CN108592900A - A kind of four vertical bar shape mass block silicon micromechanical gyroscopes - Google Patents
A kind of four vertical bar shape mass block silicon micromechanical gyroscopes Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
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Abstract
The present invention provides a kind of four vertical bar shape mass block silicon micromechanical gyroscopes, including upper layer mass block structure, middle level silicon micro-sensor structure, underlying substrate structure, upper layer mass block structure includes four cylinder mass blocks, four cylinder mass blocks are bonded in four mass block tray centers of silicon micro-sensor structure respectively, and middle level silicon micro-sensor structure is bonded in by anchor point in underlying substrate；The micro- silicon sensor structure in middle level includes centrally located detection minor structure, four mass block pallets for being connected to detection minor structure surrounding, the driving minor structure being connected between adjacent two mass blocks pallet, is also connected by detecting coupled beams between adjacent two mass pallet；Underlying substrate is equipped with contact conductor.This gyroscope can realize that vertical axis angular rate is sensitive, have many advantages, such as to drive and detection frequency is low, high sensitivity.
Description
Technical field
The invention belongs to microelectromechanical systems and micro-inertia measuring technical field, are related to a kind of four vertical bar shape mass blocks
Silicon micromechanical gyroscope is more specifically to be related to a kind of four vertical bar shape quality can be used for vertical axis angular rate sensitivity
Block silicon micromechanical gyroscope.
Background technology
Micro mechanical system (MEMS) is that occur with the development of Integrated circuit IC manufacturing technology in the 1950s.
By manufacturing the integrated effector such as micro mechanical structure, microsensor, microactrator, signal processing circuit, power supply on chip
Part and unit realize the multiple functions such as perception, measurement, driving to external signal.Micro-system as one cover machinery, electronics,
The material of the foreword ambit of the subjects height intersection such as physics, chemistry, biology, material, typical sizes and its processing
Generally in the micron-scale, even nanoscale, therefore various microminiature devices can be produced, to meet the design requirement of product.
The effect of gyroscope is the angle or angular speed for detecting its carrier, is a kind of mature, widely used
Inertia device.MEMS gyroscope using its micromation, it is integrated the advantages that and as a kind of novel gyroscope having a high potential,
The fields such as consumer electronic device, inertial navigation system, aircraft guidance and control, auto navigation and safety, military weapon have
Many applications.
In recent years, research institution both domestic and external starts to have carried out MEMS gyroscope certain research.Italian Piza is big
GiomiE et al. develops a kind of gyroscope arrangement symmetrical by eight pieces of plates, may be implemented to extraneous input angle speed
The sensitivity of degree.But the silicon micro-gyroscope driving of most of mechanism research and development and detection frequency are higher at present, to limit gyro
Instrument detects the improvement of signal and sensitivity.
Invention content
To solve the above problems, the present invention provides a kind of four vertical bar shape quality that vertical axis angular rate sensitivity may be implemented
Block silicon micromechanical gyroscope has many advantages, such as to drive and detection frequency is low, high sensitivity.
In order to achieve the above object, the present invention provides the following technical solutions：
A kind of four vertical bar shape mass block silicon micromechanical gyroscopes, including upper layer mass block structure, middle level silicon micro-sensor
Structure, underlying substrate structure, upper layer mass block structure include four cylinder mass blocks, four cylinder mass blocks difference
Four mass block tray centers of silicon micro-sensor structure are bonded in, middle level silicon micro-sensor structure is bonded in lower layer by anchor point
On substrate；The micro- silicon sensor structure in middle level includes centrally located detection minor structure, is connected to four of detection minor structure surrounding
Mass block pallet and the driving minor structure being connected between adjacent two mass blocks pallet, it is also logical between adjacent two mass pallet
Cross the connection of detection coupled beams；Underlying substrate is equipped with contact conductor.
Further, the mass block is made of SU-8/ silicon/structural steel alloy.
Further, the detection minor structure includes center anchor point, is connected to four of center anchor point surrounding completely
Identical detection comb structure, four identical detection decoupling beams for being connected to each detection comb structure end；Often
A detection comb structure is connected by U-shaped elastic connection beam with center anchor point, and detection decoupling beam is far from detection comb structure
One end is connect with quality pallet.
Further, each detection comb structure includes that detection movable comb braces and the first, second, third, fourth detection are solid
Determine broach frame, the first detection fixed broach frame is positioned opposite with the second detection fixed broach frame and broach arm is isometric, third detection
The broach arm of fixed broach frame and the 4th detection fixed broach frame are positioned opposite and broach arm is isometric, and first, second, third, the
Four detection fixed broach framves form detection comb pole plate group with detection movable comb braces to inserting.
Further, the driving minor structure include two identical first, second driving comb structures, two it is complete
The first, second exactly the same driving coupled beams and four identical first, second, third, fourth driving support constructions,
First driving comb structure is connected with the second driving comb structure by the first driving coupled beams and the second driving coupled beams, and first
Driving support construction and the second driving support construction are connected with the first driving comb structure, and third drives support construction and 4 wheel driven
Dynamic support construction is connected with the second driving comb structure.
Further, the driving comb structure includes fan-shaped driving movable comb braces, the first, second driving fixed broach
Frame and the first, second driving detection fixed broach frame, the first driving fixed broach frame, the second driving fixed broach frame with it is fan-shaped
Driving movable comb braces forms driving comb pole plate group to inserting, and the first driving detection fixed broach frame, the second driving detection are fixed
Broach frame forms driving detection comb pole plate group with fan-shaped driving movable comb braces to inserting.
Further, the driving support construction includes a U-shaped spring beam and an anchor point being connect with spring beam.
Further, the mass block pallet includes main body pallet, is located at two of the left and right sides in the middle part of main body pallet
It is swung outside a symmetrical connection structure, the symmetrical plane of two be connected at left and right sides of main body tray top and inhibits knot
Structure, connection structure are connect by two driving decoupling beams with main body pallet, and it includes that two swings inhibit that inhibition structure is swung outside plane
Beam and an anchor point.
Further, the electrode in underlying substrate is divided into several groups, and the grouping of these electrodes is silicon micro-sensor knot with middle level
Each detection comb frame, driving fixed broach frame, driving detection fixed broach frame in structure, center anchor point, the cutting of gyroscope outer layer
It is connected respectively with extraction electrode after layer protection structure bonding.
Further, the substrate is made of boryl glass.
Compared with prior art, the invention has the advantages that and advantageous effect：
1. the present invention uses 3 D stereo mass block structure, the quality size of gyroscope sensitive-mass block is increased, to
Gyroscope driving and sensed-mode frequency are reduced, the sensitivity of detection is improved.
2. using four mass block structures, the Differential Detection that four mass blocks move under coriolis force effect is realized, to have
Suppression common mode interference is imitated, output signal is increased.
3. driving the design of coupled beams, realizes driving comb structure, four mass block pallets and be arranged in mass block
The movement of column mass block on pallet couples, and is conducive to the energy transmission between driving comb structure.
4. detecting the design of coupled beams, the movement coupling between detection comb structure is realized, detection comb knot is conducive to
Energy transmission between structure is conducive to the Differential Detection of output signal.
5. the design of driving decoupling beam and detection decoupling beam realizes driving minor structure and detects the movement between minor structure
Decoupling reduces the energy transmission between drive motion and detection movement, to reduce output noise signal, improves signal-to-noise ratio.
6. swing the design for inhibiting structure and driving support construction outside plane, can effectively inhibit gyroscope driven-mode and
Sensed-mode is the movement of Z axis outside plane, to improve the structural stability of gyroscope.
Description of the drawings
Fig. 1 is whole machinery of the present invention for four vertical bar shape mass block silicon micro-gyroscopes of vertical axis angular rate sensitivity
Structural upright schematic diagram.
Fig. 2 is the vertical view of Fig. 1.
Fig. 3 is the floor map for detecting minor structure.
Fig. 4 is the floor map of the first driving minor structure；
Fig. 5 is the floor map of the first mass block pallet；
Fig. 6 is glass substrate signal lead schematic diagram.
Specific implementation mode
Technical solution provided by the invention is described in detail below with reference to specific embodiment, it should be understood that following specific
Embodiment is only illustrative of the invention and is not intended to limit the scope of the invention.
The four vertical bar shape mass block silicon micromechanical gyroscopes provided by the invention that vertical axis angular rate sensitivity may be implemented,
As depicted in figs. 1 and 2, including upper, middle and lower-ranking structure, it is at the middle and upper levels four cylinder mass blocks, middle level is silicon micro sensing
Device structure, lower layer are the boryl glass substrate equipped with contact conductor.Cylinder mass block 1-1,1-2,1-3,1-4 arrangement are in middle level
Four mass block tray centers in silicon micro-sensor structure, using materials such as SU-8/ silicon/structural steel alloys.The middle level silicon
Micro-sensor structure is bonded in by anchor point in lower layer's glass substrate.
The structure of the micro- silicon sensor in middle level includes a detection minor structure 5, four identical detection coupled beams
4-1,4-2,4-3,4-4, four identical driving minor structure 2-1,2-2,2-3,2-4 and four identical quality
Block pallet 3-1,3-2,3-3,3-4.Wherein the first mass block pallet 3-1 is located at 5 upside of detection minor structure, the second mass block pallet
3-2 is located at 5 left side of detection minor structure, and third mass block pallet 3-3 is located at 5 downside of detection minor structure, the 4th mass block 3-4 pallets
Positioned at 5 right side of detection minor structure.It is coupled by the first detection between first mass block pallet 3-1 and the second mass block pallet 3-2
Beam 4-1 is connected, and is connected by the second detection coupled beams 4-2 between the second mass block pallet 3-2 and third mass block pallet 3-3,
Coupled beams 4-3 is detected between third mass block pallet 3-3 and the 4th mass block pallet 3-4 by third to be connected, the 4th mass block
It is connected by the 4th detection coupled beams 4-4 between pallet 3-4 and the first mass block pallet 3-1.First driving minor structure 2-1 is located at
Between first mass block pallet 3-1 and the second mass block pallet 3-2, the second driving minor structure 2-2 is located at the second mass block pallet
Between 3-2 and third mass block pallet 3-3, third driving minor structure 2-3 is located at third mass block pallet 3-3 and the 4th mass block
Between pallet 3-4,4 wheel driven Structure of mover 2-4 is between the 4th mass block pallet 3-4 and the first mass block pallet 3-1.
As shown in figure 3, the detection minor structure in the present invention includes a center anchor point 501, four identical U-shaped bullets
Property tie-beam 502a, 502b, 502c, 502d, four 504,505,506,507 and four, identical detection comb structures
Identical detection decoupling beam 503a, 503b, 503c, 503d.First detection comb structure 504 is located on center anchor point 501
Side is connected by the first U-shaped elastic connection beam 502a with center anchor point 501；Second detection movable comb braces 505 is located at central anchor
501 left side of point, is connected by the second U-shaped elasticity 502b tie-beams with center anchor point 501；Third detects movable comb braces 506
In 501 downside of center anchor point, it is connected with center anchor point 501 by third U-shaped elastic connection beam 502c；4th detection activity broach
Frame 507 is located at 501 right side of center anchor point, is connected with center anchor point 501 by the 4th U-shaped elastic connection beam 502d；First detection
Decoupling one end beam 503a is connected with the first detection movable comb braces 504, and the other end is connected with the first mass block pallet 3-1；Second
Detection decoupling one end beam 503b is connected with the second detection movable comb braces 505, and the other end is connected with the second mass block pallet 3-2；
Third detection decoupling one end beam 503c is connected with third detection movable comb braces 506, the other end and third mass block pallet 3-3 phases
Even；4th detection decoupling one end beam 503d is connected with the 4th detection movable comb braces 507, the other end and the 4th mass block pallet 3-
4 are connected.
The first detection comb structure 504, the second detection comb structure 505, third detection comb structure in the present invention
506,507 structure of the 4th detection comb structure is identical and adjacent spaces are 90 degree.Specifically with the first detection comb structure 504
For, the first detection comb structure 504 by detection movable comb braces 504a and detection fixed broach frame 504b, 504c, 504d,
504e is formed.First detection fixed broach frame 504b is positioned opposite with the second detection fixed broach frame 504c and broach arm is isometric,
Third detects the broach arm of fixed broach frame 504d and the 4th and detects that fixed broach frame 504e is positioned opposite and broach arm is isometric.The
One detection fixed broach frame 504b, the second detection fixed broach frame 504c, third detection fixed broach frame 504d, the 4th detection are solid
Determine broach frame 504e and detection movable comb braces 504a and forms detection comb pole plate group to inserting.
The first driving minor structure 2-1, the second driving minor structure 2-2 in the present invention, third drive minor structure 2-3, the 4th
It drives minor structure 2-4 structures identical and adjacent spaces is 90 degree.As shown in figure 4, being with the first driving minor structure 2-1 specifically
Example, the first driving minor structure 2-1 is by two identical driving comb structures 201,202, two identical driving couplings
It closes beam 203a, 203b and four identical driving support constructions 204,205,206,207 forms.First driving comb
Structure 201 is connected with the second driving comb structure 202 by the first driving coupled beams 203a and the second driving coupled beams 203b.The
One driving support construction 204 and second drives support construction 205 to be connected with the first driving comb structure 201, third driving support
Structure 206 and the 4th drives support construction 207 to be connected with the second driving comb structure 202.
The first driving comb structure 201 in the present invention is identical with 202 structure of the second driving comb structure.Specifically with
For first driving comb structure 201, the first driving comb structure 201 drives movable comb braces 201a, driving to fix by sector
Broach frame 201b, 201c, driving detection fixed broach frame 201d, 201e composition.First driving fixed broach frame 201b, second drive
Dynamic fixed broach frame 201c and driving movable comb braces 201a forms driving comb pole plate group to inserting.The first fixed comb of driving detection
Braces 201d, the second driving detection fixed broach frame 201e and driving detection movable comb braces 201a form driving detection comb to inserting
Tooth pole plate group.
The first driving support construction 204, second in the present invention drives support construction 205, third to drive support construction
206, the 4th driving 207 structure of support construction is identical.Specifically by taking the first driving support construction 204 as an example, the first driving branch
Support structure 204 is made of a U-shaped spring beam 204b and anchor point 204a.
The first mass block pallet 3-1, the second mass block pallet 3-2, third mass block pallet 3-3 in the present invention, the 4th
Mass block pallet 3-4 structures are identical and adjacent spaces are 90 degree.As shown in figure 5, being with the first mass block pallet 3-1 specifically
Example, the first mass block pallet 3-1 is by a main body pallet 301, and two identical connection structures 302a, 302b, four complete
Exactly the same driving decouples beam 305a, 305b, 305c, 305d and two are mirrored into swing outside symmetrical plane and inhibit structure
303,304 composition.First connection structure 302a is located at 301 left side of main body pallet, and beam 305a and second is decoupled by the first driving
Driving decoupling beam 305c is connected with main body pallet 301；Second connection structure 302b is located at 301 right side of main body pallet, passes through third
The driving driving decouplings of decoupling beam 305b and the 4th beam 305d is connected with main body pallet 301.Two connection structure concave portions connect respectively
It is connected between two driving support constructions of adjacent driven minor structure side.Being swung outside first plane inhibits structure 303 to be located at main body
301 upper left-hand of pallet, the second plane is swung outside inhibits structure 304 to be located at 301 upper right of main body pallet.
Swinging to inhibit to swing outside structure 303 and the second plane outside the first plane in the present invention inhibits 304 knot of structure to constitute
Mirror symmetry.Being swung specifically for being swung outside the first plane and inhibit structure 303, outside the first plane inhibits structure 303 by first
It swings and beam 303b, second is inhibited to swing inhibition beam 303c and anchor point 303a compositions.
Distribution of electrodes in glass substrate and signal lead in the present invention is as shown in Figure 6.Electrode 606a, 606b, 606c,
606d, 606e, 606f, 606g, 606h respectively with detection fixed broach frame 505b, 505d, 507d, 507b, 504c, 504e,
506e, 506c are bonded, and are connected by signal lead and are connected with extraction electrode 601a；Electrode 607a, 607b, 607c,
607d, 607e, 607f, 607g, 607h respectively with detection fixed broach frame 505c, 505e, 507e, 507c, 504b, 504d,
506d, 506b are bonded, and are connected by signal lead and are connected with extraction electrode 601b；Electrode 608a, 608b, 608c,
608d is bonded with driving fixed broach frame 202b, 202c, 201c, 201b in the first driving minor structure 2-1 respectively, and passes through letter
Number lead is connected and is connected with extraction electrode 605a；Electrode 609a, 609b, 609c, 609d are tied with the first driving respectively
Driving detection fixed broach frame 202d, 202e, 201e, 201d bonding in structure 2-1, and be connected by signal lead and with draw
Go out electrode 604a to be connected；Electrode 608e, 608f, 608g, 608h are fixed with the driving in the second driving minor structure 2-2 comb respectively
Braces 202b, 202c, 201c, 201b bonding, and be connected by signal lead and be connected with extraction electrode 605b；Electrode
609e, 609f, 609g, 609h respectively in the second driving minor structure 2-2 driving detection fixed broach frame 202d, 202e,
201e, 201d are bonded, and are connected by signal lead and are connected with extraction electrode 604b；Electrode 608i, 608j, 608k,
608l is bonded with driving fixed broach frame 202b, 202c, 201c, 201b in third driving minor structure 2-3 respectively, and passes through letter
Number lead is connected and is connected with extraction electrode 605c；Electrode 609i, 609j, 609k, 609l drive son knot with third respectively
Driving detection fixed broach frame 202d, 202e, 201e, 201d bonding in structure 2-3, and be connected by signal lead and with draw
Go out electrode 604c to be connected；Electrode 608m, 608n, 608o, 608p are fixed with the driving in 4 wheel driven Structure of mover 2-4 comb respectively
Braces 202b, 202c, 201c, 201b bonding, and be connected by signal lead and be connected with extraction electrode 605d；Electrode
609m, 609n, 609o, 609p respectively in 4 wheel driven Structure of mover 2-4 driving detection fixed broach frame 202d, 202e,
201e, 201d are bonded, and are connected by signal lead and are connected with extraction electrode 604d；Electrode 610a, 610b and center
Anchor point 501 is bonded, and is connected respectively with extraction electrode 602a, 602b by signal lead；Electrode 611a, 611b and gyroscope
Outer layer incised layer protects structure bonding, and is connected respectively with extraction electrode 603a, 603b by signal lead.
Gyroscope in the present invention is when applying driving voltage and having the i.e. Z axis turning rate input of vertical axis, four mass blocks
Under the driving comb effect of pallet and the mass block that is bonded on mass block pallet in the driving minor structure of both sides circumferentially
Tangential direction does reciprocal simple harmonic motion, and four mass block pallets and the mass block that is bonded on mass block pallet can be in brothers
Circumferentially reciprocal simple harmonic motion is done in radial line direction under family name's force effect.It, can be with by detecting the capacitance variations of detection comb pole plate group
Realize the measurement of angular speed.
It is analyzed according to vibration mechanics it is found that the kinetics equation of oscillatory type silicon micro-gyroscopes is：
Wherein, fxFor driving force,For coriolis force, m is mass block quality, and x is the driving direction displacement of mass block,
cxFor driving direction damped coefficient, kxFor detection direction displacement that driving direction coefficient of elasticity, y are mass block, cyFor detection direction
Damped coefficient, kyFor detection direction coefficient of elasticity.Above formula is four vertical bar shape mass block silicon micromechanical gyroscopes in the present invention
The drive shaft forced vibration equation of the single mass block of instrument and the detection axis vibration equation generated due to coriolis force effect.
If electrostatic drive power is fx=AFsinωdT, wherein AFFor the amplitude of driving force, ωdIt, will for electrostatic drive angular frequency
It brings formula (1) into, can be in the hope of vibrating the displacement of single mass block in the driven direction：
In formula,For the intrinsic frequency of driven-mode,For the damping ratio of driven-mode, mxTo drive
Dynamic direction equivalent mass, t is the time.PhaseDefine driving amplitude
When gyro input axis is rotated relative to inertial space with angular velocity vector Ω, definitionFor sensed-mode
Intrinsic frequency,For the damping ratio of sensed-mode.Can must vibrate the displacement in detection direction of single mass block is：
In formula, phaseOscillation Amplitude in detection direction is：
Synthesis can obtain, and the mechanical sensitivity of four vertical bar shape mass block silicon micromechanical gyroscopes in the present invention is
By above-mentioned derivation it is found that under the premise of knowing driving force amplitude and angular frequency, four vertical bar shape mass block silicon are micro-
Mechanical gyroscope passes through the detection of the capacitance size to detecting capacitance pole board group, Wo Menke when being acted on by Z axis angular velocity vector Ω
Oscillation Amplitude of the mass block in detection axis direction is calculated, the size of angular velocity Ω is retrodicted, to realize to outside
Input the sensitivity of Z axis angular speed.
The technical means disclosed in the embodiments of the present invention is not limited only to the technological means disclosed in the above embodiment, further includes
By the above technical characteristic arbitrarily the formed technical solution of combination.It should be pointed out that for those skilled in the art
For, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also considered as
Protection scope of the present invention.
Claims (10)
1. a kind of four vertical bar shape mass block silicon micromechanical gyroscopes, including upper layer mass block structure, middle level silicon micro-sensor knot
Structure, underlying substrate structure, underlying substrate are equipped with contact conductor, it is characterised in that：Upper layer mass block structure includes four cylinders
Constitution gauge block, four cylinder mass blocks are bonded in four mass block tray centers of silicon micro-sensor structure respectively, in
Layer silicon micro-sensor structure is bonded in by anchor point in underlying substrate；The micro- silicon sensor structure in middle level includes centrally located detection
Minor structure is connected to four mass block pallets for detecting minor structure surrounding and is connected between adjacent two mass blocks pallet
Minor structure is driven, is also connected by detecting coupled beams between adjacent two mass pallet.
2. four vertical bar shape mass block silicon micromechanical gyroscope according to claim 1, it is characterised in that：The mass block
It is made of SU-8/ silicon/structural steel alloy.
3. four vertical bar shape mass block silicon micromechanical gyroscope according to claim 1, it is characterised in that：Detection
Structure includes center anchor point, is connected to four identical detection comb structures of center anchor point surrounding, is separately connected
Beam is decoupled in four identical detections of each detection comb structure end；Each detection comb structure passes through U-shaped elasticity
Tie-beam is connected with center anchor point, and the one end of detection decoupling beam far from detection comb structure is connect with quality pallet.
4. four vertical bar shape mass block silicon micromechanical gyroscope according to claim 3, it is characterised in that：Each detection comb
Structure includes detection movable comb braces and the first, second, third, fourth detection fixed broach frame, the first detection fixed broach frame
Positioned opposite and broach arm is isometric with the second detection fixed broach frame, third detects the broach arm of fixed broach frame and the 4th and detects
Fixed broach frame is positioned opposite and broach arm is isometric, the first, second, third, fourth detection fixed broach frame and detection movable comb
Braces forms detection comb pole plate group to inserting.
5. four vertical bar shape mass block silicon micromechanical gyroscope according to claim 1, it is characterised in that：Driving
Structure includes two identical first, second driving comb structures, two identical first, second driving coupled beams
And four identical first, second, third, fourth driving support constructions, the first driving comb structure and the second driving
Comb structure is connected by the first driving coupled beams and the second driving coupled beams, the first driving support construction and the second driving support
Structure is connected with the first driving comb structure, and third drives support construction and the 4th driving support construction and the second driving comb knot
Structure is connected.
6. four vertical bar shape mass block silicon micromechanical gyroscope according to claim 5, it is characterised in that：The driving comb
Toothing includes fan-shaped driving movable comb braces, and the first, second driving fixed broach frame and the first, second driving detection are fixed
Broach frame, the first driving fixed broach frame, the second driving fixed broach frame and fan-shaped driving movable comb braces form driving to inserting
Broach pole plate group, the first driving detection fixed broach frame, the second driving detection fixed broach frame and fan-shaped driving movable comb braces
Driving detection comb pole plate group is formed to inserting.
7. four vertical bar shape mass block silicon micromechanical gyroscope according to claim 5, it is characterised in that：The driving branch
Support structure includes a U-shaped spring beam and an anchor point being connect with spring beam.
8. four vertical bar shape mass block silicon micromechanical gyroscope according to claim 1, it is characterised in that：The mass block
Pallet includes main body pallet, is located at two symmetrical connection structures of the left and right sides in the middle part of main body pallet, is connected to
Swung outside two symmetrical planes at left and right sides of main body tray top and inhibit structure, connection structure by two drivings decouple beams with
Main body pallet connects, and swing inhibition structure is swung including two outside plane inhibits beam and an anchor point.
9. four vertical bar shape mass block silicon micromechanical gyroscope according to claim 1, it is characterised in that：In underlying substrate
Electrode be divided into several groups, these electrodes grouping with middle level be silicon micro-sensor structure in each detection comb frame, driving fix
Broach frame drives detection fixed broach frame, center anchor point, gyroscope outer layer incised layer protection structure electric with extraction respectively after being bonded
Pole is connected.
10. the four vertical bar shape mass block silicon micromechanical gyroscopes according to claim 1 or 9, it is characterised in that：The lining
Bottom is made of boryl glass.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110850110A (en) * | 2019-10-09 | 2020-02-28 | 东南大学 | Pipeline side line array device based on bionic resonance hair sensor |
| CN111623762A (en) * | 2020-05-25 | 2020-09-04 | 东南大学 | Annular array type four-mass coupling six-axis micro-inertial sensor and processing method thereof |
| CN114719833A (en) * | 2022-02-22 | 2022-07-08 | 瑞声开泰科技(武汉)有限公司 | MEMS gyroscope |
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| CN114719833A (en) * | 2022-02-22 | 2022-07-08 | 瑞声开泰科技(武汉)有限公司 | MEMS gyroscope |
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