TWM537171U - Miniature fluid control device - Google Patents

Description

Microfluidic control device

This case relates to a microfluidic control device suitable for a miniature ultra-thin and silent micro-pneumatic power device.

At present, in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization. Among them, products such as micro-pumps, sprayers, inkjet heads, industrial printing devices, etc. The fluid transport structure is its key technology, which is how to break through its technical bottleneck with innovative structure and be an important part of development.

For example, in the pharmaceutical industry, many instruments or equipment that require pneumatic power drive are usually used with conventional motors and pneumatic valves to achieve their gas delivery. However, limited by the limitations of the structure of the conventional motor and the gas valve, it is difficult to reduce the volume of such an instrument, so that the volume of the entire device cannot be reduced, that is, it is difficult to achieve the goal of thinning, and therefore cannot be installed. The portable device is used with or in conjunction with a portable device, and the convenience is insufficient. In addition, these conventional motors and gas valves generate noise when they are actuated, causing the user to be anxious, resulting in inconvenience and discomfort in use.

Therefore, how to develop a microfluidic control device that can improve the above-mentioned conventional technical defects, can make the instrument or device using the conventional microfluidic control device small, miniaturized and muted, thereby achieving a portable and portable purpose. It is an urgent problem to be solved.

The main purpose of the present invention is to provide a microfluidic control device suitable for use in a portable or wearable instrument or device. The gas fluctuation generated by the high frequency operation of the piezoelectric ceramic plate generates a pressure gradient in the designed flow channel. The gas is flowed at a high speed, and the gas is transmitted from the suction end to the discharge end through the difference in the impedance of the flow path in and out of the flow path. The apparatus or equipment using the micro fluid control device of the prior art has a large volume and is difficult to be thinned. Unable to achieve portable purposes, as well as lack of noise.

In order to achieve the above object, a broader aspect of the present invention provides a microfluidic control device for a micro pneumatic power device including an air inlet plate, a resonance plate and a piezoelectric actuator. Having at least one air inlet hole, at least one bus bar hole, and a central recess forming a confluence chamber, the at least one air inlet hole for introducing a gas, the bus bar hole corresponding to the air inlet hole, and guiding the air inlet hole The gas merges to the confluence chamber formed by the central recess, the resonator piece has a hollow hole corresponding to the confluence chamber of the air inlet plate, and the piezoelectric actuator has a suspension plate, an outer frame and a pressure An electric ceramic plate having a length of between 7.5 mm and 12 mm, a width of between 7.5 mm and 12 mm, and a thickness of between 0.1 mm and 0.4 mm, the outer frame having at least one bracket, The connection is disposed between the suspension plate and the outer frame, and the piezoelectric ceramic plate is attached to the first surface of the suspension plate, and has a side length not greater than the side length of the suspension plate, and has a length of 7.5 mm to 12 mm. Between 7.5mm and 12mm in length And a thickness between 0.05 mm and 0.3 mm, the length of the piezoelectric ceramic plate and the width ratio being between 0.625 and 1.6 times, wherein the piezoelectric actuator, the resonant sheet, and the The air inlet plate is sequentially positioned corresponding to the overlapping arrangement, and a gap is formed between the resonant piece and the piezoelectric actuator to form a first chamber, so that when the piezoelectric actuator is driven, the gas is driven by the Introducing at least one air inlet hole of the gas plate, collecting into the central concave portion through the at least one bus bar hole, and flowing through the hollow hole of the resonance piece to enter the first cavity, and then being actuated by the piezoelectric A gap between the at least one bracket of the device is transmitted downward to continuously push out the gas.

In order to achieve the above object, another broad aspect of the present invention provides a microfluidic control device for a micro pneumatic power device including an air inlet plate, a resonance plate and a piezoelectric actuator, wherein the above The air inlet plate, the resonant plate and the piezoelectric actuator are sequentially disposed correspondingly to the stack, and a gap is formed between the resonant plate and the piezoelectric actuator to form a first chamber, and the piezoelectric actuator is actuated. When the device is driven, gas enters through the air plate and flows through the resonator to enter the first chamber to transport gas.

Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and is not to be construed as a limitation.

The micro-pneumatic power unit 1 of this case can be applied to industries such as medical technology, energy, computer technology or printing, and is used for conveying gas, but not limited thereto. Please refer to FIG. 1A, FIG. 1B, FIG. 2A, FIG. 2B and FIGS. 7A to 7E. FIG. 1A is a front exploded view of the micro-pneumatic power device of the preferred embodiment of the present invention, and FIG. 1B is the first embodiment. FIG. 2A is a schematic view showing the structure of the front side of the micro-pneumatic power unit shown in FIG. 1A, and FIG. 2B is a view of the micro-pneumatic power unit shown in FIG. 1A. FIG. 7A to FIG. 7E are schematic diagrams showing the collective pressure operation of the micro pneumatic power device shown in FIG. 1A. As shown in FIGS. 1A and 2A, the micro-pneumatic power unit 1 of the present invention is composed of a micro fluid control device 1A and a micro-valve device 1B, wherein the micro-fluid control device 1A has a housing 1a and piezoelectric actuation. The structure of the housing 13 , the insulating sheets 141 , 142 , and the conductive sheet 15 , wherein the housing 1 a includes a gas collecting plate 16 and a base 10 , and the base 10 includes the air inlet plate 11 and the resonant plate 12 , but not limited thereto. The piezoelectric actuator 13 is provided corresponding to the resonance piece 12, and the air intake plate 11, the resonance piece 12, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, the other insulating sheet 142, and the gas collecting plate are provided. 16 and so on are sequentially stacked, and the piezoelectric actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132, and a piezoelectric ceramic plate 133; and the micro valve device 1B includes A valve piece 17 and an outlet plate 18 are not limited thereto. In this embodiment, as shown in FIG. 1A, the gas collecting plate 16 is not only a single plate structure, but also a frame structure having a side wall 168 at the periphery, and the gas collecting plate 16 has a diameter of 9 mm to 17 mm. The length between, the width between 9mm and 17mm, and the length and the width ratio are between 0.53 and 1.88 times, and the side wall 168 formed by the circumference and the bottom plate together define a volume a space 16a is provided for the piezoelectric actuator 13 to be disposed in the accommodating space 16a. Therefore, when the micro-pneumatic power device 1 of the present invention is assembled, the front schematic view is as shown in FIG. 1B, and 7A to 7E, it can be seen that the microfluidic control device 1A is assembled corresponding to the microvalve device 1B, that is, the valve piece 17 and the outlet plate 18 of the microvalve device 1B are sequentially stacked and positioned on the micro. The gas collecting plate 16 of the fluid control device 1A is formed. The assembled rear view shows the pressure relief through hole 181 and the outlet 19 on the outlet plate 18. The outlet 19 is connected to a device (not shown), and the pressure relief through hole 181 is provided for the micro valve device. The gas in 1B is discharged to achieve the effect of pressure relief. By the assembly of the microfluidic control device 1A and the microvalve device 1B, gas is introduced from at least one of the intake holes 110 of the air intake plate 11 of the microfluidic control device 1A, and transmitted through the piezoelectric actuator 13 Actuating, and continuing to transmit through a plurality of pressure chambers (not shown), the gas can be unidirectionally flowed in the microvalve device 1B, and the pressure is accumulated in a device connected to the outlet end of the microvalve device 1B. (not shown), and when pressure relief is required, the output of the microfluidic control device 1A is adjusted so that the gas is discharged through the pressure relief through hole 181 on the outlet plate 18 of the microvalve device 1B for unloading. Pressure.

Please refer to FIG. 1A and FIG. 2A. As shown in FIG. 1A, the air inlet plate 11 of the micro fluid control device 1A has a first surface 11b, a second surface 11a and at least one air inlet hole 110. In the example, the number of the air inlet holes 110 is four, but not limited thereto, which is through the first surface 11b and the second surface 11a of the air inlet plate 11, and is mainly used for supplying gas to the atmospheric pressure from outside the device. The action flows from the at least one intake port 110 into the microfluidic control device 1A. And as shown in FIG. 2A, the first surface 11b of the air inlet plate 11 is visible, and has at least one bus bar hole 112 for the at least one air inlet hole 110 of the second surface 11a of the air inlet plate 11. Corresponding settings. In the present embodiment, the number of the bus bar holes 112 corresponds to the air intake holes 110, and the number thereof is four, but not limited thereto, wherein the central AC portion of the bus bar holes 112 has a central recess 111. And the central recess 111 communicates with the bus bar hole 112, whereby the gas entering the bus bar hole 112 from the air inlet hole 110 can be guided and concentrated to be transferred to the central recess 111. In this embodiment, the air inlet plate 11 has an integrally formed air inlet hole 110, a bus bar hole 112 and a central recess portion 111, and a confluence chamber corresponding to a confluent gas is formed at the central recess portion 111 for Gas is temporarily stored. In some embodiments, the material of the air inlet plate 11 may be, but not limited to, a stainless steel material, and the thickness thereof is between 0.4 mm and 0.6 mm, and the preferred value is 0.5 mm. Not limited to this. In other embodiments, the depth of the confluence chamber formed by the central recess 111 is the same as the depth of the bus bar holes 112, and the preferred values of the depths of the confluence chamber and the bus bar hole 112 are It is between 0.2mm and 0.3mm, but not limited to this. The resonator piece 12 is made of a flexible material, but not limited thereto, and has a hollow hole 120 in the resonator piece 12, which is disposed corresponding to the central recess 111 of the first surface 11b of the air inlet plate 11. To allow gas to circulate. In other embodiments, the resonant plate 12 may be made of a copper material, but not limited thereto, and the thickness thereof is between 0.03 mm and 0.08 mm, and the preferred value is 0.05 mm. Not limited to this.

Please also refer to FIG. 3A, FIG. 3B and FIG. 3C, which are schematic diagrams of the front structure, the back structure and the cross-sectional structure of the piezoelectric actuator of the micro-pneumatic power device shown in FIG. 1A, respectively. The actuator 13 is assembled by a suspension plate 130, an outer frame 131, at least one bracket 132, and a piezoelectric ceramic plate 133, wherein the piezoelectric ceramic plate 133 is attached to the first suspension plate 130. The surface 130b is configured to apply a voltage to generate a deformation to drive the suspension plate 130 to bend and vibrate. The suspension plate 130 has a central portion 130d and a peripheral portion 130e. When the piezoelectric ceramic plate 133 is driven by a voltage, the suspension plate 130 can be driven by the central portion. 130d is bent to the outer peripheral portion 130e, and the at least one bracket 132 is connected between the suspension plate 130 and the outer frame 131. In the embodiment, the bracket 132 is connected between the suspension plate 130 and the outer frame 131. The two ends are respectively connected to the outer frame 131 and the suspension plate 130 to provide elastic support, and further have at least one gap 135 between the bracket 132, the suspension plate 130 and the outer frame 131 for gas circulation, and the Suspension plate 130, outer frame 1 31 and the type and number of brackets 132 have a variety of variations. In addition, the outer frame 131 is disposed on the outer side of the suspension plate 130, and has an outwardly protruding conductive pin 134 for power connection, but is not limited thereto. In this embodiment, the suspension plate 130 is a stepped surface structure, that is, the second surface 130a of the suspension plate 130 further has a convex portion 130c, which may be, but is not limited to, a circular protrusion. The height of the convex portion 130c is between 0.02 mm and 0.08 mm, and preferably 0.03 mm, and the diameter is 0.55 times the minimum side length of the suspension plate 130, but is not limited thereto. Please refer to FIG. 3A and FIG. 3C at the same time. The surface of the convex portion 130c of the suspension plate 130 is coplanar with the second surface 131a of the outer frame 131, and the second surface 130a of the suspension plate 130 and the second surface of the bracket 132 The surface 132a is also coplanar, and the convex portion 130c of the suspension plate 130 and the second surface 131a of the outer frame 131 and the second surface 130a of the suspension plate 130 and the second surface 132a of the bracket 132 have a specific depth. As for the first surface 130b of the suspension plate 130, as shown in FIGS. 3B and 3C, the first surface 131b of the outer frame 131 and the first surface 132b of the bracket 132 are flat and planar, and the piezoelectric The ceramic plate 133 is attached to the first surface 130b of the flat suspension plate 130. In other embodiments, the shape of the suspension plate 130 may also be a double-sided flat plate-like square structure, and is not limited thereto, and may be changed according to actual application conditions. In some embodiments, the suspension plate 130, the bracket 132, and the outer frame 131 may be integrally formed, and may be formed of a metal plate, such as stainless steel, but not limited thereto. In some embodiments, the suspension plate 130 has a thickness of between 0.1 mm and 0.4 mm, and preferably has a thickness of 0.27 mm, and the suspension plate 130 has a length of between 7.5 mm and 12 mm. A preferred value may be from 7.5 mm to 8.5 mm, a width between 7.5 mm and 12 mm, and a preferred value may be from 7.5 mm to 8.5 mm, but not limited thereto. The thickness of the outer frame 131 is between 0.2 mm and 0.4 mm, and the preferred value is 0.3 mm, but not limited thereto.

In still other embodiments, the thickness of the piezoelectric ceramic plate 133 is between 0.05 mm and 0.3 mm, and preferably 0.10 mm, and the piezoelectric ceramic plate 133 has no more than the suspension plate 130. The side length of the side has a length of between 7.5 mm and 12 mm, and preferably has a value of 7.5 mm to 8.5 mm, a width of between 7.5 mm and 12 mm, and a preferred value of 7.5 mm to 7.5 mm. 8.5mm, the other length and width ratio is preferably between 0.625 times and 1.6 times, but not limited to this. In other embodiments, the side length of the piezoelectric ceramic plate 133 may be smaller than the side length of the suspension plate 130, and is also designed as a square plate structure corresponding to the suspension plate 130, but is not limited thereto.

In the related embodiment of the micro-pneumatic power unit 1 of the present invention, the piezoelectric actuator 13 uses the square suspension plate 130 because it is compared with the circular suspension plate (as shown in Fig. 4A (j)~( l) The design of the circular suspension plate j0), the structure of the square suspension plate 130 obviously has the advantage of power saving, and the comparison of the power consumption is as shown in the following Table 1:

Table I         <TABLE border="1" borderColor="#000000" width="_0001"><TBODY><tr><td> Type and size of the suspension plate of the piezoelectric actuator</td><td> Operating frequency </td><td> Power consumption</td></tr><tr><td> Square (10mm side length) </td><td> 18kHz </td><td> 1.1W </td> </tr><tr><td> Circle (10mm diameter) </td><td> 28kHz </td><td> 1.5W </td></tr><tr><td> Square (9mm Side length) </td><td> 22kHz </td><td> 1.3W </td></tr><tr><td> Round (9mm diameter) </td><td> 34kHz </ Td><td> 2W </td></tr><tr><td> Square (8mm side length) </td><td> 27kHz </td><td> 1.5W </td></tr ><tr><td> Circle (8mm diameter) </td><td> 42kHz </td><td> 2.5W </td></tr></TBODY></TABLE>

Therefore, it is known from the above table that the piezoelectric actuator 13 having a square-shaped suspension plate 130 having a side length (8 mm to 10 mm) is smaller than the diameter of the circular suspension plate j0 (8 mm to 10 mm). Piezoelectric actuators are more energy efficient. The power consumption comparison data obtained by the above experiment can be presumed to be due to the fact that the power consumption of the capacitive load operating at the resonant frequency increases with the increase of the frequency, and is also squared by the side length. The resonant frequency of the designed suspension plate 130 is obviously lower than that of the same circular suspension plate j0, so the relative power consumption is also significantly lower, that is, the suspension plate 130 of the square design used in this case is compared with the circular suspension plate j0. Design, it has the advantage of power saving, especially for wearable devices, saving power is a very important design focus. However, in any case, the power saving effect of the above-mentioned square-designed suspension plate is obtained by experiments, and can not be directly derived from the theoretical formula. The speculation of the power-saving reason is only a reference for experimental rationality.

Please refer to FIGS. 4A, 4B, and 4C, which are schematic diagrams of various embodiments of the piezoelectric actuator. As shown in the figure, it can be seen that the suspension plate 130, the outer frame 131 and the bracket 132 of the piezoelectric actuator 13 can have various types, and at least (a) to (l) shown in FIG. 4A. In a plurality of aspects, for example, the frame a1 and the suspension plate a0 of the (a) aspect are square structures, and the two are connected by a plurality of brackets a2, for example: 8 but not For this reason, a gap a3 is provided between the bracket a2 and the suspension plate a0 and the outer frame a1 for gas circulation. In another (i) aspect, the outer frame i1 and the suspension plate i0 are also square structures, but only two brackets i2 are connected; further, there is a further related art, such as 4B. As shown in Fig. 4C, the suspension plate of the piezoelectric actuator 13 may have various forms such as (m) to (r) shown in Fig. 4B and (s) to (x) shown in Fig. 4C. In these aspects, the suspension plate 130 and the outer frame 131 are both square structures. For example, the (m) aspect outer frame m1 and the suspension plate m0 are both square structures, and the two are connected by a plurality of brackets m2, for example, four, but not limited thereto. And a gap m3 is provided between the bracket m2 and the suspension plate m0 and the outer frame m1 for fluid circulation. In this embodiment, the bracket m2 connected between the outer frame m1 and the suspension plate m0 may be, but is not limited to, a plate connecting portion m2, and the plate connecting portion m2 has both end portions m2' and m2", One end portion m2' is connected to the outer frame m1, and the other end portion m2" is connected to the suspension plate m0, and the two end portions m2' and m2" are corresponding to each other and are disposed on the same axis. In the same manner, the frame n1, the suspension plate n0, and the bracket n2 connected between the outer frame n1 and the suspension plate n0, and the gap n3 for fluid circulation, and the bracket n2 may be but not limited to one. The board connecting portion n2 and the board connecting portion n2 have both end portions n2' and n2", and the end portion n2' is connected to the outer frame n1, and the other end portion n2" is connected to the floating plate n0, but in the embodiment. The board connecting portion n2 is connected to the outer frame n1 and the suspension plate n0 at an oblique angle of 0 to 45 degrees, in other words, and the both end portions n2' and n2" are not disposed on the same horizontal axis. It is a setting relationship of mutual misalignment. In the (o) aspect, the outer frame o1, the suspension plate o0, and the support o2 connected between the outer frame o1 and the suspension plate o0, and the space o3 for fluid circulation are similar to the foregoing embodiment, wherein The design of the board connecting portion o2 as the bracket is slightly different from the (m) aspect. However, in this aspect, the two end portions o2' and o2" of the board connecting portion o2 are still corresponding to each other and are disposed. On the same axis.

Further, in the (p) aspect, the structure also has the outer frame p1, the suspension plate p0, the support p2 connected between the outer frame p1 and the suspension plate p0, and the space p3 through which the fluid flows, and the like. The plate connecting portion p2 as a bracket further has a structure such as a suspension plate connecting portion p20, a beam portion p21, and an outer frame connecting portion p22, wherein the beam portion p21 is disposed in a gap p3 between the suspension plate p0 and the outer frame p1, and The direction of the arrangement is parallel to the outer frame p1 and the suspension plate p0, and the suspension plate connection portion p20 is connected between the beam portion p21 and the suspension plate p0, and the outer frame connection portion p22 is connected to the beam portion p21 and the outer frame p1. The suspension plate connecting portion p20 and the outer frame connecting portion p22 also correspond to each other and are disposed on the same axis.

In the (q) aspect, the outer frame q1, the suspension plate q0, the support q2 connected between the outer frame q1 and the suspension plate q0, and the space q3 for fluid circulation are all the same as (m), (o) above. The pattern is similar, wherein the design of the plate joint q2 as the support is slightly different from the (m) and (o) modes. In this aspect, the suspension plate q0 is a square shape, and Each side has a two-plate connecting portion q2 connected to the outer frame q1, and the two end portions q2' and q2" of each of the plate connecting portions q2 are also corresponding to each other and disposed on the same axis. However, In the embodiment, the frame r1, the suspension plate r0, the bracket r2, and the gap r3 are also provided, and the bracket r2 may be but not limited to a board connecting portion r2. In this embodiment, the board connecting portion r2 The structure is a V-shaped structure. In other words, the board connecting portion r2 is also connected to the outer frame r1 and the suspension plate r0 at an oblique angle of 0 to 45 degrees. Therefore, each board connecting portion r2 has one end portion r2" and The suspension plate r0 is connected, and has two end portions r2' connected to the outer frame r1, that is, the two end portions b2' and the end portion b2" are not disposed on the same horizontal axis.

Continued as shown in Fig. 4C, the appearance patterns of the (s) to (x) states substantially correspond to the types of (m) to (r) shown in Fig. 4B, but only In the ~(x) aspect, the suspension plate 130 of each piezoelectric actuator 13 is provided with a convex portion 130c, that is, s4, t4, u4, v4, w4, x4 and the like as shown in the figure. And whether it is the (m)~(r) aspect or the (s)~(x) aspect, the suspension plate 130 is designed in a square shape to achieve the aforementioned low power consumption effect; It can be seen that the suspension plate 130 is a double-sided flat plate structure or a stepped structure having a convex portion on the surface, which is within the protection range of the present case and is connected between the suspension plate 130 and the outer frame 131. The type and number of the brackets 132 can also be changed according to the actual application situation, and is not limited to the manner shown in the present case. As mentioned above, the suspension plate 130, the outer frame 131 and the bracket 132 may be integrally formed, but not limited thereto, and the manufacturing method may be conventional processing, or yellow etching, or laser. Processing, or electroforming, or electrical discharge machining, etc., are not limited to this.

In addition, referring to FIG. 1A and FIG. 2A , the microfluidic control device 1A further includes an insulating sheet 141 , a conductive sheet 15 and another insulating sheet 142 which are sequentially disposed under the piezoelectric actuator 13 . The shape substantially corresponds to the shape of the outer frame of the piezoelectric actuator 13. In some embodiments, the insulating sheets 141, 142 are made of an insulating material, such as plastic, but not limited thereto for insulation; in other embodiments, the conductive sheet 15 is It is made of a conductive material, such as metal, but not limited to it for electrical conduction. Moreover, in the embodiment, a conductive pin 151 may be disposed on the conductive sheet 15 for electrical conduction.

Please refer to FIG. 1A and FIG. 5A to FIG. 5E simultaneously, wherein FIG. 5A to FIG. 5E are partial actuation diagrams of the micro fluid control device 1A of the micro pneumatic power device shown in FIG. 1A. First, as shown in FIG. 5A, it can be seen that the microfluidic control device 1A is sequentially stacked by the air inlet plate 11, the resonance plate 12, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, and the other insulating sheet 142. In the embodiment, the gap g0 between the periphery of the frame 131 and the piezoelectric actuator 13 is filled with a material, such as a conductive paste, but not limited thereto. The depth of the gap g0 can be maintained between the resonator piece 12 and the convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13, thereby guiding the airflow to flow more rapidly, and the convex portion 130c and the resonance due to the suspension plate 130 The sheets 12 are maintained at an appropriate distance to reduce contact interference with each other, causing noise generation to be reduced.

Referring to FIG. 5A to FIG. 5E , as shown in the figure, when the air inlet plate 11 , the resonant plate 12 and the piezoelectric actuator 13 are sequentially assembled, the hollow hole 120 of the resonant piece 12 can be The upper air intake plates 11 together form a chamber for the confluent gas, and a first chamber 121 is further formed between the resonant plate 12 and the piezoelectric actuator 13 for temporarily storing the gas, and the first chamber 121 Passing through the hollow hole 120 of the resonator piece 12 to communicate with the chamber at the central recess 111 of the first surface 11b of the air inlet plate 11, and the two sides of the first chamber 121 are supported by the bracket 132 of the piezoelectric actuator 13. The gap 135 is in communication with the microvalve device 1B disposed thereunder.

When the microfluidic control device 1A of the micropneumatic power unit 1 is actuated, the piezoelectric actuator 13 is mainly actuated by the voltage and the reciprocating vibration in the vertical direction is performed with the bracket 132 as a fulcrum. As shown in FIG. 5B, when the piezoelectric actuator 13 is vibrated downward by voltage actuation, since the resonance piece 12 is a light and thin sheet-like structure, when the piezoelectric actuator 13 vibrates, The resonance piece 12 also resonates to perform vertical reciprocating vibration, that is, the portion of the resonance piece 12 corresponding to the central concave portion 111 of the air inlet plate 11 is also flexurally deformed, that is, the resonance piece 12 corresponds to the The portion of the central recess 111 of the air inlet plate 11 is the movable portion 12a of the resonator piece 12, so that when the piezoelectric actuator 13 is bent downward, the movable portion 12a of the resonator piece 12 is brought in by the fluid. And pushing and the vibration of the piezoelectric actuator 13, and as the piezoelectric actuator 13 is deformed downward by the vibration, the gas enters through at least one air inlet hole 110 in the air inlet plate 11, and passes through the first At least one bus bar hole 112 of a surface 11b is collected at a central recess 111 at the center thereof, and flows downward into the first chamber 121 via a central hole 120 corresponding to the central recess 111 on the resonator piece 12, and thereafter Due to the vibration of the piezoelectric actuator 13, the resonator 12 will also resonate and be vertical. The reciprocating vibration, as shown in Fig. 5C, at this time, the movable portion 12a of the resonator piece 12 is also vibrated downward, and is attached to the convex portion 130c of the suspension plate 130 of the piezoelectric actuator 13 to be suspended. The distance between the area other than the convex portion 130c of the plate 130 and the converging portion 12b on both sides of the resonator piece 12 does not become small, and is deformed by the resonance piece 12 to compress the first chamber 121. The volume is closed, and the intermediate flow space of the first chamber 121 is closed, so that the gas inside thereof is pushed to flow to both sides, and then flows downward through the gap 135 between the brackets 132 of the piezoelectric actuator 13. As for the 5Dth diagram, the movable portion 12a of the resonator piece 12 is deformed by the bending vibration to return to the initial position, and the subsequent piezoelectric actuator 13 is driven by the voltage to vibrate upward, so that the first chamber 121 is also pressed. The volume, and at this time, the piezoelectric actuator 13 is lifted up, the displacement of the lift can be d, so that the gas in the first chamber 121 will flow toward both sides, thereby driving the gas continuously from the air inlet plate. At least one air inlet hole 110 in the 11 enters and flows into the chamber formed by the central recess 111. As shown in FIG. 5E, the resonant piece 12 is resonated upward by the vibration of the piezoelectric actuator 13 rising upward. The movable portion 12a of the resonator piece 12 is also in an upward position, so that the gas in the central recess portion 111 flows into the first chamber 121 from the central hole 120 of the resonator piece 12, and passes through the bracket 132 of the piezoelectric actuator 13. The gap 135 is passed down through the microfluidic control device 1A. It can be seen from this embodiment that when the resonant plate 12 performs vertical reciprocating vibration, it can be increased by the gap g0 between it and the piezoelectric actuator 13 to increase the maximum distance of its vertical displacement, in other words, in the two The gap g0 between the structures can cause the resonance piece 12 to generate a larger vertical displacement when resonating, wherein the piezoelectric actuator has a vibration displacement d, and the difference from the gap g0 is x, that is, x= G0-d, tested when x≦0um, is noisy; when x=1 to 5um, the maximum output pressure of the micro pneumatic power unit 1 can reach 350mmHg; when x=5 to 10um, the maximum output pressure of the micro pneumatic power unit 1 It can reach 250mmHg; when x=10~15um, the maximum output pressure of the micro-pneumatic power unit 1 can reach 150mmHg, and the numerical relationship is shown in the second list below. The above values are between 17K and 20K operating frequency and between ±10V and ±20V operating voltage. In this way, a pressure gradient is generated in the flow path design of the microfluidic control device 1A, so that the gas flows at a high speed, and the impedance difference between the flow path and the flow direction is transmitted, and the gas is transmitted from the suction end to the discharge end, and the gas is discharged at the discharge end. In this state, there is still the ability to continuously introduce gas and achieve the effect of mute. (Table II )         <TABLE border="1" borderColor="#000000" width="_0002"><TBODY><tr><td> Test item times</td><td> x (displacement and gap difference) </td> <td> Maximum output pressure</td></tr><tr><td> 1 </td><td> x=1 to 5um </td><td> 350mmHg </td></tr>< Tr><td> 2 </td><td> x=5 to 10um </td><td> 250mmHg </td></tr><tr><td> 3 </td><td> x= 10 to 15um </td><td> 150mmHg </td></tr></TBODY></TABLE>

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonant plate 12 can be the same as the vibration frequency of the piezoelectric actuator 13, that is, both can be simultaneously upward or downward, which can be implemented according to actual conditions. Any change is not limited to the mode of operation shown in this embodiment.

Please also refer to FIG. 1A, FIG. 2A and FIG. 6A and FIG. 6B, wherein FIG. 6A is a schematic diagram of the collector operation of the gas collecting plate 16 and the micro valve device 1B of the micro pneumatic power device shown in FIG. 1A. Fig. 6B is a schematic view showing the pressure relief operation of the gas collecting plate 16 and the micro valve device 1B of the micro pneumatic power device shown in Fig. 1A. As shown in FIG. 1A and FIG. 6A, the microvalve device 1B of the micro pneumatic power device 1 of the present invention is sequentially formed by stacking the valve piece 17 and the outlet plate 18, and is matched with the gas collecting plate 16 of the micro fluid control device 1A. Come to work.

In the present embodiment, the gas collecting plate 16 has a surface 160 and a reference surface 161 which is recessed to form a gas collecting chamber 162 for the piezoelectric actuator 13 to be controlled by the microfluid. The gas that is transmitted downward from the device 1A is temporarily stored in the gas collection chamber 162, and has a plurality of through holes in the gas collection plate 16, and includes a first through hole 163 and a second through hole 164, first One end of the through hole 163 and the second through hole 164 is in communication with the air collection chamber 162, and the other end is respectively connected to the first pressure relief chamber 165 and the first outlet chamber 166 on the reference surface 161 of the gas collecting plate 16 respectively. Connected. Further, a protrusion structure 167 is further added to the first outlet chamber 166. For example, but not limited to a column structure, the height of the protrusion structure 167 is higher than the reference surface 161 of the gas collecting plate 16 . And the height of the protrusion structure 167 is between 0.3 mm and 0.55 mm, and its preferred value is 0.4 mm.

The outlet plate 18 includes a pressure relief through hole 181, an outlet through hole 182, a reference surface 180, and a second surface 187. The pressure relief through hole 181 and the outlet through hole 182 extend through the reference surface 180 of the outlet plate 18. The second surface 187 is recessed with a second pressure relief chamber 183 and a second outlet chamber 184. The pressure relief through hole 181 is disposed at a central portion of the second pressure relief chamber 183, and is second. There is a communication passage 185 between the pressure relief chamber 183 and the second outlet chamber 184 for gas circulation, and one end of the outlet through hole 182 is connected to the second outlet chamber 184, and the other end is connected to the outlet. 19 is connected. In this embodiment, the outlet 19 can be connected to a device (not shown), such as a press, but not limited thereto.

The valve piece 17 has a valve hole 170 and a plurality of positioning holes 171. The valve piece 17 has a thickness of between 0.1 mm and 0.3 mm, and preferably has a thickness of 0.2 mm.

When the valve piece 17 is assembled and assembled between the gas collecting plate 16 and the outlet plate 18, the pressure relief through hole 181 of the outlet plate 18 corresponds to the first through hole 163 of the gas collecting plate 16, the second pressure relief chamber The chamber 183 corresponds to the first pressure relief chamber 165 of the gas collecting plate 16, and the second outlet chamber 184 corresponds to the first outlet chamber 166 of the gas collecting plate 16, and the valve piece 17 is disposed on the gas collecting chamber. Between the plate 16 and the outlet plate 18, the first pressure relief chamber 165 is in communication with the second pressure relief chamber 183, and the valve hole 170 of the valve piece 17 is disposed in the second through hole 164 and the outlet through hole. Between 182, and the valve hole 170 is located corresponding to the convex structure 167 of the first outlet chamber 166 of the gas collecting plate 16, by the design of the single valve hole 170, so that the gas can be reached according to the pressure difference thereof. The purpose of one-way flow.

Further, at one end of the pressure relief through hole 181 of the outlet plate 18, a convex portion structure 181a formed by a protrusion may be further added, for example, but not limited to a cylindrical structure, and the height of the convex portion structure 181a is between 0.3 mm and Between 0.55 mm, and preferably 0.4 mm, and the convex structure 181a is improved to increase its height, the height of the convex structure 181a is higher than the reference surface 180 of the outlet plate 18 to strengthen the valve The sheet 17 quickly abuts and closes the pressure relief through hole 181, and achieves a pre-stressing effect to completely seal the effect; and the outlet plate 18 further has at least one limiting structure 188, the height of the limiting structure 188 is 0.32 mm, Taking the embodiment as an example, the limiting structure 188 is disposed in the second pressure relief chamber 183 and is an annular block structure, and is not limited thereto, and is mainly used for collecting the micro valve device 1B. At the time, it is provided to assist the valve piece 17 to prevent the valve piece 17 from collapsing, and the valve piece 17 can be opened or closed more quickly.

When the microvalve device 1B is pressurized, it is mainly as shown in Fig. 6A, which can be based on the pressure supplied by the gas from the microfluidic control device 1A, or when the external atmospheric pressure is greater than the outlet. When the internal pressure of the connected device (not shown) is 19, the gas flows from the gas collecting chamber 162 in the gas collecting plate 16 of the microfluidic control device 1A through the first through hole 163 and the second through hole 164, respectively. The lower flow into the first pressure relief chamber 165 and the first outlet chamber 166. At this time, the downward gas pressure causes the flexible valve piece 17 to be bent downward to deform the volume of the first pressure relief chamber 165. Increasingly, and corresponding to the end portion of the first through hole 163, which is flatly pressed against the end of the pressure relief through hole 181, the pressure relief through hole 181 of the outlet plate 18 can be closed, so that the second pressure relief chamber 183 The gas inside does not flow out from the relief pressure through hole 181. Of course, in this embodiment, a design of the protrusion structure 181a can be added to the end of the pressure relief through hole 181 to strengthen the valve piece 17 to quickly contact and close the pressure relief through hole 181, and achieve a pre-stressing function to completely seal. The effect is simultaneously and through the ring structure 188 disposed around the pressure relief through hole 181 to assist in supporting the valve piece 17 so as not to collapse. On the other hand, since the gas system flows downward from the second through hole 164 into the first outlet chamber 166, and the valve piece 17 corresponding to the first outlet chamber 166 is also bent downward, the corresponding The valve hole 170 is opened downward, and the gas can flow from the first outlet chamber 166 through the valve hole 170 into the second outlet chamber 184, and the outlet through hole 182 flows to the outlet 19 and the device connected to the outlet 19. In the (not shown), the device is operated by collecting pressure.

Referring to FIG. 6B, when the microvalve device 1B is depressurized, it can control the gas transfer amount of the microfluidic control device 1A so that the gas is no longer input into the gas collection chamber 162, or when it is connected to the outlet. When the internal pressure of the connected device (not shown) is greater than the atmospheric pressure of the outside, the microvalve device 1B can be depressurized. At this time, the gas is introduced into the second outlet chamber 184 from the outlet through hole 182 connected to the outlet 19, so that the volume of the second outlet chamber 184 is expanded, thereby causing the flexible valve piece 17 to be bent upward and deformed, and The valve hole 170 of the valve piece 17 is closed against the gas collecting plate 16 by flattening against the top of the gas collecting plate 16. Of course, in the embodiment, the design of the protrusion structure 167 can be added by using the first outlet chamber 166, so that the flexible valve piece 17 can be bent upwardly to change quickly, so that the valve hole 170 is more favorable to achieve a pre-prevention. The force resisting action completely adheres to the closed state of the seal. Therefore, when in the initial state, the valve hole 170 of the valve piece 17 is closed by being in close contact with the convex portion structure 167, the second outlet chamber 184 is closed. The gas will not flow back into the first outlet chamber 166 to achieve a better effect of preventing gas leakage. And the gas system in the second outlet chamber 184 can flow into the second pressure relief chamber 183 via the communication passage 185, thereby expanding the volume of the second pressure relief chamber 183 and corresponding to the second discharge The valve piece 17 of the pressure chamber 183 is also bent upwardly. At this time, since the valve piece 17 is not closed to the end of the pressure relief through hole 181, the pressure relief through hole 181 is in an open state, that is, the second pressure relief chamber. The gas in the chamber 183 can flow outward from the pressure relief through hole 181 to perform a pressure relief operation. Of course, in this embodiment, the flexible valve piece 17 can be bent upward by using the convex portion structure 181a at the end of the pressure relief through hole 181 or through the limiting structure 188 disposed in the second pressure relief chamber 183. The shape change is fast, and it is more advantageous to deviate from the state of closing the pressure relief through hole 181. In this way, the gas in the device (not shown) connected to the outlet 19 can be discharged by the one-way pressure relief operation, and the pressure can be reduced or completely discharged to complete the pressure relief operation.

Please refer to FIG. 1A, FIG. 2A and FIGS. 7A to 7E simultaneously, wherein FIGS. 7A to 7E are schematic diagrams of the collective pressure operation of the micro pneumatic power device shown in FIG. 1A. As shown in FIG. 7A, the micro-pneumatic power unit 1 is composed of a micro-fluid control device 1A and a micro-valve device 1B, wherein the micro-fluid control device 1A is sequentially connected to the air-inlet plate 11 and the resonating plate 12 as described above. The piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, the other insulating sheet 142, and the gas collecting plate 16 are stacked and assembled, and are disposed between the resonant sheet 12 and the piezoelectric actuator 13. a gap g0, and a first chamber 121 between the resonator piece 12 and the piezoelectric actuator 13, and the microvalve device 1B is also sequentially stacked and assembled by the valve piece 17 and the outlet plate 18, etc. The gas collecting plate 16 of the fluid control device 1A is formed with a gas collecting chamber 162 and a reference surface of the gas collecting plate 16 between the gas collecting plate 16 of the microfluidic control device 1A and the piezoelectric actuator 13 . The 161 is further recessed into the first pressure relief chamber 165 and the first outlet chamber 166, and the reference surface 180 of the outlet plate 18 is further recessed by a second pressure relief chamber 183 and a second outlet chamber 184, in this embodiment. The operation frequency of the micro pneumatic power device is between 27K and 29.5K, and operates Pressure ± 10V to ± 16V, and by a plurality of such different pressure chambers with a piezoelectric actuator 13 of the drive plate 12 and the resonant vibration of the valve plate 17, so that the gas pressure set down transmission.

As shown in Fig. 7B, when the piezoelectric actuator 13 of the microfluidic control device 1A is vibrated downward by the voltage, the gas enters the microfluidic control device 1A from the intake hole 110 in the air intake plate 11. And passing through at least one bus bar hole 112 to be collected to the central recess portion 111, and then flowing downward into the first chamber 121 via the hollow hole 120 on the resonator piece 12. Thereafter, as shown in Fig. 7C, the resonance piece 12 is also reciprocally vibrated by the resonance of the vibration of the piezoelectric actuator 13, that is, it vibrates downward and is close to the piezoelectric actuator. The convex portion 130c of the suspension plate 130 of 13 is deformed by the resonance piece 12, so that the volume of the chamber at the central concave portion 111 of the air inlet plate 11 is increased, and at the same time, the volume of the first chamber 121 is compressed, thereby further The gas in the first chamber 121 is caused to flow toward both sides, and then flows downward through the gap 135 between the brackets 132 of the piezoelectric actuator 13 to flow to the microfluidic control device 1A and the microvalve device. The first through hole 163 and the second through hole 164 communicating with the gas collecting chamber 162 are correspondingly flowed into the first pressure relief chamber 165 and the first out. In the oral chamber 166, it can be seen from the embodiment that when the resonant sheet 12 performs vertical reciprocating vibration, the gap between the piezoelectric actuator 13 and the piezoelectric actuator 13 can be increased to increase the maximum displacement of the vertical displacement. In other words, the gap g0 is provided between the two structures to make the resonator piece 12 generate a larger amplitude when resonating. The upper and lower displacement.

Next, as shown in Fig. 7D, since the resonator piece 12 of the microfluidic control device 1A is returned to the initial position, the piezoelectric actuator 13 is driven by the voltage to vibrate upward, and the vibration displacement of the piezoelectric actuator For d, the difference from the gap g0 is x, that is, x=g0-d, which is tested when x=1 to 5um, the operating frequency is 27k to 29.5KHz, and the operating voltage is ±10V to ±16V. The output air pressure can reach at least 300mmHg, but not limited to this. The volume of the first chamber 121 is also squeezed in such a manner that the gas in the first chamber 121 flows toward both sides and is continuously input to the plenum chamber by the gap 135 between the holders 132 of the piezoelectric actuator 13 162. The first pressure relief chamber 165 and the first outlet chamber 166 further increase the air pressure in the first pressure relief chamber 165 and the first outlet chamber 166, thereby pushing the flexible valve piece 17 When the bending deformation is generated downward, in the second pressure relief chamber 183, the valve piece 17 is laid flat against the convex portion structure 181a at the end of the pressure relief through hole 181, thereby closing the pressure relief through hole 181. In the second outlet chamber 184, the valve hole 170 corresponding to the outlet through hole 182 of the valve piece 17 is opened downward, so that the gas in the second outlet chamber 184 can be transmitted downward from the outlet through hole 182 to the outlet 19. And any device (not shown) connected to the outlet 19, in order to achieve the purpose of the pressure collection operation. Finally, as shown in FIG. 7E, when the resonator piece 12 of the microfluidic control device 1A is resonantly displaced upward, the gas in the central recess 111 of the first surface 11b of the air inlet plate 11 can be made by the hollow hole 120 of the resonator piece 12. Flowing into the first chamber 121 and continuously transmitting downward into the gas collecting plate 16 via the gap 135 between the brackets 132 of the piezoelectric actuator 13, the gas pressure system continues to increase downward, so the gas Still continuing to flow through the plenum chamber 162, the second through hole 164, the first outlet chamber 166, the second outlet chamber 184, and the outlet through hole 182 to the outlet 19 and any device connected to the outlet 19, The collecting operation can be driven by the atmospheric pressure of the outside and the pressure difference in the device, but not limited thereto.

When the pressure inside the device (not shown) connected to the outlet 19 is greater than the external pressure, the micro-pneumatic power device 1 can perform the step-down or pressure-reduction operation as shown in FIG. The pressure relief operation mode is mainly as described above, and the gas can be no longer input into the air collection chamber 162 by regulating the gas transmission amount of the micro fluid control device 1A. At this time, the gas will be connected to the outlet connected to the outlet 19. The through hole 182 is input into the second outlet chamber 184, so that the volume of the second outlet chamber 184 is expanded, thereby causing the flexible valve piece 17 to be bent upwardly and flattened upwardly against the first outlet chamber. The convex portion 167 of the 166 is closed, so that the valve hole 170 of the valve piece 17 is closed, that is, the gas in the second outlet chamber 184 does not flow back into the first outlet chamber 166; and, in the second outlet chamber 184 The gas system can flow into the second pressure relief chamber 183 via the communication flow passage 185, and then the pressure relief through hole 181 can be used for pressure relief operation; thus, the one-way gas transmission operation of the micro valve structure 1B can be performed. The gas in the device connected to the outlet 19 is discharged and depressurized, or completely A relief to complete the job.

As can be seen from the above description, in the micro-pneumatic power unit 1 of the present invention, as the micro-pneumatic power unit 1 is miniaturized, the various performance changes are as shown in Table 3 below:

Table 3         <TABLE border="1" borderColor="#000000" width="_0003"><TBODY><tr><td> Square suspension board length</td><td> 7.5mm </td><td> 8mm </td><td> 8.5mm </td><td> 10mm </td><td> 12mm </td><td> 14mm </td></tr><tr><td> Frequency< /td><td> 28K Hz </td><td> 27K Hz </td><td> 27K Hz </td><td> 18K Hz </td><td> 15K Hz </td><td > 15K Hz </td></tr><tr><td> Maximum output pressure</td><td> 400mmHg </td><td> 400mmHg </td><td> 320mmHg </td><td > 300mmHg </td><td> 250mmHg </td><td> 200mmHg </td></tr><tr><td> Product defect rate</td><td> 1/25=4% </ Td><td> 1/25=4% </td><td> 3/25=12% </td><td> 10/25=40% </td><td> 12/25=48% </td><td> 15/25=60% </td></tr></TBODY></TABLE>

It can be seen from the table that after the actual experiment of sampling 25 micro-pneumatic power unit 1 products, the conclusion obtained by the experiment is that the process of gradually reducing the length of the square suspension plate 130 to 14 mm is gradually reduced to 7.5 mm. It is found that while the length of the sides is reduced, the function of the yield and the maximum output pressure is gradually increased, and the obtained preferred size is 7.5 mm to 8.5 mm, and it is further found that the preferred size is particularly at the operating frequency thereof. Between 27K and 29.5KHz , the function of increasing the maximum output air pressure can reach at least 300mmHg. The reason for the above phenomenon is that when the side length of the suspension plate 130 is lowered, the suspension plate 130 is reduced in the horizontal direction when it is vertically vibrated, so that the kinetic energy in the vertical direction can be effectively utilized, and the side length is lowered. The error value in the vertical direction during assembly can be reduced, thereby reducing the collision between the suspension plate 130 and the resonant plate 12 or other assembled components, which involves maintaining a certain distance between the suspension plate 130 and the resonant plate 12, and thus the yield. The ability to increase and simultaneously increase its maximum output air pressure. In addition, when the size of the suspension plate 130 of the piezoelectric actuator 13 is reduced, the piezoelectric actuator 13 can be made smaller, and the internal gas flow path volume is reduced when the vibration is not easily inclined, which is advantageous. The push or compression of the air improves performance and simultaneously reduces the overall component size. Further, as described above, in the case where the piezoelectric actuator 13 is provided with the suspension plate 130 and the piezoelectric ceramic plate 133 having a large size, since the suspension plate 130 is inferior in rigidity, it is easily twisted and deformed during vibration, making it easy. Collision interference occurs between the resonance plate 12 or other assembled components, so that the noise generation ratio is high, and the noise problem is also one of the causes of product defects, so the defective ratio of the large-sized suspension plate 130 and the piezoelectric ceramic plate 133 Therefore, when the size of the suspension plate 130 and the piezoelectric ceramic plate 133 is reduced, in addition to the advantages of improved performance and noise reduction, the defective rate of the product can also be reduced.

In any case, the above-mentioned function of reducing the length of the suspension plate 130 to increase the yield and increase the maximum output pressure is obtained by experiments, and can not be directly derived from the theoretical formula, which enhances the functional reasons. The speculation is only a reference for the rationality of the experiment.

Of course, in this case, the micro-pneumatic power unit 1 has a tendency to be thinned, and the micro-fluidity control device 1A is assembled with the micro-valve device 1B to have a total thickness of 2 mm to 6 mm, thereby enabling the micro-gas power unit 1 to be portable and portable. For the purpose of the application, and can be widely used in medical equipment and related equipment.

In summary, the micro-pneumatic power unit provided in the present case mainly uses micro-fluid control device and micro-valve device to form a gas, and allows gas to enter from the air inlet hole of the micro-fluid control device, and utilizes piezoelectric actuation. Actuation, the gas creates a pressure gradient in the designed flow channel and pressure chamber, so that the gas flows at high speed and is transmitted to the micro valve device, and then through the one-way valve design of the micro valve device, the gas is in one direction Flow, which in turn accumulates pressure in any device connected to the outlet; when depressurization or depressurization is required, the amount of microfluidic control device is regulated and the gas can be transferred from the device connected to the outlet to the micro The second outlet chamber of the valve device is transmitted to the second pressure relief chamber by the connecting flow passage, and then flows out through the discharge pressure hole, so as to achieve the function of allowing the gas to be rapidly transmitted and at the same time achieving the mute effect. Moreover, the overall volume of the micro gas power device can be reduced and thinned, thereby enabling the micro gas power device to achieve portable and portable purposes, and can be widely used. Used in medical equipment and related equipment. Therefore, the micro-gas powered device in this case is of great industrial use value and is submitted in accordance with the law.

Even though the present invention has been described in detail by the above-described embodiments, it can be modified by those skilled in the art, and it is intended to be protected as intended by the appended claims.

1‧‧‧Micro Pneumatic Power Plant
1A‧‧‧Microfluidic control device
1B‧‧‧ miniature valve device
1a‧‧‧shell
10‧‧‧Base
11‧‧‧Air intake plate
11a‧‧‧ second surface of the air inlet plate
11b‧‧‧ first surface of the air inlet plate
110‧‧‧Air intake
111‧‧‧Center recess
112‧‧‧ Bus Bars
12‧‧‧Resonance film
12a‧‧‧movable department
12b‧‧‧Fixed Department
120‧‧‧ hollow holes
121‧‧‧ first chamber
13‧‧‧ Piezoelectric Actuator
130‧‧‧suspension board
130a‧‧‧Second surface of the suspension plate
130b‧‧‧The first surface of the suspension plate
130c‧‧‧ convex
130d‧‧‧ Central Department
130e‧‧‧The outer part
131‧‧‧Front frame
131a‧‧‧ second surface of the outer frame
131b‧‧‧ first surface of the outer frame
132‧‧‧ bracket
132a‧‧‧Second surface of the stent
132b‧‧‧ first surface of the bracket
133‧‧‧ Piezoelectric ceramic plate
134, 151‧‧‧ conductive pins
135‧‧‧ gap
141, 142‧‧‧ insulating sheet
15‧‧‧Conductor
16‧‧‧ gas collecting plate
16a‧‧‧ accommodating space
160‧‧‧ surface
161‧‧‧ reference surface
162‧‧‧Gas chamber
163‧‧‧First through hole
164‧‧‧Second through hole
165‧‧‧First pressure relief chamber
166‧‧‧First out of the chamber
167, 181a‧‧ ‧ convex structure
168‧‧‧ side wall
17‧‧‧ Valves
170‧‧‧ valve hole
171‧‧‧ Positioning holes
18‧‧‧Export board
180‧‧‧ reference surface
181‧‧‧Relief through hole
182‧‧‧Export through hole
183‧‧‧Second pressure relief chamber
184‧‧‧Second out of the chamber
185‧‧‧Connected runners
187‧‧‧ second surface
188‧‧‧Limited structure
19‧‧‧Export
G0‧‧‧ gap
(a)~(x)‧‧‧Different implementations of piezoelectric actuators
A0, i0, j0, m0, n0, o0, p0, q0, r0‧‧‧ suspension board
A1, i1, m1, n1, o1, p1, q1, r1‧‧‧ frame
A2, i2, m2, n2, o2, p2, q2, r2‧‧‧ bracket, plate connection
A3, m3, n3, o3, p3, q3, r3‧‧‧ gap
d‧‧‧Vibration displacement of piezoelectric actuator
S4, t4, u4, v4, w4, x4‧‧‧ convex
M2', n2', o2', q2', r2'‧‧‧ bracket attached to the end of the frame
M2", n2", o2", q2", r2"‧‧‧ brackets attached to the end of the suspension plate

FIG. 1A is a front exploded view showing the micro pneumatic power device of the preferred embodiment of the present invention. Fig. 1B is a schematic view showing the front combined structure of the micro pneumatic power device shown in Fig. 1A. Fig. 2A is a schematic view showing the back side exploded structure of the micro pneumatic power device shown in Fig. 1A. Fig. 2B is a schematic view showing the structure of the back side of the micro pneumatic power device shown in Fig. 1A. Fig. 3A is a schematic view showing the front combined structure of the piezoelectric actuator of the micro pneumatic power device shown in Fig. 1A. Fig. 3B is a schematic view showing the rear combined structure of the piezoelectric actuator of the micro pneumatic power device shown in Fig. 1A. Fig. 3C is a schematic cross-sectional view showing the piezoelectric actuator of the micro pneumatic power device shown in Fig. 1A. 4A to 4C are schematic views showing various embodiments of the piezoelectric actuator. 5A to 5E are schematic views showing a partial operation of the microfluidic control device of the micro pneumatic power device shown in Fig. 1A. Fig. 6A is a schematic view showing the collective operation of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in Fig. 1A. Fig. 6B is a schematic view showing the pressure relief operation of the gas collecting plate and the micro valve device of the micro pneumatic power device shown in Fig. 1A. 7A to 7E are schematic views showing the collective pressure operation of the micro pneumatic power device shown in Fig. 1A. Figure 8 is a schematic diagram of the step-down or pressure relief operation of the micro-pneumatic power unit shown in Figure 1A.

1A‧‧‧Microfluidic control device

11‧‧‧Air intake plate

110‧‧‧Air intake

111‧‧‧Center recess

112‧‧‧ Bus Bars

12‧‧‧Resonance film

12a‧‧‧movable department

12b‧‧‧Fixed Department

120‧‧‧ hollow holes

13‧‧‧ Piezoelectric Actuator

130c‧‧‧ convex

141, 142‧‧‧ insulating sheet

15‧‧‧Conductor

G0‧‧‧ gap

Claims (19)

A microfluidic control device is applicable to a micro pneumatic power device, comprising: an air inlet plate having at least one air inlet hole, at least one bus bar hole, and a central recess forming a confluence chamber, the at least one air inlet hole Providing a gas, the bus bar hole corresponding to the air inlet hole, and the gas guiding the air inlet hole is merged to the confluence chamber formed by the central recess; a resonance piece having a hollow hole corresponding to the air inlet plate The manifold chamber; and a piezoelectric actuator having: a suspension plate having a length between 7.5 mm and 12 mm, a width between 7.5 mm and 12 mm, and a distance between 0.1 mm and a thickness between 0.4 mm; an outer frame having at least one bracket disposed between the suspension plate and the outer frame; and a piezoelectric ceramic plate attached to the first surface of the suspension plate, and the The piezoelectric ceramic plate has a side length not greater than the side length of the suspension plate, a length between 7.5 mm and 12 mm, a width between 7.5 mm and 12 mm, and a thickness between 0.05 mm and 0.3 mm. The piezoelectric The length of the porcelain plate and the width ratio are between 0.625 and 1.6 times; wherein the piezoelectric actuator, the resonant piece and the air inlet plate are sequentially positioned correspondingly to each other, and the resonant piece is A gap is formed between the piezoelectric actuators to form a first chamber, so that when the piezoelectric actuator is driven, gas is introduced from the at least one air inlet of the air inlet plate, and the at least one current is introduced. The venting hole is collected into the central recess and then flows through the hollow hole of the resonant piece to enter the first cavity, and then is transported downward by a gap between the at least one bracket of the piezoelectric actuator to Continue to introduce gas. The microfluidic control device of claim 1, wherein the operating frequency is 28k, the operating voltage is ±15V, and the maximum output air pressure is at least 300mmHg. The microfluidic control device according to claim 1, wherein the piezoelectric ceramic plate has a length of 7.5 mm to 8.5 mm, a width of 7.5 mm to 8.5 mm, and a thickness of 0.10 mm. The microfluidic control device according to claim 1, wherein the suspension plate has a length of 7.5 mm to 8.5 mm, a width of 7.5 mm to 8.5 mm, and a thickness of 0.27 mm. The microfluidic control device of claim 1, wherein the suspension plate further comprises a protrusion disposed on a second surface of the suspension plate, the height of which is between 0.02 mm and 0.08 mm. The microfluidic control device of claim 5, wherein the height of the convex portion is 0.03 mm. The microfluidic control device of claim 5, wherein the convex portion is a circular convex structure having a diameter of 0.55 times the minimum side length of the suspension plate. The microfluidic control device according to claim 1, wherein the air inlet plate is made of a stainless steel material and has a thickness of between 0.4 mm and 0.6 mm. The microfluidic control device of claim 8, wherein the air inlet plate has a thickness of 0.5 mm. The microfluidic control device according to claim 1, wherein the resonator piece is made of a copper material and has a thickness of between 0.03 mm and 0.08 mm. The microfluidic control device of claim 10, wherein the resonator plate has a thickness of 0.05 mm. The microfluidic control device of claim 1, further comprising at least one insulating sheet and a conductive sheet, and the at least one insulating sheet and the conductive sheet are sequentially disposed under the piezoelectric actuator. The microfluidic control device according to claim 1, wherein the outer frame of the piezoelectric actuator is made of a stainless steel material and has a thickness of between 0.2 mm and 0.4 mm. The microfluidic control device of claim 13, wherein the outer frame of the piezoelectric actuator has a thickness of 0.3 mm. The microfluidic control device of claim 1, wherein the two ends of the bracket of the piezoelectric actuator are connected to the outer frame, and an end point is connected to the suspension plate. A microfluidic control device for a micro pneumatic power device, comprising: an air inlet plate; a resonance plate; and a piezoelectric actuator; wherein the air inlet plate, the resonance plate and the piezoelectric body The actuators are sequentially positioned corresponding to the stacking arrangement, and a gap is formed between the resonant plate and the piezoelectric actuator to form a first chamber. When the piezoelectric actuator is driven, gas enters through the air inlet plate. Flowing through the resonator to enter the first chamber to transport gas. The microfluidic control device of claim 16, wherein the air inlet plate has at least one air inlet hole, at least one bus bar hole and a central recess, the at least one air inlet hole for introducing a gas, the bus bar The hole corresponds to the air inlet hole, and the gas guiding the air inlet hole is merged to the central recess; the resonant piece has a hollow hole corresponding to the central concave portion of the air inlet plate; and the piezoelectric actuator has a suspension plate and An outer frame is connected between the suspension plate and the outer frame by at least one bracket, and a piezoelectric ceramic plate is attached to the first surface of one of the suspension plates. The microfluidic control device according to claim 17, wherein the piezoelectric ceramic plate has a side length not greater than a side length of the suspension plate, and has a length of between 7.5 mm and 12 mm, and is between 7.5 mm and The width between 12 mm and the thickness between 0.05 mm and 0.3 mm, the length and the width ratio of the piezoelectric ceramic plate are between 0.625 and 1.6 times. The microfluidic control device of claim 17, wherein the suspension plate has a length of 7.5 mm to 12 mm, a width of 7.5 mm to 12 mm, and a thickness of 0.27 mm.