CN106771358A - A kind of full quartz resonance accelerometer of miniature differential formula - Google Patents
A kind of full quartz resonance accelerometer of miniature differential formula Download PDFInfo
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- CN106771358A CN106771358A CN201611079746.1A CN201611079746A CN106771358A CN 106771358 A CN106771358 A CN 106771358A CN 201611079746 A CN201611079746 A CN 201611079746A CN 106771358 A CN106771358 A CN 106771358A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
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Abstract
A kind of full quartz resonance accelerometer of miniature differential formula,Support frame including periphery,The support frame mass internal with it is connected by the flexible support spring that sensitive direction is set,At the sensitive direction axis position of mass,Be provided with a pair completely through dead slot,Quartz shakes beam in dead slot,The quartz beam two ends that shake are connected with support frame and mass respectively,And it is symmetrical,The quartz beam upper surface that shakes is furnished with electrode,Electrode is located on the sensitive direction axis of mass,Electrode can vibrate according to predetermined modality after energization,The input of acceleration is sensed by mass,Then shaken by two quartz the differential change frequency of beam,Acceleration is converted to electric signal by frequency detection circuit,Complete the sensing and measurement to acceleration,The present invention is with data signal output,The advantages of high resolution and excellent interference free performance.
Description
Technical field
The invention belongs to micromachine electronics (MEMS) technical field, and in particular to a kind of full quartz resonance of miniature differential formula
Accelerometer.
Background technology
With the progress of science and technology, accelerometer surely takes aim at system, unmanned system in the steady appearance of flight control, weapon
There are applications many extensively in the fields such as system, vehicle condition monitoring, Automated condtrol and mechanical property detection.In current such one
The epoch of individual information huge explosion, the speed of acquisition of information and the degree of accuracy, high-precision control and reliable operating to whole system are all
Play an important role.Acceleration signal as one of important information therein, for whole system provides required important information,
The precision of degree of hence speeding up meter plays very important effect to the running at high precision of whole system.Resonance type accelerometer has
Sensitivity is high, advantage with the uniqueness such as roomy and fast response time, disclosure satisfy that to device systems on-line operation status monitoring
Requirement, the development to the equipment manufacture of China has great importance.The sensing of the use micro electro mechanical processing commonly used at present
Device is broadly divided into pressure resistance type and condenser type.Piezoresistive transducer is by the resistance with piezoresistive effect and with a fixed structure
Beam-mass carrys out induction acceleration, and capacitance acceleration transducer is then that area or distance by changing capacitor plate come
Induction acceleration.The conventional acceleration transducer output of both the above is analog signal, and post processing circuitry is complicated, sensitivity
It is low, there is analog-to-digital conversion error, and directly can not be combined with high-precision digital display circuit.Compared to pressure resistance type and capacitive
Acceleration transducer, resonant mode acceleration transducer its output signal is frequency signal, with high precision and strong antijamming capability
Advantage.Also there is a small amount of resonant silicon micro-acceleration sensor at present, although sensors with auxiliary electrode output is data signal, by
In being processed using silicon materials, vibration frequency is low, poor sensitivity, quality factor q value are low.A part of accelerometer also uses difference
Dynamic structure, due to the complexity of structure, causes processing technology cumbersome, and difficulty of processing is big.In a word, existing accelerometer is universal
There is simulation output, sensitivity is low, the problems such as processed complex.
The content of the invention
In order to overcome the shortcoming of above-mentioned existing accelerometer, it is an object of the invention to provide a kind of full stone of miniature differential formula
English Micromachined Accelerometer Based on Resonant Principle, has the advantages that data signal output, high resolution and interference free performance are excellent.
To achieve these goals, the technical solution adopted by the present invention is：
A kind of full quartz resonance accelerometer of miniature differential formula, including peripheral support frame 1, in support frame 1 and its
The mass 2 in portion is connected by flexible support spring 5-a, 5-b, 5-c, 5-d that sensitive direction SA is set, and flexible support spring is every
Side two, is arranged symmetrically, at the sensitive direction SA axis position of mass 2, be provided with a pair completely through the He of the first dead slot 4
Second dead slot 6, the first quartz shake the quartz of beam 3 and second shake beam 7 respectively be located at the first dead slot 4 and the second dead slot 6 in, first quartz
Beam 3, the second quartz two ends of beam 7 that shake that shake are connected with support frame 1 and mass 2 respectively, and symmetrical, and the first quartz shakes beam
3 and second the quartz upper surface of beam 7 that shakes be furnished with electrode, electrode is located on the sensitive direction SA axis of mass 2, electricity after energization
Pole can be vibrated according to predetermined modality, and the input of acceleration is sensed by mass 2, then be shaken the He of beam 3 by the first quartz
Second quartz is shaken the differential change frequency of beam 7, and acceleration is converted to electric signal by frequency detection circuit, is completed to acceleration
Sensing and measurement.
The first described dead slot 4 and the width of the second dead slot 6 are more than 500 microns.
There is 200 microns of movement clearance between described mass 2 and support frame 1.
The first described quartz quartz of beam 3 and second that shakes shakes the width of beam 7 for 80 microns, and thickness is 40 microns, and length is
2000 microns, the first quartz quartz of beam 3 and second beam 7 that shakes that shakes is processed by dry etch process and obtained, and the first quartz shakes the He of beam 3
Second quartz shake beam 7 mode of oscillation it is identical, frequency is identical.
Described flexible support spring 5 is 35 microns per narrow line thickness, and length is 1900 microns, and thickness is 360 microns,
Lines spacing is 40 microns, and on sensitive direction SA, the rigidity of flexible support spring 5 is small, is susceptible to deformation, in non-sensitive side
To the rigidity of flexible support spring 5 is big, is not susceptible to deformation.
Beneficial effects of the present invention are：
When acceleration effect is in accelerometer, there is translation in mass 2, the first quartz shakes beam 3 under inertia force effect
There is faint deformation with the second quartz beam 7 that shakes, constitute differential form.The first quartz quartz of beam 3 and second that shakes is shaken the humorous of beam 7
Vibration frequency subtracts each other, and obtains differential frequency changing value, by detecting that differential frequency change can just obtain the size of acceleration.
Differential structure type can reduce the influence of the input signal to output result in non-sensitive direction, improve the anti-dry of accelerometer
Disturb ability.Due to using quartz as material, the characteristic that make use of the piezoelectric property and frequency stability of single crystal quartz high, so
The present invention has small volume, and weight is small, the advantages of data signal output, high resolution and excellent interference free performance.
Brief description of the drawings
Fig. 1 is structural representation of the invention.
Fig. 2 is the Section A-A schematic diagram of Fig. 1.
Fig. 3 is the section B-B schematic diagram of Fig. 1.
Specific embodiment
The present invention is elaborated below in conjunction with accompanying drawing.
Referring to Fig. 1, Fig. 2 and Fig. 3, a kind of full quartz resonance accelerometer of miniature differential formula, including peripheral support frame
1, the mass 2 internal with it of support frame 1 is connected by flexible support spring 5-a, 5-b, 5-c, 5-d that sensitive direction SA is set
Connect, flexible support spring is arranged symmetrically per side two, at the sensitive direction SA axis position of mass 2, be provided with a pair it is complete
First dead slot 4 and the second dead slot 6 of insertion, the first quartz quartz of beam 3 and second beam 7 that shakes that shakes are located at the first dead slot 4 and the respectively
In two dead slots 6, the first quartz beam 3, the second quartz two ends of beam 7 that shake that shake are connected with support frame 1 and mass 2 respectively, and left
Right symmetrical, the first quartz quartz of beam 3 and second upper surface of beam 7 that shakes that shakes is furnished with electrode, and electrode is located at the sensitive direction SA of mass 2
On axis, electrode can vibrate according to predetermined modality after energization, the input of acceleration be sensed by mass 2, then
Shaken the differential change frequency of beam 7 by the first quartz quartz of beam 3 and second that shakes, acceleration is converted to electricity by frequency detection circuit
Signal, completes the sensing and measurement to acceleration.
The first described dead slot 4 and the width of the second dead slot 6 are more than 500 microns.
There is 200 microns of movement clearance between described mass 2 and support frame 1, when there is acceleration, according to newton
Second law, mass 2 will produce certain displacement in the presence of inertia force, and the first quartz quartz of beam 3 and second beam 7 that shakes that shakes is sent out
The faint deformation of life, this deformation causes this one tension of beam of being shaken to quartz, and a compression constitutes differential form.
The first described quartz quartz of beam 3 and second that shakes shakes the width of beam 7 for 80 microns, and thickness is 40 microns,
Length be 2000 microns, the first quartz shake the quartz of beam 3 and second shake beam 7 by dry etch process process acquisition, so
Can ensure that the first quartz quartz of beam 3 and second that shakes shakes beam 7 with identical physical dimension and force-frequency effect, the first quartz is shaken
The quartz of beam 3 and second shake beam 7 differential vibration frequency more accurately, objectively reaction acceleration size.
Described flexible support spring 5 is 35 microns per narrow line thickness, and length is 1900 microns, and thickness is
360 microns, lines spacing is 40 microns, and on sensitive direction SA, the rigidity of flexible support spring 5 is small, easily hair
Raw deformation, enables the first quartz quartz of beam 3 and second beam 7 that shakes that shakes sensitively to experience the acceleration of extraneous applying, non-sensitive
Direction, the rigidity of flexible support spring 5 is big, is not susceptible to deformation, effectively reduces the extraneous acceleration for applying to the first quartz
The quartz of beam 3 and second that shakes shakes the influence of beam 7；Meanwhile, using the way of output of differential frequency, intersection can be effectively reduced sensitive
Degree, the drift of accelerometer and temperature drift, improve the performance of accelerometer.
Operation principle of the invention is：
Single crystal quartz has piezoelectric property, is reasonably arranged in the first quartz shake upper surface of beam 7 of the quartz of beam 3 and second that shakes
Electrode, makes the first quartz quartz of beam 3 and second beam 7 that shakes that shakes resonate by outside oscillating circuit.When acceleration effect, matter
Gauge block 2 as acceleration sensitive-mass block, according to Newton's second law, when acceleration effect is in sensitive direction SA, quality
There is translation in block 2, cause to be located at mass 2 and the side of flexible support spring 5 of the both sides of support frame 1 is held in the effect of inertia force
It is stressed, compressive deformation occurs, opposite side bears pulling force, tensile deformation occurs, the first quartz quartz of beam 3 and second that shakes shakes beam 7
There is faint deformation, this deformation causes this one tension of beam of being shaken to quartz, and a compression constitutes differential form.Stress meeting
Cause the shake internal stress of beam of quartz to change, the change of stress causes resonant frequency to change, the size of change and acceleration into
Direct ratio, the first quartz shake resonant frequency of beam 7 of the quartz of beam 3 and second of shaking is subtracted each other, and obtains differential frequency changing value, this change
Frequency signal is converted into by frequency detection circuit to export, so as to realize the acceleration-frequency signal conversion of sensor chip,
Complete the digitized measurement to acceleration.
Differential structure type can reduce the influence of the input signal to output result in non-sensitive direction, improve acceleration
The antijamming capability of meter.Therefore the present invention make use of the piezoelectric property and frequency stabilization of single crystal quartz using quartz as material
Property it is high, with small volume, weight is small, data signal output, high resolution and the advantages of excellent interference free performance.
Claims (5)
1. a kind of support frame (1) of the full quartz resonance accelerometer of miniature differential formula, including periphery, it is characterised in that：Support
Framework (1) mass (2) internal with it is connected by the flexible support spring (5-a, 5-b, 5-c, 5-d) that sensitive direction SA is set
Connect, flexible support spring is arranged symmetrically per side two, at the sensitive direction SA axis position of mass (2), be provided with a pair it is complete
First dead slot (4) and the second dead slot (6) of full insertion, the first quartz shakes beam (3) and the second quartz shakes beam (7) respectively positioned at first
In dead slot (4) and the second dead slot (6), the first quartz shake beam (3), the second quartz shake beam (7) two ends respectively with support frame (1) and
Mass (2) is connected, and symmetrical, and the first quartz shakes beam (3) and the second quartz shakes, and beam (7) upper surface is furnished with electrode, electricity
Pole is located on the sensitive direction SA axis of mass (2), and electrode can vibrate according to predetermined modality after energization, by quality
Block (2) senses the input of acceleration, beam (3) is then shaken by the first quartz and the second quartz shake beam (7) differential change frequently
Acceleration, electric signal is converted to by frequency detection circuit by rate, completes sensing and measurement to acceleration.
2. the full quartz resonance accelerometer of a kind of miniature differential formula according to claim 1, it is characterised in that：Described
The width of one dead slot (4) and the second dead slot (6) is more than 500 microns.
3. the full quartz resonance accelerometer of a kind of miniature differential formula according to claim 1, it is characterised in that：Described matter
There is 200 microns of movement clearance between gauge block (2) and support frame (1).
4. the full quartz resonance accelerometer of a kind of miniature differential formula according to claim 1, it is characterised in that：Described
One quartz shakes beam (3) and the second quartz shakes, and beam (7) width is 80 microns, and thickness is 40 microns, and length is 2000 microns, the first stone
Ying Zhenliang (3) and the second quartz beam (7) that shakes are processed by dry etch process and obtained, and the first quartz shakes beam (3) and second quartzy
Shake beam (7) mode of oscillation it is identical, frequency is identical.
5. the full quartz resonance accelerometer of a kind of miniature differential formula according to claim 1, it is characterised in that：Described is soft
Property support spring (5) be 35 microns per narrow line thickness, length is 1900 microns, and thickness is 360 microns, and lines spacing is 40 micro-
Rice, on sensitive direction SA, the rigidity of flexible support spring (5) is small, is susceptible to deformation, in non-sensitive direction, flexible support
The rigidity of spring (5) is big, is not susceptible to deformation.
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| CN201611079746.1A CN106771358A (en) | 2016-11-30 | 2016-11-30 | A kind of full quartz resonance accelerometer of miniature differential formula |
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| CN201611079746.1A CN106771358A (en) | 2016-11-30 | 2016-11-30 | A kind of full quartz resonance accelerometer of miniature differential formula |
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Cited By (7)
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| CN107782915A (en) * | 2017-09-29 | 2018-03-09 | 中国人民解放军国防科技大学 | Silicon hollow beam, silicon micro-accelerometer based on silicon hollow beam and preparation method of silicon micro-accelerometer |
| CN108398575A (en) * | 2018-03-19 | 2018-08-14 | 重庆科技学院 | A kind of electrostatic resonance type accelerometer and acceleration measurement method |
| WO2018205683A1 (en) * | 2017-05-12 | 2018-11-15 | 北京航空航天大学 | Acceleration sensor comprising differential graphene resonant beams |
| CN109374927A (en) * | 2018-11-29 | 2019-02-22 | 中国矿业大学(北京) | A kind of direct output frequency accelerometer of holohedral symmetry decoupling |
| CN110040680A (en) * | 2019-04-19 | 2019-07-23 | 西安交通大学 | The MEMS microgravity sensor chip with quasi- zero stiffness characteristic is preloaded based on electric heating |
| CN110441550A (en) * | 2019-09-06 | 2019-11-12 | 北京信息科技大学 | A kind of embedded 12 electrode quartz accelerometer of circuit |
| CN111175540A (en) * | 2020-01-02 | 2020-05-19 | 西安交通大学 | Super-harmonic synchronous resonant accelerometer based on unidirectional electrical synchronization |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2018205683A1 (en) * | 2017-05-12 | 2018-11-15 | 北京航空航天大学 | Acceleration sensor comprising differential graphene resonant beams |
| GB2578014A (en) * | 2017-05-12 | 2020-04-15 | Univ Beihang | Acceleration sensor comprising differential graphene resonant beams |
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| CN107782915A (en) * | 2017-09-29 | 2018-03-09 | 中国人民解放军国防科技大学 | Silicon hollow beam, silicon micro-accelerometer based on silicon hollow beam and preparation method of silicon micro-accelerometer |
| CN108398575A (en) * | 2018-03-19 | 2018-08-14 | 重庆科技学院 | A kind of electrostatic resonance type accelerometer and acceleration measurement method |
| CN108398575B (en) * | 2018-03-19 | 2024-02-27 | 重庆科技学院 | Electrostatic resonance accelerometer and acceleration measurement method |
| CN109374927A (en) * | 2018-11-29 | 2019-02-22 | 中国矿业大学(北京) | A kind of direct output frequency accelerometer of holohedral symmetry decoupling |
| CN110040680A (en) * | 2019-04-19 | 2019-07-23 | 西安交通大学 | The MEMS microgravity sensor chip with quasi- zero stiffness characteristic is preloaded based on electric heating |
| CN110040680B (en) * | 2019-04-19 | 2021-09-03 | 西安交通大学 | MEMS microgravity sensor chip with quasi-zero rigidity characteristic based on electric heating preloading |
| CN110441550A (en) * | 2019-09-06 | 2019-11-12 | 北京信息科技大学 | A kind of embedded 12 electrode quartz accelerometer of circuit |
| CN111175540A (en) * | 2020-01-02 | 2020-05-19 | 西安交通大学 | Super-harmonic synchronous resonant accelerometer based on unidirectional electrical synchronization |
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Application publication date: 20170531 |