CN107023456A - Minisize fluid control device - Google Patents
Minisize fluid control device Download PDFInfo
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- CN107023456A CN107023456A CN201610801486.8A CN201610801486A CN107023456A CN 107023456 A CN107023456 A CN 107023456A CN 201610801486 A CN201610801486 A CN 201610801486A CN 107023456 A CN107023456 A CN 107023456A
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- piezo
- activator
- control device
- fluid control
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- 239000012530 fluid Substances 0.000 title claims abstract description 72
- 239000000725 suspension Substances 0.000 claims abstract description 106
- 239000012190 activator Substances 0.000 claims abstract description 88
- 239000000919 ceramic Substances 0.000 claims abstract description 22
- 239000000463 material Substances 0.000 claims description 6
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000010935 stainless steel Substances 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
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- 238000013461 design Methods 0.000 description 12
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- 238000005516 engineering process Methods 0.000 description 6
- 238000000354 decomposition reaction Methods 0.000 description 4
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- 241000276425 Xiphophorus maculatus Species 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/10—Adaptations or arrangements of distribution members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/10—Adaptations or arrangements of distribution members
- F04B39/102—Adaptations or arrangements of distribution members the members being disc valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/10—Adaptations or arrangements of distribution members
- F04B39/1046—Combination of in- and outlet valve
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
Abstract
A kind of minisize fluid control device, includes stacking inlet plate, resonance plate and the piezo-activator set, and wherein inlet plate there is an at least air admission hole, at least one to conflux round and constitute a central recess for confluxing chamber；Resonance plate has hollow bore；Piezo-activator has suspension board, housing and piezoelectric ceramic plate；There is the first chamber that a gap is formed wherein between resonance plate and piezo-activator, when piezo-activator is driven, gas is imported by an at least air admission hole for the inlet plate, the central recess is collected to through at least one round that confluxes, pass through the hollow bore of the resonance plate, to enter in the first chamber, then by the downward transmitting continuous pushing out gas of the piezo-activator.
Description
【Technical field】
This case is on a kind of minisize fluid control device, it is adaptable to a kind of micro ultrathin and Jing Yin micro pressure power
Device.
【Background technology】
The current either industry such as medicine, computer technology, printing, energy in each field, product is towards sophistication and micro-
Smallization direction is developed, and the fluid delivery structure that wherein product such as Micropump, sprayer, ink gun, industrial printing devices is included is
Its key technology, therefore how its technical bottleneck is broken through by means of innovation structure, for the important content of development.
For example, in medicinal industry, many instruments for needing to drive using Pneumatic pressure power or equipment generally adopt to pass
System motor and air pressure valve come reach its gas conveying purpose.However, being limited to these conventional motors and the structure of gas trap
Limitation so that such instrument and equipment be difficult to reduce its volume so that the volume of single unit system can not reduce, that is, be difficult to reality
The target being now thinned, therefore can not also install and put on portable apparatus or used cooperatively with portable apparatus, convenience is not enough.
In addition, these conventional motors and gas trap can also produce noise when start, make user impatient, cause using upper not convenient
And it is uncomfortable.
Therefore, above-mentioned known technology missing can be improved by how developing one kind, can make conventionally employed minisize fluid control device
Instrument or equipment reach small volume, miniaturization and Jing Yin, and then reach the minisize fluid control of light comfortable portable purpose
Device processed, the problem of actually in the urgent need to address at present.
【The content of the invention】
The main purpose of this case is to provide a kind of minisize fluid suitable for portable or Wearable instrument or equipment
Control device, the gas pulsation produced by the start of piezoelectric ceramic plate high frequency, produces barometric gradient in the runner after design, and
Make gas flow at high rates, and enter the resistance difference of outgoing direction through runner, gas is transmitted to outlet side by suction side, in order to solution
Volume that the instrument or equipment of the use minisize fluid control device of known technology possess is big, is difficult to be thinned, can not reach
Portable purpose, and the noise missing such as big.
For up to above-mentioned purpose, a broader aspect of implementing of this case is a kind of minisize fluid control device of offer, it is adaptable to
One micro pressure power set, including an inlet plate, a resonance plate and a piezo-activator, the inlet plate have an at least air inlet
Hole, at least one, which are confluxed, round and constitutes a central recess for confluxing chamber, and an at least air admission hole is for importing gas, and this confluxes
Round to should air admission hole, and guide the gas of the air admission hole to converge into the chamber that confluxes that the central recess is constituted, this is total to
The piece that shakes has a hollow bore, to should inlet plate the chamber that confluxes, and the piezo-activator has a suspension board, outside one
Frame and a piezoelectric ceramic plate, the suspension board have between 4mm to the length between 8mm, between 4mm to the width between 8mm with
And between 0.1mm to the thickness between 0.4mm, the housing has an at least support, is connected in the suspension board and the housing
Between, and piezoelectric ceramic plate is attached at a first surface of the suspension board, and with the length of side for being not more than the suspension board length of side,
With between 4mm to the length between 8mm, between 4mm to width between 8mm and between 0.05mm to the thickness between 0.3mm
Degree, the length and the width ratio of the piezoelectric ceramic plate is between 0.5 times to 2 times, wherein the above-mentioned piezo-activator, should
Resonance plate and the inlet plate are sequentially folded to reply to set positioning, and has a gap shape between the resonance plate and the piezo-activator
Into a first chamber, during so that the piezo-activator is driven, gas is imported by an at least air admission hole for the inlet plate, through this
At least one round that confluxes is collected to the central recess, passes through the hollow bore of the resonance plate, to enter in the first chamber,
The space between an at least support for the piezo-activator is transmitted downwards again, with lasting pushing out gas.
It is applicable for another broader implementation aspect up to above-mentioned purpose, this case to provide a kind of minisize fluid control device
In a micro pressure power set, including an inlet plate, a resonance plate and a piezo-activator, wherein the above-mentioned air inlet
Plate, the resonance plate and the piezo-activator, which sequentially correspond to stack, sets positioning, and has between the resonance plate and the piezo-activator
There is a gap to form a first chamber, when the piezo-activator is driven, gas is entered by the inlet plate, flows through the resonance plate,
Gas is transmitted again to enter in the first chamber.
【Brief description of the drawings】
Figure 1A is the positive decomposition texture schematic diagram for the micro pressure power set that this case is preferred embodiment.
Figure 1B is the positive combination structural representation of the micro pressure power set shown in Figure 1A.
Fig. 2A is the back side decomposition texture schematic diagram of the micro pressure power set shown in Figure 1A.
Fig. 2 B are the back side combining structure schematic diagram of the micro pressure power set shown in Figure 1A.
Fig. 3 A are the positive combination structural representation of the piezo-activator of the micro pressure power set shown in Figure 1A.
Fig. 3 B are the back side combining structure schematic diagram of the piezo-activator of the micro pressure power set shown in Figure 1A.
Fig. 3 C are the cross-sectional view of the piezo-activator of the micro pressure power set shown in Figure 1A.Fig. 4 A to Fig. 4 C are
A variety of implementation aspect schematic diagrames of piezo-activator.
Fig. 5 A to Fig. 5 E are the local illustrative view of the minisize fluid control device of the micro pressure power set shown in Figure 1A.
Fig. 6 A are collection pressure illustrative view of the gas collection plate with micro valve device of the micro pressure power set shown in Figure 1A.
Fig. 6 B are release illustrative view of the gas collection plate with micro valve device of the micro pressure power set shown in Figure 1A.
Fig. 7 A to Fig. 7 E are the collection pressure illustrative view of the micro pressure power set shown in Figure 1A.
Fig. 8 is decompression or the release illustrative view of the micro pressure power set shown in Figure 1A.
【Embodiment】
Embodying some exemplary embodiments of this pattern characteristics and advantage will in detail describe in the explanation of back segment.It should be understood that
This case can have various changes in different aspects, and it does not all depart from the scope of this case, and explanation therein and diagram
Inherently it is illustrated as being used, and nand architecture is in limitation this case.
The micro pressure power set 1 of this case are to can be applied to the works such as the raw skill of medicine, the energy, computer technology or printing
Industry, in order to transmit gas, but is not limited.Figure 1A, Figure 1B, Fig. 2A, Fig. 2 B and Fig. 7 A to 7E figures are referred to, Figure 1A is this
The positive decomposition texture schematic diagram of the micro pressure power set of case preferred embodiment, Figure 1B is that the micro pressure shown in Figure 1A is moved
Positive combination structural representation, Fig. 2A of power apparatus are the back side decomposition texture signal of the micro pressure power set shown in Figure 1A
Figure, the back side combining structure schematic diagrams of Fig. 2 B then for the micro pressure power set shown in Figure 1A, Fig. 7 A to 7E figures are Figure 1A institutes
The collection pressure illustrative view of the micro pressure power set shown.As shown in Figure 1A and Fig. 2A, the micro pressure power set 1 of this case
It is to be formed as combined by minisize fluid control device 1A and micro valve device 1B, wherein minisize fluid control device 1A has
The structures such as housing 1a, piezo-activator 13, insulating trip 141,142 and conducting strip 15, wherein, housing 1a be comprising gas collection plate 16 and
Base 10, base 10 then includes inlet plate 11 and resonance plate 12, but is not limited.Piezo-activator 13 corresponds to resonance plate
12 and set, and make inlet plate 11, resonance plate 12, piezo-activator 13, insulating trip 141, conducting strip 15, another insulating trip 142,
The grade of gas collection plate 16 sequentially stacks setting, and the piezo-activator 13 is by a suspension board 130, at least a housing 131, a support
132 and one piezoelectric ceramic plate 133 assemble jointly；And micro valve device 1B goes out comprising a valve sheet 17 and one
Oralia 18 but it is not limited.And in the present embodiment, as shown in Figure 1A, gas collection plate 16 is not only single plate structure, also
There can be the frame structure of side wall 168 for periphery, and the gas collection plate 16 has between 9mm to the length between 17mm, between 9mm
To the width between 17mm, and the length and the width ratio are between 0.53 times to 1.88 times, and be made up of the periphery
Side wall 168 and the plate common definition of its bottom go out an accommodation space 16a, are housed with so that the piezo-activator 13 is arranged at this
In the 16a of space, therefore after the micro pressure power set 1 of this case are completed, then its front schematic view can as shown in Figure 1B, with
And shown in Fig. 7 A to Fig. 7 E, it is seen that minisize fluid control device 1A be it is corresponding with micro valve device 1B assemble, also
I.e. the micro valve device 1B valve sheet 17 and exit plate 18 sequentially stack setting and are positioned at minisize fluid control device 1A
Gas collection plate 16 on form.And the schematic rear view that it is completed release through hole 181 then in the visible exit plate 18 and go out
Mouth 19, outlet 19 with a device (not shown) to be connected, and release through hole 181 is then provided with making the gas in micro valve device 1B
Discharge, with up to effect of release.Set by this minisize fluid control device 1A and micro valve device 1B assembling, so that
Gas passes through piezo-activator 13 from an at least air admission hole 110 air inlet on minisize fluid control device 1A inlet plate 11
Start, and flow through that multiple pressure chamber are (not shown) to continue to transmit, and then gas can be made in unidirectional in micro valve device 1B
Flowing, and by acute build up of pressure in the device (not shown) being connected with the micro valve device 1B port of export, and ought need to carry out
During release, then regulate and control minisize fluid control device 1A output quantity, make in exit plate 18 of the gas via micro valve device 1B
Release through hole 181 and discharge, to carry out release.
It please continue refering to Figure 1A and Fig. 2A, as shown in Figure 1A, minisize fluid control device 1A inlet plate 11 is that have first
Surface 11b, second surface 11a and at least an air admission hole 110, in the present embodiment, the quantity of air admission hole 110 is for 4, but not
As limit, it is through the first surface 11b and second surface 11a of inlet plate 11, mainly suitable from outside device to supplied gas
Answer the effect of atmospheric pressure and flowed into from an at least air admission hole 110 in minisize fluid control device 1A.And again as shown in Figure 2 A,
From the first surface 11b of inlet plate 11, conflux round 112 with least one thereon, to the second surface of inlet plate 11
A 11a at least air admission hole 110 is correspondingly arranged.In the present embodiment, 110 pairs of quantity and the air admission hole of its round 112 that confluxes
Should, its quantity is 4, but is not limited thereto, and is with central recess wherein at the center exchange of these rounds 112 that conflux
111, and central recess 111 is connected with the round 112 that confluxes, and can will enter the gas for the round 112 that confluxes from air admission hole 110 whereby
Body is guided and confluxed and is concentrated to central recess 111 and transmits.It is so that in the present embodiment, inlet plate 11 has integrally formed air inlet
Hole 110, conflux round 112 and central recess 111, and be to be correspondingly formed one to conflux the confluxing of gas at the central recess 111
Chamber, it is temporary with supplied gas.In some embodiments, the material of inlet plate 11 is can be but not be limited to by a stainless steel institute
Constitute, and its thickness is that between 0.6mm, and its preferred values is 0.5mm between 0.4mm, but be not limited.In other realities
Apply in example, the depth of the chamber that confluxes constituted at the central recess 111 is identical with the depth of these rounds 112 that conflux, and
The preferred values of conflux chamber and the depth of the round 112 that confluxes is between 0.3mm, but to be not limited between 0.2mm.Altogether
The piece 12 that shakes is made up of a flexible materials, but is not limited, and in having a hollow bore 120 on resonance plate 12, is
Set corresponding to the first surface 11b of inlet plate 11 central recess 111, so that gas circulates.In other embodiments,
Resonance plate 12 is can be made up of a copper material, but is not limited, and its thickness be between 0.03mm between 0.08mm, and
Its preferred values is 0.05mm, but is also not limited.
Please refer to Fig. 3 A, Fig. 3 B and Fig. 3 C, it is the piezoelectricity of the micro pressure power set respectively shown in Figure 1A
Positive structure schematic, structure schematic diagram and the cross-sectional view of actuator, piezo-activator 13 is hanged by one
Kickboard 130, at least a housing 131, a support 132 and a piezoelectric ceramic plate 133 assemble jointly, wherein, the piezoelectricity
Ceramic wafer 133 is attached at the first surface 130b of suspension board 130, and deformation is produced to drive the suspension board 130 to apply voltage
Flexural vibrations, suspension board 130 has central part 130d and peripheral part 130e, be with when piezoelectric ceramic plate 133 is driven by voltage,
Suspension board 130 can be by central part 130d to peripheral part 130e flexural vibrations, and an at least support 132 is to be connected to suspension
Between plate 130 and housing 131, in the present embodiment, the support 132 be connected in suspension board 130 and housing 131 it
Between, its two-end-point is to be connected to housing 131, suspension board 130, to provide resilient support, and in support 132, suspension board 130
And an at least space 135 is had more between housing 131, circulated to supplied gas, and the suspension board 130, housing 131 and support
132 kenel and quantity is with a variety of changes.In addition, housing 131 is to surround the outside for being arranged at suspension board 130, and have
The conductive connecting pin 134 of one outside projection, to power, connection is used, but is not limited.In the present embodiment, suspension board 130
It is for the structure of a cascaded surface, to imply that and have more a convex portion 130c in the second surface 130a of suspension board 130, convex portion 130c can
For but be not limited to a circular protrusions structure, and convex portion 130c height is that between 0.08mm, and preferred values is between 0.02mm
0.03mm, 0.55 times of size of the minimum length of side of its a diameter of suspension board 130.Be please refer to Fig. 3 A and Fig. 3 C it is visible,
The convex portion 130c of suspension board 130 surface is the second surface 131a coplines with housing 131, and the second table of suspension board 130
The second surface 132a of face 130a and support 132 is also copline, and the suspension board 130 convex portion 130c and housing 131 the
It is that there is a specific depth between the second surface 130a and support 132 of two surface 131a and suspension board 130 second surface 132a
Degree.As for the first surface 130b of suspension board 130, then as shown in Fig. 3 B and Fig. 3 C, its first surface 131b with housing 131 and
The first surface 132b of support 132 is smooth coplanar structure, and piezoelectric ceramic plate 133 is then attached at this smooth suspension board
At 130 first surface 130b.In other embodiments, the kenel of suspension board 130 also can be for a two-sided smooth tabular just
Square structure, is not limited thereto, and can appoint according to situation is actually applied and apply change.In some embodiments, suspension board 130,
Support 132 and housing 131 are the structures that can be formed in one, and can be made up of a metallic plate, for example can be by stainless steel
Matter is constituted, but is not limited.And in some embodiments, the thickness of suspension board 130 be between 0.1mm between 0.4mm,
And its preferred values is 0.27mm, the length of the another suspension board 130 is between 4mm between 8mm, and its preferred values can be for 6mm extremely
8mm, width are between 4mm between 8mm, and its preferred values for 6mm to 8mm but can be not limited.As for the thickness of the housing 131
Degree is that between 0.4mm, and its preferred values is 0.3mm between 0.2mm, but is not limited.
Again in other embodiments, the thickness of piezoelectric ceramic plate 133 be between 0.05mm between 0.3mm, and its
Preferred values is 0.10mm, and the piezoelectric ceramic plate 133 have be not more than the length of side of suspension board 130 the length of side, with length between
4mm between 8mm, and its preferred values can for 6mm to 8mm, width between 4mm between 8mm, and its preferred values can be for 6mm extremely
8mm, another length and width than preferred values be 0.5 times to 2 times between, be so also not limited.In other embodiments,
The length of side of piezoelectric ceramic plate 133 is smaller than the length of side of suspension board 130, and same design is the pros corresponding with suspension board 130
Shape platy structure, but be not limited thereto.
Related embodiment in the micro pressure power set 1 of this case, piezo-activator 13 so outstanding using square
Kickboard 130, its reason is compared to circular suspension board (the circular suspension board of (j)~(l) aspects as shown in Fig. 4 A Fig. 4 A
J0 design), the structure of the square suspension board 130 substantially has the advantage of power saving, because of the electric capacity operated under resonant frequency
Property load, it, which consumes power, increase with risings of frequency, but because the resonant frequency of length of side square suspension board 130 it is obvious compared with
Circular suspension board j0 is low, therefore its relative consumption power is also significant lower, that is, this case uses the piezoelectricity of square _type layout to cause
Dynamic device 13, makes it have savings advantage, is particularly applied to object wearing device, and it is very important design focal point to save electric power.
It please continue refering to Fig. 4 A, 4B, 4C figure, it is a variety of implementation aspect schematic diagrames for piezo-activator.As illustrated, then
It can be seen that the suspension board 130 of piezo-activator 13, housing 131 and support 132 are that there can be various kenel, and can at least have figure
A variety of aspects such as (a)~(l) shown in 4A Fig. 4 A, for example, the housing a1 and suspension board a0 of (a) aspect are for square knot
Structure, and be to link it, for example between the two by multiple support a2：8, but be not limited, and in support a2 and suspension board
It is, with space a3, to be circulated with supplied gas between a0, housing a1.In another (i) aspect, its housing i1 and suspension board i0 are also same
Sample is square structure, precisely because in only by 2 support i2 to link it；In addition, there is further correlation technique, such as 4B,
Shown in 4C figures, the suspension board of piezo-activator 13 can also have (s)~(x) shown in (m) as shown in Figure 4 B~(r) and Fig. 4 C
Etc. a variety of aspects, only in this little aspect, suspension board 130 and housing 131 are square structure.For example, (m) aspect it
Housing m1 and suspension board m0 are the structure of square, and are to link it, for example between the two by multiple support m2：4, but
It is not limited, and is with space m3, so that fluid circulates between support m2 and suspension board m0, housing m1.And in this reality
Apply in example, the support m2 being linked between housing m1 and suspension board m0 is can be but not be limited to a plate connecting portion m2, and this plate connects
There is socket part m2 both ends m2 ' and m2 ", wherein one end m2 ' be connected with housing m1, and the other end m2 " then with suspension board
M0 connections, and this both ends m2 ' and m2 " is corresponded to each other and is arranged on same axis.In (n) aspect, its same tool
There are housing n1, suspension board n0 and the support n2 being connected between housing n1, suspension board n0 and the space circulated for fluid
N3, and support n2 also can be but not be limited to a plate connecting portion n2, plate connecting portion n2 equally has both ends n2 ' and n2 ", and end
N2 ' is connected with housing n1, and the other end n2 " is then connected with suspension board n0, only in this implementation aspect, and plate connecting portion n2 is
To be connected to housing n1 and suspension board n0 between 0~45 degree of oblique angle, in other words, and both ends n2 ' and n2 " is not arranged at
On same level axis, it is the setting relation for mutual dislocation.In (o) aspect, its housing o1, suspension board o0 and connection
The structures such as the support o2 between housing o1, the suspension board o0 and space o3 for fluid circulation are similar with previous embodiment,
Wherein only it is slightly different as the plate connecting portion o2 of support design kenel with (m) aspect, so in this aspect, the plate connecting portion
O2 both ends o2 ' and o2 " is still to correspond to each other and be arranged on same axis.
Again in (p) aspect, it equally has housing p1, suspension board p0 and is connected between housing p1, suspension board p0
Support p2 and the structure such as space p3 that is circulated for fluid, in this implementation aspect, had more as the plate connecting portion p2 of support
There is the structure such as suspension board connecting portion p20, beam portion p21 and housing connecting portion p22, wherein beam portion p21 is arranged at suspension board p0 and outer
In gap p3 between frame p1, and its direction set is parallel to housing p1 and suspension board p0, and, suspension board connecting portion
P20 is connected between beam portion p21 and suspension board p0, and housing connecting portion p22 be connection beam portion p21 and housing p1 between, and
The suspension board connecting portion p20 and housing connecting portion p22 also corresponds to each other and is arranged on same axis.
In (q) aspect, its housing q1, suspension board q0 and the support q2 being connected between housing q1, suspension board q0, with
And supply the structures such as the space q3 of fluid circulation similar with foregoing (m), (o) aspect, wherein only as the plate connecting portion q2 of support
Design kenel be slightly different with (m), (o) aspect, in this aspect, suspension board q0 is that for the kenel of square, and its is every
It is connected while being respectively provided with two plate connecting portion q2 with housing q1, and each of which plate connecting portion q2 both ends q2 ' and q2 " is similarly
Correspond to each other and be arranged on same axis.But in (r) aspect, it also has housing r1, suspension board r0, support r2
And the component such as space r3, and support r2 also can be but not be limited to a plate connecting portion r2, in this embodiment, plate connecting portion r2 is
For the structure of V-shaped, in other words, plate connecting portion r2 also to be connected to housing r1 and suspension board r0 between 0~45 degree of oblique angle,
Therefore be respectively provided with one end r2 " in each plate connecting portion r2 and be connected with suspension board r0, and be connected with both ends r2 ' with housing r1,
Imply that both ends b2 ' and end b2 " is not arranged on same level axis.
Continue as shown in Figure 4 C, the outward appearance kenel of these (s)~(x) aspects approximately corresponds to (m)~(r) shown in Fig. 4 B
Kenel, only in these (s)~(x) aspects, be equipped with convex portion 130c on the suspension board 130 of each piezo-activator 13, i.e.,
The structure such as s4, t4, u4, v4, w4, x4, and the either aspect such as (m)~(r) aspects or (s)~(x) as illustrated in the drawing, should
Suspension board 130 is designed as the kenel of square, to reach effect of foregoing low power consumption；Thus etc. and it is visible to implement aspect, no matter
Suspension board 130 is that for two-sided flat slab construction, or have for a surface step structure of convex portion, the protection in this case
In the range of, and kenel and the quantity of the support 132 being connected between suspension board 130 and housing 131 also can be according to actually applying situation
And appoint and apply change, it is not limited with the aspect shown in this case.It is described also as before, these suspension boards 130, housing 131 and support 132
Be the structure that can be formed in one, but be not limited, as its manufacture then can by traditional processing or gold-tinted etching or
The mode such as Laser Processing or eletroforming or electro-discharge machining is made, and is not limited.
In addition, please continue refering to Figure 1A and Fig. 2A, insulating trip 141, conducting strip are had more in minisize fluid control device 1A
15 and another insulating trip 142 be sequentially to be correspondingly arranged under piezo-activator 13, and its form approximately correspond to piezoelectricity cause
The form of the housing of dynamic device 13.In some embodiments, insulating trip 141,142 is made up of the material that can be insulated, for example：Modeling
Glue, but be not limited, it is used with carrying out insulation；In other embodiments, conducting strip 15 is i.e. by conductive material institute structure
Into for example：Metal, but be not limited, conduct being used.And, in the present embodiment, it can also be set on conducting strip 15
A conductive connecting pin 151 is put, conduct being used.
Please refer to Figure 1A and Fig. 5 A to Fig. 5 E, wherein Fig. 5 A to Fig. 5 E are for the micro pressure power dress shown in Figure 1A
The minisize fluid control device 1A put local illustrative view.First, as shown in Figure 5A, it is seen that minisize fluid control device 1A
It is sequentially by heaps such as inlet plate 11, resonance plate 12, piezo-activator 13, insulating trip 141, conducting strip 15 and another insulating trips 142
It is folded to form, and in the present embodiment, it is to fill out in the gap g0 between the periphery of housing 131 of resonance plate 12 and piezo-activator 13
A material is filled, for example：Conducting resinl, but be not limited, so that the convex portion of resonance plate 12 and the suspension board 130 of piezo-activator 13
Gap g0 depth can be maintained between 130c, and then air-flow can be guided more quickly flow, and because of the convex portion of suspension board 130
130c keeps suitable distance to make the interference reduction that is in contact with each other with resonance plate 12, and promoting noise to produce can be lowered.
It please continue refering to Fig. 5 A to Fig. 5 E, as illustrated, when inlet plate 11, resonance plate 12 are sequentially corresponding with piezo-activator 13
After assembling, then a chamber for confluxing gas can be collectively forming with inlet plate 11 thereon at the hollow bore 120 of resonance plate 12,
And a first chamber 121 is more formed between resonance plate 12 and piezo-activator 13, it is configured to temporarily store gas, and first chamber 121
It is to pass through the hollow bore 120 of resonance plate 12 and be connected with the chamber at the first surface 11b of inlet plate 11 central recess 111
It is logical, and the both sides space 135 then between the support 132 of piezo-activator 13 of first chamber 121 and with being arranged under it
Micro valve device 1B is connected.
When the minisize fluid control device 1A starts of micro pressure power set 1, mainly by piezo-activator 13 by electricity
Pressure activates and with support 132 for fulcrum, carries out the reciprocating vibration of vertical direction.As shown in Figure 5 B, when piezo-activator 13 by
Voltage actuation and when vibrating downwards, it is with when piezo-activator 13 vibrates for light, thin laminated structure to be due to resonance plate 12
When, resonance plate 12 also can with resonance and carry out vertical reciprocating vibration, as resonance plate 12 corresponds to the inlet plate 11
The part of central recess 111 also can with flexural vibrations deformation, i.e., the resonance plate 12 correspond to the inlet plate 11 central recess
111 part is the movable part 12a for resonance plate 12, is the now resonance plate with when piezo-activator 13 is bent downwardly vibration
12 movable part 12a can bringing into and pushing and drive that piezo-activator 13 vibrates because of fluid, and with piezo-activator
13 are bent downwardly vibration deformation, then an at least air admission hole 110 of the gas on inlet plate 11 enters, and pass through its first surface
At least the one of 11b conflux round 112 be pooled to center central recess 111 at, then via on resonance plate 12 with central recess
111 central holes 120 being correspondingly arranged are flowed downwardly into first chamber 121, thereafter, due to what is vibrated by piezo-activator 13
Drive, resonance plate 12 also can with resonance and carry out vertical reciprocating vibration, as shown in Figure 5 C, now resonance plate 12 is movable
Portion 12a also with downward vibration, and attach contact at piezo-activator 13 suspension board 130 convex portion 130c on, make suspension board
The spacing of region beyond 130 convex portion 130c and the chamber that confluxes between the fixed part 12b of the both sides of resonance plate 12 will not diminish,
And by the deformation of this resonance plate 12, to compress the volume of first chamber 121, and close the middle flow space of first chamber 121,
Promote the gas in it to push to flow to both sides, so it is downward by the space 135 between the support 132 of piezo-activator 13
Pass through flowing.As for Fig. 5 D then for its resonance plate 12 movable part 12a via flexural vibrations deformation after, and return back to initial bit
Put, and follow-up piezo-activator 13 is driven to vibrate upwards by voltage, the volume of so same extruding first chamber 121, and this
When due to piezo-activator 13 be upward lifting, the displacement of the lifting can be d, so that the gas meeting in first chamber 121
Towards both sides flowing, and then drive gas constantly to enter from least air admission hole 110 on inlet plate 11, then flow into central recess
In 111 chambers formed, then as shown in fig. 5e, the resonance plate 12 resonated by the vibration of the upward lifting of piezo-activator 13 to
On, the movable part 12a of resonance plate 12 makes gas in central recess 111 again in resonance plate 12 also to upward position
Central aperture hole 120 and flow into first chamber 121, and the space 135 between the support 132 of piezo-activator 13 and wear downwards
More outflow minisize fluid control device 1A.Thus implement aspect visible, when resonance plate 12 carries out vertical reciprocating vibration, be
Can be by its gap g0 between piezo-activator 13 to increase the ultimate range of its vertical displacement, in other words, in two knot
Set gap g0 that resonance plate 12 can be made to produce upper and lower displacement by a larger margin when resonance between structure, and wherein this is piezoelectric actuated
The vibration displacement of device is d, and the difference with gap g0 is x, i.e. x=g0-d, after tested as x≤0um, to there is noise state；Work as x
=1 to 5um, the maximum output air pressure of micro pressure power set 1 can reach 350mmHg；As x=5 to 10um, micro pressure power
The maximum output air pressure of device 1 can reach 250mmHg；As x=10 to 15um, the maximum output air pressure of micro pressure power set 1 can
150mmHg is reached, its numerical value corresponding relation is as shown in the following Table I.Above-mentioned numerical value be operating frequency be 17K to 20K it
Between, operating voltage be ± 10V between ± 20V.In this way, producing pressure in the runner design through this minisize fluid control device 1A
Power gradient, makes gas flow at high rates, and enters the resistance difference of outgoing direction through runner, and gas is transmitted to discharge by suction side
End, and in the state of outlet side has air pressure, still have the ability to continue pushing out gas, and can reach Jing Yin effect.
(table one)
| Test item | X (displacement and gap difference) | Maximum output air pressure |
| 1 | X=1 to 5um | 350mmHg |
| 2 | X=5 to 10um | 250mmHg |
| 3 | X=10 to 15um | 150mmHg |
In addition, in some embodiments, the vertical reciprocating type vibration frequency of resonance plate 12 can be with piezo-activator 13
Vibration frequency is identical, i.e., both can be upwards or simultaneously downward simultaneously, and it is can to appoint according to situation is actually applied and apply change, not
To be limited shown in the present embodiment as flowing mode.
Please refer to Figure 1A, Fig. 2A and Fig. 6 A, Fig. 6 B, wherein Fig. 6 A are for the micro pressure power set shown in Figure 1A
Gas collection plate 16 and micro valve device 1B collection pressure illustrative view, Fig. 6 B are then the micro pressure power set shown in Figure 1A
Gas collection plate 16 and micro valve device 1B release illustrative view.As shown in Figure 1A and Fig. 6 A, the micro pressure of this case is moved
The micro valve device 1B of power apparatus 1 is sequentially to be stacked and formed by valve sheet 17 and exit plate 18, and minisize fluid control of arranging in pairs or groups
Device 1A processed gas collection plate 16 is operated.
In the present embodiment, gas collection plate 16 has a surface 160 and a reference surface 161, be depression on the surface 160 with
A gas collection chamber 162 is formed, is set wherein for the piezo-activator 13, the gas transmitted downwards by minisize fluid control device 1A
Then temporarily accumulate in this gas collection chamber 162, and be that, with multiple through holes, it includes the first through hole in gas collection plate 16
163 and second through hole 164, one end of the first through hole 163 and the second through hole 164 is connected with gas collection chamber 162, separately
One end is then connected with the first release chamber 165 and first outlet chamber 166 on the reference surface 161 of gas collection plate 16 respectively.
And, a convex portion structure 167 is further set up at first outlet chamber 166, for example, can be but not be limited to a cylindrical structure,
The height of the convex portion structure 167 is above the reference surface 161 of the gas collection plate 16, and convex portion structure 167 height between 0.3mm
To between 0.55mm, and its preferred values is 0.4mm.
Exit plate 18 includes a release through hole 181, an outlet through hole 182, a reference surface 180 and a second surface
187, the wherein release through hole 181, outlet through hole 182 is through the reference surface 180 and second surface 187 of exit plate 18, should
Be recessed one second release chamber 183 and a second outlet chamber 184 on reference surface 180, and the release through hole 181 is located at second and unloaded
The core of chamber 183 is pressed, and runner is connected with more one between the second release chamber 183 and second outlet chamber 184
185, to supplied gas circulation, and one end of outlet through hole 182 is connected with second outlet chamber 184, the other end then with outlet
19 are connected, in the present embodiment, and outlet 19 is can be connected with a device (not shown), for example：Forcing press, but not as
Limit.
There is a valve opening 170 and multiple positioning holes 171, the thickness of the valve sheet 17 is between 0.1mm on valve sheet 17
To between 0.3mm, and its preferred values is 0.2mm.
When valve sheet 17 positions assembling between gas collection plate 16 and exit plate 18, the release through hole 181 of the exit plate 18
Corresponding to first through hole 163 of the gas collection plate 16, the second release chamber 183 corresponds to the first release of the gas collection plate 16
Chamber 165, the second outlet chamber 184 corresponds to the first outlet chamber 166 of the gas collection plate 16, and the valve sheet 17 is arranged at
Between the gas collection plate 16 and the exit plate 18, the first release chamber 165 of barrier is connected with the second release chamber 183, and the valve
The valve opening 170 of piece 17 is arranged between second through hole 164 and the outlet through hole 182, and valve opening 170 is located at gas collection plate 16
The convex portion structure 167 of first outlet chamber 166 and be correspondingly arranged, by the design of this single valve opening 170, so that gas can be because
Answer its pressure difference and reach the purpose of one-way flow.
And one end of release through hole 181 of the exit plate 18 can enter one and set up structure 181a in convex portion formed by a protrusion,
It for example can be but not be limited to cylindrical structure, convex portion structure 181a height is that between 0.55mm, and its is preferable between 0.3mm
Be worth for 0.4mm, and this convex portion structure 181a through improvement to increase its height, convex portion structure 181a height is above this and gone out
The reference surface 180 of oralia 18, to strengthen making valve sheet 17 rapidly contradict and closing release through hole 181, and reaches a prestressing
The effect that conflict effect is fully sealed；And, exit plate 18 is with more at least a position limiting structure 188, the height of the position limiting structure 188
Spend for 0.32mm, by taking the present embodiment as an example, position limiting structure 188 is disposed in the second release chamber 183, and be an annular block
Structure, and be not limited, it predominantly when micro valve device 1B carries out collection pressure operation, is provided with Auxiliary support valve sheet 17
It is used, to prevent valve sheet 17 from collapsing, and can makes valve sheet 17 can more quickly opening and closing of fault.
When micro valve device 1B collection presses start, mainly as shown in Figure 6A, it is can be in response to coming from minisize fluid control
The pressure that the gas that device 1A processed is transmitted downwards is provided, and or when extraneous atmospheric pressure is more than the dress being connected with outlet 19
When putting the internal pressure of (not shown), then gas can be from the gas collection chamber 162 in minisize fluid control device 1A gas collection plate 16
Respectively the first release chamber 165 and first outlet chamber are flowed downwardly into through the first through hole 163 and the second through hole 164
In 166, now, downward gas pressure is the valve sheet 17 of pliability is bent downwardly deformation and then make the first release chamber
165 volume increase, and corresponding to end that is smooth downwards at the first through hole 163 and being resisted against release through hole 181, Jin Erke
The release through hole 181 of exit plate 18 is closed, therefore will not be flowed out in the gas in the second release chamber 183 from release through hole 181.
Certainly, the present embodiment, the design of a convex portion structure 181a is set up using the end of release through hole 181, to strengthen making valve sheet 17
Rapidly contradict and close release through hole 181, and reach the effect that prestressing conflict effect is fully sealed, while and being set through ring
Position limiting structure 188 in the periphery of release through hole 181, with Auxiliary support valve sheet 17, makes it not produce and collapses.On the other hand,
Because gas is to be flowed downwardly into from the second through hole 164 in first outlet chamber 166, and corresponding to first outlet chamber 166
The valve sheet 17 at place is also bent downwardly deformation, so that its corresponding valve opening 170 is opened downwards, gas then can be from first outlet chamber
Room 166 is flowed into second outlet chamber 184 via valve opening 170, and flow to outlet 19 and with exporting 19 by outlet through hole 182
In the device (not shown) being connected, whereby with the start to device progress collection pressure.
It please continue refering to Fig. 6 B, when micro valve device 1B carries out release, it is can be filled by regulation and control minisize fluid control
1A gas transport amount is put, is made in gas no longer input set gas chamber 162, or when the device (not shown) being connected with outlet 19
When internal pressure is more than extraneous atmospheric pressure, then micro valve device 1B can be made to carry out release.Now, gas will oneself and outlet
The outlet through hole 182 of 19 connections is inputted to second outlet chamber 184 so that the volumetric expansion of second outlet chamber 184, and then
Promote the valve sheet 17 of pliability to be bent upwards deformation, and upwards it is smooth, be resisted against on gas collection plate 16, therefore the valve opening of valve sheet 17
170 can close because being resisted against gas collection plate 16.Certainly, in the present embodiment, convex portion knot is set up using first outlet chamber 166
The design of structure 167, therefore be available for the valve sheet 17 of pliability to be bent upwards deformation and more rapidly contradict, valve opening 170 is more favorably reached
One prestressing conflict effect attaches sealed closed mode completely, therefore, when in original state, the valve opening 170 of valve sheet 17
Can be closed because being close to be resisted against the convex portion structure 167, then the gas in the second outlet chamber 184 will not be countercurrently to first
In outlet chamber 166, to reach the effect for preferably preventing that gas from leaking outside.And, the gas in second outlet chamber 184 is can
It is flow to via connection runner 185 in the second release chamber 183, and then makes the volume expanded of the second release chamber 183, and is made pair
Deformation should be equally bent upwards in the valve sheet 17 of the second release chamber 183, now not support to be closed in due to valve sheet 17 and unload
The end of through hole 181 is pressed, therefore the release through hole 181 is that the gas being in opening, i.e. the second release chamber 183 can be by release
Through hole 181 flows outwardly into row release operation.Certainly, the present embodiment, the convex portion structure set up using the end of release through hole 181
181a or through position limiting structure 188 in the second release chamber 183 is arranged at, allow pliability valve sheet 17 be bent up it is curved
Become more rapidly, it is more favourable to depart from the state for closing release through hole 181.In this way, then can will be with going out by this unidirectional release operation
Gas in the devices (not shown) of the connection of mouth 19 is discharged and is depressured, or is completely exhausted out and is completed release operation.
Please refer to Figure 1A, Fig. 2A and Fig. 7 A Fig. 7 A to Fig. 7 E, wherein Fig. 7 A Fig. 7 A to Fig. 7 E are shown in Figure 1A
The collection pressure illustrative view of micro pressure power set.As shown in Fig. 7 A Fig. 7 A, micro pressure power set 1 are i.e. by minisize fluid
Formed combined by control device 1A and micro valve device 1B, wherein minisize fluid control device 1A be it has been observed that sequentially by
Inlet plate 11, resonance plate 12, piezo-activator 13, insulating trip 141, conducting strip 15, another insulating trip 142 and gas collection plate 16 etc. are tied
The positioning of structure stack assembly is formed, and is to have a gap g0 between resonance plate 12 and piezo-activator 13, and in resonance plate 12
There is first chamber 121 between piezo-activator 13, and, micro valve device 1B is then equally by valve sheet 17 and outlet
Sequentially stack assembly is positioned on minisize fluid control device 1A gas collection plate 16 and formed the grade of plate 18, and in minisize fluid control
Be between device 1A gas collection plate 16 and piezo-activator 13 with gas collection chamber 162, in gas collection plate 16 reference surface 161 more
Be recessed one first release chamber 165 and first outlet chamber 166, and is more recessed one in the reference surface 180 of exit plate 18
Second release chamber 183 and second outlet chamber 184, in the present embodiment, by the operation frequency of the micro pressure power set
Rate be 27K between 29.5K, operating voltage is ± 10V to ± 16V, and arranged in pairs or groups by these multiple different pressure chamber
The driving of piezo-activator 13 and resonance plate 12, the vibration of valve sheet 17, are transmitted so that gas is pressed to next part.
As shown in Figure 7 B, when minisize fluid control device 1A piezo-activator 13 is vibrated downwards by voltage actuation,
Air admission hole 110 that then gas can be on inlet plate 11 enters in minisize fluid control device 1A, and confluxes round via at least one
112 flow downwardly into first chamber 121 to be pooled at its central recess 111, then via the hollow bore 120 on resonance plate 12
In.Thereafter, then as seen in figure 7 c, due to the resonant interaction vibrated by piezo-activator 13, resonance plate 12 also can with carry out it is past
Compound vibration, i.e., its vibrate downwards, and close on the convex portion 130c of the suspension board 130 of piezo-activator 13, by this resonance
The deformation of piece 12 so that the volume increase of the chamber at the central recess 111 of inlet plate 11, and first chamber 121 is compressed simultaneously
Volume, and then promote the gas in first chamber 121 to push to flow to both sides, and then by the support of piezo-activator 13
Space 135 between 132 and pass through circulation downwards, to flow between minisize fluid control device 1A and micro valve device 1B
In gas collection chamber 162, and again by corresponding downwards with the first through hole 163 and the second through hole 164 that gas collection chamber 162 is connected
Flow in the first release chamber 165 and first outlet chamber 166, thus implement aspect it is visible, when resonance plate 12 carry out it is vertical
It is that can be changed by its gap g0 between piezo-activator 13 to increase the ultimate range of its vertical displacement during reciprocating vibration
Sentence is talked about, and sets gap g0 that resonance plate 12 can be made to produce upper and lower displacement by a larger margin when resonance between two structure.
Then, then as illustrated in fig. 7d, because minisize fluid control device 1A resonance plate 12 returns back to initial position, and press
Electric actuator 13 is driven to vibrate upwards by voltage, and wherein the vibration displacement of the piezo-activator is d, the difference with gap g0
Be worth for x, i.e. x=g0-d, after tested when x=1 to 5um, the operating frequency be 27k to 29.5KHz, operating voltage be ± 10V extremely
During ± 16V, its maximum output air pressure can reach at least 300mmHg, but be not limited.So same extruding first chamber 121
Volume so that gas in first chamber 121 flows towards both sides, and the space between the support 132 of piezo-activator 13
135 constantly input into gas collection chamber 162, the first release chamber 165 and first outlet chamber 166, so more cause the
Air pressure in one release chamber 165 and first outlet chamber 166 is bigger, so promote pliability valve sheet 17 produce downwards it is curved
Curved to become, then in the second release chamber 183, valve sheet 17 is then smooth downwards and is resisted against the convex portion of the end of release through hole 181
Structure 181a, and then release through hole 181 is closed, and in second outlet chamber 184, outlet through hole is corresponded on valve sheet 17
182 valve opening 170 is downward opening, the gas in second outlet chamber 184 is passed down to outlet by outlet through hole 182
19 and with any devices (not shown) that be connecteds of outlet 19, and then to reach that collection presses the purpose of operation.Finally, then such as Fig. 7 E institutes
Show, shifted up when minisize fluid control device 1A resonance plate 12 resonates, and then make the first surface 11b of inlet plate 11 center
Gas in recess 111 can be flowed into first chamber 121 by the hollow bore 120 of resonance plate 12, then via piezo-activator
Space 135 between 13 support 132 and be transmitted continuously to downwards in gas collection plate 16, then because its gas pressure is to continue downwards
Increase, therefore gas still can be constantly via gas collection chamber 162, the second through hole 164, first outlet chamber 166, second outlet chamber
Room 184 and outlet through hole 182 and flow to outlet 19 and with any devices that be connecteds of outlet 19, this collection presses operation to be can be via outer
Pressure differential in the atmospheric pressure and device on boundary is not limited with driving.
When being more than the pressure in the external world with the devices that be connecteds of outlet 19 internal pressure (not shown), then micro pressure power
Device 1 be can be depressured as shown in Figure 8 or release operation, its be depressured or release make flowing mode mainly such as preceding institute
State, can make by the gas transport amount for regulating and controlling minisize fluid control device 1A in gas no longer input set gas chamber 162, now,
Gas will be inputted to second outlet chamber 184 from the outlet through hole 182 being connected with outlet 19 so that second outlet chamber 184
Volumetric expansion, and then promote the valve sheet 17 of pliability to be bent upwards deformation, and upwards it is smooth, be resisted against first outlet chamber
In 166 convex portion structure 167, and close the valve opening 170 of valve sheet 17, i.e., the gas in second outlet chamber 184 will not be inverse
It flow in first outlet chamber 166；And, the gas in second outlet chamber 184 is that the can be flow to via connection runner 185
In two release chambers 183, then by release through hole 181 to carry out release operation；So can by this micro valve structure 1B list
The gas in device that will be connected to gas transport operation with outlet 19 is discharged and is depressured, or is completely exhausted out and is completed release work
Industry.
The suspension board 130 that this case is used is for square kenel, when the length of side of suspension board 130 reduces, and suspension board 130
Area with when being also gradually reduced, it is found that on the one hand minification make it that the rigidity of suspension board 130 is lifted, and because interior
The gas flow volume in portion reduces, and is conducive to the promotion or compression of air, and output pressure value is lifted with enable；And on the other hand
Also the deformation of the horizontal direction produced when vertical vibration of suspension board 130 can be reduced, and then when making the running of piezo-activator 13
It is able to maintain that in same vertical direction and is difficult to tilt, piezo-activator 13 and resonance plate 12 or other groups can be reduced whereby
The interference and collision between element is filled, the generation of noise is reduced with enable, and then cause the fraction defective reduction of quality.To sum up, pressure is worked as
During the size reduction of the suspension board 130 of electric actuator 13, piezo-activator 13 can also be made smaller, whereby except can lift output gas
Outside the performance of pressure, noise can be also reduced, and the fraction defective of product can be reduced；And conversely, finding large-sized suspension board 130
Output pressure value is relatively low and fraction defective is higher.
Furthermore, suspension board 130 and piezoelectric ceramic plate 133 are the cores of the micro pressure power set 1, with both areas
Reduction, be able to the synchronous diminution of the areas of the micro pressure power set 1, mitigate its weight, make the micro pressure power
Device 1 can be installed on portable apparatus easily, without because volume is excessive and limited.Certainly, this case micro pressure
Power set 1 are the trend for reaching slimming, and the minisize fluid control device 1A gross thickness for assembling micro valve device 1B is situated between
In 2mm to 6mm height, and then minitype gas power set 1 is reached light comfortable portable purpose, and can widely answer
For in medical equipment and relevant device.
In summary, the micro pressure power set that this case is provided, mainly by minisize fluid control device and miniature
Being mutually assembled for valving, makes gas enter from the air admission hole on minisize fluid control device, and utilizes piezo-activator
Start, makes gas produce barometric gradient in the runner after design and pressure chamber, and then make gas flow at high rates and be transferred to
In micro valve device, then through the one-way cock design of micro valve device, make gas with one way flow, and then will can press
Power is accumulated on exporting in any device being connected；And when being intended to be depressured or during release, then regulate and control minisize fluid control device
Transmission quantity, and make gas can by be transmitted with exporting in the device that is connected to the second outlet chamber of micro valve device, and by
Connection runner by transmit to the second release chamber, then flowed out by release through hole, and then gas can be made promptly to transmit to reach,
And Jing Yin effect is can reach simultaneously, it the overall volume of minitype gas power set is reduced and is thinned, and then make micro-
Type aerodynamic device reaches light comfortable portable purpose, and can be widely used in medical equipment and relevant device
In.Therefore, file an application in accordance with the law the great industrial utilization of minitype gas power set of this case, whence.
Even if the present invention described in detail as above-described embodiment and can as be familiar with this those skilled in the art appoint apply craftsman's think of and be it is all as
Modification, so neither takes off as attached claim is intended to Protector.
【Symbol description】
1：Micro pressure power set
1A：Minisize fluid control device
1B：Micro valve device
1a：Housing
10：Base
11：Inlet plate
11a：The second surface of inlet plate
11b：The first surface of inlet plate
110：Air admission hole
111：Central recess
112：Conflux round
12：Resonance plate
12a：Movable part
12b：Fixed part
120：Hollow bore
121：First chamber
13：Piezo-activator
130：Suspension board
130a：The second surface of suspension board
130b：The first surface of suspension board
130c：Convex portion
130d：Central part
130e：Peripheral part
131：Housing
131a：The second surface of housing
131b：The first surface of housing
132：Support
132a：The second surface of support
132b：The first surface of support
133：Piezoelectric ceramic plate
134、151：Conductive connecting pin
135：Space
141、142：Insulating trip
15：Conducting strip
16：Gas collection plate
16a：Accommodation space
160：Surface
161：Reference surface
162：Gas collection chamber
163：First through hole
164：Second through hole
165：First release chamber
166：First outlet chamber
167、181a：Convex portion structure
168：Side wall
17：Valve sheet
170：Valve opening
171：Position hole
18：Exit plate
180：Reference surface
181：Release through hole
182：Outlet through hole
183：Second release chamber
184：Second outlet chamber
185：Connect runner
187：Second surface
188：Position limiting structure
19：Outlet
g0：Gap
(a)~(x)：The different of piezo-activator implement aspect
a0、i0、j0、m0、n0、o0、p0、q0、r0：Suspension board
a1、i1、m1、n1、o1、p1、q1、r1：Housing
a2、i2、m2、n2、o2、p2、q2、r2：Support, plate connecting portion
a3、m3、n3、o3、p3、q3、r3：Space
d：The vibration displacement of piezo-activator
s4、t4、u4、v4、w4、x4：Convex portion
m2’、n2’、o2’、q2’、r2’：Support is connected to the end of housing
m2”、n2”、o2”、q2”、r2”：Support is connected to the end of suspension board
Claims (19)
1. a kind of minisize fluid control device, it is adaptable to a micro pressure power set, including：
One inlet plate, confluxes with an at least air admission hole, at least one and round and constitutes a central recess for confluxing chamber, this is extremely
A few air admission hole is for importing gas, the corresponding air admission hole of the round that confluxes, and guides the gas of the air admission hole to converge into the center
The chamber that confluxes that recess is constituted；
One resonance plate, with a hollow bore, to should inlet plate the chamber that confluxes；And
One piezo-activator, has：
One suspension board, the suspension board has between 4mm to the length between 8mm, between 4mm to the width between 8mm and Jie
In 0.1mm to the thickness between 0.4mm；
One housing, with an at least support, is connected between the suspension board and the housing；And
One piezoelectric ceramic plate, is attached at a first surface of the suspension board, and the piezoelectric ceramic plate has the no more than suspension board
The length of side of the length of side, between 4mm to the length between 8mm, between 4mm to width between 8mm and between 0.05mm extremely
Thickness between 0.3mm, length and the width ratio of the piezoelectric ceramic plate is between 0.5 times to 2 times；
Wherein, the above-mentioned piezo-activator, the resonance plate and the inlet plate are sequentially folded to reply sets positioning, and the resonance plate
Between the piezo-activator there is a gap to form a first chamber, during so that the piezo-activator is driven, gas is by this
At least air admission hole of inlet plate is imported, and is collected to the central recess through at least one round that confluxes, is passed through the resonance plate
The hollow bore, with enter the first chamber in, then from the space between an at least support for the piezo-activator to
Lower transmission, with lasting pushing out gas.
2. minisize fluid control device as claimed in claim 1, it is characterised in that the operating frequency is that 28k, operating voltage are
± 15V, its maximum output air pressure reaches at least 300mmHg.
3. minisize fluid control device as claimed in claim 1, it is characterised in that the length of the piezoelectric ceramic plate be 6mm extremely
8mm, width are 6mm to 8mm and thickness is 0.10mm.
4. minisize fluid control device as claimed in claim 1, it is characterised in that the length of the suspension board be 6mm to 8mm,
Width is 6mm to 8mm and thickness is 0.27mm.
5. minisize fluid control device as claimed in claim 1, it is characterised in that the suspension board further includes a convex portion and is arranged on
On one second surface of the suspension board, its height is between 0.02mm between 0.08mm.
6. minisize fluid control device as claimed in claim 5, it is characterised in that the height of the convex portion is 0.03mm.
7. minisize fluid control device as claimed in claim 5, it is characterised in that the convex portion is a circular protrusions structure, directly
Footpath is 0.55 times of size of the minimum length of side of the suspension board.
8. minisize fluid control device as claimed in claim 1, it is characterised in that the inlet plate is by a stainless steel institute structure
Into thickness is between 0.4mm between 0.6mm.
9. minisize fluid control device as claimed in claim 8, it is characterised in that the thickness of the inlet plate is 0.5mm.
10. minisize fluid control device as claimed in claim 1, it is characterised in that the resonance plate is made up of a copper material,
Thickness is between 0.03mm between 0.08mm.
11. minisize fluid control device as claimed in claim 10, it is characterised in that the thickness of the resonance plate is 0.05mm.
12. minisize fluid control device as claimed in claim 1, it further includes an at least insulating trip and a conducting strip, and should
An at least insulating trip and the conducting strip are sequentially arranged under the piezo-activator.
13. minisize fluid control device as claimed in claim 1, it is characterised in that the housing of the piezo-activator is by one
Stainless steel is constituted, and thickness is between 0.2mm between 0.4mm.
14. minisize fluid control device as claimed in claim 13, it is characterised in that the thickness of the housing of the piezo-activator
Spend for 0.3mm.
15. minisize fluid control device as claimed in claim 1, it is characterised in that the two of the support of the piezo-activator
End points connects the housing, end point and connects the suspension board.
16. a kind of minisize fluid control device, it is adaptable to a micro pressure power set, including：
One inlet plate；
One resonance plate；And
One piezo-activator；
Wherein, the above-mentioned inlet plate, the resonance plate and the piezo-activator, which sequentially correspond to stack, sets positioning, and the resonance plate
Between the piezo-activator there is a gap to form a first chamber, when the piezo-activator is driven, gas is by the air inlet
Plate enters, and flows through the resonance plate, and gas is transmitted again to enter in the first chamber.
17. minisize fluid control device as claimed in claim 16, it is characterised in that the inlet plate has an at least air inlet
Hole, at least one are confluxed round and a central recess, and an at least air admission hole is for importing gas, round correspondence air inlet of confluxing
Hole, and guide the gas of the air admission hole to converge into the central recess；The resonance plate has a hollow bore, to should inlet plate
The central recess；And the piezo-activator has a suspension board and a housing, with least one between the suspension board and the housing
Support is connected, and attaches a piezoelectric ceramic plate in a first surface of the suspension board.
18. minisize fluid control device as claimed in claim 17, it is characterised in that the piezoelectric ceramic plate, which has to be not more than, to be somebody's turn to do
The length of side of the suspension board length of side, between 4mm to the length between 8mm, between 4mm to the width between 8mm and between
0.05mm is to the thickness between 0.3mm, and length and the width ratio of the piezoelectric ceramic plate is between 0.5 times to 2 times.
19. minisize fluid control device as claimed in claim 17, it is characterised in that the length of the suspension board be 4mm extremely
8mm, width are that 4mm to 8mm, thickness are 0.27mm.
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| CN108258932B (en) * | 2018-02-13 | 2019-09-10 | 哈尔滨工业大学 | A kind of multiple field rotating piezoelectric micro-displacement driver |
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| CN110441408B (en) * | 2018-05-04 | 2022-07-01 | 研能科技股份有限公司 | Gas chromatography apparatus |
| CN110441101B (en) * | 2018-05-04 | 2022-07-01 | 研能科技股份有限公司 | Separation system of gas chromatography equipment |
| CN109045415A (en) * | 2018-08-29 | 2018-12-21 | 广州大学 | A kind of micro-injection pump |
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| CN110043452A (en) * | 2019-04-26 | 2019-07-23 | 常州威图流体科技有限公司 | A kind of novel piezoelectric Micropump |
| TWI696758B (en) * | 2019-08-14 | 2020-06-21 | 研能科技股份有限公司 | Micro pump |
| TWI732422B (en) * | 2020-01-13 | 2021-07-01 | 研能科技股份有限公司 | Micro pump having gas-releasing silencer structure |
| CN113464409B (en) * | 2020-03-31 | 2023-07-04 | 研能科技股份有限公司 | Thin gas transmission device |
| CN113864167A (en) * | 2020-06-30 | 2021-12-31 | 研能科技股份有限公司 | Piezoelectric actuator |
| TWI775103B (en) | 2020-06-30 | 2022-08-21 | 研能科技股份有限公司 | Piezoelectric actuator |
| TWI827957B (en) * | 2021-07-23 | 2024-01-01 | 研能科技股份有限公司 | Gas transportation device |
| CN116293000B (en) * | 2023-05-19 | 2023-07-21 | 常州威图流体科技有限公司 | Fluid conveying device and liquid cooling heat radiation module |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203488347U (en) * | 2013-09-25 | 2014-03-19 | 研能科技股份有限公司 | Micro air pressure power device |
| CN104234986A (en) * | 2013-06-24 | 2014-12-24 | 研能科技股份有限公司 | Miniature pneumatic power device |
| TW201500151A (en) * | 2013-06-24 | 2015-01-01 | Microjet Technology Co Ltd | Micro-gas pressure driving apparatus |
| US20150071797A1 (en) * | 2012-06-11 | 2015-03-12 | Murata Manufacturing Co., Ltd. | Blower |
| CN206129568U (en) * | 2016-01-29 | 2017-04-26 | 研能科技股份有限公司 | Miniature fluid controlling means |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6589198B1 (en) * | 1998-01-29 | 2003-07-08 | David Soltanpour | Implantable micro-pump assembly |
| JPH11236880A (en) * | 1998-02-23 | 1999-08-31 | Ngk Spark Plug Co Ltd | Piezoelectric pump |
| JP2995401B2 (en) * | 1998-03-16 | 1999-12-27 | セイコーインスツルメンツ株式会社 | Micropump and method of manufacturing micropump |
| US6247908B1 (en) * | 1998-03-05 | 2001-06-19 | Seiko Instruments Inc. | Micropump |
| FR2828245B1 (en) * | 2001-04-27 | 2005-11-11 | Poudres & Explosifs Ste Nale | PYROTECHNIC MICROSYSTEMS FOR MICROSYSTEMS |
| US6715733B2 (en) * | 2001-08-08 | 2004-04-06 | Agilent Technologies, Inc. | High temperature micro-machined valve |
| JP2003214349A (en) * | 2002-01-24 | 2003-07-30 | Matsushita Electric Ind Co Ltd | Micro-pump and manufacturing method thereof |
| GB0208687D0 (en) * | 2002-04-16 | 2002-05-29 | Davis John B | Elastomer-glass fluid control elements |
| CN1179127C (en) * | 2002-09-03 | 2004-12-08 | 吉林大学 | Multiple-cavity piezoelectric film driven pump |
| CN1232728C (en) * | 2003-04-11 | 2005-12-21 | 华中科技大学 | Valve less thin film driving micro pump |
| JP4848319B2 (en) * | 2007-02-16 | 2011-12-28 | アルプス電気株式会社 | Piezoelectric pump |
| JP2011241808A (en) * | 2010-05-21 | 2011-12-01 | Murata Mfg Co Ltd | Fluid device |
| CN102444566B (en) * | 2010-10-12 | 2014-07-16 | 研能科技股份有限公司 | Fluid conveying device |
| KR101275361B1 (en) * | 2011-05-26 | 2013-06-17 | 삼성전기주식회사 | Cooling Device Using a Piezoelectric Actuator |
| TWM467740U (en) * | 2013-06-24 | 2013-12-11 | Microjet Technology Co Ltd | Micro-gas pressure driving apparatus |
| CN203476838U (en) * | 2013-06-24 | 2014-03-12 | 研能科技股份有限公司 | Miniature gas transmission device |
| CN104235081B (en) * | 2013-06-24 | 2016-08-03 | 研能科技股份有限公司 | Minitype gas transmitting device |
| CN203925952U (en) * | 2013-11-12 | 2014-11-05 | 苏州大学 | Closed-loop piezoelectric film pump |
| CN203742959U (en) * | 2014-03-14 | 2014-07-30 | 厦门爱家康科技有限公司 | Diaphragm piece structure of air pump |
| CN204627944U (en) * | 2015-04-07 | 2015-09-09 | 厦门科际精密器材有限公司 | Micro air pump |
-
2016
- 2016-09-05 CN CN201610801357.9A patent/CN107023459B/en active Active
- 2016-09-05 CN CN201610801372.3A patent/CN107023461A/en active Pending
- 2016-09-05 CN CN201610802424.9A patent/CN107023469A/en active Pending
- 2016-09-05 CN CN201610801390.1A patent/CN107023462A/en active Pending
- 2016-09-05 CN CN201610801700.XA patent/CN107023466A/en active Pending
- 2016-09-05 CN CN201621037091.7U patent/CN208456827U/en active Active
- 2016-09-05 CN CN201621037092.1U patent/CN208456828U/en active Active
- 2016-09-05 CN CN201610801967.9A patent/CN107023457A/en active Pending
- 2016-09-05 CN CN201610801746.1A patent/CN107023467A/en active Pending
- 2016-09-05 CN CN201621037318.8U patent/CN206129568U/en active Active
- 2016-09-05 CN CN201610801368.7A patent/CN107023460A/en active Pending
- 2016-09-05 CN CN201621037375.6U patent/CN208456829U/en active Active
- 2016-09-05 CN CN201621037604.4U patent/CN208456830U/en active Active
- 2016-09-05 CN CN201610801486.8A patent/CN107023456A/en active Pending
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150071797A1 (en) * | 2012-06-11 | 2015-03-12 | Murata Manufacturing Co., Ltd. | Blower |
| CN104234986A (en) * | 2013-06-24 | 2014-12-24 | 研能科技股份有限公司 | Miniature pneumatic power device |
| TW201500151A (en) * | 2013-06-24 | 2015-01-01 | Microjet Technology Co Ltd | Micro-gas pressure driving apparatus |
| CN203488347U (en) * | 2013-09-25 | 2014-03-19 | 研能科技股份有限公司 | Micro air pressure power device |
| CN206129568U (en) * | 2016-01-29 | 2017-04-26 | 研能科技股份有限公司 | Miniature fluid controlling means |
Cited By (22)
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| CN109424535A (en) * | 2017-08-21 | 2019-03-05 | 研能科技股份有限公司 | The energy-saving control method of resonant piezo gas pump |
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| CN110131140B (en) * | 2018-02-09 | 2021-03-02 | 研能科技股份有限公司 | Micro fluid control device |
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| CN110411924A (en) * | 2018-04-27 | 2019-11-05 | 研能科技股份有限公司 | Particulate matter monitoring module |
| CN110609116A (en) * | 2018-06-15 | 2019-12-24 | 研能科技股份有限公司 | Gas detection device |
| CN111151310A (en) * | 2018-11-07 | 2020-05-15 | 研能科技股份有限公司 | Micro-channel structure |
| CN111151310B (en) * | 2018-11-07 | 2021-12-03 | 研能科技股份有限公司 | Micro-channel structure |
| US11478794B2 (en) | 2018-11-07 | 2022-10-25 | Micro Jet Technology Co., Ltd. | Micro channel structure |
| CN113107817A (en) * | 2020-01-13 | 2021-07-13 | 研能科技股份有限公司 | Micropump with noise-reducing and air-releasing structure |
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| CN113252517A (en) * | 2020-02-07 | 2021-08-13 | 研能科技股份有限公司 | Mobile gas detecting and cleaning device |
| CN113339244A (en) * | 2020-02-18 | 2021-09-03 | 研能科技股份有限公司 | Thin gas transmission device |
| US11668294B2 (en) | 2020-02-18 | 2023-06-06 | Microjet Technology Co., Ltd. | Thin gas transportation device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107023469A (en) | 2017-08-08 |
| CN107023463A (en) | 2017-08-08 |
| CN107023460A (en) | 2017-08-08 |
| CN107023468A (en) | 2017-08-08 |
| CN208456829U (en) | 2019-02-01 |
| CN212672033U (en) | 2021-03-09 |
| CN208456830U (en) | 2019-02-01 |
| CN107023459B (en) | 2023-07-18 |
| CN208456828U (en) | 2019-02-01 |
| CN107023464A (en) | 2017-08-08 |
| CN107023467A (en) | 2017-08-08 |
| CN107023462A (en) | 2017-08-08 |
| CN107023461A (en) | 2017-08-08 |
| CN107023459A (en) | 2017-08-08 |
| CN206129568U (en) | 2017-04-26 |
| CN208474081U (en) | 2019-02-05 |
| CN107023465A (en) | 2017-08-08 |
| CN107023466A (en) | 2017-08-08 |
| CN208456827U (en) | 2019-02-01 |
| CN107023457A (en) | 2017-08-08 |
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