CN211500944U - Miniature pneumatic power device - Google Patents

Abstract

A micro pneumatic power plant comprising: a microfluidic control device comprising, stacked in order: an air intake plate; the micro valve device comprises a valve plate and an outlet plate which are sequentially stacked and assembled on the gas collecting plate, wherein the area of the outlet plate is smaller than that of the gas collecting plate, sealing glue is coated on the sealing glue space and completely seals the periphery of the valve plate, the first surface and the second surface of the valve plate are provided with sticking areas, and gas is transmitted into the micro valve device from the micro fluid control device so as to carry out pressure collecting or pressure relief operation.

Description

Miniature pneumatic power device

[ technical field ] A method for producing a semiconductor device

The present invention relates to a pneumatic power device, and more particularly to a miniature ultra-thin and silent pneumatic power device.

[ background of the invention ]

At present, in all fields, no matter in medicine, computer technology, printing, energy and other industries, products are developed towards refinement and miniaturization, wherein fluid conveying structures contained in products such as micropumps, sprayers, ink jet heads, industrial printing devices and the like are key technologies thereof, so that how to break through technical bottlenecks thereof by means of innovative structures is an important content of development.

For example, in the pharmaceutical industry, many instruments or devices that require pneumatic power are often powered by conventional motors and pneumatic valves for gas delivery. However, the volume of the conventional motor and the gas valve is limited, so that it is difficult to reduce the volume of the whole device, i.e. to achieve the goal of thinning, and further, the portable purpose of the apparatus cannot be achieved. In addition, the conventional motor and gas valve also generate noise during operation, which causes inconvenience and discomfort in use.

As shown in fig. 8, a known micro pneumatic power device 2 is composed of a micro fluid control device 2A and a micro valve device 2B, wherein the micro fluid control device 2A has a housing 2A, a piezoelectric actuator 23, insulating sheets 241, 242 and a conducting sheet 25, the housing 2A includes a gas collecting plate 26 and a base 20, the base 20 includes a gas inlet plate 21 and a resonator plate 22, the piezoelectric actuator 23 is disposed corresponding to the resonator plate 22, and the gas inlet plate 21, the resonator plate 22, the piezoelectric actuator 23, the insulating sheet 241, the conducting sheet 25, another insulating sheet 242, the gas collecting plate 26 are sequentially stacked, and the micro valve device 1B includes a valve plate 27 and an outlet plate 28, the valve plate 27 and the outlet plate 28 of the micro valve device 2B are sequentially stacked and positioned on the gas collecting plate 26 of the micro fluid control device 2A, and a sealant 29 is coated on the valve plate 27 of the micro valve device 2B to form a leak-proof structure The structure is simple and thin, and the micro pneumatic power device 2 is provided.

Although the above-mentioned miniature pneumatic power unit 2 structure can be implemented in the apparatus or equipment, achieve the small, miniaturized and silent, and then achieve the light and comfortable portable purpose, but the valve plate 27 is positioned between exit plate 28 and gas collecting plate 26 by sticking group, although there is coating department sealant 29 that coats around the valve plate 17 to implement to glue and position and leak-proof sealed function, under the use state of the long-term vibration function, its laminating airtight will suffer to destroy and cause the laminating airtight deficiency, and then influence the working characteristic and flow rate of the miniature pneumatic power unit 2, and the space between exit plate 28 and gas collecting plate 26 of such structure is small, it is difficult to glue and coat of the sealant 29.

Therefore, how to develop a method for improving the above-mentioned drawbacks of the prior art and maintaining a certain operating characteristic and flow rate of the micro pneumatic power device for a long time is a problem that needs to be solved.

[ Utility model ] content

The main purpose of the present application is to provide a micro pneumatic power device suitable for use in portable or wearable instruments or devices, wherein the area of the outlet plate of the micro valve device is smaller than the area of the gas collecting plate of the micro fluid control device, so as to increase the sealing space and achieve easier gluing and better sealing property, and the first surface and the second surface of the valve plate can be pasted by double-sided adhesive tape, so that the pasting area can be better attached between the micro fluid control device and the micro valve device, thereby achieving better airtight sealing property, and solving the problem of insufficient airtightness after the valve plate is assembled.

To achieve the above object, a broader aspect of the present invention provides a micro pneumatic power device, including: an air intake plate; a resonant plate having a hollow hole; a piezoelectric actuator; the gas collecting plate is provided with a concave surface, a reference surface, a first through hole and a second through hole, a gas collecting cavity is formed by the concave surface, a first pressure relief cavity and a first outlet cavity are formed by the concave surface, the first pressure relief cavity is communicated with the gas collecting cavity through the first through hole, and the first outlet cavity is communicated with the gas collecting cavity through the second through hole; wherein a gap is arranged between the resonance sheet and the piezoelectric actuator to form a first chamber, and when the piezoelectric actuator is driven, gas enters from the gas inlet plate, flows through the resonance sheet, and enters the first chamber for transmission; a microvalve gate device configured to be positioned on the gas collection plate of the microfluidic control device, comprising: the valve plate is provided with a first surface, a second surface and a valve hole, the valve hole penetrates through the first surface and the second surface, and the first surface and the second surface are respectively provided with a sticking area and a plurality of non-sticking areas; an outlet plate having a reference surface and a second surface, the second surface having a pressure relief through hole and an outlet through hole respectively formed therein, the reference surface having a second pressure relief chamber and a second outlet chamber recessed therein, the pressure relief through hole being located in a central portion of the second pressure relief chamber, the outlet through hole being in communication with the second outlet chamber, and a communication flow passage further provided between the second pressure relief chamber and the second outlet chamber; the valve plate and the outlet plate are sequentially stacked and assembled on the gas collecting plate, the area of the outlet plate is smaller than that of the gas collecting plate, so that four sides of the outlet plate retract inwards to keep a sealing space with the gas collecting plate, sealing glue is coated on the sealing space and completely seal the periphery of the valve plate, the valve plate is arranged between the outlet plate and the gas collecting plate by the pasting groups of the pasting areas on the first surface and the second surface, and gas is transmitted into the micro valve device from the micro fluid control device so as to carry out pressure collecting or pressure relief operation.

[ description of the drawings ]

Fig. 1A is a schematic front view of the miniature pneumatic power device according to the present invention.

Fig. 1B is a schematic view of the back side of the miniature pneumatic power device according to the present invention.

Fig. 1C is a schematic cross-sectional view of the micro pneumatic power device of the present invention.

Fig. 1D is an appearance schematic diagram of the side view of the micro pneumatic power device of the present invention showing the state of the sealing compound.

Fig. 2A is an exploded view of the miniature pneumatic power device as viewed from the front.

Fig. 2B is an exploded view of the components of the miniature pneumatic power device according to the present invention.

Fig. 3A is a front perspective view of the piezoelectric actuator of the present invention.

Fig. 3B is a schematic back perspective view of the piezoelectric actuator of the micro pneumatic power device according to the present invention.

Fig. 3C is a schematic cross-sectional view of the piezoelectric actuator of the micro pneumatic power device according to the present invention.

Fig. 4A is a schematic front view of the valve plate of the miniature pneumatic power device of the present invention.

Fig. 4B is a schematic view of the back of the valve plate of the miniature pneumatic power device of the present invention.

Fig. 5A to 5E are schematic views illustrating a local actuation of the micro fluid control device of the micro pneumatic power device according to the present invention.

Fig. 6A to 6D are schematic diagrams illustrating the pressure collection and actuation of the micro pneumatic device according to the present invention.

Fig. 7 is a schematic view of the pressure relief actuation of the miniature pneumatic power device of the present invention.

Fig. 8 is a schematic cross-sectional view of a known micro pneumatic device.

[ detailed description ] embodiments

Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

The micro pneumatic power device 1 of the present invention can be applied to the industries of medicine and technology, energy, computer technology, or printing, etc. for delivering gas, but not limited thereto. Referring to fig. 1A, fig. 1B, fig. 1C, fig. 1D, fig. 2A and fig. 2B, a micro pneumatic power device 1 of the present invention is formed by combining a micro fluid control device 1A and a micro valve device 1B, wherein the micro fluid control device 1A has a housing 1A, a piezoelectric actuator 13, insulating sheets 141 and 142, and a conducting sheet 15, wherein the housing 1A includes an air collecting plate 16 and a base 10, and the base 10 includes an air inlet plate 11 and a resonator plate 12, but not limited thereto. The piezoelectric actuator 13 is disposed corresponding to the resonator plate 12, and the air inlet plate 11, the resonator plate 12, the piezoelectric actuator 13, the insulating plate 141, the conducting plate 15, the other insulating plate 142, and the air collecting plate 16 are sequentially stacked, and the piezoelectric actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132, and a piezoelectric ceramic plate 133; and the microvalve device 1B includes a valve plate 17, an outlet plate 18 and a sealant 19.

The air inlet plate 11 of the microfluidic control device 1A has a first surface 11A, a second surface 11b and at least one air inlet hole 110, in the present embodiment, the number of the air inlet holes 110 is 4, but not limited thereto, and the air inlet holes 110 penetrate through the first surface 11A and the second surface 11b of the air inlet plate 11, and are mainly used for allowing air to flow from the outside of the device into the microfluidic control device 1A through the at least one air inlet hole 110 under the action of atmospheric pressure. As shown in fig. 2A, the second surface 11b of the air inlet plate 11 is provided with at least one bus bar hole 112, which is disposed corresponding to the at least one air inlet hole 110 on the first surface 11a of the air inlet plate 11. The center of the bus bar hole 112 is provided with a center concave portion 111, and the center concave portion 111 is communicated with the bus bar hole 112, so that the gas entering the bus bar hole 112 from the at least one gas inlet hole 110 can be guided and converged to the center concave portion 111 for downward transmission. In the present embodiment, the air inlet plate 11 has an air inlet hole 110, a bus hole 112 and a central recess 111 formed integrally, and a converging chamber for converging air is correspondingly formed at the central recess 111 for temporary storage of air. In some embodiments, the material of the air inlet plate 11 may be, but is not limited to, a stainless steel material. In other embodiments, the depth of the bus chamber formed by the central recess 111 is the same as the depth of the bus bar hole 112. The resonator plate 12 is made of a flexible material, but not limited thereto, and the resonator plate 12 has a hollow hole 120 corresponding to the central recess 111 of the second surface 11b of the inlet plate 11, so that the gas can flow downward. In other embodiments, the resonator plate 12 may be made of a copper material, but not limited thereto.

Referring to fig. 3A, 3B and 3C, the piezoelectric actuator 13 is assembled by a suspension plate 130, a frame 131, at least one bracket 132 and a piezoelectric ceramic plate 133, wherein the piezoelectric ceramic plate 133 has a side length not greater than the side length of the suspension plate 130, is attached to the first surface 130B of the suspension plate 130, and is configured to generate a deformation by applying a voltage to drive the suspension plate 130 to perform a bending vibration, the suspension plate 130 has a central portion 130d and an outer peripheral portion 130e, so that when the piezoelectric ceramic plate 133 is driven by the voltage, the suspension plate 130 can perform the bending vibration from the central portion 130d to the outer peripheral portion 130e, and the at least one bracket 132 is connected between the suspension plate 130 and the frame 131, in this embodiment, the bracket 132 is connected between the suspension plate 130 and the frame 131, and two end points thereof are respectively connected to the frame 131 and the suspension plate 130 to provide an elastic support, at least one gap 135 is further formed between the support 132, the suspension plate 130 and the frame 131 for air circulation, and the types and numbers of the suspension plate 130, the frame 131 and the support 132 are varied. In addition, the outer frame 131 is disposed around the outer side of the suspension board 130, and has a conductive pin 134 protruding outward for power connection, but not limited thereto. In the present embodiment, the suspension plate 130 has a step-surface structure, that is, the second surface 130a of the suspension plate 130 further has a protrusion 130c, and the protrusion 130c may be, but not limited to, a circular protrusion structure. As can be seen from fig. 3A and 3C, the convex portion 130C of the suspension plate 130 is coplanar with the second surface 131a of the outer frame 131, the second surface 130a of the suspension plate 130 and the second surface 132a of the bracket 132 are also coplanar, and a specific depth is formed between the convex portion 130C of the suspension plate 130 and the second surface 131a of the outer frame 131, the second surface 130a of the suspension plate 130 and the second surface 132a of the bracket 132. As for the first surface 130B of the suspension plate 130, as shown in fig. 3B and 3C, it is a flat coplanar structure with the first surface 131B of the outer frame 131 and the first surface 132B of the support 132, and the piezoelectric ceramic plate 133 having a side length no greater than that of the suspension plate 130 is attached to the first surface 130B of the flat suspension plate 130. In other embodiments, the suspension plate 130 may also be a square structure with a flat surface and a flat surface, and the shape of the suspension plate can be changed according to the actual implementation. In some embodiments, the suspension plate 130, the bracket 132 and the outer frame 131 may be integrally formed, and may be formed by a metal plate, such as stainless steel, but not limited thereto.

In addition, the micro fluid control device 1A further comprises an insulation sheet 141, a conductive sheet 15 and another insulation sheet 142, which are sequentially disposed under the piezoelectric actuator 13 and substantially correspond to the shape of the outer frame 131 of the piezoelectric actuator 13. In some embodiments, the insulating sheets 141 and 142 are made of an insulating material, such as: plastic, but not limited to this, for insulation; in other embodiments, the conductive sheet 15 is made of a conductive material, such as: the metal is not limited to this, and is used for electrical conduction. In the present embodiment, a conductive pin 151 may also be disposed on the conductive sheet 15 for electrical conduction.

The microfluidic control device 1A is formed by sequentially stacking the inlet plate 11, the resonator plate 12, the piezoelectric actuator 13, the insulating plate 141, the conductive plate 15 and another insulating plate 142, and a gap g0 is formed between the resonator plate 12 and the piezoelectric actuator 13, in this embodiment, a material is filled in the gap g0 between the resonator plate 12 and the periphery of the outer frame 131 of the piezoelectric actuator 13, for example: the conductive paste, but not limited thereto, maintains the depth of the gap g0 between the resonator plate 12 and the protrusion 130c of the suspension plate 130 of the piezoelectric actuator 13, so as to guide the air flow to flow more rapidly, and since the protrusion 130c of the suspension plate 130 and the resonator plate 12 maintain a proper distance, the contact interference between them is reduced, and the noise generation is reduced; in other embodiments, the height of the outer frame 131 of the high voltage electric actuator 13 can be increased to increase a gap when the outer frame is assembled with the resonator plate 12, but not limited thereto.

Referring to fig. 5A to 5E, after the air inlet plate 11, the resonator plate 12 and the piezoelectric actuator 13 are assembled in sequence, a chamber for collecting gas is formed at the hollow hole 120 of the resonator plate 12 and the air inlet plate 11 thereon, a first chamber 121 is further formed between the resonator plate 12 and the piezoelectric actuator 13 for temporarily storing the gas, the first chamber 121 is communicated with the chamber at the central recess 111 of the first surface 11B of the air inlet plate 11 through the hollow hole 120 of the resonator plate 12, and two sides of the first chamber 121 are communicated with the micro valve device 1B disposed therebelow through the gap 135 between the brackets 132 of the piezoelectric actuator 13.

When the micro fluid control device 1A of the micro pneumatic power device 1 is operated, the piezoelectric actuator 13 is mainly actuated by a voltage to perform reciprocating vibration in the vertical direction with the support 132 as a fulcrum. As shown in fig. 5B, when the piezoelectric actuator 13 is actuated by a voltage to vibrate downwards, because the resonance plate 12 is a light and thin sheet-like structure, when the piezoelectric actuator 13 vibrates, the resonance plate 12 also vibrates vertically in a reciprocating manner along with the resonance, that is, the part of the resonance plate 12 corresponding to the central recess 111 also deforms along with the bending vibration, that is, the part corresponding to the central recess 111 is the movable part 12a of the resonance plate 12, so that when the piezoelectric actuator 13 vibrates in a downward bending manner, the movable part 12a of the resonance plate 12 corresponding to the central recess 111 is brought in and pushed by the fluid and driven by the vibration of the piezoelectric actuator 13, and along with the deformation of the piezoelectric actuator 13 in the downward bending vibration, the gas enters from at least one gas inlet hole 110 on the gas inlet plate 11 and is collected at the central recess 111 through at least one bus hole 112 on the first surface 11B, then, the gas flows downwards into the first chamber 121 through the central hole 120 of the resonator plate 12 corresponding to the central recess 111, and then, the resonator plate 12 is driven by the vibration of the piezoelectric actuator 13 to resonate vertically and reciprocally, as shown in fig. 5C, at this time, the movable portion 12a of the resonator plate 12 vibrates downwards and is attached to and abutted against the convex portion 130C of the suspension plate 130 of the piezoelectric actuator 13, so that the distance between the confluence chamber and the fixing portions 12b at the two sides of the resonator plate 12 is not decreased in the region other than the convex portion 130C of the suspension plate 130, and the deformation of the resonator plate 12 is used to compress the volume of the first chamber 121, close the middle flow space of the first chamber 121, and urge the gas therein to flow towards the two sides, and further pass through the gap 135 between the brackets 132 of the piezoelectric actuator 13 and flow downwards. Fig. 5D shows that the movable portion 12a of the resonator plate 12 is bent upwards to vibrate and deform, and returns to the initial position, and the piezoelectric actuator 13 is driven by the voltage to vibrate upwards, so as to press the volume of the first chamber 121, but at this time, because the piezoelectric actuator 13 is lifted upwards, the lifting displacement can be D, so that the gas in the first chamber 121 flows towards two sides, and the gas is continuously driven to enter from at least one air inlet hole 110 on the air inlet plate 11, and then flows into the chamber formed by the central concave portion 111, as shown in fig. 5E, the resonator plate 12 resonates upwards by the vibration of the piezoelectric actuator 13 lifted upwards, and then the movable portion 12a of the resonator plate 12 returns to the initial position, as shown in fig. 5A, so that the gas in the central concave portion 111 flows into the first chamber 121 from the central hole 120 of the resonator plate 12, and flows downwards through the gap 135 between the brackets 132 of the piezoelectric actuator 13 and flows out of the microfluidic control device 1 A. The micro valve device 1B of the micro pneumatic power device 1 of the present invention is formed by stacking a valve plate 17 and an outlet plate 18 in sequence, and operates in cooperation with the gas collecting plate 16 of the micro fluid control device 1A.

As shown in fig. 1C, fig. 2A and fig. 2B, the gas collecting plate 16 has a concave surface 160, a reference surface 161, a gas collecting chamber 162, a first through hole 163, a second through hole 164, a first pressure relief chamber 165 and a first outlet chamber 166, the concave surface 160 is concave to form a gas collecting chamber 162, the reference surface 161 is concave to form a first pressure relief chamber 165 and a first outlet chamber 166, the first pressure relief chamber 165 is connected to the gas collecting chamber 162 through the first through hole 163, the first outlet chamber 166 is connected to the gas collecting chamber 162 through the second through hole 164, the gas collecting chamber 162 is sealed above the microfluidic control device 1A, so that the gas transported downward by the microfluidic control device 1A is temporarily accumulated in the gas collecting chamber 162, and a convex structure 167, such as but not limited to a cylindrical structure, is further added at the first outlet chamber 166, the height of the protrusion structure 167 is higher than the reference surface 161 of the gas collecting plate 16, and the gas collecting plate 16 has a plurality of tenons 168 protruding from the reference surface 161, in this embodiment, 6 tenons 168, but not limited thereto.

The micro fluid control device 1A is assembled corresponding to the micro valve device 1B, that is, the valve plate 17 and the outlet plate 18 of the micro valve device 1B are sequentially stacked and positioned on the gas collecting plate 16 of the micro fluid control device 1A, and the area of the outlet plate 18 is smaller than the area of the gas collecting plate 16 of the micro fluid control device 1A, so that the outlet plate 18 is assembled on the gas collecting plate 16, the four sides of the outlet plate 18 are retracted inwards to keep a sealant space with the gas collecting plate 16, the sealant 19 is sealed on the sealant space between the outlet plate 18 and the gas collecting plate 16, and a space for gluing is easier to achieve, and the sealing glue area is enlarged, not only the two ends of the whole valve plate 17 between the micro fluid control device 1A and the micro valve device 1B are sealed, so as to keep better sealing property, so as to improve the air leakage problem caused by the difficult sealing glue and poor sealing property at the two ends of the valve plate 17 between the micro fluid control device 1A and the micro valve device 1B.

The outlet plate 18 of the microvalve device 1B has a reference surface 180 and a second surface 187, which are disposed corresponding to each other, a pressure relief through hole 181 and an outlet through hole 182 are disposed on the side of the second surface 187, the pressure relief through hole 181 and the outlet through hole 182 respectively penetrate through the reference surface 180 and the second surface 187 of the outlet plate 18, a second pressure relief chamber 183 and a second outlet chamber 184 are recessed on the side of the reference surface 180, the pressure relief through hole 181 is disposed in the central portion of the second pressure relief chamber 183, the outlet through hole 182 is communicated with the second outlet chamber 184, and a communication flow passage 185 is further disposed between the second pressure relief chamber 183 and the second outlet chamber 184 for communicating gas, in this embodiment, the outlet through hole 182 is connectable to a device (not shown), for example: but not limited to, a press machine. The pressure relief through hole 181 is provided to discharge the gas in the microvalve device 1B, thereby achieving the pressure relief effect.

By the assembly of the micro fluid control device 1A and the micro valve device 1B, gas is introduced from at least one gas inlet hole 110 on the gas inlet plate 11 of the micro fluid control device 1A, flows through a plurality of pressure chambers (not shown) by the actuation of the piezoelectric actuator 13, and is transmitted downward, so that the gas can flow in one direction in the micro valve device 1B, and is accumulated in a device (not shown) connected to the outlet end of the micro valve device 1B, and when pressure relief is required, the output of the micro fluid control device 1A is regulated and controlled, so that the gas is discharged through the relief through hole 181 on the outlet plate 18 of the micro valve device 1B, and pressure relief is performed.

A convex structure 181a, such as but not limited to a cylindrical structure, may be further added to an end of the pressure relief through hole 181 of the outlet plate 18, and the height of the convex structure 181a is increased by improvement, and the height of the convex structure 181a is higher than the reference surface 180 of the outlet plate 18, so as to enhance the effect that the valve plate 17 rapidly abuts against and closes the pressure relief through hole 181, and achieve a full sealing effect due to a pre-stressing abutting effect; the outlet plate 18 further has at least one limiting structure 188, for example, the limiting structure 188 is disposed in the second pressure relief chamber 183, and is an annular block structure, and not limited thereto, and is mainly used for assisting in supporting the valve plate 17 to prevent the valve plate 17 from collapsing and to enable the valve plate 17 to open or close more rapidly when the microvalve device 1B performs pressure collecting operation.

Referring to fig. 4A and 4B, the valve plate 17 has a valve hole 170 and a plurality of positioning holes 171, wherein the valve plate 17 is disposed between the microfluidic control device 1A and the microfluidic control device 1B, and each positioning hole 171 extends into the corresponding tenon 168 of the air collecting plate 16 to position the valve plate 17, and in this embodiment, in order to dispose the valve plate 17 between the microfluidic control device 1A and the microfluidic control device 1B to achieve better air-tight sealing, a first surface 172 and a second surface 173 of the valve plate 17 are respectively disposed with a pasting region 174 and a plurality of non-pasting regions, the number of non-pasting regions of the valve plate 17 is four, which are a first non-pasting region 175a, a second non-pasting region 175B, a third non-pasting region 175c and a fourth non-pasting region 175d, wherein the first non-pasting region 175a, the second non-pasting region 175B, the third non-pasting region 175c and the fourth non-pasting region d are disposed in the first non-pasting region 175a, the second non-bonded area 175b is disposed on the first surface 172 of the valve plate 17, the first non-bonded area 175a is corresponding to the first outlet chamber 166 of the gas collecting plate 16, and not only has the same shape and substantially equal area to the first outlet chamber 166, but also the second non-bonded area 175b is corresponding to the first pressure relief chamber 165 of the gas collecting plate 16, and not only has the same shape and substantially equal area to the first pressure relief chamber 165, but also the third non-bonded area 175c and the fourth non-bonded area 175d are disposed on the second surface 173 of the valve plate 17, the third non-bonded area 175c is corresponding to the second pressure relief chamber 183 of the outlet plate 18, and not only has the same shape and substantially equal area to the second pressure relief chamber 183, and the fourth non-bonded area 175d is corresponding to the second outlet chamber 184 of the outlet plate 18, not only is the same shape and configuration as the second outlet chamber 184, but also the area of the second outlet chamber 184 is substantially equal to that of the first surface 172 and the second surface 173 of the valve plate 17, and thus double-sided adhesive (not shown) may be applied to the adhesive region 174, so that the adhesive area of the valve plate 17 can be better attached between the microfluidic control device 1A and the microvalve device 1B, and meanwhile, the first non-adhesive region 175a, the second non-adhesive region 175B, the third non-adhesive region 175c, and the fourth non-adhesive region 175d are free of double-sided adhesive, so as to avoid the influence of the opening or closing of the valve plate 17 on the first pressure relief chamber 165, the first outlet chamber 166, the second pressure relief chamber 183, and the second outlet chamber 184, i.e., so that the valve plate 17 is more attached to the reference surface 161 of the gas collecting plate 16 and the reference surface 180 of the outlet plate 18, thereby achieving better airtight sealing.

When the valve plate 17 is positioned and assembled with the gas collecting plate 16 and the outlet plate 18, the pressure relief through hole 181 of the outlet plate 18 corresponds to the first through hole 163 of the gas collecting plate 16, the second pressure relief chamber 183 corresponds to the first pressure relief chamber 165 of the gas collecting plate 16, the second outlet chamber 184 corresponds to the first outlet chamber 166 of the gas collecting plate 16, the valve plate 17 is disposed between the gas collecting plate 16 and the outlet plate 18 to block the first pressure relief chamber 165 from communicating with the second pressure relief chamber 183, the valve hole 170 of the valve plate 17 is disposed between the second through hole 164 and the outlet through hole 182, and the valve hole 170 is disposed corresponding to the protrusion structure 167 of the first outlet chamber 166 of the gas collecting plate 16, so that the single valve hole 170 is designed to allow the gas to flow in one direction in response to the pressure difference.

After the micro pneumatic power device 1 is assembled as described above, the gas is transferred from the micro fluid control device 1A to the gas collection chamber 162 of the micro valve device 1B, and then flows downward into the first pressure relief chamber 165 and the first outlet chamber 166 through the first through hole 163 and the second through hole 164, at this time, the downward gas pressure bends the flexible valve plate 17 downward to deform, so that the volume of the first pressure relief chamber 165 increases, and the pressure relief through hole 181 is pressed against the end of the pressure relief through hole 163 downward, so as to seal the pressure relief through hole 181 of the outlet plate 18, and therefore the gas in the second pressure relief chamber 183 does not flow out from the pressure relief through hole 181. In this embodiment, a protrusion 181a is additionally provided at the end of the pressure relief through hole 181 to enhance the valve plate 17 to rapidly abut against and seal the pressure relief through hole 181, so as to achieve a completely sealed effect due to the pre-stressed abutting effect, and a limiting structure 188 is disposed around the pressure relief through hole 181 to assist in supporting the valve plate 17 without collapsing. On the other hand, since the gas flows downward into the first outlet chamber 166 from the second through hole 164 and the valve plate 17 corresponding to the first outlet chamber 166 is also deformed downward, the corresponding valve hole 170 is opened downward, and the gas can flow from the first outlet chamber 166 into the second outlet chamber 184 through the valve hole 170 and flow from the outlet through hole 182 to the device (not shown) connected with the outlet through hole 182, so as to perform pressure-collecting operation on the device.

Therefore, when the micro valve device 1B is actuated by pressure collection, as shown in fig. 6A to 6D, it can respond to the pressure provided by the gas downwardly transmitted from the micro fluid control device 1A, as shown in fig. 6A, when the piezoelectric actuator 13 of the micro fluid control device 1A is actuated by the pressure to vibrate downwardly, the gas will enter the micro fluid control device 1A from the gas inlet hole 110 on the gas inlet plate 11, and will be collected to the central concave portion 111 thereof through at least one bus hole 112, and then flow downwardly into the first chamber 121 through the hollow hole 120 on the resonance plate 12.

Thereafter, as shown in fig. 6B, due to the resonance effect of the vibration of the piezoelectric actuator 13, the resonator plate 12 also performs reciprocating vibration, that is, it vibrates downward and approaches to the convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13, and by the deformation of the resonator plate 12, the volume of the chamber at the central concave portion 111 of the air inlet plate 11 is increased and the volume of the first chamber 121 is compressed, so that the gas in the first chamber 121 flows to both sides, and further flows downward through the gap 135 between the supports 132 of the piezoelectric actuator 13 to flow into the gas collection chamber 162 between the microfluidic control device 1A and the microvalve device 1B, and then flows downward into the first pressure relief chamber 165 and the first outlet chamber 166 through the first through hole 163 and the second through hole 164 communicating with the gas collection chamber 162, and thus the embodiment can be seen, when the resonator plate 12 performs vertical reciprocating vibration, the gap g0 between the resonator plate and the piezoelectric actuator 13 increases the maximum distance of vertical displacement, in other words, the gap g0 between the two structures enables the resonator plate 12 to generate a larger vertical displacement at the time of resonance.

Then, as shown in fig. 6C, since the resonance piece 12 of the micro-dynamic fluid control device 1A is returned to the initial position, the piezoelectric actuator 13 is driven by the voltage to vibrate upward. The volume of the first chamber 121 is also compressed in this way, so that the gas in the first chamber 121 flows towards both sides, and is continuously fed by the interstices 135 between the legs 132 of the piezoelectric actuator 13 into the plenum 162 and the first pressure relief chamber 165 and the first outlet chamber 166, this further allows for greater gas pressure within the first pressure relief chamber 165 and the first outlet chamber 166, thereby pushing the flexible valve plate 17 to deform and bend downward, and then in the second pressure relief chamber 183, the valve plate 17 is flatly attached downwards and is abutted against the convex structure 181a at the end of the pressure relief through hole 181, the pressure relief through hole 181 is closed, and in the second outlet chamber 184, the valve hole 170 of the valve plate 17 corresponding to the outlet through hole 182 is opened downwards, so that the gas in the second outlet chamber 184 can be transmitted downwards from the outlet through hole 182 to any connected device (not shown), thereby achieving the purpose of pressure collection operation.

Finally, as shown in fig. 6D, when the resonance plate 12 of the microfluidic control device 1A is shifted upward due to resonance, and the gas in the central recess 111 of the first surface 11B of the air inlet plate 11 can flow into the first chamber 121 through the hollow hole 120 of the resonance plate 12, and then continuously flow downward into the microvalve device 1B through the gap 135 between the brackets 132 of the piezoelectric actuator 13, the gas will continuously flow into any connected device through the gas collecting chamber 162, the second through hole 164, the first outlet chamber 166, the second outlet chamber 184 and the outlet through hole 182 because the gas pressure is continuously increased downward, and the pressure collecting operation can be driven by the difference between the external atmospheric pressure and the pressure inside the device, but not limited thereto.

Referring to fig. 7, when the microvalve device 1B is depressurized, the gas transmission amount of the microfluidic control device 1A is controlled such that the gas is not inputted into the gas collecting chamber 162, or when the internal pressure of the device (not shown) connected to the outlet through hole 182 is higher than the atmospheric pressure of the outside, the microvalve device 1B is depressurized. At this time, the gas is input into the second outlet chamber 184 from the outlet through hole 182, so that the volume of the second outlet chamber 184 expands, and further the flexible valve plate 17 is caused to bend upwards and deform, and is flatly attached upwards and abutted against the gas collecting plate 16, so that the valve hole 170 of the valve plate 17 is closed by abutting against the gas collecting plate 16. In this embodiment, a convex portion 167 is additionally provided to the first outlet chamber 166, so that the flexible valve plate 17 can be bent upwards to change shape and quickly abut against the valve hole 170, and the valve hole 170 can be closed by abutting against the convex portion 167, so that the gas in the second outlet chamber 184 will not flow back into the first outlet chamber 166, thereby achieving a better effect of preventing gas leakage. And, the gas in the second outlet chamber 184 can flow into the second pressure relief chamber 183 through the communication flow path 185, so as to expand the volume of the second pressure relief chamber 183 and make the valve plate 17 corresponding to the second pressure relief chamber 183 also bend and deform upwards, at this time, because the valve plate 17 is not pressed against and closed on the end of the pressure relief through hole 181, the pressure relief through hole 181 is in an open state, that is, the gas in the second pressure relief chamber 183 can flow outwards from the pressure relief through hole 181 for pressure relief operation. In this embodiment, the flexible valve plate 17 can be quickly changed in the upward bending shape by the protrusion 181a additionally provided at the end of the pressure relief through hole 181 or by the stopper 188 provided in the second pressure relief chamber 183, and the state of closing the pressure relief through hole 181 can be advantageously released. Thus, the one-way pressure relief operation can be used to exhaust the gas in the device (not shown) connected to the outlet through hole 182 for depressurization or completely exhaust the gas for pressure relief.

In summary, the micro pneumatic power device provided by the present disclosure is mainly characterized in that the micro fluid control device and the micro valve device are mutually assembled, so that the gas enters from the gas inlet on the micro fluid control device, and the actuation of the piezoelectric actuator is utilized to generate a pressure gradient in the designed flow channel and the pressure chamber, so that the gas flows at a high speed and is transmitted to the micro valve device, and then the gas flows in a single direction through the design of the one-way valve of the micro valve device, so that the pressure can be accumulated in any device connected with the outlet through hole; meanwhile, the area of the outlet plate of the micro valve device is smaller than that of the gas collecting plate of the micro fluid control device, so that the glue sealing space is increased, the better sealing characteristic is kept by gluing more easily, double-sided glue can be used for pasting the first surface and the second surface of the valve plate, the pasting area can be attached between the micro fluid control device and the micro valve device to achieve better airtight sealing, the micro pneumatic power device can achieve the effect of silence, the whole volume of the micro pneumatic power device can be reduced, the micro pneumatic power device can be thinned, the micro pneumatic power device can be portable, and the micro pneumatic power device can be widely applied to medical equipment and related equipment.

[ notation ] to show

1. 2: miniature pneumatic power device

1A, 2A: micro fluid control device

1B, 2B: micro valve device

1a, 2 a: shell body

10. 20: base seat

11. 21: air inlet plate

11 a: second surface of air inlet plate

11 b: first surface of air inlet plate

110: air intake

111: central concave part

112: bus bar hole

12. 22: resonance sheet

12 a: movable part

12 b: fixing part

120: hollow hole

121: the first chamber

13. 23: piezoelectric actuator

130: suspension plate

130 a: second surface of the suspension plate

130 b: the first surface of the suspension plate

130 c: convex part

130 d: center part

130e, 130 e: outer peripheral portion

131: outer frame

131 a: second surface of the outer frame

131 b: the first surface of the outer frame

132: support frame

132 a: second surface of the bracket

132 b: first surface of the bracket

133: piezoelectric ceramic plate

134. 151, 151: conductive pin

135: voids

141. 142, 241, 242: insulating sheet

15. 25: conductive sheet

16. 26: air collecting plate

16 a: containing space

160: concave surface

161: reference surface

162: air-collecting chamber

163: the first through hole

164: second through hole

165: first pressure relief chamber

166: first outlet chamber

167. 181 a: convex part structure

168: tenon

17. 27: valve plate

170: valve bore

171: positioning hole

172: first surface

173: second surface

174: adhesive area

175 a: first non-sticking region

175 b: second non-sticking area

175 c: third non-pasting region

175 d: fourth non-pasting region

18. 28: outlet plate

180: reference surface

181: pressure relief through hole

182: outlet through hole

183: second pressure relief chamber

184: second outlet chamber

185: communicating flow passage

187: second surface

188: limiting structure

19. 29: sealing colloid

g 0: gap

d: displacement of lift

Claims (9)

1. A micro pneumatic power device, comprising:

a microfluidic control device includes:

an air intake plate;

a resonant plate having a hollow hole;

a piezoelectric actuator;

the gas collecting plate is provided with a concave surface, a reference surface, a first through hole and a second through hole, a gas collecting cavity is formed by the concave surface, a first pressure relief cavity and a first outlet cavity are formed by the concave surface, the first pressure relief cavity is communicated with the gas collecting cavity through the first through hole, and the first outlet cavity is communicated with the gas collecting cavity through the second through hole;

wherein a gap is arranged between the resonance sheet and the piezoelectric actuator to form a first chamber, and when the piezoelectric actuator is driven, gas enters from the gas inlet plate, flows through the resonance sheet, and enters the first chamber for transmission;

a microvalve gate device configured to be positioned on the gas collection plate of the microfluidic control device, comprising:

the valve plate is provided with a first surface, a second surface and a valve hole, the valve hole penetrates through the first surface and the second surface, and the first surface and the second surface are respectively provided with a sticking area and a plurality of non-sticking areas;

an outlet plate having a reference surface and a second surface, the second surface having a pressure relief through hole and an outlet through hole respectively formed therein, the reference surface having a second pressure relief chamber and a second outlet chamber recessed therein, the pressure relief through hole being located in a central portion of the second pressure relief chamber, the outlet through hole being in communication with the second outlet chamber, and a communication flow passage further provided between the second pressure relief chamber and the second outlet chamber;

the valve plate and the outlet plate are sequentially stacked and assembled on the gas collecting plate, the area of the outlet plate is smaller than that of the gas collecting plate, so that four sides of the outlet plate retract inwards to keep a sealing space with the gas collecting plate, sealing glue is coated on the sealing space and completely seal the periphery of the valve plate, the valve plate is arranged between the outlet plate and the gas collecting plate through the pasting area pasting groups on the first surface and the second surface, and gas is transmitted into the micro valve device from the micro fluid control device to carry out pressure collecting or pressure relief operation, wherein the outlet plate is provided with at least one limiting structure in the second pressure relief chamber to assist in supporting the valve plate so as to prevent the valve plate from collapsing.

2. The micro pneumatic power device as claimed in claim 1, wherein the adhesive area of the valve plate is attached by double-sided adhesive.

3. The micro pneumatic device according to claim 1, wherein the plurality of non-bonded areas of the valve plate are a first non-bonded area and a second non-bonded area disposed on the first surface, the first non-bonded area corresponding to the first outlet chamber of the air collecting plate and having a same shape as the first outlet chamber and an area equal to the first outlet chamber, and the second non-bonded area corresponding to the first pressure relief chamber of the air collecting plate and having a same shape as the first pressure relief chamber and an area equal to the first pressure relief chamber.

4. The micro pneumatic device according to claim 1, wherein the plurality of non-bonded areas of the valve plate are a third non-bonded area and a fourth non-bonded area disposed on the second surface, the third non-bonded area corresponding to the second pressure relief chamber of the outlet plate and having a same shape as the second pressure relief chamber and an area equal to the second pressure relief chamber, and the fourth non-bonded area corresponding to the second outlet chamber of the outlet plate and having a same shape as the second outlet chamber and an area equal to the second outlet chamber.

5. The micro pneumatic power device as claimed in claim 1, wherein the air inlet plate has at least one air inlet hole, at least one bus bar hole and a central recess portion forming a converging chamber, the at least one air inlet hole is used for introducing air, the bus bar hole is corresponding to the air inlet hole and guides the air from the air inlet hole to converge to the converging chamber formed by the central recess portion, and the converging chamber is corresponding to the hollow hole of the resonator plate.

6. The micro pneumatic actuator as claimed in claim 1, wherein the piezoelectric actuator comprises:

a suspension plate which can be bent and vibrated from a central portion to an outer peripheral portion;

an outer frame surrounding the suspension plate;

at least one bracket connected between the suspension plate and the outer frame to provide elastic support;

the piezoelectric ceramic plate has a side length not larger than that of the suspension plate, is attached to a first surface of the suspension plate, and is used for applying voltage to drive the suspension plate to vibrate in a bending mode.

7. The micro pneumatic power device as recited in claim 6, wherein the suspension plate is square.

8. The micro pneumatic device as claimed in claim 1, wherein the first outlet chamber has a protrusion structure having a height higher than the reference surface of the gas collector.

9. The micro pneumatic device as claimed in claim 1, wherein the pressure relief through hole end has a protrusion structure having a height higher than the reference surface of the outlet plate.

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