TWI679346B - Micro-gas pressure driving apparatus - Google Patents

Abstract

A miniature pneumatic power device includes a miniature fluid control device including an air intake plate, a resonance plate, a piezoelectric actuator, and a gas collecting plate arranged in a stack, wherein a gap formed between the resonance plate and the piezoelectric actuator A chamber, when the piezoelectric actuator is driven, gas is introduced from the air inlet plate, enters the first chamber through the resonance plate, and then continues to transmit to form a pressure gradient flow channel to continuously push out the gas; the micro valve device includes a stack The valve plate and the outlet plate provided; when the gas is transmitted from the micro fluid control device to the micro valve device, the valve hole of the valve plate is opened or closed in response to the unidirectional flow of the gas, and the pressure is collected or released.

Description

Miniature pneumatic power unit

This case relates to a miniature pneumatic power device, especially a miniature ultra-thin and quiet miniature pneumatic power device.

At present, in all fields, whether in the pharmaceutical, computer technology, printing, energy and other industries, the products are developing towards miniaturization and miniaturization. Among them, micropumps, sprayers, inkjet heads, industrial printing devices and other products The fluid transport structure is its key technology, so how to break through its technical bottlenecks with innovative structures is an important content of development.

For example, in the pharmaceutical industry, many instruments or equipment that require pneumatic power to drive, usually adopt traditional motors and pneumatic valves to achieve the purpose of gas delivery. However, due to the limitation of the structure of these traditional motors and gas valves, it is difficult for such instruments to reduce their volume, so that the overall device cannot be reduced in size, that is, it is difficult to achieve the goal of thinning, so it cannot be installed. It is not convenient to use it on or with a portable device. In addition, these traditional motors and gas valves also generate noise when they are actuated, making the user anxious, resulting in inconvenience and discomfort in use.

Therefore, how to develop a miniature pneumatic power device that can improve the lack of the above-mentioned conventional techniques and can make the traditional instruments or equipment using fluid control devices small in size, miniaturized, and silent, thereby achieving portable and comfortable portable purposes. Problems that urgently need to be resolved.

The main purpose of this case is to provide a micro-pneumatic power device suitable for use in portable or wearable instruments or equipment. By integrating micro-fluid control devices and micro-valve devices, the conventional technology-driven instrument or The equipment has a large volume, it is difficult to be thin, it cannot achieve the purpose of being portable, and it has a lot of noise.

In order to achieve the above purpose, one of the broader implementation aspects of the present case is to provide a miniature pneumatic power device including a miniature fluid control device and a miniature valve device; the miniature fluid control device includes an air inlet plate, a resonance plate, a pressure An electric actuator and a gas collecting plate, the gas collecting plate having at least one air inlet hole, at least one bus hole, and a central recess forming a bus cavity, at least one air hole for introducing gas, and the bus hole corresponding to air intake The resonance plate has a hollow hole corresponding to the convergence chamber of the air intake plate, and the piezoelectric actuator has a suspension plate, an outer frame and A piezoelectric ceramic plate having a length between 7.5 mm and 12 mm, a width between 7.5 mm and 12 mm, and a thickness between 0.1 mm and 0.4 mm. The outer frame has at least one The bracket is connected between the suspension plate and the outer frame. The piezoelectric ceramic plate is attached to the first surface of the suspension plate, has a side length not greater than the side length of the suspension plate, and has a length between 7.5 mm and 12 mm. Length, between 7.5mm A width between 12mm and a thickness between 0.05mm and 0.3mm, and the ratio of length and width is between 0.625 and 1.6 times. The gas collecting plate has a first through hole, a second through hole, and a first discharge hole. The pressure cavity, the first cavity and the reference surface. The first cavity has a convex structure. The height of the convex structure is higher than the reference surface of the gas collecting plate. The first through hole communicates with the first pressure relief chamber. The second through hole is in communication with the first exit chamber. The gas collecting plate, the piezoelectric actuator, the resonance plate, and the air intake plate are sequentially positioned in a correspondingly stacked manner, and the resonance plate and the piezoelectric actuator are positioned. There is a gap to form a first cavity, so that when the piezoelectric actuator is driven, gas is introduced through at least one air inlet hole of the air inlet plate, is collected into a central recessed portion through at least one bus hole, and then flows through the hollow of the resonance plate A hole to enter the first chamber, and then transmitted downward through the gap between at least one bracket of the piezoelectric actuator to continuously push out the gas; and the micro valve device includes a valve plate and an outlet plate in a correspondingly stacked arrangement in order Positioned on the air collecting plate of the micro fluid control device The valve plate has a valve hole, and the valve plate has a thickness between 0.1mm and 0.3mm. The convex structure of the gas collecting plate is arranged corresponding to the valve hole of the valve plate, which is beneficial to prevent the valve hole from forming a pre-force effect. The valve hole is completely closed. The outlet plate has a pressure relief through hole, an outlet through hole, a second pressure relief chamber, a second outlet chamber, at least one limiting structure, and a reference surface. The reference surface is recessed with a second pressure relief. Cavity and a second outlet chamber, the pressure relief through hole is provided at the center of the second pressure relief chamber, the end of the pressure relief through hole has a convex structure, and the height of the convex structure is higher than that of the outlet plate On the reference surface, the exit through-hole is in communication with the second exit chamber, and at least one limiting structure is disposed in the second pressure relief chamber, and the height of the limiting structure is between 0.2mm and 0.5mm, and the second discharge There is a communication flow path between the pressure chamber and the second outlet chamber, wherein the pressure relief through hole of the outlet plate corresponds to the first through hole of the gas collection plate, and the second pressure relief chamber of the outlet plate corresponds to the gas collection The first pressure relief chamber of the plate, and the second outlet chamber of the outlet plate corresponds to the first of the gas collecting plate. Oral chamber, and the valve plate is arranged between the gas collecting plate and the outlet plate to block the communication between the first pressure relief chamber and the second pressure relief chamber, and the valve hole of the valve plate is correspondingly provided in the second through hole and the outlet through hole. In the meantime, when gas is transmitted downward from the micro fluid control device into the micro valve device, the first through hole and the second through hole of the gas collecting plate enter the first pressure relief chamber and the first outlet cavity, and the micro valve device The structure of the valve plate that quickly touches the convex part of the outlet plate is beneficial to form a pre-force effect, completely closing the pressure relief through hole, and at the same time introducing the gas from the valve hole of the valve plate into the outlet through hole of the micro valve device for pressure collecting operation. When the gas is larger than the introduced gas, the pressure-collecting gas flows from the outlet through hole to the second outlet chamber to displace the valve plate and close the valve hole of the valve plate against the gas collecting plate, and at least one limiting structure assists Support the valve plate to prevent the valve plate from collapsing. At the same time, the pressure-collecting gas can flow along the communication channel to the second pressure-relief chamber in the second outlet chamber. At this time, the valve plate is displaced in the second pressure-relief chamber and the pressure-collecting gas Unloadable It flows through holes, for relief operations.

To achieve the above purpose, another broader implementation of the present case is to provide a miniature pneumatic power device including a miniature fluid control device and a miniature valve device; the miniature fluid control device includes an air inlet plate, a resonance plate, a A piezoelectric actuator and a gas collecting plate, the gas collecting plate having at least two through holes and at least two chambers, wherein the gas collecting plate, the piezoelectric actuator, the resonance plate and the air intake plate are sequentially positioned in a correspondingly stacked arrangement, A gap is formed between the resonance plate and the piezoelectric actuator to form a first cavity. When the piezoelectric actuator is driven, gas enters through the air inlet plate, flows through the resonance plate, enters the first cavity, and then transmits downward. ; And the micro valve device includes a valve plate and an outlet plate sequentially correspondingly arranged on the gas collecting plate of the positioning micro fluid control device, the valve plate has a valve hole, and the outlet plate has at least two through holes and at least two chambers; The gas collecting chamber is formed between the micro fluid control device and the micro valve device. When the gas is transmitted downward from the micro fluid control device to the gas collecting chamber, it is then transferred to the micro valve device and passes through the gas collecting device. Plate, each plate having an outlet through-hole and at least two of the at least two chambers, one-way flow valve hole of the gas valve in response to a corresponding opening of the sheet or off, set pressure or serve for relief operations.

In order to achieve the above purpose, another broader implementation of the present case is to provide a miniature pneumatic power device, including a miniature fluid control device and a miniature valve device. The miniature fluid control device includes a stacking plate, a piezoelectric Actuator, resonance plate and air intake plate, wherein a gap is formed between the resonance plate and the piezoelectric actuator to form a first chamber. When the piezoelectric actuator is driven, gas enters through the air intake plate and flows through the resonance plate. To enter the first chamber for retransmission; and the micro valve device includes sequentially stacked valve plates and an outlet plate positioned on a gas collecting plate of the micro fluid control device, and the valve plate has a valve hole, wherein when the gas comes from the micro fluid The control device is transmitted to the micro valve device, and the pressure collection or pressure relief operation is performed.

Some typical embodiments embodying the features and advantages of this case will be described in detail in the description in the subsequent paragraphs. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and that the descriptions and diagrams therein are essentially for illustration purposes, rather than limiting the case.

The micro-pneumatic power unit 1 in this case can be applied to industries such as medicine, biotechnology, energy, computer technology, or printing, and is not used to transmit gas. Please refer to FIG. 1A, FIG. 1B, FIG. 2A, FIG. 2B, and FIGS. 7A to 7E. FIG. 1A is a schematic exploded front view of the miniature pneumatic power device according to the preferred embodiment of the present invention, and FIG. 1B is FIG. 1A. The schematic diagram of the front assembly structure of the miniature pneumatic power device shown in the figure, FIG. 2A is a schematic diagram of the exploded structure of the rear of the miniature pneumatic power device shown in FIG. 1A, and FIG. 2B is the schematic diagram of the miniature pneumatic power device shown in FIG. Schematic diagram of the rear assembly structure. Figures 7A to 7E are schematic diagrams of the pressure-collecting operation of the miniature pneumatic power device shown in Figure 1A. As shown in Figures 1A and 2A, the miniature pneumatic power device 1 in this case is a combination of a miniature fluid control device 1A and a miniature valve device 1B. The miniature fluid control device 1A has a housing 1a and a piezoelectric actuator. The structure of the device 13, the insulating sheets 141, 142, and the conductive sheet 15 includes a casing 1a including a gas collecting plate 16 and a base 10, and the base 10 includes an air intake plate 11 and a resonance sheet 12, but is not limited thereto. The piezoelectric actuator 13 is provided corresponding to the resonance sheet 12, and the air intake plate 11, the resonance sheet 12, the piezoelectric actuator 13, the insulation sheet 141, the conductive sheet 15, the other insulation sheet 142, and the gas collecting plate are provided. 16 and so on are sequentially stacked, and the piezoelectric actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132, and a piezoelectric ceramic plate 133; and the micro valve device 1B includes A valve plate 17 and an outlet plate 18 are not limited thereto. And in this embodiment, as shown in FIG. 1A, the gas collecting plate 16 is not only a single plate structure, but also a frame structure having a side wall 168 on the periphery, and the gas collecting plate 16 has a thickness of 9 mm to 17 mm. Between the length and the width between 9mm and 17mm, and the ratio between the length and the width is between 0.53 times and 1.88 times, and the side wall 168 formed by the periphery and the bottom plate together define a capacity The installation space 16a is used for the piezoelectric actuator 13 to be installed in the accommodation space 16a. Therefore, when the miniature pneumatic power device 1 in this case is assembled, the front schematic diagram will be as shown in FIG. 1B, and As shown in FIGS. 7A to 7E, it can be seen that the micro fluid control device 1A is assembled corresponding to the micro valve device 1B, that is, the valve plate 17 and the outlet plate 18 of the micro valve device 1B are sequentially stacked and positioned on the micro valve device. It is formed on the gas collecting plate 16 of the fluid control device 1A. The assembled back view shows the pressure relief through hole 181 and the outlet 19 on the outlet plate 18. The outlet 19 is used to connect with a device (not shown), and the pressure relief through hole 181 is used to make the micro valve device The gas in 1B is discharged to achieve the effect of pressure relief. By this assembly of the micro fluid control device 1A and the micro valve device 1B, gas is introduced from at least one air inlet hole 110 on the air inlet plate 11 of the micro fluid control device 1A and passes through the piezoelectric actuator 13 It will continue to transmit through multiple pressure chambers (not shown), so that the gas can flow unidirectionally in the micro valve device 1B and accumulate pressure in a device connected to the outlet end of the micro valve device 1B. (Not shown), and when pressure relief is required, the output of the micro fluid control device 1A is regulated so that the gas is discharged through the pressure relief through hole 181 on the outlet plate 18 of the micro valve device 1B for relief. Pressure.

Please continue to refer to FIG. 1A and FIG. 2A. As shown in FIG. 1A, the air inlet plate 11 of the micro fluid control device 1A has a first surface 11b, a second surface 11a, and at least one air inlet hole 110. In the example, the number of the air inlet holes 110 is four, but it is not limited to this. It penetrates the first surface 11b and the second surface 11a of the air inlet plate 11 and is mainly used for the gas to comply with the atmospheric pressure from outside the device. This function flows into the micro fluid control device 1A from the at least one air inlet hole 110. As shown in FIG. 2A, it can be seen from the first surface 11 b of the air intake plate 11 that there is at least one bus hole 112 for communicating with the at least one air intake hole 110 of the second surface 11 a of the air intake plate 11. Corresponding setting. In this embodiment, the number of the busbar holes 112 corresponds to the air inlet holes 110, and the number is 4, but is not limited thereto. The central communication portion of the busbar holes 112 has a central recess 111. Moreover, the central recessed portion 111 is in communication with the busbar hole 112, so that the gas entering the busbar hole 112 from the air inlet hole 110 can be guided and converged to the central recessed portion 111 for transmission. Therefore, in this embodiment, the air inlet plate 11 has an air inlet hole 110, a bus bar hole 112, and a central recess 111 that are integrally formed, and a confluence chamber for a confluent gas is formed correspondingly at the central recess 111 for Gas is temporarily stored. In some embodiments, the material of the air inlet plate 11 may be, but is not limited to, a stainless steel material, and its thickness is between 0.4 mm and 0.6 mm, and its preferred value is 0.5 mm, but Not limited to this. In other embodiments, the depth of the busbar cavity formed by the central recess 111 is the same as the depth of the busbar holes 112, and the preferred value of the depth of the busbar cavity and the busbar holes 112 is described Between 0.2mm and 0.3mm, but not limited to this. The resonance sheet 12 is composed of a flexible material, but is not limited thereto. The resonance sheet 12 has a hollow hole 120 on the resonance sheet 12 and is provided corresponding to the central recess 111 of the first surface 11 b of the air intake plate 11. To allow gas to circulate. In other embodiments, the resonant plate 12 may be made of a copper material, but is not limited thereto, and its thickness is between 0.03mm and 0.08mm, and its preferred value is 0.05mm, but also Not limited to this.

Please also refer to FIG. 3A, FIG. 3B, and FIG. 3C, which are a schematic diagram of the front structure, the back structure, and the cross-sectional structure of the piezoelectric actuator of the miniature pneumatic power device shown in FIG. 1A, respectively. The actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132, and a piezoelectric ceramic plate 133. The piezoelectric ceramic plate 133 is attached to the first of the suspension plate 130. The surface 130b is used to apply voltage to generate deformation to drive the suspension plate 130 to bend and vibrate. The suspension plate 130 has a central portion 130d and an outer peripheral portion 130e. When the piezoelectric ceramic plate 133 is driven by a voltage, the suspension plate 130 can be driven by the central portion. The bending vibration from 130d to the outer peripheral portion 130e, and the at least one bracket 132 is connected between the suspension plate 130 and the outer frame 131. In this embodiment, the bracket 132 is connected between the suspension plate 130 and the outer frame 131. The two ends are respectively connected to the outer frame 131 and the suspension plate 130 to provide elastic support, and at least one gap 135 is provided between the bracket 132, the suspension plate 130 and the outer frame 131 for gas circulation, and the Suspension plate 130, frame 1 The shape and number of the 31 and the bracket 132 have various changes. In addition, the outer frame 131 is arranged around the outer side of the suspension plate 130 and has a conductive pin 134 protruding outward for power connection, but not limited thereto. In this embodiment, the suspension plate 130 is a stepped structure, which means that the second surface 130a of the suspension plate 130 further has a convex portion 130c. The convex portion 130c may be, but is not limited to, a circular protrusion. Structure, and the height of the convex portion 130c is between 0.02mm and 0.08mm, and the preferred value is 0.03mm, and its diameter is 0.55 times the minimum side length of the suspension plate 130, but it is not limited thereto. Please refer to FIG. 3A and FIG. 3C at the same time, the surface of the convex portion 130c of the suspension plate 130 is coplanar with the second surface 131a of the outer frame 131, and the second surface 130a of the suspension plate 130 and the second surface of the bracket 132 The surface 132a is also coplanar, and the protrusion 130c of the suspension plate 130 and the second surface 131a of the outer frame 131 have a specific depth between the second surface 130a of the suspension plate 130 and the second surface 132a of the bracket 132. As for the first surface 130b of the suspension plate 130, as shown in FIGS. 3B and 3C, it is a flat coplanar structure with the first surface 131b of the outer frame 131 and the first surface 132b of the bracket 132, and the piezoelectric The ceramic plate 133 is attached to the first surface 130 b of the flat suspension plate 130. In other embodiments, the shape of the suspension plate 130 can also be a flat, square plate-shaped structure with two sides, which is not limited to this, and can be arbitrarily changed according to the actual application situation. In some embodiments, the suspension plate 130, the bracket 132, and the outer frame 131 may be a one-piece structure, and may be composed of a metal plate, such as stainless steel, but not limited thereto. And in some embodiments, the thickness of the suspension plate 130 is between 0.1mm and 0.4mm, and its preferred value is 0.27mm, and the length of the suspension plate 130 is between 7.5mm and 12mm, and its The preferred value may be 7.5mm to 8.5mm and the width may be between 7.5mm and 12mm, and the preferred value may be 7.5mm to 8.5mm, but not limited thereto. As for the thickness of the outer frame 131 is between 0.2 mm and 0.4 mm, and the preferred value is 0.3 mm, but it is not limited thereto.

In still other embodiments, the thickness of the piezoelectric ceramic plate 133 is between 0.05 mm and 0.3 mm, and the preferred value is 0.10 mm, and the piezoelectric ceramic plate 133 has a size not larger than the suspension plate 130. The length of the side is between 7.5mm and 12mm, and the preferred value can be 7.5mm to 8.5mm, the width can be between 7.5mm and 12mm, and the preferred value can be 7.5mm to 8.5mm, and the preferred length and width ratio is between 0.625 and 1.6 times, but it is not limited to this. In still other embodiments, the side length of the piezoelectric ceramic plate 133 may be shorter than the side length of the suspension plate 130 and is also designed as a square plate-like structure corresponding to the suspension plate 130, but is not limited thereto.

In the related embodiment of the miniature pneumatic power device 1 of this case, the reason why the piezoelectric actuator 13 uses a square suspension plate 130 is that compared to a circular suspension plate (as shown in (j) of FIG. 4A) l) The design of the circular suspension plate j0). The structure of the square suspension plate 130 obviously has the advantage of saving power. The comparison of power consumption is shown in Table 1 below:

Table I

Therefore, it is known from the above table of the experiment that the piezoelectric actuator 13 with a square suspension plate 130 with a side length (8mm to 10mm) is smaller than the diameter of the circular suspension plate j0 (8mm to 10mm). Piezoelectric actuators save power. The above comparison data of power consumption obtained through experiments can be inferred as: due to the capacitive load operating at the resonance frequency, the power consumption will increase with the increase of frequency, and the size of the side will be square. The resonance frequency of the designed suspension plate 130 is obviously lower than that of the same circular suspension plate j0, so its relative power consumption is also significantly lower, that is, the suspension plate 130 of the square design used in this case is compared with the circular suspension plate j0. Design has power saving advantages, especially for wearable devices. Saving power is a very important design focus. In any case, the power saving effect of the above-mentioned suspended board with square design is obtained through experiments, and cannot be directly derived from theoretical formulas. The speculation of its power saving reason is only used as a reference for the rationality of the experiment.

Please refer to FIGS. 4A, 4B, and 4C, which are schematic diagrams of various implementation modes of the piezoelectric actuator. As shown in the figure, it can be seen that the suspension plate 130, the outer frame 131, and the bracket 132 of the piezoelectric actuator 13 can have various types, and can have at least (a) to (l) and the like shown in FIG. 4A. Various aspects, for example, (a) the outer frame a1 and the suspension plate a0 have a square structure, and the two are connected by multiple brackets a2, for example, 8 but not This is a limitation, and a gap a3 is provided between the bracket a2, the suspension plate a0, and the outer frame a1 for gas circulation. In another (i) aspect, the outer frame i1 and the suspension plate i0 are also square in structure, but only two brackets i2 are used to connect them; in addition, there are further related technologies, such as 4B, As shown in Fig. 4C, the suspension plate of the piezoelectric actuator 13 can also have various forms such as (m) ~ (r) shown in Fig. 4B and (s) ~ (x) shown in Fig. 4C. In these aspects, the suspension plate 130 and the outer frame 131 have a square structure. For example, (m) the outer frame m1 and the suspension plate m0 are both square structures, and the two are connected by a plurality of brackets m2, for example: 4, but not limited to this, A gap m3 is provided between the bracket m2, the suspension plate m0, and the outer frame m1 for fluid circulation. And in this embodiment, the bracket m2 connected between the outer frame m1 and the suspension plate m0 may be, but not limited to, a plate connecting portion m2, and the plate connecting portion m2 has two end portions m2 'and m2 ", One end portion m2 'is connected to the outer frame m1, and the other end portion m2 "is connected to the suspension plate m0, and the two end portions m2' and m2" are corresponding to each other and are disposed on the same axis. Yu (n In the aspect, it also has an outer frame n1, a suspension plate n0, and a bracket n2 connected between the outer frame n1, the suspension plate n0, and a gap n3 for fluid flow. The bracket n2 may also be, but not limited to, one. The plate connection portion n2, the plate connection portion n2 also has two end portions n2 'and n2 ", and the end portion n2' is connected to the outer frame n1, and the other end portion n2" is connected to the floating plate n0, but in this embodiment In the embodiment, the plate connection portion n2 is connected to the outer frame n1 and the suspension plate n0 at an oblique angle between 0 and 45 degrees. In other words, the two end portions n2 ′ and n2 ″ are not disposed on the same horizontal axis. It is a setting relationship for mutual dislocation. In the aspect (o), the structures such as the outer frame o1, the suspension plate o0 and the bracket o2 connected between the outer frame o1, the suspension plate o0, and the gap o3 for fluid circulation are similar to the foregoing embodiments, wherein The design type of the plate connection portion o2 as a bracket is slightly different from the (m) mode. However, in this mode, the two end portions o2 'and o2 "of the plate connection portion o2 are still corresponding to each other and are provided. On the same axis.

Also in the (p) aspect, it also has a structure such as an outer frame p1, a suspension plate p0, a bracket p2 connected between the outer frame p1, the suspension plate p0, and a gap p3 for fluid flow. Among them, the plate connection part p2 as a bracket further has a structure such as a suspension plate connection part p20, a beam part p21, and an outer frame connection part p22, wherein the beam part p21 is disposed in a gap p3 between the suspension plate p0 and the outer frame p1, and The setting direction is parallel to the outer frame p1 and the suspension plate p0, and the suspension plate connection portion p20 is connected between the beam portion p21 and the suspension plate p0, and the outer frame connection portion p22 connects the beam portion p21 and the outer frame p1. And the suspension board connection part p20 and the outer frame connection part p22 also correspond to each other and are disposed on the same axis.

In the aspect (q), the structures such as the outer frame q1, the suspension plate q0, and the bracket q2 connected between the outer frame q1, the suspension plate q0, and the gap q3 for fluid circulation are all the same as the aforementioned (m), (o ) The appearance is similar, in which the design of the plate connection part q2, which is only a bracket, is slightly different from the (m), (o) appearance. In this aspect, the suspension plate q0 is a square shape, and Each side thereof has two plate connecting portions q2 connected to the outer frame q1, and both end portions q2 'and q2 "of each plate connecting portion q2 are also corresponding to each other and are disposed on the same axis. However, (r In the aspect, it also has components such as an outer frame r1, a suspended plate r0, a bracket r2, and a gap r3, and the bracket r2 may also be, but not limited to, a plate connecting portion r2. In this embodiment, the plate connecting portion r2 It is a V-shaped structure. In other words, the plate connection portion r2 is also connected to the outer frame r1 and the suspension plate r0 at an inclined angle between 0 and 45 degrees. Therefore, each plate connection portion r2 has one end portion r2 ”and The suspension plate r0 is connected and has two end portions r2 'connected to the outer frame r1, which means that the two end portions b2' and the end portions b2 "are not disposed on the same horizontal axis.

Continuing as shown in Figure 4C, the appearance types of these (s) ~ (x) appearances roughly correspond to the shapes of (m) ~ (r) shown in Figure 4B, except for these (s ) ~ (x), each of the levitation plates 130 of the piezoelectric actuator 13 is provided with a convex portion 130c, that is, structures such as s4, t4, u4, v4, w4, and x4 as shown in the figure. Regardless of the state of (m) ~ (r) or the state of (s) ~ (x), the suspension plate 130 is designed as a square shape to achieve the aforementioned low power consumption effect; It can be seen that whether the suspension plate 130 is a flat flat structure with two sides or a stepped structure with convex portions on one surface, it is within the protection scope of this case and is connected between the suspension plate 130 and the outer frame 131. The shape and quantity of the bracket 132 can also be changed according to the actual application situation, and is not limited to the appearance shown in this case. As mentioned before, the suspension plate 130, the outer frame 131, and the bracket 132 can be a one-piece structure, but not limited to this. As for the manufacturing method, it can be processed by traditional processing, or yellow light etching, or laser. Processing, or electroforming, or electrical discharge machining are not limited to this.

In addition, please refer to FIG. 1A and FIG. 2A continuously. In the micro fluid control device 1A, an insulating sheet 141, a conductive sheet 15, and another insulating sheet 142 are sequentially disposed under the piezoelectric actuator 13, respectively. And its shape substantially corresponds to the shape of the outer frame of the piezoelectric actuator 13. In some embodiments, the insulating sheets 141 and 142 are made of an insulative material, such as plastic, but not limited to this for insulating purposes. In other embodiments, the conductive sheet 15 is made of an insulating material. It is made of conductive material, such as metal, but it is not limited to it for electrical conduction. And, in this embodiment, a conductive pin 151 may be provided on the conductive sheet 15 for electrical conduction.

Please refer to FIG. 1A and FIGS. 5A to 5E at the same time, wherein FIGS. 5A to 5E are schematic diagrams of partial operation of the micro fluid control device 1A of the micro pneumatic power device shown in FIG. 1A. First, as shown in FIG. 5A, it can be seen that the micro fluid control device 1A is sequentially stacked by an air intake plate 11, a resonance sheet 12, a piezoelectric actuator 13, an insulating sheet 141, a conductive sheet 15, and another insulating sheet 142. In this embodiment, a material, such as conductive adhesive, is filled in the gap g0 between the periphery of the outer plate 131 of the resonance plate 12 and the piezoelectric actuator 13, but is not limited to this. The depth of the gap g0 can be maintained between the resonance sheet 12 and the convex portion 130 c of the suspension plate 130 of the piezoelectric actuator 13, so that the airflow can be guided to flow more quickly, and the convex portion 130 c of the suspension plate 130 and the resonance can be guided. The sheet 12 is kept at a proper distance to reduce contact interference with each other, so that noise generation can be reduced.

Please refer to FIGS. 5A to 5E. As shown in the figure, after the air intake plate 11, the resonance plate 12 and the piezoelectric actuator 13 are sequentially assembled correspondingly, the cavity 120 in the resonance plate 12 can be connected with it. The air inlet plates 11 on the upper side collectively form a cavity for converging gas, and a first cavity 121 is formed between the resonance plate 12 and the piezoelectric actuator 13 to temporarily store the gas, and the first cavity 121 It communicates with the cavity at the central recess 111 of the first surface 11b of the air inlet plate 11 through the hollow hole 120 in the resonance plate 12, and the sides of the first cavity 121 are supported by the brackets 132 of the piezoelectric actuator 13. A gap 135 therebetween communicates with the micro valve device 1B provided below.

When the miniature fluid control device 1A of the miniature pneumatic power device 1 is actuated, the piezoelectric actuator 13 is mainly actuated by a voltage, and the support 132 is used as a fulcrum to perform vertical reciprocating vibration. As shown in FIG. 5B, when the piezoelectric actuator 13 is vibrated downward by being actuated by a voltage, since the resonance plate 12 is a light and thin sheet structure, when the piezoelectric actuator 13 vibrates, The resonance plate 12 will also resonate and perform vertical reciprocating vibration, that is, the portion of the resonance plate 12 corresponding to the central recessed portion 111 of the air intake plate 11 will also be deformed by bending vibration, that is, the resonance plate 12 corresponds to the The part of the central recessed portion 111 of the air intake plate 11 is the movable portion 12 a of the resonance plate 12. When the piezoelectric actuator 13 bends and vibrates downward, the movable portion 12 a of the resonance plate 12 will be brought in by the fluid. And pushing and the vibration of the piezoelectric actuator 13, and as the piezoelectric actuator 13 bends and deforms downward, the gas enters through at least one air inlet hole 110 on the air inlet plate 11 and passes through its first At least one bus hole 112 of a surface 11b is collected at the central recess 111 of the center, and then flows downward into the first cavity 121 through the central hole 120 provided on the resonance plate 12 corresponding to the central recess 111, and thereafter Due to the vibration of the piezoelectric actuator 13, the resonance plate 12 will also resonate and vertical Reciprocating vibration, as shown in FIG. 5C, at this time, the movable portion 12a of the resonance plate 12 also vibrates downwards, and is attached to the convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13 to suspend. The space between the area other than the convex portion 130c of the plate 130 and the fixing chamber 12b on both sides of the resonance plate 12 will not be reduced, and the deformation of the resonance plate 12 will be used to compress the first chamber 121. Volume, and close the middle circulation space of the first chamber 121, so that the gas in it is pushed to flow to both sides, and then passes through the gap 135 between the brackets 132 of the piezoelectric actuator 13 and flows downward. As for the 5D figure, the movable portion 12a of the resonance plate 12 is deformed by bending vibration, and then returns to the initial position, and the subsequent piezoelectric actuator 13 is driven by the voltage to vibrate upward, so that the first chamber 121 is also squeezed. At this time, since the piezoelectric actuator 13 is lifted upward, the displacement of the lift may be d, so that the gas in the first chamber 121 will flow to both sides, and then the gas will be continuously driven from the air inlet plate. At least one air inlet hole 110 on 11 enters, and then flows into the cavity formed by the central recess 111, and as shown in FIG. 5E, the resonance plate 12 is resonated upward by the vibration of the piezoelectric actuator 13 lifted upward, The movable portion 12a of the resonance plate 12 is also brought to an upward position, so that the gas in the central recessed portion 111 flows into the first chamber 121 through the central hole 120 of the resonance plate 12, and passes through the support 132 of the piezoelectric actuator 13 The interspace 135 flows downward through the outflow micro fluid control device 1A. From this aspect, it can be seen that when the resonance plate 12 performs vertical reciprocating vibration, the gap g0 between the resonance plate 12 and the piezoelectric actuator 13 can be used to increase the maximum distance of its vertical displacement. In other words, the two Setting a gap g0 between the structures can cause the resonance plate 12 to generate a larger up and down displacement at resonance, and the vibration displacement of the piezoelectric actuator is d, and the difference between the piezoelectric actuator and the gap g0 is x, that is, x = g0-d, tested when x ≦ 0um, it is noisy; when x = 1 to 5um, the maximum output pressure of micro pneumatic power unit 1 can reach 350mmHg; when x = 5 to 10um, the maximum output pressure of micro pneumatic power unit 1 It can reach 250mmHg; when x = 10 to 15um, the maximum output air pressure of the miniature pneumatic power unit 1 can reach 150mmHg, and the corresponding relationship between the values is shown in Table 2 below. The above values are between an operating frequency of 17K to 20K and an operating voltage of ± 10V to ± 20V. In this way, a pressure gradient is generated in the design of the flow channel through this miniature fluid control device 1A, so that the gas flows at high speed, and the gas is transmitted from the suction end to the discharge end through the difference in the impedance of the flow path, and there is pressure at the discharge end. In this state, there is still the ability to continuously push out the gas and achieve the effect of silence. (Table II)

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonance plate 12 may be the same as the vibration frequency of the piezoelectric actuator 13, that is, both may be upward or downward at the same time, which may be based on the actual implementation situation. However, the change of Ren Shi is not limited to the operation mode shown in this embodiment.

Please refer to FIG. 1A, FIG. 2A, FIG. 6A, and FIG. 6B at the same time, where FIG. 6A is a schematic diagram of the pressure collecting action of the gas collecting plate 16 and the micro valve device 1B of the miniature pneumatic power device shown in FIG. 1A Fig. 6B is a schematic diagram of the pressure relief operation of the gas collecting plate 16 and the micro valve device 1B of the micro pneumatic power device shown in Fig. 1A. As shown in Figures 1A and 6A, the miniature valve device 1B of the miniature pneumatic power device 1 in this case is sequentially stacked by a valve plate 17 and an outlet plate 18, and is matched with a gas collection plate 16 of a miniature fluid control device 1A To work.

In this embodiment, the gas collecting plate 16 has a surface 160 and a reference surface 161. The surface 160 is recessed to form a gas collecting chamber 162 for the piezoelectric actuator 13 to be disposed therein, which is controlled by a microfluid. The gas transmitted downward by the device 1A is temporarily accumulated in the gas collecting chamber 162, and there are a plurality of through holes in the gas collecting plate 16, including a first through hole 163 and a second through hole 164. One end of the through-hole 163 and the second through-hole 164 is in communication with the gas collection chamber 162, and the other end is respectively connected to the first pressure relief chamber 165 and the first outlet chamber 166 on the reference surface 161 of the gas collection plate 16. Connected. And, a convex structure 167 is further added at the first exit chamber 166, for example, it may be, but not limited to, a cylindrical structure, and the height of the convex structure 167 is higher than the reference surface 161 of the gas collecting plate 16, The height of the convex structure 167 is between 0.3 mm and 0.55 mm, and the preferred value is 0.4 mm.

The outlet plate 18 includes a pressure relief through hole 181, an outlet through hole 182, a reference surface 180, and a second surface 187. The pressure relief through hole 181 and the outlet through hole 182 pass through the reference surface 180 of the outlet plate 18 and A second surface 187, a second pressure relief chamber 183 and a second outlet chamber 184 are recessed on the reference surface 180, and the pressure relief through hole 181 is provided in the center portion of the second pressure relief chamber 183, and There is also a communication channel 185 between the pressure relief chamber 183 and the second outlet chamber 184 for gas circulation, and one end of the outlet through-hole 182 is in communication with the second outlet chamber 184 and the other end is in communication with the outlet. 19 is connected. In this embodiment, the outlet 19 can be connected to a device (not shown), such as a press, but not limited thereto.

The valve plate 17 has a valve hole 170 and a plurality of positioning holes 171. The thickness of the valve plate 17 is between 0.1 mm and 0.3 mm, and the preferred value is 0.2 mm.

When the valve plate 17 is positioned and assembled between the gas collecting plate 16 and the outlet plate 18, the pressure relief through hole 181 of the outlet plate 18 corresponds to the first through hole 163 and the second pressure relief cavity of the gas collecting plate 16. The chamber 183 corresponds to the first pressure-relief chamber 165 of the gas collecting plate 16, the second outlet chamber 184 corresponds to the first outlet chamber 166 of the gas collecting plate 16, and the valve plate 17 is provided in the gas collecting plate Between the plate 16 and the outlet plate 18, the first pressure relief chamber 165 is blocked from communicating with the second pressure relief chamber 183, and the valve hole 170 of the valve plate 17 is provided in the second through hole 164 and the outlet through hole. 182, and the valve hole 170 is correspondingly arranged in the convex structure 167 of the first outlet chamber 166 of the gas collecting plate 16, so that the single valve hole 170 is designed so that the gas can be reached according to its pressure difference. The purpose of one-way flow.

In addition, one end of the pressure-relief through hole 181 of the outlet plate 18 can be further provided with a protruding convex structure 181a. For example, the convex structure 181a can be, but not limited to, a cylindrical structure. The height of the convex structure 181a is 0.3 mm to 0.55mm, and its preferred value is 0.4mm, and the convex structure 181a is improved to increase its height. The height of the convex structure 181a is higher than the reference surface 180 of the outlet plate 18 to strengthen the valve. The sheet 17 quickly abuts and closes the pressure relief through-hole 181, and achieves the effect of a pre-force abutment and complete sealing; and the outlet plate 18 further has at least one limiting structure 188, the height of the limiting structure 188 is 0.32mm, Taking this embodiment as an example, the position-limiting structure 188 is disposed in the second pressure-relief chamber 183 and is a ring-shaped block structure, and is not limited thereto. It is mainly used when the micro-valve device 1B performs pressure-gathering operation. At this time, it is used to support the valve sheet 17 to prevent the valve sheet 17 from collapsing, and the valve sheet 17 can be opened or closed more quickly.

When the miniature valve device 1B is actuated under pressure, it is mainly shown in FIG. 6A, which can respond to the pressure provided by the gas transmitted downward from the miniature fluid control device 1A, or when the external atmospheric pressure is greater than the outlet pressure. 19 When the internal pressure of the connected device (not shown), the gas will flow from the gas collecting chamber 162 in the gas collecting plate 16 of the micro fluid control device 1A through the first through hole 163 and the second through hole 164, respectively. It flows down into the first pressure-relief chamber 165 and the first outlet chamber 166. At this time, the downward pressure of the gas causes the flexible valve sheet 17 to bend downward to deform and thereby make the volume of the first pressure-relief chamber 165 down. It is enlarged and corresponds to the first through hole 163 and is flatly pressed down and abuts against the end of the pressure relief through hole 181, so that the pressure relief through hole 181 of the outlet plate 18 can be closed, so it is in the second pressure relief chamber 183 The gas inside does not flow out from the pressure relief through hole 181. Of course, in this embodiment, a design of a convex structure 181a can be added to the end of the pressure relief through hole 181 to strengthen the valve plate 17 to quickly abut against and close the pressure relief through hole 181, and to achieve a pre-pressure resistance fully sealed At the same time, the limiting structure 188 provided around the pressure-relief through hole 181 is also supported through the ring to help support the valve plate 17 so that it will not collapse. On the other hand, since the gas system flows downward from the second through hole 164 into the first exit chamber 166, and the valve sheet 17 corresponding to the first exit chamber 166 also bends downward, so that it corresponds to The valve hole 170 is opened downward, and the gas can flow from the first outlet chamber 166 into the second outlet chamber 184 through the valve hole 170, and flow from the outlet through hole 182 to the outlet 19 and the device connected to the outlet 19 (Not shown), thereby performing pressure collection operation on the device.

Please refer to FIG. 6B continuously. When the micro valve device 1B is depressurized, it can regulate the gas transmission amount of the micro fluid control device 1A so that the gas is no longer input into the gas collection chamber 162, or when it is connected to the outlet. 19 When the internal pressure of the connected device (not shown) is greater than the external atmospheric pressure, the miniature valve device 1B can be depressurized. At this time, the gas is input into the second outlet chamber 184 from the outlet through-hole 182 connected to the outlet 19, so that the volume of the second outlet chamber 184 expands, and then the flexible valve sheet 17 is bent and deformed upward, and Flatly affix upwards and abut against the gas collecting plate 16, so the valve hole 170 of the valve sheet 17 will be closed due to abutting against the gas collecting plate 16. Of course, in this embodiment, the design of a convex structure 167 can be added to the first exit chamber 166, so that the flexible valve plate 17 can be bent upward to change and quickly resist, so that the valve hole 170 is more favorable to achieve a predetermined The force resistance fully adheres to the closed state of the seal. Therefore, when in the initial state, the valve hole 170 of the valve plate 17 will be closed by abutting against the convex structure 167, and the inside of the second exit chamber 184 will be closed. The gas will not flow back into the first outlet chamber 166 to achieve better prevention of gas leakage. And, the gas system in the second outlet chamber 184 can flow into the second pressure relief chamber 183 through the communication channel 185, thereby expanding the volume of the second pressure relief chamber 183 and corresponding to the second pressure relief chamber 183. The valve plate 17 of the pressure chamber 183 is also bent upward and deformed. At this time, because the valve plate 17 is not closed against the end of the pressure relief through hole 181, the pressure relief through hole 181 is in an open state, that is, the second pressure relief chamber The gas in the chamber 183 can flow outward through the pressure relief through hole 181 for pressure relief operation. Of course, in this embodiment, the convex valve structure 181a added at the end of the pressure relief through hole 181 or the limiting structure 188 provided in the second pressure relief chamber 183 can be used to bend the flexible valve plate 17 upward. The shape change is fast, which is more conducive to the state of closing the pressure relief through hole 181. In this way, the pressure in the device (not shown) connected to the outlet 19 can be exhausted and reduced by the one-way pressure relief operation, or the pressure relief operation can be completed by completely exhausting.

Please refer to FIG. 1A, FIG. 2A, and FIG. 7A to FIG. 7E at the same time, where FIGS. 7A to 7E are schematic diagrams of the pressure collecting action of the miniature pneumatic power device shown in FIG. 1A. As shown in FIG. 7A, the miniature pneumatic power device 1 is a combination of a miniature fluid control device 1A and a miniature valve device 1B. The miniature fluid control device 1A is, as described above, sequentially composed of an air inlet plate 11 and a resonance plate 12 , Piezoelectric actuator 13, insulating sheet 141, conductive sheet 15, another insulating sheet 142, and gas collecting plate 16 are stacked and assembled, and are arranged between resonance sheet 12 and piezoelectric actuator 13. A gap g0 has a first chamber 121 between the resonance plate 12 and the piezoelectric actuator 13, and the micro valve device 1B is similarly stacked and assembled in sequence by the valve plate 17 and the outlet plate 18 and the like. It is formed on the gas collecting plate 16 of the fluid control device 1A, and there is a gas collecting chamber 162 between the gas collecting plate 16 and the piezoelectric actuator 13 of the micro fluid control device 1A, and the reference surface of the gas collecting plate 16 161 further recesses a first pressure relief chamber 165 and a first outlet chamber 166, and a reference surface 180 of the outlet plate 18 is further recessed a second pressure relief chamber 183 and a second outlet chamber 184. In this embodiment, Medium, with the operating frequency of the miniature pneumatic power device between 27K to 29.5K, the operation Pressure ± 10V to ± 16V, and by a plurality of such different pressure chambers with a piezoelectric actuator 13 is driven and the resonance of the sheet 12, the vibration of the valve sheet 17, so that the gas pressure set down transmission.

As shown in FIG. 7B, when the piezoelectric actuator 13 of the micro-fluid control device 1A is vibrated downward by being actuated by a voltage, the gas will enter the micro-fluid control device 1A through the air inlet hole 110 on the air inlet plate 11 And is collected at the central recess 111 through at least one busbar hole 112, and then flows down into the first cavity 121 through the hollow hole 120 on the resonance sheet 12. Thereafter, as shown in FIG. 7C, due to the resonance effect of the vibration of the piezoelectric actuator 13, the resonance plate 12 will also perform reciprocating vibration, that is, it vibrates downward and approaches the piezoelectric actuator. The convex portion 130c of the suspension plate 130 of 13 is deformed by the resonance plate 12 to increase the volume of the cavity at the central recess 111 of the air intake plate 11 and compress the volume of the first cavity 121 at the same time. The gas in the first chamber 121 is pushed to flow to both sides, and then passes through the gap 135 between the brackets 132 of the piezoelectric actuator 13 and flows downward to flow to the micro fluid control device 1A and the micro valve device. The gas collection chambers 162 between 1B, and then flow through the first through holes 163 and the second through holes 164 communicating with the gas collection chambers 162 to the first pressure relief chamber 165 and the first outlet respectively. In the oral cavity 166, it can be seen from this embodiment that when the resonance plate 12 performs vertical reciprocating vibration, the gap g0 between the resonance plate 12 and the piezoelectric actuator 13 can be used to increase the maximum distance of its vertical displacement. In other words, In other words, setting the gap g0 between the two structures can cause the resonance plate 12 to generate a larger amplitude when the resonance occurs. The upper and lower displacement.

Then, as shown in FIG. 7D, since the resonance piece 12 of the micro fluid control device 1A returns to the initial position, the piezoelectric actuator 13 is driven by the voltage to vibrate upward, and the vibration displacement of the piezoelectric actuator is Is d, and the difference from the gap g0 is x, that is, x = g0-d. After testing, when x = 1 to 5um, the operating frequency is 27k to 29.5KHz, and the operating voltage is ± 10V to ± 16V, the maximum value is The output air pressure can reach at least 300mmHg, but it is not limited to this. The volume of the first chamber 121 is also squeezed in this way, so that the gas in the first chamber 121 flows to both sides, and is continuously input into the gas collection chamber through the gap 135 between the brackets 132 of the piezoelectric actuator 13. 162. In the first pressure relief chamber 165 and the first outlet chamber 166, this further increases the pressure in the first pressure relief chamber 165 and the first outlet chamber 166, thereby pushing the flexible valve sheet 17 When bending deformation occurs downward, in the second pressure relief chamber 183, the valve plate 17 is flat downward and abuts against the convex structure 181a at the end of the pressure relief through hole 181, thereby closing the pressure relief through hole 181. In the second outlet chamber 184, the valve hole 170 on the valve sheet 17 corresponding to the outlet through hole 182 is opened downward, so that the gas in the second outlet chamber 184 can be transmitted downward from the outlet through hole 182 to the outlet 19 And any device (not shown) connected to the outlet 19, so as to achieve the purpose of collecting pressure. Finally, as shown in FIG. 7E, when the resonance plate 12 of the microfluidic control device 1A moves upward in resonance, the gas in the central recess 111 of the first surface 11b of the air inlet plate 11 can be removed by the hollow hole 120 of the resonance plate 12. It flows into the first chamber 121 and is continuously transmitted downward to the gas collecting plate 16 through the gap 135 between the brackets 132 of the piezoelectric actuator 13. Since its gas pressure system continues to increase downward, the gas Will continue to flow through the gas collection chamber 162, the second through hole 164, the first outlet chamber 166, the second outlet chamber 184, and the outlet through hole 182 to the outlet 19 and any device connected to the outlet 19, This pressure collecting operation can be driven by the external atmospheric pressure and the pressure difference in the device, but it is not limited to this.

When the internal pressure of the device (not shown) connected to the outlet 19 is greater than the external pressure, the miniature pneumatic power unit 1 can perform pressure reduction or pressure relief operations as shown in FIG. 8. The operation of pressure relief is mainly as described above. By regulating the gas transmission volume of the micro fluid control device 1A, the gas is no longer input into the gas collection chamber 162. At this time, the gas will come from the outlet connected to the outlet 19 The through-hole 182 is input into the second exit chamber 184, so that the volume of the second exit chamber 184 expands, thereby urging the flexible valve sheet 17 to bend upward and deform, and flatly upwardly press against the first exit chamber. 166 on the convex part structure 167, so that the valve hole 170 of the valve sheet 17 is closed, that is, the gas in the second outlet chamber 184 will not flow back into the first outlet chamber 166; and the second outlet chamber 184 The gas system can flow into the second pressure-relief chamber 183 through the communication channel 185, and then the pressure-relief through hole 181 is used for pressure-relief operation; thus, the one-way gas transmission operation of the miniature valve structure 1B will The gas in the device connected to the outlet 19 is exhausted and reduced in pressure, or is completely A relief to complete the job.

From the above description, it can be known that with the miniaturization of the miniature pneumatic power device 1, the performance changes of the miniature pneumatic power device 1 are shown in Table 3 below:

Table three

It can be seen from this table that after sampling 25 micro-pneumatic power device 1 products in actual experiments, the conclusion obtained from the experiment is: by reducing the average size of the side of the square suspension plate 130 from 14 mm to 7.5 mm, It has been found that as the dimensions of these sides decrease, the functions of yield and maximum output air pressure are gradually improved, and the resulting preferred size is 7.5mm to 8.5mm. It is further found that the preferred size is particularly at its operating frequency at Between 27K and 29.5KHz , the function that can increase the maximum output pressure reaches at least 300mmHg. The reasonable speculation of the above phenomenon seems to be that when the side length of the suspension plate 130 is reduced, the suspension plate 130 reduces its horizontal deformation when it is vertically vibrated, so the kinetic energy in the vertical direction can be effectively used, and the side length is reduced. It can reduce the vertical error value during assembly, thereby reducing the collision between the suspension plate 130 and the resonance plate 12 or other assembly elements. This involves maintaining a certain distance between the suspension plate 130 and the resonance plate 12, so the yield is good. It can increase and increase its maximum output pressure at the same time. In addition, when the size of the suspension plate 130 of the piezoelectric actuator 13 is reduced, the piezoelectric actuator 13 can also be made smaller, and when it is not easy to tilt when vibrating, the volume of the internal gas flow path is reduced, which is beneficial to Pushed or compressed by air, it can improve the performance and reduce the overall component size simultaneously. Furthermore, as mentioned above, for the piezoelectric actuator 13 equipped with a large-sized suspension plate 130 and a piezoelectric ceramic plate 133, the suspension plate 130 has poor rigidity, and is easily distorted and deformed during vibration, making it easy. Collision interference with the resonance plate 12 or other assembly components, so it generates a high proportion of noise, and the noise problem is also one of the causes of product failure, so the defective rate of the large-scale suspension plate 130 and piezoelectric ceramic plate 133 High, therefore, when the size of the suspension plate 130 and the piezoelectric ceramic plate 133 is reduced, in addition to improving performance and reducing noise, the product failure rate can also be reduced.

However, in any case, the above-mentioned functions of increasing the yield and increasing the maximum output pressure due to the reduction of the side length of the suspension plate 130 are obtained through experiments and cannot be directly deduced by theoretical formulas. The speculation is only used as a reference for the rationality of the experiment.

Of course, in order to reduce the thickness of the miniature pneumatic power device 1 in this case, the total thickness of the miniature fluid control device 1A assembled with the miniature valve device 1B is between 2mm and 6mm, thereby making the miniature gas power device 1 portable and comfortable. It can be widely used in medical equipment and related equipment.

In summary, the micro-pneumatic power device provided in this case is mainly connected with the micro fluid control device and the micro valve device, so that the gas enters from the air inlet of the micro fluid control device and is actuated by piezoelectricity. The action of the device causes the gas to generate a pressure gradient in the designed flow channel and pressure chamber, so that the gas flows at high speed and is transferred to the micro valve device, and then through the one-way valve design of the micro valve device, the gas is unidirectional Flow, which can accumulate pressure in any device connected to the outlet; and when pressure reduction or pressure relief is required, the transmission volume of the micro fluid control device is regulated, and gas can be transmitted from the device connected to the outlet to the micro The second outlet chamber of the valve device is transmitted to the second pressure-relief chamber by the communication channel, and then flows out from the pressure-relief through hole, so as to achieve rapid transmission of gas and at the same time achieve the effect of silence In addition, the overall volume and thickness of the miniature gas power device can be reduced, and the miniature gas power device can be portable and comfortable. Used in medical equipment and related equipment. Therefore, the miniature gas power plant in this case has great industrial use value, and applied for it in accordance with the law.

Even though the present invention has been described in detail in the above embodiments and can be modified in various ways by those skilled in the art, it is not inferior to those intended to be protected by the scope of the attached patent.

1‧‧‧ Miniature Pneumatic Power Unit

1A‧‧‧Miniature fluid control device

1B‧‧‧Miniature valve device

1a‧‧‧shell

10‧‧‧ base

11‧‧‧Air intake plate

11a‧‧‧Second surface of air inlet plate

11b‧‧‧ the first surface of the air intake plate

110‧‧‧air inlet

111‧‧‧ Center recess

112‧‧‧ Bus hole

12‧‧‧ Resonator

12a‧‧‧movable part

12b‧‧‧Fixed section

120‧‧‧ Hollow

121‧‧‧First Chamber

13‧‧‧ Piezo actuator

130‧‧‧ suspension board

130a‧‧‧Second surface of suspension board

130b‧‧‧ the first surface of the suspended plate

130c‧‧‧ convex

130d‧‧‧ Center

130e‧‧‧outer

131‧‧‧ frame

131a‧‧‧The second surface of the frame

131b‧‧‧ the first surface of the frame

132‧‧‧ Bracket

132a‧‧‧ The second surface of the bracket

132b‧‧‧ the first surface of the bracket

133‧‧‧Piezoelectric ceramic plate

134, 151‧‧‧ conductive pins

135‧‧‧Gap

141, 142‧‧‧ insulating sheet

15‧‧‧Conductive sheet

16‧‧‧Gas collecting plate

16a‧‧‧accommodation space

160‧‧‧ surface

161‧‧‧ datum surface

162‧‧‧Gas collecting chamber

163‧‧‧The first through hole

164‧‧‧second through hole

165‧‧‧The first pressure relief chamber

166‧‧‧First Exit Room

167, 181a‧‧‧ convex structure

168‧‧‧ side wall

17‧‧‧Valve Disc

170‧‧‧Valve hole

171‧‧‧ positioning holes

18‧‧‧ export board

180‧‧‧ datum surface

181‧‧‧Pressure Relief Through Hole

182‧‧‧Exit through hole

183‧‧‧Second pressure relief chamber

184‧‧‧Second Outlet Room

185‧‧‧Connecting runner

187‧‧‧Second surface

188‧‧‧ limit structure

19‧‧‧ export

g0‧‧‧clearance

(a) ~ (x) ‧‧‧Different implementations of piezoelectric actuators

a0, i0, j0, m0, n0, o0, p0, q0, r0‧‧‧

a1, i1, m1, n1, o1, p1, q1, r1‧‧‧

a2, i2, m2, n2, o2, p2, q2, r2‧‧‧ bracket, board connection

a3, m3, n3, o3, p3, q3, r3

d‧‧‧Vibration displacement of piezoelectric actuator

s4, t4, u4, v4, w4, x4‧‧‧ convex

m2 ’, n2’, o2 ’, q2’, r2’‧‧‧ brackets are connected to the ends of the frame

m2 ”, n2”, o2 ”, q2”, r2 ”‧‧‧ brackets are connected to the ends of the suspension board

FIG. 1A is a schematic exploded front view of a miniature pneumatic power device according to a preferred embodiment of the present invention. Figure 1B is a schematic diagram of the front assembly structure of the miniature pneumatic power device shown in Figure 1A. Fig. 2A is a schematic exploded view of the back of the miniature pneumatic power device shown in Fig. 1A. Fig. 2B is a schematic diagram of the rear assembly structure of the miniature pneumatic power device shown in Fig. 1A. Fig. 3A is a schematic diagram of the front assembly structure of the piezoelectric actuator of the miniature pneumatic power device shown in Fig. 1A. FIG. 3B is a schematic diagram of the back assembly structure of the piezoelectric actuator of the miniature pneumatic power device shown in FIG. 1A. Fig. 3C is a schematic cross-sectional structure diagram of the piezoelectric actuator of the miniature pneumatic power device shown in Fig. 1A. 4A to 4C are schematic diagrams of various implementation modes of the piezoelectric actuator. FIG. 5A to FIG. 5E are partial operation schematic diagrams of the micro fluid control device of the micro pneumatic power device shown in FIG. 1A. Fig. 6A is a schematic diagram of the pressure collecting action of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in Fig. 1A. Fig. 6B is a schematic diagram of the pressure relief action of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in Fig. 1A. Figures 7A to 7E are schematic diagrams of the pressure collecting action of the miniature pneumatic power device shown in Figure 1A. Fig. 8 is a schematic diagram of the pressure reduction or pressure relief action of the miniature pneumatic power device shown in Fig. 1A.

Claims (33)

A miniature pneumatic power device includes: a miniature fluid control device including: an air inlet plate having at least one air inlet hole, at least one bus hole, and a central recess forming a bus cavity, the at least one air inlet For introducing gas, the busbar hole corresponds to the air inlet hole, and guides the gas of the air inlet hole to the confluence chamber formed by the central recess; a resonance plate with a hollow hole corresponding to the air inlet plate The confluence chamber; a piezoelectric actuator having: a suspension plate having a length between 7.5 mm and 12 mm, a width between 7.5 mm and 12 mm, and between 0.1 mm and 0.4 thickness between mm; an outer frame with at least one bracket connected between the suspension plate and the outer frame; and a piezoelectric ceramic plate attached to a first surface of the suspension plate, and the pressure The electric ceramic plate has a side length not greater than the side length of the suspension plate, a length between 7.5mm and 12mm, a width between 7.5mm and 12mm, and a thickness between 0.05mm and 0.3mm. The ratio between the length and the width is between 0.625 and 1.6 times; The gas plate has a first through-hole, a second through-hole, a first pressure-relieving chamber and a first outlet cavity, and has a reference surface. The first outlet cavity has a convex structure. The height of the convex structure is higher than the reference surface of the gas collecting plate, the first through hole is in communication with the first pressure relief chamber, and the second through hole is in communication with the first outlet chamber; The air-gathering plate, the piezoelectric actuator, the resonance plate and the air intake plate are sequentially positioned correspondingly in an overlapping arrangement, and a gap is formed between the resonance plate and the piezoelectric actuator to form a first A cavity, when the piezoelectric actuator is driven, gas is introduced through the at least one air inlet hole of the air inlet plate, is collected into the central recessed portion through the at least one bus hole, and then flows through the resonance plate. A hollow hole to enter the first chamber, and then transmitted from a gap between the at least one bracket of the piezoelectric actuator to the gas collecting plate to continuously push out the gas; and a micro valve device including : A valve plate with a valve hole, the valve plate has a value between 0.1mm and 0.3mm Thickness, wherein the convex structure of the gas collecting plate is provided corresponding to the valve hole of the valve plate, which is beneficial to form a pre-force effect against the valve hole and completely close the valve hole; and an outlet plate with a relief A pressure through hole, an outlet through hole, a second pressure relief chamber, a second outlet cavity, and at least one limiting structure, and has a reference surface, the reference surface is recessed with a second pressure relief chamber and a A second outlet chamber, the pressure relief through hole is provided at the center of the second pressure relief chamber, and an end portion of the pressure relief through hole has a convex structure, and the height of the convex structure is higher than the reference of the outlet plate On the surface, the exit through-hole is in communication with the second exit chamber, and the at least one limiting structure is disposed in the second pressure-relief chamber, and the height of the limiting structure is between 0.2 mm and 0.5 mm, and There is a communication flow path between the second pressure-relief chamber and the second outlet chamber; wherein the valve plate and the outlet plate are sequentially stacked correspondingly and positioned on the gas collecting plate of the micro fluid control device. Above, the pressure relief through hole of the outlet plate corresponds to the first of the gas collecting plate Perforated, the second pressure relief chamber of the outlet plate corresponds to the first pressure relief chamber of the gas collection plate, and the second outlet chamber of the outlet plate corresponds to the first outlet cavity of the gas collection plate The valve plate is disposed between the gas collecting plate and the outlet plate to block the communication between the first pressure relief chamber and the second pressure relief chamber, and the valve hole of the valve plate is correspondingly disposed in the second Between the through-hole and the outlet through-hole, when gas is transmitted downward from the micro fluid control device into the micro valve device, the first through-hole and the second through-hole of the gas collecting plate enter the first discharge through The pressure chamber and the first outlet chamber, and the valve plate of the micro valve device quickly abuts against the convex structure of the outlet plate, which is advantageous to form a pre-force action, completely closing the pressure relief through hole, and simultaneously introducing gas from the valve The valve hole of the sheet flows into the outlet through hole of the micro valve device for pressure collecting operation. When the pressure collected gas is larger than the introduced gas, the pressure collected gas flows from the outlet through hole to the second outlet chamber so that the The valve disc is displaced so that the valve hole of the valve disc abuts against the The gas collecting plate is closed, and the at least one limiting structure assists to support the valve plate to prevent the valve plate from collapsing. At the same time, the pressure-collecting gas can flow along the communication flow path to the second pressure relief chamber in the second outlet cavity. In the chamber, at this time, the valve sheet is displaced in the second pressure-relief chamber, and the pressure-collecting gas can flow out of the pressure-relief through hole for pressure-relief operation. The micro-pneumatic power device according to item 1 of the patent application scope, wherein one of the micro-pneumatic power devices has an operating frequency of 28 kHz and an operating voltage of ± 15 V, and its maximum output air pressure system reaches at least 300 mmHg. The micro-pneumatic power device according to item 1 of the patent application range, wherein the piezoelectric ceramic plate of the micro-fluid control device has a length of 7.5 mm to 8.5 mm, a width of 7.5 mm to 8.5 mm, and a thickness of 0.10 mm. The miniature pneumatic power device according to item 1 of the scope of the patent application, wherein the suspension plate of the miniature fluid control device has a length of 7.5 mm to 8.5 mm, a width of 7.5 mm to 8.5 mm, and a thickness of 0.27 mm. The miniature pneumatic power device according to item 1 of the scope of patent application, wherein the suspension plate of the micro fluid control device further includes a convex portion disposed on a second surface of the suspension plate, and the height is between 0.02mm and 0.08mm. The miniature pneumatic power device according to item 5 of the scope of patent application, wherein the height of the convex portion of the suspension plate is 0.03 mm. The miniature pneumatic power device according to item 5 of the scope of patent application, wherein the convex portion of the suspension plate is a circular convex structure with a diameter of 0.55 times the minimum side length of the suspension plate. The miniature pneumatic power device according to item 1 of the patent application range, wherein the air inlet plate of the miniature fluid control device is made of a stainless steel material and has a thickness between 0.4 mm and 0.6 mm. The micro-pneumatic power device according to item 8 of the scope of patent application, wherein the thickness of the air inlet plate is 0.5 mm. The miniature pneumatic power device according to item 1 of the patent application scope, wherein the resonance piece of the miniature fluid control device is made of a copper material and has a thickness between 0.03 mm and 0.08 mm. The micro-pneumatic power device according to item 10 of the scope of patent application, wherein the thickness of the resonance plate is 0.05 mm. The miniature pneumatic power device according to item 1 of the scope of patent application, wherein the miniature fluid control device further includes at least one insulating sheet and a conductive sheet, and the at least one insulating sheet and the conductive sheet are sequentially disposed on the piezoelectric actuator. Actuator. The miniature pneumatic power device according to item 1 of the scope of the patent application, wherein the outer frame of the piezoelectric actuator of the micro fluid control device is made of a stainless steel material and has a thickness between 0.2 mm and 0.4 mm. The micro-pneumatic power device according to item 13 of the application, wherein the thickness of the outer frame of the piezoelectric actuator is 0.3 mm. The micro-pneumatic power device according to item 1 of the patent application scope, wherein two ends of the bracket of the piezoelectric actuator of the micro-fluid control device are connected to the outer frame, and one end is connected to the suspension plate. The micro-pneumatic power device according to item 1 of the scope of patent application, wherein the thickness of the valve plate of the micro-valve device is 0.2 mm. The miniature pneumatic power device according to item 1 of the scope of patent application, wherein the height of the limiting structure of the miniature valve device is 0.32mm. The micro-pneumatic power device according to item 1 of the scope of patent application, wherein the convex structure of the first outlet chamber of the air collecting plate of the micro-fluid control device has a height between 0.3 mm and 0.55 mm . The micro-pneumatic power device according to item 18 of the scope of the patent application, wherein the height of the convex structure of the first outlet chamber is 0.4 mm. The miniature pneumatic power device according to item 1 of the scope of the patent application, wherein the convex structure of the pressure relief through hole of the outlet plate of the miniature valve device has a height between 0.3 mm and 0.55 mm. The miniature pneumatic power device according to item 20 of the scope of the patent application, wherein the height of the convex structure of the pressure relief through hole is 0.4 mm. The micro-pneumatic power device according to item 1 of the scope of patent application, wherein the gas collecting plate of the micro fluid control device further has a gas collecting chamber on a surface, and the gas collecting chamber and the first through hole and The second through hole communicates. The micro-pneumatic power device according to item 22 of the scope of the patent application, wherein the first pressure-relief chamber and the first outlet chamber of the gas collection plate of the micro-fluid control device are disposed in the gas-collection chamber opposite to the gas-collection chamber. On that reference surface. A miniature pneumatic power device includes: a miniature fluid control device including: an air intake plate; a resonance plate; a piezoelectric actuator; an air collection plate having at least two through holes and at least two chambers; wherein, The above-mentioned gas collecting plate, the piezoelectric actuator, the resonance plate, and the air intake plate are sequentially positioned in a correspondingly stacked arrangement, and a gap is formed between the resonance plate and the piezoelectric actuator to form a first cavity. Chamber, the piezoelectric actuator and the gas collecting plate form a gas collecting chamber. When the piezoelectric actuator is driven, gas enters through the air inlet plate and flows through the resonance plate to enter the first cavity. The chamber is then transmitted downward to the gas collection chamber; and a miniature valve device, including: a valve plate having a valve hole; and an outlet plate having at least two through holes, at least two chambers, and at least one stop structure The limiting structure is disposed in one of the at least two chambers, and the limiting structure is an annular block structure, so that a groove is formed inside the annular block structure; wherein, the valve piece described above And the outlet board sequentially positions the micros corresponding to the stacking settings. When the gas is transferred to the gas collecting chamber on the gas collecting plate of the fluid control device, the gas is transferred to the micro valve device, and the gas collecting plate and the outlet plate respectively have at least two through holes and at least two chambers. In order to respond to the unidirectional flow of gas, the valve hole of the valve sheet is opened or closed correspondingly, and the pressure collection or pressure relief operation is performed. The micro-pneumatic power device according to item 24 of the patent application, wherein the air inlet plate of the micro fluid control device has at least one air inlet hole, at least one bus hole, and a central recess, and the at least one air inlet hole is provided for Introducing gas, the busbar hole corresponds to the air inlet hole, and guides the gas of the air inlet hole to the central concave portion; the resonance plate has a hollow hole corresponding to the central concave portion of the air inlet plate; and the piezoelectric actuator The actuator has a suspension plate and an outer frame. The suspension plate and the outer frame are connected by at least one bracket, and a piezoelectric ceramic plate is attached to a first surface of the suspension plate. The miniature pneumatic power device according to item 24 of the scope of patent application, wherein the gas collecting plate has a first through hole, a second through hole, a first pressure relief chamber, and a first outlet chamber. A through hole is in communication with the first pressure relief chamber, and the second through hole is in communication with the first outlet chamber. The miniature pneumatic power device according to item 26 of the patent application scope, wherein the outlet plate of the miniature valve device has a pressure relief through hole, an outlet through hole, a second pressure relief chamber and a second outlet chamber There is a communication channel between the second pressure relief chamber and the second outlet chamber. The micro-pneumatic power device according to item 27 of the scope of the patent application, wherein the valve plate is disposed between the gas collecting plate and the outlet plate to block the communication between the first pressure relief chamber and the second pressure relief chamber, and The valve hole of the valve sheet is correspondingly disposed between the second through hole and the outlet through hole. When gas is transmitted downward from the micro fluid control device into the micro valve device, the first through hole and the first Two through-holes enter the first pressure-relief chamber and the first outlet cavity, and the introduced gas flows from the valve hole of the valve sheet into the outlet through-hole for pressure collection operation. When the pressure-collected gas is greater than the introduced gas, The pressure-collecting gas flows from the outlet through-hole toward the second outlet chamber to displace the valve plate, and close the valve hole of the valve plate against the gas-collecting plate, and at the same time, collect gas at the first The two outlet chambers can flow into the second pressure-relief chamber along the communication flow path. At this time, the valve plate is displaced in the second pressure-relief chamber, and the pressure-collecting gas can flow out of the pressure-relief through hole for pressure-relief operation. . The miniature pneumatic power device according to item 25 of the scope of patent application, wherein the piezoelectric ceramic plate has a side length not greater than the side length of the suspension plate, a length between 7.5 mm and 12 mm, and a length between 7.5 mm and A width between 12 mm and a thickness between 0.05 mm and 0.3 mm. The ratio between the length and the width of the piezoelectric ceramic plate is between 0.625 times and 1.6 times. The micro-pneumatic power device according to item 25 of the scope of patent application, wherein the suspension plate has a length of 7.5 to 12 mm, a width of 7.5 to 12 mm, and a thickness of 0.27 mm. A miniature pneumatic power device includes: a miniature fluid control device, including a gas collecting plate, a piezoelectric actuator, a resonance plate, and an air intake plate sequentially stacked, wherein the resonance plate and the piezoelectric actuation A gap is formed between the actuators to form a first chamber. When the piezoelectric actuator is driven, gas enters through the air inlet plate, flows through the resonance plate, enters the first chamber, and then transmits; and A valve device includes a valve plate sequentially stacked and an outlet plate positioned on the gas collecting plate of the micro fluid control device. The valve plate has a valve hole, and the outlet plate has at least two chambers and at least one limit position. Structure, the limiting structure is disposed in one of the at least two chambers, and the limiting structure is an annular block structure, so that a groove is formed inside the annular block structure; The micro-fluid control device is transmitted to the micro-valve device to perform pressure collection or pressure relief operations. The micro-pneumatic power device according to item 31 of the scope of patent application, wherein the piezoelectric actuator and the gas collecting plate form a gas collecting chamber, so that the gas is transmitted from the micro fluid control device to the gas collecting chamber. , And then transferred to the miniature valve device. The micro-pneumatic power device according to item 31 of the scope of the patent application, wherein the gas collecting plate and the outlet plate each have at least two through holes for correspondingly opening the valve holes of the valve sheet in response to the unidirectional flow of gas. Or off.