CN205479702U - Miniature valve device - Google Patents

Abstract

The utility model provides a miniature valve device, includes: the gas collection board has at least one first through hole, an at least second through hole, at least one first release cavity and one at least outlet chamber room, valve disc has a valve opening, go out the oralia, have at least third and at least fourth through hole, an at least second release cavity and one two at least outlet chamber room, when gas when first and second through hole gets into a first release cavity and an outlet chamber room, valve disc's valve opening is opened downwards, gaseous flow into the fourth through hole in, carry out an album pressure, when the fourth through hole flows towards the 2nd outlet chamber room, then make make progress displacement and replacing in the gas collection board of valve disc when gaseous, make the valve opening close, the indoor gas of the 2nd outlet chamber can be followed the intercommunication runner and flowed to the second release cavity in, through the outflow of third through hole, carries out the release.

Description

Micro valve device

[technical field]

This utility model is about a kind of micro valve device, a kind of be applicable in micro pressure power set micro- Type valving.

[background technology]

The at present either industry such as medicine, computer technology, printing, the energy in each field, product is all towards sophistication and micro- Littleization direction is developed, the fluid delivery structure that the product such as the most micro-side Pu, aerosol apparatus, ink gun, industrial printing devices is comprised For its key technology, therefore how to borrow innovation structure to break through its technical bottleneck, for the important content of development.

For example, in medicinal industry, many needs instrument or the equipment using Pneumatic pressure power to drive, and generally adopts to pass The purpose of its gas conveying reached by system motor and air pressure valve.But, it is limited to the volume of these conventional motor and gas trap Limit so that this type of instrument and equipment is difficult to reduce the volume of its single unit system, is i.e. difficult to the target of slimming, more cannot Make reaches portable purpose.Additionally, these conventional motor and gas trap also can produce the problem of noise when start, cause Use is not convenient and uncomfortable.

Therefore, how to develop one and can improve above-mentioned known technology disappearance, the instrument of conventionally employed charge delivery mechanism can be made Device or equipment reach that volume is little, miniaturization and quiet, and then reach the micro valve device of light comfortable portable purpose, real For problem the most in the urgent need to address.

[utility model content]

Main purpose of the present utility model is to provide a kind of micro valve device being suitable for micro pressure power set, borrows Gas is made to carry out unidirectional flowing in micro valve device by valve mechanism, to carry out collection pressure or blood pressure lowering, the operation of release, The volume possessed in order to the instrument using Pneumatic pressure power to drive or equipment that solve known technology is big, be difficult to slimming, Wu Fada Become portable purpose, and the disappearance such as noise is big.

For reaching above-mentioned purpose, a broader enforcement aspect of the present utility model, for providing a kind of micro valve device, is suitable for In micro pressure power set, comprising: a valve sheet, having a valve opening, this valve sheet has between 0.1mm-0.3mm Between thickness；One gas collection plate, has one first through hole, one second through hole, one first release chamber and one first outlet Chamber, and there is a reference surface, this first outlet chamber has a protuberance structure, with to should valve sheet this valve opening and Arranging, favourable this valve opening of conflicting forms a prestressing effect, this valve opening completely enclosed, and the height of this protuberance structure is higher than this gas collection plate This reference surface, this first through hole is connected with this first release chamber, this second through hole and this first outlet chamber It is connected；And an exit plate, there is one the 3rd through hole, one the 4th through hole, one second release chamber, one second outlet plenum Room and at least one position limiting structure, and there is a reference surface, the 3rd through hole end has a protuberance structure, and this protuberance is tied The height of structure is higher than this reference surface of this exit plate, and favorably this valve sheet is quickly conflicted and formed a prestressing effect, completely enclosed 3rd through hole, the 3rd through hole is corresponding to this first through hole of this gas collection plate, and is connected with this second release chamber Logical, the 4th through hole corresponds to this second through hole, and is connected with this second outlet chamber, and this at least one position limiting structure sets Being placed in this second pressure-releasing cavity indoor, the thickness of this position limiting structure is between 0.3mm-0.5mm, and this second release chamber And there is between this second outlet chamber a connection runner；Wherein, above-mentioned this gas collection plate, this valve sheet and this exit plate are sequentially Corresponding stacking arranges location, and this valve sheet is arranged between this gas collection plate and this exit plate, and this valve opening of this valve sheet is corresponding Being arranged between this second through hole and the 4th through hole, gas is from a minitype gas transmission of these micro pressure power set When device transmits downwards to this micro valve device, this first through hole and this second through hole enter this first pressure-releasing cavity In room and this first outlet chamber, and import in gas is flowed into the 4th through hole by the valve opening of this valve sheet and carry out collection pressure work Industry, when collecting body of calming the anger more than importing gas, collects body of calming the anger and flows towards this second outlet chamber from the 4th through hole, so that should Valve sheet displacement, and make the valve opening of this valve sheet be resisted against this gas collection plate and close, and this at least one position limiting structure is auxiliary Support this valve sheet, to prevent this valve sheet from subsiding, collect body of calming the anger simultaneously and can flow to along connection runner in this second outlet chamber This second pressure-releasing cavity is indoor, and now in this valve sheet displacement indoor of the second pressure-releasing cavity, collecting body of calming the anger can be by the 3rd through hole stream Go out, to carry out release operation.

For reaching above-mentioned purpose, another broader enforcement aspect of the present utility model is for providing a kind of micro valve device, suitable For micro pressure power set, including: a gas collection plate, there are at least two through holes and at least two chambers；One valve sheet, tool There is a valve opening；And an exit plate, there are at least two through holes and at least two chambers；Wherein, above-mentioned gas collection plate, valve sheet with And exit plate sequentially corresponding stacking arranges location, a minitype gas transmitting device of these micro pressure power set and this miniature valve Form a gas collection chamber between door gear, when gas transmits downwards to this gas collection chamber from this minitype gas transmitting device, then pass It is handed in this micro valve device, at least two through holes being respectively provided with through this gas collection plate, this exit plate and at least two chambers, This valve opening correspondence making this valve sheet with the one-way flow in response to gas opens or closes, in order to carrying out collection pressure or release operation.

[accompanying drawing explanation]

Figure 1A be this utility model be the front decomposition texture schematic diagram of the micro pressure power set of preferred embodiment.

Figure 1B is the positive combination structural representation of the micro pressure power set shown in Figure 1A.

Fig. 2 A is the back side decomposition texture schematic diagram of the micro pressure power set shown in Figure 1A.

Fig. 2 B is the back side combinative structure schematic diagram of the micro pressure power set shown in Figure 1A.

Fig. 3 A is the positive combination structural representation of the piezo-activator of the micro pressure power set shown in Figure 1A.

Fig. 3 B is the back side combinative structure schematic diagram of the piezo-activator of the micro pressure power set shown in Figure 1A.

Fig. 3 C is the cross-sectional view of the piezo-activator of the micro pressure power set shown in Figure 1A.

Fig. 4 is the multiple enforcement aspect schematic diagram of the piezo-activator shown in Fig. 3 A.

Fig. 5 A to Fig. 5 E is the illustrative view of the minitype gas transmitting device of the micro pressure power set shown in Figure 1A.

Fig. 6 A is the collection pressure illustrative view of the micro valve device of the micro pressure power set shown in Figure 1A.

Fig. 6 B is the release illustrative view of the micro valve device of the micro pressure power set shown in Figure 1A.

Fig. 7 A to Fig. 7 E is the collection pressure illustrative view of the micro pressure power set shown in Figure 1A.

Fig. 8 is blood pressure lowering or the release illustrative view of the micro pressure power set shown in Figure 1A.

[symbol description]

1: micro pressure power set

1A: minitype gas transmitting device

1B: micro valve device

11: inlet plate

110: air inlet

111: central recess

112: total string holes

12: resonance plate

120: hollow bore

121: the first chambers

13: piezo-activator

130: suspension board

The upper surface of 130a: suspension board

The lower surface of 130b: suspension board

130c: protuberance

131: housing

The upper surface of 131a: housing

The lower surface of 131b: housing

132: support

The upper surface of 132a: support

The lower surface of 132b: support

133: piezoelectric ceramic plate

134,151: conductive connecting pin

135: space

141,142: insulating trip

15: conducting strip

16: gas collection plate

160: the surface of gas collection plate

161: the reference surface of gas collection plate

162: gas collection chamber

163: the first through holes

164: the second through holes

165: the first release chambers

166: the first outlet chamber

167,181a: protuberance structure

17: valve sheet

170: valve opening

171: location hole

18: exit plate

180: the reference surface of exit plate

181: the three through holes

182: the four through holes

183: the second release chambers

184: the second outlet chamber

185: connection runner

186: pressure relief vent

187: the second surface of exit plate

188: position limiting structure

19: outlet

G0: gap

(a)～(l): the different of conductive actuation device implement aspect

A0, i0, j0: suspension board

A1, i1, j1: housing

A2, i2: support

A3: space

[detailed description of the invention]

Embodiment this utility model feature will describe with some exemplary embodiments of advantage in the explanation of back segment in detail.Ying Li Solve is that this utility model can have various changes in different aspects, and it is all without departing from scope of the present utility model, And explanation therein and be shown in and be substantially treated as purposes of discussion, and nand architecture is in limiting this utility model.

Micro pressure power set 1 of the present utility model are to can be applicable to the raw skill of medicine, the energy, computer technology or printing Deng industry, in order in order to transmit gas, but it is not limited.Referring to Figure 1A, Figure 1B, Fig. 2 A and Fig. 2 B, Figure 1A is that this practicality is new The front decomposition texture schematic diagram of the micro pressure power set of type preferred embodiment, Figure 1B is that the micro pressure shown in Figure 1A moves The positive combination structural representation of power apparatus, Fig. 2 A are the back side decomposition texture signal of the micro pressure power set shown in Figure 1A Figure, Fig. 2 B is then for the back side combinative structure schematic diagram of the micro pressure power set shown in Figure 1A.As shown in Figure 1A and Fig. 2 A, this The micro pressure power set 1 of utility model are by combined by minitype gas transmitting device 1A and micro valve device 1B Become, wherein minitype gas transmitting device 1A have inlet plate 11, resonance plate 12, piezo-activator 13, insulating trip 141,142, lead The structures such as electricity sheet 15, it is to be arranged corresponding to resonance plate 12 by piezo-activator 13, and makes inlet plate 11, resonance plate 12, pressure Electric actuator 13, insulating trip 141, conducting strip 15 and another insulating trip 142 etc. sequentially stack setting, and this piezo-activator 13 is Assembled by a suspension board 130 and a piezoelectric ceramic plate 133；And micro valve device 1B is then by gas collection plate 16, valve The sequentially stack assembly such as sheet 17 and exit plate 18 forms, but is not limited.And in the present embodiment, as shown in Figure 1A, collection Gas plate 16 is not only the most single plate structure, also can be the periphery frame structure with sidewall, and the side being made up of this periphery Wall and the plate common definition bottom it go out an accommodation space, therefore when micro pressure power set 1 of the present utility model have assembled Cheng Hou, then its front schematic view can be as shown in Figure 1B, it is seen that this minitype gas transmitting device 1A is the appearance being located in gas collection plate 16 In between being empty, and it is to stack with valve sheet 17 and exit plate 18 to form under it.Its schematic rear view being completed is the most visible Pressure relief vent 186 in this exit plate 18 and outlet 19, outlet 19 is in order to be connected with a device (not shown), and pressure relief vent 186 then supplies So that the gas in micro valve device 1B is discharged, to reach effect of release.By this minitype gas transmitting device 1A and micro- The assembling of type valving 1B is arranged, so that at least one air inlet that gas is on the inlet plate 11 of minitype gas transmitting device 1A 110 air inlets, and through the start of piezo-activator 13, and flow through multiple pressure chamber (not shown), and transmit downwards, Jin Erke Make gas one-way flow in micro valve device 1B, and by acute build up of pressure in being connected with the port of export of micro valve device 1B In one device (not shown), and when release need to be carried out, then regulate and control minitype gas transmitting device 1A output, make gas via Pressure relief vent 186 in the exit plate 18 of micro valve device 1B and discharge, to carry out release.

Please continue refering to Figure 1A and Fig. 2 A, as shown in Figure 1A, the inlet plate 11 of minitype gas transmitting device 2A is to have at least One air inlet 110, in the present embodiment, the quantity of air inlet 110 is for 4, but is not limited, and it is mainly in order to supplied gas Outside device, comply with the effect of atmospheric pressure and flow in minitype gas transmitting device 2A from this at least one air inlet 110.And again As shown in Figure 2 A, from the lower surface of inlet plate 11, it has at least one total string holes 112, in order to table on inlet plate 11 This at least one air inlet 110 in face is correspondingly arranged, and the collection that the gas entered from this at least one air inlet 110 can be guided and be confluxed In to a central recess 111, with going down.It is that inlet plate 11 has integrated air inlet with in the present embodiment 110, total string holes 112 and central recess 111, and at this central recess 111, i.e. it is correspondingly formed a chamber that confluxes confluxing gas, Keep in supplied gas.In some embodiments, the material of inlet plate 11 be can by but be not limited to be made up of a stainless steel, And its thickness preferred values is between 0.4mm-0.6mm, and its optimum is 0.5mm, but is not limited.In other In embodiment, the degree of depth by the total string holes 112 of the degree of depth and these of the chamber that confluxes constituted at this central recess 111 is identical, and The preferred values of the degree of depth of this conflux chamber and this total string holes 112 is between 0.2mm-0.3mm, but is not limited.Resonance Sheet 12 is to be made up of a flexible materials, but is not limited, and has a hollow bore 120 on resonance plate 12, is right Should arrange, so that gas can circulate downwards in the central recess 111 of the lower surface of inlet plate 11.In other embodiments, Resonance plate is can be made up of a copper material, but is not limited, and the preferred values of its thickness be between 0.03mm-0.08mm it Between, and its optimum is 0.05mm, but be also not limited.

Please refer to Fig. 3 A, Fig. 3 B and Fig. 3 C, it is the piezoelectricity of the respectively micro pressure power set shown in Figure 1A The Facad structure schematic diagram of actuator, structure schematic diagram and cross-sectional view, as it can be seen, piezo-activator 13 It is jointly to be assembled by suspension board 130, housing 131, an at least support 132 and a piezoelectric ceramic plate 133, its In, this piezoelectric ceramic plate 133 is attached at the lower surface 130b of suspension board 130, and this at least one support 132 is connected to suspend Between plate 130 and housing 131, in the present embodiment, the two-end-point of this support 132 is connected to housing 131, and another end points is then Be connected to suspension board 130, and between support 132, suspension board 130 and housing 131, have more at least one space 135, with for Gas circulates, and this suspension board 130, housing 131 and the kenel of support 132 and quantity are to have multiple change.It addition, housing 131 conductive connecting pins 134 having more an outside projection, in order to for electrical connection, but to be not limited.In some embodiments In, the thickness preferred values of piezo-activator 13 is between 0.28mm to 0.49mm, and its optimum is for 0.37mm, but also It is not limited.

In the present embodiment, suspension board 130 is the structure for a cascaded surface, implies that the upper surface 130a in suspension board 130 Have more a protuberance 130c, this protuberance 130c can be but be not limited to a circular protrusions structure, and the height preferred values of protuberance 130c It is between 0.02mm-0.08mm, and optimum is 0.03mm, its a diameter of 5.5mm, but be not limited.Join the most simultaneously It is visible for readding Fig. 3 A and Fig. 3 C, and the protuberance 130c of suspension board 130 is the upper surface 131a copline with housing 131, and suspension board The upper surface 130a of the 130 and upper surface 132a of support 132 is also copline, and the protuberance 130c of this suspension board 130 and housing Between the upper surface 131a of the 131 and upper surface 130a of suspension board 130 and the upper surface 132a of support 132 be have one specific deeply Degree.As for the lower surface 130b of suspension board 130, then as shown in Fig. 3 B and Fig. 3 C, itself and the lower surface 131b of housing 131 and support The lower surface 132b of 132 is smooth coplanar structure, and piezoelectric ceramic plate 133 is then attached at this smooth suspension board 130 At lower surface 130b.In some embodiments, suspension board 130, support 132 and housing 131 are the structures that can be formed in one, And can be made up of a metallic plate, such as can be made up of stainless steel, but be not limited.And in some embodiments, The preferred values of this suspension board 130 thickness is between 0.2mm-0.29mm, and its optimum is 0.26mm, separately this suspension board Length preferred values between 8mm-12mm, and its optimum be 10.1mm, width preferred values between 8mm-12mm, and its Optimum is 10.1mm but is not limited.Preferred values as the thickness of this housing 131 is between 0.2mm-0.4mm, And its optimum is 0.3mm, but it is not limited.

Again in other embodiments, the preferred values of the thickness of piezoelectric ceramic plate 133 is between 0.08mm-0.2mm, And its optimum is 0.10mm, and the length preferred values of this suspension board is between 8mm-12mm, and its optimum is 10mm, width Degree preferred values is between 8mm-12mm, and its optimum is 10mm, and the preferred values of another length and width ratio is 0.75 times-1.25 Between Bei, the most also it is not limited.

Please continue refering to Fig. 4, it is the multiple enforcement aspect schematic diagram for the piezo-activator shown in Fig. 3 A.As it can be seen, The suspension board 130 of the most visible piezo-activator 13, housing 131 and support 132 are to have various kenel, and at least can have Multiple aspect such as (a)～(l) shown in Fig. 4, for example, the housing a1 and suspension board a0 of (a) aspect is for square structure, And be to link it between the two by multiple support a2, such as: 8, but be not limited, and in support a2 and suspension board a0, It is that there is space a3 between housing a1, circulates with supplied gas.In another (i) aspect, its housing i1 and suspension board i0 is the most same For square structure, precisely because in only by 2 support i2 to link it；It addition, in (j)～(l) aspect, then its suspension board j0 etc. are Can be circular structure, and housing j0 etc. also can be the frame structure of somewhat radian, but all be not limited.Therefore the most multiple reality Executing aspect visible, the kenel of suspension board 130 is can be square or circular, and similarly, is attached at the lower surface of suspension board 130 The piezoelectric ceramic plate 133 of 130b also can be square or circular, is not limited thereto；And, it is connected to suspension board 130 and housing The kenel of the support 132 between 131 and quantity also can apply situation according to actual and appoint and execute change, not with shown in this utility model Aspect be limited.And these suspension boards 130, housing 131 and support 132 are the structures that can be formed in one, but it is not limited, Then can be by tradition processing or gold-tinted etching or Laser Processing or the side such as eletroforming or electro-discharge machining as its manufacture Formula is made, and is all not limited.

Additionally, please continue refering to Figure 1A and Fig. 2 A, in minitype gas transmitting device 1A, have more insulating trip 141, conducting strip 15 and another insulating trip 142 be sequentially to be correspondingly arranged under piezo-activator 13, and its form approximately correspond to piezoelectricity cause The form of the housing of dynamic device 13.In some embodiments, insulating trip 141,142 is i.e. made up of the material that can insulate, such as: mould Glue, but be not limited, is used carrying out insulation；In other embodiments, conducting strip 15 is i.e. by conductive material institute structure Become, such as: metal, but be not limited, to carry out conducting being used.And, in the present embodiment, conducting strip 15 also can set Put a conductive connecting pin 151, to carry out conducting being used.

Please refer to Figure 1A and Fig. 5 A to Fig. 5 E, wherein Fig. 5 A to Fig. 5 E is to fill for the micro pressure power shown in Figure 1A The illustrative view of the minitype gas transmitting device put.First, as shown in Figure 5A, it is seen that minitype gas transmitting device 1A is sequentially Formed by stackings such as inlet plate 11, resonance plate 12, piezo-activator 13, insulating trip 141, conducting strip 15 and another insulating trips 142, And be that there is a gap g0 between resonance plate 12 and piezo-activator 13, in the present embodiment, it is in resonance plate 12 and piezoelectricity Gap g0 between the housing 131 of actuator 13 fills a material, such as: conducting resinl, but is not limited, so that resonance plate 12 and piezo-activator 13 suspension board 130 protuberance 130c between can maintain the degree of depth of this gap g0, and then air-flow can be guided More quickly flow, and because the protuberance 130c of suspension board 130 keeps suitable distance to make the interference minimizing that contacts with each other with resonance plate 12, Promote noise to produce can be lowered；In other embodiments, also can be by the height of the housing 131 of the electric actuator 13 that adds high pressure Degree, so that increasing by a gap when it assembles with resonance plate 12, but is not limited.

Please continue refering to Fig. 5 A to Fig. 5 E, as it can be seen, when inlet plate 11, resonance plate 12 are the most corresponding with piezo-activator 13 After assembling, then can be collectively forming a chamber confluxing gas with inlet plate 11 thereon at the hollow bore 120 of resonance plate 12, And between resonance plate 12 and piezo-activator 13, more form one first chamber 121, it is configured to temporarily store gas, and the first chamber 121 It is to be connected with the chamber at the central recess 111 of inlet plate 11 lower surface through the hollow bore 120 of resonance plate 12, and the The both sides of one chamber 121 then by the space 135 between the support 132 of piezo-activator 13 with the micro valve being arranged under it Device 1B is connected.

When the minitype gas transmitting device 1A start of micro pressure power set 1, mainly by piezo-activator 13 by electricity Pressure activates and with support 132 as fulcrum, carries out the reciprocating vibration of vertical direction.As shown in Figure 5 B, it is subject to when piezo-activator 13 Voltage actuation and when vibrating downwards, then gas is entered by least one air inlet 110 on inlet plate 11, and through its lower surface At least one total string holes 112 is to be pooled at the central recess 111 of central authorities, then via corresponding with central recess 111 on resonance plate 12 The central hole 120 arranged flows downwardly into the first chamber 121, thereafter, owing to being driven by piezo-activator 13 vibration, altogether Shake sheet 12 also can with resonance and carry out vertical reciprocating vibration, as shown in Figure 5 C, then for resonance plate 12 also with shake downwards Dynamic, and attach on the protuberance 130c of the suspension board 130 contacting at piezo-activator 13, by the deformation of this resonance plate 12, with pressure Contract the volume of the first chamber 121, and closes the first chamber 121 middle flow space, promotes its interior gas to push to two effluents Dynamic, so space 135 between the support 132 of piezo-activator 13 and pass through downwards flowing.As for Fig. 5 D then for it altogether The sheet 12 that shakes returns back to initial position, and piezo-activator 13 is driven by voltage upwards to vibrate, the most same extruding the first chamber The volume of 121, is the most now upwards lifting due to piezo-activator 13, and the displacement of this lifting can be d, so that the first chamber Gas in 121 can flow towards both sides, and then drives gas at least one air inlet 110 on inlet plate 11 constantly to enter, Flow into again in the chamber that central recess 111 is formed, more as shown in fig. 5e, this resonance plate 12 is by piezo-activator 13 upwards lifting Vibration and resonate upwards, and then make the gas in central recess 111 be flowed into first by the central hole 120 of resonance plate 12 again In chamber 121, and pass through downwards outflow minitype gas transmission via the space 135 between the support 132 of piezo-activator 13 Device 1A.Thus implement aspect visible, when resonance plate 12 carries out vertical reciprocating vibration, be can be by itself and piezo-activator Gap g0 between 13 is to increase the ultimate range of its vertical displacement, and in other words, arranging gap g0 between this two structure can Make resonance plate 12 can produce upper and lower displacement by a larger margin when resonance, and wherein the vibration displacement of this piezo-activator is d, with The difference of this gap g0 is x, i.e. x=g0-d, after tested as x 0um, for there being noise state；Working as x=1-5um, pumping maximum is defeated Go out air pressure and can reach 350mmHg；Working as x=5-10um, pumping maximum output pressure can reach 250mmHg；Work as x=10-15um, pump Pu maximum output pressure can reach 150mmHg, and its numerical value corresponding relation is as shown in the following Table I.Above-mentioned numerical value is in operation Frequency is between 17K to 20K, operation voltage for ± 10V to ± 20V between.So, through this minitype gas transmitting device 1A's Runner design produces barometric gradient, makes gas flow at high rates, and through the resistance difference in runner turnover direction, by gas by inhaling Enter end to transmit to outlet side, and when outlet side has air pressure, still have the ability to continue pushing out gas, and can reach quiet Effect.

(table one)

It addition, in some embodiments, the vertical reciprocating type frequency of vibration of resonance plate 12 can be with piezo-activator 13 Frequency of vibration is identical, and i.e. both can simultaneously the most upwards or downwards, and it is can to apply situation according to actual and appoint and execute change, not With being limited as flowing mode shown in the present embodiment.

Please refer to Figure 1A, Fig. 2 A and Fig. 6 A, Fig. 6 B, wherein Fig. 6 A is for the micro pressure power set shown in Figure 1A Micro valve device collection pressure illustrative view, Fig. 6 B then for the micro pressure power set shown in Figure 1A micro valve dress The release illustrative view put.As shown in Figure 1A and Fig. 6 A, the micro valve dress of micro pressure power set 1 of the present utility model Putting 1B is sequentially to be stacked by gas collection plate 16, valve sheet 17 and exit plate 18 to form, and in the present embodiment, gas collection plate 16 has one Surface 160, this surface 160 is cave in form a gas collection chamber 162, minitype gas transmitting device 1A the gas transmitted downwards Body is the most temporarily accumulated in this gas collection chamber 162, and is to have the first through hole 163 and the second through hole in gas collection plate 16 164, one end of the first through hole 163 and the second through hole 164 is to be connected with gas collection chamber 162, the other end the most respectively with collection The first release chamber 165 and the first outlet chamber 166 on the reference surface 161 of gas plate 16 are connected.And, in the first outlet Further set up a protuberance structure 167 at chamber 166, such as, can be but not be limited to a column structure, and it is and valve sheet The valve opening 170 of 17 is correspondingly arranged.

Exit plate 18 also has two the 3rd through hole 181 and the 4th through holes 182 running through setting, and the 3rd runs through Hole 181 and the 4th through hole 182 are to correspond respectively to the first through hole 163 of gas collection plate 16 and the second through hole 164 and set Putting, and have a reference surface 180 in exit plate 18, this reference surface 180 corresponding at the 3rd through hole 181 is concave shape Become one second release chamber 183, corresponding to formation one second outlet chamber 184 of then caving at the 4th through hole 182, and in the Have more one between two release chambers 183 with the second outlet chamber 184 and connect runner 185, circulate in order to supplied gas.3rd passes through One end of perforation 181 is connected with the second release chamber 183, and the protuberance knot that its end can be set up a protrusion further and be formed Structure 181a, such as, can be but not be limited to column structure, the other end is then communicated in the pressure relief vent of the second surface 187 of exit plate 18 186；And one end of the 4th through hole 182 is connected with the second outlet chamber 184, the other end is then connected with outlet 19, Yu Ben In embodiment, outlet 19 is to be connected with a device (not shown), such as: forcing press, but is not limited.

And, exit plate 18 has more at least one position limiting structure 188, and as a example by the present embodiment, position limiting structure 188 is to arrange In the second release chamber 183, and being an annular block structure, and be not limited, it is predominantly as micro valve device 1B When carrying out collection pressure operation, it is provided with auxiliary and supports valve sheet 17 and be used, to prevent valve sheet 17 from subsiding, and can make the valve sheet 17 can be more Rapidly turn on or close.

There is a valve opening 170 and multiple location hole 171, when valve sheet 17 and gas collection plate 16 and outlet on valve sheet 17 When plate 18 location assembles, it is that its valve opening 170 is right corresponding to the protuberance structure 167 of the first outlet chamber 166 of gas collection plate 16 Should arrange, by the design of this single valve opening 170, so that gas can reach the purpose of one-way flow in response to its pressure reduction.

When the pressure start of micro valve device 1B collection, the most as shown in Figure 6A, it is can to pass in response to coming from minitype gas The pressure that the gas that defeated device 1A transmits downwards is provided, again or when extraneous atmospheric pressure more than and the dresses that are connected of outlet 19 When putting the internal pressure of (not shown), then gas can be from the gas collection of minitype gas transmitting device 1A transmission to micro valve device 1B In chamber 162, then flow downwardly into the first release chamber 165 and respectively through the first through hole 163 and the second through hole 164 In one outlet chamber 166, now, downward gas pressure is to make flexual valve sheet 17 be bent downwardly deformation, therefore valve sheet The thickness preferred values of 17 is between 0.1mm-0.3mm, and its optimum is 0.2mm, and then makes the body of the first release chamber 165 Long-pending increase, and correspond to end that is the most smooth at the first through hole 163 and that be resisted against the 3rd through hole 181, and then can close 3rd through hole 181 of exit plate 18, therefore the gas in the second release chamber 183 will not flow out at the 3rd through hole 181. Certainly, the present embodiment, the design of protuberance structure 181a, and this protuberance structure are set up in available 3rd through hole 181 end 181a is through improvement to increase its height, and the height of this protuberance structure 181a is above the reference surface 180 of this exit plate 18, and The height preferred values of protuberance structure 181a is for being between 0.45mm-0.55mm, and optimum is 0.5mm, forces valve to add Sheet 17 is conflicted rapidly and closes the 3rd through hole 181, and reaches the effect that a prestressing conflict effect fully seals, the most thoroughly Cross the position limiting structure 188 being located on the 3rd through hole 181 periphery, support valve sheet 17 with auxiliary so that it is will not produce and subside.Separately On the one hand, owing to gas is to flow downwardly in the first outlet chamber 166 from the second through hole 164, and corresponding to the first outlet Valve sheet 17 at chamber 166 is also bent downwardly deformation, so that the valve opening 170 of its correspondence is opened downwards, gas then can be from One outlet chamber 166 flows in the second outlet chamber 184 via valve opening 170, and is flow to export 19 by the 4th through hole 182 And with in the devices (not shown) that are connected of outlet 19, whereby this device to be carried out the start of collection pressure.

Please continue refering to Fig. 6 B, when micro valve device 1B carries out release, it is can be by regulation and control minitype gas transmission dress Put the gas transmission amount of 1A, make in gas no longer input set gas chamber 162, or when the device (not shown) being connected with outlet 19 When internal pressure is more than extraneous atmospheric pressure, then micro valve device 1B can be made to carry out release.Now, gas will from go out The 4th through holes 182 that mouth 19 connects input to the second outlet chamber 184 so that the volumetric expansion of the second outlet chamber 184, And then promote the flexual valve sheet 17 to be bent upwards deformation, and the most smooth, be resisted against on gas collection plate 16, therefore valve sheet 17 Valve opening 170 can be closed because being resisted against gas collection plate 16.Certainly, at the present embodiment, it is convex that available first outlet chamber 166 sets up one The design of portion's structure 167, and this protuberance structure 167 is through improveing to increase its height, the height of this protuberance structure 167 is above The reference surface 161 of this gas collection plate 16, and the height preferred values of protuberance structure 167 is between 0.45mm-0.55mm, and its Optimum is 0.50mm, therefore is available for flexual valve sheet 17 and is bent upwards the more rapid conflict of deformation, makes valve opening 170 more favorably reach The closed mode of sealing, therefore, when being in original state, the valve opening of valve sheet 17 is attached completely to a prestressing conflict effect 170 can close because being close to be resisted against this protuberance structure 167, then the gas in this second outlet chamber 184 will not the most extremely In first outlet chamber 166, to reach the effect preferably preventing gas from leaking outside.And, the gas in the second outlet chamber 184 It is can to flow in the second release chamber 183 via connection runner 185, and then makes the volume expanded of the second release chamber 183, and Make to be bent upwards equally corresponding to the valve sheet 17 of the second release chamber 183 deformation, now do not support closing due to valve sheet 17 In the 3rd through hole 181 end, therefore the 3rd through hole 181 is i.e. in opening, the gas in the i.e. second release chamber 183 Can outwards be flow to pressure relief vent 186 by the 3rd through hole 181 sentence and carry out release operation.Certainly, the present embodiment, the available 3rd passes through Protuberance structure 181a that 181 ends set up of boring a hole or through being arranged at the position limiting structure 188 in the second release chamber 183, should The height preferred values of position limiting structure 188 is between 0.3mm-0.5mm, and its optimum is 0.4mm, allows flexual valve It is more rapid that sheet 17 is bent upwards deformation, more favorably departs from the state closing the 3rd through hole 181.So, then can be unidirectional by this Release operation with the gas discharge in the devices (not shown) that be connected of outlet 19 and blood pressure lowering, or will be completely exhausted out and complete to unload Pressure operation.

Please refer to Figure 1A, Fig. 2 A and Fig. 7 A to Fig. 7 E, wherein Fig. 7 A to Fig. 7 E is for the micro pressure shown in Figure 1A The collection pressure illustrative view of power set.As shown in Figure 7 A, micro pressure power set 1 i.e. by minitype gas transmitting device 1A with And form combined by micro valve device 1B, wherein minitype gas transmitting device 1A is it has been observed that sequentially by inlet plate 11, resonate The build stack such as sheet 12, piezo-activator 13, insulating trip 141, conducting strip 15 and another insulating trip 142 assemble location and form, and It is that there is a gap g0 between resonance plate 12 and piezo-activator 13, and has between resonance plate 12 and piezo-activator 13 First chamber 121, and, micro valve device 1B is then same by the sequentially heap such as gas collection plate 16, valve sheet 17 and exit plate 18 Stacked group sets position and forms, and the piezo-activator of the gas collection plate 16 and minitype gas transmitting device 1A in micro valve device 1B It is there is gas collection chamber 162, to have more the first release chamber 165 and first in the reference surface 161 of gas collection plate 16 between 13 Outlet chamber 166, and have more the second release chamber 183 and the second outlet chamber in the reference surface 180 of exit plate 18 184, by the driving of these multiple different pressure chamber collocation piezo-activators 13 and resonance plate 12, the shaking of valve sheet 17 It is dynamic, so that gas is to next part pressure transmission.

As shown in Figure 7 B, when the piezo-activator 13 of minitype gas transmitting device 1A is vibrated downwards by voltage actuation, Then gas can be entered in minitype gas transmitting device 1A by the air inlet 110 on inlet plate 11, and via at least one total string holes 112 To be pooled at its central recess 111, then flow downwardly into the first chamber 121 via the hollow bore 120 on resonance plate 12. Thereafter, the most as seen in figure 7 c, due to the resonant interaction vibrated by piezo-activator 13, resonance plate 12 also can with carry out reciprocating Vibration, i.e. it vibrates downwards, and close on the protuberance 130c of the suspension board 130 of piezo-activator 13, by this resonance plate 12 Deformation so that the volume of the chamber at the central recess 111 of inlet plate 11 increases, and compresses the body of the first chamber 121 simultaneously Long-pending, and then promote the gas in the first chamber 121 to push to flow to both sides, so through piezo-activator 13 support 132 it Between space 135 and pass through downwards circulation, to flow to the gas collection between minitype gas transmitting device 1A and micro valve device 1B In chamber 162, and again by with gas collection chamber 162 is connected the first through hole 163 and the second through hole 164 is the most corresponding flow to In first release chamber 165 and the first outlet chamber 166, thus implement aspect visible, when resonance plate 12 carries out vertical reciprocal During formula vibration, it is can be by the gap g0 between itself and piezo-activator 13 to increase the ultimate range of its vertical displacement, in other words Say, gap g0 is set between this two structure resonance plate 12 can be made can to produce upper and lower displacement by a larger margin when resonance.

Then, the most as illustrated in fig. 7d, owing to the resonance plate 12 of minitype gas transmitting device 1A returns back to initial position, and press Electric actuator 13 is driven by voltage upwards to vibrate, and wherein the vibration displacement of this piezo-activator is d, with the difference of this gap g0 Value is x, i.e. x=g0-d, after tested as x 0um, for there being noise state；Working as x=1-5um, pumping maximum output pressure can reach 350mmHg；Working as x=5-10um, pumping maximum output pressure can reach 250mmHg；Work as x=10-15um, pumping maximum output gas Pressure can reach 150mmHg, all in shown in its most listed table one, repeats no more.Above-mentioned numerical value is to be 17K at operation frequency Between 20K, operation voltage be ± 10V extremely ± 20V between.Again in another embodiment, this operation frequency is 18.5k, operation Voltage is ± 16V, and its maximum output pressure can reach 300mmHg, but is not limited.The most same extruding the first chamber 121 Volume so that the gas in the first chamber 121 flows towards both sides, and by the space between the support 132 of piezo-activator 13 135 input gas collection chamber the 162, the first release chamber 165 to micro valve device 1B and the first outlet chamber constantly In 166, the most more make the air pressure in the first release chamber 165 and the first outlet chamber 166 the biggest, and then promote flexual Valve sheet 17 produces downwards Bending Deformation, then, in the second release chamber 183, valve sheet 17 is the most smooth and is resisted against the 3rd Protuberance structure 181a of through hole 181 end, and then make the 3rd through hole 181 close, and in the second outlet chamber 184, valve It is to open downwards corresponding to the valve opening 170 of the 4th through hole 182 on door sheet 17, makes the gas in the second outlet chamber 184 can be by 4th through hole 182 is passed down to any device (not shown) exporting 19 and being connected with outlet 19, and then to reach collection pressure The purpose of operation.Finally, the most as seen in figure 7e, shift up when the resonance plate 12 of minitype gas transmitting device 1A resonates, and then Make the gas in the central recess 111 of inlet plate 11 lower surface can be flowed into the first chamber by the hollow bore 120 of resonance plate 12 In 121, then it is transmitted continuously to downwards micro valve device via the space 135 between the support 132 of piezo-activator 13 In 1B, then it is to increase downwards due to its gas pressure, therefore gas still can be constantly via the air collecting chamber of micro valve device 1B Room the 166, second outlet chamber 184 of the 162, second through hole the 164, first outlet chamber and the 4th through hole 182 and flow to outlet 19 and with any devices of being connected of outlet 19, this collection pressure operation is can be via the pressure differential in extraneous atmospheric pressure and device To drive it, but it is not limited.

When the pressure that the device (not shown) being connected with outlet 19 is internal is more than extraneous pressure, then micro pressure power Device 1 is that the flowing mode of making of the operation that can carry out blood pressure lowering or release as shown in Figure 8, its blood pressure lowering or release is mainly such as front institute State, can make in gas no longer input set gas chamber 162 by the gas transmission amount of regulation and control minitype gas transmitting device 1A, now, Gas will input to the second outlet chamber 184 from the 4th through hole 182 being connected with outlet 19 so that the second outlet chamber The volumetric expansion of 184, and then promote flexual valve sheet 17 to be bent upwards deformation, and the most smooth, be resisted against the first outlet In the protuberance structure 167 of chamber 166, and making the valve opening 170 of valve sheet 17 close, the gas in the i.e. second outlet chamber 184 is not Can adverse current in the first outlet chamber 166；And, the gas in the second outlet chamber 184 is can to flow via connection runner 185 To the second release chamber 183, more outwards it is flow to pressure relief vent 186 by the 3rd through hole 181 and sentence and carry out release operation；So may be used Discharge and blood pressure lowering by the gas in the device that the unidirectional gas transmission operation of this micro valve structure 1B will be connected with outlet 19, Or be completely exhausted out and complete release operation.

In sum, micro valve device provided by the utility model is by gas collection plate, valve sheet and exit plate institute heap Folded form, the gas collection chamber that has in utilizing gas collection plate, the first through hole, the second through hole, the first release chamber and first The structures such as outlet chamber, so that gas is transmitted downwards by gas collection chamber, and are flow to respectively by the first through hole and the second through hole In first release chamber and the first outlet chamber, then through valve sheet one-way cock design, make gas with one way flow, And then gas can be passed down to the second outlet chamber, and it is sent to and exports in any device being connected, to carry out collection pressure Operation；And when blood pressure lowering to be carried out or release, then the gas of the minitype gas transmitting device that regulation and control are connected with micro valve device Transmission quantity, and make gas can by with the device that is connected of outlet transmits to the second outlet chamber, then by connect runner by transmission To the second release chamber, and flowed out by pressure relief vent, and then to reach to make gas promptly transmit, and can reach quiet simultaneously Effect, more can make the volume of micro valve device reduce and slimming, and then make its minitype gas power set being suitable for reach Become light comfortable portable purpose, and can be widely used in medical device and relevant device.Therefore, this utility model The great industrial utilization of micro valve device, whence file an application in accordance with the law.

Even if this utility model described in detail by above-described embodiment and can by be familiar with these those skilled in the art appoint execute craftsman think and be Modify as all, the most neither take off attached claim such as and be intended to protector.

Claims (14)

1. a micro valve device, it is adaptable to micro pressure power set, it is characterised in that comprising:

One valve sheet, has a valve opening, and this valve sheet has the thickness between 0.1mm-0.3mm；

One gas collection plate, has one first through hole, one second through hole, one first release chamber and one first outlet chamber, with And there is a reference surface, this first outlet chamber has a protuberance structure, with to should this valve opening of valve sheet and arrange, have Profit this valve opening of conflict forms a prestressing effect, and this valve opening completely enclosed, the height of this protuberance structure is higher than this base of this gas collection plate Quasi-surface, this first through hole is connected with this first release chamber, and this second through hole is connected with this first outlet chamber； And

One exit plate, has one the 3rd through hole, one the 4th through hole, one second release chamber, one second outlet chamber and extremely A few position limiting structure, and there is a reference surface, the 3rd through hole end has a protuberance structure, the height of this protuberance structure Degree is higher than this reference surface of this exit plate, and favorably this valve sheet is quickly conflicted and formed a prestressing effect, and the completely enclosed 3rd Through hole, the 3rd through hole is corresponding to this first through hole of this gas collection plate, and is connected with this second release chamber, and this is the years old Four through holes correspond to this second through hole, and are connected with this second outlet chamber, and this at least one position limiting structure is arranged at this Second pressure-releasing cavity is indoor, the height of this position limiting structure between 0.3mm-0.5mm, and this second release chamber and this second There is between outlet chamber a connection runner；

Wherein, above-mentioned this gas collection plate, this valve sheet and this exit plate sequentially corresponding stacking arranges location, and this valve sheet is arranged at Between this gas collection plate and this exit plate, and this valve opening of this valve sheet is correspondingly arranged in this second through hole and the 4th through hole Between, gas transmits downwards to this micro valve device from a minitype gas transmitting device of these micro pressure power set Time, this first through hole and this second through hole enter in this first release chamber and this first outlet chamber, and import gas Body carries out collection pressure operation in being flowed into the 4th through hole by the valve opening of this valve sheet, collect and calm the anger body more than importing gas, and collection is calmed the anger Body flows towards this second outlet chamber from the 4th through hole, so that this valve sheet displacement, and make the valve opening of this valve sheet support Close in this gas collection plate, and this at least one position limiting structure auxiliary supports this valve sheet, to prevent this valve sheet from subsiding, collects simultaneously It is indoor that body of calming the anger can flow to this second pressure-releasing cavity along connection runner in this second outlet chamber, now indoor in the second pressure-releasing cavity This valve sheet displacement, collects physical ability of calming the anger and is flowed out by the 3rd through hole, to carry out release operation.

2. micro valve device as claimed in claim 1, it is characterised in that the thickness of this valve sheet is 0.2mm.

3. micro valve device as claimed in claim 1, it is characterised in that the height of this position limiting structure is 0.4mm.

4. micro valve device as claimed in claim 1, it is characterised in that this of this first outlet chamber of this gas collection plate is convex Portion's structure has the height between 0.45mm-0.55mm.

5. micro valve device as claimed in claim 4, it is characterised in that the height of this protuberance structure of this first outlet chamber Degree is 0.5mm.

6. micro valve device as claimed in claim 1, it is characterised in that this protuberance of the 3rd through hole of this exit plate Structure has the height between 0.45mm-0.55mm.

7. micro valve device as claimed in claim 6, it is characterised in that the height of this protuberance structure of the 3rd through hole For 0.5mm.

8. micro valve device as claimed in claim 1, it is characterised in that this gas collection plate has more an air collecting chamber in a surface Room, and this gas collection chamber is connected with this first through hole and this second through hole.

9. micro valve device as claimed in claim 1, it is characterised in that this first release chamber and this first outlet chamber It is arranged on another surface of this relative gas collection chamber of this gas collection plate.

10. micro valve device as claimed in claim 1, it is characterised in that this second release chamber and this second outlet plenum Room is arranged on a surface of this exit plate, relative with this first release chamber of this gas collection plate and this first outlet chamber respectively Should.

11. 1 micro valve devices, it is adaptable to micro pressure power set, including:

One gas collection plate, has at least two through holes and at least two chambers, and a gas collection chamber；

One valve sheet, has a valve opening；And

One exit plate, has at least two through holes and at least two chambers；

Wherein, above-mentioned gas collection plate, valve sheet and exit plate sequentially corresponding stacking arranges location, and gas transmits from gas collection chamber To this micro valve device, at least two through holes being respectively provided with through this gas collection plate, this exit plate and at least two chambers, with This valve opening correspondence making this valve sheet in response to the one-way flow of gas opens or closes, to carry out collection pressure or release operation.

12. micro valve devices as claimed in claim 11, it is characterised in that this gas collection plate have one first through hole, one Second through hole, one first release chamber and one first outlet chamber, this first through hole is connected with this first release chamber, This second through hole and the first outlet chamber are connected.

13. micro valve devices as claimed in claim 12, it is characterised in that this exit plate have one the 3rd through hole, one Between 4th through hole, one second pressure-releasing cavity and one second outlet chamber wherein this second release chamber and this second outlet chamber There is a connection runner.

14. micro valve devices as claimed in claim 13, it is characterised in that this valve sheet is arranged at this gas collection plate and this goes out Between oralia, and this valve opening of this valve sheet is correspondingly arranged between this second through hole and the 4th through hole, and gas is from being somebody's turn to do When minitype gas transmitting device transmits downwards to this micro valve device, this first through hole and this second through hole enter In this first release chamber and this first outlet chamber, and import gas and flowed into the 4th through hole by this valve opening of this valve sheet Inside carry out collection pressure operation, collect body of calming the anger and be more than importing gas, collect body of calming the anger and flow towards this second outlet chamber from the 4th through hole Dynamic, so that this valve sheet displacement, and make this valve opening of this valve sheet be resisted against this gas collection plate and close, collect body of calming the anger in this simultaneously This second pressure-releasing cavity can be flow to along connection runner indoor, now in the second pressure-releasing cavity this valve sheet position indoor in second outlet chamber Move, collect physical ability of calming the anger and flowed out by the 3rd through hole, carry out release operation.