CN106921383A - Low-power-consumption low-noise MEMS accelerometer interface circuit - Google Patents
Low-power-consumption low-noise MEMS accelerometer interface circuit Download PDFInfo
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- H—ELECTRICITY
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Abstract
The invention discloses a low-power consumption and low-noise MEMS accelerometer interface circuit, which comprises: the MEMS accelerometer comprises a charge converter circuit, a PI controller circuit and a differential drive circuit, wherein pulse voltages with opposite phases are respectively input to a detection positive electrode SP and a detection negative electrode SN of the MEMS accelerometer, a driving positive electrode and a driving negative electrode of the MEMS accelerometer are respectively connected with two output ends of the differential drive circuit, and a MASS (MASS mask) of an intermediate electrode of the MEMS accelerometer is connected with an input end of the charge converter circuit; the output end of the charge converter circuit is connected with the input end of the PI controller circuit; the input of the PI controller circuit is single-ended input, the output of the PI controller circuit is differential output, the output of the PC controller circuit is connected with the input end of the differential drive circuit, monolithic integration of all control systems is achieved, external discrete devices are not needed, the structure is simpler, and the technical effects of lower power consumption and lower noise are achieved.
Description
Technical field
The present invention relates to mems accelerometer field, in particular it relates to a kind of low-power consumption low noise mems accelerometer connects
Mouth circuit.
Background technology
Mems accelerometer be mainly used in measure moving object relative to inertial space acceleration, due to its small volume,
It is low in energy consumption, easy of integration, the features such as can be mass, make it in fields such as automobile engineering, vibration detection, aerial navigation and Military Applications
More and more important effect is played in conjunction.
Mems accelerometer can be divided into open loop accelerometer and closed-loop accelerometer according to its operation principle.Open loop accelerates
Degree meter measures acceleration by measuring caused by mass change in displacement capacitance variations, and precision is relatively low, poor linearity.Closed loop adds
Speedometer is also referred to as force-balance accelerometer, and its operation principle is：When inertia force is acted on mass, closed-loop system detection
Mass displacement, and produce makes mass locate all the time with inertia force electrostatic force equal in magnitude, in opposite direction, counteracting inertia force
In equilbrium position., because of its operation principle, the linearity is high, noise is low for closed-loop accelerometer, is very suitable for seismic monitoring, inclination angle and surveys
The high-acruracy surveys such as amount.
Closed-loop accelerometer interface circuit the more commonly used at present includes：The PID close-loop control modes and digital-to-analogue of full simulation
The Delta-sigma close-loop control modes of mixing；With respect to Delta-sigma close-loop control modes, PID closed loop configurations are simple, work(
Consume low, technology maturation reliability；It is typically left in one or two KHz because high precision closed loop mems accelerometer resonant frequency is very low
The right side, in traditional PID closed-loop accelerometers, integration or electric capacity needed for differential circuit are very big, it is impossible to integrated in ASIC, lead to
Often need to use discrete device, be unfavorable for miniaturization and the system integration.
The content of the invention
The invention provides a kind of low-power consumption low noise mems accelerometer interface circuit, traditional PID closed loops are solved
In accelerometer, it is impossible to integrated in ASIC, it is unfavorable for the technical problem of miniaturization and the system integration, realizes all control systems
The single-chip integration of system, without external discrete device, structure is simpler, the lower technique effect of power consumption, noise.
In order to solve the above technical problems, this application provides a kind of low-power consumption low noise mems accelerometer interface circuit,
Whole system includes：Mems accelerometer 1, charge converter circuit 2, PI controller circuitrys 3 and differential drive circuit 4.
The pulse voltage detection positive pole SP of mems accelerometer 1 opposite with detection negative pole SN difference input phases, MEMS
The driving positive pole and driving negative pole of accelerometer 1 connect two output ends of differential driving amplifier 4, electricity in the middle of MEMS acceleration respectively
Pole MASS connects the input of charge converter circuit 2；The input of the output termination PI of charge converter circuit 2 controller circuitrys 3；PI is controlled
The input of device circuit 3 processed is single ended input, is output as difference output, and PC controller circuitrys 3 export the input for connecing differential drive circuit 4
End.
Wherein, charge converter circuit 2 is one of core circuit of the present invention.The input VI_ of charge converter circuit 2
The anode of CSA connecting resistances R1 and the anode of electric capacity C1；The negative terminal of resistance R1 meets analog reference voltage REF1；The negative terminal of electric capacity C1 with
The grid of NMOS tube MN1 is connected with the anode of electric capacity C2；The source electrode of MN1 is connected to simulation ground, and drain electrode meets current source Is1Negative terminal；Electric current
Source Is1Anode is connected with power supply；Current source Is1The drain electrode of the negative terminal, MN1 of negative terminal and C2 is connected to circuit converter output end together
VO_CSA。
Wherein, PI controller circuitrys 3 are one of core circuit of the present invention.The input VI_PI of PI controller circuitrys is connected to
The anode of electric capacity C3；The negative terminal of C3 is connected with switch PH1, PH2 with the input of PH3 respectively；Switch the output end and resistance of PH1
The anode of R2 connects, and the negative input end with amplifier OP1 connects；The output end for switching PH2 connects with the anode of resistance R3, with amplifier
The negative input end of OP2 connects；The positive input terminal of the output end and amplifier OP1, OP2 that switch PH3 is connected to common mode ground together；R2 is just
End is connected with the anode of electric capacity C4；The negative terminal of C4 is connected with the output end of amplifier OP1, and is connected to the output of PI controller circuitrys 3
Positive pole；The anode of R3 is connected with the anode of electric capacity C5；The negative terminal of C5 is connected with the output end of amplifier OP1, and is connected to PI controllers
The output negative pole of circuit 3.
One or more technical schemes that the application is provided, at least have the following technical effect that or advantage：
The present invention proposes a kind of PI closed-loop control accelerometer interface circuits of novelty, and the interface circuit realizes whole
The single-chip integration of control system, without external discrete device, the interface circuit realizes that PI is controlled using advanced switched capacitor technique
Device processed, makes integrating capacitor size be reduced to scope that can be integrated, and the interface circuit is using novel, low noise, simple structure
Charge converter, make that closed-loop system power consumption is lower, performance is more excellent, compared to traditional PI D closed control circuits, whole system structure
Simpler, power consumption, noise are lower.
Brief description of the drawings
Accompanying drawing described herein is used for providing further understanding the embodiment of the present invention, constitutes of the application
Point, do not constitute the restriction to the embodiment of the present invention；
Fig. 1 is the structural representation of mems accelerometer interface circuit in the application；
Fig. 2 is charge converter circuit diagram in the application；
Fig. 3 is PI controller circuitry schematic diagrames in the application；
Fig. 4 is charge converter circuit working example schematic diagram in the application；
Fig. 5 is PI controller timing schematic diagrames in the application；
Fig. 6 is the transient response schematic diagram of closed-loop system in the application.
Specific embodiment
The invention provides a kind of low-power consumption low noise mems accelerometer interface circuit, traditional PID closed loops are solved
In accelerometer, it is impossible to integrated in ASIC, it is unfavorable for the technical problem of miniaturization and the system integration, realizes all control systems
The single-chip integration of system, without external discrete device, structure is simpler, the lower technique effect of power consumption, noise.
It is below in conjunction with the accompanying drawings and specific real in order to be more clearly understood that the above objects, features and advantages of the present invention
Mode is applied to be further described in detail the present invention.It should be noted that in the case where not conflicting mutually, the application's
Feature in embodiment and embodiment can be mutually combined.
Many details are elaborated in the following description in order to fully understand the present invention, but, the present invention may be used also
Implemented with the other modes in the range of using other being different from being described herein, therefore, protection scope of the present invention do not receive down
The limitation of specific embodiment disclosed in face.
Fig. 1-Fig. 6 is refer to, the system that the application is provided includes：5 electrode mems accelerometers 1, charge converter circuit
2nd, PI controller circuitrys 3 and differential drive circuit 4.
The pulse voltage detection positive pole SP of mems accelerometer 1 opposite with detection negative pole SN difference input phases, MEMS
The driving positive pole and driving negative pole of accelerometer 1 connect two output ends of differential driving amplifier 4, electricity in the middle of MEMS acceleration respectively
Pole MASS connects the input of charge converter circuit 2；The input of the output termination PI of charge converter circuit 2 controller circuitrys 3；PI is controlled
The input of device circuit 3 processed is single ended input, is output as difference output, and PC controller circuitrys 3 export the input for connecing differential drive circuit 4
End.
It is illustrated in figure 2 the circuit diagram of charge converter circuit 2.The input VI_CSA connecting resistances of charge converter circuit 2
The anode of R1 and the anode of electric capacity C1；The negative terminal of resistance R1 meets analog reference voltage REF1；The negative terminal of electric capacity C1 and NMOS tube MN1
Grid be connected with the anode of electric capacity C2；The source electrode of MN1 is connected to simulation ground, and drain electrode meets current source Is1Negative terminal；Current source Is1Anode
It is connected with power supply；Current source Is1The drain electrode of the negative terminal, MN1 of negative terminal and C2 is connected to circuit converter output end VO_CSA together.
Charge converter is connected with actual acceleration meter, and example when working together is as shown in Figure 4.Current source Is1And NMOS
Pipe MN1 constitutes simple single amplifier.The single amplifier compared with traditional amplifier, simple structure, micro power consumption, while
Because the reduction of device number, noise is also decreased.In the structure, main device noise is the thermal noise of MN1.By suitable
As increase Is1The breadth length ratio of electric current and MN1, can effectively reduce noise, even so, can still ensure than traditional amplifier more
Small power consumption.
Electric capacity C1 separates mems accelerometer target and MN1 grids.Mems accelerometer target is without straight
The reason for connecing MN1 grids is that the grid voltage of MN1 can occur larger drift with temperature change.Separate MEMS with C1 to add
The benefit of speedometer target and MN1 grids is also resided in：Can be by a big resistance R1 to electricity in the middle of mems accelerometer
Pole provides stablizes clean bias voltage REF1, and preferably bias voltage REF1 connects simulation ground.
Two detecting electrodes of mems accelerometer distinguish the opposite pulse voltage V of input phases+And Vs-.C1 can be by
The pulse signal that detecting electrode is coupled to middle plate is coupled to MN1 grids, namely is coupled to MN1 and Is1The monopole of composition
Amplifier in.Therefore, charge converter circuit output voltage is and Vs+And Vs-Proportional pulse signal.
Assuming that MN1 and Is1The single amplifier gain of composition is infinitely great, then can release the output of charge converter circuit
For：
Wherein, Cs+And Cs-Respectively positive and negative electrode detects electric capacity, and VO_CSA is charge converter output voltage.
Make Δ Cs=Cs+-Cs-, because Vs+=-Vs-, formula 1.1 can be changed into：
In order to strengthen sensitivity and the signal to noise ratio of charge converter circuit, when side circuit is designed, C1 ＞ ＞ are made as far as possible
Cs+, it is reduced to formula 1.2：
As shown in figure 3, being the circuit diagram of PI controller circuitrys 3.The input VI_PI of PI controller circuitrys is connected to electric capacity C3's
Anode；The negative terminal of C3 is connected with switch PH1, PH2 with the input of PH3 respectively；Switch the output end of PH1 and the anode of resistance R2
Connect, the negative input end with amplifier OP1 connects；The output end for switching PH2 connects with the anode of resistance R3, negative with amplifier OP2
Input connects；The positive input terminal of the output end and amplifier OP1, OP2 that switch PH3 is connected to common mode ground together；The anode of R2 and electricity
The anode for holding C4 is connected；The negative terminal of C4 is connected with the output end of amplifier OP1, and is connected to the output cathode of PI controller circuitrys 3；R3
Anode be connected with the anode of electric capacity C5；The negative terminal of C5 is connected with the output end of amplifier OP1, and is connected to PI controller circuitrys 3
Output negative pole.
In PI control circuits, electric capacity C3 and switch PH1, PH2, PH3 constitute switched-capacitor circuit, constantly to integrating capacitor C4
With C5 transfer charges.
As shown in figure 5, being the timing diagram of circuit work.PH1, PH2 and PH3 are non-overlapping.As pulse signal Vs+And Vs- electricity
Steady timing, switch PH3 is opened, and makes C3 negative terminal voltages be zero.PH3 close after, switch PH1 or PH2 open, make C3 negative terminal and
The negative input end of amplifier OP1 or OP2 is connected.Then, Vs+And Vs-Level overturns, and charge converter output voltage is also therewith
Overturn, and by C3 by electric charge transfer to integrating capacitor C4 or C5, the quantity of electric charge Q of transfer is：
Wherein, | VO_CSA | represents the amplitude of charge converter output pulse signal, VsRepresent Vs+And Vs-Amplitude.
The equivalent resistance R of the switched-capacitor circuit of C3 and switch compositionEQFor：
Wherein, fsIt is switching frequency.
Make C4=C5=Ci, the transfer function H of R2=R3=Rp, PI controllerPIS () is：
Because high accuracy mems accelerometer resonant frequency is very low, typically in one or two KHz or so, therefore it is required that integration
Device unity gain bandwidth is very low, could meet stability requirement.Traditional PI circuits are typically by increasing integrating capacitor reduction product
Divide device unity gain bandwidth.But the problem so brought is integrating capacitor excessive and cannot realize Embedded.
In PI controller circuitrys shown in the present invention, can easily REQIncrease to 10M ohm of rank, such as, when
C3=0.8pf, during switching frequency 200KHz, REQCan reach about 10M ohm.Therefore without very big integrating capacitor, just may be used
By the reduction of integrator unity gain bandwidth, such that it is able to integrating capacitor C4 and C5 are integrated in piece.
As an example, interface circuit of the present invention and the mems accelerometer that a resonant frequency is 1.5KHz realize closed loop system
System.PI controller circuitry parameters are：C3=0.8pF, C4=C5=250pF, R2=R3=50K Ω, completely can be in chip integration
Into.As shown in fig. 6, being closed-loop system transient response.When acceleration is 2g, differential output voltage is about 1.6V, and transient response is built
It is about 2.5mS between immediately.
Technical scheme in above-mentioned the embodiment of the present application, at least has the following technical effect that or advantage：
The present invention proposes a kind of PI closed-loop control accelerometer interface circuits of novelty, and the interface circuit realizes whole
The single-chip integration of control system, without external discrete device, the interface circuit realizes that PI is controlled using advanced switched capacitor technique
Device processed, makes integrating capacitor size be reduced to scope that can be integrated, and the interface circuit is using novel, low noise, simple structure
Charge converter, make that closed-loop system power consumption is lower, performance is more excellent, compared to traditional PI D closed control circuits, whole system structure
Simpler, power consumption, noise are lower.
, but those skilled in the art once know basic creation although preferred embodiments of the present invention have been described
Property concept, then can make other change and modification to these embodiments.So, appended claims are intended to be construed to include excellent
Select embodiment and fall into having altered and changing for the scope of the invention.
Obviously, those skilled in the art can carry out various changes and modification without deviating from essence of the invention to the present invention
God and scope.So, if these modifications of the invention and modification belong to the scope of the claims in the present invention and its equivalent technologies
Within, then the present invention is also intended to comprising these changes and modification.
Claims (3)
1. a kind of low-power consumption low noise mems accelerometer interface circuit, it is characterised in that the interface circuit includes：
Charge converter circuit, PI controller circuitrys, differential drive circuit, the detection positive pole SP of mems accelerometer and detection are negative
The opposite pulse voltage of pole SN difference input phases, the driving positive pole and driving negative pole of mems accelerometer connect differential driving respectively
Two output ends of circuit, mems accelerometer target MASS connects the input of charge converter circuit；Charge converter
The input of the output termination PI controller circuitrys of circuit；The input of PI controller circuitrys is single ended input, is output as difference defeated
Go out, the output of PC controller circuitrys connects the input of differential drive circuit.
2. low-power consumption low noise mems accelerometer interface circuit according to claim 1, it is characterised in that the electric charge
Converter circuit includes：Resistance R1, electric capacity C1, C2, NMOS tube MN1 and bias current sources Is, the input of charge converter circuit
Hold the anode of VI_CSA connecting resistances R1 and the anode of electric capacity C1；The negative terminal of resistance R1 meets analog reference voltage REF1；Electric capacity C1's
Negative terminal is connected with the grid of NMOS tube MN1 and the anode of electric capacity C2；The source electrode of MN1 is connected to simulation ground, and drain electrode meets current source Is1It is negative
End；Current source Is1Anode is connected with power supply；Current source Is1The drain electrode of the negative terminal, MN1 of negative terminal and C2 is connected to circuit converter together
Output end VO_CSA.
3. low-power consumption low noise mems accelerometer interface circuit according to claim 1, it is characterised in that the PI controls
Device circuit processed includes：Electric capacity C3, C4, C5, resistance R2, R3, switch PH1, PH2, PH3 and single end operational amplifier OP1, OP2, PI
The input VI_PI of controller circuitry is connected to the anode of electric capacity C3；The negative terminal of C3 respectively with switch PH1, PH2 and PH3 input
End is connected；The output end for switching PH1 connects with the anode of resistance R2, and the negative input end with amplifier OP1 connects；Switch PH2's is defeated
Go out end to connect with the anode of resistance R3, the negative input end with amplifier OP2 connects；Switch the output end and amplifier OP1, OP2 of PH3
Positive input terminal is connected to common mode ground together；The anode of R2 is connected with the anode of electric capacity C4；The output end phase of the negative terminal of C4 and amplifier OP1
Connect, and be connected to the output cathode of PI controller circuitrys 3；The anode of R3 is connected with the anode of electric capacity C5；The negative terminal of C5 and amplifier OP1
Output end be connected, and be connected to the output negative pole of PI controller circuitrys 3.
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| CN107192851A (en) * | 2017-07-17 | 2017-09-22 | 四川知微传感技术有限公司 | Charge modulator accelerometer capacitance detection system |
| CN107290566A (en) * | 2017-07-17 | 2017-10-24 | 四川知微传感技术有限公司 | Basic capacitance compensation circuit for digital accelerometer |
| CN110350905A (en) * | 2018-04-03 | 2019-10-18 | 中国科学院声学研究所 | A kind of MEMS capacitive accelerometer interface circuit |
| CN111551761A (en) * | 2020-04-03 | 2020-08-18 | 四川知微传感技术有限公司 | Low-noise MEMS accelerometer |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107192851A (en) * | 2017-07-17 | 2017-09-22 | 四川知微传感技术有限公司 | Charge modulator accelerometer capacitance detection system |
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| CN110350905A (en) * | 2018-04-03 | 2019-10-18 | 中国科学院声学研究所 | A kind of MEMS capacitive accelerometer interface circuit |
| CN110350905B (en) * | 2018-04-03 | 2024-04-19 | 中国科学院声学研究所 | MEMS capacitive accelerometer interface circuit |
| CN111551761A (en) * | 2020-04-03 | 2020-08-18 | 四川知微传感技术有限公司 | Low-noise MEMS accelerometer |
| CN111551761B (en) * | 2020-04-03 | 2021-11-30 | 四川知微传感技术有限公司 | Low-noise MEMS accelerometer |
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