TW201727108A - Micro-valve device - Google Patents

Abstract

A micro-valve device is disclosed and comprises a gas gather board, a valve membrane and a outlet board, the gas gather board has at least one first penetrating hole, at least one second penetrating hole, at least one first pressure relief chamber and at least one first outlet chamber, the valve membrane has a valve hole, and the outlet board has at least one third penetrating hole, at least one fourth penetrating hole, at least one second pressure relief chamber and at least one second outlet chamber, when the gas goes into the first pressure relief chamber and the first outlet chamber form the first penetrating hole and the second penetrating hole, the valve membrane is opened downwardly, the gas then flows into the fourth penetrating hole to gather pressure. Inversely, when the gas flows into the second outlet chamber from the fourth penetrating hole, the valve membrane moves upwardly and contacts with the gas gather board, thereby close the valve hole of the valve membrane, and the gas of the second outlet chamber can flow into the second pressure relief chamber through a connecting channel, and then flow out the third penetrating hole to relief pressure.

Description

Micro valve device

The present invention relates to a miniature valve device, and more particularly to a miniature valve device suitable for use in a micro pneumatic power device.

At present, in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization. Among them, products such as micro-pumps, sprayers, inkjet heads, industrial printing devices, etc. The fluid transport structure is its key technology, which is how to break through its technical bottleneck with innovative structure and be an important part of development.

For example, in the pharmaceutical industry, many instruments or equipment that require pneumatic power drive are usually used with conventional motors and pneumatic valves to achieve their gas delivery. However, limited by the volume limitations of conventional motors and gas valves, it is difficult for such instruments to reduce the size of their overall devices, that is, it is difficult to achieve the goal of thinning, and it is impossible to achieve portable purposes. In addition, these conventional motors and gas valves also cause noise problems when they are actuated, resulting in inconvenience and discomfort in use.

Therefore, how to develop a microvalve device that can improve the above-mentioned conventional technology and make the instrument or device using the gas transmission device small, miniaturized and muted, thereby achieving a portable and portable purpose, is currently There is an urgent need to solve the problem.

The main purpose of this case is to provide a micro-valve device suitable for a micro-pneumatic power device. The valve structure allows the gas to flow in a one-way flow in the micro-valve device to perform the operation of collecting pressure or reducing pressure and pressure relief. Conventional technologies using pneumatically powered instruments or equipment are bulky, difficult to thin, unable to achieve portable purposes, and lack of noise.

In order to achieve the above object, a broader aspect of the present invention provides a microvalve device suitable for a micro pneumatic power device, comprising: a valve piece having a valve hole, the valve piece having a range of 0.1 mm to 0.3 a thickness between the mm; a gas collecting plate having a first through hole, a second through hole, a first pressure relief chamber and a first outlet chamber, and having a reference surface, the first outlet cavity The chamber has a convex structure configured to correspond to the valve hole of the valve piece, and is formed to positively abut the valve hole to completely seal the valve hole, and the height of the convex structure is higher than that of the gas collecting plate a first through hole communicating with the first pressure relief chamber, the second through hole being in communication with the first outlet chamber; and an outlet plate having a third through hole and a fourth through hole a hole, a second pressure relief chamber, a second outlet chamber, and at least one limiting structure, and having a reference surface, the third through hole end having a convex structure, the height of the convex structure being higher than The reference surface of the outlet plate is advantageous for the valve piece Quickly resisting to form a pre-stressing effect, completely closing the third through hole, the third through hole corresponding to the first through hole of the gas collecting plate, and communicating with the second pressure relief chamber, the fourth through hole The hole corresponds to the second through hole and communicates with the second outlet chamber. The at least one limiting structure is disposed in the second pressure relief chamber, and the thickness of the limiting structure is between 0.3 mm and 0.5 mm. And a communication flow path between the second pressure relief chamber and the second outlet chamber; wherein the gas collecting plate, the valve piece and the outlet plate are sequentially disposed correspondingly to the stack, The valve piece is disposed between the gas collecting plate and the outlet plate, and the valve hole of the valve piece is correspondingly disposed between the second through hole and the fourth through hole, and the gas is micro from the micro pneumatic power device When the gas transmission device is transferred downward into the micro valve device, the first through hole and the second through hole enter the first pressure relief chamber and the first outlet chamber, and the introduction gas is used by the valve piece The valve hole flows into the fourth through hole for collecting work, when collecting pressure gas When the gas is introduced, the collector gas flows from the fourth through hole toward the second outlet chamber to displace the valve piece, and the valve hole of the valve piece is closed against the gas collecting plate, and the valve is closed. At least one limiting structure assists in supporting the valve piece to prevent the valve piece from collapsing, and the collector gas flows into the second pressure relief chamber along the communication flow path in the second outlet chamber, at this time The valve piece is displaced in the pressure relief chamber, and the collector gas can be discharged from the third through hole for pressure relief operation.

In order to achieve the above object, another broad aspect of the present invention provides a microvalve device suitable for a micro pneumatic power device, comprising: a gas collecting plate having at least two through holes and at least two chambers; Having a valve hole; and an outlet plate having at least two through holes and at least two chambers; wherein the gas collecting plate, the valve piece and the outlet plate are sequentially arranged correspondingly stacked, and one of the micro pneumatic power devices is miniature Forming a gas collection chamber between the gas transmission device and the micro valve device, and the gas is transferred from the micro gas transmission device to the gas collection chamber, and then transmitted to the micro valve device, through the gas collection plate, The outlet plate has at least two through holes and at least two chambers respectively, so that the valve hole of the valve piece is opened or closed correspondingly according to the one-way flow of the gas, and the pressure collecting or depressurizing operation is performed.

Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and is not to be construed as a limitation.

The micro-pneumatic power unit 1 of this case can be applied to industries such as medical technology, energy, computer technology or printing, and is used for conveying gas, but not limited thereto. Please refer to FIG. 1A, FIG. 1B, FIG. 2A and FIG. 2B. FIG. 1A is a front exploded view of the micro-pneumatic power device of the preferred embodiment of the present invention, and FIG. 1B is a micro-pressure shown in FIG. FIG. 2A is a schematic view showing the back side exploded structure of the micro pneumatic power device shown in FIG. 1A, and FIG. 2B is a schematic view showing the back combined structure of the micro pneumatic power device shown in FIG. 1A. As shown in FIGS. 1A and 2A, the micro pneumatic power unit 1 of the present invention is composed of a micro gas transmission device 1A and a micro valve device 1B, wherein the micro gas transmission device 1A has an air intake plate 11 and a resonance plate 12 . The piezoelectric actuator 13, the insulating sheets 141, 142, the conductive sheet 15 and the like are provided such that the piezoelectric actuator 13 is provided corresponding to the resonance piece 12, and the air inlet plate 11, the resonance piece 12, and the piezoelectric element are provided. The actuator 13, the insulating sheet 141, the conductive sheet 15 and the other insulating sheet 142 are sequentially stacked, and the piezoelectric actuator 13 is assembled from a suspension plate 130 and a piezoelectric ceramic plate 133; The micro valve device 1B is assembled by sequentially assembling the gas collecting plate 16, the valve piece 17, and the outlet plate 18, but is not limited thereto. In the present embodiment, as shown in FIG. 1A, the gas collecting plate 16 is not only a single plate structure, but also a frame structure having a side wall at the periphery, and the side wall and the bottom plate formed by the peripheral edge. When the micro-pneumatic power unit 1 of the present invention is assembled, the front view of the micro-pneumatic power unit 1 is as shown in FIG. 1B, and it can be seen that the micro-gas transmission device 1A is accommodated in the sump 16 . It is placed in the space, and its lower system is formed by stacking the valve piece 17 and the outlet plate 18. The assembled rear view shows the pressure relief hole 186 and the outlet 19 on the outlet plate 18. The outlet 19 is connected to a device (not shown), and the pressure relief hole 186 is provided for the microvalve device 1B. The gas is discharged to achieve the effect of pressure relief. By the assembly of the micro gas transmission device 1A and the micro valve device 1B, the gas is introduced from the at least one air inlet hole 110 of the air intake plate 11 of the micro gas transmission device 1A, and transmitted through the piezoelectric actuator 13 The operation flows through a plurality of pressure chambers (not shown) and is transmitted downward, thereby allowing the gas to flow in one direction in the microvalve device 1B, and accumulating the pressure in the outlet end of the microvalve device 1B. In one of the devices (not shown), and when pressure relief is required, the output of the micro gas transmission device 1A is adjusted so that the gas is discharged through the pressure relief hole 186 on the outlet plate 18 of the micro valve device 1B. Depressurize.

Please refer to FIG. 1A and FIG. 2A. As shown in FIG. 1A, the air inlet plate 11 of the micro gas transmission device 2A has at least one air inlet hole 110. In the embodiment, the number of the air inlet holes 110 is There are four, but not limited thereto, which are mainly used for the gas to flow from the at least one intake hole 110 into the micro gas transmission device 2A from the outside of the device in response to atmospheric pressure. And as shown in FIG. 2A, visible from the lower surface of the air inlet plate 11, having at least one bus bar hole 112 for corresponding to the at least one air inlet hole 110 on the upper surface of the air inlet plate 11, and The gas entering from the at least one intake port 110 may be directed and concentrated into a central recess 111 for downward transfer. In this embodiment, the air inlet plate 11 has an integrally formed air inlet hole 110, a bus bar hole 112 and a central recess portion 111, and a confluence chamber corresponding to a confluent gas is formed at the central recess portion 111 for Gas is temporarily stored. In some embodiments, the material of the air inlet plate 11 may be, but is not limited to, a stainless steel material, and the thickness thereof is preferably between 0.4 mm and 0.6 mm, and the optimum value is 0.5. Mm, but not limited to this. In other embodiments, the depth of the confluence chamber formed by the central recess 111 is the same as the depth of the bus bar holes 112, and the preferred values of the depths of the confluence chamber and the bus bar hole 112 are Between 0.2mm-0.3mm, but not limited to this. The resonant plate 12 is formed of a flexible material, but not limited thereto, and has a hollow hole 120 on the resonant plate 12, which is disposed corresponding to the central concave portion 111 of the lower surface of the air inlet plate 11 to Allow gas to circulate downwards. In other embodiments, the resonant plate may be made of a copper material, but not limited thereto, and the thickness thereof is preferably between 0.03 mm and 0.08 mm, and the optimum value is 0.05 mm. , but not limited to this.

Please also refer to FIG. 3A, FIG. 3B and FIG. 3C, which are schematic diagrams of the front structure, the back structure and the cross-sectional structure of the piezoelectric actuator of the micro-pneumatic power device shown in FIG. 1A, respectively. As shown, the piezoelectric actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132, and a piezoelectric ceramic plate 133, wherein the piezoelectric ceramic plate 133 is attached to the suspension. The lower surface 130b of the plate 130 and the at least one bracket 132 are connected between the suspension plate 130 and the outer frame 131. In this embodiment, the two ends of the bracket 132 are connected to the outer frame 131, and the other end is connected. The suspension plate 130 is connected to the suspension plate 130, and has at least one gap 135 between the bracket 132, the suspension plate 130 and the outer frame 131 for gas circulation, and the type and quantity of the suspension plate 130, the outer frame 131 and the bracket 132. There are many variations. In addition, the outer frame 131 further has an outwardly protruding conductive pin 134 for power connection, but not limited thereto. In some embodiments, the thickness of the piezoelectric actuator 13 is preferably between 0.28 mm and 0.49 mm, and the optimum value is 0.37 mm, but is not limited thereto.

In this embodiment, the suspension plate 130 is a stepped surface structure, that is, the upper surface 130a of the suspension plate 130 further has a convex portion 130c, which may be, but is not limited to, a circular convex structure. The height of the convex portion 130c is preferably between 0.02 mm and 0.08 mm, and the optimum value is 0.03 mm, and the diameter is 5.5 mm, but not limited thereto. Please refer to FIG. 3A and FIG. 3C at the same time. The convex portion 130c of the suspension plate 130 is coplanar with the upper surface 131a of the outer frame 131, and the upper surface 130a of the suspension plate 130 and the upper surface 132a of the bracket 132 are also common. The plane, and the convex portion 130c of the suspension plate 130 and the upper surface 131a of the outer frame 131 and the upper surface 130a of the suspension plate 130 and the upper surface 132a of the bracket 132 have a specific depth. As for the lower surface 130b of the suspension plate 130, as shown in FIGS. 3B and 3C, it is flush with the lower surface 131b of the outer frame 131 and the lower surface 132b of the bracket 132, and the piezoelectric ceramic plate 133. Then attached to the lower surface 130b of the flat suspension plate 130. In some embodiments, the suspension plate 130, the bracket 132, and the outer frame 131 may be integrally formed, and may be formed of a metal plate, such as stainless steel, but not limited thereto. In some embodiments, the preferred value of the thickness of the suspension plate 130 is between 0.2 mm and 0.29 mm, and the optimum value is 0.26 mm, and the length of the suspension plate is preferably between 8 mm and 12 mm. Between the best value of 10.1 mm, the preferred value of between 8mm-12mm, and the optimum value of 10.1mm, but not limited to this. The preferred value of the thickness of the outer frame 131 is between 0.2 mm and 0.4 mm, and the optimum value is 0.3 mm, but not limited thereto.

In still other embodiments, the preferred value of the thickness of the piezoelectric ceramic plate 133 is between 0.08 mm and 0.2 mm, and the optimum value is 0.10 mm, and the length of the suspension plate is preferably between Between 8mm-12mm, and the optimum value is 10mm, the width is preferably between 8mm-12mm, and the optimum value is 10mm, and the other length and width ratio is preferably 0.75 times-1.25 times. However, it is not limited to this.

Please refer to FIG. 4, which is a schematic diagram of various embodiments of the piezoelectric actuator shown in FIG. 3A. As shown in the figure, it can be seen that the suspension plate 130, the outer frame 131 and the bracket 132 of the piezoelectric actuator 13 can have various types, and at least have the (a) to (l) shown in FIG. In a plurality of aspects, for example, the frame a1 and the suspension plate a0 of the (a) aspect are square structures, and the two are connected by a plurality of brackets a2, for example: 8 but not For this reason, a gap a3 is provided between the bracket a2 and the suspension plate a0 and the outer frame a1 for gas circulation. In the other (i) aspect, the outer frame i1 and the suspension plate i0 are also square-shaped, but only two brackets i2 are connected; in addition, in the (j) to (l) aspect, Then, the suspension plate j0 and the like may have a circular structure, and the outer frame j0 or the like may also be a slightly curved frame structure, but are not limited thereto. Therefore, it can be seen from various embodiments that the shape of the suspension plate 130 can be square or circular, and similarly, the piezoelectric ceramic plate 133 attached to the lower surface 130b of the suspension plate 130 can also be square or round. The type and number of the brackets 132 connected between the suspension plate 130 and the outer frame 131 may be changed according to the actual application situation, and the aspect shown in the present case is not used. Limited. The suspension plate 130, the outer frame 131 and the bracket 132 may be integrally formed, but not limited thereto, and the manufacturing method may be conventional processing, or yellow etching, laser processing, or electroforming. Processing, or electrical discharge machining, etc., are not limited to this.

In addition, referring to FIG. 1A and FIG. 2A, the micro-gas transmission device 1A further includes an insulating sheet 141, a conductive sheet 15 and another insulating sheet 142 which are disposed under the piezoelectric actuator 13 in order. The shape substantially corresponds to the shape of the outer frame of the piezoelectric actuator 13. In some embodiments, the insulating sheets 141, 142 are made of an insulating material, such as plastic, but not limited thereto for insulation; in other embodiments, the conductive sheet 15 is It is made of a conductive material, such as metal, but not limited to it for electrical conduction. Moreover, in the embodiment, a conductive pin 151 may be disposed on the conductive sheet 15 for electrical conduction.

Please refer to FIG. 1A and FIG. 5A to FIG. 5E simultaneously, wherein FIG. 5A to FIG. 5E are diagrams showing the operation of the micro gas transmission device of the micro pneumatic power device shown in FIG. 1A. First, as shown in FIG. 5A, it can be seen that the micro gas transmission device 1A is sequentially stacked by the air intake plate 11, the resonance plate 12, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, and the other insulating sheet 142. The gap between the resonator piece 12 and the piezoelectric actuator 13 is a gap g0. In the present embodiment, the gap g0 between the resonator piece 12 and the frame 131 outside the piezoelectric actuator 13 is formed. Filling a material, for example, a conductive paste, but not limited thereto, so that the depth of the gap g0 can be maintained between the resonator piece 12 and the convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13, thereby guiding The bleed air flows more rapidly, and because the convex portion 130c of the suspension plate 130 is kept at an appropriate distance from the resonance plate 12, the mutual contact interference is reduced, so that the noise generation can be reduced; in other embodiments, the high voltage can also be applied. The height of the outer frame 131 of the electric actuator 13 is such that it increases a gap when assembled with the resonator piece 12, but is not limited thereto.

Referring to FIG. 5A to FIG. 5E , as shown in the figure, when the air inlet plate 11 , the resonant plate 12 and the piezoelectric actuator 13 are sequentially assembled, the hollow hole 120 of the resonant piece 12 can be The upper air intake plates 11 together form a chamber for the confluent gas, and a first chamber 121 is further formed between the resonant plate 12 and the piezoelectric actuator 13 for temporarily storing the gas, and the first chamber 121 Passing through the hollow hole 120 of the resonator piece 12 to communicate with the chamber at the central recess 111 of the lower surface of the air inlet plate 11, and the two sides of the first chamber 121 are between the brackets 132 of the piezoelectric actuator 13 The gap 135 is in communication with the microvalve device 1B disposed thereunder.

When the micro gas transmission device 1A of the micro pneumatic power unit 1 is actuated, the piezoelectric actuator 13 is mainly actuated by the voltage and the reciprocating vibration in the vertical direction is performed with the holder 132 as a fulcrum. As shown in FIG. 5B, when the piezoelectric actuator 13 is vibrated downward by the voltage, the gas enters through at least one of the intake holes 110 on the air inlet plate 11 and passes through at least one of the lower surfaces thereof. The discharge holes 112 are collected at the central recess 111 at the center, and flow downward into the first chamber 121 via the central hole 120 provided on the resonator piece 12 corresponding to the central recess 111, and thereafter, due to the piezoelectric actuator 13 Vibration, the resonator 12 will also resonate and reciprocate vertically. As shown in Fig. 5C, the resonator 12 will also vibrate downward and adhere to the piezoelectric actuator. The convex portion 130c of the suspension plate 130 of 13 is deformed by the resonance piece 12 to compress the volume of the first chamber 121, and close the intermediate circulation space of the first chamber 121, so that the gas in the chamber is pushed to the two The side flows, and then passes through the gap 135 between the brackets 132 of the piezoelectric actuator 13 to flow downward. As for the 5Dth diagram, the resonator piece 12 is returned to the initial position, and the piezoelectric actuator 13 is driven by the voltage to vibrate upward, so that the volume of the first chamber 121 is also pressed, but at this time due to the piezoelectric actuator The 13 series is lifted up, and the displacement of the lift can be d, so that the gas in the first chamber 121 flows toward both sides, thereby driving the gas to continuously enter from the at least one air inlet hole 110 on the air inlet plate 11, and then In the chamber formed by the central recess 111, as shown in FIG. 5E, the resonator piece 12 is resonated upward by the vibration of the piezoelectric actuator 13 rising upward, and the gas in the central recess 111 is further resonated by the resonator. The central hole 120 of 12 flows into the first chamber 121 and passes downward through the gap 135 between the holders 132 of the piezoelectric actuator 13 to flow out of the micro gas transmission device 1A. It can be seen from this embodiment that when the resonant plate 12 performs vertical reciprocating vibration, it can be increased by the gap g0 between it and the piezoelectric actuator 13 to increase the maximum distance of its vertical displacement, in other words, in the two The gap g0 between the structures can cause the resonance piece 12 to generate a larger vertical displacement when resonating, wherein the piezoelectric actuator has a vibration displacement d, and the difference from the gap g0 is x, that is, x= G0-d, tested when x≦0um, is noisy; when x=1-5um, the maximum output pressure of the pump can reach 350mmHg; when x=5-10um, the maximum output pressure of the pump can reach 250mmHg; when x =10-15um, the maximum output air pressure of the pump can reach 150mmHg, and the numerical relationship is shown in the following list 1. The above values are between the operating frequency of 17K and 20K and the operating voltage of between ±10V and ±20V. Thus, a pressure gradient is generated in the flow path design of the micro gas transmission device 1A, so that the gas flows at a high speed, and the gas is transmitted from the suction end to the discharge end through the difference in impedance of the flow path in and out of the flow path, and the gas is discharged at the discharge end. In this state, there is still the ability to continuously introduce gas and achieve the effect of mute. ( Table I)

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonant plate 12 can be the same as the vibration frequency of the piezoelectric actuator 13, that is, both can be simultaneously upward or downward, which can be implemented according to actual conditions. Any change is not limited to the mode of operation shown in this embodiment.

Please also refer to FIG. 1A, FIG. 2A, and FIG. 6A and FIG. 6B. FIG. 6A is a schematic diagram of the collective pressure operation of the micro-valve device of the micro-pneumatic power device shown in FIG. 1A, and FIG. Fig. 1A is a schematic view showing the pressure relief operation of the microvalve device of the micro pneumatic power device. As shown in FIG. 1A and FIG. 6A, the micro-valve device 1B of the micro-pneumatic power device 1 of the present invention is sequentially formed by stacking the gas collecting plate 16, the valve piece 17, and the outlet plate 18, and in this embodiment, The gas plate 16 has a reference surface 160 recessed to form a gas collection chamber 162, and the gas transported downward by the micro gas transmission device 1A temporarily accumulates in the gas collection chamber 162, and The gas collecting plate 16 has a first through hole 163 and a second through hole 164. One end of the first through hole 163 and the second through hole 164 communicate with the gas collecting chamber 162, and the other end is respectively connected with the gas collecting plate. The first pressure relief chamber 165 and the first outlet chamber 166 on the second surface 161 of the 16 are in communication. Further, a protrusion structure 167 is further added to the first outlet chamber 166, for example, but not limited to a cylindrical structure, and is disposed corresponding to the valve hole 170 of the valve piece 17.

The outlet plate 18 also has two through holes 181 and a fourth through hole 182 which are respectively disposed, and the third through hole 181 and the fourth through hole 182 respectively correspond to the first through hole 163 of the gas collecting plate 16 and the first The second through hole 164 is disposed on the outlet plate 18, and the reference plate surface 180 is recessed corresponding to the third through hole 181 to form a second pressure relief chamber 183 corresponding to the fourth through hole. At 182, a second outlet chamber 184 is formed in the recess, and a communication passage 185 is further provided between the second pressure relief chamber 183 and the second outlet chamber 184 for gas circulation. One end of the third through hole 181 is in communication with the second pressure relief chamber 183, and a convex portion structure 181a formed by the protrusion may be further added to the end portion thereof, for example, but not limited to a cylindrical structure, and the other end is The pressure relief hole 186 is connected to the second surface 187 of the outlet plate 18; and one end of the fourth through hole 182 is in communication with the second outlet chamber 184, and the other end is in communication with the outlet 19. In this embodiment, the outlet The 19 series can be connected to a device (not shown), such as a press, but not limited thereto.

The outlet plate 18 further has at least one limiting structure 188. In the embodiment, the limiting structure 188 is disposed in the second pressure relief chamber 183 and is an annular block structure, and is not The main purpose is to assist the support of the valve piece 17 when the micro valve device 1B performs the pressure collecting operation to prevent the valve piece 17 from collapsing, and the valve piece 17 can be opened or closed more quickly.

The valve piece 17 has a valve hole 170 and a plurality of positioning holes 171. When the valve piece 17 is assembled with the gas collecting plate 16 and the outlet plate 18, the valve hole 170 is corresponding to the first outlet of the gas collecting plate 16. The convex structure 167 of the chamber 166 is correspondingly disposed, whereby the single valve hole 170 is designed so that the gas can reach the one-way flow in response to the pressure difference.

When the microvalve device 1B is pressurized, it is mainly as shown in Fig. 6A, which can be based on the pressure supplied by the gas transmitted downward from the micro gas transmission device 1A, or when the external atmospheric pressure is greater than the outlet. When the internal pressure of the connected device (not shown) is 19, the gas is transferred from the micro gas transmission device 1A to the gas collection chamber 162 of the micro valve device 1B, and then passes through the first through hole 163 and the second through hole, respectively. 164 flows downward into the first pressure relief chamber 165 and the first outlet chamber 166. At this time, the downward gas pressure causes the flexible valve piece 17 to be bent downward, so that the thickness of the valve piece 17 is relatively thin. The preferred value is between 0.1 mm and 0.3 mm, and the optimum value is 0.2 mm, thereby increasing the volume of the first pressure relief chamber 165 and correspondingly flattening and abutting at the first through hole 163. At the end of the third through hole 181, the third through hole 181 of the outlet plate 18 can be closed, so that the gas in the second pressure relief chamber 183 does not flow out from the third through hole 181. Of course, in this embodiment, a design of the protrusion structure 181a is added to the end of the third through hole 181, and the protrusion structure 181a is improved to increase the height thereof. The height of the protrusion structure 181a is higher than the exit board. The reference surface 180 of 18, and the height of the convex portion structure 181a is preferably between 0.45 mm and 0.55 mm, and the optimum value is 0.5 mm to strengthen the valve sheet 17 to quickly contact and close the third through hole. 181, and achieve a pre-stressing effect to completely seal the effect, and at the same time through the ring provided in the periphery of the third through hole 181 of the limiting structure 188 to assist in supporting the valve piece 17 so that it does not collapse. On the other hand, since the gas system flows downward from the second through hole 164 into the first outlet chamber 166, and the valve piece 17 corresponding to the first outlet chamber 166 is also bent downward, the corresponding The valve hole 170 is opened downward, and the gas can flow from the first outlet chamber 166 through the valve hole 170 into the second outlet chamber 184, and from the fourth through hole 182 to the outlet 19 and to the outlet 19. In the device (not shown), the device is operated by collecting pressure.

Referring to FIG. 6B, when the microvalve device 1B is depressurized, it can control the gas transmission amount of the micro gas transmission device 1A so that the gas is no longer input into the gas collection chamber 162, or when it is connected to the outlet. When the internal pressure of the connected device (not shown) is greater than the atmospheric pressure of the outside, the microvalve device 1B can be depressurized. At this time, the gas is input into the second outlet chamber 184 from the fourth through hole 182 connected to the outlet 19, so that the volume of the second outlet chamber 184 is expanded, thereby causing the flexible valve piece 17 to be bent upward. The valve hole 170 of the valve piece 17 is closed by the top of the gas collecting plate 16 by flattening against the top of the gas collecting plate 16. Of course, in the embodiment, the design of the protrusion structure 167 can be added by using the first outlet chamber 166, and the protrusion structure 167 is modified to increase the height thereof. The height of the protrusion structure 167 is higher than the gas collection. The reference surface 160 of the plate 16 and the height of the protrusion structure 167 are preferably between 0.45 mm and 0.55 mm, and the optimum value is 0.50 mm, so that the flexible valve piece 17 can be bent upward. The quick change of the change makes the valve hole 170 more favorable to achieve a pre-stressing action to completely close the closed state of the seal. Therefore, when in the initial state, the valve hole 170 of the valve piece 17 will abut against the convex structure. When 167 is closed, the gas in the second outlet chamber 184 will not flow back into the first outlet chamber 166 to achieve better gas leakage prevention. And the gas system in the second outlet chamber 184 can flow into the second pressure relief chamber 183 via the communication passage 185, thereby expanding the volume of the second pressure relief chamber 183 and corresponding to the second discharge The valve piece 17 of the pressure chamber 183 is also bent upwardly. At this time, since the valve piece 17 is not closed to the end of the third through hole 181, the third through hole 181 is in an open state, that is, the second pressure relief chamber. The gas in the chamber 183 may flow outward from the third through hole 181 to the pressure relief hole 186 for pressure relief operation. Of course, in this embodiment, the protrusion structure 181a added to the end of the third through hole 181 or the limiting structure 188 disposed in the second pressure relief chamber 183 can be used. The height of the limiting structure 188 is preferably a value. The system is between 0.3 mm and 0.5 mm, and the optimum value is 0.4 mm, so that the flexible valve piece 17 is bent upwardly and changed rapidly, and it is more advantageous to be out of the state of closing the third through hole 181. In this way, the gas in the device (not shown) connected to the outlet 19 can be discharged by the one-way pressure relief operation, and the pressure can be reduced or completely discharged to complete the pressure relief operation.

Please refer to FIG. 1A, FIG. 2A and FIGS. 7A to 7E simultaneously, wherein FIGS. 7A to 7E are schematic diagrams of the collective pressure operation of the micro pneumatic power device shown in FIG. 1A. As shown in FIG. 7A, the micro-pneumatic power unit 1 is composed of a micro-gas transmission device 1A and a micro-valve device 1B, wherein the micro-gas transmission device 1A is sequentially connected to the air intake plate 11 and the resonance plate 12 as described above. The piezoelectric actuator 13 , the insulating sheet 141 , the conductive sheet 15 and the other insulating sheet 142 are stacked and assembled, and have a gap g0 between the resonant sheet 12 and the piezoelectric actuator 13 , and The first chamber 121 is disposed between the resonant plate 12 and the piezoelectric actuator 13, and the microvalve device 1B is also sequentially assembled and assembled by the gas collecting plate 16, the valve piece 17, and the outlet plate 18. And having a gas collecting chamber 162 between the gas collecting plate 16 of the micro valve device 1B and the piezoelectric actuator 13 of the micro gas conveying device 1A, and having a first pressure relief on the second surface 161 of the gas collecting plate 16 The chamber 165 and the first outlet chamber 166, and the reference surface 180 of the outlet plate 18 further have a second pressure relief chamber 183 and a second outlet chamber 184, by which a plurality of different pressure chambers are coupled The drive of the electric actuator 13 and the vibration of the resonator piece 12 and the valve piece 17 to make the gas downward Pressure transmission.

As shown in Fig. 7B, when the piezoelectric actuator 13 of the micro gas transmission device 1A is vibrated downward by the voltage, the gas enters the micro gas transmission device 1A from the air inlet hole 110 in the air intake plate 11. And passing through at least one bus bar hole 112 to be collected to the central recess portion 111, and then flowing downward into the first chamber 121 via the hollow hole 120 on the resonator piece 12. Thereafter, as shown in Fig. 7C, the resonance piece 12 is also reciprocally vibrated by the resonance of the vibration of the piezoelectric actuator 13, that is, it vibrates downward and is close to the piezoelectric actuator. The convex portion 130c of the suspension plate 130 of 13 is deformed by the resonance piece 12, so that the volume of the chamber at the central concave portion 111 of the air inlet plate 11 is increased, and at the same time, the volume of the first chamber 121 is compressed, thereby further The gas in the first chamber 121 is caused to flow toward both sides, and then flows downward through the gap 135 between the brackets 132 of the piezoelectric actuator 13 to flow to the micro gas transmission device 1A and the micro valve device. The first through hole 163 and the second through hole 164 communicating with the gas collecting chamber 162 are correspondingly flowed into the first pressure relief chamber 165 and the first out. In the oral chamber 166, it can be seen from the embodiment that when the resonant sheet 12 performs vertical reciprocating vibration, the gap between the piezoelectric actuator 13 and the piezoelectric actuator 13 can be increased to increase the maximum displacement of the vertical displacement. In other words, the gap g0 is provided between the two structures to make the resonator piece 12 generate a larger amplitude when resonating. The upper and lower displacement.

Then, as shown in Fig. 7D, since the resonator piece 12 of the micro gas transmission device 1A is returned to the initial position, the piezoelectric actuator 13 is driven by the voltage to vibrate upward, and the vibration displacement of the piezoelectric actuator For d, the difference from the gap g0 is x, that is, x=g0-d. After testing, when x≦0um, there is a noise state; when x=1-5um, the maximum output pressure of the pump can reach 350mmHg; when x =5-10um, the maximum output air pressure of the pump can reach 250mmHg; when x=10-15um, the maximum output air pressure of the pump can reach 150mmHg, which is shown in Table 1 of the previous list, and will not be described again. The above values are between 17K and 20K operating frequency and between ±10V and ±20V operating voltage. In another embodiment, the operating frequency is 18.5k, the operating voltage is ±16V, and the maximum output air pressure can reach 300mmHg, but not limited thereto. The volume of the first chamber 121 is also squeezed in such a manner that the gas in the first chamber 121 flows toward both sides and is continuously input to the microvalve device 1B by the gap 135 between the holders 132 of the piezoelectric actuators 13. In the gas collection chamber 162, the first pressure relief chamber 165 and the first outlet chamber 166, the air pressure in the first pressure relief chamber 165 and the first outlet chamber 166 is further increased, thereby promoting the flexible The valve piece 17 is bent downward, and in the second pressure relief chamber 183, the valve piece 17 is flatly pressed against the convex portion structure 181a at the end of the third through hole 181, thereby making the third The through hole 181 is closed, and in the second outlet chamber 184, the valve hole 170 corresponding to the fourth through hole 182 of the valve piece 17 is opened downward, so that the gas in the second outlet chamber 184 can be made of the fourth through hole. The 182 is passed down to the outlet 19 and any means (not shown) connected to the outlet 19 for further collection purposes. Finally, as shown in FIG. 7E, when the resonator piece 12 of the micro gas transmission device 1A is resonantly displaced upward, the gas in the central recess 111 of the lower surface of the air inlet plate 11 can flow into the hollow hole 120 of the resonator piece 12. The inside of a chamber 121 is continuously transmitted downward into the microvalve device 1B via the gap 135 between the brackets 132 of the piezoelectric actuator 13, and since the gas pressure system continues to increase downward, the gas will still Continuously flowing through the gas collection chamber 162, the second through hole 164, the first outlet chamber 166, the second outlet chamber 184, and the fourth through hole 182 of the micro valve device 1B to the outlet 19 and to the outlet 19 In any device, the collector operation can be driven by the atmospheric pressure of the outside and the pressure difference within the device, but not limited thereto.

When the pressure inside the device (not shown) connected to the outlet 19 is greater than the external pressure, the micro-pneumatic power device 1 can perform the step-down or pressure-reduction operation as shown in FIG. The pressure relief operation mode is mainly as described above, and the gas can be no longer input into the air collection chamber 162 by regulating the gas transmission amount of the micro gas transmission device 1A. At this time, the gas will be connected from the outlet 19 The four through holes 182 are input into the second outlet chamber 184, so that the volume of the second outlet chamber 184 is expanded, thereby causing the flexible valve piece 17 to be bent upwardly and flattened upwardly against the first outlet chamber. The convex portion 167 of the chamber 166 is closed, so that the valve hole 170 of the valve piece 17 is closed, that is, the gas in the second outlet chamber 184 does not flow back into the first outlet chamber 166; and the second outlet chamber 184 The gas system can flow into the second pressure relief chamber 183 via the communication flow passage 185, and then flow outward from the third through hole 181 to the pressure relief hole 186 for pressure relief operation; The one-way gas transfer operation of 1B will be the gas in the device connected to the outlet 19. Buck discharging, or complete discharging operation is completed relief.

In summary, the microvalve device provided in the present invention is formed by stacking a gas collecting plate, a valve plate and an outlet plate, and adopts a gas collecting chamber, a first through hole and a second through hole in the gas collecting plate. a first pressure relief chamber and a first outlet chamber are configured to transport gas downwardly from the gas collection chamber, and flow from the first through hole and the second through hole to the first pressure relief chamber and the first Out of the chamber, and through the one-way valve design of the valve piece, the gas flows in a single direction, and then the gas can be transferred downward to the second outlet chamber and sent to any device connected to the outlet for collecting pressure Operation; when the pressure is to be depressurized or depressurized, the gas transmission amount of the micro gas transmission device connected to the micro valve device is regulated, and the gas can be transmitted from the device connected to the outlet to the second outlet chamber, and then The connecting flow channel is transmitted to the second pressure relief chamber, and is discharged from the pressure relief hole, so as to achieve the function of allowing the gas to be rapidly transmitted, and at the same time, the mute effect can be achieved, and the volume of the micro valve device can be reduced and Thinner, which in turn makes it Applicable micro gas power plant reached a portable lightweight comfort of purpose, and can be widely used in medical equipment and related equipment. Therefore, the micro-valve device in this case is of great industrial value and is submitted in accordance with the law.

The present invention has been described in detail by the above-described embodiments, and is intended to be modified by those skilled in the art.

1‧‧‧Micro Pneumatic Power Plant
1A‧‧‧Micro Gas Transmission
1B‧‧‧ miniature valve device
11‧‧‧Air intake plate
110‧‧‧Air intake
111‧‧‧Center recess
112‧‧‧ Bus Bars
12‧‧‧Resonance film
120‧‧‧ hollow holes
121‧‧‧ first chamber
13‧‧‧ Piezoelectric Actuator
130‧‧‧suspension board
130a‧‧‧Over the surface of the suspension plate
130b‧‧‧Under the surface of the suspension plate
130c‧‧‧ convex
131‧‧‧Front frame
131a‧‧‧Front surface
131b‧‧‧Under the surface of the frame
132‧‧‧ bracket
132a‧‧‧Top surface of the bracket
132b‧‧‧Under the surface of the stent
133‧‧‧ Piezoelectric ceramic plate
134, 151‧‧‧ conductive pins
135‧‧‧ gap
141, 142‧‧‧ insulating sheet
15‧‧‧Conductor
16‧‧‧ gas collecting plate
160‧‧‧ reference surface
161‧‧‧ second surface
162‧‧‧Gas chamber
163‧‧‧First through hole
164‧‧‧Second through hole
165‧‧‧First pressure relief chamber
166‧‧‧First out of the chamber
167, 181a‧‧ ‧ convex structure
17‧‧‧ Valves
170‧‧‧ valve hole
171‧‧‧ Positioning holes
18‧‧‧Export board
180‧‧‧ reference surface
181‧‧‧ third through hole
182‧‧‧fourth through hole
183‧‧‧Second pressure relief chamber
184‧‧‧Second out of the chamber
185‧‧‧Connected runners
186‧‧‧Relief hole
187‧‧‧ second surface
188‧‧‧Limited structure
19‧‧‧Export
G0‧‧‧ gap
(a)~(l)‧‧‧Different implementations of conductive actuators
A0, i0, j0‧‧‧ suspension board
A1, i1, j1‧‧‧ frame
A2, i2‧‧‧ bracket
A3‧‧‧ gap

FIG. 1A is a front exploded view showing the micro pneumatic power device of the preferred embodiment of the present invention. Fig. 1B is a schematic view showing the front combined structure of the micro pneumatic power device shown in Fig. 1A. Fig. 2A is a schematic view showing the back side exploded structure of the micro pneumatic power device shown in Fig. 1A. Fig. 2B is a schematic view showing the structure of the back side of the micro pneumatic power device shown in Fig. 1A. Fig. 3A is a schematic view showing the front combined structure of the piezoelectric actuator of the micro pneumatic power device shown in Fig. 1A. Fig. 3B is a schematic view showing the rear combined structure of the piezoelectric actuator of the micro pneumatic power device shown in Fig. 1A. Fig. 3C is a schematic cross-sectional view showing the piezoelectric actuator of the micro pneumatic power device shown in Fig. 1A. Fig. 4 is a schematic view showing various embodiments of the piezoelectric actuator shown in Fig. 3A. 5A to 5E are diagrams showing the operation of the micro gas transmission device of the micro pneumatic power device shown in Fig. 1A. Fig. 6A is a schematic view showing the collective pressure operation of the microvalve device of the micro pneumatic power device shown in Fig. 1A. Fig. 6B is a schematic view showing the pressure relief operation of the microvalve device of the micro pneumatic power device shown in Fig. 1A. 7A to 7E are schematic views showing the collective pressure operation of the micro pneumatic power device shown in Fig. 1A. Figure 8 is a schematic diagram of the step-down or pressure relief operation of the micro-pneumatic power unit shown in Figure 1A.

1B‧‧‧ miniature valve device

16‧‧‧ gas collecting plate

160‧‧‧ reference surface

161‧‧‧ second surface

162‧‧‧Gas chamber

163‧‧‧First through hole

164‧‧‧Second through hole

165‧‧‧First pressure relief chamber

166‧‧‧First out of the chamber

167, 181a‧‧ ‧ convex structure

17‧‧‧ Valves

18‧‧‧Export board

180‧‧‧ reference surface

181‧‧‧ third through hole

182‧‧‧fourth through hole

183‧‧‧Second pressure relief chamber

184‧‧‧Second out of the chamber

185‧‧‧Connected runners

186‧‧‧Relief hole

187‧‧‧ second surface

188‧‧‧Limited structure

19‧‧‧Export

Claims (14)

A microvalve device for a micro pneumatic power device, comprising: a valve piece having a valve hole, the valve piece having a thickness of between 0.1 mm and 0.3 mm; a gas collecting plate having a first a through hole, a second through hole, a first pressure relief chamber and a first outlet chamber, and a reference surface, the first outlet chamber has a convex structure to correspond to the valve of the valve piece The hole is disposed to cooperate with the valve hole to form a pre-stressing effect, completely closing the valve hole, the height of the protrusion structure is higher than the reference surface of the gas collecting plate, the first through hole and the first pressure relief cavity The second through hole is in communication with the first outlet chamber; and an outlet plate has a third through hole, a fourth through hole, a second pressure relief chamber, and a second outlet cavity a chamber and at least one limiting structure, and having a reference surface, the third through hole end portion has a convex portion structure, the height of the convex portion structure being higher than the reference surface of the outlet plate, which facilitates rapid formation of the valve piece a pre-action, completely sealed a third through hole corresponding to the first through hole of the gas collecting plate and communicating with the second pressure reducing chamber, wherein the fourth through hole corresponds to the second through hole, and Communicating with the second outlet chamber, the at least one limiting structure is disposed in the second pressure relief chamber, the height of the limiting structure is between 0.3 mm and 0.5 mm, and the second pressure relief chamber Between the chamber and the second outlet chamber, there is a connecting flow path; wherein the gas collecting plate, the valve piece and the outlet plate are sequentially arranged correspondingly stacked, and the valve piece is disposed on the gas collecting plate and the Between the outlet plates, and the valve hole of the valve piece is correspondingly disposed between the second through hole and the fourth through hole, and gas is transferred downward from the micro gas transmission device of the micro pneumatic power device to the micro valve When the device is inside, the first through hole and the second through hole enter the first pressure relief chamber and the first outlet chamber, and the introduction gas flows into the fourth through hole through the valve hole of the valve piece. Collecting work, when the collector gas is larger than the introduction gas, the collector gas The fourth through hole flows toward the second outlet chamber to displace the valve piece, and the valve hole of the valve piece is closed against the gas collecting plate, and the at least one limiting structure is auxiliary support The valve piece prevents the valve piece from collapsing, and the collector gas flows into the second pressure relief chamber along the communication flow path in the second outlet chamber, and the valve piece is displaced in the second pressure relief chamber. The collector gas may flow out through the third through hole to perform a pressure relief operation. The microvalve device of claim 1, wherein the valve piece has a thickness of 0.2 mm. The microvalve device of claim 1, wherein the height of the limiting structure is 0.4 mm. The microvalve device of claim 1, wherein the convex structure of the first outlet chamber of the gas collecting plate has a height of between 0.45 mm and 0.55 mm. The microvalve device of claim 4, wherein the height of the convex structure of the first outlet chamber is 0.5 mm. The microvalve device of claim 1, wherein the convex structure of the third through hole of the outlet plate has a height of between 0.45 mm and 0.55 mm. The microvalve device of claim 6, wherein the height of the convex structure of the third through hole is 0.5 mm. The micro valve device of claim 1, wherein the gas collecting plate further has a gas collecting chamber on a surface, and the gas collecting chamber is connected to the first through hole and the second through hole . The microvalve device of claim 1, wherein the first pressure relief chamber and the first outlet chamber are disposed on the other surface of the gas collection chamber opposite to the gas collection chamber. The microvalve device of claim 1, wherein the second pressure relief chamber and the second outlet chamber are disposed on a surface of the outlet plate, respectively, and the first discharge of the gas collection plate The pressure chamber corresponds to the first outlet chamber. A microvalve device, suitable for a micro pneumatic power device, comprising: a gas collecting plate having at least two through holes and at least two chambers, and a gas collecting chamber; a valve piece having a valve hole; and an outlet The plate has at least two through holes and at least two chambers; wherein the gas collecting plate, the valve piece and the outlet plate are sequentially disposed correspondingly to the stack, and when the gas is transferred from the gas collecting chamber to the micro valve device, The gas collecting plate and the outlet plate respectively have at least two through holes and at least two chambers, so that the valve holes of the valve piece are correspondingly opened or closed according to the one-way flow of the gas, and the pressure collecting or depressurizing operation is performed. . The micro valve device of claim 11, wherein the gas collecting plate has a first through hole, a second through hole, a first pressure relief chamber and a first outlet chamber, the first The through hole is in communication with the first pressure relief chamber, and the second through hole is in communication with the first outlet chamber. The micro valve device of claim 11, wherein the outlet plate has a third through hole, a fourth through hole, a second pressure relief chamber and a second outlet chamber, wherein the second pressure relief device There is a communication flow path between the chamber and the second outlet chamber. The micro valve device of claim 11, wherein the valve piece is disposed between the gas collecting plate and the outlet plate, and the valve hole of the valve piece is correspondingly disposed on the second through hole and the first Between the four through holes, when the gas is transferred from the micro gas transmission device to the micro valve device, the first through hole and the second through hole enter the first pressure relief chamber and the first outlet cavity Indoor, the introduction gas flows into the fourth through hole from the valve hole of the valve piece to perform a collecting operation, and when the collector gas is larger than the introduction gas, the collector gas flows from the fourth through hole toward the second outlet chamber Flowing to displace the valve piece, and closing the valve hole of the valve piece against the gas collecting plate, and collecting gas in the second outlet chamber to flow along the connecting flow path to the second unloading In the pressure chamber, the valve piece is displaced in the second pressure relief chamber, and the collector gas can flow out through the third through hole to perform the pressure relief operation.