CN1710383A - Tuning-type micro electro-mechanical gyroscope - Google Patents
Tuning-type micro electro-mechanical gyroscope Download PDFInfo
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- CN1710383A CN1710383A CN 200510040595 CN200510040595A CN1710383A CN 1710383 A CN1710383 A CN 1710383A CN 200510040595 CN200510040595 CN 200510040595 CN 200510040595 A CN200510040595 A CN 200510040595A CN 1710383 A CN1710383 A CN 1710383A
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Abstract
A micro - electromechanical gyroscope of tuning type features setting rotor and balance ring of gyroscope on driving shaft of motor, setting capacity top and bottom polar plates being fixed by fix - ring separately at top and bottom of gyroscopic rotor and balance ring and setting wire ring for transmitting output signal of capacity top and bottom polar plates on said fix - ring .
Description
Technical field
The present invention relates to a kind of gyro, relate in particular to a kind of tuning-type micro electro-mechanical gyroscope.
Background technology
Microelectromechanicgyroscope gyroscope is a class gyro that utilizes MEMS (micro electro mechanical system) (MEMS) fabrication techniques, has series of advantages such as volume is little, in light weight, cost is low, power consumption is little, good reliability, all is being with a wide range of applications aspect the army and the people two.Micro-electro-mechanical gyroscope has been subjected to the extensive attention of each developed country of the world since the invention of the middle and later periods eighties in last century, throw huge fund studied one after another.Micro-electro-mechanical gyroscope now adopts resonant mode mostly, and its structure mainly is made up of the mass extraneous vibration drive unit and the acceleration detecting of activity.Along the responsive pedestal of mass of a certain axially (x axle) vibration along another the axial angular velocity of (y axle), can produce along the 3rd direction of principal axis (z axle) (three orthogonal) De Geshi acceleration, can try to achieve base corner speed by the size that detects this Corioli's acceleration, there are two useful mode in such gyroscope, promptly drives mode and detects mode.In such gyrostatic design, in order to obtain higher sensitivity, need make gyroscope work in resonant condition, and it is approaching with driving mode to make it detect mode.Thereby problem such as brought poor stability, complex circuit, the linearity is low, precision is low.The occasion of low precision during the microelectromechanicgyroscope gyroscope of development is applied to mostly at present.
Dynamically tuned gyro, DTG is a kind of electro-mechanical gyro instrument that grows up the sixties in last century.A kind of typical dynamically tuned gyro, DTG structure.Drive motor is by driving shaft, and flexible coupling drives the gyrorotor high speed rotating.The structure of flexible coupling can guarantee that gyroscope is in sensitivity during perpendicular to the angular velocity of driving axial, gyrorotor produces the angular deflection signal with respect to housing, this signal detects by signalling means, and produces the moment feedback by torquer, makes gyrorotor get back to the equilibrium position.Flexible coupling is a kind of coupling arrangement, and it comprises interior ring (linking to each other with driving shaft), gimbal and outer shroud (linking to each other with gyrorotor).Connect by flexibility bar between each ring.By regulating, negative moment of elasticity that is produced by gimbal and the positive moment of elasticity that is produced by flexibility bar are balanced each other, i.e. dynamic tuning.Dynamic tuned gyroscope has precision height, advantages such as good stability.But such gyro flexible coupling complex structure, spin rotor momentum is big, the big Heavy Weight of moving-iron type torquer volume.Exist startup long stabilization time, shock resistance difference and complex structure, defectives such as cost height.
Summary of the invention
The present invention is directed to the deficiency of resonance micro electromechanical gyro and dynamic tuned gyroscope, a kind of precision that can improve micro-electro-mechanical gyroscope and stability are provided and have that volume is little, in light weight, cost is low, power consumption is little, the good reliability tuning-type micro electro-mechanical gyroscope.
The present invention adopts following technical scheme:
A kind of tuning-type micro electro-mechanical gyroscope that relates to measuring technique, comprise motor, on motor driving shaft, be provided with gyrorotor/gimbal, above gyrorotor/gimbal with below be respectively equipped with the upper and lower pole plate of electric capacity and fix by clamping rings, on clamping rings, be provided with the conductor loop of the output signal that is used to guide the upper and lower pole plate of electric capacity.
Compared with prior art, the present invention has following advantage:
The tuning-type micro electro-mechanical gyroscope that the present invention proposes comprises: the micromotor of high speed rotating, sheet rotor block and gimbal and be positioned at symmetrical detection capacitor plate in its both sides and force feedback capacitor plate.Said rotor block of the present invention and balance ring structure adopt sheet form.Rotor block/gimbal structure can adopt low-resistance silicon, makes of the MEMS job operation, perhaps adopts permanent elastic metallic material (for example 3J33) to make.The said high speed rotating micromotor of the present invention is a permanent-magnet brushless DC electric machine, and its rotating speed can be by the electronic circuit adjustment, and by designing and calculating and adjustment, the positive moment of elasticity that the negative moment of elasticity that caused by gimbal and inside and outside torsion bar are produced balances each other, and promptly satisfies:
In the formula, K
pBe positive elasticity coefficient, I
e, I
zBe respectively gimbal equator moment of inertia and utmost point inertia,
Be the gyro rotating speed.Thereby realize tuning.Or adopt the interchange hysteresis machine, change rotating speed by frequency modulation and realize tuning.Said detection capacitor plate and force feedback capacitor plate, they are fan-shaped, are distributed in one heart on the insulated substrate, as Fig. 4.Insulated substrate can adopt processable ceramic or with sheet glass or bakelite plate manufacturing, and is symmetrically distributed in rotor/gimbal both sides.
Concrete advantage of the present invention is as follows:
1. the rotor with high speed rotating has replaced the mass of making dither, changes the drawback of bringing in time thereby overcome the oscillation gyro momentum moment effectively, has also avoided the resonance micro electromechanical gyro to drive the matching problem of mode and detection mode simultaneously.
2. compare with traditional dynamically tuned gyro, DTG, the present invention has adopted sheet rotor/gimbal structure, and is simple in structure, though the momentum moment has reduced, but gyrostatic quality factor have improved greatly, and this helps reducing gyrostatic drift error, improve stability and measuring accuracy.In addition, adopt schistose texture, can make the ratio of gyroscope angular momentum and quality reach maximum.Because the quality of rotor block has alleviated, its shock resistance and measurement range all are greatly improved, and starting characteristic also is improved.
3. gyroscope signal device/torquer adopts capacitance detecting and electrostatic force feedback form, and present dynamically tuned gyro, DTG adopts inductance signalling means and moving-iron type torquer mostly, and not only volume is big, Heavy Weight, and also thermal value is very big when working under higher rate.The present invention adopts capacity plate antenna to detect and electrostatic force feedback, has reduced the volume and weight of gyro greatly, has also reduced thermal value.
4. adopt silicon materials to make sheet rotor/gimbal structure, silicon has good mechanical property and electrology characteristic, can utilize the MEMS processes, helps batch production, thereby can reduce cost greatly.
5. select permanent-magnet brushless DC electric machine for use, improved speed stability, also realized electronic tuning, the gyroscope survey precision is improved greatly.
The present invention has the strong point of resonance micro electromechanical gyro and dynamic tuning formula electro-mechanical gyro simultaneously, its measuring accuracy and dynamically tuned gyro, DTG are suitable, can reach 1 °/h～0.005 °/h, than existing resonance micro electromechanical gyro height, its shock resistance and starting characteristic are then good than dynamically tuned gyro, DTG, and cost is lower than dynamic tuned gyroscope.
Description of drawings
Fig. 1 is a tuning-type micro electro-mechanical gyroscope instrument structural representation of the present invention.
Fig. 2 is sheet rotor of the present invention/gimbal structural front view.
Fig. 3 is sheet rotor of the present invention/gimbal structure cut-open view.。
Fig. 4 is a tuning-type micro electro-mechanical gyroscope partial structurtes cut-open view of the present invention.
Fig. 5 is detection capacitor plate of the present invention and force feedback capacitor plate synoptic diagram.
Embodiment
A kind of tuning-type micro electro-mechanical gyroscope that relates to measuring technique, comprise motor 31, on motor driving shaft 39, be provided with gyrorotor/gimbal 35, above gyrorotor/gimbal 35 with below be respectively equipped with on the electric capacity, bottom crown 33,36 and fixing by clamping rings 34, on clamping rings 34, be provided with and be used to guide electric capacity, the conductor loop 32 of the output signal of bottom crown, gyrorotor/gimbal 35 is by interior ring 41, middle ring 43 and outer shroud 45 are formed, interior ring 41 is connected with the drive motor driving shaft, middle ring 43 is gimbals, outer shroud 45 is rotor blocks, torsion bar 42A in passing through one couple between interior ring and the gimbal, 42B links to each other, pass through an external torsion bar 44A between gimbal and the rotor block, 44B connects, above gyrorotor/gimbal 35, be provided with and be used to prevent baffle plate 37 that rotor and capacitor plate are collided and tighten up by trip bolt 38, said capacitor plate comprises detection capacitor plate and moment feedback capacity pole plate, they are fan-shaped, be distributed on the insulated substrate with one heart, this substrate stupalith, glass material or other insulating material are made, be connected mutually with pedestal, and be symmetrically distributed in rotor/gimbal both sides.
The tuning-type micro electro-mechanical gyroscope instrument of the present invention's design, its structure and principle of work are described with reference to the accompanying drawings as follows:
A kind of tuning-type micro electro-mechanical gyroscope instrument structure that Fig. 1 designs for the present invention.Its structure cut-open view such as Fig. 4.Drive motor 31 drives gyrorotor/gimbal 35 high speed rotating by driving shaft 39; The 32nd, conductor loop is used for guiding the output signal of capacitor plate; 33 and 36 is capacitor plates, and its electric capacity is arranged and is identical with the gap of rotor block; The 34th, clamping rings is used for fixing capacitor plate; The 37th, baffle plate is used for fixing rotor, and prevents that rotor and capacitor plate from colliding; The 38th, trip bolt.When rotor block sensitive carrier during along the angular velocity of x/y direction, just produce Corioli's acceleration, consequent gyroscopic couple acts on torsion bar, make rotor/gimbal structure produce deflection with respect to torsion bar, cause rotor and detect changes in capacitance between capacitor plate, this capacitance variations has reflected the size of input angular velocity.Capacitance detecting pole plate and moment feedback capacity pole plate all are designed to the symmetrical structure form, structure as shown in Figure 4, by preceding put, the motion of demodulation, correction and equalising torque circuit controls rotor, and measure the voltage signal that is proportional to input angular velocity.
Figure 2 shows that a kind of rotor/gimbal structure that the present invention designs.Fig. 3 is the cut-open view of this structure.It is made up of three donuts, interior ring 41 is connected with the drive motor driving shaft, and middle ring 43 is gimbals, and outer shroud 45 is rotor blocks, in link to each other with 42B by torsion bar 42A in a couple between ring and the gimbal, be connected with 44B by an external torsion bar 44A between gimbal and the rotor block.Interior torsion bar and outer torsion bar are orthogonal, and torsion bar is designed to have bigger bendind rigidity and low torsional rigidity.
A kind of capacitor plate structure that Fig. 5 designs for the present invention.Wherein, 51 is insulated substrate, and 52-55 is a capacitor plate, forms by plating on insulated substrate, and wherein 52A and 52B, 53A and 53B, 54A and 54B, 55A and 55B be symmetry in twos, and is in 90 degree and arranges.
When the rotor block sensitive carrier of high speed rotating during along the angular velocity of x/y direction, produce Corioli's acceleration, cause rotor and detect changes in capacitance between capacitor plate, capacitance detecting pole plate and force feedback capacitor plate all are designed to the symmetrical structure form, by preceding put, the motion of demodulation, correction and dynamic balance circuit controls rotor, and measure the voltage signal that is proportional to input angular velocity.
Claims (4)
1, a kind of tuning-type micro electro-mechanical gyroscope that relates to measuring technique, comprise motor (31), it is characterized in that on motor driving shaft (39), being provided with gyrorotor/gimbal (35), be respectively equipped with the upper and lower pole plate of electric capacity (33,36) and fixing in the top of gyrorotor/gimbal (35) and below, on clamping rings (34), be provided with the conductor loop (32) of the output signal that is used to guide the upper and lower pole plate of electric capacity by clamping rings (34).
2, tuning-type micro electro-mechanical gyroscope according to claim 1, it is characterized in that gyrorotor/gimbal (35) is made up of interior ring (41), middle ring (43) and outer shroud (45), interior ring (41) is connected with the drive motor driving shaft, middle ring (43) is a gimbal, outer shroud (45) is a rotor block, in link to each other by torsion bar (42A, 42B) in a pair between ring and the gimbal, be connected by an external torsion bar (44A, 44B) between gimbal and the rotor block.
3, tuning-type micro electro-mechanical gyroscope according to claim 1 and 2 is characterized in that being provided with in gyrorotor/gimbal (35) top and is used to prevent baffle plate (37) that rotor and capacitor plate are collided and is tightened up by trip bolt (38).
4, tuning-type micro electro-mechanical gyroscope according to claim 1, it is characterized in that, said capacitor plate comprises detection capacitor plate and moment feedback capacity pole plate, they are fan-shaped, be distributed in one heart on the insulated substrate, this substrate stupalith, glass material or other insulating material are made, be connected mutually with pedestal, and be symmetrically distributed in rotor/gimbal both sides.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CNB2005100405954A CN100392353C (en) | 2005-06-17 | 2005-06-17 | Tuning-type micro electro-mechanical gyroscope |
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| CNB2005100405954A CN100392353C (en) | 2005-06-17 | 2005-06-17 | Tuning-type micro electro-mechanical gyroscope |
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| CN1710383A true CN1710383A (en) | 2005-12-21 |
| CN100392353C CN100392353C (en) | 2008-06-04 |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100458366C (en) * | 2006-06-08 | 2009-02-04 | 上海交通大学 | Active suspension permanent magnet ring rotor acynchronous induction micro machinery gyroscope gyroscope |
| CN101893451A (en) * | 2009-05-22 | 2010-11-24 | 鸿富锦精密工业（深圳）有限公司 | Capacitor type sensor and gyroscope |
| CN101957201A (en) * | 2009-07-13 | 2011-01-26 | 江苏丽恒电子有限公司 | Capacitor type MEMS gyroscope and manufacture method thereof |
| CN102661744A (en) * | 2012-05-31 | 2012-09-12 | 东南大学 | Silica-based double-gimbal dynamical tuned gyroscope rotor body structure and processing method thereof |
| CN102692220A (en) * | 2012-06-29 | 2012-09-26 | 东南大学 | Silicon-based dynamically tuned gyroscope rotor block structure with three balance rings and machining method of silicon-based dynamically tuned gyroscope rotor block structure |
| CN103115617A (en) * | 2013-01-17 | 2013-05-22 | 东南大学 | Precise assembling structure of static capacitance type adjustable final motion gyroscope |
| CN104296736A (en) * | 2013-11-28 | 2015-01-21 | 中国航空工业集团公司洛阳电光设备研究所 | Gyroscope and balance ring thereof |
| CN109991852A (en) * | 2019-04-19 | 2019-07-09 | 贵州大学 | Fractional order electrostatic drive micro electro mechanical system control method with hysteresis characteristic |
| CN113908562A (en) * | 2021-11-15 | 2022-01-11 | 东南大学 | Shell alternate rotation type electric drive top |
| CN114096802A (en) * | 2020-05-15 | 2022-02-25 | 深圳市汇顶科技股份有限公司 | Gyroscope and inertial sensor |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3702568A (en) * | 1970-07-10 | 1972-11-14 | Edwin W Howe | Gyroscopes and suspensions therefor |
| US4296639A (en) * | 1980-01-16 | 1981-10-27 | Northrop Corporation | Free rotor gyro with three torquers and three pickoffs |
| US4499778A (en) * | 1981-02-03 | 1985-02-19 | Northrop Corporation | Flexure mount assembly for a dynamically tuned gyroscope and method of manufacturing same |
| CN2802446Y (en) * | 2005-06-17 | 2006-08-02 | 东南大学 | Tuning microelectromechanical top |
-
2005
- 2005-06-17 CN CNB2005100405954A patent/CN100392353C/en not_active Expired - Fee Related
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100458366C (en) * | 2006-06-08 | 2009-02-04 | 上海交通大学 | Active suspension permanent magnet ring rotor acynchronous induction micro machinery gyroscope gyroscope |
| CN101893451B (en) * | 2009-05-22 | 2013-08-21 | 鸿富锦精密工业（深圳）有限公司 | Capacitor type sensor and gyroscope |
| CN101893451A (en) * | 2009-05-22 | 2010-11-24 | 鸿富锦精密工业（深圳）有限公司 | Capacitor type sensor and gyroscope |
| CN101957201A (en) * | 2009-07-13 | 2011-01-26 | 江苏丽恒电子有限公司 | Capacitor type MEMS gyroscope and manufacture method thereof |
| CN101957201B (en) * | 2009-07-13 | 2012-10-03 | 上海丽恒光微电子科技有限公司 | Capacitive MEMS gyroscope and method of making the same |
| CN102661744A (en) * | 2012-05-31 | 2012-09-12 | 东南大学 | Silica-based double-gimbal dynamical tuned gyroscope rotor body structure and processing method thereof |
| CN102661744B (en) * | 2012-05-31 | 2014-12-17 | 东南大学 | Silica-based double-gimbal dynamical tuned gyroscope rotor body structure and processing method thereof |
| CN102692220A (en) * | 2012-06-29 | 2012-09-26 | 东南大学 | Silicon-based dynamically tuned gyroscope rotor block structure with three balance rings and machining method of silicon-based dynamically tuned gyroscope rotor block structure |
| CN102692220B (en) * | 2012-06-29 | 2015-01-28 | 东南大学 | Silicon-based dynamically tuned gyroscope rotor block structure with three balance rings and machining method of silicon-based dynamically tuned gyroscope rotor block structure |
| CN103115617A (en) * | 2013-01-17 | 2013-05-22 | 东南大学 | Precise assembling structure of static capacitance type adjustable final motion gyroscope |
| CN103115617B (en) * | 2013-01-17 | 2015-07-01 | 东南大学 | Precise assembling structure of static capacitance type adjustable final motion gyroscope |
| CN104296736A (en) * | 2013-11-28 | 2015-01-21 | 中国航空工业集团公司洛阳电光设备研究所 | Gyroscope and balance ring thereof |
| CN104296736B (en) * | 2013-11-28 | 2017-11-10 | 中国航空工业集团公司洛阳电光设备研究所 | A kind of gyroscope and its balance ring |
| CN109991852A (en) * | 2019-04-19 | 2019-07-09 | 贵州大学 | Fractional order electrostatic drive micro electro mechanical system control method with hysteresis characteristic |
| CN109991852B (en) * | 2019-04-19 | 2022-02-22 | 贵州大学 | Control method of fractional order electrostatic driving micro-electromechanical system with hysteresis characteristic |
| CN114096802A (en) * | 2020-05-15 | 2022-02-25 | 深圳市汇顶科技股份有限公司 | Gyroscope and inertial sensor |
| CN114096802B (en) * | 2020-05-15 | 2024-03-01 | 深圳市汇顶科技股份有限公司 | Gyroscope and inertial sensor |
| CN113908562A (en) * | 2021-11-15 | 2022-01-11 | 东南大学 | Shell alternate rotation type electric drive top |
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| CN100392353C (en) | 2008-06-04 |
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