TWI686537B - Micro-gas pressure driving apparatus - Google Patents

Abstract

A micro-gas pressure driving apparatus is disclosed and comprises a micro-fluid control device and a micro-valve device, the micro-fluid control device comprises a gas inlet board, a resonance membrane, an actuator and a gas gather board disposed in sequence, wherein the gas gather board has a length between 4mm-10mm and a width between 4mm-10mm, and a gap between the resonance membrane and the actuator forms a first chamber, when the actuator is driven, the gas goes in from the gas inlet board, flows through the resonance membrane and goes into the first chamber, and then transmits downwardly to form a pressure gradient to continued push the gas down. The micro-valve device comprises a valve membrane and an outlet board disposed in sequence, when the gas is pushed downwardly from the micro-fluid control device, it can be transmitted into the micro-valve device, so as to gather pressure or relief pressure by the one-way gas flow to open or close a valve hole of the valve membrane.

Description

Miniature pneumatic power device

This case relates to a pneumatic power device, especially a miniature ultra-thin and silent micro pneumatic power device.

At present, in all fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing towards refinement and miniaturization. Among them, micro-pumps, sprayers, inkjet heads, industrial printing devices and other products are included Fluid delivery structure is its key technology, so how to break through its technical bottleneck with innovative structure is an important part of development.

For example, in the pharmaceutical industry, many instruments or equipment that need to be driven by pneumatic power, usually adopt traditional motors and pneumatic valves to achieve the purpose of gas delivery. However, due to the volume restrictions of these traditional motors and gas valves, it is difficult for such instruments to reduce the volume of their overall devices, that is, it is difficult to achieve the goal of thinning, and it is impossible to achieve the purpose of being portable. In addition, these conventional motors and gas valves can also cause noise problems during operation, resulting in inconvenience and uncomfortable use.

Therefore, how to develop a miniature pneumatic power device that can improve the above-mentioned lack of conventional technology, make the traditional instruments or equipment using fluid control devices small, miniaturized, and silent, and thus achieve a portable and comfortable portable purpose is Problems urgently needed to be resolved.

The main purpose of this case is to provide a portable or wearable instrument or device The micro-pneumatic power device in China, by integrating the micro-fluid control device and the micro-valve device, solves the problem that the conventional technology using pneumatic power-driven instruments or equipment is large, difficult to be thin, and cannot achieve the purpose of being portable , And lack of noise.

To achieve the above purpose, one of the broader implementation aspects of this case is to provide a micro-pneumatic power device, including: a micro-fluid control device and a micro-valve device. The micro-fluid control device includes an air inlet plate, a A resonance plate, a piezoelectric actuator and a gas collecting plate, wherein the resonance plate has a hollow hole, the gas collecting plate has a length between 4mm to 7mm and a width between 4mm to 7mm, And the ratio of the length and the width is between 0.57 times and 1.75 times, and a gap is formed between the resonant plate and the piezoelectric actuator to form a first chamber. When the piezoelectric actuator is driven, the gas The air inlet plate enters, flows through the resonance plate to enter the first chamber and then transmits; and the micro-valve device includes a valve plate and an outlet plate stacked in sequence to arrange the gas collector plate positioned on the micro-fluid control device The valve plate has a valve hole, and the outlet plate has the same length and width as the gas collector plate of the micro-fluid control device. When the gas is transferred from the micro-fluid control device to the micro-valve device, To carry out pressure collection or pressure relief operations.

1: Miniature pneumatic power device

1A: Micro fluid control device

1B: Micro valve device

1a: shell

10: Base

11: Air intake plate

11a: the second surface of the air intake plate

11b: the first surface of the air intake plate

110: air inlet

111: central recess

112: busbar hole

12: Resonance film

12a: movable part

12b: fixed part

120: Hollow hole

121: First chamber

13: Piezo actuator

130: suspension board

130a: the second surface of the suspension board

130b: the first surface of the suspension board

130c: convex part

130d: Center

130e: outer periphery

131: Outer frame

131a: the second surface of the outer frame

131b: the first surface of the outer frame

132: Bracket

132a: the second surface of the bracket

132b: the first surface of the bracket

133: Piezoelectric ceramic board

134, 151: conductive pins

135: gap

141, 142: insulating sheet

15: conductive sheet

16: Gas gathering plate

16a: accommodating space

160: surface

161: First reference surface

162: Gas collection chamber

163: First through hole

164: Second through hole

165: First pressure relief chamber

166: First out of the oral cavity

167: First convex structure

181a: Second convex structure

168: sidewall

17: Valve piece

170: valve hole

171: positioning holes

18: export board

180: second reference surface

181: Pressure relief through hole

182: outlet through hole

183: Second pressure relief chamber

184: Second out of the oral cavity

185: Connect the flow channel

187: Second surface

188: Limit structure

19: Export

g0: gap

(a)~(x): Different implementations of piezoelectric actuators

a0, i0, j0, m0, n0, o0, p0, q0, r0: suspension plate

a1, i1, m1, n1, o1, p1, q1, r1: outer frame

a2, i2, m2, n2, o2, p2, q2, r2: bracket, board connection

a3, m3, n3, o3, p3, q3, r3: gap

d: Vibration displacement of piezoelectric actuator

s4, t4, u4, v4, w4, x4: convex part

m2’, n2’, o2’, q2’, r2’: the bracket is connected to the end of the outer frame

m2”, n2”, o2”, q2”, r2”: the bracket is connected to the end of the suspension board

FIG. 1A is a schematic diagram of the front exploded structure of the micro-pneumatic power device of the preferred embodiment in this case.

FIG. 1B is a schematic diagram of the front combined structure of the micro pneumatic power device shown in FIG. 1A.

FIG. 2A is a schematic exploded view of the back of the micro pneumatic power device shown in FIG. 1A.

FIG. 2B is a schematic diagram of the rear combined structure of the micro pneumatic power device shown in FIG. 1A.

FIG. 3A is a schematic diagram of the front combined structure of the piezoelectric actuator of the micro pneumatic power device shown in FIG. 1A.

FIG. 3B is a schematic diagram of the back structure of the piezoelectric actuator of the micro pneumatic power device shown in FIG. 1A.

Figure 3C is a schematic cross-sectional structure diagram of the piezoelectric actuator of the micro pneumatic power device shown in Figure 1A Figure. 4A to 4C are schematic views of various implementations of the piezoelectric actuator shown in FIG. 3A.

FIGS. 5A to 5E are partial operation schematic diagrams of the micro-fluid control device of the micro-pneumatic power device shown in FIG. 1A.

FIG. 6A is a schematic diagram of the pressure-collecting actuation of the micro-valve device of the micro-pneumatic power device shown in FIG. 1A.

FIG. 6B is a schematic diagram of the pressure relief operation of the micro valve device of the micro pneumatic power device shown in FIG. 1A.

7A to 7E are schematic diagrams of the pressure-gathering operation of the micro-pneumatic power device shown in FIG. 1A.

Fig. 8 is a schematic diagram of the depressurization or depressurization operation of the micro pneumatic power device shown in Fig. 1A.

Some typical embodiments embodying the characteristics and advantages of this case will be described in detail in the description in the following paragraphs. It should be understood that this case can have various changes in different forms, and they all do not deviate from the scope of this case, and the descriptions and illustrations therein are essentially used for explanation, not for limiting the case.

The micro-pneumatic power device 1 in this case can be applied to industries such as medical and biotechnology, energy, computer technology, or printing, etc., to transmit gas, but not limited to this. Please refer to Figure 1A, Figure 1B, Figure 2A, Figure 2B, and Figures 7A to 7E. Figure 1A is a schematic exploded front view of the micro-pneumatic power device of the preferred embodiment of this case. Figure 1B is the first 1A is a schematic diagram of the front combined structure of the micro-pneumatic power device shown in FIG. 1A, FIG. 2A is a schematic diagram of the exploded back structure of the micro-pneumatic power device shown in FIG. 1A, and FIG. 2B is a micro-pneumatic power device shown in FIG. 1A 7A to 7E are schematic diagrams of the pressure-collecting actuation of the micro-pneumatic power device shown in Fig. 1A. As shown in FIG. 1A and FIG. 2A, the micro-pneumatic power device 1 of this case is composed of a micro-fluid control device 1A and a micro-valve device 1B, wherein the micro-fluid control device 1A has a housing 1a, piezoelectric actuation 13, the insulating sheets 141, 142 and the conductive sheet 15. The housing 1 a includes the gas collecting plate 16 and the base 10. The base 10 includes the air intake plate 11 and the resonance plate 12, but not limited to this. The piezoelectric actuator 13 is provided corresponding to the resonance plate 12, and makes the intake plate 11 The vibrating sheet 12, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, the other insulating sheet 142, the gas collecting plate 16, etc. are stacked in this order, and the piezoelectric actuator 13 is composed of a floating plate 130, An outer frame 131, at least one bracket 132, and a piezoelectric ceramic plate 133 are assembled together; and the micro valve device 1B includes a valve plate 17 and an outlet plate 18, but not limited thereto. And in this embodiment, as shown in FIG. 1A, the gas collecting plate 16 is not only a single plate structure, but also a frame structure with a side wall 168 on the periphery and the gas collecting plate 16 has a width between 4mm and 10mm The length between, the width between 4mm to 10mm, and the ratio of the length and the width is between 0.4 times to 2.5 times, or the gas collecting plate 16 has a length between 4mm to 7mm, between 4mm Width between 7mm and 7mm, and the ratio between the length and the width is between 0.57 times and 1.75 times, or the gas collecting plate 16 has a length between 6mm and 8mm, a width between 6mm and 8mm, And the ratio between the length and the width is between 0.75 times and 1.33 times, or the gas collector plate 16 preferably has a length of 6 mm and a width of 6 mm, and the side wall 168 formed by the periphery of the gas collector plate and its bottom The plates collectively define an accommodating space 16a for the piezoelectric actuator 13 to be disposed in the accommodating space 16a, so when the assembly of the micro-pneumatic power device 1 in this case is completed, the front schematic diagram will be as As shown in FIG. 1B and FIGS. 7A to 7E, it can be seen that the micro-fluid control device 1A is assembled corresponding to the micro-valve device 1B, that is, the valve piece 17 and the outlet plate 18 of the micro-valve device 1B are The sequential stacking arrangement is positioned on the gas collecting plate 16 of the micro fluid control device 1A. The schematic diagram on the back of the assembled assembly shows the pressure relief hole 181 and the outlet 19 on the outlet plate 18. The outlet 19 is used to connect with a device (not shown), and the pressure relief hole 181 is used to make the micro valve device. The gas in 1B is discharged to achieve the effect of pressure relief. By assembling the micro-fluid control device 1A and the micro-valve device 1B, gas is drawn in from at least one air inlet hole 110 on the air inlet plate 11 of the micro-fluid control device 1A, and passes through the piezoelectric actuator 13 It moves through multiple pressure chambers (not shown) and transmits downwards, so that the gas can flow unidirectionally in the micro valve device 1B, and the pressure accumulates in connection with the outlet end of the micro valve device 1B In one device (not shown), and when pressure relief is required, the output of the microfluidic control device 1A is adjusted so that gas is discharged through the pressure relief through hole 181 in the outlet plate 18 of the microvalve device 1B. For pressure relief.

Please continue to refer to FIG. 1A and FIG. 2A. As shown in FIG. 1A, the air inlet plate 11 of the microfluidic control device 1A has a first surface 11a, a second surface 11b and at least one air inlet hole 110. In this embodiment In the example, The number of air inlet holes 110 is four, but not limited to this, it penetrates the first surface 11a and the second surface 11b of the air inlet plate 11, and is mainly used for the gas to comply with the atmospheric pressure from outside the device From the at least one air inlet hole 110 flows into the micro-fluid control device 1A. And as shown in FIG. 2A, it can be seen from the first surface 11b of the air inlet plate 11 that there is at least one busbar hole 112 for connecting with the at least one air inlet hole 110 on the second surface 11a of the air inlet plate 11 Corresponding settings. A central recess 111 is provided at the central exchange place of the bus holes 112, and the central recess 111 communicates with the bus holes 112, thereby guiding the gas entering the bus holes 112 from the at least one inlet hole 110 And the confluence is concentrated to the central recess 111 for downward transmission. Therefore, in this embodiment, the air inlet plate 11 has an integrally formed air inlet hole 110, a bus bar hole 112, and a central recess 111, and a confluent chamber for a confluent gas is formed correspondingly at the central recess 111 for Gas is temporarily stored. In some embodiments, the material of the air inlet plate 11 may be, but not limited to, a stainless steel material, and the preferred thickness is between 0.3 mm and 0.5 mm, and the preferred value is 0.4 mm, but not limited to this. In other embodiments, the depth of the confluence chamber formed by the central recess 111 is the same as the depth of the busbar holes 112, and the preferred values of the depth of the confluence chamber and the busbar holes 112 are Between 0.15mm and 0.25mm, but not limited to this. The resonator plate 12 is made of a flexible material, but not limited to this, and has a hollow hole 120 on the resonator plate 12, corresponding to the central recess 111 of the first surface 11b of the intake plate 11 , So that the gas can flow down. In other embodiments, the resonant sheet can be made of a copper material, but not limited to this, and the preferred value of the thickness is between 0.02mm and 0.07mm, and the preferred value is 0.04mm , But not limited to this.

Please also refer to Figure 3A, Figure 3B and Figure 3C, which are the front structural schematic diagram, back structural schematic diagram and cross-sectional structural schematic diagram of the piezoelectric actuator of the micro pneumatic power device shown in Figure 1A, respectively. The actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132 and a piezoelectric ceramic plate 133, wherein the piezoelectric ceramic plate 133 is attached to the first of the suspension plate 130 The surface 130b is used to deform the applied voltage to drive the suspension plate 130 to flex and vibrate. The suspension plate 130 has a central portion 130d and an outer peripheral portion 130e, so that when the piezoelectric ceramic plate 133 is driven by a voltage, the suspension plate 130 can be moved from the central portion 130d to the outer peripheral portion 130e bending vibration, and the at least one bracket 132 is connected between the suspension plate 130 and the outer frame 131, in this embodiment, the bracket 132 is connected between the suspension plate 130 and the outer frame 131, Two of them The end points are respectively connected to the outer frame 131 and the suspension plate 130 to provide elastic support, and there is at least one gap 135 between the bracket 132, the suspension plate 130 and the outer frame 131 for gas circulation, and the suspension plate 130, the shape and number of the outer frame 131 and the bracket 132 have various changes. In addition, the outer frame 131 is disposed around the outer side of the suspension board 130 and has a conductive pin 134 protruding outward for power connection, but not limited to this. In this embodiment, the suspension board 130 is a stepped surface structure, which means that the second surface 130a of the suspension board 130 further has a convex portion 130c. The convex portion 130c may be, but not limited to, a circular protrusion Structure, and the preferred value of the height of the convex portion 130c is between 0.02mm and 0.08mm, and the preferred value is 0.03mm, and the diameter is 1.1mm to 2.4mm, but not limited thereto. Please refer to FIGS. 3A and 3C at the same time. The convex portion 130c of the suspension plate 130 is coplanar with the second surface 131a of the outer frame 131, and the second surface 130a of the suspension plate 130 and the second surface 132a of the bracket 132 It is also coplanar, and there is a certain depth between the convex portion 130c of the suspension plate 130 and the second surface 131a of the outer frame 131 and the second surface 130a of the suspension plate 130 and the second surface 132a of the bracket 132. As for the first surface 130b of the suspension plate 130, as shown in FIGS. 3B and 3C, the first surface 131b of the outer frame 131 and the first surface 132b of the bracket 132 have a flat coplanar structure, and the piezoelectric The ceramic plate 133 is attached to the first surface 130b of the flat suspension plate 130. In other embodiments, the shape of the suspension board 130 may also be a flat square structure with two sides flat, which is not limited to this, and may be changed according to the actual application situation. In some embodiments, the suspension plate 130, the bracket 132, and the outer frame 131 may be an integrally formed structure, and may be composed of a metal plate, such as stainless steel, but not limited thereto. And in some embodiments, the preferred value of the thickness of the suspension plate 130 is between 0.1 mm and 0.3 mm, and the preferred value is 0.2 mm, and the preferred value of the length of the suspension plate 130 is between 2 mm and Between 4.5mm, the preferred value may be 2.5mm to 3.5mm, the preferred value of the width is between 2mm to 4.5mm, and the preferred value may be 2.5mm to 3.5mm but not limited thereto. The preferred value of the thickness of the outer frame 131 is between 0.1 mm and 0.4 mm, and the preferred value is 0.3 mm, but not limited to this.

In other embodiments, the preferred value of the thickness of the piezoelectric ceramic plate 133 is between 0.05 mm and 0.3 mm, and the preferred value is 0.10 mm, and the piezoelectric ceramic plate 133 has no greater than The length of the side length of the suspension board 130 has a length between 2mm and 4.5mm, and its preferred value may be 2.5mm to 3.5mm, The width is between 2mm and 4.5mm, and the preferred value may be 2.5mm to 3.5mm, and the preferred value of the length and width ratio is between 0.44 times and 2.25 times, but it is not limited thereto. In other embodiments, the side length of the piezoelectric ceramic plate 133 may be smaller than the side length of the suspension plate 130, and it is also designed as a square plate-like structure corresponding to the suspension plate 130, but it is not limited thereto.

The reason why the square-shaped piezoelectric actuator 13 is used in the micro-pneumatic power device 1 of this case is that the square-shaped piezoelectric actuator is compared with the conventionally-designed circular piezoelectric actuator. The device 13 obviously has the advantage of saving electricity, and the comparison of its power consumption is shown in Table 1 below:

Therefore, it is known from the above table of the experiment: the piezoelectric actuator 13 of square design with a side length (8mm to 10mm) is more power-saving than a circular piezoelectric actuator with a diameter (8mm to 10mm) . The reason for its power saving can be speculated as: due to the capacitive load operating at the resonant frequency, the power consumption will increase with the increase of the frequency, and the resonant frequency of the piezoelectric actuator 13 of the square design with a long side is significantly higher The piezoelectric actuator with the same diameter and circular shape is low, so its relative power consumption is also significantly lower, that is, the piezoelectric actuator 13 of the square design used in this creation is compared with the conventional circular piezoelectric actuator. The design has the advantage of power saving, especially when it is applied to wearable devices, saving power is a very important design focus.

Please refer to Figures 4A, 4B, and 4C, which are schematic diagrams of various implementations of the piezoelectric actuator shown in Figure 3A. As shown in the figure, it can be seen that the suspension plate 130, the outer frame 131 and the bracket 132 of the piezoelectric actuator 13 can have various types, and at least can have (a) to (l) shown in FIG. 4A, etc. Various forms, for example, (a) state In addition, the frame a1 and the suspension plate a0 are square structures, and the two are connected by a plurality of brackets a2, for example: 8, but not limited to this, and the bracket a2 and the suspension plate a0 There is a gap a3 between the outer frame a1 for gas circulation. In another aspect (i), the outer frame i1 and the suspension plate i0 are also of a square structure, but only two brackets i2 are used to connect them; in addition, in aspects (j)~(l), Then, the suspension plate j0 and the like may be a circular structure, and the outer frame j0 and the like may also be a frame structure with a slight curvature, but not limited to this. Therefore, it can be seen from various implementations that the shape of the suspension plate 130 can be square or round, and similarly, the piezoelectric ceramic plate 133 attached to the first surface 130b of the suspension plate 130 can also be square or round The shape is not limited to this; and as shown in FIGS. 4B and 4C, the floating plate of the piezoelectric actuator 13 may also have (m) to (r) shown in FIG. 4B and shown in FIG. 4C (S) ~ (x) and other aspects, but in these aspects, the suspension plate 130 and the outer frame 131 are square structures. For example, the frame (m) and the outer frame m1 and the suspension plate m0 are both square structures, and the two are connected by a plurality of brackets m2, for example: 4, but not limited to this, And there is a gap m3 between the bracket m2, the suspension plate m0, and the outer frame m1 for fluid circulation. Moreover, in this embodiment, the bracket m2 connected between the outer frame m1 and the suspension plate m0 may be, but not limited to, a board connection portion m2, and the board connection portion m2 has two ends m2' and m2", One end m2' is connected to the outer frame m1, and the other end m2" is connected to the suspension plate m0, and the two ends m2' and m2" correspond to each other and are arranged on the same axis. At (n ) In the aspect, it also has an outer frame n1, a suspension plate n0, a bracket n2 connected between the outer frame n1, the suspension plate n0, and a gap n3 for fluid circulation, and the bracket n2 may also be but not limited to a The board connection part n2, the board connection part n2 also has two ends n2' and n2", and the end n2' is connected to the outer frame n1, and the other end n2" is connected to the suspension board n0, but in this embodiment In this case, the plate connecting portion n2 is connected to the outer frame n1 and the floating plate n0 at an oblique angle between 0 and 45 degrees. In other words, the two end portions n2' and n2" are not arranged on the same horizontal axis. It is a setting relationship of mutual misalignment. In the aspect (o), the outer frame o1, the suspension plate o0, the bracket o2 connected between the outer frame o1, the suspension plate o0, and the gap o3 for fluid circulation are all similar to the previous embodiment, but The design of the board connection part o2 as a bracket is slightly different from the (m) state. However, in this state, the two ends o2' and o2" of the board connection part o2 still correspond to each other and are provided On the same axis.

In the aspect (p), it also has a structure such as the outer frame p1, the suspension plate p0, the bracket p2 connected between the outer frame p1, the suspension plate p0, and the gap p3 for fluid circulation, etc. Among them, the plate connecting portion p2 as a bracket further has a structure such as a floating plate connecting portion p20, a beam portion p21, and an outer frame connecting portion p22, wherein the beam portion p21 is provided in the gap p3 between the floating plate p0 and the outer frame p1, and The direction of its installation is parallel to the outer frame p1 and the suspension plate p0, and the suspension plate connection portion p20 is connected between the beam portion p21 and the suspension plate p0, and the outer frame connection portion p22 connects the beam portion p21 and the outer frame p1 In addition, the suspension plate connection part p20 and the outer frame connection part p22 also correspond to each other and are arranged on the same axis.

In the (q) aspect, the outer frame q1, the suspension plate q0, the bracket q2 connected between the outer frame q1, the suspension plate q0, and the gap q3 for fluid circulation are all the same as the above (m), (o ) The pattern is similar, except that the design of the plate connection part q2 as a bracket is slightly different from the (m) and (o) patterns. In this form, the suspension plate q0 is a square pattern, and Each side has two board connection parts q2 connected to the outer frame q1, and the two ends q2' and q2" of each board connection part q2 are also corresponding to each other and are arranged on the same axis. However, in (r ) In the aspect, it also has components such as the outer frame r1, the suspension plate r0, the bracket r2, and the gap r3, and the bracket r2 may also be, but not limited to, a plate connecting portion r2. In this embodiment, the plate connecting portion r2 It is a V-shaped structure. In other words, the board connection part r2 is also connected to the outer frame r1 and the suspension board r0 at an oblique angle between 0 and 45 degrees, so each board connection part r2 has an end r2" and The floating plate r0 is connected, and has two ends r2' connected to the outer frame r1, which means that the two ends b2' and the end b2" are not disposed on the same horizontal axis.

As shown in Figure 4C, the appearance patterns of these (s)~(x) patterns roughly correspond to the patterns of (m)~(r) shown in Figure 4B, except for these (s ) ~ (x), each piezoelectric actuator 13 is provided with a convex portion 130c on the suspension plate 130, that is, as shown in the figure s4, t4, u4, v4, w4, x4 and other structures, And whether it is (m)~(r) or (s)~(x), the suspension plate 130 and the outer frame 131 are designed to be square, so as to achieve the aforementioned low power consumption effect It can be seen from these implementations that regardless of whether the suspension plate 130 is a flat plate structure with double-sided flat surfaces or a stepped structure with a convex portion on its surface, it is within the scope of protection of this case and is connected to the suspension plate 130 and The shape and number of the brackets 132 between the outer frames 131 can also depend on The actual implementation of the situation and any change in application is not limited to what is shown in this case. As mentioned above, the suspension plate 130, the outer frame 131 and the bracket 132 can be an integrally formed structure, but not limited to this, as for the manufacturing method, it can be processed by traditional processing, or yellow etching, or laser Processing, or electroforming, or electrical discharge machining are not limited to this.

In addition, please refer to FIGS. 1A and 2A. In the microfluidic control device 1A, an insulating sheet 141, a conductive sheet 15 and another insulating sheet 142 are sequentially disposed under the piezoelectric actuator 13, And its form roughly corresponds to the form of the outer frame of the piezoelectric actuator 13. In some embodiments, the insulating sheets 141 and 142 are made of insulating materials, such as plastic, but not limited to this, for insulation purposes; in other embodiments, the conductive sheet 15 is made of It is made of conductive materials, such as metal, but not limited to this, for electrical conduction. And, in this embodiment, a conductive pin 151 may also be provided on the conductive sheet 15 for electrical conduction.

Please refer to FIGS. 1A and 5A to 5E at the same time, wherein FIGS. 5A to 5E are partial operation schematic diagrams of the micro-fluid control device of the micro-pneumatic power device shown in FIG. 1A. First, as shown in FIG. 5A, it can be seen that the microfluidic control device 1A is sequentially stacked by the air intake plate 11, the resonance sheet 12, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, and another insulating sheet 142, etc. There is a gap g0 between the resonant sheet 12 and the piezoelectric actuator 13, in this embodiment, the gap between the resonant sheet 12 and the peripheral edge of the outer frame 131 of the piezoelectric actuator 13 g0 is filled with a material, such as conductive glue, but not limited to this, so that the depth of the gap g0 can be maintained between the resonance plate 12 and the convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13, and then The air flow is guided to flow more quickly, and because the convex portion 130c of the suspension plate 130 and the resonance plate 12 are kept at an appropriate distance, the interference between the contacts is reduced, and the noise generation can be reduced; in other embodiments, it can also be increased by The height of the outer frame 131 of the piezoelectric actuator 13 is increased by a gap when the piezoelectric actuator 13 is assembled with the resonance plate 12, but it is not limited to this.

Please continue to refer to Figures 5A to 5E. As shown in the figure, when the intake plate 11, the resonance plate 12 and the piezoelectric actuator 13 are assembled in sequence, the hollow hole 120 in the resonance plate 12 can be connected to The upper air inlet plate 11 together forms a chamber for the confluent gas, and a first chamber 121 is formed between the resonance plate 12 and the piezoelectric actuator 13 for temporarily storing the gas, and the first chamber 121 Through the hollow hole 120 of the resonance plate 12 The cavity at the central recess 111 of the first surface 11b communicates with each other, and the two sides of the first cavity 121 are connected to the micro-valve device under the gap 135 between the brackets 132 of the piezoelectric actuator 13 1B is connected.

When the micro-fluid control device 1A of the micro-pneumatic power device 1 is actuated, the piezoelectric actuator 13 is mainly actuated by a voltage and uses the bracket 132 as a fulcrum to perform vertical reciprocating vibration. As shown in FIG. 5B, when the piezoelectric actuator 13 is actuated by a voltage and vibrates downward, since the resonance plate 12 is a light and thin sheet-like structure, when the piezoelectric actuator 13 vibrates, The resonance plate 12 will also resonate and perform vertical reciprocating vibration, that is, the portion of the resonance plate 12 corresponding to the central concave portion 111 will also be deformed by bending vibration, that is, the portion corresponding to the central concave portion 111 is the movable of the resonance plate 12 The portion 12a is such that when the piezoelectric actuator 13 bends and vibrates downward, the movable portion 12a of the resonant plate 12 corresponding to the central concave portion 111 at this time is driven by the entrainment and pushing of the fluid and the vibration of the piezoelectric actuator 13 As the piezoelectric actuator 13 bends and vibrates downward, the gas enters through the at least one air inlet hole 110 on the air inlet plate 11 and passes through at least one busbar hole 112 on the first surface 11b to collect At the central concave portion 111 in the center, it then flows down into the first chamber 121 through the central hole 120 corresponding to the central concave portion 111 on the resonance plate 12, and then, due to the vibration of the piezoelectric actuator 13, the resonance The piece 12 will also resonate and perform vertical reciprocating vibration. As shown in FIG. 5C, the movable portion 12a of the resonant piece 12 also vibrates downward accordingly, and adheres to the piezoelectric actuator 13 On the convex portion 130c of the suspension plate 130, the distance between the confluence chamber between the area other than the convex portion 130c of the suspension plate 130 and the fixing portions 12b on both sides of the resonance plate 12 does not become smaller, and thus the resonance plate 12 Deformation to compress the volume of the first chamber 121 and close the intermediate circulation space of the first chamber 121, so that the gas propellant therein flows to both sides, and then passes between the supports 132 of the piezoelectric actuator 13 The gap 135 flows down through. As for FIG. 5D, the movable portion 12a of the resonant plate 12 bends and vibrates upwardly, and returns to the initial position, and the piezoelectric actuator 13 is driven by a voltage to vibrate upward, thus also squeezing the volume of the first chamber 121 However, since the piezoelectric actuator 13 is lifted upward at this time, the displacement of the lift may be d, so that the gas in the first chamber 121 will flow to both sides, and then the gas is continuously driven from the intake plate 11 At least one air inlet hole 110 enters, and then flows into the cavity formed by the central recess 111, and as shown in FIG. 5E, the resonance plate 12 is resonated upward by the vibration of the piezoelectric actuator 13 lifting upward, and the resonance plate The movable portion 12a of 12 also returns to the initial position, so that the gas in the central concave portion 111 flows into the first chamber 121 again from the central hole 120 of the resonance sheet 12 Inside, and through the gap 135 between the supports 132 of the piezoelectric actuator 13 to pass downward and flow out of the microfluidic control device 1A. From this embodiment, it can be seen that when the resonator plate 12 performs vertical reciprocating vibration, the maximum distance of its vertical displacement can be increased by the gap g0 between it and the piezoelectric actuator 13, in other words, the two Setting a gap g0 between the structures can cause the resonance plate 12 to generate a larger and larger displacement when resonating, and the vibration displacement of the piezoelectric actuator is d, and the difference from the gap g0 is x, that is, x= g0-d, when tested, when x≦0um, it is in a noisy state; when x=1um to 5um, the maximum output air pressure of the micro pneumatic power unit 1 can reach 350mmHg; when x=5um to 10um, the maximum output air pressure of the micro pneumatic power unit 1 It can reach 250mmHg; when x=10um to 15um, the maximum output air pressure of the micro-pneumatic power device 1 can reach 150mmHg, and the corresponding relationship of the numerical values is shown in Table 2 below. The above values are between ±10V and ±20V. In this way, a pressure gradient is generated in the flow channel design of the microfluidic control device 1A, so that the gas flows at high speed, and through the difference in impedance of the flow channel in and out directions, the gas is transmitted from the suction end to the discharge end, and there is air pressure at the discharge end Under the state, it still has the ability to continue to push out the gas and can achieve the effect of silence.

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonator plate 12 can be the same as the vibration frequency of the piezoelectric actuator 13, that is, both can be up or down simultaneously, which can be implemented according to the actual situation Any change is not limited to the action mode shown in this embodiment.

Please also refer to Figure 1A, Figure 2A, Figure 6A, and Figure 6B, where Figure 6A is the schematic diagram of the pressure-collecting action of the micro-valve device of the micro-pneumatic power device shown in Figure 1A, and Figure 6B is The schematic diagram of the pressure relief operation of the micro valve device of the micro pneumatic power device shown in FIG. 1A. As shown in FIGS. 1A and 6A, the micro-valve device 1B of the micro-pneumatic power device 1 in this case is formed by sequentially stacking the valve pieces 17 and the outlet plate 18, and is matched with the gas-collecting plate 16 of the micro-fluid control device 1A To operate.

In this embodiment, the gas collecting plate 16 has a surface 160 and a first reference surface 161, which is recessed on the surface 160 to form a gas collecting chamber 162, and the gas transported downward by the microfluidic control device 1A is temporarily Accumulated in the gas collecting chamber 162, and having a plurality of through holes in the gas collecting plate 16, including a first through hole 163 and a second through hole 164, the first through hole 163 and the second through hole 164 One end communicates with the gas collection chamber 162, and the other end communicates with the first pressure relief chamber 165 and the first outlet chamber 166 on the first reference surface 161 of the gas collection plate 16, respectively. And, a first convex structure 167 is further added at the first outlet chamber 166, such as but not limited to a cylindrical structure. The height of the first convex structure 167 is higher than that of the gas collecting plate 16 A reference surface 161, and the height of the first convex structure 167 is between 0.1 mm and 0.55 mm, and the preferred value is 0.2 mm.

The outlet plate 18 has the same length and width as the gas collector plate 16 and includes a pressure relief through hole 181 and an outlet through hole 182. The pressure relief through hole 181 and the outlet through hole 182 pass through the outlet plate 18 The second reference surface 180 and the second surface 187, and the outlet plate 18 has a second reference surface 180, a second pressure relief chamber 183 and a second outlet chamber 184 are recessed on the second reference surface 180, the The pressure relief through hole 181 is provided in the central portion of the second pressure relief chamber 183. The outlet through hole 182 communicates with the second outlet chamber 184, and between the second pressure relief chamber 183 and the second outlet chamber 184 There is also a communication channel 185 for gas circulation, and one end of the outlet through-hole 182 communicates with the second outlet chamber 184, and the other end communicates with the outlet 19. In this embodiment, the outlet 19 is It can be connected to a device (not shown), such as a press, but not limited to this.

The valve plate 17 has a valve hole 170 and a plurality of positioning holes 171. The thickness of the valve plate 17 is between 0.1 mm and 0.3 mm, and the preferred value is 0.2 mm.

When the valve plate 17 is positioned and assembled with the gas collector plate 16 and the outlet plate 18, the pressure relief through hole 181 of the outlet plate 18 corresponds to the first through hole 163 of the gas collector plate 16, and the second pressure relief chamber 183 Corresponding to the first pressure-relief chamber 165 of the gas collecting plate 16, the second outlet chamber 184 corresponds to the first outlet chamber 166 of the gas collecting plate 16, and the valve plate 17 is disposed on the gas collecting plate 16 And the outlet plate 18, blocking the communication between the first pressure relief chamber 165 and the second pressure relief chamber 183, and the valve hole 170 of the valve plate 17 is disposed between the second through hole 164 and the outlet through hole 182 And the valve hole 170 is located correspondingly to the first convex structure 167 of the first outlet chamber 166 of the gas collecting plate 16, by the design of the single valve hole 170, so that the gas can be achieved according to its pressure difference Unidirectional flow purpose.

In addition, one end of the pressure relief through hole 181 of the outlet plate 18 can be further provided with a second convex structure 181a formed by a protrusion, such as but not limited to a cylindrical structure, the height of the second convex structure 181a is Between 0.1mm and 0.55mm, the preferred value is 0.2mm, and the second convex structure 181a is improved to increase its height, the height of the second convex structure 181a is higher than the second of the outlet plate 18 The reference surface 180 is used to strengthen the valve piece 17 to quickly interfere with and close the pressure relief through hole 181, and to achieve the effect of a pre-stressing effect completely sealed; and, the outlet plate 18 further has at least one limit structure 188, the limit The height of the bit structure 188 is 0.2 mm. Taking this embodiment as an example, the limit structure 188 is disposed in the second pressure relief chamber 183 and is an annular block structure, and is not limited to this. When the micro-valve device 1B is performing a pressure-collecting operation, it is used to support the valve piece 17 to prevent the valve piece 17 from collapsing, and the valve piece 17 can be opened or closed more quickly.

When the pressure-collecting action of the micro-valve device 1B is mainly as shown in Fig. 6A, it may be due to the pressure provided by the gas transmitted downward from the micro-fluid control device 1A, or when the outside atmospheric pressure is greater than the outlet 19 When the internal pressure of the connected device (not shown), gas will be transferred from the microfluidic control device 1A to the gas collection chamber 162 of the microvalve device 1B, and then through the first through hole 163 and the second through hole respectively 164 flows down into the first pressure-relief chamber 165 and the first outlet chamber 166. At this time, the downward gas pressure causes the flexible valve piece 17 to bend and deform downward, thereby making the first pressure-relief chamber The volume of the chamber 165 increases, and corresponds to the first through hole 163 to lie flat and abut against the end of the pressure relief through hole 181, thereby closing the pressure relief through hole 181 of the outlet plate 18, so the second The gas in the pressure chamber 183 does not flow out from the pressure relief through hole 181. Of course, in this embodiment, a design of a second convex structure 181a can be added at the end of the pressure relief through hole 181 to strengthen the valve piece 17 to quickly resist and close the pressure relief through hole 181, and achieve a complete preload resistance action At the same time, the effect of sealing is at the same time through the limiting structure 188 provided around the pressure relief hole 181 to assist the support of the valve piece 17 so that it will not collapse. On the other hand, since the gas system flows downward from the second through hole 164 into the first outlet chamber 166, and the valve piece 17 corresponding to the first outlet chamber 166 also bends downward, so that its corresponding The valve hole 170 is opened downward, and the gas can flow from the first outlet chamber 166 into the second outlet chamber 184 through the valve hole 170, and the outlet hole 182 flows to the outlet 19 and the device (not shown) connected to the outlet 19, so as to act to collect pressure on the device.

Please continue to refer to Figure 6B. When the micro valve device 1B is depressurized, it can adjust the gas transmission volume of the micro fluid control device 1A so that the gas is no longer input into the gas collection chamber 162, or when it is connected to the outlet 19 When the internal pressure of the connected device (not shown) is greater than the atmospheric pressure of the outside, the micro valve device 1B can be relieved of pressure. At this time, the gas is input into the second outlet chamber 184 from the outlet through-hole 182 connected to the outlet 19, so that the volume of the second outlet chamber 184 expands, thereby causing the flexible valve piece 17 to bend upward and deform, and Since it is flat against the gas collecting plate 16, the valve hole 170 of the valve piece 17 will be closed due to the gas collecting plate 16. Of course, in this embodiment, the first outlet chamber 166 can be added with a design of a first convex structure 167, so that the flexible valve piece 17 can be bent upward to change quickly, so that the valve hole 170 is more beneficial to achieve A pre-force conflicting action is completely attached to the closed state of the seal. Therefore, when in the initial state, the valve hole 170 of the valve piece 17 will be closed due to close contact with the first convex structure 167, then the second outlet The gas in the oral cavity 184 will not flow back to the first outlet cavity 166, so as to achieve better prevention of gas leakage. And, the gas system in the second outlet chamber 184 can flow into the second pressure relief chamber 183 through the communication channel 185, thereby expanding the volume of the second pressure relief chamber 183 and corresponding to the second pressure relief chamber. The valve piece 17 of the pressure chamber 183 is also bent upward and deformed. At this time, since the valve piece 17 is not closed against the end of the pressure relief through hole 181, the pressure relief through hole 181 is in an open state, that is, the second pressure relief cavity The gas in the chamber 183 may flow out through the pressure relief through hole 181 for pressure relief. Of course, in this embodiment, the second convex structure 181a added at the end of the pressure relief through hole 181 or the limiting structure 188 provided in the second pressure relief chamber 183 can be used to allow the flexible valve piece 17 The upward bending shape changes rapidly, which is more favorable for breaking away from the state of closing the pressure relief through hole 181. In this way, the gas in the device (not shown) connected to the outlet 19 can be discharged to reduce the pressure by this one-way pressure relief operation, or can be completely discharged to complete the pressure relief operation.

Please also refer to Figures 1A, 2A, and 7A to 7E, where Figures 7A to 7E are schematic diagrams of the pressure-gathering action of the micro-pneumatic power device shown in Figure 1A. As shown in FIG. 7A, the micro-pneumatic power device 1 is composed of a micro-fluid control device 1A and a micro-valve device 1B, wherein the micro-fluid control device 1A is as described above, followed by the intake plate 11 and the resonance plate 12 in sequence , Piezoelectric actuator 13, insulating sheet 141, the conductive sheet 15, another insulating sheet 142, and the gas collecting plate 16 are stacked and positioned, and have a gap g0 between the resonance sheet 12 and the piezoelectric actuator 13, and the resonance sheet 12 and There is a first chamber 121 between the piezoelectric actuators 13, and the micro-valve device 1B is similarly stacked and assembled on the gas-collecting plate 16 of the micro-fluid control device 1A by the valve plate 17 and the outlet plate 18 in sequence. A gas collecting chamber 162 is provided between the gas collecting plate 16 and the piezoelectric actuator 13 of the microfluidic control device 1A, and a first pressure relief is further recessed on the first reference surface 161 of the gas collecting plate 16 The chamber 165 and a first outlet chamber 166, and a second pressure relief chamber 183 and a second outlet chamber 184 are recessed in the second reference surface 180 of the outlet plate 18, in this embodiment, by The operating voltage of the micro-pneumatic power device is ±10V to ±16V, and the driving of the piezoelectric actuator 13 and the vibration of the resonance plate 12 and the valve plate 17 of the plurality of different pressure chambers to make the gas downward Pressure transmission.

As shown in FIG. 7B, when the piezoelectric actuator 13 of the microfluidic control device 1A is actuated by a voltage and vibrates downward, the gas will enter the microfluidic control device 1A through the air inlet hole 110 on the air inlet plate 11 At least one busbar hole 112 is collected at the central recess 111, and then flows down into the first chamber 121 through the hollow hole 120 in the resonator plate 12. Thereafter, as shown in FIG. 7C, due to the resonance effect of the vibration of the piezoelectric actuator 13, the resonator plate 12 will also undergo reciprocating vibration, that is, it vibrates downward and is close to the piezoelectric actuator On the convex portion 130c of the suspension plate 130 of 13, the volume of the cavity at the central concave portion 111 of the air intake plate 11 is increased by the deformation of the resonance plate 12, and at the same time, the volume of the first cavity 121 is compressed, and The gas propellant in the first chamber 121 is caused to flow to both sides, and then passes through the gap 135 between the brackets 132 of the piezoelectric actuator 13 to circulate downward to flow to the micro fluid control device 1A and the micro valve device 1B between the gas collection chamber 162, and then correspondingly flows downward from the first through hole 163 and the second through hole 164 communicating with the gas collection chamber 162 to the first pressure relief chamber 165 and the first outlet In the oral cavity 166, it can be seen from this implementation that when the resonator plate 12 performs vertical reciprocating vibration, the maximum distance of vertical displacement can be increased by the gap g0 between it and the piezoelectric actuator 13, in other words In other words, providing the gap g0 between the two structures can cause the resonance plate 12 to generate a larger and larger displacement when resonating.

Next, as shown in FIG. 7D, since the resonance plate 12 of the micro dynamic fluid control device 1A returns to the initial position, the piezoelectric actuator 13 is driven by a voltage to vibrate upward, and the vibration of the piezoelectric actuator The displacement is d, and the difference from the gap g0 is x, that is, x=g0-d. When x=1 to 5um and the operating voltage is ±10V to ±16V, the maximum output air pressure can reach at least 300mmHg. But not limited to this. In this way, the volume of the first chamber 121 is also pressed, so that the gas in the first chamber 121 flows to both sides, and is continuously input into the gas collection chamber by the gap 135 between the brackets 132 of the piezoelectric actuator 13 162. In the first pressure-relief chamber 165 and the first outlet chamber 166, the greater the pressure in the first pressure-relief chamber 165 and the first outlet chamber 166, the more flexible the valve piece 17 is pushed. When a downward bending deformation occurs, in the second pressure-relief chamber 183, the valve piece 17 lies flat and abuts against the second convex portion structure 181a at the end of the pressure-relief through hole 181, thereby making the pressure-relief through hole 181 Is closed, and in the second outlet chamber 184, the valve hole 170 on the valve plate 17 corresponding to the outlet through hole 182 is opened downward, so that the gas in the second outlet chamber 184 can be transmitted downward from the outlet through hole 182 to The outlet 19 and any device (not shown) connected to the outlet 19 can further achieve the purpose of collecting pressure. Finally, as shown in FIG. 7E, when the resonance plate 12 of the microfluidic control device 1A resonates upward and displaces, the gas in the central recess 111 of the first surface 11b of the air intake plate 11 can pass through the hollow hole 120 of the resonance plate 12 Into the first chamber 121, and then continuously transmitted downwards through the gap 135 between the brackets 132 of the piezoelectric actuator 13 to the microvalve device 1B, because the gas pressure continues to increase downward, so the gas Will continue to flow through the air collection chamber 162, the second through hole 164, the first outlet chamber 166, the second outlet chamber 184 and the outlet through hole 182 to the outlet 19 and any device connected to the outlet 19, This pressure collection operation can be driven by the difference between the outside atmospheric pressure and the pressure in the device, but not limited to this.

When the internal pressure of the device (not shown) connected to the outlet 19 is greater than the external pressure, the micro-pneumatic power device 1 can perform the pressure reduction or pressure relief operation as shown in Figure 8 The operation method of pressure relief is mainly as described above. The gas transmission volume of the micro fluid control device 1A can be adjusted so that the gas is no longer input into the gas collection chamber 162. At this time, the gas will come from the outlet connected to the outlet 19 The through hole 182 is input into the second outlet chamber 184, so that the volume of the second outlet chamber 184 expands, thereby causing the flexible valve piece 17 to bend and deform upward, and to lie flat against the first outlet chamber 166 on the first convex portion structure 167, so that the valve hole 170 of the valve plate 17 is closed, that is, the gas in the second outlet chamber 184 does not flow back into the first outlet chamber 166; and, the second outlet chamber The gas system in 184 can flow into the second pressure-relief chamber 183 through the communication channel 185, and then the pressure-relief through hole 181 is used for pressure-relief operation; thus, the one-way gas transmission of the micro valve structure 1B Make The gas in the device connected to the outlet 19 is discharged to reduce the pressure, or completely discharged to complete the pressure relief operation.

As can be seen from the above description, in the micro-pneumatic power device 1 of this case, with the miniaturization of the micro-pneumatic power device 1, its performance changes are shown in Table 3 below:

It can be seen that after sampling 20 miniature pneumatic power plant 1 products for practical experiments, the maximum output pressure can be stably increased by gradually reducing the side length of the square-shaped suspension plate 130 from large to the preferred size of 2.5mm to 3.5mm Can reach at least 300mmHg or more. In this case, the square shape of the suspending plate 130 and the gradual reduction of the side length are taken into consideration, so that the rigidity of the suspending plate 130 is improved, which not only has the maximum output air pressure, but also reduces the horizontal deformation of the suspending plate 130 during vertical vibration, and It can more stably cooperate with the piezoelectric ceramic plate 133, so that the vibration of the piezoelectric actuator 13 can be maintained in the same direction, thereby reducing the gap between the piezoelectric actuator 13 and the resonance plate 12 or other assembled components The collision involves maintaining a certain distance between the suspension plate 130 and the resonant sheet 12, which has a considerable suppression of noise, and at the same time the final quality inspection of the product is made, the number of defective products is also reduced, which helps in manufacturing quality Effectiveness improvement. In addition, when the size of the suspension plate 130 of the piezoelectric actuator 13 is reduced, the piezoelectric actuator 13 can also be made smaller, which in turn can reduce the volume of the gas flow path inside the piezoelectric actuator 13, which is beneficial to The air is pushed or compressed, so it can improve performance and can simultaneously reduce the overall component size. Moreover, as described above, for the piezoelectric actuator 13 equipped with a large-sized floating plate 130 and a piezoelectric ceramic plate 133, due to the poor rigidity of the floating plate 130, it is easy to distort and deform during vibration, making it It is easy to collide with the resonant sheet 12 or other assembled components, so it generates a high proportion of noise, and the noise problem is also one of the causes of product defects, so the large size of the suspension plate 130 and the piezoelectric ceramic plate 133 are defective The rate is higher. Therefore, when the size of the suspension plate 130 and the piezoelectric ceramic plate 133 is reduced, in addition to the advantages of improved performance and noise reduction, the defect rate of the product can also be reduced.

But in any case, the above-mentioned reduction of the length of the side of the suspension plate 130 improves the yield and increases its maximum The function of the large output air pressure is obtained through experiments, and cannot be directly deduced by theoretical formulas. The speculation of the reason for its increased function is only used as a reference for the rationality of the experiment.

Of course, in this case, the micro-pneumatic power device 1 has a tendency to be thinner, and the total thickness of the micro-fluid control device 1A assembled with the micro-valve device 1B is maintained to a height of between 1.5 mm and 4 mm, thereby making the micro gas power device light and comfortable Portable purpose, and can be widely used in medical equipment and related equipment.

In summary, the micro-pneumatic power device provided in this case is mainly assembled by the micro-fluid control device and the micro-valve device, so that the gas enters from the air inlet of the micro-fluid control device, and uses piezoelectric actuation The action of the device makes the gas produce a pressure gradient in the designed flow channel and pressure chamber, and then the gas flows at high speed and is transferred to the micro valve device. Then, through the one-way valve design of the micro valve device, the gas is directed in one direction Flow, which can accumulate pressure in any device connected to the outlet; and when the pressure is reduced or relieved, the transmission volume of the micro-fluid control device is adjusted, and the gas can be transmitted from the device connected to the outlet to the micro The second outlet chamber of the valve device is transmitted to the second pressure-relief chamber by the communication flow channel, and then flows out through the pressure-relief through hole, so as to achieve rapid gas transmission and at the same time to achieve the effect of mute In addition, the overall volume of the micro gas power device can be reduced and thinned, so that the micro gas power device can achieve the purpose of being portable and comfortable, and can be widely used in medical equipment and related equipment. Therefore, the micro gas power plant in this case has great industrial utilization value, and the application is submitted according to law.

Even though the present invention has been described in detail by the above-mentioned embodiments and can be modified by any person skilled in the art, it can be modified in any way as long as it is attached to the scope of protection of the patent application.

1: Miniature pneumatic power device

1A: Micro fluid control device

1B: Micro valve device

1a: shell

10: Base

11: Air intake plate

11a: the second surface of the air intake plate

110: air inlet

12: Resonance film

120: Hollow hole

13: Piezo actuator

130: suspension board

131: Outer frame

132: Bracket

133: Piezoelectric ceramic board

134: conductive pin

135: gap

141, 142: insulating sheet

15: conductive sheet

151: conductive pin

16: Gas gathering plate

16a: accommodating space

160: surface

162: Gas collection chamber

163: First through hole

164: Second through hole

168: sidewall

17: Valve piece

170: valve hole

171: positioning holes

18: export board

180: second reference surface

181: Pressure relief through hole

181a: Second convex structure

182: outlet through hole

183: Second pressure relief chamber

184: Second out of the oral cavity

185: Connect the flow channel

Claims (27)

A micro-pneumatic power device, including: a micro-fluid control device, including a stacking arrangement in sequence: an air inlet plate; a resonant sheet with a hollow hole; a piezoelectric actuator; a gas collector plate, the gas collector plate It is square and its side length is 4mm to 6mm; where there is a gap between the resonant plate and the piezoelectric actuator to form a first chamber, when the piezoelectric actuator is driven, the gas is fed by the gas inlet plate Enter, flow through the resonant sheet to enter the first chamber for retransmission; and a micro-valve device including a valve sheet and an outlet plate are sequentially stacked and positioned on the gas collecting plate of the micro-fluid control device, The valve plate has a valve hole, and the outlet plate has the same length and width as the gas collector plate of the micro-fluid control device; wherein, when gas is transferred from the micro-fluid control device to the micro-valve device, To carry out pressure collection or pressure relief operations. The miniature pneumatic power device as described in item 1 of the patent application scope, wherein the gas collecting plate has a length of 6 mm and a width of 6 mm. The micro-pneumatic power device as described in item 1 of the patent application scope, wherein the air inlet plate has at least one air inlet hole, at least one busbar hole, and a central recess forming a busbar chamber, the at least one air inlet hole is provided for Introduce gas, the busbar hole corresponds to the air inlet hole, and guide the gas of the air inlet hole to the confluence chamber formed by the central concave portion, and the confluence chamber corresponds to the hollow hole in the resonance sheet. The micro-pneumatic power device as described in item 1 of the patent application scope, wherein the piezoelectric actuator includes: a suspension plate, which can bend and vibrate from a central portion to an outer peripheral portion; and an outer frame surrounding the suspension plate Outside At least one bracket is connected between the suspension plate and the outer frame to provide elastic support; a piezoelectric ceramic plate having a side length not greater than the side length of the suspension plate is attached to a first surface of the suspension plate It is used to apply voltage to drive the suspension plate to flex and vibrate. The miniature pneumatic power device described in item 4 of the patent application scope, wherein the suspension plate is in the shape of a square. The miniature pneumatic power device as described in item 1 of the patent application scope, wherein the gas collecting plate is provided with a first through hole, a second through hole, a first pressure relief chamber and a first outlet chamber, and has A first reference surface, the first outlet chamber has a first convex structure, the height of the first convex structure is higher than the first reference surface of the gas collecting plate, the first through hole and the first The pressure relief chamber is in communication, and the second through hole is in communication with the first outlet chamber. The micro-pneumatic power device as described in item 1 of the patent application range, wherein the valve plate has a thickness between 0.1 mm and 0.3 mm. The miniature pneumatic power device as described in item 6 of the patent application scope, wherein the outlet plate is provided with a pressure relief through hole, an outlet through hole, a second pressure relief chamber and a second outlet cavity, and has a first Two reference surfaces, the second reference surface is concavely provided with a second pressure relief cavity and a second outlet cavity, the pressure relief through hole is provided at the center of the second pressure relief cavity, and the end of the pressure relief through hole It has a second convex structure, the height of the second convex structure is higher than the second reference surface of the outlet plate, the outlet through hole communicates with the second outlet chamber, and the second pressure relief chamber There is a communication channel between the second outlet chamber, and the valve plates and the outlet plate are sequentially stacked and positioned on the gas collecting plate of the micro fluid control device, and the pressure relief through hole of the outlet plate corresponds to the The first through hole of the gas collector plate, the second pressure relief chamber of the outlet plate corresponds to the first pressure relief chamber of the gas collector plate, and the second outlet chamber of the outlet plate corresponds to the The first outlet chamber, and the valve plate is disposed between the gas collecting plate and the outlet plate to block the communication between the first pressure relief chamber and the second pressure relief chamber, and the valve hole of the valve plate is correspondingly provided in the Between the second through hole and the outlet through hole. The micro-pneumatic power device as described in item 8 of the patent application scope, wherein when the gas is transferred downward from the micro-fluid control device into the micro-valve device, the first through hole and the second through hole of the gas collecting plate The perforation enters the first pressure-relief chamber and the first outlet chamber, and the valve piece of the micro-valve device quickly interferes with the second convex structure of the outlet plate, which is beneficial to form a pre-force effect, completely closing the pressure-relief passage At the same time, the gas is introduced from the valve hole of the valve piece into the outlet through hole of the micro valve device for pressure collecting operation. The miniature pneumatic power device as described in item 9 of the patent application scope, wherein when the pressure-gathering gas is greater than the introduced gas, the pressure-gathering gas flows from the outlet through-hole toward the second outlet chamber to displace the valve plate, and The valve hole of the valve plate is closed against the gas collecting plate, and at the same time, the pressure-collecting gas can flow into the second pressure-relief chamber within the second outlet cavity along the communication channel, and then the second The valve plate in the pressure chamber is displaced, and the pressure-collecting gas can flow out of the pressure relief through hole for pressure relief operation. The micro-pneumatic power device as described in item 10 of the patent application range, wherein the outlet plate is provided with at least one limiting structure in the second pressure relief chamber to assist support the valve piece to prevent the valve piece from collapsing. The miniature pneumatic power device as described in item 11 of the patent application scope, wherein the height of the limit structure is 0.2 mm. The micro-pneumatic power device as described in item 4 of the patent application scope, wherein the suspension plate of the micro-fluid control device has a length between 2 mm and 4.5 mm, a width between 2 mm and 4.5 mm, and between Thickness between 0.1mm and 0.3mm. The micro-pneumatic power device as described in item 14 of the patent application range, wherein the length of the suspension plate of the micro-fluid control device is 2.5 mm to 3.5 mm, the width is 2.5 mm to 3.5 mm, and the thickness is 0.2 mm. The micro-pneumatic power device as described in item 4 of the patent application range, wherein the piezoelectric ceramic plate has a side length not greater than the side length of the suspension plate, has a length between 2mm and 4.5mm, and a length between 2mm and 4.5 The width between mm and the thickness between 0.05mm and 0.3mm, and the ratio of the length and the width is between 0.44 times and 2.25 times. The micro-pneumatic power device as described in item 15 of the patent application range, wherein the piezoelectric ceramic plate has a length of 2.5 mm to 3.5 mm, a width of 2.5 mm to 3.5 mm, and a thickness of 0.10 mm. The micro-pneumatic power device as described in item 5 of the patent application scope, wherein the micro-fluid control device The suspended plate further includes a convex portion disposed on a second surface of the suspended plate, the height of which is between 0.02 mm and 0.08 mm. The micro-pneumatic power device as described in item 1 of the patent application scope, wherein the air inlet plate of the micro-fluid control device is made of a stainless steel material and has a thickness between 0.3 mm and 0.5 mm. The micro-pneumatic power device as described in item 1 of the patent application range, wherein the resonant plate of the micro-fluid control device is made of a copper material and has a thickness between 0.02 mm and 0.07 mm. The micro-pneumatic power device as described in item 1 of the patent application scope, wherein the micro-fluid control device further includes at least one insulating sheet and a conductive sheet, and the at least one insulating sheet and the conductive sheet are sequentially disposed on the piezoelectric actuator Under the actuator. The micro-pneumatic power device as described in item 4 of the patent application range, wherein the outer frame of the piezoelectric actuator of the micro-fluid control device is made of a stainless steel material, and the thickness is between 0.1 mm and 0.4 mm. The micro-pneumatic power device as described in item 6 of the patent application range, wherein the first convex portion structure of the first outlet chamber of the gas-collecting plate of the micro-fluid control device has between 0.1 mm and 0.55 mm the height of. The miniature pneumatic power device as described in Item 22 of the patent application scope, wherein the height of the first convex structure of the first outlet chamber is 0.2 mm. The micro-pneumatic power device as described in item 8 of the patent application range, wherein the second convex structure of the pressure relief through hole of the outlet plate of the micro-valve device has a height between 0.1 mm and 0.55 mm. The micro-pneumatic power device as described in item 6 of the patent application range, wherein the gas-collecting plate of the micro-fluid control device further has a gas-collecting chamber on a surface, and the gas-collecting chamber and the first through hole and The second through holes communicate with each other. The micro-pneumatic power device as described in item 25 of the patent application scope, wherein the first pressure-relief chamber and the first outlet chamber of the gas-collecting plate of the micro-fluid control device are disposed in the opposite gas-collecting chamber On the first reference surface. The micro-pneumatic power device as described in item 1 of the patent application scope, wherein the total thickness of the micro-fluid control device assembled with the micro-valve device is maintained to a height of 1.5 mm to 4 mm.

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