CN210087587U - Gas delivery device - Google Patents

Gas delivery device Download PDF

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CN210087587U
CN210087587U CN201721406652.0U CN201721406652U CN210087587U CN 210087587 U CN210087587 U CN 210087587U CN 201721406652 U CN201721406652 U CN 201721406652U CN 210087587 U CN210087587 U CN 210087587U
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gas
air outlet
confluence
groove
delivery device
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莫皓然
陈世昌
廖家淯
廖鸿信
黄启峰
蔡长谚
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Microjet Technology Co Ltd
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Microjet Technology Co Ltd
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Abstract

A gas delivery device, comprising: the air outlet cover plate is provided with an air outlet pipe and an air outlet convergence groove, and the air outlet pipe is communicated with the air outlet convergence groove and correspondingly arranged; a plurality of groups of flow guide seats; the gas pumps are correspondingly arranged in the concave grooves of the flow guide seats; when the gas pump is enabled to carry out gas transmission, gas is guided into the concave groove of each flow guide seat, and the gas is discharged from the gas outlet pipe sequentially through the communicating hole, the confluence chamber and the gas outlet confluence groove.

Description

气体输送装置gas delivery device

【技术领域】【Technical field】

本案是关于一种气体输送装置,尤指一种可提高流量传输的气体输送装置。This case is about a gas delivery device, especially a gas delivery device that can improve flow transmission.

【背景技术】【Background technique】

目前于各领域中无论是医药、电脑科技、打印、能源等工业,产品均朝精致化及微小化方向发展,其中微帮浦所包含的气体输送结构为其关键技术,是以,如何借创新结构突破其技术瓶颈,为发展的重要内容。At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing in the direction of refinement and miniaturization. Among them, the gas delivery structure contained in the micropump is the key technology. Therefore, how to use innovation The structure breaks through its technical bottleneck and is an important part of development.

随着科技的日新月异,气体输送装置的应用上亦愈来愈多元化,举凡工业应用、生医应用、医疗保健、电子散热等等,甚至近来热门的穿戴式装置皆可见它的踪影,可见传统的气体输送装置已渐渐有朝向装置微小化、流量极大化的趋势。With the rapid development of science and technology, the application of gas delivery devices has become more and more diversified, such as industrial applications, biomedical applications, medical care, electronic cooling, etc., and even the recent popular wearable devices. The gas conveying device of china has gradually tended towards the miniaturization of the device and the maximization of the flow rate.

于现有技术中,气体输送装置主要以传统的机构部件堆叠而构成,并以每一个机构部件极小化或厚度薄化的方式,来达到整体装置微型化、薄型化的目的。然而,传统机构件在微小化后,其尺寸精度控制不易,且组装精度同样难以掌控,进而造成产品良率不一,甚至有气体传送的流量不稳定等问题。In the prior art, the gas delivery device is mainly constructed by stacking traditional mechanical components, and the miniaturization or thickness reduction of each mechanical component is used to achieve the purpose of miniaturization and thinning of the overall device. However, after the miniaturization of traditional mechanical components, it is difficult to control the dimensional accuracy, and the assembly accuracy is also difficult to control, resulting in different product yields and even unstable gas delivery flow.

再者,已知的气体传输装置亦具有输送流量不足的问题,透过单一气体传输装置仍难以因应大量气体传输的需求。因此,如何发展一种气体输送装置提高流量传输的结构,实为目前迫切需要解决的问题。Furthermore, the known gas transmission device also has the problem of insufficient delivery flow, and it is still difficult to meet the demand for a large amount of gas transmission through a single gas transmission device. Therefore, how to develop a structure for improving the flow transmission of a gas conveying device is a problem that needs to be solved urgently at present.

【实用新型内容】【Content of utility model】

本案的主要目的在于提供一种气体输送装置,借由使多组微型化的气体泵并排设置,以提供气体输送装置达到最佳气体传输效率。The main purpose of the present application is to provide a gas delivery device, by arranging multiple groups of miniaturized gas pumps side by side, so as to provide the gas delivery device to achieve the best gas transmission efficiency.

为达上述目的,本案的一较广义实施样态为提供一种气体输送装置,包含:一出气盖板,具有一出气管及一出气汇流槽,该出气管与该出气汇流槽连通对应设置;多组导流座,该每一导流座具有一主板、一凸出侧框以及一框体,该主板具有一凹置槽及一连通孔,该连通孔连通该凹置槽;以及多组气体泵,对应设置于该每一导流座的该凹置槽内;In order to achieve the above-mentioned purpose, a broader implementation form of the present case is to provide a gas conveying device, comprising: a gas outlet cover plate, which has an air outlet pipe and an air outlet confluence groove, and the air outlet pipe is communicated with the air outlet confluence groove and is arranged correspondingly; a plurality of sets of guide seats, each guide seat has a main board, a protruding side frame and a frame body, the main board has a concave groove and a communication hole, the communication hole communicates with the concave groove; and a plurality of groups a gas pump, correspondingly disposed in the recessed groove of each guide seat;

其中,该多组导流座并排设置,透过该出气盖板罩盖封闭该多组导流座,使该出气盖板与该多组导流座的该凸出侧框上下密合连接,以定义一汇流腔室并与该出气汇流槽相互连通,当该气体泵致能进行气体传输时,将气体导入该每一导流座的该凹置槽,并使气体依序经由该连通孔、该汇流腔室及该出气汇流槽,最后气体由该出气管排出。Wherein, the multiple sets of guide seats are arranged side by side, and the multiple sets of guide bases are closed by the cover of the air outlet cover, so that the air outlet cover and the protruding side frames of the multiple sets of guide bases are tightly connected up and down, In order to define a confluence chamber and communicate with the gas outlet confluence slot, when the gas pump enables gas transmission, the gas is introduced into the recessed slot of each guide seat, and the gas is sequentially passed through the communication hole , the confluence chamber and the gas outlet confluence groove, and finally the gas is discharged from the gas outlet pipe.

【附图说明】【Description of drawings】

图1A为本案较佳实施例的气体输送装置的结构示意图。FIG. 1A is a schematic structural diagram of a gas delivery device according to a preferred embodiment of the present invention.

图1B为本案较佳实施例的气体输送装置的结构拆解示意图。FIG. 1B is a schematic diagram of the disassembly of the structure of the gas delivery device according to the preferred embodiment of the present invention.

图2A为图1B所示的出气盖板的结构示意图。FIG. 2A is a schematic structural diagram of the gas outlet cover shown in FIG. 1B .

图2B为图2A所示的出气盖板于另一视角的结构示意图。FIG. 2B is a schematic structural diagram of the air outlet cover shown in FIG. 2A from another viewing angle.

图3A为图1B所示的导流座的结构示意图。FIG. 3A is a schematic structural diagram of the guide seat shown in FIG. 1B .

图3B为图3A所示的导流座于另一视角的结构示意图。FIG. 3B is a schematic structural diagram of the flow guide shown in FIG. 3A from another viewing angle.

图4为图1A所示的气体输送装置的A-A剖面结构示意图。FIG. 4 is a schematic view of the A-A cross-sectional structure of the gas delivery device shown in FIG. 1A .

图5A为本案较佳实施例的气体泵的结构拆解示意图。FIG. 5A is a schematic diagram of disassembly of the structure of the gas pump according to the preferred embodiment of the present invention.

图5B为本案较佳实施例的气体泵于另一视角的结构拆解示意图。FIG. 5B is a schematic structural disassembly view of the gas pump according to the preferred embodiment of the present invention from another perspective.

图6为图5A所示的压电致动器的剖面结构示意图。FIG. 6 is a schematic cross-sectional structure diagram of the piezoelectric actuator shown in FIG. 5A .

图7为本案较佳实施例的气体泵的剖面结构示意图。FIG. 7 is a schematic cross-sectional structure diagram of a gas pump according to a preferred embodiment of the present invention.

图8A至图8E为本案较佳实施例的气体泵的作动结构示意图。8A to 8E are schematic views of the actuation structure of the gas pump according to the preferred embodiment of the present invention.

【具体实施方式】【Detailed ways】

体现本案特征与优点的一些典型实施例将在后段的说明中详细叙述。应理解的是本案能够在不同的态样上具有各种的变化,其皆不脱离本案的范围,且其中的说明及图示在本质上是当作说明之用,而非架构于限制本案。Some typical embodiments embodying the features and advantages of the present case will be described in detail in the description of the latter paragraph. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and the descriptions and diagrams therein are essentially for illustrative purposes rather than limiting the present case.

本案的气体输送装置是可应用于各式电子装置或医疗设备的中,并可提高流量传输。请参阅图1A及图1B所示,本案气体输送装置1主要包含出气盖板11、多组导流座12、多组气体泵14,其中每一个气体泵14分别采以对应容置导流座12中,又多组导流座12采以水平方向并排设置,出气盖板11为罩盖封闭多组导流座12,多组气体泵14为进行气体传输的用,当多组气体泵14同时进行气体传输时,气体借由出气盖板11、导流座12等元件进行汇流,最后由出气盖板11的出气管111快速排出,借此可达到提升气体传输流量的功效,为了便于说明本案的技术内容,本实施例以导流座12与气体泵14的数量为二个为例进行说明,其细部结构及作动方式将于说明书后段进一步详述。The gas delivery device in this case can be applied to various electronic devices or medical equipment, and can improve the flow transmission. Please refer to FIG. 1A and FIG. 1B , the gas delivery device 1 of the present application mainly includes a gas outlet cover 11 , a plurality of sets of guide seats 12 , and a plurality of sets of gas pumps 14 , wherein each gas pump 14 adopts a corresponding accommodating guide seat. In 12, multiple sets of guide seats 12 are arranged side by side in a horizontal direction, the gas outlet cover plate 11 is a cover to close the multiple sets of guide seats 12, and the multiple sets of gas pumps 14 are used for gas transmission. When the gas is transported at the same time, the gas is confluenced by the gas outlet cover plate 11, the guide seat 12 and other elements, and finally quickly discharged from the gas outlet pipe 111 of the gas outlet cover plate 11, thereby achieving the effect of increasing the gas transmission flow rate. For the convenience of description The technical content of this case is described in this embodiment by taking the number of the guide seat 12 and the gas pump 14 as two as an example, and the detailed structure and operation method thereof will be further described in the latter part of the specification.

本案的导流座12及气体泵14的数量是相互对应,若气体泵14数量为三个,则导流座12数量亦同样为三个,然数量不以此为限,可依据实际情形任施变化。此外,出气盖板11的大小亦可随导流座12的数量而变化,使出气盖板11可罩盖封闭于多组导流座12的上,以供进行气体汇流的传输。The numbers of the guide seats 12 and the gas pumps 14 in this case correspond to each other. If the number of the gas pumps 14 is three, the number of the guide seats 12 is also three, but the number is not limited to this, and can be arbitrarily determined according to the actual situation. Apply changes. In addition, the size of the gas outlet cover 11 can also be changed with the number of the guide seats 12 , so that the gas outlet cover 11 can be covered and sealed on the plurality of sets of guide seats 12 for the transmission of the gas confluence.

请参阅图2A及图2B所示,本实施例的出气盖板11包含出气管111及出气汇流槽114,其中出气管111与出气汇流槽114连通对应设置,出气管111包含排出开口112,以及出气汇流槽114包含进入开口113,排出开口112设置于出气管111内部与进入开口113相互连通,其中进入开口113的孔径略大于排出开口112,且出气管111之内径为由进入开口113渐缩至排出开口112的锥度形状,但不以此为限,透过锥度形状的设置,以供气体产生明显的汇聚效果,并使汇聚后的气体可由出气管111快速传输。Please refer to FIGS. 2A and 2B , the air outlet cover 11 of this embodiment includes an air outlet pipe 111 and an air outlet confluence groove 114 , wherein the air outlet pipe 111 is communicated with the air outlet confluence groove 114 and is arranged correspondingly, the air outlet pipe 111 includes a discharge opening 112 , and The air outlet manifold 114 includes an inlet opening 113 . The outlet opening 112 is disposed inside the air outlet pipe 111 and communicates with the inlet opening 113 . The diameter of the inlet opening 113 is slightly larger than that of the outlet opening 112 , and the inner diameter of the air outlet pipe 111 is tapered from the inlet opening 113 . To the taper shape of the discharge opening 112 , but not limited thereto, the taper shape can be used to generate a clear converging effect for the gas, and the condensed gas can be quickly transported by the gas outlet pipe 111 .

请参阅图3A及图3B所示,多组导流座12的结构特征均相同,为了避免重复说明,以下仅针对单一导流座12的结构特征进行详述。导流座12包含一主板120、一凸出侧框121以及一框体122,其中主板120设有一凹置槽124及一连通孔125,连通孔125连通凹置槽124,凸出侧框121为突出围绕于主板120上方,框体122为突出围绕于主板120下方,且凸出侧框121设置于主板120上相较框体122设置于主板上略为内缩,以形成一段差空间,以供与出气盖板11组接承置于上,又凸出侧框121上设置一封胶开口127,以及导流座12的框体122上设置一接脚开口126。Please refer to FIG. 3A and FIG. 3B , the structural features of the plurality of groups of guide bases 12 are the same. In order to avoid repeated description, the following only describes the structural features of a single guide base 12 in detail. The guide seat 12 includes a main board 120 , a protruding side frame 121 and a frame body 122 , wherein the main board 120 is provided with a concave groove 124 and a communication hole 125 . The communication hole 125 communicates with the concave groove 124 and protrudes from the side frame 121 . In order to protrude and surround the main board 120, the frame body 122 protrudes and surrounds the bottom of the main board 120, and the protruding side frame 121 is arranged on the main board 120. The air outlet cover 11 is assembled and supported on the top, and a sealing opening 127 is provided on the protruding side frame 121 , and a pin opening 126 is provided on the frame body 122 of the guide seat 12 .

再参阅图5A、图5B及图6所示,多组气体泵14是为相同的气体传输结构,其作动方式亦相同,为了方便说明,以下仅以单一气体泵14进行说明。如图所示,气体泵14主要依序由进气板141、共振片142、压电致动器143、第一绝缘片144a、导电片145及第二绝缘片144b相互对应堆叠设置所构成。Referring to FIGS. 5A , 5B and 6 again, multiple sets of gas pumps 14 are of the same gas transmission structure and operate in the same manner. For the convenience of description, only a single gas pump 14 is described below. As shown in the figure, the gas pump 14 is mainly composed of an air intake plate 141 , a resonance sheet 142 , a piezoelectric actuator 143 , a first insulating sheet 144 a , a conductive sheet 145 and a second insulating sheet 144 b which are stacked and arranged correspondingly to each other.

本实施例的进气板141更包含多个进气孔141a、多个汇流排孔141b及一汇流通槽141c,本实施例是以四个进气孔141a及四个汇流排孔141b为例进行说明,但其数量不以此为限,四个进气孔141a是为贯穿进气板141的孔洞,用以供气体自装置外顺应大气压力的作用而流入气体泵14之中,四个汇流排孔141b分别对应四个进气孔141a而设置,汇流通槽141c设置于四个汇流排孔141b的中心处,并与四个汇流排孔141b相互连通,借此可将气体自四个进气孔141a导入汇流排孔141b,并将气体引导并汇流集中至汇流通槽141c,以实现气体传递。本实施例的进气板141为一体成型的结构,但不以此为限。The air intake plate 141 of this embodiment further includes a plurality of air intake holes 141a, a plurality of bus bar holes 141b and a confluence flow groove 141c. In this embodiment, four air intake holes 141a and four bus bar holes 141b are used as an example For illustration, but the number is not limited to this, the four air inlet holes 141a are holes passing through the air inlet plate 141 for the gas to flow into the gas pump 14 from the outside of the device according to the action of atmospheric pressure. The bus-bar holes 141b are respectively provided corresponding to the four air inlet holes 141a, and the bus-bar holes 141c are provided at the centers of the four bus-bar holes 141b and communicate with the four bus-bar holes 141b. The air inlet holes 141a lead into the bus bar holes 141b, and guide and confluence the gas to the confluence flow grooves 141c, so as to realize the gas transmission. The air intake plate 141 in this embodiment is an integrally formed structure, but not limited thereto.

本实施例的共振片142是为可挠性材质所构成的片材,于共振片142上具有中空孔洞142c,中空孔洞142c是对应于进气板141的汇流通槽141c而设置,以供气体流通。本实施例的共振片142是由铜材质所构成,但不以此为限。The resonance sheet 142 of the present embodiment is a sheet made of flexible material, and the resonance sheet 142 has a hollow hole 142c. The hollow hole 142c is provided corresponding to the confluence groove 141c of the air inlet plate 141 for supplying gas. circulation. The resonance plate 142 in this embodiment is made of copper material, but not limited thereto.

本实施例的压电致动器143主要包含一悬浮板1431、一外框1432、多个支架1433、一压电元件1434等元件。其中,本实施例的支架1433的数量是为四个,但不以此为限,其数量可依据实际情形任施变化。本实施例的悬浮板1431更包含一凸部1431a、一第二表面1431b及一第一表面1431c,且凸部1431a设置于第二表面1431b上,凸部1431a可为但不限为一圆形凸起结构。本实施例之外框1432是为一框架结构,环绕设置于悬浮板1431的周缘,四个支架1433连接于外框1432及悬浮板1431之间,以提供弹性支撑,且四个支架1433、外框1432及悬浮板1431之间更定义出多个空隙1435,多个空隙1435是用以供气体流通导出之用。本实施例的悬浮板1431、外框1432以及支架1433的型态及数量均不以此为限,且可依实际应用需求变化。此外,本实施例之外框1432更具有一向外凸设的导电接脚1432c,以供外接电源装置(未图示)电连接至气体泵14,并提供驱动电源,但不以此为限。本实施例的压电元件1434贴附于悬浮板1431的第一表面1431c上,用以对悬浮板1431施加电压,使悬浮板1431产生形变而上下弯曲振动,借此以进行气体传输,其传输作动方式将于说明书后段进一步详述。The piezoelectric actuator 143 of this embodiment mainly includes a suspension board 1431 , an outer frame 1432 , a plurality of brackets 1433 , a piezoelectric element 1434 and other elements. The number of the brackets 1433 in this embodiment is four, but not limited thereto, and the number can be arbitrarily changed according to the actual situation. The hoverboard 1431 of this embodiment further includes a convex portion 1431a, a second surface 1431b, and a first surface 1431c, and the convex portion 1431a is disposed on the second surface 1431b, and the convex portion 1431a may be, but not limited to, a circular shape Raised structure. In this embodiment, the outer frame 1432 is a frame structure, and is disposed around the periphery of the suspension board 1431. Four brackets 1433 are connected between the outer frame 1432 and the suspension plate 1431 to provide elastic support. A plurality of gaps 1435 are further defined between the frame 1432 and the suspension board 1431 , and the plurality of gaps 1435 are used for the air to flow out. The types and quantities of the hover board 1431 , the outer frame 1432 and the brackets 1433 in this embodiment are not limited to this, and can be changed according to actual application requirements. In addition, in this embodiment, the outer frame 1432 further has a conductive pin 1432c protruding outward for the external power supply device (not shown) to be electrically connected to the gas pump 14 and provide driving power, but not limited thereto. The piezoelectric element 1434 of this embodiment is attached to the first surface 1431c of the suspension board 1431, and is used to apply a voltage to the suspension board 1431, so that the suspension board 1431 is deformed to bend and vibrate up and down, so as to carry out gas transmission, and its transmission The operation method will be further detailed in the latter part of the description.

请再参阅图6所示,悬浮板1431的凸部1431a是与外框1432的第二表面1432a共平面,且悬浮板1431的第二表面1431b及支架1433的第二表面1433a亦为共平面,且该悬浮板1431的凸部1431a及外框1432的第二表面1432a与悬浮板1431的第二表面1431b及支架1433的第二表面1433a之间是具有一特定深度。悬浮板1431的第一表面1431c与外框1432的第一表面1432b及支架1433的第一表面1433b为平整的共平面结构,而压电元件1434则贴附于此平整的悬浮板1431的第一表面1431c处。于另一些实施例中,悬浮板1431的型态亦可为一双面平整的板状正方形结构,并不以此为限,可依照实际施作情形而任施变化。于一些实施例中,悬浮板1431、支架1433以及外框1432是可为一体成型的结构,且由一金属板所构成,例如不锈钢材质,但不以此为限。又于另一些实施例中,压电元件1434的边长是小于该悬浮板1431的边长。再于另一些实施例中,压电元件1434的边长是等于悬浮板1431的边长,且同样设计为与悬浮板1431相对应的正方形板状结构,但并不以此为限。Please refer to FIG. 6 again, the protrusion 1431a of the suspension board 1431 is coplanar with the second surface 1432a of the outer frame 1432, and the second surface 1431b of the suspension board 1431 and the second surface 1433a of the bracket 1433 are also coplanar. There is a specific depth between the protruding portion 1431a of the suspension board 1431 and the second surface 1432a of the outer frame 1432 , the second surface 1431b of the suspension board 1431 and the second surface 1433a of the bracket 1433 . The first surface 1431c of the suspension board 1431 , the first surface 1432b of the outer frame 1432 and the first surface 1433b of the bracket 1433 are flat coplanar structures, and the piezoelectric element 1434 is attached to the flat first surface 1432b of the suspension board 1431 . at surface 1431c. In other embodiments, the shape of the suspension board 1431 may also be a plate-like square structure with flat surfaces on both sides. In some embodiments, the suspension board 1431 , the bracket 1433 and the outer frame 1432 can be integrally formed, and are made of a metal plate, such as stainless steel, but not limited thereto. In other embodiments, the side length of the piezoelectric element 1434 is smaller than the side length of the suspension board 1431 . In other embodiments, the side length of the piezoelectric element 1434 is equal to the side length of the suspension board 1431 , and is also designed to be a square plate structure corresponding to the suspension board 1431 , but not limited thereto.

本实施例的第一绝缘片144a、导电片145及第二绝缘片144b是依序对应设置于压电致动器143之外框1432的第一表面1432b,且其形态大致上对应于压电致动器143之外框1432的形态。于本实施例中,第一绝缘片144a、144b是由绝缘材质所构成,例如:塑胶,但不以此为限,俾提供绝缘功能。本实施例的导电片145由导电材质所构成,例如金属材质,但不以此为限,以提供电导通功能。于本实施例中,导电片145更突出设置一导电接脚145a,以实现电导通功能。The first insulating sheet 144a, the conductive sheet 145, and the second insulating sheet 144b in this embodiment are sequentially disposed on the first surface 1432b of the outer frame 1432 of the piezoelectric actuator 143, and their shapes substantially correspond to piezoelectric The actuator 143 is in the form of the outer frame 1432 . In this embodiment, the first insulating sheets 144a and 144b are made of insulating material, such as plastic, but not limited thereto, so as to provide insulating function. The conductive sheet 145 in this embodiment is made of a conductive material, such as a metal material, but is not limited to this, so as to provide an electrical conduction function. In this embodiment, a conductive pin 145a is further protruded from the conductive sheet 145 to realize the electrical conduction function.

再请参阅图7所示,气体泵14是依序由进气板141、共振片142、压电致动器143、第一绝缘片144a、导电片125及第二绝缘片144b等堆叠而成,且于共振片142与压电致动器143之间是具有一间隙h,于本实施例中,是于共振片142及压电致动器143之外框1432周缘之间的间隙h中填入填充材质,例如但不限于导电胶,以使共振片142与压电致动器143的悬浮板1431的凸部1431a之间可维持该间隙h的深度,进而可导引气流更迅速地流动,且因悬浮板1431的凸部1431a与共振片142保持适当距离使彼此接触干涉减少,促使噪音产生可被降低。于另一些实施例中,亦可借由加高压电致动器143之外框1432的高度,以使其与共振片142组装时增加一间隙,但不以此为限。Referring again to FIG. 7 , the gas pump 14 is formed by stacking an air intake plate 141 , a resonance sheet 142 , a piezoelectric actuator 143 , a first insulating sheet 144 a , a conductive sheet 125 , and a second insulating sheet 144 b in sequence. , and there is a gap h between the resonance plate 142 and the piezoelectric actuator 143 . In this embodiment, it is in the gap h between the resonance plate 142 and the periphery of the outer frame 1432 of the piezoelectric actuator 143 Filling material such as but not limited to conductive glue, so that the depth of the gap h can be maintained between the resonance plate 142 and the convex portion 1431a of the suspension plate 1431 of the piezoelectric actuator 143, so that the air flow can be guided more quickly Since the convex portion 1431a of the suspension plate 1431 and the resonance plate 142 maintain a proper distance, the contact and interference of each other are reduced, and the noise generation can be reduced. In other embodiments, the height of the outer frame 1432 of the high-voltage electric actuator 143 can also be increased to increase a gap when it is assembled with the resonance plate 142 , but not limited to this.

当进气板141、共振片142与压电致动器143依序对应组装后,共振片142具有一可动部142a及一固定部142b,可动部142a处可与其上的进气板141共同形成一汇流气体的腔室,且在共振片142与压电致动器143之间更形成一压缩腔室140,用以暂存气体,且压缩腔室140是透过共振片142的中空孔洞142c而与进气板141的汇流通槽141c处的腔室相连通。After the intake plate 141, the resonance plate 142 and the piezoelectric actuator 143 are assembled in sequence, the resonance plate 142 has a movable portion 142a and a fixed portion 142b, and the movable portion 142a can be connected to the intake plate 141 thereon. A chamber for converging gas is formed together, and a compression chamber 140 is further formed between the resonance plate 142 and the piezoelectric actuator 143 to temporarily store the gas, and the compression chamber 140 penetrates the hollow of the resonance plate 142 The hole 142c communicates with the cavity at the confluence channel 141c of the air inlet plate 141 .

再参阅图1及图4所示,多组气体泵14对应设置于多组导流座12的框体122内,且气体泵14的导电接脚1432c、导电接脚145a可由导流座12的框体122上接脚开口126凸伸出外部,以供外接电源装置(未图示)电连接至气体泵14提供驱动电源,而多组导流座12是以水平方向并排设置,并透过出气盖板11罩盖于凸出侧框121的段差空间上组接承置封闭于多组导流座12上,使出气盖板11与多组导流座12的凸出侧框121上下密合连接,且从凸出侧框121的封胶开口127处用以注入封装胶,借此以达到胶合气密的效果,如此出气盖板11与多组导流座12的凸出侧框121之间形成多个汇流腔室123并与出气汇流槽114相互连通。是以,本实施例透过框体121特殊设计,使导流座12与出气盖板11以上下密合连接的方式相互固定,借此可使元件易于拆装,同时大幅减少元件组装所耗费的时间,更可达到易于替换元件的功效,使气体输送装置1组装运用的灵活性提升。Referring again to FIG. 1 and FIG. 4 , the plurality of sets of gas pumps 14 are correspondingly disposed in the frame body 122 of the plurality of sets of guide bases 12 , and the conductive pins 1432 c and 145 a of the gas pumps 14 can be provided by the guide base 12 . The pin openings 126 on the frame body 122 protrude out to the outside for the external power supply device (not shown) to be electrically connected to the gas pump 14 to provide driving power. The air outlet cover plate 11 is covered on the step space of the protruding side frame 121 and is assembled, received and sealed on the plurality of sets of guide seats 12 , so that the air outlet cover plate 11 and the protruding side frames 121 of the multiple sets of air guide seats 12 are sealed up and down. The sealing glue is used to inject the sealing glue from the sealing glue opening 127 of the protruding side frame 121 to achieve the effect of gluing and airtightness. In this way, the air outlet cover 11 and the protruding side frames 121 of the plurality of sets of air guide bases 12 are A plurality of confluence chambers 123 are formed therebetween and communicate with each other with the air outlet confluence grooves 114 . Therefore, in this embodiment, through the special design of the frame body 121, the air guide seat 12 and the air outlet cover plate 11 are fixed to each other in a way of tightly connecting up and down, so that the components can be easily disassembled and assembled, and the cost of component assembly can be greatly reduced. It can also achieve the effect of easy replacement of components, so that the flexibility of assembly and application of the gas delivery device 1 is improved.

又当多组气体泵14致能进行气体传输时,气体借由气体泵14分别流经多组导流座12的凹置槽124、连通孔125、汇流腔室123及出气汇流槽114,最后气体由该出气管111的排出开口112排出;简而言之,透过多组气体泵14将气体导入气体输送装置1中,多组导流座12之内部流道设计,使传输的气体得以汇流集中,并达到提升传输效率的目的;再者,本实施例透过两组气体泵并排配置,并同时致能传输气体,使其气体传输流量大于单一气体泵,借此达到气体传输流量提升的功效。当然,气体泵并列组装配置的数量并不以两组为限,其可依据实际情形任施变化。When the multiple sets of gas pumps 14 enable gas transmission, the gas flows through the recessed grooves 124 , the communication holes 125 , the confluence chambers 123 and the gas outlet confluence grooves 114 of the multiple sets of guide bases 12 respectively by the gas pumps 14 , and finally The gas is discharged from the discharge opening 112 of the gas outlet pipe 111; in short, the gas is introduced into the gas delivery device 1 through the multiple sets of gas pumps 14, and the internal flow channels of the multiple sets of guide bases 12 are designed so that the transmitted gas can be The confluence is concentrated, and the purpose of improving the transmission efficiency is achieved; in addition, in this embodiment, two sets of gas pumps are arranged side by side, and at the same time, the gas transmission is enabled, so that the gas transmission flow rate is greater than that of a single gas pump, thereby improving the gas transmission flow rate. effect. Of course, the number of parallel assembly configurations of the gas pumps is not limited to two groups, which can be arbitrarily changed according to the actual situation.

请参阅图8A至图8E所示,当气体泵14进行作动时,压电致动器143受电压致动而以支架1433为支点,进行垂直方向的往复式振动。首先,如图8A所示,当压电致动器143受电压致动而向下振动时,使压缩腔室140的体积增加、压力变小,使气体顺应大气压力自进气孔141a进入,并流经汇流排孔141b、汇流通槽141及中空孔洞142c进入压缩腔室140中,接着,如第8B图所示,由于共振片142是为轻薄的片状结构,当气体顺应大气压力进入压缩腔室140时,共振片142的可动部142a随的向下振动,并贴附抵触于压电致动器143的悬浮板1431的凸部1431a上,使悬浮板1431的凸部1431a以外的区域与共振片142两侧的固定部142b之间的汇流腔室的间距不会变小,并借由此共振片142的形变,以使压缩腔室140的体积压缩,并关闭压缩腔室140中间流通空间,促使其内的气体由中央推挤向外围流动,进而经过压电致动器143的支架1433之间的空隙1435而向下穿越流动。其后,图第8C所示,共振片142的可动部142a向上弯曲振动形变,而回复至初始位置,且压电致动器143受电压驱动以向上振动,如此同样挤压压缩腔室140的体积,惟此时由于压电致动器143是向上抬升,因而使得压缩腔室140内的气体会朝两侧流动,而气体持续地自进气板141上的至少一进气孔141a进入,再流入汇流通槽141c所形成的腔室中。再如图8D所示,该共振片142受压电致动器143向上抬升的振动而共振向上,此时共振片142的可动部142a亦随的向上振动,进而减缓气体持续地自进气板141上的进气孔141a进入,再流入汇流通槽141c所形成的腔室中。最后,如图8E所示,共振片142的可动部142a亦回复至初始位置,由此实施态样可知,当共振片142进行垂直的往复式振动时,是可由其与压电致动器143之间的间隙h以增加其垂直位移的最大距离,换句话说,于该两结构之间设置间隙h可使共振片142于共振时可产生更大幅度的上下位移。Referring to FIGS. 8A to 8E , when the gas pump 14 is actuated, the piezoelectric actuator 143 is actuated by a voltage and takes the bracket 1433 as a fulcrum to reciprocate in a vertical direction. First, as shown in FIG. 8A , when the piezoelectric actuator 143 is actuated by a voltage to vibrate downward, the volume of the compression chamber 140 is increased and the pressure is decreased, so that the gas enters from the air inlet 141a in compliance with the atmospheric pressure, Then, as shown in FIG. 8B, since the resonant sheet 142 is a thin sheet-like structure, when the gas enters the compression chamber 140 according to the atmospheric pressure When the chamber 140 is compressed, the movable part 142a of the resonant plate 142 vibrates downward along with it, and sticks against the convex part 1431a of the suspension plate 1431 of the piezoelectric actuator 143, so that the convex part 1431a of the suspension plate 1431 is outside the The space between the confluence chambers between the area of the resonant sheet 142 and the fixed parts 142b on both sides of the resonance sheet 142 will not become smaller, and by virtue of the deformation of the resonance sheet 142, the volume of the compression chamber 140 is compressed and the compression chamber is closed. The intermediate circulation space 140 pushes the gas in it to flow from the center to the periphery, and then flows downward through the gap 1435 between the brackets 1433 of the piezoelectric actuator 143 . Thereafter, as shown in FIG. 8C, the movable portion 142a of the resonant plate 142 is deformed by bending and vibrating upward, and returns to the initial position, and the piezoelectric actuator 143 is driven by a voltage to vibrate upward, and thus the compression chamber 140 is also squeezed. However, at this time, since the piezoelectric actuator 143 is lifted upward, the gas in the compression chamber 140 will flow to both sides, and the gas continues to enter from at least one air inlet hole 141a on the air inlet plate 141 , and then flow into the cavity formed by the confluence flow groove 141c. As shown in FIG. 8D, the resonance plate 142 is resonated upward by the upward vibration of the piezoelectric actuator 143. At this time, the movable portion 142a of the resonance plate 142 also vibrates upward, thereby slowing down the continuous flow of the gas from the intake air. The air inlet hole 141a on the plate 141 enters, and then flows into the cavity formed by the confluence flow groove 141c. Finally, as shown in FIG. 8E, the movable portion 142a of the resonant plate 142 also returns to the initial position. From this embodiment, it can be seen that when the resonator plate 142 performs vertical reciprocating vibration, the resonant plate 142 can interact with the piezoelectric actuator. The gap h between the two structures can increase the maximum distance of the vertical displacement. In other words, setting the gap h between the two structures can make the resonance plate 142 have a larger vertical displacement during resonance.

综上所述,本案透过多组气体泵分别设置于多组导流座中,并使多组导流座彼此水平并列设置,并与出气盖板对应上下组接密合连接,以提升传输效率的目的,且多组气体泵配置可使到气体传输流量大幅提升的功效,此外,本案亦透过气体泵的特殊流道、结构设计,可使气体高速且高效率地流动,并可达到静音、微型化的效果。To sum up, in this case, multiple sets of gas pumps are respectively installed in multiple sets of guide bases, and the multiple sets of guide bases are arranged horizontally side by side with each other, and are closely connected with the corresponding upper and lower sets of the gas outlet cover to improve the transmission. For the purpose of efficiency, and the configuration of multiple sets of gas pumps can greatly increase the gas transmission flow rate, in addition, this case also through the special flow channel and structural design of the gas pump, the gas can flow at high speed and high efficiency, and can achieve Quiet, miniaturized effects.

本案得由熟知此技术的人士任施匠思而为诸般修饰,然皆不脱如附申请专利范围所欲保护者。This case can be modified by Shi Jiangsi, a person who is familiar with this technology, but all of them do not deviate from the protection of the scope of the patent application attached.

【符号说明】【Symbol Description】

1:流体控制装置1: Fluid Control Device

11:出气盖板11: Air outlet cover

111:出气管111: Outlet tube

112:排出开口112: Discharge opening

113:进入开口113: Enter the opening

114:出气汇流槽114: Outlet manifold

12:导流座12: Guide seat

120:主板120: Motherboard

121:凸出侧框121: Protruding side frame

122:框体122: Frame

123:汇流腔室123: Convergence Chamber

124:凹置槽124: Recessed groove

125:连通孔125: Connecting hole

126:接脚开口126: pin opening

127:封胶开口127: Sealing opening

14:气体泵14: Gas pump

140:压缩腔室140: Compression chamber

141:进气板141: Air intake plate

141a:进气孔141a: Air intake

141b:汇流排孔141b: Busbar hole

141c:汇流通槽141c: Convergence Flow Slot

142:共振片142: Resonance sheet

142a:可动部142a: Movable part

142b:固定部142b: Fixed part

142c:中空孔洞142c: Hollow Hole

143:压电致动器143: Piezoelectric Actuators

1431:悬浮板1431: Hoverboard

1431a:凸部1431a: convex part

1431b:第二表面1431b: Second Surface

1431c:第一表面1431c: First Surface

1432:外框1432: Outer frame

1432a:第二表面1432a: Second Surface

1432b:第一表面1432b: First Surface

1432c:导电接脚1432c: Conductive pins

1433:支架1433: Stand

1433a:第二表面1433a: Second Surface

1433b:第一表面1433b: First Surface

1434:压电元件1434: Piezoelectric Elements

1435:空隙1435: void

144a:第一绝缘片144a: First insulating sheet

144b:第二绝缘片144b: Second insulating sheet

145:导电片145: Conductive sheet

h:间隙h: gap

Claims (5)

1.一种气体输送装置,其特征在于,包含:1. A gas delivery device, characterized in that, comprising: 一出气盖板,具有一出气管及一出气汇流槽,该出气管与该出气汇流槽连通对应设置;an air outlet cover plate, which has an air outlet pipe and an air outlet confluence groove, the air outlet pipe is communicated with the air outlet confluence groove and is arranged correspondingly; 多组导流座,每一该导流座具有一主板、一凸出侧框以及一框体,该主板具有一凹置槽及一连通孔,该连通孔连通该凹置槽;以及a plurality of sets of guide seats, each of the guide seats has a main board, a protruding side frame and a frame body, the main board has a concave groove and a communication hole, and the communication hole communicates with the concave groove; and 多组气体泵,对应设置于每一该导流座的该框体内;A plurality of groups of gas pumps are correspondingly arranged in the frame of each guide seat; 其中,该多组导流座以水平方向并排设置,透过该出气盖板罩盖封闭该多组导流座,使该出气盖板与该多组导流座的该凸出侧框上下密合连接,以定义一汇流腔室并与该出气汇流槽相互连通,当该气体泵致能进行气体传输时,气体导入该每一导流座的该凹置槽,并依序经由该连通孔、该汇流腔室及该出气汇流槽,最后气体由该出气管排出。Wherein, the multiple sets of guide seats are arranged side by side in a horizontal direction, and the multiple sets of guide bases are closed by the cover of the air outlet cover, so that the air outlet cover and the protruding side frames of the multiple sets of guide bases are tightly sealed up and down. are connected together to define a confluence chamber and communicate with the gas outlet confluence groove. When the gas pump enables gas transmission, the gas is introduced into the recessed groove of each guide seat and passes through the communication hole in sequence. , the confluence chamber and the gas outlet confluence groove, and finally the gas is discharged from the gas outlet pipe. 2.如权利要求1所述的气体输送装置,其特征在于,该出气管之内径为由大渐缩至小的锥度形状。2 . The gas delivery device of claim 1 , wherein the inner diameter of the gas outlet pipe is tapered from large to small. 3 . 3.如权利要求1所述的气体输送装置,其特征在于,该凸出侧框突出围绕于该主板上方,该框体突出围绕于该主板下方,该凸出侧框设置于该主板上相较该框体设置于该主板上略为内缩,以形成一段差空间,以供与该出气盖板组接承置于上。3 . The gas delivery device of claim 1 , wherein the protruding side frame protrudes above the main board, the frame body protrudes below the main board, and the protruding side frame is disposed on the main board opposite to the main board. 4 . Compared with the frame body disposed on the mainboard, it is slightly shrunk inward to form a gap space for being assembled with the air outlet cover and placed on it. 4.如权利要求1所述的气体输送装置,其特征在于,该多组导流座的该凸出侧框具有一封胶开口、该框体具有一接脚开口。4 . The gas delivery device as claimed in claim 1 , wherein the protruding side frames of the plurality of sets of guide seats have a sealing opening, and the frame body has a pin opening. 5 . 5.如权利要求1所述的气体输送装置,其特征在于,至少一该气体泵包含:5. The gas delivery device of claim 1, wherein at least one of the gas pumps comprises: 一进气板,包含至少一进气孔、至少一汇流排孔及一汇流通槽;an air intake plate, comprising at least one air intake hole, at least one confluence row hole and one confluence flow groove; 一共振片,包含一中空孔洞;a resonance sheet, including a hollow hole; 一压电致动器,包含一压电元件、一悬浮板、一外框、至少一支架及一第一导电接脚,该悬浮板、该外框及该至少一支架之间定义至少一空隙,该悬浮板更具有一第一表面与一第二表面,该第二表面上设有一凸部,该第一表面设置该压电元件;A piezoelectric actuator includes a piezoelectric element, a suspension board, an outer frame, at least one bracket and a first conductive pin, and at least one gap is defined between the suspension plate, the outer frame and the at least one bracket , the suspension board further has a first surface and a second surface, the second surface is provided with a convex portion, and the piezoelectric element is arranged on the first surface; 一第一绝缘片;a first insulating sheet; 一导电片,包含一第二导电接脚;以及a conductive sheet including a second conductive pin; and 一第二绝缘片;a second insulating sheet; 其中,该进气板、该共振片、该压电致动器、该第一绝缘片、该导电片及该第二绝缘片相互对应堆叠设置,该共振片与该压电致动器之间具有一间隙,以定义一压缩腔室;透过该压电元件对该悬浮板施加电压,使该悬浮板进行往复式上下弯曲振动,使气体由该进气板的该至少一进气孔导入,并依序流经该汇流排孔、该汇流通槽、该中空孔洞及该压缩腔室,最后由该至少一空隙导入该凹置槽。Wherein, the air intake plate, the resonance sheet, the piezoelectric actuator, the first insulating sheet, the conductive sheet and the second insulating sheet are stacked correspondingly to each other, and the resonance sheet and the piezoelectric actuator are arranged in a corresponding stack. There is a gap to define a compression chamber; a voltage is applied to the suspension board through the piezoelectric element, so that the suspension board performs reciprocating up-and-down bending vibration, so that the gas is introduced from the at least one air inlet hole of the air inlet plate , and flow through the bus bar hole, the bus flow groove, the hollow hole and the compression chamber in sequence, and finally lead into the concave groove through the at least one gap.
CN201721406652.0U 2017-10-27 2017-10-27 Gas delivery device Active CN210087587U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109723626A (en) * 2017-10-27 2019-05-07 研能科技股份有限公司 gas delivery device
CN114251255A (en) * 2020-09-25 2022-03-29 研能科技股份有限公司 Micro fluid delivery device
CN115992811A (en) * 2021-10-18 2023-04-21 研能科技股份有限公司 gas delivery device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109723626A (en) * 2017-10-27 2019-05-07 研能科技股份有限公司 gas delivery device
CN114251255A (en) * 2020-09-25 2022-03-29 研能科技股份有限公司 Micro fluid delivery device
CN114251255B (en) * 2020-09-25 2024-02-09 研能科技股份有限公司 Micro fluid conveying device
CN115992811A (en) * 2021-10-18 2023-04-21 研能科技股份有限公司 gas delivery device

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