CN110350905B - MEMS capacitive accelerometer interface circuit - Google Patents
MEMS capacitive accelerometer interface circuit Download PDFInfo
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- CN110350905B CN110350905B CN201810296911.1A CN201810296911A CN110350905B CN 110350905 B CN110350905 B CN 110350905B CN 201810296911 A CN201810296911 A CN 201810296911A CN 110350905 B CN110350905 B CN 110350905B
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- 239000003381 stabilizer Substances 0.000 claims abstract description 8
- 238000010586 diagram Methods 0.000 description 7
- 239000003990 capacitor Substances 0.000 description 6
- 230000001133 acceleration Effects 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000009977 dual effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000001629 suppression Effects 0.000 description 1
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
- H03K19/0175—Coupling arrangements; Interface arrangements
- H03K19/017509—Interface arrangements
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Abstract
The invention relates to an MEMS capacitive accelerometer interface circuit, which comprises a sensitive unit and a reading device; the reading device includes: a switch, a pre-amplifier, and a positive reference voltage and common mode voltage generating circuit; the positive reference voltage and common-mode voltage generating circuit comprises a boost charge pump, a first low-noise linear voltage stabilizer and a second low-noise linear voltage stabilizer; the first low-noise linear voltage stabilizer and the boost charge pump form a positive reference voltage generating circuit, and the second low-noise linear voltage stabilizer and the boost charge pump form a common-mode voltage generating circuit; wherein the positive reference voltage generating circuit is used for generating a high voltage which is twice or higher than the low input power supply voltage and converting the high voltage into a positive reference voltage which is twice as high as the low input power supply voltage; the common-mode voltage generating circuit is used for generating a high voltage which is twice or higher than the low input power supply voltage and converting the high voltage into a common-mode voltage which is half of the low input power supply voltage.
Description
Technical Field
The invention relates to a capacitive inertial sensor, in particular to an MEMS (Micro Electro MECHANICAL SYSTEM) capacitive accelerometer interface circuit.
Background
Capacitive inertial sensors generally include inertial sensors such as acceleration sensors and gyroscopes, which measure parameters such as acceleration of the vehicle relative to ground motion in real time to determine the position of the vehicle and the earth's gravitational field parameters, and convert the measured changes into changes in capacitance.
The following description will take an example of a MEMS (Micro Electro MECHANICAL SYSTEM) capacitive inertial sensor.
With the increasing maturity of the MEMS (Micro Electro MECHANICAL SYSTEM) technology, the MEMS capacitive inertial sensor is widely applied due to the advantages of small volume, high sensitivity, stable direct current characteristic, small drift, low power consumption, small temperature coefficient and the like, however, the capacitance change of the MEMS capacitive inertial sensor is small, so that the MEMS capacitive inertial sensor servo circuit is required to have the characteristics of high precision, good linearity, large dynamic range and the like.
The servo circuit of the existing MEMS capacitive inertial sensor is divided into a closed-loop structure and an open-loop structure from the structure, and is divided into analog signal output and digital signal output from an output signal. The capacitive inertial sensor servo circuit with an open loop structure is restricted in linearity, measurement range, dynamic range and the like; the closed-loop implementation scheme is divided into two types, namely a negative feedback scheme based on an analog closed loop and a negative feedback scheme based on a digital closed loop, wherein the negative feedback scheme based on the digital closed loop has better dynamic measurement precision and temperature stability and can realize digital output. The interface circuit is included either in a closed loop circuit or in an open loop circuit.
The input power supply of the servo circuit of the existing MEMS capacitive inertial sensor is usually a dual power supply or a high-voltage single power supply, so that positive and negative reference voltages and high output sensitivity of the MEMS sensitive unit can be conveniently realized. The performance of the high voltage devices used in the high voltage circuit is often inferior to that of the low voltage devices, limiting the overall system performance. Meanwhile, a high input power source means high power consumption, and is not suitable for long-time operation in applications requiring battery power, such as geophysical prospecting, inertial navigation and the like. The low input power supply also typically reduces the positive and negative reference voltage values of the MEMS sensitive cell, failing to provide adequate feedback force in closed loop applications.
Disclosure of Invention
The invention aims to solve the technical problems, and provides a low-power consumption open-loop structure interface circuit of a single-power MEMS capacitive accelerometer, which has excellent noise suppression capability.
In order to achieve the above purpose, the invention provides an MEMS capacitive accelerometer interface circuit, which comprises a sensitive unit and a reading device; the reading device includes: a switch, a pre-amplifier, and a positive reference voltage and common mode voltage generating circuit; the positive reference voltage and common-mode voltage generating circuit comprises a boost charge pump, a first low-noise linear voltage regulator LDO1 and a second low-noise linear voltage regulator LDO2; the first low-noise linear voltage regulator LDO1 and the boost charge pump form a positive reference voltage generating circuit, and the second low-noise linear voltage regulator LDO2 and the boost charge pump form a common-mode voltage generating circuit; wherein the positive reference voltage generating circuit is used for generating a high voltage which is twice or higher than the low input power supply voltage and converting the high voltage which is twice or higher than the low input power supply voltage into a positive reference voltage which is twice as high as the low input power supply voltage; the common mode voltage generating circuit is used for generating a high voltage which is twice or higher relative to the low input power supply voltage and converting the high voltage which is twice or higher relative to the low input power supply voltage into a common mode voltage which is equivalent to half of the low input power supply voltage.
Further, the output of the positive reference voltage generating circuit and the ground are respectively used as positive and negative reference voltages of the MEMS sensitive unit, and the output of the common-mode voltage generating circuit is used as the common-mode voltage of the MEMS sensitive unit and the preamplifier.
Furthermore, the preamplifier is powered by a low-input power supply, and a high-performance low-voltage MOS tube design is adopted.
Further, the interface circuit is applied to a low-power open-loop or closed-loop accelerometer interface circuit.
Further, the MEMS capacitive accelerometer interface circuit further comprises an MEMS sensitive unit, and an output signal of the MEMS sensitive unit is a capacitance change signal.
The invention has the beneficial effects that: the MEMS capacitive accelerometer interface circuit is different from the conventional dual-power or high-voltage single-power interface circuit, and realizes low-voltage single-power input. The preamplifier works under low voltage, and can adopt a high-performance low-voltage MOS tube design, thereby being beneficial to realizing lower noise and higher bandwidth. Under the condition of low input power supply, the boost charge pump is utilized to realize the high reference voltage of the MEMS sensitive unit. The low-power consumption open-loop or closed-loop accelerometer servo circuit can be applied to low-power consumption open-loop or closed-loop accelerometer servo circuits according to requirements.
Drawings
FIG. 1 is a schematic diagram of an open loop servo read-out circuit of a conventional general capacitive inertial sensor;
FIG. 2 is a schematic diagram of two stages PH1 and PH2 of the circuit of FIG. 1;
FIG. 3 is a circuit for generating positive and negative reference voltages of an open loop servo readout circuit of a conventional dual-power capacitive inertial sensor;
Fig. 4 is a schematic diagram of a circuit structure of an interface of a MEMS capacitive accelerometer and a schematic diagram of a circuit structure for generating a positive reference voltage and a common-mode voltage according to the present invention.
Detailed Description
The objects, technical solutions and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings and examples, it being apparent that the described embodiments are some, but not all, embodiments of the present invention. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the invention. All other embodiments, which can be made by those skilled in the art without making any inventive effort, are intended to be within the scope of the present invention.
In the following detailed description of the present invention, certain specific details are set forth in order to provide a thorough understanding of the present invention. The present invention will be fully understood by those skilled in the art without the details described herein.
FIG. 1 is an embodiment of an interface circuit for a MEMS accelerometer, comprising a MEMS sensitive chip and a readout device, wherein the conventional acceleration sensitive chip is equivalent to a second order system model, which can be embedded in an accelerometer open loop or closed loop system.
The universal capacitive inertial sensor interface circuit of fig. 1 includes: a preamplifier OTA; three electrodes connected with three polar plates of the inertial sensor: top, ctr and bot, wherein top connects the upper pole plate of the sensor, ctr connects the middle pole plate of the sensor, bot connects the lower pole plate of the sensor; three voltages connected to the plates: vp, vn and Vcom, where Vp is a positive reference voltage, vn is a negative reference voltage, vcom is a common mode voltage; the sensor, the reference voltage and the preamplifier are connected through 6 switches; the capacitor Cf is a feedback capacitor and controls the gain of the amplifier OTA; the clock control signals ph1 and ph2 are non-overlapping clocks, and control the on and off of the switch.
Fig. 2 is an equivalent circuit diagram of two stages PH1 and PH2 in the universal capacitive inertial sensor interface circuit.
Fig. 3 is a schematic diagram of a positive and negative reference voltage generating circuit in a conventional dual power interface circuit, comprising: a bandgap reference BandGap for generating a reference voltage Vbg; buffer for generating positive reference voltage; an inverter for generating a negative reference voltage Vn. Where Vp and Vn are reference voltages that are equal in absolute value and symmetrical with respect to Gnd, which is the common mode voltage of the pre-amplifier.
Fig. 4 is a schematic diagram of an interface circuit structure of a MEMS capacitive accelerometer according to the present invention. As shown in fig. 4, the MEMS capacitive accelerometer interface circuit includes a sensing unit and a readout device; the reading device includes: a switch, a pre-amplifier, and a positive reference voltage and common mode voltage generating circuit; the positive reference voltage and common-mode voltage generating circuit comprises a boost charge pump, a first low-noise linear voltage stabilizer and a second low-noise linear voltage stabilizer; the first low-noise linear voltage regulator LDO1 and the boost charge pump form a positive reference voltage generating circuit, and the second low-noise linear voltage regulator LDO2 and the boost charge pump form a common-mode voltage generating circuit; wherein the positive reference voltage generating circuit is used for generating a high voltage which is twice or higher than the low input power supply voltage and converting the high voltage which is twice or higher than the low input power supply voltage into a positive reference voltage which is twice as high as the low input power supply voltage; the common mode voltage generating circuit is used for generating a high voltage which is twice or higher relative to the low input power supply voltage and converting the high voltage which is twice or higher relative to the low input power supply voltage into a common mode voltage which is equivalent to half of the low input power supply voltage.
The MEMS capacitive accelerometer interface circuit structure shown in fig. 4 is identical to the general capacitive inertial sensor interface circuit structure, except that a low power supply is used for supplying power, and positive and negative reference voltage values and common mode voltage values are adjusted. The low input power supply generates a high voltage twice or higher as that of the power supply through the boost charge pump, and generates a positive reference voltage Vp twice as high as the power supply voltage and a common mode voltage Vcom half as high as the power supply voltage through the two low noise LDOs, respectively, and the equivalent negative reference voltage Vn is Gnd.
Because the structure of the interface circuit of the present embodiment is consistent with that of the general capacitive inertial sensor, referring to fig. 2, in the PH1 stage, the top plate top of the sensor is connected to Vp, the bottom plate bot is connected to Vn, the left plate of the feedback capacitor Cf is connected to the inverting input end of the OTA, and the right plate is connected to the common mode voltage. The charge on the three capacitors is:
Qt(PH1)＝(Vp-Vcom)Ct
Qb(PH1)＝(-Vcom)Cb
Qf(PH1)＝0
When PH2 is high, the upper polar plate top of the sensor is connected with Vn, the lower polar plate bot is connected with Vp, and charges on Ct and Cb are transferred to the feedback capacitor Cf. The charge on the three capacitors is:
Qt(PH2)＝(-Vcom)Ct
Qb(PH2)＝(Vp-Vcom)Cb
Qf(PH2)＝(Vx-Vcom)Cf
According to the law of conservation of charge: vx= (Ct-Cb) Vp/cf+Vcom
It can be seen that the output of the interface circuit Vx and the absolute values of Vp and Vn and symmetry are not related.
The embodiment realizes the low-power consumption capacitive inertial sensor interface circuit. The preamplifier adopts a high-performance low-voltage MOS tube design, so that lower noise and higher bandwidth can be realized; the boost charge pump ensures the magnitude of the MEMS sensitive cell reference voltage value, which can provide a suitable feedback force in closed loop applications.
The foregoing embodiments have been provided for the purpose of illustrating the general principles of the present invention, and are more fully described herein with reference to certain specific embodiments thereof, it being understood that the invention has been described above with reference to certain specific embodiments thereof, but it is not intended to limit the scope of the invention to the specific embodiments, but it is intended to cover all modifications, equivalents, alternatives, and modifications falling within the spirit and principles of the invention.
Claims (4)
1. An interface circuit of a MEMS capacitive accelerometer comprises a sensitive unit and a reading device; characterized in that the reading device comprises: a switch, a pre-amplifier, and a positive reference voltage and common mode voltage generating circuit; the preamplifier is powered by a single low input power supply; the positive reference voltage and common-mode voltage generating circuit comprises a single boost charge pump, a first low-noise linear voltage stabilizer LDO1 and a second low-noise linear voltage stabilizer LDO2; the first low-noise linear voltage regulator LDO1 and the boost charge pump form a positive reference voltage generation circuit, the second low-noise linear voltage regulator LDO2 and the boost charge pump form a common-mode voltage generation circuit, the output of the positive reference voltage generation circuit is used as the positive reference voltage of the MEMS sensitive unit, the ground is used as the negative reference voltage of the MEMS sensitive unit, and the output of the common-mode voltage generation circuit is used as the common-mode voltage of the MEMS sensitive unit and the preamplifier; wherein,
The positive reference voltage generating circuit is used for generating a high voltage which is twice or higher than the low input power supply voltage and converting the high voltage which is twice or higher than the low input power supply voltage into a positive reference voltage which is twice as high as the low input power supply voltage;
The common mode voltage generating circuit is used for generating a high voltage which is twice or higher than the low input power supply voltage and converting the high voltage which is twice or higher than the low input power supply voltage into the common mode voltage which is half of the low input power supply voltage.
2. The interface circuit of claim 1, wherein the pre-amplifier is designed with a high performance low voltage MOS transistor.
3. The interface circuit of claim 1, wherein the interface circuit is applied to a low power open loop or closed loop accelerometer interface circuit.
4. The interface circuit of claim 1, further comprising a MEMS sensitive element, the MEMS sensitive element output signal being a capacitance change signal.
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| CN201810296911.1A CN110350905B (en) | 2018-04-03 | 2018-04-03 | MEMS capacitive accelerometer interface circuit |
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| CN201810296911.1A CN110350905B (en) | 2018-04-03 | 2018-04-03 | MEMS capacitive accelerometer interface circuit |
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