by the specific depth between the flexible plate 22 and the protruding portion 230C of the vibrating plate 230 of the piezoelectric actuator 23 can be increased, so as to achieve a larger fluid suction amount and a larger fluid discharge amount.

In the preferred embodiment of the present invention, as mentioned above, the deformable base structure 20 is composed of the flow plate 21 and the flexible plate 22, wherein the flow plate 21 and the flexible plate 22 are stacked on each other, and both the flow plate 21 and the flexible plate 22 are deformed synchronously to form a synchronous deformation structure. Furthermore, the synchronous deformation structure is formed by synchronous deformation areas of the flow plate 21 and the flexible plate 22, when any one of the two deforms, the other one deforms along with the deformation, and the deformed shapes of the two are consistent, that is, the corresponding surfaces of the two are mutually jointed and positioned without any gap or parallel dislocation, for example, when the flow plate 21 of the deformable base structure 20 deforms, the flexible plate 22 also deforms identically; similarly, when the flexible plate 22 of the deformable base structure 20 is deformed, the flow plate 21 is also deformed similarly. In some embodiments, the flow-through plate 21 and the flexible plate 22 are bonded and positioned with an adhesive, but not limited thereto. In addition, as described in the above conventional art and shown in fig. 1B, in the conventional fluid control device 100, in which the piezoelectric actuator 102 and the substrate 103 are both of a flat-plate type integral structure and have a certain rigidity, in this condition, it is difficult to maintain a certain depth required by precisely aligning the two integral flat-plate structures and maintaining a certain gap between the two plates, which is very easy to cause errors, which causes various problems. Therefore, various preferred embodiments of the present invention utilize a deformable base structure 20, i.e. the synchronous deformation of the aforementioned flow plate 21 and flexible plate 22, to form a synchronous deformation structure, which is equivalent to the substrate 101 of the prior art, but the flow plate 21 and flexible plate 22 of the synchronous deformation structure have various different embodiments defined in the present invention, and the various specific synchronous deformation structures can be kept within a required specific gap (i.e. a chamber formed by a specific depth) with the vibrating plate 230 of the corresponding piezoelectric actuator 23, so that even when the fluid control device 2 is miniaturized, the size of each component is miniaturized, and it is easy to maintain a certain gap between the two through the synchronous deformation structure, because the non-flat plate-shaped synchronous deformation structure (no matter the deformation is in the shape of curve, cone, various curved surfaces, irregular shapes and the like) with the reduced alignment area is aligned with a flat plate, instead of aligning two large-area flat plates, a non-flat plate-shaped small area is aligned with a large-area flat plate, the gap error between the two flat plates can be easily reduced, and the problems of low efficiency and noise of fluid conveying are solved, so that the conventional problems of inconvenience and discomfort in use are solved.

In some embodiments, the deformable base structure 20 is a synchronous deformation structure formed by synchronously deforming the flow plate 21 and the flexible plate 22, that is, the synchronous deformation region of the deformable base structure 20 can be the region in the movable portion 22a and the other region beyond the movable portion 22a, and the synchronous deformation structure formed by the deformable base structure 20 can be a bending structure, a conical structure or a bump planar structure, but not limited thereto.

As shown in fig. 5A and 5C, in the first and third embodiments, the deformable base structure 20 is a bending synchronous deformation structure composed of the flow plate 21 and the flexible plate 11, that is, the synchronous deformation region of the deformable base structure 20 is in the region of the movable portion 22a and in the other region beyond the movable portion 22a, that is, the synchronous deformation structures of both embodiments are a bending synchronous deformation structure, but only the directions of the bending synchronous deformation of both embodiments are different. In the first embodiment shown in fig. 5A, the bending-synchronized deformation is performed in such a manner that the outer surface 21a of the flow plate 21 of the deformable base structure 10 is bent and deformed in the direction close to the protrusion 230c of the diaphragm 230, and the region of the movable portion 22a of the flexible plate 22 and the other region beyond the movable portion 22a are also bent and deformed in the direction close to the protrusion 230c of the diaphragm 230, thereby forming the bending-synchronized deformation structure of the deformable base structure 20; in the third embodiment shown in fig. 5C, the bending-synchronized deformation is performed such that the outer surface 21a of the flow plate 21 of the deformable base structure 10 is bent and deformed in a direction away from the protrusion 230C of the diaphragm 230, and the region of the movable portion 22a of the flexible plate 22 and the other region beyond the movable portion 22a are also bent and deformed in a direction away from the protrusion 230C of the diaphragm 230, so as to form the bending-synchronized deformation structure of the deformable base structure 20; therefore, in the first and third embodiments, the distance between the flexible plate 22 constituting the deformable base structure 20 and the protrusion 230c of the vibrating plate 230 can be kept within the range of the required specific depth, that is, the distance between the area of the movable portion 22a of the flexible plate 22 and the protrusion 230c of the vibrating plate 230 can be kept within the range of the required specific depth, and the flow plate 21 and the flexible plate 22 constituting the deformable base structure 20 in the two embodiments constitute the fluid control device 2 having the bending synchronous deformation structure.

As shown in fig. 6A and 6C, in the fifth and seventh embodiments, the deformable base structure 20 is a cone-shaped synchronous deformation structure composed of the flow plate 21 and the flexible plate 22, that is, the synchronous deformation region of the deformable base structure 20 is in the region of the movable portion 22a and in the other region beyond the movable portion 22a, that is, the synchronous deformation structures of both embodiments are cone-shaped synchronous deformation structures, but only the directions of the cone-shaped synchronous deformation of both embodiments are different. In the fifth embodiment shown in fig. 6A, the tapered synchronous deformation is performed in such a manner that the outer surface 21a of the flow plate 21 of the deformable base structure 10 is tapered toward the protrusion 230c of the diaphragm 230, and the region of the movable portion 22a of the flexible plate 22 and the other region beyond the movable portion 22a are tapered toward the protrusion 230c of the diaphragm 230, so as to form the tapered synchronous deformation structure of the deformable base structure 20; in the seventh embodiment shown in fig. 6C, the tapered synchronous deformation is performed such that the outer surface 21a of the flow plate 21 of the deformable base structure 10 is tapered toward the direction away from the protrusion 230C of the diaphragm 230, and the region of the movable portion 22a of the flexible plate 22 and the other region beyond the movable portion 22a are also tapered toward the direction away from the protrusion 230C of the diaphragm 230, so as to form the tapered synchronous deformation structure of the deformable base structure 20; therefore, in the fifth embodiment and the seventh embodiment, the distance between the flexible plate 22 constituting the deformable base structure 20 and the protrusion 230c of the vibrating plate 230 can be maintained within the range of the required specific depth, that is, the distance between the area of the movable portion 22a of the flexible plate 22 and the protrusion 230c of the vibrating plate 230 is maintained within the range of the required specific depth, so that the fluid control device 2 having the tapered synchronous deformation structure constituted by the flow plate 21 and the flexible plate 22 having the deformable base structure 20 in the two embodiments is configured.

As shown in fig. 7A and 7C, in the ninth and eleventh embodiments, the deformable base structure 20 is a bump-plane synchronous deformation structure composed of the flow plate 21 and the flexible plate 22, that is, the synchronous deformation region of the deformable base structure 20 is in the region of the movable portion 22a and in the other region beyond the movable portion 22a, that is, the synchronous deformation structures of both embodiments are a bump-plane synchronous deformation structure, but only the directions of the bump-plane synchronous deformation of both embodiments are different. In the ninth embodiment shown in fig. 7A, the bump-plane-synchronous deformation is performed in such a manner that the outer surface 21a of the flow plate 21 of the deformable base structure 10 is subjected to bump-plane deformation in the direction toward the protrusion 230c of the diaphragm 230 in the region of the movable portion 22a and the region beyond the movable portion 22a, and the region of the movable portion 22a of the flexible plate 22 and the region beyond the movable portion 22a are also subjected to bump-plane deformation in the direction toward the protrusion 230c of the diaphragm 230, thereby forming a tapered synchronous deformation structure of the deformable base structure 20; in the eleventh embodiment shown in fig. 7C, the bump-plane-synchronous deformation is performed by performing bump-plane-synchronous deformation on the outer surface 21a of the flow plate 21 of the deformable base structure 10 in the direction away from the protrusion 230C of the vibrating plate 230, and simultaneously performing bump-plane-synchronous deformation on the area of the movable portion 22a of the flexible plate 22 and the other area beyond the movable portion 22a in the direction away from the protrusion 230C of the vibrating plate 230, so as to form a bump-plane-synchronous deformation structure of the deformable base structure 20; therefore, in the ninth embodiment and the eleventh embodiment, the distance between the flexible plate 22 constituting the deformable base structure 20 and the protrusion 230c of the vibrating plate 230 can be kept within the required range of the specific depth, that is, the distance between the area of the movable portion 22a of the flexible plate 22 and the protrusion 230c of the vibrating plate 230 can be kept within the required range of the specific depth, so that the fluid control device 2 having the bump plane synchronous deformation structure constituted by the flow plate 21 and the flexible plate 22 having the deformable base structure 20 in the two embodiments is constituted.

As mentioned above, in other embodiments, the deformable base structure 20 may also be a synchronous deformation structure formed by only partially synchronously deforming the flow plate 21 and the flexible plate 22, that is, the synchronous deformation region of the deformable base structure 20 is only in the region of the movable portion 22a of the flexible plate 22, and the synchronous deformation structure formed by the deformable base structure 20 may also be a bending structure, a conical structure, or a bump planar structure, but not limited thereto.

As shown in fig. 5B and 5D, in the second and fourth embodiments, the deformable base structure 20 is a bending synchronous deformation structure formed by only partially synchronously deforming the flow plate 21 and the flexible plate 22, that is, the synchronous deformation region of the deformable base structure 20 is in the region of the movable portion 22a, that is, the synchronous deformation structure of both embodiments is a bending synchronous deformation structure, but the bending synchronous deformation is only partially bending synchronous deformation, and the difference between the two embodiments is only that the direction of the partially bending synchronous deformation is different. In the second embodiment shown in fig. 5B, the outer surface 21a of the flow plate 21 of the deformable base structure 10 is bent toward the protrusion 230c of the vibrating plate 230 in the area corresponding to the movable portion 22a at the bus opening 212, and the movable portion 22a of the flexible plate 22 is also bent toward the protrusion 230c of the vibrating plate 230, so as to achieve the structure of the deformable base structure 20 with the partially bent and deformed synchronously; in the fourth embodiment shown in fig. 5D, the partial bending synchronous deformation is performed such that the area of the outer surface 21a of the flow plate 21 of the deformable base structure 10 corresponding to the movable portion 22a of the bus opening 212 is bent and deformed in a direction away from the vibrating plate 230, and the area of the movable portion 22a of the flexible plate 22 is also bent and deformed in a direction away from the protrusion 230c of the vibrating plate 230, so as to form the partial bending synchronous deformation structure of the deformable base structure 20; therefore, in the second and fourth embodiments, the area of the movable portion 22a of the flexible plate 22 constituting the deformable base structure 20 and the protrusion 230c of the vibrating plate 230 can be maintained within the range of the required specific depth, that is, the area of the movable portion 22a of the flexible plate 22 and the protrusion 230c of the vibrating plate 230 can be maintained within the range of the required specific depth, thereby constituting the fluid control device 2 having the structure in which the flow plate 21 and the flexible plate 22 constituting the deformable base structure 20 and the structure in which the flexible plate 22 partly synchronously deform by bending.

As shown in fig. 6B and 6D, in the sixth and eighth embodiments, the deformable base structure 20 is a cone-shaped synchronous deformation structure formed by only partially synchronously deforming the flow plate 21 and the flexible plate 22, that is, the synchronous deformation region of the deformable base structure 20 is in the region of the movable portion 22a, that is, the synchronous deformation structure of both embodiments is a cone-shaped synchronous deformation structure, but the cone-shaped synchronous deformation is only partially cone-shaped synchronous deformation, and the difference between the two embodiments is only that the direction of the partial cone-shaped synchronous deformation is different. In the sixth embodiment shown in fig. 6B, the partial cone synchronous deformation is performed in such a manner that the area of the movable portion 22a of the flow plate 21 of the deformable base structure 10 corresponding to the bus opening 212 is deformed in a cone shape toward the protrusion 230c of the vibrating plate 230, and the area of the movable portion 22a of the flexible plate 22 is deformed in a cone shape toward the protrusion 230c of the vibrating plate 230, so as to achieve the partial cone synchronous deformation of the deformable base structure 20; in the eighth embodiment shown in fig. 6D, the partial cone-shaped synchronous deformation is performed such that the area of the outer surface 21a of the flow plate 21 of the deformable base structure 10 corresponding to the movable portion 22a of the bus opening 212 is deformed in a cone shape in a direction away from the protrusion 230c of the diaphragm 230, and the area of the movable portion 22a of the flexible plate 22 is deformed in a cone shape in a direction away from the protrusion 230c of the diaphragm 230, so as to form the partial cone-shaped synchronous deformation structure of the deformable base structure 20; therefore, in the sixth embodiment and the eighth embodiment, the area between the movable portion 22a of the flexible plate 22 and the protrusion 230c of the vibrating plate 230 constituting the deformable base structure 20 can be maintained within the range of the required specific depth, that is, the area between the movable portion 22a of the flexible plate 22 and the protrusion 230c of the vibrating plate 230 can be maintained within the range of the required specific depth, thereby constituting the fluid control device 2 having the structure in which the flow plate 21 and the flexible plate 22 of the deformable base structure 20 constitute the partial cone-shaped synchronous deformation structure in the two embodiments.

As shown in fig. 7B and 7D, in the tenth and twelfth embodiments, the deformable base structure 20 is a partial bump plane synchronous deformation structure formed by only partially synchronously deforming the circulation plate 21 and the flexible plate 22, that is, the synchronous deformation region of the deformable base structure 20 is also only the region of the movable portion 22a, that is, the synchronous deformation structure of both embodiments is a bump plane synchronous deformation structure, but the bump plane synchronous deformation is only partially bump plane synchronous, and the difference between the two embodiments is only the direction of the partial bump plane synchronous deformation. In the tenth embodiment shown in fig. 7B, the partial bump plane synchronous deformation is performed in such a manner that the area of the movable portion 22a of the outer surface 21a of the flow plate 21 of the deformable base structure 10 corresponding to the bus opening 212 is bump plane-deformed in the direction close to the protrusion 230c of the diaphragm 230, and the area of the movable portion 22a of the flexible plate 22 is also bump plane-deformed in the direction close to the protrusion 230c of the diaphragm 230, so as to constitute the partial bump plane synchronous deformation structure of the deformable base structure 20; in the twelfth embodiment shown in fig. 7D, the partial bump plane synchronous deformation is performed such that the area of the outer surface 21a of the flow plate 21 of the deformable base structure 10 corresponding to the movable portion 22a of the bus opening 212 is bump plane deformed in the direction away from the protrusion 230c of the vibrating plate 230, and the area of the movable portion 22a of the flexible plate 22 is also bump plane deformed in the direction away from the protrusion 230c of the vibrating plate 230, so as to form the partial bump plane synchronous deformation structure of the deformable base structure 20; therefore, in the tenth embodiment and the twelfth embodiment, the area between the movable portion 22a of the flexible plate 22 and the protrusion 230c of the vibrating plate 230 constituting the deformable base structure 20 can be maintained within the range of the required specific depth, that is, the chamber between the area of the movable portion 22a of the flexible plate 22 and the protrusion 230c of the vibrating plate 230 is maintained within the range of the required specific depth, thereby constituting the fluid control device 2 having the structure in which the flow plate 21 and the flexible plate 222 of the deformable base structure 20 constitute part of the bump plane synchronous deformation structure in the two embodiments.

As mentioned above, in some embodiments, the surfaces of the flow-through plate 21 and the flexible plate 22 of the deformable base structure 20 may also form a curved surface synchronous deformation structure, which is formed by a plurality of curved surfaces with different curvatures, or may also be formed by curved surfaces with the same curvature, referring to the thirteenth embodiment of fig. 8, wherein the curved surface synchronous deformation is performed by generating a curved surface synchronous deformation formed by a plurality of curved surfaces with different curvatures on the outer surface 21a of the flow-through plate 21 of the deformable base structure 20, and the flexible plate 22 is also a curved surface with a plurality of curved surfaces with different curvatures simultaneously, so as to form the curved surface synchronous deformation structure of the deformable base structure 20, however, the manner of the curved surface synchronous deformation is not limited thereto, and may also be a curved surface synchronous deformation formed by a plurality of curved surfaces with different curvatures on the surface of the flexible plate 22, so that the flow plate 21 generates corresponding curved surface synchronous deformation and forms a curved surface synchronous deformation structure of the deformation base structure 20 together; thereby, the curved surface synchronous deformation structure of the deformable base structure 20 and the protrusion 230c of the vibrating plate 230 can be maintained within a desired range of a specific depth, and the fluid control device 2 having the curved surface synchronous deformation structure of the flow plate 21 and the flexible plate 22 of the deformable base structure 20 is configured.

In other embodiments, the synchronous deformation structure formed by the flow plate 21 and the flexible plate 22 of the deformable base structure 20 is not necessarily a regular synchronous deformation structure, but may also be an irregular synchronous deformation structure, that is, an irregular synchronous deformation is formed on the surface of the flow plate 21 or the flexible plate 22 of the deformable base structure 20, so that the flow plate 21 and the flexible plate 22 correspondingly form an irregular synchronous deformation structure, but not limited thereto. And a desired specific depth can be maintained between the irregularly shaped synchronous deformation structure of the flexible board 22 and the protrusion 230c of the vibration plate 230.

By means of the above-mentioned various implementation modes such as the curved structure, the tapered structure, the bump planar structure, the curved structure or the irregular structure, the distance between the movable portion 22a of the deformable base structure 20 and the protrusion 230c of the vibrating plate 230 can be maintained within a required specific depth range, and by limiting the specific depth range, it is possible to avoid the problems of the fluid control device 2, such as too large or too small gap caused by an error during assembly, and the contact interference between the protrusion 230c of the vibrating plate 230 and the flexible plate 22, which may result in poor fluid transmission efficiency and noise generation.

To sum up, the fluid control device of the present invention is a synchronous deformation structure composed of a flow plate and a flexible plate of a deformable base structure, wherein the synchronous deformation structure can be a structure that the orientation of the synchronous deformation structure is close to or away from the piezoelectric actuator, so that the flexible plate of the deformable base structure and the protruding portion of the vibrating plate can be maintained and adjusted within a required range of a specific depth, and further the contact interference between the flexible plate and the protruding portion of the vibrating plate can be reduced, thereby improving the efficiency of fluid transmission and achieving the effect of reducing noise. Therefore, the utility model discloses a fluid control device is through the flexible base structure that can warp in step, and then adjustable, the required specific degree of depth of correction to reach fluid control device's best fluid transmission efficiency, noise reduction, still can reduce the defective rate of product simultaneously, promote fluid control device's quality.

The present invention may be modified in various ways by those skilled in the art without departing from the scope of protection as defined by the appended claims.

Claims (17)

1. A fluid control device, comprising:

the piezoelectric actuator is formed by attaching a piezoelectric component to one surface of a vibrating plate, the piezoelectric component deforms by applying voltage to drive the vibrating plate to vibrate in a bending way, and the vibrating plate is provided with a protruding part and is oppositely arranged on the other surface attached to the surface of the piezoelectric component; and

a deformable base structure formed by stacking and joining a flexible plate and a circulation plate, and capable of being synchronously deformed into a synchronous deformation structure;

the deformable base structure and the vibrating plate of the piezoelectric actuator are correspondingly jointed and positioned so as to define a depth between the flexible plate of the deformable base structure and the protruding part of the vibrating plate, the flexible plate is provided with a movable part which is arranged relative to the protruding part of the vibrating plate, and the flexible plate is in a flat plate shape.

2. The fluid control device according to claim 1, wherein a synchronous deformation region of the synchronous deformation structure of the deformable base structure is a region of the movable portion of the flexible plate between the synchronous deformation structure and the protrusion of the vibration plate to form the depth required for maintenance.

3. The fluid control device according to claim 1, wherein a synchronous deformation region of the synchronous deformation structure of the deformable base structure is a region of the movable portion of the flexible plate, and the synchronous deformation structure is a bending synchronous deformation structure between the bending synchronous deformation structure and the protrusion of the vibration plate to constitute the depth required for maintenance.

4. The fluid control device according to claim 1, wherein a synchronous deformation region of the synchronous deformation structure of the deformable base structure is a region of the movable portion of the flexible plate, and the synchronous deformation structure is a cone-shaped synchronous deformation structure between the cone-shaped synchronous deformation structure and the protrusion of the vibration plate to form the depth required for maintaining.

5. The fluid control device according to claim 1, wherein a synchronous deformation region of the synchronous deformation structure of the deformable base structure is a region of the movable portion of the flexible plate, and the synchronous deformation structure is a bump planar synchronous deformation structure formed between the bump planar synchronous deformation structure and the protrusion of the vibration plate to maintain the desired depth.

6. The fluid control device according to claim 1, wherein a synchronous deformation region of the synchronous deformation structure of the deformable base structure is a region at and beyond the movable portion of the flexible plate, the synchronous deformation structure and the protrusion of the vibration plate being configured to maintain the desired depth therebetween.

7. The fluid control device according to claim 1, wherein a synchronous deformation region of the synchronous deformation structure of the deformable base structure is a region at and beyond the movable portion of the flexible plate, and the synchronous deformation structure is a bending synchronous deformation structure between the bending synchronous deformation structure and the protrusion of the vibration plate to constitute the depth required for maintenance.

8. The fluid control device according to claim 1, wherein a synchronous deformation region of the synchronous deformation structure of the deformable base structure is a region at and beyond the movable portion of the flexible plate, and the synchronous deformation structure is a cone-shaped synchronous deformation structure between the cone-shaped synchronous deformation structure and the protrusion of the vibration plate to constitute the depth required for maintenance.

9. The fluid control device according to claim 1, wherein a synchronous deformation region of the synchronous deformation structure of the deformable base structure is a region at and beyond the movable portion of the flexible plate, and the synchronous deformation structure is a bump planar synchronous deformation structure between the bump planar synchronous deformation structure and the protrusion of the vibration plate to form the depth required for maintenance.

10. The fluid control device according to claim 1, wherein the synchronous deformation structure of the deformable base structure is a curved synchronous deformation structure formed by the flow plate and the flexible plate, the curved synchronous deformation structure is formed by a plurality of curved surfaces with different curvatures, and the required depth is maintained between the curved synchronous deformation structure of the flexible plate and the protrusion of the vibration plate.

11. The fluid control device according to claim 1, wherein the synchronous deformation structure of the deformable base structure is a curved synchronous deformation structure formed by the flow plate and the flexible plate, the curved synchronous deformation structure is formed by a plurality of curved surfaces with the same curvature, and the required depth is maintained between the curved synchronous deformation structure of the flexible plate and the protrusion of the vibration plate.

12. The fluid control device according to claim 1, wherein the synchronous deformation structure of the deformable base structure is an irregular synchronous deformation structure of the flow plate and the flexible plate, and the required depth is maintained between the irregular synchronous deformation structure of the flexible plate and the protrusion of the vibration plate.

13. The fluid control device according to claim 1, wherein the vibration plate of the piezoelectric actuator has a square shape and is configured to vibrate in a bending manner, and the piezoelectric actuator further comprises:

the outer frame is arranged around the outer side of the vibrating plate; and

at least one support connected between one side of the vibrating plate and the outer frame for elastic support.

14. The fluid control device according to claim 1, wherein the deformable base structure is positioned in engagement with the vibrating plate by a medium, and the medium is an adhesive.

15. The fluid control device according to claim 1, further comprising a housing, wherein the cover is coupled to the piezoelectric actuator such that a fluid communication chamber is defined between the housing and the piezoelectric actuator, and wherein the housing is provided with at least one exhaust hole for communicating the fluid communication chamber with an outside of the housing.

16. The fluid control device according to claim 1, wherein the flexible plate has a flow path hole and is disposed at or near a center of the movable portion for passing the fluid therethrough.

17. The fluid control device according to claim 1, wherein the flow plate has at least one inlet hole penetrating the flow plate and communicating with the at least one communicating groove, at least one communicating groove having another end communicating with the communicating groove, and a communicating opening corresponding to the movable portion of the flexible plate and communicating with the flow passage hole of the flexible plate.

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