CN106403921B - Metal structure multi-ring vibrating disk micro gyroscope and preparation method thereof - Google Patents
Metal structure multi-ring vibrating disk micro gyroscope and preparation method thereof Download PDFInfo
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- CN106403921B CN106403921B CN201610712165.0A CN201610712165A CN106403921B CN 106403921 B CN106403921 B CN 106403921B CN 201610712165 A CN201610712165 A CN 201610712165A CN 106403921 B CN106403921 B CN 106403921B
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- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
- G01C19/5684—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators the devices involving a micromechanical structure
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Abstract
The invention discloses a metal structure multi-ring vibrating disk micro-gyroscope and a preparation method thereof, wherein the micro-gyroscope comprises a packaging cover, a metal multi-ring vibrator, a metal electrode and a substrate from top to bottom, the metal multi-ring vibrator is a vibrating inertial mass and is an object to be detected, and the metal multi-ring vibrator is arranged in a vacuum and closed space formed between the packaging cover and the substrate; the invention adopts the metal multi-ring oscillator, the processing of the metal plane structure is easy to realize, and the processing cost is low; the metal structure has high density, so that the inertia force of the structure can be improved, and the performance of a device is improved; the multi-ring structure increases the driving force and the detection sensitivity of the micro-gyroscope device. The invention can achieve the purpose of achieving higher device precision and quality with lower cost and condition requirements.
Description
Technical Field
The invention relates to a miniature sensor for measuring angular motion, in particular to a metal structure multi-ring vibrating disk micro gyroscope and a preparation method thereof.
Background
Currently, the widely used gyroscopes are mainly hemispherical resonator gyroscopes, light gyroscopes, etc. The oscillator used by the hemispherical resonance gyroscope is of a three-dimensional hemispherical thin-shell structure, the processing difficulty is high, the occupied space is more, a high quality factor is difficult to obtain, and the cost of the optical fiber gyroscope is high. The structure of the multi-ring vibrating disc micro gyroscope mainly comprises four parts, namely a substrate, an electrode, a vibrator and a packaging device, and has the characteristics of simple processing and small occupied space, and a more stable effect can be achieved. The vibrator is driven to vibrate in a certain mode, when the outside has an angular motion, the mode changes, the change is detected through the electrodes and output, and the actual angular motion amount is obtained after demodulation calculation. At present, silicon or fused quartz is mostly used as a vibrator material for the multi-ring vibrating disk micro gyroscope, and other parts of the device also use silicon as a main material, so that the processing complexity and the processing cost are relatively high.
Through retrieval, the chinese invention application with publication number 105466407a discloses a disc multi-ring outer double-beam isolated ring resonator gyroscope, comprising: a substrate; a disk multi-ring outer double-beam isolated ring resonator comprises an outermost ring, a plurality of double-beam isolated rings, a plurality of concentric rings and a plurality of spokes, wherein: the outermost circle of rings is connected with the substrate, the concentric rings are connected through spokes, and two ends of each double-beam isolated ring are connected with the inner side of the outermost circle of rings and the outer side of the largest ring of the concentric rings respectively; and the group of electrodes are distributed on the inner side edge of the disc multi-ring outer double-beam isolated ring resonator, and each electrode is connected with the substrate respectively.
The above patent: 1. the silicon material and deep silicon etching and structure bonding process is adopted for manufacturing; 2. and (5) fixing by adopting an outer ring, and exciting and detecting by adopting an inner ring. Silicon materials and deep silicon etching, structural bonding processes are expensive to manufacture.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides the metal structure multi-ring vibrating disk micro-gyroscope and the preparation method thereof, which increase the driving force and the detection sensitivity of the micro-gyroscope device and can achieve the purpose of achieving higher device precision and quality with lower cost and condition requirements.
According to a first aspect of the present invention, there is provided a metal structure multi-ring vibrating disk micro-gyroscope, comprising, from top to bottom, a package cover, a metal multi-ring oscillator, and a substrate, wherein:
a vacuum sealed space is formed between the packaging cover and the substrate, and the metal multi-ring oscillator is packaged in the vacuum sealed space;
the metal multi-ring vibrator comprises a metal vibrator structure and a supporting column, wherein the supporting column is positioned in the center of the metal multi-ring vibrator, the metal vibrator structure is composed of a plurality of concentric metal rings, two adjacent metal rings are connected by spokes uniformly distributed in the circumferential direction, the innermost metal ring is connected by the spokes, the adjacent metal rings and the spokes partially surround to form grooves in the metal multi-ring vibrator, and the formed grooves are uniformly distributed on the metal vibrator structure;
a gap exists between the metal oscillator structure and the substrate to form a suspension structure, the support pillar is arranged on the upper surface of the substrate and forms fixed connection with the substrate, and the metal oscillator structure is connected with the support pillar through the spoke at the innermost ring;
the metal multi-ring vibrator is characterized in that a plurality of pairs of driving electrodes are arranged in a groove of an inner ring of the metal multi-ring vibrator, a plurality of pairs of detection electrodes are arranged in a groove of an outer ring of the metal multi-ring vibrator, and the driving electrodes and the detection electrodes are respectively used for excitation of gyro reference vibration and detection of the vibration.
Preferably, the package cover comprises a top, and a bonding metal layer and a vacuum suction device which are positioned below the top.
Preferably, a bonding layer of the packaging cover is arranged on the substrate, and the bonding layer and the bonding metal layer are bonded to form a vacuum-sealed space.
Preferably, the substrate is provided with an interconnection layer, the interconnection layer leads out and leads in electric signals on the detection electrode and the driving electrode, the interconnection layer is provided with an insulating layer, and the insulating layer is positioned at the bottoms of the detection electrode and the driving electrode to form electric insulation with surrounding structures.
Preferably, the driving electrode and the detecting electrode are manufactured on the upper surface of the substrate and form a fixed connection with the substrate.
Preferably, when the metal multi-ring oscillator is in a static state, an alternating excitation signal is applied through the driving electrode, the metal multi-ring oscillator generates reference vibration, namely a first vibration mode, the oscillation type is changed between an ellipse and a circle, at the moment, a counterclockwise angular velocity is input on a plane to the metal multi-ring oscillator which is vibrating by the outside, if a certain point on the metal multi-ring oscillator moves towards the center of the metal multi-ring oscillator, the point is influenced by coriolis force to shift upwards according to the coriolis effect, due to conservation of rotation, the gyroscope generates precession, and the precession angle is theta, so that the vibration mode of the metal multi-ring oscillator generates a counterclockwise shift phenomenon, and the vibration mode deflects by an angle, namely a second vibration mode.
The metal structure multi-ring vibrating disk micro gyroscope is made of metal materials and an electroplating process, so that the cost is lower, and meanwhile, the metal structure has higher density, thereby being beneficial to improving the Coriolis force and improving the sensitivity of the gyroscope. The invention adopts the structure of inner ring fixation, inner ring excitation and outer ring detection, and the outer ring can obtain larger reference vibration and induction vibration, thereby improving the detection sensitivity. Meanwhile, the detection electrode and the driving electrode are skillfully embedded into the metal multi-ring vibration disc vibrator, so that the compactness of the structure is enhanced.
According to a second aspect of the present invention, there is provided a method for preparing a metal structure multi-ring vibrating disk micro gyroscope, comprising the steps of:
depositing a layer of metal film on a substrate, and carrying out patterning through a photoetching film to define the arrangement of wires, namely an interconnection layer;
depositing an insulating layer on the interconnection layer, carrying out patterning through photoetching, and opening windows required by the subsequent electroplated metal multi-ring oscillator, the electrodes and the welding points;
sputtering a seed layer on the insulating layer to prepare for a subsequent electroplating process;
firstly, electroplating a layer of film on a seed layer, carrying out photoetching patterning on the film according to the structural requirement of the metal multi-ring oscillator, and finally carrying out a grinding process to be used as a sacrificial layer of a subsequent electroplating process;
spin-coating a photoresist on the sacrificial layer, and patterning the photoresist;
after the patterning is finished, a metal vibrator structure of the metal multi-ring vibrator and a bonding layer of a supporting column, a detection electrode, a driving electrode and a packaging cover are processed and molded at one time through an electroplating process, and then a grinding process is carried out to ensure the smoothness and symmetry of the surface of the metal vibrator;
after the electroplating process of the metal oscillator and the electrode is finished, removing the sacrificial layer; then, removing the redundant seed layer;
electroplating a package bonding metal layer on the top of the package cover; a vacuum suction device is arranged in the packaging cover, and a vacuum and closed environment is provided for the vibration of the vibrator after bonding;
and packaging the metal multi-ring vibrator through the bonding metal layer and the bonding layer to obtain the metal multi-ring disc vibration micro gyroscope.
Compared with the prior art, the invention has the following beneficial effects:
the metal multi-ring oscillator adopts a planar annular structure, so that higher geometric symmetry and quality factors are easily obtained, and the required process cost is lower.
The vibrator adopts a metal structure, has higher density compared with silicon, is processed by adopting an electroplating process, is easier to realize microstructure processing, and has lower difficulty and relative cost.
The multi-ring structure adopted by the invention can obtain larger amplitude, thereby achieving larger driving force and better detection sensitivity.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a cross-sectional view of a metal structure multi-ring vibrating disk micro gyroscope after packaging in accordance with an embodiment of the present invention;
FIG. 2 is a top view of a metal multiple ring resonator and electrodes according to an embodiment of the present invention;
FIG. 3 is a diagram illustrating a mode of vibration of the metal multi-ring resonator according to an embodiment of the present invention;
FIG. 4 is a flow chart of a manufacturing method according to an embodiment of the present invention;
in the figure: a metal multiple ring oscillator 100, a top 200;
a support column 101, driving electrodes 102 and 103, detection electrodes 104 and 105, a spoke 106, a metal ring 107 and a groove 108;
the structure comprises a metal oscillator structure 201, insulating layers 202 and 203, an interconnection layer 204, a window 205, a vacuum suction device 206, a bonding metal layer 207 and a bonding layer 208.
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that variations and modifications can be made by persons skilled in the art without departing from the spirit of the invention. All falling within the scope of the present invention.
As shown in fig. 1, a cross-sectional view of a packaged metal structure multi-ring vibrating disk micro-gyroscope includes, from top to bottom, a package cover, a metal multi-ring vibrator 100, and a substrate.
The encapsulation cover provides a vacuum and closed environment for the metal multi-ring vibrator 100, and the detection precision of the gyroscope is improved.
The metal multi-ring vibrator is used as a main vibration structure, and an object to be detected is arranged in a vacuum and closed environment formed between the packaging cover and the substrate;
the substrate is used for supporting and simultaneously taking charge of the work of leading out interfaces such as electrodes and the like.
Specifically, the package lid includes a top 200, and a bonding metal layer 207 and a vacuum getter 206 located below the top 200; the vacuum getter 206 continuously maintains a high vacuum by consuming residual or leaked gases from the enclosed environment through chemical reactions.
The substrate is provided with a bonding layer 208 of the packaging cover and an interconnection layer lead-out welding spot 205, and the substrate is used as a support and is responsible for the work of leading out an electrode interface; the bonding layer 208 and the bonding metal layer 207 are bonded to form a vacuum-sealed space, and the metal multi-ring oscillator 100 is packaged in the vacuum-sealed space; the detection precision of the gyroscope is improved.
As shown in fig. 2, the top view of the metal multi-ring resonator 100 is shown, the metal multi-ring resonator includes a metal resonator structure 201 and a supporting pillar 101, and the supporting pillar 101 is located at the center of the metal multi-ring resonator 100 and led out of the package through a wire. The metal oscillator structure 201 is composed of a plurality of concentric metal rings 107, two adjacent metal rings 107 are connected by spokes 106 which are uniformly distributed in the circumferential direction, the innermost metal ring 107 is connected by the spokes 106, the adjacent metal rings 107 and the spokes 106 partially surround a groove 108 in the metal multi-ring oscillator 100, and the formed grooves 108 are uniformly distributed on the metal oscillator structure 201;
a gap exists between the metal oscillator structure 201 and the substrate to form a suspension structure, the supporting column 101 is arranged on the upper surface of the substrate and forms a fixed connection with the substrate, and the metal oscillator structure 201 is connected with the supporting column 101 through the spoke 106 at the innermost ring;
in the metal multi-ring vibrator, a plurality of pairs of driving electrodes 102 and 103 are arranged in a groove 108 on the inner ring of the metal multi-ring vibrator, a plurality of pairs of detection electrodes 104 and 105 are arranged in a groove 108 on the outer ring of the metal multi-ring vibrator, and the driving electrodes 102 and 103 and the detection electrodes 104 and 105 are led out by leads and are respectively used for excitation of gyro reference vibration and detection of the vibration.
The detection electrodes 104 and 105 and the driving electrodes 102 and 103 may be metal electrodes.
As shown in fig. 3, it is a metal multi-ring oscillator vibration mode diagram, and the specific working principle is as follows: when the metal multi-ring vibrator 100 is in a static state (no external angular velocity input), an alternating excitation signal is applied through the driving electrodes 102 and 103, the vibrator can generate cup-shaped vibration (a first vibration mode), the vibration mode is changed between an ellipse and a circle, and the horizontal axis in the figure is a vibration axis and is a position with the maximum amplitude. At this time, the external world inputs a counterclockwise angular velocity (external rotation angle) on the plane to the vibrating gyro-oscillator, and a point on the horizontal axis is analyzed, and if the point moves toward the center of the disk, the point is shifted upward by the influence of coriolis force according to the coriolis effect. In this phenomenon, the gyro is caused to precess (precession angle) by the conservation of the rotation amount, and the angle is θ, so that the vibration mode of the vibrator is shifted counterclockwise and the vibration mode is deflected by a certain angle (second vibration mode).
As shown in fig. 4, a flow chart of the micro gyroscope includes the following steps:
a, depositing a metal film on the substrate, and patterning through the photoetching film to define the arrangement of the wires, namely, the interconnection layer 204.
B, depositing an insulating layer 202 and an insulating layer 203 on the interconnection layer 204, and carrying out patterning through photoetching to open windows 205 required by the subsequent electroplated vibrators, electrodes and welding points.
C, sputtering a seed layer on the insulating layers 202 and 203 to prepare for the subsequent electroplating process.
And D, plating a film on the seed layer, carrying out photoetching patterning on the film according to the structural requirement of the oscillator, and finally carrying out a grinding process to be used as a sacrificial layer of a subsequent plating process.
And E, spin-coating photoresist on the sacrificial layer and patterning the photoresist. After the processing, the metal oscillator structure 201, the supporting column 101, the detection electrodes 104 and 105, the driving electrodes 102 and 103 and the bonding layer 208 of the packaging cover of the metal multi-ring oscillator are processed and molded at one step through an electroplating process, and then a grinding process is carried out to ensure the flatness and symmetry of the surface of the metal oscillator.
And F, removing the sacrificial layer after the electroplating process of the metal multi-ring oscillator and the electrode is finished.
G, then, removing the redundant seed layer.
The package bond metal layer 207 is electroplated on the top 200 of the package lid.
And I, a vacuum suction device 206 is arranged in the packaging cover, and a vacuum and closed environment is provided for the vibration of the vibrator after bonding.
And J, packaging the metal multi-ring vibrator 100 through a bonding metal layer 207 and a bonding layer 208 to obtain the metal multi-ring disc vibration micro gyroscope.
The invention relates to MEMS technology application and MEMS micromachining technology. The invention adopts a plane annular structure, the processing is easier to realize, the processing cost is lower, higher quality factors can be obtained, and the performance of the device is improved; the metal material has higher relative density, and is processed by adopting an electroplating process, so that the processing threshold and the cost are lower, and the realization is easier; the multi-ring structure increases the driving force and the detection sensitivity of the micro-gyroscope device. In order to realize the scheme, the MEMS is mainly adopted as the etching, deposition and electroplating process in the processing technology, and the purpose of achieving higher device precision and quality with lower cost and condition requirements is realized.
Particular embodiments of the present invention have been described above. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes and modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention.
Claims (7)
1. The utility model provides a metal construction polycyclic vibration dish micro-top which characterized in that: the packaging structure comprises a packaging cover, a metal multi-ring oscillator (100) and a substrate from top to bottom, wherein: a vacuum sealed space is formed between the packaging cover and the substrate, and the metal multi-ring vibrator (100) is packaged in the vacuum sealed space;
the metal multi-ring vibrator comprises a metal vibrator structure (201) and a supporting column (101), wherein the supporting column (101) is located in the center of the metal multi-ring vibrator (100), the metal vibrator structure (201) is composed of a plurality of concentric metal rings (107), two adjacent metal rings (107) are connected through spokes (106) which are uniformly distributed in the circumferential direction, the innermost metal ring (107) is connected through the spokes (106), the adjacent metal rings (107) and the spokes (106) partially surround a groove (108) in the metal multi-ring vibrator (100), and the formed grooves (108) are uniformly distributed on the metal vibrator structure (201);
a gap exists between the metal oscillator structure (201) and the substrate to form a suspended structure, the supporting column (101) is arranged on the upper surface of the substrate and forms fixed connection with the substrate, and the metal oscillator structure (201) is connected with the supporting column (101) through the spoke (106) at the innermost ring;
the metal multi-ring vibrator is characterized in that a plurality of pairs of driving electrodes (102 and 103) are arranged in a groove (108) of an inner ring of the metal multi-ring vibrator, a plurality of pairs of detection electrodes (104 and 105) are arranged in a groove (108) of an outer ring of the metal multi-ring vibrator, and the driving electrodes (102 and 103) and the detection electrodes (104 and 105) are respectively used for excitation of gyro reference vibration and detection of the vibration.
2. The metal structure multi-ring vibrating disk micro-gyroscope of claim 1, wherein: the package cover comprises a top (200), and a bonding metal layer (207) and a vacuum suction device (206) which are positioned below the top (200).
3. The metal structure multi-ring vibrating disk micro-gyroscope of claim 2, wherein: and a bonding layer (208) of a packaging cover is arranged on the substrate, and the bonding layer (208) is bonded with the bonding metal layer (207) to form a vacuum sealed space.
4. The metal structure multi-ring vibrating disk micro-gyroscope of claim 1, wherein: the substrate is provided with an interconnection layer (204), the interconnection layer (204) leads out and leads in electric signals on the detection electrodes (104, 105) and the driving electrodes (102, 103), the interconnection layer (204) is provided with insulating layers (202, 203), and the insulating layers (202, 203) are positioned at the bottoms of the detection electrodes (104, 105) and the driving electrodes (102, 103) to form electric insulation with surrounding structures.
5. The metal structure multi-ring vibrating disk micro-gyroscope of claim 1, wherein: the driving electrodes (102, 103) and the detecting electrodes (104, 105) are manufactured on the upper surface of the substrate and form fixed connection with the substrate.
6. The metal structure multiple ring vibrating disk microgyroscope of any of claims 1 to 5, wherein: when the metal multi-ring vibrator (100) is in a static state, an alternating excitation signal is applied through the driving electrodes (102 and 103), the metal multi-ring vibrator can generate reference vibration, namely a first vibration mode, the vibration mode is changed between an ellipse and a circle, at the moment, a counterclockwise angular velocity is input on the plane of the vibrating metal multi-ring vibrator by the outside, if a certain point on the metal multi-ring vibrator moves towards the center of the metal multi-ring vibrator (100), the point is upwards deviated under the influence of Coriolis force according to the Coriolis effect, due to the fact that the rotation quantity is constant, the gyroscope generates precession, the precession angle is theta, therefore, the vibration mode of the metal multi-ring vibrator generates a counterclockwise deviation phenomenon, and the vibration mode deflects by an angle, namely a second vibration mode.
7. A method for preparing a metal structure multi-ring vibrating disk microgyroscope as claimed in any one of claims 1 to 6, which is characterized in that: the method comprises the following steps:
depositing a layer of metal film on the substrate, and patterning the metal film through a photoetching film to define the arrangement of the leads, namely an interconnection layer (204);
depositing insulating layers (202, 203) on the interconnection layer (204), and carrying out patterning through photoetching to open windows (205) required by the subsequent electroplating of metal multi-ring oscillators, electrodes and welding points;
sputtering a seed layer on the insulating layers (202, 203) to prepare for a subsequent electroplating process;
firstly, electroplating a layer of film on a seed layer, carrying out photoetching patterning on the film according to the structural requirement of the metal multi-ring oscillator, and finally carrying out a grinding process to be used as a sacrificial layer of a subsequent electroplating process;
spin-coating a photoresist on the sacrificial layer, and patterning the photoresist; after the patterning is finished, a metal oscillator structure (201) and a supporting column (101), detection electrodes (104, 105), driving electrodes (102, 103) of the metal multi-ring oscillator and a bonding layer (208) of a packaging cover are machined and molded at one time through an electroplating process, and then a grinding process is carried out to ensure the flatness and symmetry of the surface of the metal oscillator;
after the electroplating process of the metal multi-ring oscillator and the electrode is finished, removing the sacrificial layer;
then, removing the redundant seed layer;
plating a packaging bonding metal layer (207) on the top (200) of the packaging cover, and embedding a vacuum suction device (206) in the packaging cover (200);
and packaging the metal multi-ring oscillator (100) through a bonding metal layer (207) and a bonding layer (208) to obtain the metal multi-ring disc vibration micro gyroscope.
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