CN206860416U - Minisize fluid control device - Google Patents

Abstract

A kind of minisize fluid control device, includes stacking inlet plate, resonance plate and the piezo-activator set, and wherein inlet plate there is an at least air admission hole, at least one to conflux round and form the circular depressions for confluxing chamber；Resonance plate has hollow bore；Piezo-activator has suspension board, housing and piezoelectric ceramic plate；Wherein suspension board has a circular protrusions corresponding with round recess, the working characteristics relation ratio of transmission and air pressure is formed by the corresponding relation changed between circular depressions and circular protrusions, and then lifts the pneumatic flow of its transmission, improve minisize fluid control device performance.

Description

Minisize fluid control device

Technical field

This case is on a kind of minisize fluid control device, suitable for a kind of micro ultrathin and Jing Yin micro pressure power Device.

Background technology

The either industry such as medicine, computer technology, printing, energy in each field at present, product is towards sophistication and micro- Smallization direction is developed, wherein the fluid delivery structure that the product such as micro- side Pu, sprayer, ink gun, industrial printing devices is included For its key technology, therefore how by means of innovation structure its technical bottleneck is broken through, for the important content of development.

For example, in medicinal industry, many instruments or equipment needed using Pneumatic pressure power driving, generally adopt to pass System motor and air pressure valve come reach its gas conveying purpose.However, it is limited to these conventional motors and the structure of gas trap Limitation so that such instrument and equipment is difficult to reduce its volume, so that the volume of single unit system can not reduce, that is, is difficult to reality The target being now thinned, therefore can not also install and put on portable apparatus or be used cooperatively with portable apparatus, convenience deficiency. In addition, these conventional motors and gas trap can also produce noise when start, make user impatient, cause using upper not convenient It is and uncomfortable.

Therefore, above-mentioned known technology missing can be improved by how developing one kind, can make conventionally employed minisize fluid control device Instrument or equipment reach small volume, miniaturization and Jing Yin, and then reach the minisize fluid control of light comfortable portable purpose Device processed, and the working characteristics of stabilizing gas transmission and air pressure can be reached, it is actually in the urgent need to address at present the problem of.

Utility model content

The main purpose of this case is in a kind of minisize fluid suitable for portable or wearable instrument or equipment of offer Control device, by phase between the diameter of circular depressions and the diameter of the circular protrusions of the suspension board of piezo-activator of inlet plate Mutually be correspondingly formed the working characteristics relation ratio of gas transport air pressure, with form the formation chamber that confluxes there is fluid non-return work With, and then it is substantially improved and improves the working characteristics efficiency of minisize fluid control device.

For the above-mentioned purpose, the one of this case broader embodiment aspect is applied to provide a kind of minisize fluid control device One micro pressure power set, including an inlet plate, there is a composition surface of an inlet surface and the relative inlet surface, should Inlet surface is provided with an at least air admission hole, and the composition surface is to be arranged with a circular depressions respectively and at least one conflux round, should Circular depressions have one first diameter, and one end of the round that confluxes is connected with the circular depressions, the other end of the round that confluxes At least an air admission hole is connected with this, and gas is imported by an at least air admission hole, and at least one confluxes round by gas by this Converge into that the circular depressions are formed one is confluxed chamber；One resonance plate, there is a hollow bore, to should inlet plate the circle Shape recess；And a piezo-activator, have：One suspension board, there is relative a first surface and a second surface, this second Surface has a circular protrusions, and the circular protrusions are vertically arranged with the circular depressions, and the circular protrusions have a Second bobbin diameter, should Second bobbin diameter and first diameter are mutually corresponding；One housing, around the periphery for being arranged at the suspension board；An at least support, connection Between the suspension board and the housing；And a piezoelectric board, it is attached at the first surface of the suspension board；Wherein, this above-mentioned Piezo-activator, the resonance plate and the inlet plate sequentially to tackle it is folded positioning is set, and the resonance plate and the piezo-activator it Between there is a gap to form a first chamber, during so that the piezo-activator is driven, gas by the inlet plate this at least one Air admission hole imports, and is collected to the circular depressions through at least one round that confluxes, the hollow bore of the resonance plate is passed through, to enter Enter in the first chamber, then transmitted downwards by the space between an at least support for the piezo-activator, with lasting release Gas.

Brief description of the drawings

Figure 1A is the positive decomposition texture schematic diagram for the micro pressure power set that this case is preferred embodiment.

Figure 1B is the positive combination structural representation of the micro pressure power set shown in Figure 1A.

Fig. 2A is the back side decomposition texture schematic diagram of the micro pressure power set shown in Figure 1A.

Fig. 2 B are the back side combining structure schematic diagram of the micro pressure power set shown in Figure 1A.

Fig. 3 A are the positive combination structural representation of the piezo-activator of the micro pressure power set shown in Figure 1A.

Fig. 3 B are the back side combining structure schematic diagram of the piezo-activator of the micro pressure power set shown in Figure 1A.

Fig. 3 C are the cross-sectional view of the piezo-activator of the micro pressure power set shown in Figure 1A.

Fig. 4 A to Fig. 4 E are that the local start of the minisize fluid control device of the micro pressure power set shown in Figure 1A is shown It is intended to.

Fig. 5 A are that the gas collection plate of the micro pressure power set shown in Figure 1A presses start signal with the collection of micro valve device Figure.

Fig. 5 B are that the gas collection plate of the micro pressure power set shown in Figure 1A is illustrated with the release start of micro valve device Figure.

Fig. 6 A to Fig. 6 E are that the collection of the micro pressure power set shown in Figure 1A presses illustrative view.

Fig. 7 is decompression or the release illustrative view of the micro pressure power set shown in Figure 1A.

Embodiment

Embodying some exemplary embodiments of this case features and advantages will describe in detail in the explanation of back segment.It should be understood that This case can have various changes in different aspects, and it does not all depart from the scope of this case, and explanation therein and diagram Inherently it is illustrated as being used, and nand architecture is in limitation this case.

The micro pressure power set 1 of this case are to can be applied to the works such as medicine raw skill, the energy, computer technology or printing Industry, in order to transmit gas, but it is not limited.Refer to shown in Figure 1A, Figure 1B, Fig. 2A and Fig. 2 B, the micro pressure of this case Power set 1 are formed as combined by minisize fluid control device 1A and micro valve device 1B, and wherein minisize fluid controls Device 1A has a structures such as inlet plate 11, resonance plate 12, piezo-activator 13, insulating trip 141,142 and conducting strip 15, but not with This is limited.Piezo-activator 13 corresponds to resonance plate 12 and set, and make inlet plate 11, resonance plate 12, piezo-activator 13, Insulating trip 141, conducting strip 15, another insulating trip 142, gas collection plate 16 etc. sequentially stack setting, and the piezo-activator 13 be by One suspension board 130, at least a housing 131, a support 132 and a piezoelectric board 133 assemble jointly；And micro valve Device 1B includes a valve sheet 17 and an exit plate 18 but is not limited.And in the present embodiment, as shown in Figure 1A, gas collection Plate 16 is not only single plate structure, also can be the frame structure that periphery has side wall 168, and the side being made up of the periphery Wall 168 and the plate common definition of its bottom go out an accommodation space 16a, and the accommodating sky is arranged at for the piezo-activator 13 Between in 16a, therefore after the micro pressure power set 1 of this case are completed, then its front schematic view can as shown in Figure 1B, and Shown in 6A to Fig. 6 E, it is seen that minisize fluid control device 1A be it is corresponding with micro valve device 1B assemble, that is, Micro valve device 1B valve sheet 17 and exit plate 18 sequentially stacks setting and is positioned at minisize fluid control device 1A's Formed on gas collection plate 16.And the schematic rear view that it the is completed then release through hole 181 in the visible exit plate 18 and outlet 19, to be connected with a device (not shown), release through hole 181 is then provided with making the gas in micro valve device 1B to arrange for outlet 19 Go out, with up to the effect of release.Set by this minisize fluid control device 1A and micro valve device 1B assembling, so that Gas passes through piezo-activator 13 from an at least air admission hole 110 air inlet on minisize fluid control device 1A inlet plate 11 Start, and flow through multiple pressure chamber (not shown) and continue to transmit, and then gas can be made in unidirectional in micro valve device 1B Flowing, and by acute build up of pressure in the device (not shown) being connected with the micro valve device 1B port of export, and ought need to carry out During release, then regulate and control minisize fluid control device 1A output quantity, make in exit plate 18 of the gas via micro valve device 1B Release through hole 181 and discharge, to carry out release.

It please continue refering to Figure 1A and Fig. 2A, as shown in Figure 1A, minisize fluid control device 1A inlet plate 11 is with air inlet Surface 11a, composition surface 11b, inlet surface 11a are provided with an at least air admission hole 110, in the present embodiment, air admission hole 110 Quantity is for 4, but is not limited, and it is through the inlet surface 11a of inlet plate 11 and composition surface 11b, mainly to Supplied gas complies with the effect of atmospheric pressure from outside device and flows into minisize fluid control device 1A from an at least air admission hole 110 It is interior.And again as shown in Figure 2 A, from the composition surface 11b of inlet plate 11, it is arranged with a circular depressions 111 and at least one remittance Round 112 is flowed, at least one one end for confluxing round 112 is connected with the circular depressions 111, and this at least one confluxes round At least an air admission hole 110 is connected for this of 112 other end and the inlet surface 11a of inlet plate 11.In the present embodiment, it converges It is corresponding with air admission hole 110 to flow the quantity of round 112, its quantity is 4, but is not limited thereto, whereby can will be from air admission hole 110 Gas into the round 112 that confluxes is guided and confluxed and is concentrated to circular depressions 111 and transmits.It is the inlet plate with the present embodiment 11 have integrally formed air admission hole 110, conflux round 112 and circular depressions 111, and i.e. corresponding at the circular depressions 111 A chamber that confluxes for confluxing gas is formed, is kept in supplied gas.In some embodiments, the material of inlet plate 11 is can be but not It is limited to be made up of a stainless steel.In other embodiments, by the chamber that confluxes that is formed at the circular depressions 111 Depth is identical with the depth of these rounds 112 that conflux, and the preferred values of conflux chamber and the depth of the round 112 that confluxes is to be situated between Between 0.2mm-0.4mm, but it is not limited.Resonance plate 12 is made up of a flexible materials, but is not limited, and In having a hollow bore 120 on resonance plate 12, correspond to the composition surface 11b of inlet plate 11 circular depressions 111 and set Put, so that gas circulates.In other embodiments, resonance plate is can be made up of a copper material, but is not limited.

Please refer to shown in Fig. 3 A, Fig. 3 B and Fig. 3 C, piezo-activator 13 be by a suspension board 130, a housing 131, An at least support 132 and a piezoelectric board 133 assemble jointly, wherein, the piezoelectric board 133 is attached at suspension board 130 First surface 130b, the flexural vibrations of suspension board 130 are driven to produce deformation for applying voltage, suspension board 130 has center Portion 130d and peripheral part 130e, it is so that when piezoelectric board 131 is driven by voltage, suspension board 130 can be by central part 130d outside All portion 130e flexural vibrations, and this at least a support 132 is connected between suspension board 130 and housing 131, in this implementation Example in, the support 132 is connected between suspension board 130 and housing 131, its two-end-point be connected to housing 131, Suspension board 130, to provide resilient support, and an at least space is had more between support 132, suspension board 130 and housing 131 135, circulated to supplied gas, and the suspension board 130, the kenel of housing 131 and support 132 and quantity are that have a variety of changes Change.In addition, housing 131 is around the outside for being arranged at suspension board 130, and the conductive connecting pin 134 with an outside projection, to The use of power supply connection, but be not limited.In the present embodiment, suspension board 130 is for the structure of a cascaded surface, is implied that in suspension The second surface 130a of plate 130 has more a circular protrusions 130c, circular protrusions 130c be vertically arranged with the circular depressions and with The circular depressions are corresponding, and circular protrusions 130c height is between 0.02mm-0.08mm, and preferred values is 0.03mm. It is visible please refer to Fig. 3 A and Fig. 3 C, the circular protrusions 130c of suspension board 130 surface is the second surface with housing 131 131a coplines, and the second surface 132a of the second surface 130a of suspension board 130 and support 132 is also copline, and this is outstanding The circular protrusions 130c of the kickboard 130 and second surface 131a of housing 131 and suspension board 130 second surface 130a and support It is that there is a certain depth between 132 second surface 132a.As for the first surface 130b of suspension board 130, then such as Fig. 3 B and Shown in Fig. 3 C, it is smooth coplanar structure with the first surface 131b of housing 131 and the first surface 132b of support 132, And piezoelectric board 133 is then attached at the first surface 130b of this smooth suspension board 130.In other embodiments, suspension board 130 kenel also can be a two-sided smooth tabular square structure, be not limited thereto, can appoint according to actually situation is applied Apply change.In some embodiments, suspension board 130, support 132 and housing 131 are the structures that can be formed in one, and can be by One metallic plate is formed, such as can be made up of stainless steel, but is not limited.And in some embodiments, another this hangs The length of side of kickboard 130 is between 8mm-9mm.

Again in other embodiments, the length of side of piezoelectric board 133 is slightly less than the length of side of the length of side of suspension board 130, has length Between 7.5mm-8.5mm, so also it is not limited.

In addition, in another embodiment, its preferred values of the length of side of suspension board 130 can be 7.5mm, the length of side of piezoelectric board 133 It is slightly less than the length of side of suspension board 130, the length of its length of side is 7mm.

Related embodiment in the micro pressure power set 1 of this case, please continue to refer to Fig. 4 A, the circle of suspension board 130 Convex portion 130c is vertically arranged and mutually corresponding with the circular depressions 111 of inlet plate 11, wherein, circular depressions 111 have one first Diameter D1, circular protrusions 130c have a Second bobbin diameter D2, when fixing the first diameter D1, after adjustment Second bobbin diameter D2 both it Between corresponding gained go out work characteristic relation as shown in following table one：

Table one

Therefore learnt by the upper table of experiment：First diameter D1 of the circular depressions 111 of inlet plate 11 and suspension board 130 Circular protrusions 130c Second bobbin diameter D2 between ratio D2/D1, for minisize fluid control device 1A gas flow shadow Sound is very huge, when Second bobbin diameter D2 and the first diameter D1 ratio D2/D1 are between 0.95 to 1.15, the work of its gas transport Making characteristic efficiency can improve, and obtain higher gas transport atmospheric pressure value, and minimum gas transport atmospheric pressure value is more than 380mmHg, especially Be ratio D2/D1 when between 1 to 1.1, its minimum gas transport atmospheric pressure value is more than 410mmHg, it is possible thereby to learn, second Diameter D2 and the first diameter D1 ratio D2/D1 can influence minisize fluid device 1A working characteristics (atmospheric pressure value), and this case will Second bobbin diameter D2 and the first diameter D1 ratio D2/D1 be defined in 0.95 to 1.15 between when, that is, obtain bigger atmospheric pressure value and enter And minisize fluid control device 1A efficiency is substantially improved, improve its working characteristics performance, such this case uses the circular depressions Gas transport is mutually correspondingly formed between 111 the first diameter D1 and the circular protrusions 130c of suspension board 130 Second bobbin diameter D2 The working characteristics relation ratio of air pressure, this is because Second bobbin diameter D2 and the first diameter D1 proportionate relationship have one kind in this structure Fluid non-return into the chamber that confluxes acts on, and is not only substantially improved and improves minisize fluid control device 1A working characteristics efficiency, This is very important design focal point, anyway, the first diameter D1 of the above-mentioned circular depressions 111 and the circle of suspension board 130 The working characteristics relation ratio that gas transport air pressure is mutually correspondingly formed between shape convex portion 130c Second bobbin diameter D2 is by reality Obtained in testing, the formula institute direct derivation of theory, the first diameter D1 and suspension board of the circular depressions 111 can be not depended on The working characteristics relation ratio of gas transport air pressure is mutually correspondingly formed between 130 circular protrusions 130c Second bobbin diameter D2, The supposition of cause is only as the rational reference explanation of experiment.

So using square suspension board 130, its reason is to suspend compared to circle for this case piezo-activator 13 The design of plate, the structure of the square suspension board 130 substantially have the advantage of power saving, and it is such as following table two that it, which consumes the comparison of power, It is shown：

Table two

Learnt by the upper table tested：The piezo-activator 13 of the positive size dimension of square suspension board 130 of the tool (8mm to 10mm) Compared to the piezo-activator of the circular suspension board diameter (8mm to 10mm), more power saving.The above-mentioned consumption obtained by experiment Electrical power compares data, and the cause of its power saving can be speculated as：Because of the capacity load operated under resonant frequency, it consumes power It can increase with the rising of frequency, and because of the obvious relatively same circle of the resonant frequency of the suspension board 130 of size dimension square _type layout The suspension board of shape is low, therefore its relative consumption power is also significant lower, that is, this case uses the suspension board 130 of square _type layout It is real that there is savings advantage compared to the design of circular suspension board, object wearing device is particularly applied to, it is extremely important to save electric power Design focal point.Nevertheless, its power saving effect of the suspension board of above-mentioned square _type layout is by obtained in experiment, it is not The formula institute direct derivation of theory can be leaned on, the supposition of its power saving cause is only as the rational reference explanation of experiment.

In addition, it please continue refering to Figure 1A and Fig. 2A, with more insulating trip 141, conducting strip in minisize fluid control device 1A 15 and another insulating trip 142 be sequentially to be correspondingly arranged under piezo-activator 13, and its form approximately correspond to piezoelectricity cause The form of the housing of dynamic device 13.In some embodiments, insulating trip 141,142 is made up of the material that can be insulated, such as：Modeling Glue, but be not limited, it is used with carrying out insulation；In other embodiments, conducting strip 15 is i.e. by conductive material institute structure Into, such as：Metal, but be not limited, conduct being used.And in the present embodiment, it can also be set on conducting strip 15 A conductive connecting pin 151 is put, conduct being used.

Please refer to Figure 1A and Fig. 4 A to Fig. 4 E, wherein Fig. 4 A to Fig. 4 E are for the micro pressure power shown in Figure 1A The minisize fluid control device 1A of device local illustrative view.First, as shown in Figure 4 A, it is seen that minisize fluid control device 1A is sequentially by inlet plate 11, resonance plate 12, piezo-activator 13, insulating trip 141, conducting strip 15 and another insulating trip 142 etc. Stacking forms, and is in the gap g0 between resonance plate 12 and the periphery of housing 131 of piezo-activator 13 in the present embodiment A material is filled, such as：Conducting resinl, but be not limited, so that the circle of resonance plate 12 and the suspension board 130 of piezo-activator 13 Gap g0 depth can be maintained between the 130c of shape convex portion, and then air-flow can be guided and more quickly flowed, and because of suspension board 130 Circular protrusions 130c keeps suitable distance to make the interference reduction that is in contact with each other with resonance plate 12, and promoting noise to produce can be lowered.

It please continue refering to Fig. 4 A to Fig. 4 E, as illustrated, when inlet plate 11, resonance plate 12 are sequentially corresponding with piezo-activator 13 After assembling, then a chamber for confluxing gas can be collectively forming with inlet plate 11 thereon at the hollow bore 120 of resonance plate 12, And a first chamber 121 is more formed between resonance plate 12 and piezo-activator 13, it is configured to temporarily store gas, and first chamber 121 It is to pass through the hollow bore 120 of resonance plate 12 and be connected with the chamber at the first surface 11b of inlet plate 11 circular depressions 111 It is logical, and the both sides of first chamber 121 are then by the space 135 between the support 132 of piezo-activator 13 and with being arranged under it Micro valve device 1B is connected.

When the minisize fluid control device 1A starts of micro pressure power set 1, mainly by piezo-activator 13 by electricity Pressure is activated with support 132 for fulcrum, carries out the reciprocating vibration of vertical direction.As shown in Figure 4 B, when piezo-activator 13 by Voltage actuation and when vibrating downwards, be with when piezo-activator 13 vibrates because resonance plate 12 is for light, thin laminated structure When, resonance plate 12 also can with resonance and carry out vertical reciprocating vibration, as resonance plate 12 corresponds to the inlet plate 11 The part of circular depressions 111 also can with flexural vibrations deformation, i.e., the resonance plate 12 correspond to the inlet plate 11 circular depressions 111 part is the movable part 12a for resonance plate 12, is the now resonance plate with when piezo-activator 13 is bent downwardly vibration 12 movable part 12a can because fluid bring into and push and drive that piezo-activator 13 vibrates, and with piezo-activator 13 are bent downwardly vibration deformation, then gas is entered by least air admission hole 110 on inlet plate 11, and pass through its composition surface At least the one of 11b confluxes round 112 to be pooled at its central circular depressions 111, then via recessed with circle on resonance plate 12 The central hole 120 that portion 111 is correspondingly arranged is flowed downwardly into first chamber 121, thereafter, due to being vibrated by piezo-activator 13 Drive, resonance plate 12 also can with resonance and carry out vertical reciprocating vibration, as shown in Figure 4 C, now resonance plate 12 can Dynamic portion 12a also with downward vibration, and attach on the circular protrusions 130c of the suspension board 130 for contacting at piezo-activator 13, make Between region beyond the circular protrusions 130c of suspension board 130 and the chamber that confluxes between the fixed part 12b of the both sides of resonance plate 12 Away from will not diminish, and by the deformation of this resonance plate 12, to compress the volume of first chamber 121, and close in first chamber 121 Between free air space, promote the gas in it push to both sides flow, and then by piezo-activator 13 support 132 between sky Gap 135 and pass through flowing downwards.As for Fig. 4 D then for its resonance plate 12 movable part 12a via flexural vibrations deformation after, and return Again to initial position, and follow-up piezo-activator 13 is driven to vibrate upwards by voltage, so equally extrudes first chamber 121 Volume, but now because piezo-activator 13 is upward lifting, the displacement of the lifting can be d, so that in first chamber 121 Gas can be flowed towards both sides, and then drive gas constantly to enter from least air admission hole 110 on inlet plate 11, then flow into In the chamber that circular depressions 111 are formed, then as shown in Figure 4 E, the resonance plate 12 is vibrated by 13 upward lifting of piezo-activator And it is upward to resonate, the movable part 12a of resonance plate 12 makes the gas in circular depressions 111 again by resonating also to upward position The central hole 120 of piece 12 and flow into first chamber 121, and the space 135 between the support 132 of piezo-activator 13 And outflow minisize fluid control device 1A is passed through downwards.Thus embodiment aspect is visible, when resonance plate 12 carry out it is vertical reciprocating During vibration, be can by its gap g0 between piezo-activator 13 to increase the ultimate range of its vertical displacement, in other words, Set gap g0 that resonance plate 12 can be made to produce upper and lower displacement by a larger margin when resonance between two structure.In this way, Barometric gradient is produced in runner design through this minisize fluid control device 1A, makes gas flow at high rates, and pass in and out through runner The resistance difference in direction, gas is transmitted to outlet side, and in the state of outlet side has air pressure by suction side, still has the ability to hold Continuous pushing out gas, and can reach Jing Yin effect.

In addition, in some embodiments, the vertical reciprocating type vibration frequency of resonance plate 12 can be with piezo-activator 13 Vibration frequency is identical, i.e., both can be upwards or simultaneously downward simultaneously, and it is can to appoint according to situation is actually applied and apply change, not To be limited shown in the present embodiment as flowing mode.

Please refer to shown in Figure 1A, Fig. 2A and Fig. 5 A, Fig. 5 B, the micro valve of the micro pressure power set 1 of this case Device 1B is sequentially to be stacked and formed by valve sheet 17 and exit plate 18, and the gas collection plate 16 for the minisize fluid control device 1A that arranges in pairs or groups To operate.

In the present embodiment, gas collection plate 16 has a surface 160 and a reference surface 161, be on the surface 160 depression with A gas collection chamber 162 is formed, is set wherein for the piezo-activator 13, the gas transmitted downwards by minisize fluid control device 1A Then temporarily accumulate in this gas collection chamber 162, and be that there are multiple through holes in gas collection plate 16, it includes first and run through One end of the through hole 164 of hole 163 and second, the first through hole 163 and the second through hole 164 is connected with gas collection chamber 162, The other end is then connected with the first release chamber 165 on the reference surface 161 of gas collection plate 16 and first outlet chamber 166 respectively It is logical.And a convex portion structure 167 is further set up at first outlet chamber 166, such as can be but not be limited to a cylinder knot Structure, the height of the convex portion structure 167 are above the reference surface 161 of the gas collection plate 16.

Exit plate 18 includes a release through hole 181, an outlet through hole 182, a reference surface 180 and a second surface 187, the wherein release through hole 181, outlet through hole 182 is the reference surface 180 and second surface for extending through exit plate 18 187, it is recessed one second release chamber 183 on the reference surface 180 and a second outlet chamber 184, the release through hole 181 is located at The core of second release chamber 183, and connected between the second release chamber 183 and second outlet chamber 184 with more one Runner 185, circulated to supplied gas, and one end of outlet through hole 182 is connected with second outlet chamber 184, the other end then with Outlet 19 is connected, and in the present embodiment, outlet 19 is can be connected with a device (not shown), such as：Forcing press, but not with This is limited.

There is a valve opening 170 and multiple positioning holes 171 on valve sheet 17；When valve sheet 17 is in gas collection plate 16 and outlet When assembling is positioned between plate 18, the release through hole 181 of the exit plate 18 corresponds to first through hole 163 of the gas collection plate 16, The second release chamber 183 corresponds to the first release chamber 165 of the gas collection plate 16, and the second outlet chamber 184 corresponds to should The first outlet chamber 166 of gas collection plate 16, and the valve sheet 17 is arranged between the gas collection plate 16 and the exit plate 18, barrier the One release chamber 165 connects with the second release chamber 183, and the valve opening 170 of the valve sheet 17 is arranged at second through hole 164 And between the outlet through hole 182, and valve opening 170 is located at the convex portion structure 167 of the first outlet chamber 166 of gas collection plate 16 and corresponded to Set, by the design of this single valve opening 170, so that gas can reach the purpose of one-way flow in response to its pressure difference.

One end of release through hole 181 of the exit plate 18 can enter a convex portion structure 181a for setting up a protrusion and being formed again, Such as can be but not be limited to cylindrical structure, and this convex portion structure 181a passes through improvement to increase its height, convex portion structure 181a Height be above the reference surface 180 of the exit plate 18, to strengthen making valve sheet 17 rapidly contradict and close release through hole 181, and reach the effect that prestressing conflict effect is fully sealed；And exit plate 18 has more an at least position limiting structure 188, By taking the present embodiment as an example, position limiting structure 188 is disposed in the second release chamber 183, and is an annular block structure, and not with This is limited, and it is provided with the use of Auxiliary support valve sheet 17 predominantly when micro valve device 1B carries out collection pressure operation, to prevent Only valve sheet 17 collapses, and can make valve sheet 17 can more quickly opening and closing of fault.

When micro valve device 1B collection presses start, mainly as shown in Figure 5A, it is can be in response to coming from minisize fluid control The pressure that the gas that device 1A processed is transmitted downwards is provided, and or when extraneous atmospheric pressure is more than the dress being connected with outlet 19 When putting the internal pressure of (not shown), then gas can be from the gas collection chamber 162 in minisize fluid control device 1A gas collection plate 16 Respectively the first release chamber 165 and first outlet chamber are flowed downwardly into through the first through hole 163 and the second through hole 164 In 166, now, downward gas pressure is the valve sheet 17 of pliability is bent downwardly deformation and then make the first release chamber 165 volume increase, and correspond to smooth downwards at the first through hole 163 and be resisted against the end of release through hole 181, Jin Erke The release through hole 181 of exit plate 18 is closed, therefore will not be flowed out in the gas in the second release chamber 183 from release through hole 181. Certainly, the present embodiment, the design of a convex portion structure 181a is set up using the end of release through hole 181, to strengthen making valve sheet 17 Rapidly contradict and close release through hole 181, and reach the effect that prestressing conflict effect is fully sealed, while and set through ring Position limiting structure 188 in the periphery of release through hole 181, with Auxiliary support valve sheet 17, it is not produced and collapse.On the other hand, Because gas is to be flowed downwardly into from the second through hole 164 in first outlet chamber 166, and correspond to first outlet chamber 166 The valve sheet 17 at place is also bent downwardly deformation, so that its corresponding valve opening 170 is opened downwards, gas then can be from first outlet chamber Room 166 is flowed into second outlet chamber 184 via valve opening 170, and is flow to by outlet through hole 182 and exported 19 and with exporting 19 In the device (not shown) being connected, whereby with to the device carry out collect pressure start.

It please continue refering to Fig. 5 B, when micro valve device 1B carries out release, it is can be by regulation and control minisize fluid control dress 1A gas transport amount is put, is made in gas no longer input set gas chamber 162, or when the device (not shown) being connected with outlet 19 When internal pressure is more than extraneous atmospheric pressure, then micro valve device 1B can be made to carry out release.Now, gas will oneself and outlet The outlet through hole 182 of 19 connections is inputted to second outlet chamber 184 so that the volumetric expansion of second outlet chamber 184, and then Promote the valve sheet 17 of pliability to be bent upwards deformation, and upwards it is smooth, be resisted against on gas collection plate 16, therefore the valve opening of valve sheet 17 170 can close because being resisted against gas collection plate 16.Certainly, in the present embodiment, convex portion knot is set up using first outlet chamber 166 The design of structure 167, therefore be available for the valve sheet 17 of pliability to be bent upwards deformation and more rapidly contradict, valve opening 170 is more favorably reached One prestressing conflict effect attaches the closed mode of sealing completely, therefore, when in original state, the valve opening 170 of valve sheet 17 Can be closed because being close to be resisted against the convex portion structure 167, then the gas in the second outlet chamber 184 will not be countercurrently to the In one outlet chamber 166, to reach the effect for preferably preventing gas from leaking outside.And the gas in second outlet chamber 184 is It can be flow to via connection runner 185 in the second release chamber 183, and then make the volume expanded of the second release chamber 183, and made Deformation is equally bent upwards corresponding to the valve sheet 17 of the second release chamber 183, is not supported now and is closed in due to valve sheet 17 The end of release through hole 181, therefore the release through hole 181 is in opening, i.e., the gas in the second release chamber 183 can be by unloading Pressure through hole 181 flows outwardly into row release operation.Certainly, the present embodiment, the convex portion structure set up using the end of release through hole 181 181a or through position limiting structure 188 in the second release chamber 183 is arranged at, allow pliability valve sheet 17 be bent up it is curved Become more rapidly, it is more favourable to depart from the state for closing release through hole 181.In this way, then can will be with going out by this unidirectional release operation Gas in the devices (not shown) of the connection of mouth 19 is discharged and is depressured, or is completely exhausted out and is completed release operation.

Please refer to Figure 1A, Fig. 2A and Fig. 6 A to Fig. 6 E, wherein Fig. 6 A to Fig. 6 E are for the micro pressure shown in Figure 1A The collection pressure illustrative view of power set.As shown in Figure 6A, micro pressure power set 1 i.e. by minisize fluid control device 1A with And formed combined by micro valve device 1B, wherein minisize fluid control device 1A is it has been observed that sequentially by inlet plate 11, resonance The assembling of the build stacks such as piece 12, piezo-activator 13, insulating trip 141, conducting strip 15, another insulating trip 142 and gas collection plate 16 is fixed Position forms, and is to have a gap g0 between resonance plate 12 and piezo-activator 13, and in resonance plate 12 and piezo-activator There is first chamber 121 between 13, and, micro valve device 1B is then equally by valve sheet 17 and the grade of exit plate 18 sequentially heap Stacked group dress, which is positioned on minisize fluid control device 1A gas collection plate 16, to be formed, and in minisize fluid control device 1A gas collection It is that there is gas collection chamber 162, be more recessed and one first unload in the reference surface 161 of gas collection plate 16 between plate 16 and piezo-activator 13 Press chamber 165 and first outlet chamber 166, and be more recessed one second release chamber in the reference surface 180 of exit plate 18 183 and second outlet chamber 184, in the present embodiment, the operating frequency by the micro pressure power set is 27K-29.5K Between, operating voltage be ± 10V- ± 16V, and the drive for piezo-activators 13 of arranging in pairs or groups by these multiple different pressure chamber Dynamic and resonance plate 12, the vibration of valve sheet 17, transmitted so that gas is pressed to next part.

As shown in Figure 6B, when minisize fluid control device 1A piezo-activator 13 is vibrated downwards by voltage actuation, Then gas can be entered in minisize fluid control device 1A by the air admission hole 110 on inlet plate 11, and be confluxed round via at least one 112 flow downwardly into first chamber 121 to be pooled at its circular depressions 111, then via the hollow bore 120 on resonance plate 12 In.Thereafter, then as shown in Figure 6 C, due to the resonant interaction vibrated by piezo-activator 13, resonance plate 12 also can with carry out it is past Compound vibration, i.e., its vibrate downwards, and close on the circular protrusions 130c of the suspension board 130 of piezo-activator 13, by this The deformation of resonance plate 12 so that the volume increase of the chamber at the circular depressions 111 of inlet plate 11, and first chamber is compressed simultaneously 121 volume, and then promote the gas in first chamber 121 to push and flowed to both sides, and then by the branch of piezo-activator 13 Space 135 between frame 132 and pass through circulation downwards, to flow between minisize fluid control device 1A and micro valve device 1B Gas collection chamber 162 in, it is and right downwards by the first through hole 163 and the second through hole 164 that are connected with gas collection chamber 162 again It should flow in the first release chamber 165 and first outlet chamber 166, thus embodiment aspect is visible, when resonance plate 12 is carried out vertically Reciprocating vibration when, be can by its gap g0 between piezo-activator 13 to increase the ultimate range of its vertical displacement, In other words, set gap g0 that resonance plate 12 can be made to produce upper bottom by a larger margin when resonance between two structure Move.

Then, then as shown in Figure 6 D, because minisize fluid control device 1A resonance plate 12 returns back to initial position, and press Electric actuator 13 is driven to vibrate upwards by voltage, the volume of so same extruding first chamber 121 so that first chamber 121 Interior gas flows towards both sides, and is constantly inputted to gas collection chamber by the space 135 between the support 132 of piezo-activator 13 162nd, in the first release chamber 165 and first outlet chamber 166, the first release chamber 165 and first outlet are so more caused Air pressure in chamber 166 is bigger, and then promotes the valve sheet 17 of pliability to produce Bending Deformation downwards, then in the second release chamber In 183, valve sheet 17 is then smooth downwards and is resisted against the convex portion structure 181a of the end of release through hole 181, and then makes release through hole 181 closings, and in second outlet chamber 184, the valve opening 170 on valve sheet 17 corresponding to outlet through hole 182 is to open downwards, The gas in second outlet chamber 184 is set to be passed down to outlet 19 by outlet through hole 182 and be connected with outlet 19 any Device (not shown), and then to reach the purpose of collection pressure operation.Finally, then as illustrated in fig. 6e, as minisize fluid control device 1A The resonance of resonance plate 12 shift up, and then make the gas in the composition surface 11b of inlet plate 11 circular depressions 111 can be by resonating The hollow bore 120 of piece 12 and flow into first chamber 121, then the space 135 between the support 132 of piezo-activator 13 And be transmitted continuously to downwards in gas collection plate 16, then because its gas pressure is to continue to increase downwards, therefore gas still can be passed through constantly Flowed by gas collection chamber 162, the second through hole 164, first outlet chamber 166, second outlet chamber 184 and outlet through hole 182 Into outlet 19 and any device being connected with outlet 19, this collection pressure operation is can be via in extraneous atmospheric pressure and device Pressure differential is not limited with driving.

When the device being connected with outlet 19 internal pressure (not shown) is more than extraneous pressure, then micro pressure moves Power apparatus 1 is can be depressured as shown in Figure 7 or the operation of release, and it is depressured or release makees flowing mode mainly as before It is described, it can make by regulation and control minisize fluid control device 1A gas transport amount in gas no longer input set gas chamber 162, this When, gas will be inputted to second outlet chamber 184 from the outlet through hole 182 being connected with outlet 19 so that second outlet chamber 184 volumetric expansion, and then promote the valve sheet 17 of pliability to be bent upwards deformation, and upwards it is smooth, be resisted against first outlet In the convex portion structure 167 of chamber 166, and close the valve opening 170 of valve sheet 17, i.e., the gas in second outlet chamber 184 is not Can be countercurrently into first outlet chamber 166；And the gas in second outlet chamber 184 is can be flowed via connection runner 185 Into the second release chamber 183, then by release through hole 181 to carry out release operation；So can be by this micro valve structure 1B Unidirectional gas transport operation will be depressured with the gas discharge in the devices that be connected of outlet 19, or be completely exhausted out and complete to unload Press operation.

In summary, the micro pressure power set that this case is provided, mainly by adjustment minisize fluid control device The diameter proportion of both the circular depressions of inlet plate and the circular protrusions of suspension board, to lift the gas of minisize fluid control device Pressure value, and then overall exhaust effect is lifted, when minisize fluid control device and when being mutually assembled of micro valve device, make gas Enter from the air admission hole on minisize fluid control device, and using the start of piezo-activator, make runner of the gas after design And barometric gradient is produced in pressure chamber, and then make gas flow at high rates and be transferred in micro valve device, then through miniature The one-way cock design of valving, makes gas with one way flow, and then can be by pressure accumulated in any with outlet connection In device；And when being intended to be depressured or during release, then regulate and control the transmission quantity of minisize fluid control device, and make gas can be by with going out Mouthful connection device in transmit to the second outlet chamber of micro valve device, and by connection runner by transmit to the second release Chamber, then flowed out by pressure relief vent, and then gas can be made promptly to transmit to reach, and the effect of Jing Yin is can reach simultaneously, more may be used The overall volume of minitype gas power set is set to reduce and be thinned, and then it is light comfortable to reach minitype gas power set Portable purpose, and can be widely used in medical equipment and relevant device.Therefore, the minitype gas power set of this case Great industrial utilization, whence are filed an application in accordance with the law.

Symbol description

1：Micro pressure power set

1A：Minisize fluid control device

1B：Micro valve device

1a：Housing

10：Base

11：Inlet plate

11a：The second surface of inlet plate

11b：The first surface of inlet plate

110：Air admission hole

111：Circular depressions

112：Conflux round

12：Resonance plate

12a：Movable part

12b：Fixed part

120：Hollow bore

121：First chamber

13：Piezo-activator

130：Suspension board

130a：The second surface of suspension board

130b：The first surface of suspension board

130c：Circular protrusions

130d：Central part

130e：Peripheral part

131：Housing

131a：The second surface of housing

131b：The first surface of housing

132：Support

132a：The second surface of support

132b：The first surface of support

133：Piezoelectric board

134、151：Conductive connecting pin

135：Space

141、142：Insulating trip

15：Conducting strip

16：Gas collection plate

16a：Accommodation space

160：Surface

161：Reference surface

162：Gas collection chamber

163：First through hole

164：Second through hole

165：First release chamber

166：First outlet chamber

167、181a：Convex portion structure

168：Side wall

17：Valve sheet

170：Valve opening

171：Position hole

18：Exit plate

180：Reference surface

181：Release through hole

182：Outlet through hole

183：Second release chamber

184：Second outlet chamber

185：Connect runner

187：Second surface

188：Position limiting structure

19：Outlet

g0：Gap

D1：First diameter

D2：Second bobbin diameter

Claims (17)

1. A kind of 1. minisize fluid control device, it is characterised in that including：

   One inlet plate, has the composition surface of an inlet surface and a relative inlet surface, and the inlet surface is provided with least one Air admission hole, the composition surface are arranged with a circular depressions and at least one confluxed round respectively, and the circular depressions have one first straight Footpath, one end of the round that confluxes are connected with the circular depressions, and at least an air admission hole is connected the other end of the round that confluxes with this Logical, gas is imported by an at least air admission hole, and gas is converged into the circular depressions institute structure by least one round that confluxes Into one conflux chamber；

   One resonance plate, there is a hollow bore, to should inlet plate the circular depressions；And

   One piezo-activator, has：

   One suspension board, has relative a first surface and a second surface, and the second surface has a circular protrusions, the circle Convex portion and the circular depressions of the composition surface of the inlet plate are vertically arranged, and the circular protrusions have a Second bobbin diameter, the circle The Second bobbin diameter of shape convex portion and first diameter of the circular depressions are mutually correspondingly formed, and with a gas transport air pressure Working characteristics relation ratio；

   One housing, around the periphery for being arranged at the suspension board；

   An at least support, it is connected between the suspension board and the housing；And

   One piezoelectric board, it is attached at the first surface of the suspension board；

   Wherein, the above-mentioned piezo-activator, the resonance plate and the inlet plate sequentially position to tackling folded set, and the resonance plate Between the piezo-activator there is a gap to form a first chamber, during so that the piezo-activator is driven, gas is by this At least air admission hole of inlet plate imports, and is collected to the circular depressions through at least one round that confluxes, passes through the resonance plate The hollow bore, with enter the first chamber in, then from the space between an at least support for the piezo-activator to Lower transmission, with lasting pushing out gas.
2. 2. minisize fluid control device as claimed in claim 1, it is characterised in that the working characteristics relation ratio is the circle The ratio of first diameter of recess and the Second bobbin diameter of the circular protrusions is between 0.95 to 1.15.
3. 3. minisize fluid control device as claimed in claim 2, it is characterised in that the working characteristics relation is 0.95 than ratio When between to 1.15, it forms gas transport air pressure more than more than 380mmHg.
4. 4. minisize fluid control device as claimed in claim 1, it is characterised in that the working characteristics relation ratio is circular recessed The ratio of first diameter in portion and the Second bobbin diameter of the circular protrusions is between 1 to 1.1.
5. 5. minisize fluid control device as claimed in claim 4, it is characterised in that the working characteristics relation than ratio be 1 to When between 1.1, it forms gas transport air pressure more than more than 410mmHg.
6. 6. the minisize fluid control device as described in claim 2 or 4, it is characterised in that the suspension board is all with the piezoelectric board Square structure.
7. 7. minisize fluid control device as claimed in claim 6, it is characterised in that the length of side of the suspension board is slightly longer than the piezoelectricity The length of side of plate.
8. 8. minisize fluid control device as claimed in claim 6, it is characterised in that the length of side of the suspension board is 8mm to 9mm.
9. 9. minisize fluid control device as claimed in claim 8, it is characterised in that the length of side of the piezoelectric board be 7.5mm extremely 8.5mm。
10. 10. minisize fluid control device as claimed in claim 6, it is characterised in that the length of side of the suspension board is 7.5mm.
11. 11. minisize fluid control device as claimed in claim 10, it is characterised in that the length of side of the piezoelectric board is 7mm.
12. 12. minisize fluid control device as claimed in claim 1, it is characterised in that its height of the circular protrusions between 0.02mm is between 0.08mm.
13. 13. minisize fluid control device as claimed in claim 12, it is characterised in that the height of the circular protrusions is 0.03mm。
14. 14. minisize fluid control device as claimed in claim 1, it is characterised in that the circular depressions its depth be 0.2mm extremely Between 0.4mm.
15. 15. the minisize fluid control device as described in claim 1 or 14, it is characterised in that the depth of the chamber that confluxes is with being somebody's turn to do At least one conflux round depth it is identical.
16. 16. minisize fluid control device as claimed in claim 1, it is characterised in that further include an at least insulating trip and one lead Electric piece, and an at least insulating trip and the conducting strip are sequentially arranged under the piezo-activator.
17. A kind of 17. minisize fluid control device, it is characterised in that including：

    One inlet plate, has the composition surface of an inlet surface and a relative inlet surface, and the inlet surface is provided with least one Air admission hole, the composition surface are arranged with a circular depressions and at least one confluxed round respectively, and the circular depressions have one first straight Footpath；

    One resonance plate, there is a hollow bore, to should inlet plate the circular depressions；And

    One piezo-activator, at least has：

    One suspension board, has relative a first surface and a second surface, and the second surface has a circular protrusions, the circle Convex portion and the circular depressions of the inlet plate composition surface are vertically arranged, and the circular protrusions have a Second bobbin diameter, the circular protrusions The Second bobbin diameter and first diameter of the circular depressions be mutually correspondingly formed, and the work with a gas transport air pressure is special Sexual intercourse ratio；

    One piezoelectric board, it is attached at the first surface of the suspension board；

    Wherein, the above-mentioned piezo-activator, the resonance plate and the inlet plate sequentially position to tackling folded set.