CN206129568U

CN206129568U - Miniature fluid controlling means

Info

Publication number: CN206129568U
Application number: CN201621037318.8U
Authority: CN
Inventors: 陈世昌; 黄启峰; 韩永隆; 廖家淯; 陈寿宏; 黄哲威; 廖鸿信; 陈朝治; 程政玮; 张英伦; 张嘉豪; 李伟铭
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2016-01-29
Filing date: 2016-09-05
Publication date: 2017-04-26
Anticipated expiration: 2026-09-05
Also published as: CN107023460A; CN107023461A; CN107023462A; CN208456829U; CN107023469A; CN212672033U; CN208456827U; CN107023466A; CN107023464A; CN107023465A; CN107023459A; CN208474081U; CN107023457A; CN208456828U; CN107023456A; CN107023459B; CN208456830U; CN107023468A; CN107023467A; CN107023463A

Abstract

The utility model provides a miniature fluid controlling means, is including piling up air intake plate, resonance sheet and the piezoelectric actuator of setting, and wherein air intake plate has an at least inlet port, at least one converge round and constitute a central concave part that converges the cavity, resonance sheet has the cavity hole, piezoelectric actuator has suspension board, frame and piezoceramics board, wherein have the first cavity that a clearance formed between resonance sheet and the piezoelectric actuator, when the piezoelectric actuator hand drive, gaseous this at least inlet port by this air intake plate channels into, passes through this and at least one converges the round and compile to this center concave part, this cavity hole of this resonance sheet that flows through again to in getting into this first cavity, transmit downwards to last by this piezoelectric actuator again and release gas.

Description

Minisize fluid control device

【Technical field】

This case is with regard to a kind of minisize fluid control device, it is adaptable to a kind of micro ultrathin and quiet micro pressure power Device.

【Background technology】

The at present either industry such as medicine, computer technology, printing, energy in each field, product is towards sophistication and micro- Littleization direction is developed, and the fluid delivery structure that wherein product such as Micropump, aerosol apparatus, ink gun, industrial printing devices is included is Its key technology, is the important content of development therefore how to break through its technical bottleneck by means of innovation structure.

For example, it is many to need, using the instruments or equipment of Pneumatic pressure power driving, generally to adopt to pass in medicinal industry System motor and air pressure valve are reaching the purpose of its gas conveying.However, being limited to the structure of these conventional motors and gas trap Restriction so that such instrument and equipment be difficult to reduce its volume so that the volume of single unit system cannot reduce, that is, be difficult to reality The target being now thinned, therefore cannot also install and put on portable apparatus or use cooperatively with portable apparatus, convenience is not enough. Additionally, these conventional motors and gas trap can also produce noise when start, make user impatient, cause to use upper not convenient And it is uncomfortable.

Therefore, how developing one kind can improve above-mentioned known technology disappearance, can make conventionally employed minisize fluid control device Instrument or equipment reach small volume, miniaturization and quiet, and then reach the minisize fluid control of light comfortable portable purpose Device processed, actually problem at present in the urgent need to address.

【Utility model content】

The main purpose of this case is to provide a kind of suitable for portable or Wearable instrument or the minisize fluid equipment Control device, by the gas pulsation that the start of piezoelectric ceramic plate high frequency is produced, produces barometric gradient in the runner after design, and Gas flow at high rates is made, and enters the resistance difference of outgoing direction through runner, gas is transmitted to outlet side by suction side, in order to solution Volume that the instrument or equipment of the employing minisize fluid control device of known technology possesses is big, be difficult to be thinned, cannot reach Portable purpose, and the noise disappearance such as big.

It is that the one broader aspect of implementing of this case is to provide a kind of minisize fluid control device up to above-mentioned purpose, it is adaptable to One micro pressure power set, including an inlet plate, a resonance plate and a piezo-activator, the inlet plate has an at least air inlet Hole, at least one are confluxed and round and constitute a central recess for confluxing chamber, and for importing gas, this confluxes an at least air inlet Round to should air inlet, and guide the gas of the air inlet to converge into the chamber that confluxes that the central recess is constituted, this is total to The piece that shakes has a hollow bore, to should inlet plate the chamber that confluxes, and the piezo-activator there is a suspension board, outside one Frame and a piezoelectric ceramic plate, the suspension board have the length between 4mm to 8mm, the width between 4mm to 8mm with And the thickness between 0.1mm to 0.4mm, the housing have an at least support, be connected in the suspension board and the housing Between, and piezoelectric ceramic plate is attached at a first surface of the suspension board, and with being not more than the length of side of the suspension board length of side, With the length between 4mm to 8mm, between 4mm to 8mm width and the thickness between 0.05mm to 0.3mm Degree, the length and the width ratio of the piezoelectric ceramic plate is between 0.5 times to 2 times, wherein the above-mentioned piezo-activator, should Resonance plate and the inlet plate are sequentially folded to reply to arrange positioning, and has a gap shape between the resonance plate and the piezo-activator Into a first chamber, during so that the piezo-activator is driven, gas is imported by an at least air inlet for the inlet plate, and Jing should At least one round that confluxes is collected to the central recess, passes through the hollow bore of the resonance plate, with the first chamber, Transmitted downwards by the space at least between a support of the piezo-activator again, with lasting pushing out gas.

It is that, up to above-mentioned purpose, another broader enforcement aspect of this case is suitable for provide a kind of minisize fluid control device In a micro pressure power set, including an inlet plate, a resonance plate and a piezo-activator, wherein the above-mentioned air inlet Plate, the resonance plate and the piezo-activator sequentially correspond to stacking and arrange positioning, and have between the resonance plate and the piezo-activator There is a gap to form a first chamber, when the piezo-activator is driven, gas is entered by the inlet plate, flows through the resonance plate, To transmit gas again in the first chamber.

【Description of the drawings】

Figure 1A is the front decomposition texture schematic diagram of the micro pressure power set that this case is preferred embodiment.

Figure 1B is the positive combination structural representation of the micro pressure power set shown in Figure 1A.

Fig. 2A is the back side decomposition texture schematic diagram of the micro pressure power set shown in Figure 1A.

Fig. 2 B are the back side combining structure schematic diagram of the micro pressure power set shown in Figure 1A.

Fig. 3 A are the positive combination structural representation of the piezo-activator of the micro pressure power set shown in Figure 1A.

Fig. 3 B are the back side combining structure schematic diagram of the piezo-activator of the micro pressure power set shown in Figure 1A.

Fig. 3 C are the cross-sectional view of the piezo-activator of the micro pressure power set shown in Figure 1A.Fig. 4 A are to figure 4C is various enforcement aspect schematic diagrams of piezo-activator.

Fig. 5 A to Fig. 5 E are that the local start of the minisize fluid control device of the micro pressure power set shown in Figure 1A is shown It is intended to.

Fig. 6 A are that the gas collection plate of the micro pressure power set shown in Figure 1A is illustrated with the collection pressure start of micro valve device Figure.

Fig. 6 B are that the gas collection plate of the micro pressure power set shown in Figure 1A is illustrated with the release start of micro valve device Figure.

Fig. 7 A to Fig. 7 E are the collection pressure illustrative view of the micro pressure power set shown in Figure 1A.

Fig. 8 is the blood pressure lowering of the micro pressure power set shown in Figure 1A or release illustrative view.

【Specific embodiment】

Embody this pattern characteristics will in detail to describe in the explanation of back segment with some exemplary embodiments of advantage.It should be understood that This case can have various changes in different aspects, and it is all without departing from the scope of this case, and explanation therein and diagram Inherently it is illustrated as being used, and nand architecture is in restriction this case.

The micro pressure power set 1 of this case are to can be applicable to the works such as the raw skill of medicine, the energy, computer technology or printing Industry, in order to transmit gas, but is not limited.Figure 1A, Figure 1B, Fig. 2A, Fig. 2 B and Fig. 7 A to 7E figures are referred to, Figure 1A is this The front decomposition texture schematic diagram of the micro pressure power set of case preferred embodiment, Figure 1B is that the micro pressure shown in Figure 1A is moved The positive combination structural representation of power apparatus, Fig. 2A are that the back side decomposition texture of the micro pressure power set shown in Figure 1A is illustrated Figure, Fig. 2 B are then the back side combining structure schematic diagram of the micro pressure power set shown in Figure 1A, and Fig. 7 A to 7E figures are Figure 1A institutes The collection pressure illustrative view of the micro pressure power set for showing.As shown in Figure 1A and Fig. 2A, the micro pressure power set 1 of this case It is to form by combined by minisize fluid control device 1A and micro valve device 1B, wherein minisize fluid control device 1A has The structures such as housing 1a, piezo-activator 13, insulating trip 141,142 and conducting strip 15, wherein, housing 1a be comprising gas collection plate 16 and Base 10, base 10 is not limited then comprising inlet plate 11 and resonance plate 12.Piezo-activator 13 corresponds to resonance plate 12 and arrange, and make inlet plate 11, resonance plate 12, piezo-activator 13, insulating trip 141, conducting strip 15, another insulating trip 142, The grade of gas collection plate 16 sequentially stacks setting, and the piezo-activator 13 is by a suspension board 130, at least a housing 131, a support 132 and one piezoelectric ceramic plate 133 assemble jointly；And micro valve device 1B goes out comprising a valve sheet 17 and Oralia 18 but it is not limited.And in the present embodiment, as shown in Figure 1A, gas collection plate 16 is not only single plate structure, also The frame structure that can have side wall 168 for periphery, and the gas collection plate 16 is with the length between 9mm to 17mm, between 9mm To the width between 17mm, and the length and the width ratio are between 0.53 times to 1.88 times, and be made up of the periphery The plate common definition of side wall 168 and its bottom goes out an accommodation space 16a, with housing so that the piezo-activator 13 is arranged at this In the 16a of space, therefore after the micro pressure power set 1 of this case are completed, then its front schematic view can as shown in Figure 1B, with And shown in Fig. 7 A to Fig. 7 E, it is seen that minisize fluid control device 1A be it is corresponding with micro valve device 1B assemble, also I.e. the valve sheet 17 and exit plate 18 of micro valve device 1B sequentially stack setting and are positioned at minisize fluid control device 1A Gas collection plate 16 on form.And the schematic rear view that it is completed release through hole 181 then in the visible exit plate 18 and go out Mouth 19, to be connected with a device (not shown), release through hole 181 is then supplied so that the gas in micro valve device 1B for outlet 19 Discharge, with up to effect of release.Assembling by this minisize fluid control device 1A and micro valve device 1B is arranged, so that An at least air inlet 110 air inlet of the gas from the inlet plate 11 of minisize fluid control device 1A, and through piezo-activator 13 Start, and flow through that multiple pressure chamber are (not shown) to continue to transmit, and then gas can be made unidirectional in micro valve device 1B Flowing, and by acute build up of pressure in the device (not shown) being connected with the port of export of micro valve device 1B, and work as and need to carry out During release, then regulate and control the output of minisize fluid control device 1A, make in exit plate 18 of the gas via micro valve device 1B Release through hole 181 and discharge, to carry out release.

Please continue refering to Figure 1A and Fig. 2A, as shown in Figure 1A, the inlet plate 11 of minisize fluid control device 1A is that have first Surface 11b, second surface 11a and at least an air inlet 110, in the present embodiment, the quantity of air inlet 110 is for 4, but not As limit, it is through the first surface 11b and second surface 11a of inlet plate 11, mainly outer suitable from device to supplied gas Answer the effect of atmospheric pressure and flow in minisize fluid control device 1A from an at least air inlet 110.And and as shown in Figure 2 A, From the first surface 11b of inlet plate 11, conflux round 112 with least one thereon, to the second surface of inlet plate 11 An at least air inlet 110 of 11a is correspondingly arranged.In the present embodiment, quantity and the air inlet 110 pairs of its round 112 that confluxes Should, its quantity is 4, but is not limited thereto, and is wherein with central recess at the center exchange of these rounds 112 that conflux 111, and central recess 111 is connected with the round 112 that confluxes, and the gas of the round 112 that confluxes can will be entered from air inlet 110 whereby Body is guided and confluxed and is concentrated to central recess 111 and transmits.It is so that in the present embodiment, inlet plate 11 has integrally formed air inlet Hole 110, conflux round 112 and central recess 111, and one is correspondingly formed at the central recess 111 confluxes the confluxing of gas Chamber, it is temporary with supplied gas.In some embodiments, the material of inlet plate 11 is can be but not be limited to by a stainless steel institute Constitute, and its thickness is that between 0.4mm to 0.6mm, and its preferred values is 0.5mm, but is not limited.In other realities In applying example, the depth by the chamber that confluxes constituted at the central recess 111 is identical with the depth of these rounds 112 that conflux, and The preferred values of conflux chamber and the depth of the round 112 that confluxes is between 0.2mm to 0.3mm, but to be not limited.Altogether The piece 12 that shakes is made up of a flexible materials, but is not limited, and has a hollow bore 120 on resonance plate 12, is Arrange corresponding to the central recess 111 of the first surface 11b of inlet plate 11, so that gas circulation.In other embodiments, Resonance plate 12 is can be made up of a copper material, but is not limited, and its thickness be between 0.03mm to 0.08mm, and Its preferred values is 0.05mm, but is also not limited.

Please refer to Fig. 3 A, Fig. 3 B and Fig. 3 C, it is the piezoelectricity of the micro pressure power set respectively shown in Figure 1A The positive structure schematic of actuator, structure schematic diagram and cross-sectional view, piezo-activator 13 is hanged by one Kickboard 130, at least a housing 131, a support 132 and a piezoelectric ceramic plate 133 assemble jointly, wherein, the piezoelectricity Ceramic wafer 133 is attached at the first surface 130b of suspension board 130, produces deformation to drive the suspension board 130 to applied voltage Bending vibration, suspension board 130 has central part 130d and peripheral part 130e, be with when piezoelectric ceramic plate 133 is driven by voltage, Suspension board 130 can be by central part 130d to peripheral part 130e bending vibrations, and an at least support 132 is to be connected to suspension Between plate 130 and housing 131, in the present embodiment, the support 132 be connected in suspension board 130 and housing 131 it Between, its two-end-point is to be connected to housing 131, suspension board 130, to provide resilient support, and in support 132, suspension board 130 And an at least space 135 is had more between housing 131, circulate to supplied gas, and the suspension board 130, housing 131 and support 132 kenel and quantity are with various changes.In addition, housing 131 is to surround to be arranged at the outside of suspension board 130, and have The conductive connecting pin 134 of one outside projection, to be used for electrical connection, but is not limited.In the present embodiment, suspension board 130 It is for the structure of a cascaded surface, to imply that the second surface 130a in suspension board 130 with more a convex portion 130c, convex portion 130c can For but be not limited to a circular protrusions structure, and the height of convex portion 130c is that between 0.02mm to 0.08mm, and preferred values is 0.03mm, 0.55 times of the minimum length of side of its a diameter of suspension board 130 of size.Be please refer to Fig. 3 A and Fig. 3 C it is visible, The surface of the convex portion 130c of suspension board 130 is the second surface 131a coplines with housing 131, and the second table of suspension board 130 The second surface 132a of face 130a and support 132 is also copline, and the suspension board 130 convex portion 130c and housing 131 the It is that there is a specific depth between the second surface 132a of the second surface 130a and support 132 of two surface 131a and suspension board 130 Degree.As for the first surface 130b of suspension board 130, then as shown in Fig. 3 B and Fig. 3 C, its first surface 131b with housing 131 and The first surface 132b of support 132 is smooth coplanar structure, and piezoelectric ceramic plate 133 is then attached at this smooth suspension board At 130 first surface 130b.In other embodiments, the kenel of suspension board 130 also can be for a two-sided smooth tabular just Square structure, is not limited thereto, and can appoint and apply change according to situation is actually applied.In some embodiments, suspension board 130, Support 132 and housing 131 are the structures that can be formed in one, and can be made up of a metallic plate, for example can be by stainless steel Matter is constituted, but is not limited.And in some embodiments, the thickness of suspension board 130 be between 0.1mm to 0.4mm, And its preferred values is 0.27mm, the length of the another suspension board 130 is between 4mm to 8mm, and its preferred values can be for 6mm extremely 8mm, width are between 4mm to 8mm, and its preferred values can be 6mm to 8mm but be not limited.As for the thickness of the housing 131 Degree is that between 0.2mm to 0.4mm, and its preferred values is 0.3mm, but is not limited.

Again in other embodiments, the thickness of piezoelectric ceramic plate 133 be between 0.05mm to 0.3mm, and its Preferred values is 0.10mm, and the piezoelectric ceramic plate 133 have be not more than the length of side of suspension board 130 the length of side, with length between Between 4mm to 8mm, and its preferred values can for 6mm to 8mm, width between 4mm to 8mm, and its preferred values can for 6mm extremely The preferred values of 8mm, another length and width ratio is between 0.5 times to 2 times, to be so also not limited.In other embodiments, The length of side of piezoelectric ceramic plate 133 is smaller than the length of side of suspension board 130, and same design is the pros corresponding with suspension board 130 Shape platy structure, but be not limited thereto.

Related embodiment in the micro pressure power set 1 of this case, piezo-activator 13 so outstanding using square Kickboard 130, its reason is compared to circular suspension board (the circular suspension board of (j)～(l) aspects as shown in Fig. 4 A Fig. 4 A J0 design), the structure of the square suspension board 130 substantially has the advantage of power saving, because of the electric capacity operated under resonant frequency Property load, its power consumption can increase with risings of frequency, but because the square suspension board 130 of the length of side resonant frequency substantially compared with Circular suspension board j0 is low, therefore its relative power consumption is also significant lower, that is, this case adopts the piezoelectricity of square _type layout to cause Dynamic device 13, makes it have savings advantage, is particularly applied to object wearing device, and it is very important design focal point to save electric power.

Please continue refering to Fig. 4 A, 4B, 4C figure, it is the various enforcement aspect schematic diagrams for piezo-activator.As illustrated, then It can be seen that the suspension board 130 of piezo-activator 13, housing 131 and support 132 are that there can be various kenel, and can at least have figure Various aspects such as (a)～(l) shown in 4A Fig. 4 A, for example, (a) the housing a1 and suspension board a0 of aspect is for square knot Structure, and be between the two to link it, for example by multiple support a2：8, but be not limited, and in support a2 and suspension board It is with space a3, with supplied gas circulation between a0, housing a1.In another (i) aspect, its housing i1 and suspension board i0 are also same Sample is square structure, precisely because in only by 2 support i2 linking it；Separately, with further correlation technique, such as 4B, Shown in 4C figures, the suspension board of piezo-activator 13 can also have (s)～(x) shown in (m) as shown in Figure 4 B～(r) and Fig. 4 C Etc. various aspects, only in this little aspect, suspension board 130 and housing 131 are foursquare structure.For example, (m) aspect it Housing m1 and suspension board m0 are foursquare structure, and are between the two to link it, for example by multiple support m2：4, but It is not limited, and is with space m3, for fluid circulation between support m2 and suspension board m0, housing m1.And in this reality In applying example, the support m2 being linked between housing m1 and suspension board m0 is can be but not be limited to a plate connecting portion m2, and this plate connects Socket part m2 has both ends m2 ' and m2 ", wherein one end m2 ' is connected with housing m1, and the other end m2 " then with suspension board M0 connects, and this both ends m2 ' and m2 " it is to correspond to each other and be arranged on same axis.In (n) aspect, its same tool There are housing n1, suspension board n0 and the support n2 being connected between housing n1, suspension board n0 and the space circulated for fluid N3, and support n2 also can be but not be limited to a plate connecting portion n2, plate connecting portion n2 equally has both ends n2 ' and n2 ", and end N2 ' is connected with housing n1, and the other end n2 " be then connected with suspension board n0, only in this enforcement aspect, plate connecting portion n2 is To be connected to housing n1 and suspension board n0 between 0～45 degree of oblique angle, in other words, and both ends n2 ' and n2 " be not arranged at On same level axis, it is the setting relation for mutual dislocation.In (o) aspect, its housing o1, suspension board o0 and connection The structures such as the support o2 between housing o1, the suspension board o0 and space o3 for fluid circulation are similar with previous embodiment, Wherein only it is slightly different with (m) aspect as the design kenel of the plate connecting portion o2 of support, so in this aspect, the plate connecting portion The both ends o2 ' and o2 of o2 " is still to correspond to each other and be arranged on same axis.

Again in (p) aspect, it equally has housing p1, suspension board p0 and is connected between housing p1, suspension board p0 Support p2 and the structure such as space p3 for fluid circulation, in this enforcement aspect, have more as the plate connecting portion p2 of support Have a structures such as suspension board connecting portion p20, beam portion p21 and housing connecting portion p22, wherein beam portion p21 be arranged at suspension board p0 with it is outer In gap p3 between frame p1, and its direction for arranging is parallel to housing p1 and suspension board p0, and, suspension board connecting portion P20 is connected between beam portion p21 and suspension board p0, and housing connecting portion p22 is connected between beam portion p21 and housing p1, and The suspension board connecting portion p20 and housing connecting portion p22 also corresponds to each other and is arranged on same axis.

In (q) aspect, its housing q1, suspension board q0 and the support q2 being connected between housing q1, suspension board q0, with And it is similar with aforementioned (m), (o) aspect for the structure such as space q3 of fluid circulation, wherein only as the plate connecting portion q2 of support Design kenel be slightly different with (m), (o) aspect, in this aspect, suspension board q0 is that for foursquare kenel, and its is every While be respectively provided with two plate connecting portion q2 be connected with housing q1, and the both ends q2 ' and q2 of each of which plate connecting portion q2 " be similarly Correspond to each other and be arranged on same axis.But in (r) aspect, it also has housing r1, suspension board r0, support r2 And the component such as space r3, and support r2 also can be but not be limited to a plate connecting portion r2, in this embodiment, plate connecting portion r2 is For the structure of V-shaped, in other words, plate connecting portion r2 also to be connected to housing r1 and suspension board r0 between 0～45 degree of oblique angle, Therefore it is respectively provided with one end r2 in each plate connecting portion r2 " be connected with suspension board r0, and be connected with housing r1 with both ends r2 ', Imply that both ends b2 ' and end b2 " it is not arranged on same level axis.

Continue as shown in Figure 4 C, the outward appearance kenel of these (s)～(x) aspects approximately corresponds to (m)～(r) shown in Fig. 4 B Kenel, only in these (s)～(x) aspects, be equipped with convex portion 130c on the suspension board 130 of each piezo-activator 13, i.e., The structure such as s4, t4, u4, v4, w4, x4, and the either aspect such as (m)～(r) aspects or (s)～(x) as illustrated in the drawing, should Suspension board 130 is designed as foursquare kenel, to reach effect of aforementioned low power consumption；Thus etc. and it is visible to implement aspect, no matter Suspension board 130 is or the step structure for having convex portion for a surface for two-sided flat slab construction, in the protection of this case In the range of, and the kenel of the support 132 being connected between suspension board 130 and housing 131 and quantity also can be according to actually applying situation And appoint and apply change, it is not limited with the aspect shown in this case.It is described also as before, these suspension boards 130, housing 131 and support 132 Be the structure that can be formed in one, but be not limited, then can be etched by traditional processing or gold-tinted as its manufacture or The mode such as Laser Processing or eletroforming or electro-discharge machining is made, and is not limited.

Additionally, please continue refering to Figure 1A and Fig. 2A, insulating trip 141, conducting strip is had more in minisize fluid control device 1A 15 and another insulating trip 142 be sequentially to be correspondingly arranged under piezo-activator 13, and its form approximately correspond to piezoelectricity cause The form of the housing of dynamic device 13.In some embodiments, insulating trip 141,142 is made up of the material that can be insulated, for example：Modeling Glue, but be not limited, it is used with carrying out insulation；In other embodiments, conducting strip 15 is i.e. by conductive material institute structure Into for example：Metal, but be not limited, to carry out conducting being used.And, in the present embodiment, also can set on conducting strip 15 A conductive connecting pin 151 is put, to carry out conducting being used.

Please refer to Figure 1A and Fig. 5 A to Fig. 5 E, wherein Fig. 5 A to Fig. 5 E are the micro pressure power dresses shown in Figure 1A The local illustrative view of the minisize fluid control device 1A for putting.First, as shown in Figure 5A, it is seen that minisize fluid control device 1A It is sequentially by heaps such as inlet plate 11, resonance plate 12, piezo-activator 13, insulating trip 141, conducting strip 15 and another insulating trips 142 It is folded to form, and in the present embodiment, filled out in the gap g0 between the periphery of housing 131 of resonance plate 12 and piezo-activator 13 A material is filled, for example：Conducting resinl, but be not limited, so that the convex portion of the suspension board 130 of resonance plate 12 and piezo-activator 13 The depth of gap g0 can be maintained between 130c, and then air-flow can be guided more quickly to flow, and because of the convex portion of suspension board 130 130c keeps suitable distance to make the interference reduction that contacts with each other with resonance plate 12, and promoting noise to produce can be lowered.

Please continue refering to Fig. 5 A to Fig. 5 E, as illustrated, when inlet plate 11, resonance plate 12 are sequentially corresponding with piezo-activator 13 After assembling, then a chamber for confluxing gas can be collectively forming with inlet plate 11 thereon at the hollow bore 120 of resonance plate 12, And a first chamber 121 is more formed between resonance plate 12 and piezo-activator 13, it is configured to temporarily store gas, and first chamber 121 It is to pass through the hollow bore 120 of resonance plate 12 and be connected with the chamber at the central recess 111 of the first surface 11b of inlet plate 11 It is logical, and the both sides of first chamber 121 then by the space 135 between the support 132 of piezo-activator 13 be arranged under it Micro valve device 1B is connected.

When the minisize fluid control device 1A starts of micro pressure power set 1, mainly by piezo-activator 13 by electricity Pressure is activated and with support 132 as fulcrum, carries out the reciprocating vibration of vertical direction.As shown in Figure 5 B, when piezo-activator 13 is received Voltage actuation and when vibrating downwards, it is with when piezo-activator 13 vibrates for light, thin laminated structure to be due to resonance plate 12 When, resonance plate 12 also can with resonance carry out vertical reciprocating vibration, as resonance plate 12 is corresponding to the inlet plate 11 The part of central recess 111 also can with bending vibration deformation, i.e., the resonance plate 12 corresponding to the inlet plate 11 central recess 111 part is the movable part 12a for resonance plate 12, is the now resonance plate with when piezo-activator 13 is bent downwardly vibration 12 movable part 12a can because fluid bring into and push and the vibration of piezo-activator 13 drive, and with piezo-activator 13 are bent downwardly vibration deformation, then gas is entered by least air inlet 110 on inlet plate 11, and through its first surface At least the one of 11b conflux round 112 be pooled to central authorities central recess 111 at, then via on resonance plate 12 with central recess 111 central holes 120 being correspondingly arranged are flowed downwardly into into first chamber 121, thereafter, due to by the vibration of piezo-activator 13 Drive, resonance plate 12 also can with resonance carry out vertical reciprocating vibration, as shown in Figure 5 C, now resonance plate 12 is movable Portion 12a also with downward vibration, and attach contact at piezo-activator 13 suspension board 130 convex portion 130c on, make suspension board The spacing of the region beyond 130 convex portion 130c and the chamber that confluxes between the fixed part 12b of the both sides of resonance plate 12 will not diminish, And by the deformation of this resonance plate 12, to compress the volume of first chamber 121, and the middle flow space of first chamber 121 is closed, Promote the gas in it push to both sides flowing, and then the space 135 between the support 132 of piezo-activator 13 and it is downward Pass through flowing.As for Fig. 5 D then for its resonance plate 12 movable part 12a via bending vibration deformation after, and return back to initial bit Put, and follow-up piezo-activator 13 is driven to vibrate upwards by voltage, the volume of so same extruding first chamber 121, and this When due to piezo-activator 13 be lifting upwards, the displacement of the lifting can be d, so that the gas meeting in first chamber 121 Towards both sides flowing, and then drive an at least air inlet 110 of the gas constantly from inlet plate 11 to enter, then flow into central recess In 111 chambers for being formed, then as shown in fig. 5e, the resonance plate 12 by piezo-activator 13 upwards the vibration of lifting and resonate to On, the movable part 12a of resonance plate 12 makes the gas in central recess 111 again by resonance plate 12 also to position upwards Central aperture hole 120 and flow into first chamber 121 in, and the space 135 between the support 132 of piezo-activator 13 and wear downwards More flow out minisize fluid control device 1A.Thus implement aspect visible, when resonance plate 12 carries out vertical reciprocating vibration, be Can by it with the gap g0 between piezo-activator 13 to increase the ultimate range of its vertical displacement, in other words, in two knot Gap g0 is arranged between structure can make resonance plate 12 to produce upper and lower displacement by a larger margin when resonance, and wherein this is piezoelectric actuated The vibration displacement of device is d, is x, i.e. x=g0-d with the difference of gap g0, and x≤0um is worked as in Jing tests, to there is noise state；Work as x =1 to 5um, the maximum output air pressure of micro pressure power set 1 can reach 350mmHg；When x=5 to 10um, micro pressure power The maximum output air pressure of device 1 can reach 250mmHg；As x=10 to 15um, the maximum output air pressure of micro pressure power set 1 can 150mmHg is reached, its numerical value corresponding relation is as shown in the following Table I.Above-mentioned numerical value be operation frequency be 17K to 20K it Between, operating voltage be ± 10V between ± 20V.Thus, producing pressure in the runner design of Jing this minisize fluid control device 1A Power gradient, makes gas flow at high rates, and enters the resistance difference of outgoing direction through runner, and gas is transmitted to discharge by suction side End, and in the state of outlet side has air pressure, still have the ability to continue pushing out gas, and can reach quiet effect.

(table one)

Test item	X (displacement and gap difference)	Maximum output air pressure
			1	X=1 to 5um	350mmHg
2	X=5 to 10um	250mmHg
			3	X=10 to 15um	150mmHg

In addition, in some embodiments, the vertical reciprocating type frequency of vibration of resonance plate 12 can be with piezo-activator 13 Frequency of vibration is identical, i.e., both can be upwards or while downward simultaneously, and it is can to appoint to apply change according to situation is actually applied, not To be limited as flowing mode shown in the present embodiment.

Please refer to Figure 1A, Fig. 2A and Fig. 6 A, Fig. 6 B, wherein Fig. 6 A are the micro pressure power set shown in Figure 1A Gas collection plate 16 and micro valve device 1B collection pressure illustrative view, Fig. 6 B are then the micro pressure power set shown in Figure 1A Gas collection plate 16 and micro valve device 1B release illustrative view.As shown in Figure 1A and Fig. 6 A, the micro pressure of this case is moved The micro valve device 1B of power apparatus 1 is sequentially to be formed by valve sheet 17 and the stacking of exit plate 18, and minisize fluid control of arranging in pairs or groups The gas collection plate 16 of device 1A processed is operating.

In the present embodiment, gas collection plate 16 has a surface 160 and a reference surface 161, be on the surface 160 be recessed with A gas collection chamber 162 is formed, is arranged wherein for the piezo-activator 13, by the gas of minisize fluid control device 1A transmission downwards Then temporarily accumulate in this gas collection chamber 162, and be that, with multiple through holes, it includes the first through hole in gas collection plate 16 163 and one end of second through hole 164, the first through hole 163 and the second through hole 164 be to be connected with gas collection chamber 162, separately One end is then connected with the first release chamber 165 and first outlet chamber 166 on the reference surface 161 of gas collection plate 16 respectively. And, a convex portion structure 167 is further set up at first outlet chamber 166, for example can be but not be limited to a column structure, The height of the convex portion structure 167 is above the reference surface 161 of the gas collection plate 16, and the height of convex portion structure 167 between 0.3mm To between 0.55mm, and its preferred values is 0.4mm.

Exit plate 18 includes a release through hole 181, an outlet through hole 182, a reference surface 180 and a second surface 187, the wherein release through hole 181, outlet through hole 182 is through the reference surface 180 and second surface 187 of exit plate 18, should Be recessed one second release chamber 183 and a second outlet chamber 184 on reference surface 180, and the release through hole 181 is located at second and unloads The pressure core of chamber 183, and connect runner with more one between the second release chamber 183 and second outlet chamber 184 185, circulate to supplied gas, and one end of outlet through hole 182 is connected with second outlet chamber 184, the other end then with outlet 19 are connected, and in the present embodiment, outlet 19 is can be connected with a device (not shown), for example：Forcing press, but not as Limit.

There is a valve opening 170 and multiple positioning holes 171, the thickness of the valve sheet 17 is between 0.1mm on valve sheet 17 To between 0.3mm, and its preferred values is 0.2mm.

When valve sheet 17 positions assembling between gas collection plate 16 and exit plate 18, the release through hole 181 of the exit plate 18 Corresponding to first through hole 163 of the gas collection plate 16, first release of the second release chamber 183 corresponding to the gas collection plate 16 Chamber 165, the second outlet chamber 184 corresponds to the first outlet chamber 166 of the gas collection plate 16, and the valve sheet 17 is arranged at Between the gas collection plate 16 and the exit plate 18, intercept the first release chamber 165 and connect with the second release chamber 183, and the valve The valve opening 170 of piece 17 is arranged between second through hole 164 and the outlet through hole 182, and valve opening 170 is located at gas collection plate 16 The convex portion structure 167 of first outlet chamber 166 and be correspondingly arranged, by the design of this single valve opening 170, so that gas can be because Answer its pressure reduction and reach the purpose of one-way flow.

Again one end of release through hole 181 of the exit plate 18 can enter convex portion structure 181a set up a protrusion and formed, For example can be but not be limited to column structure, the height of convex portion structure 181a is that between 0.3mm to 0.55mm, and its is preferable Be worth for 0.4mm, and this convex portion structure 181a through improvement to increase its height, the height of convex portion structure 181a is above this and goes out The reference surface 180 of oralia 18, forces valve sheet 17 rapidly to contradict and close release through hole 181 to add, and reaches a prestressing The effect that conflict effect is fully sealed；And, exit plate 18 has more an at least position limiting structure 188, the height of the position limiting structure 188 Spend for 0.32mm, by taking the present embodiment as an example, position limiting structure 188 is disposed in the second release chamber 183, and for an annular block Structure, and be not limited, it predominantly when micro valve device 1B carries out collection pressure operation, is provided with Auxiliary support valve sheet 17 It is used, to prevent valve sheet 17 from subsiding, and can makes the valve sheet 17 can more quickly opening and closing of fault.

When micro valve device 1B collection presses start, mainly as shown in Figure 6A, it is can be in response to coming from minisize fluid control The pressure that the gas of device 1A processed transmission downwards is provided, and or when extraneous atmospheric pressure is more than the dress being connected with outlet 19 When putting the internal pressure of (not shown), then gas can be from the gas collection chamber 162 in the gas collection plate 16 of minisize fluid control device 1A Respectively Jing the first through holes 163 and the second through hole 164 and flow downwardly into the first release chamber 165 and first outlet chamber In 166, now, downward gas pressure is flexual valve sheet 17 is bent downwardly deformation and then is made the first release chamber 165 volume increase, and corresponding to downward end that is smooth and being resisted against release through hole 181, Jin Erke at the first through hole 163 The release through hole 181 of closing exit plate 18, therefore the gas in the second release chamber 183 will not flow out from release through hole 181. Certainly, the present embodiment, using the end of release through hole 181 design of convex portion structure 181a is set up, and to add valve sheet 17 is forced Release through hole 181 is rapidly contradicted and closed, and reaches the effect that prestressing conflict effect is fully sealed, while and setting through ring In the position limiting structure 188 of the periphery of release through hole 181, with Auxiliary support valve sheet 17 so as to will not produce and subside.On the other hand, Because gas is flowed downwardly in first outlet chamber 166 from the second through hole 164, and corresponding to first outlet chamber 166 The valve sheet 17 at place is also bent downwardly deformation, so that its corresponding valve opening 170 is opened downwards, gas then can be from first outlet chamber Room 166 is flowed in second outlet chamber 184 via valve opening 170, and flow to by outlet through hole 182 outlet 19 and with outlet 19 In the device (not shown) being connected, whereby with to the device carry out collect pressure start.

Please continue refering to Fig. 6 B, when micro valve device 1B carries out release, it is can be by regulation and control minisize fluid control dress The gas transmission amount of 1A is put, in making gas no longer input set gas chamber 162, or when the device (not shown) being connected with outlet 19 When internal pressure is more than extraneous atmospheric pressure, then micro valve device 1B can be made to carry out release.Now, gas will from outlet The outlet through hole 182 of 19 connections is input into second outlet chamber 184 so that the volumetric expansion of second outlet chamber 184, and then Promote flexual valve sheet 17 to be bent upwards deformation, and upwards it is smooth, be resisted against on gas collection plate 16, therefore the valve opening of valve sheet 17 170 can close because being resisted against gas collection plate 16.Certainly, in the present embodiment, using first outlet chamber 166 convex portion knot is set up The design of structure 167, therefore be available for flexual valve sheet 17 to be bent upwards deformation and more rapidly contradict, valve opening 170 is more favorably reached One prestressing conflict effect attaches completely the closed mode of sealing, therefore, when in original state, the valve opening 170 of valve sheet 17 Can close because being close to be resisted against the convex portion structure 167, then the gas in the second outlet chamber 184 will not countercurrently to first In outlet chamber 166, to reach the effect for preferably preventing gas from leaking outside.And, the gas in second outlet chamber 184 is can Flow in the second release chamber 183 via connection runner 185, and then make the volume expanded of the second release chamber 183, and make it is right Deformation should be equally bent upwards in the valve sheet 17 of the second release chamber 183, now not support to be closed in due to valve sheet 17 and unload Pressure through hole 181 end, therefore gas of the release through hole 181 i.e. in opening, i.e. the second release chamber 183 can be by release Through hole 181 flows outwardly into row release operation.Certainly, the present embodiment, using the convex portion structure that the end of release through hole 181 is set up 181a or transmission are arranged at the position limiting structure 188 in the second release chamber 183, allow flexual valve sheet 17 to be bent up curved Become more rapidly, it is more favourable to depart from the state for closing release through hole 181.Thus, then can by this unidirectional release operation will with go out Gas in the devices (not shown) of the connection of mouth 19 is discharged and blood pressure lowering, or is completely exhausted out and is completed release operation.

Please refer to Figure 1A, Fig. 2A and Fig. 7 A Fig. 7 A to Fig. 7 E, wherein Fig. 7 A Fig. 7 A to Fig. 7 E are shown in Figure 1A The collection pressure illustrative view of micro pressure power set.As shown in Fig. 7 A Fig. 7 A, micro pressure power set 1 are i.e. by minisize fluid Form combined by control device 1A and micro valve device 1B, wherein minisize fluid control device 1A be it has been observed that sequentially by Inlet plate 11, resonance plate 12, piezo-activator 13, insulating trip 141, conducting strip 15, another insulating trip 142 and gas collection plate 16 etc. are tied Structure stack assembly positioning is formed, and is have a gap g0 between resonance plate 12 and piezo-activator 13, and in resonance plate 12 There is first chamber 121 between piezo-activator 13, and, micro valve device 1B is then equally by valve sheet 17 and outlet Sequentially stack assembly is positioned on the gas collection plate 16 of minisize fluid control device 1A and forms the grade of plate 18, and in minisize fluid control Be between the gas collection plate 16 and piezo-activator 13 of device 1A with gas collection chamber 162, in gas collection plate 16 reference surface 161 more Be recessed one first release chamber 165 and first outlet chamber 166, and is more recessed one in the reference surface 180 of exit plate 18 Second release chamber 183 and second outlet chamber 184, in the present embodiment, by the operation frequency of the micro pressure power set Rate is between 27K to 29.5K, operating voltage be ± 10V to ± 16V, and by these multiple different pressure chamber's collocation The driving of piezo-activator 13 and resonance plate 12, the vibration of valve sheet 17, so that gas is transmitted to next part pressure.

As shown in Figure 7 B, when the piezo-activator 13 of minisize fluid control device 1A is vibrated downwards by voltage actuation, Then gas can be entered in minisize fluid control device 1A by the air inlet 110 on inlet plate 11, and is confluxed round via at least one 112 being pooled at its central recess 111, then flows downwardly into first chamber 121 via the hollow bore 120 on resonance plate 12 In.Thereafter, then as seen in figure 7 c, due to by piezo-activator 13 vibration resonant interaction, resonance plate 12 also can with carry out it is past Compound vibration, i.e. its downward vibration, and close on the convex portion 130c of the suspension board 130 of piezo-activator 13, by this resonance The deformation of piece 12 so that the volume increase of the chamber at the central recess 111 of inlet plate 11, and while compress first chamber 121 Volume, and then promote the gas in first chamber 121 to push to both sides flowing, and then through the support of piezo-activator 13 Space 135 between 132 and pass through circulation downwards, to flow between minisize fluid control device 1A and micro valve device 1B In gas collection chamber 162, and again by corresponding downwards with the first through hole 163 that gas collection chamber 162 is connected and the second through hole 164 In flowing to the first release chamber 165 and first outlet chamber 166, thus implement aspect it is visible, when resonance plate 12 carry out it is vertical During reciprocating vibration, be can by it with the gap g0 between piezo-activator 13 to increase the ultimate range of its vertical displacement, change Sentence is talked about, and gap g0 is arranged between two structure can make resonance plate 12 to produce upper and lower displacement by a larger margin when resonance.

Then, then as illustrated in fig. 7d, because the resonance plate 12 of minisize fluid control device 1A returns back to initial position, and press Electric actuator 13 is driven vibrating upwards by voltage, and the wherein vibration displacement of the piezo-activator is d, the difference with gap g0 Be worth for x, i.e. x=g0-d, Jing tests when x=1 to 5um, the operation frequency be 27k to 29.5KHz, operating voltage be ± 10V extremely During ± 16V, its maximum output air pressure can reach at least 300mmHg, but be not limited.So same extruding first chamber 121 Volume so that the gas in first chamber 121 flows towards both sides, and by the space between the support 132 of piezo-activator 13 135 are constantly input into into gas collection chamber 162, the first release chamber 165 and first outlet chamber 166, so more cause the Air pressure in one release chamber 165 and first outlet chamber 166 is bigger, and then it is curved to promote flexual valve sheet 17 to produce downwards Curved change, then in the second release chamber 183, the then downward convex portion that is smooth and being resisted against the end of release through hole 181 of valve sheet 17 Structure 181a, and then release through hole 181 is closed, and in second outlet chamber 184, outlet through hole is corresponded on valve sheet 17 182 valve opening 170 is to open downwards, makes the gas in second outlet chamber 184 to be passed down to outlet by outlet through hole 182 19 and with any devices (not shown) that be connecteds of outlet 19, and then to reach the purpose that collection presses operation.Finally, then such as Fig. 7 E institutes Show, when the resonance of resonance plate 12 of minisize fluid control device 1A is shifted up, and then make the center of the first surface 11b of inlet plate 11 Gas in recess 111 can be flowed in first chamber 121, then via piezo-activator by the hollow bore 120 of resonance plate 12 Space 135 between 13 support 132 and be transmitted continuously to downwards in gas collection plate 16, then because its gas pressure is to continue downwards Increase, therefore gas still can constantly via gas collection chamber 162, the second through hole 164, first outlet chamber 166, second outlet chamber Room 184 and outlet through hole 182 and flow to outlet 19 and any devices for be connected with outlet 19 in, this collection presses operation to be can be via outer Pressure differential in the atmospheric pressure on boundary and device is not limited with driving.

When with the devices that be connecteds of outlet 19 internal pressure (not shown) more than the external world pressure when, then micro pressure power Device 1 is that the flowing mode of making of the operation that can as shown in Figure 8 carry out blood pressure lowering or release, its blood pressure lowering or release is mainly such as front institute State, can by regulation and control minisize fluid control device 1A gas transmission amount, in making gas no longer input set gas chamber 162, now, Gas will be input into second outlet chamber 184 from the outlet through hole 182 being connected with outlet 19 so that second outlet chamber 184 Volumetric expansion, and then promote flexual valve sheet 17 to be bent upwards deformation, and upwards it is smooth, be resisted against first outlet chamber In 166 convex portion structure 167, and close the valve opening 170 of valve sheet 17, i.e., the gas in second outlet chamber 184 will not be inverse In flowing to first outlet chamber 166；And, the gas in second outlet chamber 184 is that the can be flow to via connection runner 185 In two release chambers 183, then by release through hole 181 carrying out release operation；So can be by the list of this micro valve structure 1B The gas in device being connected with outlet 19 to gas transmission operation is discharged and blood pressure lowering, or is completely exhausted out and is completed release work Industry.

The suspension board 130 that this case is adopted is for square kenel, when the length of side of suspension board 130 reduces, and suspension board 130 Area with when being also gradually reduced, it is found that on the one hand minification causes the rigidity of suspension board 130 to be lifted, and because interior The gas flow volume in portion reduces, and is conducive to the promotion or compression of air, and with enable output pressure value is lifted；And on the other hand Also the deformation of produced horizontal direction when vertical vibration of suspension board 130 can be reduced, and then when operating piezo-activator 13 It is able to maintain that in same vertical direction and is difficult to incline, piezo-activator 13 can be reduced whereby with resonance plate 12 or other groups Interference and collision between dress element, with the generation that enable reduces noise, and then causes the fraction defective of quality to reduce.To sum up, pressure is worked as During the size reduction of the suspension board 130 of electric actuator 13, piezo-activator 13 also can be made it is less, whereby except output gas can be lifted Outside the performance of pressure, noise can be also reduced, and the fraction defective of product can be reduced；And conversely, finding large-sized suspension board 130 Output pressure value is relatively low and fraction defective is higher.

Furthermore, suspension board 130 and piezoelectric ceramic plate 133 are the cores of the micro pressure power set 1, with both areas Reduction, be able to the synchronous diminution of the area of the micro pressure power set 1, mitigate its weight, make the micro pressure power Device 1 can be installed in easily on portable apparatus, without because volume is excessive and limited.Certainly, this case micro pressure Power set 1 are the trend for reaching slimming, and the gross thickness that minisize fluid control device 1A assembles micro valve device 1B is situated between In the height of 2mm to 6mm, and then make minitype gas power set 1 reach light comfortable portable purpose, and can widely answer For in medical device and relevant device.

In sum, the micro pressure power set that this case is provided, mainly by minisize fluid control device and miniature Being mutually assembled for valving, enters air inlet of the gas from minisize fluid control device, and using piezo-activator Start, makes to produce barometric gradient in runner and pressure chamber of the gas after design, and then makes gas flow at high rates and be transferred to In micro valve device, then through the one-way cock design of micro valve device, gas is made with one way flow, and then will can press Power is accumulated in any device being connected with outlet；And when blood pressure lowering to be carried out or release, then regulate and control minisize fluid control device Transmission quantity, and make gas can by transmitting to the second outlet chamber of micro valve device with the device that is connected of outlet, and by Connection runner by transmit to the second release chamber, then flowed out by release through hole, and then to reach gas can be made promptly to transmit, And while can reach quiet effect, the overall volume of minitype gas power set is reduced and is thinned, and then make micro- Type aerodynamic device reaches light comfortable portable purpose, and can be widely used in medical device and relevant device In.Therefore, file an application in accordance with the law the great industrial utilization of minitype gas power set of this case, whence.

Even if this utility model is described in detail by above-described embodiment and can apply craftsman's think of by this those skilled in the art times are familiar with and be Modify as all, so neither take off as attached claim is intended to protector.

【Symbol description】

1：Micro pressure power set

1A：Minisize fluid control device

1B：Micro valve device

1a：Housing

10：Base

11：Inlet plate

11a：The second surface of inlet plate

11b：The first surface of inlet plate

110：Air inlet

111：Central recess

112：Conflux round

12：Resonance plate

12a：Movable part

12b：Fixed part

120：Hollow bore

121：First chamber

13：Piezo-activator

130：Suspension board

130a：The second surface of suspension board

130b：The first surface of suspension board

130c：Convex portion

130d：Central part

130e：Peripheral part

131：Housing

131a：The second surface of housing

131b：The first surface of housing

132：Support

132a：The second surface of support

132b：The first surface of support

133：Piezoelectric ceramic plate

134、151：Conductive connecting pin

135：Space

141、142：Insulating trip

15：Conducting strip

16：Gas collection plate

16a：Accommodation space

160：Surface

161：Reference surface

162：Gas collection chamber

163：First through hole

164：Second through hole

165：First release chamber

166：First outlet chamber

167、181a：Convex portion structure

168：Side wall

17：Valve sheet

170：Valve opening

171：Positioning hole

18：Exit plate

180：Reference surface

181：Release through hole

182：Outlet through hole

183：Second release chamber

184：Second outlet chamber

185：Connection runner

187：Second surface

188：Position limiting structure

19：Outlet

g0：Gap

(a)～(x)：The different of piezo-activator implement aspect

a0、i0、j0、m0、n0、o0、p0、q0、r0：Suspension board

a1、i1、m1、n1、o1、p1、q1、r1：Housing

a2、i2、m2、n2、o2、p2、q2、r2：Support, plate connecting portion

a3、m3、n3、o3、p3、q3、r3：Space

d：The vibration displacement of piezo-activator

s4、t4、u4、v4、w4、x4：Convex portion

m2’、n2’、o2’、q2’、r2’：Support is connected to the end of housing

m2”、n2”、o2”、q2”、r2”：Support is connected to the end of suspension board

Claims

1. a kind of minisize fluid control device, it is adaptable to a micro pressure power set, including：

One inlet plate, confluxes with an at least air inlet, at least one and round and constitutes a central recess for confluxing chamber, and this is extremely A few air inlet supplies to import gas, the corresponding air inlet of the round that confluxes, and guides the gas of the air inlet to converge into the center The chamber that confluxes that recess is constituted；

One resonance plate, with a hollow bore, to should inlet plate the chamber that confluxes；And

One piezo-activator, has：

One suspension board, the suspension board has the length between 4mm to 8mm, the width between 4mm to 8mm and Jie Thickness between 0.1mm to 0.4mm；

One housing, with an at least support, is connected between the suspension board and the housing；And

One piezoelectric ceramic plate, is attached at a first surface of the suspension board, and the piezoelectric ceramic plate has the no more than suspension board The length of side of the length of side, with the length between 4mm to 8mm, between 4mm to 8mm width and between 0.05mm extremely Thickness between 0.3mm, the length and the width ratio of the piezoelectric ceramic plate are between 0.5 times to 2 times；

Wherein, the above-mentioned piezo-activator, the resonance plate and the inlet plate are sequentially folded to reply arranges positioning, and the resonance plate There is a gap to form a first chamber between the piezo-activator, during so that the piezo-activator is driven, gas is by this At least air inlet of inlet plate is imported, and Jing at least one rounds that conflux are collected to the central recess, pass through the resonance plate The hollow bore, with the first chamber, then from the piezo-activator the space at least between a support to Lower transmission, with lasting pushing out gas.

2. minisize fluid control device as claimed in claim 1, it is characterised in that the operation frequency is that 28k, operating voltage are ± 15V, its maximum output air pressure reaches at least 300mmHg.

3. minisize fluid control device as claimed in claim 1, it is characterised in that the length of the piezoelectric ceramic plate be 6mm extremely 8mm, width are 6mm to 8mm and thickness is 0.10mm.

4. minisize fluid control device as claimed in claim 1, it is characterised in that the length of the suspension board be 6mm to 8mm, Width is 6mm to 8mm and thickness is 0.27mm.

5. minisize fluid control device as claimed in claim 1, it is characterised in that the suspension board further includes a convex portion and is arranged on On one second surface of the suspension board, it is highly between 0.02mm to 0.08mm.

6. minisize fluid control device as claimed in claim 5, it is characterised in that the height of the convex portion is 0.03mm.

7. minisize fluid control device as claimed in claim 5, it is characterised in that the convex portion is a circular protrusions structure, directly Footpath is the size of 0.55 times of the minimum length of side of the suspension board.

8. minisize fluid control device as claimed in claim 1, it is characterised in that the inlet plate is by a stainless steel institute structure Into thickness is between 0.4mm to 0.6mm.

9. minisize fluid control device as claimed in claim 8, it is characterised in that the thickness of the inlet plate is 0.5mm.

10. minisize fluid control device as claimed in claim 1, it is characterised in that the resonance plate is made up of a copper material, Thickness is between 0.03mm to 0.08mm.

11. minisize fluid control devices as claimed in claim 10, it is characterised in that the thickness of the resonance plate is 0.05mm.

12. minisize fluid control devices as claimed in claim 1, it further includes an at least insulating trip and a conducting strip, and should An at least insulating trip and the conducting strip are sequentially arranged under the piezo-activator.

13. minisize fluid control devices as claimed in claim 1, it is characterised in that the housing of the piezo-activator is by one Stainless steel is constituted, and thickness is between 0.2mm to 0.4mm.

14. minisize fluid control devices as claimed in claim 13, it is characterised in that the thickness of the housing of the piezo-activator Spend for 0.3mm.

15. minisize fluid control devices as claimed in claim 1, it is characterised in that the two of the support of the piezo-activator End points connects the housing, end point and connects the suspension board.

A kind of 16. minisize fluid control devices, it is adaptable to a micro pressure power set, including：

One inlet plate；

One resonance plate；And

One piezo-activator；

Wherein, the above-mentioned inlet plate, the resonance plate and the piezo-activator sequentially correspond to stacking and arrange positioning, and the resonance plate There is a gap to form a first chamber between the piezo-activator, when the piezo-activator is driven, gas is by the air inlet Plate is entered, and the resonance plate is flowed through, to transmit gas again in the first chamber.

17. minisize fluid control devices as claimed in claim 16, it is characterised in that the inlet plate has an at least air inlet Hole, at least one are confluxed round and a central recess, an at least air inlet for importing gas, round correspondence air inlet of confluxing Hole, and guide the gas of the air inlet to converge into the central recess；The resonance plate has a hollow bore, to should inlet plate The central recess；And the piezo-activator has a suspension board and a housing, with least one between the suspension board and the housing Support connects, and the first surface in the suspension board attaches a piezoelectric ceramic plate.

18. minisize fluid control devices as claimed in claim 17, it is characterised in that the piezoelectric ceramic plate has no more than should The length of side of the suspension board length of side, with the length between 4mm to 8mm, the width between 4mm to 8mm and between Thickness between 0.05mm to 0.3mm, the length and the width ratio of the piezoelectric ceramic plate are between 0.5 times to 2 times.

19. minisize fluid control devices as claimed in claim 17, it is characterised in that the length of the suspension board be 4mm extremely 8mm, width are 4mm to 8mm, thickness is 0.27mm.