CN108071580A

CN108071580A - Micro pressure power set

Info

Publication number: CN108071580A
Application number: CN201610992832.5A
Authority: CN
Inventors: 莫皓然; 韩永隆; 黄启峰
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2016-11-10
Filing date: 2016-11-10
Publication date: 2018-05-25

Abstract

A kind of micro pressure power set, including：Minisize fluid control device, including stacking the inlet plate, resonance plate, piezoelectric actuator and the gas collection plate that set, wherein gas collection plate have between 4mm between 10mm length, between 4mm to the width between 10mm, there is the first chamber that gap is formed between resonance plate and piezoelectric actuator, when making piezoelectric actuator driven, gas is imported by inlet plate, through resonance plate in entrance first chamber, it transmits still further below, continues pushing out gas to form barometric gradient runner；Micro valve device includes stacking the valve sheet set and exit plate；When gas is transmitted to downwards from minisize fluid control device in micro valve device, opened or closed the valve opening of valve sheet with the one-way flow in response to gas, in order to carrying out collection pressure or release.

Description

Micro pressure power set

【Technical field】

This case is on a kind of Pneumatic propelling plant, espespecially a kind of micro ultrathin and mute micro pressure power set.

【Background technology】

The either industry such as medicine, computer technology, printing, energy in each field at present, product is towards sophistication and micro- Smallization direction is developed, and the fluid delivery structure that wherein products such as Micropump, sprayer, ink gun, industrial printing devices are included is Its key technology, therefore how by means of innovation structure its technical bottleneck is broken through, for the important content of development.

For example, in medicinal industry, many instruments or equipment needed using Pneumatic pressure power driving are usually adopted to pass System motor and air pressure valve come reach its gas conveying purpose.However, it is limited to these conventional motors and the volume of gas trap Limitation so that such instrument and equipment is difficult to reduce the volume of its single unit system, that is, is difficult to realize the target of slimming, it is even more impossible to What is made reaches portable purpose.In addition, these conventional motors and gas trap can also lead to the problem of noise when start, cause Using upper not convenient and uncomfortable.

Therefore, above-mentioned known technology missing can be improved by how developing one kind, can make the instrument of conventionally employed fluid control device Device or equipment reach small, micromation and mute, and then reach the micro pressure power dress of light comfortable portable purpose Put, actually at present it is in the urgent need to address the problem of.

【The content of the invention】

The main purpose of this case is in a kind of micro pressure suitable for portable or wearable instrument or equipment of offer By integrating micro fluid control device and micro valve device, Pneumatic pressure power is used in order to solution known technology for power set Volume that the instrument or equipment of driving possess is big, be difficult to be thinned, can not reach portable purpose and the big grade of noise lacks It loses.

In order to achieve the above object, a broader embodiment aspect of this case is to provide a kind of micro pressure power set, including：One Minisize fluid control device and a micro valve device, the minisize fluid control device include sequentially stack set an inlet plate, One resonance plate, a piezoelectric actuator and a gas collection plate, the wherein resonance plate have a hollow bore, the gas collection plate, have between 4mm between 10mm length, between 4mm to the width between 10mm, and the length and the width ratio are 0.4 times to 2.5 Between times, between the resonance plate and the piezoelectric actuator there is a gap to form a first chamber, the piezoelectric actuator is driven When, gas is entered by the inlet plate, flows through the resonance plate, is transmitted again with entering in the first chamber；And the micro valve device It sequentially stacks setting including a valve sheet and an exit plate to be positioned on the gas collection plate of the minisize fluid control device, the valve Piece has a valve opening, which has the length of side of the length and width identical with the gas collection plate of the minisize fluid control device, Wherein when gas is transmitted to from the minisize fluid control device in the micro valve device, in order to carrying out collection pressure or release operation.

【Description of the drawings】

Figure 1A is the positive decomposition texture schematic diagram for the micro pressure power set that this case is preferred embodiment.

Figure 1B is the positive combination structure diagram of the micro pressure power set shown in Figure 1A.

Fig. 2A is the back side decomposition texture schematic diagram of the micro pressure power set shown in Figure 1A.

Fig. 2 B are the back side combining structure schematic diagram of the micro pressure power set shown in Figure 1A.

Fig. 3 A are the positive combination structure diagram of the piezoelectric actuator of the micro pressure power set shown in Figure 1A.

Fig. 3 B are the back side combining structure schematic diagram of the piezoelectric actuator of the micro pressure power set shown in Figure 1A.

Fig. 3 C are the cross-sectional view of the piezoelectric actuator of the micro pressure power set shown in Figure 1A.

Fig. 4 A to Fig. 4 C are a variety of embodiment aspect schematic diagrames of the piezoelectric actuator shown in Fig. 3 A.

Fig. 5 A to Fig. 5 E are the local illustrative view of the minisize fluid control device of the micro pressure power set shown in Figure 1A.

Fig. 6 A are that the collection of the micro valve device of the micro pressure power set shown in Figure 1A presses illustrative view.

Fig. 6 B are the release illustrative view of the micro valve device of the micro pressure power set shown in Figure 1A.

Fig. 7 A to Fig. 7 E are that the collection of the micro pressure power set shown in Figure 1A presses illustrative view.

Fig. 8 is the decompression of the micro pressure power set shown in Figure 1A or release illustrative view.

【Specific embodiment】

Embodying some exemplary embodiments of this case features and advantages will in detail describe in the explanation of back segment.It should be understood that This case can have various variations in different aspects, all not depart from the scope of this case, and explanation therein and diagram It is inherently illustrated as being used, and nand architecture is in limitation this case.

The micro pressure power set 1 of this case are to can be applied to the works such as the raw skill of medicine, the energy, computer technology or printing Industry, in order to transmit gas, but not limited to this.It is this to please refer to Fig.1 A, Figure 1B, Fig. 2A, Fig. 2 B and Fig. 7 A to Fig. 7 E, Figure 1A The positive decomposition texture schematic diagram of the micro pressure power set of case preferred embodiment, Figure 1B are that the micro pressure shown in Figure 1A moves Positive combination structure diagram, Fig. 2A of power apparatus are the back side decomposition texture signal of the micro pressure power set shown in Figure 1A Figure, Fig. 2 B are then the back side combining structure schematic diagram of the micro pressure power set shown in Figure 1A, and Fig. 7 A to Fig. 7 E are Figure 1A institutes The collection pressure illustrative view of the micro pressure power set shown.As shown in Figure 1A and Fig. 2A, the micro pressure power set 1 of this case It is to be formed as combined by minisize fluid control device 1A and micro valve device 1B, wherein minisize fluid control device 1A has The structures such as housing 1a, piezoelectric actuator 13, insulating trip 141,142 and conductive sheet 15, wherein, housing 1a be comprising gas collection plate 16 and Pedestal 10, pedestal 10 is then comprising inlet plate 11 and resonance plate 12, and but not limited to this.Piezoelectric actuator 13 corresponds to resonance plate 12 and set, and make inlet plate 11, resonance plate 12, piezoelectric actuator 13, insulating trip 141, conductive sheet 15, another insulating trip 142, 16 grade of gas collection plate sequentially stacks setting, and the piezoelectric actuator 13 is by a suspension board 130, at least an outline border 131, a stent 132 and one piezoelectric ceramic plate 133 assemble jointly；And micro valve device 1B goes out including a valve sheet 17 and one But not limited to this for oralia 18.And in this present embodiment, as shown in Figure 1A, gas collection plate 16 is not only single plate structure, also Can be frame structure of the periphery with side wall 168 and the gas collection plate 16 between 4mm between 10mm length, between 4mm To the width between 10mm, and the length and the width ratio is between 0.4 times to 2.5 times or the gas collection plate 16 has and is situated between In 6mm between 8mm length, between 6mm to the width between 8mm, and the length and the width ratio for 0.75 times extremely Between 1.33 times or 16 preferred values of gas collection plate is the length of 6mm, the width of 6mm, and the gas collection plate is made of the periphery The plate common definition of side wall 168 and its bottom go out an accommodating space 16a, be arranged at the appearance with for the piezoelectric actuator 13 Empty in a 16a, therefore after the micro pressure power set 1 of this case are completed, then its front schematic view can as shown in Figure 1B, And shown in Fig. 7 A to Fig. 7 E, it is seen that minisize fluid control device 1A be it is corresponding with micro valve device 1B assemble-form, That is, the valve sheet 17 and exit plate 18 of micro valve device 1B sequentially stacks setting and is positioned at the minisize fluid control device It is formed on the gas collection plate 16 of 1A.And the schematic rear view that it is completed then the release through hole 181 in the visible exit plate 18 and Outlet 19, to be connected with a device (not shown), release through hole 181 then supplies the gas so that in micro valve device 1B for outlet 19 Body is discharged, the effect of to reach release.It is set by the assembling of this minisize fluid control device 1A and micro valve device 1B, with Make gas from 110 air inlet of an at least air admission hole on the inlet plate 11 of minisize fluid control device 1A, and through piezoelectric actuator 13 start, and multiple pressure chamber (not shown) are flowed through, and transmit downwards, and then gas can be made in micro valve device 1B One-way flow, and by acute build up of pressure in the device (not shown) being connected with the port of export of micro valve device 1B, and ought need When carrying out release, then regulate and control the output quantity of minisize fluid control device 1A, make exit plate of the gas via micro valve device 1B Release through hole 181 on 18 and discharge, to carry out release.

It please continue refering to Figure 1A and Fig. 2A, as shown in Figure 1A, the inlet plate 11 of minisize fluid control device 1A is that have first Surface 11a, second surface 11b and at least an air admission hole 110, in this present embodiment, the quantity of air admission hole 110 are for 4, but not As limit, the first surface 11a of inlet plate 11 and second surface 11b is through, it is mainly suitable from outside device to supplied gas It answers the effect of atmospheric pressure and is flowed into from an at least air admission hole 110 in minisize fluid control device 1A.And again as shown in Figure 2 A, By the first surface 11b of inlet plate 11 as it can be seen that thereon have at least one confluence round 112, to 11 second surface of inlet plate At least an air admission hole 110 is correspondingly arranged for this of 11a.It is with central recess at the center exchange of these confluence rounds 112 111, and central recess 111 is connected with confluence round 112, can will enter bus-bar from an at least air admission hole 110 whereby The gas in hole 112, which is guided and converged, is concentrated to central recess 111, to transfer downwards.It is so that in this present embodiment, inlet plate 11 has There are integrally formed air admission hole 110, confluence round 112 and central recess 111, and be correspondingly formed at the central recess 111 The confluence chamber of one confluence gas, is kept in supplied gas.In some embodiments, the material of inlet plate 11 is can be but not be limited to It is made of a stainless steel, and its thickness preferred values is between 0.5mm between 0.3mm, and its preferred values is 0.4mm, But not limited to this.In other embodiments, converged by the depth of the confluence chamber formed at the central recess 111 with these Flow round 112 depth it is identical, and the preferred values of the depth of the confluence chamber and the confluence round 112 be between 0.15mm extremely Between 0.25mm, but not limited to this.Resonance plate 12 is made of a flexible materials, and but not limited to this, and in resonance On piece 12 there is a hollow bore 120, correspond to the central recess 111 of the first surface 11b of inlet plate 11 and set, so that Gas can circulate downwards.In other embodiments, resonance plate is can be made of a copper material, and but not limited to this, and its The preferred values of thickness is between 0.07mm between 0.02mm, and its preferred values is 0.04mm, but is also not limited.

It is the piezoelectricity of the micro pressure power set respectively shown in Figure 1A please refer to Fig. 3 A, Fig. 3 B and Fig. 3 C Positive structure schematic, structure schematic diagram and the cross-sectional view of actuator, piezoelectric actuator 13 are hanged by one Kickboard 130, at least an outline border 131, a stent 132 and a piezoelectric ceramic plate 133 assemble jointly, wherein, the piezoelectricity Ceramic wafer 133 is attached at the first surface 130b of suspension board 130, and deformation is generated to drive the suspension board 130 to apply voltage Bending vibration, suspension board 130 have central part 130d and peripheral part 130e, be with when piezoelectric ceramic plate 133 is driven by voltage, Suspension board 130 can by central part 130d to peripheral part 130e bending vibrations and this at least a stent 132 is to be connected to suspension Between plate 130 and outline border 131, in this present embodiment, the stent 132 be connected in suspension board 130 and outline border 131 it Between, two-end-point is to be connected to outline border 131, suspension board 130, to provide resilient support, and in stent 132, suspension board 130 And circulate between outline border 131 with more an at least gap 135 to supplied gas, and the suspension board 130, outline border 131 and stent 132 kenel and quantity is that have a variety of variations.In addition, outline border 131 is to surround the outside for being arranged at suspension board 130, and have The conductive connecting pin 134 of one outside projection, to be used for electrical connection, but not limited to this.In this present embodiment, suspension board 130 It is for the structure of a cascaded surface, implies that the second surface 130a in suspension board 130 with more a protrusion 130c, protrusion 130c can For but be not limited to a circular protrusions structure, and the height preferred values of protrusion 130c be between 0.02mm between 0.08mm, and compared with Good value is 0.03mm, and a diameter of 1.1mm to 2.4mm, but not limited to this.Please refer to Fig. 3 A and Fig. 3 C i.e. as it can be seen that outstanding The protrusion 130c of kickboard 130 is the second surface 131a coplines with outline border 131, and the second surface 130a of suspension board 130 and The second surface 132a of stent 132 is also copline, and the second surface of the protrusion 130c of the suspension board 130 and outline border 131 It is that there is a certain depth between the second surface 132a of the second surface 130a and stent 132 of 131a and suspension board 130.As for The first surface 130b of suspension board 130, then as shown in Fig. 3 B and Fig. 3 C, with the first surface 131b of outline border 131 and stent 132 First surface 132b for smooth coplanar structure, and piezoelectric ceramic plate 133 is then attached at the of this smooth suspension board 130 At one surface 130b.In other embodiments, the kenel of suspension board 130 also can be a two-sided smooth plate square knot Structure is not limited thereto, and can be appointed according to situation is actually applied and be applied variation.In some embodiments, suspension board 130, stent 132 And outline border 131 is the structure that can be integrally formed, and can be made of a metallic plate, such as can be by stainless steel institute structure Into but not limited to this.And in some embodiments, the preferred values of 130 thickness of suspension board be between 0.1mm to 0.3mm it Between, and its preferred values is 0.2mm, and the length preferred values of the another suspension board 130 is between 2mm between 4.5mm, and its preferred values can For 2.5mm to 3.5mm, width preferred values between 2mm between 4.5mm, and its preferred values can be 2.5mm to 3.5mm but not with This is limited.Preferred values as the thickness of the outline border 131 is between 0.4mm between 0.1mm, and its preferred values is 0.3mm, but It is not limited.

Again in other embodiments, the preferred values of the thickness of piezoelectric ceramic plate 133 be between 0.05mm to 0.3mm it Between, and its preferred values is 0.10mm, and the piezoelectric ceramic plate 133 has the length of side no more than 130 length of side of suspension board, has length Degree between 2mm between 4.5mm, and its preferred values can be 2.5mm to 3.5mm, width between 2mm between 4.5mm, and its compared with Good value can be 2.5mm to 3.5mm, another length and width than preferred values be 0.44 times to 2.25 times between, so also not as Limit.In other embodiments, the length of side of piezoelectric ceramic plate 133 is smaller than the length of side of suspension board 130, and same design be with The corresponding square platy structure of suspension board 130, but be not limited thereto.

In the micro pressure power set 1 of this case, why the piezoelectric actuator 13 designed using square appearance, it is former Because being the design compared to conventionally known circular piezoelectric actuator, the piezoelectric actuator 13 of square appearance, which substantially has, to be saved The advantage of electricity, the comparison of consumption power is as shown in following table one：

Table one

Piezoelectric actuator kenel	Operating frequency	Consume power
			Square (the 10mm length of sides)	18kHz	1.1W
Circular (10mm diameters)	28kHz	1.5W
			Square (the 9mm length of sides)	22kHz	1.3W
Circular (9mm diameters)	34kHz	2W
			Square (the 8mm length of sides)	27kHz	1.5W
Circular (8mm diameters)	42kHz	2.5W

Therefore it is learnt by the upper table of experiment：13 phase of piezoelectric actuator of size dimension (8mm to 10mm) square _type layout Compared with the circular piezoelectric actuator of diameter (8mm to 10mm), more power saving.The cause of its power saving can be speculated as：Because in resonance frequency The capacity load operated under rate, consumption power can increase with the rising of frequency, and because of size dimension square _type layout The piezoelectric actuator of the apparent more similary diameter circular of the resonant frequency of piezoelectric actuator 13 is low, therefore its opposite consumption power is also bright It is aobvious relatively low, that is, the present invention uses the setting compared to previous circular piezoelectric actuator of piezoelectric actuator 13 of square _type layout Meter, it is real that there is savings advantage, object wearing device is particularly applied to, electric power is saved and is very important design focal point.

It refering to Fig. 4 A, 4B, 4C, is a variety of embodiment aspect schematic diagrames for the piezoelectric actuator shown in Fig. 3 A that please continue.Such as Shown in figure, then, it is seen that suspension board 130, outline border 131 and the stent 132 of piezoelectric actuator 13 are that can have various kenel, and extremely There can be a variety of aspects such as (a)~(l) shown in Fig. 4 A less, for example, the outline border a1 and suspension board a0 of (a) aspect are for side The structure of shape, and be between the two by multiple stent a2 to link it, such as：8, but not limited to this, and in stent a2 and It is with gap a3, so that gas circulates between suspension board a0, outline border a1.In another (i) aspect, outline border i1 and suspension board I0 is also similarly square structure, precisely because in only by 2 stent i2 to link it；In addition, in (j)~(l) aspects, then its suspension It can be circular structure that plate j0 etc., which is, and outline border j0 etc. can also be the frame structure of somewhat radian, but be not limited.Therefore by This variety of embodiment aspect and similarly, is attached at suspension board 130 as it can be seen that the kenel of suspension board 130 is can be square or circular The piezoelectric ceramic plate 133 of first surface 130b also can be square or circular, be not limited thereto；For another example shown in Fig. 4 B, 4C, piezoelectricity The suspension board of actuator 13 can also have a variety of aspects such as (s)~(x) shown in (m) as shown in Figure 4 B~(r) and Fig. 4 C, only In these aspects, suspension board 130 and outline border 131 are square structure.For example, the outline border m1 of (m) aspect and suspension Plate m0 is the structure of square, and be between the two by multiple stent m2 to link it, such as：4, but not limited to this, And between stent m2 and suspension board m0, outline border m1 it is with gap m3, for fluid flow.And in this embodiment, connection Stent m2 between outline border m1 and suspension board m0 is can be but not be limited to a plate connecting portion m2, and this plate connecting portion m2 has two End m2 ' and m2 ", wherein one end m2 ' are connected with outline border m1, and the other end m2 " is then connected with suspension board m0, and this two End m2 ' and m2 " is corresponded to each other and is arranged on same axis.In (n) aspect, equally there is outline border n1, suspend The plate n0 and stent n2 being connected between outline border n1, the suspension board n0 and gap n3 for fluid flow, and stent n2 also may be used For but be not limited to a plate connecting portion n2, plate connecting portion n2 equally has both ends n2 ' and n2 ", and end n2 ' and outline border n1 connects It connects, and the other end n2 " is then connected with suspension board n0, only in this embodiment aspect, plate connecting portion n2 is between 0~45 degree Oblique angle be connected to outline border n1 and suspension board n0, in other words and both ends n2 ' and n2 " is not arranged at same level axis On, it is the setting relation for mutual dislocation.In (o) aspect, outline border o1, suspension board o0 and outline border o1, outstanding is connected to The structures such as the stent o2 between the kickboard o0 and gap o3 for fluid flow are similar with previous embodiment, wherein only conduct The design kenel of the plate connecting portion o2 of stent is slightly different with (m) aspect, so in this aspect, the both ends of plate connecting portion o2 O2 ' and o2 " is still to correspond to each other and be arranged on same axis.

Again in (p) aspect, equally there is outline border p1, suspension board p0 and be connected between outline border p1, suspension board p0 Stent p2 and the structures such as gap p3 for fluid flow, in this embodiment aspect, the plate connecting portion p2 as stent has more Have a structures such as suspension board connecting portion p20, beam portion p21 and outline border connecting portion p22, wherein beam portion p21 be arranged at suspension board p0 with it is outer In gap p3 between frame p1, and its set direction be parallel to outline border p1 and suspension board p0 and, suspension board connecting portion P20 is connected between beam portion p21 and suspension board p0, and outline border connecting portion p22 be connection beam portion p21 and outline border p1 between, and The suspension board connecting portion p20 and outline border connecting portion p22 also corresponds to each other and is arranged on same axis.

In (q) aspect, outline border q1, suspension board q0 and the stent q2 being connected between outline border q1, suspension board q0, with And the structures such as gap q3 for fluid flow are similar with foregoing (m), (o) aspect, wherein the only plate connecting portion q2 as stent Design kenel be slightly different with (m), (o) aspect, in this aspect, suspension board q0 is for the kenel of square, and it is every It is connected while being respectively provided with two plate connecting portion q2 with outline border q1, and the both ends q2 ' and q2 " of wherein each plate connecting portion q2 is similarly It corresponds to each other and is arranged on same axis.However in (r) aspect, also there is outline border r1, suspension board r0, stent r2 And the components such as gap r3, and stent r2 also can be but not be limited to a plate connecting portion r2, in this embodiment, plate connecting portion r2 is For the structure of V-shaped, in other words, plate connecting portion r2 also to be connected to outline border r1 and suspension board r0 between 0~45 degree of oblique angle, Therefore be respectively provided with one end r2 " in each plate connecting portion r2 and be connected with suspension board r0, and be connected with both ends r2 ' with outline border r1, Imply that both ends b2 ' and end b2 " is not arranged on same level axis.

Continue as shown in Figure 4 C, the appearance kenel of these (s)~(x) aspects approximately corresponds to (m)~(r) shown in Fig. 4 B Kenel, only in these (s)~(x) aspects, be equipped with protrusion 130c on the suspension board 130 of each piezoelectric actuator 13, i.e., The structures such as s4, t4, u4, v4, w4, x4 as illustrated in the drawing, and the either aspects such as (m)~(r) aspects or (s)~(x), should Suspension board 130 and outline border 131 are the kenel for being designed as square, the effect of to reach foregoing low power consumption；Thus etc. and implement Aspect as it can be seen that no matter suspension board 130 be for two-sided flat slab construction or be a surface have protrusion step structure, In the protection domain of this case, and the kenel for the stent 132 being connected between suspension board 130 and outline border 131 also may be used with quantity Appoint according to situation is actually applied and apply variation, be not limited with the aspect shown in this case.It is described also as before, it is these suspension boards 130, outer Frame 131 and stent 132 are the structures that can be integrally formed, and but not limited to this, as its manufacture then can by traditional processing, Or yellow light is etched or laser machined or the modes such as eletroforming or electro-discharge machining are made, and is not limited.

In addition, it please continue refering to Figure 1A and Fig. 2A, with more insulating trip 141, conductive sheet in minisize fluid control device 1A 15 and another insulating trip 142 be sequentially to be correspondingly arranged under piezoelectric actuator 13, and its form approximately correspond to piezoelectricity cause The form of the outline border of dynamic device 13.In some embodiments, insulating trip 141,142 is made of the material that can be insulated, such as：Modeling Glue, but not limited to this, is used with carrying out insulation；In other embodiments, conductive sheet 15 is i.e. by conductive material institute structure Into, such as：Metal, but not limited to this, conduct being used.And in this present embodiment, can also be set on conductive sheet 15 A conductive connecting pin 151 is put, conduct being used.

Please refer to Figure 1A and Fig. 5 A to Fig. 5 E, wherein Fig. 5 A to Fig. 5 E are for the micro pressure power dress shown in Figure 1A The local illustrative view for the minisize fluid control device put.First, as shown in Figure 5A, it is seen that minisize fluid control device 1A is Sequentially by stackings such as inlet plate 11, resonance plate 12, piezoelectric actuator 13, insulating trip 141, conductive sheet 15 and another insulating trips 142 Form, and be that there is a gap g0 between resonance plate 12 and piezoelectric actuator 13, in this present embodiment, be in resonance plate 12 and A material is filled in gap g0 between 131 periphery of outline border of piezoelectric actuator 13, such as：Conducting resinl, but not limited to this, with Make the depth that gap g0 can be maintained between the protrusion 130c of the suspension board 130 of resonance plate 12 and piezoelectric actuator 13, Jin Erke Guiding air-flow more quickly flows, and the protrusion 130c because of suspension board 130 keeps suitable distance to make to be in contact with each other with resonance plate 12 Interference is reduced, and promotes noise generation that can be lowered；It, also can be by the outline border for increasing piezoelectric actuator 13 in other embodiments 131 height, so that it increases by a gap when being assembled with resonance plate 12, but not limited to this.

It please continue refering to Fig. 5 A to Fig. 5 E, as shown in the figure, when inlet plate 11, resonance plate 12 are sequentially corresponding with piezoelectric actuator 13 After assembling, then the chamber of a confluence gas can be collectively formed with inlet plate 11 thereon at the hollow bore 120 of resonance plate 12, And a first chamber 121 is more formed between resonance plate 12 and piezoelectric actuator 13, it is configured to temporarily store gas, and first chamber 121 It is to penetrate the hollow bore 120 of resonance plate 12 and be connected with the chamber at the central recess 111 of 11 first surface 11b of inlet plate It is logical, and the both sides of first chamber 121 are then by the gap 135 between the stent 132 of piezoelectric actuator 13 and with being arranged under it Micro valve device 1B is connected.

When the minisize fluid control device 1A starts of micro pressure power set 1, mainly by piezoelectric actuator 13 by electricity Pressure is activated with stent 132 for fulcrum, carries out the reciprocating vibration of vertical direction.As shown in Figure 5 B, when piezoelectric actuator 13 by Voltage actuation and when vibrating downwards, since resonance plate 12 is for light, thin laminated structure, vibrated with working as piezoelectric actuator 13 When, resonance plate 12 also can carry out vertical reciprocating vibration therewith resonating, and be the portion that resonance plate 12 corresponds to central recess 111 Point also can bending vibration deformation therewith, i.e. the part of the correspondence central recess 111 is the movable part 12a for resonance plate 12, be with When piezoelectric actuator 13 is bent downwardly vibration, the movable part 12a of the correspondence of resonance plate 12 central recess 111 can be because of fluid at this time It brings into and pushes and drive that piezoelectric actuator 13 vibrates, and as piezoelectric actuator 13 is bent downwardly vibration deformation, then gas Body is entered by at least air admission hole 110 on inlet plate 11, and through its first surface 11b at least one confluence round 112 with It is pooled at the central recess 111 in center, then via the central hole 120 being correspondingly arranged on resonance plate 12 with central recess 111 Flow downwardly into first chamber 121, thereafter, due to being driven by 13 vibration of piezoelectric actuator, resonance plate 12 also can be total to Shake and carry out vertical reciprocating vibration, as shown in Figure 5 C, at this time the movable part 12a of resonance plate 12 also with downward vibration, and On the protrusion 130c for attaching the suspension board 130 for contacting at piezoelectric actuator 13, make the region beyond the protrusion 130c of suspension board 130 The spacing of confluence chamber between the fixed part 12b of 12 both sides of resonance plate will not become smaller, and by the deformation of this resonance plate 12, To compress the volume of first chamber 121, and 121 middle flow space of first chamber is closed, the gas in it is promoted to push to two Side is flowed, and then passes through flowing downwards by the gap 135 between the stent 132 of piezoelectric actuator 13.It is then as Fig. 5 D The movable part 12a of its resonance plate 12 is bent upwards vibration deformation, and returns back to initial position, and piezoelectric actuator 13 is driven by voltage It is dynamic so equally to squeeze the volume of first chamber 121 to vibrate upwards, only at this time since piezoelectric actuator 13 is upward lifting, The displacement of the lifting can be d, so that the gas in first chamber 121 can be flowed towards both sides, and then drive gas constantly Enter from at least air admission hole 110 on inlet plate 11, then flow into the chamber that central recess 111 is formed, for another example Fig. 5 E institutes Show, which is resonated upwards by the vibration of 13 upward lifting of piezoelectric actuator, and the movable part 12a of resonance plate 12 is also replied To initial position, and then the gas in central recess 111 is made to flow into first chamber by the central hole 120 of resonance plate 12 again In 121, and gap 135 between the stent 132 of piezoelectric actuator 13 and pass through outflow minisize fluid control device downwards 1A.Thus embodiment aspect is as it can be seen that when resonance plate 12 carries out vertical reciprocating vibration, be can by itself and piezoelectric actuator 13 it Between gap g0 to increase the maximum range of its vertical displacement, in other words, between two structure set gap g0 can make altogether The piece 12 that shakes can generate upper and lower displacement by a larger margin when resonance, and the wherein vibration displacement of the piezoelectric actuator is d, with this The difference of gap g0 is x, i.e. x=g0-d, after tested as x≤0um, to there is noise state；As x=1um to 5um, micro pressure moves 1 maximum output air pressure of power apparatus can reach 350mmHg；When x=5um to 10um, the 1 maximum output air pressure of micro pressure power set It can reach 250mmHg；As x=10um to 15um, the 1 maximum output air pressure of micro pressure power set can reach 150mmHg, number Value correspondence is as shown in the following Table II.Above-mentioned numerical value is between operation voltage is ± 10V to ± 20V.In this way, it is passing through Barometric gradient is generated in the runner design of this minisize fluid control device 1A, makes gas flow at high rates, and through runner disengaging side To resistance difference, gas is transmitted to outlet side by suction side, and in a state that outlet side has air pressure, still has the ability to continue Pushing out gas, and can reach mute effect.

Table two

In addition, in some embodiments, the vertical reciprocating type vibration frequency of resonance plate 12 can be with piezoelectric actuator 13 Vibration frequency is identical, i.e., the two can be simultaneously upwards or downward simultaneously, is that can appoint according to situation is actually applied and apply variation, not To be limited shown in the present embodiment as flowing mode.

Please refer to Figure 1A, Fig. 2A and Fig. 6 A, Fig. 6 B, wherein Fig. 6 A are for the micro pressure power set shown in Figure 1A Micro valve device collection pressure illustrative view, Fig. 6 B are then the micro valve dress of the micro pressure power set shown in Figure 1A The release illustrative view put.As shown in Figure 1A and Fig. 6 A, the micro valve device 1B of the micro pressure power set 1 of this case is It is sequentially stacked by valve sheet 17 and exit plate 18, and the gas collection plate 16 of the minisize fluid control device 1A that arranges in pairs or groups operates.

In this present embodiment, gas collection plate 16 has a surface 160 and a reference surface 161, be recess on the surface 160 with A gas collection chamber 162 is formed, the gas transmitted downwards by minisize fluid control device 1A is then temporarily accumulated in this gas collection chamber 162 In, and be that there are multiple through holes in gas collection plate 16, it includes having the first through hole 163 and the second through hole 164, first passes through 163 and second one end of through hole 164 of perforation is connected with gas collection chamber 162, the other end then base with gas collection plate 16 respectively The first release chamber 165 and first outlet chamber 166 on quasi- surface 161 are connected.And at first outlet chamber 166 A protrusion structure 167 further is added, the height that may be, for example, but be not limited to the cylindrical structure protrusion structure 167 is above The reference surface 161 of the gas collection plate 16, and protrusion structure 167 it is high between 0.1mm between 0.55mm, and its preferred values is 0.2mm。

Exit plate 18 have the length and width identical with the gas collection plate 16 the length of side, include a release through hole 181 with And an outlet through hole 182, the release through hole 181, outlet through hole 182 are through 180 and second table of reference surface of exit plate 18 Face 187, and there is a reference surface 180 in exit plate 18, be recessed one second release chamber 183 and one on the reference surface 180 Second outlet chamber 184, the release through hole 181 are located at 183 central part of the second release chamber, the outlet through hole 182 with this Two outlet chamber 184 connect, and connect runner with more one between the second release chamber 183 and second outlet chamber 184 185, circulate to supplied gas, and one end of outlet through hole 182 is connected with second outlet chamber 184, the other end then with outlet 19 are connected, and in this present embodiment, outlet 19 is can be connected with a device (not shown), such as：Forcing press, but not as Limit.

There is a valve opening 170 and multiple positioning holes 171, the thickness of the valve sheet 17 is between 0.1mm on valve sheet 17 To between 0.3mm, and its preferred values is 0.2mm.

When valve sheet 17 and gas collection plate 16 and the positioning of exit plate 18 assemble, the release through hole 181 of the exit plate 18 corresponds to In first through hole 163 of the gas collection plate 16, which corresponds to the first release chamber of the gas collection plate 16 165, which corresponds to the first outlet chamber 166 of the gas collection plate 16, and the valve sheet 17 is arranged at the collection Between gas plate 16 and the exit plate 18, the first release chamber 165 of barrier is connected with the second release chamber 183, and the valve sheet 17 Valve opening 170 be arranged between second through hole 164 and the outlet through hole 182, and valve opening 170 is located at the first of gas collection plate 16 The protrusion structure 167 of outlet chamber 166 and be correspondingly arranged, by the design of this single valve opening 170, so that gas can be in response to it Pressure difference and achieve the purpose that one-way flow.

The protrusion structure that 181 one end of release through hole of the exit plate 18 can further add a protrusion and be formed again 181a may be, for example, but not be limited to cylindrical structure, the height of protrusion structure 181a be between 0.1mm between 0.55mm, compared with Good value is 0.2mm, and this protrusion structure 181a, through improveing to increase its height, the height of protrusion structure 181a is above this The reference surface 180 of exit plate 18, to strengthen that valve sheet 17 is made rapidly to contradict and close release through hole 181, and it is pre- to reach one The effect that power conflict effect is fully sealed；And exit plate 18 has more an at least position limiting structure 188, the position limiting structure 188 It is highly 0.2mm, by taking the present embodiment as an example, position limiting structure 188 is disposed in the second release chamber 183, and is a ring block Body structure, and be not limited, predominantly when micro valve device 1B carries out collection pressure operation, it is provided with Auxiliary support valve sheet 17 are used, and to prevent valve sheet 17 from collapsing, and can make valve sheet 17 can more quickly opening and closing of fault.

When micro valve device 1B collection presses start, mainly as shown in Figure 6A, being can be in response to coming from minisize fluid control The pressure that the gas that device 1A processed is transmitted downwards is provided, and or when extraneous atmospheric pressure is more than the dress being connected with outlet 19 When putting the internal pressure of (not shown), then gas can be transmitted to the gas collection of micro valve device 1B from minisize fluid control device 1A In chamber 162, then the first release chamber 165 and are flowed downwardly into through the first through hole 163 and the second through hole 164 respectively In one outlet chamber 166, at this point, downward gas pressure is that flexible valve sheet 17 is made to be bent downwardly deformation, and then make the The volume increase of one release chamber 165, and correspond to smooth downwards at the first through hole 163 and be resisted against release through hole 181 End, and then the release through hole 181 of exit plate 18 can be closed, therefore will not lead in the gas in the second release chamber 183 from release It is flowed out at hole 181.Certainly, the present embodiment adds the design of a protrusion structure 181a to strengthen using 181 end of release through hole Valve sheet 17 is made rapidly to contradict and closes release through hole 181, and achievees the effect that prestressing conflict effect is fully sealed, simultaneously And through the position limiting structure 188 for being located on 181 periphery of release through hole, with Auxiliary support valve sheet 17, it is made not generate and is collapsed. On the other hand, since gas is to be flowed downwardly into from the second through hole 164 in first outlet chamber 166, and go out corresponding to first Valve sheet 17 at oral chamber 166 is also bent downwardly deformation, so that its corresponding valve opening 170 is opened downwards, gas then can be certainly First outlet chamber 166 is flowed into via valve opening 170 in second outlet chamber 184, and flow to outlet 19 by outlet through hole 182 And in 19 devices (not shown) that are connected of outlet, whereby to carry out the start of collection pressure to the device.

It please continue refering to Fig. 6 B, when micro valve device 1B carries out release, being can be by regulation and control minisize fluid control dress The gas transport amount of 1A is put, is made in gas no longer input set gas chamber 162 or when the device (not shown) being connected with outlet 19 When internal pressure is more than extraneous atmospheric pressure, then micro valve device 1B can be made to carry out release.At this point, gas will oneself and outlet The outlet through hole 182 of 19 connections is inputted to second outlet chamber 184 so that the volume expansion of second outlet chamber 184, and then Flexible valve sheet 17 is promoted to be bent upwards deformation, and upwards it is smooth, be resisted against on gas collection plate 16, therefore the valve opening of valve sheet 17 170 can close when being resisted against gas collection plate 16.Certainly, in the present embodiment, protrusion knot is added using first outlet chamber 166 The design of structure 167, therefore be bent upwards deformation for flexible valve sheet 17 and more rapidly contradict, valve opening 170 is made more favorably to reach One prestressing conflict effect attaches the closed state of sealing completely, therefore, when in original state, the valve opening 170 of valve sheet 17 Can close when being close to be resisted against the protrusion structure 167, then the gas in the second outlet chamber 184 will not adverse current to first In outlet chamber 166, to achieve the effect that preferably to prevent gas from leaking outside.And the gas in second outlet chamber 184 be can It is flow to via connection runner 185 in the second release chamber 183, and then makes the volume expanded of the second release chamber 183, and made pair Deformation should be equally bent upwards in the valve sheet 17 of the second release chamber 183, not support to be closed in due to valve sheet 17 at this time and unload 181 end of through hole is pressed, therefore gas of the release through hole 181 i.e. in opening, i.e. the second release chamber 183 can be by release Through hole 181 flows outwardly into row release operation.Certainly, the present embodiment, the protrusion structure added using 181 end of release through hole 181a or transmission are arranged at the position limiting structure 188 in the second release chamber 183, flexible valve sheet 17 are allowed to be bent up curved Become more rapidly, it is more favourable to depart from the state for closing release through hole 181.It in this way, then can will be with going out by this unidirectional release operation Gas in the devices (not shown) of 19 connection of mouth discharges and is depressured or is completely exhausted out and complete release operation.

Please refer to Figure 1A, Fig. 2A and Fig. 7 A to Fig. 7 E, wherein Fig. 7 A to Fig. 7 E are for the micro pressure shown in Figure 1A The collection pressure illustrative view of power set.As shown in Figure 7 A, micro pressure power set 1 i.e. by minisize fluid control device 1A with And formed combined by micro valve device 1B, wherein minisize fluid control device 1A is it has been observed that sequentially by inlet plate 11, resonance The assembling of the build stacks such as piece 12, piezoelectric actuator 13, insulating trip 141, conductive sheet 15, another insulating trip 142 and gas collection plate 16 is fixed Position forms, and is to have a gap g0 between resonance plate 12 and piezoelectric actuator 13, and in resonance plate 12 and piezoelectric actuator Have between 13 first chamber 121 and, micro valve device 1B is then equally by valve sheet 17 and 18 grade of exit plate sequentially heap Stacked group dress, which is located on the gas collection plate 16 of minisize fluid control device 1A, to be formed, and in the gas collection of minisize fluid control device 1A It is that there is gas collection chamber 162, be more recessed and one first unload in the reference surface 161 of gas collection plate 16 between plate 16 and piezoelectric actuator 13 Pressure 165 and one first outlet chamber 166 of chamber and more it is recessed one second pressure-releasing cavity in the reference surface 180 of exit plate 18 183 and one second outlet chamber 184 of room, in the present embodiment, the operation voltage by the micro pressure power set are ± 10V Driving and resonance plate 12, valve sheet 17 to ± 16V and these multiple and different pressure chamber's collocation piezoelectric actuators 13 Vibration is transmitted so that gas is pressed to next part.

As shown in Figure 7 B, when the piezoelectric actuator 13 of minisize fluid control device 1A is vibrated downwards by voltage actuation, Then gas can be entered by the air admission hole 110 on inlet plate 11 in minisize fluid control device 1A, and via at least one confluence round 112 flow downwardly into be pooled at its central recess 111, then via the hollow bore 120 on resonance plate 12 to first chamber 121 In.Thereafter, then as seen in figure 7 c, due to the resonant interaction vibrated by piezoelectric actuator 13, resonance plate 12 also can with carry out it is past Compound vibration, i.e., its vibrate downwards, and close on the protrusion 130c of the suspension board 130 of piezoelectric actuator 13, by this resonance The deformation of piece 12 so that the volume increase of the chamber at the central recess 111 of inlet plate 11, and first chamber 121 is compressed simultaneously Volume, and then promote the gas in first chamber 121 push to both sides flow, and then by piezoelectric actuator 13 stent Gap 135 between 132 and pass through circulation downwards, to flow between minisize fluid control device 1A and micro valve device 1B In gas collection chamber 162, and again by corresponding downwards with the first through hole 163 that gas collection chamber 162 is connected and the second through hole 164 Flow in the first release chamber 165 and first outlet chamber 166, thus embodiment aspect as it can be seen that when resonance plate 12 carry out it is vertical It is that can be changed by its gap g0 between piezoelectric actuator 13 to increase the maximum range of its vertical displacement during reciprocating vibration Sentence is talked about, and sets gap g0 that can make resonance plate 12 that can generate upper and lower displacement by a larger margin when resonance between two structure.

Then, then as illustrated in fig. 7d, since the resonance plate 12 of miniature dynamic fluid control device 1A returns back to initial position, and Piezoelectric actuator 13 is driven to vibrate upwards by voltage, and the wherein vibration displacement of the piezoelectric actuator is d, with gap g0's Difference is x, i.e. x=g0-d, after tested as x=1 to 5um, when which is ± 10V to ± 16V, maximum output air pressure At least 300mmHg is can reach, but not limited to this.The so similary volume for squeezing first chamber 121 so that first chamber 121 Interior gas is flowed towards both sides, and is constantly inputted to gas collection chamber by the gap 135 between the stent 132 of piezoelectric actuator 13 162nd, in the first release chamber 165 and first outlet chamber 166, so more so that the first release chamber 165 and first outlet Air pressure in chamber 166 is bigger, and then flexible valve sheet 17 is promoted to generate Bending Deformation downwards, then in the second release chamber In 183, valve sheet 17 is then smooth downwards and is resisted against the protrusion structure 181a of 181 end of release through hole, and then makes release through hole 181 closings, and in second outlet chamber 184, the valve opening 170 on valve sheet 17 corresponding to outlet through hole 182 is to open downwards, Make the gas in second outlet chamber 184 that can be passed down to outlet 19 by outlet through hole 182 and be connected with outlet 19 any Device (not shown), and then to achieve the purpose that collection pressure operation.Finally, then as seen in figure 7e, as minisize fluid control device 1A The resonance of resonance plate 12 shift up, and then make the gas in the central recess 111 of 11 first surface 11b of inlet plate can be by resonating The hollow bore 120 of piece 12 and flow into first chamber 121, then the gap 135 between the stent 132 of piezoelectric actuator 13 And be transmitted continuously to downwards in micro valve device 1B, then since its gas pressure is to continue to increase downwards, therefore gas can still be held Continuous ground is via gas collection chamber 162, the second through hole 164, first outlet chamber 166, second outlet chamber 184 and outlet through hole 182 and flow to outlet 19 and in 19 any devices for be connected of outlet, this collection pressure operation be can via extraneous atmospheric pressure and Pressure differential in device is to drive it, and but not limited to this.

When being more than the pressure in the external world with 19 devices that be connecteds of outlet internal pressure (not shown), then micro pressure power Device 1 is can be depressured as shown in Figure 8 or the operation of release, and decompression or release make flowing mode mainly such as preceding institute It states, can make by the gas transport amount of regulation and control minisize fluid control device 1A in gas no longer input set gas chamber 162, at this point, Gas will be inputted from the outlet through hole 182 being connected with outlet 19 to second outlet chamber 184 so that second outlet chamber 184 Volume expansion, and then flexible valve sheet 17 is promoted to be bent upwards deformation, and upwards it is smooth, be resisted against first outlet chamber In 166 protrusion structure 167, and close the valve opening 170 of valve sheet 17, i.e., the gas in second outlet chamber 184 will not be inverse It flow in first outlet chamber 166；And the gas in second outlet chamber 184 is can to flow to the via connection runner 185 In two release chambers 183, then by release through hole 181 to carry out release operation；It so can be by the list of this micro valve structure 1B The gas in device that will be connected to gas transport operation with outlet 19 discharges and is depressured or is completely exhausted out and complete release and make Industry.

As shown in the above description, it is miniature with micro pressure power set 1 in the micro pressure power set 1 of this case Change, properties variation is as shown in following table three：

Table three

It can be seen that 1 product of sampled 20 micro pressure power set is tested, by the suspension of square kenel The length of side of plate 130 can be stablized promotion maximum output air pressure and can reach by tapering into preferred dimensions 2.5mm to 3.5mm greatly At least more than 300mmHg.This case makes suspension board using the square kenel of suspension board 130 and the diminishing considerations of the length of side 130 rigidity is promoted, the promotion not only with maximum output air pressure, but also is reduced suspension board 130 and produced when vertical vibration The deformation of raw horizontal direction, and can more stably coordinate 133 start of piezoelectric ceramic plate, make the shaking during running of piezoelectric actuator 13 Kinetic energy enough maintains in the same direction, to reduce between piezoelectric actuator 13 and resonance plate 12 or other assembly elements whereby Interference and collision and the suspension board 130 and 12 a certain distance of resonance plate are maintained, have suitable inhibition for noise, while in product Final quality is made to test, the quantity of defective products also with reduction, contribute to the quality enhancing efficiency in manufacture.In addition, work as The size reduction of the suspension board 130 of piezoelectric actuator 13, piezoelectric actuator 13 can also be made smaller, and then can make piezoelectric actuator Gas flow volume inside 13 reduces, and is conducive to the promotion or compression of air, therefore can improving performance external enwergy synchronization diminution entirety Component size.More and, as described in foregoing, the piezoelectricity of suspension board 130 and piezoelectric ceramic plate 133 for being equipped with large-size causes For dynamic device 13, since the rigidity of suspension board 130 is poor, easy torsional deformation when vibration, make its easily with resonance plate 12 or Interference and collision is generated between other assembly elements, therefore its generation noise ratio is higher, and noise problem is also to cause product bad The reason for one of, therefore large-sized suspension board 130 is with piezoelectric ceramic plate 133 that bad rate is higher, therefore, when suspension board 130 with During 133 size reduction of piezoelectric ceramic plate, in addition to performance is improved, reduce the advantages that noise, the fraction defective of product can be also reduced.

It is nevertheless, above-mentioned because suspension board 130 reduces the enhancement yield that makes of size dimension and increases its maximum output gas The function of pressure is by the formula institute direct derivation that obtained in experiment, can not lean on theory, promotes function reason Speculate only as the rational reference explanation of experiment.

Certainly, this case micro pressure power set 1 are the trend for reaching slimming, and minisize fluid control device 1A is assembled The overall thickness of micro valve device 1B maintains to arrive the height between 1.5mm to 4mm, and then minitype gas power set is made to reach gently Just comfortable portable purpose, and can be widely used among medical equipment and relevant device.

In conclusion the micro pressure power set that this case is provided, mainly by minisize fluid control device and miniature Valving is mutually assembled, and gas is made to enter from the air admission hole on minisize fluid control device, and utilizes piezoelectric actuator Start makes gas generate barometric gradient in the runner after design and pressure chamber, and then makes gas flow at high rates and be transferred to In micro valve device, then the one-way cock design through micro valve device, gas is made to flow in one direction, and then can will be pressed Power is accumulated in any device connected with outlet；And when being intended to be depressured or during release, then regulate and control minisize fluid control device Transmission quantity, and make gas can by with being transmitted to the second outlet chamber of micro valve device in the device of outlet connection, and by Connection runner by be transmitted to the second release chamber, then flowed out by release through hole, and then gas can be made promptly to transmit to reach, And can reach the effect of mute simultaneously, the overall volume of minitype gas power set can more be made to reduce and be thinned, and then made micro- Type aerodynamic device reaches light comfortable portable purpose, and can be widely used in medical equipment and relevant device it In.Therefore, the great industrial utilization of minitype gas power set of this case, whence are filed an application in accordance with the law.

Even if the present invention described in detail as above-described embodiment and can as be familiar with this those skilled in the art appoint apply craftsman's think of and be it is all as Modification, it is so neither de- as attached claim is intended to Protector.

【Symbol description】

1：Micro pressure power set

1A：Minisize fluid control device

1B：Micro valve device

1a：Housing

10：Pedestal

11：Inlet plate

11a：The second surface of inlet plate

11b：The first surface of inlet plate

110：Air admission hole

111：Central recess

112：Converge round

12：Resonance plate

12a：Movable part

12b：Fixed part

120：Hollow bore

121：First chamber

13：Piezoelectric actuator

130：Suspension board

130a：The second surface of suspension board

130b：The first surface of suspension board

130c：Protrusion

130d：Central part

130e：Peripheral part

131：Outline border

131a：The second surface of outline border

131b：The first surface of outline border

132：Stent

132a：The second surface of stent

132b：The first surface of stent

133：Piezoelectric ceramic plate

134、151：Conductive connecting pin

135：Gap

141、142：Insulating trip

15：Conductive sheet

16：Gas collection plate

16a：Accommodating space

160：Surface

161：Reference surface

162：Gas collection chamber

163：First through hole

164：Second through hole

165：First release chamber

166：First outlet chamber

167、181a：Protrusion structure

168：Side wall

17：Valve sheet

170：Valve opening

171：Position hole

18：Exit plate

180：Reference surface

181：Release through hole

182：Outlet through hole

183：Second release chamber

184：Second outlet chamber

185：Connect runner

187：Second surface

188：Position limiting structure

19：Outlet

g0：Gap

(a)~(x)：The different embodiment aspects of piezoelectric actuator

a0、i0、j0、m0、n0、o0、p0、q0、r0：Suspension board

a1、i1、j1、m1、n1、o1、p1、q1、r1：Outline border

a2、i2、m2、n2、o2、p2、q2、r2：Stent, plate connecting portion

a3、m3、n3、o3、p3、q3、r3：Gap

d：Vibration displacement s4, t4, u4, v4, w4, x4 of piezoelectric actuator：Protrusion

m2’、n2’、o2’、q2’、r2’：Stent is connected to the end of outline border

m2”、n2”、o2”、q2”、r2”：Stent is connected to the end of suspension board

Claims

1. a kind of micro pressure power set, it is characterised in that including：

One minisize fluid control device, including sequentially stacking setting：

One inlet plate；

One resonance plate has a hollow bore；

One piezoelectric actuator；

One gas collection plate, have between 4mm between 10mm length, between 4mm to the width between 10mm, and the length and should Between width ratio is 0.4 times to 2.5 times；

Wherein between the resonance plate and the piezoelectric actuator there is a gap to form a first chamber, the piezoelectric actuator is driven When, gas is entered by the inlet plate, flows through the resonance plate, is transmitted again with entering in the first chamber；And

One micro valve device sequentially stacks setting including a valve sheet and an exit plate and is positioned at minisize fluid control dress On the gas collection plate put, which has a valve opening, which has the gas collection plate with the minisize fluid control device Identical length and the length of side of width；

Wherein, when gas is transmitted to from the minisize fluid control device in the micro valve device, in order to carrying out collection pressure or release is made Industry.

2. micro pressure power set as described in claim 1, which is characterized in that the gas collection plate have between 6mm to 8mm it Between length, between 6mm to the width between 8mm, and the length and the width ratio is between 0.75 times to 1.33 times.

3. micro pressure power set as described in claim 1, which is characterized in that the gas collection plate has the length and 6mm of 6mm Width.

4. micro pressure power set as described in claim 1, which is characterized in that the inlet plate have an at least air admission hole, At least one confluence round and the central recess for forming a confluence chamber, an at least air admission hole is for importing gas, the bus-bar Hole corresponds to the air admission hole, and the gas of the air admission hole is guided to converge into the confluence chamber that the central recess formed and should Confluence chamber corresponds to the hollow bore of the resonance plate.

5. micro pressure power set as described in claim 1, which is characterized in that the piezoelectric actuator includes：

One suspension board, can be by a central part to a peripheral part bending vibration；

One outline border, around the outside for being arranged at the suspension board；

An at least stent is connected between the suspension board and the outline border, to provide resilient support；

One piezoelectric ceramic plate has the length of side no more than the suspension board length of side, is attached on a first surface of the suspension board, uses The suspension board bending vibration is driven to apply voltage.

6. the micro pressure power set described in claim 5, which is characterized in that the suspension board is square kenel.

7. micro pressure power set as described in claim 1, which is characterized in that the gas collection plate be equipped with one first through hole, One second through hole, one first release chamber and a first outlet chamber and with a reference surface, the first outlet chamber With a protrusion structure, the height of the protrusion structure is higher than the reference surface of the gas collection plate, first through hole with this first Release chamber is connected, which is connected with the first outlet chamber.

8. micro pressure power set as described in claim 1, which is characterized in that the valve sheet has between 0.1mm extremely Thickness between 0.3mm.

9. micro pressure power set as claimed in claim 7, which is characterized in that the exit plate is equipped with a release through hole, one Outlet through hole, one second release chamber and a second outlet chamber and with a reference surface, reference surface recessed 1 the Two release chambers and a second outlet chamber, the release through hole are located at the second release chamber centre, the release through hole end Portion has a protrusion structure, and the height of the protrusion structure is higher than the reference surface of the exit plate, the outlet through hole with this second Outlet chamber be connected and the second release chamber and the second outlet chamber between there is a connection runner, and the valve Piece and exit plate sequentially stack setting and are positioned on the gas collection plate of the minisize fluid control device, the release through hole of the exit plate Corresponding to first through hole of the gas collection plate, the second release chamber of the exit plate corresponds to the first pressure-releasing cavity of the gas collection plate Room, the second outlet chamber of the exit plate corresponds to the first outlet chamber of the gas collection plate, and the valve sheet is arranged at the gas collection The first release chamber and the second release chamber are obstructed between plate and the exit plate, and the valve opening of the valve sheet is correspondingly arranged Between second through hole and the outlet through hole.

10. micro pressure power set as claimed in claim 9, which is characterized in that gas is from the minisize fluid control device When being transmitted to downwards in the micro valve device, first unloaded into this by the first through hole of the gas collection plate and second through hole It presses in chamber and the first outlet chamber, and the protrusion structure that the valve sheet of the micro valve device quickly contradicts the exit plate has Profit forms prestressing effect, completely encloses the release through hole, while imports gas by the valve opening of the valve sheet to flow into this miniature Collection pressure operation is carried out in the outlet through hole of valving.

11. micro pressure power set as claimed in claim 10, which is characterized in that be more than importing gas when collecting body of calming the anger When, collect body of calming the anger from the outlet through hole towards the second outlet chamber, so that the valve sheet displacement, and make being somebody's turn to do for the valve sheet Valve opening is resisted against the gas collection plate and closes, at the same collect calm the anger body in the second outlet chamber can along connection runner flow to this second In pressure-releasing cavity room, at this time in the valve sheet displacement in the second pressure-releasing cavity room, collecting body of calming the anger can be flowed out by the release through hole, to carry out Release operation.

12. micro pressure power set as claimed in claim 11, which is characterized in that the exit plate sets an at least /V knot Structure is in the second pressure-releasing cavity room, Auxiliary support valve sheet, to prevent the valve sheet from collapsing.

13. micro pressure power set as claimed in claim 12, which is characterized in that the height of the position limiting structure is 0.2mm.

14. micro pressure power set as claimed in claim 5, which is characterized in that this of the minisize fluid control device is outstanding Kickboard have between 2mm between 4.5mm length, between 2mm to the width between 4.5mm and between 0.1mm to 0.3mm Between thickness.

15. micro pressure power set as claimed in claim 14, which is characterized in that this of the minisize fluid control device is outstanding The length of kickboard is 2.5mm to 3.5mm, width is 2.5mm to 3.5mm, thickness 0.2mm.

16. micro pressure power set as claimed in claim 5, which is characterized in that the piezoelectric ceramic plate, which has to be not more than, to be somebody's turn to do The length of side of the suspension board length of side, have between 2mm between 4.5mm length, between 2mm to the width between 4.5mm and Jie In 0.05mm to the thickness between 0.3mm, and the length and the width ratio is between 0.44 times to 2.25 times.

17. micro pressure power set as claimed in claim 16, which is characterized in that the length of the piezoelectric ceramic plate is 2.5mm to 3.5mm, width are 2.5mm to 3.5mm, thickness 0.10mm.

18. micro pressure power set as claimed in claim 5, which is characterized in that this of the minisize fluid control device is outstanding Kickboard further includes a protrusion and is arranged on a second surface of the suspension board, and height is between 0.02mm between 0.08mm.

19. micro pressure power set as described in claim 1, which is characterized in that the minisize fluid control device should be into Gas plate is made of a stainless steel, and thickness is between 0.3mm between 0.5mm.

20. micro pressure power set as described in claim 1, which is characterized in that this of the minisize fluid control device is common The piece that shakes is made of a copper material, and thickness is between 0.02mm between 0.07mm.

21. micro pressure power set as described in claim 1, which is characterized in that the minisize fluid control device further includes An at least insulating trip and a conductive sheet, and an at least insulating trip and the conductive sheet are sequentially arranged under the piezoelectric actuator.

22. micro pressure power set as claimed in claim 5, which is characterized in that the pressure of the minisize fluid control device The outline border of electric actuator is made of a stainless steel, and thickness is between 0.1mm between 0.4mm.

23. micro pressure power set as claimed in claim 7, which is characterized in that the collection of the minisize fluid control device The protrusion structure of the first outlet chamber of gas plate has between 0.1mm to the height between 0.55mm.

24. micro pressure power set as claimed in claim 23, which is characterized in that the protrusion knot of the first outlet chamber The height of structure is 0.2mm.

25. micro pressure power set as claimed in claim 9, which is characterized in that the exit plate of the micro valve device The release through hole the protrusion structure have between 0.1mm to the height between 0.55mm.

26. micro pressure power set as claimed in claim 7, which is characterized in that the collection of the minisize fluid control device Gas plate has more a gas collection chamber in a surface, and the gas collection chamber is connected with first through hole and second through hole.

27. micro pressure power set as claimed in claim 26, which is characterized in that the gas collection of minisize fluid control device The first release chamber and the first outlet chamber of plate are arranged on the reference surface of the opposite gas collection chamber.

28. micro pressure power set as described in claim 1, which is characterized in that minisize fluid control device assembling is micro- The overall thickness of type valving maintains the height to 1.5mm to 4mm.