TWI681119B - Micro-fluid control device - Google Patents

Micro-fluid control device Download PDF

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Publication number
TWI681119B
TWI681119B TW105128570A TW105128570A TWI681119B TW I681119 B TWI681119 B TW I681119B TW 105128570 A TW105128570 A TW 105128570A TW 105128570 A TW105128570 A TW 105128570A TW I681119 B TWI681119 B TW I681119B
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Taiwan
Prior art keywords
plate
micro
hole
gas
fluid control
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TW105128570A
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Chinese (zh)
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TW201727068A (en
Inventor
陳世昌
黃啟峰
韓永隆
廖家淯
陳壽宏
黃哲威
廖鴻信
陳朝治
程政瑋
張英倫
張嘉豪
李偉銘
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研能科技股份有限公司
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Priority to TW105102842 priority
Priority to TW105102843 priority
Priority to TW105119823 priority
Priority to TW105119824 priority
Priority to TW105119824 priority
Priority to TW105119825 priority
Priority to TW105119825 priority
Priority to TW105119823 priority
Application filed by 研能科技股份有限公司 filed Critical 研能科技股份有限公司
Priority claimed from US15/392,018 external-priority patent/US9976673B2/en
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • F04B43/046Micropumps with piezo-electric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10Adaptations or arrangements of distribution members
    • F04B39/1066Valve plates
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047Pumps having electric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15BSYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B2211/00Circuits for servomotor systems
    • F15B2211/20Fluid pressure source, e.g. accumulator or variable axial piston pump
    • F15B2211/205Systems with pumps

Abstract

A micro-fluid control device is disclosed and comprises a gas inlet board, a resonance membrane and an actuator disposed in sequence, the gas inlet board has at least one gas inlet hole, at least one gas converge groove and a central hole which forms a converge chamber, the resonance membrane has a hollow hole, the actuator has a suspension plate, a frame and a piezoelectric ceramic, wherein a gap between the resonance membrane and the actuator forms a first chamber, when the actuator is driven, the gas goes in from the gas inlet hole of the gas inlet board, flows through the gas converge groove and into the central hole, then through the hollow hole of the resonance membrane to flow into the first chamber, and be transmitted downwardly and be pushed out.

Description

Miniature fluid control device

This case is about a miniature fluid control device, which is suitable for a miniature ultra-thin and silent miniature pneumatic power device.

At present, in all fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing towards refinement and miniaturization. Among them, micro-pumps, sprayers, inkjet heads, industrial printing devices and other products are included Fluid delivery structure is its key technology, so how to break through its technical bottleneck with innovative structure is an important part of development.

For example, in the pharmaceutical industry, many instruments or equipment that need to be driven by pneumatic power, usually adopt traditional motors and pneumatic valves to achieve the purpose of gas delivery. However, due to the limitations of the structure of these traditional motors and gas valves, it is difficult for such instruments to reduce their volume, so that the volume of the overall device cannot be reduced, that is, it is difficult to achieve the goal of thinning, so it cannot be installed. It is not convenient to use it on or in conjunction with a portable device. In addition, these traditional motors and gas valves also generate noise when actuated, which makes the user anxious, resulting in inconvenience and uncomfortable use.

Therefore, how to develop a micro-fluid control device that can improve the lack of the above-mentioned conventional technology, so that the traditional instruments or equipment using the micro-fluid control device can achieve small size, miniaturization and mute, and thus achieve a portable and comfortable portable purpose. It is an urgent problem that needs to be solved.

The main purpose of this case is to provide a micro-fluid control device suitable for portable or wearable instruments or equipment. The gas fluctuations generated by the high-frequency action of the piezoelectric ceramic plate generate a pressure gradient in the designed flow channel, and Make the gas flow at high speed, and transfer the gas from the suction end to the discharge end through the difference in impedance of the flow path. In order to solve the conventional technology, the instrument or equipment using the micro fluid control device is large and difficult to be thinned. Can not achieve the purpose of portability, and lack of noise.

To achieve the above purpose, one of the broader implementation aspects of this case is to provide a micro-fluid control device, which is suitable for a micro-pneumatic power device, including an air inlet plate, a resonance plate and a piezoelectric actuator. The air inlet plate It has at least one air inlet hole, at least one busbar hole, and a central recess that forms a busbar chamber. The at least one air inlet hole is for introducing gas. The busbar hole corresponds to the air inlet hole and guides the air inlet hole. The gas converges to the confluence chamber formed by the central recess, the resonant sheet has a hollow hole, the confluence chamber corresponding to the air inlet plate, and the piezoelectric actuator has a suspension plate, an outer frame and a pressure An electric ceramic plate, the suspension plate has a length between 7.5mm to 12mm, a width between 7.5mm to 12mm and a thickness between 0.1mm to 0.4mm, the outer frame has at least one bracket, The connection is arranged between the suspension board and the outer frame, and the piezoelectric ceramic board is attached to a first surface of the suspension board, and has a side length not greater than the side length of the suspension board, having a range between 7.5mm and 12mm The length between, the width between 7.5mm to 12mm and the thickness between 0.05mm to 0.3mm, the ratio of the length and the width of the piezoelectric ceramic plate is between 0.625 times to 1.6 times, wherein the above The piezoelectric actuator, the resonant sheet and the air intake plate are sequentially positioned corresponding to each other, and a gap is formed between the resonant sheet and the piezoelectric actuator to form a first chamber, so that the When the piezoelectric actuator is driven, gas is introduced from the at least one air inlet hole of the air inlet plate, collects to the central concave portion through the at least one busbar hole, and then flows through the hollow hole of the resonant sheet to enter In the first chamber, a gap between the at least one bracket of the piezoelectric actuator is transmitted downward to continuously push out the gas.

To achieve the above purpose, another broader implementation of the case is to provide a micro-fluid control device, which is suitable for a micro-pneumatic power device, including an air inlet plate, a resonant plate and a piezoelectric actuator, of which The air intake plate, the resonance plate and the piezoelectric actuator are sequentially stacked and positioned correspondingly, and a gap is formed between the resonance plate and the piezoelectric actuator to form a first chamber, and the piezoelectric actuation When the device is driven, gas enters from the air inlet plate, flows through the resonant sheet, and enters the first chamber to transmit the gas.

Some typical embodiments embodying the characteristics and advantages of this case will be described in detail in the description in the following paragraphs. It should be understood that this case can have various changes in different forms, and they all do not deviate from the scope of this case, and the descriptions and illustrations therein are essentially used for explanation, not for limiting the case.

The micro-pneumatic power device 1 in this case can be applied to industries such as medical and biotechnology, energy, computer technology, or printing, etc., to transmit gas, but not limited to this. Please refer to Figure 1A, Figure 1B, Figure 2A, Figure 2B, and Figures 7A to 7E. Figure 1A is a schematic diagram of the front exploded structure of the micro-pneumatic power device of the preferred embodiment of this case, and Figure 1B is the first The schematic diagram of the front combined structure of the micro pneumatic power device shown in the figure, FIG. 2A is the exploded schematic structural view of the back of the micro pneumatic power device shown in FIG. 1A, and FIG. 2B is the micro pneumatic power device shown in FIG. 1A. Schematic diagram of the combined structure on the back. Figures 7A to 7E are schematic diagrams of the pressure-collecting actuation of the micro pneumatic power device shown in Figure 1A. As shown in FIG. 1A and FIG. 2A, the micro-pneumatic power device 1 of this case is composed of a micro-fluid control device 1A and a micro-valve device 1B, wherein the micro-fluid control device 1A has a housing 1a, piezoelectric actuation 13, the insulating sheets 141, 142 and the conductive sheet 15. The housing 1 a includes the gas collecting plate 16 and the base 10. The base 10 includes the air intake plate 11 and the resonance plate 12, but not limited to this. The piezoelectric actuator 13 is provided corresponding to the resonance sheet 12, and makes the intake plate 11, the resonance sheet 12, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, the other insulating sheet 142, and the gas collecting plate 16 and the like are stacked in sequence, and the piezoelectric actuator 13 is assembled by a floating plate 130, an outer frame 131, at least one bracket 132, and a piezoelectric ceramic plate 133; and the micro valve device 1B includes A valve plate 17 and an outlet plate 18 are not limited thereto. In this embodiment, as shown in FIG. 1A, the gas collecting plate 16 is not only a single plate structure, but also a frame structure with a side wall 168 on the periphery, and the gas collecting plate 16 has a thickness of 9mm to 17mm The length between, the width between 9mm and 17mm, and the ratio of the length and the width is between 0.53 times and 1.88 times, and the side wall 168 formed by the peripheral edge and the bottom plate together define a volume The placement space 16a is used for the piezoelectric actuator 13 to be disposed in the accommodation space 16a. Therefore, after the assembly of the micro-pneumatic power device 1 in this case is completed, the schematic front view will be as shown in FIG. 1B, and As shown in FIGS. 7A to 7E, it can be seen that the micro-fluidic control device 1A is assembled corresponding to the micro-valve device 1B, that is, the valve pieces 17 and the outlet plate 18 of the micro-valve device 1B are sequentially stacked and positioned on the micro The gas control plate 1A of the fluid control device 1A is formed. The schematic diagram on the back of the assembled assembly shows the pressure relief hole 181 and the outlet 19 on the outlet plate 18. The outlet 19 is used to connect with a device (not shown), and the pressure relief hole 181 is used to make the micro valve device. The gas in 1B is discharged to achieve the effect of pressure relief. By assembling the micro-fluid control device 1A and the micro-valve device 1B, gas is drawn in from at least one air inlet hole 110 on the air inlet plate 11 of the micro-fluid control device 1A, and passes through the piezoelectric actuator 13 And the flow continues through multiple pressure chambers (not shown), so that the gas can flow unidirectionally in the micro valve device 1B, and the pressure is accumulated in a device connected to the outlet end of the micro valve device 1B (Not shown), and when pressure relief is required, the output of the microfluidic control device 1A is adjusted so that the gas is discharged through the pressure relief through hole 181 on the outlet plate 18 of the microvalve device 1B for relief Pressure.

Please continue to refer to FIG. 1A and FIG. 2A. As shown in FIG. 1A, the air inlet plate 11 of the microfluidic control device 1A has a first surface 11b, a second surface 11a, and at least one air inlet hole 110. In this embodiment In the example, the number of air inlet holes 110 is four, but not limited to this, it penetrates the first surface 11b and the second surface 11a of the air inlet plate 11 and is mainly used for the gas to conform to the atmospheric pressure from outside the device From the at least one air inlet hole 110 into the micro fluid control device 1A. And as shown in FIG. 2A, it can be seen from the first surface 11b of the air inlet plate 11 that there is at least one busbar hole 112 for connecting with the at least one air inlet hole 110 on the second surface 11a of the air inlet plate 11 Corresponding settings. In this embodiment, the number of the bus holes 112 corresponds to the intake holes 110, and the number is four, but it is not limited to this, wherein the central exchange part of the bus holes 112 has a central recess 111 And, the central recess 111 communicates with the bus hole 112, whereby the gas entering the bus hole 112 from the air inlet hole 110 can be guided and the confluence is concentrated to the central recess 111 for transmission. Therefore, in this embodiment, the air inlet plate 11 has an integrally formed air inlet hole 110, a bus bar hole 112, and a central recess 111, and a confluent chamber for a confluent gas is formed correspondingly at the central recess 111 for Gas is temporarily stored. In some embodiments, the material of the air inlet plate 11 may be, but not limited to, a stainless steel material, and its thickness is between 0.4 mm and 0.6 mm, and its preferred value is 0.5 mm, but Not limited to this. In other embodiments, the depth of the confluence chamber formed by the central recess 111 is the same as the depth of the busbar holes 112, and the preferred values of the depth of the confluence chamber and the busbar holes 112 are Between 0.2mm and 0.3mm, but not limited to this. The resonator plate 12 is made of a flexible material, but not limited to this, and has a hollow hole 120 on the resonator plate 12, corresponding to the central recess 111 of the first surface 11b of the intake plate 11 To allow gas to circulate. In other embodiments, the resonator plate 12 may be made of a copper material, but not limited to this, and its thickness is between 0.03mm and 0.08mm, and its preferred value is 0.05mm, but also Not limited to this.

Please also refer to Figure 3A, Figure 3B and Figure 3C, which are the front structural schematic diagram, back structural schematic diagram and cross-sectional structural schematic diagram of the piezoelectric actuator of the micro pneumatic power device shown in Figure 1A, respectively. The actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132 and a piezoelectric ceramic plate 133, wherein the piezoelectric ceramic plate 133 is attached to the first of the suspension plate 130 The surface 130b is used to deform the applied voltage to drive the suspension plate 130 to flex and vibrate. The suspension plate 130 has a central portion 130d and an outer peripheral portion 130e, so that when the piezoelectric ceramic plate 133 is driven by a voltage, the suspension plate 130 can be moved from the central portion 130d to the outer peripheral portion 130e bending vibration, and the at least one bracket 132 is connected between the suspension plate 130 and the outer frame 131, in this embodiment, the bracket 132 is connected between the suspension plate 130 and the outer frame 131, The two end points are respectively connected to the outer frame 131 and the suspension plate 130 to provide elastic support, and there is at least one gap 135 between the bracket 132, the suspension plate 130 and the outer frame 131 for gas circulation, and the The shape and number of the suspension board 130, the outer frame 131, and the bracket 132 have various changes. In addition, the outer frame 131 is disposed around the outer side of the suspension board 130 and has a conductive pin 134 protruding outward for power connection, but not limited to this. In this embodiment, the suspension board 130 is a stepped surface structure, which means that the second surface 130a of the suspension board 130 further has a convex portion 130c. The convex portion 130c may be, but not limited to, a circular protrusion The height of the convex portion 130c is between 0.02mm and 0.08mm, and the preferred value is 0.03mm, and the diameter is 0.55 times the minimum side length of the suspension plate 130, but not limited to this. Please refer to FIGS. 3A and 3C at the same time. The surface of the convex portion 130c of the suspension plate 130 is coplanar with the second surface 131a of the outer frame 131, and the second surface 130a of the suspension plate 130 and the second of the bracket 132 The surface 132a is also coplanar, and there is a certain depth between the convex portion 130c of the suspension plate 130 and the second surface 131a of the outer frame 131 and the second surface 130a of the suspension plate 130 and the second surface 132a of the bracket 132. As for the first surface 130b of the suspension plate 130, as shown in FIGS. 3B and 3C, the first surface 131b of the outer frame 131 and the first surface 132b of the bracket 132 have a flat coplanar structure, and the piezoelectric The ceramic plate 133 is attached to the first surface 130b of the flat suspension plate 130. In other embodiments, the shape of the suspension board 130 may also be a flat square structure with two sides flat, which is not limited to this, and may be changed according to the actual application situation. In some embodiments, the suspension plate 130, the bracket 132, and the outer frame 131 may be an integrally formed structure, and may be composed of a metal plate, such as stainless steel, but not limited thereto. And in some embodiments, the thickness of the suspension plate 130 is between 0.1 mm and 0.4 mm, and the preferred value is 0.27 mm, and the length of the suspension plate 130 is between 7.5 mm and 12 mm, and The preferred value may be 7.5 mm to 8.5 mm, and the width is between 7.5 mm to 12 mm, and the preferred value may be 7.5 mm to 8.5 mm, but not limited thereto. As for the thickness of the outer frame 131 is between 0.2 mm and 0.4 mm, and the preferred value is 0.3 mm, but it is not limited thereto.

In other embodiments, the thickness of the piezoelectric ceramic plate 133 is between 0.05 mm and 0.3 mm, and the preferred value is 0.10 mm, and the piezoelectric ceramic plate 133 has no greater than the suspension plate 130 The side length has a length between 7.5mm and 12mm, and a preferred value may be 7.5mm to 8.5mm, a width between 7.5mm and 12mm, and a preferred value may be 7.5mm to 8.5mm, the preferred length and width ratio is between 0.625 times and 1.6 times, but it is not limited to this. In other embodiments, the side length of the piezoelectric ceramic plate 133 may be smaller than the side length of the suspension plate 130, and it is also designed as a square plate-like structure corresponding to the suspension plate 130, but it is not limited thereto.

In the related embodiment of the micro-pneumatic power device 1 of this case, the reason why the piezoelectric actuator 13 uses the square suspension plate 130 is that it is compared with the circular suspension plate (as shown in FIG. 4A (j) ~ ( l) The design of the circular suspension board j0), the structure of the square suspension board 130 has obvious advantages of power saving, and the comparison of its power consumption is shown in Table 1 below:

Table I

Figure 105128570-A0304-0001

Therefore, it is known from the above table of the experiment that the piezoelectric actuator 13 with a side length of the square-shaped suspension plate 130 (8 mm to 10 mm) is compared with the diameter of the circular suspension plate j0 (8 mm to 10 mm). Piezo actuators are more power efficient. The above power consumption comparison data obtained through experiments, the reason for power saving can be presumed: due to the capacitive load operating at the resonance frequency, the power consumption will increase with the increase of the frequency, and because of the square size of the side length The resonance frequency of the designed suspension board 130 is obviously lower than that of the same circular suspension board j0, so its relative power consumption is also significantly lower, that is, the square design of the suspension board 130 used in this case is compared with the circular suspension board j0. The design has the advantage of power saving, especially when it is applied to wearable devices, saving power is a very important design focus. In any case, the power saving effect of the above-mentioned square-shaped suspension board is obtained through experiments, and cannot be directly derived from the theoretical formula. The speculation of the power saving reason is only used as a reference for the rationality of the experiment.

Please refer to Figures 4A, 4B, and 4C, which are schematic diagrams of various implementations of piezoelectric actuators. As shown in the figure, it can be seen that the suspension plate 130, the outer frame 131 and the bracket 132 of the piezoelectric actuator 13 can have various types, and at least can have (a) to (l) shown in FIG. 4A, etc. Various aspects, for example, (a) aspect, the outer frame a1 and the suspension plate a0 are square structures, and the two are connected by a plurality of brackets a2, for example: 8, but not This is limited, and there is a gap a3 between the bracket a2, the suspension plate a0, and the outer frame a1 for gas circulation. In another aspect (i), the outer frame i1 and the suspension plate i0 are also of a square structure, but only two brackets i2 are used to connect them; in addition, there are further related technologies, such as 4B, As shown in Figure 4C, the suspension plate of the piezoelectric actuator 13 may also have various forms such as (m)~(r) shown in Figure 4B and (s)~(x) shown in Figure 4C, but In these aspects, the suspension plate 130 and the outer frame 131 are both square structures. For example, the frame (m) and the outer frame m1 and the suspension plate m0 are both square structures, and the two are connected by a plurality of brackets m2, for example: 4, but not limited to this, And there is a gap m3 between the bracket m2, the suspension plate m0, and the outer frame m1 for fluid circulation. Moreover, in this embodiment, the bracket m2 connected between the outer frame m1 and the suspension plate m0 may be, but not limited to, a board connection portion m2, and the board connection portion m2 has two ends m2' and m2", One end m2' is connected to the outer frame m1, and the other end m2" is connected to the suspension plate m0, and the two ends m2' and m2" correspond to each other and are arranged on the same axis. At (n ) In the aspect, it also has an outer frame n1, a suspension plate n0, a bracket n2 connected between the outer frame n1, the suspension plate n0, and a gap n3 for fluid circulation, and the bracket n2 may also be but not limited to a The board connection part n2, the board connection part n2 also has two ends n2' and n2", and the end n2' is connected to the outer frame n1, and the other end n2" is connected to the suspension board n0, but in this embodiment In this case, the plate connecting portion n2 is connected to the outer frame n1 and the floating plate n0 at an oblique angle between 0 and 45 degrees. In other words, the two end portions n2' and n2" are not arranged on the same horizontal axis. It is a setting relationship of mutual misalignment. In the aspect (o), the outer frame o1, the suspension plate o0, the bracket o2 connected between the outer frame o1, the suspension plate o0, and the gap o3 for fluid circulation are all similar to the previous embodiment, but The design of the board connection part o2 as a bracket is slightly different from the (m) state. However, in this state, the two ends o2' and o2" of the board connection part o2 still correspond to each other and are provided On the same axis.

In the aspect (p), it also has a structure such as the outer frame p1, the suspension plate p0, the bracket p2 connected between the outer frame p1, the suspension plate p0, and the gap p3 for fluid circulation, etc. Among them, the plate connecting portion p2 as a bracket further has a structure such as a floating plate connecting portion p20, a beam portion p21, and an outer frame connecting portion p22, wherein the beam portion p21 is provided in the gap p3 between the floating plate p0 and the outer frame p1, and The direction of its installation is parallel to the outer frame p1 and the suspension plate p0, and the suspension plate connection portion p20 is connected between the beam portion p21 and the suspension plate p0, and the outer frame connection portion p22 connects the beam portion p21 and the outer frame p1 In addition, the suspension plate connection part p20 and the outer frame connection part p22 also correspond to each other and are arranged on the same axis.

In the (q) aspect, the outer frame q1, the suspension plate q0, the bracket q2 connected between the outer frame q1, the suspension plate q0, and the gap q3 for fluid circulation are all the same as the above (m), (o ) The appearance is similar, except that the design of the plate connection part q2 as a support is slightly different from the (m) and (o) forms. In this form, the suspended plate q0 is a square form, and Each side has two board connection parts q2 connected to the outer frame q1, and the two ends q2' and q2" of each board connection part q2 are also corresponding to each other and are arranged on the same axis. However, in (r ) In the aspect, it also has components such as the outer frame r1, the suspension plate r0, the bracket r2, and the gap r3, and the bracket r2 may also be, but not limited to, a plate connecting portion r2. In this embodiment, the plate connecting portion r2 It is a V-shaped structure. In other words, the board connection part r2 is also connected to the outer frame r1 and the suspension board r0 at an oblique angle between 0 and 45 degrees, so each board connection part r2 has an end r2" and The floating plate r0 is connected, and has two ends r2' connected to the outer frame r1, which means that the two ends b2' and the end b2" are not disposed on the same horizontal axis.

As shown in Figure 4C, the appearance patterns of these (s)~(x) patterns roughly correspond to the patterns of (m)~(r) shown in Figure 4B, except for these (s ) ~ (x), each piezoelectric actuator 13 is provided with a convex portion 130c on the suspension plate 130, that is, as shown in the figure s4, t4, u4, v4, w4, x4 and other structures, And whether it is the (m)~(r) state or the (s)~(x) state, the suspension board 130 is designed in a square shape to achieve the aforementioned low power consumption effect; It can be seen that whether the suspension board 130 is a flat plate structure with double-sided flat surfaces or a stepped structure with a convex portion on the surface is within the scope of protection of this case and is connected between the suspension board 130 and the outer frame 131 The shape and quantity of the bracket 132 can also be changed arbitrarily according to the actual application situation, and is not limited to the form shown in this case. As mentioned above, the suspension plate 130, the outer frame 131 and the bracket 132 can be an integrally formed structure, but not limited to this, as for the manufacturing method, it can be processed by traditional processing, or yellow etching, or laser Processing, or electroforming, or electrical discharge machining are not limited to this.

In addition, please refer to FIGS. 1A and 2A. In the microfluidic control device 1A, an insulating sheet 141, a conductive sheet 15 and another insulating sheet 142 are sequentially disposed under the piezoelectric actuator 13, And its form roughly corresponds to the form of the outer frame of the piezoelectric actuator 13. In some embodiments, the insulating sheets 141 and 142 are made of insulating materials, such as plastic, but not limited to this, for insulation purposes; in other embodiments, the conductive sheet 15 is made of It is made of conductive materials, such as metal, but not limited to this, for electrical conduction. And, in this embodiment, a conductive pin 151 may also be provided on the conductive sheet 15 for electrical conduction.

Please also refer to FIG. 1A and FIGS. 5A to 5E, where FIGS. 5A to 5E are partial operation schematic diagrams of the micro fluid control device 1A of the micro pneumatic power device shown in FIG. 1A. First, as shown in FIG. 5A, it can be seen that the microfluidic control device 1A is sequentially stacked by the air intake plate 11, the resonance sheet 12, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, and another insulating sheet 142, etc. In this embodiment, the gap g0 between the resonant sheet 12 and the piezoelectric actuator 13 between the periphery of the outer frame 131 is filled with a material, such as conductive adhesive, but not limited to this, The depth of the gap g0 can be maintained between the resonant sheet 12 and the convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13, which can guide the air flow to flow more quickly, and the convex portion 130c of the suspension plate 130 and the resonance The sheet 12 is kept at an appropriate distance so that contact interference with each other is reduced, so that noise generation can be reduced.

Please continue to refer to Figures 5A to 5E. As shown in the figure, when the intake plate 11, the resonance plate 12 and the piezoelectric actuator 13 are assembled in sequence, the hollow hole 120 in the resonance plate 12 can be connected to The upper air inlet plate 11 together forms a chamber for the confluent gas, and a first chamber 121 is formed between the resonance plate 12 and the piezoelectric actuator 13 for temporarily storing the gas, and the first chamber 121 It communicates with the cavity at the central recess 111 of the first surface 11b of the air intake plate 11 through the hollow hole 120 of the resonance plate 12, and the two sides of the first cavity 121 are supported by the bracket 132 of the piezoelectric actuator 13 The space 135 therebetween communicates with the microvalve device 1B provided thereunder.

When the micro-fluid control device 1A of the micro-pneumatic power device 1 is actuated, the piezoelectric actuator 13 is mainly actuated by a voltage and uses the bracket 132 as a fulcrum to perform vertical reciprocating vibration. As shown in FIG. 5B, when the piezoelectric actuator 13 is actuated by a voltage and vibrates downward, since the resonance plate 12 is a light and thin sheet-like structure, when the piezoelectric actuator 13 vibrates, The resonance plate 12 will also resonate and perform vertical reciprocating vibration, that is, the portion of the resonance plate 12 corresponding to the central recess 111 of the intake plate 11 will also be deformed by bending vibration, that is, the resonance plate 12 corresponds to the The portion of the central recess 111 of the air intake plate 11 is the movable portion 12a of the resonance plate 12, so that when the piezoelectric actuator 13 bends and vibrates downward, the movable portion 12a of the resonance plate 12 will be brought in by the fluid And pushing and vibration of the piezoelectric actuator 13, and as the piezoelectric actuator 13 bends and vibrates downward, gas enters through at least one inlet hole 110 on the inlet plate 11 and passes through the first At least one busbar hole 112 of a surface 11b is collected at the central concave portion 111 in the center thereof, and then flows down into the first chamber 121 through the central hole 120 corresponding to the central concave portion 111 on the resonance plate 12 and thereafter Due to the vibration of the piezoelectric actuator 13, the resonance plate 12 will also resonate and perform vertical reciprocating vibration. As shown in FIG. 5C, the movable portion 12a of the resonance plate 12 also moves downward Vibrate and attach to the convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13, so that the area other than the convex portion 130c of the suspension plate 130 and the fixed portion 12b on both sides of the resonance plate 12 The distance between the two will not become smaller, and by the deformation of the resonance sheet 12, the volume of the first chamber 121 is compressed, and the intermediate circulation space of the first chamber 121 is closed, so that the gas in it is pushed to flow to both sides, Furthermore, it flows downward through the gap 135 between the supports 132 of the piezoelectric actuator 13. As shown in FIG. 5D, the movable portion 12a of the resonant plate 12 is restored to its original position after being deformed by bending vibration, and the subsequent piezoelectric actuator 13 is driven by a voltage to vibrate upward, thus also squeezing the first chamber 121 At this time, since the piezoelectric actuator 13 is lifted upward, the displacement of the lift can be d, so that the gas in the first chamber 121 will flow toward both sides, and then the gas is continuously driven from the intake plate At least one air inlet hole 110 on 11 enters and flows into the cavity formed by the central recess 111, and as shown in FIG. 5E, the resonance plate 12 is resonated upward by the vibration of the piezoelectric actuator 13 lifting upward, The movable portion 12a of the resonant plate 12 also reaches the upward position, so that the gas in the central recess 111 flows into the first chamber 121 through the central hole 120 of the resonant plate 12, and passes through the bracket 132 of the piezoelectric actuator 13 The gap 135 passes through the micro-fluid control device 1A downward. From this embodiment, it can be seen that when the resonator plate 12 performs vertical reciprocating vibration, the maximum distance of its vertical displacement can be increased by the gap g0 between it and the piezoelectric actuator 13, in other words, the two Setting a gap g0 between the structures can cause the resonance plate 12 to generate a larger and larger displacement when resonating, and the vibration displacement of the piezoelectric actuator is d, and the difference from the gap g0 is x, that is, x= g0-d, when tested, when x≦0um, it is in a noisy state; when x=1 to 5um, the maximum output air pressure of the micro pneumatic power unit 1 can reach 350mmHg; when x= 5 to 10um, the maximum output air pressure of the micro pneumatic power unit 1 It can reach 250mmHg; when x=10 to 15um, the maximum output air pressure of the micro-pneumatic power device 1 can reach 150mmHg, and the corresponding relationship between the values is shown in Table 2 below. The above values are between 17K to 20K operating frequency and ±10V to ±20V operating voltage. In this way, a pressure gradient is generated in the flow path design of the microfluidic control device 1A, so that the gas flows at a high speed, and through the difference in impedance of the flow path in and out directions, the gas is transmitted from the suction end to the discharge end, and there is air pressure at the discharge end Under the state, it still has the ability to continue to push out the gas, and can achieve the effect of silence. (Table II)

Figure 105128570-A0304-0002

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonator plate 12 can be the same as the vibration frequency of the piezoelectric actuator 13, that is, both can be up or down simultaneously, which can be implemented according to the actual situation Any change is not limited to the action mode shown in this embodiment.

Please also refer to Figure 1A, Figure 2A, Figure 6A, and Figure 6B, where Figure 6A is a schematic diagram of the pressure-collecting actuation diagram of the gas collector plate 16 of the micro-pneumatic power device shown in Figure 1A and the micro-valve device 1B FIG. 6B is a schematic diagram of the pressure relief operation of the gas collector plate 16 and the micro valve device 1B of the micro pneumatic power device shown in FIG. 1A. As shown in FIGS. 1A and 6A, the micro-valve device 1B of the micro-pneumatic power device 1 in this case is formed by sequentially stacking the valve pieces 17 and the outlet plate 18, and is matched with the gas-collecting plate 16 of the micro-fluid control device 1A To operate.

In this embodiment, the gas collecting plate 16 has a surface 160 and a reference surface 161. The surface 160 is recessed to form a gas collecting chamber 162 for the piezoelectric actuator 13 to be set therein, controlled by the microfluid The gas conveyed downward by the device 1A is temporarily accumulated in the gas collecting chamber 162, and has a plurality of through holes in the gas collecting plate 16, which includes a first through hole 163 and a second through hole 164, the first One end of the through hole 163 and the second through hole 164 are in communication with the gas collection chamber 162, and the other end is respectively connected to the first pressure relief chamber 165 and the first outlet chamber 166 on the reference surface 161 of the gas collection plate 16 Connected. And, a convex structure 167 is further added at the first outlet chamber 166, such as but not limited to a cylindrical structure, the height of the convex structure 167 is higher than the reference surface 161 of the gas collecting plate 16, The height of the convex structure 167 is between 0.3 mm and 0.55 mm, and the preferred value is 0.4 mm.

The outlet plate 18 includes a pressure relief through hole 181, an outlet through hole 182, a reference surface 180, and a second surface 187, wherein the pressure relief through hole 181, the outlet through hole 182 pass through the reference surface 180 of the outlet plate 18 and On the second surface 187, a second pressure relief chamber 183 and a second outlet chamber 184 are recessed on the reference surface 180, the pressure relief through hole 181 is provided in the central portion of the second pressure relief chamber 183, and A communication channel 185 is further provided between the pressure relief chamber 183 and the second outlet chamber 184 for gas circulation, and one end of the outlet through hole 182 communicates with the second outlet chamber 184, and the other end communicates with the outlet 19 is connected, in this embodiment, the outlet 19 can be connected to a device (not shown), such as a press, but not limited to this.

The valve plate 17 has a valve hole 170 and a plurality of positioning holes 171. The thickness of the valve plate 17 is between 0.1 mm and 0.3 mm, and the preferred value is 0.2 mm.

When the valve plate 17 is positioned and assembled between the gas collecting plate 16 and the outlet plate 18, the pressure relief through hole 181 of the outlet plate 18 corresponds to the first through hole 163 of the gas collecting plate 16, the second pressure relief cavity The chamber 183 corresponds to the first pressure-relief chamber 165 of the gas collecting plate 16, the second outlet chamber 184 corresponds to the first outlet chamber 166 of the gas collecting plate 16, and the valve plate 17 is disposed in the gas collecting chamber Between the plate 16 and the outlet plate 18, the first pressure relief chamber 165 and the second pressure relief chamber 183 are blocked from communicating with each other, and the valve hole 170 of the valve plate 17 is disposed in the second through hole 164 and the outlet through hole Between 182, and the valve hole 170 is located corresponding to the convex structure 167 of the first outlet chamber 166 of the gas collecting plate 16, by the design of the single valve hole 170, so that the gas can be achieved according to its pressure difference The purpose of unidirectional flow.

In addition, one end of the pressure relief through hole 181 of the outlet plate 18 can be provided with a convex structure 181a, for example, but not limited to a cylindrical structure, the height of the convex structure 181a is from 0.3mm to 0.55mm, and the preferred value is 0.4mm, and the convex structure 181a is improved to increase its height, the height of the convex structure 181a is higher than the reference surface 180 of the outlet plate 18, to strengthen the valve The piece 17 quickly collides with and closes the pressure relief through hole 181, and achieves the effect of a pre-forced collision completely sealing effect; and, the outlet plate 18 further has at least one limiting structure 188, the height of the limiting structure 188 is 0.32mm, Taking this embodiment as an example, the limit structure 188 is disposed in the second pressure relief chamber 183, and is an annular block structure, and is not limited to this, which is mainly used when the micro valve device 1B performs the pressure collection operation At this time, it is used for supporting the valve piece 17 to prevent the valve piece 17 from collapsing, and the valve piece 17 can be opened or closed more quickly.

When the pressure-collecting action of the micro-valve device 1B is mainly as shown in Fig. 6A, it may be due to the pressure provided by the gas transmitted downward from the micro-fluid control device 1A, or when the outside atmospheric pressure is greater than the outlet When the internal pressure of the connected device (not shown) is reached, the gas flows from the gas collecting chamber 162 in the gas collecting plate 16 of the microfluidic control device 1A through the first through hole 163 and the second through hole 164, respectively Downflow into the first pressure-relief chamber 165 and the first outlet chamber 166, at this time, the downward gas pressure causes the flexible valve piece 17 to bend downward and deform, thereby making the volume of the first pressure-relief chamber 165 Increased, and corresponding to the first through hole 163 flat down and against the end of the pressure relief through hole 181, which can close the pressure relief through hole 181 of the outlet plate 18, so in the second pressure relief chamber 183 The gas inside does not flow out from the pressure relief through hole 181. Of course, in this embodiment, the design of adding a convex portion structure 181a at the end of the pressure relief through hole 181 can be used to strengthen the valve piece 17 to quickly resist and close the pressure relief through hole 181, and to achieve a pre-impact resistance to completely seal At the same time, the limiting structure 188 provided around the pressure relief through hole 181 at the same time helps to support the valve piece 17 so that it does not collapse. On the other hand, since the gas system flows downward from the second through hole 164 into the first outlet chamber 166, and the valve piece 17 corresponding to the first outlet chamber 166 also bends downward, so that its corresponding The valve hole 170 is opened downward, and gas can flow from the first outlet chamber 166 into the second outlet chamber 184 through the valve hole 170, and flow from the outlet through hole 182 to the outlet 19 and the device connected to the outlet 19 In (not shown), the device is used to collect pressure.

Please continue to refer to Figure 6B. When the micro valve device 1B is depressurized, it can adjust the gas transmission volume of the micro fluid control device 1A so that the gas is no longer input into the gas collection chamber 162, or when it is connected to the outlet 19 When the internal pressure of the connected device (not shown) is greater than the atmospheric pressure of the outside, the micro valve device 1B can be relieved of pressure. At this time, the gas is input into the second outlet chamber 184 from the outlet through-hole 182 connected to the outlet 19, so that the volume of the second outlet chamber 184 expands, thereby causing the flexible valve piece 17 to bend upward and deform, and Since it is flat against the gas collecting plate 16, the valve hole 170 of the valve piece 17 will be closed due to the gas collecting plate 16. Of course, in this embodiment, the design of adding a convex structure 167 to the first outlet chamber 166 can be used to allow the flexible valve piece 17 to bend upward and change quickly to make the valve hole 170 more advantageous The force conflicting action is completely attached to the closed state of the seal. Therefore, when in the initial state, the valve hole 170 of the valve piece 17 will be closed by abutting against the convex structure 167, and then the second outlet chamber 184 The gas will not flow back into the first outlet chamber 166 to achieve better prevention of gas leakage. And, the gas system in the second outlet chamber 184 can flow into the second pressure relief chamber 183 through the communication channel 185, thereby expanding the volume of the second pressure relief chamber 183 and corresponding to the second pressure relief chamber. The valve piece 17 of the pressure chamber 183 is also bent upward and deformed. At this time, since the valve piece 17 is not closed against the end of the pressure relief through hole 181, the pressure relief through hole 181 is in an open state, that is, the second pressure relief cavity The gas in the chamber 183 may flow out through the pressure relief through hole 181 for pressure relief. Of course, in this embodiment, the convex structure 181a added at the end of the pressure relief through hole 181 or the limiting structure 188 provided in the second pressure relief chamber 183 can be used to bend the flexible valve piece 17 upward The shape changes quickly, which is more favorable for breaking away from the state where the pressure relief through hole 181 is closed. In this way, the gas in the device (not shown) connected to the outlet 19 can be discharged to reduce the pressure by this one-way pressure relief operation, or can be completely discharged to complete the pressure relief operation.

Please also refer to Figures 1A, 2A, and 7A to 7E, where Figures 7A to 7E are schematic diagrams of the pressure-gathering action of the micro-pneumatic power device shown in Figure 1A. As shown in FIG. 7A, the micro-pneumatic power device 1 is composed of a micro-fluid control device 1A and a micro-valve device 1B, wherein the micro-fluid control device 1A is as described above, followed by the intake plate 11 and the resonance plate 12 in sequence , Piezoelectric actuator 13, insulating sheet 141, conductive sheet 15, another insulating sheet 142, and gas collecting plate 16 are stacked and assembled, and are located between the resonance sheet 12 and the piezoelectric actuator 13 There is a gap g0, and there is a first chamber 121 between the resonance plate 12 and the piezoelectric actuator 13, and the micro-valve device 1B is also stacked and assembled in sequence on the micro-plate by the valve plate 17 and the outlet plate 18, etc. The gas collecting plate 16 of the fluid control device 1A is formed, and a gas collecting chamber 162 and a reference surface of the gas collecting plate 16 are provided between the gas collecting plate 16 of the micro fluid control device 1A and the piezoelectric actuator 13 161 further recesses a first pressure-relief chamber 165 and a first outlet chamber 166, and a second pressure-relief chamber 183 and a second outlet chamber 184 on the reference surface 180 of the outlet plate 18, in this embodiment The operating frequency of the micro-pneumatic power device is between 27K and 29.5K, the operating voltage is ±10V to ±16V, and the driving of the piezoelectric actuator 13 through the multiple different pressure chambers And the vibration of the resonance plate 12 and the valve plate 17, so that the gas can be transmitted downward in pressure collection.

As shown in FIG. 7B, when the piezoelectric actuator 13 of the microfluidic control device 1A is actuated by a voltage and vibrates downward, the gas will enter the microfluidic control device 1A through the air inlet hole 110 on the air inlet plate 11 At least one busbar hole 112 is collected at the central recess 111, and then flows down into the first chamber 121 through the hollow hole 120 in the resonator plate 12. Thereafter, as shown in FIG. 7C, due to the resonance effect of the vibration of the piezoelectric actuator 13, the resonator plate 12 will also undergo reciprocating vibration, that is, it vibrates downward and is close to the piezoelectric actuator On the convex portion 130c of the suspension plate 130 of 13, the volume of the cavity at the central concave portion 111 of the air intake plate 11 is increased by the deformation of the resonance plate 12, and at the same time, the volume of the first cavity 121 is compressed, and The gas in the first chamber 121 is pushed to flow to both sides, and then passes through the gap 135 between the brackets 132 of the piezoelectric actuator 13 and flows downward to flow to the micro-fluid control device 1A and the micro-valve device 1B between the gas collection chamber 162, and then correspondingly flows downward from the first through hole 163 and the second through hole 164 communicating with the gas collection chamber 162 to the first pressure relief chamber 165 and the first outlet In the oral cavity 166, it can be seen from this implementation that when the resonator plate 12 performs vertical reciprocating vibration, the maximum distance of vertical displacement can be increased by the gap g0 between it and the piezoelectric actuator 13, in other words In other words, providing the gap g0 between the two structures can cause the resonance plate 12 to generate a larger and larger displacement when resonating.

Next, as shown in FIG. 7D, since the resonator plate 12 of the microfluidic control device 1A returns to the initial position, and the piezoelectric actuator 13 is driven by a voltage to vibrate upward, and the vibration displacement of the piezoelectric actuator Is d, and the difference from the gap g0 is x, that is, x=g0-d, when tested, when x=1 to 5um, the operating frequency is 27k to 29.5KHz, and the operating voltage is ±10V to ±16V, the maximum The output air pressure can reach at least 300mmHg, but not limited to this. In this way, the volume of the first chamber 121 is also squeezed, so that the gas in the first chamber 121 flows to both sides, and is continuously input into the gas collection chamber by the gap 135 between the brackets 132 of the piezoelectric actuator 13 162. In the first pressure-relief chamber 165 and the first outlet chamber 166, the greater the pressure in the first pressure-relief chamber 165 and the first outlet chamber 166, the more flexible the valve piece 17 is pushed. When a downward bending deformation occurs, in the second pressure-relief chamber 183, the valve piece 17 lies flat and abuts against the convex structure 181a at the end of the pressure-relief through hole 181, thereby closing the pressure-relief through hole 181, In the second outlet chamber 184, the valve hole 170 on the valve plate 17 corresponding to the outlet through hole 182 is opened downward, so that the gas in the second outlet chamber 184 can be transmitted downward from the outlet through hole 182 to the outlet 19 And any device (not shown) connected to the outlet 19 to further achieve the purpose of collecting pressure. Finally, as shown in FIG. 7E, when the resonance plate 12 of the microfluidic control device 1A resonates upward and displaces, the gas in the central recess 111 of the first surface 11b of the air intake plate 11 can pass through the hollow hole 120 of the resonance plate 12 Into the first chamber 121, and then continuously transmitted downwards into the gas collecting plate 16 through the gap 135 between the brackets 132 of the piezoelectric actuator 13, because the gas pressure continues to increase downward, so the gas Will continue to flow through the air collection chamber 162, the second through hole 164, the first outlet chamber 166, the second outlet chamber 184 and the outlet through hole 182 to the outlet 19 and any device connected to the outlet 19, This pressure collection operation can be driven by the difference between the outside atmospheric pressure and the pressure in the device, but not limited to this.

When the internal pressure of the device (not shown) connected to the outlet 19 is greater than the external pressure, the micro-pneumatic power device 1 can perform the pressure reduction or pressure relief operation as shown in Figure 8 The operation method of pressure relief is mainly as described above. The gas transmission volume of the micro fluid control device 1A can be adjusted so that the gas is no longer input into the gas collection chamber 162. At this time, the gas will come from the outlet connected to the outlet 19 The through hole 182 is input into the second outlet chamber 184, so that the volume of the second outlet chamber 184 expands, thereby causing the flexible valve piece 17 to bend and deform upward, and to lie flat against the first outlet chamber 166 on the convex portion structure 167, so that the valve hole 170 of the valve plate 17 is closed, that is, the gas in the second outlet chamber 184 will not flow back into the first outlet chamber 166; and, the second outlet chamber 184 The gas system can flow into the second pressure relief chamber 183 through the communication channel 185, and then the pressure relief hole 181 is used for pressure relief operation; this can be achieved by the one-way gas transmission operation of the micro valve structure 1B The gas in the device connected to the outlet 19 is discharged to reduce the pressure, or completely discharged to complete the pressure relief operation.

As can be seen from the above description, in the micro-pneumatic power device 1 of this case, with the miniaturization of the micro-pneumatic power device 1, its performance changes are shown in Table 3 below:

Table 3

Figure 105128570-A0304-0003

It can be seen from this table that after sampling 25 micro-pneumatic power plant 1 products for the actual experiment, the conclusion obtained from the experiment is that: by gradually reducing the side of the square suspension plate 130 to a size of 14mm to 7.5mm, It was found that as the size of these sides decreases, the functions of yield and maximum output air pressure gradually increase, and the preferred size obtained is 7.5mm to 8.5mm. It is further found that the preferred size is especially at its operating frequency. Between 27K and 29.5KHz , the function of increasing the maximum output air pressure can reach at least 300mmHg. The reasonable presumption of the above phenomenon seems to be that when the side length of the suspension plate 130 decreases, the suspension plate 130 reduces its horizontal deformation when it vibrates vertically, so it can increase the effective use of the kinetic energy in the vertical direction and because the side length decreases Can reduce the error value in the vertical direction during assembly, thereby reducing the collision between the suspension plate 130 and the resonance plate 12 or other assembled components. It involves maintaining a certain distance between the suspension plate 130 and the resonance plate 12, so the yield It can increase and increase its maximum output air pressure at the same time. In addition, when the size of the suspension plate 130 of the piezoelectric actuator 13 is reduced, the piezoelectric actuator 13 can also be made smaller, and the volume of the internal gas flow channel is reduced in the case of not easily tilting during vibration, which is beneficial to The air is pushed or compressed, so it can improve the performance and simultaneously reduce the overall component size. Furthermore, as described above, for the piezoelectric actuator 13 equipped with a larger size of the suspension plate 130 and the piezoelectric ceramic plate 133, due to the poor rigidity of the suspension plate 130, it is easy to distort and deform during vibration, making it easier The collision interference with the resonant plate 12 or other assembled components causes a high proportion of noise. The noise problem is also one of the causes of product defects. Therefore, the defect rate of the large-sized suspension plate 130 and the piezoelectric ceramic plate 133 Higher, therefore, when the size of the suspension plate 130 and the piezoelectric ceramic plate 133 is reduced, in addition to improving performance, reducing noise and other advantages, it can also reduce the defect rate of the product.

In any case, the above-mentioned functions of increasing the yield and increasing the maximum output pressure of the suspension plate 130 by reducing the side length are obtained through experiments, and cannot be directly deduced by theoretical formulas. The speculation is only used as a reference for the rationality of the experiment.

Of course, in this case, the micro-pneumatic power device 1 has a tendency to be thinner. The total thickness of the micro-fluidic control device 1A and the micro-valve device 1B is between 2 mm and 6 mm, so that the micro-gas power device 1 achieves light and comfortable portability. It can be widely used in medical equipment and related equipment.

In summary, the micro-pneumatic power device provided in this case is mainly assembled by the micro-fluid control device and the micro-valve device, so that the gas enters from the air inlet of the micro-fluid control device, and uses piezoelectric actuation The action of the device makes the gas produce a pressure gradient in the designed flow channel and pressure chamber, and then the gas flows at high speed and is transferred to the micro valve device. Then, through the one-way valve design of the micro valve device, the gas is directed in one direction Flow, which can accumulate pressure in any device connected to the outlet; and when the pressure is reduced or relieved, the transmission volume of the micro-fluid control device is adjusted, and the gas can be transmitted from the device connected to the outlet to the micro The second outlet chamber of the valve device is transmitted to the second pressure-relief chamber by the communication flow channel, and then flows out through the pressure-relief hole, so that the gas can be quickly transmitted, and at the same time, the effect of mute can be achieved In addition, the overall volume of the micro gas power device can be reduced and thinned, so that the micro gas power device can achieve the purpose of being portable and comfortable, and can be widely used in medical equipment and related equipment. Therefore, the micro gas power plant in this case has great industrial utilization value, and the application is submitted according to law.

Even though the present invention has been described in detail by the above-mentioned embodiments and can be modified by any person skilled in the art, it can be modified in any way as long as it is attached to the scope of protection of the patent application.

1‧‧‧Miniature pneumatic power device 1A‧‧‧mini fluid control device 1B‧‧‧Mini valve device 1a‧‧‧case 10‧‧‧Base 11‧‧‧ Intake Board 11a‧‧‧The second surface of the air intake plate 11b‧‧‧The first surface of the air intake plate 110‧‧‧Air inlet 111‧‧‧Central recess 112‧‧‧Bus hole 12‧‧‧Resonance 12a‧‧‧Moving part 12b‧‧‧Fixed Department 120‧‧‧Hollow hole 121‧‧‧ First chamber 13‧‧‧ Piezo actuator 130‧‧‧Suspended board 130a‧‧‧The second surface of the suspension board 130b‧‧‧The first surface of the suspension board 130c‧‧‧Convex 130d‧‧‧Central Department 130e‧‧‧Perimeter 131‧‧‧frame 131a‧‧‧Second surface of outer frame 131b‧‧‧The first surface of the outer frame 132‧‧‧Bracket 132a‧‧‧Second surface of the bracket 132b‧‧‧The first surface of the bracket 133‧‧‧ Piezoelectric ceramic board 134, 151‧‧‧ conductive pins 135‧‧‧ void 141、142‧‧‧Insulation sheet 15‧‧‧Conductive sheet 16‧‧‧Gas collector 16a‧‧‧accommodation space 160‧‧‧Surface 161‧‧‧ Reference surface 162‧‧‧Gas collection chamber 163‧‧‧First through hole 164‧‧‧Second through hole 165‧‧‧First pressure relief chamber 166‧‧‧ the first oral cavity 167、181a‧‧‧Convex structure 168‧‧‧Side wall 17‧‧‧Valve 170‧‧‧Bore 171‧‧‧Locating holes 18‧‧‧Export board 180‧‧‧Datum surface 181‧‧‧Pressure relief hole 182‧‧‧Exit through hole 183‧‧‧Second pressure relief chamber 184‧‧‧The second oral cavity 185‧‧‧Connecting the flow channel 187‧‧‧Second surface 188‧‧‧Limit structure 19‧‧‧Export g0‧‧‧ gap (a)~(x)‧‧‧Different implementations of piezoelectric actuators a0, i0, j0, m0, n0, o0, p0, q0, r0‧‧‧ suspension plate a1, i1, m1, n1, o1, p1, q1, r1‧‧‧frame a2, i2, m2, n2, o2, p2, q2, r2 a3, m3, n3, o3, p3, q3, r3 d‧‧‧Vibration displacement of piezoelectric actuator s4, t4, u4, v4, w4, x4 ‧‧‧ convex m2’, n2’, o2’, q2’, r2’‧‧‧‧The bracket is connected to the end of the outer frame m2”, n2”, o2”, q2”, r2”‧‧‧‧The bracket is connected to the end of the suspension board

FIG. 1A is a schematic diagram of the front exploded structure of the micro-pneumatic power device of the preferred embodiment in this case. FIG. 1B is a schematic diagram of the front combined structure of the micro pneumatic power device shown in FIG. 1A. FIG. 2A is a schematic exploded view of the back of the micro pneumatic power device shown in FIG. 1A. FIG. 2B is a schematic diagram of the rear combined structure of the micro pneumatic power device shown in FIG. 1A. FIG. 3A is a schematic diagram of the front combined structure of the piezoelectric actuator of the micro pneumatic power device shown in FIG. 1A. FIG. 3B is a schematic diagram of the back structure of the piezoelectric actuator of the micro pneumatic power device shown in FIG. 1A. FIG. 3C is a schematic cross-sectional structure diagram of the piezoelectric actuator of the micro pneumatic power device shown in FIG. 1A. 4A to 4C are schematic diagrams of various implementations of piezoelectric actuators. FIGS. 5A to 5E are partial operation schematic diagrams of the micro-fluid control device of the micro-pneumatic power device shown in FIG. 1A. FIG. 6A is a schematic diagram of the pressure-collecting actuation of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in FIG. 1A. FIG. 6B is a schematic diagram of the pressure relief operation of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in FIG. 1A. 7A to 7E are schematic diagrams of the pressure-gathering operation of the micro-pneumatic power device shown in FIG. 1A. Fig. 8 is a schematic diagram of the depressurization or depressurization operation of the micro pneumatic power device shown in Fig. 1A.

1A‧‧‧mini fluid control device

11‧‧‧ Intake Board

110‧‧‧Air inlet

111‧‧‧Central recess

112‧‧‧Bus hole

12‧‧‧Resonance

12a‧‧‧Moving part

12b‧‧‧Fixed Department

120‧‧‧Hollow hole

13‧‧‧ Piezo actuator

130c‧‧‧Convex

141、142‧‧‧Insulation sheet

15‧‧‧Conductive sheet

g0‧‧‧ gap

Claims (16)

  1. A micro-fluid control device, suitable for a micro-pneumatic power device, includes: an air inlet plate having at least one air inlet hole, at least one confluence row hole, and a central recess forming a confluence chamber, the at least one air inlet hole For introducing gas, the busbar hole corresponds to the air inlet hole, and guides the gas of the air inlet hole to the confluence chamber formed by the central concave portion; a resonant sheet with a hollow hole corresponding to the air inlet plate The confluence chamber; and a piezoelectric actuator having: a suspension plate having a length between 7.5mm and 8.5mm, a width between 7.5mm and 8.5mm, and 0.1 Thickness between mm and 0.4mm; an outer frame with at least one bracket connected between the suspension plate and the outer frame; and a piezoelectric ceramic plate attached to a first surface of the suspension plate, And the piezoelectric ceramic plate has a side length not greater than the side length of the suspension plate, has a length between 7.5 mm to 8.5 mm, a width between 7.5 mm to 8.5 mm, and a width between 0.05 mm to 0.3 mm The thickness of the piezoelectric ceramic plate is between 0.88 times and 1.13 times the ratio of the length and the width of the piezoelectric ceramic plate; wherein the piezoelectric actuator, the resonant plate and the air intake plate are arranged one above the other in sequence Positioning, and there is a gap between the resonant plate and the piezoelectric actuator to form a first chamber, so that when the piezoelectric actuator is driven, the gas passes through the at least one inlet hole of the inlet plate Lead in, gather at the central recess through the at least one busbar hole, and then flow through the hollow hole of the resonant sheet to enter the first cavity, and then pass between the at least one bracket of the piezoelectric actuator A gap is transmitted downwards to continuously push out the gas.
  2. The micro-fluid control device as described in item 1 of the patent scope, wherein the micro-fluid control device has an operating frequency of 28k, an operating voltage of ±15V, and a maximum output air pressure of at least 300 mmHg.
  3. The micro-fluid control device as described in item 1 of the patent application, wherein the thickness of the suspension plate is 0.27 mm.
  4. The micro-fluid control device as described in item 1 of the patent application range, wherein the suspension plate further includes a convex portion disposed on a second surface of the suspension plate, and the height thereof is between 0.02 mm and 0.08 mm.
  5. The micro-fluid control device as described in item 4 of the patent application scope, wherein the height of the convex portion is 0.03 mm.
  6. The micro-fluid control device as described in item 4 of the patent application, wherein the convex portion is a circular convex structure with a diameter of 0.55 times the minimum side length of the suspension plate.
  7. The micro-fluid control device as described in item 1 of the patent application scope, wherein the air inlet plate is made of a stainless steel material, and the thickness is between 0.4 mm and 0.6 mm.
  8. The micro-fluid control device as described in item 7 of the patent application, wherein the thickness of the air inlet plate is 0.5 mm.
  9. The micro-fluid control device as described in item 1 of the patent application range, wherein the resonance plate is made of a copper material, and the thickness is between 0.03 mm and 0.08 mm.
  10. The micro-fluid control device as described in item 10 of the patent application, wherein the thickness of the resonant sheet is 0.05 mm.
  11. The micro-fluid control device as described in item 1 of the patent application scope further includes at least one insulating sheet and a conductive sheet, and the at least one insulating sheet and the conductive sheet are sequentially disposed under the piezoelectric actuator.
  12. The micro fluid control device as described in item 1 of the patent application scope, wherein the outer frame of the piezoelectric actuator is made of a stainless steel material, and the thickness is between 0.2 mm and 0.4 mm.
  13. The micro fluid control device as described in item 12 of the patent application range, wherein the thickness of the outer frame of the piezoelectric actuator is 0.3 mm.
  14. The micro-fluid control device as described in item 1 of the patent application scope, wherein both ends of the bracket of the piezoelectric actuator are connected to the outer frame, and one end is connected to the suspension plate.
  15. A miniature fluid control device, suitable for a miniature pneumatic power device, including: an air inlet plate; a resonance plate; and a piezoelectric actuator, having a suspension plate and an outer frame, the suspension plate and the outer frame Is connected by at least one bracket, and a piezoelectric ceramic plate is attached to a first surface of the suspension plate, the suspension plate has a thickness of 7.5 mm A length between 8.5mm, a width between 7.5mm and 8.5mm, and a thickness between 0.1mm and 0.4mm, and the piezoelectric ceramic plate has a side length not greater than the side length of the suspension plate, Having a length between 7.5mm to 8.5mm, a width between 7.5mm to 8.5mm, and a thickness between 0.05mm to 0.3mm, the ratio of the length of the piezoelectric ceramic plate to the width 0.88 times to 1.13 times; wherein, the intake plate, the resonant plate and the piezoelectric actuator described above are sequentially stacked and positioned correspondingly, and there is a gap between the resonant plate and the piezoelectric actuator A first chamber is formed, and when the piezoelectric actuator is driven, gas enters from the air inlet plate and flows through the resonant sheet to enter the first chamber and then transmit the gas.
  16. The micro-fluid control device according to item 15 of the patent application scope, wherein the air inlet plate has at least one air inlet hole, at least one busbar hole and a central recess, the at least one air inlet hole is used for introducing gas, and the busbar The hole corresponds to the air inlet hole and guides the gas of the air inlet hole to the central concave portion; and the resonant sheet has a hollow hole corresponding to the central concave portion of the air inlet plate.
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US15/392,018 US9976673B2 (en) 2016-01-29 2016-12-28 Miniature fluid control device
EP16207248.2A EP3203070A1 (en) 2016-01-29 2016-12-29 Miniature fluid control device
KR1020160183866A KR20170091000A (en) 2016-01-29 2016-12-30 Miniature fluid control device
JP2017010017A JP2017133507A (en) 2016-01-29 2017-01-24 Compact fluid controller
KR1020190083678A KR20190095907A (en) 2016-01-29 2019-07-11 Miniature fluid control device

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TW105213587U TWM539562U (en) 2016-01-29 2016-09-05 Piezoelectric actuator
TW105128579A TWI690656B (en) 2016-01-29 2016-09-05 Actuator
TW105213580U TWM537174U (en) 2016-01-29 2016-09-05 Miniature fluid control device
TW105213586U TWM540196U (en) 2016-01-29 2016-09-05 Piezoelectric actuator
TW105213581U TWM537171U (en) 2016-01-29 2016-09-05 Miniature fluid control device
TW105128584A TWI602996B (en) 2016-01-29 2016-09-05 Actuator
TW105128570A TWI681119B (en) 2016-01-29 2016-09-05 Micro-fluid control device
TW105213579U TWM539009U (en) 2016-01-29 2016-09-05 Miniature pneumatic driving device
TW105213584U TWM535747U (en) 2016-01-29 2016-09-05 Miniature pneumatic driving device
TW105213590U TWM537586U (en) 2016-01-29 2016-09-05 Piezoelectric actuator
TW105128582A TWI696757B (en) 2016-01-29 2016-09-05 Micro-fluid control device
TW105128567A TWI676738B (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105128580A TW201727064A (en) 2016-01-29 2016-09-05 Actuator
TW105128568A TWI679346B (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105213593U TWM538546U (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105213591U TWM535746U (en) 2016-01-29 2016-09-05 Piezoelectric actuator
TW105128583A TWI619276B (en) 2016-01-29 2016-09-05 Actuator
TW105213589U TWM537172U (en) 2016-01-29 2016-09-05 Miniature fluid control device
TW105128569A TWI689663B (en) 2016-01-29 2016-09-05 Micro-fluid control device
TW105213585U TWM535770U (en) 2016-01-29 2016-09-05 Miniature pneumatic driving device
TW105213588U TWM537162U (en) 2016-01-29 2016-09-05 Miniature fluid control device
TW105128578A TWI626373B (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105128581A TWI611107B (en) 2016-01-29 2016-09-05 Micro-fluid control device
TW105128577A TWI633239B (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105213578U TWM539008U (en) 2016-01-29 2016-09-05 Miniature pneumatic driving device
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TW105213586U TWM540196U (en) 2016-01-29 2016-09-05 Piezoelectric actuator
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TW105213590U TWM537586U (en) 2016-01-29 2016-09-05 Piezoelectric actuator
TW105128582A TWI696757B (en) 2016-01-29 2016-09-05 Micro-fluid control device
TW105128567A TWI676738B (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105128580A TW201727064A (en) 2016-01-29 2016-09-05 Actuator
TW105128568A TWI679346B (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105213593U TWM538546U (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105213591U TWM535746U (en) 2016-01-29 2016-09-05 Piezoelectric actuator
TW105128583A TWI619276B (en) 2016-01-29 2016-09-05 Actuator
TW105213589U TWM537172U (en) 2016-01-29 2016-09-05 Miniature fluid control device
TW105128569A TWI689663B (en) 2016-01-29 2016-09-05 Micro-fluid control device
TW105213585U TWM535770U (en) 2016-01-29 2016-09-05 Miniature pneumatic driving device
TW105213588U TWM537162U (en) 2016-01-29 2016-09-05 Miniature fluid control device
TW105128578A TWI626373B (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105128581A TWI611107B (en) 2016-01-29 2016-09-05 Micro-fluid control device
TW105128577A TWI633239B (en) 2016-01-29 2016-09-05 Micro-gas pressure driving apparatus
TW105213578U TWM539008U (en) 2016-01-29 2016-09-05 Miniature pneumatic driving device
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