TW201727080A - Micro-fluid control device - Google Patents

Abstract

A micro-fluid control device is disclosed and comprises a an actuator and a casing, the actuator has a square suspension plate, a frame, at least one supporting part and a piezoelectric ceramic, the supporting part is disposed between the square suspension plate and the frame, the piezoelectric ceramic sticks on a first surface of the square suspension plate and the side length of the actuator is smaller than the side length of the square suspension plate, and the casing has a gas gather board and a base, the gas gather board is a frame structure having lateral walls which define a receptacle and has a plurality through holes penetrates the gas gather board, the base has a central hole and is disposed inside the receptacle to close the bottom of the actuator, and the central hole is disposed correspondingly with the central portion of the square suspension plate, wherein when the actuator is driven by voltage, the square suspension plate vibrates to push fluid flow from the central hole of the base to a gas gather chamber, and then flow out from the plurality of the through hole.

Description

Microfluidic control device

This case relates to a microfluidic control device suitable for a miniature ultra-thin and silent micro-pneumatic power device.

At present, in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization. Among them, products such as micro-pumps, sprayers, inkjet heads, industrial printing devices, etc. The fluid transport structure is its key technology, which is how to break through its technical bottleneck with innovative structure and be an important part of development.

For example, in the pharmaceutical industry, many instruments or equipment that require pneumatic power drive are usually used with conventional motors and pneumatic valves to achieve their gas delivery. However, limited by the limitations of the structure of the conventional motor and the gas valve, it is difficult to reduce the volume of such an instrument, so that the volume of the entire device cannot be reduced, that is, it is difficult to achieve the goal of thinning, and therefore cannot be installed. The portable device is used with or in conjunction with a portable device, and the convenience is insufficient. In addition, these conventional motors and gas valves generate noise when they are actuated, causing the user to be anxious, resulting in inconvenience and discomfort in use.

Therefore, how to develop a microfluidic control device that can improve the above-mentioned conventional technical defects, can make the instrument or device using the conventional microfluidic control device small, miniaturized and muted, thereby achieving a portable and portable purpose. It is an urgent problem to be solved.

The main purpose of the present invention is to provide a microfluidic control device suitable for use in a portable or wearable instrument or device. The gas fluctuation generated by the high frequency operation of the piezoelectric ceramic plate generates a pressure gradient in the designed flow channel. The gas is flowed at a high speed, and the gas is transmitted from the suction end to the discharge end through the difference in the impedance of the flow path in and out of the flow path. The apparatus or equipment using the micro fluid control device of the prior art has a large volume and is difficult to be thinned. Unable to achieve portable purposes, as well as lack of noise.

In order to achieve the above object, a broader aspect of the present invention provides a microfluidic control device comprising: a piezoelectric actuator and a housing; the piezoelectric actuator includes a suspension plate, an outer frame, and at least a bracket and a piezoelectric ceramic plate, the suspension plate is of a square shape, and can be flexed and vibrated from a central portion to an outer peripheral portion, the outer frame is disposed on an outer side of the suspension plate, and the at least one bracket is connected to the suspension Between the plate and the outer frame, to provide elastic support, the piezoelectric ceramic plate has a square shape, has a side length not greater than the side length of the suspension plate, and is attached to the first surface of one of the suspension plates, Applying a voltage to drive the suspension plate to bend and vibrate; and the housing includes a gas collecting plate and a base, the gas collecting plate has a frame structure with a side wall at the periphery, and is further recessed on the inner surface to form a gas collecting chamber a chamber for the piezoelectric actuator to be disposed in the plenum chamber, the base being closed at the bottom of the piezoelectric actuator and having a hollow hole corresponding to the suspension plate Set at the center; Wherein the gas collecting plate further has a plurality of through holes penetrating through, and when the piezoelectric actuator is driven by voltage, the floating plate also flexes and vibrates, and the fluid is transferred from the hollow hole of the base to the set. The air chamber is discharged from the plurality of through holes.

Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and is not to be construed as a limitation.

The micro-pneumatic power unit 1 of this case can be applied to industries such as medical technology, energy, computer technology or printing, and is used for conveying gas, but not limited thereto. Please refer to FIG. 1A, FIG. 1B, FIG. 2A, FIG. 2B and FIGS. 7A to 7E. FIG. 1A is a front exploded view of the micro-pneumatic power device of the preferred embodiment of the present invention, and FIG. 1B is the first embodiment. FIG. 2A is a schematic view showing the structure of the front side of the micro-pneumatic power unit shown in FIG. 1A, and FIG. 2B is a view of the micro-pneumatic power unit shown in FIG. 1A. FIG. 7A to FIG. 7E are schematic diagrams showing the collective pressure operation of the micro pneumatic power device shown in FIG. 1A. As shown in FIGS. 1A and 2A, the micro-pneumatic power unit 1 of the present invention is composed of a micro fluid control device 1A and a micro-valve device 1B, wherein the micro-fluid control device 1A has a housing 1a and piezoelectric actuation. The structure of the housing 13 , the insulating sheets 141 , 142 , and the conductive sheet 15 , wherein the housing 1 a includes a gas collecting plate 16 and a base 10 , and the base 10 includes the air inlet plate 11 and the resonant plate 12 , but not limited thereto. The piezoelectric actuator 13 is provided corresponding to the resonance piece 12, and the air intake plate 11, the resonance piece 12, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, the other insulating sheet 142, and the gas collecting plate are provided. 16 and so on are sequentially stacked, and the piezoelectric actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132, and a piezoelectric ceramic plate 133; and the micro valve device 1B includes A valve piece 17 and an outlet plate 18 are not limited thereto. In this embodiment, as shown in FIG. 1A, the gas collecting plate 16 is not only a single plate structure, but also a frame structure having a side wall 168 at the periphery, and the gas collecting plate 16 has a diameter of 9 mm to 17 mm. The length between, the width between 9mm and 17mm, and the length and the width ratio are between 0.53 and 1.88 times, and the side wall 168 formed by the circumference and the bottom plate together define a volume a space 16a is provided for the piezoelectric actuator 13 to be disposed in the accommodating space 16a. Therefore, when the micro-pneumatic power device 1 of the present invention is assembled, the front schematic view is as shown in FIG. 1B, and 7A to 7E, it can be seen that the microfluidic control device 1A is assembled corresponding to the microvalve device 1B, that is, the valve piece 17 and the outlet plate 18 of the microvalve device 1B are sequentially stacked and positioned on the micro. The gas collecting plate 16 of the fluid control device 1A is formed. The assembled rear view shows the pressure relief through hole 181 and the outlet 19 on the outlet plate 18. The outlet 19 is connected to a device (not shown), and the pressure relief through hole 181 is provided for the micro valve device. The gas in 1B is discharged to achieve the effect of pressure relief. By the assembly of the microfluidic control device 1A and the microvalve device 1B, gas is introduced from at least one of the intake holes 110 of the air intake plate 11 of the microfluidic control device 1A, and transmitted through the piezoelectric actuator 13 Actuating, and flowing through a plurality of pressure chambers (not shown) to continue the transmission, thereby allowing the gas to flow in one direction in the microvalve device 1B, and accumulating the pressure in a device connected to the outlet end of the microvalve device 1B. (not shown), and when pressure relief is required, the output of the microfluidic control device 1A is adjusted so that the gas is discharged through the pressure relief through hole 181 on the outlet plate 18 of the microvalve device 1B for unloading. Pressure.

Please refer to FIG. 1A and FIG. 2A. As shown in FIG. 1A, the air inlet plate 11 of the micro fluid control device 1A has a first surface 11b, a second surface 11a and at least one air inlet hole 110. In the example, the number of the air inlet holes 110 is four, but not limited thereto, which is through the first surface 11b and the second surface 11a of the air inlet plate 11, and is mainly used for supplying gas to the atmospheric pressure from outside the device. The action flows from the at least one intake port 110 into the microfluidic control device 1A. And as shown in FIG. 2A, the first surface 11b of the air inlet plate 11 is visible, and has at least one bus bar hole 112 for the at least one air inlet hole 110 of the second surface 11a of the air inlet plate 11. Corresponding settings. In the present embodiment, the number of the bus bar holes 112 corresponds to the air intake holes 110, and the number thereof is four, but not limited thereto, wherein the central AC portion of the bus bar holes 112 has a central recess 111. And the central recess 111 communicates with the bus bar hole 112, whereby the gas entering the bus bar hole 112 from the air inlet hole 110 can be guided and concentrated to be transferred to the central recess 111. In this embodiment, the air inlet plate 11 has an integrally formed air inlet hole 110, a bus bar hole 112 and a central recess portion 111, and a confluence chamber corresponding to a confluent gas is formed at the central recess portion 111 for Gas is temporarily stored. In some embodiments, the material of the air inlet plate 11 may be, but not limited to, a stainless steel material, and the thickness thereof is between 0.4 mm and 0.6 mm, and the preferred value is 0.5 mm. Not limited to this. In other embodiments, the depth of the confluence chamber formed by the central recess 111 is the same as the depth of the bus bar holes 112, and the preferred values of the depths of the confluence chamber and the bus bar hole 112 are It is between 0.2mm and 0.3mm, but not limited to this. The resonator piece 12 is made of a flexible material, but not limited thereto, and has a hollow hole 120 in the resonator piece 12, which is disposed corresponding to the central recess 111 of the first surface 11b of the air inlet plate 11. To allow gas to circulate. In other embodiments, the resonant plate 12 may be made of a copper material, but not limited thereto, and the thickness thereof is between 0.03 mm and 0.08 mm, and the preferred value is 0.05 mm. Not limited to this.

Please also refer to FIG. 3A, FIG. 3B and FIG. 3C, which are schematic diagrams of the front structure, the back structure and the cross-sectional structure of the piezoelectric actuator of the micro-pneumatic power device shown in FIG. 1A, respectively. The actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132, and a piezoelectric ceramic plate 133, wherein the piezoelectric ceramic plate 133 is attached to the first suspension plate 130. The surface 130b is configured to apply a voltage to generate a deformation to drive the suspension plate 130 to bend and vibrate. The suspension plate 130 has a central portion 130d and a peripheral portion 130e. When the piezoelectric ceramic plate 133 is driven by a voltage, the suspension plate 130 can be driven by the central portion. 130d is bent to the outer peripheral portion 130e, and the at least one bracket 132 is connected between the suspension plate 130 and the outer frame 131. In the embodiment, the bracket 132 is connected between the suspension plate 130 and the outer frame 131. The two ends are respectively connected to the outer frame 131 and the suspension plate 130 to provide elastic support, and further have at least one gap 135 between the bracket 132, the suspension plate 130 and the outer frame 131 for gas circulation, and the Suspension plate 130, outer frame 1 31 and the type and number of brackets 132 have a variety of variations. In addition, the outer frame 131 is disposed on the outer side of the suspension plate 130, and has an outwardly protruding conductive pin 134 for power connection, but is not limited thereto. In this embodiment, the suspension plate 130 is a stepped surface structure, that is, the second surface 130a of the suspension plate 130 further has a convex portion 130c, which may be, but is not limited to, a circular protrusion. The structure, and the height of the convex portion 130c is between 0.02 mm and 0.08 mm, and preferably 0.03 mm, and the diameter is 0.55 times the minimum side length of the suspension plate 130. Please refer to FIG. 3A and FIG. 3C at the same time. The surface of the convex portion 130c of the suspension plate 130 is coplanar with the second surface 131a of the outer frame 131, and the second surface 130a of the suspension plate 130 and the second surface of the bracket 132 The surface 132a is also coplanar, and the convex portion 130c of the suspension plate 130 and the second surface 131a of the outer frame 131 and the second surface 130a of the suspension plate 130 and the second surface 132a of the bracket 132 have a specific depth. As for the first surface 130b of the suspension plate 130, as shown in FIGS. 3B and 3C, the first surface 131b of the outer frame 131 and the first surface 132b of the bracket 132 are flat and planar, and the piezoelectric The ceramic plate 133 is attached to the first surface 130b of the flat suspension plate 130. In other embodiments, the shape of the suspension plate 130 may also be a double-sided flat plate-like square structure, and is not limited thereto, and may be changed according to actual application conditions. In some embodiments, the suspension plate 130, the bracket 132, and the outer frame 131 may be integrally formed, and may be formed of a metal plate, such as stainless steel, but not limited thereto. In some embodiments, the suspension plate 130 has a thickness of between 0.1 mm and 0.4 mm, and preferably has a thickness of 0.27 mm, and the suspension plate 130 has a length of between 4 mm and 8 mm. The preferred value may be from 6 mm to 8 mm, and the width may be between 4 mm and 8 mm, and the preferred value may be from 6 mm to 8 mm, but not limited thereto. The thickness of the outer frame 131 is between 0.2 mm and 0.4 mm, and the preferred value is 0.3 mm, but not limited thereto.

In still other embodiments, the thickness of the piezoelectric ceramic plate 133 is between 0.05 mm and 0.3 mm, and preferably 0.10 mm, and the piezoelectric ceramic plate 133 has no more than the suspension plate 130. The side length of the side has a length of between 4 mm and 8 mm, and the preferred value may be 6 mm to 8 mm, the width is between 4 mm and 8 mm, and the preferred value may be 6 mm to 8 mm, and the length is The preferred ratio of the width ratio is between 0.5 and 2 times, but not limited thereto. In other embodiments, the side length of the piezoelectric ceramic plate 133 may be smaller than the side length of the suspension plate 130, and is also designed as a square plate structure corresponding to the suspension plate 130, but is not limited thereto.

In the related embodiment of the micro-pneumatic power unit 1 of the present invention, the piezoelectric actuator 13 uses the square suspension plate 130 because it is compared with the circular suspension plate (as shown in Fig. 4A (j)~( l) The design of the circular suspension plate j0), the structure of the square suspension plate 130 obviously has the advantage of power saving, and the power consumption of the capacitive load operating at the resonant frequency increases with the increase of the frequency. Moreover, since the resonant frequency of the side-long square suspension plate 130 is significantly lower than that of the circular suspension plate j0, the relative power consumption is also significantly lower, that is, the square-shaped piezoelectric actuator 13 used in the present case has a provincial Electrical advantages, especially for wearable devices, save power is a very important design focus.

Please refer to FIGS. 4A, 4B, and 4C, which are schematic diagrams of various embodiments of the piezoelectric actuator. As shown in the figure, it can be seen that the suspension plate 130, the outer frame 131 and the bracket 132 of the piezoelectric actuator 13 can have various types, and at least (a) to (l) shown in FIG. 4A. In a plurality of aspects, for example, the frame a1 and the suspension plate a0 of the (a) aspect are square structures, and the two are connected by a plurality of brackets a2, for example: 8 but not For this reason, a gap a3 is provided between the bracket a2 and the suspension plate a0 and the outer frame a1 for gas circulation. In another (i) aspect, the outer frame i1 and the suspension plate i0 are also square structures, but only two brackets i2 are connected; further, there is a further related art, such as 4B. As shown in Fig. 4C, the suspension plate of the piezoelectric actuator 13 may have various forms such as (m) to (r) shown in Fig. 4B and (s) to (x) shown in Fig. 4C. In these aspects, the suspension plate 130 and the outer frame 131 are both square structures. For example, the (m) aspect outer frame m1 and the suspension plate m0 are both square structures, and the two are connected by a plurality of brackets m2, for example, four, but not limited thereto. And a gap m3 is provided between the bracket m2 and the suspension plate m0 and the outer frame m1 for fluid circulation. In this embodiment, the bracket m2 connected between the outer frame m1 and the suspension plate m0 may be, but is not limited to, a plate connecting portion m2, and the plate connecting portion m2 has both end portions m2' and m2", One end portion m2' is connected to the outer frame m1, and the other end portion m2" is connected to the suspension plate m0, and the two end portions m2' and m2" are corresponding to each other and are disposed on the same axis. In the same manner, the frame n1, the suspension plate n0, and the bracket n2 connected between the outer frame n1 and the suspension plate n0, and the gap n3 for fluid circulation, and the bracket n2 may be but not limited to one. The board connecting portion n2 and the board connecting portion n2 have both end portions n2' and n2", and the end portion n2' is connected to the outer frame n1, and the other end portion n2" is connected to the floating plate n0, but in the embodiment. The board connecting portion n2 is connected to the outer frame n1 and the suspension plate n0 at an oblique angle of 0 to 45 degrees, in other words, and the both end portions n2' and n2" are not disposed on the same horizontal axis. It is a setting relationship of mutual misalignment. In the (o) aspect, the outer frame o1, the suspension plate o0, and the support o2 connected between the outer frame o1 and the suspension plate o0, and the space o3 for fluid circulation are similar to the foregoing embodiment, wherein The design of the board connecting portion o2 as the bracket is slightly different from the (m) aspect. However, in this aspect, the two end portions o2' and o2" of the board connecting portion o2 are still corresponding to each other and are disposed. On the same axis.

Further, in the (p) aspect, the structure also has the outer frame p1, the suspension plate p0, the support p2 connected between the outer frame p1 and the suspension plate p0, and the space p3 through which the fluid flows, and the like. The plate connecting portion p2 as a bracket further has a structure such as a suspension plate connecting portion p20, a beam portion p21, and an outer frame connecting portion p22, wherein the beam portion p21 is disposed in a gap p3 between the suspension plate p0 and the outer frame p1, and The direction of the arrangement is parallel to the outer frame p1 and the suspension plate p0, and the suspension plate connection portion p20 is connected between the beam portion p21 and the suspension plate p0, and the outer frame connection portion p22 is connected to the beam portion p21 and the outer frame p1. The suspension plate connecting portion p20 and the outer frame connecting portion p22 also correspond to each other and are disposed on the same axis.

In the (q) aspect, the outer frame q1, the suspension plate q0, the support q2 connected between the outer frame q1 and the suspension plate q0, and the space q3 for fluid circulation are all the same as (m), (o) above. The pattern is similar, wherein the design of the plate joint q2 as the support is slightly different from the (m) and (o) modes. In this aspect, the suspension plate q0 is a square shape, and Each side has a two-plate connecting portion q2 connected to the outer frame q1, and the two end portions q2' and q2" of each of the plate connecting portions q2 are also corresponding to each other and disposed on the same axis. However, In the embodiment, the frame r1, the suspension plate r0, the bracket r2, and the gap r3 are also provided, and the bracket r2 may be but not limited to a board connecting portion r2. In this embodiment, the board connecting portion r2 The structure is a V-shaped structure. In other words, the board connecting portion r2 is also connected to the outer frame r1 and the suspension plate r0 at an oblique angle of 0 to 45 degrees. Therefore, each board connecting portion r2 has one end portion r2" and The suspension plate r0 is connected, and has two end portions r2' connected to the outer frame r1, that is, the two end portions b2' and the end portion b2" are not disposed on the same horizontal axis.

Continued as shown in Fig. 4C, the appearance patterns of the (s) to (x) states substantially correspond to the types of (m) to (r) shown in Fig. 4B, but only In the ~(x) aspect, the suspension plate 130 of each piezoelectric actuator 13 is provided with a convex portion 130c, that is, s4, t4, u4, v4, w4, x4 and the like as shown in the figure. And whether it is the (m)~(r) aspect or the (s)~(x) aspect, the suspension plate 130 is designed in a square shape to achieve the aforementioned low power consumption effect; It can be seen that the suspension plate 130 is a double-sided flat plate structure or a stepped structure having a convex portion on the surface, which is within the protection range of the present case and is connected between the suspension plate 130 and the outer frame 131. The type and number of the brackets 132 can also be changed according to the actual application situation, and is not limited to the manner shown in the present case. As mentioned above, the suspension plate 130, the outer frame 131 and the bracket 132 may be integrally formed, but not limited thereto, and the manufacturing method may be conventional processing, or yellow etching, or laser. Processing, or electroforming, or electrical discharge machining, etc., are not limited to this.

In addition, referring to FIG. 1A and FIG. 2A , the microfluidic control device 1A further includes an insulating sheet 141 , a conductive sheet 15 and another insulating sheet 142 which are sequentially disposed under the piezoelectric actuator 13 . The shape substantially corresponds to the shape of the outer frame of the piezoelectric actuator 13. In some embodiments, the insulating sheets 141, 142 are made of an insulating material, such as plastic, but not limited thereto for insulation; in other embodiments, the conductive sheet 15 is It is made of a conductive material, such as metal, but not limited to it for electrical conduction. Moreover, in the embodiment, a conductive pin 151 may be disposed on the conductive sheet 15 for electrical conduction.

Please refer to FIG. 1A and FIG. 5A to FIG. 5E simultaneously, wherein FIG. 5A to FIG. 5E are partial actuation diagrams of the micro fluid control device 1A of the micro pneumatic power device shown in FIG. 1A. First, as shown in FIG. 5A, it can be seen that the microfluidic control device 1A is sequentially stacked by the air inlet plate 11, the resonance plate 12, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, and the other insulating sheet 142. In the embodiment, the gap g0 between the periphery of the frame 131 and the piezoelectric actuator 13 is filled with a material, such as a conductive paste, but not limited thereto. The depth of the gap g0 can be maintained between the resonator piece 12 and the convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13, thereby guiding the airflow to flow more rapidly, and the convex portion 130c and the resonance due to the suspension plate 130 The sheets 12 are maintained at an appropriate distance to reduce contact interference with each other, causing noise generation to be reduced.

Referring to FIG. 5A to FIG. 5E , as shown in the figure, when the air inlet plate 11 , the resonant plate 12 and the piezoelectric actuator 13 are sequentially assembled, the hollow hole 120 of the resonant piece 12 can be The upper air intake plates 11 together form a chamber for the confluent gas, and a first chamber 121 is further formed between the resonant plate 12 and the piezoelectric actuator 13 for temporarily storing the gas, and the first chamber 121 Passing through the hollow hole 120 of the resonator piece 12 to communicate with the chamber at the central recess 111 of the first surface 11b of the air inlet plate 11, and the two sides of the first chamber 121 are supported by the bracket 132 of the piezoelectric actuator 13. The gap 135 is in communication with the microvalve device 1B disposed thereunder.

When the microfluidic control device 1A of the micropneumatic power unit 1 is actuated, the piezoelectric actuator 13 is mainly actuated by the voltage and the reciprocating vibration in the vertical direction is performed with the bracket 132 as a fulcrum. As shown in FIG. 5B, when the piezoelectric actuator 13 is vibrated downward by voltage actuation, since the resonance piece 12 is a light and thin sheet-like structure, when the piezoelectric actuator 13 vibrates, The resonance piece 12 also resonates to perform vertical reciprocating vibration, that is, the portion of the resonance piece 12 corresponding to the central concave portion 111 of the air inlet plate 11 is also flexurally deformed, that is, the resonance piece 12 corresponds to the The portion of the central recess 111 of the air inlet plate 11 is the movable portion 12a of the resonator piece 12, so that when the piezoelectric actuator 13 is bent downward, the movable portion 12a of the resonator piece 12 is brought in by the fluid. And pushing and the vibration of the piezoelectric actuator 13, and as the piezoelectric actuator 13 is deformed downward by the vibration, the gas enters through at least one air inlet hole 110 in the air inlet plate 11, and passes through the first At least one bus bar hole 112 of a surface 11b is collected at a central recess 111 at the center, and flows downward into the first chamber 121 via a central hole 120 corresponding to the central recess 111 on the resonator piece 12, after which Due to the vibration of the piezoelectric actuator 13, the resonator piece 12 will also resonate to perform vertical The compound vibration, as shown in Fig. 5C, at this time, the movable portion 12a of the resonator piece 12 is also vibrated downward, and is attached to the convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13 to make the suspension plate The distance between the area other than the convex portion 130c of 130 and the fixed portion 12b on both sides of the resonator piece 12 does not become small, and is deformed by the resonance piece 12 to compress the volume of the first chamber 121. And closing the intermediate flow space of the first chamber 121, causing the gas inside thereof to flow toward both sides, and then passing through the gap 135 between the brackets 132 of the piezoelectric actuator 13 to flow downward. As for the 5Dth diagram, the movable portion 12a of the resonator piece 12 is deformed by the bending vibration to return to the initial position, and the subsequent piezoelectric actuator 13 is driven by the voltage to vibrate upward, so that the first chamber 121 is also pressed. The volume, and at this time, the piezoelectric actuator 13 is lifted up, the displacement of the lift can be d, so that the gas in the first chamber 121 will flow toward both sides, thereby driving the gas continuously from the air inlet plate. At least one air inlet hole 110 in the 11 enters and flows into the chamber formed by the central recess 111. As shown in FIG. 5E, the resonant piece 12 is resonated upward by the vibration of the piezoelectric actuator 13 rising upward. The movable portion 12a of the resonator piece 12 is also in an upward position, so that the gas in the central recess portion 111 flows into the first chamber 121 from the central hole 120 of the resonator piece 12, and passes through the bracket 132 of the piezoelectric actuator 13. The gap 135 is passed down through the microfluidic control device 1A. It can be seen from this embodiment that when the resonant plate 12 performs vertical reciprocating vibration, it can be increased by the gap g0 between it and the piezoelectric actuator 13 to increase the maximum distance of its vertical displacement, in other words, in the two The gap g0 between the structures can cause the resonance piece 12 to generate a larger vertical displacement when resonating, wherein the piezoelectric actuator has a vibration displacement d, and the difference from the gap g0 is x, that is, x= G0-d, tested when x≦0um, is noisy; when x=1 to 5um, the maximum output pressure of the micro pneumatic power unit 1 can reach 350mmHg; when x=5 to 10um, the maximum output pressure of the micro pneumatic power unit 1 It can reach 250mmHg; when x=10 to 15um, the maximum output air pressure of the micro pneumatic power unit 1 can reach 150mmHg, and the numerical correspondence is shown in the following list 1. The above values are between the operating frequency of 17K and 20K and the operating voltage of between ±10V and ±20V. In this way, a pressure gradient is generated in the flow path design of the microfluidic control device 1A, so that the gas flows at a high speed, and the impedance difference between the flow path and the flow direction is transmitted, and the gas is transmitted from the suction end to the discharge end, and the gas is discharged at the discharge end. In this state, there is still the ability to continuously introduce gas and achieve the effect of mute. (Table I)

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonant plate 12 can be the same as the vibration frequency of the piezoelectric actuator 13, that is, both can be simultaneously upward or downward, which can be implemented according to actual conditions. Any change is not limited to the mode of operation shown in this embodiment.

Please also refer to FIG. 1A, FIG. 2A and FIG. 6A and FIG. 6B, wherein FIG. 6A is a schematic diagram of the collector operation of the gas collecting plate 16 and the micro valve device 1B of the micro pneumatic power device shown in FIG. 1A. Fig. 6B is a schematic view showing the pressure relief operation of the gas collecting plate 16 and the micro valve device 1B of the micro pneumatic power device shown in Fig. 1A. As shown in FIG. 1A and FIG. 6A, the microvalve device 1B of the micro pneumatic power device 1 of the present invention is sequentially formed by stacking the valve piece 17 and the outlet plate 18, and is matched with the gas collecting plate 16 of the micro fluid control device 1A. Come to work.

In the present embodiment, the gas collecting plate 16 has a surface 160 and a reference surface 161 which is recessed to form a gas collecting chamber 162 for the piezoelectric actuator 13 to be controlled by the microfluid. The gas that is transmitted downward from the device 1A is temporarily stored in the gas collection chamber 162, and has a plurality of through holes in the gas collection plate 16, and includes a first through hole 163 and a second through hole 164, first One end of the through hole 163 and the second through hole 164 is in communication with the air collection chamber 162, and the other end is respectively connected to the first pressure relief chamber 165 and the first outlet chamber 166 on the reference surface 161 of the gas collecting plate 16 respectively. Connected. Further, a protrusion structure 167 is further added to the first outlet chamber 166. For example, but not limited to a column structure, the height of the protrusion structure 167 is higher than the reference surface 161 of the gas collecting plate 16 . And the height of the protrusion structure 167 is between 0.3 mm and 0.55 mm, and its preferred value is 0.4 mm.

The outlet plate 18 includes a pressure relief through hole 181, an outlet through hole 182, a reference surface 180, and a second surface 187. The pressure relief through hole 181 and the outlet through hole 182 extend through the reference surface 180 of the outlet plate 18. The second surface 187 is recessed with a second pressure relief chamber 183 and a second outlet chamber 184. The pressure relief through hole 181 is disposed at a central portion of the second pressure relief chamber 183, and is second. There is a communication passage 185 between the pressure relief chamber 183 and the second outlet chamber 184 for gas circulation, and one end of the outlet through hole 182 is connected to the second outlet chamber 184, and the other end is connected to the outlet. 19 is connected. In this embodiment, the outlet 19 can be connected to a device (not shown), such as a press, but not limited thereto.

The valve piece 17 has a valve hole 170 and a plurality of positioning holes 171. The valve piece 17 has a thickness of between 0.1 mm and 0.3 mm, and preferably has a thickness of 0.2 mm.

When the valve piece 17 is assembled and assembled between the gas collecting plate 16 and the outlet plate 18, the pressure relief through hole 181 of the outlet plate 18 corresponds to the first through hole 163 of the gas collecting plate 16, the second pressure relief chamber The chamber 183 corresponds to the first pressure relief chamber 165 of the gas collecting plate 16, and the second outlet chamber 184 corresponds to the first outlet chamber 166 of the gas collecting plate 16, and the valve piece 17 is disposed on the gas collecting chamber. Between the plate 16 and the outlet plate 18, the first pressure relief chamber 165 is in communication with the second pressure relief chamber 183, and the valve hole 170 of the valve piece 17 is disposed in the second through hole 164 and the outlet through hole. Between 182, and the valve hole 170 is located corresponding to the convex structure 167 of the first outlet chamber 166 of the gas collecting plate 16, by the design of the single valve hole 170, so that the gas can be reached according to the pressure difference thereof. The purpose of one-way flow.

Further, at one end of the pressure relief through hole 181 of the outlet plate 18, a convex portion structure 181a formed by a protrusion may be further added, for example, but not limited to a cylindrical structure, and the height of the convex portion structure 181a is between 0.3 mm and Between 0.55 mm, and preferably 0.4 mm, and the convex structure 181a is improved to increase its height, the height of the convex structure 181a is higher than the reference surface 180 of the outlet plate 18 to strengthen the valve The sheet 17 quickly abuts and closes the pressure relief through hole 181, and achieves a pre-stressing effect to completely seal the effect; and the outlet plate 18 further has at least one limiting structure 188, the height of the limiting structure 188 is 0.32 mm, Taking the embodiment as an example, the limiting structure 188 is disposed in the second pressure relief chamber 183 and is an annular block structure, and is not limited thereto, and is mainly used for collecting the micro valve device 1B. At the time, it is provided to assist the valve piece 17 to prevent the valve piece 17 from collapsing, and the valve piece 17 can be opened or closed more quickly.

When the microvalve device 1B is pressurized, it is mainly as shown in Fig. 6A, which can be based on the pressure supplied by the gas from the microfluidic control device 1A, or when the external atmospheric pressure is greater than the outlet. When the internal pressure of the connected device (not shown) is 19, the gas flows from the gas collecting chamber 162 in the gas collecting plate 16 of the microfluidic control device 1A through the first through hole 163 and the second through hole 164, respectively. The lower flow into the first pressure relief chamber 165 and the first outlet chamber 166. At this time, the downward gas pressure causes the flexible valve piece 17 to be bent downward to deform the volume of the first pressure relief chamber 165. Increasingly, and corresponding to the end portion of the first through hole 163, which is flatly pressed against the end of the pressure relief through hole 181, the pressure relief through hole 181 of the outlet plate 18 can be closed, so that the second pressure relief chamber 183 The gas inside does not flow out from the relief pressure through hole 181. Of course, in this embodiment, a design of the protrusion structure 181a can be added to the end of the pressure relief through hole 181 to strengthen the valve piece 17 to quickly contact and close the pressure relief through hole 181, and achieve a pre-stressing function to completely seal. The effect is simultaneously and through the ring structure 188 disposed around the pressure relief through hole 181 to assist in supporting the valve piece 17 so as not to collapse. On the other hand, since the gas system flows downward from the second through hole 164 into the first outlet chamber 166, and the valve piece 17 corresponding to the first outlet chamber 166 is also bent downward, the corresponding The valve hole 170 is opened downward, and the gas can flow from the first outlet chamber 166 through the valve hole 170 into the second outlet chamber 184, and the outlet through hole 182 flows to the outlet 19 and the device connected to the outlet 19. In the (not shown), the device is operated by collecting pressure.

Referring to FIG. 6B, when the microvalve device 1B is depressurized, it can control the gas transfer amount of the microfluidic control device 1A so that the gas is no longer input into the gas collection chamber 162, or when it is connected to the outlet. When the internal pressure of the connected device (not shown) is greater than the atmospheric pressure of the outside, the microvalve device 1B can be depressurized. At this time, the gas is introduced into the second outlet chamber 184 from the outlet through hole 182 connected to the outlet 19, so that the volume of the second outlet chamber 184 is expanded, thereby causing the flexible valve piece 17 to be bent upward and deformed, and The valve hole 170 of the valve piece 17 is closed against the gas collecting plate 16 by flattening against the top of the gas collecting plate 16. Of course, in the embodiment, the design of the protrusion structure 167 can be added by using the first outlet chamber 166, so that the flexible valve piece 17 can be bent upwardly to change quickly, so that the valve hole 170 is more favorable to achieve a pre-prevention. The force resisting action completely adheres to the closed state of the seal. Therefore, when in the initial state, the valve hole 170 of the valve piece 17 is closed by being in close contact with the convex portion structure 167, the second outlet chamber 184 is closed. The gas will not flow back into the first outlet chamber 166 to achieve a better effect of preventing gas leakage. And the gas system in the second outlet chamber 184 can flow into the second pressure relief chamber 183 via the communication passage 185, thereby expanding the volume of the second pressure relief chamber 183 and corresponding to the second discharge The valve piece 17 of the pressure chamber 183 is also bent upwardly. At this time, since the valve piece 17 is not closed to the end of the pressure relief through hole 181, the pressure relief through hole 181 is in an open state, that is, the second pressure relief chamber. The gas in the chamber 183 can flow outward from the pressure relief through hole 181 to perform a pressure relief operation. Of course, in this embodiment, the flexible valve piece 17 can be bent upward by using the convex portion structure 181a at the end of the pressure relief through hole 181 or through the limiting structure 188 disposed in the second pressure relief chamber 183. The shape change is fast, and it is more advantageous to deviate from the state of closing the pressure relief through hole 181. In this way, the gas in the device (not shown) connected to the outlet 19 can be discharged by the one-way pressure relief operation, and the pressure can be reduced or completely discharged to complete the pressure relief operation.

Please refer to FIG. 1A, FIG. 2A and FIGS. 7A to 7E simultaneously, wherein FIGS. 7A to 7E are schematic diagrams of the collective pressure operation of the micro pneumatic power device shown in FIG. 1A. As shown in FIG. 7A, the micro-pneumatic power unit 1 is composed of a micro-fluid control device 1A and a micro-valve device 1B, wherein the micro-fluid control device 1A is sequentially connected to the air-inlet plate 11 and the resonating plate 12 as described above. The piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, the other insulating sheet 142, and the gas collecting plate 16 are stacked and assembled, and are disposed between the resonant sheet 12 and the piezoelectric actuator 13. a gap g0, and a first chamber 121 between the resonator piece 12 and the piezoelectric actuator 13, and the microvalve device 1B is also sequentially stacked and assembled by the valve piece 17 and the outlet plate 18, etc. The gas collecting plate 16 of the fluid control device 1A is formed with a gas collecting chamber 162 and a reference surface of the gas collecting plate 16 between the gas collecting plate 16 of the microfluidic control device 1A and the piezoelectric actuator 13 . The 161 is further recessed into the first pressure relief chamber 165 and the first outlet chamber 166, and the reference surface 180 of the outlet plate 18 is further recessed by a second pressure relief chamber 183 and a second outlet chamber 184, in this embodiment. The operation frequency of the micro pneumatic power device is between 27K and 29.5K, and operates Pressure ± 10V to ± 16V, and by a plurality of such different pressure chambers with a piezoelectric actuator 13 of the drive plate 12 and the resonant vibration of the valve plate 17, so that the gas pressure set down transmission.

As shown in Fig. 7B, when the piezoelectric actuator 13 of the microfluidic control device 1A is vibrated downward by the voltage, the gas enters the microfluidic control device 1A from the intake hole 110 in the air intake plate 11. And passing through at least one bus bar hole 112 to be collected to the central recess portion 111, and then flowing downward into the first chamber 121 via the hollow hole 120 on the resonator piece 12. Thereafter, as shown in Fig. 7C, the resonance piece 12 is also reciprocally vibrated by the resonance of the vibration of the piezoelectric actuator 13, that is, it vibrates downward and is close to the piezoelectric actuator. The convex portion 130c of the suspension plate 130 of 13 is deformed by the resonance piece 12, so that the volume of the chamber at the central concave portion 111 of the air inlet plate 11 is increased, and at the same time, the volume of the first chamber 121 is compressed, thereby further The gas in the first chamber 121 is caused to flow toward both sides, and then flows downward through the gap 135 between the brackets 132 of the piezoelectric actuator 13 to flow to the microfluidic control device 1A and the microvalve device. The first through hole 163 and the second through hole 164 communicating with the gas collecting chamber 162 are correspondingly flowed into the first pressure relief chamber 165 and the first out. In the oral chamber 166, it can be seen from the embodiment that when the resonant sheet 12 performs vertical reciprocating vibration, the gap between the piezoelectric actuator 13 and the piezoelectric actuator 13 can be increased to increase the maximum displacement of the vertical displacement. In other words, the gap g0 is provided between the two structures to make the resonator piece 12 generate a larger amplitude when resonating. The upper and lower displacement.

Next, as shown in Fig. 7D, since the resonator piece 12 of the microfluidic control device 1A is returned to the initial position, the piezoelectric actuator 13 is driven by the voltage to vibrate upward, and the vibration displacement of the piezoelectric actuator For d, the difference from the gap g0 is x, that is, x=g0-d, which is tested when x=1 to 5um, the operating frequency is 27k to 29.5KHz, and the operating voltage is ±10V to ±16V. The output air pressure can reach at least 300mmHg, but not limited to this. The volume of the first chamber 121 is also squeezed in such a manner that the gas in the first chamber 121 flows toward both sides and is continuously input to the plenum chamber by the gap 135 between the holders 132 of the piezoelectric actuator 13 162. The first pressure relief chamber 165 and the first outlet chamber 166 further increase the air pressure in the first pressure relief chamber 165 and the first outlet chamber 166, thereby pushing the flexible valve piece 17 When the bending deformation is generated downward, in the second pressure relief chamber 183, the valve piece 17 is laid flat against the convex portion structure 181a at the end of the pressure relief through hole 181, thereby closing the pressure relief through hole 181. In the second outlet chamber 184, the valve hole 170 corresponding to the outlet through hole 182 of the valve piece 17 is opened downward, so that the gas in the second outlet chamber 184 can be transmitted downward from the outlet through hole 182 to the outlet 19. And any device (not shown) connected to the outlet 19, in order to achieve the purpose of the pressure collection operation. Finally, as shown in FIG. 7E, when the resonator piece 12 of the microfluidic control device 1A is resonantly displaced upward, the gas in the central recess 111 of the first surface 11b of the air inlet plate 11 can be made by the hollow hole 120 of the resonator piece 12. Flowing into the first chamber 121 and continuously transmitting downward into the gas collecting plate 16 via the gap 135 between the brackets 132 of the piezoelectric actuator 13, the gas pressure system continues to increase downward, so the gas Still continuing to flow through the plenum chamber 162, the second through hole 164, the first outlet chamber 166, the second outlet chamber 184, and the outlet through hole 182 to the outlet 19 and any device connected to the outlet 19, The collecting operation can be driven by the atmospheric pressure of the outside and the pressure difference in the device, but not limited thereto.

When the pressure inside the device (not shown) connected to the outlet 19 is greater than the external pressure, the micro-pneumatic power device 1 can perform the step-down or pressure-reduction operation as shown in FIG. The pressure relief operation mode is mainly as described above, and the gas can be no longer input into the air collection chamber 162 by regulating the gas transmission amount of the micro fluid control device 1A. At this time, the gas will be connected to the outlet connected to the outlet 19. The through hole 182 is input into the second outlet chamber 184, so that the volume of the second outlet chamber 184 is expanded, thereby causing the flexible valve piece 17 to be bent upwardly and flattened upwardly against the first outlet chamber. The convex portion 167 of the 166 is closed, so that the valve hole 170 of the valve piece 17 is closed, that is, the gas in the second outlet chamber 184 does not flow back into the first outlet chamber 166; and, in the second outlet chamber 184 The gas system can flow into the second pressure relief chamber 183 via the communication flow passage 185, and then the pressure relief through hole 181 can be used for pressure relief operation; thus, the one-way gas transmission operation of the micro valve structure 1B can be performed. The gas in the device connected to the outlet 19 is discharged and depressurized, or completely A relief to complete the job.

The suspension plate 130 used in the present case is in a square shape. When the side length of the suspension plate 130 is reduced and the area of the suspension plate 130 is gradually reduced, it is found that the reduction in size causes the rigidity of the suspension plate 130 to be improved, and Because the internal gas flow path volume is reduced, it is favorable for the pushing or compression of the air, so that the output air pressure value can be increased; and on the other hand, the horizontal deformation of the suspension plate 130 caused by the vertical vibration can be reduced, thereby making the pressure The electric actuator 13 can be maintained in the same vertical direction without tilting, thereby reducing collision interference between the piezoelectric actuator 13 and the resonator piece 12 or other assembled components, so that noise generation can be reduced, and thus The quality defect rate is lowered. In summary, when the size of the suspension plate 130 of the piezoelectric actuator 13 is reduced, the piezoelectric actuator 13 can be made smaller, thereby reducing the noise of the output air pressure and reducing noise. The defect rate of the product is lowered; on the contrary, it is found that the output pressure value of the large-sized suspension plate 130 is low and the defect rate is high.

Furthermore, the suspension plate 130 and the piezoelectric ceramic plate 133 are the core of the micro pneumatic power unit 1, and as the area of both is reduced, the area of the micro pneumatic power unit 1 can be reduced in synchronization and the weight can be reduced. The micro-pneumatic power unit 1 can be easily installed on a portable device without being limited by an excessive volume. Of course, in this case, the micro-pneumatic power unit 1 has a tendency to be thinned, and the micro-fluidity control device 1A is assembled with the micro-valve device 1B to have a total thickness of 2 mm to 6 mm, thereby enabling the micro-gas power unit 1 to be portable and portable. For the purpose of the application, and can be widely used in medical equipment and related equipment.

In summary, the micro-pneumatic power unit provided in the present case mainly uses micro-fluid control device and micro-valve device to form a gas, and allows gas to enter from the air inlet hole of the micro-fluid control device, and utilizes piezoelectric actuation. Actuation, the gas creates a pressure gradient in the designed flow channel and pressure chamber, so that the gas flows at high speed and is transmitted to the micro valve device, and then through the one-way valve design of the micro valve device, the gas is in one direction Flow, which in turn accumulates pressure in any device connected to the outlet; when depressurization or depressurization is required, the amount of microfluidic control device is regulated and the gas can be transferred from the device connected to the outlet to the micro The second outlet chamber of the valve device is transmitted to the second pressure relief chamber by the connecting flow passage, and then flows out through the pressure relief through hole, so as to achieve rapid transmission of the gas and at the same time achieve the effect of mute Moreover, the overall volume of the micro gas power device can be reduced and thinned, thereby enabling the micro gas power device to achieve portable and portable purposes, and can be widely used. Used in medical equipment and related equipment. Therefore, the micro-gas powered device in this case is of great industrial use value and is submitted in accordance with the law.

The present invention has been described in detail by the above-described embodiments, and is intended to be modified by those skilled in the art.

1‧‧‧Micro Pneumatic Power Plant
1A‧‧‧Microfluidic control device
1B‧‧‧ miniature valve device
1a‧‧‧shell
10‧‧‧Base
11‧‧‧Air intake plate
11a‧‧‧ second surface of the air inlet plate
11b‧‧‧ first surface of the air inlet plate
110‧‧‧Air intake
111‧‧‧Center recess
112‧‧‧ Bus Bars
12‧‧‧Resonance film
12a‧‧‧movable department
12b‧‧‧Fixed Department
120‧‧‧ hollow holes
121‧‧‧ first chamber
13‧‧‧ Piezoelectric Actuator
130‧‧‧suspension board
130a‧‧‧Second surface of the suspension plate
130b‧‧‧The first surface of the suspension plate
130c‧‧‧ convex
130d‧‧‧ Central Department
130e‧‧‧The outer part
131‧‧‧Front frame
131a‧‧‧ second surface of the outer frame
131b‧‧‧ first surface of the outer frame
132‧‧‧ bracket
132a‧‧‧Second surface of the stent
132b‧‧‧ first surface of the bracket
133‧‧‧ Piezoelectric ceramic plate
134, 151‧‧‧ conductive pins
135‧‧‧ gap
141, 142‧‧‧ insulating sheet
15‧‧‧Conductor
16‧‧‧ gas collecting plate
16a‧‧‧ accommodating space
160‧‧‧ surface
161‧‧‧ reference surface
162‧‧‧Gas chamber
163‧‧‧First through hole
164‧‧‧Second through hole
165‧‧‧First pressure relief chamber
166‧‧‧First out of the chamber
167, 181a‧‧ ‧ convex structure
168‧‧‧ side wall
17‧‧‧ Valves
170‧‧‧ valve hole
171‧‧‧ Positioning holes
18‧‧‧Export board
180‧‧‧ reference surface
181‧‧‧Relief through hole
182‧‧‧Export through hole
183‧‧‧Second pressure relief chamber
184‧‧‧Second out of the chamber
185‧‧‧Connected runners
187‧‧‧ second surface
188‧‧‧Limited structure
19‧‧‧Export
G0‧‧‧ gap
(a)~(x)‧‧‧Different implementations of piezoelectric actuators
A0, i0, j0, m0, n0, o0, p0, q0, r0‧‧‧ suspension board
A1, i1, m1, n1, o1, p1, q1, r1‧‧‧ frame
A2, i2, m2, n2, o2, p2, q2, r2‧‧‧ bracket, plate connection
A3, m3, n3, o3, p3, q3, r3‧‧‧ gap
d‧‧‧Vibration displacement of piezoelectric actuator
S4, t4, u4, v4, w4, x4‧‧‧ convex
M2', n2', o2', q2', r2'‧‧‧ bracket attached to the end of the frame
M2", n2", o2", q2", r2"‧‧‧ brackets attached to the end of the suspension plate

FIG. 1A is a front exploded view showing the micro pneumatic power device of the preferred embodiment of the present invention. Fig. 1B is a schematic view showing the front combined structure of the micro pneumatic power device shown in Fig. 1A. Fig. 2A is a schematic view showing the back side exploded structure of the micro pneumatic power device shown in Fig. 1A. Fig. 2B is a schematic view showing the structure of the back side of the micro pneumatic power device shown in Fig. 1A. Fig. 3A is a schematic view showing the front combined structure of the piezoelectric actuator of the micro pneumatic power device shown in Fig. 1A. Fig. 3B is a schematic view showing the rear combined structure of the piezoelectric actuator of the micro pneumatic power device shown in Fig. 1A. Fig. 3C is a schematic cross-sectional view showing the piezoelectric actuator of the micro pneumatic power device shown in Fig. 1A. 4A to 4C are schematic views showing various embodiments of the piezoelectric actuator. 5A to 5E are schematic views showing a partial operation of the microfluidic control device of the micro pneumatic power device shown in Fig. 1A. Fig. 6A is a schematic view showing the collective operation of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in Fig. 1A. Fig. 6B is a schematic view showing the pressure relief operation of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in Fig. 1A. 7A to 7E are schematic views showing the collective pressure operation of the micro pneumatic power device shown in Fig. 1A. Figure 8 is a schematic diagram of the step-down or pressure relief operation of the micro-pneumatic power unit shown in Figure 1A.

1‧‧‧Micro Pneumatic Power Plant

1A‧‧‧Microfluidic control device

1B‧‧‧ miniature valve device

1a‧‧‧shell

10‧‧‧Base

11‧‧‧Air intake plate

11a‧‧‧ second surface of the air inlet plate

110‧‧‧Air intake

12‧‧‧Resonance film

120‧‧‧ hollow holes

13‧‧‧ Piezoelectric Actuator

130‧‧‧suspension board

131‧‧‧Front frame

132‧‧‧ bracket

133‧‧‧ Piezoelectric ceramic plate

134‧‧‧Electrical pins

135‧‧‧ gap

141, 142‧‧‧ insulating sheet

15‧‧‧Conductor

151‧‧‧Electrical pins

16‧‧‧ gas collecting plate

16a‧‧‧ accommodating space

160‧‧‧ surface

162‧‧‧Gas chamber

163‧‧‧First through hole

164‧‧‧Second through hole

168‧‧‧ side wall

17‧‧‧ Valves

170‧‧‧ valve hole

171‧‧‧ Positioning holes

18‧‧‧Export board

180‧‧‧ reference surface

181‧‧‧Relief through hole

181a‧‧‧ convex structure

182‧‧‧Export through hole

183‧‧‧Second pressure relief chamber

184‧‧‧Second out of the chamber

185‧‧‧Connected runners

Claims (16)

A microfluidic control device comprising: a piezoelectric actuator comprising: a suspension plate in a square shape and capable of bending vibration from a central portion to an outer peripheral portion; an outer frame circumferentially disposed on the suspension plate An outer side; at least one bracket connected between the suspension plate and the outer frame to provide elastic support; a piezoelectric ceramic plate having a square shape having a side length not greater than a side length of the suspension plate, attached a first surface of the suspension plate for applying a voltage to drive the suspension plate to bend and vibrate; and a casing comprising: a gas collecting plate having a frame structure of a side wall for the circumference and more on the inner surface Depressing to form a gas collection chamber for the piezoelectric actuator to be disposed in the gas collection chamber; and a base closed to the bottom of the piezoelectric actuator and having a hollow hole The hollow hole is disposed corresponding to the central portion of the suspension plate; wherein the gas collecting plate further has a plurality of through holes penetrating through, and when the piezoelectric actuator is driven by voltage, the floating plate is also followed The vibration is flexed and the fluid is transferred from the hollow hole of the base to the gas collection chamber, and then discharged through the plurality of through holes. The microfluidic control device of claim 1, wherein the suspension plate of the piezoelectric actuator has a side length of between 4 mm and 8 mm. The microfluidic control device of claim 1, wherein the suspension plate of the piezoelectric actuator has a convex portion on a second surface. The microfluidic control device of claim 3, wherein the height of the protrusion of the suspension plate is between 0.02 mm and 0.08 mm. The microfluidic control device of claim 3, wherein the convex portion of the suspension plate is a circular convex structure having a diameter of 0.55 times a minimum side length of the suspension plate. The microfluidic control device of claim 1, wherein the at least one bracket of the piezoelectric actuator is a board connecting portion for connecting the suspension plate and the outer frame. The microfluidic control device according to claim 6, wherein the two ends of the plate connecting portion are corresponding to each other and disposed on the same axis. The microfluidic control device of claim 6, wherein the plate connecting portion is connected to the suspension plate and the outer frame at an oblique angle of 0 to 45 degrees. The microfluidic control device of claim 1, wherein the at least one bracket of the piezoelectric actuator comprises: a beam portion disposed in a gap between the suspension plate and the outer frame, The direction of the arrangement is parallel to the outer frame and the suspension plate; a suspension plate connection portion is connected between the beam portion and the suspension plate; and an outer frame connection portion is connected between the beam portion and the outer frame And the suspension plate connecting portions correspond to each other and are disposed on the same axis. The microfluidic control device of claim 1, wherein the suspension plate of the piezoelectric actuator has a thickness of between 0.1 mm and 0.4 mm. The microfluidic control device of claim 1, wherein the piezoelectric ceramic plate has a thickness of between 0.05 mm and 0.3 mm. The microfluidic control device of claim 1, wherein the base comprises an air inlet plate and a resonance plate, the air intake plate having a first surface and a second surface, the second surface having at least one An air intake hole, the at least one air inlet hole penetrates into the first surface, the first surface also has at least one bus bar hole, and the at least one bus bar hole communicates with the at least one air inlet hole and corresponds to Providing a central recess in the central AC of the at least one bus bar for inputting and guiding fluid from the at least one air inlet hole to the at least one bus bar hole, and collecting the current to the central recess And the central recess can correspond to a confluence chamber constituting one of the confluent fluids for temporarily storing the fluid. The microfluidic control device of claim 1, wherein the microfluidic control device further has two insulating sheets and a conductive sheet, and the two insulating sheets are respectively disposed on the upper and lower sides of the conductive sheet, and are correspondingly disposed on the piezoelectric sheet. Above the actuator, the two insulating sheets and the conductive sheet have a shape substantially corresponding to the shape of the outer frame of the piezoelectric actuator. The microfluidic control device of claim 1, wherein the gas collecting plate further has a reference surface and a plurality of through holes, and the reference surface is recessed to provide a first pressure relief chamber and a first out The oral cavity, and the through holes include a first through hole and at least one second through hole, and one end of the first through hole is in communication with the gas collecting chamber, and the other end is respectively connected to the first pressure releasing chamber The chamber is in communication, and one end of the at least one second through hole is in communication with the first outlet chamber, and a protrusion structure is further added at the first outlet chamber. The microfluidic control device of claim 14, wherein the microfluidic control device is further configured with a microvalve device, the microvalve device comprising a valve piece and an outlet plate, the valve piece and the outlet plate are And the valve stack has a valve hole, wherein the valve hole is disposed corresponding to the convex structure of the first outlet chamber of the gas collecting plate, And the outlet plate has a reference surface and a second surface, and has a pressure relief through hole and an outlet through hole extending through the second surface and the reference surface, and recessing a second outlet chamber on the reference surface And a second pressure relief chamber, the second pressure relief chamber is correspondingly disposed at the pressure relief through hole, the second outlet chamber is correspondingly disposed at the outlet through hole, and the second pressure relief a communication flow path is further provided between the chamber and the second outlet chamber for fluid circulation; and one end of the pressure relief through hole is in communication with the second pressure relief chamber, and the end portion can be further Add a convex to form The convex portion structure causes the valve hole of the valve piece to close under the atmospheric pressure of the outlet through hole due to the close contact with the convex portion structure, so that the fluid in the gas collecting plate does not flow back to the first The first pressure relief chamber of the gas collecting plate is also blocked by the valve piece, so that the valve piece can achieve the opening or closing of the control fluid transportation. The microfluidic control device of claim 15, wherein the outlet plate of the microvalve device further has a limiting structure, the limiting structure is disposed in the second pressure relief chamber to assist in supporting the valve piece. So that it does not collapse, and the valve piece can be opened or closed more quickly.