CN108562383A - Static excitation/piezoresistive detection silicon micro resonance type pressure sensor closed loop autonomous system - Google Patents
Static excitation/piezoresistive detection silicon micro resonance type pressure sensor closed loop autonomous system Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
- G01L1/183—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material by measuring variations of frequency of vibrating piezo-resistive material
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Abstract
The present invention relates to static excitation/piezoresistive detection silicon micro resonance type pressure sensor closed loop autonomous systems,Including sensitive structure,Prime processing circuit,Phaselocked loop and range-adjusting device,Sensitive structure is by exciting element,Resonator and pick-up resistance composition,Prime processing circuit is by instrument amplifier,Bandpass filter,Phase shifter,Wave converter and frequency divider composition,The small-signal of pick-up resistance output is amplified by instrument amplifier,By bandpass filter filtering clutter and tailored waveforms,The phase of system is adjusted by phase shifter,Sine wave is changed to square wave by wave converter as the interface circuit of analog circuit and digital circuit,Using frequency divider using signal two divided-frequency as the input signal of phaselocked loop,The output signal of phaselocked loop is after range-adjusting device as the pumping signal excitation resonator of exciting element,Realize the closed loop phase lock of sensor.The present invention improves resonant frequency measurement accuracy and speed, range extension, and improves the dynamic characteristic of system.
Description
Technical field
The present invention relates to resonance type pressure sensor technical field, especially a kind of static excitation/piezoresistive detection silicon is micro- humorous
Formula of shaking pressure sensor closed loop autonomous system.
Background technology
The resonator of static excitation/micro- resonance pressure sensor of piezoresistive detection silicon uses the broach both-end based on SOI silicon substrates
Fixed tuning fork structure constitutes Wheatstone bridge using silicon heavy doping varistor and body silicon resistor in resonator inside and realizes pressure drag
Detection, the frequency for converting the pressure on pressure-sensitive films to by silicon island structure silicon micro-resonator plane vibration change.
The sensitive structure of resonance type pressure sensor needs and closed-loop system combination could work.Closed loop mode of operation can be with
Resonant frequency measurement accuracy and speed, range extension are improved, and the dynamic characteristic of system can be improved.Use closed loop Resonant tube
Frequency detection circuit, when ambient pressure variations, by the feedback effect of closed-loop system, the output frequency of resonator can be correspondingly
It responds, resonator is automatically made to be in resonant condition always, output signal can automatically real-time reflect tested parameter
Information, improve sensitivity and the measurement accuracy of system.
The closed-loop system of resonance type pressure sensor can be divided into self-oscillation, automatic growth control, three kinds of phaselocked loop.Self-excitation
Oscillation closed loop is to drive the DC component of electrostatic force to constitute feedback closed loop by adjusting, and automatic gain control loop is to pass through control
System drives the AC compounent of electrostatic force to constitute feedback closed loop, and phase-locked loop is to realize close loop resonance by locking phase.Mesh
The preceding closed loop autonomous system based on phaselocked loop can only tracking frequency variation and the variation of phase can not be tracked, be easily destroyed closed loop
System maintains the phase condition needed for self-excitation state.If the later difference of phase lock loop locks is not fixed, each resonance
The variation of frequency all can cause the phase of system to change, reduce system stability and output signal frequency it is reliable
Property.
Invention content
The purpose of the present invention is to provide one kind capable of realizing no difference frequency tra function, makes phaselocked loop from amplitude and phase
The aspect of position two synchronizes tracking to transmission signal, and the phase for reducing phaselocked loop changes the phase for the closed loop circuit brought with frequency
Position variation, improves static excitation/piezoresistive detection silicon micro resonance type pressure sensor closed loop autonomous system of the stability of system.
To achieve the above object, present invention employs following technical schemes：A kind of static excitation/micro- resonance of piezoresistive detection silicon
Formula pressure sensor closed loop autonomous system, including sensitive structure, prime processing circuit, phaselocked loop and range-adjusting device, it is described quick
Sense structure is made of exciting element, resonator and pick-up resistance, and the prime processing circuit is by instrument amplifier, bandpass filtering
The small-signal of device, phase shifter, wave converter and frequency divider composition, the pick-up resistance output is put by instrument amplifier
Greatly, by bandpass filter filtering clutter and tailored waveforms, the phase of system is adjusted by phase shifter, wave converter
Sine wave is changed to square wave by the interface circuit as analog circuit and digital circuit, makees signal two divided-frequency using frequency divider
Output signal for the input signal of phaselocked loop, phaselocked loop encourages after range-adjusting device as the pumping signal of exciting element
Resonator realizes the closed loop phase lock of sensor.
The instrument amplifier includes the first amplifier A1, the second amplifier A2, third amplifier A3 and resistance R1~resistance
R7, the first amplifier A1, the second amplifier A2 normal phase input end connect the output end of pick-up resistance, the output of the first amplifier A1
End is connected with one end of resistance R1, resistance R4 respectively, the other end of resistance R4 respectively with one end of resistance R5, third amplifier A3
Normal phase input end is connected, and the other end of resistance R5 is connected with the output end of third amplifier A3；The other end of resistance R1 with respectively with
The inverting input of first amplifier A1, one end of resistance R2 are connected, the other end of resistance R2 respectively with one end of resistance R3, second
The inverting input of amplifier A2 is connected, the other end of resistance R3 one end phase with the output end of the second amplifier A2, resistance R6 respectively
Even, the other end of resistance R6 is connected with one end of the inverting input of third amplifier A3, resistance R7 respectively, and third amplifier A3's is defeated
The other end of outlet and resistance R7 collectively constitute the output end of instrument amplifier.
The bandpass filter includes four high guaily unit A4 and resistance R8~resistance R12, a termination instrument of the resistance R8
The other end of the output end of table amplifier, resistance R8 is connected with one end of resistance R9, capacitance C2, capacitance C1 respectively, capacitance C2's
The other end is connected with one end of the normal phase input end of four high guaily unit A4, resistance R10 respectively, the inverting input point of four high guaily unit A4
Be not connected with one end of resistance R11, resistance R12, capacitance C1, resistance R10, resistance R11 altogether, the other end, the resistance of resistance R12
The other end of R9 connects the output end of four high guaily unit A4, and output end of the output end of four high guaily unit A4 as bandpass filter.
The wave converter includes voltage comparator and analog switch, and the voltage comparator uses LM393 chips, institute
Stating analog switch uses high speed single pole double throw analog switch SN74LVC1G3157 chips, 3 feet of the LM393 chips to connect phase shift
The output end of device, 2 feet and 4 feet of LM393 chips altogether, 8 feet of LM393 chips connect+5V direct currents and by resistance R13 with
1 foot of LM393 chips is connected, and 1 foot of LM393 chips connects 6 feet of SN74LVC1G3157 chips, SN74LVC1G3157 chips
Altogether, 1 foot and 5 feet of SN74LVC1G3157 chips connect+5V direct currents jointly for 2 feet and 3 feet, and the 4 of SN74LVC1G3157 chips
Output end of the foot as wave converter.
The phaselocked loop is made of phase discriminator, loop filter and voltage controlled oscillator, and the phase discriminator is reflected using XOR gate
Phase device, the loop filter are second-order loop filter.
As shown from the above technical solution, the advantage of the invention is that：First, the present invention by the output signal of micro-resonator into
Row amplification filters and simultaneously generates certain time delay, and requirement needed for closed loop self-excitation state is in meet system；Second, from locking phase
The stable state difference and loop transfer function relationship of ring is started with, and by selecting suitable loop filter structure, devises structure letter
Single, parameter chooses the phase-locked loop circuit that can easily realize no difference frequency tra function；Third improves resonant frequency survey
Accuracy of measurement and speed, range extension, and improve the dynamic characteristic of system.
Description of the drawings
Fig. 1 is the system structure diagram of the present invention；
Fig. 2 is the circuit diagram of instrument amplifier in Fig. 1；
Fig. 3 is the circuit diagram of bandpass filter in Fig. 1；
Fig. 4 is the circuit diagram of wave converter in Fig. 1；
Fig. 5 is the circuit diagram of phaselocked loop in Fig. 1.
Specific implementation mode
As shown in Figure 1, a kind of static excitation/piezoresistive detection silicon micro resonance type pressure sensor closed loop autonomous system, including
Sensitive structure 1, prime processing circuit, phaselocked loop 7 and range-adjusting device 8, the sensitive structure 1 by exciting element, resonator and
Pick-up resistance forms, and the prime processing circuit is by instrument amplifier 2, bandpass filter 3, phase shifter 4,5 and of wave converter
Frequency divider 6 forms, and the small-signal of the pick-up resistance output is amplified by instrument amplifier 2, is filtered out by bandpass filter 3
Clutter and tailored waveforms, are adjusted the phase of system by phase shifter 4, and wave converter 5 is used as analog circuit and number
Sine wave is changed to square wave by the interface circuit of circuit, is believed signal two divided-frequency as the input of phaselocked loop 7 using frequency divider 6
Number, the output signal of phaselocked loop 7, as the pumping signal excitation resonator of exciting element, is realized and is passed after range-adjusting device 8
The closed loop phase lock of sensor.
As shown in Fig. 2, the instrument amplifier 2 includes the first amplifier A1, the second amplifier A2, third amplifier A3 and electricity
Hinder R1~resistance R7, the first amplifier A1, the normal phase input end of the second amplifier A2 connects the output end of pick-up resistance, the first fortune
The output end for putting A1 is connected with one end of resistance R1, resistance R4 respectively, the other end of resistance R4 respectively with one end of resistance R5,
The normal phase input end of three amplifier A3 is connected, and the other end of resistance R5 is connected with the output end of third amplifier A3；Resistance R1's is another
End and be connected respectively with one end of the inverting input of the first amplifier A1, resistance R2, the other end of resistance R2 respectively with resistance R3
One end, the second amplifier A2 inverting input be connected, the other end of resistance R3 output end, the resistance with the second amplifier A2 respectively
One end of R6 is connected, and the other end of resistance R6 is connected with one end of the inverting input of third amplifier A3, resistance R7 respectively, third
The output end of amplifier A3 and the other end of resistance R7 collectively constitute the output end of instrument amplifier 2.
The first order of instrument amplification appliance 2 is made of two parts, and first part is made of amplifier A1 and amplifier A2
Buffer amplifier, the difference amplifier that second part is made of amplifier A3.The premiere feature of instrument amplifier 2 is amplification
The small-signal of MEMS resonator output, while it must be low-noise amplifier also to require amplifier, minimize measurement process
The output impedance of the observation noise of middle introducing, MEMS resonator is big, needs amplifying circuit to have larger input impedance, it is ensured that impedance
Matching；In addition, micro-resonator output signal is accompanied by higher common-mode signal, it is desirable that the differential amplifier circuit has higher total
Mould inhibits ratio.The instrument amplifier AD8221 that this invention uses has These characteristics, is widely used in sensor interface electricity
The multiple fields such as road, Precise Data Sampling System.
As shown in figure 3, the bandpass filter 3 includes four high guaily unit A4 and resistance R8~resistance R12, the resistance R8
A termination instrument amplifier 2 output end, the other end of resistance R8 one end phase with resistance R9, capacitance C2, capacitance C1 respectively
Even, the other end of capacitance C2 is connected with one end of the normal phase input end of four high guaily unit A4, resistance R10 respectively, four high guaily unit A4's
Inverting input is connected with one end of resistance R11, resistance R12 respectively, capacitance C1, resistance R10, resistance R11 altogether, resistance R12
The other end, resistance R9 the other end connect the output end of four high guaily unit A4, and the output end of four high guaily unit A4 is filtered as band logical
The output end of wave device 3.
Bandpass filter 3 is mainly used to filtering clutter and tailored waveforms, due to being contained in the output signal of micro-resonator
The noise of many different frequencies, causes output waveform more mixed and disorderly, can not be that phaselocked loop 7 provides one after being converted by waveform
A good input waveform, makes phaselocked loop 7 can not work normally, so the voltage-controlled electricity high using input impedance, output impedance is low
Potential source type second-order bandpass filter.Wherein resistance R8 and capacitance C1 forms low-pass filter network, and resistance R10 is formed with capacitance C2
High-pass filter network, the two series connection just constitute bandwidth-limited circuit, and resistance R11, resistance R12 and four high guaily unit A4 are constituted
In-phase proportion amplifying circuit, gain Avt=1+R12/R11, quality factor q=1/ (3-Avt).The band logical that the present invention uses
Filter is the fourth-order band-pass filter for being cascaded into 2 voltage controlled voltage source type second-order bandpass filters.The wherein pressure of the first order
Control voltage-source type second-order bandpass filter sets quality factor q=5 its centre frequency f1=0.9f0, the voltage-controlled voltage of the second level
Source type second-order bandpass filter sets quality factor q=5 its centre frequency f2=1.1f0, and it is bent to solve amplitude-frequency response in passband
The larger problem of the gain difference of not flat enough the passband inband signaling of line, f0 are the one class resonant frequency value of resonator.
As shown in figure 4, the wave converter 5 includes voltage comparator and analog switch, the voltage comparator uses
LM393 chips, the analog switch use high speed single pole double throw analog switch SN74LVC1G3157 chips, the LM393 chips
3 feet connect the output end of phase shifter 4, altogether, 8 feet of LM393 chips connect+5V direct currents and logical for 2 feet and 4 feet of LM393 chips
Resistance R13 to be crossed with 1 foot of LM393 chips to be connected, 1 foot of LM393 chips connects 6 feet of SN74LVC1G3157 chips,
Altogether, 1 foot and 5 feet of SN74LVC1G3157 chips connect+5V direct currents to 2 feet and 3 feet of SN74LVC1G3157 chips jointly,
Output end of 4 feet of SN74LVC1G3157 chips as wave converter 5.
The output signal of micro-resonator is still analog signal after instrument amplifier 2, bandpass filter 3 and phase shifter 4,
And the modules such as subsequent frequency divider 6, phaselocked loop 7 require that input signal is digital signal, so system needs one will be sinusoidal
Interface circuit of the wave conversion at the wave converter 5 of square wave as analog circuit and digital circuit.This system is to wave converter 5
Specific requirement be：(1) sine wave is transformed to square wave；(2) duty ratio of square wave is 50%；(3) high level of square-wave signal
SV, low level OV.Can realize that there are many circuit that sine wave is transformed into square wave, the most commonly used is use Schmidt trigger or
Voltage comparator is realized.The former using the positive feedback effect in Schmidt trigger state conversion process, when input voltage by
Low to increase to height, when reaching forward threshold voltage, output voltage mutates, and input voltage is lower by height, reaches negative sense threshold
When threshold voltage, output voltage mutates, and this method requirement input signal amplitude will reach the positive threshold of Schmidt trigger
Voltage.The latter realizes that the principle of waveform conversion is relatively simple, i.e., is compared input signal with the reference voltage of 0V, is higher than 0V
When export positive voltage, export negative supply voltage when less than 0V, to which sine wave is transformed into square wave, but this method is converted
Square-wave signal steepness it is not good enough.In order to solve these problems, the present invention is devised using voltage comparator and analog switch
A kind of improved waveform translation circuit.
As shown in figure 5, the phaselocked loop 7 is made of phase discriminator, loop filter 9 and voltage controlled oscillator, the phase discriminator
Using XOR gate phase discriminator, the loop filter 9 is second-order loop filter.The loop filter 9 that the present invention uses be
The second-order loop filter designed on the basis of first-order loop filter construction, wherein resistance R14 and capacitance C3 constitute single order
Loop filter, resistance R14, capacitance C3 and capacitance C4 constitute second-order loop filter, which is equivalent to ideal
Integral element, when transient state tracks, the current impulse of phase discriminator output charges to loop filter 9, obtains control voltage, adjusts
The frequency of oscillator output signal.After loop enters stable state, the average current of phase discriminator current output type rectangular wave is zero, no
It charges to loop filter 9, since loop filter 9 is equivalent to a true integral link, charges in transient process again
To control voltage will not disappear, exactly this control that pulse current accumulates loop filter 9 in transient process
Voltage maintains the steady track of loop.
In conclusion the output signal of micro-resonator is amplified, is filtered and generated certain time delay by the present invention, with
Meet system and is in requirement needed for closed loop self-excitation state；Start with from the stable state difference and loop transfer function relationship of phaselocked loop 7,
By selecting suitable 9 structure of loop filter, no phase difference frequency can easily be realized by devising simple in structure, parameter selection
The phase-locked loop circuit of following function；Resonant frequency measurement accuracy and speed, range extension are improved, and improves the dynamic of system
Step response.
Claims (5)
1. a kind of static excitation/piezoresistive detection silicon micro resonance type pressure sensor closed loop autonomous system, it is characterised in that：Including quick
Feel structure (1), prime processing circuit, phaselocked loop (7) and range-adjusting device (8), the sensitive structure (1) is by exciting element, humorous
Shake device and pick-up resistance composition, and the prime processing circuit is by instrument amplifier (2), bandpass filter (3), phase shifter (4), wave
The small-signal of shape transformer (5) and frequency divider (6) composition, the pick-up resistance output is amplified by instrument amplifier (2), warp
Bandpass filter (3) filtering clutter and tailored waveforms are crossed, the phase of system is adjusted by phase shifter (4), waveform transformation
Sine wave is changed to square wave by device (5) as the interface circuit of analog circuit and digital circuit, using frequency divider (6) by signal
The output signal of input signal of the two divided-frequency as phaselocked loop (7), phaselocked loop (7) is used as excitation after range-adjusting device (8)
The pumping signal excitation resonator of element, realizes the closed loop phase lock of sensor.
2. static excitation according to claim 1/piezoresistive detection silicon micro resonance type pressure sensor closed loop autonomous system,
It is characterized in that：The instrument amplifier (2) include the first amplifier A1, the second amplifier A2, third amplifier A3 and resistance R1~
Resistance R7, the first amplifier A1, the second amplifier A2 normal phase input end connect the output end of pick-up resistance, the first amplifier A1's
Output end is connected with one end of resistance R1, resistance R4 respectively, the other end of resistance R4 respectively with one end of resistance R5, third amplifier
The normal phase input end of A3 is connected, and the other end of resistance R5 is connected with the output end of third amplifier A3；The other end of resistance R1 with point
Be not connected with one end of the inverting input of the first amplifier A1, resistance R2, the other end of resistance R2 respectively with one end of resistance R3,
The inverting input of second amplifier A2 is connected, the other end of resistance R3 respectively with the output end of the second amplifier A2, resistance R6 one
End is connected, and the other end of resistance R6 is connected with one end of the inverting input of third amplifier A3, resistance R7 respectively, third amplifier A3
Output end and the other end of resistance R7 collectively constitute the output ends of instrument amplifier (2).
3. static excitation according to claim 1/piezoresistive detection silicon micro resonance type pressure sensor closed loop autonomous system,
It is characterized in that：The bandpass filter (3) includes four high guaily unit A4 and resistance R8~resistance R12, one end of the resistance R8
The output end of instrument amplifier (2) is connect, the other end of resistance R8 is connected with one end of resistance R9, capacitance C2, capacitance C1 respectively, electricity
The other end for holding C2 is connected with one end of the normal phase input end of four high guaily unit A4, resistance R10 respectively, and the reverse phase of four high guaily unit A4 is defeated
Enter end to be respectively connected with one end of resistance R11, resistance R12, altogether, resistance R12's is another by capacitance C1, resistance R10, resistance R11
End, resistance R9 the other end connect the output end of four high guaily unit A4, and the output end of four high guaily unit A4 is as bandpass filter (3)
Output end.
4. static excitation according to claim 1/piezoresistive detection silicon micro resonance type pressure sensor closed loop autonomous system,
It is characterized in that：The wave converter (5) includes voltage comparator and analog switch, and the voltage comparator uses LM393 cores
Piece, the analog switch use high speed single pole double throw analog switch SN74LVC1G3157 chips, 3 feet of the LM393 chips to connect
The output end of phase shifter (4), altogether, 8 feet of LM393 chips connect+5V direct currents and pass through resistance for 2 feet and 4 feet of LM393 chips
R13 is connected with 1 foot of LM393 chips, and 1 foot of LM393 chips meets 6 feet of SN74LVC1G3157 chips, SN74LVC1G3157
Altogether, 1 foot and 5 feet of SN74LVC1G3157 chips connect+5V direct currents, SN74LVC1G3157 cores to 2 feet and 3 feet of chip jointly
Output end of 4 feet of piece as wave converter (5).
5. static excitation according to claim 1/piezoresistive detection silicon micro resonance type pressure sensor closed loop autonomous system,
It is characterized in that：The phaselocked loop (7) is made of phase discriminator, loop filter (9) and voltage controlled oscillator, and the phase discriminator is using different
Or door phase discriminator, the loop filter (9) are second-order loop filter.
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|---|---|---|---|
| CN201810112456.5A CN108562383B (en) | 2018-02-05 | 2018-02-05 | Closed-loop self-excitation system of silicon micro-resonance type pressure sensor for electrostatic excitation/piezoresistive detection |
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| CN201810112456.5A CN108562383B (en) | 2018-02-05 | 2018-02-05 | Closed-loop self-excitation system of silicon micro-resonance type pressure sensor for electrostatic excitation/piezoresistive detection |
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| CN110207891A (en) * | 2019-05-10 | 2019-09-06 | 电子科技大学 | A kind of silicon micro resonance type pressure sensor closed loop detection system |
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| CN112505409A (en) * | 2020-11-18 | 2021-03-16 | 东南大学 | Multi-channel high-precision sensor acquisition system and frequency measurement method thereof |
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