CN108332733A - The driving of micromechanics simple oscialltor three-axis gyroscope and detection device - Google Patents
The driving of micromechanics simple oscialltor three-axis gyroscope and detection device Download PDFInfo
- Publication number
- CN108332733A CN108332733A CN201810077617.1A CN201810077617A CN108332733A CN 108332733 A CN108332733 A CN 108332733A CN 201810077617 A CN201810077617 A CN 201810077617A CN 108332733 A CN108332733 A CN 108332733A
- Authority
- CN
- China
- Prior art keywords
- axis
- oscillator
- gyroscope
- module
- driving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/567—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode
- G01C19/5691—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using the phase shift of a vibration node or antinode of essentially three-dimensional vibrators, e.g. wine glass-type vibrators
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Signal Processing (AREA)
- Gyroscopes (AREA)
Abstract
The invention discloses a kind of driving of micromechanics simple oscialltor three-axis gyroscope and detection devices, including simple oscialltor three-axis gyroscope, drive module and detection module, drive module, it is electrically connected between detection module and gyroscope, gyroscope includes oscillator (1) and driving electrodes (4 7), oscillator (1) can carry out elastic vibration in x-axis and/or y-axis, driving electrodes (4 7) and oscillator (1) constitute x-axis angular oscillation resonator and y-axis angular oscillation resonator, drive module connects the driving electrodes (4 7) and oscillator (1) of gyroscope, drive module driving vibration resonance device makees the once per revolution vibration of amplitude constant, detection module is used to detect the angular speed output quantity of gyroscope.The present invention uses simple oscialltor three-axis structure, and the compact-sized of gyroscope may be implemented so that gyroscope is small, detection precision is high and reduces the manufacturing cost of gyroscope.
Description
Technical field
The present invention relates to a kind of driving of micro-mechanical gyroscope and detection device more particularly to a kind of micromechanics simple oscialltors three
The driving of axis gyroscope and detection device belong to the field MEMS (MEMS).
Background technology
Gyroscope is a kind of important inertial sensor, in numerous areas extensive application.Gyroscope is by the detection number of axle
It is divided into single shaft, twin shaft, three kinds of three axis, three-axis gyroscope is required in many application scenarios.In the low precision occasion such as consumer electronics
Generally small size, low-power consumption are realized using more oscillator single-chip integrations；And the high-precision application scenario in, it is general only using three
The method of single axis gyroscope Automatic manual transmission is found to realize three-axis gyroscope, but the gyroscope volume of this mode is larger, limits
Its application scenario.Existing micromechanics three-axis gyroscope generally uses more oscillator single-chip integrations, and such gyroscope is small, essence
It spends low, or is assembled using three uniaxial gyros, the volume of such gyroscope is big, of high cost.
Invention content
The purpose of the present invention is to provide the micromechanics simple oscialltor three-axis gyroscopes of a kind of small size, high-precision and low cost
Driving and detection device.
The driving of the micromechanics simple oscialltor three-axis gyroscope of the present invention and detection device, including simple oscialltor three-axis gyroscope,
Drive module and detection module are electrically connected between drive module, detection module and gyroscope, and gyroscope includes oscillator (1) and drives
Moving electrode (4-7), the oscillator (1) can carry out elastic vibration, driving electrodes (4-7) and oscillator (1) structure in x-axis and/or y-axis
At x-axis angular oscillation resonator (xResonator) and y-axis angular oscillation resonator (yResonator), drive module connects gyro
The driving electrodes (4-7) and oscillator (1) of instrument, the drive module include three loops, wherein the x-axis angular oscillation resonator,
Trans-impedance amplifier (TIA) and phaselocked loop (PLL) constitute the first loop, automatic growth control module (AGC), trans-impedance amplifier TIA
The second loop constituted with the x-axis angular oscillation resonator, automatic growth control (AGC) module, trans-impedance amplifier TIA and described
The third loop that y-axis angular oscillation resonator is constituted, wherein first loop is for driving the x-axis angular oscillation resonator and institute
It states y-axis angular oscillation resonator and makees once per revolution vibration, the second loop is for making x-axis angular oscillation resonator and the y-axis angular oscillation resonance
The amplitude constant of device, first loop, the second loop and third loop are formed as closed loop, and the detection module is for detecting
The angular speed output quantity of the gyroscope.
Further, multiple oscillator electrode V are provided on oscillator (1) surfacedc(12), in the multiple oscillator
Electrode Vdc(12) the multiple fixed electrodes (4-11) of top arrangement, the multiple oscillator electrode Vdc(12) electric with the multiple fixation
Pole (4-11) corresponds, and the multiple fixed electrode (4-11) includes four driving electrodes Vx+(4)、Vx-(5)、Vy+(6)、Vy-
(7) and four detecting electrode Vzx+(8)、 Vzx-(9)、Vzy+(10)、Vzy-(11), the driving electrodes Vx+(4)、Vx-(5)、Vy+
(6)、Vy-(7) and the detecting electrode Vzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) distribution, the driving electricity are alternateed
Pole Vx+(4)、Vx-(5) and the oscillator (1) constitutes the x-axis angular oscillation resonator, and the x-axis for the oscillator (1) drives,
Drive the oscillator (1) in the vibration of the x-axis, driving electrodes Vy+ (6)、Vy-(7) and oscillator one y-axis angular oscillation of composition is humorous
Shake device, and the y-axis for the oscillator (1) drives, and drives the oscillator (1) in the vibration of the y-axis.
Further, the drive module drives the x-axis angular oscillation resonator and the y shaft angles vibration resonance
When device makees once per revolution vibration, control variable V, driving resonant frequency and phase are generated, when having turning rate input, the detection electricity
Pole Vzx+, Vzx-, Vzy+, Vzy- and the multiple oscillator electrode Vdc(12) capacitance between generates corresponding capacitance change
ΔCzx+、ΔCzx-、ΔCzy+、ΔCzy-。
Further, the capacitance change Δ Czx+, Δ Czx-, Δ Czy+, Δ Czy- and the control variable
V, the driving resonant frequency and the phase are input to the detection module, are obtained after detection module processing described
Angular speed output quantity.
Further, phaselocked loop (PLL) module is by phase detector (PD), low-pass filter (LPF), voltage controlled oscillation
Device (VCO) forms.
Further, the output signal V of low-pass filter (LPF) described in phaselocked loop (PLL) module and the top
Spiral shell instrument is related in the angular speed of z-axis, for measuring z-axis angular speed.
Further, automatic growth control (AGC) module is by rectifier (Rectifier), low-pass filter
(LPF), pi controller (PI Controller) forms, and the x-axis angular oscillation resonator passes through the automatic gain control
Molding block (AGC) locks amplitude.
Further, the output signal V of the phaselocked loop (PLL) is subjected to phase shift, input Y shaft angle vibration resonance devices are made
For referenced drive signal, the frequency of the Y-axis angular oscillation resonator is identical as the frequency of x-axis angular oscillation resonator, amplitude
Locking.
The present invention uses simple oscialltor structure, oscillator to be driven on two vertical axis (xy axis) and do angular oscillation, can be to three
The angular speed of axis is sensitive, and the locking of two drive shafts (xy axis) vibration amplitude, fixed frequency driving and frequency are different, in the detection that z-axis generates
Amount can obtain xy axis angular rates by two frequency signal in-phase solution tune, and z-axis angular speed can generate response in two drive shafts,
Carrying out demodulation filtering to drive shaft resonator output signal can be final to realize that three axis angular rate of simple oscialltor measures with z-axis angular speed.
Below in conjunction with the accompanying drawings and specific implementation mode the present invention is described in further detail.
Description of the drawings
Fig. 1 is simple oscialltor three-axis gyroscope dynamical structure schematic diagram.
Fig. 2 is simple oscialltor three-axis gyroscope structural schematic diagram.
Fig. 3 is simple oscialltor quadrature drive three axis accelerometer system structure diagram.
Fig. 4 is drive module system block diagram.
Fig. 5 is detection module system block diagram.
In figure：1, mechanical vibrator；2, universal joint；3, supporting beam；4, x drive shafts positive electrode Vx+；5, x drive shafts negative electrode
Vx-；6, y drive shafts positive electrode Vy+；7, y drive shafts negative electrode Vy-；8, z-axis grid-type detecting electrode Vzx+；9, z-axis grid-type detection electricity
Pole Vzy+；10, z-axis grid-type detecting electrode Vzx-；11, z-axis grid-type detecting electrode Vzy-；12, oscillator electrode Vdc。
Specific implementation mode
The micromechanics simple oscialltor three-axis gyroscope of the present invention is detected using Coriolis effect to vibrating the effect of rigid body
Three axis angular rates.As shown in Figure 1, a symmetrical rotary rigid body of circle is respectively I around the rotary inertia of xyz axisx,Iy,Iz, in carrier
Angular speed in coordinate system is ωx,ωy,ωz, the angular speed of relative inertness coordinate system is Ωx,Ωy,Ωz, and Coriolis is imitated
The torque that should be generated is Mx,My,Mz.When the angle of xy axis is changed with different frequency, and z-axis corner is very little, i.e. θx=θ0x
sinω1T, θy=θ0y sinω2T, θz≈0 (θ0x、θ0yFor angular oscillation amplitude, ω1、ω2Vibration is angular frequency), in low-angle
The torque that Coriolis effect generates can be obtained in the case of linear approximation is：
The amplitude of xy axis can be locked by autocontrol method (AGC), the signal of resonator output includes two kinds of frequencies
Ingredient, loop bandpass filter (BPF) only allow the frequency signal of the drive shaft to pass through, can inhibit other frequency interferences.And
Resonator separately draws signal all the way and passes through bandpass filtering and in-phase solution tune, so that it may in the hope of z-axis angular velocity vector Ωz.In addition, z-axis is turned round
Square MzIt will produce an angular response θz, this angle is by torque MzIt is determined with the property of oscillator structure itself, i.e.,
Wherein：IzIt is oscillator to the rotary inertia of z-axis；DzFor the damped coefficient of oscillator z-axis；KzFor the axis elasticity system of oscillator z
Number.
As vibration frequency ω1、ω2It, can be in the hope of angle, θ when much larger than angle measurement velocity bandwidthzIt can be approximated to be stable state
Solution：
Wherein：K is the gain of response；For the phase shift of response.
Angle, θz(or other physical quantitys caused by it, such as check capacitance), pass throughWith
Demodulation can be obtained by the angular velocity vector Ω of xy axisx,Ωy。
Micromechanics simple oscialltor three-axis gyroscope as shown in Figure 2, oscillator (1) are fixed on universal joint with four supporting beams (3)
(2) on, oscillator (1) can do elastic vibration in x-axis or y-axis, and universal joint (2) is anchor point, and oscillator (1) is the axisymmetric circles of xy
Annular or polygonal annular, arrange above oscillator (1) multiple fixed electrodes, wherein electrode Vx+(4)、Vx-(5)、Vy+(6)、Vy-(7)
For driving electrodes, grid-type electrode Vzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) it is detecting electrode, oscillator electrode Vdc(12) solid
It is scheduled on the disk of surface insulation, DC potential having the same.Electrode Vx+(4)、Vx-(5) and oscillator (1) constitutes an x-axis
Angular oscillation resonator, electrode Vy+(6)、Vy-(7) and oscillator (1) constitutes a y-axis angular oscillation resonator, grid-type electrode Vzx+
(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) and oscillator electrode Vdc(12) four detection capacitances are constituted, oscillator (1) z-axis can be detected
Angular displacement.
The micromechanics simple oscialltor three-axis gyroscope of the present invention is using electrostatic drive, capacitance detecting, as in Figure 3-5, detection
System is made of drive module and detection module, and gyro is under drive module closed-loop control, and along two axis self-oscillations of xy, amplitude is solid
Fixed, frequency is identical, quadrature in phase, while generating one and the relevant variable V of z-axis angular speed.Four fixed electrodes on z-axis direction
Corresponding four detections capacitance is respectively Czx+、 Czx-、Czy+、Czy-, capacitance (Czx++Czx-)-(Czx++Czx-) with z-axis corner at
Direct ratio.By variable V and four capacitance Czx+、Czx-、Czy+、Czy-It is input to detection module, voltage letter is obtained after C-V is converted
Number, then useWithTwo orthogonal signalling can after the processing such as being demodulated, being filtered, compensated respectively
To obtain angular velocity vector Ω to be measuredx,Ωy,Ωz, driven and demodulated using orthogonal signalling, the coupling between detection acceleration is very
Small, signal processing is more easy.
Drive module (Driving Module) connects gyroscope electrode Vx+, Vx-, Vy+, Vy- and gyrotron, driving
The affected once per revolution vibration of xy axis, two drive shaft amplitude constants, constant phase difference, at the same generate control variable V, driving resonant frequency and
Phase (Driving Frequency and Phase Reference).When there is turning rate input, detecting electrode Vzx+,
Capacitance between Vzx-, Vzy+, Vzy- and oscillator structure generates corresponding variation delta Czx+, Δ Czx-, Δ Czy+, Δ
Czy-.Control variable V, frequency, the phase that capacitance change and driving loop generate are input to detection module (Sensing
Module), three axis angular rate output quantities are obtained after detection module is handled.
X-axis is driven through phaselocked loop (Phase Locked Loop, PLL) locking frequency, passes through automatic growth control
(Auto Gain Control, AGC) locks amplitude.PLL modules are by phase detector (Phase Detector, PD), low
Bandpass filter (Low Frequency Filter, LPF), voltage controlled oscillator (Voltage Controlled Oscillator,
VCO it) forms, AGC modules are by rectifier (Rectifier), low-pass filter (LPF), pi controller (PI
Controller it) forms.Oscillator is equivalent to a resonator (xResonator), driving torque τ in x-axisxBy with extraneous z-axis
Angular speed (size Ωz) caused by Coriolis effect torque can make xResonator generate an angle.X-axis resonator passes through
Cross trans-impedance amplifier (Trans Impedance Amp, TIA), PLL modules composition closed loop can lock resonant frequency, and and AGC
The closed loop of module composition can lock amplitude, and amplitude size can pass through variable VxrefIt adjusts.
The output signal V of LPF is related with z angular speed in PLL, can be used for measuring z-axis angular speed.
PLL output signal (output of the ends VCO) carries out certain phase shift (such as -90 ° of phase shifts) and is input to y-axis resonator
(yResonator) as drive signal is referred to, y-axis resonator forms closed loop with TIA and AGC.The stable frequency of y-axis and x-axis phase
Together, amplitude locks, and size can be by variable VyrefIt adjusts.In addition, y-axis resonator can also be influenced by z-axis angle.
When three loop stabilities, xy axis connects the equal ω of resonant frequencyd, phase difference constant (such as -90 °).At this point, x
Shaft angle degree is θ0xcos(ωdT+ Δ φ), y-axis angular speed is θ0ysin(ωdT+ Δ φ), z-axis angular speed Coriolis effect exists
The torque that x-axis generates is-Ixωdθ0ycos(ωdT+ Δ φ), it is-I in the torque that y-axis generatesyωdθ0xcos(ωdT+ Δ φ),
Wherein, θox,θoyThe respectively angular oscillation amplitude of xy axis, Ix,IyThe respectively rotary inertia of xy axis.
Detection capacitance change Δ Czx+ and Δ Czx- sums after CV is converted, and Δ Czy+ and Δ Czy- become by CV
It sums after changing, two amounts are asking poor, and xy axis angular rates Ω is acquired after then demodulated, low-pass filtering (LPF)xAnd Ωy.Residual quantity
Demodulated reference signal phase differs 90 °, i.e. cos (ωdT+ Δ φ) and sin (ωdt+Δφ)。
It is above the preferred embodiment of the present invention, those skilled in the art are in the premise for not departing from the principle of the invention
Under, improvement of the present invention or variation, it should be understood that still fall within protection scope of the present invention.
Claims (8)
1. driving and the detection device of a kind of micromechanics simple oscialltor three-axis gyroscope, including simple oscialltor three-axis gyroscope, driving mould
Block and detection module are electrically connected between drive module, detection module and gyroscope, and gyroscope includes oscillator (1) and driving electrodes
(4-7), the oscillator (1) can carry out elastic vibration in x-axis and/or y-axis, and driving electrodes (4-7) and oscillator (1) constitute x-axis
Angular oscillation resonator (xResonator) and y-axis angular oscillation resonator (yResonator), drive module connect the drive of gyroscope
Moving electrode (4-7) and oscillator (1), the drive module include three loops, wherein the x-axis angular oscillation resonator is put across resistance
Big device (TIA) and phaselocked loop (PLL) constitute the first loop, automatic growth control module (AGC), trans-impedance amplifier TIA and the x
The second loop that shaft angle vibration resonance device is constituted, automatic growth control (AGC) module, trans-impedance amplifier TIA and the y-axis angle shake
The third loop that dynamic resonance device is constituted, wherein first loop is for driving the x-axis angular oscillation resonator and the y-axis angle
Vibration resonance device makees once per revolution vibration, and the second loop is used to make the amplitude of x-axis angular oscillation resonator and the y-axis angular oscillation resonator
Constant, first loop, the second loop and third loop are formed as closed loop, are electrically connected between three loops, the inspection
Survey the angular speed output quantity that module is used to detect the gyroscope.
2. device as described in claim 1, it is characterised in that：It is provided with multiple oscillator electrode V on oscillator (1) surfacedc
(12), in the multiple oscillator electrode Vdc(12) the multiple fixed electrodes (4-11) of top arrangement, the multiple oscillator electrode Vdc
(12) it is corresponded with the multiple fixed electrode (4-11), the multiple fixed electrode (4-11) includes four driving electrodes Vx+
(4)、Vx-(5)、Vy+(6)、Vy-(7) and four detecting electrode Vzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11), the driving electricity
Pole Vx+(4)、Vx-(5)、Vy+(6)、Vy-(7) and the detecting electrode Vzx+(8)、Vzx-(9)、Vzy+(10)、Vzy-(11) it alternates
Distribution, the driving electrodes Vx+(4)、Vx-(5) and the oscillator (1) constitutes the x-axis angular oscillation resonator, shakes for described
The x-axis driving of sub (1), drives the oscillator (1) in the vibration of the x-axis, driving electrodes Vy+(6)、Vy-(7) it is constituted with oscillator
One y-axis angular oscillation resonator, the y-axis for the oscillator (1) drive, and drive the oscillator (1) in the vibration of the y-axis.
3. device as claimed in claim 2, it is characterised in that：The drive module drive the x-axis angular oscillation resonator and
When the y-axis angular oscillation resonator makees once per revolution vibration, control variable V, driving resonant frequency and phase are generated, when having angular speed
When input, described detecting electrode Vzx+, Vzx-, Vzy+, Vzy- and the multiple oscillator electrode Vdc(12) capacitance between generates
Corresponding capacitance change Δ Czx+, Δ Czx-, Δ Czy+, Δ Czy-.
4. device as claimed in claim 3, it is characterised in that：The capacitance change Δ Czx+, Δ Czx-, Δ Czy+, Δ
The Czy- and control variable V, the driving resonant frequency and phase are input to the detection module, by the detection
The angular speed output quantity is obtained after resume module.
5. device as described in claim 1, it is characterised in that：Phaselocked loop (PLL) module is by phase detector (PD), low
Bandpass filter (LPF), voltage controlled oscillator (VCO) composition.
6. device as claimed in claim 5, it is characterised in that：Low-pass filter described in phaselocked loop (PLL) module
(LPF) output signal V is related in the angular speed of z-axis with the gyroscope, for measuring z-axis angular speed.
7. device as described in claim 1, it is characterised in that：Automatic growth control (AGC) module is by rectifier
(Rectifier), low-pass filter (LPF), pi controller (PI Controller) composition, the x-axis angular oscillation are humorous
The device that shakes locks amplitude by the automatic growth control module (AGC).
8. device as claimed in claim 6, it is characterised in that：The output signal V of the phaselocked loop (PLL) is subjected to phase shift,
Y-axis angular oscillation resonator is inputted to be used as with reference to drive signal, the frequency of the Y-axis angular oscillation resonator and the x-axis angular oscillation
The frequency of resonator is identical, amplitude locking.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810077617.1A CN108332733B (en) | 2018-01-26 | 2018-01-26 | Driving and detecting device of micro-mechanical single-vibrator three-axis gyroscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810077617.1A CN108332733B (en) | 2018-01-26 | 2018-01-26 | Driving and detecting device of micro-mechanical single-vibrator three-axis gyroscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108332733A true CN108332733A (en) | 2018-07-27 |
| CN108332733B CN108332733B (en) | 2020-05-19 |
Family
ID=62925844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810077617.1A Active CN108332733B (en) | 2018-01-26 | 2018-01-26 | Driving and detecting device of micro-mechanical single-vibrator three-axis gyroscope |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108332733B (en) |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060266116A1 (en) * | 2005-05-31 | 2006-11-30 | Innalabs Technologies, Inc. | Coriolis force gyroscope with high sensitivity |
| CN101520327A (en) * | 2008-02-29 | 2009-09-02 | 精工爱普生株式会社 | Physical quantity measuring apparatus and electronic device |
| US20100154542A1 (en) * | 2005-05-31 | 2010-06-24 | Innalabs Technologies, Inc. | Sensing element of coriolis force gyroscope |
| CN101860338A (en) * | 2010-06-03 | 2010-10-13 | 西北工业大学 | Closed-loop driving circuit for micromechanical resonance structure |
| CN102297690A (en) * | 2011-07-22 | 2011-12-28 | 上海交通大学 | Piezoelectricity driven capacitance detecting two-axis gyroscope |
| CN105758402A (en) * | 2016-03-31 | 2016-07-13 | 苏州大学 | Closed-loop detection system of silicon micromachined gyro |
| JP2016156810A (en) * | 2015-02-10 | 2016-09-01 | ノースロップ グラマン システムズ コーポレイションＮｏｒｔｈｒｏｐ Ｇｒｕｍｍａｎ Ｓｙｓｔｅｍｓ Ｃｏｒｐｏｒａｔｉｏｎ | Bias and scale-factor error mitigation in coriolis vibratory gyroscope system |
-
2018
- 2018-01-26 CN CN201810077617.1A patent/CN108332733B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20060266116A1 (en) * | 2005-05-31 | 2006-11-30 | Innalabs Technologies, Inc. | Coriolis force gyroscope with high sensitivity |
| US20100154542A1 (en) * | 2005-05-31 | 2010-06-24 | Innalabs Technologies, Inc. | Sensing element of coriolis force gyroscope |
| CN101520327A (en) * | 2008-02-29 | 2009-09-02 | 精工爱普生株式会社 | Physical quantity measuring apparatus and electronic device |
| CN101860338A (en) * | 2010-06-03 | 2010-10-13 | 西北工业大学 | Closed-loop driving circuit for micromechanical resonance structure |
| CN102297690A (en) * | 2011-07-22 | 2011-12-28 | 上海交通大学 | Piezoelectricity driven capacitance detecting two-axis gyroscope |
| JP2016156810A (en) * | 2015-02-10 | 2016-09-01 | ノースロップ グラマン システムズ コーポレイションＮｏｒｔｈｒｏｐ Ｇｒｕｍｍａｎ Ｓｙｓｔｅｍｓ Ｃｏｒｐｏｒａｔｉｏｎ | Bias and scale-factor error mitigation in coriolis vibratory gyroscope system |
| CN105758402A (en) * | 2016-03-31 | 2016-07-13 | 苏州大学 | Closed-loop detection system of silicon micromachined gyro |
Non-Patent Citations (6)
| Title |
|---|
| HUAN-MING WU 等: "Integrated Gm-C based PI controller for MEMS gyroscope drive loop", 《2011 9TH IEEE INTERNATIONAL CONFERENCE ON ASIC》 * |
| 李海涛 等: "钟形振子式角速率陀螺驱动控制技术研究", 《传感技术学报》 * |
| 李芊 等: "振动式微机械陀螺驱动控制电路研究", 《传感技术学报》 * |
| 肖定邦 等: "微陀螺闭环驱动方法", 《国防科技大学学报》 * |
| 陶溢: "杯形波动陀螺关键技术研究", 《中国博士学位论文全文数据库信息科技辑》 * |
| 龙善丽 等: "一种新的硅MEMS陀螺仪四相位闭环集成驱动电路", 《微电子学》 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108332733B (en) | 2020-05-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10209270B2 (en) | Inertial sensors | |
| CN108253952B (en) | Zero-bias self-calibration MEMS gyroscope and zero-bias self-calibration method thereof | |
| US7874209B2 (en) | Capacitive bulk acoustic wave disk gyroscopes with self-calibration | |
| JP2005530124A (en) | Cloverleaf microgyroscope with electrostatic alignment and tuning | |
| Cho et al. | 1.5-million Q-factor vacuum-packaged birdbath resonator gyroscope (BRG) | |
| JP2007519925A (en) | Micromachined vibratory gyroscope with electronic coupling and method | |
| JP2003520951A (en) | Multi-axis sensing device | |
| CN114383590B (en) | Phase error identification and compensation method of rate integral gyroscope | |
| CN110686662A (en) | Dual-mode differential resonant gyroscope system capable of realizing online self-calibration | |
| Zhou et al. | Innovation of flat gyro: Center support quadruple mass gyroscope | |
| EP2685210A2 (en) | Class ii coriolis vibratory rocking mode gyroscope with central fixed post | |
| Liu et al. | Digital closed-loop control based on adaptive filter for drive mode of a MEMS gyroscope | |
| CN106289209A (en) | A kind of gyroscope control method being applicable to wide-range and control system | |
| CN108332732A (en) | The driving of micromechanics simple oscialltor three-axis gyroscope and detection device | |
| CN108318019A (en) | The method for measuring three axis angular rates of micromechanics simple oscialltor three-axis gyroscope | |
| Fan et al. | High performance MEMS disk gyroscope with force-to-rebalance operation mode | |
| EP3665436A1 (en) | A silicon multi-mode coriolis vibratory gyroscopes having high order rotationally symmetric mechanical structure and 32 electrodes | |
| CN108253953A (en) | The demodulating system and demodulating equipment of a kind of MEMS gyroscope | |
| CN108332733A (en) | The driving of micromechanics simple oscialltor three-axis gyroscope and detection device | |
| CN108332734B (en) | Method for measuring three-axis angular velocity of micro-mechanical single-vibrator three-axis gyroscope | |
| CN108332731B (en) | Micro-mechanical single-vibrator three-axis gyroscope | |
| Prikhodko et al. | Pseudo-extensional mode MEMS ring gyroscope | |
| CN108318018A (en) | Micromechanics simple oscialltor three-axis gyroscope | |
| CN109556590B (en) | Resonance ring/multi-resonance ring six-axis inertial sensor | |
| Cui et al. | In-situ mode-matching control for a single-chip horizontal dual-axis MEMS gyroscope based on modulating quadrature coupling with silicon gratings |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |