JP7044663B2 - Actuator - Google Patents

Description

The present invention relates to an actuator, and is particularly suitable for a micro type, an ultrathin type, and a quiet actuator.

Currently, in each field, not only industries such as medical chemicals, computer science and technology, printing, and energy sources, but also products are all developing toward refinement and micronization. Among them, products including actuators such as micropumps, atomizers, inkjet heads, and industrial printing machines are the cornerstones of the technology. From this, how to create a new structure and solve the problem of the technology is important for the development.

For example, in the medical and pharmaceutical industry, many demand measuring instruments or equipment that employ barometric power drive, for example, sphygmomanometers, portable, wearable measuring instruments or these equipment usually include conventional motors and barometric valves. Use to achieve the purpose of its fluid transport. However, the volume of these conventional motors and fluid valves is limited, and it is difficult to reduce the volume of this type of measuring instrument or equipment, that is, it is difficult to realize thinning, and it is not possible to make it portable. It is possible. In addition to this, the conventional motor and the fluid valve cause problems of noise and heat dissipation difference, which causes inconvenience and discomfort in use.

In view of the above, how to improve and develop the deficiencies of the above-mentioned well-known technology, and the measuring instruments and equipment using atmospheric pressure power drive can reduce the volume, micronize and quietly, improve the heat conduction performance, and quickly dissipate heat. At present, it is an urgent task to create an actuator that is light and has no discomfort and is intended to be portable so that it can be made to work.

A main object of the present invention is to provide an actuator in which a piezoelectric piece is designed to be coupled to a suspension plate, and a fluid wave generated by high-frequency operation of the piezoelectric piece creates a pressure gradient in the flow after the design. The fluid is flowed at high speed, and the fluid is transmitted from the suction end to the discharge end through the resistance difference in the flow advance direction. It is to solve the deficiencies such as difficulty, failure to achieve the purpose of portable type, noise, and so on.

Another object of the present invention is to provide an actuator in which the piezoelectric piece is provided with two electrodes of a silver-palladium alloy synthesized by doping with a graphene material, the resistance is lowered, the charge transfer speed is increased, and the heat conductivity is improved. It is to increase and achieve heat dissipation quickly. The surface layer of one of the electrodes is a heat-conducting layer coated with a paint synthesized by doping graphene material, and heat conductivity can be enhanced to quickly achieve heat dissipation, and the other electrode is a graphene material. It is a paste layer coated with an epoxy resin synthesized by doping with graphene, which can be attached to the first surface of the suspension plate to lower resistance, increase charge transfer speed, improve heat conductivity, and achieve heat dissipation quickly. can. Such a configuration in which the actuator can be driven with the best conductivity can enhance the heat conductivity and quickly achieve the purpose of heat dissipation.

In order to achieve the above object, the broader embodiment of the present invention is to provide an actuator, the suspension plate, an outer frame, at least one frame, a piezoelectric piece, and the suspension. The plate comprises a first surface and a second surface and is capable of bending vibration, the outer frame is installed so as to surround the outside of the suspension plate, and at least one of the frames is the suspension. It is articulated between the plate and the outer frame to provide elastic support, the piezoelectric piece is made by doping graphene with lead zirconate titanate series pressure powder and the weight of the graphene. The ratio is between 0.1% and 20%, and by applying a mounting voltage to the first surface of the suspension plate, the suspension plate is driven and subjected to refractive vibration.

FIG. 1 is a schematic view of an exploded structure of the combination of the intake plate of the actuator of the present invention, the resonance piece, the first insulating piece, the conductive piece, and the second insulating piece as viewed from the front. FIG. 2 is a schematic view of an exploded structure of the combination of the intake plate of the actuator of the present invention, the resonance piece, the first insulating piece, the conductive piece, and the second insulating piece as viewed from the back surface. FIG. 3 is a cross-sectional structure and a locally enlarged sketch of the arrangement relationship between the piezoelectric piece and the suspension plate of the actuator of the present invention, and the frame and the outer frame. FIG. 4 is a schematic cross-sectional structure of a combination of an intake plate of the actuator of the present invention, a resonance piece, a first insulating piece, a conductive piece, and a second insulating piece. FIG. 5A is a structural diagram of the operating process of the actuator shown in FIG. FIG. 5B is a structural diagram of the operating process of the actuator shown in FIG. FIG. 5C is a structural diagram of the operating process of the actuator shown in FIG. FIG. 5D is a structural diagram of the operating process of the actuator shown in FIG. FIG. 5E is a structural diagram of the operating process of the actuator shown in FIG.

Typical examples embodying the features and advantages of the present invention will be described in detail later. It must be understood that the present invention has various variations in different forms, all of which do not deviate from the scope of the present invention, and the description and figures thereof are used essentially to explain. This is not to limit the present invention.

Referring to FIGS. 1 to 3, the present invention provides an actuator 1, which comprises at least one suspension plate 11, at least one outer frame 12, at least one frame 13, and at least one piezoelectric piece 14. In the suspension plate 11, the outer frame 12, and the piezoelectric piece 14 of the following examples, all of them will be described as one by way. The suspension plate 11, the outer frame 12, and the piezoelectric piece 14 can be combined in many ways without limitation.

Referring to FIGS. 1, 2 and 4, the actuator 1 mainly includes the suspension plate 11, the outer frame 12, and at least one frame 13 and the piezoelectric piece 14. .. Among them, the suspension plate 11 includes a first surface 11c and a second surface 11b and can be curved and vibrated, and the outer frame 12 is installed so as to surround the outside of the suspension plate 11 and at least. One frame 13 is connected between the suspension plate 11 and the outer frame 12, and in the present embodiment, both end points of the frame 13 are the suspension plate 11 and the outer frame, respectively. It is articulated between the frame 12 to provide elastic support, and further comprises at least one void 15 between the frame 13, the suspension plate 11 and the outer frame 12. The two voids 15 are used for gas flow. It should be emphasized that the form and quantity of the suspension plate 11, the outer frame 12, and the frame 13 are not limited to the above-described embodiment, but can be changed based on the actual situation. .. Further, the outer frame 12 is installed so as to surround the outside of the suspension plate 11, and the conductive pin 12c is convexly provided outward to be used for electrical connection, but the present invention is not limited to this.

The suspension plate 11 of the present embodiment has a stepped structure (shown in FIG. 3), that is, the second surface 11b of the suspension plate 11 is further provided with a convex portion 11a, and the structure of the convex portion 11a. Can have a circular convex structure, but is not limited to this. The convex portion 11a of the suspension plate 11 is flat together with the second surface 12a of the outer frame 12, and the second surface 11b of the suspension plate 11 and the second surface 13a of the frame 13 are both flat. be. Between the convex portion 11a of the suspension plate 11 and the second surface 12a of the outer frame 12, and the second surface 11b of the suspension plate 11 and the second surface 13a of the frame 13. It has a certain depth. The first surface 11c of the suspension plate 11 has a planar structure leveled together with the first surface 12b of the outer frame 12 and the first surface 13b of the frame 13, but the structure is not limited to this.

The piezoelectric piece 14 of the present embodiment is attached to the first surface 11c of the flat suspension plate 11, but is not limited thereto. In another of these embodiments, the form of the suspension plate 11 can also be a plate-like square structure having flat sides, but the present invention is not limited to this, and the suspension plate 11 is changed based on the actual operation situation. be able to. In these examples, the suspension plate 11, the frame 13, and the outer frame 12 have an integrally molded structure, and may be made of, for example, a metal plate, not limited to a stainless steel material. In another of these embodiments, the length of the piezoelectric piece 14 is shorter than the length of the suspension plate 11. In yet another embodiment, the length of the piezoelectric piece 14 is equal to the length of the suspension plate 11, and the design is similarly a square plate corresponding to the suspension plate 11. It is a structure, but it is not limited to this. Further, the piezoelectric piece 14 of the present embodiment is produced by doping graphene with a piezoelectric powder of the lead zirconate titanate (PZT) series, and the weight ratio of the graphene is 0.1%. It is most desirable to do the doping between about 20%, and the best piezoelectric driving effect can be brought to the suspension plate 11 through the excellent piezoelectric property of the lead zirconate titanate . The piezoelectric piece 14 of the present embodiment includes two electrodes 14a and 14b of a silver-palladium alloy synthesized by doping with a graphene material, and the two electrodes 14a and 14b have a reduced resistance and an electric charge. It is possible to increase the moving speed of the, increase the heat conductivity, and achieve heat dissipation quickly. The surface layer of the electrode 14a thereof is a heat-conducting layer 14c coated with a paint synthesized by doping graphene material, and the heat-conducting property can be enhanced to quickly achieve heat dissipation. It is a paste layer 14d coated with an epoxy resin synthesized by doping graphene material, and is attached to the first surface 11c of the suspension plate 11 to lower resistance, increase charge transfer speed, and improve heat conductivity. Heat dissipation can be achieved. The electrodes 14a and 14b drive the suspension plate 11 to bend and vibrate by applying a voltage.

Referring to FIGS. 1 and 2, the actuator 1 of the present invention further has a structure such as an intake plate 16, a resonance piece 17, an insulating piece 18a, an insulating piece 18b, and a conductive piece 19. Among them, the suspension plate 11 is installed corresponding to the resonance piece 17, and includes the intake plate 16, the resonance piece 17, the outer frame 12, the insulating piece 18a, and the conductive piece. 19 and the other insulating piece 18b are stacked and installed in this order. A cross-sectional view of the completed assembly is shown in FIG.

Referring to FIGS. 1 and 2, as shown in FIG. 1, in this embodiment, the intake plate 16 includes at least one intake hole 16a, of which four intake holes 16a are in quantity. Is the most desirable, but it is not limited to this. The intake hole 16a penetrates the intake plate 16 to adapt the gas from outside the device to the action of atmospheric pressure, and allows the gas to flow in from at least one intake hole 16a. As shown in FIG. 2, at least one merging exhaust hole 16b is provided on the intake plate 16, a central recess 16c is provided at the central exchange point of the merging exhaust hole 16b, and the central recess 16c is the merging. It communicates with the exhaust hole 16b. The intake plate 16 includes a first surface 16d coated with a paint synthesized by doping with graffine, which can enhance heat conductivity and dissipate heat quickly, and at least one of the intake holes of the first surface 16d. At least one of the combined exhaust holes 16b is installed corresponding to 16a. As a result, the gas in the merging / exhaust hole 16b that enters from at least one of the intake holes 16a can be guided, merged, and collected in the central recess 16c, and gas transmission is realized. In the present embodiment, the intake plate 16 corresponds to a merging chamber including the combined intake hole 16a, the merging exhaust hole 16b, and the central recess 16c, and forming a merging gas in the central recess 16c. , Temporarily store gas. In these examples, the material of the intake plate 16 can be stainless steel, but the material is not limited to this. In these examples, the depth of the merging chamber configured by the central recess 16c is the same as, but not limited to, the depth of the merging exhaust hole 16b. The resonance piece 17 is made of a flexible material, but is not limited to this, and a hollow hole 17c is provided on the resonance piece 17, and the hollow hole 17c is a central recess of the intake plate 16. It is installed corresponding to 16c and distributes gas. In these examples, the resonance piece 17 is made of a copper material, but the resonance piece 17 is not limited to this.

In this embodiment, as shown by FIGS. 1, 2 and 4, the insulating piece 18a of the present embodiment, the conductive piece 19 and the other insulating piece 18b correspond to each other in this order. It is installed under the outer frame 12, and its form almost corresponds to the form of the outer frame 12. In these examples, the insulating pieces 18a and 18b are made of an insulating material and provide an insulating effect, although not limited to plastic. In another of these embodiments, the conductive piece 19 is made of a conductive material and is not limited to a metallic material, but provides a conductive effect. In the present embodiment, the conductive pin 19a is also installed on the conductive piece 19 to realize the conduction effect, and the conductive pin 12c described above is electrically connected to the electrode 14a of the piezoelectric piece 14 to achieve the said. The conductive pin 19a is electrically connected to the electrode 14b of the piezoelectric piece 14, but is not limited to this.

In this embodiment, as shown in FIG. 4, the intake plate 16, the resonance piece 17, the outer frame 12, the insulating piece 18a, the conductive piece 19, and the other insulating piece 18b are The stacking in order forms a device capable of transporting the fluid. A gap h is formed between the resonance piece 17 and the outer frame 12, and in this embodiment, a conductive adhesive is provided in the gap h between the resonance piece 17 and the peripheral edge of the outer frame 12. By embedding a filling material not limited to the above and maintaining the depth of the gap h between the resonance piece 17 and the convex portion 11a of the suspension plate 11, an air flow is guided and the air flow is made to flow more quickly. The convex portion 11a of the suspension plate 11 maintains an appropriate distance from the resonance piece 17 and reduces contact interference with each other, thus reducing the generation of noise. In the other embodiment, by increasing the height of the outer frame 12, the gap is increased when the outer frame 12 and the resonance piece 17 are assembled, but the present invention is not limited to this.

With reference to FIGS. 1 and 2, and FIG. 4, in this embodiment, the intake plate 16, the resonance piece 17, and the outer frame 12 are assembled in order, and then the resonance. The piece 17 includes a movable portion 17a and a fixed portion 17b, the movable portion 17a forms a chamber of confluent gas jointly with the intake plate 16 on the movable portion 17a, and the resonance piece 17 is formed with the suspension plate 11. A first chamber 10 is further formed between the frame 13 and the outer frame 12, and is used for temporarily storing air. The first chamber 10 passes through the hollow hole 17c of the resonance piece 17 and communicates with the chamber of the central recess 16c of the intake plate 16, and both sides of the first chamber 10 are between the frames 13. The void 15 communicates with the fluid passage.

Referring to FIGS. 1, 2, 4, and 5A to 5E, the piezoelectric piece 14 is subjected to voltage operation and vibrates in a vertical reciprocating direction with the frame 13 as a fulcrum. As shown in FIG. 5A, when the piezoelectric piece 14 vibrates downward due to voltage operation, the resonance piece 17 has a light and thin piece structure. Therefore, when the piezoelectric piece 14 vibrates, the resonance piece 17 also vibrates. It resonates with it and makes a vertical reciprocating vibration. That is, the resonance piece 17 bends and vibrates together with the portion corresponding to the central recess 16c, and is deformed. The portion corresponding to the central recess 16c is the movable portion 17a of the resonance piece 17, and when the piezoelectric piece 14 vibrates downward, the movable portion of the resonance piece 17 corresponding to the central recess 16c. 17a is deformed as the piezoelectric piece 14 bends and vibrates due to the introduction and compression of the gas and the vibration of the piezoelectric piece 14. On the other hand, the gas enters from at least one intake hole 16a on the intake plate 16, passes through at least one merging exhaust hole 16b, is collected in the central recess 16c in the center, and is collected again on the resonance piece 17. It flows into the first chamber 10 via the hollow hole 17c installed corresponding to the central recess 16c. After that, due to the vibration of the piezoelectric piece 14, the resonance piece 17 also resonates and makes a vertical reciprocating motion. As shown in FIG. 5B, at this time, the movable portion 17a of the resonance piece 17 also vibrates downward and is attached so as to conflict with the convex portion 11a of the suspension plate 11, and the suspension is suspended. The distance between the merging chamber between the area other than the convex portion 11a of the plate 11 and the fixing portions 17b on both sides of the resonance piece 17 is not reduced. Due to the deformation of the resonance piece 17, the volume of the first chamber 10 is compressed, the flow space in the first chamber 10 is closed, and the gas in the flow space is pushed to both sides to flow, and the frame of the piezoelectric piece 14 is formed. It is allowed to flow through the gap 15 between 13 and so as to pass downward. After that, as shown in FIG. 5C, the movable portion 17a of the resonance piece 17 bends and vibrates upward to be deformed and returns to the initial position, and the piezoelectric piece 14 is voltage-driven and upwards. It vibrates and similarly compresses the volume of the first chamber 10, but since the suspension plate 11 rises upward, the gas in the first chamber 10 is flowed in both directions, and the gas is continuously generated. It enters through at least one intake hole 16a on the intake plate 16 and flows into the chamber formed by the central recess 16c again. After that, as shown in FIG. 5D, the resonance piece 17 receives an upward vibration of the suspension plate 11 and resonates upward. At this time, the movable portion 17a of the resonance piece 17 is entangled and vibrates upward, and the gas is slowly and continuously entered through at least one intake hole 16a on the intake plate 16, and the central recess 16c is again formed. It is made to flow into the formed merging chamber. Finally, as shown in FIG. 5E, the movable portion 17a of the resonance piece 17 also returns to the initial position. As can be seen from the mode of this embodiment, when the resonance piece 17 vibrates vertically, the maximum distance of vertical movement can be increased from the previous period gap h between the resonance piece 17 and the outer frame 12. can. In other words, the gap h can be provided between the two structures so that the resonance piece 17 can move up and down even more significantly at the time of resonance. Therefore, a pressure gradient is created through the flow design of the fluid actuator 13, the gas is made to flow at high speed, and the gas is sent from the suction end to the discharge end due to the difference in resistance in the flow advance direction, and the air transportation work is completed. Even when there is air pressure at the discharge end, it has the ability to continuously push the gas into the fluid passage and also provides a quiet effect. In this way, the operation of FIGS. 5A to 5E can be repeated to create gas transmission from the outside to the inside.

As described above, in the actuator provided by the present invention, the fluid wave created by the high-frequency operation of the piezoelectric piece creates a pressure gradient during the flow after design, so that the fluid flows at high speed and the resistance in the flow advance direction. The fluid can be transmitted rapidly by transmitting the fluid from the suction end to the discharge end, causing the fluid to flow at high speed and continuously transmitting the fluid. At the same time, it brings about a quiet effect, and the volume of the actuator can be made smaller and thinner, so that the purpose of a light and convenient portable type can be achieved. In addition to this, the present invention provides the best heat dissipation and piezoelectric effect by applying a paint synthesized by doping lead zirconate titanate and graphene to the electrodes of the piezoelectric plate on the surface of the intake plate. Bring. Therefore, the present invention has industrial value and submits an application in accordance with the law.

Any person who has ordinary knowledge in the technical field belonging to the present invention can make various ingenuity and modification, but none of them deviates from the protection required by the claims of the present invention.

1 Actuator 10 First chamber 11 Suspension plate 11a Convex part 11b Second surface 11c First surface 12 Outer frame 12a Second surface 12b First surface 12c Conductive pin 13 Frame 13a Second surface 13b First surface 14 Piezoelectric piece 14a, 14b Electrode 14c Heat conduction layer 14d Paste layer 15 Void 16 Intake plate 16a Intake hole 16b Confluence exhaust hole 16c Central recess 16d First surface 17 Resonance piece 17a Movable part 17b Fixed part 17c Hollow hole 18a, 18b Insulation piece 19 Conductive piece 19a Conductive pin h Gap

Claims (6)

An actuator, including a suspension plate, an outer frame, at least one frame, and a piezoelectric piece.
The suspension plate has a first surface and a second surface, and can vibrate in a curved manner.
The outer frame is installed so as to surround the outside of the suspension plate.
At least one of the frames articulates between the suspension plate and the outer frame to provide elastic support.
The piezoelectric piece is made by doping graphene with a piezoelectric powder of the lead zirconate titanate series, and the weight ratio of the graphene is between 0.1% and 20%, and the first of the suspension plates. By mounting it on one surface and applying a voltage, the suspension plate is driven to bend and vibrate, and the piezoelectric piece is provided with two electrodes of a silver-palladium alloy synthesized by doping with a graphene material. The surface layer of one of the electrodes is a heat guide layer coated with a paint synthesized by doping graphene material, and the other electrode is a paste layer coated with an epoxy resin synthesized by doping graphene material. , An actuator characterized in that it is attached to the first surface of the suspension plate . Further, the intake plate and the resonance piece are included.
The intake plate is installed on the second surface side of the suspension plate and includes at least one intake hole, at least one merging exhaust hole, and a central recess constituting the merging chamber . At least one of the intake holes introduces an air flow, the merging exhaust hole corresponds to the intake hole, and the air flow of the intake hole is guided to join the merging chamber formed by the central recess.
The resonance piece is installed between the intake plate and the suspension plate, has a hollow hole corresponding to the merging chamber, and the periphery of the hollow hole is a movable portion.
Among them, the resonance piece, the suspension plate, the frame, and the outer frame are provided with a gap forming a first chamber, and the piezoelectric piece is driven to cause the suspension plate to vibrate. When the air flow is introduced, the air flow is introduced from at least one of the intake holes of the intake plate, collected in the central recess via at least one of the confluent exhaust holes, and flows again through the hollow holes of the resonance piece, and the first. The actuator according to claim 1, wherein the actuator is allowed to enter the chamber, and the suspension plate and the movable portion of the resonance piece resonate to transmit an air flow. The actuator according to claim 2 , wherein the intake plate includes a first surface, and the first surface is coated with a paint synthesized by doping with a graphene material. The actuator according to claim 2 , wherein the suspension plate is square and has a convex portion. The actuator further includes a conductive piece, a first insulating piece and a second insulating piece, the intake plate, the resonance piece, the outer frame, the first insulating piece, and the conductivity thereof. The actuator according to claim 2 , wherein the actuator and the second insulating piece are stacked and installed in this order. An actuator comprising at least one suspension plate, at least one outer frame, at least one frame, and at least one piezoelectric piece.
At least one of the suspension plates comprises a first surface and a second surface and is capable of bending vibration.
At least one outer frame is installed so as to surround the outside of the suspension plate.
At least one of the frames articulates between the suspension and the outer frame to provide elastic support.
At least one of the piezoelectric pieces is made by doping graphene with a piezoelectric powder of the lead zirconate titanate series, and the weight ratio of the graphene is between 0.1% and 20%, and the suspension plate. By applying a mounting voltage to the first surface of the above, the suspension plate is driven to bend and vibrate, and the piezoelectric piece is provided with two electrodes of a silver-palladium alloy synthesized by doping with a graphene material. The surface layer of one of the electrodes is a heat guide layer coated with a paint synthesized by doping graphene material, and the other electrode is a paste layer coated with an epoxy resin synthesized by doping graphene material. An actuator characterized by being attached to the first surface of the suspension plate .

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