CN107795473A - Fluid control device - Google Patents
Fluid control device Download PDFInfo
- Publication number
- CN107795473A CN107795473A CN201610801655.8A CN201610801655A CN107795473A CN 107795473 A CN107795473 A CN 107795473A CN 201610801655 A CN201610801655 A CN 201610801655A CN 107795473 A CN107795473 A CN 107795473A
- Authority
- CN
- China
- Prior art keywords
- plate
- control device
- fluid control
- base construction
- protuberance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 109
- 238000009411 base construction Methods 0.000 claims abstract description 102
- 230000001360 synchronised effect Effects 0.000 claims abstract description 61
- 239000012190 activator Substances 0.000 claims abstract description 47
- 238000005452 bending Methods 0.000 claims description 19
- 230000001788 irregular Effects 0.000 claims description 8
- 239000000853 adhesive Substances 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 claims 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 abstract description 6
- 238000010586 diagram Methods 0.000 description 21
- 239000000758 substrate Substances 0.000 description 9
- 230000005540 biological transmission Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000000354 decomposition reaction Methods 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 230000000717 retained effect Effects 0.000 description 4
- 230000004308 accommodation Effects 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 241000276425 Xiphophorus maculatus Species 0.000 description 2
- 230000003321 amplification Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
A kind of fluid control device, comprising：Piezo-activator and deformable pedestal, the surface that piezo-activator is attached at oscillating plate by piezoelectric element are formed, and for piezoelectric element by voltage and deformation is applied to drive oscillating plate flexural vibrations, oscillating plate has protuberance, and it attaches another surface of piezoelectric element；And deformable base construction, it is made up of flex plate and the mutual storehouse engagement of flow plate, and can synchronize and be deformed into synchronous distressed structure；Wherein, deformable base construction engagement positioning corresponding with the oscillating plate of piezo-activator, makes to define a certain depth between flex plate and the protuberance of oscillating plate, and flex plate has movable part, and it is set relative to protuberance.
Description
Technical field
The present invention is on a kind of fluid control device, espespecially a kind of fluid control device with deformable pedestal.
Background technology
Either medicine, computer science and technology, printing and the industry such as energy in each field at present, product towards sophistication and
Microminiaturization direction is developed, the fluid conveying knot that wherein product such as micropump, sprayer, ink gun and industrial printing devices is included
Structure is its key technology, therefore, how by innovation structure its technical bottleneck is broken through, for the important content of development.
Refer to shown in Figure 1A and Figure 1B, Figure 1A is the part-structure schematic diagram of known fluid control device, and Figure 1B is habit
Know the part-structure assembling deviation schematic diagram of fluid control device.As illustrated, known fluid control device 100 makees kinetonucleus
The heart mainly includes substrate 101 and piezo-activator 102, and substrate 101 is that storehouse is set with piezo-activator 102, and substrate 101 with
Piezo-activator 102 has a gap 103, wherein, the gap 103 need to keep certain depth, remain certain by this gap 103
Depth, when piezo-activator 102 is activated by application voltage produces deformation, then fluid can be driven in fluid control device 100
Each chamber indoor moveable, use reach fluid transmission purpose.However, in this known fluid control device 100, wherein pressing
Electric actuator 102 and substrate 101 are flat overall structure, and have certain rigidity, on this condition, make this two
Individual entirety is that flat structure precisely aligns each other, to cause to produce with certain gap 103 between two flat board, that is, is tieed up
Certain depth is held, there can be certain degree of difficulty, is easy to produce error, because the certain rigid entirety of any of the above-described tool is put down
Plate, an angle, θ is tilted if any any side, then can produce the shift value that relative distance is multiplied by the angle, θ in relative position,
Such as ㄧ displacement d, and cause to increase d ' (as shown in Figure 1B) at the graticule in certain gap 103, or vice versa reduce d ' and (do not scheme
Show)；Particularly when fluid control device is towards the development of microminiaturization, the size of each component designs towards microminiaturization to be carried out, and is made
Obtain and be intended between two flat board maintain with certain gap 103, without increasing or decreasing d ', and then keep the certain of gap 103
Depth, its degree of difficulty more and more higher, and if the certain depth in gap 103 can not be kept, such as gap 103 is the above-mentioned d ' of increase
It is during the error of displacement, the distance for causing the gap 103 is excessive, and then make it that fluid efficiency of transmission is bad；Conversely, if gap is
In opposite direction so that reducing an above-mentioned d ' displacements (not shown), then make it that the distance in gap 103 is too small, and then piezoelectric actuated
The problem of interference is easily contacted during 102 start of device with other assemblies, and produces noise, and cause the fraction defective of fluid control device with
Lifting.
In other words, because the piezo-activator 102 and substrate 101 of known fluid control device 100 are with certain
Rigid flat overall structure, both are intended to, with overall alignment mode, to reach the purpose precisely aligned and shown for difficulty between flat board, especially
It more becomes small in size of components, is more difficult to exactitude position during assembling, and then the efficiency for conveying fluid is low and produces noise
Problem, cause using upper not convenient and uncomfortable.
Therefore, above-mentioned known techniques missing can be improved by how developing one kind, can make the instrument of conventionally employed fluid conveying device
Device or equipment reach small volume, miniaturization and Jing Yin, and the problem of be also easy to produce error when overcoming assembling, and then reach light comfortable
Portable purpose minisize fluid transmitting device, actually at present it is in the urgent need to address the problem of.
The content of the invention
It is a primary object of the present invention to solve in known fluid control device, substrate is with piezo-activator because component is micro-
The design of smallization, it is not easy to be precisely located when assembling and produces error, the demand for making it be difficult to maintain its gap after assembling
Distance, and then the efficiency that causes fluid to convey is low and the problem of produce noise, causes using upper not convenient and uncomfortable
Problem.
For the above-mentioned purpose, a broader pattern of implementing of the invention is to provide a kind of fluid control device, comprising：One pressure
Electric actuator, the surface that an oscillating plate is attached at by a piezoelectric element are formed, piezoelectric element deformation by application voltage
To drive the oscillating plate flexural vibrations, the oscillating plate has a protuberance, and it is relatively arranged on and attaches the piezoelectric element
Another surface on the surface；And a deformable base construction, it is made up of a flex plate and the mutual storehouse engagement of a flow plate,
And it can synchronously be deformed into a synchronous distressed structure；Wherein, oscillating plate phase of the deformable base construction and the piezo-activator
Corresponding engagement positioning, so that it is special that one is defined between the flex plate of the deformable base construction and the protuberance of the oscillating plate
Depthkeeping degree, and the flex plate have a movable part, and it is set relative to the protuberance of the oscillating plate.
Brief description of the drawings
Figure 1A is the part-structure schematic diagram of known fluid control device.
Figure 1B is the part-structure assembling deviation schematic diagram of known fluid control device.
Fig. 2A is the positive decomposition texture schematic diagram of the fluid control device of present pre-ferred embodiments.
Fig. 2 B are the positive combination structural representation of the fluid control device shown in Fig. 2A.
Fig. 3 is the back side decomposition texture schematic diagram of the fluid control device shown in Fig. 2A.
Fig. 4 A are the amplification profile structural representation of the fluid control device shown in Fig. 2A.
Fig. 4 B to Fig. 4 C are the local illustrative view of the fluid control device shown in Fig. 2A.
Fig. 5 A are the first reality that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronously deforms
Apply aspect schematic diagram.
Fig. 5 B are the second reality that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronously deforms
Apply aspect schematic diagram.
Fig. 5 C are the 3rd reality that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronously deforms
Apply aspect schematic diagram.
Fig. 5 D are the 4th reality that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronously deforms
Apply aspect schematic diagram.
Fig. 6 A are the 5th reality that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronously deforms
Apply aspect schematic diagram.
Fig. 6 B are the 6th reality that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronously deforms
Apply aspect schematic diagram.
Fig. 6 C are the 7th reality that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronously deforms
Apply aspect schematic diagram.
Fig. 6 D are the 8th reality that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronously deforms
Apply aspect schematic diagram.
Fig. 7 A are the 9th reality that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronously deforms
Apply aspect schematic diagram.
Fig. 7 B are the tenth reality that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronously deforms
Apply aspect schematic diagram.
Fig. 7 C are the 11st that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronously deforms
Embodiment aspect schematic diagram.
Fig. 7 D are the 12nd that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronously deforms
Embodiment aspect schematic diagram.
Fig. 8 is the 13rd reality that the deformable base construction of the fluid control device of present pre-ferred embodiments synchronously deforms
Apply aspect schematic diagram.
【Symbol description】
100：Known fluid control device
101：Substrate
102：Piezo-activator
103：Gap
2：Fluid control device
20：Deformable base construction
21：Flow plate
21a：Outer surface
21b：Interior surface
210：Access aperture
211：Conflux groove
212：Conflux opening portion
22：Flex plate
22a：Movable part
22b：Fixed part
23：Piezo-activator
230：Oscillating plate
230a：Second surface
230b：First surface
230c：Protuberance
231：Housing
232：Support
233：Piezoelectric element
235：Space
241、242：Insulating trip
25：Conducting strip
26：Housing
26a：Accommodation space
268：Side wall
δ：Certain depth
h：Spacing
A：Temporary chamber
θ：Angle
d、d’：Displacement
Embodiment
Embodying some exemplary embodiments of feature of present invention and advantage will describe in detail in the explanation of back segment.It should be understood that
It is that the present invention can have various changes in different aspects, it is neither departed from the scope of the present invention, and explanation therein
And accompanying drawing inherently is illustrated as being used, and nand architecture is in the limitation present invention.
The fluid control device 2 of the present invention can be applied to the industry such as the raw skill of medicine, the energy, computer science and technology or printing, with
To transmit fluid, but it is not limited.Refer to Fig. 2A, Fig. 2 B, shown in Fig. 3 and Fig. 4 A, Fig. 2A is that the present invention is preferable reality
The positive decomposition texture schematic diagram of the fluid control device of example is applied, Fig. 2 B are the positive combination of the fluid control device shown in Fig. 2A
Structural representation, Fig. 3 are the back side decomposition texture schematic diagram of the fluid control device shown in Fig. 2A, and Fig. 4 A are the stream shown in Fig. 2A
The amplification profile structural representation of member control apparatus.As shown in Fig. 2A and Fig. 3, fluid control device 2 of the invention has variable
The structures such as shape base construction 20, piezo-activator 23, insulating trip 241,242, conducting strip 25 and housing 26, wherein, deformable base
Holder structure 20 then includes flow plate 21 and flex plate 22, but is not limited.Piezo-activator 23 correspond to flex plate 22 and
Set, the piezo-activator 23 is assembled by an oscillating plate 230 and a piezoelectric element 233, variable in the present embodiment
The structures such as shape base construction 20, piezo-activator 23, insulating trip 241, conducting strip 25, another insulating trip 242 are that mutual storehouse is set
Put, and hold and close within housing 26.
Please continue to refer to shown in Fig. 2A, Fig. 2 B, Fig. 3 and Fig. 4 A, the flow plate 21 of fluid control device 2 of the invention is tool
There is the interior surface 21b and outer surface 21a of corresponding setting, as shown in Figure 3, it is seen that have at least on the 21a of portion surface outside
One access aperture 210, in present pre-ferred embodiments, the quantity of access aperture 210 is 4, but is not limited, and it is through flowing
The outer surface 21a and interior surface 21b of logical plate 21, mainly with the effect for complying with atmospheric pressure from outside device for fluid and from
In the incoming fluid control device 2 of an at least access aperture 210.And again as shown in Figure 2 A, can by the interior surface 21b of flow plate 21
See have at least one to conflux groove 211 thereon, at least an access aperture 210 is right to this of the outer surface 21a with flow plate 21
It should set.It is that there is opening portion 212 of confluxing at the center exchange of such groove 211 that confluxes, and opening portion 212 of confluxing is and remittance
Circulation groove 211 is connected, and the fluid for the groove 211 that will can thereby conflux from an at least access aperture 210 entrance guide and the collection that confluxes
In to opening portion 212 of confluxing, to be transmitted.Therefore in present pre-ferred embodiments, flow plate 21 has integrally formed
Access aperture 210, conflux groove 211 and opening portion 212 of confluxing, and be correspondingly formed at the opening portion 212 of confluxing one and conflux stream
The chamber that confluxes of body, so that fluid is kept in.In some embodiments, the material of flow plate 21 be can be but it is unlimited be by one it is stainless
Steel material is formed.Flex plate 22 is made up of a flexible materials, but is not limited, and on flex plate 22 have one
Stream hole 220, the interior surface 21b for corresponding to flow plate 21 conflux opening portion 212 and set, so that fluid can be to flowing down
It is logical.In other embodiments, flex plate 22 is can be made up of a copper material, but is not limited, and flex plate 22 has one
Movable part 22a and a fixed part 22b, such flex plate 22 set and are connected on flow plate 21, connect to use fixed part 22b and fixing
Be connected on flow plate 21, and movable part 22a to be corresponding in the part at the place for opening portion 212 of confluxing, and be arranged on can for stream hole 220
On dynamic portion 22a.
Please continue to refer to shown in Fig. 2A, Fig. 2 B and Fig. 3, in present pre-ferred embodiments, piezo-activator 23 is to include pressure
Electrical component 233, oscillating plate 230, housing 231 and an at least support 232, in present pre-ferred embodiments, oscillating plate 230 is
Flexible square platy structure, and there is first surface 230b and corresponding second surface 230a, piezoelectric element 233 is can
Square platy structure, and its length of side is not more than the length of side of oscillating plate 230, and the first surface 230b of oscillating plate 230 can be attached at
On, but be not limited, producing deformation after the piezoelectric element 233 application voltage drives the flexural vibrations of oscillating plate 230.Yu Ben
In invention preferred embodiment, the second surface 230a of oscillating plate 230 can also have a protuberance 230c, protuberance 230c to be
But a circular protrusions structure is not limited to；In the outside of oscillating plate 230 then around setting housing 231, the kenel of housing 231 is also substantially
Corresponding to the kenel of oscillating plate 230, therefore housing 231 also can be the hollow out frame-type structure of square；And oscillating plate 230 and housing
It is to be connected with an at least support 232 between 231, and resilient support is provided.As shown in Figure 2 A and 2 B, housing 26 has at least one
Tap 261, housing 26 are not only single plate structure, also can be the frame structure that periphery has side wall 260, and by this week
The side wall 260 that edge is formed and the plate common definition of its bottom go out an accommodation space 26a, are set with for the piezo-activator 23
It is placed in accommodation space 26a, therefore after the fluid control device 2 of the present invention is completed, then its front schematic view can be as schemed
Shown in 2B and Fig. 4 A, i.e., housing 26 is that cover is placed on outside piezo-activator 23 and deformable base construction 20, and make housing 26 with
The temporary chamber A of fluid circulation is formed between piezo-activator 23, and tap 261 makes fluid to connect temporary chamber A
Circulate in outside housing 26.
Fig. 4 A to Fig. 4 C are referred to, Fig. 4 A are the cross-sectional view of the fluid control device shown in Fig. 2A, and Fig. 4 B are extremely
Fig. 4 C are the local illustrative view of the fluid control device shown in Fig. 2A.In the present embodiment, so in Fig. 4 A to Fig. 4 C, absolutely
Embolium 241, conducting strip 25 and another insulating trip 242 slightly show, and shown deformable base in this Fig. 4 A to Fig. 4 C
Holder structure 20 not yet produces the kenel before synchronous deformation for it, and these icons are the deformable base constructions for illustrating the present invention
20 flow plate 21 and the structure of flex plate 22 and piezo-activator 23, position and start relation etc. are correspondingly arranged, conjunction is first chatted
It is bright.
As shown in Figure 4 A, after the assembling corresponding with piezo-activator 23 of flow plate 21, flex plate 22, then in flex plate 22
Can be collectively forming a chamber for confluxing fluid at stream hole 220 with the opening portion 212 of confluxing of flow plate 21, and flex plate 22 with
It is with spacing h between the housing 231 of piezo-activator 23, is that can fill a medium in spacing h in some embodiments,
Such as：Conducting resinl, but be not limited, engaged and positioned by medium, so that the oscillating plate of flex plate 22 and piezo-activator 23
Maintainable certain distance between 230 protuberance 230c, such as spacing h, it can also make flex plate 22 and piezo-activator 23
A certain depth δ is formed between the protuberance 230c of oscillating plate 230, and further in the oscillating plate 230 of the piezo-activator 23
, can be by the fluid compression (imply that and certain depth δ diminishes) during vibration, and the pressure of fluid and flow velocity is increased；In addition, should
Certain depth δ is a suitable distance, interfere the contact between reduction flex plate 22 and piezo-activator 23, to reduce production
The problem of raw noise；And certain depth δ between the protuberance 230c of the oscillating plate 230 of flex plate 22 and piezo-activator 23
The chamber formed is and the fluid that confluxes at the opening portion 212 of confluxing with flow plate 21 by the stream hole 220 of flex plate 22
Chamber is connected.
When 2 start of fluid control device, mainly vertical direction is carried out by voltage actuation is applied by piezo-activator 23
Reciprocating vibration.As shown in Figure 4 B, when piezo-activator 23 is vibrated upwards by application voltage actuation, due to flex plate 22
For light, thin laminated structure, therefore when piezo-activator 23 vibrates, flex plate 22 also can carry out vertical direction therewith resonating
Reciprocating vibration, as the movable part 22a of flex plate 22 part also can flexural vibrations deformation therewith, and the stream hole 220
It is arranged at the center of flex plate 22 or is adjacent at center, therefore when piezo-activator 23 vibrates upwards, now flex plate 22
Movable part 22a fluid up can be brought into and be pushed because of the drive that piezo-activator 23 vibrates upwards and with shaking upwards
Dynamic, then fluid is entered by least access aperture 210 on flow plate 21, and confluxes groove 211 by least one to be pooled to
At the opening portion 212 of confluxing of centre, then via on flex plate 22 with the stream hole 220 that opening portion 212 is correspondingly arranged of confluxing to upstream
Enter the chamber that the certain depth δ between the protuberance 230c of the oscillating plate 230 to flex plate 22 and piezo-activator 23 is formed
In, by the deformation of this flex plate 22, with compress the protuberance 230c of flex plate 22 and the oscillating plate 230 of piezo-activator 23 it
Between the volumes of chamber that are formed of certain depth δ, and strengthen the kinetic energy that this chamber middle flow space is compressed, promote in it
Fluid is pushed to be flowed to both sides, and then passes through flowing upwards by the space between oscillating plate 230 and support 232.
As for shown in Fig. 4 C, when piezo-activator 23 vibrates downwards, then the movable part 22a of flex plate 22 also resonates therewith
Vibration deformation is bent downwardly, fluid is pooled at the opening portion 212 of confluxing in center and tailed off, and piezo-activator 23 also shakes downwards
It is dynamic, and it is moved to that certain depth δ between flex plate 22 and piezo-activator 23 forms cavity bottom and to increase chamber compressible
Volume, so repeat the implementation start shown in Fig. 4 B, you can increase the oscillating plate 230 of flex plate 22 and piezo-activator 23
Protuberance 230c between the space compressed of the chamber middle flow spaces that are formed of certain depth δ, to reach larger stream
Body soakage and discharge rate.
In presently preferred embodiments of the present invention, as it was previously stated, deformable base construction 20 is by flow plate 21 and flex plate
22 are formed, and wherein flow plate 21 and flex plate 22 is mutual storehouse, and both of flow plate 21 and flex plate 22 synchronous deform
To form a synchronous distressed structure.Furthermore, foregoing synchronous distressed structure refers to by flow plate 21 and flex plate 22
Synchronous deformed region formed, when either of which is deformed, then another one necessarily deforms therewith, and both deformation
Shape is consistent, i.e., both corresponding surfaces are to engage and position each other, and do not have any between the two
Gap or parallel misalignment, for example, when the flow plate 21 of deformable base construction 20 is deformed, flex plate 22 also produces identical
Deformation；In the same manner, when the flex plate 22 of deformable base construction 20 is deformed, flow plate 21 also produces identical change
Shape.In some embodiments, flow plate 21 and flex plate 22 are bonded with each other positioning by an adhesive agent, but are not limited.
In addition, because being addressed such as preceding known content shown in Figure 1B, in known fluid control device 100, wherein piezo-activator 102 with
Substrate 103 is flat overall structure, and has certain rigidity, and on this condition, it is overall flat to make this two
Board-like structure precisely aligns each other, and makes to maintain certain gap between two flat board, implies that and maintains its required depthkeeping
Degree, can have suitable degree of difficulty, be easy to produce error, cause variety of problems.So preferable implementation various in the present invention
Example, its feature is to utilize a deformable base construction 20, the synchronous deformation of as foregoing flow plate 21 and flex plate 22, with structure
Into synchronous distressed structure, the synchronous distressed structure is equivalent to the substrate 101 of known techniques, but the flow plate of the synchronous distressed structure
21 and flex plate 22 have a variety of embodiment aspects defined in various embodiments in the present invention, and this is various specific
Synchronous distressed structure can be maintained at a required specific gap between the oscillating plate 230 of relative piezo-activator 23
Within (chamber that i.e. certain depth δ is formed), therefore even if when fluid control device 2 is towards the development of microminiaturization, each component
Size design and carry out towards microminiaturization, by the synchronous distressed structure remain to easily this above-mentioned be intended to maintain to have between the two
It is easy to have certain gap, (no matter should because aligning the synchronous distressed structure for the non-planar base that area has reduced using it
It is deformed into bending, cone-shaped, various curved, irregular etc. shape) aligned with a flat board, and no longer it is two large area
Flat board contraposition, but the flat board of the small area of a non-planar base and a large area aligns, therefore can reduce easily between the two
Gap error, and then solve the problems, such as fluid conveying efficiency it is low and produce noise so that solve use upper inconvenience
Sharp and uncomfortable known problem.
In some embodiments, deformable base construction 20 is that flow plate 21 and the synchronous deformation of flex plate 22 are same with what is formed
Walk distressed structure, i.e. the synchronous deformed region of the deformable base construction 20 is can be in movable part 22a region and to exceed
Other regions of movable part 22a, and it can be warp architecture or cone that the synchronous distressed structure that is formed of the deformable base construction 20, which is,
Type structure or projection planar structure, but be not limited thereto.
As shown in Fig. 5 A and Fig. 5 C, in this first embodiment aspect and the 3rd embodiment aspect, deformable base construction 20 is
The bending synchronization distressed structure that flow plate 21 and flex plate 11 are formed, that is, the synchronous deformed region of deformable base construction 20
It is to be in movable part 22a region and beyond other regions of movable part 22a, the i.e. synchronous distressed structure of two embodiment aspect
The one synchronous distressed structure of bending, but the direction that only both bendings synchronously deform difference.First as shown in Figure 5A is implemented
It is the outer surface 21a in the flow plate 21 of deformable base construction 10 towards connecing to implement the mode that synchronously deforms of bending in aspect
The protuberance 230c direction flexural deformations of the nearly oscillating plate 230, while the movable part 22a of flex plate 22 region and beyond movable
22a other regions in portion are also directed to the protuberance 230c direction flexural deformations close to the oscillating plate 230, to form deformable pedestal knot
The bending synchronization distressed structure of structure 20；And implement bending in the 3rd embodiment aspect as shown in Figure 5 C and be synchronously deformed into deformable
The outer surface 21a of the flow plate 21 of base construction 10 is directed away from the protuberance 230c direction flexural deformations of the oscillating plate 230,
The movable part 22a of flex plate 22 region and it is also directed to simultaneously beyond other regions of movable part 22a prominent away from the oscillating plate 230
Go out portion's 230c directions flexural deformation, to form the bending synchronization distressed structure of deformable base construction 20；Therefore the first embodiment aspect
And the 3rd form in embodiment aspect and can be protected between the flex plate 22 of deformable base construction 20 and the protuberance 230c of oscillating plate 230
Hold within the scope of required certain depth δ, i.e., the movable part 22a of the flex plate 22 region and oscillating plate 230 is prominent
Go out between portion 230c and be maintained within the scope of required certain depth δ, so form having for this two embodiment aspect can
The flow plate 21 and flex plate 22 for deforming base construction 20 form the fluid control device 2 for bending synchronous distressed structure.
As shown in Fig. 6 A and Fig. 6 C, in this 5th embodiment aspect and the 7th embodiment aspect, deformable base construction 20 is
The taper synchronization distressed structure that flow plate 21 and flex plate 22 are formed, that is, the synchronous deformed region of deformable base construction 20
It is that the synchronous distressed structure of i.e. two embodiment aspect is one in movable part 22a region and beyond other regions of movable part 22a
Taper synchronization distressed structure, but the direction that only both taper synchronously deforms difference.And the 5th as shown in Figure 6A implements
It is the outer surface 21a in the flow plate 21 of deformable base construction 10 towards connecing to implement the mode that synchronously deforms of taper in aspect
The protuberance 230c directions taper-deformation of the nearly oscillating plate 230, while the movable part 22a of flex plate 22 region and beyond movable
22a other regions in portion are also directed to the protuberance 230c directions taper-deformation close to the oscillating plate 230, to form deformable pedestal knot
The taper synchronization distressed structure of structure 20；And implement taper in the 7th embodiment aspect as shown in Figure 6 C and be synchronously deformed into deformable
The outer surface 21a of the flow plate 21 of base construction 10 is directed away from the protuberance 230c directions taper-deformation of the oscillating plate 230,
The movable part 22a of flex plate 22 region and it is also directed to simultaneously beyond other regions of movable part 22a prominent away from the oscillating plate 230
Go out portion 230c directions taper-deformation, to form the taper synchronization distressed structure of deformable base construction 20；Therefore the 5th embodiment aspect
And the 7th in embodiment aspect so that form can between the flex plate 22 of deformable base construction 20 and the protuberance 230c of oscillating plate 230
It is maintained within the scope of required certain depth δ, i.e., the movable part 22a of flex plate 22 region and oscillating plate 230 is prominent
Go out between portion 230c and be maintained within the scope of required certain depth δ, and then it is variable to form having for this two embodiment aspect
The flow plate 21 and flex plate 22 of shape base construction 20 form the fluid control device 2 of taper synchronization distressed structure.
As shown in Fig. 7 A and Fig. 7 C, in this 9th embodiment aspect and the 11st embodiment aspect, deformable base construction 20
The projection plane synchronization distressed structure being made up of flow plate 21 and flex plate 22, that is, the synchronous change of deformable base construction 20
Shape region is in movable part 22a region and the synchronous distressed structure beyond other regions of movable part 22a, i.e. two embodiment aspect
It is a projection plane synchronization distressed structure, but the only direction difference of both projection plane synchronization deformations.And such as Fig. 7 A
The mode for implementing the deformation of projection plane synchronization in the 9th shown embodiment aspect is in the flow plate 21 of deformable base construction 10
Outer surface 21a in movable part 22a region and beyond other regions of movable part 22a towards close to the prominent of the oscillating plate 230
Go out portion 230c directions projection plane deformation, while the movable part 22a of flex plate 22 region and beyond other regions of movable part 22a
The protuberance 230c directions projection plane deformation close to the oscillating plate 230 is also directed to, to form the cone of deformable base construction 20
Just as step distressed structure；And implement projection plane synchronization in the 11st embodiment aspect as seen in figure 7 c and be deformed into deformable base
The protuberance 230c directions projection plane that the outer surface 21a of the flow plate 21 of holder structure 10 is directed away from the oscillating plate 230 becomes
Shape, while the movable part 22a of flex plate 22 region and be also directed to beyond other regions of movable part 22a away from the oscillating plate 230
Protuberance 230c directions projection plane deformation, to form the projection plane synchronization distressed structure of deformable base construction 20；Therefore
To form the prominent of the flex plate 22 of deformable base construction 20 and oscillating plate 230 in 9th embodiment aspect and the 11st embodiment aspect
Go out between portion 230c and be positively retained within the scope of required certain depth δ, i.e., the movable part 22a of flex plate 22 region with
It is maintained between the protuberance 230c of oscillating plate 230 within the scope of required certain depth δ, and then forms this two implementation state
The fluid control of the flow plate 21 and the composition projection plane synchronization distressed structure of flex plate 22 with deformable base construction 20 of sample
Device 2 processed.
It is and for example foregoing, in other embodiments, deformable base construction 20 also can be flow plate 21 and flex plate 22 only
Partial synchronization deforms the synchronous distressed structure to form, i.e. the synchronous deformed region of the deformable base construction 20 is only that flexibility
The movable part 22a of plate 22 region, and the synchronous distressed structure that this deformable base construction 20 is formed also can be warp architecture
Or tapered structure or projection planar structure, but be also not limited.
As shown in Fig. 5 B and Fig. 5 D, in the second embodiment aspect and the 4th embodiment aspect, deformable base construction 20 is
Flow plate 21 and the only Partial synchronization of flex plate 22 deform formed bending synchronization distressed structure, that is, deformable base construction 20
Synchronous deformed region be in movable part 22a region, i.e. the synchronous distressed structure of this two embodiment aspect is bending synchronization
Distressed structure, so the synchronous deformation of its bending is only that part bends synchronous deformation, and the difference of this two embodiment aspect is only that its portion
The direction for dividing bending synchronously to deform is different.Implementation section bending synchronously deforms in the second embodiment aspect as shown in Figure 5 B
Mode is the movable part 22a correspondingly to conflux at opening portion 212 in the outer surface 21a of the flow plate 21 of deformable base construction 10
Region is towards the protuberance 230c direction flexural deformations close to the oscillating plate 230, while the movable part 22a regions of flex plate 22 are also
It is curved to reach the deformable generation of base construction 20 part towards the protuberance 230c direction flexural deformations close to the oscillating plate 230
Bent synchronous distressed structure；And implementation section bending is synchronously deformed into deformable pedestal in the 4th embodiment aspect as shown in Figure 5 D
Correspondingly the conflux movable part 22a regions of opening portion 212 of the outer surface 21a of the flow plate 21 of structure 10 are directed away from the oscillating plate
230 direction flexural deformation, while the movable part 22a regions of flex plate 22 are also directed to the protuberance away from the oscillating plate 230
The flexural deformation of 230c directions, synchronous distressed structure is bent to form the deformable part of base construction 20；Therefore the second embodiment aspect and
To form the prominent of the movable part 22a regions of the flex plate 22 of deformable base construction 20 and oscillating plate 230 in 4th embodiment aspect
Go out between portion 230c and be positively retained within the scope of required certain depth δ, i.e., the movable part 22a of flex plate 22 region with
It is maintained between the protuberance 230c of oscillating plate 230 within the scope of required certain depth δ, and then forms this two implementation state
The flow plate 21 with deformable base construction 20 and flex plate 22 of sample form the fluid control that part bends synchronous distressed structure
Device 2 processed.
As shown in Fig. 6 B and Fig. 6 D, in the 6th embodiment aspect and the 8th embodiment aspect, deformable base construction 20 is stream
Logical plate 21 and flex plate 22 only the formed taper synchronization distressed structure of Partial synchronization deformation, that is, deformable base construction 20
Synchronous deformed region is that the synchronous distressed structure of this i.e. two embodiment aspect is that a taper synchronously becomes in movable part 22a region
Shape structure, synchronously deformation is only that part conic synchronously deforms for its right taper, and the difference of this two embodiment aspect is only that its part
The direction that taper synchronously deforms is different.The side that implementation section taper synchronously deforms in the 6th embodiment aspect as shown in Figure 6B
Formula is in the movable part 22a areas that the outer surface 21a of the flow plate 21 of deformable base construction 10 correspondingly confluxes at opening portion 212
Domain is towards the protuberance 230c directions taper-deformation close to the oscillating plate 230, while the movable part 22a regions of flex plate 22 also court
To the protuberance 230c directions taper-deformation close to the oscillating plate 230, part conic is produced to reach deformable base construction 20
Synchronous distressed structure；And implementation section taper is synchronously deformed into deformable pedestal knot in the 8th embodiment aspect as shown in Figure 6 D
Correspondingly the conflux movable part 22a regions of opening portion 212 of the outer surface 21a of the flow plate 21 of structure 10 are directed away from the oscillating plate
230 protuberance 230c directions taper-deformation, while the movable part 22a regions of flex plate 22 are also directed to away from the oscillating plate 230
Protuberance 230c directions taper-deformation, to form the part conic synchronization distressed structure of deformable base construction 20；Therefore the 6th
In embodiment aspect and the 8th embodiment aspect with form the movable part 22a regions of the flex plate 22 of deformable base construction 20 with vibration
It is positively retained between the protuberance 230c of plate 230 within the scope of required certain depth δ, i.e. the movable part of flex plate 22
It is maintained between 22a region and the protuberance 230c of oscillating plate 230 within the scope of required certain depth δ, and then structure
Deformed into flow plate 21 of this two embodiment aspect with deformable base construction 20 and the constituting portion reference cone of flex plate 22 just as step
The fluid control device 2 of structure.
As shown in Fig. 7 B and Fig. 7 D, in the tenth embodiment aspect and the 12nd embodiment aspect, deformable base construction 20 is
Flow plate 21 and the only Partial synchronization of flex plate 22 deform formed part projection plane synchronization distressed structure, that is, deformable base
The synchronous deformed region of holder structure 20 is equally only that the synchronous distressed structure in movable part 22a region, i.e. this two embodiment aspect
It is a projection plane synchronization distressed structure, right its projection plane synchronization deformation is only part projection plane synchronization, and this two reality
The difference for applying aspect is only that the direction of its part projection plane synchronization deformation is different.The tenth as shown in Figure 7 B implements state
The mode that implementation section projection plane synchronization deforms in sample is in the outer surface 21a of the flow plate 21 of deformable base construction 10
The movable part 22a regions direction at opening portion 212 of confluxing is corresponded to close to the protuberance 230c directions projection plane of the oscillating plate 230
Deformation, while the movable part 22a regions of flex plate 22 are also directed to the protuberance 230c directions projection plane close to the oscillating plate 230
Deformation, to form the part projection plane synchronization distressed structure of deformable base construction 20；And the 12nd as illustrated in fig. 7d is real
Implementation section projection plane synchronization in aspect is applied to be deformed into 21a pairs of the outer surface of the flow plate 21 of deformable base construction 10
Should the conflux movable part 22a regions of opening portion 212 are directed away from the protuberance 230c directions projection plane of the oscillating plate 230 and become
Shape, while the movable part 22a regions of flex plate 22 are also directed to the protuberance 230c directions projection plane away from the oscillating plate 230 and become
Shape, to form the part projection plane synchronization distressed structure of deformable base construction 20；Therefore the tenth embodiment aspect and the 12nd is in fact
Apply in aspect to form the protuberance in the movable part 22a regions of the flex plate 22 of deformable base construction 20 and oscillating plate 230
It is positively retained between 230c within the scope of required certain depth δ, i.e. the movable part 22a of flex plate 22 region and vibration
Chamber between the protuberance 230c of plate 230 is maintained within the scope of required certain depth δ, and then forms this two implementation
The flow plate 21 with deformable base construction 20 and flex plate 222 of aspect form part projection plane synchronization distressed structure
Fluid control device 2.
It is and for example foregoing, in some embodiments, the flow plate 21 of deformable base construction 20 and the surface of flex plate 22
Can be that also may make up a curved surface synchronization distressed structure aspect, the curved surface synchronization distressed structure for several different curvatures curved surface institute structure
Into, or can be also made up of the curved surface of same curvature, Fig. 8 the 13rd embodiment aspect is referred to, wherein implementing curved surface knot
The mode that structure synchronously deforms is several different bent in being produced as on the outer surface 21a of the flow plate 21 of deformable base construction 20
The curved surface that the curved surface of rate is formed synchronously deforms, and flex plate 22 also has several different curvatures synchronously to deform simultaneously for this
Curved surface, so to form the curved surface synchronization distressed structure of deformable base construction 20, however, the mode that this curved surface synchronously deforms is also
It is not limited, also can synchronously becomes for the curved surface formed in the curved surface that several different curvatures are produced as on the surface of flex plate 22
Shape, so that flow plate 21 produces corresponding curved surface and synchronously deformed, and collectively form the curved surface synchronously deformation of deformation base construction 20
Structure；Thereby so that can between the curved surface synchronization distressed structure of deformable base construction 20 and the protuberance 230c of oscillating plate 230
It is maintained within the scope of required certain depth δ, and then forms the flow plate 21 with deformable base construction 20 and scratch
Property plate 22 form curved surface synchronization distressed structure structure fluid control device 2.
In other embodiments, the synchronization that the flow plate 21 and flex plate 22 of deformable base construction 20 are formed deforms
Structure, which differs, is set to the synchronous distressed structure of conformation of rules, also can be irregular synchronous distressed structure, imply that in deformable
Irregular synchronous deformation is formed on the flow plate 21 of base construction 20 or the surface of flex plate 22, so as to flow plate 21 and scratch
Property plate 22 is corresponding forms an irregular synchronous distressed structure, but be not limited.And the irregular synchronization of the flex plate 22
Required certain depth can be equally maintained between distressed structure and the protuberance 230c of oscillating plate 230.
Pass through the various realities such as above-mentioned warp architecture, pyramidal structure, projection planar structure, curved-surface structure or irregular structure
Aspect is applied, can make to be maintained at required between the movable part 22a of deformable base construction 20 and the protuberance 230c of oscillating plate 230
Within the scope of the certain depth δ asked, limited by this certain depth δ scope, then when can avoid the assembling of fluid control device 2
Error cause gap excessive or the protuberance 230c of too small and its caused flex plate 22 and oscillating plate 230 be in contact with each other it is dry
The problems such as relating to, and then making fluid efficiency of transmission bad and noise can be produced.
In summary, fluid control device of the invention is flow plate and flex plate the institute structure by deformable base construction
Into synchronous distressed structure, the embodiment synchronously deformed is to be towards close to or away from the piezo-activator, so that can
Deform base construction flex plate and oscillating plate protuberance between keep and adjustment required certain depth scope it
It is interior, and then flex plate contact with the protuberance of oscillating plate interference is reduced, so as to the efficiency of lifting fluid transmission, also can reach
The effect of reducing noise.Consequently, it is possible to the fluid control device of the present invention is entered by the deformable base construction that can synchronously deform
And can adjust, correct required certain depth, to reach the optimal fluid efficiency of transmission of fluid control device, reduce noise, together
When can also reduce the fraction defective of product, the quality of lifting fluid control device.
The present invention can as person familiar with the technology appoint apply craftsman think and be it is all as modification, but all do not depart from such as appended right will
Seek the protection domain that book is limited.
Claims (17)
1. a kind of fluid control device, comprising：
One piezo-activator, the surface that an oscillating plate is attached at by a piezoelectric element are formed, and the piezoelectric element is electric by applying
To drive the oscillating plate flexural vibrations, the oscillating plate has a protuberance for pressure and deformation, and it is to be relatively arranged on the attaching pressure
Another surface on the surface of electrical component；And
One deformable base construction, it is made up of a flex plate and the mutual storehouse engagement of a flow plate, and can be synchronously deformed into one
Synchronous distressed structure；
Wherein, deformable base construction engagement positioning corresponding with the oscillating plate of the piezo-activator, so that this is deformable
A certain depth is defined between the flex plate of base construction and the protuberance of the oscillating plate, and the flex plate has one
Movable part, it is set relative to the protuberance of the oscillating plate.
2. fluid control device as claimed in claim 1, it is characterised in that this of the deformable base construction synchronously deforms knot
One synchronous deformed region of structure is in the region of the movable part of the flex plate, and this of the synchronous distressed structure and the oscillating plate are prominent
Go out between portion and maintain the required certain depth to form.
3. fluid control device as claimed in claim 1, it is characterised in that this of the deformable base construction synchronously deforms knot
One synchronous deformed region of structure is in the region of the movable part of the flex plate, and to be that a bending is synchronous become the synchronous distressed structure
Between the protuberance of shape structure, the bending synchronization distressed structure and the oscillating plate the required specific depth is maintained to form
Degree.
4. fluid control device as claimed in claim 1, it is characterised in that this of the deformable base construction synchronously deforms knot
One synchronous deformed region of structure be the flex plate the movable part region, and the synchronous distressed structure be a taper synchronously become
Between the protuberance of shape structure, the taper synchronization distressed structure and the oscillating plate the required specific depth is maintained to form
Degree.
5. fluid control device as claimed in claim 1, it is characterised in that this of the deformable base construction synchronously deforms knot
One synchronous deformed region of structure be the flex plate the movable part region, and the synchronous distressed structure be a projection plane it is same
Distressed structure is walked, maintenance is required to be somebody's turn to do to form between the projection plane synchronization distressed structure and the protuberance of the oscillating plate
Certain depth.
6. fluid control device as claimed in claim 1, it is characterised in that this of the deformable base construction synchronously deforms knot
One synchronous deformed region of structure is that synchronously deformation is tied for this in the region of the movable part of the flex plate and beyond the region of movable part
Between this of structure and the oscillating plate protuberance the required certain depth is maintained to form.
7. fluid control device as claimed in claim 1, it is characterised in that this of the deformable base construction synchronously deforms knot
One synchronous deformed region of structure be the flex plate the movable part region and beyond the region of movable part, and this synchronously deform
Structure is the synchronous distressed structure of a bending, is maintained between the bending synchronization distressed structure and the protuberance of the oscillating plate with forming
The required certain depth.
8. fluid control device as claimed in claim 1, it is characterised in that this of the deformable base construction synchronously deforms knot
One synchronous deformed region of structure be the flex plate the movable part region and beyond the region of movable part, and this synchronously deform
Structure is a taper synchronization distressed structure, is maintained between the taper synchronization distressed structure and the protuberance of the oscillating plate with forming
The required certain depth.
9. fluid control device as claimed in claim 1, it is characterised in that this of the deformable base construction synchronously deforms knot
One synchronous deformed region of structure be the flex plate the movable part region and beyond the region of movable part, and this synchronously deform
Structure is a projection plane synchronization distressed structure, between the projection plane synchronization distressed structure and the protuberance of the oscillating plate with
Form and maintain the required certain depth.
10. fluid control device as claimed in claim 1, it is characterised in that this of the deformable base construction synchronously deforms
The curved surface synchronization distressed structure that structure is formed for the flow plate and the flex plate, the curved surface synchronization distressed structure for it is several not
The curved surface of same curvature is formed, and is maintained between the curved surface synchronization distressed structure of the flex plate and the protuberance of the oscillating plate
The required certain depth.
11. fluid control device as claimed in claim 1, it is characterised in that this of the deformable base construction synchronously deforms
The curved surface synchronization distressed structure that structure is formed for the flow plate and the flex plate, the curved surface synchronization distressed structure are several phases
Curved surface with curvature is formed, and institute is maintained between the curved surface synchronization distressed structure of the flex plate and the protuberance of the oscillating plate
The certain depth of demand.
12. fluid control device as claimed in claim 1, it is characterised in that this of the deformable base construction synchronously deforms
The irregular synchronous distressed structure that structure is formed for the flow plate and the flex plate, this of the flex plate are irregular same
The required certain depth is maintained between step distressed structure and the protuberance of the oscillating plate.
13. fluid control device as claimed in claim 1, it is characterised in that the oscillating plate of the piezo-activator is in pros
Shape, and flexible vibration, and the piezo-activator also includes:
One housing, around the outside for being arranged at the oscillating plate；And
An at least support, it is connected between a side of the oscillating plate and the housing, for resilient support.
14. fluid control device as claimed in claim 1, it is characterised in that the deformable base construction and the oscillating plate it
Between engaged and position by a medium, and the medium is an adhesive agent.
15. fluid control device as claimed in claim 1, it is characterised in that be also engaged in the piezoelectricity comprising a housing, cover lid
Actuator, make to form a fluid flowing lumen room between the housing and the piezo-activator, and the housing is provided with least one discharge
Hole, to connect outside the fluid flowing lumen room and the housing.
16. fluid control device as claimed in claim 1, it is characterised in that the flex plate has a stream hole, and is arranged at
The center of the movable part is adjacent at center, so that fluid passes through.
17. fluid control device as claimed in claim 1, it is characterised in that the flow plate has an at least access aperture, at least
One, which confluxes, groove and one confluxes opening portion, and the access aperture is connected through the flow plate and with least one groove that confluxes, and is somebody's turn to do
The other end of groove of confluxing is to be communicated in the opening portion of confluxing, and the opening portion of confluxing correspond to the flex plate this is movable
Portion, and connected with the stream hole of the flex plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610801655.8A CN107795473B (en) | 2016-09-05 | 2016-09-05 | Fluid control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610801655.8A CN107795473B (en) | 2016-09-05 | 2016-09-05 | Fluid control device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107795473A true CN107795473A (en) | 2018-03-13 |
| CN107795473B CN107795473B (en) | 2019-04-05 |
Family
ID=61530611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610801655.8A Active CN107795473B (en) | 2016-09-05 | 2016-09-05 | Fluid control device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107795473B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013084909A1 (en) * | 2011-12-09 | 2013-06-13 | 株式会社村田製作所 | Gas control apparatus |
| CN104235438A (en) * | 2013-06-24 | 2014-12-24 | 研能科技股份有限公司 | Miniature valve device |
| CN104454472A (en) * | 2013-09-15 | 2015-03-25 | 应璐 | Piezoelectric micropump for injecting insulin |
| WO2016013390A1 (en) * | 2014-07-25 | 2016-01-28 | 株式会社村田製作所 | Fluid control device |
-
2016
- 2016-09-05 CN CN201610801655.8A patent/CN107795473B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013084909A1 (en) * | 2011-12-09 | 2013-06-13 | 株式会社村田製作所 | Gas control apparatus |
| CN104235438A (en) * | 2013-06-24 | 2014-12-24 | 研能科技股份有限公司 | Miniature valve device |
| CN104454472A (en) * | 2013-09-15 | 2015-03-25 | 应璐 | Piezoelectric micropump for injecting insulin |
| WO2016013390A1 (en) * | 2014-07-25 | 2016-01-28 | 株式会社村田製作所 | Fluid control device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107795473B (en) | 2019-04-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206092351U (en) | Fluid control device | |
| TWI606936B (en) | Fluid control device | |
| CN103856178A (en) | Piezoelectric vibration module | |
| CN107795471A (en) | Fluid control device | |
| JP6585672B2 (en) | Fluid control device | |
| CN107795466A (en) | The manufacture method of fluid control device | |
| CN107795473A (en) | Fluid control device | |
| CN107795472A (en) | Fluid control device | |
| JP6606140B2 (en) | Method for manufacturing fluid control device | |
| CN107795470A (en) | Fluid control device | |
| TWI625468B (en) | Fluid control device | |
| TWI613367B (en) | Fluid control device | |
| CN209212517U (en) | Fluid control device | |
| JP6606142B2 (en) | Method for manufacturing fluid control device | |
| CN107795468A (en) | The manufacture method of fluid control device | |
| JP6574464B2 (en) | Small fluid control device | |
| CN107795469A (en) | The manufacture method of fluid control device | |
| CN107795467A (en) | The manufacture method of fluid control device | |
| TW201808656A (en) | Manufacturing method of fluid control device | |
| CN211819871U (en) | Fluid control device | |
| TWM539568U (en) | Fluid control device | |
| JP2018040355A (en) | Manufacturing method of fluid control device | |
| TWM538550U (en) | Fluid control device | |
| TWM537163U (en) | Fluid control device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |