CN103411594A - Micro-machine gyroscope detection modal 8th-order series band-pass sigma-delta closed control circuit - Google Patents
Micro-machine gyroscope detection modal 8th-order series band-pass sigma-delta closed control circuit Download PDFInfo
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Abstract
The invention discloses a micro-machine gyroscope detection modal 8th-order series band-pass sigma-delta closed control circuit and belongs the technical field of guidance or control devices utilizing the Coriolis effect. The micro-machine gyroscope detection modal 8th-order series band-pass sigma-delta closed control circuit comprises a charge amplifier 5, a high pass filter 6, a diode 7, a low-pass filter 8, a fully differential amplifying circuit 9, a phase compensating circuit 10, a resonance circuit 11, a digital conversion circuit 12, an analog switch 13, a band-pass filter 14, a demodulator 15 and a low-pass filter 16. The micro-machine gyroscope detection modal 8th-order series band-pass sigma-delta closed control circuit provided by the invention has the following beneficial effects: 1, a resonator a 17, a resonator b 18 and a resonator c 19, together with a gyroscope detection modal, can achieve a 8th-order shaping effect on noise in the whole closed-loop circuit; 2, a simulation angular velocity signal ohm(t) is obtained through processing a pulse width density modulation digital signal b(t) by the band-pass filter 14, the demodulator and the low-pass filter 16.
Description
Technical field
The present invention relates to a kind of closed control circuit for the micromechanical gyro sensed-mode, belong to the guidance or the control device field that utilize coriolis effect.
Background technology
Micromechanical gyro is a kind of important inertial sensor, have that physical dimension is little, lightweight, low in energy consumption, low cost and other advantages, attitude and positional information that the inertia type instrument that uses micromechanical gyro to realize is widely used in various moving objects detect, and particularly in military fields such as precision guided weapon, unmanned planes, especially high-precision mini inertial sensor have been proposed to clear and definite demand.But traditional micromechanical gyro precision can't reach inertial navigation level level, usually need to be by extra control system to its control or error is compensated, thereby improve precision.The closed-loop control system of micromechanical gyro sensed-mode has two kinds usually: analog closed-loop control system and digital closed loop control system.The analog closed-loop control system exists systematic parameter to be subject to the impact of extraneous factor, and system realizes the shortcomings such as difficulty is large.And digital closed loop is controlled and can effectively be solved the centroplasm gauge block and easily be adsorbed onto the problem on electrode, it is simple that system realizes, the advantages such as good stability, so the digital closed loop control system of micromechanical gyro sensed-mode is the focus and emphasis of research always.2005, the Dong Yunfeng of Southampton University of Southampton, the people such as Michael Kraft have proposed the logical Σ Δ Μ closed control circuit of 6 rank continuous bands of micromechanical gyro sensed-mode, not only greatly reduce sample frequency, make system more be easy to realize, and improved the signal to noise ratio (snr) of system and bandwidth etc.Its theory diagram is with reference to Fig. 3, charge amplifier 5 is adopted in the extraction of signal, and then signal passes through fully differential amplifying circuit 9, phase compensating circuit 10, resonator a18, resonator b19, digital conversion circuit 12 output pulse width density modulation digital signal b (t) control simulation switches 13 successively by FEEDBACK CONTROL voltage V
FbBe loaded on the FEEDBACK CONTROL electrode, whole closed-loop control system has 6 rank shaping capabilities for system noise, has improved SNR, but there are some problems in this control system:
(1) SNR of effective gyro signal of extracting of system is not still very high; (2) the pulsewidth density modulation digital signal b (t) of system output is not final angular velocity signal.
Summary of the invention
For overcoming problems of the prior art, the present invention proposes the logical Σ Δ closed-loop control system of a kind of 8 rank continuous bands for the micromechanical gyro sensed-mode, can further improve the signal to noise ratio snr that detects gyro signal, and directly angular velocity signal Ω (t) is simulated in output.
Consult Fig. 2, the sensed-mode of MEMS gyroscope structure 4 can be equivalent to public electrode 1, fixed electorde 2, and fixed electorde 3 forms, capacitance variations between public electrode 1 and fixed electorde 2, fixed electorde 3 causes that charging and discharging currents changes, and current signal i (t) changes.
Consult Fig. 4, the logical Σ Δ Μ closed control circuit of the MEMS gyro 8 rank continuous bands that the present invention proposes, by charge amplifier 5, Hi-pass filter 6, diode 7, low-pass filter 8, fully differential amplifying circuit 9, phase compensating circuit 10, resonant circuit 11, digital conversion circuit 12, analog switch 13, bandpass filter 14, detuner 15, low-pass filter 16 forms.The current signal i (t) changed is f through overfrequency
1High frequency carrier V
c(t) be modulated to high band, V
c(t) be loaded on the mass of MEMS gyroscope structure 4, also be on equivalent public electrode 1; Modulation signal, after charge amplifier 5, is converted to voltage signal V by current signal
i(t); The feedback capacity of charge amplifier 5 adopts variable capacitance for regulating two-way fully differential signal V
i(t) and V
i' (t) matching, make its amplitude equate, single spin-echo; V
i(t) and V
i' (t) pass through Hi-pass filter 6 by driven-mode coupled signal V
d' (t) filtering obtains V
I2(t) and V'
I2(t), the cutoff frequency f of Hi-pass filter 6
C1Meet: f
C1>f
x, f wherein
xFor the resonance frequency of MEMS gyro driven-mode is also coupled signal V
d' (t) frequency; V
I2(t) and V'
I2(t) through the demodulator circuit formed by diode 7 and low-pass filter 8, separate mediation filtering, the cutoff frequency f of low-pass filter 8 again
C2Meet: f
y<f
C2<f
1, wherein, f
yResonance frequency for the gyro sensed-mode; The filtered signal of solution mediation enters gain and is G
1Fully differential amplifying circuit 9 it is done to further fully differential amplify and obtain V
I3(t) and V'
I3(t); 10 couples of V of phase compensating circuit
I3(t) and V'
I3(t) carry out certain phase shifts
Make the phase shift of whole close loop control circuit be not equal to 2n, because according to the self-oscillatory condition of closed-loop system: if meet the phase shift of closed-loop control system, equal 2n, closed loop gain is greater than 1, and whole closed-loop system will self-sustained oscillation; After phase shift, obtain signal V
I4(t) and V'
I4(t) enter resonant circuit 11, resonant circuit 11 comprises identical three resonator a17, the resonator b18 resonator c19 of series connection, the resonance center frequeH f of resonator a17, resonator b18 resonator c19
2Equal f
x, and resonator a17, resonator b18 resonator c19 are at f
2The gain at place is 10-20dB, and the gain in other frequency ranges all is less than 0dB; Through the signal V after resonant circuit 11
I5(t) and V'
I5(t) enter digital conversion circuit 12, it comprises comparer 20 and d type flip flop 21,20 couples of V of comparer
I5(t) and V'
I5(t) two-way fully differential signal compares, and produces the digital comparison signal b'(t of high-low level), 21 couples of b'(t of d type flip flop) sample and quantize, finally export digital pulse width density modulation signal b (t); B (t) road is used for control simulation switch 13 by feedback voltage V
FbBe loaded on the feedback electrode of gyro sensed-mode; Another road process bandpass filter 14 is by [f
y-BW, f
y+ BW] the outer quantizing noise removal of frequency range, wherein BW is the bandwidth of gyro; Signal after bandpass filtering enters detuner 15, with driving signal V
d(t) carry out demodulation, then process and obtain angular velocity signal Ω (t), the cutoff frequency f of low-pass filter 16 by low-pass filter 16
C3Meet: f
C3>BW.
The invention has the beneficial effects as follows: the first, resonator a17, resonator b18 resonator c19 have 8 rank shaping operations to noise in whole closed loop circuit together with the gyro sensed-mode; The 3rd, pulsewidth density modulation digital signal b (t), by bandpass filter 14, detuner 15, the processing of low-pass filter 16 obtains simulating angular velocity signal Ω (t).
The accompanying drawing explanation
Fig. 1 be the present invention for the electrical model schematic diagram of MEMS gyro sensed-mode;
Fig. 2 be the present invention for MEMS gyroscope structure schematic diagram;
Fig. 3 is the logical Σ Δ Μ closed control circuit schematic diagram of 6 rank continuous bands that in prior art, the people such as Dong Yun peak proposes;
Fig. 4 is the logical Σ Δ Μ closed control circuit schematic diagram of 8 rank continuous bands that the present invention proposes;
Fig. 5 is the logical Σ Δ Μ closed control circuit schematic diagram of 8 rank continuous bands in embodiment;
In figure:
The 1-public electrode; 2-fixed electorde I; 3-fixed electorde II; The 4-micro-mechanical gyro structure; The 5-charge amplifier; The 6-Hi-pass filter; The 7-diode; The 8-low-pass filter; 9-fully differential amplifying circuit; The 10-phase compensating circuit; The 11-resonant circuit; The 12-digital conversion circuit; The 13-analog switch; The 14-bandpass filter; The 15-detuner; The 16-low-pass filter; 17-resonator a; 18-resonator b; 19-resonator c; The 20-comparer; The 21-D trigger; 22-feedback electrode AI; 23-feedback electrode AII; 24-detecting electrode AI; 25-detecting electrode AII;
Embodiment
Embodiment mono-:
In the present embodiment for micromechanical gyro as shown in Figure 2, drive and sensed-mode broach center capacitor C
o=3.43e-13F, the resonance frequency f of driven-mode
x=4.30KHz is, the resonance frequency f of sensed-mode
y=4.33KHz, bandwidth BW=50Hz, m
x=m
y=2 * 10
-6Kg.
The logical Σ Δ Μ closed control circuit of 6 rank continuous bands of its sensed-mode is consulted Fig. 5, and whole Circuits System is by fully differential charge amplifier 5, Hi-pass filter 6, diode 7, low-pass filter 8, fully differential amplifying circuit 9, phase compensating circuit 10, resonant circuit 11, digital conversion circuit 12, analog switch 13, bandpass filter 14, detuner 15, low-pass filter 16 forms; At first additional driving voltage makes gyro resonance on driven-mode, and resonance shifts is x (t)=a
1Sin (ω
xT+ φ), ω wherein
x=2 π f
x=2 π 4300, when having angular velocity Ω (t) input, due to Coriolis force
Effect, the mass of gyro produces displacement y (t) on sensed-mode, cause detecting electrode AI24 and detecting electrode AII25 capacitance variations, for example detecting electrode AI24 electric capacity increases, detecting electrode AII25 electric capacity reduces, cause that charging and discharging currents changes, this variable-current signal i (t) is by V
c(t)=10sin (2 π f
1T) be modulated to high band, wherein f
1=2MHz, V
c(t) be loaded on the mass of gyro.This modulation signal, through charge amplifier 5, is converted to fully differential voltage signal V by current signal
i(t) and V
i' (t); Wherein the feedback capacity on a road charge amplifier 5 is variable capacitance C
f, regulate C
fMake V
i(t) and V
i' (t) amplitude equates; Then V
i(t) and V
i' (t) through Hi-pass filter 6, will drive coupled signal V
d' (t)=a
2Sin (ω
xT+ φ) filtering, the cutoff frequency f of Hi-pass filter 6
C1=100KHz; Filtering obtains V after driving coupled signal
I2(t) and V'
I2(t), V
I2(t) and V'
I2(t) through by diode 7 and low-pass filter 8, being formed demodulator circuit, separate mediation filtering, wherein the cutoff frequency f of low-pass filter 8
C2=10KHz; Separate the filtered two paths of signals of mediation and enter gain G
1=200 fully differential amplifying circuit 9 is done further fully differential amplification to it and is obtained V
I3(t) and V'
I3(t); 10 couples of V of phase compensating circuit
I3(t) and V'
I3(t) carry out
Phase shifts, make the phase shift summation of whole close loop control circuit be not equal to 2n π, prevent closed loop self-sustained oscillation, improve the stability of system; Signal V after phase shift
I4(t) and V'
I4(t) enter resonant circuit 11, resonant circuit 11 comprises resonator a17, resonator b18 resonator c19; Resonator a17, resonator b18 resonator c19 have identical structure, include two Full differential operational amplifiers of series connection, first Full differential operational amplifier A of resonator a17
1Reverse input end one tunnel through resistance R
1Link second Full differential operational amplifier A
2Inverse output terminal, another road is connected in series a capacitor C successively
1, resistance R
2And capacitor C
2, link A
2The forward output terminal; The A of resonator a17
1Positive input one tunnel through resistance R
1' link A
2The forward output terminal, another road is connected in series a capacitor C successively
1', resistance R '
2And capacitor C '
2, link A
2Inverse output terminal; The A of resonator a17
1The forward output terminal, be connected into first Full differential operational amplifier A of resonator b18
1' negative input, the A of resonator a17
1The negative sense output terminal, be connected into the A of resonator b18
1' positive input; The A of resonator b18
1' the forward output terminal, be connected into first Full differential operational amplifier A'' of resonator c19
1Negative input, the A of resonator b18
1' the negative sense output terminal, be connected into the A of resonator c19
1' ' positive input; R wherein
1=R
2=R
1'=R'
2=1.68k Ω, C
1=C
2=C
1'=C'
2=22nF, the resonance center frequeH of resonator a17, resonator b18 resonator c19
The A' of resonator c19
1Forward and negative sense output terminal output signal be V
I5(t) and V'
I5(t) the two-way input signal of device 20 as a comparison; 20 couples of V of comparer
I5(t) and V'
I5(t) compare, the output high level is 5V, low level is the digital comparison signal b'(t of 0V), 21 couples of b'(t of d type flip flop) sample and quantize, sample frequency is 32KHz, the digital pulse width density modulation digital signal b (t) of final output 1bit, high level is 3.3V, low level is 0V; B (t) thus a road for the control simulation switch by feedback voltage V
Fb=1V is loaded on the feedback electrode AI22 and AII23 of gyro sensed-mode; Remove through bandpass filter 14 quantizing noise that [4330-50,4330+50] frequency range is outer on another road of b (t), then enters detuner 15, with driving signal V
d(t) carry out demodulation for the second time, then by cutoff frequency f
C3The low-pass filter 16 of=100Hz is processed the angular velocity signal Ω (t) that obtains gyro.
Claims (1)
1.MEMS gyro 8 rank continuous bands lead to the sigma-delta closed control circuit, it is characterized in that: be comprised of charge amplifier (5), Hi-pass filter (6), diode (7), low-pass filter (8), fully differential amplifying circuit (9), phase compensating circuit (10), resonant circuit (11), digital conversion circuit (12), analog switch (13), bandpass filter (14), detuner (15), low-pass filter (16); The current signal i (t) changed is f through overfrequency
1High frequency carrier V
c(t) be modulated to high band, V
c(t) be loaded on the mass of MEMS gyroscope structure (4), also be on equivalent public electrode (1); Modulation signal, after charge amplifier (5), is converted to voltage signal V by current signal
i(t); The feedback capacity of charge amplifier (5) adopts variable capacitance for regulating two-way fully differential signal V
i(t) and V
i' (t) matching, make its amplitude equate, single spin-echo; V
i(t) and V
i' (t) pass through Hi-pass filter (6) by driven-mode coupled signal V
d' (t) filtering obtains V
I2(t) and V'
I2(t), the cutoff frequency f of Hi-pass filter (6)
C1Meet: f
C1>f
x, f wherein
xFor the resonance frequency of MEMS gyro driven-mode is also coupled signal V
d' (t) frequency; V
I2(t) and V'
I2(t) pass through again the demodulator circuit formed by diode 7 and low-pass filter (8) and separate mediation filtering, the cutoff frequency f of low-pass filter (8)
C2Meet: f
y<f
C2<f
1, wherein, f
yResonance frequency for the gyro sensed-mode; The filtered signal of solution mediation enters gain and is G
1Fully differential amplifying circuit (9) it is done to further fully differential amplify and obtain V
I3(t) and V'
I3(t); Phase compensating circuit (10) is to V
I3(t) and V'
I3(t) carry out certain phase shifts
Make the phase shift of whole close loop control circuit be not equal to 2n; After phase shift, obtain signal V
I4(t) and V'
I4(t) enter resonant circuit (11), resonant circuit (11) comprises identical three resonator a(17 of series connection), resonator b(18) resonator c(19), resonator a(17), resonator b(18) resonator c(19) resonance center frequeH f
2Equal f
x, and resonator a(17), resonator b(18) resonator c(19) at f
2The gain at place is 10-20dB, and the gain in other frequency ranges all is less than 0dB; Through resonant circuit (11) signal V afterwards
I5(t) and V'
I5(t) enter digital conversion circuit (12), it comprises comparer (20) and d type flip flop (21), and comparer (20) is to V
I5(t) and V'
I5(t) two-way fully differential signal compares, and produces the digital comparison signal b'(t of high-low level), d type flip flop (21) is to b'(t) sample and quantize, finally export digital pulse width density modulation signal b (t); B (t) road is used for control simulation switch (13) by feedback voltage V
FbBe loaded on the feedback electrode of gyro sensed-mode; Another road process bandpass filter (14) is by [f
y-BW, f
y+ BW] the outer quantizing noise removal of frequency range, wherein BW is the bandwidth of gyro; Signal after bandpass filtering enters detuner (15), with driving signal V
d(t) carry out demodulation, then process and obtain angular velocity signal Ω (t), the cutoff frequency f of low-pass filter (16) by low-pass filter (16)
C3Meet: f
C3>BW.
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Cited By (7)
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| CN106289212A (en) * | 2016-09-21 | 2017-01-04 | 南京理工大学 | Integrated measurement and control unit for silicon microphony fork gyroscope |
| CN106370170A (en) * | 2016-08-29 | 2017-02-01 | 南京理工大学 | Silicon micro-machined gyroscope mechanical-electrical combined band-pass sigma-delta closed-loop detection loop parameter acquisition method |
| CN107504964A (en) * | 2017-09-22 | 2017-12-22 | 中国科学院上海微系统与信息技术研究所 | Declined mechanical gyro ∑ △ M closed-loop detection circuit systems from clock numeral |
| CN109470228A (en) * | 2018-10-30 | 2019-03-15 | 北京时代民芯科技有限公司 | A kind of MEMS dish gyro and preparation method thereof based on embedded differential electrode |
| CN111220139A (en) * | 2019-12-30 | 2020-06-02 | 南京理工大学 | Micro-electro-mechanical multi-ring gyro force balance mode measurement and control circuit system |
| CN112504258A (en) * | 2020-11-05 | 2021-03-16 | 东南大学 | Quartz hemispherical resonant gyroscope self-adaptive control circuit and method based on full-angle mode |
| CN114353775A (en) * | 2021-12-02 | 2022-04-15 | 上海航天控制技术研究所 | Micromechanical gyroscope integrated circuit |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106370170A (en) * | 2016-08-29 | 2017-02-01 | 南京理工大学 | Silicon micro-machined gyroscope mechanical-electrical combined band-pass sigma-delta closed-loop detection loop parameter acquisition method |
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| CN107504964A (en) * | 2017-09-22 | 2017-12-22 | 中国科学院上海微系统与信息技术研究所 | Declined mechanical gyro ∑ △ M closed-loop detection circuit systems from clock numeral |
| CN109470228A (en) * | 2018-10-30 | 2019-03-15 | 北京时代民芯科技有限公司 | A kind of MEMS dish gyro and preparation method thereof based on embedded differential electrode |
| CN111220139A (en) * | 2019-12-30 | 2020-06-02 | 南京理工大学 | Micro-electro-mechanical multi-ring gyro force balance mode measurement and control circuit system |
| CN111220139B (en) * | 2019-12-30 | 2022-04-01 | 南京理工大学 | Micro-electro-mechanical multi-ring gyro force balance mode measurement and control circuit system |
| CN112504258A (en) * | 2020-11-05 | 2021-03-16 | 东南大学 | Quartz hemispherical resonant gyroscope self-adaptive control circuit and method based on full-angle mode |
| CN114353775A (en) * | 2021-12-02 | 2022-04-15 | 上海航天控制技术研究所 | Micromechanical gyroscope integrated circuit |
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Application publication date: 20131127 |