CN100365278C - Prezoelectric ceramics sheet for mfg. mini-pump and mini air pump - Google Patents
Prezoelectric ceramics sheet for mfg. mini-pump and mini air pump Download PDFInfo
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- CN100365278C CN100365278C CNB2005100125756A CN200510012575A CN100365278C CN 100365278 C CN100365278 C CN 100365278C CN B2005100125756 A CNB2005100125756 A CN B2005100125756A CN 200510012575 A CN200510012575 A CN 200510012575A CN 100365278 C CN100365278 C CN 100365278C
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Abstract
The present invention relates to a piezoelectric ceramic sheet for manufacturing a miniature pump, and a miniature air pump. A piezoelectric ceramic crystal film sheet of the piezoelectric ceramic sheet is adhered with a metal base sheet into a whole body through an insulating layer. The insulating layer makes safe creepage distance formed between the piezoelectric ceramic crystal film sheet and the metal base sheet, and the other side of the metal base sheet is provided with a voltage resisting protecting layer. The surface of the piezoelectric ceramic film sheet is provided with the protecting layer, and an upper cover and a lower cover of the miniature air pump are respectively, hermetically and fixedly connected to the upper end and the lower end of a pump body. A round pump cavity is arranged on the pump body, and a pump core is provided with the piezoelectric ceramic crystal film sheet. The metal base sheet of the piezoelectric ceramic crystal film sheet is clamped through a sealing ring and is elastically fixed in the pump cavity, and the metal base sheet seals the lower end of the pump body into a working pump cavity. The working pump cavity is communicated with an air sucking pipe and an air exhausting pipe through a unidirectional valve. The present invention has the advantages of high energy utilization efficiency, simple structure, low noise, etc.
Description
Technical field
The present invention relates to a kind of structure and micro air pump structure that is used to make the piezoelectric ceramic of micropump.Particularly a kind of high pressure resistant, deformation coefficient is big, and amplitude is strong, the structure of the piezoelectric ceramic of resistance to deformation be full of cracks and use the micro air pump structure of this piezoelectric ceramic.
Background technique
At present, diaphragm type that uses in the prior art or electromagnetic type micro air pump, because complex structure, efficient is low, electromagnetic shock noise height, using scope is restricted, and particularly uses under the human settlement.View and admire fish jar oxygenation as family, uses such as family's air stacte generator.Owing to diaphragm type or electromagnetic type air pump complex structure, efficient is low simultaneously, so the micro air pump of prior art can't be realized microminiaturization, the power consumption height wastes energy.Prior art more can't satisfy the use needs of precision instrument and equipment and the supply of small tolerance.
Along with development of electronic technology, people adopt piezo technology, warp-wise vibrations by piezoelectric vibrator, bending deflection changes pump chamber, realize the piezoelectric pump that continuous negative pressure sucks and pressurization is discharged, the inventor crosses multinomial Chinese patent with regard to this technical field application, it as the patent No. 01128771.3 02114467.2 and 02114470.2 patent application, but because the piezoelectric ceramic that piezoelectric pump uses is as piezoelectric vibrator, the piezoelectric ceramic compressive strength is not enough, and the amplitude of piezoelectric ceramic does not reach usage requirement, simultaneously the piezoceramics crystal diaphragm of piezoelectric ceramic, poor toughness, Young's modulus is little, and during piezoelectric ceramic work, the electroceramic crystal diaphragm of piezoelectric ceramic is prone to crack performance, can not satisfy the use needs, particularly can not satisfy the use needs of making air pump.
Summary of the invention
For overcoming the piezoelectric ceramic that uses in the prior art piezoelectric pump, resistance to pressure is poor, the piezoceramics crystal diaphragm, poor toughness, Young's modulus is little, during piezoelectric ceramic work, the electroceramic crystal diaphragm of piezoelectric ceramic is prone to crack performance, can not satisfy the use needs, particularly can not satisfy the technical deficiency of the use needs of making air pump, the invention provides a kind of withstand voltage height, the piezoceramics crystal diaphragm, good toughness, Young's modulus is big, piezoelectric ceramic when work, the piezoceramics crystal diaphragm of piezoelectric ceramic do not occur crack performance be used to make micropump piezoelectric ceramic structure and use the micro air pump structure of this piezoelectric ceramic.
The present invention solves the technological scheme that the piezoelectric ceramic technical problem taked; a kind of piezoelectric ceramic that is used to make micro air pump; comprise piezoceramics crystal diaphragm and metal substrate composition; voltage ceramic crystal diaphragm menopause edge layer and metal substrate is bonding is integral; isolation layer makes the creep age distance that forms 1～2mm between piezoceramics crystal diaphragm and the metal substrate; the another side of metal substrate is provided with withstand voltage protective layer, is provided with anti-oxidant on the surface of piezoelectric constant diaphragm and the distortion protective layer.The piezoceramics crystal diaphragm is for adding the piezoceramics crystal diaphragm of silication silicon wafer palpus.Withstand voltage protective layer is a polytetrafluoroethylene material protection layer.Anti-oxidant and distortion protective layer is the silicone rubber protective layer.
The present invention solves the technological scheme that the micro air pump technical problem taked, a kind of micropump, comprise the pump housing, Aspirating valves, outlet valve and pump core are formed, pump housing part, by two pump covers, two pump housings are formed, two pump covers are fixedlyed connected with two pump housing end face seals respectively, the cavity of two pump covers and pump housing end face constitutes air aspiration cavity and exhaust cavity, two pump housings are provided with circular pump chamber, two corresponding installations of circular pump chamber, the pump core is a circular piezoelectric ceramic crystal diaphragm, the seal ring clamping of the metal substrate of piezoceramics crystal diaphragm in being located at pump housing mounting groove, flexible fastening is in pump chamber, the substrate of pottery transducing sheet is divided into the pump chamber of two pump housings, following two are closed into the work pump chamber, air aspiration cavity and pump chamber on the pump housing, exhaust cavity and pump chamber through the breather cheek valve of unidirectional conducting and exhaust check valve together with, pump chamber is through breather cheek valve, air aspiration cavity is communicated with sucking pipe, and pump chamber is through exhaust check valve, and exhaust cavity is communicated with outlet pipe.Breather cheek valve is to be made of suction port on the pump housing and air-breathing port lid, exhaust check valve is that pump housing upper air-vent and vent cap constitute, air-breathing port lid and vent cap are separately positioned on the end face in the exhaust cavity of the pump chamber of suction port and exhaust port, air-breathing port lid and vent cap one end are the circle greater than suction port and exhaust port diameter, the other end is the spring sheet of rectangle, air-breathing port lid and vent cap round nose are located on suction port and the exhaust port, and rectangular end is fixed on the pump housing.Air-breathing port lid, the vent cap round nose is provided with and suction port, the elastic bumps of exhaust port diameter correspondence.
The invention has the beneficial effects as follows, make the piezoelectric ceramic of micropump, withstand voltage height, piezoceramics crystal diaphragm, good toughness, Young's modulus is big, during piezoelectric ceramic work, crack performance does not appear in the electroceramic crystal diaphragm of piezoelectric ceramic, and stable performance is safe and reliable.
Use the micro air pump of this piezoelectric ceramic, simple in structure, volume is little, the efficient height, and noise is little, and at the bottom of the cost, the life-span is long, is specially adapted to use under the human settlement and satisfy the use needs of precision instrument and equipment and the supply of small tolerance.
Description of drawings
The present invention is further described below in conjunction with accompanying drawing
Accompanying drawing 1 is piezoelectric ceramic structural representation of the present invention
Accompanying drawing 2 is micro air pump embodiment 1 structural representation of the present invention
Accompanying drawing 3 is micro air pump embodiment 1 breather cheek valve of the present invention and exhaust check valve embodiment 1 structural representation
Accompanying drawing 4 is micro air pump embodiment 1 breather cheek valve of the present invention and exhaust check valve embodiment 2 structural representations
Accompanying drawing 5 is that accompanying drawing 4A is to view
Accompanying drawing 6 is micro air pump embodiment 2 structural representations of the present invention
Accompanying drawing 7 is micro air pump embodiment 2 breather cheek valves of the present invention and exhaust check valve embodiment 1 structural representation
Accompanying drawing 8 is micro air pump embodiment 2 breather cheek valves of the present invention and exhaust check valve embodiment 2 structural representations
Accompanying drawing 9 is that accompanying drawing 8B is to view
101 piezoceramics crystal diaphragms among the figure; 102 isolation layers; 103 metal substrates; 104 withstand voltage protective layers; 105 anti-oxidant and distortion protective layers; 1 loam cake; 2 pump housings; 3 lower covers; 4 circular pump chambers; 5 air aspiration cavitys; 6 exhaust cavitys; 7 work pump chambers; 9 mounting grooves; 10 seal rings; 11 breather cheek valves; 12 exhaust check valves; 13 sucking pipes; 14 outlet pipes; 15 suction ports; 16 air-breathing port lids; 17 exhaust ports; 18 vent cap; 19 projectioies; 20 pump covers; 21 pump housings; 22 air aspiration cavitys; 23 exhaust cavitys; 24 circular pump chambers; 27 mounting grooves; 28 seal rings; 29 breather cheek valves; 30 exhaust check valves; 31 sucking pipes; 32 outlet pipes; 33 suction ports; 34 air-breathing port lids, 35 exhaust ports; 36 vent cap; 37 projectioies
Embodiment
Referring to accompanying drawing 1, piezoelectric ceramic structural representation of the present invention, piezoelectric ceramic is also referred to as piezoelectric vibrator, and piezoelectric ceramic is made up of piezoceramics crystal diaphragm and metal substrate.Piezoelectric ceramic is the driving element of piezoelectric micro air pump, the equivalent circuit of piezoelectric constant compound body technology, permittivity, relative permitivity, elastic constants, mechanical quality, piezoelectricity piezoelectric crystal and piezoelectric equations, electromechanical coupling factor, Frequency constant and piezoelectric vibrator, the decision piezoelectric ceramic is in the service behaviour of piezoelectric micro air pump, to a certain extent, above-mentioned have a related parameter, depends on the structure and the preparation process and method of piezoelectric ceramic.Generally voltage is high more, and the deformation coefficient of piezoelectric ceramic is big more, and amplitude is strong more, power is big more, yet the piezoelectric constant chip architecture that prior art is used all can not be worked under high-pressure situations, otherwise it is excessive and cause the fracture of ceramic crystal diaphragm to cause damage to be easy to generate distortion.Utilize the frequency-variable electronic technology to change and press the piezoelectric ceramic frequency of okperation, can improve the service behaviour of piezoelectric pump relatively, but it adheres to the sticking ceramic crystal diaphragm that is posted on the metal base and very easily produce tired and heating phenomenon under dither, causes the piezoceramics crystal diaphragm to damage.Therefore will improve the service behaviour of piezoelectric micro air pump, at first be the structure and the preparation process that will solve piezoelectric ceramic fundamentally.
Piezoelectric constant chip architecture of the present invention is to adopt: set up anti-oxidant on electroceramic crystal diaphragm 101 and distortion protective layer 105; on metal substrate 103, set up withstand voltage protective layer 104; by isolation layer 102 way that forms the creep age distance of 1-2mm between piezoceramics crystal diaphragm 101 and the metal substrate 103 is solved the problems of the technologies described above; voltage ceramic crystal diaphragm 101 is through isolation layer 102 and metal substrate 103 bonding being integral; isolation layer 102 makes the creep age distance that forms 1-2mm between piezoceramics crystal diaphragm 101 and the metal substrate 103; the another side of metal substrate 103 is provided with withstand voltage protective layer 104, is provided with anti-oxidant on the surface of piezoelectric constant diaphragm 101 and distortion protective layer 105.Withstand voltage protective layer 104 adopts polytetrafluoroethylene material protection layer.Withstand voltage protective layer 104 can guarantee piezoelectric ceramic when being higher than 100 ℃, withstand voltage reaching more than the 15000V after testing.Anti-oxidant and distortion protective layer 105 is the silicone rubber protective layer.Anti-oxidant and distortion protective layer 105 Young's modulus increase; piezoelectric ceramic work deformation process is played a protective role; ceramic crystal diaphragm 101 surface oxidation-resistant abilities strengthen; form the creep age distance of 1-2mm between piezoceramics crystal diaphragm 101 and the metal substrate 103, guarantee the piezoelectric ceramic trouble free service.
For further improving piezoceramics crystal diaphragm 101 mechanical properties of materials, piezoceramics crystal diaphragm 101 is for adding the piezoceramics crystal diaphragm of silication silicon wafer palpus.Because silicon carbide whisker is that a kind of diameter is a monocrystal micron-sized, that have fine specific strength and Young's modulus, can effectively improve the mechanical strength of metal base and ceramic matric composite, therefore the piezoceramics crystal diaphragm of making 101 can work long hours, and obtains 101 bending deflections of piezoceramics crystal diaphragm and be prone to the promising result that collapses to damage greatly and not.
Referring to accompanying drawing 2, accompanying drawing 3, accompanying drawing 4, accompanying drawing 5, micro air pump embodiment 1 of the present invention, micro air pump, pump housing part, by loam cake 1, the pump housing 2 and lower cover 3 are formed, loam cake 1 and lower cover 3 are sealedly and fixedly connected with the pump housing 2 top and bottom respectively, the pump housing 2 upper ends are provided with circular pump chamber 4, lower cover 3 constitutes air aspiration cavity 5 and exhaust cavity 6 with the cavity of the pump housing 2 lower ends, the pump core is a piezoceramics crystal diaphragm 101, seal ring 10 clampings of the metal substrate 103 of piezoceramics crystal diaphragm 101 in being located at the pump housing 2 mounting grooves 9, flexible fastening is in pump chamber 4, the metal substrate 103 of piezoceramics crystal diaphragm 101 seals into work pump chamber 7 with the pump housing 4, on the pump housing 2 air aspiration cavity 5 and work pump chamber 7 through the breather cheek valve 11 of unidirectional conducting together with, exhaust cavity 6 and work pump chamber 7 through exhaust check valve 12 together with, work pump chamber 7 is through breather cheek valve 11, air aspiration cavity 5 is communicated with sucking pipe 13, and work pump chamber 7 is through exhaust check valve 12, and exhaust cavity 6 is communicated with outlet pipe 14.The clamping of 10 pairs of metal substrates 103 of seal ring under the situation that guarantees sealing, reduces the mechanical resistance to metal substrate 103 vibrations as far as possible, to improve the efficient of micro air pump.During work, piezoceramics crystal diaphragm 101 and metal substrate 103 energisings, piezoceramics crystal diaphragm 101 drives metal substrate 103 upper and lower vibrations, when work pump chamber 7 volumes of pump chamber 4 increased, exhaust check valve 12 was closed, and outside air is through sucking pipe 13, air aspiration cavity 5, breather cheek valve 11 enters work pump chamber 7, realizes the breathing process of micro air pump.During work pump chamber 7 volume reducing, the air pressures in the work pump chamber 7 increase, and breather cheek valve 11 is closed, and pressure air is through exhaust check valve 12, exhaust cavity 6, and outlet pipe 14 is discharged, and finishes the whole working procedure of micro air pump.Along with piezoceramics crystal diaphragm 101 drives metal substrate 103 continuous upper and lower vibrations, micro air pump gets final product continuous operation.Micro air pump embodiment's 1 of the present invention breather cheek valve 11 and exhaust check valve 12 can adopt following structure to realize, breather cheek valve 11 is to be made of suction port 15 on the pump housing 2 and air-breathing port lid 16, exhaust check valve 12 is that the pump housing 2 upper air-vents 17 and vent cap 18 constitute, air-breathing port lid 16 and vent cap 18 are separately positioned on the end face in the exhaust cavity 6 of the work pump chamber 7 of suction port 15 and exhaust port 17, air-breathing port lid 16 and vent cap 18 1 ends are the circle greater than suction port 15 and exhaust port 17 diameters, the other end is the elastic sheet metal of rectangle, air-breathing port lid 16 and round nose are located on suction port 15 and the exhaust port 17, and rectangular end is fixed on the pump housing 3.Air-breathing port lid 16, vent cap 18 round noses are provided with and suction port 15, the non-metallic elastic material projection 19 of exhaust port 17 diameter correspondences.Realize the unlatching of breather cheek valve 11 and exhaust check valve 12 or close by the resiliently deformable of air-breathing port lid 16, vent cap 18.Projection 19 increases air-breathing port lid 16, the sealing of vent cap 18 and suction port 15, exhaust port 17.Referring to accompanying drawing 6, accompanying drawing 7, accompanying drawing 8, accompanying drawing 9, micro air pump embodiment 2 of the present invention, for improving the efficient of micro air pump, the present invention designs micro air pump embodiment 2, micro air pump embodiment 2 pump housing part, by last, following two pump covers 20, on, following two pump housings 21 are formed, on, following two pump covers 20 are respectively with last, following two pump housing 21 end face seals are fixedly connected, on, following two pump covers 20 are with last, the cavity of following two pump housing 21 end faces constitutes two air aspiration cavitys 22 and two exhaust cavitys 23, the pump housing 21 is provided with circular pump chamber 24, two circular pump chamber 24 corresponding installations, the pump core is a circular piezoelectric ceramic crystal diaphragm 101, seal ring 28 clampings of the metal substrate 103 of piezoceramics crystal diaphragm 101 in being located at the pump housing 21 mounting grooves 27, flexible fastening is in pump chamber 24, the metal substrate 103 of piezoceramics crystal diaphragm 101 is divided into the pump chamber 24 of two pump housings 21, following two are closed into the work pump chamber, air aspiration cavity 22 and pump chamber 24 on the pump housing 21, exhaust cavity 23 is communicated with the breather cheek valve 29 and the exhaust check valve 30 of pump chamber 24 through unidirectional conducting, pump chamber 24 is through breather cheek valve 29, air aspiration cavity 22 is communicated with sucking pipe 31, and pump chamber 24 is through exhaust check valve 30, and exhaust cavity 23 is communicated with outlet pipe 32.During work, piezoceramics crystal diaphragm 101 and metal substrate 103 energisings, piezoceramics crystal diaphragm 101 drives on the metal substrate 103, following vibration, make, following two shape pump chambers 24, a volume increases, a volume reduces, and when upwards vibration of piezoceramics crystal film 101, last pump chamber 24 volumes reduce, air pressure in the last pump chamber 24 increases, last breather cheek valve 29 is closed, and pressure air is pressed through last exhaust check valve 30, last exhaust cavity 23, last outlet pipe 32 is discharged, with pump chamber 24 volumes increase at present, the outside air warp is sucking pipe 31 down, and following air aspiration cavity 22 sucks pump chamber 24 down, ceramic crystal diaphragm 101 drives on the metal substrate 103, following vibration, make, two shape pump chambers 24 are successively worked down, finish the whole working procedure of micro air pump.
Micro air pump embodiment's 2 of the present invention breather cheek valve 29 is identical with micro air pump embodiment 1 with working principle with the structure of exhaust check valve 30.
Advantages such as micro air pump of the present invention has piezoelectric ceramic energy utilization efficiency height, and is simple in structure, and noise is little.
It is defined as the creep age distance that relates among the present invention: between two electrified body of different potentials along the beeline on insulating material surface.
Claims (7)
1. piezoelectric ceramic that is used to make micropump; comprise piezoceramics crystal diaphragm (101) and metal substrate (103) composition; it is characterized in that: described piezoceramics crystal diaphragm (101) is through isolation layer (102) and bonding being integral of metal substrate (103); isolation layer (102) makes the creep age distance that forms 1～2mm between piezoceramics crystal diaphragm (101) and the metal substrate (103); the another side of metal substrate (103) is provided with withstand voltage protective layer (104), is provided with anti-oxidant on the surface of piezoelectric constant diaphragm (101) and distortion protective layer (105).
2. a kind of piezoelectric ceramic that is used to make micropump according to claim 1 is characterized in that: described piezoceramics crystal diaphragm (101) is for adding the piezoceramics crystal diaphragm of silication silicon wafer palpus.
3. a kind of piezoelectric ceramic that is used to make micropump according to claim 1 and 2 is characterized in that: described withstand voltage protective layer (104) is a polytetrafluoroethylene material protection layer.
4. a kind of piezoelectric ceramic that is used to make micro air pump according to claim 1 and 2 is characterized in that: described anti-oxidant and the distortion protective layer (105) be the silicone rubber protective layer.
5. a micro air pump comprises the pump housing, Aspirating valves, outlet valve and pump core composition, it is characterized in that:
The described pump housing part of a, by last, following two pump covers (20), on, following two pump housings (21) are formed, on, following two pump covers (20) are respectively with last, following two pump housings (21) end face seal is fixedly connected, on, following two pump covers (20) are with last, on following two pump housings (21), the cavity of following two ends constitutes two air aspiration cavitys (22) and two exhaust cavitys (23), and the pump housing (21) is provided with circular pump chamber (24), and two circular pump chambers (24) are corresponding to be installed;
The described pump core of b is a circular piezoelectric ceramic crystal diaphragm (101), seal ring (28) clamping of the metal substrate (103) of piezoceramics crystal diaphragm (101) in being located at the pump housing (21) mounting groove (27), flexible fastening is in pump chamber (24), and the metal substrate (103) of piezoceramics crystal diaphragm (101) is divided into upper and lower two with the pump chamber (24) of two pump housings (21) and closes into the work pump chamber;
The described pump housing of c (21) is gone up air aspiration cavity (22) and pump chamber (24), exhaust cavity (23) is communicated with the breather cheek valve (29) and the exhaust check valve (30) of pump chamber (24) through unidirectional conducting, pump chamber (24) is through breather cheek valve (29), air aspiration cavity (22) is communicated with sucking pipe (31), pump chamber (24) is through exhaust check valve (30), and exhaust cavity (23) is communicated with outlet pipe (32).
6. micro air pump according to claim 5, it is characterized in that: breather cheek valve (29) is to go up suction port (33) and air-breathing port lid (34) formation by the pump housing (21), exhaust check valve (30) is that the pump housing (21) upper air-vent (35) and vent cap (36) constitute, air-breathing port lid (34) and vent cap (36) are separately positioned on the end face in the exhaust cavity (23) of the pump chamber (24) of suction port (33) and exhaust port (35), air-breathing port lid (34) and vent cap (36) one ends are the circle greater than suction port (33) and exhaust port (35) diameter, the other end is the spring sheet of rectangle, air-breathing port lid (34) and vent cap (36) round nose are located on suction port (33) and the exhaust port (35), and rectangular end is fixed on the pump housing (21).
7. according to claim 5 or 6 described micropumps, it is characterized in that described air-breathing port lid (34), vent cap (36) round nose is provided with and suction port (33), the elastic bumps (37) of exhaust port (35) diameter correspondence.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2005100125756A CN100365278C (en) | 2005-06-04 | 2005-06-04 | Prezoelectric ceramics sheet for mfg. mini-pump and mini air pump |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2005100125756A CN100365278C (en) | 2005-06-04 | 2005-06-04 | Prezoelectric ceramics sheet for mfg. mini-pump and mini air pump |
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| CN1793647A CN1793647A (en) | 2006-06-28 |
| CN100365278C true CN100365278C (en) | 2008-01-30 |
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| CNB2005100125756A Expired - Fee Related CN100365278C (en) | 2005-06-04 | 2005-06-04 | Prezoelectric ceramics sheet for mfg. mini-pump and mini air pump |
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| CN109764150B (en) * | 2019-01-25 | 2020-03-17 | 哈尔滨工业大学 | Driver |
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