TWI611107B - Micro-fluid control device - Google Patents

Micro-fluid control device Download PDF

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Publication number
TWI611107B
TWI611107B TW105128581A TW105128581A TWI611107B TW I611107 B TWI611107 B TW I611107B TW 105128581 A TW105128581 A TW 105128581A TW 105128581 A TW105128581 A TW 105128581A TW I611107 B TWI611107 B TW I611107B
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TW
Taiwan
Prior art keywords
plate
hole
chamber
fluid control
valve
Prior art date
Application number
TW105128581A
Other languages
Chinese (zh)
Other versions
TW201727080A (en
Inventor
陳世昌
黃啟峰
韓永隆
廖家淯
陳壽宏
黃哲威
廖鴻信
陳朝治
程政瑋
張英倫
張嘉豪
李偉銘
Original Assignee
研能科技股份有限公司
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Priority to ??105102842 priority Critical
Priority to ??105102843 priority
Priority to TW105102845 priority
Priority to TW105102843 priority
Priority to TW105102842 priority
Priority to ??105102845 priority
Priority to ??105119824 priority
Priority to TW105119824 priority
Priority to TW105119823 priority
Priority to ??105119825 priority
Priority to ??105119823 priority
Priority to TW105119825 priority
Application filed by 研能科技股份有限公司 filed Critical 研能科技股份有限公司
Priority claimed from US15/409,960 external-priority patent/US10487821B2/en
Publication of TW201727080A publication Critical patent/TW201727080A/en
Application granted granted Critical
Publication of TWI611107B publication Critical patent/TWI611107B/en

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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • F04B43/046Micropumps with piezo-electric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10Adaptations or arrangements of distribution members
    • F04B39/1066Valve plates
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047Pumps having electric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00Circuits for servomotor systems
    • F15B2211/20Fluid pressure source, e.g. accumulator or variable axial piston pump
    • F15B2211/205Systems with pumps

Abstract

A miniature fluid control device includes: a piezoelectric actuator and a housing; the piezoelectric actuator has a square A shaped suspension plate, an outer frame, at least one bracket connected between the suspension plate and the outer frame, and a piezoelectric ceramic plate, each having a side length not greater than the side length of the suspension plate, attached to the first surface of the suspension plate; The body has a gas collecting plate and a base. The gas collecting plate is a frame structure with a side wall constituting a gas collecting chamber, and has a plurality of through holes provided therethrough. The base is closed and arranged at the bottom of the piezoelectric actuator and has a hollow Holes and hollow holes are set corresponding to the central part of the suspension plate; when the piezoelectric actuator is driven by voltage, the suspension plate also bends and vibrates, and transmits fluid from the hollow holes in the base to the gas collection chamber, and then It is discharged through a plurality of through holes.

Description

Miniature fluid control device

This case relates to a miniature fluid control device, which is suitable for a miniature ultra-thin and quiet miniature pneumatic power device.

At present, in all fields, whether in the pharmaceutical, computer technology, printing, energy and other industries, the products are developing towards miniaturization and miniaturization. Among them, micropumps, sprayers, inkjet heads, industrial printing devices and other products The fluid transport structure is its key technology, so how to break through its technical bottlenecks with innovative structures is an important content of development.

For example, in the pharmaceutical industry, many instruments or equipment that require pneumatic power to drive, usually adopt traditional motors and pneumatic valves to achieve the purpose of gas delivery. However, due to the limitation of the structure of these traditional motors and gas valves, it is difficult for such instruments to reduce their volume, so that the overall device cannot be reduced in size, that is, it is difficult to achieve the goal of thinning, so it cannot be installed. It is not convenient to use it on or with a portable device. In addition, these traditional motors and gas valves also generate noise when they are actuated, making the user anxious, resulting in inconvenience and discomfort in use.

Therefore, how to develop a microfluidic control device that can improve the lack of the above-mentioned conventional techniques and can make the traditional instruments or equipment using microfluidic control devices small in size, miniaturized and silent, thereby achieving portable and comfortable portable purposes. For the problems that urgently need to be solved.

The main purpose of this case is to provide a micro fluid control device suitable for portable or wearable instruments or equipment. Gas fluctuations generated by high-frequency operation of piezoelectric ceramic plates are produced in the designed flow channel. The pressure gradient is generated, so that the gas flows at high speed and passes through the impedance difference between the inlet and outlet directions of the flow channel. The gas is transmitted from the suction end to the discharge end. , It is difficult to be thin, can not achieve the purpose of portable, and the noise is large.

In order to achieve the above object, one of the broader implementation aspects of the present case is to provide a microfluidic control device including: a piezoelectric actuator and a housing; the piezoelectric actuator includes a suspension plate, an outer frame, at least A bracket and a piezoelectric ceramic plate. The suspension plate has a square shape, and can be bent and vibrated from a central portion to an outer peripheral portion. The outer frame is arranged around the outer side of the suspension plate, and the at least one bracket is connected to the suspension. Between the plate and the outer frame to provide elastic support, the piezoelectric ceramic plate has a square shape with a side length that is not greater than the side length of the suspension plate, and is attached to one of the first surfaces of the suspension plate. A voltage is applied to drive the suspension plate to bend and vibrate; and the shell includes a gas collecting plate and a base, the gas collecting plate is a frame structure with peripheral walls and side walls, and is further recessed on the inner surface to form an air collecting cavity A chamber for the piezoelectric actuator to be disposed in the air-gathering chamber, the base closedly disposed at the bottom of the piezoelectric actuator, and having a hollow hole, the hollow hole corresponding to the suspension plate Centrally located; its The gas collecting plate further has a plurality of through holes disposed therethrough. When the piezoelectric actuator is driven by a voltage, the suspension plate also bends and vibrates accordingly, and transmits fluid from the hollow hole of the base to the gas collecting plate. The chamber is then discharged through the plurality of through holes.

1‧‧‧ Miniature Pneumatic Power Unit

1A‧‧‧Miniature fluid control device

1B‧‧‧Miniature valve device

1a‧‧‧shell

10‧‧‧ base

11‧‧‧Air intake plate

11a‧‧‧Second surface of air inlet plate

11b‧‧‧ the first surface of the air intake plate

110‧‧‧air inlet

111‧‧‧ Center recess

112‧‧‧ Bus hole

12‧‧‧ Resonator

12a‧‧‧movable part

12b‧‧‧Fixed section

120‧‧‧ Hollow

121‧‧‧First Chamber

13‧‧‧ Piezo actuator

130‧‧‧ suspension board

130a‧‧‧Second surface of suspension board

130b‧‧‧ the first surface of the suspended plate

130c‧‧‧ convex

130d‧‧‧ Center

130e‧‧‧outer

131‧‧‧ frame

131a‧‧‧The second surface of the frame

131b‧‧‧ the first surface of the frame

132‧‧‧ Bracket

132a‧‧‧ The second surface of the bracket

132b‧‧‧ the first surface of the bracket

133‧‧‧Piezoelectric ceramic plate

134, 151‧‧‧ conductive pins

135‧‧‧Gap

141, 142‧‧‧ insulating sheet

15‧‧‧Conductive sheet

16‧‧‧Gas collecting plate

16a‧‧‧accommodation space

160‧‧‧ surface

161‧‧‧ datum surface

162‧‧‧Gas collecting chamber

163‧‧‧The first through hole

164‧‧‧second through hole

165‧‧‧The first pressure relief chamber

166‧‧‧First Exit Room

167, 181a‧‧‧ convex structure

168‧‧‧ side wall

17‧‧‧Valve Disc

170‧‧‧Valve hole

171‧‧‧ positioning holes

18‧‧‧ export board

180‧‧‧ datum surface

181‧‧‧Pressure Relief Through Hole

182‧‧‧Exit through hole

183‧‧‧Second pressure relief chamber

184‧‧‧Second Outlet Room

185‧‧‧Connecting runner

187‧‧‧Second surface

188‧‧‧ limit structure

19‧‧‧ export

g0‧‧‧clearance

(a) ~ (x) ‧‧‧Different implementations of piezoelectric actuators

a0, i0, j0, m0, n0, o0, p0, q0, r0‧‧‧

a1, i1, m1, n1, o1, p1, q1, r1‧‧‧

a2, i2, m2, n2, o2, p2, q2, r2‧‧‧ bracket, board connection

a3, m3, n3, o3, p3, q3, r3

d‧‧‧Vibration displacement of piezoelectric actuator

s4, t4, u4, v4, w4, x4‧‧‧ convex

m2 ’, n2’, o2 ’, q2’, r2’‧‧‧ brackets are connected to the ends of the frame

m2 ”, n2”, o2 ”, q2”, r2 ”‧‧‧ brackets are connected to the ends of the suspension board

FIG. 1A is a schematic exploded front view of a miniature pneumatic power device according to a preferred embodiment of the present invention.

Figure 1B is a schematic diagram of the front assembly structure of the miniature pneumatic power device shown in Figure 1A.

Fig. 2A is a schematic exploded view of the back of the miniature pneumatic power device shown in Fig. 1A.

Fig. 2B is a schematic diagram of the rear assembly structure of the miniature pneumatic power device shown in Fig. 1A.

Fig. 3A is a schematic diagram of the front assembly structure of the piezoelectric actuator of the miniature pneumatic power device shown in Fig. 1A.

FIG. 3B is a schematic diagram of the back assembly structure of the piezoelectric actuator of the miniature pneumatic power device shown in FIG. 1A Illustration.

Fig. 3C is a schematic cross-sectional structure diagram of the piezoelectric actuator of the miniature pneumatic power device shown in Fig. 1A.

4A to 4C are schematic diagrams of various implementation modes of the piezoelectric actuator.

FIG. 5A to FIG. 5E are partial operation schematic diagrams of the micro fluid control device of the micro pneumatic power device shown in FIG. 1A.

FIG. 6A is a schematic diagram of the pressure collecting action of the gas collecting plate and the micro valve device of the miniature pneumatic power device shown in FIG.

FIG. 6B is a schematic diagram of the pressure relief operation of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in FIG.

Figures 7A to 7E are schematic diagrams of the pressure collecting action of the miniature pneumatic power device shown in Figure 1A.

Fig. 8 is a schematic diagram of the pressure reduction or pressure relief action of the miniature pneumatic power device shown in Fig. 1A.

Some typical embodiments embodying the features and advantages of this case will be described in detail in the description in the subsequent paragraphs. It should be understood that this case can have various changes in different aspects, all of which do not depart from the scope of this case, and that the descriptions and diagrams therein are essentially for illustration purposes, rather than limiting the case.

The micro-pneumatic power unit 1 in this case can be applied to industries such as medicine, biotechnology, energy, computer technology, or printing, and is not used to transmit gas. Please refer to FIG. 1A, FIG. 1B, FIG. 2A, FIG. 2B, and FIGS. 7A to 7E. FIG. 1A is a schematic exploded front view of the miniature pneumatic power device according to the preferred embodiment of the present invention, and FIG. 1B is FIG. 1A. The schematic diagram of the front assembly structure of the miniature pneumatic power device shown in the figure, FIG. 2A is a schematic diagram of the exploded structure of the rear of the miniature pneumatic power device shown in FIG. 1A, and FIG. 2B is the schematic diagram of the miniature pneumatic power device shown in FIG. 1A. Schematic diagram of the rear assembly structure. Figures 7A to 7E are schematic diagrams of the pressure-collecting operation of the miniature pneumatic power device shown in Figure 1A. As shown in Figures 1A and 2A, the miniature pneumatic power device 1 in this case is a combination of a miniature fluid control device 1A and a miniature valve device 1B. The miniature fluid control device 1A has a housing 1a and a piezoelectric actuator. Device 13, insulating sheets 141, 142, and conductive sheet 15, etc., where the casing 1a includes a gas collecting plate 16 and a base 10, and the base 10 includes an air intake plate 11 and a resonance sheet 12, but this is not the case. Limited. The piezoelectric actuator 13 is provided corresponding to the resonance sheet 12, and the air intake plate 11, the resonance sheet 12, the piezoelectric actuator 13, the insulation sheet 141, the conductive sheet 15, the other insulation sheet 142, and the gas collecting plate are provided. 16 and so on are sequentially stacked, and the piezoelectric actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132, and a piezoelectric ceramic plate 133; and the micro valve device 1B includes A valve plate 17 and an outlet plate 18 are not limited thereto. And in this embodiment, as shown in FIG. 1A, the gas collecting plate 16 is not only a single plate structure, but also a frame structure having a side wall 168 on the periphery, and the gas collecting plate 16 has a thickness of 9 mm to 17 mm. Between the length and the width between 9mm and 17mm, and the ratio between the length and the width is between 0.53 times and 1.88 times, and the side wall 168 formed by the periphery and the bottom plate together define a capacity The installation space 16a is used for the piezoelectric actuator 13 to be installed in the accommodation space 16a. Therefore, when the miniature pneumatic power device 1 in this case is assembled, the front schematic diagram will be as shown in FIG. 1B, and As shown in FIGS. 7A to 7E, it can be seen that the micro fluid control device 1A is assembled corresponding to the micro valve device 1B, that is, the valve plate 17 and the outlet plate 18 of the micro valve device 1B are sequentially stacked and positioned on the micro valve device. It is formed on the gas collecting plate 16 of the fluid control device 1A. The assembled back view shows the pressure relief through hole 181 and the outlet 19 on the outlet plate 18. The outlet 19 is used to connect with a device (not shown), and the pressure relief through hole 181 is used to make the micro valve device The gas in 1B is discharged to achieve the effect of pressure relief. By this assembly of the micro fluid control device 1A and the micro valve device 1B, gas is introduced from at least one air inlet hole 110 on the air inlet plate 11 of the micro fluid control device 1A and passes through the piezoelectric actuator 13 It will continue to transmit through multiple pressure chambers (not shown), so that the gas can flow unidirectionally in the micro valve device 1B and accumulate pressure in a device connected to the outlet end of the micro valve device 1B. (Not shown), and when pressure relief is required, the output of the micro fluid control device 1A is regulated so that the gas is discharged through the pressure relief through hole 181 on the outlet plate 18 of the micro valve device 1B for relief. Pressure.

Please continue to refer to FIG. 1A and FIG. 2A. As shown in FIG. 1A, the air inlet plate 11 of the micro fluid control device 1A has a first surface 11b, a second surface 11a, and at least one air inlet hole 110. In the example, the number of the air inlet holes 110 is four, but it is not limited to this. It penetrates the first surface 11b and the second surface 11a of the air inlet plate 11 and is mainly used for the gas to comply with the atmospheric pressure from outside the device. This function flows into the micro fluid control device 1A from the at least one air inlet hole 110. And as shown in FIG. 2A, it can be seen from the first surface 11b of the air inlet plate 11, There is at least one busbar hole 112 formed thereon to correspond to the at least one air inlet hole 110 of the second surface 11 a of the air inlet plate 11. In this embodiment, the number of the busbar holes 112 corresponds to the air inlet holes 110, and the number is 4, but is not limited thereto. The central communication portion of the busbar holes 112 has a central recess 111. Moreover, the central recessed portion 111 is in communication with the busbar hole 112, so that the gas entering the busbar hole 112 from the air inlet hole 110 can be guided and converged to the central recessed portion 111 for transmission. Therefore, in this embodiment, the air inlet plate 11 has an air inlet hole 110, a bus bar hole 112, and a central recess 111 that are integrally formed, and a confluence chamber for a confluent gas is formed correspondingly at the central recess 111 for Gas is temporarily stored. In some embodiments, the material of the air inlet plate 11 may be, but is not limited to, a stainless steel material, and its thickness is between 0.4 mm and 0.6 mm, and its preferred value is 0.5 mm, but Not limited to this. In other embodiments, the depth of the busbar cavity formed by the central recess 111 is the same as the depth of the busbar holes 112, and the preferred value of the depth of the busbar cavity and the busbar holes 112 is described Between 0.2mm and 0.3mm, but not limited to this. The resonance sheet 12 is composed of a flexible material, but is not limited thereto. The resonance sheet 12 has a hollow hole 120 on the resonance sheet 12 and is provided corresponding to the central recess 111 of the first surface 11 b of the air intake plate 11. To allow gas to circulate. In other embodiments, the resonant plate 12 may be made of a copper material, but is not limited thereto, and its thickness is between 0.03mm and 0.08mm, and its preferred value is 0.05mm, but also Not limited to this.

Please also refer to FIG. 3A, FIG. 3B, and FIG. 3C, which are a schematic diagram of the front structure, the back structure, and the cross-sectional structure of the piezoelectric actuator of the miniature pneumatic power device shown in FIG. 1A, respectively. The actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132, and a piezoelectric ceramic plate 133. The piezoelectric ceramic plate 133 is attached to the first of the suspension plate 130. The surface 130b is used to apply voltage to generate deformation to drive the suspension plate 130 to bend and vibrate. The suspension plate 130 has a central portion 130d and an outer peripheral portion 130e. When the piezoelectric ceramic plate 133 is driven by a voltage, the suspension plate 130 can be driven by the central portion. The bending vibration from 130d to the outer peripheral portion 130e, and the at least one bracket 132 is connected between the suspension plate 130 and the outer frame 131. In this embodiment, the bracket 132 is connected between the suspension plate 130 and the outer frame 131. The two ends are respectively connected to the outer frame 131 and the suspension plate 130 to provide elastic support, and at least one gap 135 is provided between the bracket 132, the suspension plate 130 and the outer frame 131 for gas circulation, and the Suspension plate 130, frame 1 31 And the shape and number of the brackets 132 have various changes. In addition, the outer frame 131 is arranged around the outer side of the suspension plate 130 and has a conductive pin 134 protruding outward for power connection, but not limited thereto. In this embodiment, the suspension plate 130 is a stepped structure, which means that the second surface 130a of the suspension plate 130 further has a convex portion 130c. The convex portion 130c may be, but is not limited to, a circular protrusion. Structure, and the height of the convex portion 130c is between 0.02mm and 0.08mm, and the preferred value is 0.03mm, and its diameter is 0.55 times the minimum side length of the suspension plate 130. Please refer to FIG. 3A and FIG. 3C at the same time, the surface of the convex portion 130c of the suspension plate 130 is coplanar with the second surface 131a of the outer frame 131, and the second surface 130a of the suspension plate 130 and the second surface of the bracket 132 The surface 132a is also coplanar, and the protrusion 130c of the suspension plate 130 and the second surface 131a of the outer frame 131 have a specific depth between the second surface 130a of the suspension plate 130 and the second surface 132a of the bracket 132. As for the first surface 130b of the suspension plate 130, as shown in FIGS. 3B and 3C, it is a flat coplanar structure with the first surface 131b of the outer frame 131 and the first surface 132b of the bracket 132, and the piezoelectric The ceramic plate 133 is attached to the first surface 130 b of the flat suspension plate 130. In other embodiments, the shape of the suspension plate 130 can also be a flat, square plate-shaped structure with two sides, which is not limited to this, and can be arbitrarily changed according to the actual application situation. In some embodiments, the suspension plate 130, the bracket 132, and the outer frame 131 may be a one-piece structure, and may be composed of a metal plate, such as stainless steel, but not limited thereto. In some embodiments, the thickness of the suspension plate 130 is between 0.1mm and 0.4mm, and the preferred value is 0.27mm. In addition, the length of the suspension plate 130 is between 4mm and 8mm, and A good value may be 6mm to 8mm, and a width is between 4mm to 8mm, and a preferable value may be 6mm to 8mm, but not limited thereto. As for the thickness of the outer frame 131 is between 0.2 mm and 0.4 mm, and the preferred value is 0.3 mm, but it is not limited thereto.

In still other embodiments, the thickness of the piezoelectric ceramic plate 133 is between 0.05 mm and 0.3 mm, and the preferred value is 0.10 mm, and the piezoelectric ceramic plate 133 has a size not larger than the suspension plate 130. The length of the side is between 4mm and 8mm, and the preferred value is 6mm to 8mm and the width is between 4mm and 8mm. The preferred value is 6mm to 8mm. The preferred width ratio is between 0.5 and 2 times, but it is not limited to this. In still other embodiments, the side length of the piezoelectric ceramic plate 133 may be shorter than the side length of the suspension plate 130, and is also designed as a square plate-like structure corresponding to the suspension plate 130, but it is not This is the limit.

In the related embodiment of the miniature pneumatic power device 1 of this case, the reason why the piezoelectric actuator 13 uses a square suspension plate 130 is that compared to a circular suspension plate (as shown in (j) of FIG. 4A) l) The design of the circular suspension plate j0). The structure of the square suspension plate 130 obviously has the advantage of saving power. Due to the capacitive load operating at the resonance frequency, the power consumption will increase with the increase of the frequency. Because the resonance frequency of the square-shaped suspension plate 130 on the side is obviously lower than that of the circular suspension plate j0, its relative power consumption is also significantly lower. That is, the square-shaped piezoelectric actuator 13 used in this case makes it Electricity advantages, especially for wearable devices, saving power is a very important design focus.

Please refer to FIGS. 4A, 4B, and 4C, which are schematic diagrams of various implementation modes of the piezoelectric actuator. As shown in the figure, it can be seen that the suspension plate 130, the outer frame 131, and the bracket 132 of the piezoelectric actuator 13 can have various types, and can have at least (a) to (l) and the like shown in FIG. 4A. Various aspects, for example, (a) the outer frame a1 and the suspension plate a0 have a square structure, and the two are connected by multiple brackets a2, for example, 8 but not This is a limitation, and a gap a3 is provided between the bracket a2, the suspension plate a0, and the outer frame a1 for gas circulation. In another (i) aspect, the outer frame i1 and the suspension plate i0 are also square in structure, but only two brackets i2 are used to connect them; in addition, there are further related technologies, such as 4B, As shown in Fig. 4C, the suspension plate of the piezoelectric actuator 13 can also have various forms such as (m) ~ (r) shown in Fig. 4B and (s) ~ (x) shown in Fig. 4C. In these aspects, the suspension plate 130 and the outer frame 131 have a square structure. For example, (m) the outer frame m1 and the suspension plate m0 are both square structures, and the two are connected by a plurality of brackets m2, for example: 4, but not limited to this, A gap m3 is provided between the bracket m2, the suspension plate m0, and the outer frame m1 for fluid circulation. And in this embodiment, the bracket m2 connected between the outer frame m1 and the suspension plate m0 may be, but not limited to, a plate connecting portion m2, and the plate connecting portion m2 has two end portions m2 'and m2 ", One end portion m2 'is connected to the outer frame m1, and the other end portion m2 "is connected to the suspension plate m0, and the two end portions m2' and m2" are corresponding to each other and are disposed on the same axis. Yu (n In the aspect, it also has an outer frame n1, a suspension plate n0, and a bracket n2 connected between the outer frame n1, the suspension plate n0, and a gap n3 for fluid flow. The bracket n2 may also be, but not limited to, one. Board connection n2, The board connection portion n2 also has two end portions n2 'and n2 ", and the end portion n2' is connected to the outer frame n1, and the other end portion n2" is connected to the floating plate n0. However, in this embodiment, the plate connection The portion n2 is connected to the outer frame n1 and the suspension plate n0 at an oblique angle between 0 and 45 degrees. In other words, the two end portions n2 'and n2 "are not disposed on the same horizontal axis, and they are mutually offset. The setting relationship. In the aspect (o), the structures such as the outer frame o1, the suspension plate o0, and the bracket o2 connected between the outer frame o1, the suspension plate o0, and the gap o3 for fluid circulation are similar to the previous embodiment. Among them, the design type of the plate connection portion o2 as a bracket is slightly different from the (m) mode, but in this mode, the two end portions o2 'and o2 "of the plate connection portion o2 still correspond to each other. And set on the same axis.

Also in the (p) aspect, it also has a structure such as an outer frame p1, a suspension plate p0, a bracket p2 connected between the outer frame p1, the suspension plate p0, and a gap p3 for fluid flow. Here, the embodiment is implemented. Among them, the plate connection part p2 as a bracket further has a structure such as a suspension plate connection part p20, a beam part p21, and an outer frame connection part p22, wherein the beam part p21 is disposed in a gap p3 between the suspension plate p0 and the outer frame p1, and The setting direction is parallel to the outer frame p1 and the suspension plate p0, and the suspension plate connection portion p20 is connected between the beam portion p21 and the suspension plate p0, and the outer frame connection portion p22 connects the beam portion p21 and the outer frame p1. And the suspension board connection part p20 and the outer frame connection part p22 also correspond to each other and are disposed on the same axis.

In the aspect (q), the structures such as the outer frame q1, the suspension plate q0, and the bracket q2 connected between the outer frame q1, the suspension plate q0, and the gap q3 for fluid circulation are all the same as the aforementioned (m), (o ) The appearance is similar, in which the design of the plate connection part q2, which is only a bracket, is slightly different from the (m), (o) appearance. In this aspect, the suspension plate q0 has a square shape, and Each side thereof has two plate connecting portions q2 connected to the outer frame q1, and both end portions q2 'and q2 "of each plate connecting portion q2 are also corresponding to each other and are disposed on the same axis. However, (r In the aspect, it also has components such as an outer frame r1, a suspended plate r0, a bracket r2, and a gap r3, and the bracket r2 may also be, but not limited to, a plate connecting portion r2. In this embodiment, the plate connecting portion r2 It is a V-shaped structure. In other words, the plate connection portion r2 is also connected to the outer frame r1 and the suspension plate r0 at an inclined angle between 0 and 45 degrees. Therefore, each plate connection portion r2 has one end portion r2 ”and The suspension plate r0 is connected and has two end portions r2 'connected to the outer frame r1, which means that the two end portions b2' and the end portions b2 "are not provided. Placed on the same horizontal axis.

Continuing as shown in Figure 4C, the appearance types of these (s) ~ (x) appearances roughly correspond to the shapes of (m) ~ (r) shown in Figure 4B, except for these (s ) ~ (x), each of the levitation plates 130 of the piezoelectric actuator 13 is provided with a convex portion 130c, that is, structures such as s4, t4, u4, v4, w4, and x4 as shown in the figure. Regardless of the state of (m) ~ (r) or the state of (s) ~ (x), the suspension plate 130 is designed as a square shape to achieve the aforementioned low power consumption effect; It can be seen that whether the suspension plate 130 is a flat flat structure with two sides or a stepped structure with convex portions on one surface, it is within the protection scope of this case and is connected between the suspension plate 130 and the outer frame 131. The shape and quantity of the bracket 132 can also be changed according to the actual application situation, and is not limited to the appearance shown in this case. As mentioned before, the suspension plate 130, the outer frame 131, and the bracket 132 can be a one-piece structure, but not limited to this. As for the manufacturing method, it can be processed by traditional processing, or yellow light etching, or laser. Processing, or electroforming, or electrical discharge machining are not limited to this.

In addition, please refer to FIG. 1A and FIG. 2A continuously. In the micro fluid control device 1A, an insulating sheet 141, a conductive sheet 15, and another insulating sheet 142 are sequentially disposed under the piezoelectric actuator 13, respectively. And its shape substantially corresponds to the shape of the outer frame of the piezoelectric actuator 13. In some embodiments, the insulating sheets 141 and 142 are made of an insulative material, such as plastic, but not limited to this for insulating purposes. In other embodiments, the conductive sheet 15 is made of an insulating material. It is made of conductive material, such as metal, but it is not limited to it for electrical conduction. And, in this embodiment, a conductive pin 151 may be provided on the conductive sheet 15 for electrical conduction.

Please refer to FIG. 1A and FIGS. 5A to 5E at the same time, wherein FIGS. 5A to 5E are schematic diagrams of partial operation of the micro fluid control device 1A of the micro pneumatic power device shown in FIG. 1A. First, as shown in FIG. 5A, it can be seen that the micro fluid control device 1A is sequentially stacked by an air intake plate 11, a resonance sheet 12, a piezoelectric actuator 13, an insulating sheet 141, a conductive sheet 15, and another insulating sheet 142. In this embodiment, a material, such as conductive adhesive, is filled in the gap g0 between the periphery of the outer plate 131 of the resonance plate 12 and the piezoelectric actuator 13, but is not limited to this. The resonance piece 12 and the convex portion 130 c of the suspension plate 130 of the piezoelectric actuator 13 can be maintained. The depth of the gap g0 can guide the airflow to flow more quickly, and because the convex portion 130c of the suspension plate 130 and the resonance plate 12 maintain a proper distance, the contact interference between them is reduced, and the noise generation can be reduced.

Please refer to FIGS. 5A to 5E. As shown in the figure, after the air intake plate 11, the resonance plate 12 and the piezoelectric actuator 13 are sequentially assembled correspondingly, the cavity 120 in the resonance plate 12 can be connected with it. The air inlet plates 11 on the upper side collectively form a cavity for converging gas, and a first cavity 121 is formed between the resonance plate 12 and the piezoelectric actuator 13 to temporarily store the gas, and the first cavity 121 It communicates with the cavity at the central recess 111 of the first surface 11b of the air inlet plate 11 through the hollow hole 120 in the resonance plate 12, and the sides of the first cavity 121 are supported by the brackets 132 of the piezoelectric actuator 13. A gap 135 therebetween communicates with the micro valve device 1B provided below.

When the miniature fluid control device 1A of the miniature pneumatic power device 1 is actuated, the piezoelectric actuator 13 is mainly actuated by a voltage, and the support 132 is used as a fulcrum to perform vertical reciprocating vibration. As shown in FIG. 5B, when the piezoelectric actuator 13 is vibrated downward by being actuated by a voltage, since the resonance plate 12 is a light and thin sheet structure, when the piezoelectric actuator 13 vibrates, The resonance plate 12 will also resonate and perform vertical reciprocating vibration, that is, the portion of the resonance plate 12 corresponding to the central recessed portion 111 of the air intake plate 11 will also be deformed by bending vibration, that is, the resonance plate 12 corresponds to the The part of the central recessed portion 111 of the air intake plate 11 is the movable portion 12 a of the resonance plate 12. When the piezoelectric actuator 13 bends and vibrates downward, the movable portion 12 a of the resonance plate 12 will be brought in by the fluid. And pushing and the vibration of the piezoelectric actuator 13, and as the piezoelectric actuator 13 bends and deforms downward, the gas enters through at least one air inlet hole 110 on the air inlet plate 11 and passes through its first At least one busbar hole 112 of a surface 11b is collected at the central central recessed portion 111, and then flows down into the first cavity 121 through the central hole 120 corresponding to the central recessed portion 111 on the resonance plate 12, and thereafter, Driven by the vibration of the piezoelectric actuator 13, the resonance plate 12 will also resonate and perform vertical As shown in FIG. 5C, the compound vibration is such that the movable portion 12a of the resonance plate 12 vibrates downwards and attaches to the convex portion 130c of the suspension plate 130 that is in contact with the piezoelectric actuator 13 to make the suspension plate The space between the area other than the convex portion 130c of the 130 and the fixing chamber 12b on both sides of the resonance plate 12 will not be reduced, and the volume of the first chamber 121 will be compressed by the deformation of the resonance plate 12 And close the middle circulation space of the first chamber 121, so that the gas in the first chamber 121 is pushed to flow to both sides, and then passes through the gap 135 between the brackets 132 of the piezoelectric actuator 13 and flows downward. As for the figure 5D, the movable part 12a of the resonance plate 12 is After the bending vibration is deformed, it returns to the original position, and the subsequent piezoelectric actuator 13 is driven by the voltage to vibrate upward. This also squeezes the volume of the first chamber 121, and at this time, because the piezoelectric actuator 13 is Lifting upward, the displacement of this lifting can be d, so that the gas in the first chamber 121 will flow to both sides, and then drive the gas to continuously enter through at least one air inlet hole 110 on the air inlet plate 11, and then flow into the center In the cavity formed by the recessed portion 111, as shown in FIG. 5E, the resonance plate 12 is resonated upward by the vibration of the piezoelectric actuator 13 being lifted upward, and the movable portion 12a of the resonance plate 12 is also brought to an upward position, so that The gas in the central recess 111 flows into the first chamber 121 through the central hole 120 of the resonance sheet 12, and passes through the gap 135 between the brackets 132 of the piezoelectric actuator 13 and flows out of the micro fluid control device 1A. . From this aspect, it can be seen that when the resonance plate 12 performs vertical reciprocating vibration, the gap g0 between the resonance plate 12 and the piezoelectric actuator 13 can be used to increase the maximum distance of its vertical displacement. In other words, the two Setting a gap g0 between the structures can cause the resonance plate 12 to generate a larger up and down displacement when resonance, and the vibration displacement of the piezoelectric actuator is d, and the difference from the gap g0 is x, that is, x = g0-d, tested when x ≦ 0um, it is noisy; when x = 1 to 5um, the maximum output air pressure of micro pneumatic power device 1 can reach 350mmHg; when x = 5 to 10um, the maximum output air pressure of micro pneumatic power device 1 It can reach 250mmHg; when x = 10 to 15um, the maximum output air pressure of the miniature pneumatic power unit 1 can reach 150mmHg, and the corresponding relationship between the values is shown in Table 1 below. The above values are between an operating frequency of 17K to 20K and an operating voltage of ± 10V to ± 20V. In this way, a pressure gradient is generated in the design of the flow channel through this miniature fluid control device 1A, so that the gas flows at high speed, and the gas is transmitted from the suction end to the discharge end through the difference in the impedance of the flow path, and there is pressure at the discharge end. In this state, there is still the ability to continuously push out the gas and achieve the effect of silence.

Figure TWI611107BD00001

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonance plate 12 may be the same as the vibration frequency of the piezoelectric actuator 13, that is, both may be upward or downward at the same time, which may be based on the actual implementation situation. and Any change is not limited to the operation mode shown in this embodiment.

Please refer to FIG. 1A, FIG. 2A, FIG. 6A, and FIG. 6B at the same time, where FIG. 6A is a schematic diagram of the pressure collecting action of the gas collecting plate 16 and the micro valve device 1B of the miniature pneumatic power device shown in FIG. 1A Fig. 6B is a schematic diagram of the pressure relief operation of the gas collecting plate 16 and the micro valve device 1B of the micro pneumatic power device shown in Fig. 1A. As shown in Figures 1A and 6A, the miniature valve device 1B of the miniature pneumatic power device 1 in this case is sequentially stacked by a valve plate 17 and an outlet plate 18, and is matched with a gas collection plate 16 of a miniature fluid control device 1A To work.

In this embodiment, the gas collecting plate 16 has a surface 160 and a reference surface 161. The surface 160 is recessed to form a gas collecting chamber 162 for the piezoelectric actuator 13 to be disposed therein, which is controlled by a microfluid. The gas transmitted downward by the device 1A is temporarily accumulated in the gas collecting chamber 162, and there are a plurality of through holes in the gas collecting plate 16, including a first through hole 163 and a second through hole 164. One end of the through-hole 163 and the second through-hole 164 is in communication with the gas collection chamber 162, and the other end is respectively connected to the first pressure relief chamber 165 and the first outlet chamber 166 on the reference surface 161 of the gas collection plate 16. Connected. And, a convex structure 167 is further added at the first exit chamber 166, for example, it may be, but not limited to, a cylindrical structure, and the height of the convex structure 167 is higher than the reference surface 161 of the gas collecting plate 16, The height of the convex structure 167 is between 0.3 mm and 0.55 mm, and the preferred value is 0.4 mm.

The outlet plate 18 includes a pressure relief through hole 181, an outlet through hole 182, a reference surface 180, and a second surface 187. The pressure relief through hole 181 and the outlet through hole 182 pass through the reference surface 180 of the outlet plate 18 and A second surface 187, a second pressure relief chamber 183 and a second outlet chamber 184 are recessed on the reference surface 180, and the pressure relief through hole 181 is provided in the center portion of the second pressure relief chamber 183, and There is also a communication channel 185 between the pressure relief chamber 183 and the second outlet chamber 184 for gas circulation, and one end of the outlet through-hole 182 is in communication with the second outlet chamber 184 and the other end is in communication with the outlet. 19 is connected. In this embodiment, the outlet 19 can be connected to a device (not shown), such as a press, but not limited thereto.

The valve plate 17 has a valve hole 170 and a plurality of positioning holes 171. The thickness of the valve plate 17 is between 0.1 mm and 0.3 mm, and the preferred value is 0.2 mm.

When the valve plate 17 is positioned and assembled between the gas collecting plate 16 and the outlet plate 18, the pressure relief through hole 181 of the outlet plate 18 corresponds to the first through hole 163 and the second pressure relief cavity of the gas collecting plate 16. The chamber 183 corresponds to the first pressure-relief chamber 165 of the gas collecting plate 16, the second outlet chamber 184 corresponds to the first outlet chamber 166 of the gas collecting plate 16, and the valve plate 17 is provided in the gas collecting plate Between the plate 16 and the outlet plate 18, the first pressure relief chamber 165 is blocked from communicating with the second pressure relief chamber 183, and the valve hole 170 of the valve plate 17 is provided in the second through hole 164 and the outlet through hole. 182, and the valve hole 170 is correspondingly arranged in the convex structure 167 of the first outlet chamber 166 of the gas collecting plate 16, so that the single valve hole 170 is designed so that the gas can be reached according to its pressure difference. The purpose of one-way flow.

In addition, one end of the pressure-relief through hole 181 of the outlet plate 18 can be further provided with a protruding convex structure 181a. For example, the convex structure 181a can be, but not limited to, a cylindrical structure. The height of the convex structure 181a is 0.3 mm to 0.55mm, and its preferred value is 0.4mm, and the convex structure 181a is improved to increase its height. The height of the convex structure 181a is higher than the reference surface 180 of the outlet plate 18 to strengthen the valve. The sheet 17 quickly abuts and closes the pressure relief through-hole 181, and achieves the effect of a pre-force abutment and complete sealing; and the outlet plate 18 further has at least one limiting structure 188, the height of the limiting structure 188 is 0.32mm, Taking this embodiment as an example, the position-limiting structure 188 is disposed in the second pressure-relief chamber 183 and is a ring-shaped block structure, and is not limited thereto. It is mainly used when the micro-valve device 1B performs pressure-gathering operation. At this time, it is used to support the valve sheet 17 to prevent the valve sheet 17 from collapsing, and the valve sheet 17 can be opened or closed more quickly.

When the miniature valve device 1B is actuated under pressure, it is mainly shown in FIG. 6A, which can respond to the pressure provided by the gas transmitted downward from the miniature fluid control device 1A, or when the external atmospheric pressure is greater than the outlet pressure. 19 When the internal pressure of the connected device (not shown), the gas will flow from the gas collecting chamber 162 in the gas collecting plate 16 of the micro fluid control device 1A through the first through hole 163 and the second through hole 164, respectively. It flows down into the first pressure-relief chamber 165 and the first outlet chamber 166. At this time, the downward pressure of the gas causes the flexible valve sheet 17 to bend downward to deform and thereby make the volume of the first pressure-relief chamber 165 down. It is enlarged and corresponds to the first through hole 163 and is flatly pressed down and abuts against the end of the pressure relief through hole 181, so that the pressure relief through hole 181 of the outlet plate 18 can be closed, so it is in the second pressure relief chamber 183 The gas inside does not flow out from the pressure relief through hole 181. Of course, in this embodiment, a design of a convex structure 181a can be added to the end of the pressure relief through hole 181 to strengthen the valve plate 17 to quickly resist and close the pressure relief passage. The hole 181 achieves the effect of completely sealing by a pre-stress resistance, and at the same time, through the limiting structure 188 provided around the pressure relief through hole 181 to assist in supporting the valve sheet 17 so that it will not collapse. On the other hand, since the gas system flows downward from the second through hole 164 into the first exit chamber 166, and the valve sheet 17 corresponding to the first exit chamber 166 also bends downward, so that it corresponds to The valve hole 170 is opened downward, and the gas can flow from the first outlet chamber 166 into the second outlet chamber 184 through the valve hole 170, and flow from the outlet through hole 182 to the outlet 19 and the device connected to the outlet 19 (Not shown), thereby performing pressure collection operation on the device.

Please refer to FIG. 6B continuously. When the micro valve device 1B is depressurized, it can regulate the gas transmission amount of the micro fluid control device 1A so that the gas is no longer input into the gas collection chamber 162, or when it is connected to the outlet. 19 When the internal pressure of the connected device (not shown) is greater than the external atmospheric pressure, the miniature valve device 1B can be depressurized. At this time, the gas is input into the second outlet chamber 184 from the outlet through-hole 182 connected to the outlet 19, so that the volume of the second outlet chamber 184 expands, and then the flexible valve sheet 17 is bent and deformed upward, and Flatly affix upwards and abut against the gas collecting plate 16, so the valve hole 170 of the valve sheet 17 will be closed due to abutting against the gas collecting plate 16. Of course, in this embodiment, the design of a convex structure 167 can be added to the first exit chamber 166, so that the flexible valve plate 17 can be bent upward to change and quickly resist, so that the valve hole 170 is more favorable to achieve a predetermined The force resistance fully adheres to the closed state of the seal. Therefore, when in the initial state, the valve hole 170 of the valve plate 17 will be closed by abutting against the convex structure 167, and the inside of the second exit chamber 184 will be closed. The gas will not flow back into the first outlet chamber 166 to achieve better prevention of gas leakage. And, the gas system in the second outlet chamber 184 can flow into the second pressure relief chamber 183 through the communication channel 185, thereby expanding the volume of the second pressure relief chamber 183 and corresponding to the second pressure relief chamber 183. The valve plate 17 of the pressure chamber 183 is also bent upward and deformed. At this time, because the valve plate 17 is not closed against the end of the pressure relief through hole 181, the pressure relief through hole 181 is in an open state, that is, the second pressure relief chamber The gas in the chamber 183 can flow outward through the pressure relief through hole 181 for pressure relief operation. Of course, in this embodiment, the convex valve structure 181a added at the end of the pressure relief through hole 181 or the limiting structure 188 provided in the second pressure relief chamber 183 can be used to bend the flexible valve plate 17 upward. The shape change is fast, which is more conducive to the state of closing the pressure relief through hole 181. In this way, the pressure in the device (not shown) connected to the outlet 19 can be exhausted and reduced by the one-way pressure relief operation, or the pressure relief operation can be completed by completely exhausting.

Please refer to FIG. 1A, FIG. 2A, and FIG. 7A to FIG. 7E at the same time, where FIGS. 7A to 7E are schematic diagrams of the pressure collecting action of the miniature pneumatic power device shown in FIG. 1A. As shown in FIG. 7A, the miniature pneumatic power device 1 is a combination of a miniature fluid control device 1A and a miniature valve device 1B. The miniature fluid control device 1A is, as described above, sequentially composed of an air inlet plate 11 and a resonance plate 12 , Piezoelectric actuator 13, insulating sheet 141, conductive sheet 15, another insulating sheet 142, and gas collecting plate 16 are stacked and assembled, and are arranged between resonance sheet 12 and piezoelectric actuator 13. A gap g0 has a first chamber 121 between the resonance plate 12 and the piezoelectric actuator 13, and the micro valve device 1B is similarly stacked and assembled in sequence by the valve plate 17 and the outlet plate 18 and the like. It is formed on the gas collecting plate 16 of the fluid control device 1A, and there is a gas collecting chamber 162 between the gas collecting plate 16 and the piezoelectric actuator 13 of the micro fluid control device 1A, and the reference surface of the gas collecting plate 16 161 further recesses a first pressure relief chamber 165 and a first outlet chamber 166, and a reference surface 180 of the outlet plate 18 is further recessed a second pressure relief chamber 183 and a second outlet chamber 184. In this embodiment, Medium, with the operating frequency of the miniature pneumatic power device between 27K to 29.5K, the operation Pressure ± 10V to ± 16V, and by a plurality of such different pressure chambers with a piezoelectric actuator 13 of the drive plate 12 and the resonant vibration of the valve plate 17, so that the gas pressure set down transmission.

As shown in FIG. 7B, when the piezoelectric actuator 13 of the micro-fluid control device 1A is vibrated downward by being actuated by a voltage, the gas will enter the micro-fluid control device 1A through the air inlet hole 110 on the air inlet plate 11 And is collected at the central recess 111 through at least one busbar hole 112, and then flows down into the first cavity 121 through the hollow hole 120 on the resonance sheet 12. Thereafter, as shown in FIG. 7C, due to the resonance effect of the vibration of the piezoelectric actuator 13, the resonance plate 12 will also perform reciprocating vibration, that is, it vibrates downward and approaches the piezoelectric actuator. The convex portion 130c of the suspension plate 130 of 13 is deformed by the resonance plate 12 to increase the volume of the cavity at the central recess 111 of the air intake plate 11 and compress the volume of the first cavity 121 at the same time. The gas in the first chamber 121 is pushed to flow to both sides, and then passes through the gap 135 between the brackets 132 of the piezoelectric actuator 13 and flows downward to flow to the micro fluid control device 1A and the micro valve device. The gas collection chambers 162 between 1B, and then flow through the first through holes 163 and the second through holes 164 communicating with the gas collection chambers 162 to the first pressure relief chamber 165 and the first outlet respectively. In the oral cavity 166, it can be seen from this embodiment that when the resonance sheet 12 performs vertical reciprocation In the vibration mode, the gap g0 between the piezoelectric actuator 13 and the piezoelectric actuator 13 can be used to increase the maximum distance of the vertical displacement. In other words, setting the gap g0 between the two structures allows the resonance plate 12 to resonate at resonance Generate greater up and down displacement.

Then, as shown in FIG. 7D, since the resonance piece 12 of the micro fluid control device 1A returns to the initial position, the piezoelectric actuator 13 is driven by the voltage to vibrate upward, and the vibration displacement of the piezoelectric actuator is Is d, the difference from the gap g0 is x, that is, x = g0-d. After testing, when x = 1 to 5um, the operating frequency is 27k to 29.5KHz, and the operating voltage is ± 10V to ± 16V, the maximum The output air pressure can reach at least 300mmHg, but it is not limited to this. The volume of the first chamber 121 is also squeezed in this way, so that the gas in the first chamber 121 flows to both sides, and is continuously input into the gas collection chamber through the gap 135 between the brackets 132 of the piezoelectric actuator 13. 162. In the first pressure relief chamber 165 and the first outlet chamber 166, this further increases the pressure in the first pressure relief chamber 165 and the first outlet chamber 166, thereby pushing the flexible valve sheet 17 When bending deformation occurs downward, in the second pressure relief chamber 183, the valve plate 17 is flat downward and abuts against the convex structure 181a at the end of the pressure relief through hole 181, thereby closing the pressure relief through hole 181. In the second outlet chamber 184, the valve hole 170 on the valve sheet 17 corresponding to the outlet through hole 182 is opened downward, so that the gas in the second outlet chamber 184 can be transmitted downward from the outlet through hole 182 to the outlet 19 And any device (not shown) connected to the outlet 19, so as to achieve the purpose of collecting pressure. Finally, as shown in FIG. 7E, when the resonance plate 12 of the microfluidic control device 1A moves upward in resonance, the gas in the central recess 111 of the first surface 11b of the air inlet plate 11 can be removed by the hollow hole 120 of the resonance plate 12. It flows into the first chamber 121 and is continuously transmitted downward to the gas collecting plate 16 through the gap 135 between the brackets 132 of the piezoelectric actuator 13. Since its gas pressure system continues to increase downward, the gas Will continue to flow through the gas collection chamber 162, the second through hole 164, the first outlet chamber 166, the second outlet chamber 184, and the outlet through hole 182 to the outlet 19 and any device connected to the outlet 19, This pressure collecting operation can be driven by the external atmospheric pressure and the pressure difference in the device, but it is not limited to this.

When the internal pressure of the device (not shown) connected to the outlet 19 is greater than the external pressure, the miniature pneumatic power unit 1 can perform pressure reduction or pressure relief operations as shown in FIG. 8. The operation method of pressure relief is mainly as described above. By regulating the gas transmission volume of the micro fluid control device 1A, the gas can no longer be transported. Into the gas collection chamber 162, at this time, gas is input into the second outlet chamber 184 from the outlet through hole 182 connected to the outlet 19, so that the volume of the second outlet chamber 184 is expanded, thereby promoting flexibility. The valve sheet 17 is bent upwardly and deformed, and flatly affixes against the convex structure 167 of the first outlet chamber 166, so that the valve hole 170 of the valve sheet 17 is closed, that is, the gas in the second outlet chamber 184 is not It will flow back into the first outlet chamber 166; and the gas system in the second outlet chamber 184 can flow into the second pressure-relief chamber 183 through the communication channel 185, and then through the pressure-relief through hole 181 to perform Pressure relief operation; in this way, the pressure in the device connected to the outlet 19 can be reduced by the one-way gas transmission operation of the micro valve structure 1B, or the pressure relief operation can be completed by completely discharging.

The suspension plate 130 used in this case is a square type. When the side length of the suspension plate 130 is reduced, and the area of the suspension plate 130 is gradually reduced, it will be found that the reduced size on the one hand improves the rigidity of the suspension plate 130, and Because the volume of the internal gas flow path is reduced, it is conducive to the pushing or compression of air, which can increase the output air pressure value; on the other hand, it can also reduce the horizontal deformation of the suspension plate 130 when it vibrates vertically, which in turn makes the pressure The electric actuator 13 can be maintained in the same vertical direction during the operation and is not easy to tilt, thereby reducing the collision interference between the piezoelectric actuator 13 and the resonance plate 12 or other assembly components, so that the generation of noise can be reduced, and The quality defect rate is reduced. In summary, when the size of the suspension plate 130 of the piezoelectric actuator 13 is reduced, the piezoelectric actuator 13 can also be made smaller, thereby reducing the noise and improving the performance of the output air pressure. Reduce the defective rate of the product; on the contrary, it is found that the output air pressure value of the large-sized suspension plate 130 is lower and the defective rate is higher.

In addition, the suspension plate 130 and the piezoelectric ceramic plate 133 are the core of the miniature pneumatic power device 1, and as the areas of the two are reduced, the area of the miniature pneumatic power device 1 can be reduced in size and reduced in weight. The miniature pneumatic power device 1 can be easily installed on a portable device without being limited due to its large size. Of course, in order to reduce the thickness of the miniature pneumatic power device 1 in this case, the total thickness of the miniature fluid control device 1A assembled with the miniature valve device 1B is between 2mm and 6mm, thereby making the miniature gas power device 1 portable and comfortable. It can be widely used in medical equipment and related equipment.

In summary, the micro-pneumatic power device provided in this case mainly uses the micro-fluid control device and the micro-valve device to interconnect with each other, so that the gas enters from the air inlet of the micro-fluid control device, and uses the pressure The action of the electric actuator causes the gas to generate a pressure gradient in the designed flow channel and pressure chamber, so that the gas flows at high speed and is transferred to the micro valve device, and then through the one-way valve design of the micro valve device, the gas Flow in a single direction, which can accumulate pressure in any device connected to the outlet; and when pressure reduction or pressure relief is required, the transmission volume of the micro fluid control device is regulated, and the gas can be passed through the device connected to the outlet Transfer to the second outlet chamber of the micro valve device, and transfer it to the second pressure relief chamber through the communication channel, and then flow out from the pressure relief through hole, so as to achieve rapid transmission of gas, and at the same time can reach The mute effect can reduce the overall volume and thickness of the miniature gas power device, thereby enabling the miniature gas power device to be portable and comfortable, and can be widely used in medical equipment and related equipment. Therefore, the miniature gas power plant in this case has great industrial use value, and applied for it in accordance with the law.

Even though the present invention has been described in detail in the above embodiments and can be modified in various ways by those skilled in the art, it is not inferior to those protected by the scope of the attached patent.

1‧‧‧ Miniature Pneumatic Power Unit

1A‧‧‧Miniature fluid control device

1B‧‧‧Miniature valve device

1a‧‧‧shell

10‧‧‧ base

11‧‧‧Air intake plate

11a‧‧‧Second surface of air inlet plate

110‧‧‧air inlet

12‧‧‧ Resonator

120‧‧‧ Hollow

13‧‧‧ Piezo actuator

130‧‧‧ suspension board

131‧‧‧ frame

132‧‧‧ Bracket

133‧‧‧Piezoelectric ceramic plate

134‧‧‧ conductive pins

135‧‧‧Gap

141, 142‧‧‧ insulating sheet

15‧‧‧Conductive sheet

151‧‧‧ conductive pin

16‧‧‧Gas collecting plate

16a‧‧‧accommodation space

160‧‧‧ surface

162‧‧‧Gas collecting chamber

163‧‧‧The first through hole

164‧‧‧second through hole

168‧‧‧ side wall

17‧‧‧Valve Disc

170‧‧‧Valve hole

171‧‧‧ positioning holes

18‧‧‧ export board

180‧‧‧ datum surface

181‧‧‧Pressure Relief Through Hole

181a‧‧‧ convex structure

182‧‧‧Exit through hole

183‧‧‧Second pressure relief chamber

184‧‧‧Second Outlet Room

185‧‧‧Connecting runner

Claims (15)

  1. A miniature fluid control device, comprising: a piezoelectric actuator including: a suspension plate in a square shape having a side length between 4mm and 8mm and bending and vibrating from a central portion to an outer peripheral portion; An outer frame is arranged around the outer side of the suspension plate; at least one bracket is connected between the suspension plate and the outer frame to provide elastic support; a piezoelectric ceramic plate has a square shape and has a size not larger than the The length of the side of the suspension board is affixed to a first surface of the suspension board for applying a voltage to drive the bending vibration of the suspension board; and a housing including: a gas collecting plate, which is A frame structure, which is more recessed on the inner surface to form a gas collecting chamber for the piezoelectric actuator to be disposed in the gas collecting chamber; and a base which is closed to the piezoelectric actuator The bottom of the suspension plate is provided with a hollow hole corresponding to the central portion of the suspension plate; wherein the gas collecting plate further has a plurality of through holes disposed therethrough, and when the piezoelectric actuator is driven by a voltage When the suspension plate bends It vibrates and transmits fluid from the hollow hole of the base to the gas collection chamber, and then discharges through the plurality of through holes.
  2. The miniature fluid control device according to item 1 of the patent application scope, wherein the suspension plate of the piezoelectric actuator has a convex portion on a second surface.
  3. According to the miniature fluid control device described in the second item of the patent application scope, the height of the convex portion of the suspension plate is between 0.02mm-0.08mm.
  4. According to the micro fluid control device described in the second item of the patent application scope, wherein the convex portion of the suspension plate is a circular convex structure, and the diameter is 0.55 times the minimum side length of the suspension plate.
  5. The micro fluid control device according to item 1 of the scope of the patent application, wherein the at least one bracket of the piezoelectric actuator is a plate connecting portion for connecting the suspension plate and the outer frame.
  6. The micro fluid control device according to item 5 of the scope of patent application, wherein both ends of the board connection portion The systems correspond to each other and are arranged on the same axis.
  7. According to the miniature fluid control device described in item 5 of the scope of the patent application, wherein the board connection portion is connected to the suspension board and the outer frame at an inclined angle between 0 and 45 degrees.
  8. The micro fluid control device according to item 1 of the scope of patent application, wherein the at least one bracket of the piezoelectric actuator includes: a beam portion disposed in a gap between the suspension plate and the outer frame, wherein The setting direction is parallel to the outer frame and the suspension plate; a suspension plate connection portion is connected between the beam portion and the suspension plate; and an outer frame connection portion is connected between the beam portion and the outer frame. And corresponding to the suspension plate connecting part with each other and arranged on the same axis.
  9. According to the miniature fluid control device described in the first item of the patent application scope, wherein the thickness of the suspension plate of the piezoelectric actuator is between 0.1 mm and 0.4 mm.
  10. According to the miniature fluid control device described in the first item of the patent application scope, wherein the thickness of the piezoelectric ceramic plate of the piezoelectric actuator is between 0.05 mm and 0.3 mm.
  11. The micro fluid control device according to item 1 of the scope of patent application, wherein the base includes an air intake plate and a resonance plate, the air intake plate has a first surface and a second surface, and the second surface has at least one An air inlet hole, the at least one air inlet hole is penetrated to the first surface, and the first surface also has at least one bus hole, and the at least one bus hole is in communication with the at least one air inlet hole and corresponds to It is provided that a central recessed portion is provided at a central AC portion of the at least one busbar hole, and is used for inputting and guiding fluid from the at least one air intake hole to the at least one busbar hole, and then converging to the central recessed portion Moreover, the central recessed portion can correspond to a confluence chamber constituting one of the confluent fluid for temporary storage of the fluid.
  12. The micro fluid control device according to item 1 of the scope of the patent application, wherein the micro fluid control device further has two insulating sheets and a conductive sheet, and the two insulating sheets are sandwiched between the conductive sheet up and down, and are correspondingly arranged on the piezoelectric The shape of the two insulating sheets and the conductive sheet substantially corresponds to the shape of the outer frame of the piezoelectric actuator.
  13. According to the micro fluid control device described in the first item of the patent application scope, the gas collecting plate further has a reference surface and a plurality of through holes, and a first pressure relief chamber and a first outlet are recessed on the reference surface. An oral chamber, and the through-holes include a first through-hole and at least one second through-hole, and one end of the first through-hole is in communication with the gas collection chamber, and the other end of the first through-hole is respectively connected with the first pressure relief chamber The chamber is in communication with each other, and one end of the at least one second through hole is in communication with the first exit chamber, and a convex structure is further added at the first exit chamber.
  14. For example, the micro fluid control device described in item 13 of the scope of the patent application, wherein the micro fluid control device may further be equipped with a micro valve device, the micro valve device includes a valve plate and an outlet plate, and the valve plate and the outlet plate are according to Sequentially stacked on the gas collecting plate of the micro fluid control device, the valve plate has a valve hole, wherein the valve hole is provided corresponding to the convex structure of the first outlet chamber of the gas collecting plate, And the outlet plate has a reference surface and a second surface, and has a pressure relief through hole and an outlet through hole penetrating through the second surface and the reference surface, and a second outlet cavity is recessed on the reference surface. And a second pressure relief chamber, the second pressure relief chamber is correspondingly disposed at the pressure relief through hole, the second outlet chamber is correspondingly disposed at the outlet through hole, and is at the second pressure relief A communication channel is further provided between the chamber and the second outlet chamber for fluid circulation; and one end of the pressure relief through hole is communicated with the second pressure relief chamber, and the end portion can be further Add a protrusion to form The convex structure causes the valve hole of the valve plate to close due to abutting against the convex structure under the atmospheric pressure of the outlet through hole, so that the fluid in the gas collecting plate will not flow back to the first As soon as it comes out of the oral cavity, the first pressure relief chamber of the gas collecting plate is also blocked by the valve sheet, so that the valve sheet can be opened or closed to control fluid delivery.
  15. The micro fluid control device according to item 14 of the scope of the patent application, wherein the outlet plate of the micro valve device further has a limiting structure, and the limiting structure is disposed in the second pressure relief chamber to assist in supporting the valve plate. To prevent it from collapsing and allow the valve to open or close more quickly.
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US15/409,960 US10487821B2 (en) 2016-01-29 2017-01-19 Miniature fluid control device
EP17152114.9A EP3203076A1 (en) 2016-01-29 2017-01-19 Miniature fluid control device
KR1020170009593A KR20170091021A (en) 2016-01-29 2017-01-20 Miniature fluid control device
JP2017010033A JP2017133514A (en) 2016-01-29 2017-01-24 Compact fluid controller
KR1020190080202A KR20190082732A (en) 2016-01-29 2019-07-03 Miniature fluid control device

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TW105213589U TWM537172U (en) 2016-01-29 2016-09-05 Miniature fluid control device
TW105213584U TWM535747U (en) 2016-01-29 2016-09-05 Miniature pneumatic driving device
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TW105213580U TWM537174U (en) 2016-01-29 2016-09-05 Miniature fluid control device
TW105213586U TWM540196U (en) 2016-01-29 2016-09-05 Piezoelectric actuator
TW105213587U TWM539562U (en) 2016-01-29 2016-09-05 Piezoelectric actuator
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TW105128582A TWI696757B (en) 2016-01-29 2016-09-05 Micro-fluid control device
TW105128586A TWI676739B (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105128567A TWI676738B (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105213588U TWM537162U (en) 2016-01-29 2016-09-05 Miniature fluid control device
TW105213591U TWM535746U (en) 2016-01-29 2016-09-05 Piezoelectric actuator
TW105128568A TWI679346B (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105128580A TW201727064A (en) 2016-01-29 2016-09-05 Actuator
TW105128583A TWI619276B (en) 2016-01-29 2016-09-05 Actuator
TW105213593U TWM538546U (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105213590U TWM537586U (en) 2016-01-29 2016-09-05 Piezoelectric actuator
TW105128570A TWI681119B (en) 2016-01-29 2016-09-05 Micro-fluid control device
TW105213578U TWM539008U (en) 2016-01-29 2016-09-05 Miniature pneumatic driving device
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TW105128584A TWI602996B (en) 2016-01-29 2016-09-05 Actuator
TW105128569A TWI689663B (en) 2016-01-29 2016-09-05 Micro-fluid control device
TW105128579A TWI690656B (en) 2016-01-29 2016-09-05 Actuator
TW105213580U TWM537174U (en) 2016-01-29 2016-09-05 Miniature fluid control device
TW105213586U TWM540196U (en) 2016-01-29 2016-09-05 Piezoelectric actuator
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TW105128582A TWI696757B (en) 2016-01-29 2016-09-05 Micro-fluid control device
TW105128586A TWI676739B (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105128567A TWI676738B (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105213588U TWM537162U (en) 2016-01-29 2016-09-05 Miniature fluid control device
TW105213591U TWM535746U (en) 2016-01-29 2016-09-05 Piezoelectric actuator
TW105128568A TWI679346B (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105128580A TW201727064A (en) 2016-01-29 2016-09-05 Actuator
TW105128583A TWI619276B (en) 2016-01-29 2016-09-05 Actuator
TW105213593U TWM538546U (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105213590U TWM537586U (en) 2016-01-29 2016-09-05 Piezoelectric actuator
TW105128570A TWI681119B (en) 2016-01-29 2016-09-05 Micro-fluid control device
TW105213578U TWM539008U (en) 2016-01-29 2016-09-05 Miniature pneumatic driving device
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