CN109556590A - Six axis inertial sensor of resonant ring/multi-resonant ring - Google Patents
Six axis inertial sensor of resonant ring/multi-resonant ring Download PDFInfo
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- CN109556590A CN109556590A CN201811301113.XA CN201811301113A CN109556590A CN 109556590 A CN109556590 A CN 109556590A CN 201811301113 A CN201811301113 A CN 201811301113A CN 109556590 A CN109556590 A CN 109556590A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5677—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially two-dimensional vibrators, e.g. ring-shaped vibrators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
Abstract
The invention discloses a kind of six axis inertial sensors of resonant ring/multi-resonant ring, six axis inertial sensor of resonant ring includes resonant ring and the electrode unit close to resonant ring arrangement, the electrode unit includes XY axle acceleration measuring unit, Z axis acceleration measurement unit, XY shaft angle speed measurement unit, Z axis angular rate measurement unit, electrode is arranged with resonance czermak space, wherein XY axis is plane where resonant ring, and Z axis is plane where the axis of resonant ring.Six axis inertial sensor of multi-resonant ring includes the six axis inertial sensor of more than two resonant rings of nested arrangement.The present invention can be realized using single resonant ring and detect tri-axis angular rate and 3-axis acceleration, have the advantages that detection accuracy is high, simple and compact for structure, small in size.
Description
Technical field
The present invention relates to inertial sensor fields, and in particular to a kind of six axis inertial sensor of resonant ring/multi-resonant ring, it can
Tri-axis angular rate and 3-axis acceleration are detected according to using single resonant ring.
Background technique
Existing inertial sensor monomer can only provide the detection of an axis or two axis inertia vectors mostly.Realize inertia combination
Required 3-axis acceleration and tri-axis angular rate detection, need the mutually orthogonal installation of multiple sensors.Most common method is logical
It crosses and is realized using three gyros and three accelerometers.Civilian MEMS has six the axis even product of nine axis (magnetic sensor),
But inside is still to be combined by multiple sensor spaces to realize, precision is low.
Summary of the invention
The technical problem to be solved in the present invention: in view of the above problems in the prior art, a kind of resonant ring/multi-resonant ring is provided
Six axis inertial sensors, the present invention can detect tri-axis angular rate and 3-axis acceleration, detection accuracy using single resonant ring
Six axis inertial sensor of resonant ring high, simple and compact for structure, small in size/multi-resonant ring.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention are as follows:
A kind of six axis inertial sensor of resonant ring, including resonant ring and the electrode unit arranged close to resonant ring, the electrode list
Member includes XY axle acceleration measuring unit, Z axis acceleration measurement unit, XY shaft angle speed measurement unit, Z axis angular rate measurement list
Member, the XY axle acceleration measuring unit include four plate electrodes for being uniformly distributed in resonant ring outside or inside；The Z axis accelerates
Degree measuring unit includes the two pairs of electrodes arranged along the diameter of resonant ring, and every a pair of electrodes includes that opposite resonant ring or more is right
Claim two electrodes of arrangement；The XY shaft angle speed measurement unit includes the two pairs of electrodes arranged along the diameter of resonant ring, and
Every a pair of electrodes includes two electrodes of opposite resonant ring arrangement symmetrical above and below；The Z axis angular rate measurement unit includes uniform
It is distributed on the outside of resonant ring or four plate electrodes of inside, the electrode is arranged with resonance czermak space, wherein XY axis is resonant ring
Place plane, Z axis are plane where the axis of resonant ring.
Preferably, the electrode unit includes four electrode groups being distributed along the even circumferential of resonant ring, any two
A plate electrode is equipped between electrode group, the electrode between any two electrode group constitutes four electricity of Z axis angular rate measurement unit
Pole；Four electrode groups include electrode group #1~electrode group #4, and electrode group #1 includes { Paz1wy2、Pax1wz2、Paz2wy1、
Pax2wz1Four electrodes, electrode group #2 includes { Paz1wx2、Pay1wz1、Paz2wx1、Pay2wz2Four electrodes, electrode group #3
Including { Paz1wy1、Pax2wz2、Paz2wy2、Pax1wz1Four electrodes, electrode group #4 includes { Paz1wx1、Pay2wz1、
Paz2wx2、Pay1wz2Four electrodes, and four electrodes of electrode group #1~electrode group #4 are according to upside, inside, downside, outer
The sequence of side and resonance czermak space arrange, wherein Pax1wz1、Pax2wz2、Pax2wz1、Pax1wz2Four electrodes are used as XY axis simultaneously
The Z axis angular speed detecting electrode of the X-axis acceleration detection electrode of acceleration measurement unit, Z axis angular rate measurement unit,
Pay1wz1、Pay2wz2、Pay2wz1、Pay1wz2Four electrodes are used as the Y-axis acceleration detection of XY axle acceleration measuring unit simultaneously
The Z axis angular speed detecting electrode of electrode, Z axis angular rate measurement unit, Paz1wy1、Paz2wy2、Paz2wy1、Paz1wy2Four electricity
Pole is used as the Z axis acceleration detection electrode of Z axis acceleration measurement unit, the Y-axis angular speed of XY shaft angle speed measurement unit simultaneously
Detecting electrode, Paz1wx1、Paz2wx2、Paz2wx1、Paz1wx2Four electrodes are used as the Z axis of Z axis acceleration measurement unit to add simultaneously
The X-axis angular speed detecting electrode of acceleration sense electrode, XY shaft angle speed measurement unit.
Preferably, the electrode is 1~2 μm at a distance from resonance czermak space arrangement.
The present invention also provides a kind of six axis inertial sensors of multi-resonant ring, and the two or more including nested arrangement is above-mentioned humorous
Shake six axis inertial sensor of ring.
Compared to the prior art, the present invention has an advantage that
1, the present invention includes resonant ring and the electrode unit close to resonant ring arrangement, and the electrode unit includes that XY axle acceleration is surveyed
Unit, Z axis acceleration measurement unit, XY shaft angle speed measurement unit, Z axis angular rate measurement unit are measured, electrode is and resonant ring
Gap arrangement, by above structure, can be realized using single resonant ring and detects tri-axis angular rate and 3-axis acceleration, have
High, simple and compact for structure, the small in size advantage of detection accuracy.
2, the present invention includes resonant ring and the electrode unit close to resonant ring arrangement, and the electrode unit includes that XY axis accelerates
Spend measuring unit, Z axis acceleration measurement unit, XY shaft angle speed measurement unit, Z axis angular rate measurement unit, electrode with it is humorous
The czermak space that shakes arranges that wherein acceleration measurement unit can not use, and can be used as the scheme for only detecting tri-axis angular rate, precision
Slightly lower, cost is also slightly lower.
3, electrode unit of the invention includes XY axle acceleration measuring unit, Z axis acceleration measurement unit, XY shaft angle rate
Measuring unit, Z axis angular rate measurement unit can according to need using multiplexing electrode, pass through structure type appropriate, Ke Yizeng
Add independent multiplex electrode, such as set up independent acceleration observing and controlling electrode and independent angular speed electrode, it is complicated to reduce circuit
Degree.
4, having many electrodes in electrode unit of the invention is the electrode being arranged symmetrically, and can be deleted wherein in actual conditions
Partial electrode, electrode delete most of function of still achievable this programme, and precision is slightly lower.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the embodiment of the present invention.
Fig. 2 is the space coordinates structural schematic diagram of the embodiment of the present invention.
Fig. 3 is the circuit theory schematic diagram of resonant ring starting of oscillation in the embodiment of the present invention.
Fig. 4 is the vibration schematic diagram of resonant ring in the embodiment of the present invention.
Fig. 5 is the schematic illustration of angular rate measurement in the embodiment of the present invention.
Fig. 6 is the schematic illustration of Z axis angular rate measurement in the embodiment of the present invention.
Fig. 7 is the schematic illustration of XY axis angular rate rate measurement in the embodiment of the present invention.
Fig. 8 is the structural schematic diagram of XY shaft angle speed measurement unit in the embodiment of the present invention.
Fig. 9 is the structural schematic diagram of Z axis acceleration measurement unit in the embodiment of the present invention.
Figure 10 is the structural schematic diagram of XY axle acceleration measuring unit in the embodiment of the present invention.
Figure 11 is the schematic cross-sectional view of electrode group in the embodiment of the present invention.
Figure 12 is the schematic illustration of electrode multiplexing in the embodiment of the present invention.
Figure 13 is the circuit theory schematic diagram of electrode multiplexing in the embodiment of the present invention.
Specific embodiment
As shown in Figure 1, the six axis inertial sensor of resonant ring of the present embodiment includes resonant ring and arranges close to resonant ring
Electrode unit, electrode unit include XY axle acceleration measuring unit, Z axis acceleration measurement unit, XY shaft angle speed measurement unit,
Z axis angular rate measurement unit, XY axle acceleration measuring unit include four plate electrodes for being uniformly distributed in resonant ring outside or inside；
Z axis acceleration measurement unit includes the two pairs of electrodes arranged along the diameter of resonant ring, and every a pair of electrodes includes opposite resonance
Two electrodes of ring arrangement symmetrical above and below；XY shaft angle speed measurement unit includes the two pairs of electricity arranged along the diameter of resonant ring
Pole, and every a pair of electrodes includes two electrodes of opposite resonant ring arrangement symmetrical above and below；Z axis angular rate measurement unit includes uniform
It is distributed on the outside of resonant ring or four plate electrodes of inside, electrode is arranged with resonance czermak space, wherein XY axis is resonant ring place
Plane, Z axis are plane where the axis of resonant ring, as shown in Fig. 2, wherein ω x, ω y, ω z:X, Y, the rotation angle of Z-direction are fast
Rate, frequency are DC ~ 1KHz；Ax, ay, az:X, Y, the linear acceleration in Z-direction, frequency are DC ~ 1KHz.Due to electrode with it is humorous
The czermak space that shakes is arranged, is interacted between electrode and resonant ring by electrostatic force, and passes through the capacitor between electrode and ring
To carry out position detection.It is 1~2 μm at a distance from electrode and resonance czermak space arrangement in the present embodiment, apart from very little the case where
Under, electrostatic force can accomplish considerable degree.
One, resonant ring starting of oscillation.
Pass through four plate electrode (examples of on the outside of application AC signal identical with the resonant ring natural frequency of vibration to resonant ring or inside
Electrode P**wz as shown in figure 11And P**wz2, * is asterisk wildcard) between, apply the electrostatic force of alternation to resonant ring, resonant ring will
Vibration is got up, and process is as half spherical top harmony vibration ring gyro.At this point, A point and its neighbouring substance can be generated such as left and right in Fig. 3
The linearly coupled in direction.B point and its neighbouring substance can generate the linearly coupled such as up and down direction in Fig. 3, these linearly coupleds are XYZ tri-
The basis of shaft angle rate induction.If the vibration of A point is Asin ω0T, then the vibration of B point is Asin (ω0T+ π), A is vibration width
Degree, the Vibration Condition of resonant ring are as shown in Figure 4.Wherein ω0For self-vibration angular speed, frequency is 12KHz ~ 100KHz.
Two, angular rate measurement.
Angular rate measurement basic principle is as shown in figure 5, when a particle is moved in a straight line with speed V, when its speed of external force
When degree direction changes, one must be provided and change nyctitropic acceleration, common centripetal acceleration is exactly to generate in this way.
2.1, Z axis angular rate measurement.
Z axis angular rate measurement unit includes four plate electrodes for being uniformly distributed in resonant ring outside or inside, is uniformly distributed in
Z axis angular rate measurement may be implemented in any one plate electrode on the outside of resonant ring or in four plate electrodes of inside.
Z axis angular rate measurement principle is as hemisphere gyro principle.As shown in fig. 6, the particle movement nearby of A point is Asin
ω0T, speed are A ω0cosω0The Corioli's acceleration of t, A point are as follows: aA=Aω0cosω0t·ωz.Equally, B point Ge Shi accelerates
Degree are as follows: aB=Aωzω0cos(ω0t+π).In a circumferential direction, A point and B point Ge Shi acceleration magnitude are equal, contrary,
And all prolong tangent to periphery direction, under the effect of the two power, originally motionless C point will generate vibration, pass through
Pwsz1Detect the vibration of C point, so that it may measure ωz, C point can also be made to remain stationary measurement ω by dynamic balance modez.It is shaking
In the symmetrical other positions of rotating ring circumference, there is a situation where as the case where A, B, C point.
2.2, XY shaft angle speed measurement.
As shown in fig. 7, when there is angular speed ωxWhen input, A, A can be made ' point movement velocity direction change, prolong when having
Y-axis angular speed ωyWhen input, B, B can be made ' point movement velocity direction change, when directional velocity changes, will produce
Raw Corioli's acceleration.ω is measured by detecting these coriolis forces (acceleration)x、ωz。
As shown in figure 8, XY shaft angle speed measurement unit includes the two pairs of electrodes arranged along the diameter of resonant ring, and each
It include two electrodes of opposite resonant ring arrangement symmetrical above and below to electrode.Fig. 8, which illustrates to work as, ωyA, A when input ' point occur
Situation, due to B, B ' point can follow resonant ring to rotate together along Y-axis, so, their directional velocity can change, generation
Acceleration is aBy=ωyω0cosω0The acceleration magnitude of t, A point and A ' point is equal, contrary, flat perpendicular to resonant ring ring
Face, therefore Paz can be passed through1wy1、Paz1wy2Electrodes are waited to detect A, A ' vibration perpendicular to plane of a loop is put to measure angular speed
ωy, A, A can also be made by dynamic balance mode ' and it puts to save on loop plane normal direction and not vibrate to measure ωy.Same feelings
Condition generation is having the angular speed ω along X-axisxWhen input, tested point is A and A ' point at this time, and corresponding detecting electrode is positioned at Y
Paz on axis1wx1、Paz1wx2、Paz2wx1、Paz2wx2。
Three, acceleration analysis.
When acceleration analysis, entire resonant ring is treated as a mass block, it is opposite to ring on tri- directions X, Y, Z respectively
The position of pedestal carries out closed-loop control, and the control force on corresponding direction is exactly corresponding acceleration input.
3.1, Z axis acceleration analysis.
As shown in figure 9, Z axis acceleration measurement unit includes the two pairs of electrodes arranged along the diameter of resonant ring, and each
It include two electrodes of opposite resonant ring arrangement symmetrical above and below to electrode.When there is acceleration azWhen along Z-direction input, resonant ring
Ring body (m) can be moved to the opposite direction of acceleration input direction, cause to change with interelectrode gap, δ1ZBecome smaller,
δ2ZBecome larger, at this time by closed loop feedback in Paz1Add bigger voltage, Paz on * * electrode2Add smaller voltage on * * electrode,
Maintain δ1Z、δ2ZGap is constant, and added voltage difference just reflects a between two electrodeszSize.
3.2, XY axle acceleration measures.
As shown in Figure 10, XY axle acceleration measuring unit includes four electricity for being uniformly distributed in resonant ring outside or inside
Pole.XY axle acceleration and Z axis acceleration direction are different, and the input of XY axle acceleration is is parallel to resonance plane of a loop, and Z axis adds
Speed is perpendicular to resonance plane of a loop.X-axis and Y-axis acceleration analysis principle are similar with Z axis, due to configuration aspects, X, Y-axis
Each at most only 4, the observing and controlling electrode of acceleration, and Z axis observing and controlling electrode can have up to 8.Closed-loop control gap delta1XIt is constant,
Pax at this time1* * and Pax2Voltage difference between * * reflects axSize.Equally, closed-loop control gap delta1YIt is constant, Pay1* * and
Pay2Voltage difference between * * also reflects aySize.
It should be noted that XY axle acceleration measuring unit, Z axis acceleration measurement unit, XY shaft angle speed measurement unit,
It is mutually indepedent in Z axis angular rate measurement Element Theory, it actually can according to need and be multiplexed.Many electrodes be both in the present embodiment
It is used to detect acceleration, again for detecting angular speed, it is also possible to be used for the detection of gap size.
As shown in Figure 1, the electrode unit of the present embodiment includes four electrode groups being distributed along the even circumferential of resonant ring,
A plate electrode is equipped between any two electrode group, the electrode between any two electrode group constitutes Z axis angular rate measurement unit
Four plate electrodes (two panels Pwsz1, two panels Pwsz2).
As shown in Figure 1, four electrode groups include electrode group #1~electrode group #4, and electrode group #1 includes { Paz1wy2、
Pax1wz2、Paz2wy1、Pax2wz1Four electrodes, electrode group #2 includes { Paz1wx2、Pay1wz1、Paz2wx1、Pay2wz2Four
Electrode, electrode group #3 include { Paz1wy1、Pax2wz2、Paz2wy2、Pax1wz1Four electrodes, electrode group #4 includes { Paz1wx1、
Pay2wz1、Paz2wx2、Pay1wz2Four electrodes, and four electrodes of electrode group #1~electrode group #4 according to upside, inside,
Downside, the sequence in outside and resonance czermak space arrangement (sectional structure of electrode group #3 is as shown in figure 11), wherein Pax1wz1、
Pax2wz2、Pax2wz1、Pax1wz2Four electrodes are used as X-axis acceleration detection electrode, the Z of XY axle acceleration measuring unit simultaneously
The Z axis angular speed detecting electrode of shaft angle speed measurement unit, Pay1wz1、Pay2wz2、Pay2wz1、Pay1wz2Four electrodes are simultaneously
Electricity is detected as the Y-axis acceleration detection electrode of XY axle acceleration measuring unit, the Z axis angular speed of Z axis angular rate measurement unit
Pole, Paz1wy1、Paz2wy2、Paz2wy1、Paz1wy2Four electrodes are used as the Z axis acceleration of Z axis acceleration measurement unit to examine simultaneously
Survey the Y-axis angular speed detecting electrode of electrode, XY shaft angle speed measurement unit, Paz1wx1、Paz2wx2、Paz2wx1、Paz1wx2Four
Electrode is used as the X-axis angle speed of the Z axis acceleration detection electrode of Z axis acceleration measurement unit, XY shaft angle speed measurement unit simultaneously
Rate detecting electrode.Having many electrodes in the present embodiment is the electrode being arranged symmetrically, and part of electricity can be deleted in actual conditions
Pole, such as Paz1wy1、Paz1wy2、Paz1wx1、Paz1wx2Electrode deletes most of function of still achievable this programme, and precision is slightly lower.
As shown in figure 12, to be multiplexed electrode Paz1wy1With electrode Paz1wy2For, the two electrodes will complete δ1YAnd δ2YBetween
The detection of gap, Z axis acceleration closed loop, the function of Y-axis angular speed detection.In order to which above functions can be multiplexed this two electrode, using frequency
The method of rate multiplexing.Paz1wy1And Paz2wy2The circuit of electrode multiplexing is as shown in figure 13, acceleration az, angular velocity omegayFor DC ~
The low frequency input quantity of 1KHz, the natural frequency of vibration ω of resonant ringoFor 12KHz ~ 100KHz, several different frequencies are designed in the present embodiment
Rate, so that meeting: ωc>>ωo>>ω(az, ωy)。ωcFor the carrier frequency of detector gap, it is applied in resonance ring body, ωo
For the natural frequency of vibration of resonant ring, ω(az, ωy)For the frequency of measuring acceleration to be checked and angular speed.It finally will test signal and pass through height
Logical amplification is so that carrier frequency ωcThrough progress demodulation can be obtained detection signal δ1YAnd δ2Y, detect signal δ1YAnd δ2Y
Z axis acceleration closed signal is obtained by low-pass filter, detects signal δ1YAnd δ2YMake resonant ring by bandpass filter
Natural frequency of vibration ωoPass through, obtains Y-axis angular speed detection signal.Same multiplexing method can be extended on other multiplexing electrodes,
It is supported to which the realization for the present embodiment method provides circuit.
In addition, the present embodiment also provides a kind of six axis inertial sensor of multi-resonant ring, the two or more including nested arrangement
The present embodiment six axis inertial sensor of resonant ring above-mentioned, six axis inertial sensor of resonant ring is successively nested from the inside to the outside, together
Sample also may be implemented to detect tri-axis angular rate and 3-axis acceleration based on single resonant ring, and six axis inertia of multiple resonant rings passes
Sensor can further increase detection accuracy, and the mode volume of six axis inertial sensor nesting of multiple resonant rings is smaller, is convenient for
It is integrated.
The above is only a preferred embodiment of the present invention, protection scope of the present invention is not limited merely to above-mentioned implementation
Example, all technical solutions belonged under thinking of the present invention all belong to the scope of protection of the present invention.It should be pointed out that for the art
Those of ordinary skill for, several improvements and modifications without departing from the principles of the present invention, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (4)
1. a kind of six axis inertial sensor of resonant ring, it is characterised in that: including resonant ring and the electrode list arranged close to resonant ring
Member, the electrode unit include XY axle acceleration measuring unit, Z axis acceleration measurement unit, XY shaft angle speed measurement unit, Z
Shaft angle speed measurement unit, the XY axle acceleration measuring unit include four electricity for being uniformly distributed in resonant ring outside or inside
Pole；The Z axis acceleration measurement unit includes the two pairs of electrodes arranged along the diameter of resonant ring, and every a pair of electrodes includes phase
To two electrodes of resonant ring arrangement symmetrical above and below；The XY shaft angle speed measurement unit includes arranging along the diameter of resonant ring
Two pairs of electrodes, and every a pair of electrodes includes two electrodes of opposite resonant ring arrangement symmetrical above and below；The Z axis angular rate measurement
Unit includes four plate electrodes for being uniformly distributed in resonant ring outside or inside, and the electrode is arranged with resonance czermak space, wherein
XY axis is plane where resonant ring, and Z axis is plane where the axis of resonant ring.
2. six axis inertial sensor of resonant ring according to claim 1, it is characterised in that: the electrode unit include along
Four electrode groups of the even circumferential distribution of resonant ring, a plate electrode, any two electrode are equipped between any two electrode group
Electrode between group constitutes four plate electrodes of Z axis angular rate measurement unit；Four electrode groups include electrode group #1~electrode
Group #4, and electrode group #1 includes { Paz1wy2、Pax1wz2、Paz2wy1、Pax2wz1Four electrodes, electrode group #2 includes
{Paz1wx2、Pay1wz1、Paz2wx1、Pay2wz2Four electrodes, electrode group #3 includes { Paz1wy1、Pax2wz2、Paz2wy2、
Pax1wz1Four electrodes, electrode group #4 includes { Paz1wx1、Pay2wz1、Paz2wx2、Pay1wz2Four electrodes, and electrode group #
Four electrodes of 1~electrode group #4 according to upside, inside, downside, the sequence in outside and resonance czermak space arrange, wherein
Pax1wz1、Pax2wz2、Pax2wz1、Pax1wz2Four electrodes are used as the X-axis acceleration detection of XY axle acceleration measuring unit simultaneously
The Z axis angular speed detecting electrode of electrode, Z axis angular rate measurement unit, Pay1wz1、Pay2wz2、Pay2wz1、Pay1wz2Four electricity
Pole is used as the Y-axis acceleration detection electrode of XY axle acceleration measuring unit, the Z axis angular speed of Z axis angular rate measurement unit simultaneously
Detecting electrode, Paz1wy1、Paz2wy2、Paz2wy1、Paz1wy2Four electrodes are used as the Z axis of Z axis acceleration measurement unit to add simultaneously
The Y-axis angular speed detecting electrode of acceleration sense electrode, XY shaft angle speed measurement unit, Paz1wx1、Paz2wx2、Paz2wx1、
Paz1wx2Four electrodes are used as Z axis acceleration detection electrode, the XY shaft angle speed measurement unit of Z axis acceleration measurement unit simultaneously
X-axis angular speed detecting electrode.
3. six axis inertial sensor of resonant ring according to claim 1 or 2, it is characterised in that: the electrode and resonant ring
The distance of gap arrangement is 1~2 μm.
4. a kind of six axis inertial sensor of multi-resonant ring, it is characterised in that: more than two claims 1 including nested arrangement
Six axis inertial sensor of resonant ring described in any one of~3.
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114964192A (en) * | 2022-07-26 | 2022-08-30 | 深圳市景创科技电子股份有限公司 | Novel gyroscope structure and device |
| CN114964192B (en) * | 2022-07-26 | 2022-10-14 | 深圳市景创科技电子股份有限公司 | Novel gyroscope structure and device |
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