CN108457846B

CN108457846B - Miniature gas transmission device

Info

Publication number: CN108457846B
Application number: CN201710089762.7A
Authority: CN
Inventors: 廖家淯; 陈世昌; 廖鸿信; 黄启峰; 韩永隆
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2017-02-20
Filing date: 2017-02-20
Publication date: 2020-03-03
Anticipated expiration: 2037-02-20
Also published as: CN108457846A

Abstract

A micro gas transmission device comprises a gas outlet plate, a gas outlet pipe, a gas outlet hole and a plurality of convex parts, wherein the gas outlet pipe is arranged on a first surface of the gas outlet plate, the gas outlet hole is arranged in the gas outlet pipe and penetrates through the gas outlet plate for discharging gas, the plurality of convex parts are arranged on a second surface of the gas outlet plate, and at least one vent part forming a recess is defined between every two adjacent convex parts; a resonance plate; a piezoelectric actuator having a suspension plate with a first surface and a second surface; an outer frame; the at least one bracket is connected with the suspension plate and the outer frame and arranged between the suspension plate and the outer frame; the piezoelectric element is attached to the first surface of the suspension plate; and the cover plate is provided with a side wall and a bottom plate, wherein the side wall surrounds the periphery of the bottom plate and is convexly arranged on the bottom plate and forms an accommodating space with the bottom plate.

Description

Miniature gas transmission device

[ technical field ] A method for producing a semiconductor device

The present invention relates to a micro gas transmission device, and more particularly, to a micro ultra-thin and silent micro gas transmission device.

[ background of the invention ]

At present, in all fields, no matter in medicine, computer technology, printing, energy and other industries, products are developed towards refinement and miniaturization, wherein fluid conveying structures contained in products such as micropumps, sprayers, ink jet heads, industrial printing devices and the like are key technologies thereof, so that how to break through technical bottlenecks thereof by means of innovative structures is an important content of development.

For example, in the pharmaceutical industry, many instruments or devices that require pneumatic power are often powered by conventional motors and pneumatic valves for gas delivery. However, due to the structural limitations of the conventional motors and gas valves, it is difficult to reduce the volume of the apparatus, so that the volume of the entire apparatus cannot be reduced, i.e. it is difficult to achieve the object of thinning, and therefore the apparatus cannot be mounted on or used with a portable device, which is not convenient enough.

In addition, the gas inlet and outlet of the conventional micro gas transmission device are performed by different components, so that many components are required to achieve the purpose of gas inlet and outlet, and the assembly process is complicated due to the number of required components.

Therefore, how to develop a method for improving the above-mentioned drawbacks of the known technology can make the conventional apparatus or equipment using the gas transmission device achieve small size, miniaturization and silence, and reduce the number of components used in the gas transmission device, so that the gas transmission device can achieve the purposes of portability, comfort and portability, and simplifying the overall process.

[ summary of the invention ]

The invention aims to provide a miniature gas transmission device suitable for portable or wearable instruments or equipment, so that through the structural design, the miniature gas transmission device can suck air through four sides of an air outlet plate and then discharge the air through the air outlet pipe on the air outlet plate, thereby achieving the effect of air inlet and outlet through a single element, reducing the elements of the miniature gas transmission device and achieving the effect of simplifying the whole process.

To achieve the above object, the present invention provides a micro gas delivery device, comprising: the air outlet plate is provided with an air outlet pipe, an air outlet hole and a plurality of convex parts, the air outlet pipe is arranged on the first surface of the air outlet plate, the air outlet hole is arranged in the air outlet pipe and penetrates through the air outlet plate for discharging air, the plurality of convex parts are arranged on the second surface of the air outlet plate, and at least one vent opening part forming a recess is defined between every two adjacent convex parts; the resonance sheet is provided with a hollow hole corresponding to the air outlet hole of the air outlet plate; a piezoelectric actuator having: a suspension plate having a first surface and a second surface; an outer frame; the at least one bracket is connected with the suspension plate and the outer frame and arranged between the suspension plate and the outer frame; the piezoelectric element is attached to the first surface of the suspension plate; the side wall surrounds the periphery of the bottom plate and is convexly arranged on the bottom plate and forms an accommodating space with the bottom plate, and the resonance sheet and the piezoelectric actuator are arranged in the accommodating space; the air outlet plate, the resonance sheet, the piezoelectric actuator and the cover plate are sequentially and oppositely arranged and positioned in a stacked mode, a confluence cavity is formed between the air outlet plate and the resonance sheet, a first cavity is formed between the cover plate and the resonance sheet, when the piezoelectric actuator is driven to conduct air collection operation, air is firstly collected to the confluence cavity through at least one air inlet of the air outlet plate and further flows to the first cavity through the hollow hole of the resonance sheet for temporary storage, and when the piezoelectric actuator is driven to conduct air exhaust operation, the air flows to the confluence cavity through the hollow hole of the resonance sheet from the first cavity and then is exhausted through the air outlet.

[ description of the drawings ]

Fig. 1A is a schematic front exploded view of a micro gas delivery device according to a preferred embodiment of the present disclosure.

Fig. 1B is a schematic rear exploded view of a micro gas delivery device according to a preferred embodiment of the present disclosure.

Fig. 2A is a schematic front view of a piezoelectric actuator according to a preferred embodiment of the present disclosure.

Fig. 2B is a schematic diagram of a back structure of a piezoelectric actuator according to a preferred embodiment of the present disclosure.

Fig. 2C is a schematic cross-sectional view of a piezoelectric actuator according to a preferred embodiment of the present invention.

Fig. 3A is a front plan view of the micro gas delivery device according to the preferred embodiment of the present invention.

FIG. 3B is a schematic view of the cross-sectional structure A-A shown in FIG. 2A.

FIG. 3C is a schematic view of the cross-sectional structure B-B shown in FIG. 2A.

FIGS. 4A-4D are schematic views illustrating the operation of the micro gas delivery device according to the preferred embodiment of the present invention.

[ detailed description ] embodiments

Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present invention is capable of various modifications without departing from the scope of the invention, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

Referring to fig. 1A and 1B, fig. 1A is a schematic front exploded view of a micro gas transmission device according to a preferred embodiment of the present disclosure, and fig. 1B is a schematic back exploded view of the micro gas transmission device according to the preferred embodiment of the present disclosure. As shown in the figure, the micro gas delivery device 1 of the present embodiment includes an air outlet plate 11, a resonator plate 12, a piezoelectric actuator 13, a cover plate 16, and the like. The gas outlet plate 11 has a gas outlet pipe 111, a gas outlet hole 112 and a plurality of protruding portions 113, wherein the gas outlet pipe 111 is disposed on the first surface 11a of the gas outlet plate 11, the gas outlet hole 112 is disposed in the gas outlet pipe 111 and penetrates through the gas outlet plate 11 for discharging the gas in the micro gas transmission device 1, the plurality of protruding portions 113 are disposed on the second surface 11b of the gas outlet plate 11, and a vent portion 114 with a recess is defined between every two adjacent protruding portions 113, so that the assembled micro gas transmission device 1 can be air-fed through the vent portion 114. The resonator plate 12 has a hollow hole 120 disposed corresponding to the outlet hole 112 of the outlet plate 11. The piezoelectric actuator 13 includes a suspension plate 131, a frame 132 and a piezoelectric element 133, wherein the suspension plate 131 includes a central portion 131c and an outer peripheral portion 131d, when the piezoelectric element 133 is driven by a voltage, the suspension plate 131 can vibrate in a bending manner from the central portion 131c to the outer peripheral portion 131d, the frame 132 is disposed around the outer side of the suspension plate 131 and has at least one support 134 and a conductive pin 132a, but not limited thereto, each support 134 is disposed between the suspension plate 131 and the frame 132, two ends of each support 134 are connected to the suspension plate 131 and the frame 132 to provide an elastic support, the conductive pin 132a is disposed on the frame 132 in an outward protruding manner for power connection, and the piezoelectric element 133 is attached to a second surface 131b of the suspension plate 131 to receive an external voltage to deform so as to drive the suspension plate 131 to vibrate in a bending manner. The cover plate 16 has a sidewall 161, a bottom plate 162 and an opening 163, the sidewall 161 is protruded on the bottom plate 162 around the periphery of the bottom plate 162, and forms an accommodating space 16a together with the bottom plate 162 for the resonator plate 12 and the piezoelectric actuator 13 to be disposed therein, the opening 163 is disposed on the sidewall 16 for the conductive pin 132a of the outer frame 132 to pass through the opening 163 and protrude out of the cover plate 16, so as to be connected to an external power source, but not limited thereto.

In the present embodiment, the plurality of protrusions 113 of the air outlet plate 11 are correspondingly disposed at a plurality of corners of the air outlet plate 11, and are in a structure protruding outward from the plurality of corners, and are integrally formed with the air outlet plate 11, but not limited thereto. In the present embodiment, the micro gas delivery device 1 further includes two

insulating sheets

141, 142 and a conducting sheet 15, but not limited thereto, wherein the two

insulating sheets

141, 142 are respectively disposed on the upper and lower sides of the conducting sheet 15, the outer shape thereof substantially corresponds to the outer frame 132 of the piezoelectric actuator 13, and the insulating sheets are made of an insulating material, such as: plastic for insulation, but not limited thereto, the conductive sheet 15 is made of conductive material, such as: metal for electrical conduction and having an outer shape substantially corresponding to the outer frame 132 of the piezoelectric actuator 13, but not limited thereto. In the present embodiment, a conductive pin 151 may also be disposed on the conductive plate 15 for electrical conduction, and the conductive pin 151, like the conductive pin 132a of the outer frame 132, passes through the opening 163 of the cover plate 16 and protrudes out of the cover plate 16, so as to be connected to an external power source.

Referring to fig. 2A, 2B and 2C, fig. 2A is a front structural diagram of a piezoelectric actuator according to a preferred embodiment of the present disclosure, fig. 2B is a rear structural diagram of a piezoelectric actuator according to a preferred embodiment of the present disclosure, and fig. 2C is a cross-sectional structural diagram of a piezoelectric actuator according to a preferred embodiment of the present disclosure. As shown in the figure, in the present embodiment, the suspension plate 131 is a stepped structure, that is, a protrusion 131e is further disposed on the central portion 131c of the first surface 131a of the suspension plate 131, and the protrusion 131e is a circular protrusion structure, but not limited thereto, and in some embodiments, the suspension plate 131 may also be a plate-shaped square with two flat surfaces. As shown in fig. 2C, the convex portion 131e of the suspension plate 131 is coplanar with the first surface 132C of the outer frame 132, the first surface 131a of the suspension plate 131 and the first surface 134a of the bracket 134 are also coplanar, and a specific depth is provided between the convex portion 131e of the suspension plate 131 and the first surface 132C of the outer frame 132 and the first surface 131a of the suspension plate 131 and the first surface 134a of the bracket 134. As for the second surface 131B of the suspension plate 131, as shown in fig. 2B and 2C, it is a flat coplanar structure with the second surface 132d of the outer frame 132 and the second surface 134B of the support 134, and the piezoelectric element 133 is attached to the flat second surface 131B of the suspension plate 131. In other embodiments, the suspension plate 131 may also be a square structure with a flat surface and a flat surface, and the shape of the suspension plate can be changed according to the actual implementation. In some embodiments, the suspension plate 131, the outer frame 132 and the bracket 134 may be integrally formed, and may be formed by a metal plate, such as stainless steel, but not limited thereto. In the present embodiment, the micro gas delivery device 1 further has at least one gap 135 between the suspension plate 131, the outer frame 132 and the support 134 for the gas to pass through.

Next, the internal and external structures of the assembled micro gas transmission device 1 will be described, referring to fig. 3A, 3B and 3C, fig. 3A is a front plan view of the micro gas transmission device according to the preferred embodiment of the present invention, fig. 3B is a schematic sectional view of a-a shown in fig. 3A, and fig. 3C is a schematic sectional view of B-B shown in fig. 3A. As shown in the figure, the micro gas transmission device 1 of the present invention is formed by sequentially stacking the gas outlet plate 11, the resonator plate 12, the piezoelectric actuator 13, the insulating plate 141, the conducting plate 15, the insulating plate 142, and the cover plate 16 from top to bottom, and applying glue to the periphery of the stacked piezoelectric actuator 13, insulating plate 141, conducting plate 15, and another insulating plate 142 to form the glue 18, so as to fill up the periphery of the accommodating space 16a (shown in fig. 1A) of the cover plate 16 to complete the sealing. The assembled micro gas delivery device 1 has a substantially rectangular top appearance as shown in fig. 3A, but the shape may be varied according to actual requirements. In addition, as shown in fig. 3A, in the present embodiment, only the conductive pin 151 of the conductive sheet 15 and the conductive pin 132a of the piezoelectric actuator 13 are protruded out of the air outlet plate 11 for connecting with an external power source, but not limited thereto. As shown in fig. 3B and 3C, the assembled micro gas delivery device 1 forms a collecting chamber 17a between the gas outlet plate 11 and the resonant plate 12, and forms a first chamber 17B between the cover plate 16 and the resonant plate 12. Since the second surface 11B of the air outlet plate 11 has a plurality of protrusions 113, after the assembly is completed, the protrusions 113 are abutted against the side wall 161 of the cover plate 16, that is, as shown in fig. 3B, a space equal to the height of the protrusions 113 can be maintained between the second surface 11B of the air outlet plate 11 and the cover plate 16, and as shown in fig. 3B, by maintaining the height, the confluence chamber 17a can communicate with the outside through the vent part 114 between two adjacent protrusions 113, so that air can be collected from the outside environment. In the present embodiment, a gap g0 is formed between the resonator plate 12 and the piezoelectric actuator 13 of the micro gas transmission device 1, and the gap g0 is filled with a conductive material, such as: the conductive paste, but not limited thereto, can maintain a depth of a gap g0 between the resonator plate 12 and the protrusion 131e of the suspension plate 131 of the piezoelectric actuator 13, so as to guide the air flow to flow more rapidly, and since the protrusion 131e of the suspension plate 131 and the resonator plate 12 maintain a proper distance, the contact interference between them is reduced, so as to reduce the noise. Therefore, when the piezoelectric actuator 13 is driven to perform the gas collection operation, the gas is firstly collected to the collecting chamber 17a from at least one vent port 114 of the gas outlet plate 16, and further flows to the first chamber 17b through the hollow hole 120 of the resonator plate 12 for temporary storage, and when the piezoelectric actuator 13 is driven to perform the gas discharge operation, the gas flows to the collecting chamber 17a from the first chamber 17b through the hollow hole 120 of the resonator plate 12, and then is discharged through the gas outlet 112 of the gas outlet plate 11.

The operation flow of the micro gas transmission device 1 of the present invention is further described below, please refer to fig. 4A to 4D, and fig. 4A to 4D are schematic views illustrating the operation process of the micro gas transmission device according to the preferred embodiment of the present invention. First, as shown in fig. 4A, the micro gas delivery device 1 is formed by stacking and positioning the gas outlet plate 11, the resonator plate 12, the piezoelectric actuator 13, the insulating plate 141, the conductive plate 15, the other insulating plate 142 and the cover plate 16 in sequence, wherein a gap g0 is formed between the resonator plate 12 and the piezoelectric actuator 13, a bus chamber 17a is formed between the resonator plate 12 and the gas outlet plate 11, and a first chamber 17b is formed between the resonator plate 12 and the piezoelectric actuator 13. When the micro gas delivery device 1 is not driven by voltage, the positions of its elements are shown in fig. 4A.

As shown in fig. 4B, when the piezoelectric actuator 13 of the micro gas delivery device 1 is actuated by a voltage to vibrate downward, the gas enters the micro gas delivery device 1 through the vent port 114 on the gas outlet plate 11, and is collected in the collecting chamber 17a, and then flows downward into the first chamber 17B through the hollow hole 120 on the resonator plate 12, and the resonator plate 12 is also vibrated in a reciprocating manner under the resonance effect of the suspension plate 131 of the piezoelectric actuator 13, that is, the resonator plate 12 deforms downward, that is, the resonator plate 12 slightly protrudes downward from the hollow hole 120.

Thereafter, as shown in fig. 4C, the piezoelectric actuator 13 is vibrated back to the initial position and approaches the convex portion 131e of the suspension plate 131 of the piezoelectric actuator 13, so that the gas in the upper half layer of the first chamber 17b is pushed to flow to both sides and passes through the gap 135 of the piezoelectric actuator 13 to flow to the lower half layer of the first chamber 17b for temporary storage. In this embodiment, when the resonator plate 12 vertically reciprocates, the maximum vertical displacement distance can be increased by the gap g0 between the resonator plate 12 and the piezoelectric actuator 13, i.e., the gap g0 between the resonator plate 12 and the piezoelectric actuator 13 can allow the resonator plate 12 to vertically displace more greatly at the time of resonance.

Finally, as shown in fig. 4D, when the resonance plate 12 of the micro gas delivery device 1 is resonantly displaced upward, so that the gas in the first chamber 17b flows into the joining chamber 17a through the hollow hole 120 of the resonator plate 12, and as the gas pressure of the merging chamber 17a is continuously increased upward, the gas is discharged from the gas outlet hole 112 of the gas outlet pipe 111 of the gas outlet plate 11, and finally, the resonance plate 12 is returned to the original position, that is, as shown in FIG. 4A, through the above-mentioned operation flow, the gas continuously flows into the confluence chamber 17a through the gas inlet portion 114 of the gas inlet plate 11 and then flows into the first chamber 17b, and then flows into the confluence chamber 17a from the first chamber 17b, and is discharged through the outlet holes 112 in the outlet pipe 111 of the inlet plate, and finally flows into any device connected with the outlet pipe 111, thereby enabling stable gas transmission. In other words, when the micro gas transmission device 1 of the present invention operates, the gas flows through the vent part 114 of the gas outlet plate 11, the converging chamber 17a, the first chamber 17b, the converging chamber 17a, and the gas outlet pipe 11 of the gas outlet plate 11 in sequence, so that the micro gas transmission device 1 of the present invention can simultaneously perform gas inlet and gas outlet on the gas outlet plate 11 through a single element, i.e., the gas outlet plate 11, and by using the structural design of the gas outlet plate 11, the number of elements of the micro gas transmission device 1 can be reduced, and the overall process can be simplified.

In summary, the micro gas transmission device of the present disclosure utilizes the structural design, the protruding portions are disposed on the gas outlet plate, so that after the assembly is completed, the gas inlet portion is formed between the protruding portions of the gas outlet plate, and further, the gas flows into the collecting chamber of the micro gas transmission device from the gas inlet portion of the gas outlet plate, and then flows into the first chamber along the hollow hole of the resonator plate, and along with the driving of the piezoelectric actuator, the gas flows back into the collecting chamber from the first chamber, and is discharged from the gas outlet hole on the gas outlet plate, so as to achieve the effect of gas inlet and outlet by a single element, thereby reducing the number of elements of the micro gas transmission device and simplifying the assembly process, and the present disclosure can achieve the rapid gas transmission by the driving of the piezoelectric actuator and the matching of the resonator plate, and disposing the gap between the piezoelectric actuator and the resonator plate, and simultaneously, the noise is reduced, the whole volume of the micro gas transmission device can be reduced and the micro gas transmission device can be thinned, so that the portable purpose of portability and comfort can be achieved, and the micro gas transmission device can be widely applied to medical equipment and related equipment. Therefore, the micro gas transmission device has great industrial application value, and the application is provided by the method.

Various modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims.

[ notation ] to show

1: miniature gas transmission device

11: air outlet plate

111: air outlet pipe

112: air outlet

113: projecting part

114: ventilation opening part

12: resonance sheet

120: hollow hole

13: piezoelectric actuator

131: suspension plate

131 a: the first surface of the suspension plate

131 b: second surface of the suspension plate

131 c: center part

131 d: outer peripheral portion

131 e: convex part

132: outer frame

132a, 151: conductive pin

132 c: the first surface of the outer frame

132 d: second surface of the outer frame

133: piezoelectric element

134: support frame

134 a: first surface of the bracket

134 b: first surface of the bracket

135: voids

141. 142: insulating sheet

15: conductive sheet

16: cover plate

16 a: containing space

161: side wall

162: base plate

163: opening of the container

17 a: confluence chamber

17 b: the first chamber

18: colloid

A-A, B-B: tangential direction

g 0: gap

Claims

1. A micro gas delivery device, comprising:

the air outlet plate is provided with an air outlet pipe, an air outlet hole and a plurality of convex parts, the air outlet pipe is arranged on a first surface of the air outlet plate, the air outlet hole is arranged in the air outlet pipe and penetrates through the air outlet plate for discharging air, the plurality of convex parts are arranged on a second surface of the air outlet plate, and at least one air vent part forming a recess is defined between every two adjacent convex parts;

a resonance sheet having a hollow hole corresponding to the air outlet of the air outlet plate;

a piezoelectric actuator having:

a suspension plate having a first surface and a second surface;

an outer frame;

the at least one bracket is connected with the suspension plate and the outer frame and arranged between the suspension plate and the outer frame; and

the piezoelectric element is attached to the first surface of the suspension plate; and

the cover plate is provided with a side wall and a bottom plate, the side wall surrounds the periphery of the bottom plate and is convexly arranged on the bottom plate, an accommodating space is formed between the side wall and the bottom plate, and the resonator plate and the piezoelectric actuator are arranged in the accommodating space;

the gas outlet plate, the resonance sheet, the piezoelectric actuator and the cover plate are correspondingly arranged and positioned in a stacking mode in sequence, a confluence chamber is formed between the gas outlet plate and the resonance sheet, a first chamber is formed between the cover plate and the resonance sheet, when the piezoelectric actuator is driven to perform gas collection operation, gas is firstly collected to the confluence chamber through the at least one ventilation opening of the gas outlet plate and further flows to the first chamber through the hollow hole of the resonance sheet for temporary storage, and when the piezoelectric actuator is driven to perform exhaust operation, gas flows to the confluence chamber through the hollow hole of the resonance sheet from the first chamber and then is exhausted through the gas outlet hole.

2. The micro gas delivery device according to claim 1, wherein the plurality of protrusions are disposed at a plurality of corners of the gas outlet plate, and are in a shape of protruding outward from the plurality of corners.

3. The micro gas delivery device according to claim 2, wherein the plurality of protrusions and the gas outlet plate are integrally formed.

4. The micro gas delivery device according to claim 1, wherein the resonator plate of the micro gas delivery device has a gap with the piezoelectric actuator.

5. The micro gas delivery device according to claim 1, further comprising at least one insulating plate and one conductive plate, wherein the at least one insulating plate and the conductive plate are sequentially disposed under the piezoelectric actuator.

6. The micro gas delivery device according to claim 1, wherein the suspension plate of the micro gas delivery device further comprises a protrusion on the first surface.

7. The micro gas delivery device according to claim 6, wherein the convex portion of the suspension plate has a cylindrical configuration.

8. The micro gas delivery device according to claim 1, further comprising at least one gap between the frame, the suspension plate, and the outer frame.

9. The micro gas delivery device according to claim 1, wherein two ends of the support of the piezoelectric actuator of the micro gas delivery device are respectively connected to the outer frame and the suspension plate.

10. The micro gas delivery device as claimed in claim 5, wherein the outer frame of the piezoelectric actuator has a conductive pin, the conductive plate has a conductive pin, and the cover plate has an opening corresponding to the vent portion of the gas outlet plate, so that the conductive pin of the conductive plate and the conductive pin of the piezoelectric actuator are protruded outwardly through the opening of the cover plate and out of the cover plate for connecting to an external power source.