CN208174658U - A kind of MEMS capacitive accelerometer interface circuit - Google Patents
A kind of MEMS capacitive accelerometer interface circuit Download PDFInfo
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- CN208174658U CN208174658U CN201820462537.3U CN201820462537U CN208174658U CN 208174658 U CN208174658 U CN 208174658U CN 201820462537 U CN201820462537 U CN 201820462537U CN 208174658 U CN208174658 U CN 208174658U
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Abstract
The utility model relates to a kind of MEMS capacitive accelerometer interface circuits, including sensing unit and read-out device；Read-out device includes：Switch, preamplifier and reference voltage and common-mode voltage generation circuit；Reference voltage and common-mode voltage generation circuit include boosting charge pump and the first low noise linear voltage regulator and the second low noise linear voltage regulator；Wherein, the first low noise linear voltage regulator and boosting charge pump constitute reference voltage generation circuit, and the second low noise linear voltage regulator and boosting charge pump constitute common-mode voltage generation circuit；Wherein, reference voltage generation circuit is equivalent to twice of low input supply voltage of reference voltage for generating one relative to twice of low input supply voltage or higher high pressure, and being converted into；Common-mode voltage generation circuit is converted into the common-mode voltage for being equivalent to low input supply voltage half for generating one relative to twice of low input supply voltage or higher high pressure.
Description
Technical Field
The utility model relates to a capacitanc inertial sensor, in particular to MEMS (Micro electro mechanical System) capacitanc accelerometer interface circuit.
Background
Capacitive inertial sensors generally comprise inertial sensors such as acceleration sensors and gyroscopes, which measure in real time parameters such as the acceleration of the vehicle with respect to the ground, to determine the position of the vehicle and the parameters of the earth gravitational field, and convert the measured variations into variations in capacitance.
The following description will be made by taking a MEMS (Micro Electro Mechanical System) capacitive inertial sensor as an example.
With the increasing maturity of the MEMS (Micro Electro Mechanical System) technology, the MEMS capacitive inertial sensor has the advantages of small volume, high sensitivity, stable dc characteristic, small drift, low power consumption, small temperature coefficient, etc. and is widely used, however, the MEMS capacitive inertial sensor has small capacitance change, so the MEMS capacitive inertial sensor servo circuit is required to have the characteristics of high precision, good linearity, large dynamic range, etc.
The existing MEMS capacitive inertial sensor servo circuit is divided into a closed loop structure and an open loop structure from the structure, and an output signal is divided into an analog signal output and a digital signal output. The servo circuit of the capacitive inertial sensor with an open-loop structure is restricted in linearity, measuring range, dynamic range and the like; the closed loop implementation scheme is divided into two types, one is a negative feedback scheme based on an analog closed loop, the other is a negative feedback scheme based on a digital closed loop, the negative feedback scheme based on the digital closed loop has better dynamic measurement precision and temperature stability, and digital output can be realized. Whether a closed loop circuit or an open loop circuit, includes an interface circuit.
An input power supply of an existing MEMS capacitive inertial sensor servo circuit is usually a dual power supply or a high-voltage single power supply, so that positive and negative reference voltages and high output sensitivity of an MEMS sensitive unit are conveniently realized. High voltage devices used in high voltage circuits often have inferior performance to low voltage devices, limiting the performance of the overall system. Meanwhile, the high input power means high power consumption, and is not suitable for long-time operation in applications requiring battery power supply, such as geophysical exploration and inertial navigation. Low input power also typically reduces the positive and negative reference voltage values of the MEMS sensitive unit and does not provide sufficient feedback force in closed loop applications.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to solve above-mentioned technical problem, provide a single power supply MEMS capacitive accelerometer low-power consumption open loop structure interface circuit to outstanding noise suppression ability has.
In order to achieve the above object, the present invention provides an interface circuit of a MEMS capacitive accelerometer, which includes a sensing unit and a readout device; the readout device includes: a switch, a preamplifier and a positive reference voltage and common mode voltage generating circuit; the positive reference voltage and common mode voltage generating circuit comprises a boosting charge pump and a first low noise linear regulator LDO1 and a second low noise linear regulator LDO 2; the first low-noise linear regulator LDO1 and the boost charge pump form a positive reference voltage generating circuit, and the second low-noise linear regulator LDO2 and the boost charge pump form a common mode voltage generating circuit; the positive reference voltage generating circuit is used for generating a high voltage which is two times or higher than the low input power supply voltage and converting the high voltage which is two times or higher than the low input power supply voltage into a positive reference voltage which is two times of the low input power supply voltage; the common mode voltage generating circuit is used for generating a high voltage which is two times or more higher than the low input power supply voltage and converting the high voltage which is two times or more higher than the low input power supply voltage into a common mode voltage which is half of the low input power supply voltage.
Further, the output of the positive reference voltage generating circuit and the ground are respectively used as the positive reference voltage and the negative reference voltage of the MEMS sensitive unit, and the output of the common mode voltage generating circuit is used as the common mode voltage of the MEMS sensitive unit and the preamplifier.
Furthermore, the preamplifier is powered by a low-input power supply, and a high-performance low-voltage MOS tube design is adopted.
Further, the interface circuit is applied to a low-power consumption open-loop or closed-loop accelerometer interface circuit.
Furthermore, the MEMS capacitive accelerometer interface circuit also comprises an MEMS sensitive unit, and the output signal of the MEMS sensitive unit is a change signal of capacitance.
The beneficial effects of the utility model reside in that: the MEMS capacitive accelerometer interface circuit with low-voltage single power input is different from the common dual-power or high-voltage single power interface circuit at present. The preamplifier works under low voltage, and can adopt a high-performance low-voltage MOS tube design, thereby being beneficial to realizing lower noise and higher bandwidth. Under the condition of a low input power supply, the high reference voltage of the MEMS sensitive unit is realized by utilizing the boosting charge pump. The method can be applied to a low-power-consumption open-loop or closed-loop accelerometer servo circuit according to requirements.
Drawings
FIG. 1 is a schematic diagram of an open-loop servo readout circuit of a conventional universal capacitive inertial sensor;
FIG. 2 is a schematic diagram of the circuit of FIG. 1 at two stages, PH1 and PH 2;
FIG. 3 is a circuit for generating positive and negative reference voltages of an open-loop servo readout circuit of a dual-power capacitive inertial sensor in the prior art;
fig. 4 is a schematic diagram of an interface circuit structure of a MEMS capacitive accelerometer and a schematic diagram of a positive reference voltage and a common mode voltage generating circuit structure.
Detailed Description
The purpose, technical solution and advantages of the present invention are more clearly understood, and the following detailed description of the present invention is made with reference to the accompanying drawings and embodiments, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. Based on the embodiment in the utility model provides a, this technical field's technical staff does not make all other embodiments that obtain under the creative work prerequisite, all belong to the utility model discloses the scope of protection.
In the following detailed description of the present invention, certain specific details are set forth in order to provide a better understanding of the present invention. It will be apparent to those skilled in the art that the present invention may be practiced without these specific details.
FIG. 1 shows an embodiment of an interface circuit of a MEMS accelerometer, which includes a MEMS sensitive chip and a readout device, where the typical acceleration sensitive chip is equivalent to a second-order system model and can be embedded in an open-loop or closed-loop system of the accelerometer.
The universal capacitive inertial sensor interface circuit of fig. 1, comprising: a preamplifier OTA; three electrodes connected to three plates of the inertial sensor: top, ctr and bot, wherein the top is connected with an upper polar plate of the sensor, the ctr is connected with a middle polar plate of the sensor, and the bot is connected with a lower polar plate of the sensor; three voltages connected across the plates: vp, Vn and Vcom, where Vp is a positive reference voltage, Vn is a negative reference voltage, Vcom is a common mode voltage; the sensor, the reference voltage and the preamplifier are connected through 6 switches; the capacitor Cf is a feedback capacitor and controls the gain of the amplifier OTA; the clock control signals ph1 and ph2 are non-overlapping clocks, and control the on and off of the switches.
Fig. 2 is an equivalent circuit diagram of two stages of PH1 and PH2 in the universal capacitive inertial sensor interface circuit.
Fig. 3 is a circuit for generating positive and negative reference voltages in a dual power interface circuit, which includes: a band gap reference source BandGap for generating a reference voltage Vbg; a Buffer for generating a positive reference voltage; and the inverter is used for generating the negative reference voltage Vn. Where Vp and Vn are reference voltages that are equal in absolute value and symmetrical with respect to Gnd, which is the common mode voltage of the preamplifier.
Fig. 4 is a schematic diagram of an interface circuit structure of a MEMS capacitive accelerometer according to the present invention. As shown in fig. 4, the MEMS capacitive accelerometer interface circuit includes a sensing unit and a readout device; the readout device includes: a switch, a preamplifier and a positive reference voltage and common mode voltage generating circuit; the positive reference voltage and common mode voltage generating circuit comprises a boosting charge pump, a first low noise linear voltage regulator and a second low noise linear voltage regulator; the first low-noise linear regulator LDO1 and the boost charge pump form a positive reference voltage generating circuit, and the second low-noise linear regulator LDO2 and the boost charge pump form a common mode voltage generating circuit; the positive reference voltage generating circuit is used for generating a high voltage which is two times or higher than the low input power supply voltage and converting the high voltage which is two times or higher than the low input power supply voltage into a positive reference voltage which is equivalent to two times of the low input power supply voltage; the common mode voltage generating circuit is used for generating a high voltage which is two times or more higher than the low input power supply voltage and converting the high voltage which is two times or more higher than the low input power supply voltage into a common mode voltage which is half of the low input power supply voltage.
The structure of the MEMS capacitive accelerometer interface circuit shown in fig. 4 is the same as that of the general capacitive inertial sensor interface circuit, except that a low power supply is used to supply power, and the positive and negative reference voltage values and the common mode voltage value are adjusted. The low-input power supply generates a high voltage which is twice or higher than the power supply through the boosting charge pump, and then generates a positive reference voltage Vp which is twice of the power supply voltage and a common mode voltage Vcom which is half of the power supply voltage through the two low-noise LDOs respectively, wherein the equivalent negative reference voltage Vn is Gnd.
Since the structure of the interface circuit of the present embodiment is the same as that of the universal capacitive inertial sensor, referring to fig. 2, at the stage of PH1, the upper plate top of the sensor is connected to Vp, the lower plate bot is connected to Vn, the left plate of the feedback capacitor Cf is connected to the inverting input terminal of the OTA, and the right plate is connected to the common-mode voltage. The charges on the three capacitors are:
Qt(PH1)＝(Vp-Vcom)Ct
Qb(PH1)＝(-Vcom)Cb
Qf(PH1)＝0
when PH2 is high, top plate top of the sensor is connected to Vn, bottom plate bot is connected to Vp, and the charge on Ct and Cb is transferred to feedback capacitor Cf. The charges on the three capacitors are:
Qt(PH2)＝(-Vcom)Ct
Qb(PH2)＝(Vp-Vcom)Cb
Qf(PH2)＝(Vx-Vcom)Cf
according to the law of conservation of charge: vx ═ Ct-Cb) Vp/Cf + Vcom
It can be seen that the output of the interface circuit Vx and the absolute values and symmetry of Vp and Vn have no relationship.
The embodiment realizes the low-power consumption capacitive inertial sensor interface circuit. The preamplifier adopts a high-performance low-voltage MOS tube design, so that lower noise and higher bandwidth can be realized; the boost charge pump ensures the reference voltage value of the MEMS sensitive unit and can provide proper feedback force in closed-loop application.
The above-mentioned embodiments further illustrate the objects, technical solutions and advantages of the present invention in detail, so it should be understood that the above description is only one of the specific embodiments of the present invention, and is not intended to limit the scope of the present invention, and any modifications, equivalent substitutions, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (5)
1. An MEMS capacitive accelerometer interface circuit comprises a sensitive unit and a reading device; characterized in that said reading device comprises: a switch, a preamplifier and a positive reference voltage and common mode voltage generating circuit; the positive reference voltage and common mode voltage generating circuit comprises a boost charge pump and a first low noise linear regulator (LDO) 1 and a second LDO 2; the first low noise linear regulator LDO1 and the boost charge pump form a positive reference voltage generating circuit, and the second low noise linear regulator LDO2 and the boost charge pump form a common mode voltage generating circuit; wherein,
the positive reference voltage generating circuit is used for generating a high voltage which is two times or higher than the low input power supply voltage and converting the high voltage which is two times or higher than the low input power supply voltage into a positive reference voltage which is two times of the low input power supply voltage;
the common mode voltage generating circuit is used for generating a high voltage which is two times or more higher than the low input power supply voltage and converting the high voltage which is two times or more higher than the low input power supply voltage into a common mode voltage which is half of the low input power supply voltage.
2. The interface circuit of claim 1, wherein the output of said positive reference voltage generating circuit and ground are used as positive and negative reference voltages for the MEMS sensitive unit, respectively, and the output of said common mode voltage generating circuit is used as a common mode voltage for the MEMS sensitive unit and the preamplifier.
3. The interface circuit of claim 1, wherein the preamplifier is powered by a low input power supply, using a high performance low voltage MOS transistor design.
4. The interface circuit of claim 1, wherein the interface circuit is applied to a low power consumption open loop or closed loop accelerometer interface circuit.
5. The interface circuit of claim 1, further comprising a MEMS-sensitive unit, wherein the MEMS-sensitive unit outputs a signal that is a change in capacitance.
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| CN201820462537.3U CN208174658U (en) | 2018-04-03 | 2018-04-03 | A kind of MEMS capacitive accelerometer interface circuit |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110350905A (en) * | 2018-04-03 | 2019-10-18 | 中国科学院声学研究所 | A kind of MEMS capacitive accelerometer interface circuit |
| CN110470861A (en) * | 2018-05-11 | 2019-11-19 | 中国科学院声学研究所 | A kind of MEMS capacitive accelerometer interface circuit |
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2018
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110350905A (en) * | 2018-04-03 | 2019-10-18 | 中国科学院声学研究所 | A kind of MEMS capacitive accelerometer interface circuit |
| CN110350905B (en) * | 2018-04-03 | 2024-04-19 | 中国科学院声学研究所 | MEMS capacitive accelerometer interface circuit |
| CN110470861A (en) * | 2018-05-11 | 2019-11-19 | 中国科学院声学研究所 | A kind of MEMS capacitive accelerometer interface circuit |
| CN110470861B (en) * | 2018-05-11 | 2020-12-25 | 中国科学院声学研究所 | MEMS capacitive accelerometer interface circuit |
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