CN208456830U - Minisize fluid control device - Google Patents

Abstract

A kind of minisize fluid control device, comprising: piezoelectric actuator and shell；Piezoelectric actuator has the suspension board of square, outline border, at least a bracket and the piezoelectric ceramic plate being connected between suspension board and outline border, has the side length no more than suspension board side length, is attached on the first surface of suspension board；Shell has gas collection plate and pedestal, and gas collection plate is the frame structure that there is periphery side wall to constitute gas collection chamber, with more multiple through holes through setting；Pedestal closes the bottom for being set to piezoelectric actuator, and has hollow bore, and hollow bore corresponds to the central part of suspension board and is arranged；Wherein when piezoelectric actuator is driven by voltage, suspension board also with bending vibration, and fluid is transmitted to gas collection chamber from the hollow bore of pedestal, then be discharged by multiple through holes.

Description

Minisize fluid control device

[technical field]

This case is about a kind of minisize fluid control device, suitable for a kind of micro ultrathin and mute micro pressure power Device.

[background technique]

The either industry such as medicine, computer technology, printing, energy in each field at present, product is towards sophistication and micro- Smallization direction is developed, wherein the fluid delivery structure that the products such as micro- side Pu, sprayer, ink gun, industrial printing devices are included For its key technology, therefore how innovation structure to be borrowed to break through its technical bottleneck, for the important content of development.

For example, in medicinal industry, many instruments or equipment needed using Pneumatic pressure power driving are usually adopted to pass System motor and air pressure valve come reach its gas conveying purpose.However, being limited to the structure of these conventional motors and gas trap Limitation so that the volume of single unit system can not reduce, that is, be difficult to reality so that such instrument and equipment is difficult to reduce its volume The target being now thinned, therefore can not also install and set on portable apparatus or be used cooperatively with portable apparatus, convenience is insufficient. In addition, these conventional motors and gas trap can also generate noise when actuation, enable user impatient, causes using upper not convenient And it is uncomfortable.

Therefore, above-mentioned known technology missing can be improved by how developing one kind, can make conventionally employed minisize fluid control device Instrument or equipment reach small in size, micromation and mute, and then reach the minisize fluid control of light comfortable portable purpose Device processed, actually problem in the urgent need to address at present.

[utility model content]

The main purpose of this case is to provide a kind of minisize fluid suitable for portable or wearable instrument or equipment Control device generates barometric gradient in the runner after design by the gas pulsation that piezoelectric ceramic plate high frequency actuation generates, and Make gas flow at high rates, and through the resistance difference in runner disengaging direction, gas is transmitted to outlet side by suction side, in order to solution The volume of known technology being had using the instrument or equipment of minisize fluid control device is big, is difficult to be thinned, can not reach The missings such as portable purpose and noise are big.

In order to achieve the above object, a broader state sample implementation of this case is to provide a kind of minisize fluid control device, include: one Piezoelectric actuator and a shell；The piezoelectric actuator includes a suspension board, an outline border, at least a bracket and a piezoelectric ceramics Plate, the kenel which is square, and can be surround by a central part to a peripheral part bending vibration, the outline border and be set to this The outside of suspension board, at least a bracket is connected between the suspension board and the outline border for this, to provide resilient support, the piezoelectric ceramics The kenel that plate is square has the side length no more than the suspension board side length, is attached on a first surface of the suspension board, uses The suspension board bending vibration is driven to apply voltage；And shell, it include a gas collection plate and a pedestal, which is week Edge has a frame structure of side wall, and is more recessed in inner surface to constitute a gas collection chamber, is set with for the piezoelectric actuator It is placed in the gas collection chamber, which closes the bottom for being set to the piezoelectric actuator, and has a hollow bore, the hollow hole Hole corresponds to the central part of the suspension board and is arranged；Wherein the gas collection plate is with more multiple through holes through setting, when this When piezoelectric actuator is driven by voltage, the suspension board also with bending vibration, and fluid is passed from the hollow bore of the pedestal The gas collection chamber is transported to, then is discharged by multiple through hole.

[Detailed description of the invention]

Figure 1A is the positive decomposition texture schematic diagram for the micro pressure power device that this case is preferred embodiment.

Figure 1B is the positive combination structural schematic diagram of micro pressure power device shown in figure 1A.

Fig. 2A is the back side decomposition texture schematic diagram of micro pressure power device shown in figure 1A.

Fig. 2 B is the back side combining structure schematic diagram of micro pressure power device shown in figure 1A.

Fig. 3 A is the positive combination structural schematic diagram of the piezoelectric actuator of micro pressure power device shown in figure 1A.

Fig. 3 B is the back side combining structure schematic diagram of the piezoelectric actuator of micro pressure power device shown in figure 1A.

Fig. 3 C is the schematic diagram of the section structure of the piezoelectric actuator of micro pressure power device shown in figure 1A.

Fig. 4 A to Fig. 4 C is a variety of state sample implementation schematic diagrames of piezoelectric actuator.

Fig. 5 A to Fig. 5 E is that the local actuation of the minisize fluid control device of micro pressure power device shown in figure 1A is shown It is intended to.

Fig. 6 A is that the gas collection plate of micro pressure power device shown in figure 1A and the collection of micro valve device press actuation signal Figure.

Fig. 6 B is that the release actuation of the gas collection plate and micro valve device of micro pressure power device shown in figure 1A is illustrated Figure.

Fig. 7 A to Fig. 7 E is that the collection of micro pressure power device shown in figure 1A presses illustrative view.

Fig. 8 is the decompression or release illustrative view of micro pressure power device shown in figure 1A.

[specific embodiment]

The some exemplary embodiments for embodying this case features and advantages will describe in detail in the explanation of back segment.It should be understood that This case can have various variations in different aspects, all not depart from the range of this case, and explanation therein and diagram It is inherently illustrated as being used, and nand architecture is in limitation this case.

The micro pressure power device 1 of this case is to can be applied to the works such as the raw skill of medicine, the energy, computer technology or printing Industry, in order to transmit gas, but not limited to this.Figure 1A, Figure 1B, Fig. 2A, Fig. 2 B and Fig. 7 A to 7E figure are please referred to, Figure 1A is this The positive decomposition texture schematic diagram of the micro pressure power device of case preferred embodiment, Figure 1B are dynamic for micro pressure shown in figure 1A The positive combination structural schematic diagram of power device, the back side decomposition texture that Fig. 2A is micro pressure power device shown in figure 1A are illustrated Figure, Fig. 2 B is then the back side combining structure schematic diagram of micro pressure power device shown in figure 1A, and Fig. 7 A to 7E figure is Figure 1A institute The collection for the micro pressure power device shown presses illustrative view.As shown in Figure 1A and Fig. 2A, the micro pressure power device 1 of this case It is to be formed as combined by minisize fluid control device 1A and micro valve device 1B, wherein minisize fluid control device 1A has The structures such as shell 1a, piezoelectric actuator 13, insulating trip 141,142 and conductive sheet 15, wherein shell 1a be comprising gas collection plate 16 and Pedestal 10, pedestal 10 include then inlet plate 11 and resonance plate 12, and but not limited to this.Piezoelectric actuator 13 corresponds to resonance plate 12 and be arranged, and make inlet plate 11, resonance plate 12, piezoelectric actuator 13, insulating trip 141, conductive sheet 15, another insulating trip 142, Gas collection plates 16 etc. sequentially stack setting, and the piezoelectric actuator 13 is by a suspension board 130, an outline border 131, at least a bracket 132 and one piezoelectric ceramic plate 133 assemble jointly；And micro valve device 1B includes that a valve sheet 17 and one goes out But not limited to this for oralia 18.And in this present embodiment, as shown in Figure 1A, gas collection plate 16 is not only single plate structure, also Can for periphery have side wall 168 frame structure, and the gas collection plate 16 have between 9mm between 17mm length, between 9mm To the width between 17mm, and the length and the width ratio are between 0.53 times to 1.88 times, and be made of the periphery Side wall 168 and the plate common definition of its bottom go out an accommodating space 16a, are set to the accommodating with for the piezoelectric actuator 13 In the 16a of space, therefore after the micro pressure power device 1 of this case is completed, then its front schematic view can be as shown in Figure 1B, with And shown in Fig. 7 A to Fig. 7 E, it is seen that minisize fluid control device 1A be it is corresponding with micro valve device 1B assemble, also I.e. the valve sheet 17 of micro valve device 1B and exit plate 18 sequentially stack setting and are positioned at minisize fluid control device 1A Gas collection plate 16 on form.And the schematic rear view that it is completed then the release through-hole 181 in the visible exit plate 18 and goes out Mouth 19, to connect with a device (not shown), release through-hole 181 then supplies the gas so that in micro valve device 1B for outlet 19 Discharge, up to the effect of release.It is arranged by the assembling of this minisize fluid control device 1A and micro valve device 1B, so that Gas penetrates piezoelectric actuator 13 from 110 air inlet of an at least air inlet on the inlet plate 11 of minisize fluid control device 1A Actuation, and flow through multiple pressure chamber (not shown) and continue to transmit, and then gas can be made in unidirectional in micro valve device 1B Flowing, and by acute build up of pressure in the device (not shown) being connected with the outlet end of micro valve device 1B, and ought need to carry out When release, then regulate and control the output quantity of minisize fluid control device 1A, makes in exit plate 18 of the gas via micro valve device 1B Release through-hole 181 and be discharged, to carry out release.

It please continue A refering to fig. 1 and Fig. 2A, as shown in Figure 1A, the inlet plate 11 of minisize fluid control device 1A is that have first Surface 11b, second surface 11a and at least an air inlet 110, in this present embodiment, the quantity of air inlet 110 be 4, but not As limit, it is through the first surface 11b and second surface 11a of inlet plate 11, it is mainly suitable from outside device to supplied gas It answers the effect of atmospheric pressure and is flowed into minisize fluid control device 1A from an at least air inlet 110.And again as shown in Figure 2 A, By the first surface 11b of inlet plate 11 as it can be seen that thereon have at least one confluence round 112, to 11 second surface of inlet plate At least an air inlet 110 is correspondingly arranged for this of 11a.In this present embodiment, the quantity of confluence round 112 and air inlet 110 are right It answers, quantity is 4, but is not limited thereto, and is wherein with central recess at the center exchange of these confluence rounds 112 111, and central recess 111 is connected with confluence round 112, can will enter the gas of confluence round 112 from air inlet 110 whereby Body, which guides and converges, is concentrated to the transmitting of central recess 111.It is so that in this present embodiment, inlet plate 11 has integrally formed air inlet Hole 110, confluence round 112 and central recess 111, and be the confluence for being correspondingly formed a confluence gas at the central recess 111 Chamber, it is temporary with supplied gas.In some embodiments, the material of inlet plate 11 is can be but unlimited for by a stainless steel material institute It constitutes, and its thickness is between 0.4mm between 0.6mm, and its preferred values is 0.5mm, but not limited to this.In other realities It applies in example, the depth of the confluence chamber by being constituted at the central recess 111 is identical as these confluence depth of round 112, and The preferred values of the depth of the confluence chamber and the confluence round 112 are between 0.2mm between 0.3mm, and but not limited to this.Altogether The piece 12 that shakes is made of a flexible materials, and but not limited to this, and in having a hollow bore 120 on resonance plate 12, is Corresponding to the first surface 11b of inlet plate 11 central recess 111 and be arranged so that gas circulate.In other embodiments, Resonance plate 12 is can be made of a copper material, and but not limited to this, and its thickness is between 0.03mm between 0.08mm, and Its preferred values is 0.05mm, but is also not limited.

It is the piezoelectricity of micro pressure power device respectively shown in figure 1A please refer to Fig. 3 A, Fig. 3 B and Fig. 3 C Positive structure schematic, structure schematic diagram and the schematic diagram of the section structure of actuator, piezoelectric actuator 13 are hanged by one Kickboard 130, an outline border 131, at least a bracket 132 and a piezoelectric ceramic plate 133 assemble jointly, wherein the piezoelectricity Ceramic wafer 133 is attached at the first surface 130b of suspension board 130, generates deformation to apply voltage to drive the suspension board 130 Bending vibration, suspension board 130 have central part 130d and peripheral part 130e, be with when piezoelectric ceramic plate 133 is driven by voltage, Suspension board 130 can by central part 130d to peripheral part 130e bending vibration and this at least a bracket 132 is to be connected to suspension Between plate 130 and outline border 131, in this present embodiment, the bracket 132 be connected in suspension board 130 and outline border 131 it Between, two-end-point is to be connected to outline border 131, suspension board 130, to provide resilient support, and in bracket 132, suspension board 130 And an at least gap 135 is had more between outline border 131, it circulates to supplied gas, and the suspension board 130, outline border 131 and bracket 132 kenel and quantity is that have a variety of variations.In addition, outline border 131 is to surround the outside for being set to suspension board 130, and have The conductive connecting pin 134 of one outside projection, to be used for electrical connection, but not limited to this.In this present embodiment, suspension board 130 It is to imply that in the second surface 130a of suspension board 130, protrusion 130c can with more a protrusion 130c for the structure of a cascaded surface For but be not limited to a circular protrusions structure, and the height of protrusion 130c is between 0.02mm between 0.08mm, and preferred values are 0.03mm, 0.55 times of size of the minimum side length of a diameter of suspension board 130, but not limited to this.Please refer to Fig. 3 A And Fig. 3 C is as it can be seen that the surface of the protrusion 130c of suspension board 130 is coplanar with the second surface 131a of outline border 131, and is suspended The second surface 130a of the plate 130 and second surface 132a of bracket 132 is also coplanar, and the protrusion 130c of the suspension board 130 And outline border 131 second surface 131a and suspension board 130 second surface 130a and bracket 132 second surface 132a between be With a certain depth.As for the first surface 130b of suspension board 130, then as shown in Fig. 3 B and Fig. 3 C, with outline border 131 The first surface 132b of one surface 131b and bracket 132 is smooth coplanar structure, and piezoelectric ceramic plate 133 is then attached at this At the first surface 130b of smooth suspension board 130.In other embodiments, the kenel of suspension board 130 also can be two-sided for one Smooth plate square structure, is not limited thereto, and can appoint according to situation is actually applied and apply variation.In some embodiments In, suspension board 130, bracket 132 and outline border 131 be can be integrally formed structures, and can be made of a metal plate, such as It can be made of stainless steel material, but not limited to this.And in some embodiments, which is between 0.1mm To between 0.4mm, and its preferred values is 0.27mm, the length of the another suspension board 130 between 7.5mm between 12mm, and its compared with Good value can for 7.5mm to 8.5mm, width between 7.5mm between 12mm, and its preferred values can for 7.5mm to 8.5mm but not with This is limited.Thickness as the outline border 131 is between 0.2mm between 0.4mm, and its preferred values is 0.3mm, but not as Limit.

Again in other embodiments, the thickness of piezoelectric ceramic plate 133 is between 0.05mm between 0.3mm, and its Preferred values are 0.10mm, and the piezoelectric ceramic plate 133 have no more than 130 side length of suspension board side length, have length between 7.5mm between 12mm, and its preferred values can for 7.5mm to 8.5mm, width between 7.5mm between 12mm, and its preferred values It can be 7.5mm to 8.5mm, the preferred values of another length and width ratio are so also to be not limited between 0.625 times to 1.6 times.Again In other embodiments, the side length of piezoelectric ceramic plate 133 is smaller than the side length of suspension board 130, and same design is and suspension The corresponding square plate structure of plate 130, but be not limited thereto.

Related embodiment in the micro pressure power device 1 of this case, piezoelectric actuator 13 so outstanding using square Kickboard 130, reason are compared to round suspension board (the round suspension board of (j)~(l) aspect as shown in Fig. 4 A Fig. 4 A J0 design), the structure of the square suspension board 130 obviously have the advantage of power saving, and the comparison of consumption power is such as following table Shown in one:

Table one

Therefore the upper table by experiment is learnt: positive 130 size dimension of the square suspension board (piezoelectricity of 8mm to 10mm) of the tool Actuator 13 is compared to circle suspension board j0 diameter (8mm to the piezoelectric actuator of 10mm), more power saving.It is above-mentioned by experiment Power consumption obtained compares data, and the cause of power saving can speculate are as follows: because of the capacity load operated under resonant frequency, It, which consumes power, to increase with the rising of frequency, and because the resonant frequency of the suspension board of size dimension square _type layout 130 is bright Aobvious relatively same circular suspension board j0 is low, therefore its opposite consumption power is also significant lower, that is, this case is set using square Design of the suspension board 130 of meter compared to round suspension board j0, it is real that there is savings advantage, it is particularly applied to object wearing device, is saved Electric power saving is very important design focal point.Nevertheless, its power saving effect of the suspension board of above-mentioned square _type layout be by Obtained in experiment, theoretical formula institute direct derivation can be not leaned on, the supposition of power saving cause is reasonable only as experiment The reference of property.

It please continue refering to Fig. 4 A, 4B, 4C figure, be a variety of state sample implementation schematic diagrames for piezoelectric actuator.As shown, then It can be seen that the suspension board 130 of piezoelectric actuator 13, outline border 131 and bracket 132 are the kenels that there can be multiplicity, and can at least have figure A variety of aspects such as (a)~(l) shown in 4A Fig. 4 A, for example, the outline border a1 and suspension board a0 of (a) aspect are for rectangular knot Structure, and be by multiple bracket a2 between the two to link it, such as: 8, but not limited to this, and in bracket a2 and suspension board It is to be circulated with gap a3 with supplied gas between a0, outline border a1.In another (i) aspect, outline border i1 and suspension board i0 are also same Sample be rectangular structure, precisely because in only by 2 bracket i2 to link it；In addition, there are further the relevant technologies, such as 4B, Shown in 4C figure, the suspension board of piezoelectric actuator 13 also can be just like (s)~(x) shown in (m)~(r) shown in Fig. 4 B and Fig. 4 C Etc. a variety of aspects, only in these aspects, structure that suspension board 130 and outline border 131 are square.For example, (m) aspect it The structure that outline border m1 and suspension board m0 are square, and be by multiple bracket m2 between the two to link it, such as: 4, but It is not limited, and is with gap m3, for fluid circulation between bracket m2 and suspension board m0, outline border m1.And in this reality It applies in example, the bracket m2 being linked between outline border m1 and suspension board m0 is can be but not be limited to a plate interconnecting piece m2, and this plate connects Socket part m2 have both ends m2 ' and m2 ", wherein one end m2 ' be connect with outline border m1, and the other end m2 " then with suspension board M0 connection, and this both ends m2 ' and m2 " is corresponded to each other and is set on same axis.It is same to have in (n) aspect There are outline border n1, suspension board n0 and the bracket n2 being connected between outline border n1, suspension board n0 and the gap for fluid circulation N3, and bracket n2 also can be but not be limited to a plate interconnecting piece n2, plate interconnecting piece n2 equally has both ends n2 ' and n2 ", and end N2 ' is connect with outline border n1, and the other end n2 " is then connect with suspension board n0, and only in this state sample implementation, plate interconnecting piece n2 is To be connected to outline border n1 and suspension board n0 between 0~45 degree of oblique angle, in other words and both ends n2 ' and n2 " is not set to It is the setting relationship for mutual dislocation on same level axis.In (o) aspect, outline border o1, suspension board o0 and connection Bracket o2 between outline border o1, suspension board o0 and similar with previous embodiment for structures such as the gap o3 of fluid circulation, Wherein the design kenel only as the plate interconnecting piece o2 of bracket is slightly different with (m) aspect, so in this aspect, the plate interconnecting piece The both ends o2 ' and o2 " of o2 is still to correspond to each other and be set on same axis.

Again in (p) aspect, equally there is outline border p1, suspension board p0 and be connected between outline border p1, suspension board p0 Bracket p2 and structures such as gap p3 for fluid circulation, in this state sample implementation, the plate interconnecting piece p2 as bracket is had more There are the structures such as suspension board interconnecting piece p20, beam portion p21 and outline border interconnecting piece p22, wherein beam portion p21 is set to suspension board p0 and outer In gap p3 between frame p1, and the direction of its setting is parallel to outline border p1 and suspension board p0, and, suspension board interconnecting piece P20 be connected between beam portion p21 and suspension board p0, and outline border interconnecting piece p22 be connection beam portion p21 and outline border p1 between, and The suspension board interconnecting piece p20 and outline border interconnecting piece p22 also correspond to each other and are set on same axis.

In (q) aspect, outline border q1, suspension board q0 and the bracket q2 being connected between outline border q1, suspension board q0, with And it is similar with aforementioned (m), (o) aspect for structures such as the gap q3 of fluid circulation, wherein only as the plate interconnecting piece q2 of bracket Design kenel be slightly different with (m), (o) aspect, in this aspect, suspension board q0 is the kenel being square, and it is every It all has two plate interconnecting piece q2 on one side to connect with outline border q1, and wherein the both ends q2 ' and q2 " of each plate interconnecting piece q2 is similarly It corresponds to each other and is set on same axis.However in (r) aspect, also there is outline border r1, suspension board r0, bracket r2 And the components such as gap r3, and bracket r2 also can be but not be limited to a plate interconnecting piece r2, in this embodiment, plate interconnecting piece r2 is For the structure of V-shaped, in other words, plate interconnecting piece r2 also to be connected to outline border r1 and suspension board r0 between 0~45 degree of oblique angle, Therefore all have one end r2 " in each plate interconnecting piece r2 and connect with suspension board r0, and there is both ends r2 ' to connect with outline border r1, Imply that both ends b2 ' and end b2 " are not set on same level axis.

Continuous as shown in Figure 4 C, the appearance kenel of these (s)~(x) aspect approximately corresponds to (m)~(r) shown in Fig. 4 B Kenel be equipped with protrusion 130c on the suspension board 130 of each piezoelectric actuator 13, i.e., only in these (s)~(x) aspect The structures such as s4, t4, u4, v4, w4, x4 as illustrated in the drawing, and the either aspects such as (m)~(r) aspect or (s)~(x), should Suspension board 130 designs the kenel that is square, the effect of to reach aforementioned low power consumption；And thus etc. state sample implementations as it can be seen that no matter Suspension board 130 is that or have for a surface step structure of protrusion for two-sided flat slab construction, in the protection of this case In range, and the kenel for the bracket 132 being connected between suspension board 130 and outline border 131 and quantity also can be according to actually applying situation And appoint and apply variation, it is not limited with aspect shown in this case.It is described also as before, these suspension boards 130, outline border 131 and bracket 132 That can be integrally formed structures, but not limited to this, as its manufacture then can by traditional processing or yellow light etching or Laser processing or the modes such as eletroforming or electro-discharge machining are produced, and are not limited.

In addition, A refering to fig. 1 and Fig. 2A please be continue, insulating trip 141, conductive sheet are had more in minisize fluid control device 1A 15 and another insulating trip 142 be sequentially be correspondingly arranged under piezoelectric actuator 13, and its form approximately correspond to piezoelectricity cause The form of the outline border of dynamic device 13.In some embodiments, insulating trip 141,142 is made of the material that can be insulated, such as: modeling Glue, but not limited to this, is used with carrying out insulation；In other embodiments, conductive sheet 15 is i.e. by conductive material institute structure At, such as: metal, but not limited to this, conduct being used.And in this present embodiment, it can also be set on conductive sheet 15 A conductive connecting pin 151 is set, conduct being used.

Please refer to Figure 1A and Fig. 5 A to Fig. 5 E, wherein Fig. 5 A to Fig. 5 E is for micro pressure power shown in figure 1A dress The local illustrative view of the minisize fluid control device 1A set.Firstly, as shown in Figure 5A, it is seen that minisize fluid control device 1A It is sequentially by heaps such as inlet plate 11, resonance plate 12, piezoelectric actuator 13, insulating trip 141, conductive sheet 15 and another insulating trips 142 It is folded to form, and in this present embodiment, filled out in the gap g0 between resonance plate 12 and 131 periphery of outline border of piezoelectric actuator 13 A material is filled, such as: conducting resinl, but not limited to this, so that the protrusion of the suspension board 130 of resonance plate 12 and piezoelectric actuator 13 The depth of gap g0 can be maintained between 130c, and then can be guided air-flow and more quickly be flowed, and because of the protrusion of suspension board 130 130c and resonance plate 12 keep suitable distance to make the interference reduction that is in contact with each other, and promote noise generation that can be lowered.

It please continue refering to Fig. 5 A to Fig. 5 E, as shown, when inlet plate 11, resonance plate 12 are sequentially corresponding with piezoelectric actuator 13 After assembling, then the chamber of a confluence gas can be collectively formed with inlet plate 11 thereon at the hollow bore 120 of resonance plate 12, And a first chamber 121 is more formed between resonance plate 12 and piezoelectric actuator 13, it is configured to temporarily store gas, and first chamber 121 It is to penetrate the hollow bore 120 of resonance plate 12 and be connected with the chamber at the central recess 111 of 11 first surface 11b of inlet plate It is logical, and the two sides of first chamber 121 then by the gap 135 between the bracket 132 of piezoelectric actuator 13 and be set under it Micro valve device 1B is connected.

When the minisize fluid control device 1A actuation of micro pressure power device 1, mainly by piezoelectric actuator 13 by electricity Pressure is activated with bracket 132 for fulcrum, carries out the reciprocating vibration of vertical direction.As shown in Figure 5 B, when piezoelectric actuator 13 by Voltage actuation and when vibrating downwards, be when piezoelectric actuator 13 vibrates since resonance plate 12 is for light, thin laminated structure When, resonance plate 12 also can with resonance and carry out vertical reciprocating vibration, as resonance plate 12 corresponds to the inlet plate 11 The part of central recess 111 also can with bending vibration deformation, i.e., the resonance plate 12 correspond to the inlet plate 11 central recess 111 part is the movable part 12a for resonance plate 12, is the resonance plate at this time with when piezoelectric actuator 13 is bent downwardly vibration 12 movable part 12a can be because of the drive of fluid brought into and pushed and piezoelectric actuator 13 vibrates, and with piezoelectric actuator 13 are bent downwardly vibration deformation, then gas is entered by at least air inlet 110 on inlet plate 11, and penetrate its first surface 11b at least one confluence round 112 be pooled to its center central recess 111 at, then via on resonance plate 12 with central fovea The central hole 120 that portion 111 is correspondingly arranged is flowed downwardly into first chamber 121, thereafter, due to being vibrated by piezoelectric actuator 13 Drive, resonance plate 12 also can with resonance and carry out vertical reciprocating vibration, as shown in Figure 5 C, at this time resonance plate 12 can Dynamic portion 12a also with downward vibration, and attach on the protrusion 130c of the suspension board 130 for contacting at piezoelectric actuator 13, make to suspend The spacing of confluence chamber between the fixed part 12b of 12 two sides of region other than the protrusion 130c of plate 130 and resonance plate will not become It is small, and by the deformation of this resonance plate 12, to compress the volume of first chamber 121, and it is empty to close 121 middle flow of first chamber Between, promote the gas in it push to two sides flow, and then by piezoelectric actuator 13 bracket 132 between gap 135 and Flowing is passed through downwards.As for Fig. 5 D be then its resonance plate 12 movable part 12a via bending vibration deformation after, and return back to initial Position, and subsequent piezoelectric actuator 13 is driven by voltage to vibrate upwards, the so same volume for squeezing first chamber 121, again At this time since piezoelectric actuator 13 is to be lifted upwards, the displacement of the lifting can be d, so that the gas in first chamber 121 It can be flowed towards two sides, and then drive gas constantly to enter from at least air inlet 110 on inlet plate 11, then flow into central fovea Portion 111 is formed by chamber, then as shown in fig. 5e, which is resonated by the vibration that piezoelectric actuator 13 is lifted upwards Upwards, the movable part 12a of resonance plate 12 is also to upward position, and then makes the gas in central recess 111 again by resonance plate 12 Central hole 120 and flow into first chamber 121, and it is downward via the gap 135 between the bracket of piezoelectric actuator 13 132 Pass through outflow minisize fluid control device 1A.Thus state sample implementation is as it can be seen that when resonance plate 12 carries out vertical reciprocating vibration, The maximum distance that can increase its vertical displacement by its gap g0 between piezoelectric actuator 13, in other words, in this two Gap g0 is arranged between structure can make resonance plate 12 can produce upper and lower displacement by a larger margin when resonance, and wherein the piezoelectricity causes The vibration displacement of dynamic device is d, and the difference with gap g0 is x, i.e. x=g0-d, after tested as x≤0um, to there is noise state； As x=1 to 5um, the 1 maximum output air pressure of micro pressure power device can reach 350mmHg；When x=5 to 10um, micro pressure 1 maximum output air pressure of power device can reach 250mmHg；When x=10 to 15um, 1 maximum output gas of micro pressure power device Pressure can reach 150mmHg, and numerical value corresponding relationship is as shown in the following Table II.Above-mentioned numerical value be operating frequency be 17K extremely Between 20K, voltage is operated between ± 10V to ± 20V.In this way, in the runner design through this minisize fluid control device 1A Barometric gradient is generated, gas flow at high rates is made, and through the resistance difference in runner disengaging direction, gas is transmitted to by suction side Outlet side, and in the state that outlet side has air pressure, it still has the ability to continue pushing out gas, and can reach mute effect.

(table two)

Test item	X (displacement and gap difference)	Maximum output air pressure
			1	X=1 to 5um	350mmHg
2	X=5 to 10um	250mmHg
			3	X=10 to 15um	150mmHg

In addition, the vertical reciprocating type vibration frequency of resonance plate 12 can be with piezoelectric actuator 13 in some embodiments Vibration frequency is identical, i.e., the two can be simultaneously upwards or downward simultaneously, is that can appoint according to situation is actually applied and apply variation, not To be limited shown in the present embodiment as flowing mode.

Please refer to Figure 1A, Fig. 2A and Fig. 6 A, Fig. 6 B, wherein Fig. 6 A is for micro pressure power device shown in figure 1A Gas collection plate 16 and micro valve device 1B collection press illustrative view, Fig. 6 B is then micro pressure power device shown in figure 1A Gas collection plate 16 and micro valve device 1B release illustrative view.As shown in Figure 1A and Fig. 6 A, the micro pressure of this case is dynamic The micro valve device 1B of power device 1 is sequentially to be stacked by valve sheet 17 and exit plate 18, and minisize fluid control of arranging in pairs or groups The gas collection plate 16 of device 1A processed operates.

In this present embodiment, gas collection plate 16 has a surface 160 and a reference surface 161, be recess on the surface 160 with A gas collection chamber 162 is formed, wherein for the piezoelectric actuator 13 setting, the gas transmitted downwards by minisize fluid control device 1A It then temporarily accumulates in this gas collection chamber 162, and is that there are multiple through holes in gas collection plate 16, it includes have the first through hole 163 and second through hole 164, one end of the first through hole 163 and the second through hole 164 is connected with gas collection chamber 162, separately One end then respectively on the reference surface 161 of gas collection plate 16 the first release chamber 165 and first outlet chamber 166 be connected. And a protrusion structure 167 is further added at first outlet chamber 166, it may be, for example, but be not limited to a cylindrical structure, The height of the protrusion structure 167 is above the reference surface 161 of the gas collection plate 16, and the height of protrusion structure 167 is between 0.3mm To between 0.55mm, and its preferred values is 0.4mm.

Exit plate 18 includes a release through-hole 181, an outlet through hole 182, a reference surface 180 and a second surface 187, wherein the release through-hole 181, outlet through hole 182 are through the reference surface 180 and second surface 187 of exit plate 18, should One second release chamber 183 of recess and a second outlet chamber 184, the release through-hole 181 are located at second and unload on reference surface 180 183 central part of chamber is pressed, and is connected to runner with more one between the second release chamber 183 and second outlet chamber 184 185, circulate to supplied gas, and one end of outlet through hole 182 is connected with second outlet chamber 184, the other end then with outlet 19 are connected, in this present embodiment, outlet 19 be can be connected with a device (not shown), such as: press machine, but not as Limit.

There is a valve opening 170 and multiple positioning holes 171, the thickness of the valve sheet 17 is between 0.1mm on valve sheet 17 To between 0.3mm, and its preferred values is 0.2mm.

When valve sheet 17 positions assembling between gas collection plate 16 and exit plate 18, the release through-hole 181 of the exit plate 18 Corresponding to first through hole 163 of the gas collection plate 16, which corresponds to the first release of the gas collection plate 16 Chamber 165, which corresponds to the first outlet chamber 166 of the gas collection plate 16, and the valve sheet 17 is set to Between the gas collection plate 16 and the exit plate 18, the first release chamber 165 of barrier is connected to the second release chamber 183, and the valve The valve opening 170 of piece 17 is set between second through hole 164 and the outlet through hole 182, and valve opening 170 is located at gas collection plate 16 The protrusion structure 167 of first outlet chamber 166 and be correspondingly arranged, by the design of this single valve opening 170, so that gas can be because It answers its pressure difference and achievees the purpose that one-way flow.

The protrusion structure 181a that 181 one end of release through-hole of the exit plate 18 can add a protrusion and be formed into one again, It may be, for example, but be not limited to cylindrical structure, the height of protrusion structure 181a is between 0.3mm between 0.55mm, and it is preferably Value is 0.4mm, and this protrusion structure 181a penetrates improvement to increase its height, and the height of protrusion structure 181a is above this The reference surface 180 of oralia 18 to reinforce contradicting valve sheet 17 rapidly and close release through-hole 181, and reaches a prestressing Conflict acts on the effect being fully sealed；And exit plate 18 has more an at least position limiting structure 188, the height of the position limiting structure 188 Degree is 0.32mm, and by taking the present embodiment as an example, it and is an annular block that position limiting structure 188, which is set in the second release chamber 183, Structure, and be not limited, predominantly when micro valve device 1B carries out collection pressure operation, it is provided with Auxiliary support valve sheet 17 It is used, to prevent valve sheet 17 from collapsing, and can make valve sheet 17 can more quickly opening and closing of fault.

When micro valve device 1B collection presses actuation, main as shown in Figure 6A, being can be in response to from minisize fluid control Pressure provided by the gas that device 1A processed is transmitted downwards, and or when extraneous atmospheric pressure is greater than the dress connecting with outlet 19 When setting the internal pressure of (not shown), then gas can be from the gas collection chamber 162 in the gas collection plate 16 of minisize fluid control device 1A The first release chamber 165 and first outlet chamber are flowed downwardly into through the first through hole 163 and the second through hole 164 respectively In 166, at this point, downward gas pressure is so that flexible valve sheet 17 is bent downwardly deformation and then make the first release chamber 165 volume increases, and corresponds to end that is smooth downwards and being resisted against release through-hole 181, Jin Erke at the first through hole 163 The release through-hole 181 of exit plate 18 is closed, therefore will not be flowed out from release through-hole 181 in the gas in the second release chamber 183. Certainly, the present embodiment adds the design of a protrusion structure 181a using 181 end of release through-hole, to reinforce making valve sheet 17 It rapidly contradicts and closes release through-hole 181, and achieve the effect that prestressing conflict effect is fully sealed, while and being set through ring Position limiting structure 188 in 181 periphery of release through-hole, with Auxiliary support valve sheet 17, so that it will not generate to collapse.On the other hand, Since gas is to flow downwardly into first outlet chamber 166 from the second through hole 164, and correspond to first outlet chamber 166 The valve sheet 17 at place is also bent downwardly deformation, so that its corresponding valve opening 170 is opened downwards, gas then can be from first outlet chamber Room 166 flows into second outlet chamber 184 via valve opening 170, and flow to by outlet through hole 182 outlet 19 and with outlet 19 In the device (not shown) being connected, whereby to carry out the actuation for collecting pressure to the device.

It please continue refering to Fig. 6 B, when micro valve device 1B carries out release, being can be by regulation minisize fluid control dress The gas transport amount for setting 1A makes in gas no longer input set gas chamber 162, or when the device (not shown) connecting with outlet 19 When internal pressure is greater than extraneous atmospheric pressure, then micro valve device 1B can be made to carry out release.At this point, gas will oneself and outlet The outlet through hole 182 of 19 connections is input in second outlet chamber 184, so that the volume expansion of second outlet chamber 184, in turn Promote flexible valve sheet 17 to be bent upwards deformation, and upwards it is smooth, be resisted against on gas collection plate 16, therefore the valve opening of valve sheet 17 170 can close because being resisted against gas collection plate 16.Certainly, in the present embodiment, protrusion knot is added using first outlet chamber 166 The design of structure 167, therefore be bent upwards deformation for flexible valve sheet 17 and more rapidly contradict, reach valve opening 170 more favorably One prestressing conflict effect attaches the closed state of sealing completely, therefore, when being in original state, the valve opening 170 of valve sheet 17 It can be closed because abutting is resisted against the protrusion structure 167, then the gas in the second outlet chamber 184 will not be countercurrently to first In outlet chamber 166, to achieve the effect that preferably to prevent gas from leaking outside.And the gas in second outlet chamber 184 be can It is flow in the second release chamber 183 via connection runner 185, and then makes the volume expanded of the second release chamber 183, and made pair It should be equally bent upwards deformation in the valve sheet 17 of the second release chamber 183, not support to be closed in due to valve sheet 17 at this time and unload 181 end of through-hole is pressed, therefore the release through-hole 181 is i.e. in the open state, i.e. gas in the second release chamber 183 can be by release Through-hole 181 flows outwardly into row release operation.Certainly, the present embodiment, the protrusion structure added using 181 end of release through-hole The position limiting structure 188 that 181a or transmission are set in the second release chamber 183 allows flexible valve sheet 17 to be bent up curved Change is quickly, more advantageous to be detached from the state for closing release through-hole 181.In this way, then can by this unidirectional release operation will with go out Gas in the devices (not shown) of 19 connection of mouth is discharged and is depressured, or is completely exhausted out and completes release operation.

Please refer to Figure 1A, Fig. 2A and Fig. 7 A Fig. 7 A to Fig. 7 E, wherein Fig. 7 A Fig. 7 A to Fig. 7 E be shown in figure 1A The collection of micro pressure power device presses illustrative view.As shown in Fig. 7 A Fig. 7 A, micro pressure power device 1 is i.e. by minisize fluid Formed combined by control device 1A and micro valve device 1B, wherein minisize fluid control device 1A be it has been observed that sequentially by The knot such as inlet plate 11, resonance plate 12, piezoelectric actuator 13, insulating trip 141, conductive sheet 15, another insulating trip 142 and gas collection plate 16 Structure stack assembly positions, and is to have a gap g0 between resonance plate 12 and piezoelectric actuator 13, and in resonance plate 12 There is first chamber 121 between piezoelectric actuator 13, and, micro valve device 1B is then equally by valve sheet 17 and outlet Sequentially stack assembly is located on the gas collection plate 16 of minisize fluid control device 1A and forms plates 18 etc., and controls in minisize fluid Be between the gas collection plate 16 and piezoelectric actuator 13 of device 1A have gas collection chamber 162, in gas collection plate 16 reference surface 161 more Be recessed one first release chamber 165 and first outlet chamber 166, and is more recessed one in the reference surface 180 of exit plate 18 Second release chamber 183 and second outlet chamber 184, in the present embodiment, by the operation frequency of the micro pressure power device Rate be 27K between 29.5K, operation voltage is ± 10V to ± 16V, and arranges in pairs or groups by these multiple and different pressure chamber The driving of piezoelectric actuator 13 and the vibration of resonance plate 12, valve sheet 17 are transmitted so that gas is pressed to next part.

As shown in Figure 7 B, when the piezoelectric actuator 13 of minisize fluid control device 1A is vibrated downwards by voltage actuation, Then gas can be entered in minisize fluid control device 1A by the air inlet 110 on inlet plate 11, and via at least one confluence round 112 flow downwardly into be pooled at its central recess 111, then via the hollow bore 120 on resonance plate 12 to first chamber 121 In.Thereafter, then as seen in figure 7 c, due to the resonant interaction vibrated by piezoelectric actuator 13, resonance plate 12 also can with carry out it is past Compound vibration, i.e., its vibrate downwards, and close on the protrusion 130c of the suspension board of piezoelectric actuator 13 130, by this resonance The deformation of piece 12 so that the volume of the chamber at the central recess 111 of inlet plate 11 increases, and compresses first chamber 121 simultaneously Volume, and then promote the gas in first chamber 121 push to two sides flow, and then by piezoelectric actuator 13 bracket Gap 135 between 132 and pass through circulation downwards, to flow between minisize fluid control device 1A and micro valve device 1B In gas collection chamber 162, and again by corresponding downwards with the first through hole 163 that gas collection chamber 162 is connected and the second through hole 164 Flow in the first release chamber 165 and first outlet chamber 166, thus state sample implementation as it can be seen that when resonance plate 12 carry out it is vertical When reciprocating vibration, it is the maximum distance that can increase its vertical displacement by its gap g0 between piezoelectric actuator 13, changes Sentence is talked about, and gap g0 is arranged between two structure can make resonance plate 12 can produce upper and lower displacement by a larger margin when resonance.

Then, then as illustrated in fig. 7d, since the resonance plate 12 of minisize fluid control device 1A returns back to initial position, and press Electric actuator 13 is driven by voltage to vibrate upwards, and wherein the vibration displacement of the piezoelectric actuator is d, the difference with gap g0 Value be x, i.e. x=g0-d, after tested when x=1 to 5um, the operating frequency be 27k to 29.5KHz, operation voltage be ± 10V extremely When ± 16V, maximum output air pressure can reach at least 300mmHg, and but not limited to this.It is so same to squeeze first chamber 121 Volume so that gas in first chamber 121 is flowed towards two sides, and by the gap between the bracket of piezoelectric actuator 13 132 135 are constantly input in gas collection chamber 162, the first release chamber 165 and first outlet chamber 166, so more make Air pressure in one release chamber 165 and first outlet chamber 166 is bigger, and then it is curved to push flexible valve sheet 17 to generate downwards Curved change, then in the second release chamber 183, valve sheet 17 is then smooth downwards and is resisted against the protrusion of 181 end of release through-hole Structure 181a, and then release through-hole 181 is closed, and in second outlet chamber 184, outlet through hole is corresponded on valve sheet 17 182 valve opening 170 is to open downwards, makes the gas in second outlet chamber 184 that can be passed down to outlet by outlet through hole 182 19 and any device (not shown) for being connect with outlet 19, and then to achieve the purpose that collection pressure operation.Finally, then such as Fig. 7 E institute Show, is shifted up when the resonance plate 12 of minisize fluid control device 1A resonates, and then make the center of 11 first surface 11b of inlet plate Gas in recess portion 111 can be flowed into first chamber 121 by the hollow bore 120 of resonance plate 12, then via piezoelectric actuator Gap 135 between 13 bracket 132 and be transmitted continuously to downwards in gas collection plate 16, then since its gas pressure is to continue downwards Increase, therefore gas still can be constantly via gas collection chamber 162, the second through hole 164, first outlet chamber 166, second outlet chamber Room 184 and outlet through hole 182 and flow in outlet 19 and any device for connect with outlet 19, this collection presses operation to be can be via outer Pressure difference in the atmospheric pressure and device on boundary is with what is driven, and but not limited to this.

When the device connecting with outlet 19 internal pressure (not shown) is greater than extraneous pressure, then micro pressure power Device 1 is the operation that can carry out decompression or release as shown in Figure 8, is depressured or the flowing mode of making of release is mainly such as preceding institute It states, can make in gas no longer input set gas chamber 162 by the gas transport amount of regulation minisize fluid control device 1A, at this point, Gas will be input in second outlet chamber 184 from the outlet through hole 182 connecting with outlet 19, so that second outlet chamber 184 Volume expansion, and then flexible valve sheet 17 is promoted to be bent upwards deformation, and upwards it is smooth, be resisted against first outlet chamber In 166 protrusion structure 167, and close the valve opening 170 of valve sheet 17, i.e., the gas in second outlet chamber 184 will not be inverse It flow in first outlet chamber 166；And the gas in second outlet chamber 184 is can to flow to the via connection runner 185 In two release chambers 183, then by release through-hole 181 to carry out release operation；It so can be by the list of this micro valve structure 1B The gas in the device connecting with outlet 19 is discharged to gas transport operation and is depressured, or is completely exhausted out and completes release work Industry.

As shown in the above description, miniature with micro pressure power device 1 in the micro pressure power device 1 of this case Change, properties variation is as shown in following table three:

Table three

Thus table is as it can be seen that after sampled 25 micro pressure power devices, 1 product actual experiment, the knot obtained by the experiment By being: during the equal large scale 14mm of side length of the suspension board 130 of square is tapered into 7.5mm, finding with this While a little size dimensions reduce, and yield and the function of maximum output air pressure step up, and resulting preferred dimensions are 7.5mm to 8.5mm, it has further been found that the preferred dimensions especially in its operating frequency in 27K between 29.5KHz, Ke Yiti The function of rising maximum output air pressure reaches at least 300mmHg or more.Its reasonable supposition of the above phenomenon is seemingly when suspension board 130 When side length reduces, then so that the suspension board 130 is reduced the deformation of its horizontal direction when vertical vibration, therefore vertical direction can be promoted Kinetic energy effective use, and because side length reduce when can reduce assembling when in the error amount of vertical direction, suspension board can be reduced whereby Interference and collision between 130 and resonance plate 12 or other assembly elements and maintain the suspension board 130 and the resonance plate 12 certain Distance, thus yield can with promoted and at the same time increasing the function of its maximum output air pressure.In addition, when piezoelectric actuator 13 The size reduction of suspension board 130, piezoelectric actuator 13 can also be made smaller, be not easy in inclined situation when vibration, internal Gas flow volume reduces, and is conducive to the promotion or compression of air, thus can improving performance it is outer and can synchronize the element of diminution entirety Size.Furthermore as described in aforementioned, for piezoelectric actuator 13 be equipped with larger size suspension board 130 and piezoelectric ceramic plate 133 and Speech is easy torsional deformation when vibration since the rigidity of suspension board 130 is poor, is easy it and resonance plate 12 or other assemblings Generate interference and collision between element, therefore it generates that noise ratio is higher, and noise problem be also cause product bad reason it One, therefore large-sized suspension board 130 is with piezoelectric ceramic plate 133 that bad rate is higher, therefore, when suspension board 130 and piezoelectric ceramics When 133 size reduction of plate, in addition to improving performance, reducing the advantages that noise, the fraction defective of product can be also reduced.

Nevertheless, above-mentioned reduce the enhancement yield and increase its maximum output gas that size dimension makes because of suspension board 130 The function of pressure is to promote function reason by obtained in experiment, can not lean on theoretical formula institute direct derivation Speculate only as the rational reference of experiment.

Certainly, this case micro pressure power device 1 is to reach the trend of slimming, and minisize fluid control device 1A is assembled The overall thickness of micro valve device 1B is between the height of 2mm to 6mm, and then it is light comfortable to reach minitype gas power device 1 Portable purpose, and can be widely used in medical equipment and relevant device.

In conclusion micro pressure power device provided by this case, mainly by minisize fluid control device and miniature Valving is mutually assembled, and enters gas from the air inlet on minisize fluid control device, and utilizes piezoelectric actuator Actuation makes gas generate barometric gradient in the runner and pressure chamber after design, and then makes gas flow at high rates and be transferred to In micro valve device, then through the one-way cock design of micro valve device, flow gas in one direction, and then can will press Power accumulates in any device connected with outlet；And when being intended to carry out decompression or release, then regulate and control minisize fluid control device Transmission quantity, and make gas can by be transmitted to the second outlet chamber of micro valve device in the device of outlet connection, and by Connection runner by be transmitted to the second release chamber, then flowed out by release through-hole, and then gas can be made promptly to transmit to reach, And can reach mute effect simultaneously, it so that the overall volume of minitype gas power device is reduced and is thinned, and then make micro- Type aerodynamic device reaches light comfortable portable purpose, and can be widely used in medical equipment and relevant device In.Therefore, the great value of industrial utilization of minitype gas power device of this case, whence are filed an application in accordance with the law.

Even if the utility model has been described in detail by above-described embodiment and can apply craftsman's think of by being familiar with this those skilled in the art times and be Modification as all, it is so neither de- as attached claim is intended to Protector.

[symbol description]

1: micro pressure power device

1A: minisize fluid control device

1B: micro valve device

1a: shell

10: pedestal

11: inlet plate

11a: the second surface of inlet plate

11b: the first surface of inlet plate

110: air inlet

111: central recess

112: confluence round

12: resonance plate

12a: movable part

12b: fixed part

120: hollow bore

121: first chamber

13: piezoelectric actuator

130: suspension board

130a: the second surface of suspension board

130b: the first surface of suspension board

130c: protrusion

130d: central part

130e: peripheral part

131: outline border

131a: the second surface of outline border

131b: the first surface of outline border

132: bracket

132a: the second surface of bracket

132b: the first surface of bracket

133: piezoelectric ceramic plate

134,151: conductive connecting pin

135: gap

141,142: insulating trip

15: conductive sheet

16: gas collection plate

16a: accommodating space

160: surface

161: reference surface

162: gas collection chamber

163: the first through holes

164: the second through holes

165: the first release chambers

166: first outlet chamber

167,181a: protrusion structure

168: side wall

17: valve sheet

170: valve opening

171: positioning hole

18: exit plate

180: reference surface

181: release through-hole

182: outlet through hole

183: the second release chambers

184: second outlet chamber

185: connection runner

187: second surface

188: position limiting structure

19: outlet

G0: gap

(a)~(x): the different state sample implementations of piezoelectric actuator

A0, i0, j0, m0, n0, o0, p0, q0, r0: suspension board

A1, i1, m1, n1, o1, p1, q1, r1: outline border

A2, i2, m2, n2, o2, p2, q2, r2: bracket, plate interconnecting piece

A3, m3, n3, o3, p3, q3, r3: gap

D: the vibration displacement of piezoelectric actuator

S4, t4, u4, v4, w4, x4: protrusion

M2 ', n2 ', o2 ', q2 ', r2 ': bracket is connected to the end of outline border

M2 ", n2 ", o2 ", q2 ", r2 ": bracket is connected to the end of suspension board

Claims (15)

1. a kind of minisize fluid control device, includes:

One piezoelectric actuator includes:

One suspension board, the kenel being square have the side length between 7.5mm to 12mm, and can be by a central part a to periphery Portion's bending vibration；

One outline border, around the outside for being set to the suspension board；

An at least bracket is connected between the suspension board and the outline border, to provide resilient support；

One piezoelectric ceramic plate, the kenel being square have the side length no more than the suspension board side length, are attached at the suspension board On one first surface, to apply voltage to drive the suspension board bending vibration；And

One shell, comprising:

One gas collection plate has a frame structure of side wall for periphery, and is more recessed in inner surface to constitute a gas collection chamber, to It is set in the gas collection chamber for the piezoelectric actuator；And

One pedestal, closing is set to the bottom of the piezoelectric actuator, and has a hollow bore, and the hollow bore is outstanding corresponding to this The central part of kickboard and be arranged；Wherein, the gas collection plate with more it is multiple through setting through holes, when the piezoelectric actuator by When voltage drives, the suspension board also with bending vibration, and fluid is transmitted to the air collecting chamber from the hollow bore of the pedestal Room, then be discharged by multiple through hole.

2. minisize fluid control device as described in claim 1, which is characterized in that the suspension board of the piezoelectric actuator is in one There is a protrusion on two surfaces.

3. minisize fluid control device as claimed in claim 2, which is characterized in that the protrusion height of the suspension board be between 0.02mm is between 0.08mm.

4. minisize fluid control device as claimed in claim 2, which is characterized in that the protrusion of the suspension board is a circular protrusions Structure, diameter are 0.55 times of size of the minimum side length of the suspension board.

5. minisize fluid control device as described in claim 1, which is characterized in that at least a bracket is for this of the piezoelectric actuator One plate interconnecting piece, to connect the suspension board and the outline border.

6. minisize fluid control device as claimed in claim 5, which is characterized in that the both ends of the plate interconnecting piece are relative to each other It answers and is set on same axis.

7. minisize fluid control device as claimed in claim 5, which is characterized in that the plate interconnecting piece is between 0~45 degree Oblique angle is connected to the suspension board and the outline border.

8. minisize fluid control device as described in claim 1, which is characterized in that an at least bracket packet for the piezoelectric actuator It has included:

One beam portion is set in the gap between the suspension board and the outline border, setting direction be parallel to the outline border and The suspension board；

One suspension board interconnecting piece, is connected between the beam portion and the suspension board；And

One outline border interconnecting piece, is connected between the beam portion and the outline border, and corresponds to each other and be arranged with the suspension board interconnecting piece In on same axis.

9. minisize fluid control device as described in claim 1, which is characterized in that the thickness of the suspension board of the piezoelectric actuator Between 0.1mm between 0.4mm.

10. minisize fluid control device as described in claim 1, which is characterized in that the piezoelectric ceramic plate of the piezoelectric actuator Thickness between 0.05mm between 0.3mm.

11. minisize fluid control device as described in claim 1, which is characterized in that the pedestal includes an inlet plate and a resonance Piece, the inlet plate have a first surface and a second surface, have an at least air inlet on the second surface, this at least one into Stomata is through to the first surface, also has at least one confluence round on the first surface, which is At least an air inlet is connected and is correspondingly arranged with this, is to have a central fovea at the center exchange of at least one confluence round Then converge and be concentrated in this to be inputted and be guided by an at least air inlet by fluid at least one confluence round in portion It at heart recess portion, and is that can correspond to the confluence chamber for constituting confluence fluid at the central recess, so that fluid is temporary.

12. minisize fluid control device as described in claim 1, which is characterized in that the minisize fluid control device has more two Insulating trip and a conductive sheet, and two insulating trip is the upper and lower sandwiched conductive sheet, and is correspondingly arranged on the piezoelectric actuator, And the form of two insulating trip and the conductive sheet approximately corresponds to the form of the outline border of the piezoelectric actuator.

13. minisize fluid control device as described in claim 1, which is characterized in that the gas collection plate with more a reference surface with And multiple through holes, and be recess one first release chamber of setting and a first outlet chamber on the reference surface, and multiple Through hole includes first through hole and at least one second through hole, and one end of the first through hole and the gas collection chamber phase Connection, the other end be then connected respectively with the first release chamber and one end of at least one second through hole be with this One outlet chamber is connected, and a protrusion structure is further added at the first outlet chamber.

14. minisize fluid control device as claimed in claim 13, which is characterized in that the minisize fluid control device can be further It arranges in pairs or groups a micro valve device, which includes a valve sheet and an exit plate, the valve sheet and the exit plate It sequentially stacks and is set on the gas collection plate of the minisize fluid control device, which has a valve opening, and wherein the valve opening is The protrusion structure of the first outlet chamber corresponding to the gas collection plate and be arranged and the exit plate have a reference surface and One second surface, and there is a release through-hole and an outlet through hole through the second surface and the reference surface, in the benchmark Recess forms a second outlet chamber on surface and one second release chamber, the second release chamber are to be correspondingly arranged in this to unload Press through hole, which is then correspondingly arranged at the outlet through hole, and in the second release chamber and this second It is further provided with a connection runner between outlet chamber, is circulated with for fluid；And one end of the release through-hole and second release Chamber is connected, and the end can further add a protrusion and the protrusion structure that is formed, promote the valve opening of the valve sheet It can be closed because abutting is resisted against the protrusion structure under the atmospheric pressure effect of the outlet through hole, make the fluid in the gas collection plate Will not be countercurrently into the first outlet chamber, and the first release chamber of the gas collection plate is also blockaded by the valve sheet, is caused The valve sheet reaches the opening and closing of fault of control fluid conveying.

15. minisize fluid control device as claimed in claim 14, which is characterized in that the exit plate of the micro valve device is more With a position limiting structure, which is set to the second release chamber, and with the Auxiliary support valve sheet, so that it will not generate It collapses, and can make the valve sheet can more quickly opening and closing of fault.