TWI626373B - Micro-gas pressure driving apparatus - Google Patents

Abstract

A miniature pneumatic power device includes: a miniature fluid control device, The air inlet plate, the resonance plate, the piezoelectric actuator, and the gas collecting plate, wherein a first cavity formed by a gap is formed between the resonance plate and the piezoelectric actuator, so that when the piezoelectric actuator is driven, the gas enters The gas plate is introduced into the first chamber through the resonance plate, and then transmitted downward to form a pressure gradient flow channel to continuously push out the gas; the micro valve device includes stacked valve plates and an outlet plate; when the gas flows from the micro fluid control device to the It is transmitted to the miniature valve device to open or close the valve hole of the valve sheet in response to the unidirectional flow of gas, and then collect or release pressure.

Description

Miniature pneumatic power unit

This case relates to a miniature pneumatic power device, especially a miniature ultra-thin and quiet miniature pneumatic power device.

At present, in all fields, whether in the pharmaceutical, computer technology, printing, energy and other industries, the products are developing towards miniaturization and miniaturization. Among them, micropumps, sprayers, inkjet heads, industrial printing devices and other products The fluid transport structure is its key technology, so how to break through its technical bottlenecks with innovative structures is an important content of development.

For example, in the pharmaceutical industry, many instruments or equipment that require pneumatic power to drive, usually adopt traditional motors and pneumatic valves to achieve the purpose of gas delivery. However, due to the limitation of the structure of these traditional motors and gas valves, it is difficult for such instruments to reduce their volume, so that the overall device cannot be reduced in size, that is, it is difficult to achieve the goal of thinning, so it cannot be installed. It is not convenient to use it on or with a portable device. In addition, these traditional motors and gas valves also generate noise when they are actuated, making the user anxious, resulting in inconvenience and discomfort in use.

Therefore, how to develop a miniature pneumatic power device that can improve the lack of the above-mentioned conventional techniques and can make the traditional instruments or equipment using fluid control devices small in size, miniaturized, and silent, thereby achieving portable and comfortable portable purposes. Problems that urgently need to be resolved.

The main purpose of this case is to provide a device suitable for use in portable or wearable instruments or equipment. The miniature fluid control device uses the high frequency actuation of the piezoelectric ceramic plate to generate a pressure gradient in the designed flow channel, so that the gas flows at a high speed, and passes the difference in the impedance of the flow channel into and out of the channel. Transfer to the discharge end, and solve the lack of conventional instruments and equipment using micro fluid control devices that are large, difficult to thin, unable to achieve portable purposes, and have large noise.

In order to achieve the above purpose, one of the broader implementation aspects of the present case is to provide a miniature pneumatic power device including a miniature fluid control device and a miniature valve device; the miniature fluid control device includes an air intake plate, a resonance plate, a pressure An electric actuator and a gas collecting plate. The gas inlet plate has at least one air inlet hole, at least one bus hole, and a central recess forming a bus cavity. The at least one air hole is used for introducing gas, and the bus bar The hole corresponds to the air inlet hole, and guides the gas of the air inlet hole to the convergence chamber formed by the central recess. The resonance plate has a hollow hole corresponding to the convergence chamber of the air inlet plate. The actuator has a suspension plate, an outer frame, and a piezoelectric ceramic plate. The outer frame has at least a bracket, and the connection is provided between the suspension plate and the outer frame. The piezoelectric ceramic plate is attached to the suspension plate. A first surface, and the gas collecting plate has a first through-hole, a second through-hole, a first pressure relief chamber and a first oral cavity, and has a first reference surface, the first The exit chamber has a A convex structure, the height of the first convex structure is higher than the first reference surface of the gas collecting plate, the first through hole communicates with the first pressure relief chamber, and the second through hole communicates with the first An exit chamber is connected, wherein the gas collecting plate, the piezoelectric actuator, the resonance plate, and the air intake plate are sequentially positioned correspondingly in an overlapping relationship, and between the resonance plate and the piezoelectric actuator. A gap g0 is formed to form a first chamber, so that when the piezoelectric actuator is driven, a displacement of d is generated, so that there is an x difference between g0 and d, that is, x = g0-d, especially When the difference x = 1 to 5um, the gas with a maximum output pressure of 350mmHg is generated. The gas system is introduced through the at least one air inlet hole of the air intake plate, and is collected into the central recess through the at least one bus hole. Flowing through the hollow hole of the resonance plate to enter the first chamber, and then transmitted downward through a gap between the at least one bracket of the piezoelectric actuator to continuously push out the gas; and the miniature The valve device includes a valve plate and an outlet plate, which are sequentially arranged in a corresponding stack and positioned on the micro fluid control device. The valve plate has a valve hole, the valve plate has a thickness between 0.1mm and 0.3mm, and the outlet plate has a pressure relief through hole, an outlet through hole, and a second pressure relief cavity. Chamber, a second exit chamber, and at least one limiting structure, and a second reference surface, an end of the pressure relief through hole It has a second convex part structure, the height of the second convex part descending structure is higher than the second reference surface of the outlet plate, the outlet through hole communicates with the second outlet cavity, and the at least one limiting structure is provided In the second pressure relief chamber, the height of the limiting structure is between 0.2 mm and 0.5 mm, and there is a communication channel between the second pressure relief chamber and the second outlet chamber, wherein The pressure relief through hole of the outlet plate corresponds to the first through hole of the gas collecting plate, and the second pressure relief chamber of the outlet plate corresponds to the first pressure relief chamber of the gas collecting plate. The two outlet chambers correspond to the first outlet chamber of the gas collecting plate, and the valve plate is arranged between the gas collecting plate and the outlet plate to block the communication between the first pressure relief chamber and the second pressure relief chamber, and The valve hole of the valve plate is correspondingly disposed between the second through hole and the outlet through hole. When gas is transmitted downward from the micro fluid control device into the micro valve device, the first The through hole and the second through hole enter the first pressure relief chamber and the first outlet chamber, and the micro valve The valve plate of the device quickly abuts against the second convex structure of the outlet plate, which is beneficial to form a pre-force action, completely closing the pressure relief through hole, and at the same time introducing gas from the valve hole of the valve plate into the outlet through hole for pressure collection. Operation: When the pressure-collecting gas is larger than the introduced gas, the pressure-collecting gas flows from the outlet through-hole toward the second outlet chamber to displace the valve plate and make the valve hole of the valve plate abut against the gas-collecting gas. The plate is closed, and the at least one limiting structure assists to support the valve plate to prevent the valve plate from collapsing. At the same time, the pressure-collected gas can flow into the second pressure-relief chamber along the communication channel in the second outlet chamber. At this time, the valve disc is displaced in the second pressure-relief chamber, and the pressure-collecting gas can flow out of the pressure-relief through hole for pressure-relief operation.

In order to achieve the above purpose, another embodiment of the present invention in a broader aspect is to provide a miniature pneumatic power device including a miniature fluid control device and a miniature valve device; the miniature fluid control device includes an air inlet plate, a resonance plate, a A piezoelectric actuator and a gas collecting plate, the gas collecting plate having at least two through holes and at least two chambers, wherein the gas collecting plate, the piezoelectric actuator, the resonance plate and the air inlet plate are sequentially Positioned corresponding to the stack, and a gap g0 is formed between the resonance plate and the piezoelectric actuator to form a first cavity, so that when the piezoelectric actuator is driven, a displacement of d is generated, thereby making g0 There is an x difference between d and d, that is, x = g0-d, especially when the difference x = 1 to 5um, it produces a gas with a maximum output pressure of 350mmHg, which is originally entered by the air intake plate, Flow through the resonance plate to enter the first chamber and then transmit downward; and a valve plate and an outlet plate of the micro valve device are sequentially stacked and positioned on the gas collecting plate of the micro fluid control device, the valve plate Has one A valve hole, the outlet plate has at least two through holes and at least two chambers, wherein a gas collection chamber is formed between the micro fluid control device and the micro valve device, and when gas is transmitted downward from the micro fluid chamber device to The gas collection chamber is then transferred to the micro valve device, and through the gas collection plate and the outlet plate have at least two through holes and at least two chambers, respectively, in order to respond to the unidirectional flow of gas, the valve plate The valve hole is opened or closed correspondingly, and pressure collection or pressure relief operation is performed.

In order to achieve the above object, another embodiment of the present invention in a broader aspect is to provide a miniature pneumatic power device including a miniature fluid control device and a miniature valve device; the miniature fluid control device includes an air intake plate, a resonance, and the like in order. Plate, a piezoelectric actuator and a gas collecting plate, wherein a gap g0 is formed between the resonance plate and the piezoelectric actuator to form a first cavity, so that when the piezoelectric actuator is driven The displacement of d is generated at time, so that there is an x difference between g0 and d, that is, x = g0-d, especially when the difference x = 1 to 5um, it is the gas that produces the maximum output pressure. It is entered by the air inlet plate and flows through the resonance plate to enter the first chamber for transmission; and the micro valve device includes a valve plate sequentially stacked and an outlet plate positioned on the micro fluid control device. On the gas plate, the valve plate has a valve hole, and when gas is transmitted from the micro fluid control device to the micro valve device, pressure collection or pressure relief operation is performed.

1‧‧‧ Miniature Pneumatic Power Unit

1A‧‧‧Miniature fluid control device

1B‧‧‧Miniature valve device

1a‧‧‧shell

10‧‧‧ base

11‧‧‧Air intake plate

11a‧‧‧Second surface of air inlet plate

11b‧‧‧ the first surface of the air intake plate

110‧‧‧air inlet

111‧‧‧ Center recess

112‧‧‧ Bus hole

12‧‧‧ Resonator

12a‧‧‧movable part

12b‧‧‧Fixed section

120‧‧‧ Hollow

121‧‧‧First Chamber

13‧‧‧ Piezo actuator

130‧‧‧ suspension board

130a‧‧‧Second surface of suspension board

130b‧‧‧ the first surface of the suspended plate

130c‧‧‧ convex

130d‧‧‧ Center

130e‧‧‧outer

131‧‧‧ frame

131a‧‧‧The second surface of the frame

131b‧‧‧ the first surface of the frame

132‧‧‧ Bracket

132a‧‧‧ The second surface of the bracket

132b‧‧‧ the first surface of the bracket

133‧‧‧Piezoelectric ceramic plate

134, 151‧‧‧ conductive pins

135‧‧‧Gap

141, 142‧‧‧ insulating sheet

15‧‧‧Conductive sheet

16‧‧‧Gas collecting plate

16a‧‧‧accommodation space

160‧‧‧ surface

161‧‧‧First datum surface

162‧‧‧Gas collecting chamber

163‧‧‧The first through hole

164‧‧‧second through hole

165‧‧‧The first pressure relief chamber

166‧‧‧First Exit Room

167‧‧‧The first convex structure

168‧‧‧ side wall

17‧‧‧Valve Disc

170‧‧‧Valve hole

171‧‧‧ positioning holes

18‧‧‧ export board

180‧‧‧ second datum surface

181‧‧‧Pressure Relief Through Hole

181a‧‧‧Second convex structure

182‧‧‧Exit through hole

183‧‧‧Second pressure relief chamber

184‧‧‧Second Outlet Room

185‧‧‧Connecting runner

187‧‧‧Second surface

188‧‧‧ limit structure

19‧‧‧ export

g0‧‧‧clearance

(a) ~ (x) ‧‧‧Different implementations of piezoelectric actuators

a0, i0, j0, m0, n0, o0, p0, q0, r0‧‧‧

a1, i1, m1, n1, o1, p1, q1, r1‧‧‧

a2, i2, m2, n2, o2, p2, q2, r2‧‧‧ bracket, board connection

a3, m3, n3, o3, p3, q3, r3

d‧‧‧Vibration displacement of piezoelectric actuator

s4, t4, u4, v4, w4, x4‧‧‧ convex

m2 ’, n2’, o2 ’, q2’, r2’‧‧‧ brackets are connected to the ends of the frame

m2 ”, n2”, o2 ”, q2”, r2 ”‧‧‧ brackets are connected to the ends of the suspension board

FIG. 1A is a schematic exploded front view of a miniature pneumatic power device according to a preferred embodiment of the present invention.

Figure 1B is a schematic diagram of the front assembly structure of the miniature pneumatic power device shown in Figure 1A.

Fig. 2A is a schematic exploded view of the back of the miniature pneumatic power device shown in Fig. 1A.

Fig. 2B is a schematic diagram of the rear assembly structure of the miniature pneumatic power device shown in Fig. 1A.

Fig. 3A is a schematic diagram of the front assembly structure of the piezoelectric actuator of the miniature pneumatic power device shown in Fig. 1A.

FIG. 3B is a schematic diagram of the back assembly structure of the piezoelectric actuator of the miniature pneumatic power device shown in FIG. 1A Illustration.

Fig. 3C is a schematic cross-sectional structure diagram of the piezoelectric actuator of the miniature pneumatic power device shown in Fig. 1A.

4A to 4C are schematic diagrams of various implementation modes of the piezoelectric actuator.

FIG. 5A to FIG. 5E are partial operation schematic diagrams of the micro fluid control device of the micro pneumatic power device shown in FIG. 1A.

FIG. 6A is a schematic diagram of the pressure collecting action of the gas collecting plate and the micro valve device of the miniature pneumatic power device shown in FIG.

FIG. 6B is a schematic diagram of the pressure relief operation of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in FIG.

Figures 7A to 7E are schematic diagrams of the pressure collecting action of the miniature pneumatic power device shown in Figure 1A.

Fig. 8 is a schematic diagram of the pressure reduction or pressure relief action of the miniature pneumatic power device shown in Fig. 1A.

Some typical embodiments embodying the features and advantages of this case will be described in detail in the description in the subsequent paragraphs. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and that the descriptions and diagrams therein are essentially for illustration purposes, rather than limiting the case.

The micro-pneumatic power unit 1 in this case can be applied to industries such as medicine, biotechnology, energy, computer technology, or printing, and is not used to transmit gas. Please refer to FIG. 1A, FIG. 1B, FIG. 2A, FIG. 2B, and FIGS. 7A to 7E. FIG. 1A is a schematic exploded front view of the miniature pneumatic power device according to the preferred embodiment of the present invention, and FIG. 1B is FIG. 1A. The schematic diagram of the front assembly structure of the miniature pneumatic power device shown in the figure, FIG. 2A is a schematic diagram of the exploded structure of the rear of the miniature pneumatic power device shown in FIG. 1A, and FIG. 2B is the schematic diagram of the miniature pneumatic power device shown in FIG. 1A. Schematic diagram of the rear assembly structure. Figures 7A to 7E are schematic diagrams of the pressure-collecting operation of the miniature pneumatic power device shown in Figure 1A. As shown in Figures 1A and 2A, the miniature pneumatic power device 1 in this case is a combination of a miniature fluid control device 1A and a miniature valve device 1B. The miniature fluid control device 1A has a housing 1a and a piezoelectric actuator. Device 13, insulating sheets 141, 142, and conductive sheet 15, etc., where the casing 1a includes a gas collecting plate 16 and a base 10, and the base 10 includes an air intake plate 11 and a resonance sheet 12, but this is not the case. Limited. The piezoelectric actuator 13 is provided corresponding to the resonance sheet 12, and the air intake plate 11, the resonance sheet 12, the piezoelectric actuator 13, the insulation sheet 141, the conductive sheet 15, the other insulation sheet 142, and the gas collecting plate are provided. 16 and so on are sequentially stacked, and the piezoelectric actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132, and a piezoelectric ceramic plate 133; and the micro valve device 1B includes A valve plate 17 and an outlet plate 18 are not limited thereto. And in this embodiment, as shown in FIG. 1A, the gas collecting plate 16 is not only a single plate structure, but also a frame structure having a side wall 168 on the periphery, and the gas collecting plate 16 has a thickness of 9 mm to 17 mm. Between the length and the width between 9mm and 17mm, and the ratio between the length and the width is between 0.53 times and 1.88 times, and the side wall 168 formed by the periphery and the bottom plate together define a capacity The installation space 16a is used for the piezoelectric actuator 13 to be installed in the accommodation space 16a. Therefore, when the miniature pneumatic power device 1 in this case is assembled, the front schematic diagram will be as shown in FIG. 1B, and As shown in FIGS. 7A to 7E, it can be seen that the micro fluid control device 1A is assembled corresponding to the micro valve device 1B, that is, the valve plate 17 and the outlet plate 18 of the micro valve device 1B are sequentially stacked and positioned on the micro valve device. It is formed on the gas collecting plate 16 of the fluid control device 1A. The assembled back view shows the pressure relief through hole 181 and the outlet 19 on the outlet plate 18. The outlet 19 is used to connect with a device (not shown), and the pressure relief through hole 181 is used to make the micro valve device The gas in 1B is discharged to achieve the effect of pressure relief. By this assembly of the micro fluid control device 1A and the micro valve device 1B, gas is introduced from at least one air inlet hole 110 on the air inlet plate 11 of the micro fluid control device 1A and passes through the piezoelectric actuator 13 It will continue to transmit through multiple pressure chambers (not shown), so that the gas can flow unidirectionally in the micro valve device 1B and accumulate pressure in a device connected to the outlet end of the micro valve device 1B. (Not shown), and when pressure relief is required, the output of the micro fluid control device 1A is regulated so that the gas is discharged through the pressure relief through hole 181 on the outlet plate 18 of the micro valve device 1B for relief. Pressure.

Please continue to refer to FIG. 1A and FIG. 2A. As shown in FIG. 1A, the air inlet plate 11 of the micro fluid control device 1A has a first surface 11b, a second surface 11a, and at least one air inlet hole 110. In the example, the number of the air inlet holes 110 is four, but it is not limited to this. It penetrates the first surface 11b and the second surface 11a of the air inlet plate 11 and is mainly used for the gas to comply with the atmospheric pressure from outside the device. This function flows into the micro fluid control device 1A from the at least one air inlet hole 110. And as shown in FIG. 2A, it can be seen from the first surface 11b of the air inlet plate 11, There is at least one busbar hole 112 formed thereon to correspond to the at least one air inlet hole 110 of the second surface 11 a of the air inlet plate 11. In this embodiment, the number of the busbar holes 112 corresponds to the air inlet holes 110, and the number is 4, but is not limited thereto. The central communication portion of the busbar holes 112 has a central recess 111. Moreover, the central recessed portion 111 is in communication with the busbar hole 112, so that the gas entering the busbar hole 112 from the air inlet hole 110 can be guided and converged to the central recessed portion 111 for transmission. Therefore, in this embodiment, the air inlet plate 11 has an air inlet hole 110, a bus bar hole 112, and a central recess 111 that are integrally formed, and a confluence chamber for a confluent gas is formed correspondingly at the central recess 111 for Gas is temporarily stored. In some embodiments, the material of the air inlet plate 11 may be, but is not limited to, a stainless steel material, and the thickness is between 0.4 mm and 0.6 mm, and the preferred value is 0.5 mm, but Not limited to this. In other embodiments, the depth of the busbar cavity formed by the central recess 111 is the same as the depth of the busbar holes 112, and the preferred value of the depth of the busbar cavity and the busbar holes 112 is described Between 0.2mm and 0.3mm, but not limited to this. The resonance sheet 12 is composed of a flexible material, but is not limited thereto. The resonance sheet 12 has a hollow hole 120 on the resonance sheet 12 and is provided corresponding to the central recess 111 of the first surface 11 b of the air intake plate 11. To allow gas to circulate. In other embodiments, the resonant plate 12 may be made of a copper material, but is not limited thereto, and its thickness is between 0.03mm and 0.08mm, and its preferred value is 0.05mm, but also Not limited to this.

Please also refer to FIG. 3A, FIG. 3B, and FIG. 3C, which are a schematic diagram of the front structure, the back structure, and the cross-sectional structure of the piezoelectric actuator of the miniature pneumatic power device shown in FIG. 1A, respectively. The actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132, and a piezoelectric ceramic plate 133. The piezoelectric ceramic plate 133 is attached to the first of the suspension plate 130. The surface 130b is used to apply voltage to generate deformation to drive the suspension plate 130 to bend and vibrate. The suspension plate 130 has a central portion 130d and an outer peripheral portion 130e. When the piezoelectric ceramic plate 133 is driven by a voltage, the suspension plate 130 can be driven by the central portion. The bending vibration from 130d to the outer peripheral portion 130e, and the at least one bracket 132 is connected between the suspension plate 130 and the outer frame 131. In this embodiment, the bracket 132 is connected between the suspension plate 130 and the outer frame 131. The two ends are respectively connected to the outer frame 131 and the suspension plate 130 to provide elastic support, and at least one gap 135 is provided between the bracket 132, the suspension plate 130 and the outer frame 131 for gas circulation, and the Suspension plate 130, frame 1 31 And the shape and number of the brackets 132 have various changes. In addition, the outer frame 131 is arranged around the outer side of the suspension plate 130 and has a conductive pin 134 protruding outward for power connection, but not limited thereto. In this embodiment, the suspension plate 130 is a stepped structure, which means that the second surface 130a of the suspension plate 130 further has a convex portion 130c. The convex portion 130c may be, but is not limited to, a circular protrusion. Structure, and the height of the convex portion 130c is between 0.02mm and 0.08mm, and the preferred value is 0.03mm, and its diameter is 0.55 times the minimum side length of the suspension plate 130, but it is not limited thereto. Please refer to FIG. 3A and FIG. 3C at the same time, the surface of the convex portion 130c of the suspension plate 130 is coplanar with the second surface 131a of the outer frame 131, and the second surface 130a of the suspension plate 130 and the second surface of the bracket 132 The surface 132a is also coplanar, and the protrusion 130c of the suspension plate 130 and the second surface 131a of the outer frame 131 have a specific depth between the second surface 130a of the suspension plate 130 and the second surface 132a of the bracket 132. As for the first surface 130b of the suspension plate 130, as shown in FIGS. 3B and 3C, it is a flat coplanar structure with the first surface 131b of the outer frame 131 and the first surface 132b of the bracket 132, and the piezoelectric The ceramic plate 133 is attached to the first surface 130 b of the flat suspension plate 130. In other embodiments, the shape of the suspension plate 130 can also be a flat, square plate-shaped structure with two sides, which is not limited to this, and can be arbitrarily changed according to the actual application situation. In some embodiments, the suspension plate 130, the bracket 132, and the outer frame 131 may be a one-piece structure, and may be composed of a metal plate, such as stainless steel, but not limited thereto. And in some embodiments, the thickness of the suspension plate 130 is between 0.1mm and 0.4mm, and its preferred value is 0.27mm, and the length of the suspension plate 130 is between 7.5mm and 12mm, and its The preferred value may be 7.5mm to 8.5mm and the width may be between 7.5mm and 12mm, and the preferred value may be 7.5mm to 8.5mm, but not limited thereto. As for the thickness of the outer frame 131 is between 0.2 mm and 0.4 mm, and the preferred value is 0.3 mm, but it is not limited thereto.

In still other embodiments, the thickness of the piezoelectric ceramic plate 133 is between 0.05 mm and 0.3 mm, and the preferred value is 0.10 mm, and the piezoelectric ceramic plate 133 has a size not larger than the suspension plate 130. The length of the side is between 7.5mm and 12mm, and the preferred value can be 7.5mm to 8.5mm, the width can be between 7.5mm and 12mm, and the preferred value can be 7.5mm to 8.5mm, and the preferred length and width ratio is between 0.625 and 1.6 times, but it is not limited to this. In other embodiments, the side length of the piezoelectric ceramic plate 133 may be small. The sides of the suspension plate 130 are long and are similarly designed as a square plate-like structure corresponding to the suspension plate 130, but not limited thereto.

In the related embodiment of the miniature pneumatic power device 1 of the present case, the reason why the piezoelectric actuator 13 uses a square suspension plate 130 is that compared to a circular suspension plate (as shown in FIG. 4A, the circular suspension plate j0) By design, the structure of the square suspension plate 130 obviously has the advantage of saving power. The comparison of power consumption is shown in Table 1 below:

Therefore, it is known from the above table of the experiment that the piezoelectric actuator 13 with a square suspension plate 130 side length (8mm to 10mm) is smaller than the diameter of the circular suspension plate j0 (8mm to 10mm). Piezoelectric actuators save power. The above comparison data of power consumption obtained through experiments can be inferred as: due to the capacitive load operating at the resonance frequency, the power consumption will increase with the increase of frequency, and the size of the side will be square. The resonance frequency of the designed suspension plate 130 is obviously lower than that of the same circular suspension plate j0, so its relative power consumption is also significantly lower, that is, the suspension plate 130 of the square design used in this case is compared with the circular suspension plate j0. Design has power saving advantages, especially for wearable devices. Saving power is a very important design focus. In any case, the power saving effect of the above-mentioned suspended board with square design is obtained through experiments, and cannot be directly derived from theoretical formulas. The speculation of its power saving reason is only used as a reference for the rationality of the experiment.

Please refer to FIGS. 4A, 4B, and 4C, which are schematic diagrams of various implementation modes of the piezoelectric actuator. As shown in the figure, it can be seen that the suspension plate 130, the outer frame 131, and the bracket 132 of the piezoelectric actuator 13 can have various types, and can have at least (a) to (l) and the like shown in FIG. 4A. Various aspects, for example, (a) the outer frame a1 and the suspension plate a0 have a square structure, and the two are connected by multiple brackets a2, for example, 8 but not This is a limitation, and a gap a3 is provided between the bracket a2, the suspension plate a0, and the outer frame a1 for gas circulation. In another (i) aspect, the outer frame i1 and the suspension plate i0 are also square in structure, but only two brackets i2 are used to connect them; in addition, there are further related technologies, such as 4B, As shown in Fig. 4C, the suspension plate of the piezoelectric actuator 13 can also have various forms such as (m) ~ (r) shown in Fig. 4B and (s) ~ (x) shown in Fig. 4C. In these aspects, the suspension plate 130 and the outer frame 131 have a square structure. For example, (m) the outer frame m1 and the suspension plate m0 are both square structures, and the two are connected by a plurality of brackets m2, for example: 4, but not limited to this, A gap m3 is provided between the bracket m2, the suspension plate m0, and the outer frame m1 for fluid circulation. And in this embodiment, the bracket m2 connected between the outer frame m1 and the suspension plate m0 may be, but not limited to, a plate connecting portion m2, and the plate connecting portion m2 has two end portions m2 'and m2 ", One end portion m2 'is connected to the outer frame m1, and the other end portion m2 "is connected to the suspension plate m0, and the two end portions m2' and m2" are corresponding to each other and are disposed on the same axis. Yu (n In the aspect, it also has an outer frame n1, a suspension plate n0, and a bracket n2 connected between the outer frame n1, the suspension plate n0, and a gap n3 for fluid flow. The bracket n2 may also be, but not limited to, one. The plate connection portion n2, the plate connection portion n2 also has two end portions n2 'and n2 ", and the end portion n2' is connected to the outer frame n1, and the other end portion n2" is connected to the floating plate n0, but in this embodiment In the embodiment, the plate connection portion n2 is connected to the outer frame n1 and the suspension plate n0 at an oblique angle between 0 and 45 degrees. In other words, the two end portions n2 ′ and n2 ″ are not disposed on the same horizontal axis. It is a setting relationship for mutual dislocation. In the aspect (o), the structures such as the outer frame o1, the suspension plate o0 and the bracket o2 connected between the outer frame o1, the suspension plate o0, and the gap o3 for fluid circulation are similar to the foregoing embodiments, wherein The design type of the plate connection portion o2 as a bracket is slightly different from the (m) mode. However, in this mode, the two end portions o2 'and o2 "of the plate connection portion o2 are still corresponding to each other and are provided. On the same axis.

Also in the (p) aspect, it also has a structure such as an outer frame p1, a suspension plate p0, a bracket p2 connected between the outer frame p1, the suspension plate p0, and a gap p3 for fluid flow. Here, the embodiment is implemented. Among them, the plate connection part p2 as a bracket further has a structure such as a suspension plate connection part p20, a beam part p21, and an outer frame connection part p22, wherein the beam part p21 is disposed in a gap p3 between the suspension plate p0 and the outer frame p1, and The setting direction is parallel to the outer frame p1 and the suspension plate p0, and the suspension plate connection portion p20 is connected between the beam portion p21 and the suspension plate p0, and the outer frame connection portion p22 connects the beam portion p21 and the outer frame p1. And the suspension board connection part p20 and the outer frame connection part p22 also correspond to each other and are disposed on the same axis.

In the aspect (q), the structures such as the outer frame q1, the suspension plate q0, and the bracket q2 connected between the outer frame q1, the suspension plate q0, and the gap q3 for fluid circulation are all the same as the aforementioned (m), (o ) The appearance is similar, in which the design of the plate connection part q2, which is only a bracket, is slightly different from the (m), (o) appearance. In this aspect, the suspension plate q0 has a square shape, and Each side thereof has two plate connecting portions q2 connected to the outer frame q1, and both end portions q2 'and q2 "of each plate connecting portion q2 are also corresponding to each other and are disposed on the same axis. However, (r In the aspect, it also has components such as an outer frame r1, a suspended plate r0, a bracket r2, and a gap r3, and the bracket r2 may also be, but not limited to, a plate connecting portion r2. In this embodiment, the plate connecting portion r2 It is a V-shaped structure. In other words, the plate connection portion r2 is also connected to the outer frame r1 and the suspension plate r0 at an inclined angle between 0 and 45 degrees. Therefore, each plate connection portion r2 has one end portion r2 ”and The suspension plate r0 is connected and has two end portions r2 'connected to the outer frame r1, which means that the two end portions b2' and the end portions b2 "are not disposed on the same horizontal axis.

Continuing as shown in Figure 4C, the appearance types of these (s) ~ (x) appearances roughly correspond to the shapes of (m) ~ (r) shown in Figure 4B, except for these (s ) ~ (x), each of the levitation plates 130 of the piezoelectric actuator 13 is provided with a convex portion 130c, that is, structures such as s4, t4, u4, v4, w4, and x4 as shown in the figure. Regardless of the state of (m) ~ (r) or the state of (s) ~ (x), the suspension plate 130 is designed as a square shape to achieve the aforementioned low power consumption effect; It can be seen that whether the suspension plate 130 is a flat flat structure with two sides or a stepped structure with convex portions on one surface, it is within the protection scope of this case and is connected between the suspension plate 130 and the outer frame 131. The type and quantity of the bracket 132 can also be determined according to the actual application situation The implementation of changes is not limited to the form shown in this case. As mentioned before, the suspension plate 130, the outer frame 131, and the bracket 132 can be a one-piece structure, but not limited to this. As for the manufacturing method, it can be processed by traditional processing, or yellow light etching, or laser. Processing, or electroforming, or electrical discharge machining are not limited to this.

In addition, please refer to FIG. 1A and FIG. 2A continuously. In the microfluidic chamber device 1A, an insulation sheet 141, a conductive sheet 15 and another insulation sheet 142 are sequentially disposed under the piezoelectric actuator 13 in sequence. And its shape substantially corresponds to the shape of the outer frame of the piezoelectric actuator 13. In some embodiments, the insulating sheets 141 and 142 are made of an insulative material, such as plastic, but not limited to this for insulating purposes. In other embodiments, the conductive sheet 15 is made of an insulating material. It is made of conductive material, such as metal, but it is not limited to it for electrical conduction. And, in this embodiment, a conductive pin 151 may be provided on the conductive sheet 15 for electrical conduction.

Please refer to FIG. 1A and FIGS. 5A to 5E at the same time, wherein FIGS. 5A to 5E are schematic diagrams of partial operation of the micro fluid control device 1A of the micro pneumatic power device shown in FIG. 1A. First, as shown in FIG. 5A, it can be seen that the micro fluid control device 1A is sequentially stacked by an air intake plate 11, a resonance sheet 12, a piezoelectric actuator 13, an insulating sheet 141, a conductive sheet 15, and another insulating sheet 142. In this embodiment, a material, such as conductive adhesive, is filled in the gap g0 between the periphery of the outer plate 131 of the resonance plate 12 and the piezoelectric actuator 13, but is not limited to this. The depth of the gap g0 can be maintained between the resonance sheet 12 and the convex portion 130 c of the suspension plate 130 of the piezoelectric actuator 13, so that the airflow can be guided to flow more quickly, and the convex portion 130 c of the suspension plate 130 and the resonance can be guided. The sheet 12 is kept at a proper distance to reduce contact interference with each other, so that noise generation can be reduced.

Please refer to FIGS. 5A to 5E. As shown in the figure, after the air intake plate 11, the resonance plate 12 and the piezoelectric actuator 13 are sequentially assembled correspondingly, the cavity 120 in the resonance plate 12 can be connected with it. The air inlet plates 11 on the upper side collectively form a cavity for converging gas, and a first cavity 121 is formed between the resonance plate 12 and the piezoelectric actuator 13 to temporarily store the gas, and the first cavity 121 It communicates with the cavity at the central recess 111 of the first surface 11b of the air inlet plate 11 through the hollow hole 120 in the resonance plate 12, and the sides of the first cavity 121 are supported by the brackets 132 of the piezoelectric actuator 13. A gap 135 therebetween communicates with the micro valve device 1B provided below.

When the miniature fluid control device 1A of the miniature pneumatic power device 1 is actuated, the piezoelectric actuator 13 is mainly actuated by a voltage, and the support 132 is used as a fulcrum to perform vertical reciprocating vibration. As shown in FIG. 5B, when the piezoelectric actuator 13 is vibrated downward by being actuated by a voltage, since the resonance plate 12 is a light and thin sheet structure, when the piezoelectric actuator 13 vibrates, The resonance plate 12 will also resonate and perform vertical reciprocating vibration, that is, the portion of the resonance plate 12 corresponding to the central recessed portion 111 of the air intake plate 11 will also be deformed by bending vibration, that is, the resonance plate 12 corresponds to the The part of the central recessed portion 111 of the air intake plate 11 is the movable portion 12 a of the resonance plate 12. When the piezoelectric actuator 13 bends and vibrates downward, the movable portion 12 a of the resonance plate 12 will be brought in by the fluid. And pushing and the vibration of the piezoelectric actuator 13, and as the piezoelectric actuator 13 bends and deforms downward, the gas enters through at least one air inlet hole 110 on the air inlet plate 11 and passes through its first At least one bus hole 112 of a surface 11b is collected at the central recess 111 of the center, and then flows downward into the first cavity 121 through the central hole 120 provided on the resonance plate 12 corresponding to the central recess 111, and thereafter Due to the vibration of the piezoelectric actuator 13, the resonance plate 12 will also resonate and vertical Reciprocating vibration, as shown in FIG. 5C, at this time, the movable portion 12a of the resonance plate 12 also vibrates downwards, and is attached to the convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13 to suspend. The space between the area other than the convex portion 130c of the plate 130 and the fixing chamber 12b on both sides of the resonance plate 12 will not be reduced, and the deformation of the resonance plate 12 will be used to compress the first chamber 121. Volume, and close the middle circulation space of the first chamber 121, so that the gas in it is pushed to flow to both sides, and then passes through the gap 135 between the brackets 132 of the piezoelectric actuator 13 and flows downward. As for the 5D figure, the movable portion 12a of the resonance plate 12 is deformed by bending vibration, and then returns to the initial position, and the subsequent piezoelectric actuator 13 is driven by the voltage to vibrate upward, so the same pressure is applied to the first chamber 121 At this time, since the piezoelectric actuator 13 is lifted upward, the displacement of the lift may be d, so that the gas in the first chamber 121 will flow to both sides, and then the gas will be continuously driven from the air inlet plate. At least one air inlet hole 110 on 11 enters, and then flows into the cavity formed by the central recess 111, and as shown in FIG. 5E, the resonance plate 12 is resonated upward by the vibration of the piezoelectric actuator 13 lifted upward, The movable portion 12a of the resonance plate 12 is also brought to an upward position, so that the gas in the central recessed portion 111 flows into the first chamber 121 through the central hole 120 of the resonance plate 12, and passes through the support 132 of the piezoelectric actuator 13 The interspace 135 flows downward through the outflow micro fluid control device 1A. It can be seen from this embodiment that when the resonance plate 12 performs a vertical reciprocating vibration When moving, the gap g0 between it and the piezoelectric actuator 13 can be used to increase the maximum distance of its vertical displacement. In other words, setting the gap g0 between the two structures allows the resonance plate 12 to generate at resonance. Larger vertical displacement, and the vibration displacement of the piezoelectric actuator is d, and the difference between the piezoelectric actuator and the gap g0 is x, that is, x = g0-d. When tested, when x ≦ 0um, it is noisy; When x = 1 to 5um, the maximum output pressure of miniature pneumatic power unit 1 can reach 350mmHg; when x = 5 to 10um, the maximum output pressure of miniature pneumatic power unit 1 can reach 250mmHg; when x = 10 to 15um, miniature pneumatic power unit 1 The maximum output air pressure can reach 150mmHg, and the corresponding relationship is shown in Table 2 below. The above values are between an operating frequency of 17K to 20K and an operating voltage of ± 10V to ± 20V. In this way, a pressure gradient is generated in the design of the flow channel through this miniature fluid control device 1A, so that the gas flows at high speed, and the gas is transmitted from the suction end to the discharge end through the difference in the impedance of the flow path, and there is pressure at the discharge end. In this state, there is still the ability to continuously push out the gas and achieve the effect of silence.

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonance plate 12 may be the same as the vibration frequency of the piezoelectric actuator 13, that is, both may be upward or downward at the same time, which may be based on the actual implementation situation. However, the change of Ren Shi is not limited to the operation mode shown in this embodiment.

Please refer to FIG. 1A, FIG. 2A, FIG. 6A, and FIG. 6B at the same time, where FIG. 6A is a schematic diagram of the pressure collecting action of the gas collecting plate 16 and the micro valve device 1B of the miniature pneumatic power device shown in FIG. 1A Fig. 6B is a schematic diagram of the pressure relief operation of the gas collecting plate 16 and the micro valve device 1B of the micro pneumatic power device shown in Fig. 1A. As shown in Figures 1A and 6A, the miniature valve device 1B of the miniature pneumatic power device 1 in this case is sequentially stacked by a valve plate 17 and an outlet plate 18, and is matched with a gas collection plate 16 of a miniature fluid control device 1A To work.

In this embodiment, the gas collecting plate 16 has a surface 160 and a first reference surface 161. The surface 160 The upper system is recessed to form a gas collection chamber 162 for the piezoelectric actuator 13 to be set therein. The gas transmitted downward by the micro fluid control device 1A is temporarily accumulated in this gas collection chamber 162 and is collected in the gas collection chamber 162. The plate 16 has a plurality of through holes including a first through hole 163 and a second through hole 164. One end of the first through hole 163 and the second through hole 164 is in communication with the gas collection chamber 162 and the other end Then, they are in communication with the first pressure relief chamber 165 and the first outlet chamber 166 on the first reference surface 161 of the gas collecting plate 16 respectively. And, a first convex structure 167 is further added at the first exit chamber 166, for example, it may be, but not limited to, a cylindrical structure. The height of the first convex structure 167 is higher than that of the gas collecting plate 16. The first reference surface 161 and the height of the first convex structure 167 are between 0.3 mm and 0.55 mm, and the preferred value is 0.4 mm.

The outlet plate 18 includes a pressure relief through hole 181, an outlet through hole 182, a second reference surface 180, and a second surface 187. The pressure relief through hole 181 and the outlet through hole 182 pass through the second of the outlet plate 18. A reference surface 180 and a second surface 187. A second pressure relief chamber 183 and a second cavity 184 are recessed on the second reference surface 180. The pressure relief through hole 181 is provided in the center of the second pressure relief chamber 183. There is also a communication channel 185 between the second pressure relief chamber 183 and the second outlet chamber 184 for gas circulation, and one end of the outlet through hole 182 is in communication with the second outlet chamber 184 The other end is in communication with the outlet 19. In this embodiment, the outlet 19 can be connected to a device (not shown), such as a press, but not limited to this.

The valve plate 17 has a valve hole 170 and a plurality of positioning holes 171. The thickness of the valve plate 17 is between 0.1 mm and 0.3 mm, and the preferred value is 0.2 mm.

When the valve plate 17 is positioned and assembled between the gas collecting plate 16 and the outlet plate 18, the pressure relief through hole 181 of the outlet plate 18 corresponds to the first through hole 163 and the second pressure relief cavity of the gas collecting plate 16. The chamber 183 corresponds to the first pressure-relief chamber 165 of the gas collecting plate 16, the second outlet chamber 184 corresponds to the first outlet chamber 166 of the gas collecting plate 16, and the valve plate 17 is provided in the gas collecting plate Between the plate 16 and the outlet plate 18, the first pressure relief chamber 165 is blocked from communicating with the second pressure relief chamber 183, and the valve hole 170 of the valve plate 17 is provided in the second through hole 164 and the outlet through hole. 182, and the valve hole 170 is correspondingly arranged in the first convex structure 167 of the first outlet chamber 166 of the gas collecting plate 16, so that the single valve hole 170 is designed so that the gas can respond to its pressure difference To achieve the purpose of one-way flow.

In addition, one end of the pressure relief through hole 181 of the outlet plate 18 may be provided with a second convex structure 181a formed by a protrusion, such as, but not limited to, a cylindrical structure. The height of the second convex structure 181a is referred to Between 0.3mm and 0.55mm, and its preferred value is 0.4mm, and the second convex structure 181a is improved to increase its height. The height of the second convex structure 181a is higher than that of the exit plate 18. The second reference surface 180 is used to strengthen the valve plate 17 to quickly abut against and close the pressure relief through-hole 181, and to achieve the effect of completely sealing by a pre-force resistance; and the outlet plate 18 further has at least one limiting structure 188. The height of the limiting structure 188 is 0.32mm. Taking this embodiment as an example, the limiting structure 188 is disposed in the second pressure relief chamber 183 and is a ring-shaped block structure. When the micro valve device 1B performs pressure collecting operation, it is used for supporting the valve piece 17 to prevent the valve piece 17 from collapsing and to make the valve piece 17 open or close more quickly.

When the miniature valve device 1B is actuated under pressure, it is mainly shown in FIG. 6A, which can respond to the pressure provided by the gas transmitted downward from the miniature fluid control device 1A, or when the external atmospheric pressure is greater than the outlet pressure. 19 When the internal pressure of the connected device (not shown), the gas will flow from the gas collecting chamber 162 in the gas collecting plate 16 of the micro fluid control device 1A through the first through hole 163 and the second through hole 164, respectively. It flows down into the first pressure-relief chamber 165 and the first outlet chamber 166. At this time, the downward pressure of the gas causes the flexible valve sheet 17 to bend downward to deform and thereby make the volume of the first pressure-relief chamber 165 down. It is enlarged and corresponds to the first through hole 163 and is flatly pressed down and abuts against the end of the pressure relief through hole 181, so that the pressure relief through hole 181 of the outlet plate 18 can be closed, so it is in the second pressure relief chamber 183 The gas inside does not flow out from the pressure relief through hole 181. Of course, in this embodiment, a design of a second convex portion structure 181a may be added to the end of the pressure relief through hole 181 to strengthen the valve plate 17 to quickly abut against and close the pressure relief through hole 181, and achieve a pre-force resistance effect. The effect of complete sealing, and at the same time, through the limiting structure 188 provided around the pressure relief through hole 181 to assist in supporting the valve sheet 17 so that it will not collapse. On the other hand, since the gas system flows downward from the second through hole 164 into the first exit chamber 166, and the valve sheet 17 corresponding to the first exit chamber 166 also bends downward, so that it corresponds to The valve hole 170 is opened downward, and the gas can flow from the first outlet chamber 166 into the second outlet chamber 184 through the valve hole 170, and flow from the outlet through hole 182 to the outlet 19 and the device connected to the outlet 19 (Not shown), thereby performing pressure collection operation on the device.

Please refer to FIG. 6B. When the micro valve device 1B is depressurized, it can be adjusted by regulating the micro flow. The gas transmission volume of the body control device 1A makes the gas no longer be input into the gas collection chamber 162, or when the internal pressure of the device (not shown) connected to the outlet 19 is greater than the external atmospheric pressure, the micro valve device can be made 1B for pressure relief. At this time, the gas is input into the second outlet chamber 184 from the outlet through-hole 182 connected to the outlet 19, so that the volume of the second outlet chamber 184 expands, and then the flexible valve sheet 17 is bent and deformed upward, and Flatly affix upwards and abut against the gas collecting plate 16, so the valve hole 170 of the valve sheet 17 will be closed due to abutting against the gas collecting plate 16. Of course, in this embodiment, the design of a first convex structure 167 can be added to the first exit chamber 166, so that the flexible valve piece 17 can be bent upward to change and quickly resist, so that the valve hole 170 is more favorable to achieve The pre-stress resistance fully adheres to the closed state of the seal. Therefore, when in the initial state, the valve hole 170 of the valve plate 17 will be closed due to abutting against the first convex structure 167, and the second mouth will be closed. The gas in the chamber 184 will not flow back into the first outlet chamber 166, so as to achieve better prevention of gas leakage. And, the gas system in the second outlet chamber 184 can flow into the second pressure relief chamber 183 through the communication channel 185, thereby expanding the volume of the second pressure relief chamber 183 and corresponding to the second pressure relief chamber 183. The valve plate 17 of the pressure chamber 183 is also bent upward and deformed. At this time, because the valve plate 17 is not closed against the end of the pressure relief through hole 181, the pressure relief through hole 181 is in an open state, that is, the second pressure relief chamber The gas in the chamber 183 can flow outward through the pressure relief through hole 181 for pressure relief operation. Of course, in this embodiment, the second convex structure 181a added at the end of the pressure relief through hole 181 or the limiting structure 188 provided in the second pressure relief chamber 183 can be used to allow the flexible valve plate 17 The upward bending shape changes quickly, which is more conducive to the state of closing the pressure relief through hole 181. In this way, the pressure in the device (not shown) connected to the outlet 19 can be exhausted and reduced by the one-way pressure relief operation, or the pressure relief operation can be completed by completely exhausting.

Please refer to FIG. 1A, FIG. 2A, and FIG. 7A to FIG. 7E at the same time, where FIGS. 7A to 7E are schematic diagrams of the pressure collecting action of the miniature pneumatic power device shown in FIG. 1A. As shown in FIG. 7A, the miniature pneumatic power device 1 is a combination of a miniature fluid control device 1A and a miniature valve device 1B. The miniature fluid control device 1A is, as described above, sequentially composed of an air inlet plate 11 and a resonance plate 12 , Piezoelectric actuator 13, insulating sheet 141, conductive sheet 15, another insulating sheet 142, and gas collecting plate 16 are stacked and assembled, and are arranged between resonance sheet 12 and piezoelectric actuator 13. A gap g0 has a first chamber 121 between the resonance plate 12 and the piezoelectric actuator 13, and the micro valve device 1B is also assembled by sequentially stacking the valve plate 17 and the outlet plate 18 and so on. It is located on the gas collecting plate 16 of the micro fluid control device 1A, and has a gas collecting chamber 162 between the gas collecting plate 16 and the piezoelectric actuator 13 of the micro fluid control device 1A. The first reference surface 161 of 16 further recesses a first pressure relief chamber 165 and a first outlet chamber 166, and the second reference surface 180 of the exit plate 18 further recesses a second pressure relief chamber 183 and a second outlet Oral chamber 184. In this embodiment, the operating frequency of the miniature pneumatic power device is between 27K and 29.5K, the operating voltage is ± 10V to ± 16V, and the multiple pressure chambers are used for matching. The driving of the piezoelectric actuator 13 and the vibration of the resonance plate 12 and the valve plate 17 cause the gas to be transmitted to the downward pressure.

As shown in FIG. 7B, when the piezoelectric actuator 13 of the micro-fluid cavity device 1A is vibrated downward by being actuated by a voltage, the gas will enter the micro-fluid control device through the air inlet hole 110 on the air inlet plate 11 In 1A, at least one busbar hole 112 is collected to the central recess 111, and then flows into the first cavity 121 downward through the hollow hole 120 on the resonance sheet 12. Thereafter, as shown in FIG. 7C, due to the resonance effect of the vibration of the piezoelectric actuator 13, the resonance plate 12 will also perform reciprocating vibration, that is, it vibrates downward and approaches the piezoelectric actuator. The convex portion 130c of the suspension plate 130 of 13 is deformed by the resonance plate 12 to increase the volume of the cavity at the central recess 111 of the air intake plate 11 and compress the volume of the first cavity 121 at the same time. The gas in the first chamber 121 is pushed to flow to both sides, and then passes through the gap 135 between the brackets 132 of the piezoelectric actuator 13 and flows downward to flow to the micro fluid control device 1A and the micro valve device. The gas collection chambers 162 between 1B, and then flow through the first through holes 163 and the second through holes 164 communicating with the gas collection chambers 162 to the first pressure relief chamber 165 and the first outlet respectively. In the oral cavity 166, it can be seen from this embodiment that when the resonance plate 12 performs vertical reciprocating vibration, the gap g0 between the resonance plate 12 and the piezoelectric actuator 13 can be used to increase the maximum distance of its vertical displacement. In other words, In other words, setting the gap g0 between the two structures can cause the resonance plate 12 to generate a larger amplitude when the resonance occurs. The upper and lower displacement.

Then, as shown in FIG. 7D, since the resonance piece 12 of the micro fluid control device 1A returns to the initial position, the piezoelectric actuator 13 is driven by the voltage to vibrate upward, and the vibration displacement of the piezoelectric actuator is Is d, the difference from the gap g0 is x, that is, x = g0-d. After testing, when x = 1 to 5um, the operating frequency is 27k to 29.5KHz, and the operating voltage is ± 10V to ± 16V, the maximum The output air pressure can reach at least 300mmHg, but not more than This is limited. The volume of the first chamber 121 is also squeezed in this way, so that the gas in the first chamber 121 flows to both sides, and is continuously input into the gas collection chamber through the gap 135 between the brackets 132 of the piezoelectric actuator 13. 162. In the first pressure relief chamber 165 and the first outlet chamber 166, this further increases the pressure in the first pressure relief chamber 165 and the first outlet chamber 166, thereby pushing the flexible valve sheet 17 When bending deformation occurs downward, in the second pressure relief chamber 183, the valve plate 17 is flat downward and abuts against the second convex structure 181a at the end of the pressure relief through hole 181, so that the pressure relief through hole 181 It is closed, and in the second outlet chamber 184, the valve hole 170 on the valve sheet 17 corresponding to the outlet through hole 182 is opened downward, so that the gas in the second outlet chamber 184 can be transmitted downward to the outlet through hole 182. The outlet 19 and any device (not shown) connected to the outlet 19, so as to achieve the purpose of pressure collecting operation. Finally, as shown in FIG. 7E, when the resonance plate 12 of the microfluidic control device 1A moves upward in resonance, the gas in the central recess 111 of the first surface 11b of the air inlet plate 11 can be removed by the hollow hole 120 of the resonance plate 12. It flows into the first chamber 121 and is continuously transmitted downward to the gas collecting plate 16 through the gap 135 between the brackets 132 of the piezoelectric actuator 13. Since its gas pressure system continues to increase downward, the gas Will continue to flow through the gas collection chamber 162, the second through hole 164, the first outlet chamber 166, the second outlet chamber 184, and the outlet through hole 182 to the outlet 19 and any device connected to the outlet 19, This pressure collecting operation can be driven by the external atmospheric pressure and the pressure difference in the device, but it is not limited to this.

When the internal pressure of the device (not shown) connected to the outlet 19 is greater than the external pressure, the miniature pneumatic power unit 1 can perform pressure reduction or pressure relief operations as shown in FIG. 8. The operation of pressure relief is mainly as described above. By regulating the gas transmission volume of the micro fluid control device 1A, the gas is no longer input into the gas collection chamber 162. At this time, the gas will come from the outlet connected to the outlet 19 The through-hole 182 is input into the second exit chamber 184, so that the volume of the second exit chamber 184 expands, thereby urging the flexible valve sheet 17 to bend upward and deform, and flatly upwardly press against the first exit chamber. 166 on the first convex structure 167, and the valve hole 170 of the valve plate 17 is closed, that is, the gas in the second outlet chamber 184 will not flow back into the first outlet chamber 166; and, the second outlet chamber The gas system in 184 can flow into the second pressure-relief chamber 183 through the communication channel 185, and then the pressure-relief through hole 181 is used for pressure-relief operation; in this way, the one-way gas transmission by the miniature valve structure 1B can be performed. Work to reduce the pressure of the gas in the device connected to the outlet 19, or Full and complete discharge relief operations.

From the above description, it can be known that with the miniaturization of the miniature pneumatic power device 1, the performance changes of the miniature pneumatic power device 1 are shown in Table 3 below:

It can be seen from this table that after sampling 25 micro-pneumatic power plant 1 products in actual experiments, the conclusion obtained from the experiment is: by gradually reducing the average size of the side of the square suspension plate 130 from 14 mm to 7.5 mm, It has been found that as the dimensions of these sides decrease, the functions of yield and maximum output air pressure are gradually improved, and the resulting preferred size is 7.5mm to 8.5mm. It is further found that the preferred size is particularly at its operating frequency at Between 27K and 29.5KHz, the function that can increase the maximum output pressure reaches at least 300mmHg. The reasonable speculation of the above phenomenon seems to be that when the side length of the suspension plate 130 is reduced, the suspension plate 130 reduces its horizontal deformation when it is vertically vibrated, so the kinetic energy in the vertical direction can be effectively used, and the side length is reduced. It can reduce the vertical error value during assembly, thereby reducing the collision between the suspension plate 130 and the resonance plate 12 or other assembly elements. This involves maintaining a certain distance between the suspension plate 130 and the resonance plate 12, so the yield is good. It can increase and increase its maximum output pressure at the same time. In addition, when the size of the suspension plate 130 of the piezoelectric actuator 13 is reduced, the piezoelectric actuator 13 can also be made smaller, and when it is not easy to tilt when vibrating, the volume of the internal gas flow path is reduced, which is beneficial to Pushed or compressed by air, it can improve the performance and reduce the overall component size simultaneously. Furthermore, as mentioned above, for the piezoelectric actuator 13 equipped with a large-sized suspension plate 130 and a piezoelectric ceramic plate 133, the suspension plate 130 has poor rigidity, and is easily distorted and deformed during vibration, making it easy. Collision interference with the resonance plate 12 or other assembly components, so it generates a high proportion of noise, and the noise problem is also one of the causes of product failure, so the defective rate of the large-scale suspension plate 130 and piezoelectric ceramic plate 133 Higher, therefore, when the suspension plate 130 and the piezoelectric ceramic plate 133 are reduced in size, in addition to improving performance and reducing noise, they can also be used. Reduce product defect rate.

However, in any case, the above-mentioned functions of increasing the yield and increasing the maximum output pressure due to the reduction of the side length of the suspension plate 130 are obtained through experiments and cannot be directly deduced by theoretical formulas. The speculation is only used as a reference for the rationality of the experiment.

Of course, in order to reduce the thickness of the miniature pneumatic power device 1 in this case, the total thickness of the miniature fluid control device 1A assembled with the miniature valve device 1B is between 2mm and 6mm, thereby making the miniature gas power device 1 portable and comfortable. It can be widely used in medical equipment and related equipment.

In summary, the micro-pneumatic power device provided in this case is mainly connected with the micro fluid control device and the micro valve device, so that the gas enters from the air inlet of the micro fluid control device and is actuated by piezoelectricity. The action of the device causes the gas to generate a pressure gradient in the designed flow channel and pressure chamber, so that the gas flows at high speed and is transferred to the micro valve device, and then through the one-way valve design of the micro valve device, the gas is unidirectional Flow, which can accumulate pressure in any device connected to the outlet; and when pressure reduction or pressure relief is required, the transmission volume of the micro fluid control device is regulated, and gas can be transmitted from the device connected to the outlet to the micro The second outlet chamber of the valve device is transmitted to the second pressure-relief chamber by the communication channel, and then flows out from the pressure-relief through hole, so as to achieve rapid transmission of gas and at the same time achieve the effect of silence In addition, the overall volume and thickness of the miniature gas power device can be reduced, and the miniature gas power device can be portable and comfortable. Used in medical equipment and related equipment. Therefore, the miniature gas power plant in this case has great industrial use value, and applied for it in accordance with the law.

Even though the present invention has been described in detail in the above embodiments and can be modified in various ways by those skilled in the art, it is not inferior to those protected by the scope of the attached patent.

Claims (40)

A miniature pneumatic power device includes: a miniature fluid control device including: an air inlet plate having at least one air inlet hole, at least one bus hole, and a central recess forming a bus cavity, the at least one air inlet For introducing gas, the busbar hole corresponds to the air inlet hole, and guides the gas of the air inlet hole to the confluence chamber formed by the central recess; a resonance plate with a hollow hole corresponding to the air inlet plate The convergence chamber; a piezoelectric actuator having: a suspension plate; an outer frame having at least a bracket connected to the suspension plate and the outer frame; and a piezoelectric ceramic plate attached A first surface of the suspension plate; an air collecting plate having a first through hole, a second through hole, a first pressure relief chamber and a first outlet chamber, and a first reference surface , The first exit cavity has a first convex structure, the height of the first convex structure is higher than the first reference surface of the gas collecting plate, and the first through hole is connected to the first pressure relief chamber Communication, the second through hole and the first outlet chamber Communication; wherein, the gas collecting plate, the piezoelectric actuator, the resonance plate and the air intake plate are sequentially positioned in a pair of opposite positions, and there is a gap between the resonance plate and the piezoelectric actuator. g0, forming a first cavity, so that when the piezoelectric actuator is driven, a vibration displacement d is generated, so that there is an x difference between g0 and d, that is, x = g0-d, especially when When the difference x = 1 to 5um, a gas with a maximum output pressure of 350mmHg is generated. The gas system is introduced through the at least one air inlet hole of the air intake plate, and is collected into the central recess through the at least one bus hole, and then Flowing through the hollow hole of the resonance plate to enter the first chamber, and then transmitted downward through a gap between the at least one bracket of the piezoelectric actuator to continuously push out the gas; a miniature valve device, It includes: a valve plate having a valve hole, and the valve plate having a thickness between 0.1mm and 0.3mm; and an outlet plate having a pressure relief through hole, an outlet through hole, and a second pressure relief A cavity, a second cavity, and at least one limiting structure, and a second reference surface, The end of the pressure relief through hole has a second convex structure, the height of the second convex structure is higher than the second reference surface of the outlet plate, the outlet through hole communicates with the second outlet chamber, and the at least A limiting structure is disposed in the second pressure relief chamber, and the height of the limiting structure is between 0.2mm and 0.5mm, and there is a continuous connection between the second pressure relief chamber and the second outlet chamber. A flow channel; wherein the valve plate and the outlet plate are sequentially stacked and positioned on the gas collecting plate of the micro fluid cavity device, and the pressure relief through hole of the outlet plate corresponds to the gas collecting plate The first through hole, the second pressure relief chamber of the outlet plate correspond to the first pressure relief chamber of the gas collection plate, and the second outlet chamber of the outlet plate corresponds to the gas collection plate. The first outlet chamber, and the valve plate is disposed between the gas collecting plate and the outlet plate to block the first pressure relief chamber from communicating with the second pressure relief chamber, and the valve hole of the valve plate corresponds to Disposed between the second through hole and the outlet through hole, and the gas is transmitted downward from the micro fluid control device to the Type valve device, the first through-hole and the second through-hole of the gas collecting plate enter the first pressure relief chamber and the first outlet cavity, and the valve piece of the micro valve device quickly resists The second convex structure of the outlet plate is beneficial to form a pre-force effect, completely closing the pressure relief through hole, and at the same time introducing the gas from the valve hole of the valve sheet into the outlet through hole for pressure collecting operation. When the gas is larger than the introduced gas, the pressure-collecting gas flows from the outlet through-hole toward the second outlet chamber to displace the valve plate and close the valve hole of the valve plate against the gas-collecting plate, and The at least one limiting structure assists in supporting the valve plate to prevent the valve plate from collapsing, and at the same time, the pressure-collecting gas can flow into the second pressure-relief chamber along the communication flow path in the second outlet cavity. The valve disc in the second pressure relief chamber is displaced, and the pressure-collecting gas can flow out of the pressure relief through hole for pressure relief operation. The micro-pneumatic power device according to item 1 of the scope of patent application, further comprising an operating frequency of 27K to 29.5K and an operating voltage of ± 10V to ± 16V. The micro-pneumatic power device according to item 1 of the scope of patent application, wherein a displacement generated when a gap between the resonance plate and the piezoelectric actuator of the micro-pneumatic power device is driven and the piezoelectric actuator is driven When the difference x = 5 to 10um, the gas with a maximum output pressure of 250mmHg is generated. The micro-pneumatic power device according to item 1 of the scope of patent application, wherein a displacement generated when a gap between the resonance plate and the piezoelectric actuator of the micro-pneumatic power device is driven and the piezoelectric actuator is driven When the difference x = 10 to 15um, a gas with a maximum output pressure of 150mmHg is generated. The miniature pneumatic power device according to item 1 of the scope of patent application, wherein the suspension plate has a length between 7.5 mm and 12 mm, a width between 7.5 mm and 12 mm, and a thickness between 0.1 mm and 0.4 mm. . The micro-pneumatic power device according to item 5 of the scope of patent application, wherein the suspension plate has a length of 7.5 mm to 8.5 mm, a width of 7.5 mm to 8.5 mm, and a thickness of 0.27 mm. The miniature pneumatic power device according to item 1 of the scope of the patent application, wherein the piezoelectric ceramic plate has a side length that is not greater than the side length of the suspension plate, a length between 7.5 mm and 12 mm, and a length between 7.5 mm and A width between 12 mm and a thickness between 0.05 mm and 0.3 mm. The ratio between the length and the width of the piezoelectric ceramic plate is between 0.625 times and 1.6 times. The miniature pneumatic power device according to item 7 of the scope of the patent application, wherein the piezoelectric ceramic plate has a length of 7.5 mm to 8.5 mm, a width of 7.5 mm to 8.5 mm, and a thickness of 0.10 mm. The miniature pneumatic power device according to item 1 of the patent application range, wherein the suspension plate further includes a convex portion disposed on a second surface of the suspension plate, and the height is between 0.02 mm and 0.08 mm. The miniature pneumatic power device according to item 9 of the scope of the patent application, wherein the height of the convex portion is 0.03 mm. The miniature pneumatic power device according to item 9 of the scope of the patent application, wherein the convex portion is a circular convex structure with a diameter of 0.55 times the minimum side length of the suspension plate. The miniature pneumatic power device according to item 1 of the patent application range, wherein the air inlet plate of the miniature fluid control device is made of a stainless steel material and has a thickness between 0.4 mm and 0.6 mm. The micro-pneumatic power device according to item 12 of the scope of patent application, wherein the thickness of the air inlet plate is 0.5 mm. The miniature pneumatic power device according to item 1 of the patent application scope, wherein the resonance piece of the miniature fluid control device is made of a copper material and has a thickness between 0.03 mm and 0.08 mm. The miniature pneumatic power device according to item 14 of the scope of application for a patent, wherein the thickness of the resonance plate is 0.05 mm. The miniature pneumatic power device according to item 1 of the scope of patent application, wherein the miniature fluid control device further includes at least one insulating sheet and a conductive sheet, and the at least one insulating sheet and the conductive sheet are sequentially disposed on the piezoelectric actuator. Actuator. The miniature pneumatic power device according to item 1 of the scope of the patent application, wherein the outer frame of the piezoelectric actuator of the micro fluid control device is made of a stainless steel material and has a thickness between 0.2 mm and 0.4 mm. The micro-pneumatic power device according to item 17 of the scope of patent application, wherein the thickness of the outer frame of the piezoelectric actuator is 0.3 mm. The micro-pneumatic power device according to item 1 of the patent application scope, wherein two ends of the bracket of the piezoelectric actuator of the micro-fluid control device are connected to the outer frame, and one end is connected to the suspension plate. The micro-pneumatic power device according to item 1 of the scope of patent application, wherein the thickness of the valve plate of the micro-valve device is 0.2 mm. The miniature pneumatic power device according to item 1 of the scope of patent application, wherein the height of the limiting structure of the miniature valve device is 0.32mm. The micro-pneumatic power device according to item 1 of the scope of patent application, wherein the height of the first convex portion of the first outlet chamber of the air collecting plate of the micro fluid control device is between 0.3 mm and 0.55 mm . The miniature pneumatic power device according to item 22 of the scope of patent application, wherein the height of the first convex structure of the first exit chamber is 0.4 mm. The miniature pneumatic power device according to item 1 of the scope of the patent application, wherein the height of the second convex structure of the pressure relief through hole of the outlet plate of the miniature valve device is between 0.3 mm and 0.55 mm. The miniature pneumatic power device according to item 24 of the scope of the patent application, wherein the height of the second convex structure of the pressure relief through hole is 0.4 mm. The micro-pneumatic power device according to item 1 of the scope of patent application, wherein the gas collecting plate of the micro fluid control device further has a gas collecting chamber on a surface, and the gas collecting chamber and the first through hole and The second through hole communicates. The micro-pneumatic power device according to item 1 of the scope of the patent application, wherein the first pressure relief chamber and the first outlet chamber of the gas collecting plate are disposed on the first reference surface of the gas collecting plate. A miniature pneumatic power device includes: a miniature fluid control device including: an air intake plate; a resonance plate; a piezoelectric actuator; an air collection plate having at least two through holes and at least two chambers; wherein, The gas collecting plate, the piezoelectric actuator, the resonance plate, and the air intake plate are sequentially positioned in a correspondingly stacked arrangement, and a gap g0 is formed between the resonance plate and the piezoelectric actuator to form a A first chamber, the piezoelectric actuator and the gas collecting plate form a gas collecting chamber, so that when the piezoelectric actuator is driven, a vibration displacement d is generated, so that there is a gap between g0 and d The difference in x, that is, x = g0-d, especially when the difference is x = 1 to 5um, it produces a gas with a maximum output pressure of 350mmHg, which is originally entered by the air inlet plate and flows through the resonance plate, To enter the first chamber and transmit it downward to the gas collection chamber; and a micro valve device, including: a valve plate having a valve hole; and an outlet plate having at least two through holes and at least two chambers ; Wherein, the valve plate and the outlet plate are sequentially arranged correspondingly to position the micro When the gas is transmitted to the gas collecting chamber on the gas collecting plate of the fluid control device, the gas is transferred to the micro valve device, and the gas collecting plate and the outlet plate respectively have at least two through holes and at least two chambers. In order to respond to the unidirectional flow of gas, the valve hole of the valve sheet is opened or closed correspondingly, and the pressure collection or pressure relief operation is performed. The micro-pneumatic power device according to item 28 of the scope of patent application, wherein the air inlet plate of the micro fluid control device has at least one air inlet hole, at least one bus hole, and a central recess, and the at least one air inlet hole is provided for Introducing gas, the busbar hole corresponds to the air inlet hole, and guides the gas of the air inlet hole to the central concave portion; the resonance plate has a hollow hole corresponding to the central concave portion of the air inlet plate; and the piezoelectric actuator The actuator has a suspension plate and an outer frame. The suspension plate and the outer frame are connected by at least one bracket, and a piezoelectric ceramic plate is attached to a first surface of the suspension plate. The micro-pneumatic power device according to item 28 of the scope of patent application, wherein the gas collecting plate of the micro-valve device has a first through-hole, a second through-hole, a first pressure relief chamber, and a first outlet In the oral cavity, the first through hole is in communication with the first pressure relief chamber, and the second through hole is in communication with the first outlet chamber. The micro-pneumatic power device according to item 28 of the scope of patent application, wherein the outlet plate of the micro valve device has a pressure relief through hole, an outlet through hole, a second pressure relief cavity and a second outlet cavity. There is a communication channel between the second pressure-relieving chamber and the second outlet chamber. The micro-pneumatic power device according to item 28 of the scope of the patent application, wherein the valve plate is disposed between the gas collecting plate and the outlet plate to block the first pressure relief chamber from communicating with the second pressure relief chamber, and The valve hole of the valve sheet is correspondingly disposed between the second through hole and the outlet through hole. When gas is transmitted downward from the micro fluid control device into the micro valve device, the first through hole and the first Two through-holes enter the first pressure-relief chamber and the first outlet cavity, and the introduced gas flows from the valve hole of the valve sheet into the outlet through-hole for pressure collection operation. When the pressure-collected gas is greater than the introduced gas, The pressure-collecting gas flows from the outlet through-hole toward the second outlet chamber to displace the valve plate, and close the valve hole of the valve plate against the gas-collecting plate, and at the same time, collect gas at the first The two outlet chambers can flow into the second pressure-relief chamber along the communication flow path. At this time, the valve plate is displaced in the second pressure-relief chamber, and the pressure-collecting gas can flow out of the pressure-relief through hole for pressure-relief operation. . The micro-pneumatic power device according to item 28 of the scope of patent application, further comprising an operating frequency of 27K to 29.5K and an operating voltage of ± 10V to ± 16V. The micro-pneumatic power device according to item 28 of the scope of patent application, wherein a displacement generated when a gap between the resonance plate and the piezoelectric actuator of the micro-pneumatic power device is driven and the piezoelectric actuator is driven When the difference x = 5 to 10um, the gas with a maximum output pressure of 250mmHg is generated. The micro-pneumatic power device according to item 28 of the scope of patent application, wherein a displacement generated when a gap between the resonance plate and the piezoelectric actuator of the micro-pneumatic power device is driven and the piezoelectric actuator is driven When the difference x = 10 to 15um, a gas with a maximum output pressure of 150mmHg is generated. The micro-pneumatic power device according to item 29 of the scope of patent application, wherein the piezoelectric ceramic plate has a side length not greater than the side length of the suspension plate, a length between 7.5 mm and 12 mm, and a length between 7.5 mm and A width between 12 mm and a thickness between 0.05 mm and 0.3 mm. The ratio between the length and the width of the piezoelectric ceramic plate is between 0.625 times and 1.6 times. The miniature pneumatic power device according to item 29 of the scope of the patent application, wherein the suspension plate has a length of 7.5 mm to 12 mm, a width of 7.5 mm to 12 mm, and a thickness of 0.27 mm. A miniature pneumatic power device includes: a miniature fluid control device including an air intake plate, a resonance plate, a piezoelectric actuator, and a gas collecting plate sequentially stacked, wherein the resonance plate and the piezoelectric actuation There is a gap g0 between the actuators to form a first chamber, so that when the piezoelectric actuator is driven, a vibration displacement d is generated, so that there is an x difference between g0 and d, that is, x = g0 -d, especially when the difference x = 1 to 5um, it is the gas that produces the maximum output pressure. The gas originally entered through the air inlet plate, and passed through the resonance plate to enter the first chamber for transmission. A micro valve device comprising a valve plate sequentially stacked and an outlet plate positioned on a gas collecting plate of the micro fluid control device, the valve plate having a valve hole; wherein when gas is transmitted from the micro fluid control device Into the miniature valve device, pressure collection or pressure relief operation is performed. The micro-pneumatic power device according to item 38 of the application, wherein the piezoelectric actuator and the gas collecting plate form a gas collecting chamber, so that the gas is transmitted from the micro fluid control device to the gas collecting chamber. , And then transferred to the miniature valve device. The micro-pneumatic power device according to item 38 of the scope of the patent application, wherein the gas collecting plate and the outlet plate have at least two through holes and at least two chambers, respectively, so that the valve plate should respond to the unidirectional flow of gas. Valve holes are opened or closed correspondingly.