CN1802550A - Micromachined vibratory gyroscope with electrostatic coupling - Google Patents
Micromachined vibratory gyroscope with electrostatic coupling Download PDFInfo
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- CN1802550A CN1802550A CN200480006120.7A CN200480006120A CN1802550A CN 1802550 A CN1802550 A CN 1802550A CN 200480006120 A CN200480006120 A CN 200480006120A CN 1802550 A CN1802550 A CN 1802550A
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- 238000010168 coupling process Methods 0.000 title claims abstract description 55
- 230000008878 coupling Effects 0.000 title claims abstract description 54
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 54
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 238000012545 processing Methods 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 10
- 230000010363 phase shift Effects 0.000 claims description 5
- 230000004044 response Effects 0.000 abstract description 13
- 230000001133 acceleration Effects 0.000 abstract description 11
- 241001573881 Corolla Species 0.000 abstract 1
- 238000001514 detection method Methods 0.000 description 21
- 239000003990 capacitor Substances 0.000 description 15
- 230000008859 change Effects 0.000 description 7
- 230000035945 sensitivity Effects 0.000 description 7
- 238000013461 design Methods 0.000 description 3
- 230000003068 static effect Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
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- 238000006073 displacement reaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 239000000725 suspension Substances 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 206010026865 Mass Diseases 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- 239000000203 mixture Substances 0.000 description 1
- 230000024241 parasitism Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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Abstract
Micromachined vibratory gyroscope having two or more coplanar movable masses suspended over a planar substrate. Two perpendicular axes (x and y) are defined within the substrate plane, while a third, the z-axis or input axis, is defined to be perpendicular to the substrate plane. The movements of the two masses along the x-axis are coupled through an electrostatic coupling means so that the natural resonant frequency of the in-phase mode and that of the anti-phase mode are separated from each other for the resonances along the x-axis. When the two masses are driven to vibrate along the x-axis in the anti-phase mode and the device experiences rotation about the z-axis, Coriolis forces act differentially on the masses in the Ydirection, causing the two masses to dither in an anti-phase motion along the y-axis. The anti-phase dithering along the y-axis can be sensed directly by a rate sensor to measure the rate of rotation about the z-axis. Alternatively, the anti-phase dithering of the first and second bodies along the y-axis can be transferred to other movable bodies (i.e., rate-sensing masses) whose movement is then sensed to measure the rate of rotation about the z-axis. The sensing bodies are preferably suspended in such manner that, in the absence of Coriolis forces, the x-axis motion of the vibrating masses does not affect the sensing bodies. That inhibits motion of the sensing bodies in response to linear acceleration within the plane of the substrate, but permits those bodies to respond readily to the Corollas-induced motion about an axis perpendicular to the substrate plane.
Description
The cross reference of related application
Require the provisional application NO.60/453 of submission on March 16th, 2003,033 right of priority.
Technical field
The present invention totally belongs to inertial sensor and analog thereof, relates in particular to little processing gyrotron.
Background technology
Gyrotron moves (Coriolis-induced motion) and works by detecting the Coriolis that is caused around the rotation of sensitive axis by gyroscope.When drive block along given shaft vibration and wind when rotation axle perpendicular to vibrating shaft, on described, produce and apply Coriolis force along response axis perpendicular to vibrating shaft and turning axle.By detecting the described mobile variation that causes by Coriolis force, can measure rotational speed along response axis.
Because Coriolis force and speed are proportional, the Coriolis force on the vibrating mass and described speed homophase.Any mobile undesirable coupling with response axis along main shaft that vibrates or driving shaft can cause that described parasitism along response axis moves.This undesirable coupling usually with described displacement rather than speed homophase, be referred to as quadrature error usually.
A kind of method of the mobile variation of the piece that detection is caused by Coriolis force is a capacitive detection, and it generally includes fixed electorde and travelling electrode.In this device, importantly under the situation that does not apply rotation, minimize moving of travelling electrode, promptly any is not to be moved by the piece along response axis that Coriolis force causes.In addition, undesirable orthogonal signal can occur, its frequency with rate signal is identical, but phase shifts 90 the degree.These orthogonal signal are added in the output signal of hope.Although can for example utilize phase place sensitive demodulation exclusive segment orthogonal signal electronically, but still reduce gyrostatic performance easily.
Another error source of gyrotron is to the linear acceleration sensitivity, can move described and produce undesirable output.
When being installed in gyroscope in the support in application-specific, any uneven momentum of vibrating mass can cause that part is driven energy and inject described support, and may be then with described energy coupling return device.The energy feedback of this mode may cause offset error, and the performance that makes device is to the mounting condition sensitivity.
In little processing gyrotron of prior art, with mechanical means vibrating mass is coupled usually.This coupling is for guaranteeing that described is important with identical resonance frequency vibration.Ou He piece is not easy to generate different resonance frequencies, does not benefit the practicality of sensor.
Although mechanical couplings can be guaranteed described really with single resonance frequency vibration, this coupling still has certain restriction and defective.For example, their size changes with manufacturing tolerance easily, thereby will cause the variation of degree of coupling.In addition, multiple mechanical couplings wherein adopts the folded beam design, and this has increased the substrate area and the plant bulk that need.In addition, degree of coupling is determined by the fixing mechanical property of coupled structure, thereby is nonadjustable.
Summary of the invention
The little processing gyrotron that the purpose of this invention is to provide a kind of new improvement.
Another object of the present invention provides a kind of gyroscope with above-mentioned feature, and it does not need mechanical couplings between vibrating mass.
Another object of the present invention provides a kind of gyroscope with above-mentioned feature, wherein electrostatic coupling vibrating mass.
According to the present invention, by being provided, so little processing gyrotron realized these and other objects, in described gyroscope, for example pass through plane-parallel capacitor electrostatic coupling vibrating mass.This coupling can be used between the piece self, also can be used for piece and other and is used to detect between the body to the response of rotation.Such coupling is compared mechanical couplings and is not easy to change, and can regulate by changing bias voltage when needed.
Description of drawings
Fig. 1-the 6th, the plan view from above of the different embodiment of rough schematically illustrated introducing little processing gyrotron of the present invention.
Embodiment
In the embodiment shown in fig. 1, two pieces utilize electrostatic force directly to be coupled, and this electrostatic force changes with the relative position of described two pieces.Coupling condenser is asymmetric, and its electric capacity increases when drawing close mutually for described, they mutually away from the time reduce.
In the present embodiment, by beam 105-108 and 109-112 difference suspension block 101,102, wherein the end with each beam is fixed on the substrate.Each beam is L-shaped, and its arm extends in the x and y direction.This mounting structure allows piece 101,102 to move at x axle and y direction of principal axis.Preferred and the piece 102 of piece 101 is complementary, and beam 105-108 preferably is complementary with beam 109-112.
Plate 103,104 parallel contiguous blocks respectively 101,102, and the electrode or the pole plate of formation capacitor.When applying voltage, the electrostatic force between the described pole plate changes along the axial relative position of x with described 101,102.This power can be approximately the spring between two pieces with negative spring constant.
When drive block 101,102 during along the in phase vibration of x axle, its resonance frequency is determined by the spring constant of beam 105-108 and 109-112.When drive block 101,102 when the x axle vibrates with rp mode, two pieces alternately close to each other and away from, thereby change their relative position.In this case, resonance frequency not only determined by the spring constant of beam, also determines by being applied to the negative spring constant that two electrostatic force between the piece cause.Like this,, can adjust the resonance frequency of the rp mode on the x direction, and itself and the resonance frequency of in-phase mode on the x direction can be separated by between two pieces, applying voltage difference.
The embodiment of embodiment shown in Fig. 1 a and Fig. 1 is similar, and difference is that coupling condenser is symmetrical, wherein for piece mutually near and away from equate move, the variation of electric capacity is approximately equal also.
As in the embodiment shown in fig. 1, attractive force between the capacitor two-plate increases when piece is close mutually, and except equal electric capacitance change was provided at arbitrary moving direction, symmetrical capacitor also produced the linear more relation between the displacement of electric capacity and piece.
Be the beam in Fig. 1 and the 1a illustrated embodiment can also be adjusted into permission and move, and not move alternatively along the y direction of principal axis along the z direction of principal axis.Coriolis moves and also will be oriented as the direction of principal axis along z, and the y axle will become the input shaft (input axis) of detected rotation around it.Like this, input shaft is positioned at the plane at device place, rather than perpendicular to this plane.
Embodiment shown in Fig. 1 b is similar to the embodiment of Fig. 1 equally, is used for device that described two pieces are coupled and move with along y axle and x axle but increased.This device comprises pole plate 103by, the 104by along the x direction from described extension, and it separates to form the pole plate of electrostatic coupling capacitor along the y direction of principal axis, and described electrostatic coupling capacitor is coupled to move along the y axle described.As embodiment shown in Figure 1, pole plate 103bx, 104bx are coupled two pieces to move along the x axle.
In the embodiment shown in Figure 2, piece 201,202 is by placing therebetween the 3rd piece 203 by electrostatic coupling.Piece 201 is by being fixed on two pole plate 204,205 and pieces 203 couplings on the piece, and wherein pole plate 204,205 is provided with in that separate, relative mode, and piece 202 by pole plate 206,207 in a similar fashion with piece 203 couplings.
By beam 208-211,212-215 and 216-217 difference suspension block 201,202 and 203, wherein an end of each beam is fixed on the substrate.Beam 208-211 and 212-215 are L-shaped, and its arm extends at x and y direction, thereby allow piece 201,202 to move along x direction and y direction.216,217 on beam extends along the y direction, and only allows piece 203 to move along the x direction.Preferably, whole design is simultaneously with respect to x axle and y rotational symmetry about structure centre.
Applying voltage between the piece 201,203 and between the piece 202,203.For the anti-phase mode of resonance of piece 201,202 on the x direction, total spring constant of resonance is determined by the spring constant of beam 208-211 and 212-215 and by the equivalent negative spring constant of capacitor plate 204,205 and 206,207 power that apply.For the homophase mode of resonance of piece 201,202 on the x direction, the spring constant of beam 216,217 also is the influence factor of total spring constant and resonance frequency.Thereby, rp mode resonance frequency and in-phase mode resonance frequency can be separated.
For detect around be positioned at the device plane rather than perpendicular to the rotation of the axle on device plane, beam 208-215 can be adjusted into permission and move along the z direction, and simultaneously between the maintainance block along the electrostatic coupling of x axle.Thereby, Coriolis is moved be oriented to direction of principal axis, and the y axle becomes the input shaft of detected rotation around it along z.In the embodiment of this modification, will be used to detect electrode that Coriolis moves is arranged on piece along the z axle top and/or below.
Embodiment shown in Figure 3 is similar to embodiment shown in Figure 1, wherein has the electrode 313-316 that is used to detect the response that the Coriolis along the y axle is moved.As embodiment shown in Figure 1, piece 301 and 302, beam 305-308 and 309-312 and capacitor plate 303 and 304 are suspended on the substrate 300.Electrode 313-316 is installed in fixed position on the substrate, and it is distributed in the above and below of piece on the y direction.
When drive block 301,302 with rp mode on the x direction vibration and the device when the z axle rotates, on piece 301,302, produce Coriolis force differentially, thereby cause piece 302 to vibrate differentially in the y direction.Detect this moving by the capacitor that forms by electrode 313-316 and vibrating mass, measure rotating speed.
Be arranged on electrode 313-316 and described composition differential capacitive detecting device of the opposite side of piece.Described differential detection helps eliminating the interference from linear acceleration, because this interference is counted as common-mode signal rather than differential wave.
As shown in Figure 3, embodiment wherein is by detecting moving and the rotation sensitivity of opposing connection z axle along the y axle.If desired, also this embodiment can be adjusted into the rotation of detection, in this case, capacitor plate 313-316 be arranged on the top and/or the below of piece along the z direction of principal axis around the y axle.
Embodiment among embodiment shown in Fig. 3 a and Fig. 1 b and Fig. 3 is similar, wherein capacitor plate 303ax, 304ax provide the coupling of moving along the x direction of being used between piece 301a, the 302a, pole plate 303ay, 304ay are provided for the coupling of moving along the y direction, and pole plate 313a-316a and described formation capacitor, be used to detect piece moving along the y direction.
Fig. 4 shows another embodiment, wherein two pieces by place therebetween the 3rd piece by electrostatic coupling together.In this embodiment, will be delivered to removable detecting element by the variation of moving that Coriolis force causes, and preferably use capacitive detector to detect this variation then to measure rotating speed along the y axle by mechanical beams.Under the situation that does not have the Coriolis force that is caused by rotation, detecting element is static relatively and be not subjected to the influence of piece along the vibration of x axle, thus the quadrature error of minimizing.
As embodiment shown in Figure 2, with piece 401,402 and 403, capacitor plate 404,405 and 406,407 and beam 408-411,412-415 and 416,417 be suspended on the substrate 400.In addition, detecting piece 418,419 also is suspended above on the substrate, also is connected with piece 401,402 with 426,427 by beam 424,425, to move along the y direction by beam 420,421 and 422,423.Fixing detecting element 428-431 proximity detection piece ground is fixed on the substrate, and with detection piece capacitive couplings.
When drive block 401,402 with rp mode along x direction vibration and device when the z axle rotates, on piece 401,402, produce Coriolis force differentially, thereby cause described on the y direction, to vibrate differentially.This vibration is delivered to by beam 424,425 and 426,427 and detects piece 418,419.Because beam 420,421 and 422,423 only extends in the x direction, thereby keeps described detection piece by this way, make them be subjected to the influence of vibrating mass along the vibration on the x direction that does not have Coriolis force minimumly.The variation that moves through the electric capacity between they and the battery lead plate 428-431 that detects piece 418,419 detects.
Fig. 5 shows gyrostatic another embodiment, and two pieces wherein pass through the 3rd piece electrostatic coupling together, and is coupled with removable detecting element.As previous embodiment, with piece 501,502 and 503, capacitor plate 504,505 and 506,507 and beam 508-511,512-515 and 516,517 be suspended on the substrate 500.
The detecting element of stiff rectangular box form or piece 522 are suspended above on the substrate and by beam 518,519 and 520,521 by beam 523-526 and are connected on the piece 501,502.Fixing detecting element 527-530 proximity detection piece ground is fixed on the substrate, and with detection piece capacitive couplings.
When drive block 501,502 with rp mode along x direction vibration and device when the z axle rotates, on piece 501,502, produce Coriolis force differentially, and cause these pieces on the y direction, to vibrate differentially.Give detection piece 522 by beam 518-521 with this vibration transfer.Since these beams extend on the y direction and on this direction relative stiffness, thereby transmit moving on the y direction easily, and give described detection piece with the differential vibration transfer of these pieces on the x axle largely.
Beam 523-526 makes the detection piece avoid being subjected to piece 501,502 in the influence that does not have the vibration on the x direction of Coriolis force.Beam 523-526 is maintainance block 522 firmly also, and forbids the mobile variation of its response along the linear acceleration of x and y axle, but the rotation around the z axle that causes by Coriolis force of response any variation of moving easily.Detect moving of piece 522 by the electric capacitance change between this piece and the battery lead plate 527-530.
Fig. 6 shows another embodiment with rigidity detecting element or piece.In this embodiment, piece 601,602 passes through pole plate 603,604 electrostatic coupling together, and is suspended on the substrate 600 by L shaped beam 605-608 and 609-612.Above-mentioned also by pole plate 613,614; 615,616; 617,618 and 619,620 and detection piece 621 electrostatic coupling that center on, this detection piece has the rectangular frame form of rigidity.By beam 622-625 described detection piece is suspended on the substrate, and battery lead plate 626-629 is fixed on the substrate and with above-mentioned detection piece capacitive couplings, move to detect it.
When drive block 601,602 with rp mode along x direction vibration and device when the z axle rotates, on described, produce Coriolis force differentially, thereby cause these pieces on the y direction, to vibrate differentially.By battery lead plate 613,614; 615,616; 617,618 and 619,620 should move to change to pass to and detected piece 621.These electrode pairs form plane-parallel capacitors, and when applying voltage between them, the electrostatic force between the every pair of pole plate changes with the relative position of described electrode pair on the y direction.
Beam 622-625 maintainance block 621 when not having Coriolis force is static relatively, thereby reduces quadrature error.They are maintainance block 621 firmly also, thereby stops the mobile variation that is caused by the linear acceleration along x and y axle effectively, but still is easy to respond the variation that the rotation around the z axle that caused by Coriolis force is moved.With previous embodiments, detect moving of piece 621 by the electric capacitance change that detects between piece 621 and the battery lead plate 626-629.
The present invention has many important feature and advantage.The little processing gyrotron that is provided has overcome gyrostatic defective in the prior art, comprises quadrature error, the sensitivity to linear acceleration, momentum imbalance and mechanical couplings effect.
By being coupled two pieces and drive them with rp mode and come balance to drive momentum, can realize elimination to momentum imbalance.Described coupling realizes that by electrostatic force described electrostatic force changes with the relative position of two pieces.This electrostatic force can be applied directly between two pieces, or apply by the one or more intermediate mass between two drive blocks.
Because drive two pieces by rp mode, the Coriolis force on two pieces is reverse direction, thereby can detect output signal differentially.The effect of linear acceleration is counted as common mode interference, and can be used to the electronic equipment eliminating of processing signals.Thereby can greatly reduce sensitivity to linear acceleration.
In certain embodiments, the mobile variation of the vibrating mass that will be caused by Coriolis force by mechanical beams and/or electrostatic force is delivered to one or more other bodies (promptly detecting piece), and described electrostatic force changes with driven and the relative position that detects between the piece.The detection piece that suspends like this makes them static relatively when not having Coriolis force, thereby has greatly reduced quadrature error.
The above-mentioned mode that detects piece that suspends also stops the mobile variation of their responses along the linear acceleration of x and y axle, but allows them to be easy to respond by moving along the differential of response axis (y axle) that Coriolis force causes.This design has significantly reduced the sensitivity to linear acceleration.
Little processing gyroscope is fabricated on the planar substrates, and wherein by two vibrating masss of electrostatic force coupling, described electrostatic force changes with the relative position of described two pieces.This electrostatic force can directly produce between two pieces, perhaps can produce by one or more intermediate mass.For anti-phase mode of resonance and homophase mode of resonance, described coupling causes the different resonance frequencies along the resonance of vibrating shaft.This coupling technique can be easy to expand to the little processing gyrotron that has more than two piece.
The mobile variation that Coriolis force is caused by mechanical beams and/or electrostatic force is delivered to one or more other removable or detection bodies, and described electrostatic force changes with the relative position between described vibrating mass and the detection piece.
The detection piece that suspends like this makes it to be remained staticly relatively when not having Coriolis force, and makes it not be subjected to the influence of vibrating mass along the vibration of vibrating shaft.
The above-mentioned mode that detects piece of suspending has significantly stoped moving of linear acceleration in its response base plan, but allows described detection piece to be easy to respond the mobile variation that is caused by the rotation of winding perpendicular to the axle of base plan.
Electrostatic coupling between the piece can be a symmetry or asymmetric, and both can be used along detecting axle, also can be used along driving shaft.
Though the rotation sensitivity of the gyroscope opposing connection z axle in the preferred embodiment, the electrostatic coupling of its drive pattern is also applicable to having along the gyroscope of the input shaft of y axle.
Be described with reference to little processing gyroscope although the present invention is concrete, be appreciated that it can also be applicable to equivalently with vibrating mass electrostatic coupling other device together.
From above obviously as can be known, the invention provides a kind of novel, improved little processing gyrotron.Only describe specific presently preferred embodiment in detail although it will be obvious to those skilled in the art that this paper,, under the situation that does not depart from the scope of the present invention that limits by appended claims, can also carry out specific change and modification.
Claims (20)
1. little processing gyrotron, comprising: first and second, it is installed by this way, makes to allow to move and respond differential mobile along second by the Coriolis force that produces around the 3rd rotation along first vibrate in opposite phase; And be used for by electrostatic force described device that is coupled, described electrostatic force changes with described relative position.
2. little processing gyrotron as claimed in claim 1, wherein said electrostatic coupling power is oriented as along described first, makes described anti-phasely to move and have different resonance frequencies with phase shift along described first.
3. little processing gyrotron as claimed in claim 1, wherein said by simultaneously along described first and described second electrostatic coupling, make each anti-phase in described along described first and second move and have different resonance frequencies with phase shift.
4. little processing gyrotron as claimed in claim 1, wherein said be used for described device that is coupled comprise an a plurality of and described connection with the described consistent parallel plate electrode that moves.
5. little processing gyrotron as claimed in claim 4 wherein connects described first pole plate and is equidistantly separated and connecting between described second pole plate, make described mutually near and away from the electrostatic force that equates substantially of mobile generation.
6. little processing gyrotron as claimed in claim 1 wherein is used for described device that is coupled comprised by electrostatic coupling the 3rd between described first and second.
7. little processing gyrotron as claimed in claim 1 also comprises a plurality of sensors, and itself and described first and second capacitive couplings are to monitor described along described second moving.
8. little processing gyrotron as claimed in claim 1, also comprise with the detecting element of described first and second couplings and with the capacitively coupled a plurality of sensors of described detecting element, to monitor described along described second moving.
9. little processing gyrotron as claimed in claim 8, wherein said detecting element and described electrostatic coupling.
10. little processing gyrotron as claimed in claim 1, wherein said is suspended above on the planar substrates, described first and second are positioned at the plane that is parallel to described substrate, described the 3rd perpendicular to described substrate.
11. little processing gyrotron as claimed in claim 1, wherein said is suspended above on the planar substrates, and described first and the 3rd is positioned at the plane that is parallel to described substrate, described second perpendicular to described substrate.
12. little process velocity sensor, comprise by together first and second of electrostatic coupling, it is installed by this way, make to allow to move and respond differential mobile along second by the Coriolis force that produces around the 3rd rotation along first vibrate in opposite phase.
13. little process velocity sensor as claimed in claim 12, wherein said first and second intercouple by electrostatic force, and described electrostatic force changes with described relative position.
14. little process velocity sensor as claimed in claim 12, wherein said electrostatic coupling power is oriented as along described first, makes described anti-phasely to move and have different resonance frequencies with phase shift along described first.
15. little process velocity sensor as claimed in claim 12, wherein said by simultaneously along described first and described second electrostatic coupling, make each anti-phase in described along described first and second move and have different resonance frequencies with phase shift.
16. little process velocity sensor as claimed in claim 12 also comprises a plurality of sensors, itself and described first and second capacitive couplings are to monitor described along described second moving.
17. little process velocity sensor as claimed in claim 12, also comprise with the detecting element of described first and second couplings and with the capacitively coupled a plurality of sensors of described detecting element, to monitor described along described second moving.
18. little process velocity sensor as claimed in claim 17, wherein said detecting element and described electrostatic coupling.
19. little process velocity sensor as claimed in claim 17, wherein said detecting element comprises rectangular frame, described framework around described first and second and with its coplane.
20. little process velocity sensor as claimed in claim 12, wherein said first and second orthogonal and perpendicular to described the 3rd.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US45303303P | 2003-03-06 | 2003-03-06 | |
| US60/453,033 | 2003-03-06 | ||
| US10/792,043 US6966224B2 (en) | 2003-03-06 | 2004-03-02 | Micromachined vibratory gyroscope with electrostatic coupling |
| US10/792,043 | 2004-03-02 | ||
| PCT/US2004/006453 WO2004081495A2 (en) | 2003-03-06 | 2004-03-03 | Micromachined vibratory gyroscope with electrostatic coupling |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1802550A true CN1802550A (en) | 2006-07-12 |
| CN100561126C CN100561126C (en) | 2009-11-18 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB2004800061207A Expired - Fee Related CN100561126C (en) | 2003-03-06 | 2004-03-03 | Utilize little processing gyrotron of electrostatic coupling |
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| CN (1) | CN100561126C (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103076012A (en) * | 2011-10-26 | 2013-05-01 | 飞思卡尔半导体公司 | Inertial sensor with off-axis spring system |
| CN102165283B (en) * | 2008-09-25 | 2014-09-17 | 罗伯特·博世有限公司 | Coupling structure for a yaw rate sensor device, yaw rate sensor device, and method for the production thereof |
| CN107449413A (en) * | 2016-05-27 | 2017-12-08 | 株式会社村田制作所 | To the continuous monitoring of the drive amplitude in vibration micro-electro-mechanical gyroscope |
| TWI623726B (en) * | 2012-06-29 | 2018-05-11 | 村田製作所股份有限公司 | Device with improved vibratory gyroscope and method for the device |
| CN112284368A (en) * | 2020-09-21 | 2021-01-29 | 北京航天控制仪器研究所 | Fully-differential high-precision X-axis silicon micro-gyroscope |
| CN112556675A (en) * | 2019-09-10 | 2021-03-26 | 昇佳电子股份有限公司 | Micro-electromechanical gyroscope |
| US10996056B2 (en) | 2015-05-15 | 2021-05-04 | Murata Manufacturing Co., Ltd. | Vibrating micro-mechanical sensor of angular velocity |
-
2004
- 2004-03-03 CN CNB2004800061207A patent/CN100561126C/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102165283B (en) * | 2008-09-25 | 2014-09-17 | 罗伯特·博世有限公司 | Coupling structure for a yaw rate sensor device, yaw rate sensor device, and method for the production thereof |
| US8875574B2 (en) | 2008-09-25 | 2014-11-04 | Robert Bosch Gmbh | Coupling structure for a yaw rate sensor device, yaw rate sensor device, and method for the production thereof |
| CN103076012A (en) * | 2011-10-26 | 2013-05-01 | 飞思卡尔半导体公司 | Inertial sensor with off-axis spring system |
| TWI623726B (en) * | 2012-06-29 | 2018-05-11 | 村田製作所股份有限公司 | Device with improved vibratory gyroscope and method for the device |
| US10365105B2 (en) | 2012-06-29 | 2019-07-30 | Murata Manufacturing Co., Ltd. | Vibratory gyroscope |
| US10996056B2 (en) | 2015-05-15 | 2021-05-04 | Murata Manufacturing Co., Ltd. | Vibrating micro-mechanical sensor of angular velocity |
| CN107449413A (en) * | 2016-05-27 | 2017-12-08 | 株式会社村田制作所 | To the continuous monitoring of the drive amplitude in vibration micro-electro-mechanical gyroscope |
| CN112556675A (en) * | 2019-09-10 | 2021-03-26 | 昇佳电子股份有限公司 | Micro-electromechanical gyroscope |
| CN112284368A (en) * | 2020-09-21 | 2021-01-29 | 北京航天控制仪器研究所 | Fully-differential high-precision X-axis silicon micro-gyroscope |
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| Publication number | Publication date |
|---|---|
| CN100561126C (en) | 2009-11-18 |
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