CN111551761B - Low-noise MEMS accelerometer - Google Patents
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- G—PHYSICS
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- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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Abstract
The invention discloses a low-noise MEMS accelerometer, which consists of a structural layer and a substrate layer, wherein the structural layer comprises a mass block, a beam, a comb tooth group and a riveting point; wherein, the riveting points are fixed on the substrate, and the comb tooth group and the riveting points connected with the comb tooth group are distributed in the mass block; one end of the beam is connected with the mass block, the other end of the beam is connected with the riveting points, and the beam and the riveting points connected with the beam are distributed on the periphery of the mass block; the comb teeth group comprises detection comb teeth and detection comb teeth with variable areas. The invention reduces the damping by adopting the variable-area comb tooth structure, thereby reducing the Brownian noise.
Description
Technical Field
The invention relates to the technical field of MEMS sensor equipment, in particular to a low-noise MEMS accelerometer.
Background
MEMS accelerometers have the characteristics of small volume, light weight, low cost and the like, and are widely applied in more and more fields at present. However, the mass of the proof mass block of the MEMS accelerometer is very small, and the thermal noise (i.e. brownian noise) is very large, so that the requirements of low-noise fields, such as earthquake, bridge monitoring, geological exploration and the like, cannot be met.
Disclosure of Invention
The invention provides a low-noise MEMS accelerometer, aiming at solving the limitation that the existing MEMS accelerometer cannot meet the low-noise field. The invention adopts the variable-area comb tooth structure, and reduces the damping, thereby reducing the Brownian noise.
The invention is realized by the following technical scheme:
a low-noise MEMS accelerometer is composed of a structural layer and a substrate layer, wherein the structural layer comprises a mass block, a beam, a comb tooth group and a riveting point; wherein, the riveting points are fixed on the substrate, and the comb tooth group and the riveting points connected with the comb tooth group are distributed in the mass block; one end of the beam is connected with the mass block, the other end of the beam is connected with the riveting points, and the beam and the riveting points connected with the beam are distributed on the periphery of the mass block; the comb teeth group comprises detection comb teeth and detection comb teeth with variable areas.
Preferably, the detection comb teeth of the invention are composed of movable teeth and fixed teeth, the distances between the movable teeth and the fixed teeth are equal, the motion of the mass block causes the change of the overlapping length between the movable teeth and the fixed teeth to cause capacitance change, and a plurality of groups of detection comb teeth which are symmetrical about the center of the mass block form a differential detection capacitor to realize acceleration measurement.
Preferably, the invention adopts two groups of detection comb teeth, the number, the overlapping length and the gap of the comb teeth of the two groups of detection comb teeth are the same, the moving teeth of each group of detection comb teeth are connected with the mass block, the fixed teeth of each group of detection comb teeth are connected with the riveting point, and the two groups of detection comb teeth form a differential capacitor to realize the detection of acceleration; the capacitance difference between the two groups of detection comb teeth is:
wherein, Cs1Capacitance for a group of detection comb teeth, Cs2Capacitance of the other set of detection fingers, nsFor detecting the number of unit groups of the comb teeth, t is the thickness of the structural layer, epsilon is the dielectric constant, d0Is the gap between the moving tooth and the fixed tooth, a is the acceleration, omega0Is the resonant frequency;
as can be seen from the above formula,. DELTA.CsIs proportional to the acceleration a, detects Δ CsThe magnitude of the acceleration can be obtained.
In order to further improve the measurement performance, the invention also eliminates the oscillation phenomenon through closed-loop control. Preferably, the comb tooth group further comprises feedback comb teeth, the feedback comb teeth are variable-area comb teeth, the feedback comb teeth are composed of moving teeth and fixed teeth, the distances between the moving teeth and the fixed teeth are equal, the overlapping lengths of the moving teeth and the fixed teeth are changed under the action of static electricity, and a differential driving structure is formed by the feedback comb teeth which are symmetrical about the center of the mass block and a plurality of groups of feedback comb teeth are adopted to realize closed-loop control.
Preferably, the invention adopts two groups of feedback comb teeth, the overlapping length and the gap of the two groups of feedback comb teeth are the same, the moving teeth of each group of feedback comb teeth are connected with the mass block, the fixed teeth of each group of feedback comb teeth are connected with the riveting point, and the static action on the mass block is as follows:
wherein, Fe1Electrostatic force, F, to which a set of feedback combs is subjectede2For another set of feedback comb teeth subjected to electrostatic forces, VrAnd VfRespectively, the drive voltages of two groups of feedback comb teeth, epsilon is dielectric constant, d2Is the gap between the moving tooth and the fixed tooth, n2The number of unit groups of the feedback comb teeth is t, and the thickness of the structural layer is t;
through Vr，VfThe value of (2) can be known as the acceleration of the electrostatic action, and closed-loop detection is achieved.
In order to improve the detection sensitivity and reduce the noise, the invention also arranges the static negative stiffness comb teeth to further reduce the resonance frequency of the system. Preferably, the comb tooth group further comprises static negative stiffness comb teeth, the static negative stiffness comb teeth are variable-pitch comb teeth, the static negative stiffness comb teeth are composed of moving teeth and fixed teeth, the pitches between the moving teeth and the fixed teeth are the same, and the static negative stiffness is generated by applying voltage between the moving teeth and the fixed teeth so as to reduce the resonant frequency of the system.
Preferably, the static negative rigidity comb teeth of the invention moveThe teeth are connected with the mass block, the fixed teeth of the static negative stiffness comb teeth are connected with the riveting points, and the overlapping length of the moving teeth and the fixed teeth of the static negative stiffness comb teeth is l1The clearance between the moving teeth and the fixed teeth is d1And applying a voltage V between the moving teeth and the fixed teeth, wherein when the displacement of the mass block 1 is delta x, the electrostatic force applied to the moving teeth is as follows:
wherein n is1Is the number of groups of comb teeth, epsilon is the dielectric constant, t is the thickness of the structural layer, FeDerivation of Δ x:
keconsider k for electrostatic negative stiffnesseThe resonant frequency of the system is:
kmis the stiffness of the beam, due to physical size constraints, by lowering kmThere is a limit to reducing the resonant frequency, keThe effect of (2) can further reduce the system rigidity, thereby reducing the system resonance frequency and improving the detection sensitivity. Meanwhile, the invention can realize different k by adjusting the voltage VeWhen process errors cause kmAt different times, by changing keThe same resonance frequency can be realized, and the stability and the yield of the MEMS accelerometer parameters can be improved.
Preferably, the mass block has a central symmetrical structure.
The invention has the following advantages and beneficial effects:
the invention reduces the damping by adopting the variable-area comb tooth structure, thereby reducing the Brownian noise. The variable-pitch comb tooth structure is adopted to generate static negative rigidity to reduce structural resonance frequency, so that the sensitivity of the MEMS accelerometer is increased, and the purpose of reducing noise is achieved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:
fig. 1 is a schematic structural diagram of an accelerometer of the present invention.
FIG. 2 is a unit structure of the detection comb teeth of the present invention.
Fig. 3 is a unit structure of the electrostatic negative stiffness comb teeth of the present invention.
FIG. 4 is a unit structure of the feedback comb of the present invention.
Detailed Description
Hereinafter, the term "comprising" or "may include" used in various embodiments of the present invention indicates the presence of the invented function, operation or element, and does not limit the addition of one or more functions, operations or elements. Furthermore, as used in various embodiments of the present invention, the terms "comprises," "comprising," "includes," "including," "has," "having" and their derivatives are intended to mean that the specified features, numbers, steps, operations, elements, components, or combinations of the foregoing, are only meant to indicate that a particular feature, number, step, operation, element, component, or combination of the foregoing, and should not be construed as first excluding the existence of, or adding to the possibility of, one or more other features, numbers, steps, operations, elements, components, or combinations of the foregoing.
In various embodiments of the invention, the expression "or" at least one of a or/and B "includes any or all combinations of the words listed simultaneously. For example, the expression "a or B" or "at least one of a or/and B" may include a, may include B, or may include both a and B.
Expressions (such as "first", "second", and the like) used in various embodiments of the present invention may modify various constituent elements in various embodiments, but may not limit the respective constituent elements. For example, the above description does not limit the order and/or importance of the elements described. The foregoing description is for the purpose of distinguishing one element from another. For example, the first user device and the second user device indicate different user devices, although both are user devices. For example, a first element could be termed a second element, and, similarly, a second element could be termed a first element, without departing from the scope of various embodiments of the present invention.
It should be noted that: if it is described that one constituent element is "connected" to another constituent element, the first constituent element may be directly connected to the second constituent element, and a third constituent element may be "connected" between the first constituent element and the second constituent element. In contrast, when one constituent element is "directly connected" to another constituent element, it is understood that there is no third constituent element between the first constituent element and the second constituent element.
The terminology used in the various embodiments of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the various embodiments of the invention. As used herein, the singular forms are intended to include the plural forms as well, unless the context clearly indicates otherwise. Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which various embodiments of the present invention belong. The terms (such as those defined in commonly used dictionaries) should be interpreted as having a meaning that is consistent with their contextual meaning in the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein in various embodiments of the present invention.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.
Examples
The present embodiment proposes a low noise MEMS accelerometer.
As shown in fig. 1, the accelerometer MEMS accelerometer of the present embodiment is composed of a structural layer and a substrate, which is not shown in the figure. The structural layer includes: the mass block comprises a mass block 1, a beam 2, comb tooth groups (4, 5, 7,8, 10,11, 13,14, 16, 17) and riveting points (3, 6, 9, 12, 15, 18). The riveting points are all fixed on the substrate. One end of the beam 2 is connected with the mass block 1, and the other end of the beam 2 is connected with the riveting point 3. The beams 2 and the rivet points 3 are distributed around the mass block 1 and are symmetrical with respect to the center of the mass block.
In this embodiment, the beams 2 and the rivets 3 are symmetrically distributed about the centre of the mass.
In this embodiment, the mass block 1 has a centrosymmetric structure.
When acceleration along the X direction occurs, the mass 1 can move in the X direction with the following movement displacements:
wherein a is the acceleration, omega0Is the resonant frequency.
The comb teeth 4,5, 7,8, 10,11, 13,14, 16, 17 and the rivet points 6, 9, 12, 15, 18 are distributed within the mass 1.
4 one end of broach is connected with quality piece 1, and the one end of broach 5 links to each other with riveting point 6, and broach 4 is for moving the tooth, and broach 5 is for deciding the tooth, and broach 4 and broach 5 constitute the detection broach. The comb teeth 4 and 5 are overlapped with each other with an overlap length of l0The gaps between the comb teeth 4 and 5 in the Y direction are d0A variable capacitance C is formed between the comb teeth 4 and 5s1. The comb teeth 4 and 5 may be composed of several sets of the unit structures of fig. 2(a) as required. When the displacement of the mass block 1 is Δ x, the overlapping length of the comb teeth 4 and 5 is changed, Cs1Comprises the following steps:
wherein n issIs the number of comb tooth groups, epsilon is the dielectric constant, and t is the thickness of the structural layer.
One end of a comb tooth 7 is connected with the mass block 1, and one end of a comb tooth 8 is connected with the rivetThe point 9 is connected, the comb teeth 7 are moving teeth, the comb teeth 8 are fixed teeth, and the comb teeth 7 and the comb teeth 8 form detection comb teeth. The comb teeth 7 and 8 are mutually overlapped with the overlapping length of l0The clearance between the comb teeth 7 and 8 in the Y direction is d0A variable capacitance C is formed between the comb teeth 7 and 8s2. That is, the overlapping length and the gap between the comb teeth 7 and 8 are the same as those between the comb teeth 4 and 5. The comb teeth 7 and 8 can be composed of a plurality of groups of unit structures in fig. 2(b) according to requirements, and the number of unit groups of the comb teeth 7 and 8 is the same as that of the comb teeth 4 and 5. The comb teeth 7 and 8 are symmetrical to the comb teeth 4 and 5 with respect to the center of the mass 1. When the displacement of the mass block 1 is Δ x, the overlapping length of the comb teeth 7 and 8 changes, Cs2Comprises the following steps:
comb teeth 4,5 and comb teeth 7,8 form capacitance differential detection, Cs1And Cs2The difference is:
from the above formula, Δ CsIs proportional to the acceleration a, detects Δ CsThe magnitude of the acceleration can be obtained. From the above formula, Δ CsWith resonant frequency omega0Is inversely proportional to the square of ω0The smaller, Δ CsThe larger the detection sensitivity, the smaller the equivalent noise.
One end of a comb 16 is connected with the mass block 1, one end of a comb 17 is connected with a riveting point 18, the comb 16 is a moving tooth, the comb 17 is a fixed tooth, and the comb 16 and the comb 17 form static negative stiffness comb. The comb teeth 16 and 17 are overlapped with each other by a length l1The clearance in the X direction between the comb teeth 16 and 17 is d1The comb teeth 16 and 17 may be composed of several sets of the unit structures of fig. 3 as required. A voltage V is applied between the comb teeth 16 and 17, and when the displacement of the mass 1 is Δ x, the electrostatic force applied to the comb teeth 16 is:
wherein n is1Number of sets of teeth, FeThe derivative is taken of the value of deltax,
keconsider k for electrostatic negative stiffnesseThe resonant frequency of the system is:
wherein k ismIs the stiffness of the beam 2, due to physical size constraints, by lowering kmThere is a limit to reducing the resonant frequency, keThe effect of (2) can further reduce the system rigidity, thereby reducing the system resonance frequency and improving the detection sensitivity. Moreover, different k can be realized by adjusting the magnitude of the voltage VeWhen process errors cause kmAt different times, by changing keThe same resonance frequency can be realized, and the stability and the yield of the MEMS accelerometer parameters can be improved.
The brownian noise of a MEMS accelerometer is:
kbboltzmann constant, T absolute temperature, c damping coefficient, and m mass. Damping between broach 4 and 5 and broach 7 and 8 is the synovial membrane damping, compares in squeeze film damping, and the damping coefficient of synovial membrane damping is many littleer, is favorable to reducing the Brown noise.
Under the condition of small damping coefficient, the mass block 1 can generate oscillation phenomenon under the action of acceleration, and the phenomenon can be eliminated through closed-loop control.
one end of a comb tooth 13 is connected with the mass block 1, one end of a comb tooth 14 is connected with the riveting point 15, the comb tooth 13 is a moving tooth, the comb tooth 14 is a fixed tooth, and the comb tooth 13 and the comb tooth 14 form a feedback comb tooth. The comb teeth 13 and 14 are overlapped with each other by a length l2The gap between the comb teeth 13 and 14 in the Y direction is d2I.e. the overlap length and the gap between the comb teeth 13,14 are the same as the overlap length and the gap between the comb teeth 10, 11. The comb teeth 13 and 14 may be composed of a plurality of sets of unit structures shown in fig. 4(b) as required, and the number of unit groups of the comb teeth 13 and 14 is the same as that of the comb teeth 10 and 11. Comb teeth 13 and 14 are symmetrical to comb teeth 10 and 11 with respect to the center of mass 1. A voltage V is applied between the comb teeth 13 and 14r-VfThe electrostatic force to which the comb teeth 13 are subjected is:
Fe1，Fe2the action directions are opposite and act on the mass block through the comb teeth, and the resultant force of the mass block is:
adjusting Vr，VfValue of (1)The following holds:
through Vr，VfThe value of the acceleration can be known, and the effect of closed-loop detection is achieved. Damping between the comb teeth 10 and 11 and between the comb teeth 13 and 14 is synovial damping, which is also beneficial to reducing Brownian noise.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are merely exemplary embodiments of the present invention, and are not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (7)
1. A low-noise MEMS accelerometer is characterized in that the accelerometer is composed of a structural layer and a substrate layer, wherein the structural layer comprises a mass block, a beam, a comb tooth group and a riveting point; wherein, the riveting points are fixed on the substrate, and the comb tooth group and the riveting points connected with the comb tooth group are distributed in the mass block; one end of the beam is connected with the mass block, the other end of the beam is connected with the riveting points, and the beam and the riveting points connected with the beam are distributed on the periphery of the mass block; the comb tooth group comprises detection comb teeth which are variable-area comb teeth;
the comb tooth group further comprises feedback comb teeth, the feedback comb teeth are variable-area comb teeth, the feedback comb teeth are formed by moving teeth and fixed teeth, the distances between the moving teeth and the fixed teeth are equal, the overlapping lengths of the moving teeth and the fixed teeth are changed under the action of static electricity, and the feedback comb teeth which are symmetrical about the center of the mass block in a plurality of groups form a differential driving structure to achieve closed-loop control.
2. The low noise MEMS accelerometer of claim 1, wherein the sensing comb is composed of a moving tooth and a fixed tooth, the moving tooth and the fixed tooth are equally spaced, the movement of the mass block causes the change of the overlapping length between the moving tooth and the fixed tooth to cause the capacitance change, and the acceleration is measured by using a differential sensing capacitor composed of a plurality of sets of sensing comb symmetrical about the center of the mass block.
3. The low-noise MEMS accelerometer according to claim 2, wherein two sets of detection comb teeth are adopted, the number, the overlapping length and the gap of the comb teeth of the two sets of detection comb teeth are the same, the moving teeth of each set of detection comb teeth are connected with the mass block, the fixed teeth of each set of detection comb teeth are connected with the rivet point, and the two sets of detection comb teeth form a differential capacitor to realize the detection of acceleration; the capacitance difference between the two groups of detection comb teeth is:
wherein, Cs1Capacitance for a group of detection comb teeth, Cs2Capacitance of the other set of detection fingers, nsFor detecting the number of unit groups of the comb teeth, t is the thickness of the structural layer, epsilon is the dielectric constant, d0Is the gap between the moving tooth and the fixed tooth, a is the acceleration, omega0Is the resonant frequency;
as can be seen from the above formula,. DELTA.CsIs proportional to the acceleration a, detects Δ CsThe magnitude of the acceleration can be obtained.
4. A low noise MEMS accelerometer according to claim 1, wherein two sets of feedback comb teeth are used, the overlapping length and gap of the two sets of feedback comb teeth are the same, the moving teeth of each set of feedback comb teeth are connected to the mass block, the fixed teeth of each set of feedback comb teeth are connected to the rivet point, and the electrostatic effect on the mass block is:
wherein, Fe1Electrostatic force, F, to which a set of feedback combs is subjectede2For another set of feedback comb teeth subjected to electrostatic forces, VrAnd VfRespectively, the drive voltages of two groups of feedback comb teeth, epsilon is dielectric constant, d2Is the gap between the moving tooth and the fixed tooth, n2The number of unit groups of the feedback comb teeth is t, and the thickness of the structural layer is t;
through Vr，VfThe value of (2) can be known as the acceleration of the electrostatic action, and closed-loop detection is achieved.
5. The low-noise MEMS accelerometer according to claim 1, wherein the comb-teeth set further comprises static negative stiffness comb-teeth, the static negative stiffness comb-teeth are variable-pitch comb-teeth, the static negative stiffness comb-teeth are composed of moving teeth and fixed teeth, the pitches between the moving teeth and the fixed teeth are the same, and the application of voltage between the moving teeth and the fixed teeth can generate static negative stiffness to reduce the resonant frequency of the system.
6. The low-noise MEMS accelerometer according to claim 5, wherein the movable teeth of the static negative stiffness comb teeth are connected to the mass block, the fixed teeth of the static negative stiffness comb teeth are connected to the rivet point, and the overlapping length of the movable teeth and the fixed teeth of the static negative stiffness comb teeth is l1The clearance between the moving teeth and the fixed teeth is d1And applying a voltage V between the moving teeth and the fixed teeth, wherein when the displacement of the mass block 1 is delta x, the electrostatic force applied to the moving teeth is as follows:
wherein n is1Is the number of groups of comb teeth, epsilon is the dielectric constant, t is the thickness of the structural layer, FeDerivation of Δ x:
keto electrostatic negative stiffness, kmFor beam stiffness, consider keThe resonant frequency of the system is:
kmis the stiffness of the beam, due to physical size constraints, by lowering kmThere is a limit to reducing the resonant frequency, keThe effect of (2) is to further reduce the system rigidity, thereby reducing the system resonance frequency and improving the detection sensitivity.
7. A low noise MEMS accelerometer according to any of claims 1 to 3, wherein said mass is a centrosymmetric structure.
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| CN114088976B (en) * | 2022-01-24 | 2022-04-12 | 成都华托微纳智能传感科技有限公司 | Comb gap adjustable MEMS accelerometer |
| CN115061213A (en) * | 2022-05-30 | 2022-09-16 | 华中科技大学 | MEMS relative gravimeter probe based on variable-area comb capacitors and gravimeter |
| US11906693B2 (en) | 2022-05-30 | 2024-02-20 | Huazhong University Of Science And Technology | Variable-area comb capacitor-based MEMS relative gravimeter probe and gravimeter |
| CN114814293B (en) * | 2022-06-29 | 2022-09-09 | 成都华托微纳智能传感科技有限公司 | MEMS accelerometer with sawtooth-shaped comb tooth structure |
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