CN104234986A - Miniature pneumatic power device - Google Patents
Miniature pneumatic power device Download PDFInfo
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- CN104234986A CN104234986A CN201310253543.XA CN201310253543A CN104234986A CN 104234986 A CN104234986 A CN 104234986A CN 201310253543 A CN201310253543 A CN 201310253543A CN 104234986 A CN104234986 A CN 104234986A
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Abstract
The invention discloses a miniature pneumatic power device which comprises a miniature air transmission unit. The miniature air transmission unit comprises an air intake plate, a runner plate, a resonance piece and a piezoelectric actuator which are arranged by stacking, a gap reserved between the resonance piece and the piezoelectric actor forms a first chamber, and when the piezoelectric actuator is driven, air is led into the first chamber from the air intake plate via the runner plate and the resonance piece and then transmitted downwards, and a pressure gradient runner is formed to have the air continuously pushed out; a miniature valve unit comprises an air collecting plate, a valve slice and an outlet plate which are arranged by stacking; when downwardly transmitted to an air collecting chamber from the miniature air transmission unit, the air is then transmitted to the interior of the miniature valve unit, so that a valve hole of the valve slice is enabled to be opened or closed due to one-way flow of the air to perform pressure collecting or pressure releasing.
Description
Technical field
System of the present invention about a kind of Pneumatic propelling plant, espespecially a kind of micro ultrathin and quiet micro pressure power plant.
Background technique
No matter be at present medicine in each field, computer technology, print, the industry such as the energy, product is all towards sophistication and microminiaturization future development, the fluid delivery structure that wherein product such as micro-side Pu, sprayer, ink gun, industrial printing device comprises is its key technology, be with, how mat innovation structure breaks through its technical bottleneck, is the important content of development.
For example, in medicinal industry, much instrument or the equipment needing the driving of employing Pneumatic pressure power, adopts the object of carrying to reach its gas with conventional motor and air pressure valve usually.But be limited to the volume restriction of these conventional motor and gas valve, make this type of instrument and equipment be difficult to reduce the volume of its single unit system, be namely difficult to the target realizing slimming, what more cannot make reaches portable object.In addition, these conventional motor and gas valve also can produce the problem of noise when start, cause use on not convenient and uncomfortable.
Therefore, how to develop one and can improve above-mentioned known techniques disappearance, tradition can be made to adopt the instrument of charge delivery mechanism or equipment to reach volume little, microminiaturized and quiet, and then reach the micro pressure power plant of light comfortable portable object, real is problem in the urgent need to address at present.
Summary of the invention
The object of the present invention is to provide a kind of micro pressure power plant be applicable in portable or wearing type instrument or equipment, by integrating micro charge delivery mechanism and micro valve device, the instrument driven in order to do the employing Pneumatic pressure power solving known techniques or the volume that possesses of equipment large, be difficult to slimming, portable object cannot be reached, and the disappearance such as noise is large.
For reaching above-mentioned purpose, of the present invention one comparatively broad sense implement aspect for providing a kind of micro pressure power plant, comprising: minitype gas transmitting set, comprising: inlet plate, there is at least one inlet hole, for importing gas, runner plate, has at least one round and center hole of confluxing, the inlet hole of the round that confluxes this inlet plate corresponding, and guides the gas of inlet hole to conflux to center hole, resonance plate, has hollow bore, the center hole of corresponding runner plate, and piezoelectric actuator, there is suspension board and housing, be connect with at least one support between suspension board and housing, and attach piezoelectric ceramic plate in the surface of suspension board, wherein, above-mentioned inlet plate, runner plate, resonance plate and piezoelectric actuator sequentially stack reply and put location, and there is between resonance plate and piezoelectric actuator one first chamber of a gap formation, when being driven to make piezoelectric actuator, gas is imported by least one inlet hole of inlet plate, at least one round that confluxes through runner plate is collected to center hole, flow through the hollow bore of resonance plate again, to enter in the first chamber, again by piezoelectric actuator at least one support between space transmit downwards, pushing out gas is continued with mineralization pressure gradient runner, and micro valve device, comprise: gas collection plate, have the first penetration hole, the second penetration hole, the first release chamber and the first outlet chamber, the first penetration hole is connected with the first release chamber, and the second penetration hole is connected with the first release chamber and the first outlet chamber, valve sheet, has a valve opening, and exit plate, there is the 3rd penetration hole, the 4th penetration hole, the second pressure-releasing cavity and the second outlet chamber, 3rd penetration hole corresponds to the first penetration hole of gas collection plate, and be connected with the second release chamber, 4th penetration hole corresponds to the second penetration hole, and be connected with the second outlet chamber, and between the second release chamber and the second outlet chamber, there is a connection runner, wherein, above-mentioned gas collection plate, valve sheet and exit plate sequentially correspondence stack and arrange location, this valve sheet is arranged between gas collection plate and exit plate, and the valve opening correspondence of valve sheet is arranged between the second penetration hole and the 4th penetration hole, gas is when minitype gas transmitting set transfers to downwards in micro valve device, enter in the first release chamber and the first outlet chamber by the first penetration hole and the second penetration hole, and import gas by carrying out the operation of collection pressure in valve opening inflow the 4th penetration hole of valve sheet, when collecting body of calming the anger and being greater than importing gas, collect body of calming the anger to flow towards the second outlet chamber from the 4th penetration hole, to make valve sheet displacement, and make the valve opening of this valve sheet be resisted against gas collection plate and close, collect body of calming the anger simultaneously and can flow to the second pressure-releasing cavity indoor along connection runner in the second outlet chamber, now in this valve sheet displacement indoor of the second pressure-releasing chamber, collect body of calming the anger to be flowed out by the 3rd penetration hole, to carry out release operation.
A main purpose system more of the present invention provides a kind of micro pressure power plant, comprising: a minitype gas transmitting set, comprising: inlet plate, has at least one inlet hole, for importing gas, runner plate, has at least one round and center hole of confluxing, the inlet hole of the corresponding inlet plate of the round that confluxes, and guides the gas of inlet hole to conflux to center hole, resonance plate, has hollow bore, the center hole of corresponding runner plate, and piezoelectric actuator, having suspension board and housing, is connect with at least one support between suspension board and housing, and attaches piezoelectric ceramic plate in a surface of suspension board, wherein, above-mentioned inlet plate, runner plate, resonance plate and piezoelectric actuator sequentially stack reply and put location, when piezoelectric actuator is driven, gas is imported by least one inlet hole of inlet plate, at least one round that confluxes through runner plate is collected to center hole, then flows through the hollow bore of resonance plate, to enter in the first chamber, again by piezoelectric actuator at least one support between a space transmit downwards, continue pushing out gas with mineralization pressure gradient runner, and micro valve device, comprising: gas collection plate, have the first penetration hole, the second penetration hole, the first release chamber and the first outlet chamber, the first penetration hole is connected with the first release chamber, and the second penetration hole is connected with the first outlet chamber, valve sheet, has valve opening, and exit plate, there is the 3rd penetration hole, the 4th penetration hole, the second pressure-releasing cavity and the second outlet chamber, 3rd penetration hole corresponds to the first penetration hole of gas collection plate, and be connected with the second release chamber, 4th penetration hole corresponds to the second penetration hole, and be connected with the second outlet chamber, and between the second release chamber and the second outlet chamber, there is connection runner, wherein, above-mentioned gas collection plate, valve sheet and exit plate sequentially correspondence stack and arrange location, valve sheet is arranged between gas collection plate and exit plate, and the valve opening correspondence of valve sheet is arranged between this second penetration hole and the 4th penetration hole, gas is when this minitype gas transmitting set transfers to downwards in micro valve device, enter in the first release chamber and the first outlet chamber by the first penetration hole and the second penetration hole, and import gas by carrying out the operation of collection pressure in valve opening inflow the 4th penetration hole of valve sheet, when collecting body of calming the anger and being greater than importing gas, collect body of calming the anger to flow towards the second outlet chamber from the 4th penetration hole, to make valve sheet displacement, and make the valve opening of valve sheet be resisted against gas collection plate and close, collect body of calming the anger simultaneously and can flow to the second pressure-releasing cavity indoor along connection runner in the second outlet chamber, now in the second pressure-releasing chamber indoor valve sheet displacement, collect body of calming the anger to be flowed out by the 3rd penetration hole, to carry out release operation.
For reaching above-mentioned purpose, of the present invention one comparatively broad sense implement aspect for providing a kind of micro pressure power plant, comprise: minitype gas transmitting set, comprise the inlet plate, runner plate, resonance plate and the piezoelectric actuator that sequentially stack setting, wherein have the first chamber that gap is formed between resonance plate and piezoelectric actuator, when piezoelectric actuator is driven, gas is entered by inlet plate, flow through runner plate and resonance plate, transmit downwards again to enter in the first chamber; And micro valve device, comprise the gas collection plate, valve sheet and the exit plate that sequentially stack setting, valve sheet has valve opening; Wherein, gas collection chamber is formed between minitype gas transmitting set and micro valve device, when gas is after minitype gas transmitting set transfers to gas collection chamber downwards, be passed in micro valve device again, at least two penetration holes had respectively through gas collection plate, exit plate and at least two chambers, the valve opening correspondence of valve sheet is made to open or close with the one-way flow in response to gas, in order to do carrying out collection pressure or release operation.
Accompanying drawing explanation
Fig. 1 is the front decomposition texture schematic diagram of the micro pressure power plant of the present invention first preferred embodiment.
The front decomposition texture schematic diagram of Fig. 2 A to be the present invention be micro pressure power plant of the second preferred embodiment.
The back side decomposition texture schematic diagram of Fig. 2 B to be the present invention be micro pressure power plant of the second preferred embodiment.
Fig. 3 A is the Facad structure schematic diagram of the piezoelectric actuator of the micro pressure power plant shown in Fig. 2 A.
Fig. 3 B is the structure schematic diagram of the piezoelectric actuator of the micro pressure power plant shown in Fig. 2 A.
Fig. 3 C is the cross-sectional view of the piezoelectric actuator of the micro pressure power plant shown in Fig. 2 A.
Fig. 4 is the multiple enforcement aspect schematic diagram of the piezoelectric actuator shown in Fig. 3 A.
Fig. 5 A to 5E figure is the illustrative view of the minitype gas transmitting set of the micro pressure power plant shown in Fig. 2 A.
Fig. 6 A is the collection pressure illustrative view of the micro valve device of the micro pressure power plant shown in Fig. 2 A.
Fig. 6 B is the release illustrative view of the micro valve device of the micro pressure power plant shown in Fig. 2 A.
Fig. 7 A to Fig. 7 E is the collection pressure illustrative view of the micro pressure power plant shown in Fig. 2 A.
Fig. 8 is step-down or the release illustrative view of the micro pressure power plant shown in Fig. 2 A.
[primary component symbol description]
1,2: small power pneumatic shuttle
1A, 2A: minitype gas transmitting set
1B, 2B: micro valve device
10,20: inlet plate
100,200: inlet hole
11,22: resonance plate
12,23: piezoelectric actuator
120,230: suspension board
121,233: piezoelectric ceramic plate
13,24: insulating trip
14,25: conducting plate
15,26: gas collection plate
16,27: valve sheet
17,28: exit plate
170,285: be communicated with runner
21: runner plate
211: conflux round
210: center hole
220: hollow bore
221,234,251: conductive connecting pin
222: the first chambers
230a: the upper surface of suspension board
230b: the lower surface of suspension board
230c: protuberance
231: housing
231a: the upper surface of housing
231b: the lower surface of housing
232: support
232a: the upper surface of support
232b: the lower surface of support
235: space
260: the first surface of gas collection plate
261: the second surface of gas collection plate
262: gas collection chamber
263: the first penetration holes
264: the second penetration holes
265: the first release chambers
266: the first outlet chamber
267,286: groove structure
268,287: seal ring
269,281a: protuberance structure
270: valve opening
271: location hole
280: the first surface of exit plate
281: the three penetration holes
282: the four penetration holes
283: the second release chambers
284: the second outlet chamber
288: pressure relief vent
289: the second surface of exit plate
29: outlet
G0: gap
(a) ~ (l): the difference of conductive actuation device implements aspect
A0, i0, j0: suspension board
A1, i1, j1: housing
A2, i2: support
A3: space
Embodiment
Some exemplary embodiments embodying feature & benefits of the present invention describe in detail in the explanation of back segment.Be understood that the present invention can have various changes in different aspects, it neither departs from the scope of the present invention, and explanation wherein and to be shown in be use when explain in essence, and be not used to limit the present invention.
Micro pressure power plant 1 of the present invention are can be applicable to medicine raw skill, the energy, computer technology or the industry such as to print, in order to do in order to transmit gas, but not as limit.Refer to Fig. 1, it is the front decomposition texture schematic diagram of the micro pressure power plant of the present invention first preferred embodiment.As shown in the figure, micro pressure power plant 1 of the present invention are combined by minitype gas transmitting set 1A and micro valve device 1B, wherein minitype gas transmitting set 1A at least has the structures such as inlet plate 10, resonance plate 11, piezoelectric actuator 12, insulating trip 13, conducting plate 14, it is piezoelectric actuator 12 is corresponded to resonance plate 11 and arranges, and make inlet plate 10, resonance plate 11, piezoelectric actuator 12, insulating trip 13, conducting plate 14 etc. sequentially stack setting, and this piezoelectric actuator 12 is assembled by a suspension board 120 and a piezoelectric ceramic plate 121; And micro valve device 1B is then sequentially stacked by gas collection plate 15, valve sheet 16 and exit plate 17 etc. and assembles, but not as limit.Assembling by this minitype gas transmitting set 1A and micro valve device 1B is arranged, to make at least one inlet hole 100 air inlet of gas on the inlet plate 10 of minitype gas transmitting set 1A, and through the start of piezoelectric actuator 12, and flow through multiple pressure chamber (not shown), and transmit downwards, and then gas one-way flow in micro valve device 1B can be made, and by acute build up of pressure in the device (not shown) be connected with the outlet end of micro valve device 1B, and when pressure release need be carried out, then regulate and control the output quantity of minitype gas transmitting set 1A, gas is discharged via the connection runner 170 in the exit plate 17 of micro valve device 1B, to carry out pressure release.
Please refer to Fig. 2 A and Fig. 2 B, it is front decomposition texture schematic diagram and the back side decomposition texture schematic diagram of the micro pressure power plant being respectively the present invention second preferred embodiment.As shown in the figure, micro pressure power plant 2 are combined by minitype gas transmitting set 2A and micro valve device 2B equally, wherein minitype gas transmitting set 2A system is sequentially by inlet plate 20, runner plate 21, resonance plate 22, piezoelectric actuator 23, insulating trip 24, the structures such as conducting plate 25 stack assembling location and form, in the present embodiment, between resonance plate 22 and piezoelectric actuator 23, cording has a gap g0 (as shown in Figure 5A), but in other embodiments, also gap can not be had between resonance plate 22 and piezoelectric actuator 23, therefore it implements aspect not as limit.In some embodiments, inlet plate 20 and runner plate 21 also can be integrated structure, namely, as shown in the first preferred embodiment of the present invention, but not as limit, be below that the enforcement aspect being separated setting with runner plate 21 with the inlet plate 20 of the present embodiment illustrates in detail.And micro valve device 2B then same sequentially being stacked by gas collection plate 26, valve sheet 27 and exit plate 28 etc. assembles, but not as limit.
In the present embodiment, inlet plate 20 cording of minitype gas transmitting set 2A has at least one inlet hole 200, complies with the effect of atmospheric pressure and flow in minitype gas transmitting set 2A from this at least one inlet hole 200 in order to supplied gas outside device.Runner plate 21 then has at least one round 211 that confluxes, in order at least one inlet hole 200 is corresponding arranges with this of inlet plate 20, and the gas entered from this at least one inlet hole 200 can be guided and confluxes and be concentrated to a center hole 210, with going down.Resonance plate 22 is be made up of a flexible materials, but not as limit, and there is a hollow bore 220 on resonance plate 22, be arrange corresponding to the center hole 210 of runner plate 21, can circulate downwards to make gas.
Please refer to Fig. 3 A, Fig. 3 B and Fig. 3 C, it is the Facad structure schematic diagram of the piezoelectric actuator being respectively the micro pressure power plant shown in Fig. 2 A, structure schematic diagram and cross-sectional view, as shown in the figure, piezoelectric actuator 23 is by a suspension board 230, one housing 231, at least one support 232 and a piezoelectric ceramic plate 233 assemble jointly, wherein, this piezoelectric ceramic plate 233 is attached at the lower surface 230b of suspension board 230, and this at least one support 232 is be connected between suspension board 230 and housing 231, and in support 232, at least one space 235 is had more between suspension board 230 and housing 231, circulate in order to supplied gas, and this suspension board 230, kenel and the quantity cording of housing 231 and support 232 have multiple change.In addition, housing 231 has more the conductive connecting pin 234 of an outside projection, in order to for electrical connection, but not as limit.
In the present embodiment, suspension board 230 is the structure of a ladder surface, namely meaning has more a protuberance 230c in the upper surface 230a of suspension board 230, namely visible please refer to Fig. 3 A and Fig. 3 C, the protuberance 230c system of suspension board 230 and the upper surface 231a coplanar of housing 231, and the upper surface 232a of the upper surface 230a of suspension board 230 and support 232 is also coplanar, and between the upper surface 232 of the upper surface 231a of the protuberance 230c of this suspension board 230 and housing 231 and the upper surface 230a of suspension board 230 and support 232, cording has a certain depth.As for the lower surface 230b of suspension board 230, then as shown in Fig. 3 B and Fig. 3 C, itself and the lower surface 231b of the housing 231 and lower surface 232b of support 232 are smooth coplanar structure, and piezoelectric ceramic plate 233 is then attached at the lower surface 230b place of this smooth suspension board 230.In some embodiments, suspension board 230, support 232 and housing 231 are can be made up of a sheet metal, but not as limit, therefore piezoelectric actuator 23 is formed by piezoelectric ceramic plate 233 and bonding metal plates.
Please continue and consult Fig. 4, it is the multiple enforcement aspect schematic diagram of the piezoelectric actuator shown in Fig. 3 A.As shown in the figure, then the suspension board 230 of visible piezoelectric actuator 23, housing 231 and support 232 are to have various kenel, and at least can have the multiple aspects such as (a) shown in Fig. 4 ~ (l), for example, a the housing a1 of () aspect and suspension board a0 is square structure, and be to link between the two by multiple support a2, such as: 8, but not as limit, and between support a2 and suspension board a0, housing a1, cording has space a3, circulates for gas.In another (i) aspect, its housing i1 and suspension board i0 is also similarly square structure, precisely because in only by 2 support i2 with link; In addition, in (j) ~ (l) aspect, then its suspension board j0 etc. can be circular structure, and housing j0 etc. also can be the frame structure of somewhat radian, but all not as limit.Therefore multiple enforcement aspect is visible thus, the kenel system of suspension board 230 can be square or circular, and similarly, the piezoelectric ceramic plate 233 being attached at the lower surface 230b of suspension board 230 also can be square or circular, not as limit; And, be connected to the kenel of the support 232 between suspension board 230 and housing 231 and quantity and also can apply situation according to actual and appoint and execute change, be not limited with illustrated aspect.And these suspension boards 230, housing 231 and support 232 are can be integrated structure, but not as limit, then can be processed by tradition as its manufacture or gold-tinted etching or the mode such as laser beam machining or eletroforming or electric discharge processing are made, all not as limit.
In addition, please continue and consult Fig. 2 A and Fig. 2 B, in minitype gas transmitting set 2A, have more insulating trip 24 and conducting plate 25, insulating trip 24 and conducting plate 25 are that correspondence is arranged at piezoelectric actuator 23 times, and its form corresponds to the form of the housing of piezoelectric actuator 23 haply.In some embodiments, namely insulating trip 24 is made up of the material that can insulate, such as: plastic cement, but not as limit, to carry out the use insulated; In other embodiments, namely conducting plate 25 is made up of conductive material, such as: metal, but not as limit, to carry out the use conducted.And, in the present embodiment, resonance plate 22 is can have a conductive connecting pin 221, but not as limit, and the housing 231 of conductive actuation device 23 also has the conductive connecting pin 224 with the corresponding setting of conductive connecting pin 221 of resonance plate 22, also not as limit, in addition, conducting plate 25 also can arrange a conductive connecting pin 251, to carry out the use conducted.
Scheme please refer to Fig. 2 A and Fig. 5 A to 5E, wherein Fig. 5 A to 5E figure is the illustrative view of the minitype gas transmitting set of the micro pressure power plant shown in Fig. 2 A.First, as shown in Figure 5A, visible minitype gas transmitting set 2A system is sequentially by inlet plate 20, runner plate 21, resonance plate 22, piezoelectric actuator 23, insulating trip 24, conducting plate 25 etc. stacks and forms, and cording has a gap g0 between resonance plate 22 and piezoelectric actuator 23, in the present embodiment, a material is filled in gap g0 between the housing 231 lying in resonance plate 22 and piezoelectric actuator 23, such as: conducting resinl, but not as limit, to make the degree of depth that can maintain this gap g0 between the protuberance 230c of the suspension board 230 of resonance plate 22 and piezoelectric actuator 23, and then can more promptly flow by air-guiding, and keep suitable distance to make to contact with each other to interfere and reduce because of the protuberance 230c of suspension board 230 and resonance plate 22, impel noise to produce can be lowered, in other embodiments, also can by the height of the housing 231 of the electric actuator 23 that adds high pressure, with make it and resonance plate 22 is assembled time increase by a gap, but not as limit, in addition, in other embodiments, also can not have gap g0 between this resonance plate 22 and piezoelectric actuator 23, namely it implements aspect not as limit.
Please continue and consult Fig. 5 A to 5E and scheme, as shown in the figure, when inlet plate 20, runner plate 21, resonance plate 22 and piezoelectric actuator 23 sequentially corresponding assemble after, then can jointly form a chamber confluxing gas with the inlet plate 20 on it and resonance plate 22 in center hole 210 place of runner plate 21, and between resonance plate 22 and piezoelectric actuator 23, more form one first chamber 222, in order to temporary gas, and the first chamber 222 is be connected with the chamber at center hole 210 place of runner plate 21 through the hollow bore 220 of resonance plate 22, and the both sides of the first chamber 222 then by piezoelectric actuator 23 support 232 between space 235 and be connected with the micro valve device 2B be arranged under it.
When the minitype gas transmitting set 2A start of micro pressure power plant 2, with support 232 for fulcrum, carry out the reciprocating vibration of Vertical direction by voltage actuation primarily of piezoelectric actuator 23.As shown in 5B figure, when piezoelectric actuator 23 vibrates downwards by voltage actuation, then gas is entered by least one inlet hole 200 on inlet plate 20, and via at least one round 211 that confluxes on runner plate 21 to be pooled to center hole 210 place of central authorities, flow in the first chamber 222 downwards via the central hole 220 arranged corresponding with center hole 210 on resonance plate 22 again, thereafter, due to the drive vibrated by piezoelectric actuator 23, resonance plate 22 also can with resonance and carry out vertical reciprocating vibration, as shown in 5C figure, be then resonance plate 22 also with downward vibration, and attaching contacts on the protuberance 230c of the suspension board 230 of piezoelectric actuator 23, by the deformation of this resonance plate 22, to compress the volume of the first chamber 222, and close the first chamber 222 middle flow space, impel the gas in it to push to flow to both sides, and then space 235 between the support 232 of piezoelectric actuator 23 and pass through flowing downwards.Then initial position is returned back to for its resonance plate 22 as 5D figure, and piezoelectric actuator 23 is subject to voltage driven upwards to vibrate, so volume of same extruding the first chamber 222, only now because piezoelectric actuator 23 is upwards lifting, thus the gas in the first chamber 222 is made can to flow towards both sides, and then drive at least one inlet hole 200 of gas constantly on inlet plate 20 to enter, flow in the chamber that the center hole 210 on runner plate 21 formed again, for another example shown in 5E figure, this resonance plate 22 by piezoelectric actuator 23 upwards lifting vibration and resonate upwards, and then make the gas in the center hole 210 of runner plate 21 flow in the first chamber 222 by the central hole 220 of resonance plate 22 again, and via piezoelectric actuator 23 support 232 between space 235 and pass through downwards and flow out minitype gas transmitting set 2A.Implement aspect thus visible, when resonance plate 22 carries out vertical reciprocating vibration, system can by the gap g0 between itself and piezoelectric actuator 23 to increase the ultimate range of its vertical displacement, in other words, between this two structure, arrange gap g0 can make resonance plate 22 can produce upper and lower displacement by a larger margin in time resonating, thus can promote that gas flows faster, and quiet effect can be reached.So, in the runner design through this minitype gas transmitting set 2A, produce pressure gradient, make gas flow at high rates, and the resistance difference in direction is passed in and out through runner, gas is transferred to exhaust end by suction side, and under the state having air pressure at exhaust end, still has the ability to continue pushing out gas.
In addition, in some embodiments, the vertical reciprocating type vibration frequency system of resonance plate 22 can be identical with the vibration frequency of piezoelectric actuator 23, and namely both can simultaneously upwards or downwards simultaneously, its be can according to actual apply situation and appoint execute change, not with being limited as flowing mode shown in the present embodiment.
Please refer to Fig. 2 A, Fig. 2 B and Fig. 6 A, Fig. 6 B, wherein Fig. 6 A is the collection pressure illustrative view of the micro valve device of the micro pressure power plant shown in Fig. 2 A, and Fig. 6 B is then the release illustrative view of the micro valve device of the micro pressure power plant shown in Fig. 2 A.As shown in Figure 6A, the micro valve device 2B system of micro pressure power plant 2 of the present invention is sequentially by gas collection plate 26, valve sheet 27 and exit plate 28 stack and form, in the present embodiment, the first surface 260 of gas collection plate 26 is depression is to form a gas collection chamber 262, the gas transmitted downwards by minitype gas transmitting set 2A is then temporarily accumulated in this gas collection chamber 262, and cording has the first penetration hole 263 and the second penetration hole 264 in gas collection plate 26, one end system of the first penetration hole 263 and the second penetration hole 264 is connected with gas collection chamber 262, the other end is then connected with the first release chamber 265 on the second surface 261 of gas collection plate 26 and the first outlet chamber 266 respectively.And, further set up a protuberance structure 269 at the first place of outlet chamber 266, such as, can be but be not limited to a round column structure, and it is arranges corresponding with the valve opening 270 of valve sheet 27; In addition, gas collection plate 26 has more and is a plurality ofly surrounded on gas collection chamber 262, first release chamber 265 and the first outlet chamber 266 and the groove structure 267 that arranges, arrange thereon with for a seal ring 268.
Exit plate 28 also has the 3rd penetration hole 281 and the 4th penetration hole 282 that two run through setting, and the 3rd penetration hole 281 and the 4th penetration hole 282 are correspond respectively to the first penetration hole 263 of gas collection plate 26 and the second penetration hole 264 and arrange, and one second release chamber 283 is recessed to form corresponding to the 3rd system of penetration hole 281 place on the first surface 280 of exit plate 28, correspond to the 4th penetration hole 282 place and be then recessed to form one second outlet chamber 284, and between the second release chamber 283 with the second outlet chamber 284, have more one be communicated with runner 285, circulate in order to supplied gas.One end of 3rd penetration hole 281 is connected with the second release chamber 283, and the protuberance structure 281a that its end can be set up a protrusion further and be formed, such as can be but be not limited to round column structure, the other end is then communicated in the pressure relief vent 288 of the second surface 289 of exit plate 28; And one end of the 4th penetration hole 282 is connected with the second outlet chamber 284, the other end is then connected with outlet 29, in the present embodiment, outlet 29 be can with a device (not shown), such as: press machine, but not as limit, be connected.Similarly, exit plate 28 also has and is a plurality ofly surrounded on the second release chamber 283 and the second outlet chamber 284 and the groove structure 286 that arranges, with arranging thereon for a seal ring 287, in some embodiments, the material of seal ring 268,287 is can the good rubber material of endurance, but not as limit, it is mainly arranged in groove structure 267,286 in order to correspondence, with auxiliary gas collection plate 26, engage more closely between exit plate 28 with valve sheet 27, and prevent gas leak.
Valve sheet 27 have a valve opening 270 and a plurality of location hole 271, when valve sheet 27 and gas collection plate 26 and exit plate 28 locate assemble time, be arrange corresponding corresponding to the protuberance structure 269 of the first outlet chamber 266 of gas collection plate 26 for its valve opening 270, by the design of this single valve opening 270, with the object making gas can reach one-way flow in response to its pressure reduction.
When the start of micro valve device 2B collection pressure, mainly as shown in Figure 6A, it is can in response to the pressure coming from gas that minitype gas transmitting set 2A transmits downwards and provide, again or when extraneous atmospheric pressure is greater than the internal pressure of the device (not shown) be connected with outlet 29, then gas can transfer in the gas collection chamber 262 of micro valve device 2B from minitype gas transmitting set 2A, flow in the first release chamber 265 and the first outlet chamber 266 downwards through the first penetration hole 263 and the second penetration hole 264 respectively again, now, downward gas pressure system makes flexual valve sheet 27 be bent downwardly deformation, and then the volume of the first release chamber 265 is increased, and it is smooth downwards and be resisted against the end of the 3rd penetration hole 281 to correspond to the first penetration hole 263 place, and then the 3rd penetration hole 281 of exit plate 28 can be closed, therefore the gas in the second release chamber 283 can not flow out from the 3rd penetration hole 281 place.Certainly, the present embodiment, can utilize the protuberance structure 281a that the 3rd penetration hole 281 end is set up, and to strengthen valve sheet 27 closed 3rd penetration hole 281 of conflict fast, and reaches the complete hermetic effect of a prestressing conflict effect.On the other hand, because gas system flows in the first outlet chamber 266 downwards from the second penetration hole 264, and the valve sheet 27 corresponding to the first place of outlet chamber 266 is also bent downwardly deformation, therefore the valve opening 270 of its correspondence is opened downwards, gas then can flow in the second outlet chamber 284 via valve opening 270 from the first outlet chamber 266, and flow to outlet 29 by the 4th penetration hole 282 and in the device (not shown) that is connected with outlet 29, by this to carry out the start collecting pressure to this device.
Please continue and consult Fig. 6 B, when micro valve device 2B carries out release, it is can by the gas transport amount of regulation and control minitype gas transmitting set 2A, make gas no longer in input set gas chamber 262, or when device (not shown) internal pressure be connected with outlet 29 is greater than extraneous atmospheric pressure, then micro valve device 2B can be made to carry out release.Now, gas will input in the second outlet chamber 284 from the 4th penetration hole 282 be connected with outlet 29, make the volumetric expansion of the second outlet chamber 284, and then impel flexual valve sheet 27 to be bent upwards deformation, and upwards smooth, be resisted against on gas collection plate 26, therefore the valve opening 270 of valve sheet 27 can close because being resisted against gas collection plate 26.Certainly, at the present embodiment, the first outlet chamber 266 can be utilized to set up protuberance structure 269, allow flexual valve sheet 27 be bent upwards deformation conflict more fast, make that valve opening 270 is more favourable reaches the closed condition that a prestressing conflict effect attaches sealing completely, therefore the valve opening 270 of valve sheet 27 can close because being resisted against this protuberance structure 269, then the gas in this second outlet chamber 284 can not in adverse current to the first outlet chamber 266.And, gas system in second outlet chamber 284 can flow in the second release chamber 283 via connection runner 285, and then make the volume expanded of the second release chamber 283, and make the valve sheet 27 corresponding to the second release chamber 283 be bent upwards deformation equally, now do not support due to valve sheet 27 and be closed in the 3rd penetration hole 281 end, therefore namely the 3rd penetration hole 281 is in opening state, the gas namely in the second release chamber 283 can outwards flow to pressure relief vent 288 by the 3rd penetration hole 281 and sentence and carry out release operation.Certainly, the present embodiment, the protuberance structure 281a that the 3rd penetration hole 281 end can be utilized to set up, allows flexual valve sheet 27 be bent upwards deformation quicker, the state of more favourable disengaging closedown the 3rd penetration hole 281.So, then by this unidirectional release operation, the gas in the device (not shown) be connected with outlet 29 can be discharged and step-down, or discharge completely and complete release operation.
Please refer to Fig. 2 A, Fig. 2 B and Fig. 7 A to Fig. 7 E, wherein Fig. 7 A to Fig. 7 E is the collection pressure illustrative view of the micro pressure power plant shown in Fig. 2 A.As shown in Figure 7 A, namely micro pressure power plant 2 combined by minitype gas transmitting set 2A and micro valve device 2B, wherein minitype gas transmitting set 2A system is as aforementioned, sequentially by inlet plate 20, runner plate 21, resonance plate 22, piezoelectric actuator 23, insulating trip 24, the structures such as conducting plate 25 stack assembling location and form, and cording has a gap g0 between resonance plate 22 and piezoelectric actuator 23, and there is the first chamber 222 between resonance plate 22 and piezoelectric actuator 23, and, micro valve device 2B is then same by gas collection plate 26, valve sheet 27 and exit plate 28 etc. sequentially stack assembling location and form, and cording has gas collection chamber 262 between the gas collection plate 26 and the piezoelectric actuator 23 of minitype gas transmitting set 2A of micro valve device 2B, second surface 261 in gas collection plate 26 has more the first release chamber 265 and the first outlet chamber 266, and have more the second release chamber 283 and the second outlet chamber 284 in the first surface 280 of exit plate 28, by driving and the resonance plate 22 of these multiple different pressure chamber collocation piezoelectric actuators 23, the vibration of valve sheet 27, to make gas to the transmission of next part pressure.
As shown in Figure 7 B, when the piezoelectric actuator 23 of minitype gas transmitting set 2A vibrates downwards by voltage actuation, then gas can be entered by the inlet hole 200 on inlet plate 20 in minitype gas transmitting set 2A, and via at least one round 211 that confluxes on runner plate 21 to be pooled to its center hole 210 place, then flow into downwards in the first chamber 222 via the hollow bore 220 on resonance plate 22.Thereafter, then as seen in figure 7 c, due to the resonant interaction vibrated by piezoelectric actuator 23, resonance plate 22 also can with carry out reciprocating vibration, namely it vibrates downwards, and be adsorbed on the protuberance 230c of the suspension board 230 of piezoelectric actuator 23, by the deformation of this resonance plate 22, the volume of the chamber at central hole 210 place of runner plate 21 is increased, and compress the volume of the first chamber 222 simultaneously, and then impel the gas in the first chamber 222 to push to flow to both sides, and then space 235 between the support 232 of piezoelectric actuator 23 and pass through circulation downwards, to flow in the gas collection chamber 262 between minitype gas transmitting set 2A and micro valve device 2B, and flow in the first release chamber 265 and the first outlet chamber 266 by with the first penetration hole 263 that gas collection chamber 262 is connected and the second penetration hole 264 are corresponding downwards again.Then, then as illustrated in fig. 7d, because the resonance plate 22 of minitype gas transmitting set 2A returns back to initial position, and piezoelectric actuator 23 is subject to voltage driven upwards to vibrate, so volume of same extruding the first chamber 222, gas in first chamber 222 is flowed towards both sides, and by piezoelectric actuator 23 support 232 between space 235 input to the gas collection chamber 262 of micro valve device 2B constantly, in first release chamber 265 and the first outlet chamber 266, so more make the air pressure in the first release chamber 265 and the first outlet chamber 266 larger, and then promote flexual valve sheet 27 and produce Bending Deformation downwards, then in the second release chamber 283, valve sheet 27 is downward smooth and be resisted against the protuberance structure 281a of the 3rd penetration hole 281 end, and then the 3rd penetration hole 281 is closed, and in the second outlet chamber 284, the valve opening 270 valve sheet 27 corresponding to the 4th penetration hole 282 is open downwards, make any device (not shown) that the gas in the second outlet chamber 284 can extremely be exported 29 by the 4th penetration hole 282 going down and is connected with outlet 29, and then to reach the object of collection pressure operation.Finally, then as seen in figure 7e, when the resonance plate 22 of minitype gas transmitting set 2A resonates to top offset, and then make the gas in the center hole 210 of runner plate 21 can flow in the first chamber 222 by the hollow bore 220 of resonance plate 22, again via piezoelectric actuator 23 support 232 between space 235 and transfer in micro valve device 2B constantly downwards, then because its gas pressure system continues to increase downwards, therefore gas still can constantly via the gas collection chamber 262 of micro valve device 2B, second penetration hole 264, first outlet chamber 266, second outlet chamber 284 and the 4th penetration hole 282 and flow to outlet 29 and in any device of being connected with outlet 29, this collection pressure operation system can via the pressure difference in the atmospheric pressure in the external world and device to drive it, but not as limit.
When the pressure that the device (not shown) be connected with outlet 29 is inner is greater than extraneous pressure, then micro pressure power plant 2 are the operation can carrying out step-down or release as shown in Figure 8, its step-down or the flowing mode of doing of release is mainly as previously mentioned, can by the gas transport amount of regulation and control minitype gas transmitting set 2A, make gas no longer in input set gas chamber 262, now, gas will input in the second outlet chamber 284 from the 4th penetration hole 282 be connected with outlet 29, make the volumetric expansion of the second outlet chamber 284, and then impel flexual valve sheet 27 to be bent upwards deformation, and it is upwards smooth, be resisted against in the protuberance structure 269 of the first outlet chamber 266, and the valve opening 270 of valve sheet 27 is closed, namely the gas in the second outlet chamber 284 can not in adverse current to the first outlet chamber 266, and the gas system in the second outlet chamber 284 can via connection runner 285 and flow in the second release chamber 283, more outwards flow to pressure relief vent 288 by the 3rd penetration hole 281 and sentence and carry out release operation, so by the unidirectional gas transport operation of this micro valve structure 2B, the gas in the device be connected with outlet 29 can be discharged and step-down, or discharge completely and complete release operation.
In sum, minitype gas power plant provided by the present invention, mainly connect by mutual group of minitype gas transmitting set and micro valve device, the inlet hole of gas on minitype gas transmitting set is entered, and utilize the start of piezoelectric actuator, make gas in design after runner and pressure chamber in produce pressure gradient, and then make gas flow at high rates and be passed in micro valve device, one-way cock again through micro valve device designs, make gas with one way flow, and then can by pressure accumulated any device in being connected with outlet, and when for carrying out step-down or release, then regulate and control the transmission quantity of minitype gas transmitting set, and make gas can by with export the second outlet chamber transferring to micro valve device in the device that is connected, and by be communicated with runner by transfer to the second release chamber, flowed out by pressure relief vent again, and then gas can be made promptly to transmit to reach, and quiet effect can be reached simultaneously, the overall volume of minitype gas power plant more can be made to reduce and slimming, and then make minitype gas power plant reach light comfortable portable object, and can be widely used among medical equipment and relevant device.Therefore, of the present invention have industrial utilization, files an application in whence in accordance with the law.
Even if the present invention has been described in detail by above-described embodiment and can think by being familiar with this skill personage Ren Shi craftsman and modify as all, so neither de-if attached claim institute is for Protector.
Claims (18)
1. micro pressure power plant, is characterized in that comprising:
One minitype gas transmitting set, comprising:
One inlet plate, has at least one inlet hole, for importing gas;
One runner plate, has at least one round and center hole of confluxing, this inlet hole of this round that confluxes this inlet plate corresponding, and guides the gas of this inlet hole to conflux to this center hole;
One resonance plate, has a hollow bore, to should this center hole of runner plate; And
One piezoelectric actuator, has a suspension board and a housing, connects between this suspension board and this housing with at least one support, and attaches a piezoelectric ceramic plate in a surface of this suspension board;
Wherein, above-mentioned inlet plate, runner plate, resonance plate and piezoelectric actuator sequentially stack reply and put location, and there is between this resonance plate and this piezoelectric actuator a gap form one first chamber, when being driven to make this piezoelectric actuator, gas is imported by this at least one inlet hole of this inlet plate, this at least one round that confluxes through this runner plate is collected to this center hole, flow through this hollow bore of this resonance plate again, to enter in this first chamber, again by this piezoelectric actuator this at least one support between a space transmit downwards, with lasting pushing out gas; And
One micro valve device, comprising:
One gas collection plate, has one first penetration hole, one second penetration hole, one first release chamber and one first outlet chamber, and this first penetration hole is connected with this first release chamber, and this second penetration hole is connected with this first outlet chamber;
One valve sheet, has a valve opening; And
One exit plate, there is one the 3rd penetration hole, one the 4th penetration hole, one second pressure-releasing cavity and one second outlet chamber, 3rd penetration hole corresponds to this first penetration hole of this gas collection plate, and be connected with this second release chamber, 4th penetration hole corresponds to this second penetration hole, and be connected with this second outlet chamber, and between this second release chamber and this second outlet chamber, there is a connection runner;
Wherein, above-mentioned gas collection plate, valve sheet and exit plate sequentially correspondence stack and arrange location, this valve sheet is arranged between this gas collection plate and this exit plate, and the valve opening correspondence of this valve sheet is arranged between this second penetration hole and the 4th penetration hole, gas is when this minitype gas transmitting set transfers to downwards in this micro valve device, enter in this first release chamber and this first outlet chamber by this first penetration hole and this second penetration hole, and import gas by the valve opening of this valve sheet flow in the 4th penetration hole carry out collection press operation, when collecting body of calming the anger and being greater than importing gas, collect body of calming the anger to flow towards this second outlet chamber from the 4th penetration hole, to make this valve sheet displacement, and make the valve opening of this valve sheet be resisted against this gas collection plate and close, collect body of calming the anger simultaneously and can flow to this second pressure-releasing cavity indoor along connection runner in this second outlet chamber, now in this valve sheet displacement indoor of the second pressure-releasing chamber, collect body of calming the anger to be flowed out by the 3rd penetration hole, to carry out release operation.
2. micro pressure power plant as claimed in claim 1, it is characterized in that this minitype gas transmitting set more comprises an insulating trip and a conducting plate, and this insulating trip and this conducting plate are sequentially arranged under this piezoelectric actuator.
3. micro pressure power plant as claimed in claim 1, is characterized in that this inlet plate of this minitype gas transmitting set and this runner plate can be integrated structure.
4. micro pressure power plant as claimed in claim 1, it is characterized in that a upper surface of this suspension board of this piezoelectric actuator of this minitype gas transmitting set is the structure of a ladder surface, namely this upper surface has a protuberance, and a upper surface coplanar of this protuberance and this housing, between a upper surface of this upper surface of this protuberance and this housing and this upper surface of this suspension board and this support, there is a certain depth.
5. micro pressure power plant as claimed in claim 1, it is characterized in that this piezoelectric ceramic plate of this piezoelectric actuator of this minitype gas transmitting set is attached at a lower surface of this suspension board, and a lower surface coplanar of this lower surface of this suspension board and this housing and this support.
6. micro pressure power plant as claimed in claim 1, it is characterized in that this gas collection plate of this micro valve device has more a gas collection chamber in a surface, and this gas collection chamber are connected with this first penetration hole and this second penetration hole.
7. as claimed in claim 6 micro pressure power plant, it is characterized in that this first release chamber of this micro valve device and this first outlet chamber be arranged at this relative gas collection chamber of this gas collection plate another on the surface.
8. micro pressure power plant as claimed in claim 1, it is characterized in that this first outlet chamber of this gas collection plate of this micro valve device has more a protuberance structure, and this protuberance structure is to should this valve opening of valve block plate arrange, and to conflict this valve opening of complete hermetically closing in order to quick conflict formation one prestressing.
9. micro pressure power plant as claimed in claim 1, it is characterized in that this second release chamber and this second outlet chamber of this micro valve device are arranged at one of this exit plate on the surface, corresponding with this first release chamber of this gas collection plate and this first outlet chamber respectively.
10. micro pressure power plant as claimed in claim 1, it is characterized in that the 3rd penetration hole end of this exit plate of this micro valve device has a protuberance structure, to conflict complete hermetically closing the 3rd penetration hole in order to this valve sheet formation one prestressing of conflicting fast, or depart from fast in order to this valve sheet and open the 3rd penetration hole.
11. 1 kinds of micro pressure power plant, is characterized in that comprising:
One minitype gas transmitting set, comprising:
One inlet plate;
One runner plate;
One resonance plate; And
One piezoelectric actuator;
Wherein, above-mentioned inlet plate, runner plate, resonance plate and piezoelectric actuator sequentially correspondence stack and arrange location, and there is between this resonance plate and this piezoelectric actuator a gap form one first chamber, when this piezoelectric actuator is driven, gas is entered by this inlet plate, flow through this runner plate and this resonance plate, transmit downwards again to enter in this first chamber; And
One micro valve device, comprising:
One gas collection plate, has at least two penetration holes and at least two chambers;
One valve sheet, has a valve opening; And
One exit plate, has at least two penetration holes and at least two chambers;
Wherein, above-mentioned gas collection plate, valve sheet and exit plate sequentially correspondence stack and arrange location, a gas collection chamber is formed between this minitype gas transmitting set and this micro valve device, when gas transfers to this gas collection chamber downwards from this minitype gas transmitting set, be passed in this micro valve device again, at least two penetration holes had respectively through this gas collection plate, this exit plate and at least two chambers, this valve opening correspondence of this valve sheet is made to open or close with the one-way flow in response to gas, in order to do carrying out collection pressure or release operation.
12. micro pressure power plant as described in claims 11, it is characterized in that this minitype gas transmitting set, this inlet plate has at least one inlet hole, for importing gas; This runner plate has at least one round and center hole of confluxing, this inlet hole of this round that confluxes this inlet plate corresponding, and guides the gas of this inlet hole to conflux to this center hole; This resonance plate has a hollow bore, to should this center hole of runner plate; And this piezoelectric actuator has a suspension board and a housing, connect with at least one support between this suspension board and this housing, and attach a piezoelectric ceramic plate in a surface of this suspension board.
13. micro pressure power plant as described in claims 11, it is characterized in that this gas collection plate of this micro valve device has one first penetration hole, one second penetration hole, one first release chamber and one first outlet chamber, this first penetration hole is connected with this first release chamber, and this second penetration hole is connected with the first outlet chamber.
14. micro pressure power plant as described in claims 13, is characterized in that this exit plate of this micro valve device has one the 3rd penetration hole, one the 4th penetration hole, one second pressure-releasing cavity and one second outlet chamber and wherein has a connection runner between this second release chamber and this second outlet chamber.
15. micro pressure power plant as described in claims 14, it is characterized in that this valve sheet is arranged between this gas collection plate and this exit plate, and the valve opening correspondence of this valve sheet is arranged between this second penetration hole and the 4th penetration hole, gas is when this minitype gas transmitting set transfers to downwards in this micro valve device, enter in this first release chamber and this first outlet chamber by this first penetration hole and this second penetration hole, and import gas by this valve opening of this valve sheet flow in the 4th penetration hole carry out collection press operation, when collecting body of calming the anger and being greater than importing gas, collect body of calming the anger to flow towards this second outlet chamber from the 4th penetration hole, to make this valve sheet displacement, and make this valve opening of this valve sheet be resisted against this gas collection plate and close, collect body of calming the anger simultaneously and can flow to this second pressure-releasing cavity indoor along connection runner in this second outlet chamber, now in this valve sheet displacement indoor of the second pressure-releasing chamber, collect body of calming the anger to be flowed out by the 3rd penetration hole, carry out release operation.
16. 1 kinds of micro pressure power plant, is characterized in that comprising:
One minitype gas transmitting set, comprise sequentially stacking and an inlet plate, a runner plate, a resonance plate and a piezoelectric actuator are set, wherein there is between this resonance plate and this piezoelectric actuator a gap and form one first chamber, when this piezoelectric actuator is driven, gas is entered by this inlet plate, flow through this runner plate and this resonance plate, transmit again to enter in this first chamber; And
One micro valve device, comprises sequentially stacking and arranges a gas collection plate, a valve sheet and an exit plate, and this valve sheet has a valve opening;
Wherein, when gas transfers in this micro valve device from this minitype gas transmitting set, in order to do carrying out collection pressure or release operation.
17. micro pressure power plant as described in claims 16, it is characterized in that forming a gas collection chamber between this minitype gas transmitting set and this micro valve device, make this gas transfer to this gas collection chamber from this minitype gas transmitting set, then be passed in this micro valve device.
18. micro pressure power plant as described in claims 16, it is characterized in that this gas collection plate, this exit plate of this micro valve device have at least two penetration holes and at least two chambers respectively, make with the one-way flow in response to gas this valve opening correspondence of this valve sheet open or close.
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