CN107023469A

CN107023469A - Piezo-activator

Info

Publication number: CN107023469A
Application number: CN201610802424.9A
Authority: CN
Inventors: 陈世昌; 黄启峰; 韩永隆; 廖家淯; 陈寿宏; 黄哲威; 廖鸿信; 陈朝治; 程政玮; 张英伦; 张嘉豪; 李伟铭
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2016-01-29
Filing date: 2016-09-05
Publication date: 2017-08-08
Also published as: CN107023463A; CN107023464A; CN208474081U; CN107023459A; CN107023465A; CN208456830U; CN107023459B; CN206129568U; CN107023457A; CN107023460A; CN107023467A; CN107023456A; CN107023462A; CN107023466A; CN208456827U; CN107023461A; CN212672033U; CN107023468A; CN208456829U; CN208456828U

Abstract

A kind of piezo-activator, include suspension board, piezoelectric ceramic plate, housing and support, suspension board is square structure, and can be by central part to peripheral part flexural vibrations, piezoelectric ceramic plate is square structure, it is attached on the first surface of suspension board, to apply voltage to drive suspension board flexural vibrations, housing is around the outside for being arranged at suspension board, and support is connected between suspension board and housing, to provide resilient support, its medium-height trestle includes beam portion, it is arranged in the gap between suspension board and housing, its direction set is parallel to housing and suspension board, suspension board connecting portion, it is connected between beam portion and suspension board, and housing connecting portion, it is connected between beam portion and housing, and corresponded to each other with suspension board connecting portion, and be arranged on same axis.

Description

Piezo-activator

【Technical field】

This case be on a kind of piezo-activator, it is espespecially a kind of suitable for micro ultrathin and Jing Yin minisize fluid control dress The piezo-activator put.

【Background technology】

The current either industry such as medicine, computer technology, printing, energy in each field, product is towards sophistication and micro- Smallization direction is developed, wherein the fluid delivery structure that the product such as micro- side Pu, sprayer, ink gun, industrial printing devices is included For its key technology, therefore how its technical bottleneck is broken through by means of innovation structure, for the important content of development.

For example, in medicinal industry, many instruments for needing to drive using Pneumatic pressure power or equipment generally adopt to pass System motor and air pressure valve come reach its gas conveying purpose.However, being limited to these conventional motors and the structure of gas trap Limitation so that such instrument and equipment be difficult to reduce its volume so that the volume of single unit system can not reduce, that is, be difficult to reality The target being now thinned, therefore can not also install and put on portable apparatus or used cooperatively with portable apparatus, convenience is not enough. In addition, these conventional motors and gas trap can also produce noise when start, make user impatient, cause using upper not convenient And it is uncomfortable.

Therefore, above-mentioned known technology missing can be improved by how developing one kind, can make the instrument of conventionally employed Pneumatic pressure power driving Device or equipment reach small volume, miniaturization and Jing Yin, and then reach the minisize fluid control dress of light comfortable portable purpose The piezo-activator put and its used, the problem of actually in the urgent need to address at present.

【The content of the invention】

The main purpose of this case is to provide a kind of minisize fluid suitable for portable or Wearable instrument or equipment Control device and its piezo-activator used, the fluid produced by the start of piezo-activator high frequency are fluctuated, in after design Runner in produce barometric gradient, and flow fluid high-speed, and enter the resistance difference of outgoing direction through runner, by fluid by inhaling Enter end to transmit to outlet side, in order to the use Pneumatic pressure power driving for solving known technology instrument or the volume that possesses of equipment it is big, It is difficult to be thinned, can not reach portable purpose, and the missing such as noise is big.

Include a suspension for the broader aspect of implementing up to above-mentioned purpose, this case to provide a kind of piezo-activator Plate, a piezoelectric ceramic plate, a housing and an at least support, the suspension board for square structure, and can by a central part to One peripheral part flexural vibrations, the piezoelectric ceramic plate is the structure of square, with the length of side for being not more than the suspension board length of side, is attached In on a first surface of the suspension board, to apply voltage to drive the suspension board flexural vibrations, the housing surround and is arranged at The outside of the suspension board, and at least a support is connected between the suspension board and the housing, to provide resilient support, wherein should Support includes a beam portion, is arranged in the gap between the suspension board and the housing, and its direction set is parallel to this Housing and the suspension board, a suspension board connecting portion, are connected between the beam portion and the suspension board, and a housing connecting portion, even It is connected between the beam portion and the housing, and corresponds to each other and be arranged on same axis with the suspension board connecting portion.

【Brief description of the drawings】

Figure 1A is the positive decomposition texture schematic diagram for the micro pressure power set that this case is preferred embodiment.

Figure 1B is the positive combination structural representation of the micro pressure power set shown in Figure 1A.

Fig. 2A is the back side decomposition texture schematic diagram of the micro pressure power set shown in Figure 1A.

Fig. 2 B are the back side combining structure schematic diagram of the micro pressure power set shown in Figure 1A.

Fig. 3 A are the positive combination structural representation of the piezo-activator of the micro pressure power set shown in Figure 1A.

Fig. 3 B are the back side combining structure schematic diagram of the piezo-activator of the micro pressure power set shown in Figure 1A.

Fig. 3 C are the cross-sectional view of the piezo-activator of the micro pressure power set shown in Figure 1A.Fig. 4 A to Fig. 4 C are A variety of implementation aspect schematic diagrames of piezo-activator.

Fig. 5 A to Fig. 5 E are the local illustrative view of the minisize fluid control device of the micro pressure power set shown in Figure 1A.

Fig. 6 A are collection pressure illustrative view of the gas collection plate with micro valve device of the micro pressure power set shown in Figure 1A.

Fig. 6 B are release illustrative view of the gas collection plate with micro valve device of the micro pressure power set shown in Figure 1A.

Fig. 7 A to Fig. 7 E are the collection pressure illustrative view of the micro pressure power set shown in Figure 1A.

Fig. 8 is decompression or the release illustrative view of the micro pressure power set shown in Figure 1A.

【Embodiment】

Embodying some exemplary embodiments of this pattern characteristics and advantage will in detail describe in the explanation of back segment.It should be understood that This case can have various changes in different aspects, and it does not all depart from the scope of this case, and explanation therein and diagram Inherently it is illustrated as being used, and nand architecture is in limitation this case.

The micro pressure power set 1 of this case are to can be applied to the works such as the raw skill of medicine, the energy, computer technology or printing Industry, in order to transmit gas, but is not limited.Figure 1A, Figure 1B, Fig. 2A, Fig. 2 B and Fig. 7 A to 7E figures are referred to, Figure 1A is this The positive decomposition texture schematic diagram of the micro pressure power set of case preferred embodiment, Figure 1B is that the micro pressure shown in Figure 1A is moved Positive combination structural representation, Fig. 2A of power apparatus are the back side decomposition texture signal of the micro pressure power set shown in Figure 1A Figure, the back side combining structure schematic diagrams of Fig. 2 B then for the micro pressure power set shown in Figure 1A, Fig. 7 A to 7E figures are Figure 1A institutes The collection pressure illustrative view of the micro pressure power set shown.As shown in Figure 1A and Fig. 2A, the micro pressure power set 1 of this case It is to be formed as combined by minisize fluid control device 1A and micro valve device 1B, wherein minisize fluid control device 1A has The structures such as housing 1a, piezo-activator 13, insulating trip 141,142 and conducting strip 15, wherein, housing 1a be comprising gas collection plate 16 and Base 10, base 10 then includes inlet plate 11 and resonance plate 12, but is not limited.Piezo-activator 13 corresponds to resonance plate 12 and set, and make inlet plate 11, resonance plate 12, piezo-activator 13, insulating trip 141, conducting strip 15, another insulating trip 142, The grade of gas collection plate 16 sequentially stacks setting, and the piezo-activator 13 is by a suspension board 130, at least a housing 131, a support 132 and one piezoelectric ceramic plate 133 assemble jointly；And micro valve device 1B goes out comprising a valve sheet 17 and one Oralia 18 but it is not limited.And in the present embodiment, as shown in Figure 1A, gas collection plate 16 is not only single plate structure, also There can be the frame structure of side wall 168 for periphery, and the gas collection plate 16 has between 9mm to the length between 17mm, between 9mm To the width between 17mm, and the length and the width ratio are between 0.53 times to 1.88 times, and be made up of the periphery Side wall 168 and the plate common definition of its bottom go out an accommodation space 16a, are housed with so that the piezo-activator 13 is arranged at this In the 16a of space, therefore after the micro pressure power set 1 of this case are completed, then its front schematic view can as shown in Figure 1B, with And shown in Fig. 7 A to Fig. 7 E, it is seen that minisize fluid control device 1A be it is corresponding with micro valve device 1B assemble, also I.e. the micro valve device 1B valve sheet 17 and exit plate 18 sequentially stack setting and are positioned at minisize fluid control device 1A Gas collection plate 16 on form.And the schematic rear view that it is completed release through hole 181 then in the visible exit plate 18 and go out Mouth 19, outlet 19 with a device (not shown) to be connected, and release through hole 181 is then provided with making the gas in micro valve device 1B Discharge, with up to effect of release.Set by this minisize fluid control device 1A and micro valve device 1B assembling, so that Gas passes through piezo-activator 13 from an at least air admission hole 110 air inlet on minisize fluid control device 1A inlet plate 11 Start, and flow through that multiple pressure chamber are (not shown) to continue to transmit, and then gas can be made in unidirectional in micro valve device 1B Flowing, and by acute build up of pressure in the device (not shown) being connected with the micro valve device 1B port of export, and ought need to carry out During release, then regulate and control minisize fluid control device 1A output quantity, make in exit plate 18 of the gas via micro valve device 1B Release through hole 181 and discharge, to carry out release.

It please continue refering to Figure 1A and Fig. 2A, as shown in Figure 1A, minisize fluid control device 1A inlet plate 11 is that have first Surface 11b, second surface 11a and at least an air admission hole 110, in the present embodiment, the quantity of air admission hole 110 is for 4, but not As limit, it is through the first surface 11b and second surface 11a of inlet plate 11, mainly suitable from outside device to supplied gas Answer the effect of atmospheric pressure and flowed into from an at least air admission hole 110 in minisize fluid control device 1A.And again as shown in Figure 2 A, From the first surface 11b of inlet plate 11, conflux round 112 with least one thereon, to the second surface of inlet plate 11 A 11a at least air admission hole 110 is correspondingly arranged.In the present embodiment, 110 pairs of quantity and the air admission hole of its round 112 that confluxes Should, its quantity is 4, but is not limited thereto, and is with central recess wherein at the center exchange of these rounds 112 that conflux 111, and central recess 111 is connected with the round 112 that confluxes, and can will enter the gas for the round 112 that confluxes from air admission hole 110 whereby Body is guided and confluxed and is concentrated to central recess 111 and transmits.It is so that in the present embodiment, inlet plate 11 has integrally formed air inlet Hole 110, conflux round 112 and central recess 111, and be to be correspondingly formed one to conflux the confluxing of gas at the central recess 111 Chamber, it is temporary with supplied gas.In some embodiments, the material of inlet plate 11 is can be but not be limited to by a stainless steel institute Constitute, and its thickness is that between 0.6mm, and its preferred values is 0.5mm between 0.4mm, but be not limited.In other realities Apply in example, the depth of the chamber that confluxes constituted at the central recess 111 is identical with the depth of these rounds 112 that conflux, and The preferred values of conflux chamber and the depth of the round 112 that confluxes is between 0.3mm, but to be not limited between 0.2mm.Altogether The piece 12 that shakes is made up of a flexible materials, but is not limited, and in having a hollow bore 120 on resonance plate 12, is Set corresponding to the first surface 11b of inlet plate 11 central recess 111, so that gas circulates.In other embodiments, Resonance plate 12 is can be made up of a copper material, but is not limited, and its thickness be between 0.03mm between 0.08mm, and Its preferred values is 0.05mm, but is also not limited.

Please refer to Fig. 3 A, Fig. 3 B and Fig. 3 C, it is the piezoelectricity of the micro pressure power set respectively shown in Figure 1A Positive structure schematic, structure schematic diagram and the cross-sectional view of actuator, piezo-activator 13 is hanged by one Kickboard 130, at least a housing 131, a support 132 and a piezoelectric ceramic plate 133 assemble jointly, wherein, the piezoelectricity Ceramic wafer 133 is attached at the first surface 130b of suspension board 130, and deformation is produced to drive the suspension board 130 to apply voltage Flexural vibrations, suspension board 130 has central part 130d and peripheral part 130e, be with when piezoelectric ceramic plate 133 is driven by voltage, Suspension board 130 can be by central part 130d to peripheral part 130e flexural vibrations, and an at least support 132 is to be connected to suspension Between plate 130 and housing 131, in the present embodiment, the support 132 be connected in suspension board 130 and housing 131 it Between, its two-end-point is to be connected to housing 131, suspension board 130, to provide resilient support, and in support 132, suspension board 130 And an at least space 135 is had more between housing 131, circulated to supplied gas, and the suspension board 130, housing 131 and support 132 kenel and quantity is with a variety of changes.In addition, housing 131 is to surround the outside for being arranged at suspension board 130, and have The conductive connecting pin 134 of one outside projection, to power, connection is used, but is not limited.In the present embodiment, suspension board 130 It is for the structure of a cascaded surface, to imply that and have more a convex portion 130c in the second surface 130a of suspension board 130, convex portion 130c can For but be not limited to a circular protrusions structure, and convex portion 130c height is that between 0.08mm, and preferred values is between 0.02mm 0.03mm, 0.55 times of size of the minimum length of side of its a diameter of suspension board 130, but be not limited.Please refer to Fig. 3 A And Fig. 3 C are visible, the convex portion 130c of suspension board 130 surface is the second surface 131a coplines with housing 131, and is suspended The second surface 130a of plate 130 and the second surface 132a of support 132 are also copline, and the convex portion 130c of the suspension board 130 And be between the second surface 131a of housing 131 and the second surface 130a of suspension board 130 and the second surface 132a of support 132 With a certain depth.As for the first surface 130b of suspension board 130, then as shown in Fig. 3 B and Fig. 3 C, its with housing 131 The first surface 132b of one surface 131b and support 132 is smooth coplanar structure, and piezoelectric ceramic plate 133 is then attached at this At the first surface 130b of smooth suspension board 130.In other embodiments, the kenel of suspension board 130 also can be two-sided for one Smooth tabular square structure, is not limited thereto, and can appoint according to situation is actually applied and apply change.In some embodiments In, suspension board 130, support 132 and housing 131 are the structures that can be formed in one, and can be made up of a metallic plate, for example It can be made up of, but be not limited stainless steel.And in some embodiments, the thickness of suspension board 130 is between 0.1mm To between 0.4mm, and its preferred values is 0.27mm, the length of the another suspension board 130 between 7.5mm between 12mm, and its compared with Good value can for 7.5mm to 8.5mm, width between 7.5mm between 12mm, and its preferred values can for 7.5mm to 8.5mm but not with This is limited.Thickness as the housing 131 is that between 0.4mm, and its preferred values is 0.3mm between 0.2mm, but not as Limit.

Again in other embodiments, the thickness of piezoelectric ceramic plate 133 be between 0.05mm between 0.3mm, and its Preferred values is 0.10mm, and the piezoelectric ceramic plate 133 have be not more than the length of side of suspension board 130 the length of side, with length between 7.5mm between 12mm, and its preferred values can for 7.5mm to 8.5mm, width between 7.5mm between 12mm, and its preferred values Can be 7.5mm to 8.5mm, another length and width than preferred values be between 0.625 times to 1.6 times, to be so also not limited.Again In other embodiments, the length of side of piezoelectric ceramic plate 133 is smaller than the length of side of suspension board 130, and same design is and suspension The corresponding square platy structure of plate 130, but be not limited thereto.

Related embodiment in the micro pressure power set 1 of this case, piezo-activator 13 so outstanding using square Kickboard 130, its reason is compared to circular suspension board (the circular suspension board of (j)~(l) aspects as shown in Fig. 4 A Fig. 4 A J0 design), the structure of the square suspension board 130 substantially has the advantage of power saving, and what it consumed power is relatively such as following table Shown in one：

Table one

Therefore being learnt by the upper table of experiment：The piezoelectricity of the positive size dimension of square suspension board 130 of the tool (8mm to 10mm) Actuator 13 is compared to the piezo-activator of the circular suspension board j0 diameters (8mm to 10mm), more power saving.It is above-mentioned by experiment The power consumption obtained compares data, and the cause of its power saving can be speculated as：Because of the capacity load operated under resonant frequency, It, which consumes power, to increase with the rising of frequency, and because the resonant frequency of the suspension board 130 of size dimension square _type layout is bright It is aobvious low compared with same circular suspension board j0, therefore its relative consumption power is also significant lower, that is, this case uses square to set Design of the suspension board 130 of meter compared to circular suspension board j0, it is real that there is savings advantage, object wearing device is particularly applied to, is saved Electric power saving is very important design focal point.Nevertheless, its power saving effect of the suspension board of above-mentioned square _type layout be by Obtained in experiment, the formula institute direct derivation of theory can be not leaned on, the supposition of its power saving cause is reasonable only as experiment The reference explanation of property.

It please continue refering to Fig. 4 A, 4B, 4C figure, it is a variety of implementation aspect schematic diagrames for piezo-activator.As illustrated, then It can be seen that the suspension board 130 of piezo-activator 13, housing 131 and support 132 are that there can be various kenel, and can at least have figure A variety of aspects such as (a)~(l) shown in 4A Fig. 4 A, for example, the housing a1 and suspension board a0 of (a) aspect are for square knot Structure, and be to link it, for example between the two by multiple support a2：8, but be not limited, and in support a2 and suspension board It is, with space a3, to be circulated with supplied gas between a0, housing a1.In another (i) aspect, its housing i1 and suspension board i0 are also same Sample is square structure, precisely because in only by 2 support i2 to link it；In addition, there is further correlation technique, such as 4B, Shown in 4C figures, the suspension board of piezo-activator 13 can also have (s)~(x) shown in (m) as shown in Figure 4 B~(r) and Fig. 4 C Etc. a variety of aspects, only in this little aspect, suspension board 130 and housing 131 are square structure.For example, (m) aspect it Housing m1 and suspension board m0 are the structure of square, and are to link it, for example between the two by multiple support m2：4, but It is not limited, and is with space m3, so that fluid circulates between support m2 and suspension board m0, housing m1.And in this reality Apply in example, the support m2 being linked between housing m1 and suspension board m0 is can be but not be limited to a plate connecting portion m2, and this plate connects There is socket part m2 both ends m2 ' and m2 ", wherein one end m2 ' be connected with housing m1, and the other end m2 " then with suspension board M0 connections, and this both ends m2 ' and m2 " is corresponded to each other and is arranged on same axis.In (n) aspect, its same tool There are housing n1, suspension board n0 and the support n2 being connected between housing n1, suspension board n0 and the space circulated for fluid N3, and support n2 also can be but not be limited to a plate connecting portion n2, plate connecting portion n2 equally has both ends n2 ' and n2 ", and end N2 ' is connected with housing n1, and the other end n2 " is then connected with suspension board n0, only in this implementation aspect, and plate connecting portion n2 is To be connected to housing n1 and suspension board n0 between 0~45 degree of oblique angle, in other words, and both ends n2 ' and n2 " is not arranged at On same level axis, it is the setting relation for mutual dislocation.In (o) aspect, its housing o1, suspension board o0 and connection The structures such as the support o2 between housing o1, the suspension board o0 and space o3 for fluid circulation are similar with previous embodiment, Wherein only it is slightly different as the plate connecting portion o2 of support design kenel with (m) aspect, so in this aspect, the plate connecting portion O2 both ends o2 ' and o2 " is still to correspond to each other and be arranged on same axis.

Again in (p) aspect, it equally has housing p1, suspension board p0 and is connected between housing p1, suspension board p0 Support p2 and the structure such as space p3 that is circulated for fluid, in this implementation aspect, had more as the plate connecting portion p2 of support There is the structure such as suspension board connecting portion p20, beam portion p21 and housing connecting portion p22, wherein beam portion p21 is arranged at suspension board p0 and outer In gap p3 between frame p1, and its direction set is parallel to housing p1 and suspension board p0, and, suspension board connecting portion P20 is connected between beam portion p21 and suspension board p0, and housing connecting portion p22 be connection beam portion p21 and housing p1 between, and The suspension board connecting portion p20 and housing connecting portion p22 also corresponds to each other and is arranged on same axis.

In (q) aspect, its housing q1, suspension board q0 and the support q2 being connected between housing q1, suspension board q0, with And supply the structures such as the space q3 of fluid circulation similar with foregoing (m), (o) aspect, wherein only as the plate connecting portion q2 of support Design kenel be slightly different with (m), (o) aspect, in this aspect, suspension board q0 is that for the kenel of square, and its is every It is connected while being respectively provided with two plate connecting portion q2 with housing q1, and each of which plate connecting portion q2 both ends q2 ' and q2 " is similarly Correspond to each other and be arranged on same axis.But in (r) aspect, it also has housing r1, suspension board r0, support r2 And the component such as space r3, and support r2 also can be but not be limited to a plate connecting portion r2, in this embodiment, plate connecting portion r2 is For the structure of V-shaped, in other words, plate connecting portion r2 also to be connected to housing r1 and suspension board r0 between 0~45 degree of oblique angle, Therefore be respectively provided with one end r2 " in each plate connecting portion r2 and be connected with suspension board r0, and be connected with both ends r2 ' with housing r1, Imply that both ends b2 ' and end b2 " is not arranged on same level axis.

Continue as shown in Figure 4 C, the outward appearance kenel of these (s)~(x) aspects approximately corresponds to (m)~(r) shown in Fig. 4 B Kenel, only in these (s)~(x) aspects, be equipped with convex portion 130c on the suspension board 130 of each piezo-activator 13, i.e., The structure such as s4, t4, u4, v4, w4, x4, and the either aspect such as (m)~(r) aspects or (s)~(x) as illustrated in the drawing, should Suspension board 130 is designed as the kenel of square, to reach effect of foregoing low power consumption；Thus etc. and it is visible to implement aspect, no matter Suspension board 130 is that for two-sided flat slab construction, or have for a surface step structure of convex portion, the protection in this case In the range of, and kenel and the quantity of the support 132 being connected between suspension board 130 and housing 131 also can be according to actually applying situation And appoint and apply change, it is not limited with the aspect shown in this case.It is described also as before, these suspension boards 130, housing 131 and support 132 Be the structure that can be formed in one, but be not limited, as its manufacture then can by traditional processing or gold-tinted etching or The mode such as Laser Processing or eletroforming or electro-discharge machining is made, and is not limited.

In addition, please continue refering to Figure 1A and Fig. 2A, insulating trip 141, conducting strip are had more in minisize fluid control device 1A 15 and another insulating trip 142 be sequentially to be correspondingly arranged under piezo-activator 13, and its form approximately correspond to piezoelectricity cause The form of the housing of dynamic device 13.In some embodiments, insulating trip 141,142 is made up of the material that can be insulated, for example：Modeling Glue, but be not limited, it is used with carrying out insulation；In other embodiments, conducting strip 15 is i.e. by conductive material institute structure Into for example：Metal, but be not limited, conduct being used.And, in the present embodiment, it can also be set on conducting strip 15 A conductive connecting pin 151 is put, conduct being used.

Please refer to Figure 1A and Fig. 5 A to Fig. 5 E, wherein Fig. 5 A to Fig. 5 E are for the micro pressure power dress shown in Figure 1A The minisize fluid control device 1A put local illustrative view.First, as shown in Figure 5A, it is seen that minisize fluid control device 1A It is sequentially by heaps such as inlet plate 11, resonance plate 12, piezo-activator 13, insulating trip 141, conducting strip 15 and another insulating trips 142 It is folded to form, and in the present embodiment, it is to fill out in the gap g0 between the periphery of housing 131 of resonance plate 12 and piezo-activator 13 A material is filled, for example：Conducting resinl, but be not limited, so that the convex portion of resonance plate 12 and the suspension board 130 of piezo-activator 13 Gap g0 depth can be maintained between 130c, and then air-flow can be guided more quickly flow, and because of the convex portion of suspension board 130 130c keeps suitable distance to make the interference reduction that is in contact with each other with resonance plate 12, and promoting noise to produce can be lowered.

It please continue refering to Fig. 5 A to Fig. 5 E, as illustrated, when inlet plate 11, resonance plate 12 are sequentially corresponding with piezo-activator 13 After assembling, then a chamber for confluxing gas can be collectively forming with inlet plate 11 thereon at the hollow bore 120 of resonance plate 12, And a first chamber 121 is more formed between resonance plate 12 and piezo-activator 13, it is configured to temporarily store gas, and first chamber 121 It is to pass through the hollow bore 120 of resonance plate 12 and be connected with the chamber at the first surface 11b of inlet plate 11 central recess 111 It is logical, and the both sides space 135 then between the support 132 of piezo-activator 13 of first chamber 121 and with being arranged under it Micro valve device 1B is connected.

When the minisize fluid control device 1A starts of micro pressure power set 1, mainly by piezo-activator 13 by electricity Pressure activates and with support 132 for fulcrum, carries out the reciprocating vibration of vertical direction.As shown in Figure 5 B, when piezo-activator 13 by Voltage actuation and when vibrating downwards, it is with when piezo-activator 13 vibrates for light, thin laminated structure to be due to resonance plate 12 When, resonance plate 12 also can with resonance and carry out vertical reciprocating vibration, as resonance plate 12 corresponds to the inlet plate 11 The part of central recess 111 also can with flexural vibrations deformation, i.e., the resonance plate 12 correspond to the inlet plate 11 central recess 111 part is the movable part 12a for resonance plate 12, is the now resonance plate with when piezo-activator 13 is bent downwardly vibration 12 movable part 12a can bringing into and pushing and drive that piezo-activator 13 vibrates because of fluid, and with piezo-activator 13 are bent downwardly vibration deformation, then an at least air admission hole 110 of the gas on inlet plate 11 enters, and pass through its first surface At least the one of 11b confluxes round 112 to be pooled at its central central recess 111, then via on resonance plate 12 with central fovea The central hole 120 that portion 111 is correspondingly arranged is flowed downwardly into first chamber 121, thereafter, due to being vibrated by piezo-activator 13 Drive, resonance plate 12 also can with resonance and carry out vertical reciprocating vibration, as shown in Figure 5 C, now resonance plate 12 can Dynamic portion 12a also with downward vibration, and attach on the convex portion 130c of the suspension board 130 for contacting at piezo-activator 13, make suspension The spacing of region beyond the convex portion 130c of plate 130 and the chamber that confluxes between the fixed part 12b of the both sides of resonance plate 12 will not become It is small, and by the deformation of this resonance plate 12, to compress the volume of first chamber 121, and it is empty to close the middle flow of first chamber 121 Between, promote the gas in it to push and flowed to both sides, and then by the space 135 between the support 132 of piezo-activator 13 Pass through flowing downwards.As for Fig. 5 D then for its resonance plate 12 movable part 12a via flexural vibrations deformation after, and return back to initial Position, and follow-up piezo-activator 13 is driven to vibrate upwards by voltage, the volume of so same extruding first chamber 121, again Now because piezo-activator 13 is upward lifting, the displacement of the lifting can be d, so that the gas in first chamber 121 Can be towards both sides flowing, and then drive gas constantly to enter from least air admission hole 110 on inlet plate 11, then flow into central fovea In the chamber that portion 111 is formed, then as shown in fig. 5e, the resonance plate 12 is resonated by the vibration of the upward lifting of piezo-activator 13 Upwards, the movable part 12a of resonance plate 12 is also to upward position, and then makes the gas in central recess 111 again by resonance plate 12 Central hole 120 and flow into first chamber 121, and the space 135 between the support 132 of piezo-activator 13 and it is downward Pass through outflow minisize fluid control device 1A.Thus aspect is implemented visible, when resonance plate 12 carries out vertical reciprocating vibration, Be can by its gap g0 between piezo-activator 13 to increase the ultimate range of its vertical displacement, in other words, in this two Set gap g0 that resonance plate 12 can be made to produce upper and lower displacement by a larger margin when resonance between structure, and wherein the piezoelectricity is caused The vibration displacement of dynamic device is d, and the difference with gap g0 is x, i.e. x=g0-d, after tested as x≤0um, to there is noise state； As x=1 to 5um, the maximum output air pressure of micro pressure power set 1 can reach 350mmHg；As x=5 to 10um, micro pressure The maximum output air pressure of power set 1 can reach 250mmHg；As x=10 to 15um, the maximum output gas of micro pressure power set 1 Pressure can reach 150mmHg, and its numerical value corresponding relation is as shown in the following Table II.Above-mentioned numerical value be operating frequency be 17K extremely Between 20K, operating voltage be ± 10V between ± 20V.In this way, in the runner design through this minisize fluid control device 1A Produce barometric gradient, make gas flow at high rates, and enter through runner the resistance difference of outgoing direction, by gas by suction side transmit to Outlet side, and in the state of outlet side has air pressure, still have the ability to continue pushing out gas, and can reach Jing Yin effect.

(table two)

Test item	X (displacement and gap difference)	Maximum output air pressure
			1	X=1 to 5um	350mmHg
2	X=5 to 10um	250mmHg
			3	X=10 to 15um	150mmHg

In addition, in some embodiments, the vertical reciprocating type vibration frequency of resonance plate 12 can be with piezo-activator 13 Vibration frequency is identical, i.e., both can be upwards or simultaneously downward simultaneously, and it is can to appoint according to situation is actually applied and apply change, not To be limited shown in the present embodiment as flowing mode.

Please refer to Figure 1A, Fig. 2A and Fig. 6 A, Fig. 6 B, wherein Fig. 6 A are for the micro pressure power set shown in Figure 1A Gas collection plate 16 and micro valve device 1B collection pressure illustrative view, Fig. 6 B are then the micro pressure power set shown in Figure 1A Gas collection plate 16 and micro valve device 1B release illustrative view.As shown in Figure 1A and Fig. 6 A, the micro pressure of this case is moved The micro valve device 1B of power apparatus 1 is sequentially to be stacked and formed by valve sheet 17 and exit plate 18, and minisize fluid control of arranging in pairs or groups Device 1A processed gas collection plate 16 is operated.

In the present embodiment, gas collection plate 16 has a surface 160 and a reference surface 161, be depression on the surface 160 with A gas collection chamber 162 is formed, is set wherein for the piezo-activator 13, the gas transmitted downwards by minisize fluid control device 1A Then temporarily accumulate in this gas collection chamber 162, and be that, with multiple through holes, it includes the first through hole in gas collection plate 16 163 and second through hole 164, one end of the first through hole 163 and the second through hole 164 is connected with gas collection chamber 162, separately One end is then connected with the first release chamber 165 and first outlet chamber 166 on the reference surface 161 of gas collection plate 16 respectively. And, a convex portion structure 167 is further set up at first outlet chamber 166, for example, can be but not be limited to a cylindrical structure, The height of the convex portion structure 167 is above the reference surface 161 of the gas collection plate 16, and convex portion structure 167 height between 0.3mm To between 0.55mm, and its preferred values is 0.4mm.

Exit plate 18 includes a release through hole 181, an outlet through hole 182, a reference surface 180 and a second surface 187, the wherein release through hole 181, outlet through hole 182 is through the reference surface 180 and second surface 187 of exit plate 18, should Be recessed one second release chamber 183 and a second outlet chamber 184 on reference surface 180, and the release through hole 181 is located at second and unloaded The core of chamber 183 is pressed, and runner is connected with more one between the second release chamber 183 and second outlet chamber 184 185, to supplied gas circulation, and one end of outlet through hole 182 is connected with second outlet chamber 184, the other end then with outlet 19 are connected, in the present embodiment, and outlet 19 is can be connected with a device (not shown), for example：Forcing press, but not as Limit.

There is a valve opening 170 and multiple positioning holes 171, the thickness of the valve sheet 17 is between 0.1mm on valve sheet 17 To between 0.3mm, and its preferred values is 0.2mm.

When valve sheet 17 positions assembling between gas collection plate 16 and exit plate 18, the release through hole 181 of the exit plate 18 Corresponding to first through hole 163 of the gas collection plate 16, the second release chamber 183 corresponds to the first release of the gas collection plate 16 Chamber 165, the second outlet chamber 184 corresponds to the first outlet chamber 166 of the gas collection plate 16, and the valve sheet 17 is arranged at Between the gas collection plate 16 and the exit plate 18, the first release chamber 165 of barrier is connected with the second release chamber 183, and the valve The valve opening 170 of piece 17 is arranged between second through hole 164 and the outlet through hole 182, and valve opening 170 is located at gas collection plate 16 The convex portion structure 167 of first outlet chamber 166 and be correspondingly arranged, by the design of this single valve opening 170, so that gas can be because Answer its pressure difference and reach the purpose of one-way flow.

And one end of release through hole 181 of the exit plate 18 can enter one and set up structure 181a in convex portion formed by a protrusion, It for example can be but not be limited to cylindrical structure, convex portion structure 181a height is that between 0.55mm, and its is preferable between 0.3mm Be worth for 0.4mm, and this convex portion structure 181a through improvement to increase its height, convex portion structure 181a height is above this and gone out The reference surface 180 of oralia 18, to strengthen making valve sheet 17 rapidly contradict and closing release through hole 181, and reaches a prestressing The effect that conflict effect is fully sealed；And, exit plate 18 is with more at least a position limiting structure 188, the height of the position limiting structure 188 Spend for 0.32mm, by taking the present embodiment as an example, position limiting structure 188 is disposed in the second release chamber 183, and be an annular block Structure, and be not limited, it predominantly when micro valve device 1B carries out collection pressure operation, is provided with Auxiliary support valve sheet 17 It is used, to prevent valve sheet 17 from collapsing, and can makes valve sheet 17 can more quickly opening and closing of fault.

When micro valve device 1B collection presses start, mainly as shown in Figure 6A, it is can be in response to coming from minisize fluid control The pressure that the gas that device 1A processed is transmitted downwards is provided, and or when extraneous atmospheric pressure is more than the dress being connected with outlet 19 When putting the internal pressure of (not shown), then gas can be from the gas collection chamber 162 in minisize fluid control device 1A gas collection plate 16 Respectively the first release chamber 165 and first outlet chamber are flowed downwardly into through the first through hole 163 and the second through hole 164 In 166, now, downward gas pressure is the valve sheet 17 of pliability is bent downwardly deformation and then make the first release chamber 165 volume increase, and corresponding to end that is smooth downwards at the first through hole 163 and being resisted against release through hole 181, Jin Erke The release through hole 181 of exit plate 18 is closed, therefore will not be flowed out in the gas in the second release chamber 183 from release through hole 181. Certainly, the present embodiment, the design of a convex portion structure 181a is set up using the end of release through hole 181, to strengthen making valve sheet 17 Rapidly contradict and close release through hole 181, and reach the effect that prestressing conflict effect is fully sealed, while and being set through ring Position limiting structure 188 in the periphery of release through hole 181, with Auxiliary support valve sheet 17, makes it not produce and collapses.On the other hand, Because gas is to be flowed downwardly into from the second through hole 164 in first outlet chamber 166, and corresponding to first outlet chamber 166 The valve sheet 17 at place is also bent downwardly deformation, so that its corresponding valve opening 170 is opened downwards, gas then can be from first outlet chamber Room 166 is flowed into second outlet chamber 184 via valve opening 170, and flow to outlet 19 and with exporting 19 by outlet through hole 182 In the device (not shown) being connected, whereby with the start to device progress collection pressure.

It please continue refering to Fig. 6 B, when micro valve device 1B carries out release, it is can be filled by regulation and control minisize fluid control 1A gas transport amount is put, is made in gas no longer input set gas chamber 162, or when the device (not shown) being connected with outlet 19 When internal pressure is more than extraneous atmospheric pressure, then micro valve device 1B can be made to carry out release.Now, gas will oneself and outlet The outlet through hole 182 of 19 connections is inputted to second outlet chamber 184 so that the volumetric expansion of second outlet chamber 184, and then Promote the valve sheet 17 of pliability to be bent upwards deformation, and upwards it is smooth, be resisted against on gas collection plate 16, therefore the valve opening of valve sheet 17 170 can close because being resisted against gas collection plate 16.Certainly, in the present embodiment, convex portion knot is set up using first outlet chamber 166 The design of structure 167, therefore be available for the valve sheet 17 of pliability to be bent upwards deformation and more rapidly contradict, valve opening 170 is more favorably reached One prestressing conflict effect attaches sealed closed mode completely, therefore, when in original state, the valve opening 170 of valve sheet 17 Can be closed because being close to be resisted against the convex portion structure 167, then the gas in the second outlet chamber 184 will not be countercurrently to first In outlet chamber 166, to reach the effect for preferably preventing that gas from leaking outside.And, the gas in second outlet chamber 184 is can It is flow to via connection runner 185 in the second release chamber 183, and then makes the volume expanded of the second release chamber 183, and is made pair Deformation should be equally bent upwards in the valve sheet 17 of the second release chamber 183, now not support to be closed in due to valve sheet 17 and unload The end of through hole 181 is pressed, therefore the release through hole 181 is that the gas being in opening, i.e. the second release chamber 183 can be by release Through hole 181 flows outwardly into row release operation.Certainly, the present embodiment, the convex portion structure set up using the end of release through hole 181 181a or through position limiting structure 188 in the second release chamber 183 is arranged at, allow pliability valve sheet 17 be bent up it is curved Become more rapidly, it is more favourable to depart from the state for closing release through hole 181.In this way, then can will be with going out by this unidirectional release operation Gas in the devices (not shown) of the connection of mouth 19 is discharged and is depressured, or is completely exhausted out and is completed release operation.

Please refer to Figure 1A, Fig. 2A and Fig. 7 A Fig. 7 A to Fig. 7 E, wherein Fig. 7 A Fig. 7 A to Fig. 7 E are shown in Figure 1A The collection pressure illustrative view of micro pressure power set.As shown in Fig. 7 A Fig. 7 A, micro pressure power set 1 are i.e. by minisize fluid Formed combined by control device 1A and micro valve device 1B, wherein minisize fluid control device 1A be it has been observed that sequentially by Inlet plate 11, resonance plate 12, piezo-activator 13, insulating trip 141, conducting strip 15, another insulating trip 142 and gas collection plate 16 etc. are tied The positioning of structure stack assembly is formed, and is to have a gap g0 between resonance plate 12 and piezo-activator 13, and in resonance plate 12 There is first chamber 121 between piezo-activator 13, and, micro valve device 1B is then equally by valve sheet 17 and outlet Sequentially stack assembly is positioned on minisize fluid control device 1A gas collection plate 16 and formed the grade of plate 18, and in minisize fluid control Be between device 1A gas collection plate 16 and piezo-activator 13 with gas collection chamber 162, in gas collection plate 16 reference surface 161 more Be recessed one first release chamber 165 and first outlet chamber 166, and is more recessed one in the reference surface 180 of exit plate 18 Second release chamber 183 and second outlet chamber 184, in the present embodiment, by the operation frequency of the micro pressure power set Rate be 27K between 29.5K, operating voltage is ± 10V to ± 16V, and arranged in pairs or groups by these multiple different pressure chamber The driving of piezo-activator 13 and resonance plate 12, the vibration of valve sheet 17, are transmitted so that gas is pressed to next part.

As shown in Figure 7 B, when minisize fluid control device 1A piezo-activator 13 is vibrated downwards by voltage actuation, Air admission hole 110 that then gas can be on inlet plate 11 enters in minisize fluid control device 1A, and confluxes round via at least one 112 flow downwardly into first chamber 121 to be pooled at its central recess 111, then via the hollow bore 120 on resonance plate 12 In.Thereafter, then as seen in figure 7 c, due to the resonant interaction vibrated by piezo-activator 13, resonance plate 12 also can with carry out it is past Compound vibration, i.e., its vibrate downwards, and close on the convex portion 130c of the suspension board 130 of piezo-activator 13, by this resonance The deformation of piece 12 so that the volume increase of the chamber at the central recess 111 of inlet plate 11, and first chamber 121 is compressed simultaneously Volume, and then promote the gas in first chamber 121 to push to flow to both sides, and then by the support of piezo-activator 13 Space 135 between 132 and pass through circulation downwards, to flow between minisize fluid control device 1A and micro valve device 1B In gas collection chamber 162, and again by corresponding downwards with the first through hole 163 and the second through hole 164 that gas collection chamber 162 is connected Flow in the first release chamber 165 and first outlet chamber 166, thus implement aspect it is visible, when resonance plate 12 carry out it is vertical It is that can be changed by its gap g0 between piezo-activator 13 to increase the ultimate range of its vertical displacement during reciprocating vibration Sentence is talked about, and sets gap g0 that resonance plate 12 can be made to produce upper and lower displacement by a larger margin when resonance between two structure.

Then, then as illustrated in fig. 7d, because minisize fluid control device 1A resonance plate 12 returns back to initial position, and press Electric actuator 13 is driven to vibrate upwards by voltage, and wherein the vibration displacement of the piezo-activator is d, the difference with gap g0 Be worth for x, i.e. x=g0-d, after tested when x=1 to 5um, the operating frequency be 27k to 29.5KHz, operating voltage be ± 10V extremely During ± 16V, its maximum output air pressure can reach at least 300mmHg, but be not limited.So same extruding first chamber 121 Volume so that gas in first chamber 121 flows towards both sides, and the space between the support 132 of piezo-activator 13 135 constantly input into gas collection chamber 162, the first release chamber 165 and first outlet chamber 166, so more cause the Air pressure in one release chamber 165 and first outlet chamber 166 is bigger, so promote pliability valve sheet 17 produce downwards it is curved Curved to become, then in the second release chamber 183, valve sheet 17 is then smooth downwards and is resisted against the convex portion of the end of release through hole 181 Structure 181a, and then release through hole 181 is closed, and in second outlet chamber 184, outlet through hole is corresponded on valve sheet 17 182 valve opening 170 is downward opening, the gas in second outlet chamber 184 is passed down to outlet by outlet through hole 182 19 and with any devices (not shown) that be connecteds of outlet 19, and then to reach that collection presses the purpose of operation.Finally, then such as Fig. 7 E institutes Show, shifted up when minisize fluid control device 1A resonance plate 12 resonates, and then make the first surface 11b of inlet plate 11 center Gas in recess 111 can be flowed into first chamber 121 by the hollow bore 120 of resonance plate 12, then via piezo-activator Space 135 between 13 support 132 and be transmitted continuously to downwards in gas collection plate 16, then because its gas pressure is to continue downwards Increase, therefore gas still can be constantly via gas collection chamber 162, the second through hole 164, first outlet chamber 166, second outlet chamber Room 184 and outlet through hole 182 and flow to outlet 19 and with any devices that be connecteds of outlet 19, this collection presses operation to be can be via outer Pressure differential in the atmospheric pressure and device on boundary is not limited with driving.

When being more than the pressure in the external world with the devices that be connecteds of outlet 19 internal pressure (not shown), then micro pressure power Device 1 be can be depressured as shown in Figure 8 or release operation, its be depressured or release make flowing mode mainly such as preceding institute State, can make by the gas transport amount for regulating and controlling minisize fluid control device 1A in gas no longer input set gas chamber 162, now, Gas will be inputted to second outlet chamber 184 from the outlet through hole 182 being connected with outlet 19 so that second outlet chamber 184 Volumetric expansion, and then promote the valve sheet 17 of pliability to be bent upwards deformation, and upwards it is smooth, be resisted against first outlet chamber In 166 convex portion structure 167, and close the valve opening 170 of valve sheet 17, i.e., the gas in second outlet chamber 184 will not be inverse It flow in first outlet chamber 166；And, the gas in second outlet chamber 184 is that the can be flow to via connection runner 185 In two release chambers 183, then by release through hole 181 to carry out release operation；So can by this micro valve structure 1B list The gas in device that will be connected to gas transport operation with outlet 19 is discharged and is depressured, or is completely exhausted out and is completed release work Industry.

As shown in the above description, it is miniature with micro pressure power set 1 in the micro pressure power set 1 of this case Change, the change of its properties is as shown in following table three：

Table three

Thus table is visible, after the sampled product actual experiment of 25 micro pressure power set 1, the knot obtained by the experiment By being：Taper into during 7.5mm, found with this by by the equal large scale 14mm of the length of side of the suspension board 130 of square While a little size dimension reductions, and the function of yield and maximum output air pressure is stepped up, and the preferred dimensions of gained are 7.5mm to 8.5mm, it has further been found that the preferred dimensions particularly in its operating frequency in 27K between 29.5KHz, Ke Yiti The function of rising maximum output air pressure reaches at least more than 300mmHg.Its rational supposition of above phenomenon is seemingly to work as suspension board 130 When the length of side is reduced, then the suspension board 130 is set to reduce the deformation of its horizontal direction when vertical vibration, therefore vertical direction can be promoted Kinetic energy is effectively utilized, and because that can be reduced when the length of side is reduced during assembling in the error amount of vertical direction, suspension board can be reduced whereby Interference and collision between 130 and resonance plate 12 or other assembly elements and maintain the suspension board 130 and the resonance plate 12 certain Distance, thus yield can with lifting while increasing the function of its maximum output air pressure.In addition, when piezo-activator 13 The size reduction of suspension board 130, piezo-activator 13 can also be made smaller, in vibration when be difficult it is inclined in the case of, it is internal Gas flow volume reduces, and is conducive to the promotion or compression of air, thus can improving performance it is outer and can synchronously reduce overall element Size.Furthermore, as described in foregoing, for piezo-activator 13 be equipped with large-size suspension board 130 and piezoelectric ceramic plate 133 and Speech, because the rigidity of suspension board 130 is poor, in vibration when easy torsional deformation, make its easily with resonance plate 12 or other assembling Produce interference and collision between element, thus its to produce noise ratio higher, and noise problem be also cause the reason for product is bad it One, therefore the fraction defective of large-sized suspension board 130 and piezoelectric ceramic plate 133 is higher, therefore, when suspension board 130 and piezoelectric ceramics During 133 size reduction of plate, in addition to the advantages of improving performance, reduce noise, the fraction defective of product can be also reduced.

Nevertheless, above-mentioned because suspension board 130 reduces the enhancement yield that makes of size dimension and increases its maximum output gas The function of pressure, is that by obtained in experiment, can not leaning on the formula institute direct derivation of theory, it promotes function reason Speculate only as the rational reference explanation of experiment.

Certainly, this case micro pressure power set 1 are the trend for reaching slimming, and minisize fluid control device 1A is assembled Micro valve device 1B gross thickness is between 2mm to 6mm height, and then it is light comfortable to reach minitype gas power set 1 Portable purpose, and can be widely used in medical equipment and relevant device.

In summary, the micro pressure power set that this case is provided, mainly by minisize fluid control device and miniature Being mutually assembled for valving, makes gas enter from the air admission hole on minisize fluid control device, and utilizes piezo-activator Start, makes gas produce barometric gradient in the runner after design and pressure chamber, and then make gas flow at high rates and be transferred to In micro valve device, then through the one-way cock design of micro valve device, make gas with one way flow, and then will can press Power is accumulated on exporting in any device being connected；And when being intended to be depressured or during release, then regulate and control minisize fluid control device Transmission quantity, and make gas can by be transmitted with exporting in the device that is connected to the second outlet chamber of micro valve device, and by Connection runner by transmit to the second release chamber, then flowed out by release through hole, and then gas can be made promptly to transmit to reach, And Jing Yin effect is can reach simultaneously, it the overall volume of minitype gas power set is reduced and is thinned, and then make micro- Type aerodynamic device reaches light comfortable portable purpose, and can be widely used in medical equipment and relevant device In.Therefore, file an application in accordance with the law the great industrial utilization of minitype gas power set of this case, whence.

Even if the present invention described in detail as above-described embodiment and can as be familiar with this those skilled in the art appoint apply craftsman's think of and be it is all as Modification, so neither takes off as attached claim is intended to Protector.

【Symbol description】

1：Micro pressure power set

1A：Minisize fluid control device

1B：Micro valve device

1a：Housing

10：Base

11：Inlet plate

11a：The second surface of inlet plate

11b：The first surface of inlet plate

110：Air admission hole

111：Central recess

112：Conflux round

12：Resonance plate

12a：Movable part

12b：Fixed part

120：Hollow bore

121：First chamber

13：Piezo-activator

130：Suspension board

130a：The second surface of suspension board

130b：The first surface of suspension board

130c：Convex portion

130d：Central part

130e：Peripheral part

131：Housing

131a：The second surface of housing

131b：The first surface of housing

132：Support

132a：The second surface of support

132b：The first surface of support

133：Piezoelectric ceramic plate

134、151：Conductive connecting pin

135：Space

141、142：Insulating trip

15：Conducting strip

16：Gas collection plate

16a：Accommodation space

160：Surface

161：Reference surface

162：Gas collection chamber

163：First through hole

164：Second through hole

165：First release chamber

166：First outlet chamber

167、181a：Convex portion structure

168：Side wall

17：Valve sheet

170：Valve opening

171：Position hole

18：Exit plate

180：Reference surface

181：Release through hole

182：Outlet through hole

183：Second release chamber

184：Second outlet chamber

185：Connect runner

187：Second surface

188：Position limiting structure

19：Outlet

g0：Gap

(a)~(x)：The different of piezo-activator implement aspect

a0、i0、j0、m0、n0、o0、p0、q0、r0：Suspension board

a1、i1、m1、n1、o1、p1、q1、r1：Housing

a2、i2、m2、n2、o2、p2、q2、r2：Support, plate connecting portion

a3、m3、n3、o3、p3、q3、r3：Space

d：The vibration displacement of piezo-activator

s4、t4、u4、v4、w4、x4：Convex portion

m2’、n2’、o2’、q2’、r2’：Support is connected to the end of housing

m2”、n2”、o2”、q2”、r2”：Support is connected to the end of suspension board

Claims

1. a kind of piezo-activator, comprising：

One suspension board, is the structure of square, and can be by a central part to a peripheral part flexural vibrations；

One piezoelectric ceramic plate, is the structure of square, with the length of side for being not more than the suspension board length of side, is attached at the suspension board On one first surface, to apply voltage to drive the suspension board flexural vibrations；

One housing, around the outside for being arranged at the suspension board；And

An at least support, is connected between the suspension board and the housing, to provide resilient support, and wherein the support includes:

One beam portion, is arranged in the gap between the suspension board and the housing, and what it was set is oriented parallel to the housing and is somebody's turn to do Suspension board；

One suspension board connecting portion, is connected between the beam portion and the suspension board；And

One housing connecting portion, is connected between the beam portion and the housing, and corresponds to each other and set with the suspension board connecting portion In on same axis.

2. piezo-activator as claimed in claim 1, it is characterised in that an at least support is a plate connecting portion, to connect The suspension board and the housing.

3. piezo-activator as claimed in claim 2, it is characterised in that the both ends of the plate connecting portion correspond to each other and set It is placed on same axis.

4. piezo-activator as claimed in claim 2, it is characterised in that the plate connecting portion is between 0~45 degree of oblique angle company It is connected to the suspension board and the housing.

5. piezo-activator as claimed in claim 1, it is characterised in that the suspension board is square structure, with 7.5mm extremely The 8.5mm length of side.

6. piezo-activator as claimed in claim 1, it is characterised in that the suspension board is square structure, with 8.5mm extremely The 10mm length of side.

7. piezo-activator as claimed in claim 1, it is characterised in that the suspension board is square structure, with 10mm extremely The 12mm length of side.

8. piezo-activator as claimed in claim 1, it is characterised in that there is a convex portion on a second surface of the suspension board.

9. piezo-activator as claimed in claim 8, it is characterised in that the protrusion height of the suspension board between 0.02mm extremely Between 0.08mm.

10. piezo-activator as claimed in claim 8, it is characterised in that the convex portion of the suspension board is a circular protrusions structure, 0.55 times of size of the minimum length of side of a diameter of suspension board.

11. piezo-activator as claimed in claim 1, it is characterised in that the thickness of the suspension board between 0.1mm to 0.4mm it Between.

12. piezo-activator as claimed in claim 1, it is characterised in that the thickness of the piezoelectric ceramic plate between 0.05mm extremely Between 0.3mm.