CN107795469A - The manufacture method of fluid control device - Google Patents
The manufacture method of fluid control device Download PDFInfo
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- CN107795469A CN107795469A CN201610801569.7A CN201610801569A CN107795469A CN 107795469 A CN107795469 A CN 107795469A CN 201610801569 A CN201610801569 A CN 201610801569A CN 107795469 A CN107795469 A CN 107795469A
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- distressed structure
- control device
- fluid control
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- 239000012530 fluid Substances 0.000 title claims abstract description 101
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 32
- 238000000034 method Methods 0.000 title claims abstract description 31
- 230000001360 synchronised effect Effects 0.000 claims abstract description 163
- 238000009411 base construction Methods 0.000 claims abstract description 52
- 239000012190 activator Substances 0.000 claims abstract description 40
- 238000010276 construction Methods 0.000 claims abstract description 6
- 238000005452 bending Methods 0.000 claims description 17
- 230000001788 irregular Effects 0.000 claims description 6
- 238000007493 shaping process Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 18
- 239000000758 substrate Substances 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 4
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 4
- 230000004308 accommodation Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- 230000018109 developmental process Effects 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- 241000276425 Xiphophorus maculatus Species 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000003814 drug Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001012 protector Effects 0.000 description 1
- 230000034179 segment specification Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/206—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using only longitudinal or thickness displacement, e.g. d33 or d31 type devices
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
A kind of manufacture method of fluid control device, comprising:(a) housing, piezo-activator and deformable base construction are provided, piezo-activator is made up of piezoelectric element and oscillating plate, oscillating plate has first surface and corresponding second surface, second surface has a protuberance, deformable base construction includes flow plate and flex plate, and flex plate has movable part；(b) flex plate of deformable base construction and flow plate are stacked with engaging and are implemented on the outside prefabricated synchronous deformation operation for applying an at least active force, make flex plate and the prefabricated profiled synchronous distressed structure of flow plate synchronization deformation construction, the surface for the deformable base construction that an at least active force is contacted produces an at least distressed structure；(c) housing, piezo-activator and deformable base construction are sequentially stacked with locating engagement, the prefabricated profiled synchronous distressed structure of deformable base construction is the protuberance relative to oscillating plate, so as to define certain depth between movable part and protuberance.
Description
【Technical field】
This case is on a kind of manufacture method of fluid control device, espespecially a kind of fluid control with deformable pedestal
The manufacture method of device.
【Background technology】
The either industry such as medicine, computer technology, printing, energy in each field at present, product is towards sophistication and micro-
Smallization direction is developed, and the fluid delivery structure that wherein product such as Micropump, sprayer, ink gun, industrial printing devices is included is
Its key technology, therefore how by means of innovation structure its technical bottleneck is broken through, for the important content of development.
Refer to shown in Figure 1A and Figure 1B, Figure 1A is the part-structure schematic diagram of known fluid control device, and Figure 1B is
Know the part-structure assembling deviation schematic diagram of fluid control device.As illustrated, known fluid control device 100 makees kinetonucleus
The heart mainly includes substrate 101 and piezo-activator 102, and substrate 101 is to stack to set with piezo-activator 102, and substrate 101 with
Piezo-activator 102 has a gap 103, wherein, the gap 103 need to keep certain depth, remain certain by this gap 103
Depth, when piezo-activator 102 is activated by application voltage produces deformation, then fluid can be driven in fluid control device 100
Each chamber indoor moveable, so as to reach fluid transmission purpose.However, in this known fluid control device 100, wherein pressing
Electric actuator 102 and substrate 101 are flat overall structure, and have certain rigidity, on this condition, make this two
Individual entirety is that flat structure precisely aligns each other, to cause to produce with certain gap 103 between two flat board, that is, is tieed up
Certain depth is held, there can be certain degree of difficulty, is easy to produce error, because the certain rigid entirety of any of the above-described tool is put down
Plate, an angle, θ is tilted if any any side, then can produce the shift value that relative distance is multiplied by the angle, θ in relative position,
Such as a displacement d, and cause to increase d ' (as shown in Figure 1B) at the graticule in certain gap 103, or vice versa reduce d ' and (do not scheme
Show)；Particularly when fluid control device is towards the development of microminiaturization, the size of each element designs towards microminiaturization to be carried out, and is made
Obtain and be intended between two flat board maintain with certain gap 103, without increasing or decreasing d ', and then keep the certain of gap 103
Depth, its degree of difficulty more and more higher, and if the certain depth in gap 103 can not be kept, such as gap 103 is the above-mentioned d ' of increase
It is during the error of displacement, the distance for causing the gap 103 is excessive, and then make it that fluid efficiency of transmission is bad；Conversely, if gap is
In opposite direction so that reducing an above-mentioned d ' displacements (not shown), then make it that the distance in gap 103 is too small, and then piezoelectric actuated
The problem of interference is easily contacted during 102 start of device with other elements, and produces noise, and cause the fraction defective of fluid control device with
Lifting.
In other words, because the piezo-activator 102 and substrate 101 of known fluid control device 100 are with certain
Rigid flat overall structure, both are intended to, with overall alignment mode, to reach the purpose precisely aligned and shown for difficulty between flat board, especially
It more becomes small in component size, is more difficult to exactitude position during assembling, and then the efficiency for conveying fluid is low and produces noise
Problem, cause using upper not convenient and uncomfortable.
Therefore, above-mentioned known technology missing can be improved by how developing one kind, can make the instrument of conventionally employed fluid conveying device
Device or equipment reach small volume, miniaturization and Jing Yin, and the problem of be also easy to produce error when overcoming assembling, and then reach light comfortable
Portable purpose minisize fluid transmitting device, actually at present it is in the urgent need to address the problem of.
【The content of the invention】
The main purpose of this case is in fluid control device known to solution, and substrate is with piezo-activator because element is small
The design of change, be not easy to be precisely located and produce error when assembling, make its be difficult to maintain after assembling the demand in its gap away from
From and then the efficiency that causes fluid to convey is low and the problem of produce noise, causes not convenient and uncomfortable to ask using upper
Topic.
For the above-mentioned purpose, the one of this case broader pattern of implementing is to provide a kind of manufacture method of fluid control device,
Comprising:(a) housing, a piezo-activator and a deformable base construction be provided, the piezo-activator by a piezoelectric element and
One oscillating plate is formed, and the oscillating plate has first surface and corresponding second surface, and the second surface has a protuberance,
The deformable base construction includes a flow plate and a flex plate, and the flex plate has a movable part；(b) by the deformable pedestal
Flex plate and the flow plate of structure are stacked with engaging and are implemented on the outside prefabricated synchronization for applying an at least active force
Operation is deformed, the flex plate and the flow plate is synchronized the prefabricated profiled synchronous distressed structure of deformation construction one, this is at least
One surface of the deformable base construction that one active force is contacted produces an at least distressed structure；And (c) sequentially by the shell
Body, the piezo-activator and the deformable base construction are stacked with, and carry out locating engagement, and the deformable base construction is somebody's turn to do
Prefabricated profiled synchronous distressed structure is the protuberance relative to the oscillating plate, so that the movable part of the flex plate shakes with this
A certain depth is defined between the protuberance of dynamic plate.
【Brief description of the drawings】
Figure 1A is the part-structure schematic diagram of known fluid control device.
Figure 1B is the part-structure assembling deviation schematic diagram of known fluid control device.
Fig. 2 is the manufacture method schematic flow sheet of the fluid control device of this case preferred embodiment.
Fig. 3 A are the cross-sectional view of the fluid control device of this case.
Fig. 3 B are the local illustrative view of the fluid control device of this case.
Fig. 4 A are the first embodiment aspect of the prefabricated profiled synchronous distressed structure of the fluid control device of this case preferred embodiment
Schematic diagram.
Fig. 4 B are the second embodiment aspect of the prefabricated profiled synchronous distressed structure of the fluid control device of this case preferred embodiment
Schematic diagram.
Fig. 4 C are the 3rd embodiment aspect of the prefabricated profiled synchronous distressed structure of the fluid control device of this case preferred embodiment
Schematic diagram.
Fig. 4 D are the 4th embodiment aspect of the prefabricated profiled synchronous distressed structure of the fluid control device of this case preferred embodiment
Schematic diagram.
Fig. 5 A are the 5th embodiment aspect of the prefabricated profiled synchronous distressed structure of the fluid control device of this case preferred embodiment
Schematic diagram.
Fig. 5 B are the 6th embodiment aspect of the prefabricated profiled synchronous distressed structure of the fluid control device of this case preferred embodiment
Schematic diagram.
Fig. 5 C are the 7th embodiment aspect of the prefabricated profiled synchronous distressed structure of the fluid control device of this case preferred embodiment
Schematic diagram.
Fig. 5 D are the 8th embodiment aspect of the prefabricated profiled synchronous distressed structure of the fluid control device of this case preferred embodiment
Schematic diagram.
Fig. 6 A are the 9th embodiment aspect of the prefabricated profiled synchronous distressed structure of the fluid control device of this case preferred embodiment
Schematic diagram.
Fig. 6 B are the tenth embodiment aspect of the prefabricated profiled synchronous distressed structure of the fluid control device of this case preferred embodiment
Schematic diagram.
Fig. 6 C are the 11st implementation state of the prefabricated profiled synchronous distressed structure of the fluid control device of this case preferred embodiment
Sample schematic diagram.
Fig. 6 D are the 12nd implementation state of the prefabricated profiled synchronous distressed structure of the fluid control device of this case preferred embodiment
Sample schematic diagram.
Fig. 7 is the 13rd embodiment aspect of the prefabricated profiled synchronous distressed structure of the fluid control device of this case preferred embodiment
Schematic diagram.
【Embodiment】
Embodying some exemplary embodiments of this case features and advantages will describe in detail in the explanation of back segment.It should be understood that
This case can have various changes in different aspects, and it does not all depart from the scope of this case, and explanation therein and diagram
Inherently it is illustrated as being used, and nand architecture is in limitation this case.
The manufacture method of the fluid control device of this case be made fluid control device 2 can be applied to the raw skill of medicine,
The industry such as the energy, computer technology or printing, in order to transmit fluid, but it is not limited.Fig. 2 and Fig. 3 A are referred to, Fig. 2 is
The manufacture method schematic flow sheet of the fluid control device of this case preferred embodiment, Fig. 3 A are cuing open for the fluid control device of this case
Face structural representation.As shown in Fig. 2 in the manufacture method of the fluid control device of this case, and as shown in Figure 3A, first as walked
Shown in rapid S31, there is provided housing 26, piezo-activator 23 and deformable base construction 20.Wherein piezo-activator 23 is by a piezoelectricity
The oscillating plate 230 of element 233 and one is formed, and oscillating plate 230 has first surface 230b and corresponding second surface 230a, the
Two surface 230a have a protuberance 230c；And oscillating plate 230 can be but not be limited to flexible square platy structure, piezoelectricity member
Part 233 for can square platy structure, and its length of side is not more than the length of side of oscillating plate 230, and can be attached at the first of oscillating plate 230
On the 230b of surface, but it is not limited, the piezoelectric element 233 produces deformation after by application voltage and drives the oscillating plate 230 curved
Qu Zhendong, another piezo-activator 23 further include housing 231 and at least a support 232, and housing 231 surround and is arranged at oscillating plate
230 outside, and its kenel also corresponds roughly to the kenel of oscillating plate 230, i.e., its can be but not be limited to the hollow out frame of square
Type structure, and between oscillating plate 230 and housing 231 connected with an at least support 232, and resilient support is provided；It is and variable
Shape base construction 20 includes flow plate 21 and flex plate 22, but is not limited, and flow plate 21 has an at least surface, and this is at least
One surface includes an outer surface 21a, and further there is the flow plate 21 an at least access aperture 210, at least one to conflux groove
211 and one to conflux opening portion 212, the access aperture 210 is connected through the flow plate 21 and with least one groove 211 that confluxes,
And the other end for confluxing groove 211 is to be communicated in the opening portion 212 of confluxing, and flex plate 22 has a movable part 22a and one
Fixed part 22b, flex plate 22 set and are connected on flow plate 21, to be fixedly connected on so as to fixed part 22b on flow plate 21, and
Movable part 22a is corresponds in the part at the place for opening portion 212 of confluxing, and stream hole 220 is arranged on movable part 22a, and stream
Hole 220 corresponds to opening portion 212 of confluxing.Housing 26 has an at least tap 261, and housing 26 is not only single plate knot
Structure, it also can be the frame structure that periphery has side wall 260, be set wherein for the piezo-activator 23, i.e., housing 26 can cover and be placed on
Outside piezo-activator 23 and deformable base construction 20, and make to form fluid circulation between housing 26 and piezo-activator 23
Temporary chamber A, and tap 261 makes fluid circulate in outside housing 26 to connect temporary chamber A.
Thereafter, stated for another example shown in Fig. 2 step S32, flex plate 22 and flow plate 21 are stacked with engaging and be implemented on
Outside applies the prefabricated synchronous deformation operation of an at least active force, flex plate 22 and flow plate 21 is synchronized deformation construction one
Prefabricated profiled synchronous distressed structure, the synchronous deformation operation of a application at least active force are applied to a few active force in this
An at least surface for deformable base construction 20, an at least active force can be that single only imposes an active force, or apply simultaneously
With multiple active forces, but it is not limited, i.e., is implemented on deformable base construction 20 at least through by active force contact
On one surface, so that deformable base construction 20 produces synchronous deformation, and then to form the prefabricated profiled synchronous distressed structure
(as shown in Fig. 4 A to Fig. 7), and the surface of deformable base construction that the active force is contacted can produce an at least distressed structure,
Such as：Exert a force vestige (not shown), but is not limited.
Finally, for another example described in step S33, sequentially by housing 26, piezo-activator 23 and the mutual heap of deformable base construction
It is folded, and locating engagement is carried out, and the prefabricated profiled synchronous distressed structure of deformable base construction 20 is relative to oscillating plate 230
Protuberance 230c so that it is specific to define one between the movable part 22a of the flex plate 22 and the protuberance 230c of oscillating plate 230
Depth δ.This step makes housing 206 cover the outboard peripheries (as shown in Figure 3A) for being placed on the piezo-activator 23, wherein deformable base
Though holder structure 20 not yet carries out step S32 synchronous deformation, so in this mainly illustrating the heap of the fluid control device 2 of this case
The folded mode set, as makes piezo-activator 23 be arranged in the accommodation space 26a of housing 26, then with deformable base construction
The deformable base construction of 20 or prefabricated profiled synchronous distressed structures is corresponding to be assembled with piezo-activator 23, and is set jointly
In accommodation space 26a, the bottom so as to closing piezo-activator 23, and movable part 22a are relative to the prominent of oscillating plate 130
Go out portion 130c position, and in the present embodiment, the prefabricated profiled synchronous distressed structure of deformable base construction 20 is can court
To close to or away from the protuberance 130c directions of the oscillating plate 230 synchronously deform, i.e., as shown in Fig. 4 A to Fig. 7, and not as
Limit, it predominantly makes to define a certain depth δ between the movable part 22a of flex plate 22 and the protuberance 230c of oscillating plate 230,
And then prefabricated profiled synchronous distressed structure is can pass through to maintain required certain depth δ fluid control dress so that this case is made
Put 2.
Made fluid control device 2 as described above, as shown in Fig. 3 A and Fig. 3 B, when flow plate 21, flex plate 22 with
, then can be common with the opening portion 212 of confluxing of flow plate 21 at the stream hole 220 of flex plate 22 after the corresponding assembling of piezo-activator 23
With forming a chamber for confluxing fluid, and between flex plate 22 and the housing 231 of piezo-activator 23 be with spacing h, in
It is that can fill a medium in some embodiments, in spacing h, such as：Conducting resinl, but be not limited, it is fixed to be engaged through medium
Position, so that maintainable certain distance between flex plate 22 and the oscillating plate 230 of piezo-activator 23, such as spacing h, it can more make
Obtain and form a certain depth δ between the movable part 22a of flex plate 22 and the protuberance 230c of oscillating plate 230, when the oscillating plate 230
, can be by the fluid compression, between the protuberance 230c for implying that the movable part 22a and oscillating plate 230 that make flex plate 22 when vibration
Spacing diminish, and the pressure of fluid and flow velocity is increased；In addition, certain depth δ is for a suitable distance, to make reduction
Contact interference between the movable part 22a of flex plate 22 and the protuberance 230c of oscillating plate 230, asking for noise is produced to reduce
Topic；And certain depth δ forms chamber transmission between the movable part 22a of flex plate 22 and the protuberance 230c of oscillating plate 230
The stream hole 220 of flex plate 22 and be connected with the chamber for the fluid that confluxes at the opening portion 212 of confluxing of flow plate 21；When fluid control
During 2 start of device processed, mainly driving oscillating plate is deformed by voltage actuation is applied by the piezoelectric element 233 of piezo-activator 23
230 carry out the reciprocating vibration of vertical direction, when oscillating plate 230 vibrates upwards, because flex plate 22 is light, thin sheet knot
Structure, flex plate 22 also can with resonance and carry out the reciprocating vibration of vertical direction, the as movable part 22a of flex plate 22 portion
Point also can with flexural vibrations deformation, and the stream hole 220 is arranged at the center of flex plate 22 or is adjacent at center, now scratches
The movable part 22a of property plate 22 can because the drive vibrated upwards of oscillating plate 230 and fluid is up brought into and pushed and with to
Upper vibration, then fluid is entered by least access aperture 210 on flow plate 21, and confluxes groove 211 through at least one to collect
To at the opening portion 212 of confluxing in center, then via on flex plate 22 with conflux stream hole 220 that opening portion 212 is correspondingly arranged to
On the certain depth δ that flows between the movable part 22a of flex plate 22 and the protuberance 230c of oscillating plate 230 form chamber
In, by the deformation of this flex plate 22, to compress the certain depth between the movable part 22a of flex plate 22 and piezo-activator 23
δ forms the volume of chamber, and the certain depth δ strengthened between the movable part 22a and oscillating plate 230 of flex plate 22 forms chamber
The kinetic energy that middle flow space is compressed, promote the fluid in it to push and flowed to both sides, and then pass through oscillating plate 230 and support
Space between 232 and pass through flowing upwards, and when oscillating plate 230 is bent downwardly vibration, then the movable part 22a of flex plate 22
Also with resonance be bent downwardly vibration deformation, fluid is pooled at the opening portion 212 of confluxing in center and tailed off, and piezo-activator 23
Also vibration downwards, and it is moved to certain depth δ institutes between the movable part 22a of flex plate 22 and the protuberance 230c of oscillating plate 230
Form cavity bottom and increase the compressible volume of chamber, so repeat the implementation start shown in Fig. 3 B, you can increase flexible
Certain depth δ between the movable part 22a of plate 22 and the protuberance 230c of oscillating plate 230 forms chamber middle flow space quilt
The space of compression, reach larger fluid soakage and discharge rate.
In the preferred embodiment of this case, as it was previously stated, deformable base construction 20 is by flow plate 21 and flex plate 22
Formed, wherein flow plate 21 and flex plate 22 be to be stacked with, and flow plate 21 and flex plate 22 both can to carry out this pre-
System is synchronous to be deformed operation and produces synchronous deformation, to form prefabricated profiled synchronous distressed structure.Furthermore, it is foregoing
Synchronous deformation refers to flow plate 21 and flex plate 22, when either of which is deformed, then another one necessarily with deformation, and
The shape of both deformations is consistent, i.e., both corresponding surfaces are to engage and position each other, and between the two not
Have any gap or parallel misalignment, for example, when the flow plate 21 of deformable base construction 20 is deformed, flex plate 22
Also identical deformation is produced；In the same manner, when the flex plate 22 of deformable base construction 20 is deformed, flow plate 21 also produces
Identical deforms.In addition, because as described in preceding contents known, in known fluid control device, wherein piezo-activator and substrate
Be flat overall structure, and there is certain rigidity, on this condition, make this two be Integral flat-plate formula knot
Structure precisely aligns each other, to cause to maintain certain gap between two flat board, implies that maintenance certain depth, can have certain be stranded
Difficulty, it is easy to produce error, causes variety of problems.So preferred embodiment various in this case, its feature is using can
The prefabricated profiled synchronous distressed structure of base construction 20 is deformed, it is the synchronous deformation knot for flow plate 21 and flex plate 22
Structure, the deformable base construction 20 is equivalent to the base component of known technology, and only the deformable base construction 20 is pre-formed
Synchronous distressed structure flow plate 21 and flex plate 22 have it is various specific pre- defined in various embodiments in this case
The synchronous distressed structure of type is made, and the various specific prefabricated profiled synchronous distressed structures can be with relative oscillating plate
Between 230 protuberance 230c, it is maintained within a required certain depth δ, therefore even if when fluid control device 2 is towards micro-
The development of smallization, the size of each element designs towards microminiaturization to be carried out, and is remained to by the prefabricated profiled synchronous distressed structure
Easily so that this it is above-mentioned be intended to maintain between the two with certain gap to be easy because aligning what area had reduced using it
The synchronous distressed structure of non-planar base (no matter this is deformed into bending, tapered shape, various curved, irregular etc. shape)
Aligned with a flat board, and be no longer the flat board contraposition of two large area, but the small area of a non-planar base and a large area is flat
Plate aligns, therefore can reduce gap error between the two easily, and then the efficiency for solving fluid conveying is low and generation is made an uproar
The problem of sound so that solve using upper not convenient and uncomfortable known problem.
In some embodiments, prefabricated profiled synchronous distressed structure can be that synchronous deformation aspect can be warp architecture, cone
Shape structure, projection planar structure, curved-surface structure or irregular structure etc., but be not limited, these knots synchronously deformed
Structure and aspect will be described in detail in back segment specification.
As shown in Fig. 4 A and Fig. 4 C, in this first embodiment aspect and the 3rd embodiment aspect, prefabricated profiled synchronous deformation
Structure is the bending synchronization distressed structure being made up of flow plate 21 and flex plate 22, that is, prefabricated profiled synchronous distressed structure
The synchronous deformed region of bending be in movable part 22a region and beyond other regions of movable part 22a, i.e. two embodiment aspect
Prefabricated profiled synchronous distressed structure be a bending synchronization distressed structure, the direction that only only both bending synchronously deforms has
Institute's difference.Implement the prefabricated synchronous deformation operation of flexural deformation in the first embodiment aspect as shown in Figure 4 A, it is in deformable
The outer surface 21a of the flow plate 21 of base construction 20 is bent towards the direction of the protuberance 230c close to the oscillating plate 230 to be become
Shape, while the movable part 22a of flex plate 22 region and be also directed to beyond other regions of movable part 22a close to the oscillating plate 230
Protuberance 230c direction flexural deformation, to form the bending synchronization distressed structure of prefabricated profiled synchronous distressed structure；And
Implement the prefabricated synchronous deformation operation of flexural deformation in the 3rd embodiment aspect as shown in Figure 4 C, it is in deformable base construction
The outer surface 21a of 20 flow plate 21 is directed away from the protuberance 230c of the oscillating plate 230 direction flexural deformation, scratches simultaneously
Property plate 22 movable part 22a region and the protuberance away from the oscillating plate 230 is also directed to beyond other regions of movable part 22a
230c direction flexural deformation, to form the bending synchronization distressed structure of prefabricated profiled synchronous distressed structure；Therefore first implements
The movable part 22a of the flex plate 22 of prefabricated profiled synchronous distressed structure region is formed in aspect and the 3rd embodiment aspect with shaking
It is maintained between the protuberance 230c of dynamic plate 230 within the scope of a required certain depth δ, and then forms this two implementation
The fluid control that the bending of the flow plate 21 and flex plate 22 with prefabricated profiled synchronous distressed structure of aspect synchronously deforms
Device 2.
As shown in Fig. 5 A and Fig. 5 C, in this 5th embodiment aspect and the 7th embodiment aspect, prefabricated profiled synchronous deformation
Structure is the taper synchronization distressed structure being made up of flow plate 21 and flex plate 22, that is, prefabricated profiled synchronous distressed structure
Taper synchronization deformed region be i.e. two embodiment aspect in movable part 22a region and beyond other regions of movable part 22a
Synchronous distressed structure is a taper synchronization distressed structure, the direction that only only both taper synchronously deforms difference.And such as
The prefabricated synchronization for implementing synchronously to be deformed into pyramidal structure in the 5th embodiment aspect shown in Fig. 5 A deforms operation, and it is in deformable
The outer surface 21a of the flow plate 21 of base construction 20 towards the protuberance 230c close to the oscillating plate 230 direction taper become
Shape, while the movable part 22a of flex plate 22 region and be also directed to beyond other regions of movable part 22a close to the oscillating plate 230
Protuberance 230c direction taper-deformation, to form the taper synchronization distressed structure of prefabricated profiled synchronous distressed structure；And
The prefabricated synchronization for implementing synchronously to be deformed into pyramidal structure in the 7th embodiment aspect as shown in Figure 5 C deforms operation, and it is in variable
The outer surface 21a of the flow plate 21 of shape base construction 20 is directed away from the protuberance 230c of the oscillating plate 230 direction taper
Deformation, while the movable part 22a of flex plate 22 region and be also directed to beyond other regions of movable part 22a away from the oscillating plate
230 protuberance 230c direction taper-deformation, to form the taper synchronization distressed structure of prefabricated profiled synchronous distressed structure；
Therefore to form the movable part of the flex plate 22 of prefabricated profiled synchronous distressed structure in the 5th embodiment aspect and the 7th embodiment aspect
It is maintained between 22a region and the protuberance 230c of oscillating plate 230 within the scope of a required certain depth δ, and then
The taper for forming the flow plate 21 and flex plate 22 with prefabricated profiled synchronous distressed structure of this two embodiment aspect synchronously becomes
The fluid control device 2 of shape.
As shown in Fig. 6 A and Fig. 6 C, in this 9th embodiment aspect and the 11st embodiment aspect, prefabricated profiled synchronous change
Shape structure is the projection plane synchronization distressed structure being made up of flow plate 21 and flex plate 22, that is, prefabricated profiled synchronization becomes
The projection plane synchronization deformed region of shape structure be in movable part 22a region and beyond other regions of movable part 22a, i.e., this two
The synchronous distressed structure of embodiment aspect is a projection plane synchronization distressed structure, only only both projection plane synchronization deformation
Direction difference.And implement synchronously to be deformed into the prefabricated synchronization of projection planar structure in the 9th embodiment aspect as shown in Figure 6A
Operation is deformed, it in movable part 22a region and is exceeded in the outer surface 21a of the flow plate 21 of deformable base construction 20
Other regions of movable part 22a are towards the direction projection plane deformation of the protuberance 230c close to the oscillating plate 230, while flex plate
22 movable part 22a region and it is also directed to beyond other regions of movable part 22a close to the protuberance 230c's of the oscillating plate 230
Direction projection plane deformation, to form the projection plane synchronization distressed structure of prefabricated profiled synchronous distressed structure；And such as Fig. 7 C
The prefabricated synchronization for implementing synchronously to be deformed into projection planar structure in the 11st shown embodiment aspect deforms operation, and it is in variable
The outer surface 21a of the flow plate 21 of shape base construction 20 is directed away from the protuberance 230c of the oscillating plate 230 direction projection
Plane deformation, while the movable part 22a of flex plate 22 region and be also directed to beyond other regions of movable part 22a away from the vibration
The protuberance 230c of plate 230 direction projection plane deformation, it is same to form the projection plane of prefabricated profiled synchronous distressed structure
Walk distressed structure；Therefore to form the flexibility of prefabricated profiled synchronous distressed structure in the 9th embodiment aspect and the 11st embodiment aspect
The model of a required certain depth δ is maintained between the movable part 22a of plate 22 region and the protuberance 230c of oscillating plate 230
Within enclosing, and then form the flow plate 21 with prefabricated profiled synchronous distressed structure and flex plate 22 of this two embodiment aspect
The fluid control device 2 of projection plane synchronization deformation.
And for example foregoing, in some embodiments, prefabricated profiled synchronous distressed structure is flow plate 21 and flex plate 22
Also can be only Partial synchronization distressed structure, that is, the Partial synchronization deformed region of prefabricated profiled synchronous distressed structure is only can
Dynamic portion 22a regions, the Partial synchronization distressed structure of prefabricated profiled synchronous distressed structure can be warp architecture or tapered structure or
Projection planar structure, but be also not limited.
As shown in Fig. 4 B and Fig. 4 D, in the second embodiment aspect and the 4th embodiment aspect, prefabricated profiled synchronous deformation knot
The part that structure is made up of flow plate 21 and flex plate 22 bends synchronous distressed structure, that is, prefabricated profiled synchronous distressed structure
Part flexural deformation region be that the synchronous distressed structure of i.e. two embodiment aspect is that a bending is same in movable part 22a regions
Distressed structure is walked, the direction that only only both bending synchronously deforms difference.It is real in the second embodiment aspect as shown in Figure 4 B
The prefabricated synchronous deformation operation that part bending synchronously deforms is applied, it is in the outer surface of the flow plate 21 of deformable base construction
The movable part 22a regions that 21a correspondingly confluxes at opening portion 212 are curved towards the direction of the protuberance 230c close to the oscillating plate 230
Song deformation, while the movable part 22a regions of flex plate 22 are also directed to the direction bending close to the protuberance 230c of the oscillating plate 230
Deformation, synchronous distressed structure is bent to reach prefabricated profiled synchronous distressed structure part；And the 4th as shown in Figure 4 D implements
Implement the prefabricated synchronous deformation operation of pre-erection bending in aspect, it is in the flow plate of prefabricated profiled synchronous distressed structure
Correspondingly the conflux movable part 22a regions of opening portion 212 of 21 outer surface 21a are directed away from the protuberance of the oscillating plate 230
230c direction flexural deformation, while the movable part 22a regions of flex plate 22 are also directed to the protuberance away from the oscillating plate 230
230c direction flexural deformation, synchronous distressed structure is bent to form prefabricated profiled synchronous distressed structure part；Therefore second is real
Apply in aspect and the 4th embodiment aspect to form the movable part 22a of the flex plate 22 of prefabricated profiled synchronous distressed structure region
It is maintained between the protuberance 230c of oscillating plate 230 within the scope of a required certain depth δ, and then forms this two reality
Apply the stream that the part bending of the flow plate 21 and flex plate 22 with prefabricated profiled synchronous distressed structure of aspect synchronously deforms
Member control apparatus 2.
, can prefabricated profiled synchronous deformation in the 6th embodiment aspect and the 8th embodiment aspect as shown in Fig. 5 B and Fig. 5 D
Structure is the part conic synchronization distressed structure of flow plate 21 and flex plate 22, that is, the portion of prefabricated profiled synchronous distressed structure
Reference cone deformation region is that the synchronous distressed structure of i.e. two embodiment aspect is that a taper synchronously becomes in movable part 22a regions
Shape structure, the direction that only only both taper synchronously deforms difference.Implementation in the 6th embodiment aspect as shown in Figure 5 B
Divide the prefabricated synchronous deformation operation for being synchronously deformed into pyramidal structure, it is in the outside of flow plate 21 of deformable base construction 20
The movable part 22a regions that surface 21a correspondingly confluxes at opening portion 212 are towards the side of the protuberance 230c close to the oscillating plate 230
It is also directed to the movable part 22a regions of taper-deformation, while flex plate 22 close to the protuberance 230c of the oscillating plate 230 direction
Taper-deformation, to reach prefabricated profiled synchronous distressed structure part conic synchronization distressed structure；And the as shown in Figure 5 D the 8th
Implementation section is synchronously deformed into the prefabricated synchronous deformation operation of pyramidal structure in embodiment aspect, and it is in deformable base construction
Correspondingly the conflux movable part 22a regions of opening portion 212 of the outer surface 21a of flow plate 21 are directed away from the prominent of the oscillating plate 230
Go out portion 230c direction taper-deformation, while the movable part 22a regions of flex plate 22 are also directed to the protrusion away from the oscillating plate 230
Portion 230c direction taper-deformation, to form the part conic synchronization distressed structure of prefabricated profiled synchronous distressed structure；Therefore the
To form the movable part 22a's of the flex plate 22 of prefabricated profiled synchronous distressed structure in six embodiment aspects and the 8th embodiment aspect
It is maintained between region and the protuberance 230c of oscillating plate 230 within the scope of a required certain depth δ, and then forms this
The part conic synchronously deformation of the flow plate 21 and flex plate 22 with prefabricated profiled synchronous distressed structure of two embodiment aspects
Fluid control device 2.
As shown in Fig. 6 B and Fig. 6 D, in the tenth embodiment aspect and the 12nd embodiment aspect, prefabricated profiled synchronous deformation
Structure is the part projection plane synchronization distressed structure of flow plate 21 and flex plate 22, that is, prefabricated profiled synchronous distressed structure
Part projection plane deformation region be that the synchronous distressed structure of i.e. two embodiment aspect is one convex in movable part 22a regions
Block plane synchronization distressed structure, the only only direction difference of both projection plane synchronization deformations.As shown in Figure 6B the tenth
Implementation section is synchronously deformed into the prefabricated synchronous deformation operation of projection planar structure in embodiment aspect, and it is in deformable pedestal knot
The movable part 22a regions that the outer surface 21a of the flow plate 21 of structure 20 correspondingly confluxes at opening portion 212 are towards close to the oscillating plate
230 protuberance 230c direction projection plane deformation, while the movable part 22a regions of flex plate 22 are also directed to close to the vibration
The protuberance 230c of plate 230 direction projection plane deformation, put down with forming the part projection of prefabricated profiled synchronous distressed structure
Face synchronization distressed structure；And implementation section is synchronously deformed into projection planar structure in the 12nd embodiment aspect as shown in Figure 6 D
Prefabricated synchronous deformation operation, is correspondingly to conflux out in the outer surface 21a of the flow plate 21 of prefabricated profiled synchronous distressed structure
The movable part 22a regions of oral area 212 are directed away from the protuberance 230c of the oscillating plate 230 direction projection plane deformation, simultaneously
The movable part 22a regions of flex plate 22 are also directed to the direction projection plane deformation of the protuberance 230c away from the oscillating plate 230, with
Form the part projection plane synchronization distressed structure of prefabricated profiled synchronous distressed structure；Therefore the tenth embodiment aspect and the 12nd is in fact
Apply in aspect to form the movable part 22a of the flex plate 22 of prefabricated profiled synchronous distressed structure region and oscillating plate 230
It is maintained between protuberance 230c within the scope of a required certain depth δ, and then forms having for this two embodiment aspect
The fluid control dress of the part projection plane synchronization deformation of the flow plate 21 and flex plate 22 of prefabricated profiled synchronous distressed structure
Put 2.
And for example foregoing, in some embodiments, prefabricated profiled synchronous distressed structure is flow plate 21 and the institute of flex plate 22
The curved surface synchronization distressed structure aspect of composition, the curved surface synchronization distressed structure are formed by the curved surface of each and every one more different curvatures, or
Person is that the curved surface of same curvature is formed, and refers to and implements synchronously to be deformed into curved-surface structure in Fig. 7 the 13rd embodiment aspect
Prefabricated synchronous deformation operation, it in the outer surface 21a of the flow plate 21 of deformable base construction is multiple different curvatures that it, which is,
The deformation that curved surface is formed, while the deformation that the surface of flex plate 22 is also made up of the curved surface of multiple different curvatures, to form
The curved surface synchronization distressed structure of prefabricated profiled synchronous distressed structure, so that the curved surface of prefabricated profiled synchronous distressed structure is synchronous
It is maintained within the scope of required certain depth δ, and then forms between distressed structure and the protuberance 230c of oscillating plate 230
The fluid control dress that the curved-surface structure of flow plate 21 and flex plate 22 with prefabricated profiled synchronous distressed structure synchronously deforms
Put 2.
In other embodiments, the synchronous distressed structure of prefabricated profiled synchronous distressed structure, which differs, is set to conformation of rules
Synchronous distressed structure, it also can be irregular synchronous distressed structure, imply that the flow plate of prefabricated profiled synchronous distressed structure
21 and the surface of flex plate 22 be irregular synchronous distressed structure, but be not limited.It is prefabricated in other embodiments
The synchronous distressed structure of shaping can be protrusion synchronous distressed structure of the direction close to the protuberance 230c directions of the oscillating plate 230,
Or can be the synchronous distressed structure of protrusion in the protuberance 230c directions for being directed away from the oscillating plate 230, the protrusion synchronously deforms
A certain depth δ is defined between structure and the protuberance 230c of the oscillating plate 230.
Produced prefabricated profiled synchronous distressed structure can have many embodiment party in numerous embodiment aspects described in this case
Formula, and can appoint according to situation is actually applied and apply change, it is not limited by foregoing in a manner of these.
Through above-mentioned various embodiment aspects, group is carried out to have the deformable pedestal 20 of the prefabricated profiled synchronous distressed structure
Dress, can make between the movable part 22a of the flex plate 22 of prefabricated profiled synchronous distressed structure and the protuberance 230c of oscillating plate 230
It is maintained within the scope of required certain depth δ, is limited through this certain depth δ scope, then can avoid fluid control
Error when device 2 assembles causes gap excessive or too small and its caused flex plate 22 is in contact with each other with piezo-activator 23
Interference, so make fluid efficiency of transmission is bad, avoid produce noise the problems such as.
In summary, this case can be implemented on outside before assembling in fluid control device through in deformable base construction
Apply the prefabricated of an at least active force and synchronously deform operation, it is produced synchronous deformation, to form prefabricated profiled synchronously deformation
Structure, and the surface of the deformable base construction that an at least active force is contacted produces an at least distressed structure, and make its with
Piezo-activator assembling after, can make the flex plate of prefabricated profiled synchronous distressed structure movable part and oscillating plate protuberance it
Between be maintained within the scope of required certain depth, so make prefabricated profiled synchronous distressed structure flex plate it is movable
Between portion and the protuberance of oscillating plate in the range of adjustment to the certain depth of demand, and then reduce flex plate and piezo-activator
Contact interference, in order to can lifting fluid transmission efficiency, more can reach to reach can reduce product not the effect of reducing noise
Yield, the quality of lifting fluid control device.
This case appointed as person familiar with the technology apply craftsman think and be it is all as modification, it is so neither de- such as attached claim
Be intended to Protector.【Symbol description】
100：Known fluid control device
101：Substrate
102：Piezo-activator
103：Gap
2：Fluid control device
20：Deformable base construction
21：Flow plate
21a：Outer surface
210：Access aperture
211：Conflux groove
212：Conflux opening portion
22：Flex plate
22a：Movable part
22b：Fixed part
23：Piezo-activator
230：Oscillating plate
230a：Second surface
230b：First surface
230c：Protuberance
231：Housing
232：Support
233：Piezoelectric element
26：Housing
26a：Accommodation space
261：Tap
260：Side wall
A：Temporary chamber
δ：Certain depth
h：Spacing
d、d’：Displacement
θ：Angle
S31~S33：The step of manufacture method of fluid control device
Claims (20)
1. a kind of manufacture method of fluid control device, comprising:
(a) housing, a piezo-activator and a deformable base construction are provided, the piezo-activator is by a piezoelectric element and one
Oscillating plate is formed, and the oscillating plate has first surface and corresponding second surface, and the second surface has a protuberance, should
Deformable base construction includes a flow plate and a flex plate, and the flex plate has a movable part；
(b) flex plate of the deformable base construction and the flow plate are stacked with engaging and are implemented on outside apply at least
One prefabricated synchronous deformation operation of one active force, make the flex plate and the flow plate to synchronize deformation construction one prefabricated profiled
Synchronous distressed structure, a surface of the deformable base construction that an at least active force is contacted produce at least one deformation knot
Structure；And
(c) sequentially the housing, the piezo-activator and the deformable base construction are stacked with, and carry out locating engagement, should
The prefabricated profiled synchronous distressed structure of deformable base construction is the protuberance relative to the oscillating plate, so that the flexibility
A certain depth is defined between the movable part of plate and the protuberance of the oscillating plate.
2. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the prefabricated synchronous deformation operation is applied
A few active force is added at least on a surface of flex plate for the deformable base construction, so that the deformable base construction production
Raw synchronous deformation construction prefabricated profiled synchronous distressed structure.
3. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the prefabricated synchronous deformation operation is applied
At least on a surface of the flow plate in the deformable base construction for a few active force is added to, so that deformable base construction
Produce the synchronous deformation construction prefabricated profiled synchronous distressed structure.
4. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the prefabricated profiled synchronous deformation
One synchronous deformed region of structure be in the movable part region of the flex plate, and the prefabricated profiled synchronous distressed structure be one
Synchronous distressed structure is bent, a certain depth is defined between the bending synchronization distressed structure and the protuberance of the oscillating plate.
5. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the prefabricated profiled synchronous deformation
One synchronous deformed region of structure is that and the prefabricated profiled synchronous distressed structure one is bored in the movable part region of the flex plate
Just as step distressed structure, a certain depth is defined between the taper synchronization distressed structure and the protuberance of the oscillating plate.
6. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the prefabricated profiled synchronous deformation
One synchronous deformed region of structure is in the movable part region of the flex plate, and the one of the prefabricated profiled synchronous distressed structure
Projection plane synchronization distressed structure, it is specific to define one between the projection plane synchronization distressed structure and the protuberance of the oscillating plate
Depth.
7. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the prefabricated profiled synchronous deformation
One synchronous deformed region of structure is in the movable part region of the flex plate and beyond movable part region, the prefabricated profiled synchronization
A certain depth is defined between distressed structure and the protuberance of the oscillating plate.
8. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the prefabricated profiled synchronous deformation
One synchronous deformed region of structure is in the movable part region of the flex plate and beyond movable part region, and this is prefabricated profiled same
It is the synchronous distressed structure of a bending to walk distressed structure, is defined between the bending synchronization distressed structure and the protuberance of the oscillating plate
One certain depth.
9. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the prefabricated profiled synchronous deformation
One synchronous deformed region of structure is in the movable part region of the flex plate and beyond movable part region, and this is prefabricated profiled same
Step distressed structure is a taper synchronization distressed structure, is defined between the taper synchronization distressed structure and the protuberance of the oscillating plate
One certain depth.
10. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the prefabricated profiled synchronous change
One synchronous deformed region of shape structure is that and this is prefabricated profiled in the movable part region of the flex plate and beyond movable part region
Synchronous distressed structure is the protuberance of a projection plane synchronization distressed structure, the projection plane synchronization distressed structure and the oscillating plate
Between define a certain depth.
11. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the prefabricated profiled synchronous change
The curved surface synchronization distressed structure that shape structure is formed for the flow plate and the flex plate, the curved surface synchronization distressed structure are multiple
The curved surface for differing curvature is formed, adopted between the curved surface synchronization distressed structure of the flex plate and the protuberance of the oscillating plate
Go out a certain depth.
12. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the prefabricated profiled synchronous change
The curved surface synchronization distressed structure that shape structure is formed for the flow plate and the flex plate, the curved surface synchronization distressed structure are multiple
The curved surface of same curvature is formed, and justice goes out between the curved surface synchronization distressed structure of the flex plate and the protuberance of the oscillating plate
One certain depth.
13. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the prefabricated profiled synchronous change
The irregular synchronous distressed structure that shape structure is formed for the flow plate and the flex plate, this of the flex plate are irregular
Justice goes out a certain depth between the protuberance of synchronous distressed structure and the oscillating plate.
14. the manufacture method of the fluid control device as any one of claim 1,2 to 13, it is characterised in that this is pre-
The synchronous distressed structure that type is made is that one protruded towards the protuberance direction close to the oscillating plate protrudes synchronous distressed structure, should
A certain depth is defined between prominent synchronous distressed structure and the protuberance of the oscillating plate.
15. the manufacture method of the fluid control device as any one of claim 1,2-13, it is characterised in that this is prefabricated
The synchronous distressed structure of shaping is to be directed away from the synchronous distressed structure of a protrusion that the protuberance direction of the oscillating plate protrudes, and this is prominent
Go out between the protuberance of synchronous distressed structure and the oscillating plate and define a certain depth.
16. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the vibration of the piezo-activator
Plate is square, and flexible vibration, and the piezo-activator further includes:
One housing, around the outside for being arranged at the oscillating plate；And
An at least support, it is connected between a side of the oscillating plate and the housing, for resilient support.
17. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the prefabricated profiled synchronous change
Positioning is engaged by a medium between shape structure and the oscillating plate, and the medium is a sticker.
18. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the housing is piezoelectric actuated with this
The temporary chamber for forming fluid circulation is stacked between device, and the housing is provided with least one tap, is communicated in the temporary storage cavity
Room is outside with the housing.
19. the manufacture method of fluid control device as claimed in claim 1, it is characterised in that the flex plate has a stream
Hole, and be arranged at the center of the movable part or be adjacent at center, so that fluid passes through.
20. the manufacture method of fluid control device as claimed in claim 19, it is characterised in that the flow plate has at least one
Access aperture, at least one, which are confluxed, groove and one confluxes opening portion, and the access aperture at least one is confluxed groove through the flow plate and with this
It is connected, and the other end of the groove that confluxes is communicated in the opening portion of confluxing, and the opening portion of confluxing is corresponding to the flex plate
The movable part, and connected with the stream hole of the flex plate.
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|---|---|---|---|
| CN201610801569.7A CN107795469B (en) | 2016-09-05 | 2016-09-05 | Method for manufacturing fluid control device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610801569.7A CN107795469B (en) | 2016-09-05 | 2016-09-05 | Method for manufacturing fluid control device |
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| CN107795469B CN107795469B (en) | 2020-10-02 |
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| JP2005282387A (en) * | 2004-03-26 | 2005-10-13 | Matsushita Electric Works Ltd | Piezo-electric diaphragm pump |
| CN102979705A (en) * | 2011-09-06 | 2013-03-20 | 株式会社村田制作所 | Fluid control device |
| CN102979704A (en) * | 2011-09-06 | 2013-03-20 | 株式会社村田制作所 | Fluid control device |
| WO2013084909A1 (en) * | 2011-12-09 | 2013-06-13 | 株式会社村田製作所 | Gas control apparatus |
| CN203476669U (en) * | 2013-06-24 | 2014-03-12 | 研能科技股份有限公司 | Miniature gas pressure power unit |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005282387A (en) * | 2004-03-26 | 2005-10-13 | Matsushita Electric Works Ltd | Piezo-electric diaphragm pump |
| CN102979705A (en) * | 2011-09-06 | 2013-03-20 | 株式会社村田制作所 | Fluid control device |
| CN102979704A (en) * | 2011-09-06 | 2013-03-20 | 株式会社村田制作所 | Fluid control device |
| WO2013084909A1 (en) * | 2011-12-09 | 2013-06-13 | 株式会社村田製作所 | Gas control apparatus |
| CN203476669U (en) * | 2013-06-24 | 2014-03-12 | 研能科技股份有限公司 | Miniature gas pressure power unit |
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| CN107795469B (en) | 2020-10-02 |
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