CN112747731B - Five-mass-block double-axis detection silicon micro-resonant gyroscope based on out-of-plane vibration - Google Patents
Five-mass-block double-axis detection silicon micro-resonant gyroscope based on out-of-plane vibration Download PDFInfo
- Publication number
- CN112747731B CN112747731B CN202011588764.9A CN202011588764A CN112747731B CN 112747731 B CN112747731 B CN 112747731B CN 202011588764 A CN202011588764 A CN 202011588764A CN 112747731 B CN112747731 B CN 112747731B
- Authority
- CN
- China
- Prior art keywords
- mass block
- axis direction
- mass
- axis
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
Abstract
The invention discloses a five-mass-block double-axis detection silicon micro-resonance gyroscope based on out-of-plane vibration, which comprises a first mass block, a polar plate substrate, a transfer beam, 2 mass blocks in a symmetrical position sensitive Y-axis angular velocity, 2 mass blocks in a symmetrical position sensitive X-axis angular velocity, detection comb teeth, anchor points, a lever support beam and a frame. A capacitance structure is formed by the first mass block and the polar plate substrate, so that the first mass block generates simple harmonic vibration in the Z-axis direction, the simple harmonic motion is transmitted to the other four mass blocks through the support beams between the first mass block and the other four mass blocks, the other four mass blocks realize the simple harmonic motion in the Z-axis direction same as that of the first mass block, when the angular speed in the X-axis or Y-axis direction occurs, scientific force is generated on the four mass blocks, and the angular speed detection in the X-axis and Y-axis directions is realized through the comb tooth detection structure. The invention realizes the real-time, high-precision and high-sensitivity measurement of the out-of-plane vibration five-mass-block biaxial angular velocity.
Description
Technical Field
The invention belongs to the technical field of micro/nano electromechanical systems, and particularly relates to a five-mass-block double-shaft detection silicon micro-resonant gyroscope based on out-of-plane vibration.
Background
The gyroscope is a sensor for measuring the rotation angular velocity of a measured object in space, so that the gyroscope can be used for identifying the rotation angle of the object in unit time, is an important device in the field of inertial navigation, and plays an important role in aspects such as attitude control and the like. Conventional gyroscopes include mechanical rotor gyroscopes, liquid-floated gyroscopes, flexible gyroscopes, laser gyroscopes, and fiber optic gyroscopes, among others. Since the eighties of the last century, the micromachining based on IC technology has come to be applied to the manufacture of sensors, and the development of micromechanical gyroscopes has been greatly promoted due to the advent of the technology, and silicon micromechanical gyroscopes have been developed. In 1988, the first silicon micromachined gyroscope in the world was designed and manufactured by the Draper laboratory in the united states. The working principle of the micromechanical gyroscope is the same as that of the vibrating piezoelectric crystal gyroscope. But the processing method, the device characteristics, the application prospect and the like are obviously different from the piezoelectric crystal gyroscope. Micromechanical gyroscopes are fabricated on single crystal silicon or quartz crystals by semiconductor processing and have associated electronics integrated on the same chip. The combination of micro-electronics and micro-mechanics meets the requirements of cheap and low-precision gyros for automobiles, control, consumer electronics and the like.
The gyroscope is in a free vibration state when not being subjected to external force; when the gyroscope is forced to vibrate under the action of external force. When the driving frequency of the external force is as close as possible to the detection frequency of the gyroscope, the gyroscope is called to be in a resonance state. In the resonance state, the gyroscope can make simple harmonic motion with the maximum amplitude, and the maximum sensitivity is realized. The Japanese scholars develop a micro-mechanical gyroscope with comb-tooth electrostatic drive and Z-direction vibration of an angular velocity sensitive mass block under the action of Goldson force. The gyroscope is manufactured by utilizing a surface polysilicon processing technology, and high sensitivity is obtained by matching the resonant frequency of a driving mode and the resonant frequency of a detection mode by adopting ion etching to adjust structural parameters. The Berkeley division of California university reports a vibrating micro-mechanical Z-axis gyroscope integrating comb drive and comb capacitance detection manufactured by surface silicon micro-technology. The university of California's European school adopts two mechanical structures, and couple the energy of one component resonance to the second component, measure the motion of second component, realize the design of two degrees of freedom gyro structures.
Research and investigation aiming at the existing MEMS gyroscope structure are all used for measuring the single-axis angular velocity, and the solution for measuring the two axial angular velocities at the same time point is to orthogonally place the two single-axis gyroscopes to output two signals, namely to simultaneously use two single-axis gyroscopes to measure the two axial angular velocities, and does not realize simultaneous detection of the two axial angular velocities by one gyroscope structure. The five-mass-block double-shaft detection vibrating gyroscope based on out-of-plane vibration can meet the requirement that an independent device measures two axial angular velocities in real time, so that the gyroscope device for double-shaft detection in the inertia measurement unit has the advantages of small size and flexible structure.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: aiming at the characteristic that the existing MEMS vibrating gyroscope can only realize single-axis detection, the five-mass-block double-axis detection silicon micro-resonant gyroscope based on out-of-plane vibration can realize double-axis detection and has a flexible structure, and the detection of two axial angular velocities can be simultaneously finished by one device.
The technical scheme adopted by the invention for solving the technical problems is as follows: a five-mass-block double-shaft detection silicon micro-resonance gyroscope based on out-of-plane vibration comprises a first mass block, a polar plate substrate, a first mass block in the Y-axis direction, a first mass block in the X-axis direction, a second mass block in the Y-axis direction, a second mass block in the X-axis direction, a detection comb fixing structure, a detection comb movable structure, an anchor point mass block elastic beam, a mass block connecting beam, an anchor point frame connecting beam and a frame, wherein the detection comb fixing structure and the anchor point are fixed on the polar plate substrate; the first mass block is connected with the first mass block in the Y-axis direction, the first mass block in the X-axis direction, the second mass block in the Y-axis direction and the second mass block in the X-axis direction through mass block connecting beams respectively and is in a suspended state; the movable detection comb tooth structure is respectively connected with the first mass block in the Y-axis direction, the first mass block in the X-axis direction, the second mass block in the Y-axis direction and the second mass block in the X-axis direction into a whole, can realize displacement generated in the X-axis direction, the Y-axis direction and the Z-axis direction with the movable detection comb tooth structure, and forms a detection comb tooth capacitor with the fixed detection comb tooth structure; the frame is connected with the anchor point through the anchor point frame connecting beam to form a fixed structure; the first mass block in the Y-axis direction, the first mass block in the X-axis direction, the second mass block in the Y-axis direction and the second mass block in the X-axis direction are consistent in geometric size, and the vibration directions of the internal detection comb tooth fixing structure and the detection comb tooth movable structure are different.
Furthermore, the detection comb fixing structure is made of monocrystalline silicon and is fixed on the polar plate substrate as same as the anchor point material, and the thickness of the detection comb fixing structure is the same as that of the anchor point material; the first mass block in the Y-axis direction, the first mass block in the X-axis direction, the second mass block in the Y-axis direction, the second mass block in the X-axis direction, the movable structure of the detection comb teeth, the elastic beam of the anchor mass block, the mass block connecting beam, the anchor frame connecting beam and the frame are made of the same material and are in a suspended state by monocrystalline silicon, and the bottom layers are positioned on the same horizontal plane and have the same thickness.
Further, processing and molding the detection comb tooth fixing structure and the columnar root supporting part of the anchor point on a piece of monocrystalline silicon with a flat structure through a first etching process; processing and molding the first mass block, the first mass block in the Y-axis direction, the first mass block in the X-axis direction, the second mass block in the Y-axis direction, the second mass block in the X-axis direction, the anchor mass block elastic beam, the mass block connecting beam, the anchor frame connecting beam and the frame through a secondary etching process; processing and forming the movable detection comb tooth structure in the Y-axis direction first mass block, the X-axis direction first mass block, the Y-axis direction second mass block and the X-axis direction second mass block through a third etching process; finally, the processed silicon wafer is turned over, and the polar plate substrate is fixed on the opposite side of the first mass block, namely the other end face of the anchor point.
Furthermore, the first mass block in the Y-axis direction, the first mass block in the X-axis direction, the second mass block in the Y-axis direction, the second mass block in the X-axis direction, the movable structure of the detection comb teeth, the anchor mass block elastic beam, the mass block connecting beam, the anchor frame connecting beam and the frame are all on the same horizontal plane; the positions of the first mass block in the Y-axis direction and the second mass block in the Y-axis direction in the normal direction are completely symmetrical, the positions of the first mass block in the X-axis direction and the second mass block in the X-axis direction in the axial direction are completely symmetrical, the sizes of the first mass block in the X-axis direction and the second mass block in the X-axis direction are completely the same, and the two pairs of symmetrical structures can simultaneously sense the influences of the angular speed to be measured and the environment.
Furthermore, the first mass block of the gyroscope and the polar plate substrate form a capacitance structure, simple harmonic vibration of the first mass block in the out-of-plane (Z-axis) direction can be realized in the power-on state, the vibration is respectively transmitted to the first mass block in the Y-axis direction, the first mass block in the X-axis direction, the second mass block in the Y-axis direction and the second mass block in the X-axis direction through the mass block connecting beams, so that the four symmetrical mass blocks are in the resonance state in the out-of-plane (Z-axis) direction, when the angular velocity of the X-axis or the Y-axis is generated, the two pairs of mass blocks in the symmetrical state feel the displacement generated along the direction under the action of the formula force, and the displacement of the mass blocks drives the displacement of the movable structure of the internal detection comb teeth, so that the detection comb teeth enter the variable-gap capacitance detection working state, and the capacitance detection is realized. Therefore, the excitation-vibration pickup mode of the gyroscope is an electrical mode, an electrostatic drive mode and a capacitance detection mode.
The principle of the invention is as follows: the utility model provides a five quality piece biax detection silicon are resonant gyroscope a little based on off-plate vibration, includes first quality piece, polar plate substrate, the first quality piece of Y axle direction, the first quality piece of X axle direction, Y axle direction second quality piece, X axle direction second quality piece, detection broach fixed knot construct, detection broach movable structure, anchor point quality piece elastic beam, quality piece tie-beam, anchor point frame tie-beam and frame.
The detection comb tooth fixing structure and the anchor point are both fixed on the polar plate substrate; the first mass block in the Y-axis direction, the first mass block in the X-axis direction, the second mass block in the Y-axis direction and the second mass block in the X-axis direction are connected with the first mass block through mass block connecting beams to form an axisymmetric structure respectively, and the first mass block in the Y-axis direction, the first mass block in the X-axis direction, the second mass block in the Y-axis direction and the second mass block in the X-axis direction are consistent in size; the first mass block is connected with the anchor point through the anchor point frame connecting beam.
The first mass block is connected with the anchor point through the anchor point connecting beam, so that the first mass block, the first mass block in the Y-axis direction, the first mass block in the X-axis direction, the second mass block in the Y-axis direction and the second mass block in the X-axis direction are all in a suspended state on the same horizontal plane; the first mass block, the first mass block in the Y-axis direction, the first mass block in the X-axis direction, the second mass block in the Y-axis direction and the second mass block in the X-axis direction are made of the same material and can have the same vibration perpendicular to the plane of the mass blocks through the connection of the mass block connecting beams, so that a whole is formed.
The bottom of the detection comb fixing structure is connected with the polar plate substrate immovably, and the movable part of the detection comb is connected with the first mass block in the Y-axis direction, the first mass block in the X-axis direction, the second mass block in the Y-axis direction and the second mass block in the X-axis direction internally, can generate displacement along with the movement of the mass blocks and forms a detection capacitor structure with the detection comb fixing structure.
The first mass block is connected with the anchor point through the anchor point connecting beam, the anchor point connecting beam has high rigidity in the X axis direction and the Y axis direction, and the rigidity in the Z axis direction is low, so that the first mass block can move in the Z axis direction and the displacement in the X axis direction and the Y axis direction is low.
Compared with the prior art, the invention has the advantages that: according to the invention, the out-of-plane vibration generated by the first mass block drives other four axial mass blocks to simultaneously generate out-of-plane vibration, so that the two axial angular velocities are simultaneously measured by the other four mass blocks, the requirement of the same gyroscope structure on the detection of the two axial angular velocities is met, the gyroscope has smaller volume, faster detection of the two axial angular velocities and stronger impact resistance, the characteristics of better reliability, symmetrical measurement, reduction of common-mode interference and the like of the MEMS double-axis detection gyroscope are realized, and the MEMS double-axis detection gyroscope has great application potential in the fields of aviation, aerospace, navigation, industry and consumer electronics.
Drawings
FIG. 1 is a top view of a five-proof-mass two-axis detection vibrating gyroscope based on out-of-plane vibration according to the present invention;
FIG. 2 is a perspective view of a five-proof-mass two-axis detection vibrating gyroscope based on out-of-plane vibration according to the present invention;
FIG. 3 is a diagram of a sensing structure of a five-proof-mass two-axis detection vibrating gyroscope based on out-of-plane vibration according to the present invention;
FIG. 4 is a schematic view of the Korea effect;
FIG. 5 is a Coriolis acceleration analysis chart;
FIG. 6 is a parallel plate capacitance model.
In the figure: 1 is a first mass block; 2 is a polar plate substrate; 3 is a first mass block in the Y-axis direction; 4 is a first mass block in the X-axis direction; 5 is a second mass block in the Y-axis direction; 6 is a second mass block in the X-axis direction; 7 is a detection comb fixing structure; 8 is a movable structure of detection comb teeth; 9 is an anchor point; 10 is an anchor mass block elastic beam; 11 is a mass block connecting beam; 12 is an anchor point frame connecting beam; and 13 is a frame.
Detailed Description
The invention is further described with reference to the following figures and detailed description.
As shown in fig. 1-3, a five-mass-block two-axis detection resonant gyro angular velocity sensor based on out-of-plane vibration comprises a first mass block 1, a polar plate substrate 2, a first mass block 3 in the Y-axis direction, a first mass block 4 in the X-axis direction, a second mass block 5 in the Y-axis direction, a second mass block 6 in the X-axis direction, a detection comb fixing structure 7, a detection comb movable structure 8, an anchor point 9, an anchor point mass block elastic beam 10, a mass block connecting beam 11, an anchor point frame connecting beam 12 and a frame 13.
The gyroscope structure is made of silicon materials, the preparation of the silicon materials can be realized by selecting relatively mature bulk silicon or surface silicon process technology, the gyroscope structure is realized by utilizing an etching process and a silicon and polar plate substrate bonding process, and large-scale preparation and production are realized.
Cleaning a silicon wafer with a thicker thickness, performing first photoetching on 2 surfaces of one surface (the selected surface is considered to be a second surface, hereinafter, the surface is called 2 surfaces, and the other surface is called 1 surface), and performing first etching after photoetching to form a root columnar structure of the anchor point 9 and the detection comb tooth fixing structure 7 and an etched flat silicon wafer.
And performing second mask photoetching on the flat silicon wafer subjected to the first etching, and etching to obtain specific details and structures of the first mass block 1, the first mass block 3 in the Y-axis direction, the first mass block 4 in the X-axis direction, the second mass block 5 in the Y-axis direction, the second mass block 6 in the X-axis direction, the anchor point 9, the anchor point mass block elastic beam 10, the mass block connecting beam 11, the anchor point frame connecting beam 12 and the frame 13.
And carrying out third mask photoetching on the basis of the second etching, and etching comb tooth parts of the detection comb tooth fixing structure 7 and the detection comb tooth movable structure 8 to form a comb tooth detection structure.
The metal polar plate substrate and the root part of the columnar structure of the anchor point 9 and the detection comb fixing structure 7 on the 2 surface are bonded, and the whole gyroscope is placed on the metal polar plate substrate in a three-dimensional state to form a three-dimensional structure shown in figure 2.
The first mass block 1, the detection comb tooth fixing structure 7 and the detection comb tooth movable structure 8 are subjected to electrode bonding on the surface 1 through a silicon-electrode bonding process, so that the first mass block 1 can be driven by electric field force through electrodes, and the detection comb tooth fixing structure 7 and the detection comb tooth movable structure 8 can detect changes of capacitance values through the electrodes.
The sensitive structure part is shown in fig. 3, and the detection comb tooth capacitor structure formed by silicon material is manufactured by the second etching, and the detection comb tooth fixing structure 7 is fixed on the metal plate substrate 2 by the bonding of the metal plate substrate 2.
The principle and the working process of the invention are as follows: the first mass block 1 and the metal polar plate substrate 2 form a parallel plate capacitor structure, and electrostatic force is generated between the first mass block 1 and the metal polar plate substrate 2 through electrodes to drive the first mass block 1 to vibrate in the Z-axis direction. The first mass block 1 can only vibrate in the Z-axis direction due to the limitation of the anchor mass block elastic beam in the X-axis direction and the Y-axis direction. And the first mass block 3 in the Y-axis direction, the first mass block 4 in the X-axis direction, the second mass block 5 in the Y-axis direction and the second mass block 6 in the X-axis direction are driven by the elastic beam of the mass block to vibrate together in the Z-axis direction. Because the other four mass blocks are only driven by the mass block elastic beams and have no other axial limitation, the other four mass blocks can bear the vibration of the first mass block 1 in the Z-axis direction without damage, and the five mass blocks simultaneously vibrate at the same frequency.
When the angular velocity in the X axis direction occurs, the first mass block 3 located in the Y axis direction and the second mass block 5 located in the Y axis direction feel coriolis force to generate a small displacement in the Y axis direction, the movable detection comb teeth structure 8 located inside the first mass block 3 located in the Y axis direction and the second mass block 5 located in the Y axis direction generates displacement and changes with the capacitance output formed by the fixed detection comb teeth structure 7, and the detection of the angular velocity in the X axis direction is realized through the output of capacitance analog signals.
When the angular velocity in the Y axis direction occurs, the first mass block 4 and the second mass block 6 in the X axis direction feel coriolis force to generate a small displacement in the X axis direction, the movable detection comb teeth structure 8 inside the first mass block 4 and the second mass block 6 in the X axis direction generates a displacement and a capacitance output formed by the fixed detection comb teeth structure 7 changes, and the detection of the angular velocity in the Y axis direction is realized through the output of a capacitance analog signal.
In the present invention, the parallel plate capacitance formed by the first proof mass 1 and the metal plate substrate 2 provides the five proof masses with vibration in the Z-axis direction by electrostatic force so that the five proof masses are in a resonant state in the Z-axis direction. When two angular velocities in the X-axis direction and the Y-axis direction are input simultaneously, the first mass block 3 and the second mass block 5 in the Y-axis direction sense the angular velocity in the X-axis direction, the first mass block 4 and the second mass block 6 in the X-axis direction sense the angular velocity in the Y-axis direction, and the change of the Coriolis force is converted into the change of the variable-area capacitance output through the respective mass blocks, so that the measurement of the orthogonal axial angular velocity is realized.
As shown in fig. 5, let a be a static coordinate system oyx, and B be a moving coordinate system O 'X' Y 'Z', and rotate at an angular velocity Ω.
The displacement vector is then:
in the formula:
representing a displacement vector relative to the a coordinate system;
the displacement vector calculates the first derivative of time to be a velocity vector, and calculates the second derivative of time to be an acceleration vector, so that the following can be obtained:
in the formula (I), the compound is shown in the specification,
relative speed of the moving coordinate system B
the absolute acceleration of the moving point includes a bulk acceleration, a relative acceleration, and a coriolis acceleration.
The coriolis acceleration is:
direction perpendicular to the angle velocity of the drawing
And
plane of relative velocity. In the five-mass-block double-shaft detection resonant gyro angular velocity sensor based on out-of-plane vibration, a driving capacitor formed by a first mass block 1 and a polar plate substrate 2 enables the first mass block 1 to vibrate in a Z-axis direction to be a plane where a relative velocity is located, and when X-axis acceleration is generated to be a plane where a traction acceleration is located, a Coriolis acceleration is generated by a Y axis vertical to the Z axis and the X axis; similarly, when the acceleration of the Y axis occurs, the acceleration of Coriolis is generated by the X axis which is perpendicular to the Z axis and the Y axis, and then Coriolis force is generated.
As shown in FIG. 6, for the parallel plate capacitance model,. epsilon.is the dielectric constant of the parallel plate capacitance, L is the relative length, b is the relative width, d 0 For the spacing of the parallel plate capacitance, the capacitance is then expressed as:
by varying the relative length L and spacing d 0 A change in capacitance value may be achieved. The driving of the electrostatic force can be obtained by a change of the capacitance value. Similarly, when the capacitance value is changed by external force, the magnitude of the external force value can be obtained by detecting the change of the capacitance value.
Claims (1)
1. The utility model provides a five quality piece biax detection silicon are resonant gyroscope a little based on out-of-plane vibration, including first quality piece (1), polar plate substrate (2), the first quality piece of Y axle direction (3), the first quality piece of X axle direction (4), Y axle direction second quality piece (5), X axle direction second quality piece (6), detection broach fixed knot constructs (7), detection broach movable structure (8), anchor point (9), anchor point quality piece elastic beam (10), quality piece tie-beam (11), anchor point frame tie-beam (12) and frame (13), its characterized in that: the detection comb fixing structure (7) and the anchor points (9) are fixed on the polar plate substrate (2), and the first mass block (1) is connected with the anchor points (9) through anchor point mass block elastic beams (10), so that the first mass block (1) is in a suspended state and can meet simple harmonic vibration in the Z-axis direction; the first mass block (1) is connected with the first mass block (3) in the Y-axis direction, the first mass block (4) in the X-axis direction, the second mass block (5) in the Y-axis direction and the second mass block (6) in the X-axis direction through mass block connecting beams (11) respectively and is in a suspended state; the detection comb tooth movable structure (8) is respectively connected with the first mass block (3) in the Y-axis direction, the first mass block (4) in the X-axis direction, the second mass block (5) in the Y-axis direction and the second mass block (6) in the X-axis direction into a whole, can realize displacement generated in the X-axis direction, the Y-axis direction and the Z-axis direction with the detection comb tooth movable structure, and forms a detection comb tooth capacitor with the detection comb tooth fixed structure (7); the frame (13) is connected with the anchor point (9) through an anchor point frame connecting beam (12) to form a fixed structure; the first mass block (3) in the Y-axis direction, the first mass block (4) in the X-axis direction, the second mass block (5) in the Y-axis direction and the second mass block (6) in the X-axis direction are consistent in geometric size, and the vibration directions of the internal detection comb tooth fixing structure (7) and the detection comb tooth movable structure (8) are different;
the detection comb fixing structure (7) and the anchor point (9) are made of the same material and are made of the same monocrystalline silicon and fixed on the polar plate substrate (2), and the thicknesses of the monocrystalline silicon and the polar plate substrate are the same; the detection comb-tooth type silicon wafer detector comprises a Y-axis direction first mass block (3), an X-axis direction first mass block (4), a Y-axis direction second mass block (5), an X-axis direction second mass block (6), a detection comb-tooth movable structure (8), an anchor point mass block elastic beam (10), a mass block connecting beam (11), an anchor point frame connecting beam (12) and a frame (13), wherein the materials of the first mass block, the X-axis direction second mass block, the detection comb-tooth movable structure (8), the anchor point mass block elastic beam (10), the mass block connecting beam (11), the anchor point frame connecting beam (12) and the frame (13) are the same, monocrystalline silicon is in a suspended state, bottom layers are positioned on the same horizontal plane, and the thicknesses of the first mass block, the X-axis direction second mass block and the frame are the same;
processing and molding the detection comb tooth fixing structure (7) and the columnar root supporting part of the anchor point (9) on a piece of monocrystalline silicon with a flat structure by a primary etching process; processing and molding the first mass block (1), the Y-axis direction first mass block (3), the X-axis direction first mass block (4), the Y-axis direction second mass block (5), the X-axis direction second mass block (6), the anchor point mass block elastic beam (10), the mass block connecting beam (11), the anchor point frame connecting beam (12) and the frame (13) through a secondary etching process; processing and forming a movable detection comb tooth structure (8) in the structures of the first mass block (3) in the Y-axis direction, the first mass block (4) in the X-axis direction, the second mass block (5) in the Y-axis direction and the second mass block (6) in the X-axis direction by a third etching process; finally, turning the processed silicon wafer, and fixing a polar plate substrate on the opposite side of the first mass block (1), namely the other end face of the anchor point (9);
the first mass block (1), the first mass block (3) in the Y-axis direction, the first mass block (4) in the X-axis direction, the second mass block (5) in the Y-axis direction, the second mass block (6) in the X-axis direction, the detection comb movable structure (8), the anchor point mass block elastic beam (10), the mass block connecting beam (11), the anchor point frame connecting beam (12) and the frame (13) are all on the same horizontal plane; the positions of the first mass block (3) in the Y-axis direction and the position of the second mass block (5) in the Y-axis direction in the normal direction are completely symmetrical, the positions of the first mass block (4) in the X-axis direction and the position of the second mass block (6) in the X-axis direction in the axial direction are completely symmetrical, the sizes of the first mass block and the second mass block are completely the same, and the two pairs of symmetrical structures can simultaneously sense the influence of the angular speed to be measured and the environment;
the gyroscope first mass block (1) and a polar plate substrate (2) form a capacitance structure, simple harmonic vibration of the first mass block in the out-of-plane (Z-axis) direction can be realized in a power-on state, the vibration is respectively transmitted to a Y-axis first mass block (3), an X-axis first mass block (4), a Y-axis second mass block (5) and an X-axis second mass block (6) through mass block connecting beams (11), so that four symmetrical mass blocks are in a resonance state in the out-of-plane (Z-axis) direction, when the angular velocity of an X-axis or a Y-axis is generated, two pairs of mass blocks in the symmetrical state sense the effect of a scientific force to generate displacement along the direction, and the displacement of the mass blocks drives the displacement of an internal detection comb tooth movable structure (8) to enable the detection comb teeth to enter a variable gap type capacitance detection working state, so that capacitance detection is realized; therefore, the excitation-vibration pickup mode of the gyroscope is an electrical mode, an electrostatic drive mode and a capacitance detection mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011588764.9A CN112747731B (en) | 2020-12-28 | 2020-12-28 | Five-mass-block double-axis detection silicon micro-resonant gyroscope based on out-of-plane vibration |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011588764.9A CN112747731B (en) | 2020-12-28 | 2020-12-28 | Five-mass-block double-axis detection silicon micro-resonant gyroscope based on out-of-plane vibration |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112747731A CN112747731A (en) | 2021-05-04 |
| CN112747731B true CN112747731B (en) | 2022-09-23 |
Family
ID=75646550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011588764.9A Active CN112747731B (en) | 2020-12-28 | 2020-12-28 | Five-mass-block double-axis detection silicon micro-resonant gyroscope based on out-of-plane vibration |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112747731B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113280967B (en) * | 2021-05-08 | 2022-04-08 | 杭州电子科技大学 | Three-dimensional decoupling force touch sensor and MEMS (micro-electromechanical systems) preparation method |
| CN113566804B (en) * | 2021-06-08 | 2023-01-13 | 无锡职业技术学院 | Four-mass optical-electromechanical three-axis gyroscope of three-dimensional photonic crystal and processing method thereof |
| CN116147599B (en) * | 2023-04-18 | 2023-06-23 | 华芯拓远(天津)科技有限公司 | Four-mass full-differential double-shaft MEMS gyroscope |
| CN116182919B (en) * | 2023-04-23 | 2023-09-12 | 西北工业大学 | Triaxial high-temperature vibration sensor based on optical fiber F-P cavity and preparation method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102109534A (en) * | 2010-11-30 | 2011-06-29 | 南京理工大学 | Two-axis resonant silicon micro-accelerometer |
| CN102305626A (en) * | 2011-07-07 | 2012-01-04 | 西北工业大学 | Novel MEMS (micro electro mechanical system) centrifugal-type gyroscope |
| CN106597011A (en) * | 2016-12-23 | 2017-04-26 | 中北大学 | Double-shaft MEMS resonant acceleration transducer structure |
| CN109387191A (en) * | 2018-09-28 | 2019-02-26 | 清华大学 | A kind of high-temperature adaptability MEMS planar resonant gyroscope structure |
| CN110631568A (en) * | 2019-09-10 | 2019-12-31 | 东南大学 | Novel MOEMS (metal oxide semiconductor energy management system) double-shaft gyroscope based on two-dimensional photonic crystal cavity structure and processing method thereof |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4353087B2 (en) * | 2004-12-01 | 2009-10-28 | 株式会社デンソー | Rotational vibration type angular velocity sensor |
-
2020
- 2020-12-28 CN CN202011588764.9A patent/CN112747731B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102109534A (en) * | 2010-11-30 | 2011-06-29 | 南京理工大学 | Two-axis resonant silicon micro-accelerometer |
| CN102305626A (en) * | 2011-07-07 | 2012-01-04 | 西北工业大学 | Novel MEMS (micro electro mechanical system) centrifugal-type gyroscope |
| CN106597011A (en) * | 2016-12-23 | 2017-04-26 | 中北大学 | Double-shaft MEMS resonant acceleration transducer structure |
| CN109387191A (en) * | 2018-09-28 | 2019-02-26 | 清华大学 | A kind of high-temperature adaptability MEMS planar resonant gyroscope structure |
| CN110631568A (en) * | 2019-09-10 | 2019-12-31 | 东南大学 | Novel MOEMS (metal oxide semiconductor energy management system) double-shaft gyroscope based on two-dimensional photonic crystal cavity structure and processing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112747731A (en) | 2021-05-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112747731B (en) | Five-mass-block double-axis detection silicon micro-resonant gyroscope based on out-of-plane vibration | |
| US5723790A (en) | Monocrystalline accelerometer and angular rate sensor and methods for making and using same | |
| CN104807454B (en) | A kind of single-chip integration six degree of freedom micro inertial measurement unit and its processing method | |
| US9315376B2 (en) | Planar structure for a triaxial gyrometer | |
| CN108955663B (en) | Resonant double-shaft micro-mechanical wheel type gyroscope | |
| CN111623762B (en) | Annular array type four-mass coupling six-axis micro-inertial sensor and processing method thereof | |
| CN101441081B (en) | Vibration type micro-mechanical gyroscope | |
| CN101759136B (en) | Fully-decoupled vibrating micromechanical gyroscope | |
| CN1648673A (en) | Single chip double inertia parameter accelerometer gyroscope | |
| CN101746708B (en) | Fully-decoupled capacitance type micromachined gyroscope | |
| Shah et al. | Modal analysis of a single-structure multiaxis MEMS gyroscope | |
| CN113566804B (en) | Four-mass optical-electromechanical three-axis gyroscope of three-dimensional photonic crystal and processing method thereof | |
| CN116907466B (en) | Microelectromechanical triaxial gyroscope and electronic device | |
| CN110702088B (en) | Wheel type double-shaft micromechanical gyroscope | |
| Tsai et al. | Design and analysis of a tri-axis gyroscope micromachined by surface fabrication | |
| CN111780737B (en) | High-precision horizontal axis silicon micro gyroscope based on tuning fork driving effect | |
| CN201352121Y (en) | Vibratory micromachined gyroscope | |
| Yang et al. | A new silicon triaxial resonant micro-accelerometer | |
| CN112014597A (en) | Triaxial resonance capacitance type micro-electromechanical accelerometer | |
| Che et al. | A novel electrostatic-driven tuning fork micromachined gyroscope with a bar structure operating at atmospheric pressure | |
| CN110879059A (en) | Tunnel magnetoresistance effect micro-gyroscope device and method based on piezoelectric ceramic out-of-plane driving | |
| Xu et al. | Analytical and finite element analysis of a new tri-axial piezoelectric accelerometer | |
| Xu et al. | A monolithic triaxial micromachined silicon capacitive gyroscope | |
| CN201561983U (en) | Full-decoupling capacitor-type micro mechanical gyro for measuring angular speed | |
| CN201561758U (en) | Full decoupling vibration type micromechanical gyroscope for measuring angular speed |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |