CN108278195B

CN108278195B - Micro fluid control device

Info

Publication number: CN108278195B
Application number: CN201710006869.0A
Authority: CN
Inventors: 廖鸿信; 陈世昌; 廖家淯; 韩永隆; 黄启峰; 李伟铭
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2017-01-05
Filing date: 2017-01-05
Publication date: 2020-12-18
Anticipated expiration: 2037-01-05
Also published as: CN108278195A

Abstract

A micro gas transmission device comprises an air inlet plate, a resonator plate and a piezoelectric actuator which are stacked, wherein the air inlet plate is provided with at least one air inlet hole, at least one bus bar hole and a circular concave part forming a bus bar chamber; the resonance sheet is provided with a hollow hole; the piezoelectric actuator is provided with a suspension plate, an outer frame and a piezoelectric ceramic plate; the suspension plate is provided with a circular convex part corresponding to the circular concave part, and the ratio of the working characteristic relation of the transmission air pressure is formed by changing the corresponding relation between the circular concave part and the circular convex part, so that the transmission air pressure flow is improved, and the performance of the micro gas transmission device is improved.

Description

Micro fluid control device

[ technical field ] A method for producing a semiconductor device

The present invention relates to a miniature fluid control device, which is suitable for a miniature ultrathin and silent miniature pneumatic power device.

[ background of the invention ]

At present, in all fields, no matter in medicine, computer technology, printing, energy and other industries, products are developed towards refinement and miniaturization, wherein fluid conveying structures contained in products such as micropumps, sprayers, ink jet heads, industrial printing devices and the like are key technologies thereof, so that how to break through technical bottlenecks thereof by means of innovative structures is an important content of development.

For example, in the pharmaceutical industry, many instruments or devices that require pneumatic power are often powered by conventional motors and pneumatic valves for gas delivery. However, due to the structural limitations of the conventional motors and gas valves, it is difficult to reduce the volume of the apparatus, so that the overall apparatus cannot be reduced in size, i.e. it is difficult to achieve the object of thinning, and therefore, the apparatus cannot be mounted on or used with a portable device, and is not convenient enough. In addition, these conventional motors and gas valves also generate noise during operation, which can be irritating to users and cause inconvenience and discomfort in use.

Therefore, how to develop a micro fluid control device that can improve the above-mentioned shortcomings of the known technology, and make the traditional instruments or equipment using the micro fluid control device achieve small volume, miniaturization and silence, thereby achieving the portable purpose of portability and comfort, and can achieve the working characteristics of stabilizing the gas transmission pressure, is a problem that needs to be solved at present.

[ summary of the invention ]

The main objective of the present disclosure is to provide a micro fluid control device suitable for portable or wearable instruments or devices, wherein a working characteristic relation ratio of gas transmission pressure is formed by a diameter of a circular concave portion of an air inlet plate and a diameter of a circular convex portion of a suspension plate of a piezoelectric actuator, so as to form a converging chamber having a fluid non-return effect, thereby greatly improving and improving the working characteristic efficiency of the micro fluid control device.

In order to achieve the above objects, a broader aspect of the present invention provides a micro fluid control device suitable for a micro pneumatic power device, including an air inlet plate having an air inlet surface and a joint surface opposite to the air inlet surface, the air inlet surface being provided with at least one air inlet hole, the joint surface being respectively recessed with a circular recess and at least one bus bar hole, the circular recess having a first diameter, one end of the bus bar hole being communicated with the circular recess, the other end of the bus bar hole being communicated with the at least one air inlet hole, the air being introduced from the at least one air inlet hole and being converged to a converging chamber formed by the circular recess through the at least one bus bar hole; a resonance sheet having a hollow hole corresponding to the circular recess of the air inlet plate; and a piezoelectric actuator having: the suspension plate is provided with a first surface and a second surface which are opposite, the second surface is provided with a circular convex part, the circular convex part is vertically arranged with the circular concave part, the circular convex part is provided with a second diameter, and the second diameter is corresponding to the first diameter; an outer frame surrounding the suspension plate; at least one bracket connected between the suspension plate and the outer frame; the piezoelectric plate is attached to the first surface of the suspension plate; the piezoelectric actuator, the resonator plate and the air inlet plate are sequentially and oppositely arranged and positioned in a stacked mode, and a gap is formed between the resonator plate and the piezoelectric actuator to form a first cavity, so that when the piezoelectric actuator is driven, air is guided in from the at least one air inlet hole of the air inlet plate, is collected to the circular concave portion through the at least one bus hole, flows through the hollow hole of the resonator plate to enter the first cavity, and is downwards transmitted through a gap between the at least one support of the piezoelectric actuator to continuously push out the air.

[ description of the drawings ]

Fig. 1A is a schematic front exploded view of a micro pneumatic power device according to a preferred embodiment of the present disclosure.

Fig. 1B is a schematic front assembly structure view of the micro pneumatic power device shown in fig. 1A.

Fig. 2A is a schematic view of a back side exploded structure of the micro pneumatic power device shown in fig. 1A.

Fig. 2B is a schematic view of a back assembly structure of the micro pneumatic power device shown in fig. 1A.

Fig. 3A is a schematic front assembly view of the piezoelectric actuator of the micro pneumatic device shown in fig. 1A.

Fig. 3B is a schematic diagram of a back assembly structure of the piezoelectric actuator of the micro pneumatic power device shown in fig. 1A.

Fig. 3C is a schematic cross-sectional view of a piezoelectric actuator of the micro pneumatic device shown in fig. 1A.

Fig. 4A to 4E are schematic partial operation diagrams of the micro fluid control device of the micro pneumatic power device shown in fig. 1A.

Fig. 5A is a schematic diagram of the pressure collecting operation of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in fig. 1A.

Fig. 5B is a schematic diagram of the pressure relief operation of the gas collector and the microvalve device of the micro pneumatic power device shown in fig. 1A.

Fig. 6A to 6E are schematic pressure-collecting actuation diagrams of the micro pneumatic power device shown in fig. 1A.

Fig. 7 is a schematic diagram illustrating the operation of the micro pneumatic power device shown in fig. 1A for reducing pressure or releasing pressure.

[ detailed description ] embodiments

Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

The micro pneumatic power device 1 of the present invention can be applied to the industries of medicine and technology, energy, computer technology, or printing, etc. for delivering gas, but not limited thereto. Referring to fig. 1A, fig. 1B, fig. 2A and fig. 2B, the micro pneumatic power device 1 of the present invention is formed by combining a micro fluid control device 1A and a micro valve device 1B, wherein the micro fluid control device 1A has structures of an air intake plate 11, a resonator plate 12, a piezoelectric actuator 13,

insulating plates

141 and 142, and a conductive plate 15, but not limited thereto. The piezoelectric actuator 13 is disposed corresponding to the resonator plate 12, and the air inlet plate 11, the resonator plate 12, the piezoelectric actuator 13, the insulating plate 141, the conducting plate 15, the other insulating plate 142, and the air collecting plate 16 are sequentially stacked, and the piezoelectric actuator 13 is formed by assembling a suspension plate 130, an outer frame 131, at least one bracket 132, and a piezoelectric plate 133; and the microvalve device 1B includes a valve plate 17 and an outlet plate 18 but is not limited thereto. In the embodiment, as shown in fig. 1A, the gas collecting plate 16 is not only a single plate structure, but also a frame structure with a side wall 168 at the periphery, and the side wall 168 formed by the periphery and the plate at the bottom thereof define a receiving space 16A for the piezoelectric actuator 13 to be disposed in the receiving space 16A, so that when the micro pneumatic power device 1 of the present invention is assembled, the front schematic view is shown in fig. 1B, and fig. 6A to 6E show that the micro fluid control device 1A is assembled corresponding to the micro valve device 1B, that is, the valve plate 17 and the outlet plate 18 of the micro valve device 1B are sequentially stacked and positioned on the gas collecting plate 16 of the micro fluid control device 1A. The assembled back view shows the pressure relief through holes 181 and the outlet 19 of the outlet plate 18, the outlet 19 is used to connect to a device (not shown), and the pressure relief through holes 181 are used to vent the gas in the microvalve device 1B for pressure relief. By the assembly of the micro fluid control device 1A and the micro valve device 1B, gas is introduced from at least one gas inlet hole 110 on the gas inlet plate 11 of the micro fluid control device 1A, and is continuously transmitted through a plurality of pressure chambers (not shown) by the actuation of the piezoelectric actuator 13, so that the gas can flow in the micro valve device 1B in one direction, and the pressure is accumulated in a device (not shown) connected with the outlet end of the micro valve device 1B, and when pressure relief is required, the output of the micro fluid control device 1A is regulated and controlled, so that the gas is discharged through the pressure relief through hole 181 on the outlet plate 18 of the micro valve device 1B, and pressure relief is performed.

Referring to fig. 1A and fig. 2A, as shown in fig. 1A, the air intake plate 11 of the micro fluid control device 1A has an air intake surface 11A and a bonding surface 11b, the air intake surface 11A is provided with at least one air intake hole 110, in the present embodiment, the number of the air intake holes 110 is 4, but not limited thereto, and the air intake holes 110 penetrate through the air intake surface 11A and the bonding surface 11b of the air intake plate 11, and are mainly used for allowing air to flow from the outside of the device into the micro fluid control device 1A through the at least one air intake hole 110 under the action of atmospheric pressure. As shown in fig. 2A, the joint surface 11b of the air inlet plate 11 is recessed with a circular recess 111 and at least one bus bar hole 112, one end of the at least one bus bar hole 112 is connected to the circular recess 111, and the other end of the at least one bus bar hole 112 is connected to the at least one air inlet 110 on the air inlet surface 11a of the air inlet plate 11. In the present embodiment, the number of the bus bar holes 112 corresponds to the number of the gas inlet holes 110, and the number is 4, but not limited thereto, so that the gas entering the bus bar holes 112 from the gas inlet holes 110 can be guided and converged to the circular recess 111 for transmission. In the present embodiment, the air inlet plate 11 has an air inlet hole 110, a bus hole 112 and a circular recess 111 formed integrally, and a converging chamber for converging air is formed at the circular recess 111 for temporary storage of air. In some embodiments, the material of the air inlet plate 11 may be, but is not limited to, a stainless steel material. In other embodiments, the depth of the bus chamber formed by the circular recess 111 is the same as the depth of the bus holes 112, and the depth of the bus chamber and the bus holes 112 is preferably between 0.2mm and 0.4mm, but not limited thereto. The resonator plate 12 is made of a flexible material, but not limited thereto, and the resonator plate 12 has a hollow hole 120 formed therein corresponding to the circular recess 111 of the joint surface 11b of the inlet plate 11 for gas to flow therethrough. In other embodiments, the resonator plate may be made of a copper material, but not limited thereto.

Referring to fig. 3A, 3B and 3C, the piezoelectric actuator 13 is assembled by a suspension plate 130, a frame 131, at least one bracket 132 and a piezoelectric plate 133, wherein the piezoelectric plate 133 is attached to the first surface 130B of the suspension plate 130 for generating a deformation to drive the suspension plate 130 to perform a bending vibration, the suspension plate 130 has a central portion 130d and an outer peripheral portion 130e, so that when the piezoelectric plate 131 is driven by a voltage, the suspension plate 130 can perform a bending vibration from the central portion 130d to the outer peripheral portion 130e, the at least one bracket 132 is connected between the suspension plate 130 and the frame 131, in this embodiment, the bracket 132 is connected between the suspension plate 130 and the frame 131, two ends of the bracket 132 are respectively connected to the frame 131 and the suspension plate 130 to provide an elastic support, and at least one gap 135 is further provided between the bracket 132, the frame 130 and the frame 131, for the circulation of air, the shapes and the number of the suspension plate 130, the outer frame 131 and the brackets 132 can be varied. In addition, the outer frame 131 is disposed around the outer side of the suspension board 130, and has a conductive pin 134 protruding outward for power connection, but not limited thereto. In the present embodiment, the suspension plate 130 is a stepped structure, that is, the second surface 130a of the suspension plate 130 further has a circular protrusion 130c, the circular protrusion 130c is perpendicular to the circular recess and corresponds to the circular recess, and the height of the circular protrusion 130c is between 0.02mm and 0.08mm, and preferably 0.03 mm. As can be seen from fig. 3A and 3C, the surface of the circular protrusion 130C of the suspension plate 130 is coplanar with the second surface 131a of the outer frame 131, the second surface 130a of the suspension plate 130 and the second surface 132a of the bracket 132 are also coplanar, and a specific depth is provided between the circular protrusion 130C of the suspension plate 130 and the second surface 131a of the outer frame 131, and the second surface 130a of the suspension plate 130 and the second surface 132a of the bracket 132. As for the first surface 130B of the suspension plate 130, as shown in fig. 3B and 3C, it is a flat coplanar structure with the first surface 131B of the outer frame 131 and the first surface 132B of the bracket 132, and the piezoelectric plate 133 is attached to the flat first surface 130B of the suspension plate 130. In other embodiments, the suspension plate 130 may also be a square structure with a flat surface and a flat surface, and the shape of the suspension plate can be changed according to the actual implementation. In some embodiments, the suspension plate 130, the bracket 132 and the outer frame 131 may be integrally formed, and may be formed by a metal plate, such as stainless steel, but not limited thereto. And in some embodiments, the length of the side of the suspension plate 130 is between 8mm and 9 mm.

In other embodiments, the length of the piezoelectric plate 133 is slightly smaller than that of the suspension plate 130, and the length is between 7.5mm and 8.5mm, but not limited thereto.

In another embodiment, the length of the suspension plate 130 may be 7.5mm, and the length of the piezoelectric plate 133 is slightly smaller than the length of the suspension plate 130, which is 7 mm.

Referring to fig. 4A, the circular protrusion 130c of the suspension plate 130 and the circular recess 111 of the air intake plate 11 are vertically disposed and correspond to each other, wherein the circular recess 111 has a first diameter D1, the circular protrusion 130c has a second diameter D2, and when the first diameter D1 is fixed, the corresponding operational characteristic relationship between the two is obtained after the second diameter D2 is adjusted as shown in the following table:

watch 1

Thus, it can be seen from the above table of experiments that: the ratio D2/D1 between the first diameter D1 of the circular recess 111 of the air inlet plate 11 and the second diameter D2 of the circular protrusion 130c of the suspension plate 130 has a great influence on the air flow rate of the micro fluid control device 1A, when the ratio D2/D1 between the second diameter D2 and the first diameter D1 is between 0.95 and 1.15, the efficiency of the operating characteristics of the air transmission thereof is improved, and a higher value of the air transmission pressure is obtained, and the lowest value of the air transmission pressure exceeds 380mmHg, and particularly when the ratio D2/D1 is between 1 and 1.1, the lowest value of the air transmission pressure is above 410mmHg, so it can be known that the ratio D2/D1 between the second diameter D2 and the first diameter D1 affects the operating characteristics (air pressure value) of the micro fluid device 1A, and the ratio D2/D1 between the second diameter D2 and the first diameter D1 is greatly defined as 0.95 to 1.15, that the efficiency of the micro fluid control device is higher, the working characteristic performance is improved, so that the working characteristic relation ratio of the gas transmission pressure formed by the first diameter D1 of the circular concave part 111 and the second diameter D2 of the circular convex part 130c of the suspension plate 130 corresponding to each other is adopted, and therefore, the proportional relation between the second diameter D2 and the first diameter D1 has a fluid non-return effect of the confluence chamber formed thereby, which not only greatly improves and improves the working characteristic efficiency of the micro fluid control device 1A, which is a very important design point, but also in any case, the working characteristic relation ratio of the gas transmission pressure formed by the first diameter D1 of the circular concave part 111 and the second diameter D2 of the circular convex part 130c of the suspension plate 130 corresponding to each other is obtained through experiments and can not be directly deduced by theoretical formulas, the working characteristic relation ratio of the gas transmission pressure formed by the first diameter D1 of the circular concave part 111 and the second diameter D2 of the circular convex part 130c of the suspension plate 130 corresponding to each other, the reasoning is merely as a reference for experimental rationality.

The reason why the square suspension plate 130 is adopted in the piezoelectric actuator 13 of the present disclosure is that compared with the design of a circular suspension plate, the structure of the square suspension plate 130 obviously has the advantage of power saving, and the comparison of the consumed power is as shown in the following table two:

watch two

From the above table of the experiment it follows: compared with the piezoelectric actuator with the diameter of the circular suspension plate (8mm to 10mm), the piezoelectric actuator 13 with the side length (8mm to 10mm) of the square suspension plate 130 is more power-saving. The reason for the power saving of the above-mentioned power consumption comparison data obtained by the experiment can be presumed as follows: because the capacitive load operated under the resonant frequency increases with the increase of the frequency, and because the resonant frequency of the suspension plate 130 with the square side length is obviously lower than that of the same circular suspension plate, the relative power consumption is also obviously lower, that is, the square suspension plate 130 adopted in the scheme has the advantage of power saving compared with the design of the circular suspension plate, and especially applied to a wearable device, the power saving is a very important design point. However, the power saving effect of the suspension board with the square design is obtained through experiments, and can not be directly derived by theoretical formulas, and the power saving reason is only presumed as a reference for experimental rationality.

In addition, referring to fig. 1A and fig. 2A, the micro fluid control device 1A further includes an insulation sheet 141, a conductive sheet 15 and another insulation sheet 142, which are sequentially disposed under the piezoelectric actuator 13 and have a shape substantially corresponding to the shape of the outer frame of the piezoelectric actuator 13. In some embodiments, the insulating

sheets

141 and 142 are made of an insulating material, such as: plastic, but not limited to this, for insulation; in other embodiments, the conductive sheet 15 is made of a conductive material, such as: but not limited to, metals for electrical conduction. In the present embodiment, a conductive pin 151 may also be disposed on the conductive sheet 15 for electrical conduction.

Referring to fig. 1A and fig. 4A to 4E, fig. 4A to 4E are partial schematic operation diagrams of the micro fluid control device 1A of the micro pneumatic power device shown in fig. 1A. First, as shown in fig. 4A, it can be seen that the micro fluid control device 1A is formed by sequentially stacking the air inlet plate 11, the resonator plate 12, the piezoelectric actuator 13, the insulating plate 141, the conducting plate 15 and the other insulating plate 142, and in this embodiment, a material is filled in the gap g0 between the resonator plate 12 and the periphery of the outer frame 131 of the piezoelectric actuator 13, for example: the conductive paste, but not limited thereto, maintains the depth of the gap g0 between the resonator plate 12 and the circular protrusion 130c of the suspension plate 130 of the piezoelectric actuator 13, so as to guide the air flow to flow more rapidly, and since the circular protrusion 130c of the suspension plate 130 and the resonator plate 12 maintain a proper distance, the contact interference between them is reduced, so that the noise generation can be reduced.

Referring to fig. 4A to 4E, as shown in the figure, after the air inlet plate 11, the resonator plate 12 and the piezoelectric actuator 13 are assembled in sequence, a chamber for collecting gas is formed at the hollow hole 120 of the resonator plate 12 and the air inlet plate 11 thereon, and a first chamber 121 is further formed between the resonator plate 12 and the piezoelectric actuator 13 for temporarily storing the gas, and the first chamber 121 is communicated with the chamber at the circular recess 111 of the first surface 11B of the air inlet plate 11 through the hollow hole 120 of the resonator plate 12, and two sides of the first chamber 121 are communicated with the valve device 1B disposed therebelow through the micro gap 135 between the brackets 132 of the piezoelectric actuator 13.

When the micro fluid control device 1A of the micro pneumatic power device 1 is operated, the piezoelectric actuator 13 is mainly actuated by a voltage to perform reciprocating vibration in the vertical direction with the support 132 as a fulcrum. As shown in fig. 4B, when the piezoelectric actuator 13 is actuated by a voltage to vibrate downward, since the resonator plate 12 is a light and thin sheet-like structure, when the piezoelectric actuator 13 vibrates, the resonator plate 12 also vibrates in a vertical reciprocating manner along with the resonance, that is, the portion of the resonator plate 12 corresponding to the circular recess 111 of the air inlet plate 11 also deforms along with the bending vibration, that is, the portion of the resonator plate 12 corresponding to the circular recess 111 of the air inlet plate 11 is the movable portion 12a of the resonator plate 12, so that when the piezoelectric actuator 13 vibrates in a downward bending manner, the movable portion 12a of the resonator plate 12 is pushed and pressed by the fluid and the piezoelectric actuator 13 vibrates, and along with the deformation of the piezoelectric actuator 13 in a downward bending vibration, the gas enters from at least one air inlet hole 110 on the air inlet plate 11 and is collected to the circular recess 111 therein through at least one bus hole 112 of the joint surface 11B, and then flows downward into the first chamber 121 through the central hole 120 of the resonance plate 12 disposed corresponding to the circular recess 111, thereafter, the resonator plate 12 is vibrated in a vertically reciprocating manner by the resonance caused by the vibration of the piezoelectric actuator 13, as shown in fig. 4C, and at this time, the movable portion 12a of the resonator plate 12 is also vibrated in a downward direction, and is adhered to and abutted against the circular convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13, so that the distance between the confluence chamber between the region other than the circular convex portion 130c of the suspension plate 130 and the fixing portions 12b at both sides of the resonator plate 12 is not decreased, and by the deformation of the resonator plate 12, to compress the volume of the first chamber 121 and close the middle flow space of the first chamber 121, so as to promote the gas therein to flow toward both sides, and thus downward through the flow, via the gaps 135 between the legs 132 of the piezoelectric actuator 13. In FIG. 4D, the movable portion 12a of the resonator plate 12 is deformed by bending vibration and then returns to the initial position, while the subsequent piezoelectric actuator 13 is driven by the voltage to vibrate upward, so as to also compress the volume of the first chamber 121, and since the piezoelectric actuator 13 is lifted upward, the displacement of the lift may be d, thereby allowing the gas in the first chamber 121 to flow toward both sides, thereby driving the gas to continuously enter from the at least one gas inlet hole 110 on the gas inlet plate 11, and then flow into the chamber formed by the circular concave portion 111, as shown in fig. 4E, the resonance piece 12 resonates upward by the upward-lifting vibration of the piezoelectric actuator 13, the movable portion 12a of the resonance piece 12 is also brought to the upward position, so that the gas in the circular recess 111 flows into the first chamber 121 through the central hole 120 of the resonator plate 12, and passes downwardly through the gap 135 between the legs 132 of the piezoelectric actuator 13 to exit the microfluidic control device 1A. In this embodiment, when the resonator plate 12 is vertically reciprocated, the maximum vertical displacement distance can be increased by the gap g0 between the resonator plate and the piezoelectric actuator 13, in other words, the gap g0 between the two structures can allow the resonator plate 12 to generate a larger vertical displacement at the time of resonance. Thus, a pressure gradient is generated in the flow channel design of the micro fluid control device 1A, so that the gas flows at a high speed, the gas is transmitted from the suction end to the discharge end through the impedance difference in the inlet and outlet directions of the flow channel, and the gas can be continuously pushed out under the condition that the discharge end has air pressure, and the effect of silence can be achieved.

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonator plate 12 may be the same as the vibration frequency of the piezoelectric actuator 13, i.e. both of them may be upward or downward at the same time, which may be varied according to the actual implementation, and is not limited to the operation manner shown in this embodiment.

Referring to fig. 1A and 2A and fig. 5A and 5B, a micro valve device 1B of the micro pneumatic power device 1 of the present invention is formed by sequentially stacking a valve plate 17 and an outlet plate 18, and operates with a gas collecting plate 16 of the micro fluid control device 1A.

In the present embodiment, the gas collecting plate 16 has a surface 160 and a reference surface 161, the surface 160 is recessed to form a gas collecting chamber 162, in which the piezoelectric actuator 13 is disposed, the gas transmitted downward from the microfluidic control device 1A is temporarily accumulated in the gas collecting chamber 162, and the gas collecting plate 16 has a plurality of through holes including a first through hole 163 and a second through hole 164, one end of the first through hole 163 and one end of the second through hole 164 are communicated with the gas collecting chamber 162, and the other end is communicated with the first pressure relief chamber 165 and the first outlet chamber 166 on the reference surface 161 of the gas collecting plate 16. And, a protrusion 167, such as but not limited to a cylinder, is further added to the first outlet chamber 166, and the height of the protrusion 167 is higher than the reference surface 161 of the gas collecting plate 16.

The outlet plate 18 includes a pressure relief through hole 181, an outlet through hole 182, a reference surface 180 and a second surface 187, wherein the pressure relief through hole 181 and the outlet through hole 182 respectively penetrate through the reference surface 180 and the second surface 187 of the outlet plate 18, the reference surface 180 is recessed with a second pressure relief chamber 183 and a second outlet chamber 184, the pressure relief through hole 181 is disposed in the central portion of the second pressure relief chamber 183, and further has a communication flow passage 185 between the second pressure relief chamber 183 and the second outlet chamber 184 for gas communication, and one end of the outlet through hole 182 is communicated with the second outlet chamber 184, and the other end is communicated with the outlet 19, in this embodiment, the outlet 19 is connectable to a device (not shown), for example: but not limited to, a press machine.

The valve plate 17 has a valve hole 170 and a plurality of positioning holes 171; when the valve plate 17 is positioned and assembled between the gas collecting plate 16 and the outlet plate 18, the pressure relief through hole 181 of the outlet plate 18 corresponds to the first through hole 163 of the gas collecting plate 16, the second pressure relief chamber 183 corresponds to the first pressure relief chamber 165 of the gas collecting plate 16, the second outlet chamber 184 corresponds to the first outlet chamber 166 of the gas collecting plate 16, the valve plate 17 is disposed between the gas collecting plate 16 and the outlet plate 18 to block the first pressure relief chamber 165 from communicating with the second pressure relief chamber 183, the valve hole 170 of the valve plate 17 is disposed between the second through hole 164 and the outlet through hole 182, and the valve hole 170 is correspondingly disposed on the convex portion structure 167 of the first outlet chamber 166 of the gas collecting plate 16, so that the gas can flow in one direction due to the pressure difference of the gas by virtue of the design of the single valve hole 170.

A convex structure 181a formed by protruding may be added to one end of the pressure relief through hole 181 of the outlet plate 18, such as but not limited to a cylindrical structure, and the height of the convex structure 181a is increased by improving the convex structure 181a, and the height of the convex structure 181a is higher than the reference surface 180 of the outlet plate 18, so as to enhance the effect that the valve plate 17 rapidly collides with and seals the pressure relief through hole 181, and achieve a complete sealing effect by a pre-stressing collision effect; the outlet plate 18 further has at least one limiting structure 188, for example, the limiting structure 188 is disposed in the second pressure relief chamber 183, and is an annular block structure, and not limited thereto, and is mainly used for assisting in supporting the valve plate 17 to prevent the valve plate 17 from collapsing and to enable the valve plate 17 to open or close more rapidly when the microvalve device 1B performs pressure collecting operation.

When the micro valve device 1B is actuated by pressure collection, as shown in fig. 5A, it can respond to the pressure provided by the gas transmitted downward from the micro fluid control device 1A, or when the external atmospheric pressure is greater than the internal pressure of the device (not shown) connected to the outlet 19, gas flows from the gas collection chamber 162 in the gas collection plate 16 of the microfluidic control device 1A down through the first and second through

holes

163, 164 into the first pressure relief chamber 165 and the first outlet chamber 166, respectively, at which time, the downward gas pressure causes the flexible valve flap 17 to flex downwardly and thereby increase the volume of the first pressure relief chamber 165, and the part corresponding to the first through hole 163 is flatly attached downwards and abutted against the end of the pressure relief through hole 181, further, the pressure relief through holes 181 of the outlet plate 18 are closed, so that the gas in the second pressure relief chamber 183 does not flow out from the pressure relief through holes 181. In this embodiment, a design of a protrusion 181a is added to the end of the pressure relief through hole 181 to enhance the valve plate 17 to rapidly abut against and seal the pressure relief through hole 181, and achieve a complete sealing effect due to a pre-stressed abutting effect, and a limiting structure 188 is disposed around the pressure relief through hole 181 to assist in supporting the valve plate 17 without collapsing. On the other hand, since the gas flows downward into the first outlet chamber 166 from the second through hole 164 and the valve plate 17 corresponding to the first outlet chamber 166 is also deformed downward, so that the corresponding valve hole 170 is opened downward, the gas can flow from the first outlet chamber 166 into the second outlet chamber 184 through the valve hole 170 and flow from the outlet through hole 182 to the outlet 19 and the device (not shown) connected to the outlet 19, thereby performing a pressure-collecting operation on the device.

Referring to fig. 5B, when the micro valve device 1B is used for pressure relief, the gas transmission amount of the micro fluid control device 1A is controlled such that the gas is not input into the gas collecting chamber 162, or when the internal pressure of the device (not shown) connected to the outlet 19 is higher than the external atmospheric pressure, the micro valve device 1B is used for pressure relief. At this time, the gas is input into the second outlet chamber 184 from the outlet through hole 182 connected to the outlet 19, so that the volume of the second outlet chamber 184 expands, and further the flexible valve plate 17 is bent upwards and deformed, and is flatly attached upwards and abutted against the gas collecting plate 16, so that the valve hole 170 of the valve plate 17 is closed by abutting against the gas collecting plate 16. In this embodiment, a convex structure 167 is added to the first outlet chamber 166, so that the flexible valve plate 17 can be bent upwards to change shape and quickly abut against the valve hole 170, and the valve hole 170 can be closed by abutting against the convex structure 167, so that the gas in the second outlet chamber 184 will not flow back into the first outlet chamber 166, and the gas leakage can be prevented. And, the gas in the second outlet chamber 184 can flow into the second pressure relief chamber 183 through the communication flow path 185, so as to expand the volume of the second pressure relief chamber 183 and make the valve plate 17 corresponding to the second pressure relief chamber 183 also bend and deform upwards, at this time, because the valve plate 17 is not pressed against and closed on the end of the pressure relief through hole 181, the pressure relief through hole 181 is in an open state, that is, the gas in the second pressure relief chamber 183 can flow outwards from the pressure relief through hole 181 for pressure relief operation. In this embodiment, the flexible valve plate 17 can be quickly changed in the upward bending shape by the protrusion 181a additionally provided at the end of the pressure relief through hole 181 or by the stopper 188 provided in the second pressure relief chamber 183, and the state of closing the pressure relief through hole 181 can be advantageously released. Thus, the gas in the device (not shown) connected to the outlet 19 is discharged by the one-way pressure relief operation to reduce the pressure, or is completely discharged to complete the pressure relief operation.

Please refer to fig. 1A, fig. 2A, and fig. 6A to fig. 6E, wherein fig. 6A to fig. 6E are schematic pressure-collecting operation diagrams of the micro pneumatic power device shown in fig. 1A. As shown in fig. 6A, the micro pneumatic power device 1 is composed of a micro fluid control device 1A and a micro valve device 1B, wherein the micro fluid control device 1A is formed by sequentially stacking and positioning the inlet plate 11, the resonator plate 12, the piezoelectric actuator 13, the insulating plate 141, the conductive plate 15, another insulating plate 142 and the air collecting plate 16, and a gap g0 is formed between the resonator plate 12 and the piezoelectric actuator 13, and a first chamber 121 is formed between the resonator plate 12 and the piezoelectric actuator 13, and the micro valve device 1B is formed by sequentially stacking and positioning the valve plate 17 and the outlet plate 18 on the air collecting plate 16 of the micro fluid control device 1A, and a air collecting chamber 162 is formed between the air collecting plate 16 and the piezoelectric actuator 13 of the micro fluid control device 1A, and a first pressure relief chamber 165 and a first outlet chamber 166 are further recessed in the reference surface 161 of the air collecting plate 16, and a second pressure relief chamber 183 and a second outlet chamber 184 are further recessed on the reference surface 180 of the outlet plate 18, in the present embodiment, the operating frequency of the micro pneumatic power device is 27K-29.5K, the operating voltage is ± 10V-16V, and the plurality of different pressure chambers are used together with the driving of the piezoelectric actuator 13 and the vibration of the resonator plate 12 and the valve plate 17, so as to transmit the gas downward in a pressure-collecting manner.

As shown in fig. 6B, when the piezoelectric actuator 13 of the microfluidic control device 1A is actuated by voltage to vibrate downward, the gas enters the microfluidic control device 1A through the gas inlet hole 110 on the gas inlet plate 11, and is collected at the circular recess 111 through at least one bus hole 112, and then flows downward into the first chamber 121 through the hollow hole 120 on the resonator plate 12. Thereafter, as shown in fig. 6C, due to the resonance effect of the piezoelectric actuator 13, the resonator plate 12 also vibrates in a reciprocating manner, i.e. it vibrates downward and approaches to the circular protrusion 130C of the suspension plate 130 of the piezoelectric actuator 13, and by the deformation of the resonator plate 12, the volume of the chamber at the circular recess 111 of the air inlet plate 11 is increased and the volume of the first chamber 121 is compressed, so that the air in the first chamber 121 flows to both sides, and further flows downward through the gap 135 between the supports 132 of the piezoelectric actuator 13 to flow into the air collection chamber 162 between the microfluidic control device 1A and the microvalve device 1B, and then flows downward into the first pressure relief chamber 165 and the first outlet chamber 166 through the first through hole 163 and the second through hole 164 communicating with the air collection chamber 162, and thus the embodiment can be seen, when the resonator plate 12 vertically reciprocates, the maximum vertical displacement distance can be increased by the gap g0 between the resonator plate and the piezoelectric actuator 13, in other words, the gap g0 between the two structures can allow the resonator plate 12 to generate a larger vertical displacement at the time of resonance.

Then, as shown in fig. 6D, since the resonance plate 12 of the micro fluid control device 1A returns to the initial position, and the piezoelectric actuator 13 is driven by the voltage to vibrate upwards, so as to also compress the volume of the first chamber 121, so that the gas in the first chamber 121 flows towards both sides, and is continuously input into the gas collecting chamber 162, the first pressure relief chamber 165 and the first outlet chamber 166 through the gap 135 between the supports 132 of the piezoelectric actuator 13, so that the pressure in the first pressure relief chamber 165 and the first outlet chamber 166 is increased, and the flexible valve plate 17 is pushed downwards to generate bending deformation, and in the second pressure relief chamber 183, the valve plate 17 is flatly attached downwards and abuts against the convex structure 181A at the end of the pressure relief through hole 181, so that the pressure relief through hole 181 is closed, and in the second outlet chamber 184, the valve hole 170 on the valve plate 17 corresponding to the outlet through hole 182 is opened downwards, the gas in the second outlet chamber 184 can be transferred from the outlet through hole 182 to the outlet 19 and any device (not shown) connected to the outlet 19, thereby achieving the pressure-collecting operation. Finally, as shown in fig. 6E, when the resonance plate 12 of the microfluidic control device 1A is shifted upward due to resonance, and the gas in the circular recess 111 of the joint surface 11b of the gas inlet plate 11 can flow into the first chamber 121 through the hollow hole 120 of the resonance plate 12, and then continuously flow downward into the gas collecting plate 16 through the gap 135 between the brackets 132 of the piezoelectric actuator 13, the gas will continuously flow into the outlet 19 and any device connected to the outlet 19 through the gas collecting chamber 162, the second through hole 164, the first outlet chamber 166, the second outlet chamber 184 and the outlet through hole 182 due to the continuous downward increase of the gas pressure, and the pressure collecting operation can be driven by the atmospheric pressure outside and the pressure difference inside the device, but not limited thereto.

When the pressure inside the device (not shown) connected to the outlet 19 is higher than the external pressure, the micro pneumatic power device 1 may perform a pressure reducing or relieving operation as shown in fig. 7, and the pressure reducing or relieving operation is mainly performed as described above, and the gas transmission amount of the micro fluid control device 1A may be regulated to prevent the gas from being input into the gas collecting chamber 162, at this time, the gas is input into the second outlet chamber 184 from the outlet through hole 182 connected to the outlet 19, so that the volume of the second outlet chamber 184 is expanded, and the flexible valve plate 17 is further caused to bend upwards and deform, and is flatly attached to and abutted against the convex portion structure 167 of the first outlet chamber 166, so that the valve hole 170 of the valve plate 17 is closed, that is, the gas in the second outlet chamber 184 does not flow back into the first outlet chamber 166; the gas in the second outlet chamber 184 can flow into the second pressure relief chamber 183 through the communication channel 185, and then the pressure relief operation is performed through the pressure relief through hole 181; the gas in the device connected to the outlet 19 is discharged by the one-way gas transfer operation of the micro valve structure 1B to reduce the pressure or completely discharged to complete the pressure relief operation.

In summary, the micro pneumatic power device provided by the present disclosure is mainly configured to increase the pneumatic value of the micro fluid control device by adjusting the diameter ratio of the circular concave portion of the air inlet plate and the circular convex portion of the suspension plate in the micro fluid control device, so as to increase the overall exhaust effect, when the micro fluid control device and the micro valve device are assembled with each other, air enters from the air inlet on the micro fluid control device, and the actuation of the piezoelectric actuator is utilized to generate a pressure gradient in the designed flow channel and the pressure chamber, so that the air flows at a high speed and is transmitted to the micro valve device, and then the air flows in a single direction through the design of the one-way valve of the micro valve device, so that the pressure can be accumulated in any device connected to the outlet; when the pressure is reduced or relieved, the transmission quantity of the micro fluid control device is regulated and controlled, and the gas can be transmitted to the second outlet chamber of the micro valve device from the device connected with the outlet, and transmitted to the second pressure relief chamber from the communicating flow channel and then flows out from the pressure relief hole, so that the gas can be rapidly transmitted, the silencing effect can be achieved, the integral volume of the micro gas power device can be reduced and thinned, the portable light and comfortable purpose of the micro gas power device can be achieved, and the micro gas power device can be widely applied to medical equipment and related equipment. Therefore, the micro gas power device has great industrial application value, and the application is provided by the method.

While the present invention has been described in detail with respect to the above embodiments, it will be apparent to those skilled in the art that various modifications can be made without departing from the scope of the invention as defined in the appended claims.

[ notation ] to show

1: miniature pneumatic power device

1A: micro fluid control device

1B: micro valve device

1 a: shell body

10: base seat

11: air inlet plate

11 a: second surface of air inlet plate

11 b: first surface of air inlet plate

110: air intake

111: circular recess

112: bus bar hole

12: resonance sheet

12 a: movable part

12 b: fixing part

120: hollow hole

121: the first chamber

13: piezoelectric actuator

130: suspension plate

130 a: second surface of the suspension plate

130 b: the first surface of the suspension plate

130 c: round convex part

130 d: center part

130e, 130 e: outer peripheral portion

131: outer frame

131 a: second surface of the outer frame

131 b: the first surface of the outer frame

132: support frame

132 a: second surface of the bracket

132 b: first surface of the bracket

133: piezoelectric plate

134. 151, 151: conductive pin

135: voids

141. 142: insulating sheet

15: conductive sheet

16: air collecting plate

16 a: containing space

160: surface of

161: reference surface

162: air-collecting chamber

163: the first through hole

164: second through hole

165: first pressure relief chamber

166: first outlet chamber

167. 181 a: convex part structure

168: side wall

17: valve plate

170: valve bore

171: positioning hole

18: outlet plate

180: reference surface

181: pressure relief through hole

182: outlet through hole

183: second pressure relief chamber

184: second outlet chamber

185: communicating flow passage

187: second surface

188: limiting structure

19: an outlet

g 0: gap

D1: first diameter

D2: second diameter

Claims

1. A microfluidic control device, comprising:

the air inlet plate is provided with an air inlet surface and a joint surface opposite to the air inlet surface, the air inlet surface is provided with at least one air inlet hole, the joint surface is respectively concavely provided with a circular concave part and at least one bus bar hole, the circular concave part has a first diameter, one end of the bus bar hole is communicated with the circular concave part, the other end of the bus bar hole is communicated with the at least one air inlet hole, and gas is led in from the at least one air inlet hole and is converged to a confluence chamber formed by the circular concave part through the at least one bus bar hole;

a resonance sheet having a hollow hole corresponding to the circular recess of the air inlet plate; and

a piezoelectric actuator having:

a suspension plate having a first surface and a second surface opposite to each other, the second surface having a circular protrusion, the circular protrusion being disposed perpendicular to the circular recess of the joining surface of the intake plate, the circular protrusion having a second diameter, the second diameter of the circular protrusion being formed corresponding to the first diameter of the circular recess, and having a working characteristic relation ratio of a gas transmission pressure, the working characteristic relation ratio being a ratio of the first diameter of the circular recess to the second diameter of the circular protrusion, the working characteristic relation ratio being between 0.95 and 1.15;

an outer frame surrounding the suspension plate;

at least one bracket connected between the suspension plate and the outer frame; and

a piezoelectric plate attached to the first surface of the suspension plate;

the piezoelectric actuator, the resonator plate and the air inlet plate are sequentially and oppositely arranged and positioned in a stacked mode, and a gap is formed between the resonator plate and the piezoelectric actuator to form a first cavity, so that when the piezoelectric actuator is driven, air is guided in from the at least one air inlet hole of the air inlet plate, is collected to the circular concave portion through the at least one bus hole, flows through the hollow hole of the resonator plate to enter the first cavity, and is downwards transmitted through a gap between the at least one support of the piezoelectric actuator to continuously push out the air.

2. The microfluidic control device of claim 1 wherein the duty ratio is between 0.95 and 1.15, which constitutes a gas delivery pressure in excess of 380 mmHg.

3. The microfluidic control device of claim 1 wherein the duty ratio is between 1 and 1.1.

4. The microfluidic control device of claim 3 wherein the duty ratio is between 1 and 1.1, which constitutes a gas delivery pressure in excess of 410 mmHg.

5. The microfluidic control device according to claim 1 or 3, wherein the suspension plate and the piezoelectric plate are both square.

6. The microfluidic device of claim 5 wherein the length of the side of the suspension plate is slightly longer than the length of the side of the piezoelectric plate.

7. The microfluidic device of claim 5 wherein the suspension plate has a side length of 8mm to 9 mm.

8. The microfluidic control device of claim 7 wherein the piezoelectric plate has a side length of 7.5mm to 8.5 mm.

9. The microfluidic device of claim 5 wherein the suspension plate has a side length of 7.5 mm.

10. The microfluidic control device of claim 9 wherein the piezoelectric plate has a side of 7 mm.

11. The microfluidic control device of claim 1 wherein the rounded protrusion has a height of between 0.02mm to 0.08 mm.

12. The microfluidic control device of claim 11 wherein the height of the rounded protrusion is 0.03 mm.

13. The microfluidic control device of claim 1 wherein the circular recess has a depth of between 0.2mm and 0.4 mm.

14. The microfluidic control device of claim 1 or 13, wherein the depth of the manifold chamber is the same as the depth of the at least one manifold hole.

15. The microfluidic control device according to claim 1, further comprising at least one insulating plate and one conducting plate, wherein the at least one insulating plate and the conducting plate are sequentially disposed under the piezoelectric actuator.

16. A microfluidic control device, comprising:

the air inlet plate is provided with an air inlet surface and a joint surface opposite to the air inlet surface, the air inlet surface is provided with at least one air inlet hole, the joint surface is respectively provided with a circular concave part and at least one busbar hole in a concave mode, and the circular concave part is provided with a first diameter;

a piezoelectric actuator having at least:

a suspension plate having a first surface and a second surface opposite to each other, the second surface having a circular protrusion, the circular protrusion being perpendicular to the circular recess of the joining surface of the intake plate, the circular protrusion having a second diameter, the second diameter of the circular protrusion being formed corresponding to the first diameter of the circular recess, and having a working characteristic relation ratio of a gas transmission pressure, the working characteristic relation ratio being a ratio of the first diameter of the circular recess to the second diameter of the circular protrusion, the working characteristic relation ratio being between 0.95 and 1.15;

a piezoelectric plate attached to the first surface of the suspension plate;

the piezoelectric actuator, the resonator plate and the air inlet plate are correspondingly stacked and positioned in sequence.