CN208203524U - Miniature conveying device - Google Patents

Miniature conveying device Download PDF

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Publication number
CN208203524U
CN208203524U CN201820760280.XU CN201820760280U CN208203524U CN 208203524 U CN208203524 U CN 208203524U CN 201820760280 U CN201820760280 U CN 201820760280U CN 208203524 U CN208203524 U CN 208203524U
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China
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chamber
plate
gas
release
hole
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CN201820760280.XU
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Chinese (zh)
Inventor
莫皓然
黄启峰
韩永隆
郭俊毅
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Microjet Technology Co Ltd
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Microjet Technology Co Ltd
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Abstract

A kind of miniature conveying device, it include: inlet plate, resonance plate, piezoelectric actuator and the gas collection plate for stacking setting, the first chamber wherein formed between resonance plate and piezoelectric actuator with chamber spacing, it is accurate to control chamber spacing to ensure that first chamber has enough spaces, when being driven piezoelectric actuator, gas is imported by inlet plate, is entered in first chamber through resonance plate, it is further continued for transmitting, continues pushing out gas to form barometric gradient runner;And a minisize fluid control device is formed with a micro valve device.Micro valve device includes the valve sheet and exit plate for stacking setting;When gas is transmitted in micro valve device from minisize fluid control device, in response to gas one-way flow and open or close the valve opening of valve sheet, in order to carrying out collection pressure or release.

Description

Miniature conveying device
Technical field
This case is about a kind of miniature conveying device, espespecially a kind of micro ultrathin and mute miniature conveying device.
Background technique
The either industry such as medicine, computer technology, printing, energy in each field at present, product is towards sophistication and micro- Smallization direction is developed, wherein the fluid delivery structure that the products such as micro- side Pu, sprayer, ink gun, industrial printing devices are included For its key technology, therefore how innovation structure to be borrowed to break through its technical bottleneck, for the important content of development.
For example, in medicinal industry, many instruments or equipment needed using Pneumatic pressure power driving are usually adopted to pass System motor and air pressure valve come reach its gas conveying purpose.However, being limited to the structure of these conventional motors and gas trap Limitation so that the volume of single unit system can not reduce, that is, be difficult to reality so that such instrument and equipment is difficult to reduce its volume The target being now thinned, therefore can not also install and set on portable apparatus or be used cooperatively with portable apparatus, convenience is insufficient. In addition, multiple conventional motor and gas trap can also generate noise when actuation, enables user impatient, cause using upper inconvenience It is sharp and uncomfortable.
However, micromation can promote the distance between each element of the difficulty that group is loaded onto, especially minisize fluid device all It influences whether efficiency of transmission, therefore, how can be accurately controlled element spacing while micromation and actually compel to be essential at present It solves the problems, such as.
Utility model content
The main purpose of this case is to provide a kind of miniature conveying suitable for portable or wearable instrument or equipment Device.
In order to achieve the above object, a broader state sample implementation of this case is to provide a miniature conveying device, comprising: an air inlet Plate has an at least air inlet, at least one confluence round and a confluence chamber, and an at least air inlet is for importing gas, this is extremely One end of few confluence round is connected to an at least air inlet, the other end and the confluence chamber, imports the air inlet with guidance The gas in hole converges into the confluence chamber;One resonance plate has a hollow bore, the confluence chamber of the corresponding inlet plate;One Piezoelectric actuator a, comprising: suspension board, the suspension board have between 4mm to the diameter between 8.5mm, which has one First surface and a second surface;One outline border around the periphery for being set to the suspension board, and has one to assemble surface and an outline border Bottom surface;An at least bracket is connected between the suspension board and the outline border, flexibly supports the suspension board to provide;And One piezoelectric element is attached at the first surface of the suspension board;Wherein, the above-mentioned resonance plate is stacked in the piezoelectric actuator This of the outline border assembles surface, which is stacked in the resonance plate, make the piezoelectric actuator, the resonance plate, the inlet plate according to Ordered pair should stack setting, and have a chamber spacing to form a first chamber between the resonance plate and the piezoelectric actuator, make When the piezoelectric actuator is driven, gas is imported by an at least air inlet for the inlet plate, is converged through at least one confluence round Collection passes through the hollow bore of the resonance plate, to enter in the first chamber, then by the piezoelectric actuator to the confluence chamber An at least bracket between a gap be transmitted to the gas collection plate downwards, with lasting pushing out gas.
Detailed description of the invention
Figure 1A is the positive decomposition texture schematic diagram for the minisize fluid control device that this case is preferred embodiment.
Figure 1B is the positive combination structural schematic diagram of minisize fluid control device shown in figure 1A.
Fig. 2A is the back side decomposition texture schematic diagram of minisize fluid control device shown in figure 1A.
Fig. 2 B is the back side combining structure schematic diagram of minisize fluid control device shown in figure 1A.
Fig. 3 A is the positive combination structural schematic diagram of the piezoelectric actuator of minisize fluid control device shown in figure 1A.
Fig. 3 B is the back side combining structure schematic diagram of the piezoelectric actuator of minisize fluid control device shown in figure 1A.
Fig. 3 C is the schematic diagram of the section structure of the piezoelectric actuator of minisize fluid control device shown in figure 1A.
Fig. 4 is the diagrammatic cross-section of the miniature conveying device of this case.
Fig. 5 A to Fig. 5 C is the local illustrative view of miniature conveying device shown in Fig. 4.
Fig. 6 A is that the gas collection plate of minisize fluid control device shown in figure 1A and the collection of micro valve device press actuation signal Figure.
Fig. 6 B is that the release actuation of the gas collection plate and micro valve device of minisize fluid control device shown in figure 1A is illustrated Figure.
Fig. 7 A to Fig. 7 D is that the collection of minisize fluid control device shown in figure 1A presses illustrative view.
Fig. 8 is the decompression or release illustrative view of minisize fluid control device shown in figure 1A.
Description of symbols
1: minisize fluid control device
1A: miniature conveying device
1B: micro valve device
11: inlet plate
11a: the second surface of inlet plate
11b: the first surface of inlet plate
110: air inlet
111: confluence chamber
112: confluence round
12: resonance plate
12a: movable part
12b: fixed part
120: hollow bore
121: first chamber
13: piezoelectric actuator
130: suspension board
130a: second surface
130b: first surface
130c: protrusion
130d: central part
130e: peripheral part
130f: protrusion top surface
131: outline border
131a: surface is assembled
131b: outline border bottom surface
132: bracket
133: piezoelectric element
134,151: conductive connecting pin
135: gap
141,142: insulating trip
15: conductive sheet
16: gas collection plate
16a: accommodating space
160: surface
161: reference surface
162: gas collection chamber
163: the first through holes
164: the second through holes
165: the first release chambers
166: first outlet chamber
167,181a: protrusion structure
168: side wall
17: valve sheet
170: valve opening
171: positioning hole
18: exit plate
180: reference surface
181: release through-hole
182: outlet through hole
183: the second release chambers
184: second outlet chamber
185: connection runner
_
187: second surface
188: position limiting structure
19: outlet
G: chamber spacing
D: the vibration displacement of piezoelectric actuator
X: the vibration displacement of piezoelectric actuator and the difference of chamber spacing
Specific embodiment
The some exemplary embodiments for embodying this case features and advantages will describe in detail in the explanation of back segment.It should be understood that This case can have various variations in different aspects, all not depart from the range of this case, and explanation therein and diagram It is inherently illustrated as being used, and nand architecture is in limitation this case.
The minisize fluid control device 1 of this case is to can be applied to the works such as the raw skill of medicine, the energy, computer technology or printing Industry, in order to transmit gas, but not limited to this.Please refer to this case shown in Figure 1A, Figure 1B, Fig. 2A, Fig. 2 B and 7A to 7D figure Minisize fluid control device 1 be to be formed as combined by miniature conveying device 1A and micro valve device 1B, wherein miniature defeated Send device 1A that there is inlet plate 11, resonance plate 12, piezoelectric actuator 13, insulating trip 141,142, conductive sheet 15 and gas collection plate 16 etc. Structure.Piezoelectric actuator 13 corresponds to resonance plate 12 and is arranged, and make inlet plate 11, resonance plate 12, piezoelectric actuator 13, absolutely Embolium 141, conductive sheet 15, another insulating trip 142, gas collection plate 16 etc. sequentially stack setting.The piezoelectric actuator 13 is hanged by one Kickboard 130, an outline border 131, at least a bracket 132 and a piezoelectric element 133 assemble jointly.Micro valve device 1B Comprising a valve sheet 17 and an exit plate 18, but not limited to this.And in this present embodiment, as shown in Figure 1A, gas collection plate 16 It is not only single plate structure, can also has the frame structure of side wall 168 for periphery, and the length and the width ratio are Between 0.53 times to 1.88 times.The plate common definition of side wall 168 and its bottom that the periphery is constituted goes out an accommodating space 16a is set in accommodating space 16a with for the piezoelectric actuator 13, therefore 1 group of minisize fluid control device when this case installs Cheng Hou, then its front schematic view is as shown in Figure 1B and Fig. 7 A to Fig. 7 D shown in, it is seen that the miniature conveying device 1A be with it is miniature Valving 1B is corresponding to be assembled, that is, the valve sheet 17 of micro valve device 1B and exit plate 18 are sequentially to stack to set It sets and the gas collection plate 16 for being positioned at the miniature conveying device 1A forms.And the schematic rear view that it is completed then visible exit plate Release through-hole 181 on 18 and outlet 19, outlet 19 connect with a device (not shown), release through-hole 181 then for so that Gas discharge in micro valve device 1B, up to the effect of release.It is filled by this miniature conveying device 1A and micro valve The assembling setting of 1B is set, so that gas is from 110 air inlet of an at least air inlet on the inlet plate 11 of miniature conveying device 1A, and thoroughly The actuation of piezoelectric actuator 13 is crossed, and flows through multiple pressure chamber (not shown) and continues to transmit, and then gas can be made in miniature valve One-way flow in door gear 1B, and by acute build up of pressure in the device (not shown) being connected with the outlet 19 of micro valve device 1B In, and when release need to be carried out, then regulate and control the output quantity of miniature conveying device 1A, makes gas going out via micro valve device 1B Release through-hole 181 on oralia 18 and be discharged, to carry out release.
It please continue shown in A refering to fig. 1 and Fig. 2A, the inlet plate 11 of miniature conveying device 1A is with first surface 11b, second Surface 11a and at least an air inlet 110, in this present embodiment, the quantity of air inlet 110 be 4, but not limited to this, It is through the first surface 11b and second surface 11a of inlet plate 11, mainly to make gas comply with atmospheric pressure from outside device Effect and from this, at least an air inlet 110 is flowed into miniature conveying device 1A.And again as shown in Figure 2 A, the first table of inlet plate 11 There is at least one confluence round 112, at least an air inlet 110 is corresponding to this with 11 second surface 11a of inlet plate on the 11b of face Setting.In this present embodiment, converge round 112 quantity it is corresponding with air inlet 110, quantity be 4, but not as Limit, wherein being there is confluence chamber 111, and the chamber 111 that converges is and busbar connector at the center exchange of multiple confluence round 112 Hole 112 is connected, and can be concentrated to confluence chamber for guide and converge into the gas of confluence round 112 from air inlet 110 whereby 111 transmitting.It is so that in this present embodiment, inlet plate 11 has integrally formed air inlet 110, confluence round 112 and confluence chamber Room 111, and it is temporary in confluence 111 supplied gas of chamber.In some embodiments, the material of inlet plate 11 is can be but unlimited serve as reasons One stainless steel material is constituted, and its thickness is between 0.4mm between 0.6mm, and its preferred values is 0.5mm, but not with this It is limited.It is identical as multiple confluence depth of round 112 by the depth of confluence chamber 111 in other embodiments, and converge The preferred values of the depth of chamber 111 and the confluence round 112 are between 0.2mm between 0.3mm, and but not limited to this.Resonance Piece 12 is made of a flexible materials, and but not limited to this, and is pair in having a hollow bore 120 on resonance plate 12 Should in the first surface 11b of inlet plate 11 confluence chamber 111 and be arranged so that gas circulate.In other embodiments, altogether The piece 12 that shakes is can be made of a copper material, and but not limited to this, and its thickness is between 0.03mm between 0.08mm, and its Preferred values are 0.05mm, but are also not limited.
Please refer to shown in Fig. 3 A, Fig. 3 B and Fig. 3 C, piezoelectric actuator 13 include a suspension board 130, an outline border 131, An at least bracket 132 and a piezoelectric element 133, wherein piezoelectric element 133 is attached at the first surface 130b of suspension board 130, Deformation is generated to drive 130 bending vibration of suspension board to apply voltage, and suspension board 130 is a circular kenel, has center Portion 130d and peripheral part 130e, be with when piezoelectric element 133 is driven by voltage, suspension board 130 can by central part 130d to Peripheral part 130e bending vibration.At least a bracket 132 is connected between suspension board 130 and outline border 131, in the present embodiment In, at least a bracket 132 is connected between suspension board 130 and outline border 131, and two-end-point is to be connected to outline border 131, suspension board 130, to provide resilient support, and at least between a bracket 132, suspension board 130 and outline border 131 with more extremely A few gap 135, circulates to supplied gas.Outline border 131 is to surround the outside for being set to suspension board 130, and have a convex If conductive connecting pin 134, to for electrical connection be used, but not limited to this;In addition, outline border 131 has one to assemble surface 131a And an outline border bottom surface 131b, it assembles surface 131a and is arranged on for resonance plate 12.
From the above, the piezoelectric actuator 13 of this case is the piezoelectric actuator of a spill, in this present embodiment, suspension board 130 second surface 130a and the surface 131a that assembles of outline border 131 form non-co-planar structure, the second table of suspension board 130 130a its level in face assembles surface 131a lower than outline border 131, and the first surface 130b of suspension board 130 is also lower than outline border 131 Outline border bottom surface 131b, make piezoelectric actuator 13 present a central concave dish configuration;In addition, the second table of suspension board 130 A chamber spacing g is maintained between face 130a and resonance plate 12, chamber spacing g can be by being formed in round suspension board 130 and outline border 131 Between an at least bracket 132 adjustment.
In this present embodiment, the second surface 130a of suspension board 130 have more a protrusion 130c, protrusion 130c can be but A circular protrusions structure it is not limited to, and the height of protrusion 130c is between 0.02mm between 0.08mm, and preferred values are 0.03mm, 0.4~0.5 times of size of the diameter of a diameter of suspension board 130, but not limited to this.Please refer to Fig. 3 A And it is non-co-planar that the protrusion top surface 130f of Fig. 3 C, the protrusion 130c of suspension board 130, which are with the surface 131a that assembles of outline border 131, In this present embodiment, the protrusion top surface 130f of its protrusion of suspension board 130 130c assembles surface 131a lower than outline border 131, makes convex A chamber spacing g (as shown in Figure 4) is formed between portion top surface 130f and resonance plate 12, chamber spacing g can be by an at least bracket 132 To adjust.Chamber spacing g will will affect the laser propagation effect of minisize fluid control device 1, thus maintain fixed chamber spacing g for It is particularly significant that minisize fluid control device 1 provides stable efficiency of transmission.The round suspension board 130 of the piezoelectric actuator 13 of this case Using impact style, make it to lower recess, so that one space of the recess formation of suspension board 130 of piezoelectric actuator 13 obtains and resonance plate 12 constitute an adjustable chamber spacing g.It adopts through by the round suspension board 130 of above-mentioned piezoelectric actuator 13 with shaped depression structure At the structural improvement of a first chamber 121, required chamber spacing g is able to the round suspension board through adjustment piezoelectric actuator 13 The 130 recess distances formed effectively simplify the structure design for adjusting chamber spacing g to complete, while also reaching simplified system Journey shortens the advantages that processing time.With continued reference to Fig. 3 B and Fig. 3 C, piezoelectric element 133 is attached at the first surface of suspension board 130 At 130b.In some embodiments, suspension board 130, at least a bracket 132 and outline border 131 are can be integrally formed structures, And can be made of a metal plate, such as can be made of stainless steel material, but not limited to this.And in some embodiments, 130 diameter of suspension board is between 4mm between 8.5mm, and its preferred values can but not limited to this for 8mm.As for the thickness of outline border 131 Degree is between 0.2mm between 0.4mm, and its preferred values is 0.3mm, and but not limited to this.
Again in other embodiments, piezoelectric element 133 also be circular piezoelectric element, thickness be between 0.05mm extremely Between 0.3mm, and its preferred values is 0.10mm, and the area of piezoelectric element 133 is not more than suspension board 130,.
In addition, A refering to fig. 1 and Fig. 2A please be continue, in miniature conveying device 1A with more insulating trip 141, conductive sheet 15 and Another insulating trip 142 is sequentially to be correspondingly arranged under piezoelectric actuator 13, and its form approximately corresponds to piezoelectric actuator The form of 13 outline border 131.In some embodiments, insulating trip 141,142 is made of the material that can be insulated, such as: modeling Glue, but not limited to this, is used with carrying out insulation;In other embodiments, conductive sheet 15 is made of conductive material, Such as: metal, but not limited to this, conduct being used, and in this present embodiment, also settable one leads on conductive sheet 15 Electric pin 151, conduct being used.
Referring to Fig. 4, after inlet plate 11, resonance plate 12 are with the sequentially corresponding assembling of piezoelectric actuator 13, then in resonance plate The chamber of a confluence gas can be collectively formed at 12 hollow bore 120 with inlet plate 11 thereon, and in resonance plate 12 and pressure First chamber 121 is more formed between electric actuator 13, is configured to temporarily store gas, and first chamber 121 is through in resonance plate 12 Hollow bore 120 and be connected with the chamber at the confluence chamber 111 of 11 first surface 11b of inlet plate, and the two of first chamber 121 Side then by the gap 135 between an at least bracket 132 for piezoelectric actuator 13 and be set to miniature valve of the gas collection plate 16 under it Door gear 1B is connected (as shown in 7A figure).
It please continue refering to Fig. 5 A to Fig. 5 C, when the miniature conveying device 1A actuation of minisize fluid control device 1, mainly by pressing Electric actuator 13 makes suspension board 130 carry out the reciprocating vibration of vertical direction by voltage actuation and with an at least bracket 132 for fulcrum It is dynamic.As shown in Figure 5A, when piezoelectric actuator 13 is vibrated downwards by voltage actuation, since resonance plate 12 is for light, thin piece Shape structure is so that when piezoelectric actuator 13 vibrates, resonance plate 12 also can carry out vertical reciprocating vibration therewith resonating, i.e., The part for corresponding to the confluence chamber 111 of the inlet plate 11 for resonance plate 12 also can bending vibration deformation therewith, the i.e. resonance plate 12 parts for corresponding to the confluence chamber 111 of the inlet plate 11 are movable part 12a for resonance plate 12, are to work as piezoelectric actuator 13 when being bent downwardly vibration, at this time the movable part 12a of resonance plate 12 can because of the bringing into of fluid, push and piezoelectric actuator 13 shakes Dynamic drive, and as piezoelectric actuator 13 is bent downwardly vibration deformation, then gas is by at least air inlet on inlet plate 11 110 enter, and through at least one confluence round 112 of its first surface 11b to be pooled at the confluence chamber 111 in its center, It flows downwardly into again via the hollow bore 120 being correspondingly arranged on resonance plate 12 with confluence chamber 111 into first chamber 121, Afterwards, due to the drive vibrated by piezoelectric actuator 13, resonance plate 12 also can carry out vertical reciprocating vibration therewith resonating, ask With continued reference to Fig. 5 B, piezoelectric actuator 13 is lifted upwards, and the movable part 12a of resonance plate 12 contacts at the piezoelectricity shifted up at this time On the protrusion 130c of the suspension board 130 of actuator 13, make the region and 12 two sides of resonance plate other than the protrusion 130c of suspension board 130 Fixed part 12b between first chamber 121 reduce, and by the deformation of this resonance plate 12, to compress the body of first chamber 121 Product, and 121 middle flow space of first chamber is closed, promote the gas in it to push and flowed to two sides, and then is caused by piezoelectricity It moves the gap 135 between an at least bracket 132 for device 13 and passes through flowing downwards.Again as shown in Figure 5 C, which is pressurized Vibration that electric actuator 13 is lifted upwards and resonate upwards, the movable part 12a of resonance plate 12 makes to converge also to upward position Gas in chamber 111 is flowed into first chamber 121 by the hollow bore 120 of resonance plate 12 again, and via piezoelectric actuator Gap 135 between a 13 at least bracket 132 and pass through the miniature conveying device 1A of outflow downwards.It is repeated continuously the above actuation Step can be penetrated to lower conveying after entering gas constantly from air inlet 110, to achieve the purpose that transmit gas.By upper State sample implementation is stated as it can be seen that when resonance plate 12 carries out vertical reciprocating vibration, it can be by it between piezoelectric actuator 13 Chamber spacing g is to increase the maximum distance of its vertical displacement, and in other words, increasing setting chamber spacing g between two structures can make Resonance plate 12 can produce upper and lower displacement by a larger margin when resonance, and wherein the vibration displacement of piezoelectric actuator is d, with chamber The difference of spacing g is x, i.e. x=g-d.As x=1 to 5um, the 1 maximum output air pressure of minisize fluid control device be can reach 350mmHg, above-mentioned numerical value be operating frequency be 17K between 20K, operation voltage be between ± 10V to ± 20V.In this way, Barometric gradient is generated in the runner design through this miniature conveying device 1A, makes gas flow at high rates, and penetrate runner disengaging side To resistance difference, gas is transmitted to outlet side by suction side, and in the state that outlet side has air pressure, still have the ability continue Pushing out gas, and can reach mute effect.
In addition, the vertical reciprocating type vibration frequency of resonance plate 12 can be with piezoelectric actuator 13 in some embodiments Vibration frequency is identical, i.e., the two can be simultaneously upwards or downward simultaneously, is that can appoint according to situation is actually applied and apply variation, not To be limited shown in the present embodiment as flowing mode.
Please refer to shown in Figure 1A, Fig. 2A and Fig. 6 A, Fig. 6 B, the micro valve of the minisize fluid control device 1 of this case Device 1B is sequentially to be stacked by valve sheet 17 and exit plate 18, and the gas collection plate 16 of the miniature conveying device 1A that arranges in pairs or groups is transported Make.
In this present embodiment, gas collection plate 16 has a surface 160 and a reference surface 161, is recess on surface 160 with shape At a gas collection chamber 162, wherein for the setting of piezoelectric actuator 13, the gas transmitted downwards by miniature conveying device 1A then temporarily stores Product is in this gas collection chamber 162.It is that there are multiple through holes in gas collection plate 16, it includes have the first through hole 163 and second pass through One end of perforation 164, the first through hole 163 and the second through hole 164 is connected with gas collection chamber 162, and the other end is then distinguished With on the reference surface 161 of gas collection plate 16 the first release chamber 165 and first outlet chamber 166 be connected.And first A protrusion structure 167 is further added at outlet chamber 166, may be, for example, a cylindrical structure, and but not limited to this, protrusion knot The height of structure 167 is above the reference surface 161 of gas collection plate 16, and the height of protrusion structure 167 between 0.3mm to 0.55mm it Between, and its preferred values is 0.4mm.
Exit plate 18 includes a release through-hole 181, an outlet through hole 182, a reference surface 180 and a second surface 187, wherein release through-hole 181, outlet through hole 182 are through the reference surface 180 and second surface 187 of exit plate 18, benchmark One second release chamber 183 of recess and a second outlet chamber 184, release through-hole 181 are located at the second release chamber on surface 180 183 central parts, and it is connected to runner 185 with more one between the second release chamber 183 and second outlet chamber 184, to Supplied gas circulation, and one end of outlet through hole 182 is connected with second outlet chamber 184, the other end is then connected with outlet 19, In this present embodiment, outlet 19 be can be connected with a device (not shown), such as: press machine, but not limited to this.
On valve sheet 17 have a valve opening 170 and multiple positioning holes 171, the thickness of valve sheet 17 between 0.1mm extremely Between 0.3mm, and its preferred values is 0.2mm.
When valve sheet 17 positions assembling between gas collection plate 16 and exit plate 18, the release through-hole 181 of exit plate 18 is right The first release chamber 165 of the gas collection plate 16 should be corresponded in the first through hole 163 of gas collection plate 16, the second release chamber 183, The second outlet chamber 184 corresponds to the first outlet chamber 166 of gas collection plate 16, and valve sheet 17 is set to gas collection plate 16 and goes out Between oralia 18, the first release chamber 165 of barrier is connected to the second release chamber 183, and the valve opening 170 of valve sheet 17 is set to Between second through hole 164 and the outlet through hole 182, and valve opening 170 is and the first outlet chamber 166 positioned at gas collection plate 16 Protrusion structure 167 is correspondingly arranged, by the design of this single valve opening 170, so that gas can reach unidirectional in response to its pressure difference The purpose of flowing.
181 one end of release through-hole of exit plate 18 can further add protrusion and a protrusion structure 181a of formation, example again It such as can be but not be limited to cylindrical structure, the height of protrusion structure 181a is between 0.3mm between 0.55mm, and its preferred values is 0.4mm, and this protrusion structure 181a penetrates improvement to increase its height, the height of protrusion structure 181a is above exit plate 18 Reference surface 180 to reinforce contradicting valve sheet 17 rapidly and close release through-hole 181, and reaches prestressing conflict effect The effect being fully sealed;And exit plate 18 is with more an at least position limiting structure 188, the height of position limiting structure 188 0.32mm, by taking the present embodiment as an example, it and is an annular block knot that position limiting structure 188, which is set in the second release chamber 183, Structure, but not limited to this, predominantly when micro valve device 1B carry out collection pressure operation when, be provided with Auxiliary support valve sheet 17 it With to prevent valve sheet 17 from collapsing, and can making valve sheet 17 can more quickly opening and closing of fault.
It is main as shown in Figure 6A when micro valve device 1B collection presses actuation, it is that can be filled in response to from miniature conveying Pressure provided by the gas that 1A is transmitted downwards is set, and or when extraneous atmospheric pressure is greater than the device connecting with outlet 19 When the internal pressure of (not shown), then gas can pass through respectively from the gas collection chamber 162 in the gas collection plate 16 of miniature conveying device 1A First through hole 163 and the second through hole 164 and flow downwardly into the first release chamber 165 and first outlet chamber 166, this When, downward gas pressure is so that flexible valve sheet 17 is bent downwardly deformation and then make the volume of the first release chamber 165 Increase, and corresponds to end that is smooth downwards and being resisted against release through-hole 181 at the first through hole 163, and then outlet can be closed The release through-hole 181 of plate 18, therefore will not be flowed out from release through-hole 181 in the gas in the second release chamber 183.Certainly, originally Embodiment adds the design of a protrusion structure 181a using 181 end of release through-hole, to reinforce supporting valve sheet 17 rapidly Touching and closing release through-hole 181, and achieve the effect that prestressing conflict effect is fully sealed, while and logical through release is located on The position limiting structure 188 on 181 periphery of hole, with Auxiliary support valve sheet 17, so that it will not generate to collapse.On the other hand, due to gas It is to be flowed downwardly into first outlet chamber 166 from the second through hole 164, and correspond to the valve at first outlet chamber 166 Piece 17 is also bent downwardly deformation, so that its corresponding valve opening 170 is opened downwards, gas can then be passed through from first outlet chamber 166 It is flowed into second outlet chamber 184 by valve opening 170, and is flow to outlet 19 by outlet through hole 182 and be connected with outlet 19 Device (not shown) in, whereby with to the device carry out collection pressure actuation.
It please continue refering to Fig. 6 B, when micro valve device 1B carries out release, being can be by the miniature conveying device 1A of regulation Gas transport amount, make in gas no longer input set gas chamber 162, or inside the device that connect with outlet 19 is (not shown) When pressure is greater than extraneous atmospheric pressure, then micro valve device 1B can be made to carry out release.At this point, gas will connect with outlet 19 certainly The outlet through hole 182 connect is input in second outlet chamber 184, so that the volume expansion of second outlet chamber 184, and then promote Flexible valve sheet 17 is bent upwards deformation, and upwards it is smooth, be resisted against on gas collection plate 16, therefore the valve opening 170 of valve sheet 17 It can be closed because being resisted against gas collection plate 16.Certainly, in the present embodiment, a protrusion structure is added using first outlet chamber 166 167 design is bent upwards deformation for flexible valve sheet 17 and more rapidly contradicts, valve opening 170 is made to be easier to reach a prestressing Conflict effect attaches the closed state of sealing completely, and therefore, when being in original state, the valve opening 170 of valve sheet 17 can be because tight It sticks to and peaks at the protrusion structure 167 and close, then the gas in second outlet chamber 184 will not be countercurrently to first outlet chamber In 166, to achieve the effect that preferably to prevent gas from leaking outside.And the gas in second outlet chamber 184 be can be via connection Runner 185 and flow in the second release chamber 183, and then make the volume expanded of the second release chamber 183, and make to correspond to second The valve sheet 17 of release chamber 183 is equally bent upwards deformation, is not supported due to valve sheet 17 be closed in release through-hole 181 at this time End, therefore release through-hole 181 is i.e. in the open state, i.e. gas in the second release chamber 183 can be outside by release through-hole 181 Stream carries out release operation.Certainly, the present embodiment, the protrusion structure 181a added using 181 end of release through-hole or transmission The position limiting structure 188 being set in the second release chamber 183 allows flexible valve sheet 17 to be bent upwards deformation more rapidly, more It is advantageous to be detached from the state for closing release through-hole 181.In this way, the device that can will be connect with outlet 19 by this unidirectional release operation Gas in (not shown) is discharged and is depressured, or is completely exhausted out and completes release operation.
Please refer to shown in Figure 1A, Fig. 2A, Fig. 4, Fig. 6 A to Fig. 6 B and Fig. 7 A to Fig. 7 D, minisize fluid control device 1 Formed as combined by miniature conveying device 1A and micro valve device 1B, wherein miniature conveying device 1A be it has been observed that according to Sequence is by inlet plate 11, resonance plate 12, piezoelectric actuator 13, insulating trip 141, conductive sheet 15, another insulating trip 142 and gas collection plate 16 Equal build stacks assembles and are positioned, and are with chamber spacing g, and in being total between resonance plate 12 and piezoelectric actuator 13 Shaking has first chamber 121 between piece 12 and piezoelectric actuator 13, and, micro valve device 1B then equally by valve sheet 17 with And sequentially stack assembly and being located on the gas collection plate 16 of the miniature conveying device 1A forms exit plate 18 etc., and in miniature conveying Be between the gas collection plate 16 and piezoelectric actuator 13 of device 1A with gas collection chamber 162, in gas collection plate 16 reference surface 161 more Recess forms one first release chamber 165 and first outlet chamber 166, and more recessed in the reference surface 180 of exit plate 18 One second release chamber 183 and second outlet chamber 184 are fallen into, in the present embodiment, by setting the miniature conveying device 1A's Operating frequency be 27K between 29.5K, operation voltage be ± 10V to ± 16V, and by multiple multiple and different pressure The driving of chamber collocation piezoelectric actuator 13 and the vibration of resonance plate 12, valve sheet 17, are transmitted so that gas is pressed to next part.
As shown in Fig. 4, Fig. 5 A and Fig. 7 B, when the piezoelectric actuator 13 of miniature conveying device 1A is shaken downwards by voltage actuation When dynamic, resonance plate 12 can also carry out reciprocating vibration due to the resonant interaction vibrated by piezoelectric actuator 13 therewith at this time, i.e., to Lower vibration, and close on the protrusion 130c of the suspension board of piezoelectric actuator 13 130.By the deformation of this resonance plate 12, so that The volume of chamber at the confluence chamber 111 of inlet plate 11 increases, and gas can then be entered micro- by the air inlet 110 on inlet plate 11 In type conveying device 1A, and via at least one confluence round 112 to be pooled at its chamber 111 that converges, then via resonance plate 12 On hollow bore 120 flow downwardly into first chamber 121, while via first chamber 121 to two sides flow, and then pass through Gap 135 between an at least bracket 132 for piezoelectric actuator 13 and pass through circulation downwards, flow to miniature conveying device 1A with it is micro- In gas collection chamber 162 between type valving 1B, and again by the first through hole 163 being connected with gas collection chamber 162 and Correspondence is flow in the first release chamber 165 and first outlet chamber 166 two through holes 164 downwards.
Then, then as shown in Fig. 5 B and Fig. 7 C, due to miniature conveying device 1A piezoelectric actuator 13 by voltage actuation and Upwards when vibration, piezoelectric actuator 13 is lifted upwards, and the movable part 12a of resonance plate 12 contacts at the piezoelectricity shifted up and causes at this time On the protrusion 130c of the suspension board 130 of dynamic device 13, make the region and 12 two sides of resonance plate other than the protrusion 130c of suspension board 130 First chamber 121 between fixed part 12b reduces, and by the deformation of this resonance plate 12, to compress the body of first chamber 121 Product, and 121 middle flow space of first chamber is closed, the volume of first chamber 121 is so squeezed, so that in first chamber 121 Gas flowed towards two sides, and gas collection is constantly input to by the gap 135 between an at least bracket 132 for piezoelectric actuator 13 In chamber 162, the first release chamber 165 and first outlet chamber 166, so that the first release chamber 165 and first outlet chamber Air pressure in room 166 increases, and then flexible valve sheet 17 is pushed to generate Bending Deformation downwards.In the second release chamber 183 In, valve sheet 17 is then smooth downwards and is resisted against the protrusion structure 181a of 181 end of release through-hole, and then makes release through-hole 181 Closing.Corresponding to the valve opening 170 of outlet through hole 182 it is to open downwards on valve sheet 17 in second outlet chamber 184, makes the Any device that gas in two outlet chamber 184 can be passed down to outlet 19 by outlet through hole 182 and be connect with outlet 19 (not shown), and then to achieve the purpose that collection pressure.Finally, then as shown in Fig. 5 C and Fig. 7 D, when resonance plate 12 is by piezoelectric actuator 13 vibrations being lifted upwards and resonate upwards, the movable part 12a of resonance plate 12 makes the chamber 111 that converges also to upward position Interior gas is flowed into first chamber 121 by the hollow bore 120 of resonance plate 12 again, then at least via piezoelectric actuator 13 Gap 135 between one bracket 132 and be transmitted continuously to downwards in gas collection plate 16, then since its gas pressure is to continue to increase downwards Add, therefore more make the air pressure in the first release chamber 165 and first outlet chamber 166 bigger, and then pushes flexible valve Piece 17 generates downwards Curved change greatly, allows valve sheet 17 to contradict position limiting structure 188, does Auxiliary support and be used, to prevent valve Piece 17 collapses, while the valve opening 170 of valve sheet 17 touches outlet through hole 182, make both valve opening 170 and protrusion structure 167 away from From increasing, gas still can be constantly via gas collection chamber 162, the second through hole 164, first outlet chamber 166, second outlet chamber Room 184 and outlet through hole 182 and flow in outlet 19 and any device for connect with outlet 19, this collection presses operation to be can be via outer Pressure difference in the atmospheric pressure and device on boundary is with what is driven, and but not limited to this.
It is as also shown in fig. 8, when the device connecting with outlet 19 internal pressure (not shown) is greater than extraneous pressure, then Minisize fluid control device 1 is the operation that can carry out decompression or release, is depressured or the flowing mode of making of release is mainly such as It is preceding described, it can make in gas no longer input set gas chamber 162 by the gas transport amount for regulating and controlling miniature conveying device 1A, at this point, Gas will be input in second outlet chamber 184 from the outlet through hole 182 connecting with outlet 19, so that second outlet chamber 184 Volume expansion, and then flexible valve sheet 17 is promoted to be bent upwards deformation, and upwards it is smooth, be resisted against first outlet chamber In 166 protrusion structure 167, and close the valve opening 170 of valve sheet 17, i.e., the gas in second outlet chamber 184 will not be inverse It flow in first outlet chamber 166, while the gas in second outlet chamber 184 is can to flow to the via connection runner 185 In two release chambers 183, valve sheet 17 is not collapsed by the Auxiliary support of position limiting structure 188 at this time, can be quickly by gas push It is displaced rapidly upward, the then protrusion structure 181a non-contravention with 181 end of release through-hole of valve sheet 17, and then makes release through-hole 181 open, and gas is discharged by release through-hole 181 again, to complete release operation;It so can be by the list of this micro valve structure 1B The gas in the device connecting with outlet 19 is discharged to gas transport operation and is depressured, or is completely exhausted out and completes release work Industry.
This case minisize fluid control device 1 is the trend for reaching slimming, and miniature conveying device 1A is assembled micro valve The overall thickness of device 1B is between the height of 2mm to 6mm, and then it is light comfortable portable to reach minitype gas power device 1 Purpose, and can be widely used in medical equipment and relevant device.
Again above description it is found that the suspension board 130 that uses of this case for circle kenel, when the diameter of suspension board 130 is contracted to When 4mm is between 8.5mm, when the area of suspension board 130 is consequently also gradually reduced, discovery is through minification so that suspension board 130 integral rigidity is promoted, and because internal gas flow volume reduces, is conducive to the promotion or compression of air, with Enable promotes output pressure value;And it on the other hand can also reduce generated horizontal direction when vertical vibration of suspension board 130 Deformation, and then the suspension board 130 of piezoelectric actuator 13 is made to be able to maintain that in same vertical direction in running and be not easy to incline Tiltedly, and whereby the interference and collision in actuation between suspension board 130 and resonance plate 12 or other assembly elements can be reduced, with Enable reduces the generation of noise, so that the fraction defective of quality reduces;In this way, work as the suspension board 130 of piezoelectric actuator 13 When size reduction, piezoelectric actuator 13 can also be made smaller, whereby in addition to it can promote the performance of output pressure, also can be reduced and make an uproar Sound, and can reduce the fraction defective of product.
In conclusion miniature conveying device provided by this case, mainly identical to drive through circular piezoelectric element The suspension board of circular shape, the two is identical shape and area is close, and piezoelectric element is enable expeditiously to drive suspension board Vertical tremor, reduce piezoelectric element drive suspension board kinetic energy loss, and using punching press by the suspension board of piezoelectric actuator to Lower recess avoids to ensure to load onto when being miniaturized in group because of tolerance to adjust the chamber spacing between suspension board and resonance plate It causes chamber spacing deficiency to cause first chamber space too small, makes suspension board and the resonance plate constantly phase both in operation Mutually interference leads to the problem of noise and reduces efficiency of transmission, and therefore, this case can reach mute effect, can more make miniature conveying The overall volume of device reduces and slimming, and then reaches light comfortable portable purpose, and can be widely used in medical treatment In equipment and relevant device.Therefore, the great value of industrial utilization of miniature conveying device of this case, whence are filed an application in accordance with the law.
Even if the utility model has been described in detail by above-described embodiment and can apply craftsman's think of by being familiar with this those skilled in the art times and be Modification as all, it is so neither de- as attached claim is intended to Protector.
Although the utility model is disclosed as above with preferred embodiment, so it is not intended to limit the utility model, any Those skilled in the art, without departing from the spirit and scope of the utility model, when can make a little modification and it is perfect, therefore this The protection scope of utility model, which is worked as, to be subjected to the definition of the claims.

Claims (16)

1. a kind of miniature conveying device characterized by comprising
One inlet plate has an at least air inlet, at least one confluence round and a confluence chamber, and an at least air inlet is for importing One end of gas, at least one confluence round is connected to an at least air inlet, the other end and the confluence chamber, to lead The gas for entering an at least air inlet converges into the confluence chamber;
One resonance plate has a hollow bore, the confluence chamber of the corresponding inlet plate;
One piezoelectric actuator, comprising:
One suspension board has between 4mm to the diameter between 8.5mm, and has a first surface and a second surface;
One outline border around the periphery for being set to the suspension board, and has one to assemble surface and an outline border bottom surface;
An at least bracket is connected between the suspension board and the outline border, flexibly supports the suspension board to provide;And
One piezoelectric element is attached at the first surface of the suspension board;
Wherein, the resonance plate be stacked in the outline border of the piezoelectric actuator this assemble surface, which is stacked in the resonance Piece makes the piezoelectric actuator, the resonance plate are sequentially corresponding to stack setting, and has one between the resonance plate and the piezoelectric actuator Chamber spacing is to form a first chamber, when driving the piezoelectric actuator by voltage, gas by the inlet plate this at least one Air inlet import, through this at least one confluence round be collected to the confluence chamber, pass through the hollow bore of the resonance plate, with into Enter in the first chamber, then transmitted downwards by the gap between an at least bracket for the piezoelectric actuator, with lasting release Gas.
2. miniature conveying device as described in claim 1, which is characterized in that the first surface of the suspension board and the outline border This assembles surface and is formed as non-co-planar, and makes to keep between the first surface of the suspension board and the resonance plate between the chamber Away from.
3. miniature conveying device as claimed in claim 2, which is characterized in that the chamber spacing by an at least stent forming in It is adjusted between the suspension board and the outline border.
4. miniature conveying device as described in claim 1, which is characterized in that the first surface of the suspension board is lower than the outline border This assemble surface.
5. miniature conveying device as claimed in claim 4, which is characterized in that the second surface of the suspension board is lower than the outline border The outline border bottom surface.
6. miniature conveying device as described in claim 1, which is characterized in that the outline border, an at least bracket and the suspension board In a disk-shaped structure.
7. miniature conveying device as described in claim 1, which is characterized in that the first surface of the suspension board is convex with one Portion, the protrusion have a protrusion top surface, and to assemble surface be non-co-planar for this of the protrusion top surface and the outline border.
8. miniature conveying device as claimed in claim 7, which is characterized in that the protrusion top surface of the suspension board is lower than the outline border This assemble surface.
9. miniature conveying device as claimed in claim 7, which is characterized in that the protrusion of the suspension board is a circular protrusions knot 0.4~0.5 times of diameter of structure, diameter and the suspension board.
10. miniature conveying device as described in claim 1, which is characterized in that the piezoelectric element be for circular form, it is straight Diameter is less than the diameter of the suspension board.
11. miniature conveying device as described in claim 1, which is characterized in that the miniature conveying device further includes at least one absolutely Embolium and a conductive sheet, and an at least insulating trip and the conductive sheet are sequentially arranged under the piezoelectric actuator.
12. miniature conveying device as described in claim 1, which is characterized in that further include a gas collection plate, which has one First through hole, one second through hole, one first release chamber, a first outlet chamber and a reference surface, this first goes out Oral chamber has a protrusion structure, and the height of the protrusion structure is higher than the reference surface of the gas collection plate, first through hole with The first release chamber is connected, which is connected with the first outlet chamber, wherein the above-mentioned gas collection plate, The piezoelectric actuator, the resonance plate and the inlet plate are sequentially corresponding to stack setting positioning, and the resonance plate and the piezoelectric actuator Between the chamber spacing form the first chamber, when being driven the piezoelectric actuator, gas by the inlet plate this at least One air inlet imports, and is collected to the confluence chamber through at least one confluence round, passes through the confluence chamber of the resonance plate, with It is transmitted to the gas collection downwards into the first chamber, then by the gap between an at least bracket for the piezoelectric actuator Plate, with lasting pushing out gas.
13. miniature conveying device as claimed in claim 12, which is characterized in that a surface of the gas collection plate has more a gas collection Chamber, and the gas collection chamber is connected with first through hole and second through hole.
14. miniature conveying device as claimed in claim 12, which is characterized in that further include a micro valve device to constitute one Minisize fluid control device, the micro valve device include:
One valve sheet has a valve opening, and position corresponds to the protrusion structure of the gas collection plate;And
One exit plate includes a release through-hole, an outlet through hole, one second release chamber, a second outlet chamber and a base Quasi- surface, the recessed second release chamber of the reference surface and the second outlet chamber, the release through-hole are located at second release The centre of chamber, the release through-hole end have a protrusion structure, and the height of the protrusion structure is higher than being somebody's turn to do for the exit plate Reference surface, the outlet through hole are connected with the second outlet chamber, and the second release chamber and the second outlet chamber it Between have one connection runner;
Wherein, the valve sheet and the sequentially corresponding gas collection plate for stacking setting and being located in the miniature conveying device of the exit plate On, the release through-hole of the exit plate corresponds to first through hole of the gas collection plate, the second release chamber of the exit plate Corresponding to the first release chamber of the gas collection plate, the second outlet chamber of the exit plate correspond to the gas collection plate this first Outlet chamber, and the valve sheet is set between the gas collection plate and the exit plate, with obstruct the first release chamber and this second Release chamber is connected, and the valve opening is located between second through hole and the outlet through hole, is able to by gas flow optimized and the collection The protrusion structure of gas plate is formed away from, and imports gas by the miniature conveying device, then should by importing by the valve opening Collection pressure operation is carried out in outlet through hole, and the discharge gas of the outlet through hole is controlled the valve sheet, makes the valve opening and the collection The protrusion structure of gas plate is contradicted and is closed, and the discharge gas is made to enter the second release chamber via the connection runner stream It is interior, enable the valve sheet close the outlet through hole and the first release chamber and the first outlet chamber, and promote the valve Piece not with the protrusion structure of the exit plate contradict and open the release through-hole, allow the discharge gas by the release through-hole flow out into Row release operation.
15. miniature conveying device as claimed in claim 14, which is characterized in that the exit plate of the micro valve device includes An at least position limiting structure, an at least position limiting structure are set in the second pressure-releasing cavity room.
16. miniature conveying device as claimed in claim 14, which is characterized in that the gas collection plate of miniature conveying device this One release chamber and the first outlet chamber are formed on the reference surface of the opposite gas collection chamber.
CN201820760280.XU 2018-05-21 2018-05-21 Miniature conveying device Active CN208203524U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820760280.XU CN208203524U (en) 2018-05-21 2018-05-21 Miniature conveying device

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Country Link
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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111608895A (en) * 2019-02-22 2020-09-01 研能科技股份有限公司 Miniature gas conveying device
CN111692085A (en) * 2019-03-15 2020-09-22 研能科技股份有限公司 Micro pump
CN112814878A (en) * 2019-11-18 2021-05-18 研能科技股份有限公司 Micro fluid actuator
US11889766B2 (en) 2019-11-18 2024-01-30 Microjet Technology Co., Ltd. Miniature fluid actuator

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111608895A (en) * 2019-02-22 2020-09-01 研能科技股份有限公司 Miniature gas conveying device
CN111692085A (en) * 2019-03-15 2020-09-22 研能科技股份有限公司 Micro pump
CN112814878A (en) * 2019-11-18 2021-05-18 研能科技股份有限公司 Micro fluid actuator
CN112814878B (en) * 2019-11-18 2023-02-21 研能科技股份有限公司 Micro fluid actuator
US11889766B2 (en) 2019-11-18 2024-01-30 Microjet Technology Co., Ltd. Miniature fluid actuator

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