TWI667461B - Particulate matter measuring device - Google Patents

Abstract

A gas particle detecting device for detecting a concentration of suspended particles in the air, comprising a gas transfer actuator; a particle sensor disposed corresponding to a position of the gas transfer actuator; and a laser module disposed at the gas transfer actuator Between the particle sensor and the particle sensor, the laser module can emit a laser beam between the gas transmission actuator and the particle sensor; whereby the gas flowing between the gas transmission actuator and the particle sensor is subjected to the laser beam Irradiation, and the particle sensor analyzes the size of the aerosol in the air, and calculates the concentration of the aerosol in the air. The gas can be ejected at high speed by the gas transmission actuator to clean the surface of the particle sensor and spray the particle sensor. Suspended particles on the surface to maintain the accuracy of each particle sensor detection.

Description

Gas particle detecting device

The present invention relates to a gas particle detecting device, and more particularly to a gas particle detecting device capable of automatically cleaning a particle sensor contained therein.

In recent years, the air pollution problem in China and its neighboring areas has become more and more serious. Especially the concentration data of fine aerosols (PM 2.5) is often too high. The monitoring of the concentration of suspended particles in the air is gradually gaining importance. Various detection devices have also been invented accordingly. See the world. At present, the gas particle detecting device for detecting the concentration of suspended particles on the market operates on the principle that the light in the gas flow channel is irradiated by the beam of infrared light or laser light, and the light beam is scattered after hitting the suspended particles in the gas. By detecting and collecting the scattered light, the particle size of the suspended particles and the number of suspended particles of different particle sizes in the unit space can be calculated according to the Mie scattering theory.

However, since the gas particle detecting device has a gas flow path connecting the outside, and the particle sensor for detecting the scattered light is also disposed in the gas flow path, the pollutant from the outside is easily attached to the particle sensor to affect the detection of the scattered light. , resulting in errors in the calculation results. In response to this problem, the current solution is to perform compensation calculation through software calculation. However, due to the fact that the suspended particles in the outside air tend to change with time instead of maintaining a fixed value, the corrected detection value is still often corrected. There is a certain deviation from the actual results. Therefore, when the gas particle detecting device for detecting the concentration of suspended particles is used, the particle sensor is susceptible to the problem of the scattering of suspended particles entering the outside, which is an urgent need for the industry to solve.

The present invention provides a gas particle detecting device with an automatic cleaning function for monitoring the concentration of suspended particles in the air, and automatically cleaning the particle sensor to prevent airborne contaminants from adhering to the particle sensor, thereby avoiding The detection result is biased.

A generalized embodiment of the present invention is a gas particle detecting device for monitoring the concentration of suspended particles in the air, comprising: a gas transfer actuator, a particle sensor, and a laser module. The particle sensor is provided corresponding to the position of the gas transfer actuator. The laser module is disposed between the gas transfer actuator and the particle sensor and can emit a light beam between the gas transfer actuator and the particle sensor. The gas circulating in the gas transfer actuator and the particle sensor is irradiated by the light beam, and the particle sensor analyzes the size of the suspended particles in the air and calculates the concentration of the suspended particles in the air.

100, 100', 100", 100'''‧‧‧ gas particle detection device

1, 1', 1", 1'''‧‧‧ gas transmission actuator

11‧‧‧Air hole film

110‧‧‧suspension tablets

111‧‧‧ hollow holes

112‧‧‧Connecting parts

1121‧‧‧ Fixed Department

1122‧‧‧Connecting Department

113‧‧‧ gap

12‧‧‧ cavity frame

13‧‧‧Actuator

131‧‧‧Piezo carrier

1311‧‧‧First conductive pin

132‧‧‧Adjusting the resonance plate

133‧‧‧ Piezo Pieces

14‧‧‧Insulation frame

15‧‧‧Electrical frame

151‧‧‧Second conductive pin

152, 152'‧‧‧ electrodes

16‧‧‧Resonance chamber

17‧‧‧Airflow chamber

11'‧‧‧Air intake plate

11a'‧‧‧Air intake

11b'‧‧‧ busbar slot

11c'‧‧‧ confluence chamber

12'‧‧‧Resonance film

12a'‧‧‧ hollow hole

12b'‧‧‧movable department

12c'‧‧‧Fixed Department

13'‧‧‧ Piezoelectric Actuator

13a'‧‧‧suspension board

13b'‧‧‧Front frame

13c'‧‧‧ bracket

13d'‧‧‧Piezoelectric components

13e'‧‧‧ gap

13f'‧‧‧ convex

14'‧‧‧First insulation sheet

15'‧‧‧Conductor

151'‧‧‧Electrical pins

16'‧‧‧Second insulation sheet

17'‧‧‧Case space

2‧‧‧Laser module

3‧‧‧Particle sensor

4‧‧‧Light institutions

41‧‧‧beam channel

42‧‧‧ gas flow path

43‧‧‧Light source setting slot

44‧‧‧ accommodating slots

441‧‧‧fixed slot

442‧‧‧first groove

443‧‧‧second groove

5, 5", 5'''‧‧‧ drive circuit module

51", 51'''‧‧‧ transmission module

52'''‧‧‧ processor

6", 6'''‧‧‧ shell

6a", 6a'''‧‧‧ air intake

6b", 6b'''‧‧‧ gas outlet

6c", 6c'''‧‧‧ chamber

7‧‧‧Battery module

8‧‧‧ gas sensor

Fig. 1 is a schematic cross-sectional view showing a first embodiment of the gas particle detecting device of the present invention.

Fig. 2 is a perspective view showing the accommodating groove and the gas transmission actuator of the first embodiment of the present invention.

FIG. 3A is a perspective exploded view of the gas transmission actuator of the first embodiment of the present invention as seen from a plan view.

FIG. 3B is a perspective exploded view of the gas transmission actuator of the first embodiment of the present invention as viewed from a bottom view angle.

Fig. 4 is a perspective view showing the three-dimensional structure of the accommodating groove of the first embodiment of the present invention.

Fig. 5 is a schematic plan view showing the structure of the gas vent sheet of the first embodiment of the present invention.

Fig. 6A is a schematic cross-sectional view of the first embodiment of Fig. 2 taken along line A-A.

6B and 6C are schematic views showing the operation of the gas transmission actuator of the first embodiment of the present invention.

Figure 7 is a schematic cross-sectional view showing a second embodiment of the gas particle detecting device of the present invention.

8A is a perspective exploded view of the gas transmission actuator of the second embodiment of the present invention as seen from a plan view.

FIG. 8B is a perspective exploded view of the gas transmission actuator of the second embodiment of the present invention as viewed from a bottom view angle.

Fig. 9A is a schematic cross-sectional view showing the gas transmission actuator of the second embodiment of the present invention.

Figure 9B is a schematic cross-sectional view of a gas transmission actuator of another embodiment of the present invention.

9C to 9E are schematic views showing the operation of the gas transmission actuator of the second embodiment of the present invention.

Figure 10 is a schematic cross-sectional view showing a third embodiment of the gas particle detecting device of the present invention.

Figure 11 is a schematic cross-sectional view showing a fourth embodiment of the gas particle detecting device of the present invention.

Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various embodiments, and is not intended to limit the scope of the invention.

The present invention provides a gas particle detecting device for monitoring the concentration of suspended particles in the air, and the suspended particles may be PM2.5 suspended particles or PM10 suspended particles. Referring to FIG. 1 , in the first embodiment, the gas particle detecting device 100 includes a gas transmission actuator 1 , a laser module 2 , a particle sensor 3 , an optical mechanism 4 , and a driving circuit module 5 . . The optical mechanism 4 is disposed between the gas transmission actuator 1 and the particle sensor 3 and is a solid member having a beam path 41 and a gas flow path 42 therein. Among them, the gas flow path 42 is preferably but not limited to a channel of a straight line configuration. The beam path 41 is a linear channel and is in communication with the gas flow path 42. In the present embodiment, the gas flow path 42 and the light beam path 41 are disposed orthogonally to each other. In the embodiment, the light mechanism 4 further has a light source setting groove 43 and a receiving groove 44. The light source setting groove 43 is disposed at one end of the beam path 41, and the receiving groove 44 is disposed at the gas flow path 42. One end. The light source setting groove 43 and the receiving groove 44 may be one of a square shape, a circular shape, an elliptical shape, a triangular shape, and a polygonal shape.

The gas transfer actuator 1 is constructed at one end of the gas flow path 42 of the optical mechanism 4 for actuating and introducing a gas. In the present embodiment, the gas transmission actuator 1 is fixed in the accommodating groove 44 of the optical mechanism 4, but is not limited thereto.

The laser module 2 is disposed in the light source setting groove 43 of the optical mechanism 4 for emitting a laser beam, and the laser beam passes through the beam path 41 and illuminates the gas flow path 42. Thereby, when the laser beam emitted from the laser module 2 passes through the gas flow path 42, the gas flowing through the gas flow path 42 is irradiated.

The particle sensor 3 is disposed at one end of the gas flow path 42 away from the accommodating groove 44, and is used for detecting a spot of light in which the suspended particles in the gas are irradiated by the laser beam, thereby detecting the size and calculation of the suspended particles in the air. The concentration of suspended particles.

Referring to FIG. 1 , in the embodiment, the driving circuit module 5 includes a transmission module (not shown) and a processor (not shown). The processor is configured to drive the gas transmission actuator 1, the laser module 2 and the particle sensor 3, and analyze and store the detected result of the particle sensor 3. When the processor drives the gas transfer actuator 1, the laser module 2, and the particle sensor 3, the gas transfer actuator 1 directs air into the gas flow path 42, and the gas in the gas flow path 42 is subjected to the laser mode. The laser beam projected by the group 2 is irradiated. Thus, the particle sensor 3 further detects the spot of the gas suspended in the gas channel 42 after being irradiated, and transmits the detection result to the processor, and the processor further relies on The detection results analyze the size of the aerosol in the air and calculate the concentration of the aerosol, and analyze and generate a detection value for storage. Then, the detection value stored by the processor is sent by the transmission module to an external connection device (not shown), and the external connection device may be one of a cloud system, a portable device, a computer system, and a display device to display Detection value and alarm indication.

During the detection of the gas particle detecting device 100 or at a predetermined time point, the processor The gas transfer actuator 1 is driven to introduce an external gas into the gas transfer actuator 1 and spray the gas at a high speed through the gas transfer actuator 1 out of the gas flow path 42, thereby adhering the surface of the particle sensor 3 The aerosol is cleaned to maintain the accuracy of the particle sensor 3. The preset time point may be before each gas detecting operation, or a plurality of preset time points having a fixed time interval (for example, automatic cleaning every three minutes), or may be manually controlled by the user. Or it can be dynamically determined by using the software according to the instantaneous detection value calculation, and is not limited to the example here.

In addition, the above transmission module can be connected to the external connection device through wired transmission or wireless transmission, and the wired transmission mode can be: wired transmission module of one of USB, mini-USB, micro-USB, etc., the wireless transmission mode can be : Wireless transmission module of one of Wi-Fi module, Bluetooth module, radio frequency identification module and a near field communication module.

Please refer to FIG. 2, FIG. 3A and FIG. 3B simultaneously. In the first embodiment of the present invention, the gas transmission actuator 1 is a miniaturized gas transmission structure, which enables the gas to be transported at high speed and in a large amount. The gas transmission actuator 1 is arranged in a stack correspondingly by the elements such as the air vent sheet 11, the cavity frame 12, the actuator 13, the insulating frame 14, and the conductive frame 15.

Referring to FIG. 4, the accommodating groove 44 has a plurality of fixing grooves 441 for snapping and fixing the air vent sheet 11. In this embodiment, the number of the fixing grooves 441 is four, which are corresponding to the four corners of the receiving groove 44, and are L-shaped grooves, but not limited thereto, the number and the groove pattern. Changes can be made according to actual needs. A first recess 442 and a second recess 443 are defined in a side of one of the receiving slots 44.

Referring to FIG. 5 and referring to FIG. 3A, FIG. 3B and FIG. 4, the air venting sheet 11 is made of a flexible material, and has a suspension piece 110, a hollow hole 111 and a plurality of connecting members 112. . The suspension piece 110 is a sheet-like structure that can be flexibly vibrated, and its shape and size substantially correspond to the inner edge of the receiving groove 44. However, the shape of the suspension piece 110 can also be square, circular, elliptical, triangular, and One of the polygons. Hollow hole 111 It runs through the center of the suspension sheet 110 for gas circulation. In this embodiment, the number of the connecting members 112 is four, but not limited thereto, and the number and type thereof are mainly disposed opposite to the fixing groove 441. Each of the connecting members 112 and the corresponding fixing groove 441 form a snap structure to be engaged and fixed with each other, but the embodiment may be changed according to actual conditions.

For example, as shown in FIG. 4 and FIG. 5, each connecting member 112 has a fixing portion 1121 and a connecting portion 1122. The fixing portion 1121 has a shape corresponding to the fixing groove 441 and is L-shaped to match each other. That is, the fixing portion 1121 is an L-shaped solid structure, and the fixing groove 441 is an L-shaped groove. When the fixing portion 1121 is sleeved in the corresponding fixing groove 441, the two can be snapped and coupled with each other, thereby accommodating the air venting sheet 11 in the accommodating groove 44. The buckle structure design can produce a positioning effect in the horizontal direction and enhance the connection strength between the air vent sheet 11 and the accommodating groove 44. Moreover, during the assembly process, the snap-fit structure allows the air venting aperture 11 to be quickly and accurately positioned in the accommodating groove 44, which has the advantages of being light and simple, easy to assemble, and easy to accurately position. At the same time, the connecting portion 1122 of the connecting member 112 is connected between the suspension piece 110 and the fixing portion 1121, and has an elastic strip structure, so that the suspension piece 110 can be flexibly vibrated reciprocally.

Referring to FIG. 3A, FIG. 3B and FIG. 6A simultaneously, a plurality of connecting members 112 define a plurality of gaps 113 between the suspension sheet 110 and the inner edge of the receiving groove 44 for gas circulation. The cavity frame 12 can be a square hollow structure that carries the suspension sheet 110 stacked on the air vent sheet 11. The actuator 13 is stacked on the cavity frame 12, covers the hollow structure, and forms a resonance chamber 16 between the air vent sheet 11, the cavity frame 12 and the actuator 13. The actuator 13 is composed of a piezoelectric carrier 131, an adjustment resonator 132 and a piezoelectric sheet 133. The piezoelectric carrier 131 can be a metal plate, and a peripheral edge thereof can extend to form a first conductive pin 1311. Used to receive current. The adjustment resonator plate 132 can also be a metal plate and attached to the surface of the piezoelectric carrier plate 131 away from the surface of the gas venting sheet 11. The piezoelectric sheet 133 is a plate made of a piezoelectric material, and is placed on the adjustment resonance plate 132. After the piezoelectric piece 133 is energized, it will cause The piezoelectric effect is deformed and, within a specific range of vibration frequencies, drives the piezoelectric carrier 131 to reciprocate. The adjustment resonance plate 132 is located between the piezoelectric piece 133 and the piezoelectric carrier 131, and as a buffer between the two, the vibration frequency of the piezoelectric carrier 131 can be adjusted. Basically, the thickness of the adjustment resonance plate 132 is larger than the thickness of the piezoelectric carrier 131, and the thickness of the adjustment resonance plate 132 can be varied, thereby adjusting the vibration frequency of the actuator 13.

Returning to FIG. 2 , FIG. 3A and FIG. 3B , the insulating frame 14 and the conductive frame 15 are sequentially stacked on the actuator 13 , and a second conductive pin 151 is protruded from the outer edge of the conductive frame 15 , and A curved electrode 152 is protruded from the inner edge, and the electrode 152 is electrically connected to the piezoelectric piece 133 of the actuator 13. The first conductive pin 1311 of the piezoelectric carrier 131 and the second conductive pin 151 of the conductive frame 15 respectively protrude from the first recess 442 and the second recess 443 of the receiving slot 44, thereby being connected The external current is applied to form a common circuit between the piezoelectric carrier 131, the adjustment resonator plate 132, the piezoelectric sheet 133, and the conductive frame 15. In addition, through the insulating frame 14 disposed between the conductive frame 15 and the piezoelectric carrier 131, direct electrical connection between the conductive frame 15 and the piezoelectric carrier 131 can be avoided, resulting in a short circuit.

Referring to Fig. 6A, the gas transfer actuator 1 is in an initial state. The gas venting sheet 11, the cavity frame 12, the actuator 13, the insulating frame 14, and the conductive frame 15 are sequentially stacked on the accommodating groove 44 to constitute the gas transfer actuator 1 of the present embodiment. In the present embodiment, an air flow chamber 17 is formed between the air venting sheet 11 and the bottom surface of the accommodating groove 44. The air flow chamber 17 passes through the hollow hole 111 of the air venting piece 11, and communicates with the resonant chamber 16 between the actuator 13, the cavity frame 12 and the suspension piece 110. By controlling the vibration frequency of the gas in the resonant chamber 16 to be similar to the vibration frequency of the suspension piece 110, the Helmholtz resonance can be generated by the resonance chamber 16 and the suspension piece 110. Gas transmission efficiency is improved.

Then, as shown in FIG. 6B, when the piezoelectric sheet 133 vibrates away from the bottom surface of the accommodating groove 44, the suspension piece 110 of the air venting sheet 11 is vibrated away from the bottom surface of the accommodating groove 44 to make the air flow. The volume of the chamber 17 is rapidly dilated, resulting in a drop in pressure in the airflow chamber 17. The negative pressure of the gas flow chamber 17 attracts the outside atmospheric gas to flow from the plurality of voids 113, and enters the resonant chamber 16 via the hollow holes 111, thereby increasing the gas pressure in the resonant chamber 16 to generate a pressure gradient. Further, as shown in FIG. 6C, when the piezoelectric piece 133 drives the suspension piece 110 of the air venting piece 11 to vibrate toward the bottom surface of the accommodating groove 44, the gas in the resonance chamber 16 quickly flows out through the hollow hole 111, and the airflow chamber is squeezed. The gas in the chamber 17 causes the concentrated gas to be ejected quickly and in a large amount in an ideal gas state close to the law of Bernoulli, and is discharged after flowing through the particle sensor 3 (see Fig. 1). According to the principle of inertia, the internal pressure of the resonant chamber 16 after exhausting is lower than the equilibrium air pressure, and the gas is guided to enter the resonant chamber 16 again. Therefore, the piezoelectric sheet 133 is reciprocally vibrated, and the vibration frequency of the gas in the resonant chamber 16 is controlled to be the same as the vibration frequency of the piezoelectric sheet 133 to generate a Helmholtz resonance effect, and the gas velocity is high. And a lot of transmission.

Referring to FIG. 7, FIG. 8A, FIG. 8B, and FIG. 9A, in the second embodiment of the present invention, the structure of the gas particle detecting device 100' is substantially the same as that of the gas particle detecting device 100 of the first embodiment. The difference is in the gas transmission actuator 1'. In the second embodiment, the gas transmission actuator 1' includes an air inlet plate 11', a resonance piece 12', a piezoelectric actuator 13', a first insulating sheet 14', and a conductive sheet 15'. And a second insulating sheet 16'. The air intake plate 11', the resonance plate 12', the piezoelectric actuator 13', the first insulating sheet 14', the conductive sheet 15', and the second insulating sheet 16' are stacked in sequence.

In the present embodiment, the air inlet plate 11' has at least one air inlet hole 11a', at least one bus bar groove 11b', and a confluence chamber 11c'. The bus bar groove 11b' is provided corresponding to the intake hole 11a'. The intake hole 11a' is for introducing a gas, and the bus groove 11b' guides the gas introduced from the intake hole 11a' to flow into the confluence chamber 11c'. The resonator piece 12' has a hollow hole 12a', a movable portion 12b', and a fixing portion 12c'. The hollow hole 12a' is provided corresponding to the confluence chamber 11c' of the air intake plate 11'. The movable portion 12b' is provided around the hollow hole 12a', and the fixed portion 12c' is provided at the outer periphery of the movable portion 12b'. Resonant A chamber space 17' is formed between 12' and the piezoelectric actuator 13'. Therefore, when the piezoelectric actuator 13' is driven, gas is introduced from the intake hole 11a' of the air intake plate 11', and is collected to the confluence chamber 11c' via the bus bar groove 11b'. Then, the gas passes through the hollow hole 12a' of the resonator piece 12', so that the piezoelectric actuator 13' resonates with the movable portion 12b' of the resonator piece 12' to transport the gas.

Referring to FIG. 7, FIG. 8A, FIG. 8B and FIG. 9A, the piezoelectric actuator 13' includes a suspension plate 13a', an outer frame 13b', at least one bracket 13c', and a piezoelectric element 13d. '. In this embodiment, the suspension plate 13a' has a square shape and can be flexed and shaken, but is not limited thereto. The suspension plate 13a' has a convex portion 13f'. In the present embodiment, the suspension plate 13a' is designed in a square shape because the structure of the square suspension plate 13a' clearly has the advantage of power saving compared to the circular shape. The capacitive load operating at the resonant frequency increases its power consumption as the resonant frequency increases. Since the resonant frequency of the square suspension plate 13a' is lower than that of the circular suspension plate, the power consumed is also low. However, in other embodiments, the shape of the suspension plate 13a' may vary depending on actual needs. The outer frame 13b' is disposed around the outer side of the suspension plate 13a'. The bracket 13c' is coupled between the suspension plate 13a' and the outer frame 13b' to provide a supporting force for elastically supporting the suspension plate 13a'. The piezoelectric element 13d' has a side length which is less than or equal to one side length of the suspension plate 13a'. And the piezoelectric element 13d' is attached to one surface of the suspension plate 13a' for applying a driving voltage to drive the suspension plate 13a' to bend and vibrate. At least one gap 13e' is formed between the suspension plate 13a', the outer frame 13b' and the bracket 13c' for gas to pass therethrough. The convex portion 13f' is protruded from the other surface of the suspension plate 13a'. In this embodiment, the suspension plate 13a' and the protrusion 13f' are integrally formed by an etching process, but are not limited thereto.

Referring to FIG. 9A, in the embodiment, the chamber space 17' can be filled with a material such as a conductive adhesive by using a gap generated between the resonator piece 12' and the frame 13b' outside the piezoelectric actuator 13'. However, it is not limited thereto, so that a certain depth can be maintained between the resonator piece 12' and the suspension plate 13a', thereby guiding the gas to flow more rapidly. Further, since the suspension plate 13a' is kept at an appropriate distance from the resonance piece 12', contact interference with each other is reduced, and generation of noise can also be reduced. In other In the embodiment, the height of the outer frame 13b' of the piezoelectric actuator 13' can be increased to reduce the gap between the resonator piece 12' and the frame 13b' outside the piezoelectric actuator 13'. Conductive adhesive thickness. Thus, in the case where the suspension plate 13a' can still be kept at an appropriate distance from the resonance piece 12', the overall assembly of the gas transmission actuator 1' does not affect the thickness of the filled conductive paste due to the hot pressing temperature and the cooling temperature. It can be avoided that the conductive adhesive affects the actual size of the chamber space 17' after assembly is completed due to thermal expansion and contraction factors.

Referring to FIG. 9B, in other embodiments, the suspension plate 13a' may be formed by stamping, so that the suspension plate 13a' extends outwardly by a distance, and the outward extension distance can be formed by the bracket 13c' on the suspension plate 13a' and the outside. The adjustment between the frame 13b' is such that the surface of the convex portion 13f' on the suspension plate 13a' and the surface of the outer frame 13b' form a non-coplanar, that is, the surface of the convex portion 13f' will be lower than the outer frame 13b. 's surface. Applying a small amount of a filling material, for example, a conductive paste, to the surface of the outer frame 13b', the piezoelectric actuator 13' is bonded to the fixing portion 12c' of the resonator piece 12' by heat pressing, thereby making the pressure The electric actuator 13' is assembled in combination with the resonator piece 12', so that the structure of the suspension plate 13a' of the piezoelectric actuator 13' is formed by press forming to form a chamber space 17'. The chamber space 17' can be completed by adjusting the stamping distance of the suspension plate 13a' of the piezoelectric actuator 13', which simplifies the structural design of the adjustment chamber space 17', and also simplifies the process and shortens the process time. Etc.

Please refer to FIG. 8A and FIG. 8B. In this embodiment, the first insulating sheet 14', the conductive sheet 15' and the second insulating sheet 16' are all thin frame-shaped sheets, but not limited thereto. . The air inlet plate 11', the resonance plate 12', the piezoelectric actuator 13', the first insulating sheet 14', the conductive sheet 15' and the second insulating sheet 16' are all transparent to the micro-electromechanical surface micromachining process. The volume of the gas transmission actuator 1' is reduced to constitute a gas transmission actuator 1' of a microelectromechanical system.

Referring to FIG. 9C, in the operation of the piezoelectric actuator 13', the piezoelectric element 13d' of the piezoelectric actuator 13' is deformed by applying a driving voltage, and the suspension plate 13a' is driven away from the air inlet plate 11 'The direction displacement, at this time the volume of the chamber space 17' is increased, forming in the chamber space 17' With the negative pressure, the gas in the confluence chamber 11c' is taken into the chamber space 17'. At the same time, the resonance piece 12' generates resonance resonance displacement in a direction away from the air intake plate 11', which increases the volume of the confluence chamber 11c'. And because the gas in the confluence chamber 11c' enters the chamber space 17', the confluence chamber 11c' is also in a negative pressure state, and the gas enters the confluence through the air inlet hole 11a' and the bus bar groove 11b'. Inside the chamber 11c'.

Next, as shown in FIG. 9D, the piezoelectric element 13d' drives the suspension plate 13a' to be displaced toward the air intake plate 11' to compress the chamber space 17'. Similarly, the resonance piece 12' is actuated by the suspension plate 13a' to generate Resonance is displaced toward the air intake plate 11', forcing the gas in the synchronous push chamber space 17' to be further transmitted through the gap 13e' to achieve the effect of transporting gas.

Finally, as shown in FIG. 9E, when the suspension plate 13a' is brought back to the state not being driven by the piezoelectric element 13d', the resonance piece 12' is also simultaneously driven to be displaced away from the air intake plate 11'. The resonator piece 12' at this time moves the gas in the compression chamber space 17' toward the gap 13e', and raises the volume in the confluence chamber 11c' so that the gas can continuously pass through the intake hole 11a' and the bus bar groove 11b. 'to converge in the confluence chamber 11c'. By continuously repeating the operation of the gas transfer actuator 1' shown in the above-mentioned 9C to 9E, the gas transfer actuator 1' can continuously flow the gas at a high speed to achieve the gas transfer actuator 1' transmission and The operation of the output gas.

Next, please refer back to FIGS. 8A and 8B. The outer edge of the conductive sheet 15' protrudes from a conductive pin 151', and a curved electrode 152' protrudes from the inner edge. The electrode 152' is electrically connected to the piezoelectric body. Piezoelectric element 13d' of the actuator 13'. The conductive pin 151' of the conductive sheet 15' is externally turned on to externally drive the piezoelectric element 13d' of the piezoelectric actuator 13'. Further, the arrangement of the first insulating sheet 14' and the second insulating sheet 16' can avoid the occurrence of a short circuit.

Referring to FIG. 10, in the third embodiment of the present invention, the present invention provides a gas particle detecting device 100" having the same structure as the gas particle detecting device 100 of the first embodiment and the gas particle detecting device 100 of the second embodiment. 'Absolutely the same, the difference lies in the detection of gas particles The device 100" further includes a housing 6" and a set position of the transmission module 51" included in the drive circuit module 5". In the present embodiment, the structure of the gas transmission actuator 1" may be the same as that of the gas transmission actuator 1 of the first embodiment, or may be the same as the gas transmission actuator 1' of the second embodiment, but not The housing 6" has an air inlet 6a", an air outlet 6b" and a chamber 6c" formed inside the housing 6". The air inlet 6a" and the air outlet 6b" communicate with the outside of the chamber 6c" and the housing 6", whereby air can enter the chamber 6c" from the air inlet 6a" and be discharged to the housing from the air outlet 6b" 6" exterior. The gas transmission actuator 1", the laser module 2, the particle sensor 3, and the optical mechanism 4 are all disposed in the chamber 6c", and the gas transmission actuator 1" is disposed adjacent to the air inlet 6a" The guiding air is introduced from the air inlet 6a. Further, in the present embodiment, the transmission module 51" of the driving circuit module 5" is disposed outside the casing 6", thereby transmitting the detection data to the external connecting device. In this way, it is also possible to prevent the arrangement of the housing 6" from interfering with the quality of the transmission signal.

When the gas transfer actuator 1" is driven, the gas transfer actuator 1" begins to draw air from the gas inlet 6a" into the gas flow path 42 of the light mechanism 4, and the gas entering the gas flow path 42 is subjected to thunder. The laser beam projected by the radiation module 2 through the beam channel 41 emits a plurality of light spots when the laser beam hits the suspended particles in the gas, and the particle sensor 3 receives the plurality of light spots and detects The result is transmitted to the processor, and the processor calculates the size and concentration of the suspended particles in the air according to the number and intensity of the light spots, thereby generating a detection value for storage. Then, the detection value stored by the processor is obtained by the transmission module 51" Send to external link device.

Referring to FIG. 11, in the fourth embodiment of the present invention, the present invention provides a gas particle detecting device 100"', the structure of which is the gas particle detecting device 100, 100' in the first, second and third embodiments, 100''' is substantially the same, except that the gas particle detecting device 100''' further includes a battery module 7 and a gas sensor 8, the structure of the housing 6"" and the driving circuit module 5''' Configuration location. In the present embodiment, the structure of the gas transmission actuator 1"' can be the same as that of the gas transmission actuator 1 of the first embodiment, and can also be actuated by the gas transmission of the second embodiment. The device 1' is the same. The housing 6"" has a plurality of air inlets 6a"' disposed on opposite sides of the housing 6"". The gas transmission actuator 1''', the laser module 2, the particle sensor 3, and the optical mechanism 4 are disposed between the air inlets 6a''. In the present embodiment, the gas sensor 8 is disposed in the housing 6"" and adjacent to one of the inlets 6a"' of the housing 6"", allowing air to enter through the air inlet 6a" Immediately afterwards, the content of a specific gas component in the air can be detected. The gas sensor 8 can be one of an oxygen sensor, a carbon monoxide sensor, a carbon dioxide sensor, or a combination thereof, or a volatile organic sensor, or a bacteria. One or a combination of a sensor, a virus sensor, and a microbial sensor. In this embodiment, the transmission module 51''' and the processor 52''' of the driving circuit module 5''' are disposed adjacent to the chamber 6c"' of the housing 6"'. The battery module 7 is disposed in the chamber 6c"" and is located on a side of the chamber 6c"' away from the air outlet 6b"'. The battery module 7 is electrically connected to an external power supply device (not shown) for receiving and storing electrical energy of the external power supply device, and providing electrical energy, outputting electrical energy to the gas transmission actuator 1''', and the laser mode. Group 2, particle sensor 3 and gas sensor 8. The external power supply device can transmit power to the battery module 7 by means of wired conduction, and can also transmit power to the battery module 7 through wireless conduction, but not limited thereto.

When the processor 52"" drives the gas transfer actuator 1"", the gas transfer actuator 1"' begins to draw air from the air inlet 6a"' into the gas flow path 42 of the light mechanism 4, Before detecting the aerosol in the air, the gas sensor 8 adjacent to the air inlet 6a"' first detects the air entering from the air inlet 6a"' and transmits the detection result to the processor 52''. '.

In summary, the gas particle detecting device provided in the present invention may respectively have a gas sensor and a particle sensor, and the gas is used to extract air from the outside of the gas particle detecting device and enter through the air inlet, and pass the gas sense. The detector detects the content of a specific gas component in the air entering from the air inlet and flowing to the gas flow channel, and then transporting the gas to the gas flow path, and projecting the laser beam through the laser module to illuminate the suspended particles in the gas, the light beam After hitting the suspended particles, multiple spots are generated, and the particle sensor receives a plurality of spots to pass through the plurality of spots. The number and intensity of the spots are used to calculate the concentration of PM2.5 or PM10 in the air. In addition, the gas transfer actuator can be used to clean the particle sensor to prevent excessive aerosols from depositing on the particle sensor, causing problems in detecting misalignment.

This case has been modified by people who are familiar with the technology, but it is not intended to be protected by the scope of the patent application.

Claims (26)

A gas particle detecting device for detecting the concentration of suspended particles in the air comprises: a gas transfer actuator comprising a jet orifice, a cavity frame, an actuator, an insulating frame and a conductive frame, wherein a gas vent sheet, the cavity frame, the actuator, the insulating frame, and the conductive frame are sequentially stacked; a particle sensor is disposed corresponding to a position of the gas transmission actuator; and a laser module is disposed Between the gas transfer actuator and the particle sensor, the laser module emits a laser beam between the gas transfer actuator and the particle sensor; wherein the gas transfer actuator and the gas flow A gas between the particle sensors is illuminated by a laser beam, and the particle sensor analyzes the size of the aerosol in the gas and calculates the concentration of suspended particles in the gas. The gas particle detecting device of claim 1, further comprising an optical mechanism disposed between the gas transfer actuator and the particle sensor, wherein the optical mechanism has a gas flow path and a beam path a light source providing groove and a receiving groove; the beam path is connected to the gas flow path, and the laser module is disposed in the light source setting groove, whereby the laser module can emit the laser beam to the beam path a light beam for illuminating the gas passing through the gas flow path; the accommodating groove accommodating the gas transfer actuator; and the particle sensor is disposed in the gas flow path and located at the gas flow path away from the gas transfer actuation One end of the device detects the scattered light spot generated by the suspended particles after the laser beam is irradiated to the gas in the gas flow path, thereby detecting and calculating the size of the suspended particles contained in the gas and the concentration of the suspended particles. The gas particle detecting device of claim 2, wherein the gas transfer actuator comprises: The air venting piece has a plurality of connecting members, a suspension piece and a hollow hole, the floating piece is bendable and vibrating, and the air venting piece is disposed through the plurality of connecting members and positioned in the accommodating groove, thereby Forming an air flow chamber between the air venting piece and a bottom surface of the accommodating groove, and forming at least one gap between the plurality of connecting members, the floating piece and the accommodating groove; the cavity frame carrying the stack On the suspension sheet; the actuator is stacked on the cavity frame to generate a reciprocating bending vibration by applying a voltage; the insulating frame is stacked on the actuator; and the electric frame a carrier stack is disposed on the insulating frame; wherein a resonant cavity is formed between the actuator, the cavity frame and the suspension piece, and the air-jet aperture is resonated by driving the actuator to make the jet The suspension piece of the orifice sheet is reciprocally vibrated to cause the gas to enter the gas flow chamber through the at least one gap and then discharged into the gas flow path. The gas particle detecting device of claim 3, wherein the actuator comprises: a piezoelectric carrier plate stacked on the cavity frame; and an adjustment resonant plate supported by the piezoelectric layer And a piezoelectric sheet, which is stacked on the adjustment resonance plate, drives the piezoelectric carrier by applying a voltage, and adjusts the resonance plate to generate a reciprocating bending vibration. The gas particle detecting device of claim 4, wherein the thickness of the adjusting resonator plate is greater than the thickness of the piezoelectric carrier. The gas particle detecting device according to claim 3, wherein the accommodating groove of the optical mechanism has a plurality of fixing grooves. The gas particle detecting device of claim 6, wherein the plurality of connecting members have a fixing portion and a connecting portion, wherein the fixing portion is opposite in shape to the fixing groove The connecting portion is connected between the suspension piece and the fixing portion, and the connecting portion elastically supports the suspension piece for the reciprocating bending vibration of the suspension piece. The gas particle detecting device of claim 1, wherein the gas transfer actuator comprises: an air inlet plate having at least one air inlet hole, at least one pair of bus bar slots corresponding to the position of the air inlet hole, and a a flow chamber for introducing the gas, the bus bar for guiding the gas introduced from the air inlet to the confluence chamber; a resonance piece having a pair of hollow holes corresponding to the position of the confluence chamber And a movable portion surrounding the hollow hole; and a piezoelectric actuator disposed in position corresponding to the resonant piece, the resonator piece and the piezoelectric actuator form a cavity space for When the piezoelectric actuator is driven, the gas is introduced from the air inlet hole of the air inlet plate, collected into the convergence chamber through the bus bar groove, and then passed through the hollow hole of the resonance plate, so that The piezoelectric actuator resonates with the movable portion of the resonant plate to transmit the gas; wherein the air inlet plate, the resonant plate, and the piezoelectric actuator are sequentially stacked. The gas particle detecting device of claim 8, wherein the piezoelectric actuator comprises: a suspension plate having a square shape and being bendable and vibrating; and an outer frame surrounding the suspension plate An outer side; at least one bracket connected between the suspension plate and the outer frame to provide elastic support; and a piezoelectric element having a side length which is less than or equal to one side length of the suspension plate, and the pressure An electrical component is attached to a surface of the suspension plate for applying a voltage to drive the suspension plate to flex vibration. The gas particle detecting device according to claim 8, wherein: The gas transmission actuator includes a first insulating sheet, a conductive sheet and a second insulating sheet; and the air inlet plate, the resonant plate, the piezoelectric actuator, the first insulating sheet, the conductive sheet and The second insulating sheets are stacked in sequence. The gas particle detecting device according to claim 1, wherein the suspended particles detected by the particle sensor are PM2.5 suspended particles. The gas particle detecting device according to claim 1, wherein the aerosol detected by the particle sensor is PM10 suspended particles. The gas particle detecting device according to claim 1, wherein the gas transfer actuator is configured to eject the gas at a high speed, perform a cleaning operation on the surface of the particle sensor, and spray the suspended particles adhered to the surface of the particle sensor. To maintain the accuracy of each detection of the particle sensor. The gas particle detecting device of claim 2, further comprising a casing, wherein: the casing has an air inlet, an air outlet, and a chamber disposed inside the casing, a chamber communicating with the air inlet and the air outlet; the light mechanism is disposed in the chamber, the gas passage of the light mechanism is connected to the air inlet of the housing and the air outlet; and the gas transmission actuator pair The position of the air inlet of the housing should be set to be guided to introduce the gas from the air inlet, and the air outlet is led out of the housing. The gas particle detecting device of claim 1, further comprising a driving circuit module, wherein the driving circuit module comprises a processor and a transmission module, wherein the processor is configured to drive the gas transmission The actuator, the laser module and the particle sensor are used to analyze the detection result of the particle sensor and convert it into a detection value, and the transmission module sends the detection value to an external connection device for The external connection device The detection value and an alarm indication are shown. The gas particle detecting device of claim 15, wherein the transmission module is at least one of a wired transmission transmission module and a wireless transmission transmission module. The gas particle detecting device of claim 16, wherein the wired transmission module is at least one of a USB, a mini-USB, and a micro-USB. The gas particle detecting device of claim 16, wherein the wireless transmission module is a Wi-Fi module, a Bluetooth module, a radio frequency identification module, and a near field communication module. At least one of them. The gas particle detecting device of claim 15, wherein the external connecting device is at least one of a cloud system, a portable device, a computer system, and the like. The gas particle detecting device of claim 15, further comprising a battery module for providing stored electrical energy and providing electrical energy, so that the processor can drive the gas transmitting actuator, the laser module And the particle sensor, the battery module can receive power by externally connecting a power supply device for storage. The gas particle detecting device of claim 20, wherein the power supply device delivers electrical energy in a wired conduction manner to the battery module for storage. The gas particle detecting device of claim 20, wherein the power supply device delivers electrical energy in a wireless conduction manner to the battery module for storage. The gas particle detecting device of claim 14, further comprising a gas sensor disposed in the casing to sense the gas introduced by the air inlet to obtain a specific gas in the gas The content of the ingredients. The gas particle detecting device of claim 23, wherein the gas sensor is at least one of an oxygen sensor, a carbon monoxide sensor, and a carbon dioxide sensor, or any combination thereof. Group of. The gas particle detecting device according to claim 23, wherein the gas sensing device The device is a volatile organic sensor. The gas particle detecting device according to claim 23, wherein the gas sensor is a sensor that detects a group of at least one of bacteria, viruses, and microorganisms, or any combination thereof.