CN203476838U - Miniature gas transmission device - Google Patents

Miniature gas transmission device Download PDF

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Publication number
CN203476838U
CN203476838U CN201320364052.8U CN201320364052U CN203476838U CN 203476838 U CN203476838 U CN 203476838U CN 201320364052 U CN201320364052 U CN 201320364052U CN 203476838 U CN203476838 U CN 203476838U
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CN
China
Prior art keywords
plate
piezoelectric actuator
gas
inlet
suspension board
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CN201320364052.8U
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Chinese (zh)
Inventor
薛达伟
张英伦
吴祥涤
余荣侯
陈世昌
周宗柏
李耀吉
廖家淯
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Microjet Technology Co Ltd
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Microjet Technology Co Ltd
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Abstract

The utility model discloses a miniature gas transmission device, comprising a gas inlet plate, a runner plate, a resonance sheet and a piezoelectric actuator, wherein at least one gas inlet is formed in the gas inlet plate; at least one busbar hole and a central hole are formed in the runner plate; a hollow hole is formed in the resonance sheet; the piezoelectric actuator is provided with a suspension plate, an outer frame and at least one support connected between the suspension plate and the outer frame; a piezoelectric ceramic plate is attached onto one surface of the suspension plate; a first cavity formed by a gap is reserved between the resonance sheet and the piezoelectric actuator; when the piezoelectric actuator is driven, gas enters from the gas inlet of the gas inlet plate, is collected to the central hole through the busbar hole of the runner plate, enters the first cavity by passing by the hollow hole of the resonance sheet, and is downwards transmitted by a gap between the supports of the piezoelectric actuator, so that a pressure gradient runner is formed to continually push the gas.

Description

Minitype gas transmitting set
Technical field
The utility model is about a kind of charge delivery mechanism, espespecially a kind of micro ultrathin and quiet minitype gas transmitting set.
Background technique
In each field, no matter be the industry such as medicine, computer technology, printing, the energy at present, product is all towards sophistication and microminiaturization future development, the fluid delivery structure that wherein product such as micropump, sprayer, ink gun, Industrial Printing device comprises is its key technology, therefore, how mat innovation structure is broken through its technical bottleneck, is the important content of development.
For instance, in medicinal industry, much instrument or the equipment that need to adopt Pneumatic pressure power to drive, conventionally adopts with conventional motor and air pressure valve and reaches the object that its gas is carried.Yet, be limited to the volume restrictions of these conventional motor and gas valve, make this type of instrument and equipment be difficult to dwindle the volume of its single unit system, be difficult to realize the target of slimming, more cannot make it to reach portable object.In addition, these conventional motor and gas valve also can produce the problem of noise when start, cause not convenient and uncomfortable on using.
Therefore, how to develop a kind of above-mentioned known technology disappearance of improving, can make tradition adopt the instrument of charge delivery mechanism or equipment to reach volume little, microminiaturized and quiet, and then reach the minitype gas transmitting set of light comfortable Portable object, real be current problem in the urgent need to address.
Model utility content
The purpose of this utility model is to provide a kind of minitype gas transmitting set being applicable in Portable or wearing type instrument or equipment, the gas pulsation producing via the start of piezoelectric board high frequency, in runner after design, produce pressure gradient, and make gas flow at high speed, and by runner, pass in and out the resistance difference of direction, gas is transferred to exhaust end by suction side, with solve the volume that instrument or equipment were possessed of employing charge delivery mechanism of known technology large, be difficult to slimming, cannot reach portable object, and the disappearance such as noise is large.
For reaching above-mentioned purpose, of the present utility model one compared with broad sense enforcement aspect for a kind of minitype gas transmitting set is provided, be applicable to micro pressure power plant, at least comprise: inlet plate, has at least one inlet hole, for importing gas; Runner plate, has at least one round and center hole of confluxing, the inlet hole of the corresponding inlet plate of round that confluxes, and the gas of guiding inlet hole confluxes to center hole; Resonance plate, has hollow bore, the center hole of corresponding runner plate; And piezoelectric actuator, there is suspension board and housing, between suspension board and housing, with at least one support, connect, and attach piezoelectric ceramic plate in the surface of suspension board; Wherein, above-mentioned inlet plate, runner plate, resonance plate and piezoelectric actuator sequentially correspondence stack location are set, and between resonance plate and piezoelectric actuator, there is one first chamber that a gap forms, so that piezoelectric actuator is when driven, gas is imported by least one inlet hole of inlet plate, at least one round that confluxes through runner plate is collected to center hole, flow through the again hollow bore of resonance plate, to enter in the first chamber, by the space between at least one support of piezoelectric actuator, transmitted downwards again, with mineralization pressure gradient runner, continue pushing out gas.
For reaching above-mentioned purpose, of the present utility model another compared with broad sense enforcement aspect for a kind of minitype gas transmitting set is provided, be applicable to micro pressure power plant, at least comprise: inlet plate, has at least one inlet hole, for importing gas; Runner plate, has at least one round and center hole of confluxing, the inlet hole of the corresponding inlet plate of round that confluxes, and the gas of guiding inlet hole confluxes to center hole; Resonance plate, has hollow bore, the center hole of corresponding runner plate; And piezoelectric actuator, there is suspension board and housing, between suspension board and housing, with at least one support, connect, and attach piezoelectric ceramic plate in the surface of suspension board; Wherein, above-mentioned inlet plate, runner plate, resonance plate and piezoelectric actuator sequentially correspondence stack location are set, so that piezoelectric actuator is when driven, gas is entered by least one inlet hole of inlet plate, and be collected to center hole by least one round that confluxes of runner plate, flow through the hollow bore of resonance plate to enter between resonance plate and piezoelectric actuator again, then transmitted downwards by the space between at least one support of piezoelectric actuator, with mineralization pressure gradient runner, continue pushing out gas.
Accompanying drawing explanation
Fig. 1 is the front decomposition texture schematic diagram of the micro pressure power plant of the utility model the first preferred embodiment.
Fig. 2 A is that the utility model is the front decomposition texture schematic diagram of the micro pressure power plant of the second preferred embodiment.
Fig. 2 B is that the utility model is the back side decomposition texture schematic diagram of the micro pressure power plant of the second preferred embodiment.
Fig. 3 A is the Facad structure schematic diagram of the piezoelectric actuator of the micro pressure power plant shown in Fig. 2 A.
Fig. 3 B is the structure schematic diagram of the piezoelectric actuator of the micro pressure power plant shown in Fig. 2 A.
Fig. 3 C is the cross-sectional view of the piezoelectric actuator of the micro pressure power plant shown in Fig. 2 A.
Fig. 4 is the multiple enforcement aspect schematic diagram of the piezoelectric actuator shown in Fig. 3 A.
Fig. 5 A to Fig. 5 E is the illustrative view of the minitype gas transmitting set of the micro pressure power plant shown in Fig. 2 A.
Fig. 6 A is that the collection of the micro valve device of the micro pressure power plant shown in Fig. 2 A is pressed illustrative view.
Fig. 6 B is the release illustrative view of the micro valve device of the micro pressure power plant shown in Fig. 2 A.
Fig. 7 A to Fig. 7 E is that the collection of the micro pressure power plant shown in Fig. 2 A is pressed illustrative view.
Fig. 8 is step-down or the release illustrative view of the micro pressure power plant shown in Fig. 2 A.
[primary component symbol description]
1,2: micro pressure device
1A, 2A: minitype gas transmitting set
1B, 2B: micro valve device
10,20: inlet plate
100,200: inlet hole
11,22: resonance plate
12,23: piezoelectric actuator
120,230: suspension board
121,233: piezoelectric ceramic plate
13,24: insulating trip
14,25: conducting plate
15,26: gas collection plate
16,27: valve sheet
17,28: exit plate
170,285: be communicated with runner
21: runner plate
211: round confluxes
210: center hole
220: hollow bore
221,234,251: conductive connecting pin
222: the first chambers
230a: the upper surface of suspension board
230b: the lower surface of suspension board
230c: protuberance
231: housing
231a: the upper surface of housing
231b: the lower surface of housing
232: support
232a: the upper surface of support
232b: the lower surface of support
235: space
260: the first surface of gas collection plate
261: the second surface of gas collection plate
262: gas collection chamber
263: the first penetration holes
264: the second penetration holes
265: the first release chambers
266: the first outlet chamber
267,286: groove structure
268,287: seal ring
269,281a: protuberance structure
270: valve opening
271: location hole
280: the first surface of exit plate
281: the three penetration holes
282: the four penetration holes
283: the second release chambers
284: the second outlet chamber
288: pressure relief vent
289: the second surface of exit plate
29: outlet
G0: gap
(a)~and (l): the difference enforcement aspect of conduction actuator
A0, i0, j0: suspension board
A1, i1, j1: housing
A2, i2: support
A3: space
Embodiment
Some exemplary embodiments that embody the utility model feature & benefits will describe in detail in the explanation of back segment.Be understood that the utility model has various variations on can be aspect different, its neither disengaging protection domain of the present utility model, and explanation wherein and the accompanying drawing use that ought explain in itself, but not in order to limit the utility model.
Micro pressure power plant 1 of the present utility model can be applicable to the industry such as the raw skill of medicine, the energy, computer technology or printing, in order to transmit gas, but not as limit.Refer to Fig. 1, it is the front decomposition texture schematic diagram of the micro pressure power plant of the utility model the first preferred embodiment.As shown in the figure, micro pressure power plant 1 of the present utility model are combined by minitype gas transmitting set 1A and micro valve device 1B, wherein minitype gas transmitting set 1A at least has inlet plate 10, resonance plate 11, piezoelectric actuator 12, insulating trip 13, the structures such as conducting plate 14, it arranges piezoelectric actuator 12 corresponding to resonance plate 11, and make inlet plate 10, resonance plate 11, piezoelectric actuator 12, insulating trip 13, conducting plate 14 grades sequentially stack location are set, this insulating trip 13 and this conducting plate 14 are sequentially arranged under this piezoelectric actuator 12, and this piezoelectric actuator 12 is assembled by a suspension board 120 and a piezoelectric ceramic plate 121, and micro valve device 1B sequentially stacks and assembled by gas collection plate 15, valve sheet 16 and exit plate 17 etc., but not as limit.Through the assembling setting of minitype gas transmitting set 1A and micro valve device 1B thus, so that at least one inlet hole 100 air inlets of gas on the inlet plate 10 of minitype gas transmitting set 1A, and by the start of piezoelectric actuator 12, and a plurality of pressure chamber (not shown) that flow through, and transmission downwards, and then can make gas one-way flow in micro valve device 1B, and in the device (not shown) that acute build up of pressure is connected in the outlet end with micro valve device 1B, and in the time need carrying out pressure release, regulate and control the output quantity of minitype gas transmitting set 1A, gas is discharged via the connection runner 170 in the exit plate 17 of micro valve device 1B, to carry out pressure release.
Please refer to Fig. 2 A and Fig. 2 B, it is respectively front decomposition texture schematic diagram and the back side decomposition texture schematic diagram of the micro pressure power plant of the utility model the second preferred embodiment.As shown in the figure, micro pressure power plant 2 are combined by minitype gas transmitting set 2A and micro valve device 2B equally, wherein minitype gas transmitting set 2A is sequentially stacked and is assembled by structures such as inlet plate 20, runner plate 21, resonance plate 22, piezoelectric actuator 23, insulating trip 24, conducting plates 25, in the present embodiment, between resonance plate 22 and piezoelectric actuator 23, there is a gap g0 (as shown in Figure 5A), yet in other embodiments, between resonance plate 22 and piezoelectric actuator 23, also can not there is gap, therefore its enforcement aspect is not as limit.In some embodiments, inlet plate 20 also can be integrated structure with runner plate 21, as shown in the first preferred embodiment of the present utility model, but not as limit, below with the inlet plate 20 of the present embodiment, illustrate in detail with the enforcement aspect of runner plate 21 separated settings.And micro valve device 2B is sequentially stacked and is assembled by gas collection plate 26, valve sheet 27 and exit plate 28 etc. equally, but not as limit.
In the present embodiment, the inlet plate 20 of minitype gas transmitting set 2A has at least one inlet hole 200, in order to supplied gas from the outer effect of complying with atmospheric pressure of device and certainly in these at least one inlet hole 200 inflow minitype gas transmitting set 2A.On runner plate 21, there is at least one round 211 that confluxes, in order to the corresponding setting of this at least one inlet hole 200 with inlet plate 20, and the gas that this at least one inlet hole 200 enters certainly can be guided and confluxes and be concentrated to a center hole 210, with going down.Resonance plate 22 is consisted of a flexible materials, but not as limit, and on resonance plate 22, there is a hollow bore 220, corresponding to the center hole 210 of runner plate 21, arrange, so that gas can circulate downwards.
Please refer to Fig. 3 A, Fig. 3 B and Fig. 3 C, it is respectively the Facad structure schematic diagram of the piezoelectric actuator of the micro pressure power plant shown in Fig. 2 A, structure schematic diagram and cross-sectional view, as shown in the figure, piezoelectric actuator 23 is by a suspension board 230, one housing 231, at least one support 232 and a piezoelectric ceramic plate 233 assemble jointly, wherein, this piezoelectric ceramic plate 233 is attached at the lower surface 230b of suspension board 230, and this at least one support 232 is connected between suspension board 230 and housing 231, and in support 232, between suspension board 230 and housing 231, also there is at least one space 235, in order to supplied gas, circulate, and this suspension board 230, the kenel of housing 231 and support 232 and quantity have multiple variation.In addition, housing 231 also has a conductive connecting pin being outwards convexly equipped with 234, in order to for electrical connection, but not as limit.
In the present embodiment, one upper surface of suspension board 230 is the structure of a ladder surface, meaning also has a protuberance 230c in the upper surface 230a of suspension board 230, visible please refer to Fig. 3 A and Fig. 3 C, the protuberance 230c of suspension board 230 is the upper surface 231a coplanars with housing 231, and the upper surface 230a of suspension board 230 and the upper surface 232a of support 232 are also coplanar, and there is a certain depth between the protuberance 230c of this suspension board 230 and the upper surface 230a of the upper surface 231a of housing 231 and suspension board 230 and the upper surface 232 of support 232.Lower surface 230b as for suspension board 230, as shown in Fig. 3 B and Fig. 3 C, itself and the lower surface 231b of housing 231 and the lower surface 232b of support 232 are smooth coplanar structure, and piezoelectric ceramic plate 233 is attached at the lower surface 230b place of this smooth suspension board 230.In some embodiments, suspension board 230, support 232 and housing 231 can be consisted of a sheet metal, but not as limit, therefore piezoelectric actuator 23 is binded and forms with sheet metal by piezoelectric ceramic plate 233.
Please continue and consult Fig. 4, it is the multiple enforcement aspect schematic diagram of the piezoelectric actuator shown in Fig. 3 A.As shown in the figure, suspension board 230, housing 231 and the support 232 of visible piezoelectric actuator 23 can have various kenel, and at least can there is the multiple aspects such as (a) shown in Fig. 4~(l), for instance, (a) the housing a1 of aspect and suspension board a0 are square structure, and between the two by a plurality of support a2 to link it, for example: 8, but not as limit, and there is space a3 between support a2 and suspension board a0, housing a1, for gas communication.In another (i) aspect, its housing i1 and suspension board i0 are also similarly square structure, but wherein only by 2 support i2 to link it; In addition, in (j)~(l) aspect, its suspension board j0 etc. can be circular structure, and housing j0 etc. also can be the slightly frame structure of tool radian, but all not as limit.Therefore multiple enforcement aspect is visible thus, the kenel of suspension board 230 can be square or circular, and similarly, and the piezoelectric ceramic plate 233 that is attached at the lower surface 230b of suspension board 230 also can be square or circular, not as limit; And, be connected in the kenel of the support 232 between suspension board 230 and housing 231 and quantity and also can apply situation and appoint and execute variation according to actual, with the aspect shown in the utility model, be not limited.And these suspension boards 230, housing 231 and support 232 can be integrated structure, but not as limit, as for its manufacture, can be processed or the mode such as gold-tinted etching or laser beam machining or eletroforming or electric discharge processing is made by tradition, all not as limit.
In addition, please continue and consult Fig. 2 A and Fig. 2 B, in minitype gas transmitting set 2A, also have insulating trip 24 and conducting plate 25, insulating trip 24 and conducting plate 25 correspondences are arranged under piezoelectric actuator 23, and its form is haply corresponding to the form of the housing of piezoelectric actuator 23.In some embodiments, insulating trip 24 is consisted of the material that can insulate, for example: and plastic cement, but not as limit, with the use insulating; In other embodiments, conducting plate 25 is consisted of conductive material, for example: and metal, but not as limit, with the use conducting.And, in the present embodiment, on resonance plate 22, can there is a conductive connecting pin 221, but not as limit, and on the housing 231 of conduction actuator 23, also there is the conductive connecting pin 224 with the conductive connecting pin 221 corresponding settings of resonance plate 22, also not as limit, in addition, one conductive connecting pin 251 also can be set on conducting plate 25, with the use conducting.
Please refer to Fig. 2 A and Fig. 5 A to Fig. 5 E, wherein Fig. 5 A to Fig. 5 E is the illustrative view of the minitype gas transmitting set of the micro pressure power plant shown in Fig. 2 A.First, as shown in Figure 5A, visible minitype gas transmitting set 2A is sequentially by inlet plate 20, runner plate 21, resonance plate 22, piezoelectric actuator 23, insulating trip 24, conducting plate 25 grades stack and form, and between resonance plate 22 and piezoelectric actuator 23, there is a gap g0, in the present embodiment, in gap g0 between the housing 231 of resonance plate 22 and piezoelectric actuator 23, fill a material, for example: conducting resinl, but not as limit, so that can maintain the degree of depth of this gap g0 between the protuberance 230c of the suspension board 230 of resonance plate 22 and piezoelectric actuator 23, and then can more promptly flow by air-guiding, and because protuberance 230c and the resonance plate 22 of suspension board 230 keeps suitably interfering and reducing apart from making to contact with each other, impel noise producing to be lowered, in other embodiments, also can be via the height of the housing 231 of the electric actuator 23 that adds high pressure, so that increase by a gap during 22 assembling of itself and resonance plate, but not as limit, in addition, in other embodiments, between this resonance plate 22 and piezoelectric actuator 23, also can not there is gap g0, its enforcement aspect is not as limit.
Please continue and consult Fig. 5 A to Fig. 5 E, as shown in the figure, when inlet plate 20, runner plate 21, resonance plate 22 is with after sequentially corresponding assembling of piezoelectric actuator 23, the common chamber that confluxes gas that forms of the inlet plate 20 on center hole 210 places of runner plate 21 can be with it and resonance plate 22, and between resonance plate 22 and piezoelectric actuator 23, also form one first chamber 222, in order to temporary gas, and the first chamber 222 is connected with the chamber at center hole 210 places of runner plate 21 by the hollow bore 220 of resonance plate 22, and the both sides of the first chamber 222 are connected with the micro valve device 2B being arranged under it by the space 235 between the support 232 of piezoelectric actuator 23.
When the minitype gas transmitting set 2A of micro pressure power plant 2 start, mainly by piezoelectric actuator 23, be subject to voltage actuation and take support 232 as fulcrum, carry out the reciprocating vibration of Vertical direction.As shown in Figure 5 B, when piezoelectric actuator 23 is subject to voltage actuation and vibrates downwards, gas is entered by least one inlet hole 200 on inlet plate 20, and via at least one round 211 that confluxes on runner plate 21 to be pooled to central center hole 210 places, again via flowing into downwards in the first chamber 222 with the central hole 220 of the corresponding setting of center hole 210 on resonance plate 22, thereafter, owing to being subject to the drive of piezoelectric actuator 23 vibrations, resonance plate 22 also can carry out thereupon resonating vertical reciprocating vibration, as shown in Figure 5 C, it is also vibration downwards thereupon of resonance plate 22, and attach on the protuberance 230c of the suspension board 230 that contacts at piezoelectric actuator 23, through the deformation of resonance plate 22 thus, to compress the volume of the first chamber 222, and close the first chamber 222 middle flow spaces, impel the gas in it to push to two side flow, and then pass through mobile downwards through the space 235 between the support 232 of piezoelectric actuator 23.As for Fig. 5 D, for its resonance plate 22, return back to initial position, and piezoelectric actuator 23 is driven with upwards vibration by voltage, the so same volume that pushes the first chamber 222, only now due to piezoelectric actuator 23 upwards liftings, thereby make the gas in the first chamber 222 can be towards two side flow, and then drive gas constantly at least one inlet hole 200 on inlet plate 20 enter, flow into again in the formed chamber of center hole 210 on runner plate 21, for another example shown in Fig. 5 E, this resonance plate 22 be subject to piezoelectric actuator 23 upwards lifting vibration and resonate upwards, and then the gas in the center hole 210 of runner plate 21 is flowed in the first chamber 222 again by the central hole 220 of resonance plate 22, and via the space 235 between the support 232 of piezoelectric actuator 23, pass through downwards and flow out minitype gas transmitting set 2A.Enforcement aspect is thus visible, when resonance plate 22 carries out vertical reciprocating vibration, can be by the gap g0 between itself and piezoelectric actuator 23 to increase the ultimate range of its vertical displacement, in other words, in arranging between this two structure when gap g0 can make resonance plate 22 in resonance, can produce upper and lower displacement by a larger margin, thereby can promote gas to flow faster, and can reach quiet effect.So, in the runner design through this minitype gas transmitting set 2A, produce pressure gradient, make gas flow at high speed, and by runner, pass in and out the resistance difference of direction, gas is transferred to exhaust end by suction side, and at exhaust end, have under the state of air pressure, still have the ability to continue pushing out gas.
In addition, in some embodiments, the vertical reciprocating type vibration frequency of resonance plate 22 can be identical with the vibration frequency of piezoelectric actuator 23, and both can make progress simultaneously or be simultaneously downward, it can apply situation and appoint and to execute variation according to actual, not with being limited as flowing mode shown in the present embodiment.
Please refer to Fig. 2 A, Fig. 2 B and Fig. 6 A, Fig. 6 B, wherein Fig. 6 A is the collection pressure illustrative view of the micro valve device of the micro pressure power plant shown in Fig. 2 A, and Fig. 6 B is the release illustrative view of the micro valve device of the micro pressure power plant shown in Fig. 2 A.As shown in Figure 6A, the micro valve device 2B of micro pressure power plant 2 of the present utility model is sequentially by gas collection plate 26, valve sheet 27 and exit plate 28 stack and form, in the present embodiment, on the first surface 260 of gas collection plate 26, depression is to form a gas collection chamber 262, the gas being transmitted downwards by minitype gas transmitting set 2A is temporarily accumulated in this gas collection chamber 262, and in gas collection plate 26, there is the first penetration hole 263 and the second penetration hole 264, one end of the first penetration hole 263 and the second penetration hole 264 is connected with gas collection chamber 262, the other end is connected with the first release chamber 265 and the first outlet chamber 266 on the second surface 261 of gas collection plate 26 respectively.And, at the first outlet chamber 266 places, further set up a protuberance structure 269, for example can be but be not limited to a round column structure, and itself and the corresponding setting of valve opening 270 of valve sheet 27; In addition, on gas collection plate 26, also there are several groove structures 267 that are surrounded on gas collection chamber 262, the first release chamber 265 and the first outlet chamber 266 and arrange, use for a seal ring 268 and arrange thereon.
Exit plate 28 also has two the 3rd penetration hole 281 and the 4th penetration holes 282 that run through setting, and the 3rd penetration hole 281 and the 4th penetration hole 282 correspond respectively to the first penetration hole 263 of gas collection plate 26 and the second penetration hole 264 and arrange, and corresponding to the 3rd penetration hole 281 places, be recessed to form one second release chamber 283 on the first surface 280 of exit plate 28, corresponding to the 4th penetration hole 282 places, be recessed to form one second outlet chamber 284, and be communicated with runner 285 in also having one between the second release chamber 283 and the second outlet chamber 284, in order to supplied gas, circulate.One end of the 3rd penetration hole 281 is connected with the second release chamber 283, and a protrusion can further be set up and the protuberance structure 281a that forms in its end, for example can be but be not limited to round column structure, the other end is communicated in the pressure relief vent 288 of the second surface 289 of exit plate 28; And one end of the 4th penetration hole 282 is connected with the second outlet chamber 284, the other end 29 is connected with outlet, in the present embodiment, export 29 can with a device (not shown), for example: press machine, but not as limit, be connected.Similarly, in exit plate 28, also there are several groove structures 286 that are surrounded on the second release chamber 283 and the second outlet chamber 284 and arrange, use for a seal ring 287 and arrange thereon, in some embodiments, the material of seal ring 268,287 is can the good rubber material of endurance, but not as limit, it is mainly arranged in groove structure 267,286 in order to correspondence, to assist between gas collection plate 26, exit plate 28 and valve sheet 27, engage more closely, and prevent gas leak.
On valve sheet 27, there is a valve opening 270 and several location hole 271, when valve sheet 27 is assembled with gas collection plate 26 and exit plate 28 location, by the corresponding setting corresponding to the protuberance structure 269 of the first outlet chamber 266 of gas collection plate 26 of its valve opening 270, through the design of single thus valve opening 270, so that gas can reach in response to its pressure reduction the object of one-way flow.
When micro valve device 2B collection is pressed start, mainly as shown in Figure 6A, it can be in response to coming from the minitype gas transmitting set 2A pressure that the gas of transmission provides downwards, again or be greater than when exporting the internal pressure of 29 devices that are connected (not shown) when extraneous atmospheric pressure, gas can transfer in the gas collection chamber 262 of micro valve device 2B from minitype gas transmitting set 2A, again respectively through the first penetration hole 263 and the second penetration hole 264 and flow into downwards in the first release chamber 265 and the first outlet chamber 266, now, downward gas pressure makes flexual valve sheet 27 be bent downwardly deformation, and then the volume of the first release chamber 265 is increased, and smooth and be resisted against the end of the 3rd penetration hole 281 downwards corresponding to the first penetration hole 263 places, and then can seal the 3rd penetration hole 281 of exit plate 28, therefore the gas in the second release chamber 283 can not flow out from the 3rd penetration hole 281 places.Certainly, the present embodiment, the protuberance structure 281a that can utilize the 3rd penetration hole 281 ends to set up, conflicts and seals the 3rd penetration hole 281 fast to strengthen valve sheet 27, and reach the complete hermetic effect of a prestressing conflict effect.On the other hand, because gas is to flow into downwards in the first outlet chamber 266 from the second penetration hole 264, and the valve sheet 27 corresponding to the first outlet chamber 266 places is also bent downwardly deformation, therefore making its corresponding valve opening 270 opens downwards, gas can flow in the second outlet chamber 284 via valve opening 270 from the first outlet chamber 266, and by the 4th penetration hole 282, flow to outlet 29 and with outlet 29 devices that are connected (not shown) in, by this with this device collect pressure start.
Please continue and consult Fig. 6 B, when micro valve device 2B carries out release, it can be via the gas transport amount of regulation and control minitype gas transmitting set 2A, make gas no longer in input set gas chamber 262, or when being greater than extraneous atmospheric pressure with outlet 29 device being connected (not shown) internal pressures, can make micro valve device 2B carry out release.Now, gas will input in the second outlet chamber 284 with outlet 29 the 4th penetration holes 282 that are connected certainly, make the volumetric expansion of the second outlet chamber 284, and then impel flexual valve sheet 27 to be bent upwards deformation, and upwards smooth, be resisted against on gas collection plate 26, therefore the valve opening 270 of valve sheet 27 can be closed because being resisted against gas collection plate 26.Certainly, at the present embodiment, can utilize the first outlet chamber 266 to set up protuberance structure 269, allowing flexual valve sheet 27 be bent upwards deformation conflicts more fast, make that valve opening 270 is more favourable reaches the closed condition that a prestressing conflict effect attaches sealing completely, therefore the valve opening 270 of valve sheet 27 can be closed because being resisted against this protuberance structure 269, the gas in this second outlet chamber 284 will be not can adverse current to the first outlet chamber 266 in.And, gas in the second outlet chamber 284 can flow in the second release chamber 283 via being communicated with runner 285, and then make the volume expanded of the second release chamber 283, and make to be bent upwards equally deformation corresponding to the valve sheet 27 of the second release chamber 283, now because valve sheet 27 is not supported and is closed in the 3rd penetration hole 281 ends, therefore the 3rd penetration hole 281 is in opening state, the gas in the second release chamber 283 can outwards flow to pressure relief vent 288 by the 3rd penetration hole 281 and sentences and carry out release operation.Certainly, the present embodiment, the protuberance structure 281a that can utilize the 3rd penetration hole 281 ends to set up, allows flexual valve sheet 27 be bent upwards deformation quicker, and the state of the 3rd penetration hole 281 is closed in more favourable disengaging.So, can through unidirectional thus release operation will be with outlet the gas discharge in 29 devices that are connected (not shown) and step-down, or discharge completely and complete release operation.
Please refer to Fig. 2 A, Fig. 2 B and Fig. 7 A to Fig. 7 E figure, wherein Fig. 7 A to Fig. 7 E is the collection pressure illustrative view of the micro pressure power plant shown in Fig. 2 A.As shown in Figure 7 A, micro pressure power plant 2 are combined by minitype gas transmitting set 2A and micro valve device 2B, wherein minitype gas transmitting set 2A is as aforementioned, sequentially by inlet plate 20, runner plate 21, resonance plate 22, piezoelectric actuator 23, insulating trip 24, the structures such as conducting plate 25 stack assembling location and form, and between resonance plate 22 and piezoelectric actuator 23, there is a gap g0, and between resonance plate 22 and piezoelectric actuator 23, there is the first chamber 222, and, micro valve device 2B is equally by gas collection plate 26, valve sheet 27 and exit plate 28 etc. sequentially stack assembling location and form, and there is gas collection chamber 262 between the gas collection plate 26 of micro valve device 2B and the piezoelectric actuator 23 of minitype gas transmitting set 2A, second surface 261 in gas collection plate 26 also has the first release chamber 265 and the first outlet chamber 266, and also there is the second release chamber 283 and the second outlet chamber 284 in the first surface 280 of exit plate 28, driving and resonance plate 22 via these a plurality of different pressure chamber collocation piezoelectric actuators 23, the vibration of valve sheet 27, so that gas is pressed transmission to next part.
As shown in Figure 7 B, when the piezoelectric actuator 23 of minitype gas transmitting set 2A is subject to voltage actuation and vibrates downwards, gas can be entered by the inlet hole 200 on inlet plate 20 in minitype gas transmitting set 2A, and via at least one round 211 that confluxes on runner plate 21 to be pooled to its center hole 210 places, then flow into downwards in the first chamber 222 via the hollow bore 220 on resonance plate 22.Thereafter, as shown in Fig. 7 C, owing to being subject to the resonant interaction of piezoelectric actuator 23 vibrations, resonance plate 22 also can with carry out reciprocating vibration, be that it vibrates downwards, and be adsorbed on the protuberance 230c of suspension board 230 of piezoelectric actuator 23, through the deformation of resonance plate 22 thus, the volume of chamber at central hole 210 places of runner plate 21 is increased, and compress the volume of the first chamber 222 simultaneously, and then impel the gas in the first chamber 222 to push to two side flow, and then pass through circulation downwards through the space 235 between the support 232 of piezoelectric actuator 23, to flow in the gas collection chamber 262 between minitype gas transmitting set 2A and micro valve device 2B, and again by the first penetration hole 263 being connected with gas collection chamber 262 and downward corresponding the flowing in the first release chamber 265 and the first outlet chamber 266 of the second penetration hole 264.Then, as shown in Fig. 7 D, because the resonance plate 22 of minitype gas transmitting set 2A returns back to initial position, and piezoelectric actuator 23 is driven with upwards vibration by voltage, the so same volume that pushes the first chamber 222, make gas in the first chamber 222 towards two side flow, and by the space 235 between the support 232 of piezoelectric actuator 23, inputed to constantly the gas collection chamber 262 of micro valve device 2B, in the first release chamber 265 and the first outlet chamber 266, so more make the air pressure in the first release chamber 265 and the first outlet chamber 266 larger, and then promote flexual valve sheet 27 and produce Bending Deformation downwards, in the second release chamber 283, 27 of valve sheets are downward smooth and be resisted against the protuberance structure 281a of the 3rd penetration hole 281 ends, and then the 3rd penetration hole 281 is sealed, and in the second outlet chamber 284, valve opening 270 corresponding to the 4th penetration hole 282 on valve sheet 27 is opened downwards, make gas in the second outlet chamber 284 can by the 4th penetration hole 282 going downs to export 29 and with the outlet 29 any devices (not shown) that are connected, and then to reach the object of collection pressure operation.Finally, as shown in Fig. 7 E, when resonance plate 22 resonance of minitype gas transmitting set 2A is to top offset, and then the gas in the center hole 210 of runner plate 21 can be flowed in the first chamber 222 by the hollow bore 220 of resonance plate 22, via the space 235 between the support 232 of piezoelectric actuator 23, transfer to constantly downwards in micro valve device 2B again, because its gas pressure holding is continuous, increase downwards, therefore gas still can be constantly via the gas collection chamber 262 of micro valve device 2B, the second penetration hole 264, the first outlet chamber 266, the second outlet chamber 284 and the 4th penetration hole 282 and flow to outlet 29 and with outlet the 29 any devices that are connected in, this collection pressure operation can be via the pressure difference in extraneous atmospheric pressure and device to drive it, but not as limit.
When the pressure inner with outlet 29 devices that are connected (not shown) is greater than extraneous pressure, micro pressure power plant 2 can carry out step-down or the operation of release as shown in Figure 8, its step-down or release make flowing mode mainly as previously mentioned, can be via the gas transport amount of regulation and control minitype gas transmitting set 2A, make gas no longer in input set gas chamber 262, now, gas will input in the second outlet chamber 284 with outlet 29 the 4th penetration holes 282 that are connected certainly, make the volumetric expansion of the second outlet chamber 284, and then impel flexual valve sheet 27 to be bent upwards deformation, and upwards smooth, be resisted against in the protuberance structure 269 of the first outlet chamber 266, and the valve opening 270 of valve sheet 27 is closed, the gas in the second outlet chamber 284 can adverse current to the first outlet chamber 266 in, and the gas in the second outlet chamber 284 can flow in the second release chamber 283 via being communicated with runner 285, then by the 3rd penetration hole 281, outwards flow to pressure relief vent 288 and sentence and carry out release operation, so can will the step-down with gas discharge in outlet 29 devices that are connected through the unidirectional gas transport operation of micro valve structure 2B thus, or discharge completely and complete release operation.
In sum, minitype gas transmitting set provided by the utility model comprises inlet plate, runner plate, resonance plate, piezoelectric actuator, the structure such as insulating trip and conducting plate, gas is entered from the inlet hole of inlet plate, and utilize the start of piezoelectric actuator, conflux round and the center hole that make that gas designed in the runner plate of flowing through flow, and flow downward along the hollow bore of resonance plate, to produce pressure gradient in the first chamber forming between resonance plate and piezoelectric actuator, and then make gas flow at high speed, and can continue going down, and then can make gas promptly transmit to reach, and can reach quiet effect simultaneously, more can make the overall volume of minitype gas transmitting set reduce and slimming, and then make its applicable minitype gas power plant reach light comfortable Portable object, and can be widely used among medical equipment and relevant device.Therefore, of the present utility model have an industrial utilization, files an application in whence in accordance with the law.
Although the utility model has been described in detail by above-described embodiment, can think to modify as all by being familiar with this skill personage Ren Shi craftsman, neither disengaging be as protection domain that appended claims limited.

Claims (9)

1. a minitype gas transmitting set, is applicable to micro pressure power plant, at least comprises:
One inlet plate, has at least one inlet hole, for importing gas;
One runner plate, has at least one round and center hole of confluxing, this inlet hole of corresponding this inlet plate of round that confluxes, and guide the gas of this inlet hole to conflux to this center hole;
One resonance plate, has a hollow bore, to center hole that should runner plate; And
One piezoelectric actuator, has a suspension board and a housing, connects, and attach a piezoelectric ceramic plate in a surface of this suspension board between this suspension board and this housing with at least one support;
Wherein, above-mentioned inlet plate, runner plate, resonance plate and piezoelectric actuator sequentially correspondence stack location are set, and between this resonance plate and this piezoelectric actuator, there is a gap and form one first chamber, so that this piezoelectric actuator is when driven, gas is imported by this at least one inlet hole of this inlet plate, this at least one round that confluxes through this runner plate is collected to this center hole, flow through again this hollow bore of this resonance plate, to enter in this first chamber, by the space between this at least one support of this piezoelectric actuator, transmitted downwards again, to continue pushing out gas.
2. minitype gas transmitting set as claimed in claim 1, is characterized in that, this minitype gas transmitting set also comprises an insulating trip and a conducting plate, and this insulating trip and this conducting plate are sequentially arranged under this piezoelectric actuator.
3. minitype gas transmitting set as claimed in claim 1, is characterized in that, this inlet plate and this runner plate can be integrated structure.
4. minitype gas transmitting set as claimed in claim 1, is characterized in that, this resonance plate is consisted of a flexual material, and can produce resonance with this piezoelectric actuator.
5. minitype gas transmitting set as claimed in claim 1, it is characterized in that, one upper surface of this suspension board of this piezoelectric actuator is the structure of a ladder surface, this upper surface has a protuberance, and a upper surface coplanar of this protuberance and this housing, has a degree of depth between this upper surface of this protuberance and this housing and a upper surface of this upper surface of this suspension board and this support.
6. minitype gas transmitting set as claimed in claim 1, is characterized in that, this piezoelectric ceramic plate of this piezoelectric actuator is attached at a lower surface of this suspension board, and this lower surface of this suspension board and a lower surface coplanar of this housing and this support.
7. minitype gas transmitting set as claimed in claim 1, is characterized in that, the structure that this suspension board of this piezoelectric actuator, this housing, this support are formed in one, and this suspension board, this housing, this support can be consisted of a metal material.
8. a minitype gas transmitting set, is applicable to micro pressure power plant, at least comprises:
One inlet plate, has at least one inlet hole, for importing gas;
One runner plate, has at least one round and center hole of confluxing, this inlet hole of corresponding this inlet plate of round that confluxes, and guide the gas of this inlet hole to conflux to this center hole;
One resonance plate, has a hollow bore, to center hole that should runner plate; And
One piezoelectric actuator, has a suspension board and a housing, connects, and attach a piezoelectric ceramic plate in a surface of this suspension board between this suspension board and this housing with at least one support;
Wherein, above-mentioned inlet plate, runner plate, resonance plate and piezoelectric actuator sequentially correspondence stack location are set, so that this piezoelectric actuator is when driven, gas is entered by this at least one inlet hole of this inlet plate, and be collected to this center hole by this at least one round that confluxes of this runner plate, flow through this hollow bore of this resonance plate to enter between this resonance plate and this piezoelectric actuator again, then transmitted downwards by the space between this at least one support of this piezoelectric actuator, to continue pushing out gas.
9. a minitype gas transmitting set, be applicable to micro pressure power plant, at least comprise the inlet plate, a runner plate, a resonance plate and the piezoelectric actuator that sequentially stack setting, wherein between this resonance plate and this piezoelectric actuator, there is a gap and form one first chamber, when this piezoelectric actuator is driven, gas is entered by this inlet plate, flow through this runner plate and this resonance plate, to enter in this first chamber, transmit again, to continue pushing out gas.
CN201320364052.8U 2013-06-24 2013-06-24 Miniature gas transmission device Withdrawn - After Issue CN203476838U (en)

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CN104235081A (en) * 2013-06-24 2014-12-24 研能科技股份有限公司 Miniature gas transmission device
CN105484982A (en) * 2014-09-15 2016-04-13 研能科技股份有限公司 Micro gas pressure power device
CN107023462A (en) * 2016-01-29 2017-08-08 研能科技股份有限公司 Micro pressure power set
US9976673B2 (en) 2016-01-29 2018-05-22 Microjet Technology Co., Ltd. Miniature fluid control device
CN108278195A (en) * 2017-01-05 2018-07-13 研能科技股份有限公司 Minisize fluid control device
CN108278196A (en) * 2017-01-05 2018-07-13 研能科技股份有限公司 Fluid control device
CN109578686A (en) * 2017-09-29 2019-04-05 研能科技股份有限公司 Fluid system
CN109870541A (en) * 2017-12-04 2019-06-11 研能科技股份有限公司 Gas-detecting device
US10371136B2 (en) 2016-01-29 2019-08-06 Microjet Technology Co., Ltd. Miniature pneumatic device
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US10388850B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Piezoelectric actuator
US10388849B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Piezoelectric actuator
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US10584695B2 (en) 2016-01-29 2020-03-10 Microjet Technology Co., Ltd. Miniature fluid control device
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US10746169B2 (en) 2016-11-10 2020-08-18 Microjet Technology Co., Ltd. Miniature pneumatic device
CN112413747A (en) * 2019-08-20 2021-02-26 青岛海尔空调器有限总公司 Outdoor machine of air conditioner
CN115095509A (en) * 2022-07-21 2022-09-23 米笛声学科技(江阴)有限公司 Micro pump

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CN104235081A (en) * 2013-06-24 2014-12-24 研能科技股份有限公司 Miniature gas transmission device
CN104235081B (en) * 2013-06-24 2016-08-03 研能科技股份有限公司 Minitype gas transmitting device
CN105484982A (en) * 2014-09-15 2016-04-13 研能科技股份有限公司 Micro gas pressure power device
US10584695B2 (en) 2016-01-29 2020-03-10 Microjet Technology Co., Ltd. Miniature fluid control device
US10451051B2 (en) 2016-01-29 2019-10-22 Microjet Technology Co., Ltd. Miniature pneumatic device
US10615329B2 (en) 2016-01-29 2020-04-07 Microjet Technology Co., Ltd. Piezoelectric actuator
CN107023462A (en) * 2016-01-29 2017-08-08 研能科技股份有限公司 Micro pressure power set
US10529911B2 (en) 2016-01-29 2020-01-07 Microjet Technology Co., Ltd. Piezoelectric actuator
US10487821B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature fluid control device
US10371136B2 (en) 2016-01-29 2019-08-06 Microjet Technology Co., Ltd. Miniature pneumatic device
US10378529B2 (en) 2016-01-29 2019-08-13 Microjet Technology Co., Ltd. Miniature pneumatic device
US10385838B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Miniature fluid control device
US10388850B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Piezoelectric actuator
US10388849B2 (en) 2016-01-29 2019-08-20 Microjet Technology Co., Ltd. Piezoelectric actuator
US9976673B2 (en) 2016-01-29 2018-05-22 Microjet Technology Co., Ltd. Miniature fluid control device
US10487820B2 (en) 2016-01-29 2019-11-26 Microjet Technology Co., Ltd. Miniature pneumatic device
US10655620B2 (en) 2016-11-10 2020-05-19 Microjet Technology Co., Ltd. Miniature fluid control device
US10683861B2 (en) 2016-11-10 2020-06-16 Microjet Technology Co., Ltd. Miniature pneumatic device
US10746169B2 (en) 2016-11-10 2020-08-18 Microjet Technology Co., Ltd. Miniature pneumatic device
CN108278196A (en) * 2017-01-05 2018-07-13 研能科技股份有限公司 Fluid control device
CN108278195A (en) * 2017-01-05 2018-07-13 研能科技股份有限公司 Minisize fluid control device
CN109578686A (en) * 2017-09-29 2019-04-05 研能科技股份有限公司 Fluid system
CN109870541A (en) * 2017-12-04 2019-06-11 研能科技股份有限公司 Gas-detecting device
CN112413747A (en) * 2019-08-20 2021-02-26 青岛海尔空调器有限总公司 Outdoor machine of air conditioner
CN115095509A (en) * 2022-07-21 2022-09-23 米笛声学科技(江阴)有限公司 Micro pump

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