CN105486297B - Polycyclic types of disc-shaped flexible beam within the resonator gyro s and preparation method - Google Patents

Polycyclic types of disc-shaped flexible beam within the resonator gyro s and preparation method Download PDF

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CN105486297B
CN105486297B CN201510807733.0A CN201510807733A CN105486297B CN 105486297 B CN105486297 B CN 105486297B CN 201510807733 A CN201510807733 A CN 201510807733A CN 105486297 B CN105486297 B CN 105486297B
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shaped
flexible beam
resonator
polycyclic
disc
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CN105486297A (en
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张卫平
朱甲强
唐健
邢亚亮
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上海交通大学
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Abstract

本发明提供了种圆盘多环内S形柔性梁谐振陀螺及其制备方法,包括个基底;个圆盘多环内S形柔性梁谐振器,包含中央圆柱、多个S形柔性梁、多个同心圆环和多组辐条,其中:中央圆柱与所述基底相连,同心圆环之间均通过多个辐条相连,多个S形柔性梁的两端均分别与中央圆柱和多个同心圆环中最小圆环内侧相连;组分布在所述圆盘多环内S形柔性梁谐振器外围边缘的电极,且每个电极分别与所述基底相连。 The present invention provides multiple types of disk S-shaped inner ring resonator gyro of the flexible beam and its preparation method, comprising a substrate; a disk-shaped flexible beam S within the multiple ring resonator, comprising a central cylinder, a plurality of S-shaped flexible beam, multi- concentric rings and a plurality of sets of spokes, wherein: a central cylinder connected to said base, a plurality of spokes connected between concentric rings have passed, a plurality of S-shaped flexible beam ends are respectively concentric with the central cylinder and a plurality of an annular inner ring is connected to the minimum; distributed electrode group in said disc-shaped polycyclic S within the flexible peripheral edge of the resonator beam, and each of the electrodes connected to the substrate. 本发明具有体积小、结构稳定、响应灵敏等优点,具有良好的对称性,因而可以达到较高的性能。 The present invention has a small volume, a stable structure, sensitive response, etc., with good symmetry, it is possible to achieve high performance.

Description

一种圆盘多环内S形柔性梁谐振陀螺及其制备方法 The disc-shaped polycyclic S within the flexible beam resonator gyro and preparation method

技术领域 FIELD

[0001] 本发明涉及一种微机电技术领域的陀螺,具体地,涉及一种圆盘多环内S形柔性梁谐振陀螺及其制备方法。 [0001] The present invention relates to a technical field of microelectromechanical gyroscope, in particular, to a flexible disk resonator gyro beam and preparation method within the multi-S-shaped ring.

背景技术 Background technique

[0002] 陀螺仪是一种能够敏感检测载体角度或角速度的惯性器件,在姿态控制和导航定位等领域有着非常重要的作用。 [0002] The gyroscope is capable of sensitive detection angle or an angular velocity vector of the inertial device, has a very important role in the attitude control and navigation fields. 随着国防科技和航空、航天工业的发展,惯性导航系统对于陀螺仪的要求也向低成本、小体积、高精度、多轴检测、高可靠性、能适应各种恶劣环境的方向发展。 With the development of defense technology and aerospace industry, inertial navigation system requirements for gyro also to low-cost, small size, high precision, multi-axis detection, high reliability and can adapt to the development direction of a variety of harsh environments. 基于MEMS技术的微陀螺仪采用微纳批量制造技术加工,其成本、尺寸、功耗都很低, 而且环境适应性、工作寿命、可靠性、集成度与传统技术相比有极大的提高,因而MEMS级的微陀螺已经成为近些年来MEMS技术广泛研宄和应用开发的一个重要方向。 MEMS-based micro gyroscope using the micro-nano-volume manufacturing techniques, the cost, size, power consumption is low, and environmental adaptability, working life, reliability, and the degree of integration as compared to the conventional art has greatly improved, thus MEMS gyro micro-level has become an important direction in recent years extensive study based on MEMS technology and application development.

[0003] 随着MEMS陀螺在导航系统中的应用和发展,国外科学家1994年研制的半球谐振陀螺具有较高的性能。 [0003] With the application and development of MEMS gyroscopes in navigation system, developed by foreign scientists in 1994, HRG has a high performance. 借助于这种半球谐振陀螺的研究,研宄者们对具有高Q值和对称结构的ffiMS谐振器的设计有了更好的理解。 With this study HRG, who study based on a better understanding of the design ffiMS resonator having a high Q value and a symmetrical structure. 但是,由于早期的杆结构谐振器的杆部分需要组装在微机械机构上,从长远来看,更高的动态负载和在连接处的不精确连接会导致半球谐振陀螺产生更大偏移。 However, because of the early portion of the shaft rod resonator structure requires assembly on the micromechanical mechanism, the long term, higher loads and a greater dynamic offset imprecise connection at the connector HRG leads to generation. 于是,想到了设计一种具有良好对称性的、小而紧凑的、平面结构的ffiMS 陀螺,即圆盘多环内S形柔性梁谐振陀螺。 Therefore, I thought, small and compact, ffiMS gyro design having a good symmetry plane of the structure, i.e., the S-shaped disk polycyclic flexible beam resonator gyro.

发明内容 SUMMARY

[0004] 本发明的目的是提供一种圆盘多环内S形柔性梁谐振陀螺的结构,具有体积小、结构稳定,响应灵敏等优点,具有良好的对称性,因而可以达到较高的性能。 [0004] The object of the present invention is to provide a disc-shaped inner polycyclic structure S flexible beam resonator gyro, having a small volume, a stable structure, sensitive response, etc., with good symmetry, it is possible to achieve high performance .

[0005] 根据本发明的一个方面,提供一种圆盘多环内S形柔性梁谐振陀螺,包括: [0005] In accordance with one aspect of the invention, there is provided a disc-shaped polycyclic S within the flexible beam resonator gyro, comprising:

[0006] —个基底; [0006] - a substrate;

[0007] 一个圆盘多环内S形柔性梁谐振器,包含中央圆柱、多个S形柔性梁、多个同心圆环和多组辐条,其中:中央圆柱与基底相连,同心圆环之间均通过多个辐条相连,多个S形柔性梁的两端均分别与中央圆柱和多个同心圆环中最小圆环内侧相连; The [0007] S a disc-shaped flexible beam polycyclic resonator, comprising a central cylinder, a plurality of S-shaped flexible beams, a plurality of concentric rings and a plurality of sets of spokes, wherein: the substrate and connected between the central cylinder, concentric rings are connected via a plurality of spokes, a plurality of S-shaped flexible beam ends are connected to the plurality of concentric rings and the central cylindrical minimum inner ring respectively;

[0008] 一组分布在圆盘多环内s形柔性梁谐振器外围边缘的电极,且每个电极分别与基底相连。 [0008] distributed within a set of disc-shaped electrode polycyclic s peripheral edge of the flexible beam resonator, and each electrode is connected to the substrate, respectively.

[0009] 优选地,所述基底上设有凸出的部分,所述凸出的部分包括中央圆柱和n个外围边缘离散的扇环部分,n多8且n为偶数,其中:n个外围边缘离散的扇环部分等间距分布且每个扇环部分的宽度相等;中央圆柱与n个外围边缘离散的扇环部分的髙度相等; [0009] Preferably, the projecting portion is provided on the base, the projecting portion includes a central cylinder and the peripheral edge of the n-th discrete fan ring portion, n 8 and n is an even plurality, wherein: n peripheral edge discrete fan ring portion are equally spaced and of equal width portion of each sector of the ring; n is equal to the central cylindrical peripheral edge of the discrete Gao sector ring moiety;

[0010] 基底上最外围边缘为n个等间距分布的电极片,其中:n个电极片与n个外围边缘离散的扇环部分的位置一一对应,n个电极片分别与n个外围边缘离散的扇环部分用导线相连且两者之间的距离均相等;n个电极片的宽度、厚度均相等; [0010] Most of the peripheral edge of the electrode sheet on the substrate of n equally spaced, wherein: n and n electrode plate peripheral edge discrete positions correspond sector ring portion, the n electrode sheet peripheral edge, respectively, the n They are equal and are connected with the wire distance between discrete fan ring portion; n-electrode sheet width and thickness are equal;

[0011]基底上的中央圆柱上将引出一条引线,用于接地或接零电势。 [0011] the central cylindrical substrate on a lead wire, a ground or zero potential.

[0012]更优选地,在所述中央圆柱和n个外围边缘离散的扇环部分上分别设有一层导电薄膜,然后将所述基底与单晶硅片键合。 [0012] More preferably, a conductive film respectively provided on the central cylinder and the peripheral edge of the n-th discrete fan ring portion, and then the single crystal silicon substrate with a chip bonding.

[0013] 优选地,所述基底的材料为熔融石英或耐热玻璃或单晶硅。 [0013] Preferably, the material of the substrate is fused silica or glass or heat-resistant single-crystal silicon.

[0014]优选地,所述圆盘多环内S形柔性梁谐振器中:中央圆柱位于圆盘多环内S形柔性梁谐振器的中心位置; [0014] Preferably, said disc-shaped polycyclic S flexible beam within the resonator: multiple central cylindrical central position of the disc shaped flexible beam S within the ring resonator;

[0015] 多个同心圆环的中心轴均与中央圆柱的中心轴重合;同心圆环的宽度均相等,同心圆环之间的间隙宽度均相等; [0015] a plurality of concentric rings of the central axis is coincident with the central axis of the central cylinder; concentric rings are equal to the width of the gap width between concentric rings are equal;

[0016] 分布于同心圆环间的每组辐条均匀间隔排列;每组辐条的个数为m个,m彡8且m为偶数;每组辐条的间隔角度为360°/m;每个辐条的宽度均相等; [0016] uniformly distributed between the spokes of each group are spaced concentric rings; the number of spokes in each group of m, 8 m and m is an even number San; each spoke spacing angles of 360 ° / m; each spoke widths are equal;

[0017] 为了提升圆盘多环谐振器的灵敏度,在中央圆柱和多个同心圆环中最小圆环之间加入了多个S形柔性梁,所述S形柔性梁的个数为n个,n>8且n为偶数;nfs形柔性梁等间距分布,且n个S形柔性梁的中心位于同一圆周上,n个S形柔性梁与中央圆柱位于同一水平面。 [0017] In order to enhance the sensitivity of multi-disc of the ring resonator, and the central cylinder between the plurality of concentric annular rings are added to the smallest plurality of flexible S-shaped beam, the number of the S-shaped flexible beam is n , n> 8, and n is an even number; nfs pitch like shaped flexible beam distribution, and n S-shaped flexible beam center is located on the same circumference, n a S-shaped flexible beam at the same level with the central cylinder.

[0018] 更优选地,每个所述S形柔性梁均呈中心对称,且均由两个“月牙”形状的结构构成,其中:每个“月牙”结构均由两个直径相等的半圆弧构成,且半圆弧的圆心与S形柔性梁的中心共线。 [0018] More preferably, each of the S-shaped flexible beam showed a center of symmetry, and the two "crescent" shaped configuration by configuration, wherein: each "crescent" structure by two equal semicircular diameter arcs, the center of the arc and the half central S-shaped flexible beam collinear.

[0019] 优选地,所述圆盘多环内S形柔性梁谐振器的材料为单晶硅。 [0019] Preferably, said disc-shaped polycyclic S flexible beam within the resonator is a single crystal silicon material.

[0020] 优选地,所述电极为n个扇环形状的电极,n多8且为偶数,n个电极与n个S形柔性梁的位置——对应,且每个电极的中心轴均与圆盘多环内S形柔性梁谐振器的中心轴重合;n 个电极与同心圆环中最大圆环之间的间隙距离均相等; [0020] Preferably, the electrode is an n-th sector ring-shaped electrodes, 8 and n is an even multiple, the position of the n electrodes and the n-shaped flexible beam S - correspondence, and the center axis of each electrode and are the S-shaped disk polycyclic flexible beam coincides with the center axis of the resonator; n-electrodes and the gap distance between a maximum concentric annular ring are all equal;

[0021] n个电极包含n/2个驱动电极和n/2个检测电极,n/2个驱动电极和n/2个检测电极沿圆盘多环内S形柔性梁谐振器外围边缘均匀间隔排布。 [0021] n electrodes comprises n / 2 electrodes and driving the n / 2 electrodes is detected, the n / 2 electrodes and driving the n / 2 electrodes in the detection of the disc-shaped flexible beam multiple ring resonator S peripheral edge spaced uniformly arrangement.

[0022] 优选地,所述电极的材料为单晶硅。 [0022] Preferably, the electrode material of single crystal silicon.

[0023] 根据本发明的另一个方面,提供一种圆盘多环内S形柔性梁谐振陀螺的制备方法, 该方法包括如下步骤: [0023] According to another aspect of the present invention, there is provided a method of preparing a flexible disk resonator gyro beams within polycyclic S-shaped, the method comprising the steps of:

[0024] ⑴采用MEMS微细加工工艺,对基底进行刻蚀,形成凹槽和凸出部分,在凸出部分上镀一层导电薄膜; [0024] ⑴ using MEMS microfabrication process, the substrate is etched to form a groove and a projecting portion, the projecting portion is plated on the conductive thin film layer;

[0025] ⑵采用键合技术,将步骤⑴得到的基底与单晶硅片键合; [0025] ⑵ using bonding techniques, obtained in step ⑴ monocrystalline silicon substrate and the chip bonding;

[0026] ⑶采用深反应离子刻蚀(Deep Reactive Ion Etching)法,对单晶硅片进行刻蚀,得到圆盘多环内S形柔性梁谐振器及其外围边缘的电极,最终得到圆盘多环内s形柔性梁谐振陀螺。 [0026] ⑶ using deep reactive ion etching (Deep Reactive Ion Etching) method, monocrystalline silicon wafer is etched to obtain a multi-disk resonator electrode and the peripheral edge of the ring-shaped flexible beam S, to give a final disc polycyclic s-shaped flexible beam within the resonator gyro.

[0027] 与现有技术相比,本发明具有以下优势: [0027] Compared with the prior art, the present invention has the following advantages:

[0028] 1.加工工艺步骤简洁,采用成熟的微机械加工工艺和刻蚀方法,利于批量生产; [0028] Step 1. The process is simple, the use of sophisticated micromachining process and an etching method, facilitates mass production;

[0029] 2.圆盘多环内S形柔性梁谐振陀螺具有高度对称性,且结构相对稳定,抗冲击,具有优良的性能; [0029] 2. The S-shaped disk polycyclic inner flexible beam resonator gyro having high symmetry, and the structure is relatively stable, impact resistance, excellent performance;

[0030] 3.分布在圆盘多环内S形柔性梁谐振器外围边缘的电极相对于分布在圆盘多环内S形柔性梁谐振器中同心圆环内部的电极而言,可以提高圆盘多环内s形柔性梁谐振陀螺的Q值,因而响应更加灵敏。 [0030] The electrode located in the peripheral edge of the disc-shaped polycyclic inner flexible beam S with respect to the resonator in terms of distribution of the S-shaped flexible ring resonator beam multiple electrodes inside the disk concentric rings, can be improved circle s inner disc-shaped polycyclic Q value resonator gyro of the flexible beam, and therefore more responsive.

[0031] 本发明具有体积小、结构稳定、响应灵敏等优点,具有良好的对称性,因而可以达到较高的性能。 [0031] The present invention has a small size, a stable structure, sensitive response, etc., with good symmetry, it is possible to achieve high performance.

附图说明 BRIEF DESCRIPTION

[0032]通过阅读参照以下附图对非限制性实施例中所作的详细描述,本发明的其它特征、目的和优点将会变得更明显: [0032] By reading the following detailed description of the drawings made in non-limiting embodiments of the present invention, other features, objects and advantages will become more apparent:

[0033]图1A为本发明一实施例中圆盘多环内S形柔性梁谐振陀螺的俯视图; [0033] FIG 1A a plan view of a multi-disk embodiment the S-shaped flexible ring resonator gyro is a beam embodiment of the present invention;

[0034]图1B为本发明—实施例中圆盘多环内S形柔性梁谐振陀螺的三维视图; [0034] FIG 1B of the present invention - the disk embodiments the S-shaped flexible multi-ring resonator gyro beam three-dimensional view;

[0035]图1C为本发明一实施例中圆盘多环内S形柔性梁谐振陀螺的剖视图; [0035] FIG. 1C sectional view of the disc-shaped polycyclic S within the flexible beam resonator gyro an embodiment of the present invention;

[0036]图2A为本发明一实施例中基底的俯视图; [0036] Figure 2A embodiment of a top view of the base embodiment of the present invention;

[0037]图2B为本发明一实施例中基底的三维视图; [0037] FIG. 2B is a three-dimensional view of a substrate in the embodiment of the present invention;

[0038]图2C为本发明一实施例中基底的剖视图; Sectional view of the embodiment of a substrate [0038] FIG 2C of the present invention;

[0039]图⑽为本发明—实施例中圆盘多环内S形柔性梁谐振器的俯视图; [0039] FIG ⑽ present invention - a multi-disc embodiments within the S-shaped top plan view of the ring resonator embodiment of the flexible beam;

[0040] 图3B为本发明一实施例中圆盘多环内S形柔性梁谐振器的三维视图; [0040] FIG. 3B embodiment the disc-shaped polycyclic S flexible beam within the resonator dimensional view of an embodiment of the present invention;

[0041] 图3C为本发明一实施例中圆盘多环内S形柔性梁谐振器的主视图; [0041] FIG 3C a front view of the present embodiment, the disc-shaped polycyclic S flexible beam within the resonator to an embodiment of the invention;

[0042]图4A为本发明一实施例中圆盘多环内S形柔性梁谐振器与其外围边缘电极相对位置的俯视图; [0042] FIG. 4A is a plan view of the relative position of the S-shaped disk polycyclic flexible beam resonator with peripheral edges of the electrode in an embodiment of the present invention embodiment;

[0043]图4B为本发明一实施例中圆盘多环内S形柔性梁谐振器与其外围边缘电极相对位置的三维视图; [0043] FIG. 4B embodiment the relative position of three-dimensional view of the disc polycyclic S-shaped flexible beam resonator with peripheral edges of the electrodes one embodiment of the present invention;

[0044]图4C为本发明一实施例中圆盘多环内S形柔性梁谐振器与其外围边缘电极相对位置的剖视图; [0044] FIG 4C is a sectional view of the relative position of the S-shaped disk polycyclic flexible beam resonator with peripheral edges of the electrode in an embodiment of the present invention embodiment;

[0045]图5A为圆盘多环内S形柔性梁谐振陀螺工作时圆盘多环内S形柔性梁谐振器所做四波腹振动的驱动振型图; When [0045] FIGS. 5A-shaped flexible beam a disk resonator gyro working polycyclic ring within the multi-disc S S-shaped flexible beam resonator made four driving vibration mode antinode of vibration FIG;

[0046]图5B为圆盘多环内S形柔性梁谐振陀螺工作时圆盘多环内S形柔性梁谐振器所做四波腹振动的检测振型图; When [0046] FIG. 5B beam-shaped flexible disk resonator gyro work polycyclic ring within the multi-disc S S flexible beam-shaped resonator made of four antinodes of vibration detecting FIG modes;

[0047]图6A-6C为本发明一实施例中基底的制作工艺流程示意图; [0047] Figures 6A-6C production process schematic diagram of an embodiment of the present invention, a substrate;

[0048]图7A为本发明一实施例中基底与单晶硅片键合前的示意图; [0048] FIG. 7A is a schematic view of the front substrate and the single crystal silicon wafer embodiment bonded to an embodiment of the present invention;

[0049]图7B为本发明一实施例中基底与单晶硅片键合后的示意图; [0049] FIG. 7B embodiment schematic view of the silicon wafer substrate and bonded to an embodiment of the invention;

[0050] 图8为本发明一实施例中采用深反应离子刻蚀(Deep Reactive Ion Etching)法, 对单晶硅片进行刻蚀,最终得到圆盘多环内S形柔性梁谐振陀螺; [0050] Example 8 using deep reactive ion etching (Deep Reactive Ion Etching) method an embodiment of the present invention, a silicon wafer is etched, the finally obtained multi-ring disc-shaped flexible beam resonator gyro S;

[0051]图中:基底1〇〇,圆盘多环内S形柔性梁谐振器102,电极104。 [0051] FIG: 1〇〇 substrate, a disc-shaped polycyclic S flexible beam within the resonator 102, the electrode 104.

具体实施方式 Detailed ways

[0052]下面结合具体实施例对本发明进行详细说明。 Specific embodiments of the present invention will be described in detail [0052] below in conjunction. 以下实施例将有助于本领域的技术人员进一步理解本发明,但不以任何形式限制本发明。 The following examples will assist those skilled in the art a further understanding of the invention, but do not limit the present invention in any way. 应当指出的是,对本领域的普通技术人员来说,在不脱离本发明构思的前提下,还可以做出若干变形和改进。 It should be noted that one of ordinary skill in the art, without departing from the spirit of the present invention, further modifications and changes may be made. 这些都属于本发明的保护范围。 All these fall within the scope of the present invention.

[0053]如图1A、图1B、图1C所示,本实施例中提供一种圆盘多环内S形柔性梁谐振陀螺,包括: [0053] As shown in FIG. 1A, 1B, 1C, the present embodiment provides a disc-shaped polycyclic S within the flexible beam resonator gyro, comprising:

[0054] 一个基底100,基底100上具有一个中央圆柱和次外围的8个凸出的扇环部分以及最外围的8电极片; [0054] a substrate 100 having a sector ring 8 projecting central cylindrical portion and times and the outermost periphery of the electrode sheet 8 on a substrate 100;

[0055] —个圆盘多环内S形柔性梁谐振器1〇2,包含中央圆柱、多个S形柔性梁、多个同心圆环和多个辐条,其中:中央圆柱与基底100相连,多个同心圆环之间均通过多个辐条相连, 多个S形柔性梁的两端均分别与中央圆柱和多个同心圆环中最小圆环内侧相连; [0055] - multi-ring discs within the S-shaped flexible beam 1〇2 resonator, comprising a central cylinder, a plurality of S-shaped flexible beams, a plurality of concentric rings and a plurality of spokes, wherein: the substrate 100 is connected to the central cylinder, between a plurality of concentric rings are connected via a plurality of spokes, a plurality of S-shaped flexible beam ends are connected to the plurality of concentric rings and the central cylindrical minimum inner ring respectively;

[0056] 一组分布在圆盘多环内S形柔性梁谐振器102外围边缘的电极104,每个电极104分别与基底100相连。 [0056] a group of distribution electrodes 104,102 in the peripheral edge of the disk polycyclic S-shaped flexible beam resonators, each electrode 104 is connected to the substrate 100, respectively.

[0057] 以下对实施例中涉及的关于长度、宽度、高度等说明: [0057] the length, width, height, etc. of the description of the embodiment according to:

[0058] 如图2A所示,所述基底100的中央是底面圆直径为Di (Di的值为20wn〜2mm)中央圆柱,次外围的8个扇环部分的宽度为W2(W2的值为10um〜50um),最外围边缘的8个电极片的宽度为W3(W3的值为l〇Wn〜lOOwn),电极片与扇环部分之间的间距为W4(W4的值为10wn〜100U m) 〇 [0058] As shown in FIG. 2A, the substrate 100 is a bottom surface of the central diameter circle (Di value 20wn~2mm) central cylindrical, eight times the width of the peripheral ring portion of the fan Di of W2 (W2 value 10um~50um), the width of the outermost peripheral edge of the electrode sheet 8 is W3 (W3 l〇Wn~lOOwn value), the spacing between the electrode sheets and the fan ring portion is W4 (W4 value 10wn~100U m ) 〇

[0059] 如图2C所示,所述基底100的凸出部分(即中央圆柱与8个扇环部分)的高度为出他的值为lwn〜lOOwn);在凸出部位上沉积的导电薄膜的厚度分别为H2他的值为lOOnm〜1以m),最外围边缘8个电极片的厚度为H3(H3的值为lOOnm〜lwn)。 [0059] shown in Figure 2C, the height of the base convex portion (i.e. central cylindrical sector and eight ring portion) 100 is a value that he lwn~lOOwn); a conductive film deposited on a projecting portion the thicknesses of the value of his H2 lOOnm~1 to m), the outermost peripheral edge of the electrode plate 8 having a thickness of H3 (H3 value lOOnm~lwn).

[0060] 如图3A所示,所述圆盘多环内S形柔性梁谐振器102的中央是直径为D2 (D2的值为20 ym〜2mm)的中央圆柱,每条同心圆环的宽度均为W5(W5的值为5wn〜50um),同心圆环之间的间隙宽度均为W6 (W6的值为5um〜50um),每个辐条的宽度均为W7(W7的值为5wn〜50um) ;8个S 形柔性梁均呈中心对称,且均由两个类似于“月牙”形状的结构构成,每个“月牙”结构均由两个半圆弧构成,半圆弧的直径均为D3 (D3的值为10um〜lOOwn),两个半圆弧之间相距的最大距离为Ws(W8的值为5WI1〜50WH)。 [0060] shown, the disc-shaped polycyclic S within the flexible beam is a center of the resonator 102 in FIG. 3A central cylindrical diameter D2 (D2 value 20 ym~2mm), the width of each of concentric circles are W5 (W5 value 5wn~50um), a gap width between concentric rings are W6 (W6 value of 5um~50um), the width of each spoke are W7 (W7 value 5wn~50um ); 8 S-shaped flexible beam showed a center of symmetry, and by two similar "crescent" shaped configuration structure, each "crescent" structure constituted by two semi-circular, semi-circular diameter are D3 (D3 value 10um~lOOwn), between a maximum distance from the two semicircular arcs for Ws (W8 value 5WI1~50WH).

[0061]如图4A所示,分布在圆盘多环内S形柔性梁谐振器102外围边缘的8个所述电极104 宽度均为Wi (Wi的值为lOum〜50wn),每个电极104与同心圆环中最大圆环之间的间隙距离均为W9 (Wg的值为5ym〜50um)。 [0061] As shown in FIG. 4A, in the distribution disc 8 to the plurality width of the ring electrodes 104 within the S-shaped peripheral edge of the flexible beam 102 are both resonator (Wi is the lOum~50wn) Wi, each electrode 104 the annular gap between the maximum distance concentric rings are W9 (Wg value 5ym~50um).

[0062]如图2A、图邪、图2C所示,本实施例中,所述基底100上的次外围的8个扇环部分等间距分布且每个扇环部分的宽W2相同,基底1〇〇上凸出的中央圆柱和8个扇环部分的高度Hi 相同,在凸出部位(即中央圆柱和8个扇环部分)上沉积的导电薄膜的厚度H2也相同,最外围边缘的8个电极片的厚度H3也相同。 [0062] As shown in FIG. 2A, evil, as shown in 2C, the embodiment of the present embodiment, 100 times on the periphery of the base ring portion 8 sectors are equally spaced and have the same width W2 of the ring portion of each sector, the substrate 1 projecting the same height Hi thousand and central cylindrical portion of the ring sector and 8, the thickness H2 of the conductive thin film deposited on the convex portions are the same (i.e., central cylindrical ring portion and 8 sectors), the most peripheral edge 8 the thickness H3 of the same plate electrode.

[0063]如图3A、图洲、图3C所示,本实施例中,所述圆盘多环内S形柔性梁谐振器102的中央是圆柱体结构,围绕着中央圆柱的是多个同心圆环和8个S形柔性梁,其中:每条同心圆环的宽W5相同,同心圆环之间的间隙宽度W6相同,同心圆环间均有8个辐条均匀排列,每个辐条的宽度W7相同,每个“月牙”中半圆弧的直径D3相同,两个半圆弧之间相距的最大距离W8相同。 [0063] As shown in FIG. 3A, Chau, FIG. 3C, in the present embodiment, the center of the disk polycyclic S-shaped flexible beam resonator 102 is a cylindrical structure around the central cylinder is a plurality of concentric 8 S-shaped rings and the flexible beam, wherein: each of the concentric rings of the same width W5, the same gap width between concentric rings W6, between the concentric rings are arranged uniformly eight spokes, each spoke width same W7, each identical "crescent" in the semi-circular diameter D3, a distance between the same two half arcs maximum distance W8.

[0064]如图4A、图4B、图4C所示,本实施例中,8个所述电极104沿圆盘多环内S形柔性梁谐振器102外围边缘均匀分布,且8个电极104的中心轴均与圆盘多环内S形柔性梁谐振器102 的中心轴重合,每个电极104的宽度A相同,每个电极104与同心圆环中最大圆环之间的间隙距离%也相同。 [0064] FIG. 4A, 4B, and 4C, in the present embodiment, the eight S-shaped electrodes 104 in the disc peripheral edge of the flexible beam 102 within the multiple ring resonator is uniformly distributed, and the eight electrode 104 the central axis of the disc are polycyclic S-shaped flexible beam within the resonator center axis 102 coincides same width a of each electrode 104, the gap distance% between each electrode 104 and the maximum concentric annular rings same .

[0065] 本实施例中,所述圆盘多环内S形柔性梁谐振器102中:每条同心圆环的宽度W5、同心圆环之间的宽度为W6、每个辐条的宽度为W7、辐条间的角度差0以及每个“月牙”中半圆弧的直径D3、两个半圆弧之间相距的最大距离w8,在加工时可以适当调节以达到理想的模态匹配。 [0065] In this embodiment, the disc-shaped polycyclic S flexible beam within the resonator 102: width W5 of each of the concentric rings, the width between concentric rings is W6, the width W7 of each spoke , the angle difference between the spokes and each 0 "crescent" in the semi-circular diameter D3, a distance between the two half arcs maximum distance W8, in the processing mode can be appropriately adjusted to achieve the desired match.

[0066]本实施例中,所述圆盘多环内S形柔性梁谐振器1〇2外围边缘的电极1〇4为S个扇环电极,分别为4个驱动电极和4个检测电极,其中:4个驱动电极和4个检测电极均匀间隔排布,相邻驱动电极之间的位置间隔90。 [0066] In this embodiment, the peripheral edge of the electrode 1〇2 polycyclic inner disc-shaped flexible beam S into S resonator 1〇4 sector ring electrodes, respectively, four drive electrodes and detection electrodes 4, wherein: four drive electrodes and the detecting electrodes 4 are arranged evenly spaced, the position gap between adjacent driving electrodes 90. ,相邻检测电极之间的位置间隔90 °,相邻驱动电极与检测电极的位置间隔45 °。 , Detecting a position between the adjacent electrodes spaced 90 °, the position adjacent to the drive electrode and the detection electrodes are spaced 45 °.

[0067]如图5A、图5B所示,本实施例中,所述圆盘多环内S形柔性梁谐振器1〇2的平面四波腹振动模态作为参考振动,在该模态下所述圆盘多环内S形柔性梁谐振器1〇2径向振动。 [0067] FIG. 5A, 5B, in the present embodiment, the plane of the disc polycyclic S-shaped flexible beam resonator 1〇2 four vibration mode antinode of vibration as a reference, in this mode the disc-shaped polycyclic inner flexible beam S 1〇2 radial vibration of the resonator. 具体的工作原理为: Specific works as follows:

[0068] 所述圆盘多环内S形柔性梁谐振器102与所述基底1〇〇的中央圆柱接地,保证同电势为0V;利用所述圆盘多环内S形柔性梁谐振器102的平面四波腹振动模态作为参考振动, 所述电极104中的驱动电极被施加交流电压时,由逆压电效应产生径向振动,从而带动所述圆盘多环内S形柔性梁谐振器102振动;当有所述圆盘多环内S形柔性梁谐振器102中心轴方向的角速度输入时,在科氏力的作用下,所述圆盘多环内S形柔性梁谐振器102的振型向检测模态转变,带动所述电极104振动,由正压电效应在电极1 〇4中的检测电极上得到电信号, 从而得到圆盘多环内S形柔性梁谐振器102在检测模态下的振幅,由于检测模态谐振振幅与输入角速度的大小成正比,进而可以得到输入角速度的大小。 [0068] The disc-shaped polycyclic S within the flexible beam and the center of the cylindrical resonator 102 is grounded to the substrate 1〇〇 to ensure that the same potential is 0V; with the disc-shaped polycyclic S flexible beam within the resonator 102 when four plane vibration mode antinode of vibration as a reference, the driving of the electrodes 104 is AC voltage is applied, the radial vibration generated by the inverse piezoelectric effect, so as to drive the inner disk polycyclic S-shaped flexible beam resonator vibrator 102; when the disk has the S-shaped flexible polycyclic angular velocity input beam central axis direction of the resonator 102, under the action of the Coriolis force, within the disk polycyclic S-shaped flexible beam resonator 102 detecting vibration mode to mode transition, the driving vibration electrodes 104, an electric signal obtained by the direct piezoelectric effect on the detecting electrode 1 〇4 an electrode to obtain a disc-shaped polycyclic S within the flexible beam in the resonator 102 the amplitude detection mode, since the size is proportional to the amplitude of the resonance mode is detected and the input angular velocity, and thus the input angular velocity can be obtained size. 图5A、图5B的驱动模态和检测模态相差45°。 FIGS. 5A, 5B of the drive mode and the detection mode differ 45 °.

[0069] 本实施例中,所述基底1〇〇的厚为300mi〜800wn,直径为2mm〜8mm;所述基底100的材料是熔融石英,石英材料具有耐高温、热膨胀系数小、耐腐蚀、谐振等特性,可以使陀螺仪成品能在恶劣环境下工作。 [0069] In this embodiment, the thickness of the substrate is 1〇〇 300mi~800wn, diameter 2mm~8mm; material of the substrate 100 are fused silica, quartz material having high temperature resistance, low coefficient of thermal expansion, corrosion resistance, resonance characteristics, can be made to work gyroscope finished in harsh environments.

[0070] 本实施例中,所述圆盘多环内S形柔性梁谐振器102的厚为100M1〜500WI1,直径为2mm〜8mm;所述电极104的厚为lOOum〜500mi;所述圆盘多环内S形柔性梁谐振器102及其外围边缘的电极104的材料均为单晶硅,单晶硅具有半导体性质,可以使陀螺仪达到较高的性能。 [0070] In this embodiment, the thickness of the disk polycyclic S-shaped flexible beam resonator 102 is 100M1~500WI1, diameter 2mm~8mm; thickness of the electrode 104 is lOOum~500mi; of the disc material of the electrode 104 of the S-shaped flexible polycyclic beam 102 and the peripheral edge of the resonator are single crystal silicon, single crystal silicon with semiconductor properties, can achieve higher performance gyro.

[0071] 本实施例提供一种圆盘多环内S形柔性梁谐振陀螺的制备方法,所述方法包括如下步骤: [0071] The present embodiment provides a method of preparing a flexible disk resonator gyro beams within polycyclic S-shaped, said method comprising the steps of:

[0072] (1)采用MEMS微细加工工艺,对熔融石英块进行湿法或干法刻蚀,得到所述基底100的凹槽和凸出的部分,然后在基底100上的凸出部分上沉积一层导电薄膜,最终得到所述基底1〇〇(如图6A、图6B、图60所示); [0072] (1) using MEMS microfabrication process, blocks of fused silica wet or dry etching, to obtain a groove and a convex portion of the substrate 100, and then deposited on the convex portions on a substrate 100 a conductive film, said substrate 1〇〇 finally obtained (Fig. 6A, 6B, and 60 shown);

[0073] ⑵采用键合技术,将上述基底100与单晶硅片键合(如图7A、图7B所示,其中:图7A 为基底与单晶硅片键合前的示意图,图7B为基底与单晶硅片键合后的示意图): [0073] ⑵ bonding technique employed, the above-mentioned substrate 100 and single crystal silicon wafer bonding (FIG. 7A, 7B, wherein: FIG. 7A is a schematic front substrate and the monocrystalline silicon wafer is bonded to FIG. 7B monocrystalline silicon substrate and bonded to the schematic):

[0074] (3)采用深反应离子刻蚀(Deep Reactive Ion Etching)法,对单晶娃片进行刻蚀,得到圆盘多环内S形柔性梁谐振器102及其外围边缘的电极104,最终得到圆盘多环内S 形柔性梁谐振陀螺(如图8所示)。 [0074] (3) deep reactive ion etching (Deep Reactive Ion Etching) method, a single crystal substrate is etched baby, to give the S-shaped disk polycyclic flexible beam resonator 102 and the electrode 104 of the peripheral edge, polycyclic disk finally obtained the S-shaped flexible beam resonator gyro (Figure 8).

[0075] 本实施例中陀螺的优点:1、较小的尺寸;2、良好的性能;3、抗冲击能力好;4、工艺步骤简单,利于批量生产,从而降低了制造成本。 Advantage of [0075] Embodiment of the present embodiment gyro: 1, smaller size; 2, good performance; 3, good impact resistance; 4, the process steps is simple, facilitates mass production, thereby reducing manufacturing costs.

[0076]以上对本发明的具体实施例进行了描述。 [0076] The foregoing specific embodiments of the invention have been described. 需要理解的是,本发明并不局限于上述特定实施方式,本领域技术人员可以在权利要求的范围内做出各种变形或修改,这并不影响本发明的实质内容。 Is to be understood that the present invention is not limited to the particular embodiments, those skilled in the art can make various changes and modifications within the scope of the appended claims, this does not affect the substance of the present invention.

Claims (10)

1. 一种圆盘多环内S形柔性梁谐振陀螺,包括:一个基底;其特征在于,还包括: 一个圆盘多环内s形柔性梁谐振器,包含中央圆柱、多个S形柔性梁、多个同心圆环和多组辐条,其中:中央圆柱与所述基底相连,同心圆环之间均通过多个辐条相连,多个S形柔性梁的两端均分别与中央圆柱和多个同心圆环中最小圆环内侧相连; 一组分布在所述圆盘多环内S形柔性梁谐振器外围边缘的电极,且每个电极分别与所述基底相连。 A disc-shaped polycyclic S within the flexible beam resonator gyro, comprising: a substrate; characterized by, further comprising: an inner disk polycyclic s-shaped flexible beam resonator, comprising a central cylinder, a plurality of S-shaped flexible beams, a plurality of concentric rings and a plurality of sets of spokes, wherein: said substrate and connected to the central cylinder, are connected through a plurality of spokes between the concentric rings, a plurality of S-shaped flexible beam ends are respectively and a plurality of central cylindrical the smallest concentric rings connected to the inner ring; a set of electrodes distributed in said disc-shaped polycyclic S within the flexible peripheral edge of the resonator beam, and each of the electrodes connected to the substrate.
2. 根据权利要求1所述的一种圆盘多环内S形柔性梁谐振陀螺,其特征在于:所述基底上设有凸出的部分,所述凸出的部分包括中央圆柱和n个外围边缘离散的扇环部分,n彡8且n为偶数,其中个外围边缘离散的扇环部分等间距分布且每个扇环部分的宽度相等;中央圆柱与n个外围边缘离散的扇环部分的高度相等; 基底上最外围边缘为n个等间距分布的电极片,其中:n个电极片与n个外围边缘离散的扇环部分的位置一一对应,n个电极片分别与n个外围边缘离散的扇环部分用导线相连且两者之间的距离均相等;n个电极片的宽度、厚度均相等; 基底上的中央圆柱上将引出一条引线,用于接地或接零电势。 2. According to one of the disk 1, the S-shaped flexible polycyclic beam resonator gyroscope as claimed in claim, wherein: said projecting portion is provided on a substrate, said projecting portion includes a central cylinder and the n the peripheral edge of the discrete fan ring portion, San n 8 and n is an even number, wherein the peripheral edge of the fan ring portion discrete equally spaced and the width of each sector is equal to the loop portion; central cylindrical peripheral edge of the n discrete fan ring portion equal height; the outermost peripheral edge of the electrode sheet on the substrate of n equally spaced, wherein: n and n electrode plate peripheral edge discrete positions correspond sector ring portion, each of n and n electrode tab peripheral edge discrete fan ring portion connected with the wire and the distance between the two are equal; n-electrode sheet width and thickness are equal; the central cylindrical substrate on a lead wire, a ground or zero potential.
3. 根据权利要求2所述的一种圆盘多环内S形柔性梁谐振陀螺,其特征在于:在所述中央圆柱和n个外围边缘离散的扇环部分上分别设有一层导电薄膜,然后将所述基底与单晶硅片键合。 3. A member according to claim 2, wherein said disc-shaped flexible beam S within the resonator gyro polycyclic, wherein: the conductive thin film layer are provided on the peripheral edge and the n discrete portion of the central cylindrical ring sector, the substrate is then bonded to the single crystal silicon wafer.
4. 根据权利要求1所述的一种圆盘多环内S形柔性梁谐振陀螺,其特征在于,所述基底的材料为熔融石英或耐热玻璃或单晶硅。 4. According to one disk according to claim 1 S-shaped flexible beam within the multi-ring resonator gyro, characterized in that the material of the substrate is fused silica or glass or heat-resistant single-crystal silicon.
5. 根据权利要求1所述的一种圆盘多环内S形柔性梁谐振陀螺,其特征在于,所述圆盘多环内S形柔性梁谐振器中:中央圆柱位于圆盘多环内S形柔性梁谐振器的中心位置; 多个同心圆环的中心轴均与中央圆柱的中心轴重合;同心圆环的宽度均相等,同心圆环之间的间隙宽度均相等; ^ 分布于同心圆环间的每组辐条均匀间隔排列;每组辐条的个数为m个,m彡8且m为偶数; 每组辐条的间隔角度为360°/m;每个辐条的宽度均相等; 所述S形柔性梁的个数为n个,n多8且n为偶数;n个S形柔性梁等间距分布,且n个S形柔性梁的中心位于同一圆周上,n个S形柔性梁与中央圆柱位于同一水平面。 5. According to one disk according to claim 1 polycyclic within the S-shaped flexible beam resonator gyro, characterized in that said disc-shaped polycyclic S flexible beam within the resonator: a central cylinder located inside the disc polycyclic S-center position of the flexible beam resonator; a plurality of concentric rings of the central axis is coincident with the central axis of the central cylinder; concentric rings are equal to the width of the gap width between concentric rings are equal; ^ distributed in concentric evenly spaced between each set of spokes ring; the number of spokes in each group of m, 8 m and m is an even number San; each spoke spacing angles of 360 ° / m; width of each spoke are equal; the the number of said S-shaped flexible beam is n, n 8 and n is an even multiple; S-shaped pitch of the n flexible beam distribution and the like, and n S-shaped flexible beam center is located on the same circumference, n a S-shaped flexible beam at the same level with the central cylinder.
6. 根据权利要求5所述的一种圆盘多环内S形柔性梁谐振陀螺,其特征在于,每个所述S 形柔性梁均呈中心对称,且均由两个“月牙”形状的结构构成,其中:每个“月牙”结构均由两个直径相等的半圆弧构成,且半圆弧的圆心与3形柔性梁的中心共线。 A disk according to claim 5, wherein the S-shaped flexible beam within the multi-ring resonator gyro, characterized in that each of said S-shaped flexible beam showed a center of symmetry, and by two "crescent" shaped structure configuration, wherein: each "crescent" structure by two equal half the diameter of circular arcs, the center and the center of the semicircular arc-shaped flexible beam 3 and collinear.
7. 根据权利要求1-6任一项所述的一种圆盘多环内s形柔性梁谐振陀螺,其特征在于, 所述圆盘多环内S形柔性梁谐振器的材料为单晶娃。 A disc according to any of claims 1 to 6 multiple ring resonator gyro s-shaped flexible beam, characterized in that said disc-shaped polycyclic S flexible beam within the resonator is a single crystal material baby.
8. 根据权利要求1 _6任一项所述的一种圆盘多环内S形柔性梁谐振陀螺,其特征在于, 所述电极为n个扇环形状的电极,n多8且为偶数,n个电极与n个S形柔性梁的位置--对应, 且每个电极的中心轴均与圆盘多环内S形柔性梁谐振器的中心轴重合;n个电极与同心圆环中最大圆环之间的间隙距离均相等; n个电极包含n/2个驱动电极和n/2个检测电极,n/2个驱动电极和n/2个检测电极沿圆盘多环内S形柔性梁谐振器外围边缘均匀间隔排布。 The disc-according to claim any one of claims claim 1 _6 S-shaped flexible beam within the resonator gyro polycyclic ring, wherein said ring electrode is a fan-shaped n-electrodes, and n is an even number multiple 8, n positions of the n electrodes and the S-shaped flexible beam - corresponds to the center axis of each electrode and the disc are within the S-shaped flexible polycyclic central axis of the resonator beams coincide; n electrodes and the maximum concentric rings They are equal gap distance between the ring; n-electrodes comprises n / 2 electrodes and driving the n / 2 electrodes is detected, the n / 2 electrodes and driving the n / 2 electrodes in the detection of the disc-shaped flexible polycyclic S the peripheral edge of the resonator beam evenly spaced arrangement.
9. 根据权利要求8所述的一种圆盘多环内S形柔性梁谐振陀螺,其特征在于,所述电极的材料为单晶硅。 The disc-according to claim 8, wherein said flexible S-shaped beam within the multi-ring resonator gyro, characterized in that the electrode material of single crystal silicon. 丄W、.+ Shang W,. +
10.-种权利要求卜9任-项臓的圆盘多环内S形柔性梁谐攝螺的制备万法,该方法包括如下步骤: 七^ (1)采用MEMS微细加工工艺,对基底进行刻蚀,形成凹槽和凸出部分,在凸出部为度一层导电薄膜; ⑵采用键合技术,将步骤⑴得到的基底与单晶硅片键合; , (3)采用深反应离子刻蚀法,对单晶硅片进行刻蚀,得到圆盘多环内S形柔性振器及其外围边缘的电极,最终得到圆盘多环内S形柔性梁谐振陀螺。 Bu any of claims 9 10.- species - term Zang disk polycyclic harmonic beam within the S-shaped flexible methodology for preparing spiro subject, the method comprising the steps of: Seven ^ (1) using MEMS microfabrication process, performed on the substrate etched to form a recess and projecting portion, the projecting portion of the layer of conductive thin film; ⑵ using bonding techniques, obtained in step ⑴ monocrystalline silicon substrate and the chip bonding;, (3) deep reactive ion etching method, etching of the monocrystalline silicon wafer, to obtain a multi-electrode disc within the ring resonator and a flexible S-shaped peripheral edge of the disk finally obtained the polycyclic S-shaped flexible beam resonator gyro.
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