CN105866470A - Integrated quartz double-vibration-beam accelerometer - Google Patents
Integrated quartz double-vibration-beam accelerometer Download PDFInfo
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- CN105866470A CN105866470A CN201610291353.0A CN201610291353A CN105866470A CN 105866470 A CN105866470 A CN 105866470A CN 201610291353 A CN201610291353 A CN 201610291353A CN 105866470 A CN105866470 A CN 105866470A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
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Abstract
The invention provides an integrated quartz double-vibration-beam accelerometer. The integrated quartz double-vibration-beam accelerometer comprises a mass block and vibration beams. The mass block is connected with a fixing frame through a folding beam, the vibration beams comprise the left vibration beams and the right vibration beams, and an anti-symmetric relation is formed by the left vibration beams, the right vibration beams and the mass block. One ends of the left vibration beams are connected with the mass block through a joint block, and the other ends of the left vibration beams are connected with the fixing frame through a joint block. One ends of the right vibration beams are connected with the mass block through a joint block, and the other ends of the right vibration beams are connected with the fixing frame through a joint block. The number of the left vibration beams is two, the number of the right vibration beams is two, and the polarities of every corresponding two vibration beams are opposite. According to the integrated quartz double-vibration-beam accelerometer, the mass block and two pairs of vibration beams are adopted, integral formation is achieved with the MEMS technology, and compared with a split type, the integrated quartz double-vibration-beam accelerometer has the advantages of being compact in structure, free of assembling and easy to process; besides, the two pairs of vibration beams are adopted, vacuum encapsulation can be avoided, and the integrated quartz double-vibration-beam accelerometer is more stable and more reliable in use.
Description
Technical field
The present invention relates to technical field of microelectronic mechanical systems, particularly to a kind of double vibrating beam accelerometer of integral type quartz.
Background technology
Quartz vibration beam accelerometer is a kind of to utilize quartz to shake the MEMS inertial sensor of the characteristic sensitivity inertia force of the power of beam-frequently, there is the advantages such as Direct Digital output, bias stability good, scale factor good stability, range flexible design, can be widely used for tactical missile gesture stability, inertial navigation, the fields such as earth resource exploration, have important Military value and name to be worth.
Current quartz vibration beam accelerometer is broadly divided into integral type and split type, split-type structural Typical Representative is the RBA500 of Honeywell company, it is made up of with metallic gauge block the quartz twin beams beam that shakes, need Fine Boring, facing different materials thermal mismatching and the aging problem of glue, long-time stability and reliability are poor.Integral structure with France ONERA design structure as Typical Representative, the beam that shakes all is made up of quartz material with quality structure, has compact conformation, integrated advantage, but use the beam that singly shakes, need Vacuum Package, use the change of middle vacuum can affect the performance of device.
Summary of the invention
It is an object of the invention to provide a kind of double vibrating beam accelerometer of integral type quartz, the present invention uses double beam that shakes, can avoid Vacuum Package, the most reliable and the most stable.
For solving above technical problem, the present invention provides following technical scheme: a kind of double vibrating beam accelerometers of integral type quartz, including mass and the beam that shakes, described mass is connected with fixed frame by folded beam, the described beam that shakes includes that Zuo Zhenliang and the right side shake beam, and described left and right beam and the mass of shaking constitutes antisymmetric relation, shake one end of beam, a described left side is connected with mass by transfer block, and the other end passes through transfer block and is connected with fixed frame；Shake one end of beam, the described right side is connected with mass by transfer block, and the other end passes through transfer block and is connected with fixed frame, and the described left and right beam that shakes all includes two beams that shake, and the opposite polarity of two beams that shake.
Preferably, two beam front surfaces of Zuo Zhenliang are coated with metal electrode respectively；Shake two beam front surfaces of beam of the right side are coated with metal electrode respectively.
Preferably, described metal electrode is made up of the electrode of two kinds of opposed polarities, and said metal electrode includes target, left electrodes and right electrodes, and mid portion is referred to as target, and the both sides of described target are left electrodes, right electrodes respectively;When described target is positive pole, then left electrodes, right electrodes are negative pole；Otherwise, when described target is negative pole, then left electrodes, right electrodes are positive pole.
Preferably, a described left side shakes in beam the target opposite polarity of metal electrode on two beams that shake；The described right side shakes in beam the target opposite polarity of metal electrode on two beams that shake.
Preferably, described mass uses four folded beam structures, it is possible to make mass do moving in same plane along quartz substrate Y direction.
Preferably, two spacing shaken between beam of Zuo Zhenliang can require change according to design, it addition, two beam distances respectively and between mass, fixed frame of shaking can require change according to design.
The present invention uses the double vibrating beam accelerometer of integral type quartz to use a mass, and two to double beams that shake, and use MEMS technology one-body molded, compare and split type there is compact conformation, exempt from assembling, the feature of easily processing, additionally use double beam that shakes, Vacuum Package can be avoided, the most reliable and the most stable.
Accompanying drawing explanation
Fig. 1 is the structural representation of the double a kind of embodiment of vibrating beam accelerometer of integral type of the present invention quartz；
Fig. 2 is the distribution of electrodes schematic diagram of the double a kind of embodiment of vibrating beam accelerometer of integral type of the present invention quartz.
Fig. 3 is the electrode structural chart of opposed polarity of the present invention.
In figure: 1 mass, 2 folded beams, 3 fixed frames, 4 transfer blocks, a 5A left side shakes beam 5A, and the 5B right side shakes beam 5B, 6 metal electrodes, 601 targets, 602 left electrodes, 603 right electrodes, 10 first metal electrodes, 7 second metal electrodes, 8 the 3rd metal electrodes, 9 the 4th metal electrodes.
Detailed description of the invention
The present invention will be further described in conjunction with the accompanying drawings and embodiments.
As shown in Figure 1,3, a kind of double vibrating beam accelerometer of integral type quartz, including mass 1 and the beam that shakes, described mass 1 is connected with fixed frame 3 by folded beam 2, the described beam that shakes includes that a left side shakes beam 5A and the right side shakes beam 5B, and described left and right beam and the mass 1 of shaking constitutes antisymmetric relation, shake one end of beam 5A, a described left side is connected with mass 1 by transfer block 4, and the other end passes through transfer block 4 and is connected with fixed frame 3；Shake one end of beam 5B, the described right side is connected with mass 1 by transfer block 4, and the other end passes through transfer block 4 and is connected with fixed frame 3, and the described left and right beam that shakes all includes two beams that shake, and the opposite polarity of two beams that shake.
Shake two beam front surfaces of beam 5A of a left side are coated with metal electrode 6 respectively；Shake two beam front surfaces of beam 5B of the right side are coated with metal electrode 6 respectively.
Preferably, described metal electrode 6 is made up of the electrode of two kinds of opposed polarities, said metal electrode 6 includes target 601, left electrodes 602 and right electrodes 603, and mid portion is referred to as target 601, and the both sides of described target are left electrodes 602, right electrodes 603 respectively;When described target 601 is positive pole, then left electrodes 602, right electrodes 603 are negative pole；Otherwise, when described target 601 is negative pole, then left electrodes 602, right electrodes 603 are positive pole.
Preferably, a described left side shakes in beam 5A the target opposite polarity of metal electrode 6 on two beams that shake；The described right side shakes in beam 5B the target opposite polarity of metal electrode 6 on two beams that shake.
Preferably, described mass 1 uses four folded beam 2 structures, it is possible to make mass 1 do moving in same plane along quartz substrate Y direction.
As shown in Figure 2, the operation principle of apparatus of the present invention is as follows: metal electrode 6 includes the first metal electrode 10, second metal electrode 7, 3rd metal electrode 8 and the 4th metal electrode 9, the positive pole of alternating current is carried in the first metal electrode 10, on the positive pole (i.e. target) of the 3rd metal electrode 8, second metal electrode 7, negative pole (the i.e. left electrodes of the 4th metal electrode 9, right electrodes) on, the negative pole of alternating current is carried in the first metal electrode 10, negative pole (the i.e. left electrodes of the 3rd metal electrode 8, right electrodes) on, second metal electrode 7, on the positive pole (i.e. target) of the 4th metal electrode 9；Shaking under the effect of driving voltage beam starting of oscillation, the beam that causes shaking is at X-direction bending vibration, and two beams of the every pair of beam that shakes direction of vibration when vibration is contrary, can be with the power in negative function to keyset, it is thus achieved that high Q-value, it is not necessary to Vacuum Package.When acceleration effect, the double vibrating beam accelerometer sensitivity of integral type quartz of the present invention is to the acceleration change of Y direction, by mass, acceleration is converted into inertia force, the characteristic of power-frequently due to quartz crystal, the natural frequency of beam of shaking can change, and when the beam that shakes is by compressive stress, natural frequency increases, when the beam that shakes receives tension, natural frequency reduces.Two pairs of a pair of beams of shaking are by compressive stress, and another is to by tension, by detection two frequency difference signals to the beam that shakes, it is possible to realize the detection of accelerometer sensitive direction of principal axis acceleration.
Detailed description of the invention of the present invention is not intended that the restriction to the application scope; within every spirit at present inventive concept and principle, any amendment, equivalent and improvement etc. that one of skill in the art can make should be included within the scope of the present invention.
Claims (6)
1. the double vibrating beam accelerometer of integral type quartz, including mass and the beam that shakes, it is characterized in that, described mass is connected with fixed frame by folded beam, the described beam that shakes includes that Zuo Zhenliang and the right side shake beam, and described left and right beam and the mass of shaking constitutes antisymmetric relation, shake one end of beam, a described left side is connected with mass by transfer block, and the other end passes through transfer block and is connected with fixed frame；Shake one end of beam, the described right side is connected with mass by transfer block, and the other end passes through transfer block and is connected with fixed frame, and the described left and right beam that shakes all includes two beams that shake, and the opposite polarity of two beams that shake.
The double vibrating beam accelerometer of integral type the most according to claim 1 quartz, it is characterised in that two beam front surfaces of Zuo Zhenliang are coated with metal electrode respectively；Shake two beam front surfaces of beam of the right side are coated with metal electrode respectively.
The double vibrating beam accelerometer of integral type the most according to claim 2 quartz, it is characterized in that, described metal electrode is made up of the electrode of two kinds of opposed polarities, said metal electrode includes target, left electrodes and right electrodes, mid portion is referred to as target, and the both sides of described target are left electrodes, right electrodes respectively;When described target is positive pole, then left electrodes, right electrodes are negative pole；Otherwise, when described target is negative pole, then left electrodes, right electrodes are positive pole.
The double vibrating beam accelerometers of integral type the most according to claim 3 quartz, it is characterised in that a described left side shakes in beam the target opposite polarity of metal electrode on two beams that shake；The described right side shakes in beam the target opposite polarity of metal electrode on two beams that shake.
5. according to the double vibrating beam accelerometer of integral type quartz described in claim 1-4 any one, it is characterised in that described mass uses four folded beam structures, it is possible to make mass do moving in same plane along quartz substrate Y direction.
6. according to the double vibrating beam accelerometer of integral type quartz described in claim 1-4 any one, it is characterized in that, two spacing shaken between beam of Zuo Zhenliang can require change according to design, it addition, two beam distances respectively and between mass, fixed frame of shaking can require change according to design.
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106771359A (en) * | 2016-11-30 | 2017-05-31 | 西安交通大学 | A kind of quartzy integral type Micromachined Accelerometer Based on Resonant Principle |
| CN106771358A (en) * | 2016-11-30 | 2017-05-31 | 西安交通大学 | A kind of full quartz resonance accelerometer of miniature differential formula |
| CN109188022A (en) * | 2018-09-28 | 2019-01-11 | 北京航天控制仪器研究所 | Method for the compensation of quartz vibration beam accelerometer output error |
| CN109239400A (en) * | 2018-11-12 | 2019-01-18 | 中国工程物理研究院电子工程研究所 | The double vibrating beam accelerometers of integral type quartz and preparation method |
| CN109254170A (en) * | 2018-11-30 | 2019-01-22 | 中国工程物理研究院电子工程研究所 | The double vibrating beam accelerometers of integral type quartz and preparation method |
| CN112379126A (en) * | 2020-11-02 | 2021-02-19 | 西安交通大学 | Quartz resonance acceleration sensor with composite measuring range |
| CN113945733A (en) * | 2021-10-25 | 2022-01-18 | 北京星箭长空测控技术股份有限公司 | Quartz accelerometer fixing device and fixing method thereof |
| CN116364482A (en) * | 2023-06-02 | 2023-06-30 | 中国工程物理研究院电子工程研究所 | Integrated high-impact quartz micro switch |
| CN116387094A (en) * | 2023-06-02 | 2023-07-04 | 中国工程物理研究院电子工程研究所 | Integrated quartz micro-switch |
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Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106771358A (en) * | 2016-11-30 | 2017-05-31 | 西安交通大学 | A kind of full quartz resonance accelerometer of miniature differential formula |
| CN106771359A (en) * | 2016-11-30 | 2017-05-31 | 西安交通大学 | A kind of quartzy integral type Micromachined Accelerometer Based on Resonant Principle |
| CN109188022B (en) * | 2018-09-28 | 2021-12-07 | 北京航天控制仪器研究所 | Method for compensating output error of quartz vibrating beam accelerometer |
| CN109188022A (en) * | 2018-09-28 | 2019-01-11 | 北京航天控制仪器研究所 | Method for the compensation of quartz vibration beam accelerometer output error |
| CN109239400A (en) * | 2018-11-12 | 2019-01-18 | 中国工程物理研究院电子工程研究所 | The double vibrating beam accelerometers of integral type quartz and preparation method |
| CN109239400B (en) * | 2018-11-12 | 2024-02-09 | 中国工程物理研究院电子工程研究所 | Integrated quartz double-vibration beam accelerometer and preparation method thereof |
| CN109254170A (en) * | 2018-11-30 | 2019-01-22 | 中国工程物理研究院电子工程研究所 | The double vibrating beam accelerometers of integral type quartz and preparation method |
| CN109254170B (en) * | 2018-11-30 | 2024-02-09 | 中国工程物理研究院电子工程研究所 | Integrated quartz double-vibration beam accelerometer and preparation method thereof |
| CN112379126A (en) * | 2020-11-02 | 2021-02-19 | 西安交通大学 | Quartz resonance acceleration sensor with composite measuring range |
| CN113945733A (en) * | 2021-10-25 | 2022-01-18 | 北京星箭长空测控技术股份有限公司 | Quartz accelerometer fixing device and fixing method thereof |
| CN113945733B (en) * | 2021-10-25 | 2024-05-24 | 北京星箭长空测控技术股份有限公司 | Quartz accelerometer fixing device and fixing method thereof |
| CN116364482A (en) * | 2023-06-02 | 2023-06-30 | 中国工程物理研究院电子工程研究所 | Integrated high-impact quartz micro switch |
| CN116387094A (en) * | 2023-06-02 | 2023-07-04 | 中国工程物理研究院电子工程研究所 | Integrated quartz micro-switch |
| CN116387094B (en) * | 2023-06-02 | 2023-08-25 | 中国工程物理研究院电子工程研究所 | Integrated quartz micro-switch |
| CN116364482B (en) * | 2023-06-02 | 2023-08-29 | 中国工程物理研究院电子工程研究所 | Integrated high-impact quartz micro switch |
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Application publication date: 20160817 |