CN103339380A - Fluid-control device, and method for adjusting fluid-control device - Google Patents
Fluid-control device, and method for adjusting fluid-control device Download PDFInfo
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- CN103339380A CN103339380A CN2012800070342A CN201280007034A CN103339380A CN 103339380 A CN103339380 A CN 103339380A CN 2012800070342 A CN2012800070342 A CN 2012800070342A CN 201280007034 A CN201280007034 A CN 201280007034A CN 103339380 A CN103339380 A CN 103339380A
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- 238000003825 pressing Methods 0.000 claims abstract description 39
- 239000012530 fluid Substances 0.000 claims description 73
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- 239000007788 liquid Substances 0.000 claims description 5
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- 238000005086 pumping Methods 0.000 description 41
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- 238000005516 engineering process Methods 0.000 description 2
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Abstract
Provided are a fluid-control device capable of adjusting the natural frequency of a flexible plate to an optimal value, and a method for adjusting the fluid-control device. In a pressing step, a piezoelectric pump (101) is placed on a stage (502), with a cover plate (195) facing up; the stage (502) is raised; and the center portion of the main surface of the cover plate (195) on the side opposite the vibration plate (141) is depressed using a pressing pin (503). As a result, the cover plate (195) and a base plate (191) form a flexed shape projecting upward on the vibration-plate (141) side, pulling the portion bonded to a a flexible plate (151) and flexing the flexible plate (151) to project upward on the vibration-plate (141) side. This causes residual tensile stress to occur in the movable part (154) of the flexible plate (151), increasing the tensile stress of the movable part (154) of the flexible plate (151) due to the residual tensile stress, and allowing the natural frequency of the movable part (154) to be adjusted to an optimal value obtained at a desired pump pressure at or above a designated value with power consumption within a permissible range.
Description
Technical field
The present invention relates to a kind of fluid control device of fluid control and regulating method of this fluid control device of carrying out.
Background technique
Existing fluid pump is disclosed in patent documentation 1.
Figure 10 is the figure that the pump under the 3rd rank resonance mode of fluid pump of expression patent documentation 1 extracts action.Fluid pump shown in Figure 10 comprises: pump main body 10; Vibrating plate 20, the peripheral part of this vibrating plate 20 is fixed in pump main body 10; Piezoelectric element 23, this piezoelectric element 23 is pasted on the central part of above-mentioned vibrating plate 20; First opening portion 11, this first opening portion 11 are formed at the position relative with the substantial middle portion of vibrating plate 20 of pump main body 10; And second opening portion 12, this second opening portion 12 is formed at central part and the zone line of peripheral part or the position relative with this zone line of pump main body of vibrating plate 20.Vibrating plate 20 is metal, and piezoelectric element 23 forms the size that covers first opening portion 11 and do not arrive second opening portion 12.
In fluid pump shown in Figure 10, by piezoelectric element 23 being applied the voltage of assigned frequency, the part in the opposite direction bending deflection relative with second opening portion 12 of the part relative with first opening portion 11 of vibrating plate 20 and vibrating plate 20.By this, an opening portion from first opening portion 11 and second opening portion 12 sucks fluid, and this fluid is discharged from another opening portion.
The prior art document
Patent documentation
Patent documentation 1: the international pamphlet that discloses No. 2008/069264
Summary of the invention
Invent technical problem to be solved
The fluid pump structure of such structure shown in Figure 10 is simple and can form thinlyyer, thereby for example can be used as the air of fuel cell system and carry and use pump.But, owing to have the trend of miniaturization usually as the electronic equipment of the assembling destination of fluid pump (Japanese: Group み Write body is earlier), therefore, require the miniaturization more under the situation of the ability that does not reduce the fluid pump (flow and pressure) of fluid pump.The miniaturization of fluid pump, then the ability of pump (flow and pressure) descends, and therefore, if want miniaturization in the ability of holding pump, has boundary in the fluid pump of existing structure.
Therefore, the present inventor studies the fluid pump of structure shown below.
Figure 11 is the sectional view of structure of the major component of the above-mentioned fluid pump of expression.Fluid pump 901 comprises cover plate 95, substrate 39, flexible plate 35, dividing plate 37, vibrating plate 31 and piezoelectric element 32, and has the structure that above-mentioned member is stacked gradually.In fluid pump 901, piezoelectric element 32 and the vibrating plate 31 that engages with piezoelectric element 32 constitute actuator 30.
The end of above-mentioned vibrating plate 31 is adhesively fixed on the end of flexible plate 35 across dividing plate 37, be formed with vent 35A at the center of this flexible plate 35.Therefore, vibrating plate 31 is supported on dividing plate 37 in the mode of separating the distance of the thickness that is equivalent to dividing plate 37 with flexible plate 35.
In addition, at flexible plate 35 joints substrate 39 is arranged, be formed with opening portion 40 at the center of this substrate 39.The pressure oscillation of the fluid that produces because of the vibration along with actuator 30, the part of the covering opening portion 40 of flexible plate 35 can be with the frequency vibration identical with actuator 30 essence.
Namely, utilize the structure of above-mentioned flexible plate 35 and substrate 39, make the part of covering opening portion 40 of flexible plate 35 become can flexure vibrations movable part 41, and make ratio movable part 41 part more in the outer part of flexible plate 35 become the fixing part 42 that is subjected to substrate 39 restrictions.In addition, the center in movable part 41 zone relative with actuator 30 that comprise flexible plate 35.
In addition, in the lower bond of substrate 39 cover plate 95 is arranged, cover plate 95 is provided with the vent 97 that is communicated with opening portion 40.
In above structure, if piezoelectric element 32 is applied driving voltage, then in fluid pump 901, because of stretching of piezoelectric element 32, and make vibrating plate 31 flexure vibrations, be accompanied by the vibration of vibrating plate 31, the movable part 41 of flexible plate 35 vibrates.By this, fluid pump 901 is discharged from vent 97 suction air or with air.
Thereby in fluid pump 901, the movable part 41 of flexible plate 35 can be accompanied by the vibration of actuator 30 and vibrate, and can increase vibration amplitude substantially, therefore, though fluid pump 901 small-sized, the low back ofs the body can obtain higher head pressure (hereinafter referred to as " pumping pressure ") and bigger flow.
At this, the natural frequency of flexible plate 35 is to be determined by the tensile stress of the material of the thickness of the diameter of movable part 41, movable part 41, movable part 41 and movable part 41 etc.The natural frequency of flexible plate 35 is close to the driver frequency that is applied to the driving voltage on the fluid pump 901, then the movable part 41 of flexible plate 35 high vibration along with the vibration of actuator 30.
Yet in the individuality of each fluid pump 901, all there is deviation in the shape that constitutes each member of fluid pump 901, in addition, also has boundary on the Location accuracy of above-mentioned each member being carried out when stacked.Therefore, also there is deviation in the natural frequency of flexible plate 35 in the individuality of each fluid pump 901.
Therefore, in fluid pump 901, the natural frequency of flexible plate 35 is difficult to accurately to be adjusted to the optimum value that obtains the desirable pumping pressure more than the specified value under can the power consumption in allowed band.
Therefore, the object of the present invention is to provide and a kind ofly the natural frequency of flexible plate can be adjusted to the fluid control device of optimum value and the regulating method of this fluid control device.
The technological scheme that the technical solution problem adopts
Fluid control device of the present invention has following structure in order to solve the problems of the technologies described above.
(1) fluid control device comprises: vibration plate unit, this vibration plate unit have vibrating plate and surround the deckle board on every side of above-mentioned vibrating plate; Driving body, this driving body are arranged at a side's of above-mentioned vibrating plate interarea, and make above-mentioned vibration plate vibrates; The flexible plate, this flexible plate is provided with the hole, and engages with above-mentioned deckle board in the mode relative with the opposing party's of above-mentioned vibrating plate interarea; And the lid member, this lid member engages with the interarea of an opposite side with above-mentioned vibrating plate of above-mentioned flexible plate, and above-mentioned flexible plate is applied with tensile stress because of above-mentioned lid member.
In said structure, cover the deformation of member by the interarea of an opposite side with vibrating plate of lid member is pressed to make, and so that the vibrating plate side is the mode warpage of convex.Thereupon, because the anastomosis part that engages with the lid member of flexible plate is stretched, therefore, is applied with tensile stress at the flexible plate, and the tensile stress of flexible plate is improved.
Therefore, according to said structure, by utilize to the lid member press to make warpage two variations of cover member, thereby can will be accompanied by the vibration of vibrating plate and the natural frequency of the flexible plate that vibrates be adjusted to can the power consumption in allowed band under the optimum value of desirable head pressure more than the acquisition specified value.Therefore, according to said structure, can head pressure be increased.
(2) comparatively it is desirable to, above-mentioned lid member is formed with recess in central authorities,
Above-mentioned flexible plate has: movable part, and this movable part is relative with the above-mentioned recess of above-mentioned lid member, and the energy flexure vibrations; And fixing part, this fixing part engages with above-mentioned lid member.
In this structure, be accompanied by actuator vibration with movable part and vibrate, therefore, can increase in fact and rouse oneself, by this, pressure and flow are increased.
(3) comparatively it is desirable to, above-mentioned lid member is the conjugant of substrate and cover plate, and wherein, side's interarea of aforesaid substrate engages with the interarea of an opposite side with above-mentioned vibrating plate of above-mentioned flexible plate, and being formed with opening portion in central authorities, above-mentioned cover plate is located on the opposing party's interarea of aforesaid substrate.
In said structure, press by the interarea to the opposite side with vibrating plate of cover plate, thereby make warpage two variations of covering member, and the flexible plate is applied tensile stress.Like this, just the natural frequency of flexible plate can be adjusted to optimum value.
(4) comparatively it is desirable to, the central part at the back side that is equivalent to above-mentioned recess of above-mentioned cover plate is pressed towards above-mentioned vibrating plate side.
In said structure, press by the central part to the interarea of the opposite side with vibrating plate of cover plate, thereby make warpage two variations of covering member, and the flexible plate is applied tensile stress.Like this, just the natural frequency of flexible plate can be adjusted to optimum value.
(5) comparatively it is desirable to, above-mentioned cover plate is formed with impression at above-mentioned central part.
In said structure, to press by the central part to the interarea of the opposite side with vibrating plate of cover plate, this impression is on the cover board residual.Thereupon, because the anastomosis part that engages with the lid member of flexible plate is stretched, therefore, is applied with residual tensile stress at the flexible plate, and obtains the effect identical with (1).
(6) comparatively it is desirable to, above-mentioned fluid control device also comprises outer basket, and above-mentioned lid member constitutes the part of above-mentioned outer basket.
In said structure, press from the outside to the lid member easily.
(7) comparatively it is desirable to, above-mentioned lid member is made of the metallic material of ductility.
In said structure, can make with lower load and cover the member plastic deformation.
(8) comparatively it is desirable to, above-mentioned vibration plate unit also has joint, and this joint is connected above-mentioned vibrating plate with above-mentioned deckle board, and with above-mentioned vibrating plate yielding support in above-mentioned deckle board.
In said structure and since vibrating plate use joint flexibly yielding support therefore, can hinder the flexure vibrations by the flexible vibrating plate that causes of piezoelectric element hardly in deckle board.Therefore, the loss that the flexure vibrations that are accompanied by vibrating plate are brought tails off.
(9) comparatively it is desirable to, above-mentioned vibrating plate and above-mentioned driving body constitute actuator, and above-mentioned actuator is discoideus.
In said structure, because actuator is in the vibrational state of rotation symmetric figure (concentric circles), therefore, between actuator and flexible plate, do not produce unwanted gap, and the efficiency of movement as pump is improved.
In addition, the regulating method of fluid control device of the present invention has following structure in order to solve the problems of the technologies described above.
(10) regulating method of fluid control device comprises: check operation, check in the operation at this, to measuring because of the head pressure of the vibration of the above-mentioned vibrating plate liquid that the fluid control device of any is discharged from above-mentioned (1) to (9), and check whether above-mentioned head pressure is more than the specified value; And
Press operation, press in the operation at this, when above-mentioned head pressure is lower than specified value, the interarea of the opposite side with above-mentioned vibrating plate of above-mentioned lid member is pressed,
The above-mentioned operation of pressing also is included in the above-mentioned operation of getting back to above-mentioned inspection operation after the operation of pressing.
In said method, at first the fluid control device after making is checked operation.At this, when head pressure is specified value when above, being judged as above-mentioned fluid control device does not need to regulate natural frequency, is non-defective unit,
On the other hand, when head pressure is lower than specified value, carry out pressing operation to what the interarea of an opposite side with vibrating plate of lid member was pressed.By this, the lid member becomes so that the vibrating plate side is the shape of the mode warpage of convex, thereupon, and with the anastomosis part stretching that engages with the lid member of flexible plate, so that the vibrating plate side is the mode warpage of convex.Therefore, be applied with residual tensile stress at the flexible plate, and the tensile stress of flexible plate is improved.
Then, for finishing to press the fluid control device of operation, in checking operation, whether be to check more than the specified value to head pressure again.At this, when head pressure is specified value when above, in above-mentioned fluid control device, by pressing operation the flexible plate is adjusted to best natural frequency, fluid control device can be judged as non-defective unit.
On the other hand, in checking again, still be lower than the fluid control device of specified value for head pressure, press operation again.In addition, then, similarly check operation repeatedly and press operation.
In sum, according to said method, the natural frequency of flexible plate can be adjusted to the optimum value that obtains the desirable head pressure more than the specified value under can the power consumption in allowed band.Thereby, according to said method, can provide a kind of fluid control device that when suppressing power consumption, head pressure is increased.
(11) the above-mentioned operation of pressing also comprises the every increase of number of times that above-mentioned lid member is pressed once, just improves the operation of the pressure that above-mentioned lid member is pressed.
In this method, checking operation and press operation once repeatedly, just in pressing operation, improve the pressure that the lid member is pressed, therefore, can be reliably apply distortion with the corresponding size of plus-pressure to covering member.
(12) in above-mentioned inspection operation, driving voltage after dc offset voltage and alternating voltage is overlapping is applied on the above-mentioned driving body, do not compare when being applied to above-mentioned driving body with above-mentioned driving voltage, interval from above-mentioned vibrating plate to above-mentioned flexible plate is broadened, make above-mentioned vibration plate vibrates, and above-mentioned head pressure is measured.
If above-mentioned driving voltage is applied on the driving body, the interval from vibrating plate to the flexible plate is broadened.At this, this is that the head pressure-discharge flow rate characteristic of convection cell control gear is brought the important factor of influence at interval.Therefore, if this broadens at interval, then the head pressure of fluid control device descends.
On the other hand, the tensile stress of flexible plate rises and descends along with the temperature of fluid control device, and natural frequency also descends along with the decline of the tensile stress of flexible plate.That is, the head pressure of fluid control device is along with the temperature of fluid control device rises and descends.
Therefore, after the interval from vibrating plate to the flexible plate broadened, the head pressure of fluid control device was represented the value close to the head pressure of the fluid control device under the temperature higher than normal temperature.
Therefore, under the situation that the head pressure under the higher temperature of contrast normal temperature is measured, long-time driving fluid control gear, and after the temperature that makes fluid control device because of heating rises, need the pumping pressure of convection cell control gear to measure, but in said method, by above-mentioned driving voltage is applied on the driving body, just can simulates ground and measure than the head pressure under the high temperature of normal temperature.Therefore, can implement to check operation the short time.
The invention effect
According to the present invention, the natural frequency of flexible plate can be adjusted to the optimum value that obtains the desirable head pressure more than the specified value under can the power consumption in allowed band.
Description of drawings
Fig. 1 is the stereoscopic figure of the piezoelectric pump 101 of embodiment of the present invention.
Fig. 2 is the exploded perspective view of piezoelectric pump 101 shown in Figure 1.
Fig. 3 is the sectional view of the T-T line of piezoelectric pump 101 shown in Figure 1.
Fig. 4 is the flow chart of first regulating method of the piezoelectric pump 101 of expression embodiment of the present invention.
Fig. 5 is positioned in lid to press on the anchor clamps 501 and the sectional view of the piezoelectric pump 101 when cover plate 195 pressed.
Fig. 6 utilizes lid to press the sectional view that 501 pairs of cover plates 195 of anchor clamps finish the piezoelectric pump 101 after pressing.
Fig. 7 utilizes lid to press the sectional view that 501 pairs of cover plates 195 of anchor clamps finish the major component of the piezoelectric pump 101 after pressing.
Fig. 8 is the chart of the relation between the interval (distance) of 151 of the tensile stress of the flexible plate 151 of expression in first regulating method and piezoelectric actuator 140 and flexible plates.
Fig. 9 is the chart of the relation between the interval (distance) of 151 of the tensile stress of the flexible plate 151 of expression in second regulating method and piezoelectric actuator 140 and flexible plates.
Figure 10 is the sectional view of major component of the fluid pump of patent documentation 1.
Figure 11 is the sectional view of major component of the fluid pump 901 of comparative example of the present invention.
Embodiment
Below, the piezoelectric pump 101 of embodiment of the present invention is described.
Fig. 1 is the stereoscopic figure of the piezoelectric pump 101 of embodiment of the present invention.Fig. 2 is the exploded perspective view of piezoelectric pump 101 shown in Figure 1, and Fig. 3 is the sectional view of the T-T line of piezoelectric pump 101 shown in Figure 1.
As shown in Figure 2, piezoelectric pump 101 comprises: cover plate 195, substrate 191, flexible plate 151, vibration plate unit 160, piezoelectric element 142, dividing plate 135, electrode conduction plate 170, dividing plate 130 and cap 110, and have the structure that above-mentioned member is stacked gradually.
Vibrating plate 141 have the upper surface that is provided with piezoelectric element 142 and with flexible plate 151 opposing lower surface.Upper surface at discoideus vibrating plate 141 is adhesively fixed with piezoelectric element 142, constitutes discoideus actuator 140 by vibrating plate 141 and piezoelectric element 142.At this, involving vibrations plate 141 is formed by the linear expansion coeffcient metallic material bigger than the linear expansion coeffcient of piezoelectric element 142 in interior vibration plate unit 160.
Therefore, by vibrating plate 141 and piezoelectric element 142 are heating and curing when bonding, just can when make vibrating plate 141 be convex ground warpage towards piezoelectric element 142 sides, suitable compressive stress be remained on the compressing member 142, thereby can prevent breaking of piezoelectric element 142.For example, vibration plate unit 160 is preferably formed by SUS430 etc.For example, piezoelectric element 142 can be formed by lead zirconate titanate class pottery etc.The linear expansion coeffcient of piezoelectric element 142 is almost nil, and the linear expansion coeffcient of SUS430 is 10.4 * 10
-6K
-1About.
In addition, piezoelectric element 142 is equivalent to " driving body " of the present invention.
The thickness of the dividing plate 135 preferably thickness with piezoelectric element 142 is identical or bigger slightly than the thickness of piezoelectric element 142.
At this, the material of the binder of adhesives layer 120 for example is thermosetting resins such as epoxy resin, and the material of particulate for example is silica or the resin of by the washing of electric conductivity.In addition, adhesives layer 120 is cured by heating under pressurized conditions when bonding.Therefore, after bonding, deckle board 161 and flexible plate 151 are adhesively fixed under the state that clips a plurality of particulates by adhesives layer 120.
That is, vibrating plate 141 and joint 162 are configured to make the face by flexible plate 151 1 sides of vibrating plate 141 and joint 162 to separate the distance that is equivalent to mean particle dia with flexible plate 151.Therefore, can limit the distance between vibrating plate 141 and joint 162 and the flexible plate 151 by mean particle dia (for example 15 μ m).In addition, joint 162 is the flexible elastic structures with less spring constant.
Therefore, in that flexibly yielding support is on deckle board 161 on 3 o'clock, the flexure vibrations of vibrating plate 141 are hindered hardly by three joints 162 for vibrating plate 141.That is the structure that is not restricted in fact for the periphery of actuator 140 (certainly central part also) of piezoelectric pump 101.Therefore, in piezoelectric pump 101, can make the vibration that is accompanied by vibrating plate 141 and the loss that causes is less, small-sized, the low back of the body, and can obtain higher pressure and than flow greatly.
Upper surface at deckle board 161 is adhesively fixed with resinous dividing plate 135.The thickness of dividing plate 135 is identical or bigger slightly than the thickness of piezoelectric element 42 with the thickness of piezoelectric element 142, constitutes the part of pump basket 180, and with the electrode conduction plate 170 and vibration plate unit 160 electrical insulations that describe below.
Be adhesively fixed with metal electrode conduction plate 170 at dividing plate 135.Electrode conduction with plate 170 by the frame position 171 of rounded opening roughly, in the above-mentioned opening outstanding internal terminal 173 and towards the outside outstanding outside terminal 172 constitutes.
The front end of internal terminal 173 is welded on the surface of piezoelectric element 142.By the welding position being set at the position suitable with the flexure vibrations of actuator 140 joint (Japanese: flexing shake Move Festival), just can suppress the vibration of internal terminal 173.
Be adhesively fixed with resinous dividing plate 130 at electrode conduction with plate 170.Dividing plate 130 has thickness with piezoelectric element 142 same degree at this.Dividing plate 130 is the dividing plates that do not contact with cap 110 for the welding portion that makes internal terminal 173 when the actuator vibration.In addition, dividing plate 130 also can suppress because of piezoelectric element 142 surfaces and the cap 110 undue close situations that cause vibration amplitude to reduce by resistance of air.Therefore, the thickness of dividing plate 130 is so long as get final product with the thickness of piezoelectric element 142 same degree.
Be formed with for the outside terminal 153 that is electrically connected at flexible plate 151.In addition, be formed with vent 152 at the center of flexible plate 151.Flexible plate 151 is relative with vibrating plate 141, and utilizes adhesives layer 120 to be adhesively fixed on the deckle board 161 across a plurality of particulates.
Therefore, in the piezoelectric pump 101 of present embodiment, when deckle board 161 and flexible plate 151 are adhesively fixed by adhesives layer 120, because the thickness of adhesives layer 120 is little unlike the diameter of particulate, therefore, the amount around the binder that can suppress adhesives layer 120 flows out to.
In addition, in piezoelectric pump 101, even if unnecessary binder flows into the gap of joint 162 and 151 of flexible plates, because the face that leans on flexible plate 151 1 sides of joint 162 separates the distance that is equivalent to mean particle dia with flexible plate 151, therefore, it is bonding with flexible plate 151 to suppress joint 162.Similarly, even if the gap that unnecessary binder inflow vibrating plate 141 and flexible plate are 151, because the face by flexible plate 151 1 sides of vibrating plate 141 separates the distance that is equivalent to mean particle dia with flexible plate 151, therefore, it is bonding with flexible plate 151 to suppress vibrating plate 141.
Therefore, in the piezoelectric pump 101 of present embodiment, can suppress to make vibrating plate 141 and joint 162 and the 151 bonding vibrations that hinder vibrating plate 141 of flexible plate because of unnecessary binder.
Lower bond at flexible plate 151 has substrate 191, is formed with at the center of this substrate 191 and overlooks rounded opening portion 192.The pressure oscillation of the air that produces because of the vibration along with actuator 140, the part of the covering opening portion 192 in the flexible plate 151 can be with the frequency vibration identical with actuator 140 essence.
Namely, utilize the structure of above-mentioned flexible plate 151 and substrate 191, make the part of the covering opening portion 192 in the flexible plate 151 become the movable part 154 of energy flexure vibrations, and make ratio movable part 154 part more in the outer part in the flexible plate 151 become the fixing part 155 that is subjected to substrate 191 restrictions.In addition, movable part 154 comprises the center in the zone relative with actuator 140 in the flexible plate 151.The natural frequency of the movable part 154 of above-mentioned circle is designed to the frequency identical or lower slightly than the driver frequency of actuator 40 with the driver frequency of actuator 140.
Therefore, the vibration of responsive actuation device 140, the movable part 154 of the flexible plate 151 centered by vent 152 is also with bigger amplitude vibration.So long as (for example slow 90 °) vibration slower than the vibration phase of actuator 140 of the vibration phase of flexible plate 151 will make the thickness variation essence of clearance space between flexible plate 151 and the actuator 140 increase.By this, can further improve the ability of pump.
Lower bond at substrate 191 has cover plate 195.Be provided with three at cover plate 195 and attract hole 197.Attract hole 197 to be communicated with opening portion 192 by the stream 193 that is formed at substrate 191.Substrate 191 is equivalent to " lid member " of the present invention with the conjugant of cover plate 195, constitutes the part of pump basket 180.This conjugant has the shape of utilizing opening portion 192 to be formed with recess in central authorities.
In addition, the details of the impression 199 that forms for the central authorities at cover plate 195 and interareas vibrating plate 141 opposite sides will be elaborated below.
In this case, because the linear expansion coeffcient of flexible plate 151, substrate 191, cover plate 195 is different with the linear expansion coeffcient of deckle board 161, therefore, by above-mentioned member is heating and curing, just can be when making flexible plate 151 be the convex warpage towards piezoelectric element 142 sides, near the center can flexure vibrations movable part 154 apply suitable tensile stress.
By this, not only can suitably regulate the tensile stress of movable part 154 that can flexure vibrations, and it is lax to enable the movable part 154 of flexure vibrations, and can not hinders the vibration of movable part 154.Because constituting the beryllium copper of flexible plate 151 is spring materials, therefore, even if circular movable part 154 with bigger amplitude vibration, can not produce yet permanent deformation (Japanese: へ り), excellent in te pins of durability.
In addition, actuator 140 and flexible plate 151 all make piezoelectric element 142 sides be convex at normal temperatures, and warpage amount about equally, at this, the temperature rising that heating when driving because of piezoelectric pump 101 causes or the rising of ambient temperature, and the warpage of actuator 140 and flexible plate 151 is all reduced, but under uniform temp, the amount of warpage of actuator 140 and flexible plate 151 about equally.
That is, being subjected to that the diameter of particulate limits, vibrating plate 141 can not change along with the different of temperature with the distance of 151 of flexible plates.Therefore, in the piezoelectric pump 101 of present embodiment, can be in the very big temperature range of width the suitable pressure-flow characteristic of holding pump.
In above structure, as if the driving voltage that outside terminal 153,172 is applied interchange, then in piezoelectric pump 101, actuator 140 is the concentric circles flexure vibrations, is accompanied by the vibration of vibrating plate 141, and the movable part 154 of flexible plate 151 vibrates.By this, piezoelectric pump 101 is drawn to pump chamber 145 from attracting hole 197 via vent 152 with air, and the air of pump chamber 145 is discharged from tap hole 111.
Thereby in piezoelectric pump 101, the movable part 154 of flexible plate 151 can be accompanied by the vibration of actuator 140 and vibrate, therefore, can increase vibration amplitude substantially, piezoelectric pump 101 small-sized, the low back ofs the body, and can obtain higher head pressure (hereinafter referred to as " pumping pressure ") and bigger flow.
At this, the natural frequency of this flexible plate 154 is to be determined by the tensile stress of the material of the thickness of the diameter of movable part 154, movable part 154, movable part 154 and above-mentioned movable part 154 etc.The natural frequency of the movable part 154 of flexible plate 151 is close to the driver frequency that is applied to the driving voltage on the piezoelectric pump 101, then movable part 154 high vibration along with the vibration of actuator 140.
But the tensile stress of movable part 154 is along with the temperature of piezoelectric pump 101 rises and descends.Specifically, in the piezoelectric pump 101 of present embodiment, piezoelectric element 142, vibration plate unit 160, flexible plate 151, substrate 191 and cover plate 195 are engaged (with reference to Fig. 3) under the temperature higher than normal temperature (20 ℃) (for example 120 ℃).
By this, behind the joint, at normal temperatures, difference because of the linear expansion coeffcient of above-mentioned vibration plate unit 160 and piezoelectric element 142, and make vibrating plate 141 so that piezoelectric element 142 sides are the mode warpage of convex, and because of the difference of the linear expansion coeffcient of above-mentioned vibration plate unit 160 and substrate 191, and make flexible plate 151 so that piezoelectric element 142 sides are the mode warpage of convex.
In addition, under the situation that the temperature that the heating when driving because of piezoelectric pump 101 or the variation of ambient temperature make piezoelectric pump 101 rises, the warpage of vibrating plate 141 and flexible plate 151 reduces simultaneously.Therefore, the tensile stress of flexible plate 151 rises and descends along with the temperature of piezoelectric pump 101, and natural frequency also descends along with the decline of the tensile stress of flexible plate 151.That is, the head pressure of piezoelectric pump 101 is along with the temperature of piezoelectric pump 101 rises and descends.
Fig. 8 is the chart of the characteristic of expression piezoelectric pump 101.In Fig. 8, the longitudinal axis is the tensile stress of flexible plate 151, and transverse axis is the interval of piezoelectric actuator 140 and flexible plate 151.
In addition, in piezoelectric pump 101, when the tensile stress of flexible plate 151 descends, for example, from the first operating point L
0Transfer to the second operating point H
0Under such situation, the boundary line h that pumping pressure sharply descends appears.The boundary line h that this pumping pressure is sharply descended is called stripper wire.
For fear of the rapid decline of this pumping pressure, even if the upper limit of the temperature range of supposing when requiring the temperature of piezoelectric pump 101 to rise to actual use in piezoelectric pump 101 (for example 10 ℃～55 ℃), the operating point of piezoelectric pump 101 also is positioned at the top of stripper wire h.On the other hand, the tensile stress of flexible plate 151 neither be more The more the better greatly than stripper wire h, if the tensile stress of flexible plate 151 is strong excessively, then power consumption can increase.
Therefore, when making piezoelectric pump 101, need regulate the natural frequency of the movable part 154 of flexible plate 151, all be contained in the non-defective unit scope R (with reference to Fig. 8) that can obtain the desirable pumping pressure more than the specified value with the power consumption of the scope that allows so that be positioned at the full operating point of the piezoelectric pump 101 of said temperature scope (for example 10 ℃～55 ℃).
Therefore, in the present embodiment, put down in writing first regulating method and second regulating method, be used as the regulating method of this natural frequency.
(first regulating method)
Below, at first the natural frequency with the movable part 154 of the flexible plate 151 of present embodiment is adjusted to and can describes with first regulating method that the power consumption in the allowed band obtains the optimum value of the desirable pumping pressure more than the specified value.
Fig. 4 is the flow chart of first regulating method of the piezoelectric pump 101 of expression embodiment of the present invention.Fig. 5 is positioned in lid to press on the anchor clamps 501 and the sectional view of the piezoelectric pump 101 when cover plate 195 pressed.Fig. 6 utilizes lid to press the sectional view that 501 pairs of cover plates 195 of anchor clamps finish the piezoelectric pump 101 after pressing.Fig. 7 utilizes lid to press the sectional view that 501 pairs of cover plates 195 of anchor clamps finish the major component of the piezoelectric pump 101 after pressing.At this, Fig. 5～Fig. 7 is the sectional view of T-T line shown in Figure 1.In addition, lid shown in Figure 5 press anchor clamps 501 be comprise can lifting worktable 502 and by the anchor clamps of pad 503.In addition, for convenience of explanation, Fig. 7 more pays attention to representing the warpage of the conjugant of vibration plate unit 160, piezoelectric element 142, flexible plate 151, substrate 191 and cover plate 195 than reality.
At first, for a plurality of piezoelectric pumps that produce, measure the pumping pressure of discharging from each piezoelectric pump 101, and check whether this pumping pressure is the above inspection operation (Fig. 4: S1, S2) of specified value.Above-mentioned inspection operation long-time (being 300 seconds in the present embodiment) after a plurality of piezoelectric pumps 101 are dropped into actual Environmental Conditions drives, after the temperature that makes a plurality of piezoelectric pumps 101 because of heating rises near the upper limit of said temperature scope, the pumping pressure of each piezoelectric pump 101 is measured.At this moment, also to needed power consumption is measured in order to drive each piezoelectric pump 101.
At this, have the movable part 154 of best natural frequency under the power consumption of pumping pressure in allowed band for the piezoelectric pump 101 more than the specified value, and do not need to regulate natural frequency.Therefore, this piezoelectric pump 101 just need not just be judged as non-defective unit through pressing operation, and finishes the adjusting to this piezoelectric pump 101.In addition, at this, for the piezoelectric pump 101 that is judged as non-defective unit, in not shown characteristic selection machine, all projects such as pumping pressure, flow, power consumption are measured, further to select.
On the other hand, when the temperature that makes a plurality of piezoelectric pumps 101 rose near the upper limit of said temperature scope, for example, as shown in Figure 8, operating point was from the first operating point L
0Transfer to the second following operating point H of stripper wire h
0, pumping pressure is dropped to the piezoelectric pump 101 that is lower than specified value observes.
Be lower than the piezoelectric pump 101 of specified value for pumping pressure, the pressing force of pressing anchor clamps 501 at the lid of current setting is lower than under the situation of certain value (being 7kgf in the present embodiment), and what enter S4 presses operation ("Yes" of Fig. 4: S3).
In pressing operation, as shown in Figure 5, piezoelectric pump 101 so that cover plate 195 mode up is positioned on the worktable 502, rises worktable 502, and uses and press (Fig. 4: S4) by the central parts with interareas vibrating plate 141 opposite sides 503 pairs of cover plates 194 of pad.Press in the operation above-mentioned, lid is pressed the pressing force of anchor clamps 501 and is monitored by load cell.In addition, by the lifting action of worktable 502 is controlled, just can at random set pressing force and compressing time.In the present embodiment, the pressing force of setting as initial value is 5kgf, and the compressing time of setting as initial value is 3 seconds.
In pressing operation, by 503 pairs of cover plates 195 of pad finish press after, worktable 502 is descended, and piezoelectric pump 101 is pressed anchor clamps 501 from lid pull down.Consequently, impression 199 arranged in that the central part of cover plate 195 is residual, the conjugant of cover plate 195 and substrate 191 is illustrated in figure 7 as so that vibrating plate 141 sides are the shape of the mode warpage of convex, and the anastomosis part that engages with flexible plate 151 stretched, just can make flexible plate 151 so that vibrating plate 141 sides are the mode warpage of convex.By this, on the movable part 154 of flexible plate 151, just produce residual tensile stress (with reference to Fig. 6).
Therefore, the tensile stress of the movable part 154 of flexible plate 151 is improved, and the natural frequency that can make movable part 154 is close to the optimum value that obtains the desirable pumping pressure more than the specified value under can the power consumption in allowed band.For example, under the effect of above-mentioned residual tensile stress, the operating point of piezoelectric pump 101 is from the first operating point L
0Transfer to the 3rd operating point L
1(with reference to Fig. 8), the natural frequency of movable part 154 has also increased for example 200Hz.
In addition, the material of cover plate 195 material plastic deformation, be rich in ductility such as fine aluminium (A1050) or fine copper (C1100) etc. easily under low load preferably.In the present embodiment, use fine copper (C1100).
Then, the every increase of number of times that cover plate 195 is pressed once, the pressing force of pressing anchor clamps 501 with regard to the lid that makes current setting increases, and returns inspection operation (Fig. 4: S5) of above-mentioned S1.In the present embodiment, lid press anchor clamps 501 pressing force after making the current pressing force of setting as initial value (5kgf) increase 0.5kgf and be set to 5.5kgf.Compressing time still is set at 3 seconds identical with initial compressing time.
Then, for the piezoelectric pump of pressing operation 101 through S4, measure the pumping pressure of discharging from this piezoelectric pump 101, and check whether this pumping pressure is the above inspection operation (Fig. 4: S1, S2) of specified value.Above-mentioned inspection operation is long-time (being 300 seconds in the present embodiment) driving after a plurality of piezoelectric pumps 101 are dropped into actual Environmental Conditions also, after the temperature that makes a plurality of piezoelectric pumps 101 because of heating rises near the upper limit of said temperature scope, the pumping pressure of each piezoelectric pump 101 is measured.
Therefore, when the temperature that makes a plurality of piezoelectric pumps 101 rose near the upper limit of said temperature scope, for example, the operating point of piezoelectric pump 101 was as shown in Figure 8 from the 3rd operating point L
1Transfer to the 4th operating point H
1At this, when pumping pressure is specified value when above, the movable part 154 of above-mentioned piezoelectric pump 101 just is adjusted to best natural frequency by pressing operation.For example, the operating point at piezoelectric pump 101 is illustrated in figure 8 as the 4th operating point H
1Situation under, the movable part 154 of above-mentioned piezoelectric pump 101 just is adjusted to best natural frequency by pressing operation.Then, this piezoelectric pump 101 just is judged as non-defective unit, and finishes the adjusting to natural frequency.
In addition, at this, for the piezoelectric pump 101 that is judged as non-defective unit, in not shown characteristic selection machine, all projects such as pumping pressure, flow, power consumption are measured, further to select.
On the other hand, through the above-mentioned piezoelectric pump 101 that still is lower than specified value after pressing operation, press operation (Fig. 4: S4) for pumping pressure again.
That is, after, the pressing force that the lid that sets is pressed anchor clamps 501 reach certain value (being 7kgf in the present embodiment) above before (Fig. 4: S3), check operation repeatedly and press operation.At this moment, in the operation of the S5 of Fig. 4, whenever once press operation, the pressing force that the lid that sets is pressed anchor clamps 501 just increases 0.5kgf at every turn.
Then, after repeatedly pressing operation repeatedly and checking operation, still be lower than the piezoelectric pump 101 of specified value or the power consumption that needs in order to drive surpasses the piezoelectric pump 101 of permitted value for pumping pressure, in case pressing the pressing force of anchor clamps 501, the lid of current setting reaches certain value above ("No" of Fig. 4: S3), just be judged as substandard products, and discarded.
In sum, first regulating method according to present embodiment, can be under the situation that the temperature of having considered piezoelectric pump 101 rises, the natural frequency of movable part 154 is adjusted to the optimum value that obtains the desirable pumping pressure more than the specified value under can the power consumption in allowed band.Thereby, according to first regulating method of present embodiment, can provide a kind of piezoelectric pump 101 that when suppressing power consumption, pumping pressure is increased.
In addition, piezoelectric pump 101 according to present embodiment, by to cover plate 195 press the amount of warpage of conjugant of cover plate 195 and substrate 191 is changed, therefore, the natural frequency of movable part 154 can be adjusted to the optimum value that obtains the desirable pumping pressure more than the specified value under can the power consumption in allowed band.Thereby, according to the piezoelectric pump 101 of present embodiment, can head pressure be increased.
In addition, because the conjugant of substrate 191 and cover plate 195 constitutes the part of pump basket 180, therefore, the piezoelectric pump 101 of present embodiment has easy use lid and presses the structure that 501 pairs of cover plates 195 of anchor clamps are pressed.
In addition, according to first regulating method of present embodiment, by cover plate 195 is pressed, just can apply tensile stress to the movable part 154 of flexible plate 151, and the raising natural frequency, but be impossible on the contrary, namely can not reduce this tensile stress and reduce natural frequency.
Thereby, comparatively it is desirable to, make the natural frequency of movable part 154 become the value such design lower slightly than optimum value by force, after producing piezoelectric pump 101, regulate by first regulating method of present embodiment.By this, even if exist under the situation of deviation in the individuality of the piezoelectric pump 101 of the natural frequency of the movable part 154 of flexible plate 151 after each is made, also can realize very high rate of good product.
(second regulating method)
Below, then the natural frequency with the movable part 154 of the flexible plate 151 of present embodiment is adjusted to second regulating method that obtains the optimum value of the desirable pumping pressure more than the specified value under can the power consumption in allowed band and describes.The difference of this second regulating method and first regulating method is the S1 of Fig. 4, the inspection operation shown in the S2.In other side, identical with first regulating method.
Specifically, in second regulating method, also at first for a plurality of piezoelectric pumps 101 that produce, measure the pumping pressure of discharging from each piezoelectric pump 101, and check whether this pumping pressure is the above inspection operation (Fig. 4: S1, S2) of specified value.
Wherein, in above-mentioned second regulating method, check in the operation at this, driving voltage after dc offset voltage (DC bias voltage) and the alternating voltage of exporting from the ac power supply of commercialization is overlapping is applied on the piezoelectric element 142, make actuator 140 vibrate, and the pumping pressure of piezoelectric pump 101 is measured.At this moment, also to needed power consumption is measured in order to drive each piezoelectric pump 101.
At this, in case outside terminal 153,172 is applied this driving voltage, then in piezoelectric pump 101, utilize dc offset voltage to make actuator 140 so that piezoelectric element 142 sides are the mode warpage of convex, and actuator 140 and flexible plate 151 are separated, and the interval K (with reference to Fig. 3) of the beeline of 151 of actuator 140 and flexible plates is broadened.In addition, actuator 140 is the concentric circles flexure vibrations centered by the interval K that broadens, and the movable part 154 of flexible plate 151 is accompanied by the vibration of vibrating plate 141 and vibrates.
For example, in the piezoelectric pump 101 of present embodiment, in case be that the alternating voltage 38Vp-p of the 23kHz driving voltage after overlapping is applied to outside terminal 153,172 with dc offset voltage 15V and frequency, the interval K of actuator 140 and the flexible plate 151 1 μ m that broadens then, actuator 140 is the concentric circles flexure vibrations centered by the interval K behind the 1 μ m that broadens, and makes the movable part 154 of flexible plate 151 be accompanied by the vibration of vibrating plate 141 and vibrate.
At this, the interval K of actuator 140 and flexible plate 151 is important factors that the pressure-flow characteristic (below be called the PQ characteristic) to pump impacts.Therefore, in case this interval K broadens, then the pumping pressure of piezoelectric pump 101 descends.By this, if this interval K broadens, then the pumping pressure of piezoelectric pump 101 is represented the value approaching with the pumping pressure of piezoelectric pump 101 under the temperature higher than normal temperature.
Fig. 9 is the chart of the characteristic of expression piezoelectric pump 101.In Fig. 9, the longitudinal axis is the tensile stress of flexible plate 151, and transverse axis is the interval of piezoelectric actuator 140 and flexible plate 151.
As mentioned above, if the temperature of piezoelectric pump 101 rises, then as shown in Figure 9, the operating point of piezoelectric pump 101 is for example from the first operating point L
0Transfer to the second operating point H
0On the other hand, make applying dc offset voltage after K broadens at interval, the operating point of piezoelectric pump 101 is for example from the first operating point L
0Transfer to the 5th operating point LD
0
At this, when the operating point of piezoelectric pump 101 for example as the first operating point L
0Be positioned at the upside of stripper wire h like this and be positioned under the situation close to the position of stripper wire h, no matter the operating point of piezoelectric pump 101 is mobile down, still towards moving right, all can be positioned at the position of the below of stripper wire h, and pumping pressure is sharply descended.
Therefore, when the operating point of piezoelectric pump 101 is positioned at the upside of stripper wire h and is positioned under the situation close to the position of stripper wire h, if apply dc offset voltage interval K is broadened, because the operating point of piezoelectric pump 101 is towards moving right, therefore, just be positioned at the below of stripper wire h, and pumping pressure is sharply descended.
Therefore, long-time (being about 300 seconds in the present embodiment) drives after the Environmental Conditions that a plurality of piezoelectric pumps 101 inputs are actual, after the temperature that makes a plurality of piezoelectric pumps 101 because of heating rises to the upper limit near the said temperature scope, the pumping pressure of each piezoelectric pump 101 is not measured, but be in the state that makes after at interval K broadens by applying dc offset voltage, (only using about 15 seconds in the present embodiment) just can confirm whether the operating point of each piezoelectric pump 101 is positioned at the upside of stripper wire h and is positioned at position close to stripper wire h.
Then, be positioned at the upside of stripper wire h and be positioned at piezoelectric pump 101 close to the position of stripper wire h for operating point, with above-mentioned first regulating method similarly, in the S4 of Fig. 4, implement to press operation.By this, because the tensile stress of movable part 154 increases, therefore, the operating point of piezoelectric pump 101 is (for example from the first operating point L
0To the second operating point L
1) move towards the top.
Then, for through the piezoelectric pump of pressing operation 101 of S4, with above-mentioned first regulating method similarly, measure the pumping pressure of discharging from this piezoelectric pump 101, and check whether this pumping pressure is the above inspection operation (Fig. 4: S1, S2) of specified value.
At this, with similarly above-mentioned, form the state that makes after at interval K broadens by applying dc offset voltage, whether the operating point that just can confirm each piezoelectric pump 101 is positioned at the upside of stripper wire h and is positioned at position close to stripper wire h.
Applying after dc offset voltage forms the state that makes after at interval K broadens, the operating point of piezoelectric pump 101 is for example as shown in Figure 9 from the 3rd operating point L
1Transfer to the 6th operating point LD
1At this, when pumping pressure is specified value when above, the movable part 154 of above-mentioned piezoelectric pump 101 just is adjusted to best natural frequency by pressing operation.
For example, the operating point at piezoelectric pump 101 is illustrated in figure 9 as the 6th operating point LD
1Situation under, the movable part 154 of above-mentioned piezoelectric pump 101 just is adjusted to best natural frequency by pressing operation.Then, this piezoelectric pump 101 just is judged as non-defective unit, and finishes the adjusting to natural frequency.
In sum, according to second regulating method, can further implement the inspection operation that the pumping pressure of the piezoelectric pump 101 under the temperature higher than normal temperature is measured at short notice.
(other mode of execution)
In the above-described embodiment, be provided with single piezoelectric type and can produce the actuator 140 of flexure vibrations, but also piezoelectric element 142 can be bonded in the actuator that constitutes two piezoelectric types and can bend and vibrate on two faces of vibrating plate 141.
In addition, in the above-described embodiment, driving body is made of piezoelectric element, and is provided with the flexible actuator 140 that carries out flexure vibrations by piezoelectric element 142, but is not limited thereto.For example, also the actuator that carries out flexure vibrations with Electromagnetic Drive can be set.
In addition, in the above-described embodiment, piezoelectric element 142 is made of lead zirconate titanate class pottery, but is not limited thereto.For example, also can be constituted by piezoelectric material of non-plumbous class piezoelectrics potteries such as potassium-sodium niobate and alkaline niobic acid class pottery etc.
In addition, in the above-described embodiment, show the size example about equally that makes piezoelectric element 142 and vibrating plate 141, but be not limited thereto.For example, also can make vibrating plate 141 bigger than piezoelectric element 142.
In addition, in the above-described embodiment, used discoideus piezoelectric element 142 and discoideus vibrating plate 141, but be not limited thereto.For example, the side in piezoelectric element 142 and the vibrating plate 141 also can be rectangle or polygonal.
In addition, in the above-described embodiment, joint 162 is located at three places, but is not limited thereto.For example, also two places can only be set, or more than arranging everywhere.Though joint 162 can not hinder actuator 140 vibrations, but because what can bring an influence to vibration, therefore, by connecting (maintenance) at three positions, just can also can prevent breaking of piezoelectric element 142 realizing more natural maintenance in the holding position accurately.
In addition, produce on the purposes that audible sound can not throw into question in the present invention, also can in audible sound frequency band scope, drive actuator 140.
In addition, in the above-described embodiment, the center configuration that shows in the zone relative with actuator 140 of flexible plate 151 has the example of a vent 152, but is not limited thereto.For example, also can be near the center in the zone relative with actuator 140 a plurality of holes of configuration.
In addition, in the above-described embodiment, set the frequency of driving voltage so that actuator 140 vibrates under the first rank mode, but be not limited thereto.For example, also can set driving voltage frequency so that actuator 140 under other mode such as the 3rd rank mode, vibrate.
In addition, in the above-described embodiment, use air as fluid, but be not limited to this.For example, even if this fluid is in liquid, gas-liquid mixed stream, solid-liquid mixed flow, the solid and gas mixed flow etc. any, also can be suitable for.
At last, the explanation of above-mentioned mode of execution is illustration in all respects, should be considered the situation without any restriction.Scope of the present invention is not just as above stated shown in the mode of execution, but is represented by the scope of claim.And the intention in scope of the present invention is to comprise that the meaning that equates with the claim scope reaches all changes in its scope.
(symbol description)
10 pump main bodys
11 first opening portions
12 second opening portions
20 vibrating plates
23 piezoelectric elements
30 actuators
31 vibrating plates
32 piezoelectric elements
35 flexible plates
The 35A vent
37 dividing plates
39 substrates
40 opening portions
41 movable parts
42 fixing parts
95 cover plates
97 vents
101 piezoelectric pumps
110 caps
111 tap holes
120 adhesives layers
130 dividing plates
135 dividing plates
140 actuators
141 vibrating plates
142 piezoelectric elements
145 pump chambers
151 flexible plates
152 vents
153,172 outside terminals
154 movable parts
155 fixing parts
160 vibration plate unit
161 deckle boards
162 joints
170 electrode conduction plates
171 frame positions
173 internal terminals
180 pump baskets
191 substrates
192 opening portions
193 streams
195 cover plates
197 attract the hole
199 impressions
501 lids are pressed anchor clamps
502 worktable
503 press pad
901 piezoelectric pumps
Claims (12)
1. a fluid control device is characterized in that, comprising:
Vibration plate unit, this vibration plate unit have vibrating plate and surround the deckle board on every side of described vibrating plate;
Driving body, this driving body are arranged at a side's of described vibrating plate interarea, and make described vibration plate vibrates;
The flexible plate, this flexible plate is provided with the hole, and engages with described deckle board in the mode relative with the opposing party's of described vibrating plate interarea; And
The lid member, this lid member engages with the interarea of an opposite side with described vibrating plate of described flexible plate,
Described flexible plate is applied with tensile stress because of described lid member.
2. fluid control device as claimed in claim 1 is characterized in that,
Described lid member is formed with recess in central authorities,
Described flexible plate has: movable part, and this movable part is relative with the described recess of described lid member, and the energy flexure vibrations; And fixing part, this fixing part engages with described lid member.
3. fluid control device as claimed in claim 1 or 2 is characterized in that,
Described lid member is the conjugant of substrate and cover plate, and wherein, side's interarea of described substrate engages with the interarea of an opposite side with described vibrating plate of described flexible plate, and is formed with opening portion in central authorities, and described cover plate is located on the opposing party's interarea of described substrate.
4. as claim 2 or 3 described fluid control devices, it is characterized in that,
The central part at the back side that is equivalent to described recess of described cover plate is pressed towards described vibrating plate side.
5. fluid control device as claimed in claim 4 is characterized in that,
Described cover plate is formed with impression at described central part.
6. as each described fluid control device in the claim 1 to 5, it is characterized in that,
Described fluid control device also comprises outer basket,
Described lid member constitutes the part of described outer basket.
7. as each described fluid control device in the claim 1 to 6, it is characterized in that,
Described lid member is made of the ductile metal material.
8. as each described fluid control device in the claim 1 to 7, it is characterized in that,
Described vibration plate unit also has joint, and this joint is connected described vibrating plate with described deckle board, and with described vibrating plate yielding support in described deckle board.
9. as each described fluid control device in the claim 1 to 8, it is characterized in that,
Described vibrating plate and described driving body constitute actuator,
Described actuator is discoideus.
10. the regulating method of a fluid control device is characterized in that, comprising:
Check operation, check in the operation at this, require the head pressure of the liquid that each described fluid control device is discharged in 1 to 9 to measure to the vibration accessory rights because of described vibrating plate, and check whether described head pressure is more than the specified value; And
Press operation, press in the operation at this, when described head pressure is lower than specified value, the interarea of the opposite side with described vibrating plate of described lid member is pressed,
The described operation of pressing also is included in the described operation of getting back to described inspection operation after the operation of pressing.
11. the regulating method of fluid control device as claimed in claim 10 is characterized in that,
The described operation of pressing also comprises the every increase of number of times that described lid member is pressed once, just improves the operation of the pressure that described lid member is pressed.
12. the regulating method as claim 10 or 11 described fluid control devices is characterized in that,
In described inspection operation, driving voltage after dc offset voltage and alternating voltage is overlapping is applied on the described driving body, do not compare when being applied to described driving body with described driving voltage, interval from described vibrating plate to described flexible plate is broadened, make described vibration plate vibrates, and described head pressure is measured.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-223594 | 2011-10-11 | ||
| JP2011223594 | 2011-10-11 | ||
| JP2012-095721 | 2012-04-19 | ||
| JP2012095721 | 2012-04-19 | ||
| PCT/JP2012/076163 WO2013054801A1 (en) | 2011-10-11 | 2012-10-10 | Fluid-control device, and method for adjusting fluid-control device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103339380A true CN103339380A (en) | 2013-10-02 |
| CN103339380B CN103339380B (en) | 2015-11-25 |
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ID=48081856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280007034.2A Active CN103339380B (en) | 2011-10-11 | 2012-10-10 | The regulating method of fluid control device, fluid control device |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10006452B2 (en) |
| EP (2) | EP3346131B1 (en) |
| JP (1) | JP5505559B2 (en) |
| CN (1) | CN103339380B (en) |
| WO (1) | WO2013054801A1 (en) |
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Also Published As
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| CN103339380B (en) | 2015-11-25 |
| US10006452B2 (en) | 2018-06-26 |
| EP2767715A1 (en) | 2014-08-20 |
| EP2767715A4 (en) | 2015-12-23 |
| JP5505559B2 (en) | 2014-05-28 |
| WO2013054801A1 (en) | 2013-04-18 |
| US20130323085A1 (en) | 2013-12-05 |
| JPWO2013054801A1 (en) | 2015-03-30 |
| EP2767715B1 (en) | 2018-04-04 |
| EP3346131B1 (en) | 2022-04-27 |
| EP3346131A1 (en) | 2018-07-11 |
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