CN111879303B - Capacitive MEMS gyroscope and method for accelerating oscillation starting speed thereof - Google Patents
Capacitive MEMS gyroscope and method for accelerating oscillation starting speed thereof Download PDFInfo
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- CN111879303B CN111879303B CN202010546410.1A CN202010546410A CN111879303B CN 111879303 B CN111879303 B CN 111879303B CN 202010546410 A CN202010546410 A CN 202010546410A CN 111879303 B CN111879303 B CN 111879303B
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- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
- G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
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Abstract
The invention provides a capacitive MEMS gyroscope and a method for accelerating oscillation starting speed thereof, wherein the capacitive MEMS gyroscope comprises a substrate, a movable mass block, a direct current signal end, a ground wire, a first switch, a second switch and a third switch; the direct current signal end is electrically connected with the movable mass block through the first switch; the direct current signal end is electrically connected with the substrate through the second switch; the direct current signal end is electrically connected with the ground wire through the second switch and the third switch in sequence; the substrate is electrically connected to the ground line through the third switch.
Description
Technical Field
The invention relates to the field of micro-electro-mechanical systems, in particular to a capacitive MEMS gyroscope and a method for accelerating oscillation starting speed thereof.
Background
MEMS (Micro Electro Mechanical System) devices have been widely used in consumer electronics, medical treatment, and automobiles due to their small size, low cost, and good integration. The MEMS gyroscope plays a vital role in the current applications of camera anti-shake, unmanned aerial vehicle attitude control, inertial navigation, air mouse and the like. At present, MEMS gyroscopes on the market are classified according to the working principle, mainly including piezoelectric type and capacitive type, wherein the capacitive type gyroscope has more advantages in the aspects of miniaturization and integration, and is the mainstream technical route of the current MEMS gyroscope.
The main structure of the capacitive MEMS gyroscope comprises a driving electrode, a detection electrode, a movable mass block, an elastic beam and a fixed anchor point. The movable mass block is connected to the fixed anchor point through the elastic beam, the driving electrode and the detection electrode are capacitors made of materials such as silicon and the like, the capacitors are divided into a fixed electrode plate part and a movable electrode plate part, the movable electrode plate part is connected to the movable mass block, and when the movable mass block moves, the capacitors of the driving electrode capacitor bank and the detection electrode capacitor bank can change.
The simple working principle of the capacitive MEMS gyroscope is that a dc signal and an ac signal are respectively applied to the capacitive plates at the two ends of the driving electrode, and the electrostatic driving force F provided to the movable mass block by a set of driving electrodes arranged oppositely can be expressed as:
F＝2*C1*Vac*Vdc (1)
where C1 is the rate of change of capacitance of the drive electrode in the drive direction; vacIs an alternating current signal applied on the movable polar plate; vdcTo applyA direct current signal on the fixed plate. When the frequency of the alternating current signal is consistent with the inherent resonant frequency of the movable mass block in the driving direction, the electrostatic force on the driving electrode can excite the movable mass block to enter a resonant state, so that the movable mass block has large amplitude vibration in the driving direction, and when the electrostatic driving force F is balanced with the restoring force of the elastic beam and the gas damping force, the movable mass block is maintained in a stable amplitude vibration state. At this time, when the movable mass detects an applied rotational angular velocity and the rotational axis direction is perpendicular to the driving direction, a coriolis force in a third direction perpendicular to both the driving direction and the rotational axis direction of the angular velocity is generated. In the structural design of the gyroscope, the capacitor plates of the detection electrodes are arranged in the opposite direction and are designed to be parallel to the Coriolis force direction, so that when the movable mass block moves in the detection direction due to the Coriolis force, the distance between the capacitor plates of the detection electrodes changes, and then the change of the capacitance of the detection electrodes is read through a subsequent capacitance detection circuit, so that the measurement of the diagonal velocity is completed.
When the capacitive MEMS gyroscope works normally, direct current and alternating current signals need to be continuously applied to the capacitive MEMS gyroscope to keep the capacitive MEMS gyroscope in a resonance state. In many mobile terminal applications, the effective service time of the mobile terminal is limited by the capacity of a power supply battery, and electricity needs to be saved as much as possible, so that a gyroscope device in the application is generally in a low-power-consumption standby state when not needed to work, an electric signal does not need to be applied to a gyroscope structure at the moment, and only when the gyroscope needs to be used in the application, a gyroscope chip is waken up to enable the gyroscope structure to start to vibrate.
Therefore, the time required for the gyroscope chip to wake up to normal operation from a low power consumption state is very important for user experience, and the wake-up time, especially the gyroscope start-up time, needs to be shortened as much as possible to the extent that the user cannot basically perceive the time. One of the main ways to reduce the start-up time of the gyroscope structure is to increase the driving force during the start-up process, which is proportional to the capacitance change rate of the driving electrodes, the driving dc voltage and the ac voltage, as can be seen from the expression of the electrostatic driving force F. The increase of the capacitance of the driving electrode needs to increase the chip area, so that the chip cost is increased; the maximum amplitude of the direct current and alternating current voltages is limited by the processing technology of the driving circuit, and the complexity and the cost of the processing technology of the circuit chip can be obviously increased by increasing the maximum withstand voltage of the circuit.
Disclosure of Invention
In view of the problems in the prior art, the present invention provides a capacitive MEMS gyroscope, which includes a substrate, a movable mass, a dc signal terminal, a ground line, a first switch, a second switch, and a third switch; the direct current signal end is electrically connected with the movable mass block through the first switch; the direct current signal end is electrically connected with the substrate through the second switch; the direct current signal end is electrically connected with the ground wire through the second switch and the third switch in sequence; the substrate is electrically connected to the ground line through the third switch.
Further, the capacitive MEMS gyroscope includes an enabled state and a disabled state.
Further, when the gyroscope enters the enabled state from the disabled state, the second switch is set to be turned off, the first switch and the third switch are turned on, the first switch and the third switch are set to be turned off after a first preset condition is met, the second switch is turned on, the second switch is set to be turned off after a second preset condition is met, and the first switch and the third switch are turned on.
Further, the first predetermined condition is to achieve charging of a parasitic capacitance formed by the movable mass and the substrate.
Further, the second preset condition consists in bringing the amplitude of vibration of the movable mass to a predetermined value.
Further, the first preset condition and/or the second preset condition is a preset time.
Further, the direct current signal terminal is provided by a charge pump.
The invention also provides a method for accelerating the starting vibration speed of the capacitive MEMS gyroscope, which comprises the following steps:
charging a parasitic capacitor formed by the movable mass block and the substrate;
the charging is disconnected to maintain the charge on the movable mass;
and changing the potential of the substrate so as to increase the potential difference of the movable mass to the ground.
Further, when the parasitic capacitor is charged, the movable mass block is connected with the direct current signal end, and the substrate is grounded.
Further, the direct current signal is connected with the substrate in a terminating mode to change the potential of the substrate, and therefore the potential difference of the movable mass to the ground is improved.
According to the capacitive MEMS gyroscope and the method for accelerating the oscillation starting speed of the capacitive MEMS gyroscope, the static driving force acting on the movable mass block during oscillation starting of the gyroscope is increased by setting the structure of the gyroscope and adjusting the working mode of the gyroscope, the oscillation starting speed of the gyroscope is accelerated, and therefore the time required by the gyroscope from a low-power-consumption standby state to normal work awakening is shortened. The technical scheme of the invention is based on the structure and the manufacturing process of the existing gyroscope, can effectively accelerate the starting vibration speed of the gyroscope without increasing the area of a chip and adjusting the pressure-resistant grade of a process platform, and has low cost and easy realization.
The conception, the specific structure and the technical effects of the present invention will be further described with reference to the accompanying drawings to fully understand the objects, the features and the effects of the present invention.
Drawings
FIG. 1 is a schematic block diagram of one embodiment of the present invention;
fig. 2 is a schematic diagram of an equivalent circuit structure of an embodiment of the present invention.
Detailed Description
In the description of the embodiments of the present invention, it should be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc., indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the invention. The drawings are schematic diagrams or conceptual diagrams, and the relationship between the thickness and the width of each part, the proportional relationship between the parts and the like are not completely consistent with actual values.
FIG. 1 shows a schematic structural diagram of a capacitive MEMS gyroscope of this embodiment, which includes a movable mass 100, fixed anchors 201-204, elastic beams 301-304, fixed electrodes 401-408, and a substrate 500, wherein the movable mass 100 and the substrate 500 are disposed at an interval.
The movable mass block 100 is connected with the fixed anchor points 201-204 through elastic beams 301-304 respectively, and the elastic beams 301-304 are suitable for the movable mass block 100 to move along the X direction and the Y direction, wherein the X direction is a detection direction and the Y direction is a driving direction in the embodiment.
The fixed electrodes 401, 402 and the fixed electrodes 403, 404 are symmetrically disposed on both sides of the movable mass 100 in the X direction. The movable mass block 100 and the fixed electrodes 401-404 are provided with matched comb tooth pairs, so that the movable mass block 100 and the fixed electrodes 401-404 respectively form a driving capacitor C1～C4Driving capacitor C1～C4All the capacitance values of (A) are marked as CdrDriving capacitor C1～C4The rate of change of capacitance in the driving direction is denoted Cdr1。
When the gyroscope normally works, a direct current signal is loaded on the movable mass block 100, an alternating current signal is loaded on the fixed electrodes 401-404, the direct current driving signal and the alternating current driving signal are both generated by a circuit chip generally, the direct current signal and the alternating current signal are common to the ground, the direct current signal is generated by a charge pump generally, namely, the movable mass block 100 is electrically connected to the charge pump of the circuit chip, and the substrate 500 is electrically connected to the ground wire of the circuit chip to play a role in shielding external interference. The alternating current driving signal output by the circuit chip is divided into two paths with the same amplitude and opposite phases, and the two paths are respectively loaded on the fixed electrodes 401 and 402 and the fixed electrodes 403 and 404, and each pair of driving capacitors, such as the driving capacitor C, is according to the formula (1)1And C3Resultant force F of electrostatic driving force supplied to the movable mass 1001Is composed of
F1＝2*Cdr1*Vac*Vdc (2)
In the formula, Cdr1Is the rate of change of capacitance of the drive capacitance in the drive direction; vacIs an alternating current signal applied to the fixed electrode; vdcIs a dc signal applied to the movable mass 100. So that the movable mass 100 vibrates in the Y direction, i.e., in the driving direction, under the electrostatic driving force.
The fixed electrodes 405 and 406 and the fixed electrodes 407 and 408 are symmetrically disposed on both sides of the movable mass 100 in the Y direction. The movable mass block 100 and the fixed electrodes 405-408 are provided with matched comb tooth pairs, so that the movable mass block 100 and the fixed electrodes 405-408 respectively form a detection capacitor C5～C8Detecting the capacitance C5～C8All the capacitance values of (A) are marked as Csns. When the movable mass 100 detects a rotational angular velocity in the Z direction, the movable mass 100 receives a coriolis force in the Y direction, and vibrates in the Y direction, that is, in the driving direction. The capacitance C is detected as the movable mass 100 vibrates in the detection direction due to the coriolis force5～C8The distance between the capacitor plates is correspondingly changed, and the detection capacitor C is read through a subsequent capacitor detection circuit5～C8The change of the capacitance value can realize the measurement of the angular speed.
The movable mass 100 and the substrate form a parasitic capacitance C9Parasitic capacitance C9Is denoted as CsubAnd C issub＞＞4*Cdr+4*Csns。
FIG. 2 is a schematic diagram showing an equivalent circuit structure of the capacitive MEMS gyroscope of the present embodiment, wherein the movable mass 100 and the substrate 500 form a parasitic capacitor C9The DC signal terminal 600 can provide a DC signal VdcThe dc signal terminal 600 is electrically connected to the movable mass 100 through the switch S1; the dc signal terminal 600 is electrically connected to the substrate 500 through the switch S2; the direct current signal terminal 600 is electrically connected with the ground wire 700 through the switch S2 and the switch S3 in sequence; the substrate 500 is electrically connected to the ground line 700 through the switch S3. Direct currentThe signal terminal 600 is provided by a charge pump of the circuit chip.
The capacitive MEMS gyroscope of the implementation comprises an enabling state and a disabling state, wherein the enabling state corresponds to the starting and normal working stages of the gyroscope, and a direct current signal and an alternating current signal are continuously applied to keep the gyroscope in a resonance state during the normal working period; the inactive state corresponds to a low power consumption standby state of the gyroscope, at which no additional dc and ac signals are required, thereby saving energy consumption, and only when the gyroscope is needed in an application, it is woken up even if it enters the active state.
When the gyroscope enters the enabled state from the disabled state, the switch S2 is turned off, the switch S1 and the switch S3 are closed, and the dc signal terminal 600 and the ground line 700 are electrically connected to the parasitic capacitor C respectively9Specifically, the movable mass 100 is electrically connected to the dc signal terminal 600, the substrate 500 is electrically connected to the ground line 700, and the potential of the movable mass 100 is VdcAnd thus is parasitic capacitance C9Charging, accumulating the charge on the movable mass 100 to Vdc*CsubThen, the switch S1 and the switch S3 are turned off, and the movable mass 100 is electrically floating, so that the charged amount remains unchanged, but the potential is no longer determined by the potential of the dc signal terminal 600.
In view of parasitic capacitance C9The dc charging speed is very fast, and in some embodiments, after a short preset time after the switch S1 and the switch S3 are closed, the switch S1 and the switch S3 are turned off, so that the charge amount accumulated on the movable mass 100 is up to Vdc*Csub。
After the switch S1 and the switch S3 are turned off, the switch S2 is closed, the substrate 500 is electrically connected to the dc signal terminal 600, the potential of the substrate 500 is determined by the dc signal terminal 600, i.e. the potential of the substrate 500 is VdcLet the potential of the movable mass 100 be VxSince the movable mass 100 is electrically suspended, the charge amount carried by the movable mass remains unchanged, and can be obtained according to charge conservation:
(Vx-Vdc)*Csub＝Vdc*Csub (3)
from equation (3) we can derive:
Vx＝2*Vdc (4)
the voltage of the movable mass 100 relative to the ground 700 is doubled compared with the voltage of the gyroscope in normal operation, and the voltage amplitude is not limited by the voltage resistance of the circuit chip because the voltage is not directly applied to the circuit chip.
At this time, each pair of driving capacitors, e.g. driving capacitor C1And C3Resultant force F of electrostatic driving force supplied to the movable mass 1002Is composed of
F2＝2*Cdr1*Vac*Vx (5)
According to the formulas (2), (3) and (5),
F2＝2*F1 (6)
the driving force acting on the movable mass 100 is doubled compared to the normal operation of the gyroscope, so that the driving amplitude can reach the target value more quickly, and the waiting time of the user is reduced.
When the circuit chip detects that the driving amplitude reaches the target value, the switch S2 is turned off, and the switch S1 and the switch S3 are turned on to maintain the amplitude while the substrate 500 is grounded to shield the external disturbance. In other embodiments, after the preset time, the switch S2 is turned off, and the switch S1 and the switch S3 are closed.
In the embodiment, under the condition that the size of a chip and the existing process are not changed, the static driving force acting on the movable mass block during the start-up of the gyroscope is increased by setting the corresponding switch structure and adjusting the working mode of the circuit in the figure 2, and the start-up speed of the gyroscope is accelerated, so that the time required by the gyroscope from the low-power standby state to the awakening normal operation is shortened.
The foregoing detailed description of the preferred embodiments of the invention has been presented. It should be understood that numerous modifications and variations could be devised by those skilled in the art in light of the present teachings without departing from the inventive concepts. Therefore, the technical solutions available to those skilled in the art through logic analysis, reasoning and limited experiments based on the prior art according to the concept of the present invention should be within the scope of protection defined by the claims.
Claims (10)
1. A capacitive MEMS gyroscope is characterized by comprising a substrate, a movable mass block, a direct current signal end, a ground wire, a first switch, a second switch and a third switch; the direct current signal end is electrically connected with the movable mass block through the first switch; the direct current signal end is electrically connected with the substrate through the second switch; the direct current signal end is electrically connected with the ground wire through the second switch and the third switch in sequence; the substrate is electrically connected to the ground line through the third switch.
2. The capacitive MEMS gyroscope of claim 1 comprising an enabled state and a disabled state.
3. The capacitive MEMS gyroscope of claim 2, wherein the second switch is set to be off and the first switch and the third switch are set to be on when the gyroscope enters the active state from the inactive state, and wherein the first switch and the third switch are set to be off after a first predetermined condition is met, the second switch is set to be on, and the second switch is set to be off and the first switch and the third switch are set to be on after a second predetermined condition is met.
4. A capacitive MEMS gyroscope according to claim 3 wherein the first predetermined condition consists in achieving that charging is accomplished for a parasitic capacitance formed by the movable mass and the substrate.
5. A capacitive MEMS gyroscope according to claim 3 wherein the second predetermined condition is that the amplitude of vibration of the moveable mass is brought to a predetermined value.
6. The capacitive MEMS gyroscope of claim 3 wherein the first predetermined condition and/or the second predetermined condition is a predetermined time.
7. The capacitive MEMS gyroscope of claim 1 wherein the dc signal terminal is provided by a charge pump.
8. A method for accelerating the starting vibration speed of a capacitive MEMS gyroscope is characterized by comprising the following steps:
connecting a movable mass block to a direct current signal end, and connecting a substrate to the ground, so as to charge a parasitic capacitor formed by the movable mass block and the substrate;
disconnecting the movable mass from the DC signal terminal and disconnecting the substrate from ground to maintain the charge on the movable mass;
and connecting the substrate to the direct current signal end, so as to increase the potential difference of the movable mass to the ground.
9. The method as claimed in claim 8, wherein after connecting the substrate to the dc signal terminal, when it is detected that the driving amplitude of the movable mass reaches a target value, the substrate is disconnected from the dc signal terminal, and the movable mass is connected to the dc signal terminal, and the substrate is grounded.
10. The method of claim 8, wherein after a predetermined time period has elapsed since the substrate was connected to the dc signal terminal, the substrate is disconnected from the dc signal terminal, the movable mass is connected to the dc signal terminal, and the substrate is grounded.
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