CN106597016B - Capacitive MEMS (micro-electromechanical system) double-axis accelerometer - Google Patents
Capacitive MEMS (micro-electromechanical system) double-axis accelerometer Download PDFInfo
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- CN106597016B CN106597016B CN201611196565.7A CN201611196565A CN106597016B CN 106597016 B CN106597016 B CN 106597016B CN 201611196565 A CN201611196565 A CN 201611196565A CN 106597016 B CN106597016 B CN 106597016B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
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Abstract
The invention discloses a capacitive MEMS (micro-electromechanical systems) double-axis accelerometer, which sequentially comprises the following components from bottom to top: a substrate, an insulating layer and a sensitive device layer; the sensitive device layer comprises: the device comprises a fixed frame, a folding beam, a sensitive mass block, a comb tooth combination and an anchor point; the sensor comprises a fixed framework, a sensitive mass block, a pair of folding beams, a plurality of sensing mass blocks and a plurality of sensing units, wherein the fixed framework is fixed on a substrate through an insulating layer, 4 end angles of the sensitive mass block are respectively provided with the pair of folding beams, the central lines of each pair of folding beams are orthogonal, one end of each folding beam is connected with the fixed framework, and the other end of each folding beam is connected with the sensitive mass block; a plurality of comb tooth combinations are distributed around the sensitive mass block, and the comb tooth combinations comprise: the capacitive MEMS biaxial accelerometer comprises fixed comb teeth and movable comb teeth, wherein one end of each fixed comb tooth is connected with a fixed frame, and one end of each movable comb tooth is connected with a sensitive mass block, so that the technical effects of high sensitivity and small quadrature error of the capacitive MEMS biaxial accelerometer are achieved.
Description
Technical Field
The invention relates to the field of MEMS accelerometer design research, in particular to a capacitive MEMS biaxial accelerometer.
Background
The MEMS accelerometer is widely applied to various fields such as consumer electronics, automobile industry, aviation and military, and with the development of microelectronic technology and the continuous progress of micro-mechanical manufacturing technology, the MEMS accelerometer also shows an extremely important value in the sensing fields such as wearable devices, unmanned aerial vehicles, internet of things (IoT), vibration and navigation, and has a wide market prospect.
The accelerometer is mainly used for measuring the acceleration of a moving object relative to an inertial space, can be divided into a piezoresistive type, a piezoelectric type, a resonant type, a tunneling current type and a capacitance type according to different detection principles, and generally adopts capacitance type detection for low-g accelerometers with higher requirements on temperature coefficient, resolution, precision and the like.
The capacitive accelerometer is mainly divided into a comb type accelerometer and a flat type accelerometer, and the flat type accelerometer mainly has the following problems: the method needs double-sided photoetching and bonding, has high processing difficulty, needs vacuum packaging if reducing the thermal noise of the device and improving the precision, and has high packaging cost, poor repeatability and low device yield. The comb-tooth type accelerometer (variable-area type/variable-pitch type) does not need double-sided photoetching, has simple processing technology, can reduce the thermal noise of devices by manufacturing the damping holes on the mass block, can carry out normal-pressure packaging, has low manufacturing cost and mature technology, and can realize batch production.
The traditional accelerometer is mostly a single-axis sensor for single-vector detection, along with the continuous change of the application environment of the sensor, the single-axis accelerometer cannot meet the application requirement, a double-axis accelerometer is needed, and the traditional double-axis accelerometer encapsulates two single-axis accelerometers in an orthogonal manner, so that a large orthogonal error is inevitably introduced, the accuracy of the sensor is influenced, and meanwhile, the assembly is difficult, the size of a device is large, and the manufacturing cost is high; the existing double-shaft accelerometer technical scheme adopts a comb-tooth variable-area structure and an orthogonal snake-shaped supporting beam comb-tooth structure to measure the double-shaft acceleration, and the two schemes are insufficient: the accelerometer formed by the former has low sensitivity and poor resolution, and the accelerometer formed by the latter can generate larger cross sensitivity and poor stability.
Disclosure of Invention
The invention provides a capacitive MEMS (micro-electromechanical systems) biaxial accelerometer, which solves the technical problems of low sensitivity and high cross sensitivity of the conventional biaxial accelerometer and realizes the technical effects of high sensitivity and small quadrature error of the capacitive MEMS biaxial accelerometer.
In order to solve the technical problem, the present application provides a capacitive MEMS dual-axis accelerometer, the accelerometer includes from bottom to top in proper order:
the device comprises a substrate, an insulating layer and a sensitive device layer; the sensitive device layer comprises: the device comprises a fixed frame, a folding beam, a sensitive mass block, a comb tooth combination and an anchor point; the fixed frame is fixed on the substrate through an anchor point, 4 end angles of the sensitive mass block are respectively provided with a pair of folding beams, the central lines of each pair of folding beams are orthogonal, one end of each folding beam is connected with the fixed frame, and the other end of each folding beam is connected with the sensitive mass block; a plurality of comb combinations are distributed around the sensitive mass block, and each comb combination comprises: the device comprises fixed comb teeth and movable comb teeth, wherein one end of each fixed comb tooth is connected with a fixed frame, and one end of each movable comb tooth is connected with a sensitive mass block.
The sensing mass block can realize mass adjustment by changing the size and the number of the cavities through design, and the mass of the sensing mass block can be adjusted according to actual application requirements to realize high-sensitivity detection.
The folding beam has relatively low rigidity in the sensitive axis direction and is easy to deform, the folding beam has very high rigidity in the non-sensitive axis direction and is not easy to deform, the cross sensitivity can be inhibited, the influence of orthogonal errors is prevented, meanwhile, the folding beam has very low nonlinearity, the structural residual stress can be released, and the influence of the residual stress and the temperature on devices is reduced.
The 4 pairs of folding beams are symmetrical about the geometric center of the sensitive mass block, and the plurality of comb tooth combinations are symmetrical about the central line of the sensitive mass block.
Wherein the accelerometer further comprises: a second stationary frame positioned within the proof mass, the second stationary frame comprising: first dead lever, second dead lever, first dead lever are the cross with second dead lever cross connection, the center coincidence of first dead lever and second dead lever, and first dead lever both sides and second dead lever both sides equal symmetric distribution have a plurality of second broach combinations, and the second broach combination includes: and one end of the second fixed comb tooth is connected with the fixed rod, and one end of the second movable comb tooth is connected with the inner wall of the sensing mass block.
The two ends of the first fixing rod and the two ends of the second fixing rod extend towards the inner wall of the sensitive mass block respectively, and the two ends of the first fixing rod and the two ends of the second fixing rod are provided with limiting structures respectively.
Wherein, at least one cavity is uniformly arranged in the sensitive mass block.
The insulating layer is provided with a central anchor point, the second fixed frame is fixed on the substrate through the central anchor point, the insulating layer is provided with peripheral anchor points, and the fixed frame is fixed on the substrate through the peripheral anchor points.
Wherein, fixed broach is parallel with movable broach, and both have overlap region in horizontal direction or vertical direction, and for making accelerometer sensitivity big enough, improve chip area's utilization simultaneously, make chip compact structure, the clearance ratio between movable broach and two adjacent fixed broach is 1:4.
The fixed comb teeth distributed on the periphery of the fixed frame are connected with the same electrodes, the second fixed comb teeth distributed on two sides of the second fixed frame are connected with the same electrodes, the number of the fixed comb teeth is equal to that of the second fixed comb teeth, and the electric polarities of the fixed comb teeth are opposite.
The substrate is made of silicon or glass, the sensitive device layer is heavily doped silicon, and the accelerometer is completed through an MEMS processing technology.
The invention provides a single-chip comb-tooth type variable-spacing biaxial accelerometer, which solves the problems of low sensitivity, poor resolution, high cross sensitivity, poor stability and the like of the traditional biaxial accelerometer through the innovative design of an accelerometer beam, a mass block and a limiting structure (stopper).
Single-chip comb-tooth type variable-pitch biaxial accelerometer: the sensor comprises a substrate and a sensitive device layer, wherein an insulating layer is arranged between the substrate and the sensitive device layer; the sensitive device layer comprises a fixed frame, anchor points, folding beams, sensitive mass blocks, fixed comb teeth, movable comb teeth and a stopper; the detection of X, Y biaxial acceleration signals is respectively realized by combining a single mass block structure in the sensitive device layer with eight-beam centrosymmetric design and comb tooth variable-pitch symmetric layout; a plurality of pairs of movable comb teeth are manufactured on the sensitive mass block by utilizing a surface silicon processing technology, a plurality of pairs of fixed comb teeth are correspondingly manufactured on the fixed frame to form a plurality of pairs of differential sensitive capacitors, when acceleration signals are input into the accelerometer in different directions, the differential sensitive capacitors generate corresponding capacitance changes, and biaxial acceleration measurement is realized by detecting the changed capacitors.
The stopper is designed on a central cross-shaped fixed frame to form a symmetrical distribution structure. The folding beams are designed in an eight-beam central symmetry mode, four folding beams are symmetrically distributed on two corners of the mass block in the sensitive axial direction in each sensitive axial direction, four folding beam structures symmetrically distributed in the non-sensitive axial direction are orthogonal in pairs, one end of each folding beam is connected to the fixed frame, and the other end of each folding beam is connected to the sensitive mass block.
The folding beam is easy to deform in the sensitive axis direction and has higher rigidity in the non-sensitive axis direction. The sensitive mass of the sensitive mass block can be adjusted, the sensitive mass block is mainly composed of four small mass blocks with cavity structures in a symmetrical distribution mode, and the mass of the sensitive mass block can be changed by designing the size and the number of the cavities.
The anchor points are divided into anchor points distributed on the periphery, and the anchor points also comprise designed central anchor points, and the central cross-shaped fixed frames are fixed and connected together through the central anchor points. The fixed comb teeth and the movable comb teeth are arranged in parallel in a staggered mode, and the gap ratio between the movable comb teeth and the two adjacent fixed comb teeth is 1:4. The fixed comb teeth distributed at the periphery of the fixed frame are connected with the same electrode, the fixed comb teeth distributed at the central cross position of the fixed frame are connected with the same electrode, the number of the fixed comb teeth at the two positions is equal, the electric polarities are opposite, and when acceleration signals exist in the X or Y sensitive axial direction, the peripheral comb tooth structure and the central cross position comb tooth structure form total differential capacitance signals.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention adopts pairwise orthogonal centrosymmetric design of eight folding beams, realizes orthogonal decoupling in the directions of two sensitive axes (X axis and Y axis), effectively inhibits structural orthogonal errors, and has higher double-axis detection precision.
2. According to the invention, the mass of the sensitive mass block can be adjusted, namely the size and the number of cavities in the mass block are adjusted, so that on one hand, the mass of the mass block can be increased, and the high-sensitivity and high-resolution detection of the biaxial accelerometer is realized; on the other hand, when the requirements of sensitivity and resolution are ensured, the mass of the mass block is properly reduced, and the measuring range of the accelerometer is increased.
3. According to the invention, by designing the cross-shaped fixing frame at the central position and the central anchor point structure, the electrode metal lead can be led out from the central anchor point (namely the central coincidence position of the first fixing rod and the second fixing rod) only by one Pad, so that the difficulty in the processing technology is greatly reduced, the product yield is improved, and the cost is reduced.
4. The symmetrical stopper structure is designed on the cross-shaped fixed frame, so that the problems of overload suction and failure of movable and fixed comb teeth are prevented, and the stability and reliability of the dual-axis accelerometer are improved.
5. Through the design of the mass block with the cavity, the system damping of the dual-axis accelerometer is reduced, the thermomechanical noise of the accelerometer is reduced, and the signal-to-noise ratio of the dual-axis accelerometer is improved.
6. The design of the fixed comb teeth with the peripheral frame and the central position respectively connected in the same polarity mode is adopted, mutual interference of double-shaft input signals is effectively avoided, the double-shaft accelerometer is free of cross sensitivity, the detection precision of the accelerometer is improved, meanwhile, differential capacitance detection is formed between the double-shaft accelerometer and the movable comb teeth, common mode interference can be effectively inhibited, and the comprehensive performance of the accelerometer is improved.
7. The comb teeth variable-spacing capacitor design is utilized, the initial capacitance between the moving comb teeth and the fixed comb teeth is increased, and the design difficulty of a rear-end micro capacitor signal detection circuit is reduced.
8. The design of single-chip double-shaft acceleration avoids the problem of poor packaging verticality of the combined accelerometer, and meanwhile, the combined accelerometer is small in size, light in weight, free of vacuum packaging, mature in processing technology, capable of being manufactured in batches and low in cost.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention;
FIG. 1 is a schematic structural diagram of a capacitive MEMS biaxial accelerometer of the present application;
fig. 2 is a schematic structural diagram of a sensing mass in the present application.
Detailed Description
The invention provides a capacitive MEMS (micro-electromechanical systems) biaxial accelerometer, which solves the technical problems of poor sensitivity and high cross sensitivity of the conventional biaxial accelerometer and realizes the technical effects of high sensitivity and small quadrature error of the capacitive MEMS biaxial accelerometer.
In order that the above objects, features and advantages of the present invention can be more clearly understood, a more particular description of the invention will be rendered by reference to the appended drawings. It should be noted that the embodiments and features of the embodiments of the present application may be combined with each other without conflicting with each other.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced otherwise than as specifically described and thus the scope of the present invention is not limited by the specific embodiments disclosed below.
As shown in fig. 1, the single-chip comb-tooth type variable-pitch biaxial accelerometer according to the embodiment of the invention includes a substrate 1 made of n-type doped polysilicon; the substrate 1 is provided with a thin silicon oxide layer which plays roles of insulation, isolation and fixation, and the anchor points 3 are fixed on the substrate through the silicon oxide layer; the sensing device layer is arranged on the silicon oxide layer, the sensing device layer is made of p-type heavily doped silicon, the sensing device layer comprises a fixed frame 2, a folding beam 4, a sensing mass block 5, movable comb teeth 6, 7, 8, 9, 10 and 11, fixed comb teeth 12, 13, 14, 15, 16 and 17 and a stopper18, and all the structures are manufactured through an MEMS (micro electro mechanical System) processing technology; the fixed frame 2 is fixed on the substrate 1 through an anchor point 3, and eight folding beams 4 with centrosymmetric design are respectively connected with four corners of the sensitive mass block 5 at one end in a pairwise orthogonal mode, and are connected with the corresponding peripheral fixed frame 2 at the other end; the fixed comb teeth 12, 13, 14, 15, 16, 17 are designed and manufactured on the crisscross fixed frame 2 and the peripheral fixed frame 2, are perpendicular to the fixed frame 2, and are distributed along the central symmetry, and the number of the fixed comb teeth distributed on the peripheral fixed frame 2 is equal to that of the fixed comb teeth distributed on the central crisscross fixed frame 2, each fixed comb tooth 12, 13, 14, 15, 16, 17 has a corresponding movable comb tooth 6, 7, 8, 9, 10, 11 to form a pair of differential capacitance structures, the movable comb teeth 6, 7, 8, 9, 10, 11 are designed and manufactured on the sensitive mass block 5, are symmetrical along the center and are vertically distributed on the four sides and the inner wall of the sensitive mass block 5, and the gap ratio between each movable comb tooth 6, 7, 8, 9, 10, 11 and two adjacent fixed comb teeth is 1:4; stopper18 is designed and manufactured on cross type fixed frame 2, and has a certain clearance with the inner wall of sensing mass block 5.
The sensitive mass block 5 is mainly composed of four small mass blocks with cavity structures which are symmetrically distributed, the four small mass blocks are connected to the fixed frame 2 through the folding beam 4, and the folding beam 4, the sensitive mass block 5, the movable comb teeth 6, 7, 8, 9, 10 and 11 are directly corroded and released through the structural cavities and structural gaps in combination with an MEMS corrosion process to obtain a suspended structure.
It should be noted that: the mass of the sensing mass 5 can be adjusted, and as shown in fig. 2, the mass of the sensing mass 5 can be changed by changing the size and the number of the cavities, so that the comprehensive performance of the biaxial accelerometer is optimized.
The working principle of the invention is as follows: the acceleration signal to be detected is converted into a capacitance variation signal through a sensitive element, and the linear detection of the acceleration is realized through the analysis of a subsequent signal processing circuit.
Initial capacitance C between adjacent pairs of parallel comb teeth 0 Can be expressed as (because the comb tooth structure adopts a fixed tooth offset formula, and the gap ratio of the movable comb tooth to the fixed teeth on the two sides is 1:4, the capacitance on the larger side is ignored):
in the formula, epsilon 0 Is a vacuum dielectric constant of ∈ 1 A, h, d is relative dielectric constant 0 The overlapping length, thickness and spacing between the moving comb teeth and the fixed comb teeth are respectively.
The change Δ C of the pair of capacitances when the small displacement between the comb teeth is changed is obtained from the formula (1):
when the invention works in one-dimensional condition, it is not assumed that the accelerometer is only acted by acceleration along the negative direction of the Y axis, at this time, the sensitive mass block 5 will generate tiny displacement towards the positive direction of the Y axis due to the action of inertia force, the comb capacitance formed by the external movable comb 6 and the fixed comb 12 will be reduced due to the increased gap, at the same time, the comb capacitance formed by the internal movable comb 7 and the fixed comb 13 will be increased due to the reduced gap, two parts form internal and external differential capacitance detection signals, of course, the movable combs 8, 9, 10, 11 will also generate tiny translation along the positive direction of the Y axis at this time, but the movable combs 8, 9 and 10, 11 and the fixed combs 14, 15 and 16, 17 are respectively the same polarity change, each polarity capacitance is zero, therefore there is no differential signal output at the detection end of the capacitance in the X axis, and the Y axis acceleration input has no influence on the detection of the X axis signal; similarly, when the accelerometer is only acted by acceleration along the X axial direction, similar changes can be obtained, differential capacitance detection signals are formed in the inner structure and the outer structure of the X axial direction, and meanwhile, the Y axial direction signal detection end is not affected. Therefore, when the biaxial accelerometer works in one dimension, the biaxial accelerometer can completely replace a uniaxial accelerometer.
When the present invention normally works in a two-dimensional condition, that is, the present invention is simultaneously subjected to the action of the acceleration in the axial direction of X, Y (assuming that all the acceleration is in the negative direction), the position change conditions of the movable comb teeth 6, 7, 8, 9, 10, 11 can be considered according to specific conditions, and if the micro-displacement of the sensitive mass block 5 in the axial direction of X, Y is respectively Δ x, Δ y, then the following can be obtained:
the comb capacitance variation amount formed by the pair of movable comb teeth 6 and the fixed comb teeth 12 is:
the capacitance variation of the pair of movable comb teeth 7 and fixed comb teeth 13 is:
the capacitance variation of the pair of movable comb teeth 8 or 9 and fixed comb teeth 14 or 15 is:
the capacitance variation of the pair of movable comb teeth 10 or 11 and fixed comb teeth 16 or 17 is:
since the movable comb teeth 6, 8, 9 and the fixed comb teeth 12, 14, 15 are changed in the same polarity, the movable comb teeth 7, 10, 11 and the fixed comb teeth 13, 16, 17 are changed in the same polarity, and the total cross interference capacitance variation of each polarity is zero, the magnitudes of a pair of differential detection capacitances along the X, Y axial direction are respectively:
it can be seen from equations (7) and (8) that the differential capacitance variation in the sensitive axis direction of the biaxial accelerometer is linearly proportional to the micro-displacement component of the mass block along the sensitive axis direction, i.e., linearly proportional to the components of the external acceleration input signal in the two sensitive axis directions, and the biaxial accelerometer is not cross sensitive. The acceleration measurement along the X, Y biaxial direction can be realized by connecting a total differential capacitance change signal into a rear-end processing detection circuit after a plurality of pairs of comb capacitors are connected in parallel.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention adopts pairwise orthogonal centrosymmetric design of eight folding beams, realizes orthogonal decoupling in the directions of two sensitive axes (X axis and Y axis), effectively inhibits structural orthogonal errors, and has higher double-axis detection precision.
2. According to the invention, the mass of the sensitive mass block can be adjusted, namely the size and the number of cavities in the mass block are adjusted, so that on one hand, the mass of the mass block can be increased, and the high-sensitivity and high-resolution detection of the biaxial accelerometer is realized; on the other hand, when the requirements of sensitivity and resolution are ensured, the mass of the mass block is properly reduced, and the measuring range of the accelerometer is increased.
3. According to the invention, by designing the cross-shaped fixing frame at the central position and the central anchor point structure, the electrode metal lead can be led out from the central anchor point (namely the center coincidence position of the first fixing rod and the second fixing rod) only by one Pad, so that the difficulty in the processing technology is greatly reduced, the product yield is improved, and the cost is reduced.
4. Through design symmetry stopper structure on cross fixed frame, prevented moving, decide overload actuation, the inefficacy problem of broach, increased biaxial accelerometer's stability and reliability.
5. Through the design of the mass block with the cavity, the system damping of the dual-axis accelerometer is reduced, the thermomechanical noise of the accelerometer is reduced, and the signal-to-noise ratio of the dual-axis accelerometer is improved.
6. The design of the fixed comb teeth with the peripheral frame and the central position respectively connected in the same polarity mode is adopted, mutual interference of double-shaft input signals is effectively avoided, the double-shaft accelerometer is free of cross sensitivity, the detection precision of the accelerometer is improved, meanwhile, differential capacitance detection is formed between the double-shaft accelerometer and the movable comb teeth, common mode interference can be effectively inhibited, and the comprehensive performance of the accelerometer is improved.
7. The comb teeth variable-spacing capacitor design is utilized, the initial capacitance value between the moving comb teeth and the fixed comb teeth is increased, and the design difficulty of a rear-end micro capacitor signal detection circuit is reduced.
8. The design of single-chip double-shaft acceleration avoids the problem of poor packaging verticality of the combined accelerometer, and meanwhile, the combined accelerometer is small in size, light in weight, free of vacuum packaging, mature in processing technology, capable of being manufactured in batches and low in cost.
While preferred embodiments of the present invention have been described, additional variations and modifications in those embodiments may occur to those skilled in the art once they learn of the basic inventive concepts. Therefore, it is intended that the appended claims be interpreted as including the preferred embodiment and all changes and modifications that fall within the scope of the invention.
It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Thus, it is intended that the present invention cover the modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents.
Claims (8)
1. A capacitive MEMS biaxial accelerometer is characterized in that the accelerometer sequentially comprises from bottom to top:
the device comprises a substrate, an insulating layer and a sensitive device layer; the sensitive device layer comprises: the device comprises a fixed frame, a folding beam, a sensitive mass block, a comb tooth combination and an anchor point; the fixed frame is fixed on the substrate through an anchor point, 4 end angles of the sensitive mass block are respectively provided with a pair of folding beams, the central lines of each pair of folding beams are orthogonal, one end of each folding beam is connected with the fixed frame, and the other end of each folding beam is connected with the sensitive mass block; a plurality of comb tooth combinations are distributed around the sensitive mass block, and the comb tooth combinations comprise: the comb comprises fixed comb teeth and movable comb teeth, wherein one end of each fixed comb tooth is connected with a fixed frame, one end of each movable comb tooth is connected with a sensitive mass block, and the mass of the sensitive mass block can be adjusted;
the accelerometer further comprises: a second stationary frame positioned within the sensitive mass, the second stationary frame comprising: first dead lever, second dead lever, first dead lever are the cross with second dead lever cross connection, the center coincidence of first dead lever and second dead lever, and first dead lever both sides and second dead lever both sides equal symmetric distribution have a plurality of second broach combinations, and the second broach combination includes: one end of the second fixed comb tooth is connected with the fixed rod, and one end of the second movable comb tooth is connected with the inner wall of the sensitive mass block;
the fixed comb teeth distributed on the periphery of the fixed frame are connected with the same electrodes, the second fixed comb teeth distributed on two sides of the second fixed frame are connected with the same electrodes, the number of the fixed comb teeth is equal to that of the second fixed comb teeth, and the electric polarities are opposite.
2. A capacitive MEMS biaxial accelerometer according to claim 1, wherein the 4 pairs of folded beams are symmetrical about the geometric centre of the proof mass and the plurality of comb tooth combinations are symmetrical about the centre line of the proof mass.
3. The capacitive MEMS biaxial accelerometer according to claim 1, wherein two ends of the first fixing bar and two ends of the second fixing bar extend toward the inner wall of the proof mass, and two ends of the first fixing bar and two ends of the second fixing bar are respectively provided with a limiting structure.
4. A capacitive MEMS biaxial accelerometer according to claim 1, wherein at least one cavity is uniformly provided within the proof mass block.
5. The capacitive MEMS biaxial accelerometer of claim 1, wherein the insulating layer is provided with a central anchor point, the second fixing frame is fixed on the substrate through the central anchor point, the insulating layer is provided with peripheral anchor points, and the fixing frame is fixed on the substrate through the peripheral anchor points.
6. The capacitive MEMS biaxial accelerometer according to claim 1, wherein the fixed comb teeth and the movable comb teeth are parallel and have an overlapping area in horizontal direction or vertical direction, and the gap ratio between the movable comb teeth and two adjacent fixed comb teeth is 1:4.
7. A capacitive MEMS biaxial accelerometer according to claim 1, wherein the substrate is made of silicon or glass, the sensitive device layer is heavily doped silicon, and the accelerometer is fabricated by MEMS processing.
8. A capacitive MEMS biaxial accelerometer according to claim 1, wherein the proof mass achieves mass tuning by varying the size and number of cavities within the proof mass.
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| GB2565295A (en) | 2017-08-07 | 2019-02-13 | Atlantic Inertial Systems Ltd | Accelerometer |
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| CN113753843B (en) * | 2021-07-04 | 2024-01-16 | 西北工业大学 | MEMS ring resonator with high vibration mode stability |
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