CN107449413A - To the continuous monitoring of the drive amplitude in vibration micro-electro-mechanical gyroscope - Google Patents
To the continuous monitoring of the drive amplitude in vibration micro-electro-mechanical gyroscope Download PDFInfo
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- CN107449413A CN107449413A CN201710380421.5A CN201710380421A CN107449413A CN 107449413 A CN107449413 A CN 107449413A CN 201710380421 A CN201710380421 A CN 201710380421A CN 107449413 A CN107449413 A CN 107449413A
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- frequency
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- driving
- mass elements
- gyroscope
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5726—Signal processing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
Abstract
The invention discloses the continuous monitoring to the drive amplitude in vibration micro-electro-mechanical gyroscope.Present disclosure is related to a kind of micro-electro-mechanical gyroscope, and it includes at least one mass elements, driving actuator and sensing electrode.At least one mass elements are configured as being driven to carry out with driving oscillation frequencies omega by driving actuatorDOscillating movement, and the sensing electrode is configured as producing sensing signal from the oscillating movements of at least one mass elements.Gyroscope control circuit is included with the ω of frequency 2DDetect the amplitude detection unit of sensing signal amplitude.The amplitude produces and driving oscillation amplitude is measured.With frequencies omegaDThe amplitude detection of progress produces measuring for the diagonal speed of rotation.
Description
Technical field
The present invention relates to vibrate micro electronmechanical (MEMS) gyroscope and be related to the continuous monitoring operated to it.
Background technology
MEMS gyroscope uses Coriolis effect (Coriolis Effect) measurement angular speed.In vibration MEMS gyro
In instrument, mass elements are by actuating drive force to carry out oscillating movement.In this disclosure, the vibration will be referred to as " driving
Dynamic vibration ", and it can be linear or rotation.Fig. 1, which is shown, to be driven to along its main shaft a1The quality of linear osccilation
Part, and Fig. 2 shows and is driven to around its main shaft a2The mass member of rotational oscillation.Driving oscillation is in both figures with filled black
Arrow represents.Activating driving force can be produced by such as electrostatic actuator, magnetic actuator or piezo-activator.
Micro-electro-mechanical gyroscope can include reference frame, and one or more mass elements are with permission mass elements with least
The spring structure of two free degree movements is connected to the reference frame.Reference frame generally surrounds mass elements.Reference frame
The electrical measurement that is relative to each other is typically configured to mass elements.Mass elements can be in the plane limited by reference frame
Or vibrated outside the plane limited by reference frame.
When the gyroscope comprising the mass elements in driving oscillation is subjected to revolving on the angle not with the secondary axes of main axis parallel
During rotational speed rate Ω, mass elements are influenceed by Coriolis force.Coriolis force is by angle speed of rotation vector mass elements
The size and Orientation of velocity determines.Mass elements in driving oscillation will be subjected to vibrating Coriolis force.The power makes matter
Measure element along or on perpendicular to main shaft secondary axes vibrate.Vibration in present disclosure along or on secondary axes will be referred to as
" sensing vibration ".
In fig. 1 and 2, speed of rotation Ω in angle is represented with white arrow, and sensing vibration is represented with grey arrow.Sensing shakes
Swing is along axle a in Fig. 13Linear osccilation, and in fig. 2 be on axle a3Rotational oscillation.In other words, in Fig. 1 and Fig. 2
Secondary axes be a3.Sensing vibration can be entered by the capacitance sensing related to fixed reference framework, piezoelectric sense or piezo-resistive sense
Row detection.In this disclosure, electric signal will be referred to as " sensing signal " as caused by the detection.
In this disclosure, term " sensing oscillation amplitude " refers to that the mass elements in gyroscope are being subjected to sensing vibration
Shi Congqi resting guards are offset at utmost.Term " driving oscillation amplitude " refers to mass elements in gyroscope through driven
During dynamic vibration from the skew of its resting guard at utmost.Sensing oscillation amplitude and driving oscillation amplitude can be such as Fig. 1 and
Linear range or angle shown in Fig. 2.
Correspondingly, in this disclosure, term " sensing frequency of oscillation " and " driving oscillation frequency " represent quality respectively
The frequency that element vibrates in sensing vibration and driving oscillation.Symbol " w "DRepresent the driving oscillation frequency in present disclosure.Frame
Frame, mass elements and spring be designed such that sensing frequency of oscillation be in now equal to or very close driving oscillation frequency
Value.
Some mass elements can be driven with a driving actuator.Powered motion simultaneous transmission is to all mass elements.
Capacitive character monitoring contributes to the measurement of various differential capacitances while to some mass elements.Differential capacitance is measured than unilateral measurement
Noise is small, because they cause sensing vibration (being produced by angular speed) (may can be vibrated with extra capacitance signal by other
Or acceleration produces) more clearly separate.Realize that a kind of mode clearly separated is with opposite phase driven mass elements (example
Such as, when a mass member is along a1Another mass member is driven to move in a negative direction when axle moves in the positive direction, or when one
Mass member is along a1Another mass member is driven to move in the positive direction when axle moves in a negative direction).The sensing of these mass elements
Vibration also by opposite phase (when a mass member is along a3Another mass member will be in negative direction when axle moves in the positive direction
Upper movement, or work as a mass member along a3Another mass member will move in the positive direction when axle moves in a negative direction).It is this
Difference modes sensing vibration (being produced by angular speed) can be clearly distinguished from wherein above-mentioned two mass member along a3Axle is in phase
The common mode motion (being produced by other vibrations or acceleration) that same side moves up.
Some mass elements are advantageous in that in addition：When some mass elements around symmetrically positioning and are set
When being set to suitable phase oscillation, avoid the oscillating inner angular momentum around the center of gyroscope and (produced by powered motion
It is raw).
Fig. 3 shows a kind of MEMS gyroscope, wherein the driving actuator 33 positioned at center drives two adjacent masses members
The Linear Driving vibration of part 31 and 32.Fig. 4 shows a kind of MEMS gyroscope, wherein the driving actuator 43 positioned at center drives
The rotation driving vibration of two adjacent masses elements 41 and 42.In two kinds of gyroscopes, two mass elements are generally driven to
Anti-phase oscillations so that 32 move right and 42 rotate counterclockwises when 41 turn clockwise when 31 are moved to the left.
Driving actuator can be such as electric capacity comb driver, wherein by the way that adjacent comb electrode is connected into vibration driving
Voltage to produce vibration electrostatic force between adjacent comb electrode.In this disclosure, the oscillating voltage will be referred to as driving
Signal.Drive signal has drive signal amplitude and driving signal frequency.Driving oscillation frequencies omegaDFollow driving signal frequency,
Because driving signal frequency is directly delivered to mass elements by actuator.Correspondingly, drive signal amplitude determines driving oscillation width
Degree.In other words, the value of driving oscillation frequency can be changed by adjusting driving signal frequency, and can be driven by adjusting
Signal amplitude changes the value of driving oscillation amplitude.Driving signal frequency is typically set at and the mass elements in powered motion
The equal or very close value of resonant frequency, maximize oscillation amplitude by resonance gain.
When setting driving oscillation by drive signal in the above described manner, sensing vibration is more complicated motion.The one of vibration
Individual component is determined by the intensity of driving oscillation amplitude and Coriolis force.Sensing vibration can also have other components, such as will be
Described in the detailed description of present disclosure.A purpose in designing gyroscope can be to maintain driving oscillation amplitude and use up
It is possibly constant.The unexpected and undetected change of driving oscillation amplitude by the sensitivity for changing gyroscope and produces mistake
Measurement result.
Driving oscillation amplitude may not keep the reason for accurate constant many for a long time.Temperature is a key factor,
Because thermal expansion may change the mechanism of driving oscillation.Temperature change also influences ambient gas and the mass elements of motion is applied
Dynamic pressure.Therefore drive signal voltage must be increased or decreased to keep and temperature change identical driving oscillation width
Degree.
Driving oscillation amplitude can also be based on temperature and input and deliberately change, to keep the spirit of gyroscope with temperature change
Sensitivity is constant.The degree of this temperature correction must predefine during temperature correction.The driving oscillation amplitude adjusted can be with
Supplement or replacement as digital temperature correction, wherein measurement result are zoomed in and out with temperature correction factor.
Driving oscillation mechanism may also change due to the various chance failures during operation.The effective member of gyroscope
Manufacturing defect or mechanical wear or the engagement between them are understood gradually and suddenly influence its operation.Therefore, micro electronmechanical top is vibrated
Spiral shell instrument is commonly equipped with the measurement arrangement for monitoring driving oscillation amplitude.It is such arrangement for said temperature calibration process and
Speech is also what is needed.
By continuously measuring the driving oscillation amplitude and frequency of its own, vibration micro-electro-mechanical gyroscope can be compiled
Journey, to automatically adjust drive signal, to compensate unexpected changes in amplitude or perform temperature correction.If driving oscillation amplitude is disturbed
Dynamic seriously to compensate very much, then gyroscope can also be to the outside Circuit Reports failure of itself.
Document US8820136 B2 disclose the micro-electro-mechanical gyroscope with self-test capability.Mass elements be driven to along
Drive shaft x-ray vibrates.Mass elements can also move up in orthogonal sense axle Y side.Utilize mass elements and fixed frame
Special self-test electrode on frame realizes self-checking function.Oscillating driving signal, which is converted into, has the self-test lower than driving oscillation
The vibration self-test signal of frequency.The self-test signal produces the oscillating force acted in the Y direction on mass elements.Then, with driving
Frequency of oscillation continuously demodulate traverse measurement from mass elements along Y-direction to signal, to measure the shadow of Coriolis effect
Ring.Also it is demodulated with self-test frequency, to monitor gyroscope whether still normal work.The problem of the prior art solution
It is to need single self-test excited electrons device and single self-test excitation actuator.Therefore, there is the top of this self-checking function
Spiral shell instrument needs more chip areas, and consumes more electric currents than the gyroscope of no self-checking function.Extra excitation electricity
Sub- device and actuator also introduce extra complexity and potential sources of measurement error.
Document US20150211853A1 also discloses that the micro-electro-mechanical gyroscope with self-test capability.In the publication, linearly
Actuator is driven to produce the rotational oscillation of sensing mass member.Self-checking function passes through including for the independent of continuous monitoring driving oscillation
Sensing electrode realize.The problem of solution is to must be introduced into extra electrode and circuit carrys out monitoring driving vibration.This
Outside, the risk of crosstalk between drive signal and driving monitoring signals be present, which increase the risk of measurement error.
The content of the invention
The purpose of present disclosure is to provide a kind of micro-electro-mechanical gyroscope and associated method to overcome or at least mitigate
Above mentioned problem of the prior art.The purpose of present disclosure is realized by the arrangement according to following aspect and method.This public affairs
Content is opened based on the design that the measurement of the angle speed of rotation and the monitoring of driving oscillation amplitude are carried out using sensing signal.
According to an aspect of the present invention, there is provided a kind of micro-electro-mechanical gyroscope, including at least one mass elements, driving cause
Dynamic device, sensing electrode and gyroscope control circuit, wherein, driving actuator is configured as by including drive signal amplitude and driving
The drive signal control of signal frequency, at least one mass elements are configured as being driven by driving actuator to carry out having driving
Frequency of oscillation ωDOscillating movement, and sensing electrode is configured as producing sense from the oscillating movements of at least one mass elements
Survey signal, it is characterised in that gyroscope control circuit is included with the ω of frequency 2DDetect the amplitude detection unit of sensing signal amplitude.
According to another aspect of the present invention, there is provided a kind of method for operating micro-electro-mechanical gyroscope, it is described micro electronmechanical
Gyroscope includes at least one mass elements, gyroscope control circuit and driving actuator, and the driving actuator is by including driving
The drive signal control of dynamic signal amplitude and driving signal frequency, wherein, at least one mass elements are driven by driving actuator
To carry out with driving oscillation frequencies omegaDOscillating movement, produce sensing signal from the oscillating movements of at least one mass elements,
Characterized in that, in gyroscope control circuit, with the ω of frequency 2DDetect sensing signal amplitude.
Brief description of the drawings
Hereinafter, present disclosure is more fully described by means of preferred embodiment in refer to the attached drawing, in the accompanying drawings：
Fig. 1 is shown in which the overall work principle for the MEMS gyroscope that mass member is activated with linear osccilation；
Fig. 2 is shown in which the overall work principle for the MEMS gyroscope that mass member is activated with rotational oscillation；
Fig. 3 is shown in which the MEMS gyroscope that two mass elements are activated with linear osccilation；
Fig. 4 is shown in which the MEMS gyroscope that two mass elements are activated with rotational oscillation；
Fig. 5 is shown for performing the measurement described in present disclosure and the gyroscope control circuit of monitoring function；
Fig. 6 a-6e show the first exemplary gyroscope；And
Fig. 7a-7c shows the second exemplary gyroscope.
Embodiment
As known from the prior art, by with driving oscillation frequencies omegaDSensing signal is demodulated, can be in oscillation gyro
The angle speed of rotation is detected in instrument.The design proposed in this disclosure is：Can be by with twice driving oscillation frequency
Frequency --- in other words 2 ωD--- demodulate same sensing signal and carry out monitoring driving oscillation amplitude.As it was previously stated, driving oscillation frequency
Rate ωDIt is resonant frequency, therefore double frequency will be marked as second harmonic frequency in this disclosure.
Exemplary gyroscope structure described below produces the periodic sensing signal component in second harmonic frequency.
General plotting is that gyroscope is constructed so that into the electricity of sensing shows two pure driving phases in each driving oscillation cycle
The maximum of pass.In other words, gyroscope is configured as continuously generating the sensing signal component for being totally independent of Coriolis effect,
And because the sensing signal component is vibrated with second harmonic frequency, thus easily with Coriolis caused by sensing signal component
Distinguish.As described above, the sensing signal component as caused by Coriolis effect is generally with driving oscillation (resonance) frequencies omegaDShake
Swing.
In disclosed equipment, therefore sensing signal has at least two components.First component is by Coriolis effect
Cause, and its frequency is resonance frequency omegaD.The second component as caused by moving driving oscillation is by following illustrative gyro
Caused by architectural characteristic described by instrument.The frequency of second component is the ω of second harmonic frequency 2D.The amplitude of first component will be by
Labeled as Coriolis amplitude, the amplitude of second component will be marked as second harmonic amplitude.Term " sensing signal amplitude " will
For referring to any amplitude determined according to sensing signal, including Coriolis amplitude and second harmonic amplitude.
This disclosure has described a kind of method for operating micro-electro-mechanical gyroscope, the micro-electro-mechanical gyroscope is included at least
One mass elements, gyroscope control circuit and driving actuator, the driving actuator is by including drive signal amplitude and drive
The drive signal control of dynamic signal frequency.In the method, at least one mass elements are driven by driving actuator and carried out
With driving oscillation frequencies omegaDOscillating movement.Sensing signal is produced by the oscillating movement of at least one mass elements, and
And with the ω of frequency 2 in gyroscope control circuitDDetect sensing signal amplitude.
The advantages of arrangement and method of present disclosure be can be used only in appropriate location be used for sense section
The sensor device (sensing electrode and sensing circuit) of Li Aolili influence monitors and adjusted driving oscillation amplitude.Need not spy
The extra measuring electrode not monitored dedicated for driving oscillation and the circuit measured for reading these driving oscillations.Also without
For causing the single driving actuator of self-test sensing vibration.
Therefore, compared with corresponding solution well known in the prior art, continuous driving oscillation amplitude adjusted and from
Inspection can be performed with lower current drain, smaller area and simpler circuit in MEMS gyroscope.Potential measurement
The number of error source reduces.In addition, often showed using the prior art solution of single driving oscillation measuring circuit
The crosstalk gone out between drive signal and driving oscillation measurement signal.In the arrangement and method of present disclosure, due to with drive
The different frequency of dynamic signal frequency carrys out monitoring driving vibration, so eliminating this crosstalk.
Fig. 5 shows the example of the gyroscope control circuit according to present disclosure.Gyroscope control circuit continuous monitoring
Driving oscillation amplitude, and the amplitude is adjusted as needed.Sensor 504 can be used to measure the sensing of MEMS gyroscope 501 to vibrate.
These sensors can be condenser type or piezoelectric type.Sensor signal can be exaggerated and is converted in analog-digital converter 505
Data signal.The signal of the amplification then can be by two demodulators 512,513 with driving oscillation frequencies omegaDAnd by two solutions
Device 511,522 is adjusted with the ω of second harmonic frequency 2DIt is demodulated.In some embodiments, each demodulator to 512+513 and
511+522 can be replaced by the only one demodulator to be worked with the frequency.If gyroscope 501 does not need quadrature compensation,
Demodulator 513 can not then be included.
Demodulator 511, loop filter 518 and voltage controlled oscillator (VCO) 519 form phaselocked loop.VCO 519 can from when
Clock generator receives initial clock signal (ICLK) and produces the period 1 property clock signal (CLK_ for being fed to demodulator 511
2F).Demodulator 511 includes phase detectors, and phase detectors enter the phase of sensing signal of the CLK_2F phase with entering
Row compares.Loop filter 518 be may then pass through to adjust the first clock signal clk _ 2F, until its phase and sensing signal
Phase matched.Then the first clock signal clk _ 2F can be fed to frequency divider 520 from VCO, frequency divider 520 produces frequency
For the second clock signal CLK_F of the half of CLK_2F frequency.
Two clock signal clk _ F are fed to demodulator 512 and 513.Frequency of the demodulator 512 to be determined by CLK_F
Sensing signal is demodulated, and sensing signal is fed to filter system 515 and alignment unit 516 (wherein can be inclined with application rate
Shifting is temperature dependent sensitivity correction) and it is fed to SPI (SPI) 517.Demodulator 512 and filter system
515 form amplitude detection unit 524 together.The detection unit detects Coriolis amplitude.Due to the first clock signal clk _ 2F
By carry out frequency halving in frequency divider 520, so demodulator 512 is worked with the half frequency of demodulator 511.Alternatively, width
Degree detection unit 524 can include with the bandpass filter of frequency CLK_F work and for detecting corresponding sensing signal amplitude
Peak detector, or for from sensing signal extract Coriolis amplitude other devices.
Gyroscope control circuit can perform quadrature compensation.The signal caused by orthogonal signalling and by Coriolis force is just
Hand over, so being fed to clock signal clk _ F of demodulator 513 in this case relative to the clock for being fed to demodulator 512
Signal is phase-shifted 90 °.Frequency demodulation sensing signal of the demodulator 513 to be determined by CLK_F, and measurement signal is fed to orthogonal
Control unit 514 is compensated, quadrature compensation control unit 514 sends signal to compensating electrode 506.If gyroscope 501 need not
Quadrature compensation, then it can omit the orthogonal control path.
Second harmonic amplitude is detected in amplitude detection unit 523.In the embodiment shown in Fig. 5, amplitude detection list
Member 523 includes demodulator 522, and demodulator 522 is believed with the frequency CLK_2F set in phaselocked loop 511-518-519 to demodulate sensing
Number.In Figure 5, amplitude detection unit 523 also includes being used for the low pass filter 510 for removing ripple from higher order harmonics.Substitute
Ground, amplitude detection unit 523 can include with the frequency CLK_2F bandpass filters operated and for detecting corresponding sense
Survey the peak detector of signal amplitude or other devices for extracting second harmonic amplitude from sensing signal.
Detected second harmonic amplitude can be fed to amplitude control element 509, and amplitude control element 509 includes will
Amplitude comparison circuit of the second harmonic amplitude measured compared with reference value.Difference between the two is fed to control
Device circuit, controller circuitry is generally with the proportional integration scheme (PI controllers) for the drive signal amplitude for wherein calculating regulation come real
It is existing.
Reference value can be the value selected before equipment investment operation, the survey earlier obtained after equipment investment operation
Measure result or Initial fixed values and the combination of more early measurement result.Reference is selected in calibration process generally in process of production
It is worth and stores in the nonvolatile memory.
Based on Amplitude Ratio compared with amplitude control element 509 indicates that drive signal amplitude is arranged to by drive signal generator 508
Its regulated value.Amplitude control element 509 can control the amplitude (being run with CLK_F) of sinusoidal excitation or preferably control driving electricity
Average (DC) value of pressure.Then drive signal can be fed to driving actuator 502 by digital analog converter (DAC) 503, driven
Thus new regulated value is presented in dynamic oscillation amplitude.The value of driving oscillation amplitude may remain in predetermined interval so that only work as institute
The driving oscillation amplitude of measurement just performs regulation when outside the section.
Drive signal amplitude after detected second harmonic amplitude and regulation may be fed into be held including numeral
The self-test monitoring unit 521 of difference detecting circuit.Self-test prison can also be fed to by carrying out the frequency LOOPF of loop filter 518
Survey unit 521.Self-test monitoring unit continuously reads the drive signal amplitude after second harmonic amplitude, regulation and driving oscillation frequency
Rate.If any value in these values allows surplus beyond its default self-test, monitoring unit has to outside Circuit Reports
The self-test of failure so that the specific gyroscope parts can be stopped using.
With reference to figure 5, the advantages of apparatus and method of present disclosure can be described in more detail.First, it is not necessary to special
Additional incentive circuit or excitation actuator for self-test purpose.What gyroscope can possess using only it is used to drive it
The actuating unit that driven vibrates senses the sensor vibrated to perform its continuous self test with what it had possessed for measuring
Function.
Therefore, the apparatus and method of present disclosure are realized with having the single measurement for being used for detecting driving oscillation amplitude
The self-test arrangement identical purpose of electrode, while use less device area and simpler circuit.Shaken for detecting driving
The separated sensor for swinging amplitude will be required for the additional preamplifier of the signal and additional a/d converter.On the contrary, this
The apparatus and method of disclosure obtain the letter on both sensing oscillation amplitude and driving oscillation amplitude from a sensing signal
Breath.By to drive resonance frequency omegaDThe demodulation of progress obtains sensing oscillation amplitude, while with the ω of second harmonic frequency 2DTake
Obtain driving oscillation amplitude.The two can to easily and reliably area each other with the overlapping sensing signal component of different frequency vibration
Point.
The apparatus and method of present disclosure can be also used for detecting other failures, such as the change or complete of amplifier gain
The fault pin engagement of a part for contract fully sensing signal.Both latent process defects can all reduce the sensing letter detected
Number amplitude.
Exemplary gyroscope
The apparatus and method of present disclosure can be realized with many MEMS gyroscope structures.In following two examples
In, it will be described in the first gyroscope arrangement with linear osccilation mass elements and second with rotational oscillation mass elements
Gyroscope arrangement.The purpose of these examples is illustrated with the origin of the sensing signal component of second harmonic frequency vibration.These show
Example property gyroscope utilizes capacitance detecting, but can also be piezoelectric detection in some embodiments.
In each example, micro-electro-mechanical gyroscope includes at least one mass elements, driving actuator, sensing electrode and top
Spiral shell instrument control circuit.Driving actuator is configured as the drive signal control by including drive signal amplitude and driving signal frequency
System.At least one mass elements are configured as being driven to carry out with driving oscillation frequencies omega by driving actuatorDShake
Swing motion.Sensing electrode is configured as producing sensing signal, and gyro from the oscillating movement of at least one mass elements
Instrument control circuit includes amplitude detection unit, and amplitude detection unit is with the ω of frequency 2DSensing signal amplitude is detected.
Example 1
Fig. 6 a-6e show the operation principle of the first exemplary gyroscope structure.Gyroscope is the type shown in Fig. 3, its
In two mass elements be driven to linear osccilation.In this gyroscope, driving oscillation frequencies omegaDCan be, for example, 8kHz.
Second harmonic frequency will be then 16kHz.
When the gyroscope carries out angle rotation, Coriolis force drives the linear translation vertical with driving oscillation, such as Fig. 1 institutes
Show.The axle shown in Fig. 1 is also shown in Fig. 6 a-6e.
Fig. 6 a show mass elements 611, wherein sensing finger electrode 614 surrounds consolidating with fixed finger electrode 644
Center electrode 641.Term " sensing electrode " in present disclosure covers sensing finger electrode and fixed finger electrode.Quality
Element 611 is hung by the spring (not shown) for being attached to framework (not shown).Fixed center electrode 641 and fixed finger electrode
644 are fixed to framework.Mass elements 611 can be relative to framework along a1Axle and a3The direction movement of axle.Gyroscope control electricity
Differential capacitance between all fixed finger electrodes 644 of drive test amount and all sensing finger electrodes 614.Use multiple finger electrodes
To improve measurement accuracy.
Driving oscillation makes mass elements 611 along a1The direction of axle moves forward and backward.Difference of this linear translation to measurement
Electric capacity does not influence, because when mass elements 611 are moved to the left, the sensing finger electrode 614 on the left of fixed center is with consolidating
Determine the overlapping reduction of area between finger electrode 644, but the corresponding right side that overlaps increases identical amount.Along a1Axle
Therefore the net impacts of electric capacity of the driving oscillation to sensing are zero.Coriolis force causes with driving oscillation frequency along a3The week of axle
Phase property vibrates.This generates the measurable change of differential capacitance.
Fig. 6 b show how to realize the example of the apparatus and method of present disclosure.Gyroscope includes two quality
Element 611 and 612, two mass elements 611 and 612 drive progress along a by centre-driven actuator 6131The linear of axle shakes
Swing.Driving actuator 613 is attached to framework and powered motion is capacitively driven.Drive the finger electrode of powered motion by
A finger on every side of actuator 613 is driven to schematically show.For the sake of clarity, mass elements are eliminated
Sensing finger electrode on 611 and 612.
Two mass elements 611 and 612 by drive actuator 613 left side and right side two bars 622 and 623 each other
Physical couplings.As it was previously stated, driving actuator 613 anti-phase drives two mass elements 611 and 612 so that moves right when 612
611 are moved to the left and 611 are moved right when 612 are moved to the left when dynamic.For the sake of clarity, in figure 6b, transverse movement
Scope be greatly exaggerated.
Fig. 6 c show with two mass elements 611,612 and driven the and of bar 622 in the gyroscope of actuator 613
623 physical location.As fig. 6 c, bar 622 and 623 extends parallel to the framework 651 of gyroscope both sides, and is attached to matter
Measure the drift angle of element 611 and the base angle of mass elements 612.Bar 622 and 623 can not be perfect rigidity.Except producing sensing
Outside second harmonic component in signal, they can be also used for extra purpose.When mass elements 611 and 612 are coupled to each other
When, they are along a3The common mode resonance frequency of axle goes above differential mode resonant frequency.This is made it easier to sensing vibration and its
He separates capacitive signals, as illustrated by the background parts of the application.In this case, bar 622 and 623 must be flexible
Be not suppressed with the differential mode for causing 611 and 612 to move in the opposite direction.Other functions about bar 622 and 623 enter one
Step details can be found in prior art literature WO2012120190.
Bar 622 and 623 has enough rigidity, to realize the equipment of present disclosure by the operation principle shown in Fig. 6 b
And method.Sequence I-II-III in being circulated the figure shows driving oscillation.Complete cycle of oscillation corresponds to circulation II-I-
II-III-II.When the first mass elements 611 be driven to left side and the second mass elements 612 be driven to right side be in position I
When, bar 622 and 623 is tilted to the left with angle [alpha].The identical tilt angle alpha that is then tilted to the right of bar 622 and 623 is in position
III。
Therefore, if the distance between mass elements 611 and 612 are d at the II of position, the distance between they are in place
Put at I and III is dcos α.In other words, at position I and III, two mass elements are pulled in a by bar 622 and 6233
It is slightly closer to each other on the direction of axle.Due to this pulling action, each point on mass elements is in driving oscillation cycle II-
Prolong slight curving line movement in I-II-III-II, as shown in Fig. 6 b bottom.Therefore, except the main of them linearly shakes
Swing i.e. along a1Outside the driven vibration of axle, two mass elements 611 and 612 will be also presented along a3The secondary of axle is linearly shaken
Swing.Because angle [alpha] is smaller, the secondary linear osccilation has small amplitude, but amplitude is enough to produce measurable sensing letter
Number component.
Importantly, this secondary linear osccilation of mass elements 611 and 612 is in a complete driving oscillation cycle
Two are shown apart from maximum and two apart from minimum value because they by center II twice.Therefore, because driving
Frequency of oscillation is ωD, so secondary linear osccilation will obtain the ω of second harmonic frequency 2D.Therefore, the equipment of present disclosure is passed through
And method, it is easy to and the Signal separator as caused by Coriolis effect from sensing signal caused by secondary linear osccilation.
Fig. 6 d illustrate in greater detail the geometry of the exemplary gyroscope structure.The figure shows the heart in the electrodes
A part for fixed a finger electrode 644 and fixed center electrode 641 on 641 every side.In order to keep clear, quality
Element 611 and 612 is simply represented by two pairs of sensing finger electrodes 614 and 624, and illustrate only a pair of fixation finger electrodes
644。
Mass elements 611 are connected to mass elements 612 by bar 622 and 623, as shown in Figure 6 b.Mass elements are in fig. 6d
In center II, wherein bar 622 and 623 is perpendicular to sensing finger electrode 614 and 624.The length of each bar is L, and
In the position, the distance between finger electrode 614 and 644 is d0, as shown in the figure.Sensing finger electrode 614 refers to relative to fixation
Shape electrode 644 is in a1Initial position on axle is represented by dotted line P.
Fig. 6 e are shown when bar is tilted to the right angle [alpha] due to the powered motion of mass elements, in the same of position III
One gyroscope geometry.All parts shown in Fig. 6 e correspond to the part shown in Fig. 6 d, but for the sake of clarity, save
Reference is omited.Finger electrode 614 is sensed at the III of position relative to fixed finger electrode 644 in a1Position on axle by
Dotted line P ' is represented.The distance h as can be seen that two sensing finger electrodes 614 have moved right, and relative sensing finger electrode
624 have been moved to the left identical distance h.Distance h can be construed to driving oscillation amplitude, because the mass-element at the III of position
Part 611 is moved into its low order end and mass elements 612 are moved into its high order end.
For these reasons, along a1During axle displacement h, finger electrode 614 and 624 is sensed along a3Axle is away from its phase
The fixation finger electrode 644 answered moves.Remember identical displacement occurs in both sides, directly obtained according to Fig. 6 d and 6e geometry
Arrive：
And
If Δ C is represented when mass elements are moved to position III (as shown in fig 6e) from position II (shown in Fig. 6 d) a pair
The amount that electric capacity between fixed finger electrode 644 and a pair of sensing finger electrodes 614 changes.Δ C can be written as h letter
Number：
Wherein, C0It is electric capacity when being in position II, C1It is electric capacity when being in position III, ε is dielectric constant, and A is sense
The overlapping area surveyed between finger electrode and fixed finger electrode.As described above, the area keeps permanent in driving oscillation motion
It is fixed.
Displacement h is very small.Therefore, function Δ C (h) can be approximate by being carried out around h=0 Taylor series, produces such as
Lower result：
Δ C (h)~h2 (4)
For each finger electrode for, calculating is identical.Therefore, the capacitance sensing letter measured from mass elements
Number it will show square proportional cyclical component of its amplitude to driving oscillation amplitude h.This amplitude is second harmonic width
Degree.The explicit value of proportionality coefficient is by depending on the number of finger electrode pair and its size and distance L and d0.It can be by ability
Field technique personnel determine.
It should be noted that continuous monitoring driving oscillation amplitude h can be carried out using the second harmonic amplitude of sensing signal.This
Outside, second harmonic amplitude is the very sensitive index of the change of driving oscillation amplitude, because its value is put down with driving oscillation amplitude
Side is proportional.
Once it is determined that second harmonic amplitude, it is possible to calculate corresponding (measurement) driving oscillation amplitude.If driving
The reference value of oscillation amplitude is href, and be h in the driving oscillation amplitude of time t measurementsmeas, then for example can be with such as
The regulated value S for drive signal amplitude is calculated in the PI controllers of lower known formulaADJ(t)：
Wherein, KpAnd KiIt is no negative coefficient.
Regulated value can also be calculated otherwise.Regulation can be conditional, therefore except non-measured secondary humorous
Wave amplitude (or corresponding driving oscillation amplitude) is outside the predetermined interval around its reference value, otherwise without regulation.
Example 2
Fig. 7 a-7b show the operation principle of the second exemplary gyroscope structure.Gyroscope type is as shown in figure 4, wherein
Two mass elements are driven to rotational oscillation.As it was previously stated, when the gyroscope carries out angle rotation, Coriolis force will drive
Rotation outside base plan.
As shown in Figure 7a, can be by using the tabular sensing electrode 741 and 742 above and below mass elements 711
Differential capacitance measurement detects the rotation outside base plan.The surface area of electrode and mass elements is plotted as in figure 7 a
It is accurate equal, but the apparatus and method of present disclosure can also use the electrode area for being less than or greater than sensing mass member area
To realize.
When mass elements 711 are in powered motion, it is on axle a2Rotate back and forth.Fig. 7 b, which are shown, projects to a1-a3It is flat
The position of top sensing electrode 741 and mass elements 711 on face.At the time of shown in Fig. 7 b, mass elements are counterclockwise
Rotation.For illustrative purposes, rotate and be greatly exaggerated in figure.Top sensing electrode 741 and bottom sensing electrode 742
Remain fixed in its initial position.It is can be seen that from Fig. 7 b when mass elements have been pivoted away from its center, each sense
It is overlapping with the area of mass elements 711 smaller to survey electrode (741,742).
Electric capacity each between sensing electrode 741 and 742 and mass elements 711 is overlapping with their area directly proportional.Figure
The gray area of visible mass elements 711 is not contributed electric capacity below top sensing electrode 741 in 7b.In other words, when
Mass elements 711 are on a2When axle vibrates back and forth, change area overlying periodicity.
Mass elements 711 are with driving oscillation frequencies omegaDVibration.However, the overlapping vibration of area will obtain second harmonic frequency 2
ωD, because in each cycle of driving cycle vibration, it is overlapping to show two minimum values and two maximums.Show in Fig. 7 b
A minimum value is gone out, it is extreme to have rotated to its counter clockwise direction for wherein mass elements 711.When mass elements 711 have revolved
When going to the extreme (not shown) of its clockwise direction, another minimum value will occur.In other words, sensing electrode 741 and 742 will be every
In the individual cycle completely it is overlapping with mass elements 711 twice.Even if when mass elements area is not exactly equal to sensing electrode area,
Identical cycle effect can also be easily produced, as long as area overlaps with some changes.
The electric capacity sensed is certainly also by mass elements 711 on a3The cyclic shift of axle determines that this is attributed in section
Sharp effect difficult to understand.As it was previously stated, the change in oscillation of electric capacity shows driving oscillation frequencies omegaD.Vibrated caused by Coriolis effect
Vibration overlapping with area is easily distinguished in sensing signal, because they have different frequencies.
In this example, the amplitude of the overlapping oscillator signal component of area is proportional to the amplitude of driving oscillation.This can be as
Shown in lower.
As defined in Fig. 7 b, the height of sensing electrode 741 and mass elements 711 is 2H, and its width is 2W.Fig. 7 c are more detailed
Carefully show the geometry in Fig. 7 b upper left corner.Vital point in geometry is represented with alphabetical A, B, C, D and E.Quality
The anglec of rotation of element is θ, and this can be construed to driving oscillation amplitude, because to have gone to its inverse for mass elements 711 in Fig. 7 b
Hour hands are extreme.
Because the central point E of mass elements 711 keeps fixing when it rotates, so line AB, which is formed, has two edge lengthsWith the isosceles triangle ABE of vertex angle theta base portion.Therefore, line AB length LABFor：
When the triangle ABC application laws of sines, as a result for：
Wherein, LACIt is the distance from point A to point C, LBCIt is the distance from B to C.Due to Φ=90 °-θ, therefore sin
(180 ° of-Φ)=cos θ.In addition, δ=(180 °-(90 ° of+θ)-γ)=90 ° of-θ-γ and therefore sin δ=cos (θ+γ).
Therefore, can be seen that from (6)：
Because E is the central point of sensing quality, so angle beta=tan-1(W/H).It can be seen that from the angle around point A：
β adds right angle plus the base angle of isosceles triangle equal to γ.In other words,
In fact, angle, θ is more much smaller than angle beta, because driving oscillation makes mass elements 711 rotate very little.Then, in order to
Good approximation, γ ≈ β and equation (5), (7) and (8) can be combined into：
It can be write as：
The area of gray triangles in Fig. 7 c can markADC.It can be write as θ function now：
Due to angle θ very littles, so function AABC(θ) can be carried out approximate by the Taylor series around point θ=0.This is produced
Proportionate relationship：
AABC(θ)~θ (12)
Identical analyzes the lower right corner for directly applying to sensing electrode in Fig. 7 b/mass elements structure.It is also applied for together
The upper right corner and the lower left corner of one electrode/mass elements structure, there is a modification：Angle beta has value in the two corners
tan-1(H/W)。
Therefore, when mass elements 711 are with a2The angle, θ of axle turn to its counter clockwise direction it is extreme when, area is overlapping
Entire change it is directly proportional to the angle.The electric capacity measured is overlapping directly proportional to area, it can be seen that
Δ C (θ)~θ (13)
Therefore, the capacitance sensing signal measured from mass elements will show its amplitude and driving oscillation amplitude θ into than
The cyclical component of example.This amplitude is second harmonic amplitude.
The explicit value of proportionality coefficient is by the size depending on W and H.In addition, second harmonic signal component can use Arbitrary Digit
Purpose substitutes geometry generation.Sensing electrode and mass elements area need not it is equal also need not be symmetrical.Electrode and mass elements
There need not be identical central point.In each case, proportionality coefficient can be determined by one skilled in the art.
It should be noted that continuous monitoring driving oscillation amplitude θ can be carried out using the second harmonic amplitude of sensing signal.Once
Second harmonic amplitude is determined, it is possible to calculate corresponding (measurement) driving oscillation amplitude, and can be with above-mentioned first
Exemplary gyroscope identical mode adjusts drive signal amplitude.
Claims (18)
1. a kind of micro-electro-mechanical gyroscope, including at least one mass elements, driving actuator, sensing electrode and gyroscope control electricity
Road, wherein,
The driving actuator is configured as being controlled by the drive signal including drive signal amplitude and driving signal frequency,
At least one mass elements are configured as by the driving actuator driving to carry out with driving oscillation frequencies omegaD
Oscillating movement, and
The sensing electrode is configured as producing sensing signal from the oscillating movement of at least one mass elements,
Characterized in that,
The gyroscope control circuit is included with the ω of frequency 2DDetect the amplitude detection unit of sensing signal amplitude.
2. micro-electro-mechanical gyroscope according to claim 1, it is characterised in that the gyroscope control circuit is also included with frequency
Rate ωDDetect the amplitude detection unit of the sensing signal amplitude.
3. micro-electro-mechanical gyroscope according to any one of the preceding claims, it is characterised in that the gyroscope control electricity
Road also includes：Amplitude control element, it is based on the ω of frequency 2DThe sensing signal amplitude that detects adjusts the drive signal
Amplitude.
4. micro-electro-mechanical gyroscope according to claim 3, it is characterised in that the amplitude control element is configured as examining
The sensing signal amplitude measured is compared with reference to sensing signal amplitude.
5. micro-electro-mechanical gyroscope according to any one of the preceding claims, it is characterised in that the gyroscope control electricity
Road：
Including phaselocked loop, in the phaselocked loop, the sensing signal is with the ω of frequency 2DIt is demodulated,
Including frequency divider, the frequency divider halves to the frequency set in the phaselocked loop, and
The frequency halved is fed to signal generator, wherein the driving signal frequency is set as institute by the signal generator
State the frequency halved.
6. micro-electro-mechanical gyroscope according to claim 5, it is characterised in that the gyroscope includes self-test monitoring unit,
If the frequency set in the drive signal amplitude or the phaselocked loop after detected sensing signal amplitude, regulation exceeds certainly
Surplus is allowed in inspection, then the signal of the self-test monitoring unit output indication self test failure.
7. micro-electro-mechanical gyroscope according to any one of the preceding claims, it is characterised in that at least one quality
Element is referenced framework encirclement.
8. micro-electro-mechanical gyroscope according to claim 7, it is characterised in that at least one mass elements are by described
Vibrated in the plane that reference frame is limited.
9. micro-electro-mechanical gyroscope according to claim 8, it is characterised in that at least one mass elements are by described
Vibrated outside the plane that reference frame is limited.
10. a kind of method for operating micro-electro-mechanical gyroscope, the micro-electro-mechanical gyroscope includes at least one mass elements, top
Spiral shell instrument control circuit and driving actuator, the driving actuator is by including the driving of drive signal amplitude and driving signal frequency
Signal controls, wherein,
At least one mass elements are driven to carry out with driving oscillation frequencies omega by the driving actuatorDVibration fortune
It is dynamic,
Sensing signal is produced from the oscillating movement of at least one mass elements,
Characterized in that,
In the gyroscope control circuit, with the ω of frequency 2DDetect sensing signal amplitude.
11. according to the method for claim 10, it is characterised in that with frequencies omegaDDetect the second sensing signal amplitude.
12. the method according to any one of claim 10 to 11, it is characterised in that based on the ω of frequency 2DDetect
Sensing signal amplitude adjusts the drive signal amplitude.
13. according to the method for claim 12, it is characterised in that by sensing signal amplitude with entering with reference to sensing signal amplitude
Row compares.
14. the method according to any one of claim 10 to 13, it is characterised in that
With the ω of frequency 2 in phaselocked loopDThe sensing signal is demodulated,
The frequency set in the phaselocked loop is halved in frequency divider, and
The frequency halved is fed to signal generator, wherein the driving signal frequency is set as institute by the signal generator
State the frequency halved.
15. according to the method for claim 14, it is characterised in that
The sensing signal amplitude detected is fed to self-test monitoring unit,
Drive signal amplitude after regulation is fed to the self-test monitoring unit,
The frequency set in the phaselocked loop is fed to the self-test monitoring unit, and
If the frequency set in the drive signal amplitude or the phaselocked loop after the sensing signal amplitude detected, regulation exceedes
Surplus is allowed in self-test, then by the signal of the self-test monitoring unit output indication self test failure.
16. the method according to any one of claim 10 to 15, it is characterised in that at least one mass elements quilt
Reference frame surrounds.
17. according to the method for claim 16, it is characterised in that at least one mass elements are by the reference block
Vibrated in the plane that frame limits.
18. according to the method for claim 17, it is characterised in that at least one mass elements are by the reference block
Vibrated outside the plane that frame limits.
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| US9714842B2 (en) * | 2011-09-16 | 2017-07-25 | Invensense, Inc. | Gyroscope self test by applying rotation on coriolis sense mass |
| GB2580116B (en) * | 2018-12-21 | 2023-07-19 | Atlantic Inertial Systems Ltd | Gyroscope |
| JP7225817B2 (en) | 2019-01-17 | 2023-02-21 | セイコーエプソン株式会社 | Angular rate sensors, inertial measurement devices, electronics and moving objects |
| JP2021022620A (en) | 2019-07-25 | 2021-02-18 | セイコーエプソン株式会社 | Electronic device, manufacturing method thereof, electronic apparatus, and moving body |
| JP7188311B2 (en) | 2019-07-31 | 2022-12-13 | セイコーエプソン株式会社 | Gyro sensors, electronic devices, and mobile objects |
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| US20170343351A1 (en) | 2017-11-30 |
| EP3252429B1 (en) | 2020-11-18 |
| EP3252429A1 (en) | 2017-12-06 |
| JP2017211386A (en) | 2017-11-30 |
| US10520313B2 (en) | 2019-12-31 |
| JP6451779B2 (en) | 2019-01-16 |
| TW201809601A (en) | 2018-03-16 |
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| TWI632345B (en) | 2018-08-11 |
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